Dresser monitoring system and method and chemical mechanical grinding machine

Abstract

The invention discloses a dresser monitoring system and method and a chemical mechanical grinding machine table, a dresser is arranged on a driving unit through a mounting base, the driving unit is arranged at a steering arm, and the dresser monitoring system comprises a first position monitoring unit used for monitoring a first position on the dresser; the alarm unit is connected with the first position monitoring unit; when the first position monitoring unit does not monitor the first position on the trimmer, the alarm unit gives an alarm to remind that the trimmer is neglected to be installed or falls off, and feedback to the machine table is achieved.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of semiconductor processing equipment, in particular to a conditioner monitoring system, a conditioner monitoring method and a chemical mechanical polishing machine. BACKGROUND

[0002] In the CMP (chemical mechanical polishing) process of a wafer, a chemical mechanical polishing machine occupies a dominant position, a steering arm is an important component thereof, and a conditioner plays an important role in conditioning a polishing pad, removing residual slag on the polishing pad and maintaining the stability of a polishing rate as an indispensable part of the steering arm.

[0003] Due to the particularity of chemical mechanical polishing work, the conditioner needs to be replaced after being used for a period of time. During the replacement of the conditioner, the conditioner is caused to be missing due to some human factors or the screw is not tightened after being installed, so that the conditioner falls off during the work of the steering arm, which causes great influence on the product during the running of the machine, and may cause the product to be scrapped.

[0004] On the other hand, the conditioner is pressed down by compressed air in the cylinder driving device at the upper end of the conditioner, and is returned to the initial position by the spring inside, but the spring is inevitably deformed during long-term use, which may cause inaccurate pressure feedback and affect the polishing rate, thereby affecting the quality of the product.

[0005] The conditioner in the prior art does not have a corresponding monitoring system, so that the machine cannot be fed back when the conditioner is missing, falls off or the spring is deformed. SUMMARY

[0006] To solve the above technical problems, the present application provides a conditioner monitoring system, method and chemical mechanical polishing machine.

[0007] In a first aspect, the present application provides a conditioner monitoring system, wherein the conditioner is arranged on a driving unit through a mounting seat, the driving unit is arranged at a steering arm, and the conditioner monitoring system comprises:

[0008] a first position monitoring unit for monitoring a first position on the conditioner;

[0009] an alarm unit connected with the first position monitoring unit;

[0010] When the first position monitoring unit fails to monitor the first position on the conditioner, the alarm unit issues an alarm.

[0011] Preferably, the conditioner monitoring system further comprises:

[0012] a second position monitoring unit for monitoring a second position on the mounting seat;

[0013] a position comparison unit connected with the first position monitoring unit and the second position monitoring unit, for comparing whether the distance between the first position and the second position meets a first set value;

[0014] the alarm unit is connected with the position comparison unit, and the position comparison unit compares that the distance between the first position and the second position is greater than the first set value, and the alarm unit sends an alarm.

[0015] Further,

[0016] the driving unit is installed on the driving unit installation surface of the steering arm;

[0017] the position comparison unit is further used for comparing whether the distance between the second position and the driving unit installation surface meets a second set value;

[0018] the position comparison unit compares that the distance between the second position and the driving unit installation surface is greater than the second set value, and the alarm unit sends an alarm.

[0019] Further,

[0020] the first position includes a working surface of the dresser;

[0021] the second position includes a dresser installation surface on the mounting seat;

[0022] the working surface of the dresser is a lower surface of the dresser, the dresser installation surface is a lower surface of the mounting seat, and the driving unit installation surface is a lower surface of the steering arm.

[0023] Further,

[0024] the driving unit includes a cylinder, the cylinder includes a fixed part and a movable part, the movable part is used for driving the mounting seat to move down from an initial position to a working position, the fixed part is connected with the mounting seat through a return spring, and spring return makes the mounting seat move up from the working position to the initial position;

[0025] the mounting seat is in the initial position, and the position comparison unit compares that the distance between the second position and the driving unit installation surface is greater than the second set value, and the alarm unit sends an alarm.

[0026] Further, the first position monitoring unit and the second position monitoring unit both include an optical sensor installed on the lower surface of the steering arm.

[0027] In a second aspect, the present application further provides a dresser monitoring method of the dresser monitoring system, which comprises:

[0028] When the first position monitoring unit fails to monitor the first position on the trimmer, the alarm unit sends an alarm of missing or falling off of the trimmer.

[0029] Preferably, the trimmer monitoring system further comprises a second position monitoring unit for monitoring a second position on the mounting base; a position comparison unit connected with the first position monitoring unit and the second position monitoring unit, for comparing whether the distance between the first position and the second position meets a first set value; the alarm unit is connected with the position comparison unit; the trimmer and the mounting base are connected through a screw; and the method comprises:

[0030] The first position monitoring unit monitors the first position on the trimmer;

[0031] The second position monitoring unit monitors the second position on the mounting base;

[0032] When the position comparison unit compares that the distance between the first position and the second position is greater than the first set value, the alarm unit sends an alarm of loosening of the screw between the trimmer and the mounting base.

[0033] Further, the driving unit is installed on a driving unit installation surface of the steering arm; and the position comparison unit is further used for comparing whether the distance between the second position and the driving unit installation surface meets a second set value;

[0034] The driving unit comprises a cylinder, the cylinder comprises a fixed part and a movable part, the movable part is used for driving the mounting base to move down from an initial position to a working position, the fixed part is connected with the mounting base through a reset spring, and reset of the spring makes the mounting base move up from the working position to the initial position.

[0035] The method comprises:

[0036] When the mounting base is in the initial position and the position comparison unit compares that the distance between the second position and the driving unit installation surface is greater than the second set value, the alarm unit sends an alarm of deformation of the reset spring.

[0037] In a third aspect, the present application further provides a chemical mechanical polishing machine table comprising the trimmer monitoring system according to any one of the above.

[0038] Compared with the prior art, the present application has the following beneficial effects:

[0039] In an example of the present application, when the first position monitoring unit fails to monitor the first position on the trimmer, the alarm unit sends an alarm to remind missing or falling off of the trimmer.

[0040] When the first position monitoring unit monitors the first position on the trimmer, the second position monitoring unit monitors the second position on the mounting base, and the position comparison unit compares that the distance between the first position and the second position is greater than the first set value, the alarm unit issues an alarm of loose screw between the trimmer and the mounting base;

[0041] When the mounting base is in the initial position, and the position comparison unit compares that the distance between the second position and the mounting surface of the driving unit is greater than the second set value, the alarm unit issues an alarm of deformation of the reset spring;

[0042] The present application realizes feedback to the machine table when the trimmer is missing, falls off or the spring is deformed by the above-mentioned manner. BRIEF DESCRIPTION OF DRAWINGS

[0043] In order to more clearly illustrate the technical solutions of the present application, the following will briefly introduce the drawings needed to be used in the description. Obviously, the drawings in the following description are one embodiment of the present application, and other drawings can also be obtained by those skilled in the art without creative labor on the basis of these drawings:

[0044] Figure 1 It is a schematic diagram of the mounting structure of the trimmer monitoring system in one embodiment of the present application.

[0045] Explanation of reference signs:

[0046] 1: trimmer;

[0047] 2: mounting base;

[0048] 3: driving unit;

[0049] 310: air cylinder;

[0050] 4: steering arm;

[0051] 5: first position monitoring unit;

[0052] 510: first optical sensor;

[0053] 6: second position monitoring unit;

[0054] 610: second optical sensor;

[0055] 7: base. DETAILED DESCRIPTION

[0056] The present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments. The advantages and features of the present invention will become clearer from the following description. It should be noted that the drawings are in a very simplified form and use non-precise proportions, used only to facilitate and clearly illustrate the embodiments of the present invention. Please refer to the drawings to make the objectives, features, and advantages of the present invention more apparent and understandable. It should be understood that the structures, proportions, sizes, etc., depicted in the accompanying drawings are only for the purpose of assisting those skilled in the art in understanding and reading the content disclosed in the specification, and are not intended to limit the implementation conditions of the present invention. Therefore, they have no substantial technical significance. Any modifications to the structure, changes in proportions, or adjustments to the size, without affecting the effects and objectives achieved by the present invention, should still fall within the scope of the technical content disclosed in the present invention.

[0057] like Figure 1 As shown, this embodiment provides a dresser monitoring system, wherein the dresser 1 is mounted on the drive unit 3 via the mounting base 2, and the drive unit 3 is mounted at the steering arm 4. The dresser monitoring system includes: a first position monitoring unit 5 for monitoring the first position on the dresser 1; and an alarm unit (not shown in the figure) connected to the first position monitoring unit 5. When the first position monitoring unit 5 fails to detect the first position on the dresser 1, the alarm unit issues an alarm to remind the dresser 1 that it is missing or has fallen off, thereby providing feedback to the machine.

[0058] In a preferred embodiment, the trimmer monitoring system further includes: a second position monitoring unit 6 for monitoring a second position on the mounting base 2; a position comparison unit (not shown in the figure) connected to the first position monitoring unit 5 and the second position monitoring unit 6 for comparing whether the distance between the first position and the second position meets a first preset value; and an alarm unit connected to the position comparison unit, which issues an alarm when the position comparison unit determines that the distance between the first position and the second position is greater than the first preset value.

[0059] In this embodiment, the trimmer 1 and the mounting base 2 are connected by screws. When the screws are loose, the distance between the trimmer 1 and the mounting base 2 will increase. At this time, the position comparison unit compares the distance between the first position and the second position and finds that it is greater than the first set value. The alarm unit then issues an alarm indicating that the screws between the trimmer 1 and the mounting base 2 are loose.

[0060] Specifically, in this embodiment, the drive unit 3 is mounted on the drive unit mounting surface of the steering arm 4; the position comparison unit is also used to compare whether the distance between the second position and the drive unit mounting surface meets the second set value; when the position comparison unit finds that the distance between the second position and the drive unit mounting surface is greater than the second set value, the alarm unit issues an alarm.

[0061] The mounting seat 2 in the embodiment is connected with the driving unit 3 through a reset spring. When the reset spring is deformed, the stroke between the mounting seat 2 and the driving unit 3 becomes larger. When the position comparison unit compares that the distance between the second position and the driving unit mounting surface is greater than the second set value, the alarm unit sends an alarm that the reset spring is deformed.

[0062] As shown in Figure 1 In the embodiment, the first position includes the working surface of the dresser 1; the second position includes the dresser mounting surface on the mounting seat 2; the working surface of the dresser 1 is the lower surface of the dresser 1, the dresser mounting surface is the lower surface of the mounting seat 2, and the driving unit mounting surface is the lower surface of the steering arm 4.

[0063] In the embodiment, the driving unit 3 includes a cylinder 310, which includes a fixed part and a movable part. The movable part is used to drive the mounting seat 2 to move down from the initial position to the working position. The fixed part is connected with the mounting seat 2 through a reset spring. The spring reset makes the mounting seat 2 move up from the working position to the initial position. When the mounting seat 2 is in the initial position and the position comparison unit compares that the distance between the second position and the driving unit mounting surface is greater than the second set value, the alarm unit sends an alarm that the reset spring is deformed.

[0064] In the embodiment, the first position monitoring unit 5 and the second position monitoring unit 6 both include optical sensors installed on the lower surface of the steering arm 4.

[0065] As shown in Figure 1 In the embodiment, the lower surface of the steering arm 4 is used as the reference surface. The first optical sensor 510 detects that the distance between the first position and the lower surface of the steering arm 4 is h1, and the second optical sensor 610 detects that the distance between the second position and the lower surface of the steering arm 4 is h2. When the position comparison unit compares that the distance between the first position and the second position, i.e., h1-h2 is greater than the first set value a1, the alarm unit sends an alarm that the screw between the dresser 1 and the mounting seat 2 is loose. When the mounting seat 2 is in the initial position and the position comparison unit compares that the distance h2 between the second position and the driving unit mounting surface is greater than the second set value a2, the alarm unit sends an alarm that the reset spring is deformed.

[0066] The embodiment also provides a dresser monitoring method using the above dresser monitoring system, which includes: when the first position monitoring unit 5 fails to monitor the first position on the dresser 1, the alarm unit sends an alarm that the dresser 1 is missing or falls off.

[0067] As a preferred embodiment, the dresser monitoring method in the embodiment further comprises: the first position monitoring unit 5 monitors a first position on the dresser 1; the second position monitoring unit 6 monitors a second position on the mounting base 2; when the position comparison unit compares that the distance between the first position and the second position is greater than a first set value, the alarm unit issues an alarm that the screw between the dresser 1 and the mounting base 2 is loose.

[0068] Specifically, the dresser monitoring method in the embodiment further comprises: the mounting base 2 is in an initial position, and when the position comparison unit compares that the distance between the second position and the driving unit mounting surface is greater than a second set value, the alarm unit issues an alarm that the reset spring is deformed.

[0069] The embodiment further provides a chemical mechanical polishing machine table comprising the dresser monitoring system of any one of the above, wherein the steering arm 4 is mounted on the machine table through the base 7, which will not be described here again.

[0070] Although the content of the present application has been described in detail through the above preferred embodiments, it should be recognized that the above description should not be considered as a limitation to the present application. After reading the above content, various modifications and substitutions to the present application will be apparent to those skilled in the art. Therefore, the protection scope of the present application should be defined by the appended claims.

Claims

1. A trimmer monitoring system, characterized in that, The dressing device is mounted on the drive unit via a mounting bracket, and the drive unit is located at the steering arm, comprising: The first position monitoring unit is used to monitor the first position on the trimmer. An alarm unit is connected to the first position monitoring unit; When the first position monitoring unit fails to detect the first position on the trimmer, the alarm unit issues an alarm.

2. The trimmer monitoring system as described in claim 1, characterized in that, Also includes: The second position monitoring unit is used to monitor the second position on the mounting base; A position comparison unit, connected to the first position monitoring unit and the second position monitoring unit, is used to compare whether the distance between the first position and the second position meets a first preset value; The alarm unit is connected to the position comparison unit. When the position comparison unit determines that the distance between the first position and the second position is greater than a first preset value, the alarm unit issues an alarm.

3. The trimmer monitoring system as described in claim 2, characterized in that: The drive unit is mounted on the drive unit mounting surface of the steering arm; The position comparison unit is also used to compare whether the distance between the second position and the mounting surface of the drive unit meets a second preset value; When the position comparison unit determines that the distance between the second position and the mounting surface of the drive unit is greater than a second set value, the alarm unit issues an alarm.

4. The trimmer monitoring system as described in claim 3, characterized in that, The first position includes the working surface of the trimmer; The second position includes the trimmer mounting surface on the mounting base; The working surface of the dresser is the lower surface of the dresser, the mounting surface of the dresser is the lower surface of the mounting base, and the mounting surface of the drive unit is the lower surface of the steering arm.

5. The trimmer monitoring system as described in claim 3, characterized in that, The drive unit includes a cylinder, which includes a fixed part and a movable part. The movable part is used to drive the mounting base to move down from the initial position to the working position. The fixed part is connected to the mounting base through a return spring. The spring returns to its original position, causing the mounting base to move up from the working position to the initial position. When the mounting base is in the initial position and the position comparison unit determines that the distance between the second position and the mounting surface of the drive unit is greater than a second set value, the alarm unit issues an alarm.

6. The trimmer monitoring system as described in claim 4, characterized in that, Both the first position monitoring unit and the second position monitoring unit include an optical sensor mounted on the lower surface of the steering arm.

7. A method for monitoring a dresser using the dresser monitoring system as described in claim 1, characterized in that, include: When the first position monitoring unit fails to detect the first position on the trimmer, the alarm unit issues an alarm indicating that the trimmer is missing or has fallen off.

8. The trimmer monitoring method as described in claim 7, characterized in that, The trimmer monitoring system further includes a second position monitoring unit for monitoring a second position on the mounting base; a position comparison unit connected to the first and second position monitoring units for comparing whether the distance between the first and second positions meets a first preset value; an alarm unit connected to the position comparison unit; and the trimmer and the mounting base connected by screws. The method includes: The first position monitoring unit detects the first position on the trimmer; The second position monitoring unit detects the second position on the mounting base; When the position comparison unit determines that the distance between the first position and the second position is greater than a first set value, the alarm unit issues an alarm indicating that the screws between the trimmer and the mounting base are loose.

9. The trimmer monitoring method as described in claim 8, characterized in that, The drive unit is mounted on the drive unit mounting surface of the steering arm; the position comparison unit is also used to compare whether the distance between the second position and the drive unit mounting surface meets a second preset value; The drive unit includes a cylinder, which comprises a fixed part and a movable part. The movable part drives the mounting base to move downward from an initial position to a working position. The fixed part is connected to the mounting base via a return spring, and the spring's return causes the mounting base to move upward from the working position back to the initial position. The method includes: When the mounting base is in the initial position and the position comparison unit determines that the distance between the second position and the mounting surface of the drive unit is greater than a second set value, the alarm unit issues an alarm indicating that the reset spring has deformed.

10. A chemical mechanical grinding machine, characterized in that, Includes the trimmer monitoring system as described in any one of claims 1-6.

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