Design method of optical device array

Abstract

The invention discloses a method for designing an optical device array, which comprises the following steps of: modeling a single optical device, and performing simulation analysis and optimization design by using a time domain finite difference method combined with an image recognition model to obtain a single optical device model; at least two single optical device models are combined in an array mode and remodeled, a ray tracing method combined with an image recognition model is adopted for simulation analysis and optimization design, and a design result of an optical device array is obtained; iteratively adjusting the design result of the single optical device model and / or the optical device array until the design result of the optical device array meets the design requirement, and obtaining the final design result of the optical device array. According to the design method, the light field distribution of the optical device can be accurately simulated and optimized, it is ensured that all basic optical units can work cooperatively, the performance of the device is maximized, the number of times of testing and adjusting in a traditional design method is reduced, the design efficiency is improved, and wide application prospects are achieved.

Description

Technical Field

[0001] This invention relates to the field of optical device design, and more specifically to a design method for an optical device array. Background Technology

[0002] With the development of optoelectronic devices and the advancement of optical design technology, optical arrays have shown enormous application potential in fields such as lighting, displays, communications, and virus disinfection. Their design results will significantly impact product delivery performance. Traditional array design methods typically rely on experimental debugging, which has certain limitations, including long design cycles, high experimental costs, and the inability to fully consider the complex interactions between the various optical components in the array. Therefore, effectively improving the accuracy and efficiency of optical array design is a major challenge in current research and application.

[0003] In the current design process of optical device arrays, ray tracing simulation plays a crucial role. This method, by tracing the propagation path of light in different media, can accurately calculate the reflection and refraction effects of light, providing designers with detailed optical behavior analysis references. It can also effectively simulate the interaction between the light source and optical components such as panels, mirrors, or lenses, offering designers more comprehensive optimization solutions. However, this method also has some limitations: ray tracing primarily focuses on the propagation path of light, and its simulation of wave characteristics, nonlinear effects, or complex optical properties of materials (such as absorption and scattering) is not as accurate as other calculation methods. Furthermore, ray tracing also faces accuracy issues when dealing with micro-optical structures or microscale light sources. For example, when simulating small-sized light-emitting diodes (Micro-LEDs), the optical characteristics of the device are significantly affected by its small size, anisotropic light-emitting surface, and special micro / nano optical structures. This can lead to significant errors in predicting and optimizing the performance of such small-sized devices using conventional simulation modeling methods. On the other hand, when these optical devices are arranged in an array, the mutual interference, light scattering and refraction effects between the units become more complex. Traditional optical simulation methods may not be able to effectively handle the multi-level and multi-dimensional optical interactions in the array, resulting in calculation errors and inaccurate light field distribution predictions, which affect the performance of the final optical device array.

[0004] In recent years, with the development of computer simulation technology, the Finite-Difference Time-Domain (FDTD) method has begun to be applied to the design and optimization of optoelectronic devices. The FDTD method can accurately simulate electromagnetic fields, thereby optimizing the topology and operating characteristics of devices. However, as the model size increases, the simulation time increases rapidly, resulting in low computational efficiency, and it is often unsuitable for the design of large-scale arrays. Furthermore, when using this simulation method to model small-sized light sources such as Micro-LEDs, similar problems exist as in ray tracing modeling. How to optimize and improve traditional light source modeling and array design methods to meet the design requirements of novel optoelectronic devices is an urgent problem to be solved. Summary of the Invention

[0005] The purpose of this application is to propose a design method for optical device arrays to address the aforementioned technical problems.

[0006] In a first aspect, the present invention provides a method for designing an optical device array, comprising the following steps:

[0007] S1. A single optical device is modeled, and the finite-difference time-domain method combined with an image recognition model is used for simulation analysis and optimization design to obtain a single optical device model.

[0008] S2, combine at least two single optical device models in an array and remodel them, then use ray tracing combined with image recognition model for simulation analysis and optimization design to obtain the design results of the optical device array;

[0009] S3, in response to the adjustment of the single optical device model in the simulation analysis and optimization design process in step S2, the adjustment result is fed back to the simulation analysis and optimization design process in step S1, and the single optical device model is adjusted synchronously; in response to the adjustment of the single optical device model in step S1, the adjustment result is fed back to the simulation analysis and optimization design process in step S2, and the design result of the optical device array is adjusted synchronously.

[0010] S4. Repeat step S3 to iteratively adjust the design results of the single optical device model and / or the optical device array until the design results of the optical device array meet the design requirements, and obtain the final design result of the optical device array.

[0011] As a preferred approach, the simulation results of the finite-difference time-domain method and ray tracing method are input into the image recognition model to obtain the corresponding image processing results, and the image processing results are used for optimization design.

[0012] Preferably, the simulation analysis results include a light field distribution map or an electric field intensity distribution map, and the image processing results include the strongest light-emitting region or a local strong light-emitting region.

[0013] Preferably, in the modeling process of step S1, one or more monitoring light sources are designed in the model of a single optical device. When there is only one set monitoring light source, the monitoring light source is located at the geometric center of the plane in the model of the single optical device. When there are two set monitoring light sources, the two monitoring light sources are located on circles with the geometric center of the plane in the model of the single optical device as the center and the shortest distance from any point on the boundary of the plane in the model of the single optical device to the geometric center as the radius, and the positions of the two monitoring light sources bisect the circumference of the circle. When there are three or more set monitoring light sources, one monitoring light source is located at the geometric center of the plane in the model of the single optical device and serves as the central light source, and the other monitoring light sources are located on circles with the central light source as the center and the shortest distance from any point on the boundary of the plane in the model of the single optical device to the geometric center as the radius, and the positions of the other monitoring light sources bisect the circumference of the circle.

[0014] Preferably, in the remodeling process of step S2, the single optical device model included in the design result of the optical device array is a surface light source with a Lambertian emission field pattern, located on the surface of the three-dimensional geometry, and the light emission direction of the monitoring light source is the outward side of the surface of the three-dimensional geometry.

[0015] Preferably, all monitoring light sources included in the single optical device model are in the same wavelength range, which includes near-infrared, mid-infrared, far-infrared, red, yellow, green, blue, violet, or ultraviolet bands, with the ultraviolet band including UVA, UVB, or UVC.

[0016] Preferably, the monitoring light sources of different individual optical device models in the design results of the optical device array are in the same or different wavelength ranges.

[0017] Preferably, the optical device array includes micro-sized light-emitting diodes, miniature light-emitting diodes, organic light-emitting diodes, quantum dot light-emitting diodes, liquid crystal diodes, or combinations of at least two of them.

[0018] Compared with the prior art, the present invention has the following beneficial effects:

[0019] (1) The optical device array design method proposed in this invention has high optimization design accuracy. By combining the FDTD of the image recognition model to simulate a single optical device, the optimal performance of a single optical device under different working conditions can be ensured, effectively avoiding the errors and uncertainties of traditional design that rely on experimental debugging.

[0020] (2) The optical device array design method proposed in this invention has an efficient array layout optimization process. By combining the ray tracing method of image recognition model to simulate the optical device array, it can accurately simulate the interaction of multiple single optical devices in the array. Based on the simulation results, the layout and arrangement of single optical devices can be adjusted through image recognition model to improve the optical performance of the entire array.

[0021] (3) The optical device array design method proposed in this invention has high array design efficiency, which can effectively reduce the need for a large number of tests and adjustments in traditional design methods, saving time and costs. The accurate simulation prediction and optimization process can quickly obtain high-quality optical effects in the early stage of design, reducing debugging and modification in the production stage. Attached Figure Description

[0022] To more clearly illustrate the technical solutions in the embodiments of the present invention, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the accompanying drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0023] Figure 1 A flowchart illustrating the design method of an optical device array according to an embodiment of this application;

[0024] Figure 2 This diagram illustrates several scenarios of model settings in FDTD software during the device optimization simulation process of the optical device array design method of Embodiment 1 of this application.

[0025] Figure 3 The diagram shows the electric field intensity distribution on the Micro-LED surface and at a distance of 5 μm from the chip surface in the design method of the optical device array of Embodiment 1 of this application.

[0026] Figure 4 The diagram shows the variation of LEE of Micro-LED devices with different center wavelength light sources in the optical device array design method of Embodiment 1 of this application;

[0027] Figure 5 This is a schematic diagram illustrating the iterative improvement process of model settings in FDTD software during the device optimization simulation of the optical device array design method of Embodiment 1 of this application;

[0028] Figure 6 This is a graph showing the relationship between the LEE value and the sidewall tilt angle obtained from the simulation of each iterative process of the optical device array design method of Embodiment 1 of this application;

[0029] Figure 7This is a schematic diagram of the light source modeling method in the optical device array design process of Embodiment 1 of this application.

[0030] Figure 8 This is a schematic diagram showing the design result of the optical device array of the design method of the optical device array in Embodiment 1 of this application;

[0031] Figure 9 This is a schematic diagram showing the design result of a single optical device in the optical device array design method of Embodiment 2 of this application;

[0032] Figure 10 This is a schematic diagram showing the design result of the optical device array of the design method of the optical device array in Embodiment 2 of this application;

[0033] Figure 11 This is a schematic diagram showing the design result of a single optical device in the optical device array design method of Embodiment 3 of this application;

[0034] Figure 12 The electric field intensity distribution at a distance of 5 μm from the surface of the Micro-LED chip is shown in the design method of the optical device array of Embodiment 3 of this application.

[0035] Figure 13 The image shows the irradiance simulation results of the optical device array in the design method of the optical device array of Embodiment 3 of this application. Detailed Implementation

[0036] To make the objectives, technical solutions, and advantages of this invention clearer, the invention will be further described in detail below with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of this invention, and not all of them. Based on the embodiments of this invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this invention.

[0037] An embodiment of this application provides a design method for an optical device array, comprising the following steps:

[0038] S1. A single optical device is modeled, and the finite-difference time-domain method combined with an image recognition model is used for simulation analysis and optimization design to obtain a single optical device model.

[0039] In a specific embodiment, the simulation results of the finite-difference time-domain method and ray tracing method are input into the image recognition model to obtain the corresponding image processing results, and the image processing results are used for optimization design.

[0040] In specific embodiments, the simulation analysis results include light field distribution maps or electric field intensity distribution maps, and the image processing results include the strongest light-emitting region or a local strong light-emitting region.

[0041] In a specific embodiment, during the modeling process in step S1, one or more monitoring light sources are designed in the single optical device model. When there is only one set monitoring light source, the monitoring light source is located at the geometric center of the plane within the single optical device model. When there are two set monitoring light sources, the two monitoring light sources are respectively located on circles with the geometric center of the plane within the single optical device model as the center and the shortest distance from any point on the boundary of the plane within the single optical device model to the geometric center as the radius, and the positions of the two monitoring light sources bisect the circumference of the circle. When there are three or more set monitoring light sources, one monitoring light source is located at the geometric center of the plane within the single optical device model and serves as the central light source, while the other monitoring light sources are located on circles with the central light source as the center and the shortest distance from any point on the boundary of the plane within the single optical device model to the geometric center as the radius, and the positions of the other monitoring light sources bisect the circumference of the circle.

[0042] In a specific embodiment, all monitoring light sources included in a single optical device model are within the same wavelength range, which includes near-infrared, mid-infrared, far-infrared, red, yellow, green, blue, violet, or ultraviolet bands. The ultraviolet band includes UVA, UVB, or UVC.

[0043] For details, please refer to Figure 1The embodiments of this application first model the individual optical device to be used, with each modeling focusing on a single independent device. Then, a finite-difference time-domain (FDTD) method combined with an image recognition model is used for simulation analysis and optimization design. The FDTD method used in the embodiments of this application is a general-purpose optical simulation method, primarily used for accurate simulation of local light fields, such as those in the hundreds of nanometers or subwavelength range. During the simulation process using FDTD, an image recognition model can be combined to process the simulation results, and the processed results are fed back into the current simulation step for optimization and further data processing. The image recognition model used in the embodiments of this application is a trained neural network model, the structure of which is not limited. Its input is the simulation result image, and its output is the image processing result. The image processing result is related to the type of the simulation result image. In one embodiment, the simulation result image is a light field distribution map, and the image processing structure is the strongest light-emitting region. Therefore, the strongest light-emitting region can be efficiently processed and its size further determined. This size is then used to further adjust the parameters of the single optical device model during the simulation process. In another embodiment, the simulation result image is an electric field intensity distribution map, and the image processing structure is a locally strong light-emitting region. This further determines whether there are locations that generate strong local excitations, thus filtering out single optical device structures without crosstalk. By setting certain targets, specific regions in the simulation result image are identified. For example, regions with strong light intensity in the light emission distribution will have a specific color in the simulated light field distribution map. Therefore, the strongest light-emitting region can be identified through the image recognition model. The main purpose of using the image recognition model is to perform high-throughput processing, such as identifying hundreds of simulation result images at once, forming statistical patterns, and outputting the image processing results for researchers' reference, thereby modifying the single optical device model. For example, as the radius of a single optical device increases from 1µm to 10µm in 0.1µm increments, 100 simulated light field distribution images are generated. These 100 simulation images are then identified using an image recognition model to determine the region of strongest light emission. In reality, there may be many more simulation images, thus this method is more efficient than manual review. The structural design result of the single optical device is the single optical device model. The structural design result obtained after this step serves as the input for the next step.

[0044] In the modeling of a single optical device involved in step S1, there can be one or more monitoring light sources. The monitoring light source is the light source set in the simulation of the optical device. When performing any simulation and control of light field, the monitoring light source must be set; otherwise, no light will be generated, and the simulation software will be unable to calculate. Usually, the monitoring light source is located inside or on the surface of the optical device.

[0045] S2, combine at least two single optical device models in an array and remodel them, then use ray tracing combined with image recognition model for simulation analysis and optimization design to obtain the design results of the optical device array.

[0046] In a specific embodiment, during the remodeling process in step S2, the single optical device corresponding to the single optical device model included in the design result of the optical device array is a surface light source with a Lambertian emission field pattern, located on the surface of the three-dimensional geometry, and the light emission direction of the monitoring light source is the outward side of the surface of the three-dimensional geometry.

[0047] In specific embodiments, the monitoring light sources of different individual optical device models in the design results of the optical device array are in the same or different wavelength ranges.

[0048] Specifically, the one or more independent single light source device models obtained in step S1 are arrayed together to form a light source device array. After remodeling, ray tracing is used for simulation analysis and optimization design to obtain the design result of the light source device array. Similarly, during simulation design, a specific image recognition model can be used to process the simulation result image, and the processed result is fed back into the simulation process of the current step for optimization and further data processing. When modeling the optical device array involved in step S2, the geometry of the monitoring light source should be in a three-dimensional space, i.e., a three-dimensional geometric body, rather than a plane or a point. By arraying the single optical device models designed in step S1 in three-dimensional space, the design result of the optical device array can be obtained. The monitoring light sources used in the simulation of step S2 are all set on the surface of the three-dimensional geometric body, and the direction of light emission is the outward side of the geometric body surface. The set monitoring light sources are all surface light sources and have a Lambertian emission field pattern. There can be one or more monitoring light sources, located on various surfaces of the three-dimensional geometric body, but it is not required that every surface of the three-dimensional geometric body be set with light source attributes.

[0049] During the modeling process in steps S1 and S2, the monitoring light source inside each independent single optical device should be within the same wavelength range, including the near-infrared band (0.75μm~3μm), mid-infrared band (3μm~30μm), far-infrared band (30μm~1000μm), red light band (622nm~780nm), yellow light band (577nm~622nm), green light band (492nm~577nm), and blue light band (455nm~492nm). The optical array can be configured with either a violet band (400nm–455nm) or an ultraviolet band, including UVA (315nm–400nm), UVB (280nm–315nm), or UVC (190nm–280nm). During the modeling process in step S2, the monitoring light sources inside different independent single optical devices in the optical device array may not be in the same band, and their combinations are arbitrary, such as red, green, and blue bands, or all UVC bands.

[0050] S3, in response to the adjustment of the single optical device model in the simulation analysis and optimization design process in step S2, the adjustment result is fed back to the simulation analysis and optimization design process in step S1, and the single optical device model is adjusted synchronously; in response to the adjustment of the single optical device model in step S1, the adjustment result is fed back to the simulation analysis and optimization design process in step S2, and the design result of the optical device array is adjusted synchronously.

[0051] Specifically, in the simulation process of step S2 of the optical device array design method proposed in the embodiments of this application, intermediate results can be fed back to the single optical device model involved in step S1 simulation, and used to modify and adjust the geometric parameters of the single optical device model involved in step S1 simulation, including length, width, height, radius, and the geometric parameters of optical microstructures that may be attached to the surface of the single optical device, such as thickness and material reflectivity; when the single optical device model designed in step S1 simulation is adjusted or modified, the design results of the optical device array used in step S2 simulation need to be modified or adjusted according to the single optical device model involved in step S1 simulation.

[0052] S4. Repeat step S3 to iteratively adjust the design results of the single optical device model and / or the optical device array until the design results of the optical device array meet the design requirements, and obtain the final design result of the optical device array.

[0053] In specific embodiments, the optical device array includes micro-sized light-emitting diodes, miniature light-emitting diodes, organic light-emitting diodes, quantum dot light-emitting diodes, liquid crystal diodes, or combinations of at least two of them.

[0054] Specifically, by repeating step S3, iteratively adjusting the design results of the single optical device model and / or the optical device array until the final design result of the optical device array meets the design requirements, the final design result of the optical device array can be obtained.

[0055] The technical solution of the present invention will be described below through specific embodiments.

[0056] Example 1

[0057] Embodiment 1 of this application demonstrates the design process and results of a Micro-LED-based optical device array based on the optical device array design method proposed in this invention. First, Ansys Lumerical FDTD software is used to model individual optical devices and optimize their structure to reduce sidewall light leakage and improve LEE (light extraction efficiency). Then, TracePro software is used for ray tracing to obtain the optical crosstalk of the optical device array, verifying that it meets the design requirements, thus completing the entire design.

[0058] Figure 2 This paper demonstrates several model settings in FDTD software during the device optimization design process based on the optical device array design method proposed in this invention. The optical device involved is a GaN-based blue Micro-LED. To optimize sidewall light emission, three mesa shapes were first designed for simulation: square, hexagon, and circular. The front light-emitting surface area was set to be equal, thus giving them different sidewall areas for sidewall light emission simulation. Initially, the side length of the square structure was designed to be 5.0 μm, the side length of the hexagonal structure to be 3.10 μm, and the radius of the circular structure to be 2.82 μm. These parameters may change in subsequent optimization processes based on simulation results to achieve optimal device performance.

[0059] Figure 3 The electric field intensity distribution on the surface of the Micro-LED and at a distance of 5 μm from the chip surface is shown, which can represent the light distribution. It can be seen that single optical devices with quadrilateral and hexagonal structures will generate strong local excitation at their vertices, causing the surrounding quantum dot patterns to be lit and generating crosstalk. However, single optical devices with circular structures will not produce this effect, and their strongest light intensity is always located directly above the chip.

[0060] Figure 4The figure shows the LEE variation of Micro-LED devices with different center wavelength light sources. As can be seen from the figure, the circular single optical device generally has a stronger light extraction capability in the blue light band (445-470nm) used in the display. Therefore, the circular single optical device model will be used for further optimization in the subsequent simulation process.

[0061] Figure 5 This paper demonstrates the iterative improvement process of FDTD model settings in the device optimization design process based on the optical device array design method proposed in this invention. The absorption boundary conditions of the computational domain are all set to PML (Perfect Matched Layer). The GaN-based Micro-LED consists of the following layers: a 4 μm thick n-GaN layer, a 100 nm thick InGaN / GaN multiple quantum well (MQW) active layer, a 500 nm thick p-GaN layer, and a 100 nm thick transparent conductive indium tin oxide (ITO) layer. The refractive indices of the GaN layer and the MQW layer are set to 2.45 and 2.48, respectively. Additionally, a dipole source with a center wavelength of 450 nm is placed in the center of the MQW region to represent the light generated by electron-hole recombination. Ag metal is used, with a normal reflectivity of 90%. A 100 nm thick SiO2 isolation layer with a refractive index of 1.46 is disposed outside the Micro-LED. At the beginning of the design, the device boundary was perpendicular to the horizontal plane. In the subsequent process, the sidewalls were changed to an inclined state to enhance light extraction. To reduce light leakage from the sidewalls, a reflector structure made of Ag was added to the outside of the sidewalls. Finally, to further enhance light extraction, a SiO2 microstructure array was designed on the surface of a single optical device. The unit of the microstructure array is a SiO2 cylinder with a diameter and height of 100nm and a center-to-center spacing of 200nm between adjacent cylinders. This structure is the result of automatic optimization through an image recognition model.

[0062] Figure 6 The relationship between the LEE values ​​obtained from simulations at each stage and the sidewall tilt angle is shown. It can be seen that as the sidewall tilt angle increases, the LEE shows a significant enhancement trend. Adding the Ag reflector structure can both suppress light leakage from the sidewall and enhance light extraction. The surface microstructure contributes significantly to the LEE and can significantly enhance the light extraction efficiency. Based on the above results, a relatively ideal single optical device model can be considered to have been obtained. For example, in the embodiments of this application, the emission wavelength of the blue Micro-LED is finally selected as 455nm. The single optical device adopts a circular mesa with a radius of 3μm and a sidewall tilt angle of 40°. The sidewall is wrapped with 100nm thick SiO2 and 200nm thick Ag. The light-emitting surface is fabricated as a SiO2 cylindrical array with a diameter and height of 100nm and a center-to-center distance of 200nm between adjacent cylinders.

[0063] Figure 7 This paper demonstrates a modeling method for light sources in the design of a single optical device. In the embodiments of this application, two surface light sources, A and B, are set, both of which are Lambertian emission field types. Surface light source A is located on the upper part of the multi-quantum well layer to simulate front light emission, and surface light source B is located on the side of the multi-quantum well layer to simulate sidewall light emission. This allows for better simulation of optical crosstalk phenomena in real-world environments during ray tracing.

[0064] Figure 8 The design results of the optical device array are shown. The display array consists of a structure composed of three red, green, and blue sub-pixels. The lower excitation light source uses the aforementioned optimized blue Micro-LED, while the upper part uses a color conversion film to generate red and green light. The specific parameters of the array are automatically optimized by an image recognition model based on crosstalk results obtained from ray tracing. Figure 8 As shown, the optical device array in the embodiments of this application is composed of a repeating periodic structure array, which can be represented by M×N to indicate the number of sub-pixels in each of the two directions. A single sub-pixel is... Figure 8 The left side contains RGB three-color structural units, which are 300×300 in this embodiment.

[0065] Example 2

[0066] Example 2 illustrates another optimization scenario in the design process of an optical device array. In this example, the design requirement is an ultraviolet Micro-LED array for disinfection. Modeling and simulation were performed in FDTD based on the design requirements, and the final device design schematic is shown below. Figure 9 As shown. The Micro-LED has a central emission wavelength of 200nm, a circular mesa with a radius of 55μm, and a mesa tilt angle of 45 degrees. The light-reflecting layer is designed to block light with wavelengths below 400nm. The Micro-LED includes a first surface microstructure array 11, a first n-GaN 12, a first multiple quantum well layer 13, a first p-GaN 14, a first ITO 15, a first n-electrode 16, a first p-electrode 17, and a light-reflecting layer 18. The light-reflecting layer 18 uses an L(0.5HL0.5H) film structure. 15 H represents a high-refractive-index material, which is TiO2; L represents a low-refractive-index material, which is SiO2, with a thickness of 2.0 μm. A SiO2 cylindrical array with a diameter and height of 200 nm is fabricated on the light-emitting surface, with a center-to-center spacing of 400 nm between adjacent cylinders to form a first surface microstructure array 11.

[0067] Figure 10The design results of the optical device array in Example 2 are shown, with the optimized ultraviolet Micro-LEDs used as the light source. The specific parameters of the optical device array were automatically optimized using an image recognition model based on the crosstalk results obtained from ray tracing. For example... Figure 10 As shown, the optical device array in this embodiment is composed of a repeating periodic array, which can be represented by M×N to indicate the number of sub-pixels in each of the two directions. A single sub-pixel is... Figure 10 The left side contains the structural unit of the ultraviolet chip, which is 12×12 in this embodiment.

[0068] Example 3

[0069] Example 3 illustrates an optimization scenario in the design process of an optical device array. In this example, the design requirement is a Micro-LED array for display, requiring a stripe-like arrangement. Modeling and simulation were performed in FDTD based on the design requirements, resulting in the device design schematic shown below. Figure 11 As shown. The Micro-LED has a central wavelength of 450 nm, a circular mesa with a radius of 2.5 μm, and a mesa tilt angle of 30°. The Micro-LED comprises a second surface microstructure array 21, a second n-GaN 22, a second multiple quantum well layer 23, a second p-GaN 24, a second ITO 25, a second n-electrode 26, a second p-electrode 27, a dielectric layer 28, and a filling layer 29. The sidewalls are coated with 150 nm thick SiO2 to form the dielectric layer 28, and the remaining sloped portions are filled with Al metal to form the filling layer 29. A SiO2 cylindrical array with a diameter and height of 150 nm is fabricated on the light-emitting surface, with a center-to-center spacing of 350 nm between adjacent cylinders to form the second surface microstructure array 21.

[0070] Figure 12 The electric field intensity distribution on the surface of the Micro-LED and at a distance of 5 μm from the chip surface is shown, which represents the light distribution. It can be seen that the device can generate a suitable light field after optimization and can be used for subsequent array design.

[0071] Figure 13 The simulation demonstrates the optical crosstalk of the device design described above, with a sidewall light source added, within an optical device array. The structure used for the optical crosstalk simulation contains three pixels (each pixel contains three RGB sub-pixels). Assuming that at a certain moment only the Micro-LED at the center sub-pixel is lit, ideally only the center pixel should emit light. However, due to factors such as the spacing between the devices, some light will leak from an unexpected channel, resulting in crosstalk. Figure 13The irradiance simulation results show that even with the introduction of sidewall light sources, optical crosstalk is still well suppressed, with almost no light leakage into adjacent sub-pixel areas, which meets the design requirements.

[0072] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, and not to limit them; although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some or all of the technical features; and these modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of the present invention.

Claims

1. A design method for an optical device array, characterized in that, Includes the following steps: S1. A single optical device is modeled, and the finite-difference time-domain method combined with an image recognition model is used for simulation analysis and optimization design to obtain a single optical device model. S2, combine at least two single optical device models in an array and remodel them, then use ray tracing combined with image recognition model for simulation analysis and optimization design to obtain the design results of the optical device array; S3, in response to the adjustment of the single optical device model during the simulation analysis and optimization design process in step S2, the adjustment result is fed back to the simulation analysis and optimization design process in step S1, and the single optical device model is adjusted synchronously. In response to the existence of adjustments to the single optical device model in step S1, the adjustment results are fed back to the simulation analysis and optimization design process in step S2, and the design results of the optical device array are adjusted synchronously. S4. Repeat step S3 to iteratively adjust the design results of the single optical device model and / or the optical device array until the design results of the optical device array meet the design requirements, and obtain the final design result of the optical device array.

2. The design method for an optical device array according to claim 1, characterized in that, The simulation results of the finite-difference time-domain method and ray tracing method are input into the image recognition model to obtain the corresponding image processing results, and the image processing results are used for optimization design.

3. The design method for an optical device array according to claim 2, characterized in that, The simulation analysis results include light field distribution maps or electric field intensity distribution maps, and the image processing results include the strongest light-emitting region or a local strong light-emitting region.

4. The design method for an optical device array according to claim 1, characterized in that, In the modeling process of step S1, one or more monitoring light sources are designed in the single optical device model. When there is only one set monitoring light source, the monitoring light source is located at the geometric center of the plane in the single optical device model. When there are two set monitoring light sources, the two monitoring light sources are located on circles with the geometric center of the plane in the single optical device model as the center and the shortest distance from any point on the boundary of the plane in the single optical device model to the geometric center as the radius, and the positions of the two monitoring light sources bisect the circumference of the circle. When there are three or more set monitoring light sources, one monitoring light source is located at the geometric center of the plane in the single optical device model and serves as the central light source. The other monitoring light sources are located on circles with the central light source as the center and the shortest distance from any point on the boundary of the plane in the single optical device model to the geometric center as the radius, and the positions of the other monitoring light sources bisect the circumference of the circle.

5. The design method for an optical device array according to claim 4, characterized in that, In the remodeling process of step S2, the single optical device model included in the design result of the optical device array is a surface light source with a Lambertian emission field pattern, located on the surface of the three-dimensional geometry, and the light emission direction of the monitoring light source is the outward side of the surface of the three-dimensional geometry.

6. The design method for an optical device array according to claim 5, characterized in that, All monitoring light sources included in the single optical device model are within the same wavelength range, which includes near-infrared, mid-infrared, far-infrared, red, yellow, green, blue, violet, or ultraviolet bands. The ultraviolet band includes UVA, UVB, or UVC.

7. The design method for an optical device array according to claim 6, characterized in that, The monitoring light sources of different individual optical device models in the design results of the optical device array are in the same or different wavelength ranges.

8. The design method for an optical device array according to claim 1, characterized in that, The optical device array includes micro-sized light-emitting diodes, miniature light-emitting diodes, organic light-emitting diodes, quantum dot light-emitting diodes, liquid crystal diodes, or a combination of at least two of them.

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