Driver with bidirectional reversible deformation and liquid-solid friction nanometer power generation functions and preparation method thereof
By employing a composite thin film of CNTs-MXene mixed solution and PDMS in the actuator, combined with magnetron sputtering and ultraviolet surface modification treatment, a SiOx layer is formed, realizing the bidirectional reversible deformation and liquid-solid triboelectric nano-power generation function of the actuator. This solves the problems of irreversibility and external power supply required by traditional actuators, and has a high-efficiency self-powering capability.
Patent Information
- Application Number
- CN202511114792.X
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2025-08-11
- Publication Date
- 2025-11-18
AI Technical Summary
Traditional actuators have fixed and irreversible motion modes, limited functionality, and require continuous external power, which restricts their application in passive environments.
A composite thin film was prepared by doping polydimethylsiloxane (PDMS) with a CNTs-MXene mixed solution. An Al thin film was deposited by magnetron sputtering, and the PDMS-CNTs-MXene layer was subjected to ultraviolet surface modification treatment to form a SiOx layer. The bidirectional reversible deformation and liquid-solid triboelectric nanogenerator function was realized by utilizing the multilayer composite structure and dual electrode design.
It achieves bidirectional reversible deformation and self-powered capability of the actuator, solving the problems of fixed motion mode and single function of traditional actuators. It has high-efficiency triboelectric nano-power generation performance and is suitable for multiple application scenarios.
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Figure CN120966055A_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The present application relates to the technical field of driver, in particular to a preparation method of a composite film with bidirectional reversible deformation and liquid-solid friction nanogenerator function, a composite film prepared by the preparation method, a method for preparing a driver by using the composite film and a prepared driver. BACKGROUND
[0002] The driver can convert external energy (such as light, electromagnetic field, humidity and chemical solvent, etc.) into mechanical movement, as a kind of intelligent device, it is increasingly concerned in the field of soft robot, bionic organism and intelligent sensor. The solvent response driver diffuses the solvent molecules to the sensitive layer, and reacts with the functional groups inside the material, breaks the original balance, and causes the material macroscopic deformation. The traditional driver usually relies on the asymmetric expansion of the material to realize the one-way bending, its movement mode is fixed and irreversible. Most of the drivers also have the problems of single function and need for continuous external energy supply. It is worth mentioning that the liquid-solid friction nanogenerator can generate electricity by using various water source energy, which is based on the principle of contact electrification and electrostatic induction. When water and solid surface repeatedly contact and separate, continuous current can be generated in the external circuit, which provides a new idea for the development of a new generation of self-powered soft robot and intelligent environmental detection equipment. With the increasingly complex application scene, the demand for drivers with bidirectional reversible deformation and self-power supply is becoming more and more urgent. SUMMARY
[0003] Therefore, in order to solve the technical problems of the traditional driver that the movement mode is fixed and irreversible and the single function, the present application provides a preparation method of a composite film with bidirectional reversible deformation and liquid-solid friction nanogenerator function, a composite film prepared by the preparation method, a method for preparing a driver by using the composite film and a prepared driver. The CNTs-MXene mixed solution is doped into the polydimethylsiloxane (PDMS) to prepare a composite film, an Al film is deposited by using a magnetron sputtering technology, and the PDMS-CNTs-MXene layer is subjected to ultraviolet surface modification treatment to form a SiOx layer. Due to the great difference in the expansion coefficient of the PDMS-CNTs-MXene layer, the SiOx layer and the Al layer, the solvent driven response can be realized. The SiOx layer swells in the organic solvent due to the hydrogen bond effect and the solvation effect, and the PDMS-CNTs-MXene layer swells in the organic solvent due to the non-polar penetration, so that the bidirectional reversible deformation in the organic solvent can be realized. Due to the multilayer composite structure and the double electrode design, the Al / PDMS-CNTs-MXene / SiOx driver also has high efficient friction nanogenerator performance.
[0004] In order to achieve the above purpose, the present application provides the following technical scheme:
[0005] In a first aspect, the present application provides a preparation method of a composite film with bidirectional reversible deformation and liquid-solid friction nanogeneration function, comprising the following steps:
[0006] Step (1), preparation of CNTs-Mxene mixed solution
[0007] The CNTs suspension and the MXene dispersion liquid are mixed and uniformly dispersed to obtain a CNTs-Mxene mixed solution.
[0008] Step (2), preparation of PDMS-CNTs-MXene mixed solution
[0009] The PDMS precursor is uniformly mixed with the CNTs-Mxene mixed solution prepared in step (1), and then a curing agent is added, and vacuum degassing treatment is performed to obtain a uniformly dispersed PDMS-CNTs-MXene mixed solution.
[0010] Step (3), preparation of PDMS-CNTs-MXene thin film
[0011] The PDMS-CNTs-MXene mixed solution prepared in step (2) is poured on a glass sheet to make the surface solution uniformly distributed, and after curing, a PDMS-CNTs-MXene thin film with uniform thickness is obtained.
[0012] Step (4), preparation of Al / PDMS-CNTs-MXene double-layer film
[0013] An Al layer is deposited on the surface of the PDMS-CNTs-MXene thin film prepared in step (3) by direct current magnetron sputtering to obtain an Al / PDMS-CNTs-MXene double-layer film.
[0014] Step (5), preparation of Al / PDMS-CNTs-MXene / SiOx composite film
[0015] The Al / PDMS-CNTs-MXene double-layer film prepared in step (4) is peeled off from the glass sheet and turned over, and then the PDMS-CNTs-MXene layer is subjected to ultraviolet surface modification treatment to form a SiOx layer, and finally an Al / PDMS-CNTs-MXene / SiOx composite film is obtained.
[0016] In a second aspect, the present application provides a composite film with bidirectional reversible deformation and liquid-solid friction nanogeneration function, which is prepared by the above preparation method.
[0017] In a third aspect, the present application provides a preparation method of a driver with bidirectional reversible deformation and liquid-solid friction nanogeneration function, which cuts the above composite film with bidirectional reversible deformation and liquid-solid friction nanogeneration function into a specific pattern by using a laser microprocessing device.
[0018] When the length is much greater than the width, a driver with chiral deformation and liquid-solid friction nanogeneration function is obtained.
[0019] When the length and the width are comparable, a driver with bidirectional reversible deformation can be obtained.
[0020] In a fourth aspect, the application provides a driver prepared by the preparation method of the above-mentioned driver with bidirectional reversible deformation and liquid-solid friction nanogeneration function.
[0021] The application adopts CNTs-MXene mixed solution to dope into polydimethylsiloxane (PDMS) to prepare a composite film, uses a magnetron sputtering technology to deposit an Al film, performs ultraviolet surface modification treatment on the PDMS-CNTs-MXene layer, and forms a SiOx layer. Due to the great difference in expansion coefficients of the PDMS-CNTs-MXene layer, the SiOx layer and the Al layer, solvent-driven response can be realized. Among them, the SiOx layer swells in an organic solvent due to hydrogen bonding and solvation effect, and the PDMS-CNTs-MXene layer swells in an organic solvent due to non-polar penetration, so that bidirectional reversible deformation in an organic solvent can be realized. Due to the multilayer composite structure and the double-electrode design, the Al / PDMS-CNTs-MXene / SiOx driver also has high-efficiency friction nanogeneration performance. Compared with the prior art, the following beneficial effects are achieved:
[0022] (1) Solving the defects of fixed motion mode and irreversibility of traditional drivers:
[0023] Traditional drivers usually rely on the asymmetric expansion of materials to realize single-direction bending deformation, and their motion mode is fixed and irreversible. In the application, the magnetron sputtering technology is combined with ultraviolet surface modification to treat the film, and under the action of stress regulation and boundary effect, the driver can realize bidirectional reversible deformation. The application optimizes the single motion model of the traditional driver through surface treatment of the composite film, and improves the problem of low degree of freedom.
[0024] (2) Having power generation performance
[0025] Traditional drivers need continuous input of external energy, which limits their application in passive environments. In the application, the magnetron sputtering technology is used to deposit an Al layer, so that a conductive network is formed on the surface, and the composite film realizes liquid-solid friction nanogeneration performance by combining with FEP.
[0026] (3) Material collaborative design: realizing multifunctional integration
[0027] Core composition: Al / PDMS-CNTs-MXene / SiOx composite film
[0028] PDMS matrix: high flexibility, strong chemical stability, as the driver structure framework;
[0029] CNTs-MXene doping: uniform mixing, improving the electrical conductivity and mechanical strength of the composite material, laying the foundation for power generation function and structural stability;
[0030] Al layer and SiOx layer: Al layer forms a uniform conductive network through magnetron sputtering, SiOx layer introduces silicon hydroxyl (Si-OH) through ultraviolet modification, which can form hydrogen bonds with -OH in organic solvents to achieve swelling driving.
[0031] Advantages:
[0032] Bidirectional reversible deformation: the synergistic effect of SiOx layer (swelling) and PDMS-CNTs-MXene layer (non-polar solvent response) realizes morphological transformation (such as bending and stretching) through alternating regulation of different organic solvents.
[0033] Self-powering capability: Al layer as electrode, with FEP material to form a friction nanogenerator, with a maximum open circuit voltage of 104V when impacted by liquid droplets, without external power supply.
[0034] (4) Flexible structure design: suitable for multiple scene requirements
[0035] Size customization:
[0036] Cut into two sizes by laser micromachining:
[0037] 25mm×1.5mm: length much greater than width, realizing chiral spiral deformation, suitable for micro robot joint driving;
[0038] 12mm×4.8mm: aspect ratio close to 1, realizing bidirectional reversible bending, suitable for morphological switching of intelligent sensors.
[0039] Advantages:
[0040] Functional modularization: the same preparation process can produce different functional devices, reducing the development cost of multiple scene applications;
[0041] Strong compatibility: flexible substrate (PDMS) can be integrated with biological tissues and flexible electronic devices, expanding applications in bionic robots and wearable devices.
[0042] In summary, through the "material-technology-structure" trinity design, the invention realizes the multifunctional integration of "bidirectional reversible deformation + self-powering", providing key technical support for the practicalization of flexible intelligent devices. BRIEF DESCRIPTION OF DRAWINGS
[0043] Figure 1is a schematic diagram of the bidirectional reversible deformation of Al / PDMS-CNTs-MXene / SiOx composite film;
[0044] Figure 2 is the surface wrinkle morphology of Al / PDMS-CNTs-MXene / SiOx composite film induced by anhydrous ethanol;
[0045] Figure 3 is the chiral deformation diagram of Al / PDMS-CNTs-MXene / SiOx actuator when driven by solvent. The size of the actuator is 25mm×1.5mm, and the solvent is anhydrous ethanol solution;
[0046] Figure 4 is the bidirectional reversible deformation image of Al / PDMS-CNTs-MXene / SiOx actuator. The size of the actuator is 12mm×4.8mm, and the solvent is anhydrous ethanol and xylene solution;
[0047] Figure 5 is a liquid-solid friction nanogenerator device composed of Al / PDMS-CNTs-MXene / SiOx composite film and FEP. The size of the actuator is 25mm×1.5mm;
[0048] Figure 6 is the voltage diagram of Al / PDMS-CNTs-MXene / SiOx composite film liquid-solid friction nanogenerator performance test. The size of the actuator is 25mm×1.5mm. Under the condition of continuous droplet dropping, the maximum open circuit voltage (Voc) of Al / PDMS-CNTs-MXene / SiOx based droplet TENG can reach 104V. DETAILED DESCRIPTION
[0049] The technical solutions in the embodiments of the present application will be described clearly and completely below in combination with specific embodiments of the present application and the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of protection of the present application.
[0050] TERMS EXPLANATION
[0051] CNTs: carbon nanotubes;
[0052] Mxene: Mxene is a kind of two-dimensional material composed of transition metal carbide, nitride or carbonitride. Its name comes from its chemical composition and structural characteristics, where "M" represents transition metal (such as titanium, vanadium, niobium, etc.), "X" represents carbon or nitrogen, and "ene" represents its two-dimensional layered structure similar to graphene.
[0053] PDMS: polydimethylsiloxane.
[0054] The application provides a preparation method of a composite film with bidirectional reversible deformation and liquid-solid friction nanogeneration function, characterized by comprising the following steps:
[0055] Step (1), preparation of a CNTs-Mxene mixed solution
[0056] The CNTs suspension and the MXene dispersion liquid are mixed and uniformly dispersed to obtain a CNTs-Mxene mixed solution. Exemplarily, in this step (1), 2 ml of the CNTs suspension and 1 ml of the MXene dispersion liquid are added into a beaker, subjected to magnetic stirring for 10 minutes and ultrasonic treatment for 15 minutes after the stirring is completed, to obtain a uniformly dispersed CNTs-Mxene mixed solution. In the application, the mass fraction ratio of the CNTs suspension and the MXene dispersion liquid is preferably 20:1.
[0057] Step (2), preparation of a PDMS-CNTs-MXene mixed solution
[0058] After the PDMS precursor and the CNTs-Mxene mixed solution prepared in step (1) are uniformly mixed, a curing agent is added, vacuum degassing treatment is performed, and a uniformly dispersed PDMS-CNTs-MXene mixed solution is obtained. Exemplarily, in this step (2), the PDMS precursor is weighed, and the CNTs-Mxene mixed solution prepared in step (1) is added. The two are placed in a water bath environment and fully stirred to mix uniformly. After the curing agent is added, the mixture is fully stirred again. Finally, the mixture is placed in a vacuum environment for degassing treatment, to obtain a uniformly dispersed PDMS-CNTs-MXene mixed solution. In step (2), the volume ratio of the PDMS precursor, the CNTs-Mxene mixed solution and the curing agent is preferably 10:3:0.1. In step (2), the water bath temperature is preferably 40°C, and the degassing treatment time is preferably 1 hour.
[0059] Step (3), preparation of a PDMS-CNTs-MXene thin film
[0060] The PDMS-CNTs-MXene mixed solution prepared in step (2) is poured on a glass sheet to make the surface solution evenly distributed, and after solidification, a PDMS-CNTs-MXene film with uniform thickness is obtained. Illustratively, step (3) can be specifically as follows: the PDMS-CNTs-MXene mixed solution prepared in step (2) is poured on a glass sheet, and then it is placed in a film-distributing machine to make the surface solution evenly distributed by centrifugal force. Finally, it is placed in a drying oven for solidification to obtain a PDMS-CNTs-MXene film with uniform thickness. In step (3), the rotating speed of the film-distributing machine is preferably set to low speed 1000 r / min and high speed 1500 r / min. The solidification temperature and time are preferably 80°C and 4 hours, respectively.
[0061] Step (4), preparation of Al / PDMS-CNTs-MXene double-layer film
[0062] An Al layer is deposited on the surface of the PDMS-CNTs-MXene film prepared in step (3) by direct current magnetron sputtering to obtain an Al / PDMS-CNTs-MXene double-layer film. Illustratively, step (4) can be specifically as follows: the PDMS-CNTs-MXene film prepared in step (3) is placed in the cavity of a magnetron sputtering film-coating machine, and an aluminum target is installed. An Al film is deposited by direct current magnetron sputtering to obtain an Al / PDMS-CNTs-MXene double-layer film. The working conditions of the direct current magnetron sputtering are as follows: the cavity vacuum degree is 5×10 -4 Pa, the working vacuum degree is 0.5 Pa, the sputtering power of the aluminum target is 70 W, the bias voltage is 100 V, and the sputtering time is 15 min.
[0063] Step (5), preparation of Al / PDMS-CNTs-MXene / SiOx composite film
[0064] The Al / PDMS-CNTs-MXene double-layer film prepared in step (4) is peeled off from the glass sheet and turned over, and then the PDMS-CNTs-MXene layer is subjected to ultraviolet surface modification treatment to form a SiOx layer, and finally an Al / PDMS-CNTs-MXene / SiOx composite film is obtained. Its bidirectional reversible deformation is shown in Figure 1 , and the surface wrinkle morphology is shown in Figure 2As shown. Exemplarily, step (5) can be specifically: after the Al / PDMS-CNTs-MXene double-layer film prepared in step (4) is cooled to room temperature, it is peeled off from the glass plate, and after being turned over, the PDMS-CNTs-MXene layer is pasted on the glass plate upward, then the PDMS-CNTs-MXene layer is subjected to ultraviolet surface modification treatment to form a SiOx layer. In step (5), the ultraviolet modification treatment time in step (5) is 25 min. In step (5), the silicon hydroxyl (Si-OH) of the SiOx layer on the surface of the composite film after ultraviolet surface modification can form a hydrogen bond with the -OH group in the organic solvent (preferably ethanol), causing the SiOx layer to swell.
[0065] The application also provides a composite film with bidirectional reversible deformation and liquid-solid friction nanogenerator function, characterized by being prepared by the above preparation method. The composite film has bidirectional reversible deformation (such as Figure 1 as shown), chiral deformation (such as Figure 3 as shown) and power generation function.
[0066] The application also provides a preparation method of a driver with bidirectional reversible deformation and liquid-solid friction nanogenerator function, which cuts the above-mentioned composite film with bidirectional reversible deformation and liquid-solid friction nanogenerator function into a specific pattern by using a laser microprocessing device; when the length is much greater than the width which is much greater than the height, a driver with chiral deformation and liquid-solid friction nanogenerator function is obtained, wherein the chiral deformation is a monostable deformation; when the length and the width are comparable, a driver with bidirectional reversible deformation is obtained.
[0067] Exemplarily, the preparation method of the driver can be specifically: the Al / PDMS-CNTs-MXene / SiOx composite film prepared in step (5) is peeled off from the glass plate, and is cut into a specific pattern by using a laser microprocessing device. When the length is much greater than the width which is much greater than the height, a driver with chiral deformation and liquid-solid friction nanogenerator function is obtained. When the length is much greater than the width which is much greater than the height, the bending energy generated by the composite film is much greater than the stretching energy generated by geometric nonlinearity, the geometric nonlinearity effect is ignored, and the energy minimization determines the final stable state to be a monostable deformation. In the application, the length and width dimensions of the driver realizing chiral deformation and liquid-solid friction nanogenerator are preferably 25 mm x 1.5 mm.
[0068] When the length and the width are comparable, a driver with bidirectional reversible deformation is obtained. In the application, the length and width dimensions of the driver with bidirectional reversible deformation are preferably 12 mm x 4.8 mm.
[0069] The chiral deformation is a monostable deformation occurring under the driving of an organic solvent;
[0070] The bidirectional reversible deformation is realized by alternating regulation of different organic solvents to realize reversible conversion of two forms.
[0071] Deformation characteristic difference
[0072] Chiral deformation: the elongated strip structure is driven by organic solvents (such as anhydrous ethanol) to occur unidirectional deformation in the form of spiral or bending, which is mainly used to realize the liquid-solid friction nanogenerator function (combined with FEP material to form a power generation device, and the maximum open circuit voltage can reach 104V).
[0073] Bidirectional reversible deformation: the rectangular structure can realize rapid and reversible conversion (such as from flat to curved to reverse curved state) of two forms by alternating regulation of anhydrous ethanol and organic solvents, which focuses on solving the problems of fixed motion mode and irreversibility of traditional drivers, and improving the deformation degree of freedom.
[0074] Chiral deformation depends on the elongated strip structure to realize monostable spiral deformation. It can also be used to realize the performance of droplet type friction nanogenerator (such as shown in the figure) after being combined with FEP, to realize the "power generation function". The bidirectional reversible deformation takes "form conversion" as the core, realizes bidirectional reversible motion through the rectangular structure, and the two are distinguished by size design. Figure 5
[0075] The application also provides a driver prepared by the preparation method of the driver with bidirectional reversible deformation and liquid-solid friction nanogenerator function.
[0076] The technical solutions of the application will be clearly and specifically described below in combination with specific embodiments.
[0077] Embodiment 1
[0078] The polydimethylsiloxane (PDMS), CNTs suspension and MXene dispersion liquid and other materials used are ordinary commercially available products. Among them, the PDMS uses sylgard 184 of the United States DOW CORNING company; the CNTs suspension is purchased from Nanjing Xin Nanomaterials Technology Co., Ltd.; and the MXene dispersion liquid is purchased from Nanjing Xianfeng Nanomaterials Technology Co., Ltd.
[0079] A driver with bidirectional reversible deformation and liquid-solid friction nanogenerator function and a preparation method thereof include the following steps:
[0080] Step one, 1ml of CNTs dispersion liquid (CNTs dispersion liquid is a commercial CNTs water suspension, and the mass ratio is 10wt%) and 0.5ml of MXene dispersion liquid (10mg / mL) are added into a beaker. The mixture is stirred by magnetic stirring for 10 minutes and ultrasonic treatment for 15 minutes after stirring is completed, to obtain a uniformly dispersed CNTs-Mxene mixed solution;
[0081] Step two, place 10 g of PDMS precursor and CNTs-Mxene mixed solution in a 40°C water bath beaker, stir with a magnetic stirrer and let it mix well;
[0082] Step three, add 1 g of PDMS curing agent to the mixed solution of PDMS precursor and CNTs-Mxene, and stir with a glass rod for 10 minutes;
[0083] Step four, place the well-stirred PDMS-CNTs-MXene mixed solution into a vacuum box and vacuum for 1 hour to remove bubbles in the mixture;
[0084] Step five, pour the PDMS-CNTs-MXene mixed solution onto a glass sheet and place it in a spin coater to spin it into a uniform thickness. The spin coater speed is set to low speed 1000 r / min and high speed 1500 r / min;
[0085] Step six, place the glass sheet after spin coating into a drying oven for curing. After curing, a uniform thickness of PDMS-CNTs-MXene composite film is obtained. The curing temperature is 80°C and the curing time is 3h;
[0086] Step seven, move the PDMS-CNTs-MXene composite film into the cavity of the magnetron sputtering coating machine and install the aluminum target. Deposit Al film by direct current magnetron sputtering. The cavity vacuum degree is 5×10 -4 Pa, the working vacuum degree is 0.5 Pa, the sputtering power of the aluminum target is 70 W, the bias voltage is 100 V, and the sputtering time is 15 min. After cooling to room temperature, Al / PDMS-CNTs-MXene double-layer film is obtained;
[0087] Step eight, peel off the Al / PDMS-CNTs-MXene double-layer film from the glass plate, and after turning over, the PDMS-CNTs-MXene layer is attached to the glass plate, then the PDMS-CNTs-MXene layer is treated with ultraviolet surface modification to form a SiOx layer, and an Al / PDMS-CNTs-MXene / SiOx composite film is obtained;
[0088] Step nine, the Al / PDMS-CNTs-MXene / SiOx composite film is cut into a specific pattern using a laser micro-machining device. When cut into 25 mm x 1.5 mm, a driver with chiral deformation and liquid-solid friction nanogenerator is obtained. After the prepared driver is placed in ethanol and xylene organic solvents, the deformation direction will present opposite monostable spiral deformation. When the composite film is combined with FEP, the charge transfer generated by the water droplet dropping and separating from the FEP surface generates continuous current between the external double electrodes to realize the liquid-solid friction nanogenerator performance (as shown in Figure 5
[0089] Example 2
[0090] The polydimethylsiloxane (PDMS), CNTs suspension and MXene dispersion used are ordinary commercially available products. Among them, the PDMS uses sylgard 184 of DOW CORNING, USA; the CNTs suspension is purchased from Nanjing Xin Nanomaterials Technology Co., Ltd.; and the MXene dispersion is purchased from Nanjing Xianfeng Nanomaterials Technology Co., Ltd.
[0091] A driver with bidirectional reversible deformation and liquid-solid friction nanogenerator function and a preparation method thereof include the following steps:
[0092] Step one, 1 ml of CNTs dispersion (CNTs dispersion is a commercial CNTs water suspension with a mass ratio of 10wt%) and 0.5 ml of MXene dispersion (10 mg / mL) are added to a beaker. Stir for 10 minutes with a magnetic stirrer and ultrasonic treat for 15 minutes after stirring is completed to obtain a uniformly dispersed CNTs-Mxene mixed solution;
[0093] Step two, 10 g of PDMS precursor and CNTs-Mxene mixed solution are placed in a 40°C water bath beaker, and a magnetic stirrer is used to stir and mix them thoroughly;
[0094] Step three, 1 g of PDMS curing agent is added to the PDMS precursor and CNTs-Mxene mixed solution, and then stirred for 10 minutes with a glass rod;
[0095] Step four, the uniformly stirred PDMS-CNTs-MXene mixed solution is placed in a vacuum box and vacuumed for 1 hour to remove bubbles in the mixture;
[0096] Step five, the PDMS-CNTs-MXene mixed solution is poured on a glass sheet and placed in a spin coater to spin coat it into a uniform thickness. The spin coater speed is set to low speed 1000 r / min and high speed 1500 r / min;
[0097] Step six: Place the coated glass slide into a drying oven for curing. After curing, a PDMS-CNTs-MXene composite film of uniform thickness is obtained. The curing temperature is 80℃, and the curing time is 3 hours.
[0098] Step 7: The PDMS-CNTs-MXene composite film is transferred into the cavity of a magnetron sputtering coating machine, and an aluminum target is installed. An Al film is deposited using DC magnetron sputtering. The cavity vacuum is 5 × 10⁻⁴ Pa, the working vacuum is 0.5 Pa, the sputtering power of the aluminum target is 70 W, the bias voltage is 100 V, and the sputtering time is 15 min. After cooling to room temperature, an Al / PDMS-CNTs-MXene bilayer film is obtained.
[0099] Step 8: Peel the Al / PDMS-CNTs-MXene bilayer film from the glass plate, flip it over so that the PDMS-CNTs-MXene layer faces upward and is attached to the glass plate. Then, perform UV surface modification treatment on the PDMS-CNTs-MXene layer to form a SiOx layer, and obtain the Al / PDMS-CNTs-MXene / SiOx composite film.
[0100] Step nine involves cutting the Al / PDMS-CNTs-MXene / SiOx composite film into a specific pattern using a laser micromachining device. Cutting it to 12mm × 4.8mm yields a bidirectional reversible deformation actuator; when placed in anhydrous ethanol solution, the deformation result is as follows... Figure 4 As shown in the left figure, when xylene organic solvent is continuously added, the composite membrane will return to its initial flat state and then slowly deform in the opposite direction. Then, after anhydrous ethanol is continuously added again, the composite membrane returns to its flat state and deforms again as shown in the left figure. Figure 4 The image on the right.
[0101] The above description is merely a preferred embodiment of the present invention. However, the scope of protection of the present invention is not limited thereto. Any equivalent substitutions or modifications made by those skilled in the art within the scope of the technology disclosed in the present invention should be covered within the scope of protection of the present invention.
Claims
1. A method for preparing a composite film having bidirectional reversible deformation and liquid-solid friction nanogeneration function, characterized in that, comprising the following steps: Step (1), preparing a CNTs-Mxene mixed solution The CNTs suspension and the MXene dispersion liquid are mixed and uniformly dispersed to obtain a CNTs-Mxene mixed solution. Step (2), preparing a PDMS-CNTs-MXene mixed solution The PDMS precursor is uniformly mixed with the CNTs-Mxene mixed solution prepared in step (1), and then a curing agent is added, and vacuum degassing treatment is performed to obtain a uniformly dispersed PDMS-CNTs-MXene mixed solution. Step (3), preparing a PDMS-CNTs-MXene film The PDMS-CNTs-MXene mixed solution prepared in step (2) is poured onto a glass sheet to uniformly distribute the surface solution, and after curing, a PDMS-CNTs-MXene film with uniform thickness is obtained. Step (4), preparing an Al / PDMS-CNTs-MXene double-layer film An Al layer is deposited on the surface of the PDMS-CNTs-MXene film prepared in step (3) by direct current magnetron sputtering to obtain an Al / PDMS-CNTs-MXene double-layer film. Step (5), preparing an Al / PDMS-CNTs-MXene / SiOx composite film The Al / PDMS-CNTs-MXene double-layer film prepared in step (4) is peeled off from the glass sheet and turned over, and the PDMS-CNTs-MXene layer is subjected to ultraviolet surface modification treatment to form a SiOx layer, and finally an Al / PDMS-CNTs-MXene / SiOx composite film is obtained.
2. The method for preparing a composite film with bidirectional reversible deformation and liquid-solid friction nanogeneration function according to claim 1, characterized in that, In step (1), the mass fraction ratio of the CNTs suspension and the MXene dispersion liquid is 20:
1.
3. The method of claim 1, wherein the method is characterized by: In step (2), the volume ratio of the PDMS precursor, the CNTs-Mxene mixed solution and the curing agent is 10:3:0.
1.
4. The method of claim 1, wherein the method is characterized by: In step (4), the working conditions of direct current magnetron sputtering are as follows: the cavity vacuum degree is 5x10 -4 Pa, the working vacuum degree is 0.5 Pa, the sputtering power of the aluminum target is 70 W, the bias voltage is 100 V, and the sputtering time is 15 min.
5. The method of claim 1-4, wherein the method is characterized by, In step (5), the ultraviolet modification treatment time is 25 min.
6. A composite film having bidirectional reversible deformation and liquid-solid friction nanogeneration function, characterized in that, Prepared by the preparation method of any one of claims 1-5.
7. A method for preparing a driver with bidirectional reversible deformation and liquid-solid friction nanogeneration function, characterized in that, A laser micro-machining device is used to cut the composite film of claim 6 into a specific pattern; When the length is much greater than the width, which is much greater than the height, a driver with chiral deformation and liquid-solid friction nanogeneration function is obtained, wherein the chiral deformation is a monostable deformation; When the length and the width are comparable, a bidirectional reversible deformation driver can be obtained.
8. The preparation method of the driver with bidirectional reversible deformation and liquid-solid friction nanogeneration function according to claim 7, characterized in that, The length and width dimensions of the driver with bidirectional reversible deformation are 12mm x 4.8mm.
9. The preparation method of the driver with bidirectional reversible deformation and liquid-solid friction nanogeneration function according to claim 7 or 8, characterized in that, The chiral deformation is a monostable deformation driven by an organic solvent; Bidirectional reversible deformation realizes reversible conversion of two forms through alternating regulation of different organic solvents.
10. A driver, characterized by Prepared by the preparation method of any one of claims 7-9 for a driver with bidirectional reversible deformation and liquid-solid friction nanogeneration function. Prepared by the preparation method of any one of claims 1-5.