Linear workbench device

Abstract

The purpose of the present invention is to improve the recovery of fine particles into a sheet storage chamber by an air flow. A front roller (80) and a rear roller (90) are provided on the front and rear of a movable table (50) defining a sheet storage chamber (70), and peripheral grooves (82B, 92B) are provided on the outer peripheries of the front roller (80) and the rear roller (90).

Description

Technical Field

[0001] The present invention relates to a linear worktable apparatus, and more particularly, to a linear worktable apparatus comprising a plate. Background Technology

[0002] As a linear worktable device, there is a known linear worktable device that includes: a base member having a groove extending along an axial direction; and a strip-shaped plate extending along the axial direction in a manner that closes the opening of the groove, having two ends fixed to the base member; the movable worktable includes: a plate storage chamber that stores a portion of the plate in a bent state away from the base member; and a plate guide portion disposed in front of and behind the plate storage chamber in the moving direction of the movable worktable (e.g., Patent Document 1).

[0003] Existing technical documents

[0004] Patent documents

[0005] Patent Document 1: Japanese Utility Model Application Publication No. 02-043142 Summary of the Invention

[0006] The problem that the invention aims to solve

[0007] To recover abrasive particles and other fine particles generated by the movement of the movable worktable, an airflow is created from outside the sheet collection chamber to inside the sheet collection chamber as the worktable moves. In this case, the sheet guide section becomes an obstacle to the airflow from outside the sheet collection chamber to inside the sheet collection chamber, thus hindering the airflow. Therefore, it hinders the recovery of fine particles using the airflow.

[0008] In view of the above background, the present invention addresses the problem of preventing obstruction of airflow from outside the sheet storage room to inside the sheet storage room in a linear worktable device.

[0009] Methods for solving problems

[0010] To address the aforementioned issues, one aspect of the present invention is a linear worktable device comprising: a base member having a groove extending along an axial direction; a drive device disposed within the groove and having a movable portion movable along the axial direction; a strip-shaped plate extending along the axial direction to close the opening of the groove and having two ends fixed to the base member; and a movable worktable connected to the movable portion and movable on the plate, the movable worktable having: a plate receiving chamber for receiving a portion of the plate in a bent state away from the base member; and a pair of rollers disposed before and after the plate receiving chamber in the direction of movement of the movable worktable, each roller being configured to rotate about a rotation axis extending in a direction perpendicular to the axial direction and transverse to the plate, each roller abutting against a surface of the plate away from the base member, and each roller including at least one circumferential groove formed on its outer periphery.

[0011] According to this method, the airflow from outside the sheet storage room to inside the sheet storage room is blocked by the roller.

[0012] Alternatively, in the above-described manner, the base component may include an internal space communicating with the sheet storage chamber and have an air intake port that creates a negative pressure in the internal space.

[0013] According to this method, a pressure difference is generated between the outside and inside of the storage unit, and the pressure difference is used to reliably allow air to flow from the outside to the inside of the storage unit.

[0014] Alternatively, the base component may have a magnetic portion extending along both sides of the opening in the axial direction, which magnetically attracts the plate.

[0015] According to this method, the opening of the groove can be effectively closed using the plate.

[0016] In the above-described manner, each roller may have: a roller body portion including the circumferential groove and an abutting portion abutting against the plate; and a bearing engaging shaft portion integrally disposed with the roller body portion at both ends in the direction of the rotation axis of the roller body portion, wherein the movable worktable has a bearing portion that supports the bearing engaging shaft portion to be rotatable.

[0017] This method reduces the number of roller components and assembly steps.

[0018] In the above-described manner, each roller may also include a large-diameter portion between the roller body portion and the bearing engagement shaft portion, with a diameter larger than that of the bearing engagement shaft portion, thereby forming a labyrinth seal between the roller body portion and the bearing portion.

[0019] This method suppresses the dispersion of particles generated in the bearing section to the outside of the bearing section.

[0020] In the above-described manner, the movable worktable may also include: a pair of longitudinal beams extending along the side edges of the sheet on both sides in the axial direction; a crossbeam extending between the pair of longitudinal beams to engage them, wherein the sheet passes between the pair of rollers without contacting the crossbeam; four bearing retaining blocks respectively mounted on one end of the pair of longitudinal beams and the other end to retain the bearing portion; and a cover member fixed to the pair of longitudinal beams to cover the side of the pair of longitudinal beams, the crossbeam, and the bearing retaining blocks away from the base member, the cover member cooperating with the pair of longitudinal beams and the four bearing retaining blocks to define the sheet storage chamber.

[0021] This method suppresses the dispersion of particles to the outside of the movable worktable.

[0022] In the above manner, each of the bearing retaining blocks has three mutually orthogonal surfaces, which are in surface contact with the three mutually orthogonal surfaces located at one end and the other end of the corresponding longitudinal beam.

[0023] According to this method, the installation position of each bearing retainer relative to the longitudinal beam can be easily and with high precision.

[0024] In the above-described manner, the drive device may also include: a ball screw shaft supported by the base component to be rotatable, the ball screw shaft extending along the axial direction; and a ball nut threadedly engaged with the ball screw shaft, the movable part including the ball nut.

[0025] This method enables high-precision driving of the movable worktable.

[0026] Invention Effects

[0027] The above method suppresses the obstruction of airflow from outside the storage room to inside the storage room. Attached Figure Description

[0028] Figure 1 This is a perspective view illustrating an embodiment of the linear worktable device of the present invention.

[0029] Figure 2 This is an enlarged perspective view of the main parts of the linear worktable device of this embodiment.

[0030] Figure 3 It is along Figure 1Enlarged sectional view of line III-III.

[0031] Figure 4 It is along Figure 3 A sectional view of line IV-IV.

[0032] Figure 5 It is along Figure 3 A cross-sectional view of line VV.

[0033] Figure 6 This is an enlarged perspective view of the linear worktable device of this embodiment. Detailed Implementation

[0034] The following is for reference Figures 1-6 Embodiments of the linear stage device of the present invention will be described. Furthermore, in the following description of the embodiments, for ease of explanation, mutually perpendicular directions such as up / down, left / right, and front / back are defined as shown in the figures.

[0035] like Figure 1 As shown, the linear worktable device 10 has a base component 12. The base component 12 has: a straight track component 14 extending along an axial direction, which in this embodiment extends in a front-to-back direction; a front end component 16 and a rear end component 18 fixed to the front end and rear end of the track component 14; and an upper cover 20 disposed on the upper part of the track component 14, defining an internal space 30 (see reference) inside them. Figure 3 The front-back direction is the length direction of the track component 14. In the following description, the front-back direction will sometimes be referred to as the length direction of the track component 14.

[0036] like Figure 3 As shown, the track component 14 has a bottom wall 14A and left and right side walls 14B and 14C disposed on the left and right sides of the bottom wall 14A. The track component 14 forms a groove 22 with an opening at the top. That is, the track component 14 forms a concave cross-sectional shape by the bottom wall 14A and the left and right side walls 14B and 14C, defining the groove 22 with an opening at the top.

[0037] The upper cover 20 has a left-side component 24 and a right-side component 26, which are divided into left and right sides. The left-side component 24 and the right-side component 26 have longitudinal plate portions 24A and 26A, and flat transverse plate portions 24B and 26B extending from the upper ends of the longitudinal plate portions 24A and 26A in a direction approaching each other. The left-side component 24 and the right-side component 26 each have a hook-shaped cross-section. In the left-side component 24 and the right-side component 26, the longitudinal plate portions 24A and 26A are fixed to the corresponding side walls 14B and 14C, and the front end and rear end are fixed to the front end component 16 and the rear end component 18, respectively. A strip-shaped opening 28 extending along the length direction of the track component 14 is defined between the transverse plate portions 24B and 26B.

[0038] Therefore, in this embodiment, the opening 28 of the upper cover 20 constitutes a substantial opening of the groove 22 that opens the upper side of the groove 22 to the outside.

[0039] The linear worktable device 10 includes: a slider 34 that is guided within a groove 22 by left and right linear ball bearings 32 and moves in the extension direction of the track component 14, the left and right linear ball bearings 32 being respectively disposed on the left and right sidewalls 14B and 14C of the track component 14; and a drive device 36 that drives the slider 34 in the length direction of the track component 14.

[0040] The drive unit 36 ​​includes: a ball screw shaft 38, comprising a rotatable shaft end supported by a front end member 16 and a rear end member 18, the ball screw shaft 38 extending along the length direction (front-to-back direction) of the track member 14; and a ball nut 40 (movable part), fixed to a slider 34 and threadedly engaged with the ball screw shaft 38. The drive unit 36 ​​is driven by an electric motor (not shown) mounted on the rear end member 18 to rotate the ball screw shaft 38, causing the ball nut 40 to move linearly along the length direction of the track member 14. Through the linear movement of the ball nut 40, the slider 34 is guided by a linear ball bearing 32 to move approximately horizontally with high positional accuracy relative to the track member 14 along the length direction of the track member 14.

[0041] Thus, in this embodiment, the slider 34 and the ball nut 40 constitute the movable part of the drive device 36, which is provided in the groove 22 and moves in the longitudinal direction of the track component 14.

[0042] A strip-shaped plate 44 is mounted on the base component 12. The plate 44 is made of a magnetic material with the required elasticity, such as stainless steel of a ferritic or martensitic system. Figure 1 As shown, the plate 44 extends along the length of the track component 14 in a manner that closes the opening 28, and has two ends 44A, 44B that are fixed to the front end component 16 and the rear end component 18 by means of screws 46.

[0043] like Figure 2 As shown, the plate 44 has a left-right length such that the side edges 44C on both sides overlap the horizontal portions 24B and 26B of the left and right components 24 and 26 of the upper cover 20. On the upper surface of the portion of the horizontal portions 24B and 26B that overlaps with the plate 44, a strip of magnetic sheet (magnetic part) 25 is attached along the length direction of the track component 14.

[0044] The two side edges 44C of the plate 44, outside the portion located within the plate storage chamber 70 of the movable worktable 50 (described later), are magnetically adsorbed onto the corresponding magnetic sheet 25. Thus, outside the portion located within the plate storage chamber 70, the plate 44 extends in a generally horizontal, flat plate shape along the length direction of the track member 14 in a close-fitting state on the transverse plate portions 24B and 26B, closing the opening 28.

[0045] The linear worktable assembly 10 has a movable worktable 50. For example... Figures 2-6 As shown, the movable worktable 50 has: a pair of longitudinal beams 52 that extend parallel to each other in the front-rear direction along the side edges 44C of the left and right sides of the plate 44; a crossbeam 56 that extends between the pair of longitudinal beams 52 and joins the lower parts of the middle portions of the longitudinal beams 52 in the front-rear direction; a pair of front bearing retaining blocks 60 that are fixed to the front end (one end) of each longitudinal beam 52 by means of screws 58; a pair of rear bearing retaining blocks 64 that are fixed to the rear end (the other end) of each longitudinal beam 52 by means of screws 62; and a rectangular box-shaped cover member 68 that is open at the bottom and fixed to the upper part of the longitudinal beams 52 by means of screws 66 to cover the side (upper side) of the longitudinal beams 52, crossbeams 56, front bearing retaining blocks 60 and rear bearing retaining blocks 64 away from the base member 12. The movable worktable 50 is rectangular when viewed from above.

[0046] Cover component 68 cooperates with a pair of longitudinal beams 52, a front bearing retainer block 60, and a rear bearing retainer block 64 to define a downward-opening plate storage chamber 70 on their inner sides (see reference). Figure 5 The cover component 68 also cooperates with a pair of longitudinal beams 52, a front bearing retainer block 60, and a rear bearing retainer block 64 to define a rectangular frame-like outer peripheral space 69 surrounding them. The sheet storage chamber 70 communicates with the outer peripheral space 69 on the lower side.

[0047] To securely connect the left and right longitudinal beams 52 to each other with the largest possible cross-sectional area without contacting the plate 44, the crossbeam 56 is designed such that... Figure 5As shown, the front and rear sides of the generally horizontal upper surface 56A of the crossbeam 56 are inclined surfaces 56B and 56C, respectively, which are inclined in a direction that mimics the curved shape of the plate 44.

[0048] The movable worktable 50 has a connecting portion 72 extending downward from the lower part of the crossbeam 56, the connecting portion 72 including a constricted neck 72A passing through an opening 28 in the vertical direction. The movable worktable 50 is integrally connected to the upper part of the slider 34 by means of the connecting portion 72. Thus, the movable worktable 50 and the slider 34 move substantially horizontally in the front-back direction. The portion of the movable worktable 50 above the constricted neck 72A moves substantially horizontally on the plate 44 along the length direction (front-back direction) of the track member 14.

[0049] Each longitudinal beam 52 has multiple mounting portions 74, each including a portion that extends vertically through the cover member 68 and protrudes above the cover member 68. A moving object (not shown) of the linear worktable device 10 is mounted on the mounting portion 74.

[0050] like Figure 4 As shown, each front bearing retainer 60 has: an end piece 60A extending in the left-right direction, including a rear surface 61A that makes face contact with the front end face 52A of the corresponding longitudinal beam 52; and a side piece 60B extending rearward from the end piece 60A, including an outer surface 61B that makes face contact with the inner surface 52B of the corresponding longitudinal beam 52. Each front bearing retainer 60 has a hook-shaped shape when viewed from above that engages with the corner of the front end of the corresponding longitudinal beam 52.

[0051] like Figure 2 As shown, each front bearing retainer 60 has a protrusion 60C that engages with a hook-shaped notch 53 formed along the lower edge of the front end of the corresponding longitudinal beam 52. Each protrusion 60C includes an upper surface 61C that makes surface contact with the lower surface 52C of the corresponding hook-shaped notch 53.

[0052] That is, such as Figure 6 As shown, the three mutually orthogonal surfaces (rear surface 61A, outer surface 61B, and upper surface 61C) of each front bearing retainer 60 in the front-rear, left-right, and up-down directions respectively make surface contact with the three mutually orthogonal surfaces (front surface 52A, inner surface 52B, and lower surface 52C) of the front corner of the corresponding longitudinal beam 52. This makes it easy and highly accurate to uniquely set the installation position of each front bearing retainer 60 relative to the corresponding longitudinal beam 52 in the front-rear, left-right, and up-down directions.

[0053] like Figure 4As shown, each front bearing retainer block 60 has a side plate portion 60B with an inwardly opening bearing chamber 60D, which holds the ball bearing (bearing portion) 76 inserted in the bearing chamber 60D.

[0054] The term "facing inward" as used here refers to the direction in which the side plate portion 60B of each front bearing retaining block 60 is away from the side adjacent to the longitudinal beam 52, and is the direction in which the side plate portions 60B of the left and right pairs of front bearing retaining blocks 60 are opposite to each other.

[0055] A front roller 80 is disposed between a pair of left and right front bearing retaining blocks 60. The front roller 80 has a rotation axis extending in a direction that traverses the plate 44 in the left and right direction. The front roller 80 has a roller body portion 82 and a bearing engaging shaft portion 84, which is integrally provided with the roller body portion 82 at both ends in the direction of the rotation axis of the roller body portion 82.

[0056] like Figure 4 As shown, the roller body 82 includes: abutment portions 82A, which are formed in three equally spaced portions along the central axis; and peripheral grooves 82B, which are formed between adjacent abutment portions 82A. Each abutment portion 82A abuts against the upper surface 44E of the sheet 44. The peripheral grooves 82B are provided in two equally spaced portions along the central axis on the outer periphery of the roller body 82, each defining a space with a concave groove cross-sectional shape.

[0057] A pair of ball bearings 76, located on the left and right sides of each front bearing retainer block 60, respectively support the corresponding bearing engaging shaft 84 of the front roller 80 so that it can rotate about a rotation axis extending in the left and right direction.

[0058] like Figure 4 As shown, each rear bearing retainer 64 has: an end piece 64A extending in the left-right direction, including a front surface 65A that makes surface contact with the rear end face 52D of the corresponding longitudinal beam 52; and a side piece 64B extending forward from the end piece 64A, including an outer surface 65B that makes surface contact with the inner surface 52B of the corresponding longitudinal beam 52. Each rear bearing retainer 64 has a hook shape that engages with the corner of the rear end of the corresponding longitudinal beam 52 when viewed from above.

[0059] like Figure 2 As shown, each rear bearing retainer 64 has a protrusion 64C that engages with a hook-shaped notch 55 formed along the lower edge of the rear end of the corresponding longitudinal beam 52. Each protrusion 64C includes an upper surface 65C that makes surface contact with the lower surface 52E of the corresponding hook-shaped notch 55.

[0060] That is, such as Figure 6As shown, the three mutually orthogonal surfaces (front surface 65A, outer surface 65B, and upper surface 65C) of each rear bearing retainer 64 in the front-back, left-right, and up-down directions respectively make surface contact with the three mutually perpendicular surfaces (rear surface 52D, inner surface 52B, and lower surface 52E) of the rear end corner of the corresponding longitudinal beam 52. This makes it easy and highly accurate to uniquely set the installation position of each rear bearing retainer 64 relative to the corresponding longitudinal beam 52 in the front-back, left-right, and up-down directions.

[0061] like Figure 4 As shown, each rear bearing retainer block 64 has a side plate portion 64B with an inwardly opening bearing chamber 64D, which holds the ball bearing (bearing portion) 78 inserted into the bearing chamber 64D.

[0062] The term "facing inward" as used here refers to the direction in which the side plate portion 64B of each rear bearing retaining block 64 is away from the side adjacent to the longitudinal beam 52, and is the direction in which the side plate portions 64B of the left and right pairs of rear bearing retaining blocks 64 are opposite to each other.

[0063] A rear roller 90 is disposed between a pair of left and right rear bearing retaining blocks 64. The rear roller 90 has a rotation axis (central axis) extending in a direction that traverses the plate 44 in the left and right direction. The rear roller 90 has a roller body portion 92 and a bearing engaging shaft portion 94, which is integrally provided with the roller body portion 92 at both ends in the direction of the rotation axis of the roller body portion 92.

[0064] like Figure 4 As shown, the roller body 92 includes: abutment portions 92A, which are formed in three equally spaced portions along the central axis; and peripheral grooves 92B, which are formed between adjacent abutment portions 92A. Each abutment portion 92A abuts against the upper surface 44E of the sheet 44. The peripheral grooves 92B are provided in two equally spaced portions along the central axis on the outer periphery of the roller body 92, each defining a space with a concave groove cross-sectional shape.

[0065] The front roller 80 and the rear roller 90 have the same structure. The front roller 80 is integrally formed, including the roller body 82 and the bearing engaging shaft 84, through machining or other processes. The rear roller 90 is integrally formed, including the roller body 92 and the bearing engaging shaft 94, through machining or other processes.

[0066] A pair of ball bearings 78 provided on each rear bearing retainer block 64 respectively support the corresponding bearing engaging shaft 94 of the rear roller 90 so that it can rotate about a rotation axis extending in the left-right direction.

[0067] Each peripheral groove 82B of the front roller 80 and each peripheral groove 92B of the rear roller 90 can be formed by cutting. The entire front roller 80 with multiple peripheral grooves 82B and the entire rear roller 90 with multiple peripheral grooves 92B are each a single component. Therefore, even if multiple peripheral grooves 82B and 92B are provided in the roller body 82 and roller body 92 respectively, the assembly process and the number of components of the front roller 80 and the rear roller 90 will not increase.

[0068] Furthermore, since the roller body 82 and the bearing engaging shaft 84, and the roller body 92 and the bearing engaging shaft 94 are each integrally constructed, the assembly process and number of parts for the front roller 80 and the rear roller 90 will not increase, and the assembly error of the front roller 80 and the rear roller 90 will not occur.

[0069] Even though the roller body 82 and bearing engagement shaft 84, and the roller body 92 and bearing engagement shaft 94 are each integrally constructed, the assembly of the front roller 80 and rear roller 90 relative to the left and right longitudinal beams 52 is not difficult because the left and right front bearing retaining blocks 60 and rear bearing retaining blocks 64 are separate from the left and right longitudinal beams 52, respectively. The assembly of the front roller 80 can be performed as follows: install the front bearing retaining blocks 60 on the left and right bearing engagement shafts 84 of the front roller 80, and use screws 58 to assemble the assembly of the front roller 80 and the left and right front bearing retaining blocks 60 to the front end of the left and right longitudinal beams 52. Similarly, the assembly of the rear roller 90 can be performed as follows: install the rear bearing retaining blocks 64 on the left and right bearing engagement shafts 94 of the rear roller 90, and use screws 62 to assemble the assembly of the rear roller 90 and the left and right rear bearing retaining blocks 64 to the rear end of the left and right longitudinal beams 52.

[0070] The front roller 80 and the rear roller 90 are rotatable about mutually parallel axes of rotation and are located in front of and behind the crossbeam 56, respectively. In other words, the front roller 80 and the rear roller 90 are positioned in front of and behind the sheet storage chamber 70 in the moving direction of the movable worktable 50, forming a front-to-back pair. In other words, the crossbeam 56 is arranged at a distance between the front roller 80 and the rear roller 90 in the front-to-back direction.

[0071] The high precision of the mounting positions of the front bearing retainer 60 and the rear bearing retainer 64 relative to the longitudinal beams 52 results in higher positional precision of the ball bearings 76 and 78 relative to the longitudinal beams 52, which in turn increases the positional precision of the front roller 80 and the rear roller 90 relative to the movable worktable 50. Therefore, the front roller 80 and the rear roller 90 act effectively on the plate 44 as desired.

[0072] The sheet storage chamber 70 stores the front roller 80, the rear roller 90, and the crossbeam 56.

[0073] The plate 44 has a longitudinal length (length direction length) longer than the longitudinal length (length direction length) between the fixing portion of the screw 46 relative to the front end member 16 and the fixing portion of the screw 46 relative to the rear end member 18, such that a residual portion is created between the fixing portion relative to the front end member 16 and the fixing portion relative to the rear end member 18.

[0074] By setting the length as described above, such as Figure 2 and Figure 5 As shown, in the sheet storage chamber 70, the sheet 44 forms a curved portion 45 that is detached from the magnetic adsorption of the magnetic sheet 25 and bends in an arc shape in the direction away from the base member 12 (upward direction). In other words, the sheet storage chamber 70 stores the curved portion 45 in a state in which a portion of the sheet 44 is bent away from the base member 12 between the front roller 80 and the rear roller 90.

[0075] The bend 45 is generated by the elasticity of the remaining portion of the plate 44. The required elasticity of the plate 44 is such that the position of the bend 45 varies in the front-rear direction of the plate 44 along with the front-rear direction of the movable worktable 50.

[0076] The crossbeam 56 has a mountain-shaped cross-sectional shape that bulges out in the direction away from the base member 12.

[0077] The plate 44 passes under the front roller 80 and the rear roller 90 in the front-back direction. In the normal state, below the flat upper wall 68A of the cover member 68, the plate 44 passes above the crossbeam 56 in the front-back direction without contacting the crossbeam 56 by means of the normally curved portion 45 with a predetermined height.

[0078] like Figure 1 and Figure 3 As shown, pipe fittings 15 are installed at the front and rear of the left side component 24 of the upper cover 20. Each pipe fitting 15 has an air suction port 13. The air suction port 13 is connected to a negative pressure source (not shown) based on a suction pump or the like.

[0079] like Figure 3 As shown, the internal space 30 of the base component 12 is connected to the sheet storage chamber 70 in the front-rear direction corresponding to the movable worktable 50 via the space around the connecting part 72 and the opening 28. As a result, the outer peripheral space 69, the internal space 30, and the sheet storage chamber 70 are in a negative pressure state.

[0080] With the internal space 30 and the sheet storage chamber 70 under negative pressure, the particles generated by the movement of the movable worktable 50 can be recycled into the internal space 30 and the sheet storage chamber 70, and their dispersion from the sheet storage chamber 70 to the outside of the movable worktable 50 is suppressed, and then discharged to the outside from the air intake 13.

[0081] The abutting portion 82A of the roller body portion 82 of the front roller 80 and the abutting portion 92A of the roller body portion 92 of the rear roller 90 can rollably abut against the upper surface 44E of the plate 44 on the side away from the base member 12. The roller bodies 82 and 92 only require a small pressing force to abut against the plate 44. Figure 5 As shown, the positions where the roller body 82 and roller body 92 abut against the upper surface 44E of the sheet 44 are slightly biased toward the sheet storage chamber 70 in the front-back direction than the position where the sheet 44 is detached from the magnetic adsorption of the magnetic sheet 25.

[0082] Near the start and end positions of the bending portion 45, the sheet 44, through its own elastic deformation, abuts against the contact portions 82A and 92A of the roller body portions 82 and 92 with a small pressing force, thereby suppressing unnecessary deformation of the bending portion 45 due to vibration, etc. As a result, the shape of the bending portion 45 is stable, and the portion of the sheet 44 outside the bending portion 45 is stably magnetically adsorbed to the magnetic sheet 25, and the sheet 44 stably closes the opening 28.

[0083] The peripheral grooves 82B and 92B of the front roller 80 and the rear roller 90, located at their respective positions in the roller body parts 82 and 92, form air passages that connect the interior of the sheet storage chamber 70 with the exterior of the sheet storage chamber 70, i.e., the outer peripheral space 69.

[0084] Therefore, the roller body portions 82 and 92 are less likely to obstruct the airflow in the front-to-back direction, thus preventing the airflow that wants to flow from the outer peripheral space 69 into the sheet storage chamber 70 from being obstructed. As a result, compared with the case where there are no peripheral grooves 82B and 92B, the airflow from the outer peripheral space 69 into the sheet storage chamber 70 is increased at the respective placement portions of the roller body portions 82 and 92.

[0085] Therefore, at the respective configuration locations of the roller body sections 82 and 92, the airflow flowing from the outer peripheral space 69 into the sheet storage chamber 70 can effectively recover abrasive particles and other fine particles into the sheet storage chamber 70.

[0086] like Figure 4 As shown, the front roller 80 and the rear roller 90 are respectively located between the roller body portions 82 and 92 and the bearing engagement shaft portions 84 and 94. From the roller body portions 82 and 92 toward the bearing engagement shaft portions 84 and 94, they have successively small diameter portions 86 and 96 and large diameter portions 88 and 98. The outer diameter of the small diameter portions 86 and 96 is smaller than the outer diameter of the roller body portions 82 and 92, and the outer diameter (large diameter) of the large diameter portions 88 and 98 is larger than the outer diameter of both the small diameter portions 86 and 96 and the bearing engagement shaft portions 84 and 94. The large diameter portions 88 and 98 have an outer diameter slightly smaller than the inner diameter of the bearing chambers 60D and 64D, and are located within the bearing chambers 60D and 64D.

[0087] Therefore, labyrinth seals, serving as non-contact seals, are formed between the front roller 80 and the front bearing retainer 60, and between the rear roller 90 and the rear bearing retainer 64. These labyrinth seals suppress the dispersion of particles generated within the bearing chambers 60D and 64D to the outside of the bearing chambers 60D and 64D. This prevents contamination of the front roller 80 and rear roller 90 by particles generated within the bearing chambers 60D and 64D.

[0088] The above concludes the description of the specific implementation methods, but the present invention is not limited to the above-described implementation methods and can be widely modified and implemented.

[0089] For example, the number of peripheral grooves 82B and 92B provided in each of the roller body sections 82 and 92 is not limited to two; it can be one or more than three. The number of abutment parts 82A and 92A is not limited to three; it can be more than two depending on the number of peripheral grooves 82B and 92B. The number of abutment parts 82A and 92A and peripheral grooves 82B and 92B can be set to correspond to the axial length of the roller body sections 82 and 92. The abutment parts 82A and 92A and peripheral grooves 82B and 92B are not necessarily provided at equal intervals in the axial direction. The drive device 36 of the movable worktable 50 is not limited to a ball screw type including a ball screw shaft 38 and a ball nut 40; it can also be a linear actuator such as a linear motor.

[0090] In the above embodiments, it is assumed that the linear worktable device 10 is arranged horizontally. For example, in the case where the linear worktable device 10 is arranged vertically, the extension direction of the track component 14 is the vertical direction.

[0091] Label Explanation

[0092] 10: Linear worktable assembly; 12: Base component; 13: Air intake port; 14: Track component; 14A: Bottom wall; 14B: Side wall; 14C: Side wall; 15: Pipe connector; 16: Front end component; 18: Rear end component; 20: Upper cover; 22: Groove; 24: Left side component; 24A: Longitudinal section; 24B: Transverse section; 25: Magnetic plate (magnetic part); 26: Right side component; 26A: Longitudinal section; 26B: Transverse section; 28: Opening; 30: Internal space; 32: Linear ball bearing; 34 36: Sliding component; 38: Drive unit; 40: Ball screw shaft; 44: Ball nut (movable part); 45: Plate; 46: End; 47: End; 48: Side edge; 49: Upper surface; 40: Bending part; 41: Screw; 52: Movable worktable; 53: Longitudinal beam; 54: Front end face; 55: Inner side face; 56: Lower surface; 57: Rear end face; 58: Lower surface; 59: Hook-shaped notch; 50: Hook-shaped notch; 51: Crossbeam; 52: Upper surface; 53: Inclined surface; 56C: Inclined surface; 58: Screw; 60: Front bearing retainer (bearing part); 60A: End piece; 60B: Side piece; 60C: Protrusion; 60D: Bearing housing; 61A: Rear surface; 61B: Outer surface; 61C: Upper surface; 62: Screw; 64: Rear bearing retainer (bearing part); 64A: End piece; 64B: Side piece; 64C: Protrusion; 64D: Bearing housing; 65A: Front surface; 65B: Outer surface; 65C: Upper surface; 66: Screw; 68: Cover component; 68A 69: Upper wall portion; 70: Outer peripheral space; 72: Sheet storage chamber; 73: Connecting part; 74: Neck; 75: Mounting seat portion; 76: Ball bearing (bearing part); 78: Ball bearing (bearing part); 80: Front roller; 82: Roller body portion; 82A: Abutting part; 82B: Circumferential groove; 84: Bearing engaging shaft portion; 86: Small diameter portion; 88: Large diameter portion; 90: Rear roller; 92: Roller body portion; 92A: Abutting part; 92B: Circumferential groove; 94: Bearing engaging shaft portion; 96: Small diameter portion; 98: Large diameter portion.

Claims

1. A linear worktable device, comprising: A base component having a groove extending along an axial direction; A drive device, which is disposed in the groove, has a movable part that moves along the axial direction; A strip-shaped plate extending along the axial direction to close the opening of the groove, having both ends fixed to the base component; and A movable worktable, connected to the movable part, moves on the plate. The movable worktable has: A sheet storage chamber that stores a portion of the sheet in a bent-out position away from the base component; and A pair of rollers are positioned in front of and behind the sheet receiving chamber in the direction of movement of the movable worktable. Each roller is configured to rotate about a rotation axis extending in a direction perpendicular to and transverse to the plate, each roller abutting against the side of the plate away from the base member, and each roller includes at least one circumferential groove formed on its outer periphery.

2. The linear worktable device according to claim 1, wherein, The base component includes an internal space communicating with the sheet storage chamber and has an air intake port that creates a negative pressure in the internal space.

3. The linear stage device according to claim 1 or 2, wherein, The base component has magnetic portions extending along the two sides of the opening in the axial direction, which magnetically attract the plate.

4. The linear worktable apparatus according to claim 1 or 2, wherein, Each of the rollers has: The roller body includes the circumferential groove and an abutting portion that abuts against the sheet; and The bearing engaging shaft portion is integrally provided with the roller body portion at both ends in the direction of the rotation axis of the roller body portion. The movable worktable has a bearing portion that supports the bearing engaging shaft portion so that it can rotate.

5. The linear worktable apparatus according to claim 4, wherein, Each roller also includes a large-diameter portion between the roller body and the bearing engagement shaft portion, which has a diameter larger than that of the bearing engagement shaft portion, thereby forming a labyrinth seal between the roller body and the bearing portion.

6. The linear stage apparatus according to claim 4, wherein, The movable worktable has: A pair of longitudinal beams extending along the side edges of both sides of the plate in the axial direction; A crossbeam extends between the pair of longitudinal beams to join the pair of longitudinal beams together, and the sheet passes between the pair of rollers in a manner that does not contact the crossbeam; Four bearing retaining blocks are respectively installed at one end and the other end of each of the pair of longitudinal beams to retain the bearing portion; and A cover component, fixed to the pair of longitudinal beams, to cover the side of the pair of longitudinal beams, the crossbeam, and the bearing retainer block away from the base component. The cover component, together with the pair of longitudinal beams and the four bearing retaining blocks, defines the sheet storage chamber.

7. The linear stage apparatus according to claim 6, wherein, Each of the bearing retaining blocks has three mutually orthogonal surfaces, which are in surface contact with the three mutually orthogonal surfaces located at one end and the other end of the corresponding longitudinal beam.

8. The linear stage apparatus according to claim 1 or 2, wherein, The driving device has: A ball screw shaft, supported by the base component for rotatability, extends along the axial direction; and A ball nut, which is threadedly engaged with the ball screw shaft. The movable part includes the ball nut.

Images