Substrate processing apparatus

Abstract

A substrate processing apparatus may include: a drying housing having an internal space for performing a drying process; a process fluid supply configured to receive a process fluid used in the drying process; a supply fluid line connected to the drying housing and the process fluid supply; a reduced pressure fluid line connected to the supply fluid line; and a controller configured to control an operation of the substrate processing apparatus. The controller is configured to stop the supply of the process fluid to the drying housing through the supply fluid line and discharge the process fluid remaining in the supply fluid line through the decompression fluid line.

Description

Cross-references to related applications

[0001] This application claims priority and benefit to Korean Patent Application No. 10-2024-0064615, filed with the Korean Intellectual Property Office on May 17, 2024, the entire contents of which are incorporated herein by reference. Technical Field

[0002] This disclosure relates to a substrate processing apparatus capable of processing substrates using fluids in a supercritical state. Background Technology

[0003] Semiconductor devices can be manufactured using various processes, including photolithography, which forms circuit patterns on substrates such as silicon wafers. During the manufacturing process, various foreign substances, such as particles, organic contaminants, and metallic impurities, may be generated. These foreign substances can cause defects in the substrate, directly affecting the performance and yield of the semiconductor device. Therefore, cleaning processes can be performed during semiconductor device manufacturing to remove these foreign substances.

[0004] The cleaning process can be carried out through a series of steps, including a chemical process to remove foreign matter from the substrate using chemical agents, a rinsing process to remove the chemical agents with pure water, and a drying process to dry the substrate. Summary of the Invention

[0005] This disclosure describes a substrate processing apparatus for reducing defects generated during substrate drying processes.

[0006] However, the purpose of this invention is not limited to the above-described purpose, and the described embodiments can be extended in various ways.

[0007] A substrate processing apparatus may include: a drying housing having an internal space for performing a drying process; a process fluid supply unit configured to receive process fluid used in the drying process; a supply fluid line connected to the drying housing and connected to the process fluid supply unit; a depressurization fluid line connected to the supply fluid line; and a controller configured to control the operation of the substrate processing apparatus. The controller is configured to: start the drying process, and after starting the drying process, stop supplying process fluid to the drying housing through the supply fluid line, and discharge any residual process fluid in the supply fluid line through the depressurization fluid line.

[0008] A substrate processing apparatus may include: a drying housing having an internal space for performing a drying process; a process fluid supply unit configured to receive process fluid used in the drying process; a supply fluid line connected to the drying housing and connected to the process fluid supply unit; a depressurization fluid line connected to the supply fluid line; and a controller configured to control the operation of the substrate processing apparatus. The controller is configured to: stop supplying process fluid to the drying housing after the internal pressure of the drying housing reaches a first threshold pressure, and to discharge any residual process fluid in the supply fluid line through the depressurization fluid line before resupplying process fluid to the drying housing.

[0009] A substrate processing apparatus may include: a drying housing having an internal space for performing a drying process; a process fluid supply unit configured to receive process fluid used in the drying process; a supply fluid line connected to the drying housing and the process fluid supply unit; and a pressure-reducing fluid line connected to the supply fluid line, wherein the supply fluid line may include: a main fluid line having a first end connected to the process fluid supply unit; a first branch fluid line having a first end connected to a second end of the main fluid line and a second end connected to the drying housing; and a second branch fluid line having a first end connected to the second end of the main fluid line and a second end connected to the drying housing. The pressure-reducing fluid line provides a fluid path for discharging the process fluid from the supply fluid line.

[0010] A method of manufacturing a substrate may include: performing a liquid processing process on the substrate in a liquid processing chamber; transferring the substrate to a drying chamber; and performing a drying process on the substrate in a drying shell of the drying chamber. The drying process includes: supplying a supercritical process fluid to a supply fluid line connected to the drying shell to supply process fluid to the drying shell; determining that the pressure in the drying shell has reached a first threshold pressure; stopping the supply of process fluid to the drying shell in response to the pressure in the drying shell reaching the first threshold pressure; and reducing the pressure of the process fluid in the supply fluid line via a depressurization fluid line connected to the supply fluid line.

[0011] According to an embodiment, a substrate processing apparatus capable of preventing defects from occurring during a substrate drying process can be provided. Attached Figure Description

[0012] Figure 1 This is a planar top view of the substrate processing apparatus according to an embodiment.

[0013] Figure 2 yes Figure 1 A cross-sectional view of the liquid processing chamber.

[0014] Figure 3 It shows that it includes Figure 1The diagram shows the structure of the drying shell in the drying chamber and the fluid pipelines connected to it.

[0015] Figure 4 This is a graph showing the internal pressure changes of the drying shell during the execution of the drying process according to an embodiment.

[0016] Figure 5 This is a diagram showing the state of the drying chamber as the process fluid is supplied to the drying shell during the pressurization step.

[0017] Figure 6 This is a diagram showing the state of the drying chamber as the internal pressure of the drying shell is reduced during the flow step.

[0018] Figure 7 This is a diagram showing the state of the drying chamber as the process fluid is supplied to the drying shell during the flow step.

[0019] Figure 8 This is a diagram showing the state of the drying chamber as the process fluid inside the drying shell is discharged during the drying step.

[0020] Figure 9 This is a diagram illustrating a fluid pipeline structure connected to a drying housing according to another embodiment.

[0021] Figure 10 This is a diagram illustrating a fluid pipeline structure connected to a drying housing according to another embodiment.

[0022] Figure 11 This is a diagram illustrating a fluid pipeline structure connected to a drying housing according to another embodiment.

[0023] Figure 12 This is a diagram illustrating a fluid pipeline structure connected to a drying housing according to another embodiment.

[0024] Figure 13 This is a diagram illustrating a fluid pipeline structure connected to a drying housing according to another embodiment.

[0025] Figure 14 This is a diagram illustrating a fluid pipeline structure connected to a drying housing according to another embodiment.

[0026] Figure 15 It is shown in Figure 4 A diagram showing the state of the drying chamber supplying process fluid to the drying shell during the pressurization step described in the figure.

[0027] Figure 16 It is shown in Figure 4 A diagram showing the state of the drying chamber as the pressure inside the drying shell is reduced during the flow steps described in the diagram.

[0028] Figure 17It is shown in Figure 4 A diagram showing the state of the drying chamber supplying process fluid to the drying shell during the flow step described above.

[0029] Figure 18 This is a graph showing the internal pressure changes of the drying shell during the drying process according to another embodiment.

[0030] Figure 19 It is shown in Figure 18 A diagram showing the state of the drying chamber as the process fluid is supplied to the drying shell during the flow steps described in the diagram.

[0031] Figure 20 This is a diagram illustrating a fluid pipeline structure connected to a drying housing according to another embodiment.

[0032] Figure 21 It is shown in Figure 4 In the pressurization step described in or Figure 18 A diagram showing the state of the drying chamber supplying process fluid to the drying shell during the pressurization step described in the figure.

[0033] Figure 22 This is a diagram showing the state of the drying chamber as the process fluid is supplied to the drying shell during the flow step.

[0034] Figure 23 This is a diagram illustrating a fluid pipeline structure connected to a drying housing according to another embodiment. Detailed Implementation

[0035] The inventive concept will now be described more fully with reference to the accompanying drawings, in which various embodiments are illustrated. As those skilled in the art will recognize, the described embodiments can be modified in various different ways without departing from the spirit or scope of the inventive concept.

[0036] To clearly describe the embodiments, components or parts that are not related to the inventive concept or are commonly understood by those skilled in the art may be omitted, and the same or similar constituent elements throughout the specification may be indicated by the same reference numerals.

[0037] Furthermore, the dimensions and thicknesses of each element are shown arbitrarily in the accompanying drawings for ease of description, and the invention is not necessarily limited to the embodiments shown in the drawings. For clarity, the thicknesses of layers, films, panels, regions, areas, etc., may be exaggerated in the drawings. For ease of description, the thicknesses of certain layers and regions may be exaggerated in the drawings.

[0038] It should be understood that when an element such as a layer, film, region, or substrate is referred to as being "on" or "above" another element, it can be directly on that other element or there may be intermediate elements present. In contrast, when an element is referred to as being "directly" on "above" another element, there are no intermediate elements present. Furthermore, in this specification, the terms "on" or "above" mean disposed above or below the object portion, and do not necessarily mean disposed on the upper side of the object portion based on the direction of gravity.

[0039] In addition, unless explicitly stated otherwise, the word “including” and its variations such as “comprising” or “containing” will be understood to mean that the said element is included, but not that any other element is excluded.

[0040] Furthermore, throughout the specification, the phrase "in plan view" or "on a plane" indicates viewing the target portion from the top, and the phrase "in section view" or "on a section" indicates viewing the section formed by vertically cutting the target portion from the side.

[0041] Figure 1 This is a plan view of the substrate processing apparatus 1 according to an embodiment.

[0042] Reference Figure 1 The substrate processing apparatus 1 according to the embodiment may include an index module 2 and a process module 3.

[0043] Index module 2 can allow the substrate ( Figure 2 The S) enters and exits between the process module 3 and the outside. The index module 2 can be an equipment front-end module (EFEM). The index module 2 may include a loading port 20 and a transmitter 22.

[0044] The loading port 20, transmitter 22, and process module 3 can be arranged sequentially in a line. Here, the direction in which the loading port 20, transmitter 22, and process module 3 are arranged can be referred to as the first direction X, and in the top view, the direction perpendicular to the first direction X can be referred to as the second direction Y, and the direction perpendicular to the first direction X and the second direction Y can be referred to as the third direction Z. Furthermore, the third direction Z can be referred to as the height direction.

[0045] At least one loading port 20 may be provided in the index module 2. The loading port 20 may be provided on the first side of the transmitter 22. When the number of loading ports 20 is set to multiple, the multiple loading ports 20 may be arranged in a line along the second direction Y. The number and arrangement of the loading ports 20 are not limited to the above examples and may be changed according to the footprint of the substrate processing apparatus 1, process efficiency, arrangement relationship with other equipment, etc. The loading port 20 may have a carrier C located thereon, in which the substrate S is housed. The carrier C may be transferred from the outside and loaded onto the loading port 20. In addition, the carrier C may be unloaded from the loading port 20 and transferred to the outside. For example, the carrier C may be transferred by a transfer device such as an overhead crane transfer machine (OHT). In addition, the transfer of the carrier C may be carried out by an automated guided vehicle, a rail-guided vehicle, etc., or may be carried out by a worker. The carrier C may house the substrate S. The carrier C may be a front-opening wafer transfer box (FOUP), etc.

[0046] The transmitter 22 can be positioned between the loading port 20 and the process module 3, and can transfer the substrate S between the loading port 20 and the process module 3. The transmitter 22 may include an indexing robot 220 and an indexing track 221.

[0047] The indexing robot 220 can pick up and transport the substrate S. The indexing track 221 provides a path for the indexing robot 220 to move. The indexing track 221 can extend along a second direction Y, such that its length direction corresponds to the arrangement direction of the multiple loading ports 20. The indexing robot 220 can be mounted on the indexing track 221 and can move along it. Accordingly, the indexing robot 220 can move along the second direction Y on the indexing track 221 and pull the substrate S from the carrier C located at the loading port 20 and introduce it into the process module 3, or pull the substrate S from the process module 3 and accommodate it in the carrier C located at the loading port 20.

[0048] Furthermore, index track 221 can be omitted. In this case, index robot 220 can be located in the central part of transmitter 22.

[0049] Process module 3 can perform a predetermined process on the introduced substrate S. The process performed by process module 3 can be a cleaning process. Process module 3 may include buffer chamber 30, transfer chamber 40, and process chambers 50 and 60.

[0050] Buffer chamber 30 and transfer chamber 40 may be disposed along a first direction X. Transfer chamber 40 may be configured such that its length direction is oriented towards the first direction X. Process chambers 50 and 60 may process a substrate. Process chambers 50 and 60 may be configured to be connected to transfer chamber 40. Process chambers 50 and 60 may include a liquid processing chamber 50 and a drying chamber 60. Liquid processing chamber 50 may be connected to transfer chamber 40. Drying chamber 60 may be connected to transfer chamber 40. Liquid processing chamber 50 and drying chamber 60 may be disposed along a second direction Y on a side surface of transfer chamber 40. For example, liquid processing chamber 50 may be disposed along the second direction Y on a first side of transfer chamber 40, and drying chamber 60 may be disposed along the second direction Y on a second side of transfer chamber 40 (i.e., on opposite sides of the direction in which liquid processing chamber 50 is disposed).

[0051] The transfer chamber 40 may include a transfer track 400 and a transfer robot 401.

[0052] The transport track 400 can provide the path along which the transport robot 401 moves. The length direction of the transport track 400 can be oriented towards a first direction X.

[0053] The transfer robot 401 can move on the transfer track 400 and can transfer the substrate S between the buffer chamber 30, the liquid processing chamber 50 and the drying chamber 60.

[0054] The number of liquid processing chambers 50 can be set to one or more. When the number of liquid processing chambers 50 is set to multiple, the multiple liquid processing chambers 50 can be arranged along a first direction X, parallel to the length direction of the transfer chamber 40. Furthermore, the multiple liquid processing chambers 50 can be arranged to be stacked along a third direction. Additionally, the multiple liquid processing chambers 50 can be arranged in a combination of an arrangement along the first direction X and an arrangement along a third direction Z.

[0055] The number of drying chambers 60 can be set to one or more. When the number of drying chambers 60 is set to multiple, the multiple drying chambers 60 can be arranged along a first direction X, parallel to the length direction of the transfer chamber 40. Furthermore, the multiple drying chambers 60 can be arranged to be stacked along a third direction. Additionally, the multiple drying chambers 60 can be arranged in a combination of an arrangement along the first direction X and an arrangement along a third direction Z.

[0056] The drying chamber 60 can perform a drying process on the substrate S. The liquid processing process performed in the liquid processing chamber 50 and the drying process performed in the drying chamber 60 can be processes performed sequentially on the substrate. In some embodiments, a liquid processing process can be performed on a first substrate in the liquid processing chamber 50 while a drying process is performed on a second substrate in the drying chamber. Furthermore, in some cases, the liquid processing process performed in the liquid processing chamber 50 and the drying process performed in the drying chamber 60 can be selectively performed, such that only one process is performed.

[0057] The arrangement of the buffer chamber 30, transfer chamber 40, liquid processing chamber 50, and drying chamber 60 is not limited to the example described above and can be modified to take into account process efficiency. For example, the liquid processing chamber 50 and the drying chamber 60 may be arranged on the same side surface as the transfer chamber 40 along the first direction X, or they may be stacked on top of each other.

[0058] A buffer chamber 30 can be disposed between the index module 2 and the transfer chamber 40. The buffer chamber 30 can also be disposed between the transmitter 22 and the transfer chamber 40. The buffer chamber 30 allows the substrate S being transferred between the index module 2 and the process module 3 to temporarily remain in place. Accordingly, the buffer chamber 30 can reduce congestion during the transfer of the substrate S and ensure that the substrate S is transferred efficiently.

[0059] Figure 2 yes Figure 1 Cross-sectional view of the liquid processing chamber 50.

[0060] Reference Figure 2 The liquid processing chamber 50 may include a liquid processing housing 500, a support plate 510, and a fluid supply unit 520.

[0061] The liquid processing chamber 50 can use chemical agents to perform liquid processing processes to process the substrate S. For example, the liquid processing chamber 50 can perform chemical processes, rinsing processes, and organic solvent substitution processes. The liquid processing housing 500 can provide an enclosed internal space (e.g., the interior of the liquid processing housing) in which the processing of the substrate S is carried out.

[0062] A support plate 510 may be disposed inside the liquid processing housing 500. The support plate 510 may support the substrate S. The support plate 510 may rotate about a third axis in the Z direction. For example, the lower part of the support plate 510 may be connected to the upper part of a support shaft 515. The lower part of the support shaft 515 may be connected to a driver 516. The support shaft 515 may be rotated by power provided by the driver 516.

[0063] Multiple support pins 511 can be disposed on the support plate 510. The support pins 511 can be configured to protrude along a third direction Z on the upper surface of the support plate 510. The multiple support pins 511 can be configured to be spaced apart from each other by a predetermined interval. For example, the multiple support pins 511 can be arranged on an annular ring having a predetermined radius. When the substrate S is located on the support plate 510, the bottom surface of the substrate S can be placed on the support pins 511.

[0064] Multiple clamping pins 512 can be disposed on the support plate 510. The clamping pins 512 can be configured to protrude along a third direction Z on the upper surface of the support plate 510. The length of the clamping pin 512 in the third direction Z can be configured to be longer than that of the support pin 511, and correspondingly, the upper end of the clamping pin 512 can be located above the upper end of the support pin 511. The clamping pin 512 can be positioned away from the center of the support plate 510, a position further away from the center of the support plate 510 than the support pin 511. The clamping pin 512 can move between a fixed position and a pick-up position along the radial direction of the support plate 510. Here, the fixed position can be a position offset from the center of the support plate 510 by a distance corresponding to the radius of the substrate S, and the pick-up position can be a position further away from the center of the support plate 510 than the fixed position. When the substrate S is loaded onto the support plate 510 by the transfer robot 401, the clamping pin 512 can be located at the pick-up position. When the substrate S is mounted on the support plate 510, the clamping pin 512 can move to a fixed position and contact the side surface of the substrate S to secure it during process execution. Accordingly, the clamping pin 512 prevents the substrate S from separating from the support plate 510 due to rotational force when the support plate 510 rotates. When the process is complete, the clamping pin 512 can move to a pick-up position, and the transfer robot 401 picks up the substrate S.

[0065] The fluid supply unit 520 can supply fluid for processing the substrate S to the support plate 510. Accordingly, the fluid for processing the substrate S can be supplied to the substrate S located on the support plate 510. The fluid supply unit 520 may include nozzles 531, 541 and 551 and nozzle supports 532, 542 and 552.

[0066] Nozzles 531, 541, and 551 can spray fluid for processing the substrate S. Nozzle supports 532, 542, and 552 can be connected to nozzles 531, 541, and 551. Nozzle supports 532, 542, and 552 can move the position of nozzles 531, 541, and 551. Accordingly, nozzles 531, 541, and 551 can move between a process position and a standby position. The process position can be the position where nozzles 531, 541, and 551 face the support plate 510 in the third direction Z. The standby position can be the position where nozzles 531, 541, and 551 are outside the area facing the support plate 510 in the third direction Z.

[0067] The fluid supply unit 520 may include a chemical fluid supply unit 530, a flushing fluid supply unit 540, and an alternative fluid supply unit 550. The chemical fluid supply unit 530, the flushing fluid supply unit 540, and the alternative fluid supply unit 550 may spray different fluids.

[0068] The chemical fluid supply unit 530 may include a chemical nozzle 531 and a chemical nozzle support 532.

[0069] The chemical nozzle 531 can spray chemical agents. The chemical agent can be a cleaning solution. For example, the chemical agent can be: hydrogen peroxide solution; a solution in which ammonia, hydrochloric acid, or sulfuric acid are mixed with hydrogen peroxide solution; hydrofluoric acid solution, etc. The chemical nozzle support 532 can be connected to the chemical nozzle 531. The chemical nozzle support 532 can move the chemical nozzle 531 to a standby position and a process position.

[0070] The rinsing fluid supply unit 540 may include a rinsing nozzle 541 and a rinsing nozzle support 542. The rinsing nozzle 541 can spray a rinsing solution. The rinsing solution may be ultrapure water, etc. The rinsing nozzle support 542 can be connected to the rinsing nozzle 541. The rinsing nozzle support 542 can move the rinsing nozzle 541 to a standby position and a process position. After the chemical reagent is supplied to the substrate S, the rinsing fluid supply unit 540 can supply rinsing solution to the substrate S to remove residual chemical reagents in the substrate S.

[0071] The alternative fluid supply unit 550 may include an alternative nozzle 551 and an alternative nozzle support 552. The alternative nozzle 551 may spray organic solvents. The organic solvents may be isopropanol, ethylene glycol, 1-propanol, tetrahydrate franc, 4-hydroxyl, 4-methyl, 2-pentanone, 1-butanol, 2-butanol, methanol, ethanol, n-propanol, dimethyl ether, etc.

[0072] The alternative nozzle support 552 can be connected to the alternative nozzle 551. The alternative nozzle support 552 can move the alternative nozzle 551 to a standby position and a process position. After the rinsing solution is supplied to the substrate S, the alternative fluid supply unit 550 can supply organic solvent to the substrate S, so that the residual rinsing solution in the substrate S can be replaced by the organic solvent.

[0073] Figure 3 It shows that it includes Figure 1 A diagram showing the structure of the drying housing 600 in the drying chamber 60 and the fluid pipelines connected thereto.

[0074] Reference Figure 3 The drying chamber 60 can use a supercritical fluid to dry the substrate S. The drying chamber 60 may include a drying housing 600.

[0075] The space for performing the drying process can be located inside the drying housing 600 (e.g., the drying housing 600 can have an internal space for performing the drying process). The drying housing 600 can be provided with a pressure-resistant structure capable of withstanding high pressure.

[0076] The drying housing 600 can be connected to a process fluid supply unit 610 via a supply fluid line 620. The process fluid supply unit 610 can receive and / or store process fluid for performing a drying process within the drying housing 600. For example, the process fluid supply unit can be a gas container storing process fluid. In another example, the process fluid supply unit can be a connector configured to connect to a process fluid supply unit, such as a container storing process fluid or an external source of process fluid. The process fluid supply unit 610 can supply process fluid in a supercritical state (e.g., the process fluid may be in a supercritical state). The process fluid can be supplied to the process fluid supply unit in a supercritical state, or the process fluid supply unit can convert the process fluid to a supercritical state. For example, the process fluid supply unit 610 can convert the process fluid to a supercritical state by heating the process fluid to a supercritical threshold temperature or higher and pressurizing the process fluid to a supercritical threshold pressure or higher. The process fluid supply unit may include heating elements and / or compressors for heating and compressing the process fluid. The process fluid may be carbon dioxide, etc. The supercritical process fluid generated in the process fluid supply unit 610 can be supplied to the drying shell 600 through the supply fluid line 620.

[0077] Hereinafter, when referring to the supply fluid line 620, during the time the process fluid is supplied from the process fluid supply unit 610 to the drying shell 600, the direction in which the process fluid is introduced can be referred to as the upstream direction, and the direction in which the process fluid flows can be referred to as the downstream direction. That is, based on a point in the supply fluid line 620, the first side facing the process fluid supply unit 610 can be the upstream side, and the opposite second side facing the drying shell 600 can be the downstream side.

[0078] Valves 631 and 632 can be disposed in the supply fluid line 620. When valves 631 and 632 are open, process fluid can flow through valves 631 and 632 and along the supply fluid line 620. When valves 631 and 632 are closed, valves 631 and 632 can prevent the flow of process fluid in the supply fluid line 620. Valves 631 and 632 can include an upstream valve 631 and a downstream valve 632. The upstream valve 631 and the downstream valve 632 can be configured to be spaced apart from each other in the supply fluid line 620. The downstream valve 632 can be disposed downstream of the upstream valve 631. For example, the upstream valve 631 can be disposed at the upstream end of the supply fluid line 620, adjacent to the process fluid supply section 610. The downstream valve 632 can be disposed at the downstream end of the supply fluid line 620, adjacent to the drying housing 600.

[0079] Filters 634 and 635 can be installed in the supply fluid line 620. Filters 634 and 635 can filter impurities contained in the process fluid flowing through the supply fluid line 620. Filters 634 and 635 can include an upstream filter 634 and a downstream filter 635. The upstream filter 634 can be installed downstream of the upstream valve 631. The upstream filter 634 can be positioned adjacent to the upstream valve 631 and can also be installed upstream of the downstream valve 632. The downstream filter 635 can be installed downstream of the downstream valve 632.

[0080] A pressure-reducing fluid line 640 can be connected to a supply fluid line 620. The pressure-reducing fluid line 640 branches off from the supply fluid line 620 and allows process fluid to drain from the supply fluid line 620. The pressure-reducing fluid line 640 can be connected to the supply fluid line 620 in the section between upstream valve 631 and downstream valve 632. The pressure-reducing fluid line 640 can also be connected to the supply fluid line 620 in the section between upstream filter 634 and downstream valve 632. A pressure-reducing valve 641 can be located on the pressure-reducing fluid line 640. When the pressure-reducing valve 641 is open, process fluid can flow from the supply fluid line 620 to the pressure-reducing fluid line 640. When the pressure-reducing valve 641 is closed, it prevents the flow of process fluid from the supply fluid line 620 to the pressure-reducing fluid line 640.

[0081] A drain fluid line 660 can be connected to a drying housing 600. The drain fluid line 660 can discharge used process fluid from inside the drying housing 600. When process fluid, fluid removed from the substrate by the drying process, etc., are discharged from inside the drying housing 600 through the drain fluid line 660, the pressure inside the drying housing 600 can be reduced compared to when no fluid is discharged. A drain valve 661 can be located in the drain fluid line 660. When the drain valve 661 is open, process fluid can pass through the drain valve 661 and flow along the drain fluid line 660. When the drain valve 661 is closed, the drain valve 661 can block the flow of process fluid in the drain fluid line 660.

[0082] The substrate processing apparatus may include a controller 670 for controlling various operations of the substrate processing apparatus. For example, the controller 670 may communicate with various valves, sensors, and other components of the substrate processing apparatus, and may receive data and / or send data and / or control signals to various valves, sensors, and other components of the substrate. In the figures, the dashed lines connecting the controller 670 represent communication connections (which may be wired or wireless) between the controller 670 and the various elements to be controlled. For example, the controller 670 may send control signals to valves to open, close, or change to an intermediate state between an open and closed state. The controller 670 may communicate with pressure sensors and open / and / or close valves in response to the pressure sensor sensing that the pressure exceeds a threshold pressure. In other examples, the valves may be manually controlled by an operator.

[0083] Although not shown, a controller may include one or more of the following components: at least one central processing unit (CPU) configured to execute computer program instructions to perform various processes and methods; random access memory (RAM) and read-only memory (ROM) configured to access and store data and information as well as computer program instructions; input / output (I / O) devices configured to provide input and / or output to the controller (e.g., keyboard, mouse, monitor, speaker, printer, modem, network card, etc.); and storage media or other suitable types of memory (e.g., RAM, ROM, programmable read-only memory (PROM), erasable programmable read-only memory (EPROM), electrically erasable programmable read-only memory (EEPROM), disk, optical disk, floppy disk, hard disk, removable cassette tape, flash drive, any type of tangible and non-transitory storage medium) in which data and / or instructions may be stored. In addition, the controller may include: an antenna; a network interface that provides a wireless and / or wired digital and / or analog interface to one or more networks via one or more network connections (not shown); a power supply that provides appropriate alternating current (AC) or direct current (DC) to power one or more components of the controller; and a bus that allows communication between the various exposed components of the controller.

[0084] Figure 4 This is a graph showing the internal pressure changes of the drying housing 600 during the drying process according to an embodiment.

[0085] Reference Figure 4 During the drying process according to the embodiment, the internal pressure of the drying housing 600 can be changed in the order of pressurization step S1, flow step S2, and discharge step S3. These steps can be performed manually by an operator or by the control unit of the substrate processing apparatus.

[0086] During the pressurization step S1, the internal pressure of the drying housing 600 can be increased. For example, during the pressurization step S1, the internal pressure of the drying housing 600 can be increased to a first pressure P1. The first pressure P1 can be a value exceeding the threshold pressure of the process fluid. For example, the first pressure P1 can be 150 bar.

[0087] During flow step S2, the internal pressure of the drying shell 600 can be maintained within a predetermined range. During flow step S2, the internal pressure of the drying shell 600 can be maintained between a first pressure P1 and a second pressure P2. The second pressure P2 can be lower than the first pressure P1. The second pressure P2 can be higher than the threshold pressure of the process fluid. During flow step S2, the internal pressure of the drying shell 600 can decrease and increase at least once, and this process can be repeated. Figure 4The image shows an example of the internal pressure of the drying housing 600 decreasing and increasing multiple times.

[0088] During the discharge step S3, the internal pressure of the drying shell 600 decreases. During the discharge step S3, the internal pressure of the drying shell 600 may decrease below the threshold pressure of the process fluid. For example, during the discharge step S3, the internal pressure of the drying shell 600 may decrease to a normal pressure (e.g., non-supercritical).

[0089] Figure 5 This is a diagram showing the state of the drying chamber as the process fluid is supplied to the drying housing 600 during the pressurization step S1.

[0090] Reference Figure 5 During the pressurization step S1, both valves 631 and 632 are opened, and process fluid can be supplied from the process fluid supply unit 610 to the drying housing 600. During this period, the pressure reducing valve 641 can remain closed, preventing process fluid from flowing from the supply fluid line 620 to the pressure reducing fluid line 640. Furthermore, the discharge valve 661 can remain closed, preventing process fluid from being discharged through the discharge fluid line 660. During the pressurization step S1, the internal pressure of the drying housing 600 can increase as time passes with the process fluid supplied to it. The supply of process fluid can continue until the internal pressure of the drying housing 600 reaches a first pressure P1. In the pressurization step S1, the flow rate of the process fluid flowing along the supply fluid line 620 can be constant or vary over time.

[0091] Figure 6 This is a diagram showing the state of the drying chamber during the flow step S2, where the pressure is reduced inside the drying housing 600.

[0092] Reference Figure 6 When the internal pressure of the drying housing 600 reaches the first pressure P1, valves 631 and 632 can be closed, preventing the supply of process fluid from the process fluid supply unit 610 to the drying housing 600. Furthermore, the drain valve 661 can be opened, allowing at least some of the process fluid inside the drying housing 600 to be discharged through the drain fluid line 660. Accordingly, the internal pressure of the drying housing 600 decreases. Discharging process fluid through the drain fluid line 660 can continue until the internal pressure of the drying housing 600 reaches a predetermined pressure, or it can be done for a preset time.

[0093] When the supply of process fluid from the process fluid supply section 610 to the drying shell 600 is blocked, the pressure reducing valve 641 can be opened, and process fluid can flow from the supply fluid line 620 to the pressure reducing fluid line 640. Specifically, the pressure reducing valve 641 can be opened when the upstream valve 631 and the downstream valve 632 are closed. Accordingly, the process fluid remaining in the portion between the upstream valve 631 and the downstream valve 632 can be discharged through the pressure reducing fluid line 640. When the supply of process fluid to the drying shell 600 is blocked due to the closure of valves 631 and 632, the opening time of the pressure reducing valve 641 can be the same as the opening time of the discharge valve 661. That is, when at least some of the process fluid inside the drying shell 600 is discharged through the discharge fluid line 660, the process fluid remaining in the supply fluid line 620 can be discharged through the pressure reducing fluid line 640. Furthermore, when the supply of process fluid to the drying shell 600 is blocked due to the closure of valves 631 and 632, the opening time of the pressure reducing valve 641 can be different from the opening time of the discharge valve 661. That is, when at least some of the process fluid inside the drying housing 600 is discharged through the discharge fluid line 660, the pressure reducing valve 641 can be opened for a period of time corresponding to a portion of the time when the discharge valve 661 is open.

[0094] Figure 7 This is a diagram showing the state of the drying chamber 60 in which process fluid is supplied to the drying shell 600 during flow step S2.

[0095] Reference Figure 7 During flow step S2, valves 631 and 632 can be reopened, and process fluid can be supplied to the drying housing 600. Furthermore, pressure reducing valve 641 can be closed, preventing process fluid from escaping through pressure reducing fluid line 640. Additionally, discharge valve 661 can be closed, preventing process fluid from draining from inside the drying housing 600. Accordingly, the pressure in the drying housing 600 can be increased.

[0096] The supply of process fluid can continue until the internal pressure of the drying shell 600 reaches a predetermined pressure, or it can continue for a preset time.

[0097] During flow step S2 Figure 6 and Figure 7The process described herein can be repeated at least once. Accordingly, during the flow step S2, the internal pressure of the drying housing 600 can be maintained between the first pressure P1 and the second pressure P2. Furthermore, during the processes of discharging the process fluid from the drying housing 600 and supplying process fluid into the drying housing 600, the flow of the process fluid can occur inside the drying housing 600 (e.g., the process fluid can continue to flow in the drying housing 600 instead of stagnating in the drying housing). Accordingly, it is possible to prevent the process fluid from stagnating around the substrate S, which would lead to a decrease in the efficiency of the drying process. In addition, during the process fluid discharge from the drying housing 600, fluid is removed from the substrate S, and drying efficiency can be improved.

[0098] During flow step S2, during the period when the supply of process fluid to the drying shell 600 is stopped through the supply fluid line 620, the residual process fluid in the supply fluid line 620 can change from a supercritical state to a gaseous state. If the gaseous process fluid flows into the drying shell 600, the efficiency of the drying process decreases. Furthermore, the decrease in drying process efficiency can cause drying defects, a decrease in yield, etc.

[0099] In the substrate processing apparatus 1 according to the embodiment, after the drying process has started, during the period when the supply of process fluid to the drying housing 600 via the supply fluid line 620 is stopped, the residual process fluid in the supply fluid line 620 can be discharged through the depressurization fluid line 640. Accordingly, when the process fluid is supplied to the drying housing 600 again, the inflow of gaseous process fluid into the drying housing 600 can be prevented or minimized.

[0100] Figure 8 This is a diagram showing the state of the drying chamber as the process fluid inside the drying shell is discharged during the drying step.

[0101] Reference Figure 8 After flow step S2, discharge valve 661 can be opened, and discharge step S3 can be performed to discharge the process fluid inside the drying housing 600. During discharge step S3, valves 631 and 632 can remain closed, preventing the supply of process fluid to the drying housing 600. Furthermore, pressure reducing valve 641 can be closed during discharge step S3.

[0102] Figure 9 This is a diagram showing the structure of the fluid pipeline connected to the drying housing 600a according to another embodiment.

[0103] Reference Figure 9The drying housing 600a can be connected to the process fluid supply unit 610a via a fluid supply line 620a. Valves 631a and 632a can be installed in the fluid supply line 620a. Valves 631a and 632a may include an upstream valve 631a and a downstream valve 632a. Filters 634a and 635a can be installed in the fluid supply line 620a. Filters 634a and 635a may include an upstream filter 634a and a downstream filter 635a.

[0104] The pressure-reducing fluid line 640a can be connected to the supply fluid line 620a. The pressure-reducing valve 641a can be located in the pressure-reducing fluid line 640a.

[0105] A safety fluid line 650a can be connected to a pressure-reducing fluid line 640a. The safety fluid line 650a branches off from the pressure-reducing fluid line 640a and allows process fluid to drain from the supply fluid line 620a. The safety fluid line 650a can be connected to the pressure-reducing fluid line 640a in the portion between the first end of the pressure-reducing fluid line 640a connected to the supply fluid line 620a and the pressure-reducing valve 641a. A safety valve 651a can be provided in the safety fluid line 650a. When a safety problem may occur due to the pressure in the supply fluid line 620a becoming higher than a predetermined pressure, the safety valve 651a can be opened to drain process fluid from the supply fluid line 620a. Furthermore, when it is necessary to drain process fluid from the supply fluid line 620a, for example during maintenance and repair of the substrate processing apparatus 1, the safety valve 651a can be opened to drain process fluid from the supply fluid line 620a.

[0106] The discharge fluid line 660a can be connected to the dry housing 600a. The discharge valve 661a can be located on the discharge fluid line 660a.

[0107] The structure and function of the process fluid supply unit 610a, supply fluid line 620a, valves 631a and 632a, filters 634a and 635a, pressure reducing fluid line 640a, pressure reducing valve 641a, discharge fluid line 660a, and discharge valve 661a can be related to... Figures 3 to 8 The process fluid supply unit 610, supply fluid line 620, valves 631 and 632, filters 634 and 635, pressure reducing fluid line 640, pressure reducing valve 641, discharge fluid line 660 and discharge valve 661 described herein are the same or similar, and therefore will not be described again here.

[0108] Figure 10 This is a diagram showing the structure of the fluid pipeline connected to the drying housing 600b according to another embodiment.

[0109] Reference Figure 10The drying housing 600b can be connected to the process fluid supply unit 610b via a fluid supply line 620b. Valves 631b and 632b can be installed in the fluid supply line 620b. Valves 631b and 632b may include an upstream valve 631b and a downstream valve 632b. Filters 634b and 635b can be installed in the fluid supply line 620b. Filters 634b and 635b may include an upstream filter 634b and a downstream filter 635b.

[0110] The pressure-reducing fluid line 640b can be connected to the supply fluid line 620b. The pressure-reducing valve 641b can be located in the pressure-reducing fluid line 640b.

[0111] A safety fluid line 650b can be connected to a supply fluid line 620b. The safety fluid line 650b branches off from the supply fluid line 620b and allows process fluid to be discharged from the supply fluid line 620b. The safety fluid line 650b can be connected to the supply fluid line 620b in the section between the upstream valve 631b and the downstream valve 632b. The safety fluid line 650b can be connected to the supply fluid line 620b at a location closer to the process fluid supply section 610b than the pressure-reducing fluid line 640b. The safety fluid line 650b can be connected to the supply fluid line 620b in the section between the upstream valve 631b and the upstream filter 634b. A safety valve 651b can be located within the safety fluid line 650b. When a safety problem may occur due to the pressure in the supply fluid line 620b exceeding a predetermined pressure, the safety valve 651b can be opened to discharge process fluid from the supply fluid line 620b. Furthermore, when it is necessary to discharge process fluid from the supply fluid line 620b, such as during maintenance and repair of the substrate processing apparatus 1, the safety valve 651b can be opened to discharge process fluid from the supply fluid line 620b.

[0112] The discharge fluid line 660b can be connected to the dry housing 600b. The discharge valve 661b can be located on the discharge fluid line 660b.

[0113] The structure and function of the process fluid supply unit 610b, supply fluid line 620b, valves 631b and 632b, filters 634b and 635b, pressure reducing fluid line 640b, pressure reducing valve 641b, discharge fluid line 660b, and discharge valve 661b can be related to... Figures 3 to 8 The process fluid supply unit 610, supply fluid line 620, valves 631 and 632, filters 634 and 635, pressure reducing fluid line 640, pressure reducing valve 641, discharge fluid line 660 and discharge valve 661 described herein are the same or similar, and therefore will not be described again here.

[0114] Figure 11 This is a diagram showing a fluid pipeline structure connected to a drying housing 600c according to another embodiment.

[0115] Reference Figure 11 The drying housing 600c can be connected to the process fluid supply unit 610c via a fluid supply line 620c. Valves 631c and 632c can be installed in the fluid supply line 620c. Valves 631c and 632c may include an upstream valve 631c and a downstream valve 632c. Filters 634c and 635c can be installed in the fluid supply line 620c. Filters 634c and 635c may include an upstream filter 634c and a downstream filter 635c.

[0116] The pressure-reducing fluid line 640c can be connected to the supply fluid line 620c. The pressure-reducing valve 641c can be located in the pressure-reducing fluid line 640c.

[0117] The extension 621c may be located within the supply fluid line 620c. The extension 621c may be configured such that the dimension of its internal space in the direction perpendicular to the length of the supply fluid line 620c is larger than the dimension of the adjacent region (e.g., the cross-section of the extension perpendicular to the length of the supply fluid line 620c may be larger than the cross-section of the adjacent region). For example, the extension 621c may have a tank structure or the like, having a predetermined volume.

[0118] Extension 621c can be located in the portion between upstream valve 631c and downstream valve 632c. Extension 621c can be located in the portion between upstream filter 634c and downstream valve 632c. Extension 621c can be located upstream of the point where the pressure-reducing fluid line 640c connects to the supply fluid line 620c. Extension 621c can be located in the portion between the point where the pressure-reducing fluid line 640c connects to the supply fluid line 620c and the upstream filter 634c. Extension 621c can be located near the point where the pressure-reducing fluid line 640c connects to the supply fluid line 620c, thereby reducing noise generated during the process of discharging process fluid through the pressure-reducing fluid line 640c. Furthermore, extension 621c can prevent condensation of dew caused by temperature drop during the process of discharging process fluid through the pressure-reducing fluid line 640c.

[0119] Pressure gauge 622c can be connected to extension 621c. Pressure gauge 622c can detect the pressure inside extension 621c.

[0120] Thermometer 623c can be connected to extension 621c. Thermometer 623c can detect the temperature inside extension 621c.

[0121] A management fluid line 624c can be connected to an extension 621c. A management valve 625c can be installed in the management fluid line 624c. The management valve 625c can open and close the management fluid line 624c. When it is necessary to discharge process fluid from inside the extension 621c, such as during maintenance and repair, the management valve 625c can be opened to discharge process fluid from the extension 621c through the management fluid line 624c.

[0122] The discharge fluid line 660c can be connected to the dryer housing 600c. The discharge valve 661c can be located on the discharge fluid line 660c.

[0123] The structure and function of the process fluid supply unit 610c, supply fluid line 620c, valves 631c and 632c, filters 634c and 635c, pressure reducing fluid line 640c, pressure reducing valve 641c, discharge fluid line 660c, and discharge valve 661c can be related to Figures 3 to 8 The process fluid supply unit 610, supply fluid line 620, valves 631 and 632, filters 634 and 635, pressure reducing fluid line 640, pressure reducing valve 641, discharge fluid line 660 and discharge valve 661 described herein are the same as or similar to those described herein, and therefore will not be described in detail here.

[0124] With Figure 10 In the same or similar manner described herein, safety fluid line 650c can be connected to supply fluid line 620c. Safety valve 651c can be located on safety fluid line 650c. Furthermore, in accordance with... Figure 9 In the same or similar manner described herein, the safety fluid line 650c can be connected to the pressure-reducing fluid line 640c. Alternatively, the safety fluid line 650c can be omitted.

[0125] Figure 12 This is a diagram showing the structure of the fluid pipeline connected to the drying housing 600d according to another embodiment.

[0126] Reference Figure 12 The drying housing 600d can be connected to the process fluid supply unit 610d via a supply fluid line 620d. Valves 631d and 632d can be installed in the supply fluid line 620d. Valves 631d and 632d may include an upstream valve 631d and a downstream valve 632d. Filters 634d and 635d can be installed in the supply fluid line 620d. Filters 634d and 635d may include an upstream filter 634d and a downstream filter 635d.

[0127] The pressure-reducing fluid line 640d can be connected to the supply fluid line 620d. The pressure-reducing valve 641d can be located on the pressure-reducing fluid line 640d.

[0128] Extension 621d can be located on the supply fluid line 620d. Extension 621d can be located in the section between upstream valve 631d and downstream valve 632d. Extension 621d can be located in the section between upstream filter 634d and downstream valve 632d. Extension 621d can be located downstream of the point where the pressure-reducing fluid line 640d connects to the supply fluid line 620d. Extension 621d can be located in the section between the point where the pressure-reducing fluid line 640d connects to the supply fluid line 620d and the downstream valve 632d. The extension 621d can be located near the point where the pressure-reducing fluid line 640d connects to the supply fluid line 620d, thereby reducing noise generated during the process of discharging process fluid through the pressure-reducing fluid line 640d. Furthermore, extension 621d can prevent condensation of dew caused by temperature drop during the process of discharging process fluid through the pressure-reducing fluid line 640d.

[0129] Pressure gauge 622d can be connected to extension 621d. Pressure gauge 622d can detect the pressure inside extension 621d.

[0130] Thermometer 623d can be connected to extension 621d. Thermometer 623d can detect the temperature inside extension 621d.

[0131] The fluid management line 624d can be connected to the extension 621d. The management valve 625d can be installed in the fluid management line 624d.

[0132] The discharge fluid line 660d can be connected to the dry housing 600d. The discharge valve 661d can be located on the discharge fluid line 660d.

[0133] The structure and function of the process fluid supply unit 610d, supply fluid line 620d, valves 631d and 632d, filters 634d and 635d, pressure reducing fluid line 640d, pressure reducing valve 641d, discharge fluid line 660d, and discharge valve 661d can be related to Figures 3 to 8 The process fluid supply unit 610, supply fluid line 620, valves 631 and 632, filters 634 and 635, pressure reducing fluid line 640, pressure reducing valve 641, discharge fluid line 660 and discharge valve 661 described herein are the same as or similar to those described herein, and therefore will not be described in detail here.

[0134] Furthermore, the structure of the extension 621d can be combined with... Figure 11 The extension 621c described herein is the same as or similar to the extension described herein, and therefore will not be repeated here.

[0135] With Figure 10In the same or similar manner described, safety fluid line 650d can be connected to supply fluid line 620d. Safety valve 651d can be located on safety fluid line 650d. Furthermore, in accordance with... Figure 9 In the same or similar manner described, the safety fluid line 650d can be connected to the pressure-reducing fluid line 640d. Alternatively, the safety fluid line 650d can be omitted.

[0136] Figure 13 This is a diagram showing a fluid pipeline structure connected to a drying housing 600e according to another embodiment.

[0137] Reference Figure 13 The drying housing 600e can be connected to the process fluid supply unit 610e via a fluid supply line 620e. Valves 631e and 632e can be installed in the fluid supply line 620e. Valves 631e and 632e may include an upstream valve 631e and a downstream valve 632e. Filters 634e and 635e can be installed in the fluid supply line 620e. Filters 634e and 635e may include an upstream filter 634e and a downstream filter 635e.

[0138] The pressure-reducing fluid line 640e can be connected to the supply fluid line 620e. The pressure-reducing valve 641e can be located on the pressure-reducing fluid line 640e.

[0139] Extension 621e may be located on the fluid supply line 620e. Extension 621e may be located in the section between upstream valve 631e and downstream valve 632e. Extension 621e may be located in the section between upstream filter 634e and downstream valve 632e.

[0140] The pressure-reducing fluid line 640e can be connected to the extension 621e. The extension 621e can reduce noise generated during the process of discharging process fluid through the pressure-reducing fluid line 640e. In addition, the extension 621e can prevent condensation of dew caused by temperature drop during the process of discharging process fluid through the pressure-reducing fluid line 640e.

[0141] Pressure gauge 622e can be connected to extension 621e. Pressure gauge 622e can detect the pressure inside extension 621e.

[0142] Thermometer 623e can be connected to extension 621e. Thermometer 623e can detect the temperature inside extension 621e.

[0143] The fluid management line 624e can be connected to the extension 621e. The management valve 625e can be installed in the fluid management line 624e.

[0144] The discharge fluid line 660e can be connected to the dry housing 600e. The discharge valve 661e can be located on the discharge fluid line 660e.

[0145] The structure and function of the process fluid supply unit 610e, supply fluid line 620e, valves 631e and 632e, filters 634e and 635e, pressure reducing fluid line 640e, pressure reducing valve 641e, discharge fluid line 660e, and discharge valve 661e can be related to Figures 3 to 8 The process fluid supply unit 610, supply fluid line 620, valves 631 and 632, filters 634 and 635, pressure reducing fluid line 640, pressure reducing valve 641, discharge fluid line 660 and discharge valve 661 described herein are the same as or similar to those described herein, and therefore will not be described in detail here.

[0146] Furthermore, the structure of the extension 621e can be combined with... Figure 11 The extension 621c described herein is the same as or similar to the extension described herein, and therefore will not be repeated here.

[0147] With Figure 10 In the same or similar manner described herein, safety fluid line 650e can be connected to supply fluid line 620e. Safety valve 651e can be located on safety fluid line 650e. Furthermore, in accordance with... Figure 9 In the same or similar manner described herein, safety fluid line 650e can be connected to pressure-reducing fluid line 640e. Alternatively, safety fluid line 650e can be omitted.

[0148] Figure 14 This is a diagram showing a fluid pipeline structure connected to a drying housing 600f according to another embodiment.

[0149] Reference Figure 14 The drying housing 600f can be connected to the process fluid supply unit 610f via the fluid supply line 620f. In the following text, with... Figures 3 to 8 The same or similar parts described in the text will not be repeated, and the focus will be on describing the differences.

[0150] The fluid supply line 620f may include a main fluid line 6210f and a branch fluid line 6220f.

[0151] The first end of the main fluid line 6210f can be connected to the process fluid supply unit 610f.

[0152] A first end of a branch fluid line 6220f can be connected to a second end of a main fluid line 6210f. The second end of the branch fluid line 6220f can be connected to a drying housing 600f. The branch fluid line 6220f may include a first branch fluid line 6221f and a second branch fluid line 6222f. The first branch fluid line 6221f and the second branch fluid line 6222f branch from the second end of the main fluid line 6210f and can be connected to the drying housing 600f in parallel. The second end of the first branch fluid line 6221f can be connected to the lower part of the drying housing 600f. For example, the second end of the first branch fluid line 6221f can be connected to the lower wall of the drying housing 600f. The second end of the second branch fluid line 6222f can be connected to the upper part of the drying housing 600f. For example, the second end of the second branch fluid line 6222f can be connected to the upper wall of the drying housing 600f.

[0153] Valves 631f, 632f, and 633f can be installed in the fluid supply line 620f. Valves 631f, 632f, and 633f can include upstream valve 631f and downstream valves 632f and 633f. The upstream valve 631f and downstream valves 632f and 633f can be spaced apart from each other on the fluid supply line 620f. The upstream valve 631f can be located upstream of the downstream valves 632f and 633f. The upstream valve 631f can be installed in the main fluid line 6210f.

[0154] Downstream valves 632f and 633f can be installed in branch fluid line 6220f. Downstream valves 632f and 633f may include a first downstream valve 632f and a second downstream valve 633f. The first downstream valve 632f can be installed in the first branch fluid line 6221f. The second downstream valve 633f can be installed in the second branch fluid line 6222f.

[0155] Filters 634f, 635f, and 636f can be installed in the supply fluid line 620f. Filters 634f, 635f, and 636f can filter impurities contained in the process fluid flowing through the supply fluid line 620f. Filters 634f, 635f, and 636f can include an upstream filter 634f and downstream filters 635f and 636f. The upstream filter 634f can be installed in the main fluid line 6210f. The upstream filter 634f can be installed downstream of the upstream valve 631f.

[0156] Downstream filters 635f and 636f can be installed in branch fluid line 6220f. Downstream filters 635f and 636f may include a first downstream filter 635f and a second downstream filter 636f. The first downstream filter 635f can be installed in the first branch fluid line 6221f. The first downstream filter 635f can be installed downstream of the first downstream valve 632f. The second downstream filter 636f can be installed in the second branch fluid line 6222f. The second downstream filter 636f can be installed downstream of the second downstream valve 633f.

[0157] The pressure-reducing fluid line 640f can be connected to the supply fluid line 620f. The pressure-reducing fluid line 640f branches off from the supply fluid line 620f and allows process fluid to be discharged from the supply fluid line 620f. The pressure-reducing fluid line 640f can be connected to the supply fluid line 620f in the section between the upstream valve 631f and the downstream valves 632f and 633f. The pressure-reducing fluid line 640f can be connected to the supply fluid line 620f in the section between the upstream filter 634f and the downstream valves 632f and 633f. The pressure-reducing fluid line 640f can be connected to the main fluid line 6210f in the downstream section of the upstream filter 634f.

[0158] Pressure reducing valve 641f can be located on pressure reducing fluid line 640f.

[0159] The discharge fluid line 660f can be connected to the dry housing 600f. The discharge valve 661f can be located on the discharge fluid line 660f.

[0160] In addition, with Figures 11 to 13 In the same or similar manner as described above, the extension may be located on the main fluid line 6210f, and therefore will not be described again here.

[0161] In addition, with Figure 10 In the same or similar manner described herein, safety fluid line 650f can be connected to supply fluid line 620f. Safety fluid line 650f can be connected to main fluid line 6210f. Safety fluid line 650f can be connected to the section between upstream valve 631f and upstream filter 634f. Safety valve 651f can be located on safety fluid line 650f. Furthermore, in accordance with… Figure 9 In the same or similar manner described, the safety fluid line 650f can be connected to the pressure-reducing fluid line 640f. Alternatively, the safety fluid line 650f can be omitted.

[0162] Figure 15 It is shown in Figure 4 A diagram showing the state of the drying chamber supplying process fluid to the drying housing 600f during the pressurization step S1 described in the figure.

[0163] Reference Figure 15 In the pressurization step S1, the upstream valve 631f and the first downstream valve 632f can be opened, while the second downstream valve 633f can be closed. Accordingly, process fluid can be supplied from the process fluid supply unit 610f to the lower part of the drying housing 600f through the main fluid line 6210f and the first branch fluid line 6221f. At this time, the pressure reducing valve 641f can remain closed, preventing process fluid from flowing from the supply fluid line 620f to the pressure reducing fluid line 640f. Furthermore, the discharge valve 661f can remain closed, preventing process fluid from being discharged through the discharge fluid line 660f. As time passes with the process fluid being supplied to the drying housing 600f, the internal pressure of the drying housing 600f can increase. The process fluid supply can continue until the internal pressure of the drying housing 600f reaches the first pressure P1. In the pressurization step S1, the flow rates of the process fluid flowing along the main fluid line 6210f and the first branch fluid line 6221f can be the same, or they can vary depending on time.

[0164] Figure 16 It is shown in Figure 4 A diagram showing the state of the drying chamber where pressure is reduced inside the drying shell 600f during the flow step S2 described in the figure.

[0165] Reference Figure 16 When the internal pressure of the drying housing 600f reaches the first pressure P1, the upstream valve 631f and the downstream valves 632f and 633f can be closed, and the supply of process fluid from the process fluid supply unit 610f to the drying housing 600f can be stopped. Furthermore, the drain valve 661f can be opened, thereby discharging the process fluid inside the drying housing 600f through the drain fluid line 660f. Accordingly, the internal pressure of the drying housing 600f decreases. The process fluid can be discharged through the drain fluid line 660f until the internal pressure of the drying housing 600f reaches a predetermined pressure, or for a preset time.

[0166] When the supply of process fluid from the process fluid supply section 610f to the drying shell 600f is blocked, the pressure reducing valve 641f can be opened, and process fluid can flow from the supply fluid line 620f to the pressure reducing fluid line 640f. Specifically, the pressure reducing valve 641f can be opened when the upstream valve 631f and the downstream valves 632f and 633f are closed. Accordingly, the process fluid remaining in the portion between the upstream valve 631f and the downstream valves 632f and 633f can be discharged through the pressure reducing fluid line 640f. When the supply of process fluid to the drying shell 600f is blocked due to the closure of valves 631f, 632f, and 633f, the opening time of the pressure reducing valve 641f can be the same as the opening time of the discharge valve 661f. That is, when the process fluid inside the drying shell 600f is discharged through the discharge fluid line 660f, the process fluid remaining in the supply fluid line 620f can be discharged through the pressure reducing fluid line 640f. Furthermore, when valves 631f, 632f, and 633f are closed, preventing the supply of process fluid to the drying shell 600f, the opening time of the pressure reducing valve 641f may differ from the opening time of the discharge valve 661f. That is, when the process fluid inside the drying shell 600f is discharged through the discharge fluid line 660f, the pressure reducing valve 641f may open for a period corresponding to a portion of the opening time of the discharge valve 661f.

[0167] Figure 17 It is shown in Figure 4 A diagram showing the state of the drying chamber supplying process fluid to the drying shell 600f in the flow step S2 described in the figure.

[0168] Reference Figure 17 At flow step S2, the upstream valve 631f and the second downstream valve 633f can be opened, and the first downstream valve 632f can be closed. Accordingly, process fluid can be supplied from the process fluid supply unit 610f to the upper part of the drying shell 600f through the main fluid line 6210f and the second branch fluid line 6222f. Furthermore, the pressure reducing valve 641f can be closed, preventing process fluid from escaping through the pressure reducing fluid line 640f. Additionally, the discharge valve 661f can be closed, preventing process fluid from draining from inside the drying shell 600f. Accordingly, the pressure in the drying shell 600f can be increased.

[0169] Process fluid can be supplied until the internal pressure of the drying shell 600f reaches a predetermined pressure, or a preset time can be set.

[0170] During flow step S2 Figure 16 and Figure 17The process described herein can be repeated at least once. Accordingly, during the flow step S2, the internal pressure of the drying shell 600f can be maintained between the first pressure P1 and the second pressure P2. Furthermore, during the processes of discharging the process fluid from the interior of the drying shell 600f and supplying process fluid to the interior of the drying shell 600f, the flow of process fluid can occur inside the drying shell 600f.

[0171] Furthermore, during periods when process fluid supply through the supply fluid line 620f is stopped, residual process fluid in the supply fluid line 620f can be discharged through the pressure-reducing fluid line 640f. Accordingly, when process fluid is supplied to the drying shell 600f again, the inflow of gaseous process fluid into the drying shell 600f can be prevented or minimized.

[0172] Subsequently, when the discharge step S3 begins, the discharge valve 661f can be opened, and the process fluid inside the drying housing 600f can be discharged. During the discharge step S3, valves 631f, 632f, and 633f can remain closed, preventing the supply of process fluid to the drying housing 600f. Furthermore, during the discharge step S3, the pressure reducing valve 641f can be closed.

[0173] Figure 18 This is a graph showing the internal pressure changes of the drying housing 600f during the drying process according to another embodiment.

[0174] Reference Figure 18 When performing the drying process according to another embodiment, the internal pressure of the drying shell 600f can be varied in the order of pressurization step S1a, flow step S2a and discharge step S3a.

[0175] At the pressurization step S1a, the internal pressure of the drying shell 600f can be increased. For example, at the pressurization step S1a, the internal pressure of the drying shell 600f can be increased to a first pressure P1a. The first pressure P1a can be a value exceeding the threshold pressure of the process fluid. For example, the first pressure P1a can be 150 bar.

[0176] At flow step S2a, the internal pressure of the drying shell 600f can be maintained within a predetermined range. At flow step S2a, the internal pressure of the drying shell 600f can be maintained at a value exceeding the threshold pressure of the process fluid. At flow step S2a, the change in internal pressure of the drying shell 600f can be less than... Figure 4 The pressure change at flow step S2 is described in the diagram. For example, at flow step S2a, the internal pressure of the drying shell 600f can be approximately parallel to the horizontal axis.

[0177] At the discharge step S3a, the internal pressure of the drying shell 600f decreases. At the discharge step S3a, the internal pressure of the drying shell 600f can be reduced below the threshold pressure of the process fluid. For example, at the discharge step S3a, the internal pressure of the drying shell 600f can be reduced to the normal pressure.

[0178] Figure 19 It is shown in Figure 18 A diagram showing the state of the drying chamber supplying process fluid to the drying shell 600f in the flow step S2a described in the figure.

[0179] First of all, Figure 18 At the pressurization step S1a described herein, process fluid can be supplied from the process fluid supply unit 610f to the lower part of the drying housing 600f. The operating state at this time can be compared with... Figure 15 The description is the same as that in the text, so it will not be repeated here.

[0180] Subsequently, when the flow begins in step S2a, with Figure 16 Similar to the operating state described, when the supply of process fluid to the drying housing 600f is stopped due to the closure of valves 631f, 632f, and 633f, the pressure reducing valve 641f can be opened, and residual process fluid in the supply fluid line 620f can be discharged through the pressure reducing fluid line 640f. When process fluid is discharged through the pressure reducing fluid line 640f due to the opening of the pressure reducing valve 641f, the discharge valve 661f can be in the open state, which is consistent with... Figure 16 The same applies. Furthermore, when process fluid is discharged through pressure-reducing fluid line 640f due to the opening of pressure-reducing valve 641f, discharge valve 661f can be in the closed state, which is consistent with... Figure 16 different.

[0181] After that, as Figure 19 As shown, at flow step S2a, the upstream valve 631f and the second downstream valve 633f can be opened, while the first downstream valve 632f can be closed. Accordingly, process fluid can be supplied from the process fluid supply unit 610f to the upper part of the drying housing 600f via the main fluid line 6210f and the second branch fluid line 6222f. Furthermore, the pressure reducing valve 641f can be closed, preventing process fluid from escaping through the pressure reducing fluid line 640f. Additionally, the discharge valve 661f can be opened, discharging the process fluid inside the drying housing 600f. At this time, the amount of fluid discharged through the discharge fluid line 660f corresponds to the amount of process fluid supplied from the process fluid supply unit 610f to the drying housing 600f. Accordingly, during flow step S2a, the internal pressure of the drying housing 600f can be maintained within a predetermined range.

[0182] Subsequently, when the discharge step S3a begins, the discharge valve 661f can be opened, and the process fluid inside the drying housing 600f can be discharged. During the discharge step S3a, valves 631f, 632f, and 633f can remain closed, preventing the supply of process fluid to the drying housing 600f. Furthermore, during the discharge step S3f, the pressure reducing valve 641f can be closed.

[0183] Figure 20 This is a diagram showing the structure of a fluid pipeline connected to a drying housing 600g according to another embodiment.

[0184] Reference Figure 20 The drying shell 600g can be connected to the process fluid supply unit 610g via the fluid supply line 620g. In the following text, with... Figures 3 to 8 The same or similar parts described in the text will not be repeated, and the focus will be on describing the differences.

[0185] The fluid supply line 620g may include a main fluid line 6210g and branch fluid lines 6220g.

[0186] The first end of the main fluid line 6210g can be connected to the process fluid supply unit 610g.

[0187] A first end of a branch fluid line 6220g can be connected to a second end of a main fluid line 6210g. The second end of the branch fluid line 6220g can be connected to a drying housing 600g. The branch fluid line 6220g may include a first branch fluid line 6221g and a second branch fluid line 6222g. The first branch fluid line 6221g and the second branch fluid line 6222g branch from the second end of the main fluid line 6210g and can be connected to the drying housing 600g in parallel. The second end of the first branch fluid line 6221g can be connected to the upper part of the drying housing 600g. For example, the second end of the first branch fluid line 6221g can be connected to the upper wall of the drying housing 600g. The second end of the second branch fluid line 6222g can also be connected to the upper part of the drying housing 600g. For example, the second end of the second branch fluid line 6222g can be connected to the upper wall of the drying housing 600g.

[0188] Valves 631g, 632g, and 633g can be installed in the fluid supply line 620g. Valves 631g, 632g, and 633g can include upstream valve 631g and downstream valves 632g and 633g. The upstream valve 631g and downstream valves 632g and 633g can be spaced apart from each other on the fluid supply line 620g. The upstream valve 631g can be located upstream of the downstream valves 632g and 633g. The upstream valve 631g can also be installed in the main fluid line 6210g.

[0189] Downstream valves 632g and 633g can be installed in branch fluid lines 6220g. Downstream valves 632g and 633g can include a first downstream valve 632g and a second downstream valve 633g. The first downstream valve 632g can be installed in a first branch fluid line 6221g. The second downstream valve 633g can be installed in a second branch fluid line 6222g.

[0190] Filters 634g, 635g, and 636g can be installed in the supply fluid line 620g. Filters 634g, 635g, and 636g can filter impurities contained in the process fluid flowing through the supply fluid line 620g. Filters 634g, 635g, and 636g can include an upstream filter 634g and downstream filters 635g and 636g. The upstream filter 634g can be installed in the main fluid line 6210g. The upstream filter 634g can be installed downstream of the upstream valve 631g.

[0191] Downstream filters 635g and 636g can be installed in branch fluid lines 6220g. Downstream filters 635g and 636g can include a first downstream filter 635g and a second downstream filter 636g. The first downstream filter 635g can be installed in the first branch fluid line 6221g. The first downstream filter 635g can be installed downstream of the first downstream valve 632g. The second downstream filter 636g can be installed in the second branch fluid line 6222g. The second downstream filter 636g can be installed downstream of the second downstream valve 633g.

[0192] The pressure-reducing fluid line 640g can be connected to the supply fluid line 620g. The pressure-reducing fluid line 640g branches off from the supply fluid line 620g and allows process fluid to be discharged from the supply fluid line 620g. The pressure-reducing fluid line 640g can be connected to the supply fluid line 620g in the section between the upstream valve 631g and the downstream valves 632g and 633g. The pressure-reducing fluid line 640g can be connected to the supply fluid line 620g in the section between the upstream filter 634g and the downstream valves 632g and 633g. The pressure-reducing fluid line 640g can be connected to the main fluid line 6210g in the downstream section of the upstream filter 634g.

[0193] The pressure reducing valve 641g can be located on the pressure reducing fluid line 640g.

[0194] The discharge fluid line 660g can be connected to the dry housing 600g. The discharge valve 661g can be located on the discharge fluid line 660g.

[0195] In addition, with Figures 11 to 13 In the same or similar manner described herein, the extension may be located on the main fluid line 6210g, and therefore will not be described further here.

[0196] In addition, with Figure 10 In the same or similar manner described herein, the safety fluid line 650g can be connected to the supply fluid line 620g. The safety fluid line 650g can be connected to the main fluid line 6210g. The safety fluid line 650g can be connected to the section between the upstream valve 631g and the upstream filter 634g. The safety valve 651g can be located on the safety fluid line 650g. Furthermore, in accordance with... Figure 9 In the same or similar manner described, the safety fluid line 650g can be connected to the pressure-reducing fluid line 640g. Alternatively, the safety fluid line 650g can be omitted.

[0197] Figure 21 It is shown in Figure 4 In the pressurization step S1 described above, or Figure 18 A diagram showing the state of the drying chamber supplying process fluid to the drying shell 600g during the pressurization step S1a described above.

[0198] Reference Figure 21In pressurization steps S1 and S1a, the upstream valve 631g and the first downstream valve 632g can be opened, while the second downstream valve 633g can be closed. Accordingly, process fluid can be supplied from the process fluid supply unit 610g to the upper part of the drying shell 600g via the main fluid line 6210g and the first branch fluid line 6221g. At this time, the pressure reducing valve 641g can remain closed, preventing process fluid from flowing from the supply fluid line 620g to the pressure reducing fluid line 640g. Furthermore, the discharge valve 661g can remain closed, preventing process fluid from being discharged through the discharge fluid line 660g. As time passes with the process fluid being supplied to the drying shell 600g, the internal pressure of the drying shell 600g can increase. The process fluid supply can continue until the internal pressure of the drying shell 600g reaches the first pressures P1 and P1a. In the pressurization steps S1 and S1a, the flow rates of the process fluid flowing along the main fluid line 6210g and the first branch fluid line 6221g can be the same, or they can vary over time.

[0199] Subsequently, when the flow steps S2 and S2a begin, with Figure 16 Similar to the operating state described, pressure reducing valve 641g can be opened, and residual process fluid in supply fluid line 620g can be discharged through pressure reducing fluid line 640g. When process fluid is discharged through pressure reducing fluid line 640g due to the opening of pressure reducing valve 641g, discharge valve 661g can be in the open state, which is consistent with... Figure 16 The same applies. Furthermore, when process fluid is discharged through pressure-reducing fluid line 640g due to the opening of pressure-reducing valve 641g, discharge valve 661g can be in the closed state, which is consistent with... Figure 16 different.

[0200] Figure 22 This is a diagram showing the state of the drying chamber as the process fluid is supplied to the drying shell during flow steps S2 and S2a.

[0201] After that, as Figure 22 As shown, at flow steps S2 and S2a, the upstream valve 631g and the second downstream valve 633g can be opened, while the first downstream valve 632g can be closed. Accordingly, process fluid can be supplied from the process fluid supply unit 610g to the upper part of the drying housing 600g via the main fluid line 6210g and the second branch fluid line 6222g. Furthermore, the pressure reducing valve 641g can be closed, preventing process fluid from escaping through the pressure reducing fluid line 640g.

[0202] At this time, the discharge valve 661g can be closed, and the pressure inside the drying housing 600g can increase. Furthermore, in conjunction with... Figure 16 and Figure 17 In the same or similar manner described above, at flow step S2, the process of discharging the process fluid from inside the drying shell 600g and supplying process fluid into the drying shell 600g can be repeated at least once. Accordingly, at flow step S2, the internal pressure of the drying shell 600g can be as described above. Figure 4 As described in the text.

[0203] In addition, with Figure 19 In the same or similar manner described above, the discharge valve 661g can be opened, and the process fluid inside the drying housing 600g can be discharged. At this time, the amount of fluid discharged through the discharge fluid line 660g corresponds to the amount of process fluid supplied from the process fluid supply unit 610g to the inside of the drying housing 600g. Accordingly, during flow step S2a, the internal pressure of the drying housing 600g can be maintained within a predetermined range. Accordingly, at flow step S2a, the internal pressure of the drying housing 600g can be as described above. Figure 18 As stated above.

[0204] Subsequently, when discharge steps S3 and S3a begin, discharge valve 661g can be opened, allowing the process fluid inside the drying housing 600g to be discharged. During discharge step S3g, valves 631g, 632g, and 633g can remain closed, preventing the supply of process fluid to the drying housing 600g. Furthermore, during discharge steps S3 and S3a, pressure reducing valve 641g can remain closed.

[0205] Figure 23 This is a diagram showing a fluid pipeline structure connected to a drying housing for 600 hours according to another embodiment.

[0206] Reference Figure 23 The drying shell 600h can be connected to the process fluid supply unit 610h via the fluid supply line 620h. In the following text, with... Figures 16 to 19 The same or similar parts described in the text will not be repeated, and the focus will be on describing the differences.

[0207] The fluid supply line 620h may include a main fluid line 6210h and a branch fluid line 6220h.

[0208] The first end of the main fluid line 6210h can be connected to the process fluid supply unit 610h. The main fluid line 6210h may include multiple flow control fluid lines 6211h and connecting fluid lines 6212h.

[0209] The first end of multiple flow-controlled fluid lines 6211h can be connected to the process fluid supply unit 610h. The multiple flow-controlled fluid lines 6211h can be arranged parallel to each other. A connecting fluid line 6212h can connect the multiple flow-controlled fluid lines 6211h to a branch fluid line 6220h. That is, the first end of the connecting fluid line 6212h can be connected to the second end of the multiple flow-controlled fluid lines 6211h, and the second end of the connecting fluid line 6212h can be connected to the first end of the branch fluid line 6220h. Ports 6300h, 6301h, and 6302h can be respectively provided in the multiple flow-controlled fluid lines 6211h. Ports 6300h, 6301h, and 6302h located in the multiple flow-controlled fluid lines 6211h can be configured to have different internal channel areas through which the process fluid flows.

[0210] The branch fluid line 6220h can connect the second end of the main fluid line 6210h to the drying shell 600h. The first end of the branch fluid line 6220h can be connected to the second end of the connecting fluid line 6212h, and the second end of the branch fluid line 6220h can be connected to the drying shell 600h.

[0211] The branch fluid line 6220h may include a first branch fluid line 6221h and a second branch fluid line 6222h. The first and second branch fluid lines 6221h branch from the second end of the main fluid line 6210h and may be connected to the drying housing 600h in a parallel configuration. The second end of the first branch fluid line 6221h may be connected to the lower part of the drying housing 600h. For example, the second end of the first branch fluid line 6221h may be connected to the lower wall of the drying housing 600h. The second end of the second branch fluid line 6222h may be connected to the upper part of the drying housing 600h. For example, the second end of the second branch fluid line 6222h may be connected to the upper wall of the drying housing 600h.

[0212] In contrast, the second end of the first branch fluid line 6221h can be connected to the upper part of the drying shell 600h, which is consistent with... Figure 20 The same applies. For example, the second end of the first branch fluid line 6221h can be connected to the upper wall of the drying shell 600h.

[0213] Valves 631h, 632h, and 633h can be installed in the fluid supply line 620h. Valves 631h, 632h, and 633h can include upstream valve 631h and downstream valves 632h and 633h. The upstream valve 631h and downstream valves 632h and 633h can be spaced apart from each other on the fluid supply line 620h. The upstream valve 631h can be located upstream of the downstream valves 632h and 633h. The upstream valve 631h can be installed in the main fluid line 6210h. Multiple upstream valves 631h can be installed in multiple flow control fluid lines 6211h. The upstream valve 631h can be located upstream of pipe outlets 6300h, 6301h, and 6302h.

[0214] Downstream valves 632h and 633h can be installed in branch fluid line 6220h. Downstream valves 632h and 633h can include a first downstream valve 632h and a second downstream valve 633h. The first downstream valve 632h can be installed in the first branch fluid line 6221h. The second downstream valve 633h can be installed in the second branch fluid line 6222h.

[0215] Filters 634h, 635h, and 636h can be installed in the supply fluid line 620h. Filters 634h, 635h, and 636h can filter impurities contained in the process fluid flowing through the supply fluid line 620h. Filters 634h, 635h, and 636h can include an upstream filter 634h and downstream filters 635h and 636h. The upstream filter 634h can be installed in the main fluid line 6210h. The upstream filter 634h can be installed downstream of the upstream valve 631h. The upstream filter 634h can be installed in the connecting fluid line 6212h.

[0216] Downstream filters 635h and 636h can be installed in branch fluid lines 6220h. Downstream filters 635h and 636h may include a first downstream filter 635h and a second downstream filter 636h. The first downstream filter 635h can be installed in the first branch fluid line 6221h. The first downstream filter 635h can be installed downstream of the first downstream valve 632h. The second downstream filter 636h can be installed in the second branch fluid line 6222h. The second downstream filter 636h can be installed downstream of the second downstream valve 633h.

[0217] The pressure-reducing fluid line 640h can be connected to the supply fluid line 620h. The pressure-reducing fluid line 640h branches off from the supply fluid line 620h and allows process fluid to be discharged from the supply fluid line 620h. The pressure-reducing fluid line 640h can be connected to the supply fluid line 620h in the section between the upstream valve 631h and the downstream valves 632h and 633h. The pressure-reducing fluid line 640h can be connected to the supply fluid line 6212h in the section between the upstream filter 634h and the downstream valves 632h and 633h. The pressure-reducing fluid line 640h can be connected to the connecting fluid line 6212h. The pressure-reducing fluid line 640h can be connected to the connecting fluid line 6212h in the downstream section of the upstream filter 634h.

[0218] The pressure reducing valve 641h can be located on the pressure reducing fluid line 640h.

[0219] The discharge fluid line 660h can be connected to the dry housing 600h. The discharge valve 661h can be located on the discharge fluid line 660h.

[0220] In addition, with Figures 11 to 13 In the same or similar manner as described above, the extension may be located on the connecting fluid line 6212h, so it will not be described again here.

[0221] In addition, with Figure 10 In the same or similar manner described above, the safety fluid line 650h can be connected to the supply fluid line 620h. The safety fluid line 650h can be connected to the connecting fluid line 6212h. The safety fluid line 650h can be connected to the upstream side of the upstream filter 634h. The safety valve 651h can be located on the safety fluid line 650h. Furthermore, in accordance with... Figure 9 In the same or similar manner described, the safety fluid line 650h can be connected to the pressure-reducing fluid line 640h. Alternatively, the safety fluid line 650h can be omitted.

[0222] When process fluid is supplied from the process fluid supply unit 610h to the drying shell 600h, at least one of the multiple upstream valves 631h is opened. When process fluid is not supplied from the process fluid supply unit 610h to the drying shell 600h, all of the multiple upstream valves 631h are closed.

[0223] In addition to the fact that the number of upstream valves 631h is set to be multiple, such that at least one of the multiple upstream valves 631h is opened when process fluid is supplied, and all of the multiple upstream valves 631h are closed when process fluid is not supplied from the process fluid supply unit 610h to the drying housing 600h, the method of supplying process fluid to the interior of the drying housing 600h or discharging process fluid from the interior of the drying housing 600h during the drying process is the same as... Figures 15 to 19 The methods described herein are the same or similar, so they will not be repeated here.

[0224] While embodiments of this disclosure have been described in conjunction with what are now considered practical embodiments, it should be understood that the invention is not limited to the disclosed embodiments; rather, this disclosure is intended to cover various modifications and equivalent arrangements included within the spirit and scope of the appended claims. <Figure Labels> 2: Index Module 3: Process Module 20: Loading port 22: Transmission Department 30: Buffer room 40: Transmission Room 50: Liquid Processing Room 60: Drying Chamber 500: Liquid Processing Housing 510: Support plate 520: Fluid Supply Department 600: Dry shell 610: Process Fluid Supply Department 620: Fluid supply line 631: Upstream valve 632: Downstream valve 640: Pressure-reducing fluid line 641: Pressure reducing valve 660: Discharge fluid line 661: Discharge valve.

Claims

1. A substrate processing apparatus comprising: a dry chamber having an internal space for performing a dry process; a process fluid supply configured to receive a process fluid used in the dry process; a supply fluid line connected to the dry chamber and to the process fluid supply; a reduced pressure fluid line connected to the supply fluid line; and a controller configured to control an operation of the substrate processing apparatus, wherein the controller is configured to start the dry process, and after starting the dry process, stop supplying the process fluid to the dry chamber through the supply fluid line, and discharge the process fluid remaining in the supply fluid line through the reduced pressure fluid line.

2. The substrate processing apparatus according to claim 1, comprising: an upstream valve provided in the supply fluid line; and a downstream valve provided in the supply fluid line on a downstream side of the upstream valve, wherein the reduced pressure fluid line is connected to a portion of the supply fluid line between the upstream valve and the downstream valve. The supply fluid line includes an extension, an internal space of the extension has a cross section in a direction perpendicular to a length direction of the supply fluid line that is larger than a cross section of an adjacent region of the supply fluid line. The extension is located in the portion between the upstream valve and the downstream valve.

3. The substrate processing apparatus of claim 2, wherein, The supply fluid line includes:

4. The substrate processing apparatus according to claim 3, wherein a main fluid line having a first end connected to the process fluid supply; 5. The substrate processing apparatus of claim 2, wherein, a first branch fluid line having a first end connected to a second end of the main fluid line, and a second end connected to the dry chamber; and a second branch fluid line having a first end connected to the second end of the main fluid line, and a second end connected to the dry chamber.

6. The substrate processing apparatus according to claim 5, wherein: the upstream valve is provided in the main fluid line; and the downstream valve is a first downstream valve provided in the first branch fluid line, and the substrate processing apparatus further includes a second downstream valve provided in the second branch fluid line. The reduced pressure fluid line is connected to the main fluid line. The main fluid line includes:

7. The substrate processing apparatus of claim 5, wherein, a plurality of flow control fluid lines provided in parallel to each other, each flow control fluid line having a first end connected to the process fluid supply, and a second end; and 8. The substrate processing apparatus of claim 5, wherein, a connection fluid line having a first end connected to the second end of each of the plurality of flow control fluid lines, and a second end connected to a first end of the first branch fluid line and a first end of the second branch fluid line. a plurality of upstream valves, wherein the upstream valve is a first upstream valve of the plurality of upstream valves, and each of the plurality of upstream valves is provided in a corresponding one of the plurality of flow control fluid lines.

10. The substrate processing apparatus according to claim 5, wherein:

9. The substrate processing apparatus of claim 8, further comprising: the second end of the first branch fluid line is connected to a lower portion of the dry chamber; and the second end of the second branch fluid line is connected to an upper portion of the dry chamber. ​ A second end of the second branch fluid line is connected to an upper portion of the dry chamber.

11. The substrate processing apparatus according to claim 5, wherein: A second end of the first branch fluid line is connected to an upper portion of the dry chamber; and A second end of the second branch fluid line is connected to an upper portion of the dry chamber.

12. The substrate processing apparatus of claim 1, further comprising: A safety fluid line is connected to the supply fluid line.

13. A substrate processing apparatus comprising: a dry chamber having an internal space for performing a dry process; a process fluid supply configured to receive a process fluid used in the dry process; a supply fluid line connected to the dry chamber and to the process fluid supply; a pressure reduction fluid line connected to the supply fluid line; and a controller configured to control operation of the substrate processing apparatus, wherein the controller is configured to stop supplying the process fluid to the dry chamber after an internal pressure of the dry chamber reaches a first threshold pressure, and to exhaust the process fluid remaining in the supply fluid line through the pressure reduction fluid line before re-supplying the process fluid to the dry chamber.

14. The substrate processing apparatus of claim 13, wherein, The supply fluid line includes: a main fluid line having a first end connected to the process fluid supply; a first branch fluid line having a first end connected to a second end of the main fluid line, and a second end connected to the dry chamber; and a second branch fluid line having a first end connected to the second end of the main fluid line, and a second end connected to the dry chamber, wherein the controller is configured to supply the process fluid to the dry chamber through the first branch fluid line until the first threshold pressure is reached, and to switch the supply of the process fluid to the dry chamber through the first branch fluid line to the supply of the process fluid to the dry chamber through the second branch fluid line after the first threshold pressure is reached.

15. A substrate processing apparatus comprising: a dry chamber having an internal space for performing a dry process; a process fluid supply configured to receive a process fluid used in the dry process; a supply fluid line connected to the dry chamber and to the process fluid supply; and a pressure reduction fluid line connected to the supply fluid line; wherein the supply fluid line includes: a main fluid line having a first end connected to the process fluid supply; a first branch fluid line having a first end connected to a second end of the main fluid line, and a second end connected to the dry chamber; and a second branch fluid line having a first end connected to the second end of the main fluid line, and a second end connected to the dry chamber, wherein the pressure reduction fluid line provides a fluid path for exhausting the process fluid from the supply fluid line.

16. The substrate processing apparatus of claim 15, wherein, The pressure reduction fluid line is connected to the main fluid line.

17. The substrate processing apparatus of claim 16, wherein, A cross section of an extension of the supply fluid line in a direction perpendicular to a length direction of the supply fluid line is larger than a cross section of an adjacent region provided in the main fluid line.

18. The substrate processing apparatus of claim 17, wherein, The extension is provided on an upstream side of a position where the reduced-pressure fluid line is connected to the main fluid line.

19. The substrate processing apparatus of claim 17, wherein, The extension is provided on a downstream side of a position where the reduced-pressure fluid line is connected to the main fluid line.

20. The substrate processing apparatus of claim 17, wherein, The reduced-pressure fluid line is connected to the extension.

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