Fan disassembling and assembling tool for semiconductor vacuum equipment and using method of fan disassembling and assembling tool

Abstract

The invention relates to a fan dismounting and mounting tool for semiconductor vacuum equipment and a using method thereof, the fan dismounting and mounting tool is used for carrying a fan on vacuum process equipment in a semiconductor manufacturing production line, the fan dismounting and mounting tool comprises a working platform, universal wheels with brake devices are arranged at the bottom of the working platform, and foldable and locked supporting legs are hinged to the bottom of the working platform; a telescopic lifting support is arranged on the working platform, a winch and a hand wheel are arranged on the inner side of the lifting support, the lifting support comprises an inner telescopic section, a fork arm used for bearing a draught fan is arranged at the front end of the inner telescopic section, a self-locking gear transmission set is arranged in the winch, and the hand wheel is connected with the self-locking gear transmission set through a transmission shaft. The output end of the self-locking gear transmission set is connected with the fork arm through a steel wire rope, the lifting support is formed by nesting an outer-section fixed section and an inner-section telescopic section and is matched with the multi-stage pulley block to guide the steel wire rope to operate, and the composite lifting mode that the fork arm firstly ascends along the inner-section telescopic section and then drives the whole inner-section telescopic section to integrally stretch out after ascending to the top end is achieved.

Description

Technical Field

[0001] This invention relates to the field of semiconductor technology, and in particular to a fan assembly / disassembly fixture for semiconductor vacuum equipment and its usage method. Background Technology

[0002] In high-cleanliness industrial production processes such as semiconductor manufacturing, vacuum process equipment widely uses fans as core components for gas circulation, pressure regulation, or vacuum maintenance. Since fans are usually large in size, heavy in weight, and installed at a high position, their disassembly and installation operations place extremely high demands on the stability, safety, and operational precision of the handling equipment.

[0003] While some tooling equipment exists for wind turbine handling, it generally suffers from problems such as complex structure, large size, lack of self-locking function in the lifting system, and inconvenient operation. These issues lead to numerous shortcomings in actual use. For example, some tooling uses hydraulic or electric lifting systems, which, although highly efficient, are expensive, complex to maintain, and pose a risk of load slippage in the event of power failure or system malfunction. Other manual lifting devices lack multi-stage lifting capabilities and cannot meet the installation requirements of wind turbines at different heights. Furthermore, traditional handling tooling uses relatively simple methods to fix the wind turbine during lifting at different heights, lacking effective anti-slip and anti-tipping designs. This can easily cause wind turbine displacement or even damage during handling, posing a risk of damage and contamination to the semiconductor wind turbine equipment. Summary of the Invention

[0004] The present invention aims to solve the problems existing in the prior art by providing a fan disassembly and assembly tool for semiconductor vacuum equipment and its usage method, which is used for disassembling and installing fans of vacuum process equipment in semiconductor manufacturing production lines, and solves the problems of low handling efficiency, poor safety, and easy damage to equipment in the prior art.

[0005] The technical solution adopted by this invention to solve its technical problem is as follows: This fan assembly and disassembly fixture for semiconductor vacuum equipment is used to transport fans on vacuum process equipment in semiconductor manufacturing production lines. It includes a work platform, with casters equipped with brakes and hinged, foldable, and lockable support legs at the bottom. A retractable lifting bracket is installed on the work platform, and a winch and handwheel are located inside the lifting bracket. The lifting support includes an inner telescopic section, the front end of which is provided with a fork arm for supporting the fan. The winch is equipped with a self-locking gear transmission group. The handwheel is connected to the self-locking gear transmission group through a transmission shaft. The output end of the self-locking gear transmission group is connected to the fork arm through a steel wire rope. The rotating handwheel drives the self-locking gear transmission group to drive the fork arm to rise and fall along the inner telescopic section of the lifting bracket via a steel wire rope, and can continue to drive the inner telescopic section to extend as a whole after the fork arm rises to the top of the inner telescopic section.

[0006] Preferably, the self-locking gear transmission assembly includes: an input gear fixedly connected to the drive shaft of the handwheel, a transition gear rotatably mounted on the winch and meshing with the input gear, and an output gear meshing with the transition gear. A winch is rotatably mounted on the winch, and the output gear is coaxially mounted and connected to the winch. The number of teeth on the output gear is greater than the number of teeth on the input gear, forming a gear transmission with deceleration and self-locking functions.

[0007] Preferably, the lifting support includes an outer fixed section nested with the inner telescopic section. The outer fixed section is provided with a guide wheel for guiding the wire rope near the side wall of the winch. The top of the inner telescopic section is provided with a top pulley group and an anchor point. The bottom of the inner telescopic section is provided with a bottom pulley group. The wire rope of the winch passes through the guide wheel, the bottom pulley group, the top pulley group, and the movable pulley at the top of the fork arm in sequence, and is finally fixed to the anchor point of the inner telescopic section. When the winch retracts the rope, the wire rope first lifts the fork arm along the inner telescopic section to its top, and then drives the inner telescopic section to extend out from the outer fixed section.

[0008] Preferably, the fork arm is a U-shaped bracket structure. The fork arm includes a horizontal support plate with anti-slip texture, a lateral beam at the rear of the support plate, and a movable pulley at the top of the lateral beam connected to the wire rope. The lateral beam is equipped with a tightening bolt. The lateral beam is used for the hanging rope of the L-shaped baffle of the fan to be wound around. The tightening bolt is used to press and fix the hanging rope to the support plate to prevent displacement during transportation.

[0009] When the winch retracts the rope, the wire rope first lifts the fork arm along the inner telescopic section to its top, and then drives the entire inner telescopic section to extend.

[0010] Preferably, the surface of the horizontal bearing plate is provided with an anodized antistatic coating, and the upper surface of the horizontal bearing plate is provided with an insulating protective plate that abuts against the fan.

[0011] Preferably, the inner side of the lifting support is provided with a push-pull handrail, which is located below the handwheel and fixedly connected to the lifting support, for manually pushing or pulling the work platform to move.

[0012] This invention also provides a method for using a fan disassembly fixture for semiconductor vacuum equipment to solve the above-mentioned technical problems. The fixture is used to disassemble fans on vacuum process equipment in a semiconductor manufacturing production line, and includes the following steps: S1. Unfold the folded lifting bracket and lock the hinged legs to put the tooling into working condition; S2. Rotate the handwheel to drive the self-locking gear transmission group, controlling the fork arm set on the lifting bracket to descend to the loading height; S3. Transfer the fan to the U-shaped bracket of the fork arm, and the hanging rope locked on the L-shaped baffle of the fan is wound around the U-shaped bracket; S4. Lift the fan off the mounting surface and disconnect the power supply and vacuum line; S5. Move the tooling to a safe area, rotate the handwheel in the opposite direction to slowly lower the fork arm, and place the fan on the ground or a transport device; S6. Adjust the handwheel to return the fork arm to its initial position; The self-locking gear transmission assembly's reduction structure prevents reverse rotation caused by the reverse torque generated by the load, ensuring safe positioning during the lifting process.

[0013] Preferably, in step S4, a fluororubber blind flange is installed at the pipeline interface immediately after the vacuum pipeline is disconnected.

[0014] This invention also provides a method for using a fan installation fixture for semiconductor vacuum equipment to solve the above-mentioned technical problems, for installing a fan on a vacuum process equipment in a semiconductor manufacturing production line, comprising the following steps: S1. Unfold the folded lifting bracket and lock the hinged legs to put the tooling into working condition; S2. Rotate the handwheel to drive the self-locking gear transmission group, controlling the fork arm set on the lifting bracket to descend to the loading height; S3. Place the fresh air unit to be installed on the fork arm, and the hanging rope locked on the L-shaped baffle of the fan is wound around the U-shaped bracket. Adjust the handwheel to raise the fork arm to the target installation height to ensure the stable support of the fresh air unit on the fork arm. S4. Move the tooling to the target installation position, and slowly lower the fork arm by adjusting the handwheel to smoothly install the fresh air unit into the designated position; S5. Lower the blower to its position and connect the vacuum pipeline; S6. After the fresh air unit is installed, adjust the handwheel to return the fork arm to its initial position, preparing for the next operation. The self-locking gear transmission assembly's reduction structure prevents reverse rotation caused by the reverse torque generated by the load, ensuring safe positioning during the lifting process.

[0015] Preferably, the mounting surface is cleaned to a cleanroom level of ISO 14644-1 Class 5 before step S5.

[0016] The present invention has the following beneficial effects: 1. The lifting bracket of the present invention is composed of an outer fixed section and an inner telescopic section nested together, and is coordinated with a multi-stage pulley system (guide wheel, bottom pulley system, top pulley system and moving pulley) to guide the steel wire rope to run, so as to realize a composite lifting mode in which the fork arm first rises along the inner telescopic section, and after rising to the top, it drives the entire inner telescopic section to extend as a whole. This segmented lifting structure not only improves the lifting efficiency, but also expands the applicable height range of the tooling, and adapts to the needs of various installation semiconductor vacuum process equipment fan handling.

[0017] 2. Employing a combination of swivel casters with brakes and foldable locking outriggers, the transport vehicle offers excellent flexibility during movement while providing stable support during operation, effectively preventing tipping risks caused by uneven ground or external forces. Simultaneously, the lifting support utilizes a self-locking gear transmission to drive the wire rope lifting fork arm, featuring a self-locking function to ensure the fork arm will not slip due to gravity when at any height, greatly improving operational safety.

[0018] 3. The fork arm adopts a U-shaped bracket structure, with a horizontal load-bearing plate with anti-slip texture and a side beam with tightening bolts. The surface of the load-bearing plate is coated with an anti-static coating by anodizing to prevent static electricity accumulation from damaging the sensitive components inside the fan. At the same time, an insulating protection plate is set up. Combined with the fixed method of moving pulleys and hanging ropes, the fan is both supported and restricted in position during transportation, preventing displacement or tipping caused by vibration or movement, and improving the stability of the load and the reliability of operation. Attached Figure Description

[0019] Figure 1 This is a front view of a fan assembly / disassembly fixture for semiconductor vacuum equipment in its folded state, according to the present invention. Figure 2 This is a front view of a fan assembly / disassembly fixture for semiconductor vacuum equipment in its unfolded state, according to the present invention. Figure 3 A schematic diagram of the structure where the inner telescopic section extends outward from the outer fixed section; Figure 4 This is a top view of a fan assembly / disassembly fixture for semiconductor vacuum equipment in a folded state, according to the present invention. Figure 5 This is a top view of a fan assembly / disassembly fixture for semiconductor vacuum equipment in its unfolded state, according to the present invention. Figure 6 A schematic diagram of the winch and handwheel; Figure 7 This is a schematic diagram of a self-locking gear transmission assembly. Figure 8 This is an exploded view of the wind turbine; Figure 9 This is a flowchart illustrating the usage method of a blower disassembly fixture for a semiconductor vacuum device. Figure 10 This is a flowchart illustrating the usage of a fan installation fixture for a semiconductor vacuum device.

[0020] Explanation of reference numerals in the attached figures: 1. Working platform; 2. Winch; 3. Handwheel; 4. Casters; 5. Outriggers; 6. Lifting bracket; 7. Push-pull handrail; 8. Fan; 10. Self-locking gear transmission assembly; 11. Winch; 20. Fork arm; 21. Outer fixed section; 22. Inner telescopic section; 23. Guide wheel; 24. Top pulley assembly; 25. Bottom pulley assembly; 80. L-shaped baffle; 100. Input gear; 101. Transition gear; 102. Output gear; 103. Horizontal bearing plate; 104. Moving pulley; 105. Side beam; 106. Tightening bolt; 107. Lateral limiting plate; 108. Anchor point; 109. First tooth section; 110. Second tooth section; 800. Locking buckle. Detailed Implementation

[0021] To further illustrate the technical means and effects of the present invention in achieving its intended purpose, the following detailed description of the specific implementation methods, structures, features, and effects of the present invention, in conjunction with the accompanying drawings and preferred embodiments, is provided below.

[0022] like Figures 1 to 8 As shown, a fan assembly / disassembly fixture for semiconductor vacuum equipment is used to transport a fan 8 on a vacuum process equipment in a semiconductor manufacturing production line. It includes a working platform 1, with casters 4 equipped with brakes and hinged, foldable, and lockable support legs 5 at the bottom. A telescopic lifting bracket 6 is mounted on the working platform 1. A winch 2 and a handwheel 3 are located inside the lifting bracket 6. The lifting bracket 6 includes an inner telescopic section 22, with a fork arm 20 supporting the fan 8 at its front end. A self-locking gear transmission group 10 is installed inside the winch 2. The handwheel 3 is connected to the self-locking gear transmission group 10 via a drive shaft. The output end of the self-locking gear transmission group 10 is connected to the fork arm 20 via a steel wire rope. Rotating the handwheel 3 drives the self-locking gear transmission group 10 to move the fork arm 20 up and down along the inner telescopic section 22 of the lifting bracket 6 via the steel wire rope. The handwheel 3 can also continue to extend the inner telescopic section 22 as a whole after the fork arm 20 reaches the top of the inner telescopic section 22.

[0023] The fixture includes a working platform 1, with casters 4 equipped with brakes and foldable, lockable support legs 5 mounted on its bottom. A retractable lifting bracket 6 is installed on the working platform 1. The lifting bracket 6 is equipped with a winch 2 and a handwheel 3. The lifting bracket 6 has a vertical inner telescopic section 22, the front end of which is equipped with a U-shaped bracket fork arm 20 for supporting the fan 8. In this embodiment, the winch 2 has a self-locking gear transmission assembly 10 inside, connected to the handwheel 3 via a transmission shaft. When the handwheel 3 rotates, it drives the self-locking gear transmission assembly 10, which in turn drives the fan 8 via a wire rope. Connecting to the fork arm 20; when the operator rotates the handwheel 3, the self-locking gear transmission group 10 can precisely control the winding and unwinding of the wire rope, so that the fork arm 20 moves smoothly up and down along the inner telescopic section 22, realizing the efficient and safe lifting or lowering of the fan 8; and when the fork arm 20 rises to the top of the inner telescopic section 22, continuing to rotate the handwheel 3 can further push the entire inner telescopic section 22 outward, thereby completing the task of moving the fan 8 to a higher position. This not only improves the safety and efficiency of moving the fan 8, but also ensures the accuracy and stability during the operation process, making it particularly suitable for semiconductor production environments with strict environmental requirements.

[0024] In this embodiment, each caster wheel 4 is equipped with a foot-operated brake device. The brake pedal controls the brake pads to press against the axle, thereby locking the wheel and preventing the transport vehicle from shifting due to external forces during operation. The support legs 5 are as follows: Figure 1 and Figure 4 Hinged at the four corners of the work platform bottom, the outriggers are made of metal profiles and have sufficient load-bearing capacity. A limit hinge structure and locking pin mechanism are installed between the outriggers and the vehicle body. When not in use, they can be folded upwards to reduce space occupation. Figure 3 and Figure 5 The support legs are also equipped with casters 4. When the support legs are extended to the vertical position, they are fixed by locking pins, so that the support legs are in full contact with the ground and form a stable triangular support structure. This effectively distributes the weight of the transport vehicle and the fan, avoids the risk of tipping over caused by relying solely on the casters for support, and ensures stable support and easy movement during use.

[0025] Specifically, such as Figure 2 , Figure 3 , Figure 6 and Figure 7As shown, the self-locking gear transmission assembly 10 includes: an input gear 100 fixedly connected to the transmission shaft of the handwheel 3, a transition gear 101 rotatably mounted on the winch 2 and meshing with the input gear 100, and an output gear 102 meshing with the transition gear 101. A winch 11 is rotatably mounted on the winch 2, and the output gear 102 is coaxially mounted with and connected to the winch 11. The number of teeth of the output gear 102 is greater than the number of teeth of the input gear 100, forming a gear transmission with deceleration and self-locking functions.

[0026] The self-locking gear transmission assembly 10 includes an input gear 100 fixedly connected to the drive shaft of the handwheel 3, a transition gear 101 rotatably mounted on the winch 2 via a rotating shaft and meshing with the input gear 100, and an output gear 102 meshing with the transition gear 101. The output gear 102 is coaxially sleeved with and connected to the winch 11 of the winch 2. The output gear 102 rotates synchronously on the winch 2. The transition gear 101 is divided into upper and lower layers. The first tooth 109 of the lower layer meshes with the input gear 100, and the second tooth 110 of the upper layer meshes with the input gear 100. The output gear 102 meshes, and the number of teeth of the output gear 102 is greater than that of the input gear 100, forming a gear transmission system with a reduction function. The meshing transmission between the gears realizes the reduction and amplification of the input power of the handwheel 3, thereby increasing the lifting torque of the winch 2. At the same time, because the output gear 102 has a large number of teeth and a large transmission ratio, the entire gear system has a self-locking function. That is, without external force, the system cannot rotate in the opposite direction due to the load gravity, thereby effectively preventing the fork arm 20 from slipping due to gravity during the lifting process, ensuring the safety and stability during operation.

[0027] Specifically, such as Figure 2 and Figure 3 As shown, the lifting support 6 includes an outer fixed section 21 nested with the inner telescopic section 22. The outer fixed section 21 has a guide wheel 23 for guiding the wire rope on its side wall near the winch 2. The top of the inner telescopic section 22 is provided with a top pulley group 24 and an anchor point 108. The bottom of the inner telescopic section 22 is provided with a bottom pulley group 25. The wire rope of the winch 2 passes through the guide wheel 23, the bottom pulley group 25, the top pulley group 24, and the movable pulley 104 at the top of the fork arm 20 in sequence, and is finally fixed at the anchor point 108 of the inner telescopic section 22. When the winch retracts the rope, the wire rope first lifts the fork arm up along the inner telescopic section 22 to its top, and then drives the inner telescopic section 22 to extend out from the outer fixed section 21.

[0028] The lifting support 6 includes an outer fixed section 21 and an inner telescopic section 22 slidably nested inside it. In this embodiment, a guide wheel 23 is provided at the top of the side wall of the outer fixed section 21 near the winch 2 to guide the wire rope to run smoothly. At the same time, a top pulley group 24 is provided at the top of the inner telescopic section 22 near the outer fixed section 21, an anchor point 108 is provided at the top of the outer side of the inner telescopic section 22 away from the outer fixed section 21, and a bottom pulley group 25 is provided at the bottom of the inner telescopic section 22, forming a complete wire rope guiding and transmission system. The wire rope output by the winch 2 passes sequentially around the guide wheel 23, the bottom pulley group 25 of the inner telescopic section 22, and the top pulley group 25 of the inner telescopic section 22. The movable pulley 104 at the top of the wheel assembly 24 and the fork arm 20 is finally fixed on the anchor point 108 on the outer side of the top of the inner telescopic section 22. Through the composite transmission method of the multi-stage pulley assembly, the force distribution and stroke control of the wire rope during the lifting process are realized, thereby ensuring that the fork arm 20 rises smoothly along the inner telescopic section 22 in the initial stage. After rising to the top, the rope is continued to be wound, which drives the entire inner telescopic section 22 to extend outward, completing the lifting operation at a higher position. This improves the load-bearing capacity and operational stability of the lifting system, and also realizes the composite action of segmented lifting and overall extension, greatly enhancing the applicability and operational flexibility of the tooling. It is especially suitable for wind turbine handling scenarios where space is limited or multi-height operations are required.

[0029] It is worth mentioning that the top of the inner telescopic section 22 is provided with a transverse limiting plate 107. The transverse limiting plate 107 is located on the top of the outer side away from the outer fixed section 21, and is located next to the left and right ends of the anchor point 108 and abuts against the fork arm 20. It is used to prevent the fork arm 20 from colliding with, shifting off from or coming off the anchor point 108 during the telescopic process.

[0030] Specifically, such as Figure 2 , Figure 5 and Figure 8 As shown, the fork arm 20 is a U-shaped bracket structure. The fork arm 20 includes a horizontal bearing plate 103 with anti-slip texture, a side beam 105 set at the tail of the bearing plate, and a movable pulley 104 set at the top of the side beam 105 and connected to the wire rope. The side beam 105 is provided with a tightening bolt 106. The side beam 105 is used for the hanging rope of the locking buckle 800 on the L-shaped baffle 80 of the fan 8 to be wound. The tightening bolt 106 is used to press and fix the hanging rope to the bearing plate to prevent displacement during transportation.

[0031] The forklift 20 adopts a U-shaped bracket structure to stably support the fan 8. This structure includes a pair of horizontal support plates 103 with anti-slip textures to enhance friction with the bottom of the fan 8 and prevent slippage. A side beam 105 is fixed to the rear of the support plate, and a movable pulley 104 connected to a wire rope is provided at the top of the beam for lifting the forklift 20. Simultaneously, a tightening bolt 106 is also provided on the side beam 105 to secure the hanging rope of the locking buckle 800 on the L-shaped baffle 80 of the fan 8, and to press the hanging rope firmly onto the support plate by tightening, preventing displacement of the fan 8 due to vibration or movement during handling. This enhances the load-bearing stability of the forklift 20 and improves its anti-slip and anti-deviation capabilities during handling.

[0032] Furthermore, such as Figure 2 and Figure 5 The surface of the horizontal bearing plate 103 is provided with an anodized antistatic coating, and the upper surface of the horizontal bearing plate 103 is provided with an insulating protective plate that abuts against the fan 8.

[0033] The surface of the horizontal support plate 103 is treated with an anodizing process to form an anti-static coating, which can effectively prevent damage to the internal electronic components of the fan 8 due to static electricity accumulation during transportation. At the same time, an insulating protective plate is also provided on the upper surface of the support plate, which is in direct contact with the bottom of the fan 8. This protective plate is made of soft material and has good insulation properties, which can play a buffering and protective role during transportation, avoiding scratches or wear on the surface of the fan 8 due to direct contact with the metal support plate.

[0034] Specifically, such as Figure 2 and Figure 3 As shown, the inner side of the lifting support 6 is provided with a push-pull handle 7, which is located below the handwheel 3 and fixed to the lifting support 6, and is used to manually push or pull the work platform 1 to move.

[0035] The inner side of the lifting support 6 is provided with a push-pull handrail 7. The handrail is located below the handwheel 3 and is structurally fixed to the lifting support 6 to form a stable grip point. The operator can push or pull the entire work platform 1 through the push-pull handrail 7, thereby flexibly transferring tooling equipment between different work areas.

[0036] Example 2 This invention also provides a method for using a blower disassembly fixture for semiconductor vacuum equipment, used to disassemble blowers on vacuum process equipment in a semiconductor manufacturing production line, comprising the following steps: S1. Unfold the folded lifting bracket 6 and lock the hinged support leg 5 to put the tooling into working state. S2. Rotating the handwheel 3 drives the self-locking gear transmission group 10, controlling the fork arm 20 set on the lifting bracket 6 to descend to the loading height; S3. Transfer the fan 8 to the U-shaped bracket of the fork arm 20, and the hanging rope of the locking buckle 800 on the L-shaped baffle 80 of the fan 8 is wound around the U-shaped bracket. S4. Lift the fan 8 away from the mounting surface and disconnect the power supply and vacuum pipeline; S5. Move the tooling to a safe area, rotate the handwheel 3 in the opposite direction to slowly lower the fork arm 20, and place the fan 8 on the ground or a transport device. S6. Adjust handwheel 3 to return fork arm 20 to its initial position; The self-locking gear transmission group 10 has a reduction structure that prevents reverse torque caused by the load gravity from causing reverse rotation, thus ensuring safe positioning during the lifting process.

[0037] Furthermore, in step S4, immediately after disconnecting the vacuum line, a fluororubber blind flange is installed at the line interface for sealing.

[0038] The operation uses a fluororubber blind flange to immediately seal the vacuum line opening after disconnection. Utilizing the excellent high-temperature resistance, corrosion resistance, and sealing performance of fluororubber, it prevents particulate matter or moisture from the outside air from entering the vacuum system, thereby avoiding internal contamination or oxidation. This ensures the cleanliness of the vacuum system and subsequent recovery of operation, and is one of the key measures to guarantee the maintenance quality of semiconductor manufacturing equipment.

[0039] Example 3 This invention also provides a method for using a fan installation fixture for semiconductor vacuum equipment, used to install a fan on a vacuum process equipment in a semiconductor manufacturing production line, comprising the following steps: S1. Unfold the folded lifting bracket 6 and lock the hinged support leg 5 to put the tooling into working state. S2. Rotating the handwheel 3 drives the self-locking gear transmission group 10, controlling the fork arm 20 set on the lifting bracket 6 to descend to the loading height; S3. Place the fresh air unit 8 to be installed on the fork arm 20. The hanging rope of the latch 800 on the L-shaped baffle 80 of the fan 8 is wound around the U-shaped bracket, and the handwheel 3 is adjusted to raise the fork arm 20 to the target installation height to ensure the stable support of the fresh air unit 8 on the fork arm 20. S4. Move the tooling to the target installation position, and slowly lower the fork arm 20 by adjusting the handwheel 3 to smoothly install the fresh air unit 8 to the designated position; S5. Lower the blower 8 to its position and connect the vacuum pipeline; S6. After completing the installation of the fresh air unit 8, adjust the handwheel 3 to return the fork arm 20 to the initial position, and prepare for the next operation. The self-locking gear transmission group 10 has a reduction structure that prevents reverse torque caused by the load gravity from causing reverse rotation, thus ensuring safe positioning during the lifting process.

[0040] Further, before step S5, clean the mounting surface to a cleanroom level of ISO 14644-1 Class 5.

[0041] This cleaning process employs high-cleanliness operating procedures, using specialized cleaning agents and lint-free cloths to repeatedly wipe the installation surface, combined with vacuuming or clean air blowing to ensure that the surface is free of particles, oil stains, and electrostatic adsorption substances, ultimately meeting the Class 5 cleanliness requirements of ISO 14644-1 standard (i.e., no more than 100,000 particles larger than 0.5 micrometers per cubic meter of air). This prevents vacuum leaks or equipment malfunctions caused by particulate contamination and is suitable for semiconductor manufacturing process environments that are extremely sensitive to cleanliness.

[0042] The above description is merely a preferred embodiment of the present invention and is not intended to limit the present invention in any way. Although the present invention has been disclosed above with reference to preferred embodiments, it is not intended to limit the present invention. Any person skilled in the art can make some modifications or alterations to the above-disclosed technical content to create equivalent embodiments without departing from the scope of the present invention. Any simple modifications, equivalent changes and alterations made to the above embodiments based on the technical essence of the present invention without departing from the scope of the present invention shall still fall within the scope of the present invention.

Claims

1. A fan assembly / disassembly fixture for semiconductor vacuum equipment, used for handling fans on vacuum process equipment in a semiconductor manufacturing production line, characterized in that: The system includes a work platform (1), which has casters (4) with brakes and hinged foldable and lockable legs (5) at its bottom. The work platform (1) is equipped with a telescopic lifting bracket (6), and the lifting bracket (6) is equipped with a winch (2) and a handwheel (3) on its inner side. The lifting support (6) includes an inner telescopic section (22), and the front end of the inner telescopic section (22) is provided with a fork arm (20) for supporting the fan. The winch (2) is provided with a self-locking gear transmission group (10). The handwheel (3) is connected to the self-locking gear transmission group (10) through a transmission shaft. The output end of the self-locking gear transmission group (10) is connected to the fork arm (20) through a steel wire rope. The rotating handwheel (3) drives the self-locking gear transmission group (10) to drive the fork arm (20) to rise and fall along the inner telescopic section (22) of the lifting bracket via the wire rope, and can continue to drive the inner telescopic section (22) to extend as a whole after the fork arm rises to the top of the inner telescopic section (22).

2. The fan assembly / disassembly fixture for semiconductor vacuum equipment according to claim 1, characterized in that: The self-locking gear transmission assembly (10) includes: an input gear (100) fixedly connected to the transmission shaft of the handwheel (3), a transition gear (101) rotatably mounted on the winch (2) and meshing with the input gear (100), and an output gear (102) meshing with the transition gear (101). A winch (11) is rotatably mounted on the winch (2), and the output gear (102) is coaxially mounted with and connected to the winch (11). The number of teeth of the output gear (102) is greater than the number of teeth of the input gear (100), forming a gear transmission with deceleration and self-locking functions.

3. The fan assembly / disassembly fixture for semiconductor vacuum equipment according to claim 1, characterized in that: The lifting support (6) includes an outer fixed section (21) nested with the inner telescopic section (22). The outer fixed section (21) is provided with a guide wheel (23) for guiding the wire rope on the side wall near the winch (2). The top of the inner telescopic section (22) is provided with a top pulley group (24) and an anchor point (108). The bottom of the inner telescopic section (22) is provided with a bottom pulley group (25). The wire rope of the winch (2) passes through the guide wheel (23), the bottom pulley group (25), the top pulley group (24), and the movable pulley (104) at the top of the fork arm (20) in sequence, and is finally fixed at the anchor point (108) of the inner telescopic section (22). When the winch retracts the rope, the wire rope first lifts the fork arm along the inner telescopic section (22) to its top, and then drives the inner telescopic section (22) to extend out from the outer fixed section (21).

4. The fan assembly / disassembly fixture for semiconductor vacuum equipment according to claim 1, characterized in that: The fork arm (20) is a U-shaped bracket structure. The fork arm (20) includes a horizontal bearing plate (103) with anti-slip texture, a side beam (105) set at the tail of the bearing plate, and a movable pulley (104) set at the top of the side beam (105) and connected to the wire rope. The side beam (105) is provided with a tightening bolt (106). The side beam (105) is used for the hanging rope of the L-shaped baffle of the fan to be wound. The tightening bolt (106) is used to press and fix the hanging rope on the bearing plate to prevent displacement during transportation.

5. The fan assembly / disassembly fixture for semiconductor vacuum equipment according to claim 4, characterized in that: The surface of the horizontal bearing plate is provided with an anodized antistatic coating, and an insulating protective plate that abuts against the fan is provided on the upper surface of the horizontal bearing plate.

6. The fan assembly / disassembly fixture for semiconductor vacuum equipment according to claim 1, characterized in that: The inner side of the lifting support (6) is provided with a push-pull handrail (7), which is located below the handwheel (3) and fixed to the lifting support (6), and is used to manually push or pull the work platform (1) to move.

7. A method for using a blower disassembly fixture for semiconductor vacuum equipment, used to disassemble blowers on vacuum process equipment in a semiconductor manufacturing production line, characterized in that: Including the following steps: S1. Unfold the folded lifting bracket (6) and lock the hinged support (5) to put the tooling into working state; S2. Rotate the handwheel (3) to drive the self-locking gear transmission group (10) and control the fork arm (20) set on the lifting bracket (6) to descend to the loading height; S3. Transfer the fan to the U-shaped bracket of the fork arm (20), and the hanging rope locked on the L-shaped baffle of the fan is wound around the U-shaped bracket; S4. Lift the fan off the mounting surface and disconnect the power supply and vacuum line; S5. Move the tooling to the safe area, rotate the handwheel (3) in the opposite direction to slowly lower the fork arm (20), and place the fan on the ground or the transport device; S6. Adjust the handwheel (3) to return the fork arm (20) to the initial position; Among them, the deceleration structure of the self-locking gear transmission group (10) prevents reverse torque caused by the load gravity from causing reverse rotation, ensuring safe positioning during the lifting process.

8. The method of using the fan disassembly fixture for a semiconductor vacuum equipment according to claim 7, characterized in that: In step S4, immediately after disconnecting the vacuum line, a fluororubber blind flange is installed at the line interface for sealing.

9. A method for using a fan installation fixture for semiconductor vacuum equipment, used to install a fan on a vacuum process equipment in a semiconductor manufacturing production line, characterized in that: Including the following steps: S1. Unfold the folded lifting bracket (6) and lock the hinged support (5) to put the tooling into working state; S2. Rotate the handwheel (3) to drive the self-locking gear transmission group (10) and control the fork arm (20) set on the lifting bracket (6) to descend to the loading height; S3. Place the fresh air unit to be installed on the fork arm (20), and the hanging rope locked on the L-shaped baffle of the air unit is wound around the U-shaped bracket. Adjust the handwheel (3) to raise the fork arm (20) to the target installation height to ensure the stable support of the fresh air unit on the fork arm (20). S4. Move the tooling to the target installation position, and slowly lower the fork arm (20) by adjusting the handwheel (3) to smoothly install the fresh air unit to the designated position; S5. Lower the blower to its position and connect the vacuum pipeline; S6. After the fresh air unit is installed, adjust the handwheel (3) to return the fork arm (20) to the initial position and prepare for the next operation. The deceleration structure of the self-locking gear transmission group (10) prevents reverse torque caused by the load gravity from causing reverse rotation and ensures safe positioning during the lifting process.

10. The method of using the fan installation fixture for a semiconductor vacuum equipment according to claim 9, characterized in that: Before step S5, clean the mounting surface to a cleanroom level of ISO 14644-1 Class 5.

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