Vibration damping device and vibration damping method

Abstract

The invention relates to vibration reduction equipment and a vibration reduction method, the vibration reduction equipment comprises at least one vibration reduction supporting leg, and each vibration reduction supporting leg comprises a vibration damper, an external hanging device used for outputting force, a top adapter plate and a bottom adapter plate; the shock absorber comprises a bottom plate, a top plate and a shock absorption functional assembly, the bottom plate and the top plate are oppositely arranged in a spaced mode, the shock absorption functional assembly is arranged between the bottom plate and the top plate, and in each shock absorption supporting leg, a part of structure of the external hanging device is connected with the top plate of the shock absorber through a top adapter plate. And the other part of the structure of the external hanging device is connected with a bottom plate of the shock absorber through a bottom adapter plate. In this way, by additionally arranging the external hanging device in the vibration reduction supporting leg, the problem that due to insufficient output of a vibration damper, a vibration reduction system cannot meet the requirement for large output while high precision of vibration reduction of existing vibration reduction equipment is guaranteed can be solved.

Description

Technical Field

[0001] This application relates to the field of precision vibration reduction technology, specifically to a vibration reduction device and a vibration reduction method. Background Technology

[0002] A high-performance active vibration reduction control system is a technology designed to effectively reduce or eliminate vibration through real-time detection and dynamic adjustment. This system is suitable for vibration-sensitive applications, such as vibration-resistant designs for precision manufacturing equipment and optical instruments.

[0003] However, existing active vibration reduction control systems cannot simultaneously meet the requirements of high-precision vibration reduction and high output, which limits their application scenarios. Summary of the Invention

[0004] The purpose of this application is to provide a vibration reduction device and a vibration reduction method to solve the problem that existing active vibration reduction control systems cannot simultaneously meet the requirements of high-precision vibration reduction and high output, thereby expanding their application scenarios.

[0005] This application provides a vibration damping device, which includes at least one vibration damping support leg. Each vibration damping support leg includes a vibration damper, an external device for outputting force, a top adapter plate, and a bottom adapter plate. The vibration damper includes a bottom plate and a top plate spaced apart from each other, and a vibration damping functional component disposed between the bottom plate and the top plate. In each vibration damping support leg, a portion of the external device is connected to the top plate of the vibration damper via the top adapter plate, and another portion of the external device is connected to the bottom plate of the vibration damper via the bottom adapter plate.

[0006] The vibration damping device further includes: a support platform, an object to be isolated, and a foundation. The support platform supports the object to be isolated and is connected to the foundation through at least one vibration damping support leg. A control module is configured to receive a motion feedback signal from the support platform and, based on the motion feedback signal, control the vibration damping functional components of the vibration dampers in all the vibration damping support legs to output a first target force as a whole. The first target force acts on the support platform and counteracts the vibration force of the support platform during the feedback phase.

[0007] Among them, the overall output range of the vibration damping functional component of the vibration damper in all vibration damping support legs is smaller than the overall output range of the external device in all vibration damping support legs, and the overall output accuracy of the vibration damping functional component of the vibration damper in all vibration damping support legs is greater than the overall output accuracy of the external device in all vibration damping support legs.

[0008] The external device is an external motor, and in each of the vibration damping support legs, one of the stator and the mover of the external motor is connected to the top plate of the vibration damper through the top adapter plate, and the other is connected to the bottom plate of the vibration damper through the bottom adapter plate.

[0009] In each of the vibration damping support legs, the top adapter plate is located on the side of the top plate away from the bottom plate and is connected to the top plate. The top adapter plate protrudes beyond the edge of the top plate, and one of the stator and mover of the external motor is connected to the portion of the top adapter plate that protrudes beyond the edge of the top plate.

[0010] In each of the vibration damping support legs, the bottom adapter plate is located on the side of the base plate facing the top plate and is connected to the base plate, and is opposite to the portion of the top adapter plate that protrudes beyond the edge of the top plate. Furthermore, the other of the stator and rotor of the external motor is connected to the base plate adapter plate.

[0011] This application also provides a vibration reduction method applied to a vibration reduction device. The vibration reduction device includes at least one vibration reduction support leg, a support platform, an object to be isolated, and a foundation. Each vibration reduction support leg includes a vibration damper, an external device for outputting force, a top adapter plate, and a bottom adapter plate. The vibration damper includes a bottom plate and a top plate spaced apart from each other, and a vibration reduction functional component disposed between the bottom plate and the top plate. In each vibration reduction support leg, a portion of the external device is connected to the top plate of the vibration damper through the top adapter plate, and another portion of the external device is connected to the bottom plate of the vibration damper through the bottom adapter plate. The support platform supports the object to be isolated and is connected to the foundation through the at least one vibration reduction support leg. The vibration reduction method includes: receiving a motion feedback signal from the support platform; and, based on the motion feedback signal, controlling the vibration reduction functional components of the vibration dampers in all vibration reduction support legs to output a first target force as a whole. The first target force acts on the support platform and counteracts the vibration force of the support platform during the feedback phase.

[0012] The vibration reduction method further includes: receiving a first motion feedforward signal from the object being isolated and a second motion feedforward signal from the foundation; and controlling the external devices in all vibration-damping support legs to output a second target force based on the first motion feedforward signal and the second motion feedforward signal, wherein the second target force acts on the support platform and at least partially offsets the vibration force of the support platform during the feedforward phase.

[0013] The step of controlling the external devices in all vibration damping support legs to output a second target force based on the first motion feedforward signal and the second motion feedforward signal includes: generating a force output matrix based on the first motion feedforward signal and the second motion feedforward signal, wherein the force output matrix contains target force information corresponding to each external device; and controlling each external device to output a force consistent with the corresponding target force information.

[0014] The step of controlling the external devices in all vibration-damping support legs to output a second target force based on the first motion feedforward signal and the second motion feedforward signal includes: determining whether the vibration force of the bearing platform in the feedforward stage exceeds the overall output range of the external devices in all vibration-damping support legs based on the first motion feedforward signal and the second motion feedforward signal; if so, controlling the external devices in all vibration-damping support legs to output a first force, and controlling the vibration damping functional components of the vibration dampers in all vibration-damping support legs to output a second force, so that the second force and the first force jointly offset the vibration force of the bearing platform in the feedforward stage; if not, controlling the external devices in all vibration-damping support legs to output a third force, so that the third force offsets the vibration force of the bearing platform in the feedforward stage.

[0015] The beneficial effects of this application are as follows: The vibration damping equipment and method provided by this application, by adding external devices to the vibration damping support legs of the vibration damping equipment, and by flexibly configuring the number and output parameters of the external devices according to actual needs, such as using external devices with fast output speed and large output range, can effectively ensure the stability of the bearing platform. It can also solve the problem that existing vibration damping equipment cannot meet the high output requirements while ensuring high vibration damping accuracy due to the lag in vibration damper response and insufficient output. This allows the vibration damping system to take into account the requirements of fast response, high output and high precision vibration damping, and significantly improves the vibration damping performance of the system. Attached Figure Description

[0016] The technical solution and other beneficial effects of this application will become apparent from the following detailed description of specific embodiments in conjunction with the accompanying drawings.

[0017] Figure 1 This is a schematic diagram of the structure of the vibration damping device provided in the embodiments of this application; Figure 2 This is a three-dimensional structural schematic diagram of the vibration reduction device provided in the embodiments of this application; Figure 3 This is another three-dimensional structural schematic diagram of the vibration reduction device provided in the embodiments of this application; Figure 4 This is a three-dimensional structural diagram of the vibration-damping support leg provided in the embodiments of this application; Figure 5 This is another three-dimensional structural schematic diagram of the vibration-damping support leg provided in the embodiments of this application; Figure 6 This is a schematic diagram of the circuit structure of the vibration damping device provided in the embodiments of this application; Figure 7 This is another circuit structure diagram of the vibration damping device provided in the embodiments of this application; Figure 8 This is a schematic flowchart of the vibration reduction method provided in the embodiments of this application; Figure label: 1-Vibration damping equipment; 10-Vibration damping support leg; 10A-First vibration damping support leg; 10B-Second vibration damping support leg; 11-Vibration damper; 11A-First vibration damper; 11B-Second vibration damper; 111-Base plate; 112-Top plate; 113-Vibration damping cavity; 12-External components / external motor; 12A-First external component / first external motor; 12B-Second external component / second external motor; 121-Stator; 122-Motor; 10 0 - External component group; 100A - First external component group; 100B - Second external component group; 13 - Bottom adapter plate; 13A - First bottom adapter plate; 13B - Second bottom adapter plate; 14 - Top adapter plate; 20 - Support platform; 30 - Control module; 31 - Controller; 32 - Drive controller; 32A - First drive controller; 32B - Second drive controller; 33 - Ethernet switch; 40 - Vibration-isolated object; 50 - Foundation. Detailed Implementation

[0018] To make the objectives, technical solutions, and advantages of this application clearer, the following detailed description is provided in conjunction with the accompanying drawings and embodiments. Examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain this application, and should not be construed as limiting this application. Furthermore, it should be understood that the specific embodiments described herein are merely for explaining this application and are not intended to limit this application.

[0019] In the following description, the connection of the second component to the first component may include embodiments in which the second component is directly connected to the first component, and may also include embodiments in which the second component is connected to the first component via an additional component, such that the second component is not directly connected to the first component.

[0020] In the following description, the connection between the second component and the first component may include embodiments in which the second component is directly connected to the first component, and may also include embodiments in which the second component is connected to the first component via an additional component, thereby preventing the second component from being directly connected to the first component.

[0021] When describing the structure of a component, when referring to a layer or region as being "above" or "on top of" another layer or region, it can mean that it is directly above the other layer or region, or that it contains other layers or regions between itself and the other layer or region. Furthermore, if the component is flipped, the layer or region will be located "below" or "under" the other layer or region. Additionally, the features, structures, or characteristics described below can be combined in any suitable manner in one or more embodiments.

[0022] Furthermore, the directional terms mentioned in the embodiments of this application, such as [up], [down], [front], [back], [left], [right], [inner], [outer], [side], etc., are only for reference to the accompanying drawings. Therefore, the directional terms used are for illustrating and understanding the embodiments of this application, and not for limiting the embodiments of this application. In the various drawings, structurally similar units are represented by the same reference numerals. For clarity, the various parts in the drawings are not drawn to scale. In addition, some related parts may not be shown in the drawings.

[0023] The following detailed description is based on specific embodiments. It should be noted that the sequence numbers of the following embodiments are not intended to limit the preferred order of the embodiments.

[0024] Please see Figures 1 to 7 , Figure 1 This is a schematic diagram of the vibration damping device provided in the embodiments of this application. Figure 2 This is a three-dimensional structural diagram of the vibration damping device provided in the embodiments of this application. Figure 3 This is another three-dimensional structural schematic diagram of the vibration damping device provided in the embodiments of this application. Figure 4 This is a three-dimensional structural diagram of the vibration-damping support leg provided in an embodiment of this application. Figure 5 This is another three-dimensional structural schematic diagram of the vibration-damping support leg provided in the embodiments of this application. Figure 6 This is a circuit diagram of the vibration damping device provided in the embodiments of this application. Figure 7 This is another circuit diagram of the vibration damping device provided in the embodiments of this application. For example... Figures 1 to 7As shown, the vibration damping device 1 includes at least one vibration damping support leg 10. Each vibration damping support leg 10 includes a vibration damper 11, an external device 12 for outputting force, a bottom adapter plate 13, and a top adapter plate 14. The vibration damper 11 includes a bottom plate 111 and a top plate 112 spaced apart from each other, and a vibration damping functional component disposed between the bottom plate 111 and the top plate 112. In each vibration damping support leg 10, a portion of the structure of the external device 12 is connected to the top plate 112 of the vibration damper 11 via the top adapter plate 14, and another portion of the structure of the external device 12 is connected to the bottom plate 111 of the vibration damper 11 via the bottom adapter plate 13. This allows the external device 12 to drive relative movement between the top plate 112 and the bottom plate 111, thereby adjusting the working state of the vibration damping functional component.

[0025] Specifically, the aforementioned vibration damping device 1 may further include a support platform 20, a control module 30, an object to be isolated 40, and a foundation 50. The support platform 20 supports the object to be isolated 40 and is connected to the foundation 50 via at least one vibration damping support leg 10. Furthermore, the control module 30 is configured to receive motion feedback signals from the support platform 20 and, based on these signals, control the vibration damping functional components of the dampers 11 in all the vibration damping support legs 10 to output a first target force. This first target force acts on the support platform 20 and counteracts the vibration force of the support platform 20 during the feedback phase. In some embodiments, the control module 30 may also be configured to: receive a first motion feedforward signal from the vibration-isolated object 40 and a second motion feedforward signal from the foundation 50, and control the external devices 12 in all vibration-damping support legs 10 to output a second target force as a whole, based on the first motion feedforward signal and the second motion feedforward signal. The second target force acts on the support platform 20 and at least partially offsets the vibration force of the support platform 20 in the feedforward stage, so that the support platform 20 remains stable during the movement of the vibration-isolated object 40.

[0026] The vibration damping device 1 can be a precision device that is sensitive to vibration, such as semiconductor manufacturing equipment or optical instruments. The object being isolated 40 can be a running table or other motion device.

[0027] The motion feedback signal of the support platform 20 may include velocity feedback and / or displacement feedback and / or acceleration feedback of the support platform 20, i.e., the real-time velocity and / or real-time displacement and / or real-time acceleration of the support platform 20. The first motion feedforward signal of the vibration-isolated object 40 may include velocity feedforward and / or displacement feedforward and / or acceleration feedforward of the vibration-isolated object 40, i.e., the expected motion velocity and / or expected motion displacement and / or expected motion acceleration of the vibration-isolated object 40. The second motion feedforward signal of the foundation 50 may include the velocity and / or displacement and / or acceleration of the foundation 50. The third motion information of the support platform 20 may include velocity feedforward and / or displacement feedforward and / or acceleration feedforward of the support platform 20, i.e., the expected motion velocity and / or expected motion displacement and / or expected motion acceleration of the support platform 20.

[0028] The first target force output by the overall vibration damping functional components of all vibration damping support legs 10 is the sum of the forces output by the vibration damping functional components of all vibration dampers 11 in the vibration damping device 1. The vibration force of the bearing platform 20 during the feedback phase, i.e., the force generated by the bearing platform 20 during real-time vibration, directly affects the stability of the vibration-isolated object 40 on the bearing platform 20. Furthermore, the first target force output by the overall vibration damping functional components of all vibration damping support legs 10 is precisely calculated based on the motion feedback signal of the bearing platform 20, and its purpose is to counteract the vibration of the bearing platform 20.

[0029] The second target force output by the external devices 12 in all vibration damping support legs 10 is the sum of the forces output by all external devices 12 in the vibration damping device 1. The vibration force of the support platform 20 during the feedforward phase is the vibration force estimated in advance based on the expected movement of the isolated object 40 (reflected by the first motion feedforward signal) and the potential vibration of the foundation 50 (reflected by the second motion feedforward signal) before the platform 20 generates actual vibration. This estimation of vibration force during the feedforward phase allows the vibration damping system to make adjustments in advance, outputting the corresponding second target force through the external devices 12, thereby more effectively offsetting potential vibration effects and ensuring that the support platform 20 and the isolated object 40 on it maintain a high degree of stability during movement. Furthermore, this control strategy based on a combination of feedforward and feedback not only improves the response speed of the vibration damping system but also enhances its adaptability to different vibration environments.

[0030] In practical applications, the control module 30 continuously monitors the motion feedback signal of the support platform 20, as well as the motion feedforward signals of the isolated object 40 and the foundation 50. Once a vibration trend is detected in the support platform 20, the control module 30 immediately adjusts the output force of the vibration damping components of the dampers 11 and the external devices 12 in all the vibration damping support legs 10 according to these signals. For example, when the isolated object 40 is about to start moving, its first motion feedforward signal will inform the control module 30 in advance of the expected motion state of the isolated object 40, and the second motion feedforward signal of the foundation 50 will also provide corresponding environmental vibration information. Based on this information, the control module 30 calculates the first target force and the second target force that need to be output through a complex algorithm, and controls the dampers 11 and the external devices 12 to make corresponding adjustments.

[0031] Furthermore, the design of the vibration damping device 1 fully considers flexibility and scalability. Since the number and output parameters of the external devices 12 can be flexibly configured according to actual needs, the vibration damping device 1 can adapt to vibration-isolated objects 40 of different sizes and types. For example, for vibration-isolated objects 40 requiring greater output, the number of external devices 12 can be increased, or external devices 12 with a larger output range can be selected.

[0032] In the aforementioned vibration damping device 1, the foundation 50 is connected to the ground so that the vibration damping device 1 is fixed to the ground through the foundation 50. The aforementioned at least one vibration damping support leg 10 is installed between the foundation 50 and the support platform 20 and supports the support platform 20. The foundation 50 supports the aforementioned at least one vibration damping support leg 10. Specifically, one end (i.e., the bottom end) of each vibration damping support leg 10 can be connected to the foundation 50, and the other end (i.e., the top end) of each vibration damping support leg 10 can be connected to the support platform 20 so that the support platform 20 is fixed above the aforementioned at least one vibration damping support leg 10, and the aforementioned at least one vibration damping support leg 10 is fixed above the foundation 50.

[0033] Specifically, the vibration damping device 1 may further include a vibration damping sensor (not shown in the figure), which is installed between the foundation 50 and the support platform 20 and is used to collect the second motion feedforward signal of the foundation 50 and the motion feedback signal of the support platform 20. For example, the vibration damping sensor may include a velocity sensor and a displacement sensor. Furthermore, the control module 30 is connected to the vibration damping sensor to enable the control module 30 to receive the second motion feedforward signal and motion feedback signal collected by the vibration damping sensor in real time, thereby ensuring the real-time acquisition and reception of the second motion feedforward signal and motion feedback signal.

[0034] Specifically, the vibration damping device 1 may further include a sensor (not shown in the figure) for acquiring a first motion feedforward signal of the object being isolated 40. For example, the sensor may include a velocity sensor and a displacement sensor. Furthermore, the control module 30 is connected to the sensor to enable the control module 30 to receive the first motion feedforward signal acquired by the sensor in real time, thereby ensuring the real-time acquisition and reception of the first motion feedforward signal.

[0035] Specifically, during the operation of the aforementioned vibration damping device 1, when the object being isolated 40 moves, the force generated by the vibration of the object being isolated 40 is transmitted to the support platform 20, causing the support platform 20 to vibrate. When the foundation 50 is subjected to external disturbance, the force generated by the vibration of the foundation 50 is also transmitted to the support platform 20 through the vibration damping support leg 10, causing the support platform 20 to vibrate additionally. The vibration damping device 1, through its unique structural design and control strategy, can effectively cope with these vibrations. On the one hand, the vibration damper 11 in the vibration damping support leg 10, using its vibration damping functional components, outputs a first target force based on the motion feedback signal of the support platform 20, directly offsetting the force generated by the vibration of the object being isolated 40 or the foundation 50 in the feedback phase of the support platform 20, thereby reducing the real-time vibration amplitude of the support platform 20. On the other hand, the control module 30 also receives motion feedforward signals from the isolated object 40 and the foundation 50, and outputs a second target force in advance through the external device 12. This force is actively counteracted before the bearing platform 20 generates feedforward vibration force due to the expected movement of the isolated object 40 or the potential vibration of the foundation 50. This dual-pronged control method enables the vibration damping device 1 to respond promptly to existing vibrations and predict and prevent potential vibrations, greatly improving the stability and accuracy of the isolated object 40 during operation. Simultaneously, the various components of the vibration damping device 1 achieve real-time data exchange and collaborative operation through a highly integrated communication system. This tight integration ensures that control commands can be quickly and accurately transmitted to every component requiring adjustment, thereby achieving rapid response and efficient operation of the entire vibration damping system.

[0036] In this embodiment, the direction of the second target force is opposite to the direction of the vibration force of the bearing platform 20 in the feedforward stage, and the magnitude of the second target force is less than or equal to the magnitude of the vibration force of the bearing platform 20 in the feedforward stage. Therefore, the influence of the vibration of the isolated object 40 and the vibration of the foundation 50 on the bearing platform 20 can be reduced or eliminated, ensuring that the bearing platform 20 maintains high stability under dynamic working conditions and meets the stringent requirements of precision equipment for an ultra-stable working environment.

[0037] At this time, the control module 30 calculates the required damping force (i.e., the second target force mentioned above) in real time based on the first motion feedforward signal of the vibration-isolated object 40 and the second motion feedforward signal of the foundation 50, and coordinates the output of the external devices 12 in each vibration-damping support leg 10 to output the corresponding force, so that the overall output force of the external devices 12 in all vibration-damping support legs 10 (i.e., the second target force mentioned above) cancels all or most of the vibration force of the bearing platform 20 in the feedforward stage, which is beneficial to the high-precision motion control of the vibration-isolated object 40.

[0038] Furthermore, it should be noted that compared to existing vibration damping devices that rely on the output damping force of the dampers to effectively reduce or eliminate vibration, existing vibration damping devices suffer from insufficient damping force, resulting in the vibration damping system being unable to meet high output force requirements while ensuring high vibration damping accuracy. In this embodiment, by adding an external device 12 to the vibration damping support leg 10 of the vibration damping device 1, the external device 12 can work independently or in conjunction with the original damper 11 in the vibration damping support leg 10, significantly increasing the range of the total output force of the vibration damping system, and maintaining high-precision vibration damping performance under high load or strong disturbance conditions.

[0039] Specifically, an external device 12 with high output speed and large output range, such as a voice coil motor or a reluctance motor, can be used to achieve rapid and large output to reduce vibration, thereby making up for the shortcomings of traditional vibration dampers in terms of transient response and output limit.

[0040] In some embodiments, such as Figure 4 and Figure 5 As shown, in each vibration-damping support leg 10, the vibration-damping functional component may include a vibration-damping motor (not shown) and / or a vibration-damping cavity 113. One of the stator and mover of the vibration-damping motor is connected to the base plate 111, and the other is connected to the top plate 112. The top plate 112 is connected to the vibration-damping cavity 113 in a manner that allows it to move along the depth direction of the vibration-damping cavity 113. The vibration-damping cavity 113 is sealed to form a sealed cavity, and the air pressure within this sealed cavity can be adjustable. Specifically, when the vibration damper 11 is working, by adjusting the output force of the vibration-damping motor and / or the air pressure within the sealed cavity, the force applied by the vibration damper 11 to the support platform 20 can be dynamically changed, thereby suppressing the vibration of the support platform 20.

[0041] For example, the vibration damping motor described above can specifically be a voice coil motor.

[0042] In a preferred embodiment, in the vibration damping device 1, the overall output range of the vibration damping functional components of the dampers 11 in all the vibration damping support legs 10 can be smaller than the overall output range of the external devices 12 in all the vibration damping support legs 10, and the overall output accuracy of the vibration damping functional components of the dampers 11 in all the vibration damping support legs 10 can be greater than the overall output accuracy of the external devices 12 in all the vibration damping support legs 10. Therefore, in actual vibration damping control, the external devices 12 can bear the main dynamic load and transient disturbance suppression, quickly providing a wide range of adjustment force, while the dampers 11 focus on high-precision fine-tuning to achieve fine vibration suppression under steady state. The two complement each other, taking into account both output capacity and control accuracy.

[0043] In some examples, in each vibration damping support leg 10, the output range of the vibration damping functional component of the damper 11 can be smaller than the overall output range of all external devices 12, and the output accuracy of the vibration damping functional component of the damper 11 can be greater than the overall output accuracy of all external devices 12. Thus, it is possible to achieve that the overall output range of the vibration damping functional components of all dampers 11 in the vibration damping device 1 (e.g., the first damper 11A and the second damper 11B, etc.) is smaller than the overall output range of all external devices 12 in the vibration damping device 1, and that the overall output accuracy of the vibration damping functional components of all dampers 11 in the vibration damping device 1 is greater than the overall output accuracy of all external devices 12 in the vibration damping device 1.

[0044] In this embodiment, control tasks can be dynamically allocated based on the actual intensity of the vibration load, ensuring that the system is always in an optimal response state. For example, when the vibration force of the bearing platform 20 is small in the feedforward stage, the external device 12 independently completes the vibration suppression, reducing control complexity; when the vibration force of the bearing platform 20 in the feedforward stage exceeds the adjustment capability of the external device 12, the vibration damper 11 intervenes in coordination to improve the overall anti-interference capability. This hierarchical control strategy not only ensures the system's rapid response characteristics but also takes into account the steady-state accuracy requirements, significantly improving the adaptability and stability of the vibration damping equipment under varying working conditions. By monitoring and dynamically evaluating the vibration state in real time, the control module 30 can determine in real time whether the vibration force of the bearing platform 20 in the feedforward stage exceeds the overall output range of the external devices 12 in all the vibration damping support legs 10. When it is determined that the vibration force of the bearing platform 20 in the feedforward stage exceeds the overall output range of the external devices 12 in all the vibration damping support legs 10, the control module 30 automatically triggers the collaborative control mechanism to mobilize the dampers 11 in the vibration damping support legs 10 to participate in the combined force to offset the vibration force of the bearing platform 20 in the feedforward stage.

[0045] In some specific embodiments, when the control module 30 controls the external devices 12 in all vibration damping support legs 10 to output the second target force based on the first motion feedforward signal and the second motion feedforward signal, it can specifically perform the following: Based on the first motion feedforward signal and the second motion feedforward signal, determine whether the vibration force of the bearing platform 20 in the feedforward stage exceeds the overall output range of the external devices 12 in all the vibration damping support legs 10. If so, control all external devices 12 in all vibration damping support legs 10 to output the first force as a whole, and control the vibration damping function components of the dampers 11 in all vibration damping support legs 10 to output the second force as a whole, so that the second force and the first force can jointly offset the vibration force of the bearing platform 20 in the feedforward stage. If not, control all external devices 12 in the vibration damping support legs 10 to output a third force as a whole, so as to achieve the third force to counteract the vibration force of the bearing platform 20 in the feedforward stage.

[0046] In this scenario, the vibration force of the support platform 20 during the feedforward phase exceeds the overall output range of the external devices 12 in all the vibration damping support legs 10. Specifically, the vibration force of the support platform 20 during the feedforward phase is greater than the maximum output force of the external devices 12 in all the vibration damping support legs 10. Furthermore, the magnitude of the first force is less than the vibration force of the support platform 20 during the feedforward phase, and less than or equal to the maximum output force of the external devices 12 in all the vibration damping support legs 10. The direction of the resultant force of the second force and the first force is opposite to the direction of the vibration force of the support platform 20 during the feedforward phase, and the magnitude of the resultant force is equal to the magnitude of the vibration force of the support platform 20 during the feedforward phase. Thus, when the external devices 12 cannot completely offset the vibration force on their own, the vibration damping components of the damper 11 can collaboratively output supplementary force. This ensures both the rapid response characteristics of the vibration damping system and meets the requirements for high-precision vibration damping, significantly improving the adaptability and stability of the vibration damping equipment under varying working conditions.

[0047] In this scenario, the vibration force of the support platform 20 during the feedforward phase does not exceed the overall output range of the external devices 12 in all the vibration damping support legs 10. Specifically, the vibration force of the support platform 20 during the feedforward phase is less than or equal to the maximum output force of the external devices 12 in all the vibration damping support legs 10. Furthermore, the direction of the aforementioned third force is opposite to the direction of the vibration force of the support platform 20 during the feedforward phase, and the magnitude of the aforementioned third force is equal to the magnitude of the vibration force of the support platform 20 during the feedforward phase. At this time, the external devices 12 can independently cancel the vibration force, and the vibration damping function components of the damper 11 do not require additional output. This enables rapid capture of vibration signals and a quick, large-output reduction of vibration, allowing the system to rapidly recover to a stable state under instantaneous disturbances.

[0048] Furthermore, in the above-described embodiment where the damping functional components of the damper 11 include a damping motor and / or a damping cavity 113, the aforementioned control of the overall output of the second force by the damping functional components of the damper 11 in all damping support legs 10 may include: By controlling the output of the damping motor of the damping motor of the damper 11 in all the damping support legs 10 and / or the air intake and exhaust of the sealed cavity formed by the damping cavity 113, the damping function components of the damping motor 11 in all the damping support legs 10 are made to output a second force as a whole.

[0049] Specifically, the magnitude and phase of the output force of the vibration damping motor can be precisely controlled by adjusting the current frequency and voltage of the vibration damping motor. At the same time, the opening and closing sequence and diameter of the air inlet valve and air outlet valve of the vibration damping cavity 113 can be adjusted to change the rate of air pressure change in the sealed cavity, thereby achieving dynamic and precise control of the second force and ensuring that the resultant force of the second force and the first force is in real time balanced with the vibration force of the bearing platform 20 in the feedforward stage.

[0050] It should be noted that, in the process of controlling all the external devices 12 in the vibration damping support legs 10 to output a first force and controlling the vibration damping functional components of the vibration dampers 11 in all the vibration damping support legs 10 to output a second force, so that the second force and the first force jointly offset the vibration force of the bearing platform 20 in the feedforward stage, because the response of the vibration damping functional components of the vibration dampers 11 lags behind that of the external devices 12, the first force will act on the bearing platform 20 before the first force, offsetting most of the vibration force of the bearing platform 20 in the feedforward stage. After the vibration damping functional components of the vibration dampers 11 have completed their response, the second force can accurately supplement the remaining vibration force offsetting requirements, working together with the first force to achieve vibration suppression. This process fully utilizes the fast response characteristics of the external devices 12 and the continuous adjustment capability of the vibration dampers 11, enabling the vibration damping system to meet the requirements of fast response, high output, and high-precision vibration damping, significantly improving the vibration damping performance of the system.

[0051] In some specific embodiments, such as Figure 4 and Figure 5 As shown, the aforementioned external device 12 can specifically be an external motor 12. For example, the external motor 12 can be a voice coil motor or a reluctance motor. Accordingly, as... Figure 4 and Figure 5 As shown, in each vibration damping support leg 10, one of the stator 121 and the rotor 122 of the external motor 12 can be connected to the top plate 112 of the vibration damper 11 via the top adapter plate 14, and the other can be connected to the bottom plate 111 of the vibration damper 11 via the bottom adapter plate 13. Furthermore, the aforementioned support platform 20 can be fixed to the side of the top plate 112 of the vibration damper 11 that faces away from the bottom plate 111.

[0052] Specifically, such as Figure 4 and Figure 5As shown, in each vibration damping support leg 10, the top adapter plate 14 can be located on the side of the top plate 112 of the vibration damper 11 away from the bottom plate 111 and connected to the top plate 112. The top adapter plate 14 can protrude beyond the edge of the top plate 112. The external motor 12 can be located between the part of the top adapter plate 14 protruding beyond the edge of the top plate 112 and the bottom plate 111. One of the stator 121 and the mover 122 of the external motor 12 can be connected to the part of the top adapter plate 14 protruding beyond the edge of the top plate 112, so that one of the stator 121 and the mover 122 of the external motor 12 can be connected to the top plate 112 of the vibration damper 11 through the top adapter plate 14. Furthermore, the aforementioned support platform 20 can be fixed to the side of the top plate 112 of the damper 11 away from the top plate 112 of the damper 11 via the top plate 14, so that the support platform 20 can be fixed to the side of the top plate 112 of the damper 11 away from the bottom plate 111 via the top plate 14.

[0053] Specifically, such as Figure 4 and Figure 5 As shown, in each vibration damping support leg 10, the bottom adapter plate 13 is located on the side of the bottom plate 111 facing the top plate 112 and is connected to the bottom plate 111. It is opposite to the portion of the top adapter plate 14 that protrudes beyond the edge of the top plate 112. The external motor 12 can be specifically located between the portion of the top adapter plate 14 that protrudes beyond the edge of the top plate 112 and the bottom adapter plate 13. The other of the stator 121 and the mover 122 of the external motor 12 can be connected to the bottom plate adapter plate 14, so that the other of the stator 121 and the mover 122 of the external motor 12 is connected to the bottom plate 111 of the vibration damper 11 through the bottom adapter plate 13.

[0054] In the above embodiments, the vibration damping device 1 may include one or more vibration damping support legs 10. For example, as shown... Figure 4 and Figure 5 As shown, the vibration damping device 1 includes four vibration damping support legs 10. The tops of these four vibration damping support legs 10 can be connected to the four corner areas of the support platform 20, and the bottoms can be fixed to the foundation 50, thus forming a stable four-point support structure. This arrangement not only helps to evenly distribute the load and improve the overall rigidity of the system, but also effectively suppresses multi-directional vibration transmission and enhances the vibration damping effect. At the same time, the external motors 12 in each vibration damping support leg 10 can work together. Through unified control, the external motors 12 in all the vibration damping support legs 10 of the vibration damping device 1 can output the target force as a whole, so as to reduce or eliminate the impact of the vibration of the isolated object 40 and the vibration of the foundation 50 on the support platform 20, so that the support platform 20 remains stable during the movement of the isolated object 40.

[0055] In the above embodiments, such as Figure 4 and Figure 5 As shown, for each vibration damping support leg 10, the number of external devices 12 included in the vibration damping support leg 10 can be one or more. In some examples, such as Figure 4 and Figure 5 As shown, for each vibration damping support leg 10, the number of external devices 12 included in the vibration damping support leg 10 is multiple, and the multiple external devices 12 may include at least one first external device 12A and at least one second external device 12B, for example, as Figure 4 and Figure 5 As shown, it may include two first external devices 12A and two second external devices 12B, wherein the first external device 12A and the second external device 12B may be a first external motor 12A and a second external motor 12B, respectively.

[0056] Furthermore, for each first external motor 12A, the mover 122 of the first external motor 12A can be configured to move vertically relative to the stator 121 of the first external motor 12A, so that the first external motor 12A generates a vertical force and applies it to the support platform 20. For each second external motor 12B, the mover 122 of the second external motor 12B can be configured to move horizontally relative to the stator 121 of the second external motor 12B, so that the second external motor 12B generates a horizontal force and applies it to the support platform 20.

[0057] It should be noted that the vertical direction in this embodiment can refer to any direction perpendicular to the horizontal plane, and the horizontal direction in this embodiment can refer to any direction parallel to the horizontal plane. Specifically, the depth direction of the damping cavity 113 of the above-mentioned damper 11 can be parallel to the vertical direction.

[0058] In some specific examples, such as Figure 4 and Figure 5 As shown, each vibration damping support leg 10 includes multiple external motors 12. Furthermore, one of the stators 121 and rotors 122 of these multiple external motors 12 (e.g., stator 121) can be connected to a portion of the same top adapter plate 14 protruding beyond the edge of the top plate 112, so that one of the stators 121 and rotors 122 of the multiple external motors 12 is connected to the top plate 112 via the same top adapter plate 14. The other of the stators 121 and rotors 122 of the multiple external motors 12 (e.g., rotor 122) can be connected to multiple bottom adapter plates 13 respectively, so that the other of the stators 121 and rotors 122 of each external motor 12 is connected to the bottom plate 111 via its respective bottom adapter plate 13.

[0059] For example, such as Figure 4 and Figure 5As shown, for each vibration damping support leg 10, the other of the stator 121 and mover 122 of each of the first external motors 12A included in the vibration damping support leg 10 can be connected to the base plate 111 through their respective first bottom adapter plate 13A, and the other of the stator 121 and mover 122 of each of the second external motors 12B included in the vibration damping support leg 10 can be connected to the base plate 111 through their respective second bottom adapter plate 13B.

[0060] It should be noted that in each vibration damping support leg 10 of the aforementioned vibration damping device 1, the number, location, and output parameters of the external devices 12 (e.g., the first external device 12A and the second external device 12B) can be set according to actual needs, and this case does not impose any restrictions on this.

[0061] For example, such as Figure 4 and Figure 5 As shown, for each vibration damping support leg 10 of the aforementioned vibration damping device 1, the number of external devices 12 can be multiple, for example, four. Two of these external devices 12 are first external devices 12A, and the remaining two are second external devices 12B. Specifically, these multiple external devices 12 can be located in the edge area of ​​the vibration damping support leg 10, for example, on the periphery of the vibration damping functional component of the vibration damper 11, so as to make full use of the peripheral space of the vibration damping support leg 10 and avoid occupying the structural space of the central area, thereby improving the compactness and space utilization of the overall layout. At the same time, the external motors 12 are distributed along the edge of the vibration damping support leg 10, which is conducive to the disassembly and maintenance of the external devices 12 and facilitates modular design and batch replacement.

[0062] In the above embodiments, such as Figure 6 and Figure 7 As shown, in the aforementioned vibration damping device 1, the external devices 12 in all vibration damping support legs 10 can be divided into at least one external device group 100, and each external device group 100 consists of at least one external device 12. In some examples, such as Figure 6 and Figure 7 As shown, in the above-mentioned vibration damping device 1, the external devices 12 in all vibration damping support legs 10 can be divided into multiple external device groups 100 (for example, the first external device group 100A and the second external device group 100B, etc.).

[0063] Specifically, the number of external devices 12 in each external device group 100 can be one or more. Furthermore, for an external device group 100 consisting of multiple external devices 12 (e.g., a first external device group 100A or a second external device group 100B), each external device 12 in the external device group 100 can belong to the same vibration damping support leg 10 or to different vibration damping support legs 10.

[0064] Specifically, the control module 30 may include a controller 31 and at least one drive controller 32 communicatively connected to the controller 31. The controller 31 may be configured as follows: Receive the first motion feedforward signal of the vibration-isolated object 40 and the second motion feedforward signal of the foundation 50; Based on the first motion feedforward signal and the second motion feedforward signal, a power output matrix is ​​generated and transmitted to at least one drive controller 32.

[0065] The aforementioned output matrix includes target output information for all external devices 12 in each external device group 100. That is, the aforementioned output matrix includes target output information for each external device 12 in the vibration damping device 1, and for each external device 12, the target output information for that external device 12 is used to indicate the magnitude and direction of the required output force for that external device 12.

[0066] Furthermore, in specific implementation, when the vibration-isolated object 40 moves, the first motion feedforward signal of the vibration-isolated object 40 can be uploaded to the controller 31 sequentially via at least one drive controller 32. At the same time, the second motion feedforward signal of the foundation 50 can be collected by the sensor and uploaded synchronously to the controller 31. Thus, the controller 31 can receive the dynamic data of the vibration-isolated object 40 and the foundation 50 in real time, and then accurately calculate the target output information corresponding to each external device 12 in each external device group 100.

[0067] Specifically, each drive controller 32 can correspond to one external device group 100 and can be configured as follows: In response to receiving the target output information corresponding to the external device 12 in the corresponding external device group 100, the external device 12 in the corresponding external device group 100 is controlled to output a force consistent with the corresponding target output information.

[0068] Specifically, in the control module 30, the drive controller 32 can correspond one-to-one with the external device group 100, and each receiving controller 31 can not only drive each external device 12 in its corresponding external device group 100 to output force, but also realize the distribution of the force output by each external device 12 in its corresponding external device group 100.

[0069] For example, the receiving controller 31 can be an embedded control unit integrating signal processing and force feedback adjustment algorithms, possessing high-speed computing and real-time response capabilities, and able to dynamically adjust the driving parameters of each external device 12 in its corresponding external device group 100 according to the output matrix. Simultaneously, this control unit works in conjunction with the drive controller 32 through a digital communication interface to ensure precise synchronization and stability of the force output, thereby improving the overall vibration reduction performance. Based on this, the system continuously optimizes control accuracy through a closed-loop feedback mechanism, comparing the actual output force with the target output force information in real time and dynamically correcting deviations.

[0070] For example, the controller 31 may be a multi-channel real-time processor that integrates advanced control algorithms, has multi-axis collaborative computing capabilities, and can quickly calculate the optimal distribution scheme of the output force required by each external device based on the dynamic response data of the vibration-isolated object and the foundation.

[0071] In some specific embodiments, each drive controller 32 can be configured to: in response to receiving target output information corresponding to all external devices 12 in the external device group 100 corresponding to the drive controller 32 sent by the controller 31, control each external device 12 in the external device group 100 corresponding to the drive controller 32 to output a force consistent with its corresponding target output information, thereby achieving precise control of the output of each external device 12 in the external device group 100. In this way, each external device 12 in the vibration damping device 1 can dynamically adjust its output according to the actual working conditions, effectively improving the response accuracy and stability of the vibration damping system, and ensuring high-precision movement of the isolated object 40 under complex disturbance conditions.

[0072] In some specific embodiments, such as Figure 7 As shown, the control module 30 may further include an Ethernet switch 33. The controller 31 communicates with the drive controller 32 via the Ethernet switch 33, enabling the controller 31 to transmit its generated output matrix to at least one drive controller 32 via the Ethernet switch 33. The Ethernet switch 33 supports real-time industrial communication protocols and possesses low-latency, high-bandwidth data transmission capabilities, ensuring that the controller 31 and each drive controller 32 complete the distribution of output commands and status feedback within milliseconds. Through this communication architecture, the system can achieve coordinated control of multiple external devices 12, improving overall control synchronization and response speed, and meeting high-precision vibration reduction requirements. The Ethernet switch 33 also supports time synchronization protocols, ensuring strict alignment of the control cycles of each drive controller 32, further suppressing phase deviations in multi-channel control.

[0073] Specifically, Ethernet switch 33 can be configured as follows: The receiving controller 31 transmits the output matrix to at least one drive controller 32, and divides the received output matrix into at least one sub-output matrix. Each sub-output matrix corresponds to one drive controller 32 and contains the target output information of all external devices 12 in the external device group 100 corresponding to the corresponding drive controller 32. Each sub-output matrix is ​​then transmitted to the at least one drive controller 32.

[0074] The aforementioned sub-output matrices correspond one-to-one with the aforementioned drive controllers 32. Each sub-output matrix includes target output information for all external devices 12 within the external device group 100 corresponding to its drive controller 32. Upon receiving the corresponding sub-output matrix, the drive controller 32 parses the target output information for each external device 12 and controls each external device 12 to output a force consistent with its corresponding target output information.

[0075] It should be noted that, in this embodiment, by using multiple controllers (i.e., the controller 31 and at least one drive controller 32 mentioned above), the system can reduce or eliminate vibration with high precision while meeting the demand for high output. The system can also quickly capture vibration signals and rapidly reduce vibration with high output. At the same time, the closed-loop control method is used to improve the vibration reduction accuracy, which can meet the system's requirements for fast response, high output, and high precision.

[0076] In the above embodiments, the vibration damping device 1 may further include a temperature sensor (not shown in the figure). The temperature sensor is used to detect the operating temperature of the vibration damping motors included in each vibration damper 11 in the vibration damping device 1, and feeds back the detected temperature signal to the control module 30 (e.g., the controller 31 in the control module 30) in real time. The control module 30 (e.g., the controller 31 in the control module 30) can dynamically adjust the output power of each vibration damping motor according to the received temperature signal to avoid performance degradation or equipment damage due to overheating, thereby ensuring the stability and reliability of the vibration damping system under long-term high-load operation.

[0077] As can be seen from the above, the vibration damping device provided in this embodiment includes at least one vibration damping support leg. Each vibration damping support leg includes a vibration damper, an external device for outputting force, a top adapter plate, and a bottom adapter plate. The vibration damper includes a bottom plate and a top plate arranged at relative intervals, and a vibration damping functional component disposed between the bottom plate and the top plate. In each vibration damping support leg, a part of the structure of the external device is connected to the top plate of the vibration damper through the top adapter plate, and another part of the structure of the external device is connected to the bottom plate of the vibration damper through the bottom adapter plate. In this way, by adding external devices to the vibration damping support leg of the vibration damping device, and by flexibly configuring the number and output parameters of the external devices according to actual needs, such as using external devices with fast output speed and large output range, the stability of the bearing platform can be effectively guaranteed. This solves the problem that existing vibration damping devices cannot meet the high output requirements while ensuring high vibration damping accuracy due to the lag in vibration damper response and insufficient output. This allows the vibration damping system to take into account the requirements of fast response, high output, and high-precision vibration damping, significantly improving the vibration damping performance of the system.

[0078] Please see Figure 8 , Figure 8 This is a schematic flowchart of the vibration reduction method provided in an embodiment of this application. This vibration reduction method is applied to the vibration reduction device 1 in any of the above embodiments (e.g., Figures 1 to 7 As shown). Specifically, as Figures 1 to 7 As shown, the vibration damping device 1 includes at least one vibration damping support leg 10, a support platform 20, a control module 30, an object to be isolated 40, and a foundation 50. Each vibration damping support leg 10 includes a vibration damper 11, an external device 12 for outputting force, a bottom adapter plate 13, and a top adapter plate 14. The vibration damper 11 includes a bottom plate 111 and a top plate 112 spaced apart from each other, and a vibration damping functional component disposed between the bottom plate 111 and the top plate 112. In each vibration damping support leg 10, a portion of the external device 12 is connected to the top plate 112 of the vibration damper 11 via the top adapter plate 14, and another portion of the external device 12 is connected to the bottom plate 111 of the vibration damper 11 via the bottom adapter plate 13. The support platform 20 supports the object to be isolated 40 and is connected to the foundation 50 via the at least one vibration damping support leg 10. The description of the vibration damping device 1 has been detailed in the above embodiments and will not be repeated here.

[0079] Specifically, such as Figures 1 to 8 As shown, the vibration reduction method includes the following steps: Step S11: Receive the motion feedback signal from the support platform 20.

[0080] Specifically, the vibration damping device 1 can receive motion feedback signals from the support platform 20 through the control module 30.

[0081] Step S12: Based on the motion feedback signal, control the overall output of the first target force of the damping function components of the dampers 11 in all the damping support legs 10. The first target force acts on the support platform 20 and cancels the vibration force of the support platform 20 in the feedback stage.

[0082] Specifically, the aforementioned vibration damping device 1 can control the vibration damping function components of all the vibration dampers 11 in the vibration damping support legs 10 to output the first target force as a whole, based on the motion feedback signal, through the control module 30.

[0083] In some embodiments, the above vibration reduction method may further include: Step S21: Receive the first motion feedforward signal of the vibration-isolated object 40 and the second motion feedforward signal of the foundation 50.

[0084] Specifically, the vibration damping device 1 can receive the first motion feedforward signal of the object being isolated 40 and the second motion feedforward signal of the foundation 50 through the control module 30.

[0085] Step S22: Based on the first motion feedforward signal and the second motion feedforward signal, control the external devices 12 in all vibration damping support legs 10 to output the second target force as a whole. The second target force acts on the support platform 20 and at least partially offsets the vibration force of the support platform 20 in the feedforward stage.

[0086] Specifically, the aforementioned vibration damping device 1 can control the external devices 12 in all vibration damping support legs 10 to output the second target force as a whole, based on the first motion feedforward signal and the second motion feedforward signal, through the control module 30.

[0087] In some specific embodiments, such as Figures 1 to 8 As shown, step S22 above may include: Step S1-1: Generate a power output matrix based on the first motion feedforward signal and the second motion feedforward signal. The power output matrix contains the target power output information corresponding to each external device 12.

[0088] Step S1-2: Control each external device 12 to output a force consistent with the corresponding target output information.

[0089] In some specific embodiments, such as Figure 6 and Figure 7 As shown, in the aforementioned vibration damping device 1, the external components 12 in all vibration damping support legs 10 can be divided into at least one external component group 100, and each external component group 100 consists of at least one external component 12. Furthermore, as... Figure 7 As shown, the control module 3 may include a controller 31 and at least one drive controller 32 that is communicatively connected to the controller 31.

[0090] Accordingly, step S21 can be specifically described as follows: receiving the first motion feedforward signal of the vibration-isolated object 40 and the second motion feedforward signal of the foundation 50 through the controller 31.

[0091] The above step S1-1 can be specifically described as follows: the controller 31 generates a power output matrix based on the received first motion feedforward signal and second motion feedforward signal, and transmits the power output matrix to the at least one drive controller 32.

[0092] Furthermore, each drive controller 32 can correspond to one external device group 100. The above steps S1-2 can be specifically described as follows: each drive controller 32, in response to receiving the target output information corresponding to the external device 12 in the corresponding external device group 100, controls the external device 12 in the corresponding external device group 100 to output a force consistent with the corresponding target output information.

[0093] In some embodiments, such as Figure 7 As shown, the control module 3 may include an Ethernet switch 33, and the controller 31 is communicatively connected to at least one drive controller 32 via the Ethernet switch 33. Accordingly, the controller 31 can transmit the power output matrix to the at least one drive controller 32 via the Ethernet switch 33.

[0094] In some embodiments, step S22 may specifically include: Step S2-1: Based on the first motion feedforward signal and the second motion feedforward signal, determine whether the vibration force of the bearing platform 20 in the feedforward stage exceeds the overall output range of the external devices 12 in all the vibration damping support legs 10. If yes, proceed to step S2-2 below; if no, proceed to step S2-3 below.

[0095] Step S2-2: If so, control all external devices in the vibration damping support legs to output the first force as a whole, and control the vibration damping function components of the dampers 11 in all vibration damping support legs 10 to output the second force as a whole, so that the second force and the first force can jointly counteract the vibration force of the bearing platform 20 in the feedforward stage.

[0096] Step S2-3: Control the external devices 12 in all vibration damping support legs 10 to output a third force as a whole, so as to achieve the third force to counteract the vibration force of the bearing platform 20 in the feedforward stage.

[0097] In some specific embodiments, such as Figure 4 and Figure 5As shown, in the above-mentioned vibration damper 11, the vibration damping functional component may include a vibration damping motor and / or a vibration damping cavity 113, wherein one of the stator and the mover of the vibration damping motor is connected to the base plate 111 and the other is connected to the top plate 112. The top plate 112 is connected to the vibration damping cavity 113 in a manner that allows it to move along the depth direction of the vibration damping cavity 113, and the vibration damping cavity 113 is sealed to form a sealed cavity, the air pressure in the sealed cavity being adjustable.

[0098] Accordingly, the above-mentioned control of the overall output of the second force of the damping functional components of the dampers 11 in all the damping support legs 10 can specifically include: controlling the output of the damping motor of the damping motor of the dampers 11 in all the damping support legs 10 and / or the air inlet and outlet of the sealed cavity to make the overall output of the second force of the damping functional components of the dampers 11 in all the damping support legs 10.

[0099] Furthermore, it should be noted that the specific implementation of each of the above steps can be found in the previous vibration damping equipment embodiment, so it will not be repeated here.

[0100] As can be seen from the above, the vibration reduction method provided in this embodiment is applied to vibration reduction equipment. By receiving the motion feedback signal of the bearing platform in the vibration reduction equipment, and according to the received motion feedback signal, the vibration reduction functional components of all vibration reduction support legs are controlled to output a first target force as a whole. The first target force acts on the bearing platform and cancels the vibration force of the bearing platform during the feedback stage. In this way, it is realized that by adding external devices to the vibration reduction support legs of the vibration reduction equipment, and adjusting the first target force of the vibration reduction output of the vibration reduction device on the bearing platform in real time based on the feedback signal of the bearing platform, the stability of the bearing platform can be effectively guaranteed. It can also solve the problem that the existing vibration reduction equipment cannot meet the high output requirements of the vibration reduction system while ensuring high vibration reduction accuracy due to the lag in vibration reduction response and insufficient output. This allows the vibration reduction system to take into account the requirements of fast response, high output and high-precision vibration reduction, and significantly improves the vibration reduction performance of the system.

[0101] The above description is merely a preferred embodiment of this application and is not intended to limit this application. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of this application should be included within the protection scope of this application.

Claims

1. A vibration damping device, characterized in that, include: At least one vibration damping support leg, each of the vibration damping support legs including a vibration damper, an external device for outputting force, and a top adapter plate and a bottom adapter plate; The vibration damper includes a bottom plate and a top plate arranged at relative intervals, and a vibration damping functional component disposed between the bottom plate and the top plate. In each vibration damping support leg, a part of the structure of the external device is connected to the top plate of the vibration damper through the top adapter plate, and another part of the structure of the external device is connected to the bottom plate of the vibration damper through the bottom adapter plate.

2. The vibration damping device according to claim 1, characterized in that, The vibration damping device also includes: The support platform, the object to be isolated, and the foundation, wherein the support platform supports the object to be isolated and is connected to the foundation through at least one vibration damping support leg; The control module is configured to receive the motion feedback signal of the support platform and, based on the motion feedback signal, control the vibration damping functional components of the vibration dampers in all the vibration damping support legs to output a first target force as a whole. The first target force acts on the support platform and counteracts the vibration force of the support platform during the feedback phase.

3. The vibration damping device according to claim 1, characterized in that, The overall output range of the vibration damping functional components of the vibration dampers in all vibration damping support legs is smaller than the overall output range of the external devices in all vibration damping support legs, and the overall output accuracy of the vibration damping functional components of the vibration dampers in all vibration damping support legs is greater than the overall output accuracy of the external devices in all vibration damping support legs.

4. The vibration damping device according to claim 1, characterized in that, The external device is an external motor, and in each of the vibration damping support legs, one of the stator and the mover of the external motor is connected to the top plate of the vibration damper through the top adapter plate, and the other is connected to the bottom plate of the vibration damper through the bottom adapter plate.

5. The vibration damping device according to claim 4, characterized in that, In each of the vibration damping support legs, the top adapter plate is located on the side of the top plate away from the bottom plate and is connected to the top plate, and the top adapter plate protrudes beyond the edge of the top plate. One of the stator and mover of the external motor is connected to the portion of the top adapter plate that protrudes beyond the edge of the top plate.

6. The vibration damping device according to claim 5, characterized in that, In each of the vibration damping support legs, the bottom adapter plate is located on the side of the base plate facing the top plate and is connected to the base plate, and is opposite to the portion of the top adapter plate that protrudes beyond the edge of the top plate. Furthermore, the other of the stator and rotor of the external motor is connected to the base plate adapter plate.

7. A vibration reduction method, characterized in that, This invention relates to vibration damping equipment, which includes at least one vibration damping support leg, a support platform, an object to be isolated, and a foundation. Each vibration damping support leg includes a vibration damper, an external device for outputting force, a top adapter plate, and a bottom adapter plate. The vibration damper includes a bottom plate and a top plate spaced apart from each other, and a vibration damping functional component disposed between the bottom plate and the top plate. In each vibration damping support leg, a portion of the external device is connected to the top plate of the vibration damper via the top adapter plate, and another portion of the external device is connected to the bottom plate of the vibration damper via the bottom adapter plate. The support platform supports the object to be isolated and is connected to the foundation via the at least one vibration damping support leg. The vibration reduction method includes: Receive the motion feedback signal of the support platform; Based on the motion feedback signal, the vibration damping functional components of the dampers in all the vibration damping support legs are controlled to output a first target force as a whole. The first target force acts on the support platform and counteracts the vibration force of the support platform during the feedback phase.

8. The vibration reduction method according to claim 7, characterized in that, The vibration reduction method further includes: Receive the first motion feedforward signal of the vibration-isolated object and the second motion feedforward signal of the foundation; Based on the first motion feedforward signal and the second motion feedforward signal, the external devices in all vibration damping support legs are controlled to output a second target force as a whole. The second target force acts on the support platform and at least partially offsets the vibration force of the support platform during the feedforward phase.

9. The vibration reduction method according to claim 8, characterized in that, The step of controlling the external devices in all vibration-damping support legs to output a second target force based on the first motion feedforward signal and the second motion feedforward signal includes: Based on the first motion feedforward signal and the second motion feedforward signal, a power output matrix is ​​generated, and the power output matrix contains the target power output information corresponding to each of the external devices. Control each of the external devices to output a force consistent with the corresponding target output information.

10. The vibration reduction method according to claim 8, characterized in that, The step of controlling the external devices in all vibration-damping support legs to output a second target force based on the first motion feedforward signal and the second motion feedforward signal includes: Based on the first motion feedforward signal and the second motion feedforward signal, determine whether the vibration force of the bearing platform in the feedforward stage exceeds the overall output range of the external devices in all vibration damping support legs; If so, control all the external devices in the vibration damping support legs to output a first force as a whole, and control all the vibration damping functional components of the vibration dampers in the vibration damping support legs to output a second force as a whole, so that the second force and the first force can jointly counteract the vibration force of the support platform in the feedforward stage; If not, then control all the external devices in the vibration damping support legs to output a third force as a whole, so as to offset the vibration force of the bearing platform in the feedforward stage.

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