Method for reducing influence of lift-off deformation temperature on precision of flexible thickness sensor

Abstract

The invention relates to a method capable of reducing the influence of lift-off, deformation and temperature on the precision of a flexible thickness sensor, and belongs to the technical field of sensing. Firstly, an effective induced electromotive force calibration interval is determined, and then a bit value corresponding to an actual induced electromotive force value is obtained. Then, an effective lift-off calibration interval, an effective deformation calibration interval and an effective temperature calibration interval are determined, and then bit values corresponding to an actual lift-off value, an actual deformation value and an actual temperature value are obtained; according to the information, the initial conversion value of the actual thickness value is obtained, then the first-level and second-level intermediate conversion quantity is obtained, and finally the actual thickness value is obtained. The method provided by the invention can realize thickness measurement under the influence of lift-off, deformation and temperature, and is suitable for the field of flexible thickness sensor design and the like.

Description

TECHNICAL FIELD

[0001] The present application belongs to the technical field of sensing, and particularly relates to a thickness sensor. BACKGROUND

[0002] With the development of modern science and technology, many engineering occasions require the thickness sensor to have intrinsic flexibility. The prior art uses a composite conductive polymer coil as a sensing probe to realize thickness measurement. However, in actual application, the induced electromotive force of the flexible thickness sensor will change with the changes of lift-off, deformation and temperature, thereby adversely affecting the measurement. Therefore, there is an urgent need to design a method capable of reducing the influence of lift-off, deformation and temperature on the accuracy of the flexible thickness sensor. SUMMARY

[0003] The purpose of the present application is to overcome the shortcomings of the prior art and provide a method for reducing the influence of lift-off, deformation and temperature on the accuracy of a flexible thickness sensor, comprising the following steps:

[0004] determining an effective induced electromotive force calibration interval containing the actual induced electromotive force value v of the flexible thickness sensor, denoted as wherein L i represents the i-th lift-off calibration value, i = 1, 2,..., I, I being the number of lift-off calibration values; D j represents the j-th deformation calibration value, j = 1, 2,..., J, J being the number of deformation calibration values, and T k represents the k-th temperature calibration value, k = 1, 2,..., K, K being the number of temperature calibration values; r(L i , D j , T k ) is an integer between 1 and R(L i , D j , T k )-1, R(L i , D j , T k ) represents the number of induced electromotive force value calibration values under the condition that the lift-off calibration value is L i , the deformation calibration value is D j , and the temperature calibration value is T k , and r(L i , D j , T k ) represents the serial number of the induced electromotive force value calibration value under the condition that the lift-off calibration value is L i , the deformation calibration value is D j , and the temperature calibration value is T k ; represents the induced electromotive force value calibration value under the condition that the lift-off calibration value is L i , the deformation calibration value is D j , and the temperature calibration value is Tk The left endpoint of the effective induced electromotive force calibration interval under the given conditions. The representative value is L. i The deformation calibration value is D. j The temperature calibration value is T k The right endpoint of the effective induced electromotive force calibration interval under the given conditions; the value obtained using the calibration system and... The corresponding thickness calibration value is denoted as The results obtained using the calibration system are compared with The corresponding thickness calibration value is denoted as When the lift-off calibration value is L i The deformation calibration value is D. j And the temperature calibration value is T k In the case of a flexible thickness sensor, the potential value corresponding to the actual induced electromotive force value v is denoted as... Calculate using the formula:

[0005]

[0006] The effective lift-off calibration range, including the actual lift-off value l of the flexible thickness sensor, is determined and denoted as [L]. m L m+1 ], where m is an integer between 1 and 1-1, L m L represents the left endpoint of the effective lift-off from the calibration interval. m+1 Represents the right endpoint of the effective lift-off calibration interval; determine the effective deformation calibration interval including the actual deformation value d of the flexible thickness sensor, denoted as [D]. n D n+1 ], where n is an integer between 1 and J-1, D n D represents the left endpoint of the effective deformation calibration interval. n+1 Represents the right endpoint of the effective deformation calibration interval; determine the effective temperature calibration interval including the actual temperature value t of the flexible thickness sensor, denoted as [T]. h T h+1 ], where h is an integer between 1 and K-1, T h T represents the left endpoint of the effective temperature calibration range. h+1 Represents the right endpoint of the effective temperature calibration range;

[0007] Let the position value corresponding to l be denoted as α. l Its calculation formula is: α l =(lL m (L) m+1 -L m ) -1 Let α be the bit value corresponding to d. d Its calculation formula is: α d= (d - D n )(D n+1 - D n ) -1 ; let the bit value corresponding to t be α t , and its calculation formula is: α t = (t - T h )(T h+1 - T h ) -1 ;

[0008] The initial conversion values of the 8 actual thickness values are calculated by formula (2)-(9):

[0009]

[0010]

[0011] In the formula, are the initial conversion values of the actual thickness values when the lift-off calibration value, the deformation calibration value and the temperature calibration value are L m , D n and T h , respectively, are the initial conversion values of the actual thickness values when the lift-off calibration value, the deformation calibration value and the temperature calibration value are L m+1 , D n and T h , respectively; are the initial conversion values of the actual thickness values when the lift-off calibration value, the deformation calibration value and the temperature calibration value are L m , D n+1 and T h , respectively; are the initial conversion values of the actual thickness values when the lift-off calibration value, the deformation calibration value and the temperature calibration value are L m+1 , D n+1 and T h , respectively; are the initial conversion values of the actual thickness values when the lift-off calibration value, the deformation calibration value and the temperature calibration value are L m , D n+1 and T h , respectively; are the initial conversion values of the actual thickness values when the lift-off calibration value, the deformation calibration value and the temperature calibration value are L m+1 , D n and T h+1 , respectively; are the initial conversion values of the actual thickness values when the lift-off calibration value, the deformation calibration value and the temperature calibration value are L m , D n+1 and T h+1 , respectively; To improve the calibration values, deformation calibration values, and temperature calibration values, respectively, L m+1 D n+1 and T h+1 The initial conversion value of the actual thickness value at that time;

[0012] The initial conversion values ​​of the actual thickness values ​​obtained by formulas (2)-(9) are used to calculate the first-level intermediate conversion values ​​of the four actual thickness values, which are then calculated by formulas (10)-(13):

[0013]

[0014] In the formula, The actual extraction value is l, and the deformation calibration value and temperature calibration value are D respectively. n T h The first intermediate conversion value of the measured thickness value at that time; The actual extraction value is l, and the deformation calibration value and temperature calibration value are D respectively. n+1 T h The first intermediate conversion value of the measured thickness value at that time; The actual extraction value is l, and the deformation calibration value and temperature calibration value are D respectively. n T h+1 The first intermediate conversion value of the measured thickness value at that time; The actual extraction value is l, and the deformation calibration value and temperature calibration value are D respectively. n+1 T h+1 The first intermediate conversion value of the measured thickness value at that time;

[0015] The first intermediate conversion value of the actual thickness value is calculated using equations (10)-(13), and the second intermediate conversion value of the two actual thickness values ​​is obtained by equations (14)-(15):

[0016]

[0017] In the formula, The actual lift-off is l, the actual deformation is d, and the temperature calibration value is T. h The second intermediate conversion value of the measured thickness value at that time; The actual lift-off is l, the actual deformation is d, and the temperature calibration value is T. h+1 The second intermediate conversion value of the measured thickness value at that time;

[0018] The actual thickness value w is obtained by using the second-level intermediate conversion value of the two actual thickness values, and then calculated by equation (16):

[0019]

[0020] Features and effects of the present invention:

[0021] The method for reducing the influence of lift-off, deformation and temperature on the accuracy of a flexible thickness sensor comprises the following steps: first, determining an effective induction electromotive force calibration interval containing the actual induction electromotive force value of the flexible thickness sensor, and then obtaining the bit value corresponding to the actual induction electromotive force value; determining an effective lift-off calibration interval, an effective deformation calibration interval and an effective temperature calibration interval, and obtaining the bit value corresponding to the actual lift-off value, the actual deformation value and the actual temperature value; according to the above information, obtaining the initial conversion value of eight actual thickness values, then obtaining the first-level intermediate conversion quantity of four actual thickness values, and then obtaining the second-level intermediate conversion quantity of two actual thickness values, and finally obtaining the actual thickness value. The method can realize thickness measurement under the influence of lift-off, deformation and temperature, and is suitable for the fields of flexible thickness sensor design and electronic skin development. DETAILED DESCRIPTION

[0022] An effective lift-off calibration interval containing the actual lift-off value l of the flexible thickness sensor is determined, denoted as [L m , L m+1 ], wherein m is an integer between 1 and I-1, I is the number of lift-off calibration values, L m is the left end point of the effective lift-off calibration interval, and L m+1 is the right end point of the effective lift-off calibration interval; an effective deformation calibration interval containing the actual deformation value d of the flexible thickness sensor is determined, denoted as [D n , D n+1 ], wherein n is an integer between 1 and J-1, J is the number of deformation calibration values, D n is the left end point of the effective deformation calibration interval, and D n+1 is the right end point of the effective deformation calibration interval; an effective temperature calibration interval containing the actual temperature value t of the flexible thickness sensor is determined, denoted as [T h , T h+1 ], wherein h is an integer between 1 and K-1, K is the number of temperature calibration values, T h is the left end point of the effective temperature calibration interval, and T h+1 is the right end point of the effective temperature calibration interval.

[0023] The bit value corresponding to l is denoted as α l , and the calculation formula is: α l = (l-L m )(L m+1 -L m ) -1 ; the bit value corresponding to d is denoted as α d , and the calculation formula is: α d = (d-D n )(D n+1 -D n )-1 ; let the bit value corresponding to t be α t , and its calculation formula is α t = (t - T h ) (T h+1 - T h ) -1 ;

[0024] Determine the effective induction electromotive force calibration interval of the actual induction electromotive force value v of the flexible thickness sensor when the lift-off calibration value is L m , the deformation calibration value is D n , and the temperature calibration value is T h , denoted as wherein r (L m, D n , T h ) is an integer between 1 and R (Lm, D n , T h )-1, R (L m , D n , T h ) is the number of induction electromotive force calibration values when the lift-off calibration value is L m , the deformation calibration value is D n , and the temperature calibration value is T h , is the left end point of the effective induction electromotive force calibration interval, is the right end point of the effective induction electromotive force calibration interval; and then use the calibration system to obtain the effective thickness calibration interval containing the actual thickness w, denoted as wherein is the left end point of the effective thickness calibration interval, is the right end point of the effective thickness calibration interval;

[0025] Obtain the bit value corresponding to the actual induction electromotive force value v of the flexible thickness sensor when the lift-off calibration value is L m , the deformation calibration value is D n , and the temperature calibration value is T h , denoted as calculated by formula (17):

[0026]

[0027] Determine the effective induction electromotive force calibration interval of the actual induction electromotive force value v of the flexible thickness sensor when the lift-off calibration value is L m+1 , the deformation calibration value is D n , and the temperature calibration value is T h , denoted as wherein r (L m+1 , Dn T h ) is between 1 and R(L) m+1 D n T h Integers between 1 and 1, R(L) m+1 D n T h The calibration value is L. m+1 The deformation calibration value is D. n The temperature calibration value is T h The number of induced electromotive force calibration values ​​under the given conditions To effectively calibrate the left end of the electromotive force calibration interval, Let w be the right endpoint of the effective induced electromotive force calibration interval; then, the effective thickness calibration interval containing the actual thickness w is obtained using the calibration system, denoted as w. in, The left endpoint of the effective thickness calibration range. The right endpoint of the effective thickness calibration interval is given; this is obtained when the calibration value is lifted off the ground. m+1 The deformation calibration value is D. n The temperature calibration value is T h The potential value corresponding to the actual induced electromotive force value v of the flexible thickness sensor under the given condition is denoted as Calculated using equation (18):

[0028]

[0029] The calibration value was determined to be L. m The deformation calibration value is D. n+1 The temperature calibration value is T h The effective induced electromotive force calibration range for the actual induced electromotive force value v of the flexible thickness sensor under the condition is denoted as . Where r(L) m D n+1 T h ) is between 1 and R(L) m D n+1 T h Integers between 1 and 1, R(L) m D n+1 T h The calibration value is L. m The deformation calibration value is D. n+1 The temperature calibration value is T h The number of induced electromotive force calibration values ​​under the given conditions To effectively calibrate the left end of the electromotive force calibration interval, Let w be the right endpoint of the effective induced electromotive force calibration interval; then, the effective thickness calibration interval containing the actual thickness w is obtained using the calibration system, denoted as w. in, The left endpoint of the effective thickness calibration range. The right endpoint of the effective thickness calibration interval is given; this is obtained when the calibration value is lifted off the ground. m The deformation calibration value is D. n+1 The temperature calibration value is T h The potential value corresponding to the actual induced electromotive force value v of the flexible thickness sensor under the given condition is denoted as Calculated using equation (19):

[0030]

[0031] The calibration value was determined to be L. m+1 The deformation calibration value is D. n+1 The temperature calibration value is T h The effective induced electromotive force calibration range for the actual induced electromotive force value v of the flexible thickness sensor under the condition is denoted as . Where r(L) m+1 D n+1 T h ) is between 1 and R(L) m+1 D n+1 T h Integers between 1 and 1, R(L) m+1 D n+1 T h The calibration value is L. m+1 The deformation calibration value is D. n+1 The temperature calibration value is T h The number of induced electromotive force calibration values ​​under the given conditions To effectively calibrate the left end of the electromotive force calibration interval, Let w be the right endpoint of the effective induced electromotive force calibration interval; then, the effective thickness calibration interval containing the actual thickness w is obtained using the calibration system, denoted as w. in, The left endpoint of the effective thickness calibration range. The right endpoint of the effective thickness calibration interval is given; this is obtained when the calibration value is lifted off the ground. m+1 The deformation calibration value is D. n+1 The temperature calibration value is T h The potential value corresponding to the actual induced electromotive force value v of the flexible thickness sensor under the given condition is denoted as Calculated using equation (20):

[0032]

[0033] The calibration value was determined to be L. m The deformation calibration value is D. n The temperature calibration value is Th+1 The effective induced electromotive force calibration range for the actual induced electromotive force value v of the flexible thickness sensor under the condition is denoted as . Where r(L) m D n T h+1 ) is between 1 and R(L) m D n T h+1 Integers between 1 and 1, R(L) m D n T h+1 The calibration value is L. m The deformation calibration value is D. n The temperature calibration value is T h+1 The number of induced electromotive force calibration values ​​under the given conditions To effectively calibrate the left end of the electromotive force calibration interval, Let w be the right endpoint of the effective induced electromotive force calibration interval; then, the effective thickness calibration interval containing the actual thickness w is obtained using the calibration system, denoted as w. in, The left endpoint of the effective thickness calibration range. The right endpoint of the effective thickness calibration interval is given; this is obtained when the calibration value is lifted off the ground. m The deformation calibration value is D. n The temperature calibration value is T h+1 The potential value corresponding to the actual induced electromotive force value v of the flexible thickness sensor under the given condition is denoted as Calculated using equation (21):

[0034]

[0035] The calibration value was determined to be L. m+1 The deformation calibration value is D. n The temperature calibration value is T h+1 The effective induced electromotive force calibration range for the actual induced electromotive force value v of the flexible thickness sensor under the condition is denoted as . Where r(L) m+1 D n T h+1 ) is between 1 and R(L) m+1 D n T h+1 Integers between 1 and 1, R(L) m+1 D n T h+1 The calibration value is L. m+1 The deformation calibration value is D. n The temperature calibration value is T h+1 The number of induced electromotive force calibration values ​​under the given conditions To effectively calibrate the left end of the electromotive force calibration interval, Let w be the right endpoint of the effective induced electromotive force calibration interval; then, the effective thickness calibration interval containing the actual thickness w is obtained using the calibration system, denoted as w. in, The left endpoint of the effective thickness calibration range. The right endpoint of the effective thickness calibration interval is given; this is obtained when the calibration value is lifted off the ground. m+1 The deformation calibration value is D. n The temperature calibration value is T h+1 The potential value corresponding to the actual induced electromotive force value v of the flexible thickness sensor under the given condition is denoted as Calculated using equation (22):

[0036]

[0037] The calibration value was determined to be L. m The deformation calibration value is D. n+1 The temperature calibration value is T h+1 The effective induced electromotive force calibration range for the actual induced electromotive force value v of the flexible thickness sensor under the condition is denoted as . Where r(L) m D n+1 T h+1 ) is between 1 and R(L) m D n+1 T h+1 Integers between 1 and 1, R(L) m D n+1 T h+1 The calibration value is L. m The deformation calibration value is D. n+1 The temperature calibration value is T h+1 The number of induced electromotive force calibration values ​​under the given conditions To effectively calibrate the left end of the electromotive force calibration interval, Let w be the right endpoint of the effective induced electromotive force calibration interval; then, the effective thickness calibration interval containing the actual thickness w is obtained using the calibration system, denoted as w. in, The left endpoint of the effective thickness calibration range. The right endpoint of the effective thickness calibration interval is given; this is obtained when the calibration value is lifted off the ground. m The deformation calibration value is D. n+1 The temperature calibration value is T h+1 The potential value corresponding to the actual induced electromotive force value v of the flexible thickness sensor under the given condition is denoted as Calculated using equation (23):

[0038]

[0039] The calibration value was determined to be L. m+1 The deformation calibration value is D. n+1 The temperature calibration value is T h+1 The effective induced electromotive force calibration range for the actual induced electromotive force value v of the flexible thickness sensor under the condition is denoted as . Where r(L) m+1 D n+1 T h+1 ) is between 1 and R(L) m+1 D n+1 T h+1 Integers between 1 and 1, R(L) m+1 D n+1 T h+1 The calibration value is L. m+1 The deformation calibration value is D. n+1 The temperature calibration value is T h+1 The number of induced electromotive force calibration values ​​under the given conditions To effectively calibrate the left end of the electromotive force calibration interval, Let w be the right endpoint of the effective induced electromotive force calibration interval; then, the effective thickness calibration interval containing the actual thickness w is obtained using the calibration system, denoted as w. in, The left endpoint of the effective thickness calibration range. The right endpoint of the effective thickness calibration interval is given; this is obtained when the calibration value is lifted off the ground. m+1 The deformation calibration value is D. n+1 The temperature calibration value is T h+1 The potential value corresponding to the actual induced electromotive force value v of the flexible thickness sensor under the given condition is denoted as Calculated using equation (24):

[0040]

[0041] The lift-off calibration value, deformation calibration value, and temperature calibration value are respectively L m D n and T h The initial conversion value of the actual thickness at that time is denoted as Calculated using equation (25):

[0042]

[0043] The lift-off calibration value, deformation calibration value, and temperature calibration value are respectively L m+1 D n and T h The initial conversion value of the actual thickness at that time is denoted as Calculated using equation (26):

[0044]

[0045] The lift-off calibration value, deformation calibration value, and temperature calibration value are respectively L m D n+1 and T h The initial conversion value of the actual thickness at that time is denoted as Calculated using equation (27):

[0046]

[0047] The lift-off calibration value, deformation calibration value, and temperature calibration value are respectively L m+1 D n+1 and T h The initial conversion value of the actual thickness at that time is denoted as Calculated by equation (28):

[0048]

[0049] The lift-off calibration value, deformation calibration value, and temperature calibration value are respectively L m D n and T h+1 The initial conversion value of the actual thickness at that time is denoted as Calculated using equation (29):

[0050]

[0051] The lift-off calibration value, deformation calibration value, and temperature calibration value are respectively L m+1 D n and T h+1 The initial conversion value of the actual thickness at that time is denoted as Calculated using equation (30):

[0052]

[0053] The lift-off calibration value, deformation calibration value, and temperature calibration value are respectively L m D n+1 and T h+1 The initial conversion value of the actual thickness at that time is denoted as Calculated by equation (31):

[0054]

[0055] The lift-off calibration value, deformation calibration value, and temperature calibration value are respectively L m+1 D n+1 and T h+1 The initial conversion value of the actual thickness at that time is denoted as Calculated using equation (32):

[0056]

[0057] Using the initial conversion values ​​of the eight actual thickness values, the first-level intermediate conversion values ​​of the four actual thickness values ​​are obtained and calculated by equations (33)-(36):

[0058]

[0059] In the formula, The actual extraction value is l, and the deformation calibration value and temperature calibration value are D respectively. n T h The first intermediate conversion value of the measured thickness at that time; The actual extraction value is l, and the deformation calibration value and temperature calibration value are D respectively. n+1 T h The first intermediate conversion value of the measured thickness at that time; The actual extraction value is l, and the deformation calibration value and temperature calibration value are D respectively. n T h+1 The first intermediate conversion value of the measured thickness at that time; The actual extraction value is l, and the deformation calibration value and temperature calibration value are D respectively. n+1 T h+1 The first intermediate conversion value of the measured thickness at that time;

[0060] Using the first-level intermediate conversion amount of the four actual thickness values, the second-level intermediate conversion amount of the two actual thickness values ​​is obtained, and calculated by equations (37)-(38):

[0061]

[0062] In the formula, The actual lift-off is l, the actual deformation is d, and the temperature calibration value is T. h The second intermediate conversion value of the measured thickness value at that time; The actual lift-off is l, the actual deformation is d, and the temperature calibration value is T. h+1 The second intermediate conversion value of the measured thickness value at that time;

[0063] The actual thickness value w is obtained by using the second-level intermediate conversion amount of the two actual thickness values, and then calculated by equation (39):

[0064]

Claims

1. A method for reducing the impact of lift-off, deformation, and temperature on the accuracy of a flexible thickness sensor, characterized in that, The method includes the following steps: The effective induced electromotive force calibration range, including the actual induced electromotive force value v of the flexible thickness sensor, is determined and denoted as . Among them, L i D represents the i-th lift-off calibration value, where i = 1, 2, ..., I, and I is the number of lift-off calibration values; j T represents the j-th deformation calibration value, j = 1, 2, ..., J, where J is the number of deformation calibration values. k Represents the k-th temperature calibration value, k = 1, 2, ..., K, where K is the number of temperature calibration values; r(L i D j T k ) is between 1 and R(L) i D j T k Integers between 0 and 1, R(L) i D j T k ) represents the lift-off calibration value as L i The deformation calibration value is D. j The temperature calibration value is T k The number of calibrated values ​​of induced electromotive force under the given conditions, r(L) i D j T k ) represents the lift-off calibration value as L i The deformation calibration value is D. j The temperature calibration value is T k The serial number of the induced electromotive force calibration value under the given condition; The representative value is L. i The deformation calibration value is D. j The temperature calibration value is T k The left endpoint of the effective induced electromotive force calibration interval under the given conditions. The representative value is L. i The deformation calibration value is D. j The temperature calibration value is T k The right endpoint of the effective induced electromotive force calibration interval under the given conditions; the value obtained using the calibration system and... The corresponding thickness calibration value is denoted as The results obtained using the calibration system are compared with The corresponding thickness calibration value is denoted as When the lift-off calibration value is L i The deformation calibration value is D. j And the temperature calibration value is T k In the case of a flexible thickness sensor, the potential value corresponding to the actual induced electromotive force value v is denoted as... Calculate using the formula: The effective lift-off calibration range, including the actual lift-off value l of the flexible thickness sensor, is determined and denoted as [L]. m L m+1 ], where m is an integer between 1 and l-1, L m L represents the left endpoint of the effective lift-off from the calibration interval. m+1 Represents the right endpoint of the effective lift-off calibration interval; determine the effective deformation calibration interval including the actual deformation value d of the flexible thickness sensor, denoted as [D]. n D n+1 ], where n is an integer between 1 and J-1, D n D represents the left endpoint of the effective deformation calibration interval. n+1 Represents the right endpoint of the effective deformation calibration interval; determine the effective temperature calibration interval including the actual temperature value t of the flexible thickness sensor, denoted as [T]. h T h+1 ], where h is an integer between 1 and K-1, T h T represents the left endpoint of the effective temperature calibration range. h+1 Represents the right endpoint of the effective temperature calibration range; Let the position value corresponding to l be denoted as α. l Its calculation formula is: α l =(lL m (L) m+1 -L m ) -1 Let α be the bit value corresponding to d. d Its calculation formula is: α d =(dD) n (D) n+1 -D n ) -1 Let α be the position value corresponding to t. t Its calculation formula is: α t =(tT) h (T) h+1 -T h ) -1 ; The initial conversion values ​​of the eight actual thickness values ​​are obtained and calculated using equations (2)-(9): In the formula, To improve the calibration values, deformation calibration values, and temperature calibration values, respectively, L m D n and T h The initial conversion value of the actual thickness value at that time. To improve the calibration values, deformation calibration values, and temperature calibration values, respectively, L m+1 D n and T h The initial conversion value of the actual thickness value at that time; To improve the calibration values, deformation calibration values, and temperature calibration values, respectively, L m D n+1 and T h The initial conversion value of the actual thickness value at that time; To improve the calibration values, deformation calibration values, and temperature calibration values, respectively, L m+1 D n+1 and T h The initial conversion value of the actual thickness value at that time; To improve the calibration values, deformation calibration values, and temperature calibration values, respectively, L m D n+1 and T h The initial conversion value of the actual thickness value at that time; To improve the calibration values, deformation calibration values, and temperature calibration values, respectively, L m+1 D n and T h+1 The initial conversion value of the actual thickness value at that time; To improve the calibration values, deformation calibration values, and temperature calibration values, respectively, L m D n+1 and T h+ The initial conversion value of the actual thickness at point 1; To improve the calibration values, deformation calibration values, and temperature calibration values, respectively, L m+1 D n+1 and T h+ The initial conversion value of the actual thickness at point 1; The initial conversion values ​​of the actual thickness values ​​obtained by formulas (2)-(9) are used to calculate the first-level intermediate conversion values ​​of the four actual thickness values, which are then calculated by formulas (10)-(13): In the formula, The actual extraction value is l, and the deformation calibration value and temperature calibration value are D respectively. n T h The first intermediate conversion value of the measured thickness value at that time; The actual extraction value is l, and the deformation calibration value and temperature calibration value are D respectively. n+1 T h The first intermediate conversion value of the measured thickness value at that time; The actual extraction value is l, and the deformation calibration value and temperature calibration value are D respectively. n T h+1 The first intermediate conversion value of the measured thickness value at that time; The actual extraction value is l, and the deformation calibration value and temperature calibration value are D respectively. n+1 T h+1 The first intermediate conversion value of the measured thickness value at that time; The first intermediate conversion value of the actual thickness value is calculated using equations (10)-(13), and the second intermediate conversion value of the two actual thickness values ​​is obtained by equations (14)-(15): In the formula, The actual lift-off is l, the actual deformation is d, and the temperature calibration value is T. h The second intermediate conversion value of the measured thickness value at that time; The actual lift-off is l, the actual deformation is d, and the temperature calibration value is T. h+1 The second intermediate conversion value of the measured thickness value at that time; The actual thickness value w is obtained by using the second-level intermediate conversion value of the two actual thickness values, and then calculated by equation (16):

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