Method and system for determining first-layer coating condition of end face of laser and storage medium

Abstract

The embodiment of the invention discloses a method and system for determining the first-layer coating condition of the end face of a laser device and a storage medium, and the method comprises the steps: carrying out the first-layer coating of the end face of the laser device at a preset coating temperature through different ion source conditions, and carrying out the second-layer coating of the end face of the laser device; constructing a first relation model of the corresponding relation between the ion source condition and the film refractive index; selecting an ion source condition meeting a layer coating refractive index requirement from the first relation model, carrying out coating with different thicknesses, and constructing a second relation model of a corresponding relation between the coating thickness and the film stress; and finally, based on the second relation model, determining the first-layer coating condition of the laser end face. According to the method, the obtained first-layer coating conditions of the end face of the laser comprise the proper ion source condition and the film layer thickness, the requirements of the film layer for the refractive index and the stress can be met, various feasible technical schemes can be produced, and a basis is provided for determining the optimal conditions of the first-layer coating of the end face of the laser.

Description

Technical Field

[0001] This application relates to the field of laser technology, and in particular to a method, system, and storage medium for determining the conditions of the first layer coating on the end face of a laser. Background Technology

[0002] The ion source conditions for the first layer of laser end-face coating have a significant impact on laser performance, affecting the quality of the coating, optical performance, thermal stability, and reliability. Excessive ion energy or uneven beam current can lead to excessive internal stress or uneven thickness within the coating, resulting in cracking or peeling and reducing the laser's lifespan. Traditional technologies primarily improve the quality of the first layer of laser end-face coating by optimizing the process flow and selecting coating materials. This includes choosing suitable coating materials based on laser wavelength and performance requirements, such as silicon dioxide (low refractive index) or silicon nitride (high refractive index), and optimizing the annealing process. However, these adjustments have limitations and cannot optimize the first layer of laser end-face coating from a holistic process perspective. Summary of the Invention

[0003] The summary section introduces a series of simplified concepts, which will be further explained in detail in the detailed description section. This part of the invention is not intended to limit the key features and essential technical features of the claimed technical solution, nor is it intended to determine the scope of protection of the claimed technical solution.

[0004] The present invention aims to solve at least one of the technical problems existing in the prior art or related art.

[0005] Therefore, a first aspect of the present invention provides a method for determining the conditions of the first layer coating on the end face of a laser.

[0006] A second aspect of the present invention provides a system for the first layer coating conditions of a laser end face.

[0007] A third aspect of the present invention provides a computer-readable storage medium.

[0008] In view of this, a method for determining the first-layer coating conditions of a laser end face is proposed according to a first aspect of the embodiments of this application, comprising:

[0009] At a preset coating temperature, the first layer of coating is applied to the laser end face under different ion source conditions, and a first relationship model is constructed to establish the relationship between ion source conditions and film refractive index.

[0010] In the first relational model, ion source conditions that meet the refractive index requirements of the coating are selected, and coatings of different thicknesses are carried out to construct a second relational model of the relationship between coating thickness and film stress.

[0011] Based on the second relationship model, the conditions for the first layer of coating on the laser end face are determined.

[0012] In one feasible implementation, the method for determining the conditions of the first layer coating on the laser end face further includes:

[0013] For ion source coating equipment, the laser is coated with the first layer at different cavity heating temperatures;

[0014] Obtain the correspondence between the refractive index of the first layer of coating and the cavity heating temperature, and determine the preset coating temperature based on the correspondence.

[0015] In one feasible implementation, the first relationship model between ion source conditions and film refractive index includes the following formula:

[0016]

[0017] Among them, E e E represents the relationship between the anode voltage and the kinetic energy of electrons in the ion source. e ≈0.1V a V a I is the anode voltage. a n is the anode current. e This represents the electron flux density.

[0018] In one feasible implementation, the second relationship model between coating thickness and film stress includes the following formula:

[0019]

[0020] Among them, t f t represents the substrate thickness. s E represents the coating thickness. s Young's modulus based on v s R is the Poisson's ratio of the substrate, R is the radius of curvature of the substrate before deposition, R0 is the radius of curvature of the substrate after deposition, and σ is the base radius of curvature. f This refers to the stress in the membrane layer.

[0021] In one feasible implementation, the step of determining the first layer coating conditions of the laser end face based on the second relational model includes:

[0022] In the second relationship model, a proposed coating scheme that meets the stress requirements of the film layer is selected;

[0023] The laser bar is coated based on the proposed coating scheme;

[0024] The performance of the coated laser Bar is tested, and the proposed coating scheme that meets the performance test requirements is taken as the qualified scheme for the first layer coating condition of the laser end face.

[0025] In one feasible implementation, the step of performing performance testing on the coated laser Bar and selecting the proposed coating scheme that meets the performance testing requirements as the qualified scheme for the first layer coating condition of the laser end face includes:

[0026] After testing the bar bar using a bar bar testing machine, an optoelectronic characteristic diagram is generated.

[0027] Products whose threshold current change rate in the photoelectric characteristic diagram is less than or equal to the first threshold and whose slope effect change rate is less than or equal to the first threshold are subjected to aging test, electron beam detection and reliability qualification test in sequence.

[0028] The proposed coating scheme corresponding to the product that meets the aging test, the electron beam detection and the reliability qualification test shall be the qualified scheme for the first layer coating condition of the laser end face.

[0029] According to a second aspect of the embodiments of this application, a system for the first layer coating conditions of a laser end face is provided, comprising:

[0030] The first building unit is used to perform the first layer coating on the laser end face under different ion source conditions at a preset coating temperature, and to build a first relationship model of the correspondence between ion source conditions and film refractive index.

[0031] The second building unit is used to select ion source conditions that meet the refractive index requirements of the coating layer in the first relationship model, perform coating of different thicknesses, and build a second relationship model of the relationship between coating thickness and film stress.

[0032] The determining unit is used to determine the first layer coating conditions of the laser end face based on the second relationship model.

[0033] In one feasible implementation, the step of determining the first layer coating conditions of the laser end face based on the second relational model includes:

[0034] In the second relationship model, a proposed coating scheme that meets the stress requirements of the film layer is selected;

[0035] The laser bar is coated based on the proposed coating scheme;

[0036] The performance of the coated laser Bar is tested, and the proposed coating scheme that meets the performance test requirements is taken as the qualified scheme for the first layer coating condition of the laser end face.

[0037] In one feasible implementation, the step of performing performance testing on the coated laser Bar and selecting the proposed coating scheme that meets the performance testing requirements as the qualified scheme for the first layer coating condition of the laser end face includes:

[0038] After testing the bar bar using a bar bar testing machine, an optoelectronic characteristic diagram is generated.

[0039] Products whose threshold current change rate in the photoelectric characteristic diagram is less than or equal to the first threshold and whose slope effect change rate is less than or equal to the first threshold are subjected to aging test, electron beam detection and reliability qualification test in sequence.

[0040] The proposed coating scheme corresponding to the product that meets the aging test, the electron beam detection and the reliability qualification test shall be the qualified scheme for the first layer coating condition of the laser end face.

[0041] A computer-readable storage medium is provided according to a third aspect of the embodiments of this application.

[0042] The computer-readable storage medium stores a computer program that implements the method for determining the first layer coating conditions of the laser end face as described in any of the above technical solutions.

[0043] Compared with the prior art, the present invention has at least the following beneficial effects:

[0044] The method for determining the first-layer coating conditions of a laser end face provided in this application firstly performs the first-layer coating of the laser end face under a preset coating temperature and different ion source conditions, constructing a first relationship model between the ion source conditions and the refractive index of the film layer; then, based on the first relationship model, ion source conditions that meet the refractive index requirements of the coating layer are selected, and coatings of different thicknesses are performed, constructing a second relationship model between the coating thickness and the stress of the film layer; finally, based on the second relationship model, the first-layer coating conditions of the laser end face are determined. This method ensures that the obtained first-layer coating conditions of the laser end face include appropriate ion source conditions and film thickness, meets the requirements of the film layer for refractive index and stress, and can produce a variety of feasible technical solutions, providing a basis for determining the optimal conditions for the first-layer coating of the laser end face.

[0045] The above description is merely an overview of the technical solution of the present invention. In order to better understand the technical means of the present invention and to implement it in accordance with the contents of the specification, and in order to make the above and other objects, features and advantages of the present invention more apparent and understandable, specific embodiments of the present invention are described below. Attached Figure Description

[0046] Various other advantages and benefits will become apparent to those skilled in the art upon reading the following detailed description of preferred embodiments. The accompanying drawings are for illustrative purposes only and are not intended to limit the scope of this application. Furthermore, the same reference numerals denote the same parts throughout the drawings. In the drawings:

[0047] Figure 1 A schematic flowchart illustrating the steps of a method for determining the first layer coating conditions of a laser end face according to an embodiment of this application;

[0048] Figure 2 A schematic block diagram of a system for determining the first layer coating conditions of a laser end face according to an embodiment of this application;

[0049] Figure 3 A schematic block diagram of a system for determining a computer-readable storage medium according to an embodiment of this application. Detailed Implementation

[0050] The following description provides numerous specific details to offer a more thorough understanding of the technical solutions provided by this invention. However, it will be apparent to those skilled in the art that the technical solutions provided by this invention can be implemented without one or more of these details.

[0051] It should be noted that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to limit the scope of exemplary embodiments according to the invention. As used herein, the singular form is intended to include the plural form as well, unless the context clearly indicates otherwise. Furthermore, it should be understood that when the terms “comprising” and / or “including” are used in this specification, they indicate the presence of the stated features, integrals, steps, operations, elements, and / or components, but do not exclude the presence or addition of one or more other features, integrals, steps, operations, elements, components, and / or combinations thereof.

[0052] Exemplary embodiments according to the present invention will now be described in more detail with reference to the accompanying drawings. However, these exemplary embodiments may be implemented in many different forms and should not be construed as being limited to the embodiments set forth herein. It should be understood that these embodiments are provided so that the disclosure of the invention is thorough and complete, and that the concept of these exemplary embodiments is fully conveyed to those skilled in the art.

[0053] like Figure 1 As shown, a method for determining the first-layer coating conditions of a laser end face is proposed according to a first aspect of the embodiments of this application, comprising:

[0054] Step 101: At a preset coating temperature, perform the first layer coating on the laser end face under different ion source conditions, and construct the first relationship model between the ion source conditions and the refractive index of the film layer.

[0055] Step 102: In the first relational model, select ion source conditions that meet the refractive index requirements of the coating layer, perform coatings of different thicknesses, and construct a second relational model that corresponds to the coating thickness and the film stress.

[0056] Step 103: Determine the first layer coating conditions on the laser end face based on the second relational model.

[0057] The method for determining the first-layer coating conditions of a laser end face provided in this application firstly performs the first-layer coating of the laser end face under a preset coating temperature and different ion source conditions, constructing a first relationship model between the ion source conditions and the refractive index of the film layer; then, based on the first relationship model, ion source conditions that meet the refractive index requirements of the coating layer are selected, and coatings of different thicknesses are performed, constructing a second relationship model between the coating thickness and the stress of the film layer; finally, based on the second relationship model, the first-layer coating conditions of the laser end face are determined. This method ensures that the obtained first-layer coating conditions of the laser end face include appropriate ion source conditions and film thickness, meets the requirements of the film layer for refractive index and stress, and can produce a variety of feasible technical solutions, providing a basis for determining the optimal conditions for the first-layer coating of the laser end face.

[0058] The laser fabricated under the optimal conditions for the first layer coating on the laser end face provided in this application can meet the laser's requirements for refractive index and film thickness. Ion source conditions (such as gas type, pressure, and power) affect the deposition rate and stoichiometry of the coating material, thereby changing the refractive index and extinction coefficient of the film. This ensures the laser's output power and beam quality. Controlling the film thickness ensures the consistency of laser operation. Maintaining the stress in the laser film can improve the laser's lifespan.

[0059] In one feasible implementation, the method for determining the first-layer coating conditions of the laser end face further includes: for the ion source coating equipment, performing the first-layer coating on the laser at different cavity heating temperatures; obtaining the correspondence between the refractive index of the first-layer coating and the cavity heating temperature, and determining the preset coating temperature based on the correspondence.

[0060] This technical solution further provides a method for determining the preset coating temperature. First, for the ion source coating equipment, the laser is coated with the first layer at different cavity heating temperatures. Then, the correspondence between the refractive index of the first layer coating and the cavity heating temperature is obtained. Based on the correspondence, the preset coating temperature is determined. This can eliminate cavity temperature interference and ensure the reliability of the preset coating temperature, thereby making the determination of the first relationship model and the second relationship model more reliable.

[0061] In one feasible implementation, the first relationship model between ion source conditions and film refractive index includes the following formula:

[0062]

[0063] Among them, E e E represents the relationship between the anode voltage and the kinetic energy of electrons in the ion source. e≈0.1V a V a I is the anode voltage. a n is the anode current. e This represents the electron flux density.

[0064] This technical solution further provides a first relational model, which can include the aforementioned formula. By determining this formula, the anode current in the ion source conditions can be calculated, allowing for the acquisition of multiple ion source conditions that meet the laser's requirements for film refractive index. This facilitates laser production and fabrication, and improves the reliability of laser operation. It is understood that the anode current is positively correlated with the electron flux density of the ion source; however, a high electron flux density can induce surface sputtering, increasing surface roughness and consequently reducing the material's refractive index. The aforementioned formula allows for the determination of the ion source's operating parameters, ensuring the required refractive index is met.

[0065] In one feasible implementation, the second relationship model between coating thickness and film stress includes the following formula:

[0066]

[0067] Among them, t f t represents the substrate thickness. s E represents the coating thickness. s Young's modulus based on v s R is the Poisson's ratio of the substrate, R is the radius of curvature of the substrate before deposition, R0 is the radius of curvature of the substrate after deposition, and σ is the base radius of curvature. f This refers to the stress in the membrane layer.

[0068] In this technical solution, a specific style of the second relational model is further provided. By determining the above formula, the coating thickness can be calculated. The second relational model is derived based on the first relational model. Based on this, the laser film prepared by the second relational model can take into account the requirements of refractive index and film stress, and can ensure the quality of the laser.

[0069] In one feasible implementation, the step of determining the first layer coating conditions of the laser end face based on the second relational model includes: selecting a proposed coating scheme that meets the film stress requirements in the second relational model; coating the laser bar based on the proposed coating scheme; performing performance testing on the coated laser bar; and taking the proposed coating scheme that meets the performance testing requirements as the qualified scheme for the first layer coating conditions of the laser end face.

[0070] In this technical solution, after defining the second relationship model, multiple proposed coating schemes that meet the film stress requirements can be obtained from the second relationship model. Then, based on the selected proposed coating schemes that meet the film stress requirements, actual processing can be carried out to coat the laser bar. Afterwards, the performance of the coated laser bar is tested, and the proposed coating scheme that meets the performance test requirements can be regarded as the qualified scheme for the first layer coating conditions of the laser end face. Among the multiple qualified schemes, the scheme that is easy to implement and has low cost is the optimal condition for the first layer coating of the laser end face, which facilitates the determination of the laser manufacturing process.

[0071] In one feasible implementation, the steps of performing performance tests on the coated laser bar and selecting the proposed coating scheme that meets the performance test requirements as the qualified scheme for the first layer coating condition of the laser end face include: using a bar bar testing machine to test the bar bar and then generating a photoelectric characteristic diagram; subjecting products whose threshold current change rate in the photoelectric characteristic diagram is less than or equal to a first threshold and whose slope effect change rate is less than or equal to the first threshold to aging tests, electron beam detection, and reliability qualification tests in sequence; and selecting the proposed coating scheme corresponding to the products that meet the aging test, electron beam detection, and reliability qualification test as the qualified scheme for the first layer coating condition of the laser end face.

[0072] This technical solution further provides specific steps for performance testing of the coated laser bar. A photoelectric characteristic map can be constructed using a bar bar tester. Based on this map, feasible solutions are then selected. Finally, aging tests, electron beam tests, and reliability assessment tests are conducted sequentially on the product to determine a qualified solution. Products prepared using this qualified solution can meet refractive index requirements, stress requirements, and the requirements of the bar bar tester, aging tests, electron beam tests, and reliability assessment tests, thereby further improving the quality of the laser.

[0073] Example

[0074] This application provides a method for determining the conditions of the first layer coating on the end face of a laser, including the following steps:

[0075] Step 1: Take several 2-inch Si wafers and conduct the first layer film experiment at a fixed coating temperature T. By adjusting the ion source anode current, anode voltage, process gas and gas flow rate, establish a model of the relationship between ion source conditions and film refractive index.

[0076] Among them, the relationship between the anode voltage and the kinetic energy of the ion source electrons is known to be E. e ≈0.1V a Approximately 10% of the anode voltage is converted into electron kinetic energy, thus a minimum anode voltage can be derived from practical experience. A model relating electron kinetic energy and anode current can then be established as follows: n_e is the electron flux density. With n_e constant, the qualification conditions of the ion source for the first layer membrane are calculated, and the first relational model is constructed.

[0077] Step 2: Take several 2-inch Si wafers and use Essential Macleod to design the initial film thickness. Deposit the film using the obtained initial ion source conditions, ensuring the test stress f ∈ [-150, -100]. Establish the formula for the relationship between film thickness and stress:

[0078]

[0079] Among them, t f t represents the substrate thickness. s E represents the coating thickness. s Young's modulus based on v s R is the Poisson's ratio of the substrate, R is the radius of curvature of the substrate before deposition, R0 is the radius of curvature of the substrate after deposition, and σ is the base radius of curvature. f The stress is the membrane layer stress. Based on the stress requirements, the required membrane thickness can be calculated, and a second relational model can be constructed.

[0080] Step 3: Take several laser bar strips, and perform coating using the calculated first-layer ion source conditions and film thickness. After coating, use a bar strip testing machine to test the bar strips and then generate relevant photoelectric characteristic diagrams. The Ith and SE values ​​after coating should be ±10%.

[0081] Step 4: Place the qualified chip in the aging chamber for a 24-hour burn-in test. After the qualified chip undergoes an EBI test for 48 hours, it undergoes an ALT test for 500 hours. If the test is successful, it represents the optimal conditions for the first layer of coating ion source on the laser end face.

[0082] The specific test parameters include: placing qualified chips in an aging chamber for burn-in testing at 100℃, 400mA, and 10 hours, with requirements of -15% ≤ ΔIth ≤ 6%, -10% ≤ ΔSE ≤ 10%, and -5% ≤ ΔVf ≤ 5%. Qualified chips then undergo ALT testing at 100℃, 400mA, and 168 hours, with a requirement of ΔIth ≤ 10%. These conditions represent the optimal conditions for the first layer of ion source coating on the laser's end face. Here, ΔIth is the rate of change of current, ΔSE is the rate of change of slope efficiency, and ΔVf is the rate of change of operating voltage.

[0083] like Figure 2As shown, according to a second aspect of the embodiments of this application, a system for the first-layer coating conditions of a laser end face is proposed, comprising: a first construction unit 201, which is used to perform the first-layer coating of the laser end face under different ion source conditions at a preset coating temperature, and construct a first relationship model of the correspondence between ion source conditions and film refractive index; a second construction unit 202, which is used to select ion source conditions that meet the refractive index requirements of the first layer coating under the first relationship model, and perform coating of different thicknesses, and construct a second relationship model of the correspondence between coating thickness and film stress; and a determination unit 203, which is used to determine the first-layer coating conditions of the laser end face based on the second relationship model.

[0084] The system for determining the first-layer coating conditions of a laser end face provided in this application includes a first construction unit 201, a second construction unit 202, and a determination unit 203. Based on this, the first construction unit 201 firstly performs first-layer coating of the laser end face under a preset coating temperature and different ion source conditions, constructing a first relationship model between the ion source conditions and the film refractive index. Then, the second construction unit 202 selects ion source conditions that meet the refractive index requirements of the first coating layer from the first relationship model, performing coatings of different thicknesses, constructing a second relationship model between the coating thickness and the film stress. Finally, the determination unit 203 determines the first-layer coating conditions of the laser end face based on the second relationship model. This ensures that the obtained first-layer coating conditions of the laser end face include appropriate ion source conditions and film thickness, meeting the film's requirements for refractive index and stress, and producing multiple feasible technical solutions, providing a basis for determining the optimal conditions for the first-layer coating of the laser end face.

[0085] In one feasible implementation, the first relationship model between ion source conditions and film refractive index includes the following formula:

[0086]

[0087] Among them, E e E represents the relationship between the anode voltage and the kinetic energy of electrons in the ion source. e ≈0.1V a V a I is the anode voltage. a n is the anode current. e This represents the electron flux density.

[0088] In this technical solution, a first relational model is further provided. The first relational model may include the above formula. By determining the above formula, the anode current in the ion source conditions can be calculated, and multiple ion source conditions that can meet the laser's requirements for the film refractive index can be obtained. This facilitates the production, processing and fabrication of the laser and can improve the reliability of the laser's operation.

[0089] In one feasible implementation, the second relationship model between coating thickness and film stress includes the following formula:

[0090]

[0091] Among them, t f t represents the substrate thickness. s E represents the coating thickness. s Young's modulus based on v s R is the Poisson's ratio of the substrate, R is the radius of curvature of the substrate before deposition, R0 is the radius of curvature of the substrate after deposition, and σ is the base radius of curvature. f This refers to the stress in the membrane layer.

[0092] In this technical solution, a specific style of the second relational model is further provided. By determining the above formula, the coating thickness can be calculated. The second relational model is derived based on the first relational model. Based on this, the laser film prepared by the second relational model can take into account the requirements of refractive index and film stress, and can ensure the quality of the laser.

[0093] In one feasible implementation, the step of determining the first layer coating conditions of the laser end face based on the second relational model includes: selecting a proposed coating scheme that meets the film stress requirements in the second relational model; coating the laser bar based on the proposed coating scheme; performing performance testing on the coated laser bar; and taking the proposed coating scheme that meets the performance testing requirements as the qualified scheme for the first layer coating conditions of the laser end face.

[0094] In one feasible implementation, the steps of performing performance tests on the coated laser bar and selecting the proposed coating scheme that meets the performance test requirements as the qualified scheme for the first layer coating condition of the laser end face include: using a bar bar testing machine to test the bar bar and then generating a photoelectric characteristic diagram; subjecting products whose threshold current change rate in the photoelectric characteristic diagram is less than or equal to a first threshold and whose slope effect change rate is less than or equal to the first threshold to aging tests, electron beam detection, and reliability qualification tests in sequence; and selecting the proposed coating scheme corresponding to the products that meet the aging test, electron beam detection, and reliability qualification test as the qualified scheme for the first layer coating condition of the laser end face.

[0095] This technical solution further provides specific steps for performance testing of the coated laser bar. A photoelectric characteristic map can be constructed using a bar bar tester. Based on this map, feasible solutions are then selected. Finally, aging tests, electron beam tests, and reliability assessment tests are conducted sequentially on the product to determine a qualified solution. Products prepared using this qualified solution can meet refractive index requirements, stress requirements, and the requirements of the bar bar tester, aging tests, electron beam tests, and reliability assessment tests, thereby further improving the quality of the laser.

[0096] In this technical solution, after defining the second relationship model, multiple proposed coating schemes that meet the film stress requirements can be obtained from the second relationship model. Then, based on the selected proposed coating schemes that meet the film stress requirements, actual processing can be carried out to coat the laser bar. Afterwards, the performance of the coated laser bar is tested, and the proposed coating scheme that meets the performance test requirements can be regarded as the qualified scheme for the first layer coating conditions of the laser end face. Among the multiple qualified schemes, the scheme that is easy to implement and has low cost is the optimal condition for the first layer coating of the laser end face, which facilitates the determination of the laser manufacturing process.

[0097] like Figure 3 As shown, according to a third aspect of the embodiments of this application, a computer-readable storage medium 301 is provided, which stores a computer program 302 to implement a method for determining the first layer coating conditions of a laser end face as described in any of the above technical solutions.

[0098] The computer-readable storage medium 301 provided in this application embodiment implements the method for determining the first layer coating conditions of the laser end face as described in any of the above technical solutions. Therefore, the computer-readable storage medium 301 possesses all the beneficial effects of the method for determining the first layer coating conditions of the laser end face as described in the above technical solutions.

[0099] The computer-readable storage medium 301 provided in this application embodiment, when executing the computer program 302, firstly performs the first-layer coating of the laser end face under a preset coating temperature and different ion source conditions, constructing a first relationship model of the correspondence between ion source conditions and film refractive index; then, based on the first relationship model, selects ion source conditions that meet the refractive index requirements of the coating layer, performs coatings of different thicknesses, and constructs a second relationship model of the correspondence between coating thickness and film stress; finally, based on the second relationship model, determines the first-layer coating conditions of the laser end face. This ensures that the obtained first-layer coating conditions of the laser end face include appropriate ion source conditions and film thickness, meeting the film's requirements for refractive index and stress, and generating multiple feasible technical solutions, providing a basis for determining the optimal conditions for the first-layer coating of the laser end face.

[0100] Based on this understanding, the technical solution of this application can be embodied in the form of a software product. This software product can be stored in a non-volatile storage medium (such as a CD-ROM, USB flash drive, or portable hard drive), and includes several instructions to cause a computer device (such as a personal computer, server, or network device) to execute the methods described in the various implementation scenarios of this application.

[0101] The aforementioned storage medium may also include an operating system and a network communication module. The operating system is a program that manages the hardware and software resources of the physical device described above, supporting the operation of information processing programs and other software and / or programs. The network communication module is used to enable communication between the various components within the storage medium, as well as communication with other hardware and software in the information processing physical device.

[0102] Through the above description of the embodiments, those skilled in the art can clearly understand that this application can be implemented by means of software plus necessary general-purpose hardware platform, or it can be implemented by hardware.

[0103] This application is described with reference to flowchart illustrations and / or block diagrams of methods, apparatus (systems), and computer program products according to embodiments of this application. It will be understood that each block of the flowchart illustrations and / or block diagrams, and combinations of blocks in the flowchart illustrations and / or block diagrams, can be implemented by computer program instructions. These computer program instructions can be provided to a processor of a general-purpose computer, special-purpose computer, embedded computer, or other programmable data processing apparatus to produce a machine, such that the instructions, which execute via the processor of the computer or other programmable data processing apparatus, create a machine for implementing the flowchart illustrations. Figure 1 One or more processes and / or boxes Figure 1 A device that provides the functions specified in one or more boxes.

[0104] In this invention, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance; the term "multiple" refers to two or more unless otherwise explicitly defined. The terms "install," "connect," "link," and "fix" should be interpreted broadly. For example, "connect" can be a fixed connection, a detachable connection, or an integral connection; "link" can be a direct connection or an indirect connection through an intermediate medium. Those skilled in the art can understand the specific meaning of the above terms in this invention according to the specific circumstances.

[0105] In the description of this invention, it should be understood that the terms "upper," "lower," "left," "right," "front," "rear," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the device or unit referred to must have a specific orientation or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this invention.

[0106] In the description of this specification, the terms "one embodiment," "some embodiments," "specific embodiment," etc., refer to a specific feature, structure, material, or characteristic described in connection with that embodiment or example, which is included in at least one embodiment or example of the present invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.

[0107] The above are merely preferred embodiments of the present invention and are not intended to limit the present invention. Various modifications and variations can be made to the present invention by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the scope of protection of the present invention.

Claims

1. A method for determining the conditions of the first layer coating on the end face of a laser, characterized in that, include: At a preset coating temperature, the first layer of coating is applied to the laser end face under different ion source conditions, and a first relationship model is constructed to establish the relationship between ion source conditions and film refractive index. In the first relational model, ion source conditions that meet the refractive index requirements of the coating are selected, and coatings of different thicknesses are carried out to construct a second relational model of the relationship between coating thickness and film stress. Based on the second relationship model, the conditions for the first layer of coating on the laser end face are determined.

2. The method for determining the first-layer coating conditions of the laser end face according to claim 1, characterized in that, Also includes: For ion source coating equipment, the laser is coated with the first layer at different cavity heating temperatures; Obtain the correspondence between the refractive index of the first layer of coating and the cavity heating temperature, and determine the preset coating temperature based on the correspondence.

3. The method for determining the first layer coating conditions of the laser end face according to claim 1, characterized in that, The first relationship model between ion source conditions and film refractive index includes the following formula: Among them, E e E represents the relationship between the anode voltage and the kinetic energy of electrons in the ion source. e ≈0.1V a V a I is the anode voltage. a n is the anode current. e This represents the electron flux density.

4. The method for determining the conditions of the first layer coating on the laser end face according to claim 1, characterized in that, The second relationship model between coating thickness and film stress includes the following formula: Among them, t f t represents the substrate thickness. s E represents the coating thickness. s Young's modulus based on v s R is the Poisson's ratio of the substrate, R is the radius of curvature of the substrate before deposition, R0 is the radius of curvature of the substrate after deposition, and σ is the base radius of curvature. f This refers to the stress in the membrane layer.

5. The method for determining the first layer coating conditions of the laser end face according to claim 1, characterized in that, The step of determining the first layer coating conditions of the laser end face based on the second relationship model includes: In the second relationship model, a proposed coating scheme that meets the stress requirements of the film layer is selected; The laser bar is coated based on the proposed coating scheme; The performance of the coated laser Bar is tested, and the proposed coating scheme that meets the performance test requirements is taken as the qualified scheme for the first layer coating condition of the laser end face.

6. The method for determining the first layer coating conditions of the laser end face according to claim 5, characterized in that, The steps of performing performance testing on the coated laser Bar and selecting the proposed coating scheme that meets the performance testing requirements as the qualified scheme for the first layer coating condition of the laser end face include: After testing the bar bar using a bar bar testing machine, an optoelectronic characteristic diagram is generated. Products whose threshold current change rate in the photoelectric characteristic diagram is less than or equal to the first threshold and whose slope effect change rate is less than or equal to the first threshold are subjected to aging test, electron beam detection and reliability qualification test in sequence. The proposed coating scheme corresponding to the product that meets the aging test, the electron beam detection and the reliability qualification test shall be the qualified scheme for the first layer coating condition of the laser end face.

7. A system for the first-layer coating conditions of a laser end face, characterized in that, include: The first building unit is used to perform the first layer coating on the laser end face under different ion source conditions at a preset coating temperature, and to build a first relationship model of the correspondence between ion source conditions and film refractive index. The second building unit is used to select ion source conditions that meet the refractive index requirements of the coating layer in the first relationship model, perform coating of different thicknesses, and build a second relationship model of the relationship between coating thickness and film stress. The determining unit is used to determine the first layer coating conditions of the laser end face based on the second relationship model.

8. The system for the first layer coating conditions of the laser end face according to claim 7, characterized in that, The step of determining the first layer coating conditions of the laser end face based on the second relationship model includes: In the second relationship model, a proposed coating scheme that meets the stress requirements of the film layer is selected; The laser bar is coated based on the proposed coating scheme; The performance of the coated laser Bar is tested, and the proposed coating scheme that meets the performance test requirements is taken as the qualified scheme for the first layer coating condition of the laser end face.

9. The system for the first layer coating conditions of the laser end face according to claim 8, characterized in that, The steps of performing performance testing on the coated laser Bar and selecting the proposed coating scheme that meets the performance testing requirements as the qualified scheme for the first layer coating condition of the laser end face include: After testing the bar bar using a bar bar testing machine, an optoelectronic characteristic diagram is generated. Products whose threshold current change rate in the photoelectric characteristic diagram is less than or equal to the first threshold and whose slope effect change rate is less than or equal to the first threshold are subjected to aging test, electron beam detection and reliability qualification test in sequence. The proposed coating scheme corresponding to the product that meets the aging test, the electron beam detection and the reliability qualification test shall be the qualified scheme for the first layer coating condition of the laser end face.

10. A computer-readable storage medium, characterized in that, The computer-readable storage medium stores a computer program that implements the method for determining the first layer coating conditions of the laser end face as described in any one of claims 1 to 6.

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