Full-automatic material changing structure

The fully automated material changing structure, with its dual-rail transport module and grippers, enables the automated transfer of materials such as REEL trays, solving the problems of equipment downtime and low efficiency caused by manual operation, and improving the efficiency and equipment utilization of semiconductor production lines.

CN120987084APending Publication Date: 2025-11-21HUATIAN TECH (JIANGSU) CO LTD
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Patent Information

Application Number
CN202511419564.3
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2025-09-30
Publication Date
2025-11-21

AI Technical Summary

Technical Problem

In existing semiconductor production lines, the transfer of REEL trays, carriers, material frames, and pallets relies on manual operation, resulting in long equipment downtime, low operating efficiency, and the risk of equipment downtime due to manual intervention.

Method used

Design a fully automatic material changing structure, which adopts a dual slide rail transport module and transport grippers to realize the automated transfer of REEL trays, carriers, material frames and pallets. Automatic loading and unloading of materials is realized through slide rails and drive modules, reducing manual intervention and improving equipment utilization and production capacity.

Benefits of technology

It significantly improved the overall efficiency and uptime of semiconductor production lines, reduced equipment waiting time, and increased production capacity per unit time.

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Abstract

The invention provides a full-automatic material changing structure, which effectively solves the problems of long material waiting time, low operation efficiency and the like in the production process of existing equipment, and remarkably improves the overall efficiency and the utilization rate of a semiconductor production line. The transfer material frame comprises top plates, bottom plates and peripheral stand columns, the two sides of each top plate are each provided with a set of parallel upper sliding rails, specifically, a first upper sliding rail and a second upper sliding rail, and the two sides of each bottom plate are each provided with a set of parallel lower sliding rails, specifically, a first lower sliding rail and a second lower sliding rail; the double-sliding-rail carrying module comprises transverse sliding rail modules, longitudinal sliding rail modules and carrying clamping jaws, the double-sliding-rail carrying module is arranged in the middle space of the transfer material frame in the length direction, and the two longitudinal sliding rail modules are arranged on the two sides correspondingly and are at least fixedly connected with one corresponding position of the top plate or the bottom plate; the two ends of the transverse sliding rail module are supported at the output ends of the longitudinal sliding rail modules on the two sides respectively.
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Description

Technical Field

[0001] This invention relates to the technical field of material transfer, specifically to a fully automatic material changing structure. Background Technology

[0002] Currently, the transfer of REEL trays, carriers, material frames, and pallets is done manually. When the main equipment needs to be loaded, personnel manually place the REEL trays, carriers, material frames, and pallets to their respective workstations, and the machine begins operation. After the operation is completed, personnel remove the REEL trays, carriers, material frames, and pallets and manually transport them to the recycling storage location. Manual operation carries certain risks in handling and placement, and delays in manual material replacement can lead to main equipment downtime. To improve equipment utilization, during operation, personnel can pre-place the REEL trays, carriers, material frames, and pallets at the loading position. After material processing is complete, the equipment is transferred to the unloading position via a mechanism, reducing equipment downtime caused by manual intervention and thus improving equipment utilization and capacity per unit time. Summary of the Invention

[0003] To address the aforementioned problems, this invention provides a fully automated material changing structure, which effectively solves the problems of long waiting time and low operating efficiency of existing equipment during the production process, and significantly improves the overall efficiency and utilization rate of semiconductor production lines.

[0004] A fully automatic material changing structure, characterized in that it comprises: The transfer frame includes a top plate, a bottom plate, and four columns. Each top plate has a set of parallel upper slide rails on both sides, specifically a first upper slide rail and a second upper slide rail. Each bottom plate has a set of parallel lower slide rails on both sides, specifically a first lower slide rail and a second lower slide rail. A dual-rail conveying module includes a transverse rail module, a longitudinal rail module, and conveying grippers. The dual-rail conveying module is disposed in the middle space along the length of the transfer frame. Two sets of longitudinal rail modules are respectively disposed on both sides and fixed to at least one corresponding position of the top plate or the bottom plate. The two ends of the transverse rail module are respectively supported by the output ends of the longitudinal rail modules on both sides. The output end of the transverse rail module is fixed to the conveying grippers. The front part of the first upper slide rail is provided with an independent first feeding frame and is embedded in the first upper slide rail through a first upper front drive module. The rear part of the first upper slide rail is provided with an independently driven first upper rear drive module, and the lower part of the first upper rear drive module is fixed with a first operating mechanism. The front of the first lower slide rail is provided with an independent first feeding frame and is embedded in the first lower slide rail through a first lower front drive module. The rear of the first lower slide rail is provided with an independently driven first lower rear drive module, and a second operating mechanism is fixed on the upper part of the first lower rear drive module. The front part of the second upper slide rail is provided with an independent second feeding frame and is embedded in the second upper slide rail through the second upper front drive module. The rear part of the second upper slide rail is provided with an independently driven second upper rear drive module, and the lower part of the second upper rear drive module is fixed with a third operating mechanism. The front of the second lower slide rail is provided with an independent second feeding frame and is embedded in the second lower slide rail through a second lower front drive module. The rear of the second lower slide rail is provided with an independently driven second lower rear drive module, and a fourth operating mechanism is fixed on the upper part of the second lower rear drive module. The transport grippers of the dual-rail transport module are used to perform bottom-up transport operations of the material loading mechanism in the same area, and can also take into account the up-and-down transport of modules on both sides at the same time.

[0005] Its further features are: When the material is wound around the Reel disk, the first transfer mechanism, the second transfer mechanism, the third transfer mechanism, and the fourth transfer mechanism each include a vertical plate, a rotating wheel, a conveyor belt, a drive motor, and a mounting contour positioning post. The front end of the mounting contour positioning post is set towards the center hole of the Reel disk, and the rear end of the mounting contour positioning post is fixedly fitted with a rotating wheel. The output end of the drive motor is fitted with an output wheel and connected to the rotating wheel through a transmission belt. The rotating wheel drives the mounting contour positioning post to rotate, thereby driving the Reel disk to rotate. All four sides of the front facade of the movable plate in the areas of the first feeding frame, the second feeding frame, the first feeding frame, and the second feeding frame are equipped with material-blocking cylinders. The movable plates at the corresponding positions are fixed to the movable ends of the first upper front drive module, the second upper front drive module, the first lower front drive module, and the second lower front drive module. The material-blocking cylinder is used to clamp the outer edge of the Reel at the rear position, thereby pushing the Reel disk that needs to be moved to move back and forth. After ensuring that the transfer mechanism reliably sends the Reel disk into the feeding frame, the material-blocking block of the material-blocking cylinder extends and stops the Reel disk, so that the empty Reel disk enters the feeding frame. Alternatively, after ensuring that the transfer mechanism removes the Reel disk at the last end of the upper feeding frame by installing the contour positioning column, the material-blocking block of the material-blocking cylinder extends and presses the Reel disk at the next rear end, so that the corresponding operating mechanism only takes away a single Reel disk. The transport gripper includes four pressing cylinders arranged in an X-shape. The piston end of each pressing cylinder is fixedly connected to a pressing block. The transport gripper is located behind the Reel disk. Driven by the pressing cylinder, the pressing block is reliably pressed against the inner circumference of the Reel disk, thereby allowing the corresponding operating mechanism to disengage by moving back and forth.

[0006] Taking the above technical solution as an example, with the first upper slide rail, the first lower slide rail corresponding to the first unloading frame, the first operating mechanism, the first loading frame, and the second operating mechanism, the manual or automatic loading and unloading mechanism places the loading mechanism (REEL tray, carrier, material frame, pallet) in the area of ​​the first loading frame. The first front drive module drives the loading mechanisms arranged in sequence to retreat one by one to the rear end of the first loading frame. Then, the second operating mechanism docks with the loading mechanism and drives the individual loading mechanism backward and detaches it from the first loading frame. The individual loading mechanism moves the material through the action of the second operating mechanism. After that, the loading mechanism is an empty loading mechanism. The transport grippers of the dual slide rail transport module transport the loading mechanism from bottom to top to the corresponding height position of the first operating mechanism. The first operating mechanism docks with the empty loading mechanism and sends the empty loading mechanism into the first unloading frame, until the first... Once the material-carrying mechanism in the unloading frame is full, the empty material-carrying mechanism is removed manually or automatically. During specific material operations, the processing position can also be set at the height of the first transfer mechanism, depending on the working position height. The dual-rail conveying module can simultaneously handle the up-and-down transfer of the material-carrying mechanisms corresponding to the two modules on both sides without interfering with other mechanisms. When the machine is in operation, the material-carrying mechanism is placed in the loading frame of the loading position in advance. After the material is processed by the operating mechanism located at the bottom or top, it is transferred to the unloading position of the unloading frame by the conveying grippers of the dual-rail conveying module. This reduces equipment downtime caused by manual intervention, thereby improving equipment utilization and production capacity per unit time. It effectively solves the problems of long waiting time and low operating efficiency of existing equipment in the production process, and significantly improves the overall efficiency and utilization rate of the semiconductor production line. Attached Figure Description

[0007] Figure 1 The three-dimensional representation of the present invention Figure 1 ; Figure 2 The three-dimensional representation of the present invention Figure 2 ; Figure 3 This is a perspective view of a single-sided fully automatic material changing module of the present invention; Figure 4 This is a perspective view of the dual slide rail transport module of the present invention; The names corresponding to the serial numbers in the diagram are as follows: 1. Vertical plate; 2. Rotating wheel; 3. Conveyor belt; 4. Drive motor; 5. Mounting contour positioning column; 6. Moving plate; 7. Material blocking cylinder; 8. Material blocking block; The following components are included: transfer frame 10, top plate 11, bottom plate 12, column 13, double slide rail handling module 20, transverse slide rail module 21, longitudinal slide rail module 22, handling gripper 23, transverse connecting plate 24, pressing cylinder 25, pressing block 26, first upper slide rail 30, second upper slide rail 40, first lower slide rail 50, second lower slide rail 60, first unloading frame 70, first upper front drive module 80, first upper rear drive module 90, first operating mechanism 100, first loading frame 110, first lower front drive module 120, first lower rear drive module 130, second operating mechanism 140, second unloading frame 150, second upper front drive module 160, second upper rear drive module 170, third operating mechanism 180, second loading frame 190, second lower front drive module 200, second lower rear drive module 210, fourth operating mechanism 220, and Reel disk 230. Detailed Implementation

[0008] A fully automatic material changing structure, see Figures 1-4 It includes a transfer frame 10 and a double slide rail handling module 20; The transfer frame 10 includes a top plate 11, a bottom plate 12, and four columns 13. Each top plate 11 has a set of parallel upper slide rails on both sides, specifically a first upper slide rail 30 and a second upper slide rail 40. Each bottom plate 12 has a set of parallel lower slide rails on both sides, specifically a first lower slide rail 50 and a second lower slide rail 60. The dual-rail conveying module 20 includes a transverse rail module 21, a longitudinal rail module 22, and a conveying gripper 23. The dual-rail conveying module 20 is set in the middle space of the transfer frame 10 along its length. The two sets of longitudinal rail modules 22 are respectively set on both sides and fixed to the corresponding positions of the top plate 11. The transverse rail module 21 is fixed to the transverse connecting plate 24. The two ends of the transverse connecting plate 24 are the output ends of the longitudinal rail modules 22 on both sides. The output end of the transverse rail module 21 is fixed to the conveying gripper 23. The front of the first upper slide rail 30 is provided with an independent first unloading frame 70 and is embedded in the first upper slide rail 30 through the first upper front drive module 80. The rear of the first upper slide rail 30 is provided with an independently driven first upper rear drive module 90, and the lower part of the first upper rear drive module 90 is fixed with a first operating mechanism 100. The front of the first lower slide rail 50 is provided with an independent first feeding frame 110 and is embedded in the first lower slide rail 50 through a first lower front drive module 120. The rear of the first lower slide rail 50 is provided with an independently driven first lower rear drive module 130, and the upper part of the first lower rear drive module 130 is fixed with a second operating mechanism 140. The front of the second upper slide rail 40 is provided with an independent second unloading frame 150 and is embedded in the second upper slide rail 40 through the second upper front drive module 160. The rear of the second upper slide rail 40 is provided with an independently driven second upper rear drive module 170, and the lower part of the second upper rear drive module 170 is fixed with a third operating mechanism 180. The front of the second lower slide rail 60 is provided with an independent second feeding frame 190 and is embedded in the second lower slide rail 60 through the second lower front drive module 200. The rear of the second lower slide rail 60 is provided with an independently driven second lower rear drive module 210, and the upper part of the second lower rear drive module 210 is fixed with a fourth operating mechanism 220. The transport grippers 23 of the dual slide rail transport module 20 are used to perform bottom-up transport operations of the material loading mechanism in the same area, and can also take into account the up-and-down transport of the fully automatic material changing modules on both sides.

[0009] In specific implementation, the material loading mechanism is a Reel disk 230. The first transfer mechanism 100, the second transfer mechanism 140, the third transfer mechanism 180, and the fourth transfer mechanism 220 all include a vertical plate 1, a rotating wheel 2, a conveyor belt 3, a drive motor 4, and a mounting contour positioning column 5. The front end of the mounting contour positioning column 5 is set towards the center hole of the Reel disk 230, and the rear end of the mounting contour positioning column 5 is fixedly fitted with the rotating wheel 2. The output end of the drive motor 4 is fitted with an output wheel and connected to the rotating wheel 2 through a transmission belt 3. The rotating wheel 2 drives the mounting contour positioning column 5 to rotate, thereby driving the Reel disk 230 to rotate. Around the front perimeter of the movable plate 6 within the areas of the first unloading frame 70, the second unloading frame 150, the first loading frame 110, and the second loading frame 190, there are material-stopping cylinders 7. The movable plate 6 at the corresponding positions is fixed to the moving ends of the first upper front drive module 80, the second upper front drive module 160, the first lower front drive module 120, and the second lower front drive module 200. The output end of the material-stopping cylinder 7 is fixed to the material-stopping block 8 and used to clamp the outer edge of the Reel disk 230 at the rear position, thereby pushing the Reel disk 230 that needs to be moved. After the Reel disc 230 moves back and forth and the transfer mechanism reliably feeds the Reel disc 230 into the unloading frame, the baffle block 8 of the baffle cylinder 7 extends and stops the Reel disc 230, allowing the empty Reel disc 230 to enter the unloading frame. Alternatively, after the transfer mechanism removes the Reel disc 230 at the last end of the loading frame by installing the contour positioning column 5, the baffle block of the baffle cylinder 7 extends and presses the Reel disc 230 at the next rear end, so that the corresponding operating mechanism only takes away a single Reel disc 230. The transport gripper 23 includes four pressing cylinders 25 arranged in an X-shape. The piston end of each pressing cylinder 25 is fixedly connected to a pressing block 26. The transport gripper 23 is positioned behind the Reel disk 230. Driven by the pressing cylinders 25, the pressing block 26 is reliably pressed against the inner circumference of the Reel disk 230, thereby allowing the transporter to disengage from the corresponding transporter by moving back and forth.

[0010] Its working principle is as follows: Taking the first upper slide rail, the first lower slide rail corresponding to the first unloading frame, the first operating mechanism, the first loading frame, and the second operating mechanism as examples, the manual or automatic loading and unloading mechanism places the loading mechanism (REEL tray, carrier, material frame, pallet) in the area of ​​the first loading frame. The first lower front drive module drives the loading mechanisms arranged in sequence to retreat one by one to the rear end of the first loading frame. Then, the second operating mechanism docks with the loading mechanism and drives the individual loading mechanism backward and detaches it from the first loading frame. The individual loading mechanism moves the material through the action of the second operating mechanism. After that, the loading mechanism is an empty loading mechanism. The transport grippers of the dual slide rail transport module transfer the loading mechanism from bottom to top to the corresponding height position of the first operating mechanism. The first operating mechanism docks with the empty loading mechanism and sends the empty loading mechanism into the first unloading frame until the first... After the material loading mechanism in the unloading frame is full, the empty material loading mechanism is removed manually or automatically. During specific material operations, the processing position can also be set at the height of the first transfer mechanism, depending on the height of the working position. The dual-rail conveying module can simultaneously handle the up and down transfer of the material loading mechanisms corresponding to the two modules on both sides without interfering with other mechanisms. When the machine is in operation, the material loading mechanism is placed in the loading frame of the loading position in advance. After the material is processed by the operating mechanism located at the bottom or top, it is transferred to the unloading position of the unloading frame by the conveying grippers of the dual-rail conveying module. This reduces equipment downtime caused by manual intervention, thereby improving equipment utilization and production capacity per unit time. It effectively solves the problems of long waiting time and low operating efficiency of existing equipment in the production process, and significantly improves the overall efficiency and utilization rate of the semiconductor production line.

[0011] It will be apparent to those skilled in the art that the present invention is not limited to the details of the exemplary embodiments described above, and that the invention can be implemented in other specific forms without departing from its spirit or essential characteristics. Therefore, the embodiments should be considered in all respects as exemplary and non-limiting, and the scope of the invention is defined by the appended claims rather than the foregoing description. Thus, all variations falling within the meaning and scope of equivalents of the claims are intended to be included within the present invention. No reference numerals in the claims should be construed as limiting the scope of the claims.

[0012] Furthermore, it should be understood that although this specification describes embodiments, not every embodiment contains only one independent technical solution. This narrative style is merely for clarity. Those skilled in the art should consider the specification as a whole, and the technical solutions in each embodiment can also be appropriately combined to form other embodiments that can be understood by those skilled in the art.

Claims

1. A fully automatic material changing structure, characterized in that, It includes: The transfer frame includes a top plate, a bottom plate, and four columns. Each top plate has a set of parallel upper slide rails on both sides, specifically a first upper slide rail and a second upper slide rail. Each bottom plate has a set of parallel lower slide rails on both sides, specifically a first lower slide rail and a second lower slide rail. A dual-rail conveying module includes a transverse rail module, a longitudinal rail module, and conveying grippers. The dual-rail conveying module is disposed in the middle space along the length of the transfer frame. Two sets of longitudinal rail modules are respectively disposed on both sides and fixed to at least one corresponding position of the top plate or the bottom plate. The two ends of the transverse rail module are respectively supported by the output ends of the longitudinal rail modules on both sides. The output end of the transverse rail module is fixed to the conveying grippers. The front part of the first upper slide rail is provided with an independent first feeding frame and is embedded in the first upper slide rail through a first upper front drive module. The rear part of the first upper slide rail is provided with an independently driven first upper rear drive module, and the lower part of the first upper rear drive module is fixed with a first operating mechanism. The front of the first lower slide rail is provided with an independent first feeding frame and is embedded in the first lower slide rail through a first lower front drive module. The rear of the first lower slide rail is provided with an independently driven first lower rear drive module, and a second operating mechanism is fixed on the upper part of the first lower rear drive module. The front part of the second upper slide rail is provided with an independent second feeding frame and is embedded in the second upper slide rail through the second upper front drive module. The rear part of the second upper slide rail is provided with an independently driven second upper rear drive module, and the lower part of the second upper rear drive module is fixed with a third operating mechanism. The front of the second lower slide rail is provided with an independent second feeding frame and is embedded in the second lower slide rail through a second lower front drive module. The rear of the second lower slide rail is provided with an independently driven second lower rear drive module, and a fourth operating mechanism is fixed on the upper part of the second lower rear drive module. The transport grippers of the dual-rail transport module are used to perform bottom-up transport operations of the material loading mechanism in the same area, and can also take into account the up-and-down transport of modules on both sides at the same time.

2. The fully automatic material changing structure according to claim 1, characterized in that: When materials are wound around the Reel disc, the first, second, third, and fourth transfer mechanisms each include a vertical plate, a rotating wheel, a conveyor belt, a drive motor, and a mounting contour positioning post. The front end of the mounting contour positioning post faces the center hole of the Reel disc, and the rear end of the mounting contour positioning post is fixedly fitted with a rotating wheel. The output end of the drive motor is fitted with an output wheel and connected to the rotating wheel through a transmission belt. The rotating wheel drives the mounting contour positioning post to rotate, thereby driving the Reel disc to rotate.

3. The fully automatic material changing structure according to claim 2, characterized in that: All four sides of the front facade of the movable plate in the areas of the first feeding frame, the second feeding frame, the first feeding frame, and the second feeding frame are equipped with material-stopping cylinders, and the movable plates at the corresponding positions are fixed to the movable ends of the first upper front drive module, the second upper front drive module, the first lower front drive module, and the second lower front drive module.

4. The fully automatic material changing structure according to claim 2, characterized in that: The transport gripper includes four pressing cylinders arranged in an X-shape, with a pressing block fixed to the piston end of each pressing cylinder.