Inspection apparatus, inspection method, and electronic device

Abstract

The invention relates to an inspection apparatus, an inspection method, and an electronic device. The inspection apparatus includes: a light emitting part configured to emit light; an alignment key attached to one side of the light emitting part; a light receiving part disposed to be spaced apart from the light emitting part in the first direction and to receive light emitted from the light emitting part; and a camera attached to one side of the light receiving member, disposed to be spaced apart from the alignment key in the first direction, and to capture an image of the alignment key.

Description

TECHNICAL FIELD

[0001] The disclosure relates to an inspection apparatus for a display apparatus, an inspection method using the same, and an electronic device manufactured using the same. More particularly, the disclosure relates to an inspection apparatus for a display apparatus for providing visual information and an inspection method using the same. BACKGROUND

[0002] The demand for display apparatuses has become diverse, and the trend of consuming larger screen displays is also increasing. In addition, in order to increase the efficiency of a display apparatus manufacturing process, attempts are being continuously made to manufacture many display apparatuses at once using a relatively large substrate. Accordingly, as the substrate size increases, a sag phenomenon occurring during substrate manufacturing makes it difficult to determine the exact physical properties of the substrate at each location. SUMMARY

[0003] Recently, in order to inspect the light transmittance of an increased substrate, an inspection apparatus that moves a light emitting part and a light receiving part separately has been developed. However, problems such as movement deviation have occurred due to the independent movement of the light emitting part and the light receiving part. Various types of research are being conducted to solve these problems.

[0004] An object of the disclosure is to provide an inspection apparatus for reducing the error rate of a display apparatus due to movement deviation of a light emitting part and a light receiving part in a manufacturing process.

[0005] Another object of the disclosure is to provide an inspection method using the inspection apparatus.

[0006] Still another object of the disclosure is to provide an electronic device manufactured using the inspection apparatus.

[0007] The inspection apparatus in an embodiment of the disclosure includes a light emitting part to emit light, a first alignment key attached to one side of the light emitting part, a light receiving part spaced apart from the light emitting part in a first direction and to receive light emitted from the light emitting part, and a camera attached to one side of the light receiving part, spaced apart from the first alignment key in the first direction, and to capture an image of the first alignment key.

[0008] In an embodiment, the inspection apparatus can further include a first moving part connected to the light emitting part and the first alignment key, and to move the light emitting part and the first alignment key, and a second moving part spaced apart from the first moving part in the first direction, connected to the light receiving part and the camera, and to move the light receiving part and the camera.

[0009] In an embodiment, the first and second moving components are movable in a second direction that intersects the first direction.

[0010] In an embodiment, the inspection device can further include a control component to control movement of the first and second moving components in the first direction or the second direction that intersects the first direction.

[0011] In an embodiment, the camera can be used to check whether the first alignment key is centered and whether the first alignment key is in focus based on an image of the first alignment key.

[0012] In an embodiment, the light emitting component and the light receiving component can overlap in a plan view.

[0013] In an embodiment, the first alignment key and the camera can overlap in a plan view.

[0014] In an embodiment, the light receiving component and the light emitting component can be spaced apart from each other in the first direction by a first distance, and the first distance can be about 99.6 millimeters (mm) to about 100.4 mm.

[0015] In an embodiment, the inspection device can further include a stage to accommodate the substrate between the light emitting component and the light receiving component.

[0016] In an embodiment, the stage can accommodate a substrate having a length of about 500 mm to 2000 mm on one side.

[0017] In an embodiment, the substrate can include a second alignment key, and the camera can measure a sag amount of the substrate by capturing an image of the second alignment key of the substrate.

[0018] In an embodiment, the light emitting component and the light receiving component can be movable in a second direction that intersects the first direction, and the stage can be movable in a third direction that intersects the first and second directions.

[0019] In an embodiment, the light emitting component and the substrate can be spaced apart from each other in the first direction by a second distance, and the second distance can be about 69.2 mm to about 70 mm.

[0020] In an embodiment, the light receiving component and the substrate can be spaced apart from each other in the first direction by a third distance, and the third distance can be about 29.6 mm to about 30.4 mm.

[0021] The inspection device in another embodiment of the disclosure includes a light emitting part to emit light, a camera attached to one side of the light emitting part, a light receiving part spaced apart from the light emitting part in a first direction and to receive light emitted from the light emitting part, an alignment key attached to one side of the light receiving part and spaced apart from the camera in the first direction, and a stage to accommodate a substrate between the light emitting part and the light receiving part.

[0022] In an embodiment, the camera can be used to check whether the alignment key is centered and whether the alignment key is focused based on an image of the alignment key.

[0023] The inspection method in an embodiment of the disclosure includes measuring and correcting a separation distance in a first direction between a light emitting part and a light receiving part, and measuring and correcting a movement distance in a second direction intersecting the first direction of each of the light emitting part and the light receiving part, the light emitting part connected to a first movement part, the light receiving part connected to a second movement part spaced apart from the first movement part in the first direction, and the light emitting part connected to a first movement part, the light receiving part connected to a second movement part spaced apart from the first movement part in the first direction; measuring a deflection amount of a substrate disposed between the first movement part and the second movement part using a camera attached to one side of one of the light emitting part and the light receiving part; and correcting a movement deviation in the second direction of each of the light emitting part and the light receiving part by the deflection amount of the substrate.

[0024] In an embodiment, in measuring the separation distance in the first direction and the movement distance in the second direction, the camera can measure the movement distance by checking whether the alignment key is disposed at the center, and measure the separation distance by checking whether the alignment key is focused based on an image of the alignment key, the alignment key attached to one side of the other one of the light emitting part and the light receiving part.

[0025] In an embodiment, the inspection method can further include measuring a light transmittance of the substrate using the light emitting part and the light receiving part after correcting the movement deviation of each of the light emitting part and the light receiving part.

[0026] In an embodiment, in measuring the light transmittance of the substrate, light emitted from the light emitting part can be converged on the substrate.

[0027] An electronic device in an embodiment of the disclosure includes a display module and a processor configured to drive the display module, wherein the display module is manufactured by an inspection apparatus including a light emitting part to emit light, a first alignment key attached to one side of the light emitting part, a light receiving part spaced apart from the light emitting part in a first direction and to receive light emitted from the light emitting part, and a camera attached to one side of the light receiving part, spaced apart from the first alignment key in the first direction, to capture an image of the first alignment key.

[0028] An inspection apparatus in an embodiment of the disclosure can include a light emitting part to emit light, a first alignment key attached to one side of the light emitting part, a light receiving part spaced apart from the light emitting part in a first direction and to receive light emitted from the light emitting part, and a camera attached to one side of the light receiving part, spaced apart from the first alignment key in the first direction, to capture an image of the first alignment key.

[0029] Accordingly, the light emitting part can be moved by the first moving part, and the light receiving part can be independently moved by the second moving part, so that a light transmittance test can be performed on a substrate having a long side. In addition, by measuring a skew amount of the substrate using the camera and the first alignment key, an accurate light transmittance can be measured for each position of the substrate. BRIEF DESCRIPTION OF DRAWINGS

[0030] The accompanying drawings, which are included to provide a further understanding of the present concept and are incorporated in and constitute a part of this specification, illustrate embodiments of the present concept.

[0031] Figure 1 is a schematic view to illustrate an embodiment of an inspection apparatus according to the present disclosure.

[0032] Figure 2 is a perspective view to illustrate a stage of Figure 1 .

[0033] Figure 3 is a cross-sectional view to illustrate a light emitting part and a light receiving part of Figure 1 .

[0034] Figure 4 is a perspective view to illustrate an embodiment of a substrate included in a stage of Figure 2 .

[0035] Figure 5 , Figure 6 , Figure 7 , Figure 8 , Figure 9 and Figure 10 are views to explain an inspection method using an inspection apparatus of Figure 1 . Figure 10 is a perspective view to illustrate an embodiment of a stage of Figure 9enlarged view of area A of FIG. 1.

[0036] Figure 11 a schematic diagram to illustrate another embodiment of an inspection apparatus according to the present disclosure.

[0037] Figure 12 a block diagram to illustrate an electronic device according to an embodiment of the present disclosure.

[0038] Figure 13 a schematic diagram to illustrate an electronic device according to various embodiments of the present disclosure. Figure 12 DETAILED DESCRIPTION

[0039] With respect to the embodiments of the present disclosure disclosed herein, the specific structural and functional descriptions are merely for illustrative purposes of the exemplary embodiments of the present disclosure, and the embodiments of the present disclosure can be implemented in various forms. It should not be construed as being limited to the embodiments described herein.

[0040] In the present disclosure, various modifications can be made, various forms can be used, and exemplary embodiments will be illustrated in the drawings, and described in detail herein. However, this is not intended to limit the present disclosure to the specific forms disclosed, and it will be understood that all changes, equivalents, or alternatives falling within the spirit and technical scope of the present disclosure should be included.

[0041] Terms such as first, second, and the like can be used to describe various components, but the components should not be limited by these terms. The above terms can be used for the purpose of distinguishing one component from another component. For example, a first component can be referred to as a second component, and similarly, a second component can also be referred to as a first component without departing from the scope of the present disclosure.

[0042] When a component is referred to as being "connected" to another component, it should be understood that it can be directly connected to the other component, or connected to the other component with other components interposed therebetween. Other expressions describing the relationship between components, such as "between" and "immediately adjacent to" or "adjacent to" and "directly adjacent to", should be interpreted similarly.

[0043] The terms used in the present disclosure are merely used to describe particular embodiments, and are not intended to limit the inventive concept. As used herein, the singular forms "a," "an," and "the" are intended to include the plural forms as well, unless the context clearly indicates otherwise. It will be further understood that the terms "comprises" and / or "comprising," when used in this specification, specify the presence of stated features, integers, steps, operations, elements, and / or components, but do not preclude the presence or addition of one or more other features, integers, steps, operations, elements, components, and / or groups thereof.

[0044] ​"About" or "approximately," as used herein, includes the recited value and means within an acceptable range of deviation for a particular value, as determined by one of ordinary skill in the art to be appropriate in light of the measurement and error associated with the particular quantity being measured (i.e., the limitations of the measurement system). For example, the term "about" can mean within one or more standard deviations, or within ± 30%, 20%, 10%, 5% of the recited value.

[0045] Unless otherwise defined, all terms used in this document, including technical or scientific terms, have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs. Terms, such as those defined in commonly used dictionaries, should be interpreted as having a meaning that is consistent with their meaning in the context of the relevant art and will not be interpreted in an idealized or overly formal sense unless expressly so defined in the application.

[0046] Hereinafter, embodiments will be described in detail with reference to the accompanying drawings. The same reference numbers are used throughout the drawings to refer to the same parts and redundant descriptions of the same parts will be omitted.

[0047] In this specification, a plane can be defined by a first direction D1 and a second direction D2 intersecting the first direction D1. In an embodiment, for example, the second direction D2 can be perpendicular to the first direction D1. In addition, a third direction D3 can be a normal direction of the plane. That is, the third direction D3 can be perpendicular to the plane formed by the first direction D1 and the second direction D2.

[0048] Figure 1 A schematic view to illustrate an embodiment of an inspection apparatus according to the present disclosure. Figure 2 A perspective view to illustrate Figure 1 of a stage.

[0049] Referring to Figure 1 and Figure 2 , the inspection apparatus IA can include a first moving part MP1, a second moving part MP2, a stage ST, a light emitting part LP, a light receiving part RP, a first alignment key AK1, a camera CA, and a control part CP. In an embodiment, the control part CP can be a hardware part such as a circuit, but is not limited thereto.

[0050] The first moving part MP1 and the second moving part MP2 can be spaced apart from each other in the third direction D3. The first moving part MP1 and the second moving part MP2 can move an object attached to each of the first moving part MP1 and the second moving part MP2 in the second direction D2 or a direction opposite to the second direction D2. The control part CP can control the operation of the first moving part MP1 and the second moving part MP2.

[0051] In an embodiment, the first moving part MP1 and the second moving part MP2 can be independently driven. In an embodiment, for example, when the light emitting part LP is attached to the first moving part MP1 and the light receiving part RP is attached to the second moving part MP2, the first moving part MP1 can move the light emitting part LP in the second direction D2 or a direction opposite to the second direction D2 independently of the movement of the second moving part MP2. Likewise, the second moving part MP2 can move the light receiving part RP in the second direction D2 or a direction opposite to the second direction D2 independently of the movement of the first moving part MP1. That is, the first moving part MP1 and the second moving part MP2 can be independently driven by the control part CP.

[0052] In a cross-sectional view, the stage ST can be disposed between the first moving part MP1 and the second moving part MP2. The stage ST can accommodate the substrate SUB.

[0053] In an embodiment, the stage ST can move in the first direction D1. That is, the stage ST can move in the first direction D1 and a direction opposite to the first direction D1. As the light emitting part LP and the light receiving part RP move in the second direction D2 or a direction opposite to the second direction D2, and the stage ST moves in the first direction D1 and / or a direction opposite to the first direction D1, the light transmittance of the entire area of the substrate SUB accommodated in the stage ST can be checked.

[0054] The light emitting part LP can be attached to one side of the first moving part MP1. In an embodiment, for example, the light emitting part LP can be attached to one side opposite to the first moving part MP1 in the third direction D3 (or facing the second moving part MP2). The light emitting part LP can move by the first moving part MP1 in the second direction D2 or a direction opposite to the second direction D2.

[0055] The light emitting part LP can emit the light LB in a direction opposite to the third direction D3 (or toward the second moving part MP2). The inspection apparatus IA can check the light transmittance of the substrate SUB accommodated in the stage ST by the light LB emitted from the light emitting part LP. The light LB can converge at the substrate SUB and can be transmitted through the substrate SUB to be diverged.

[0056] In an embodiment, the wavelength of the light LB emitted from the light emitting part LP can be, for example, about 400 nm or more and about 780 nm or less. Preferably, the wavelength of the light LB can be about 450 nm or more and about 700 nm or less. However, the present disclosure is not necessarily limited thereto. When the wavelength of the light LB satisfies the above-described range, the light LB can pass through the substrate SUB, and the light transmittance can be measured.

[0057] The light-receiving member RP can be spaced apart from the light-emitting member LP in a direction opposite to the third direction D3. The light-receiving member RP can be attached to one side of the second moving member MP2. In an embodiment, for example, the light-receiving member RP can be attached to one side of the second moving member MP2 in the third direction D3 (or facing the first moving member MP1). The light-receiving member RP can be moved by the second moving member MP2 in the second direction D2 or a direction opposite to the second direction D2.

[0058] The light-receiving member RP can receive the light LB emitted from the light-emitting member LP. That is, the light-receiving member RP can receive the light LB transmitted through the substrate SUB. The inspection apparatus IA can calculate the light transmittance of the substrate SUB by analyzing the light LB received by the light-receiving member RP.

[0059] In an embodiment, the light-emitting member LP and the light-receiving member RP can overlap in a plan view. That is, in order for the light LB emitted from the light-emitting member LP to be received by the light-receiving member RP, the light-emitting member LP and the light-receiving member RP can overlap in a plan view. The control member CP can control each of the first moving member MP1 and the second moving member MP2 so that the light-emitting member LP and the light-receiving member RP overlap in a plan view.

[0060] The first alignment key AK1 can be attached to one side of the light-emitting member LP (for example, one side of the light-emitting member LP in the second direction D2 or a direction opposite to the second direction D2). The first alignment key AK1 can be configured as a reference for checking the relative position of the light-emitting member LP and the light-receiving member RP. As shown in FIG. 1A, the first alignment key AK1 can have a cross shape at the center. However, the present disclosure is not necessarily limited thereto. Figure 1

[0061] The camera CA can be attached to one side of the light-receiving member RP (for example, one side of the light-receiving member RP in the second direction D2 or a direction opposite to the second direction D2). The camera CA can be spaced apart from the first alignment key AK1 in a direction opposite to the third direction D3. The camera CA can measure the relative position of the light-emitting member LP and the light-receiving member RP by capturing an image of the first alignment key AK1.

[0062] In an embodiment, the first alignment key AK1 and the camera CA can overlap in a plan view. The camera CA can determine whether the first alignment key AK1 is disposed at the center of the image (for example, the image IM of FIG. 1A) and / or whether the first alignment key AK is focused on the image (for example, the image IM of FIG. 1A) based on the image (for example, the image IM of FIG. 1A). Figure 6 Figure 6 Figure 6 Figure 6 ​​​​to control the first moving part MP1 and the second moving part MP2 based on the image IM captured by the camera CA. The method of capturing the first alignment key AK1 by the camera CA will be described later with reference to Figure 5 , Figure 6 , Figure 7 and Figure 8 .

[0063] Figure 3 to show a cross-sectional view of the light emitting part and the light receiving part of Figure 1 .

[0064] With reference to Figure 1 , Figure 2 and Figure 3 , the light emitting part LP and the light receiving part RP can be spaced apart from each other by a first distance (also referred to as a separation distance) L1 in a third direction D3. The control part CP can control the movement of each of the first moving part MP1 and the second moving part MP2 in the third direction D3 or a direction opposite to the third direction D3 such that the light emitting part LP and the light receiving part RP are spaced apart by the first distance L1.

[0065] In an embodiment, the first distance L1 can be about 99.6 millimeters (mm) or more and about 100.4 mm or less. Preferably, for example, the first distance L1 can be about 99.8 mm or more and about 100.2 mm or less. When the first distance L1 satisfies the above range, the light LB emitted from the light emitting part LP can reach the light receiving part RP and the light transmittance of the substrate SUB can be accurately measured.

[0066] In an embodiment, the light emitting part LP and the substrate SUB can be spaced apart by a second distance L2 in the third direction D3. In an embodiment, for example, the second distance L2 can be about 69.2 mm or more and about 70 mm or less. Preferably, the second distance L2 can be about 69.4 mm or more and about 69.8 mm or less. The light LB emitted from the light emitting part LP can move the second distance L2 and converge in one area of the substrate SUB.

[0067] In an embodiment, the light receiving part RP and the substrate SUB can be spaced apart by a third distance L3 in the third direction D3. In an embodiment, for example, the third distance L3 can be about 29.6 mm or more and about 30.4 mm or less. Preferably, the third distance L3 can be about 29.8 mm or more and about 30.2 mm or less. The light LB emitted from the light emitting part LP and transmitted through the substrate SUB can diverge and can move the third distance L3 to be received by the light receiving part RP.

[0068] Figure 4 to show a perspective view of an embodiment of a substrate included in a stage of Figure 2 .

[0069] Reference Figure 2 、 Figure 3 and Figure 4 The substrate SUB can include a glass substrate, a metal substrate, a plastic substrate, etc. However, the present disclosure is not necessarily limited thereto. The substrate SUB can be an inorganic layer, an organic layer, or a composite material layer.

[0070] In an embodiment, the substrate SUB can include a second alignment key AK2. As shown in Figure 4 At least one second alignment key AK2 can be disposed on the substrate SUB. The second alignment key AK2 can be disposed in the form of a pad in the first direction D1 and / or the second direction D2. The second alignment key AK2 can be used as a reference when the substrate SUB is cut.

[0071] In an embodiment, the camera CA can further capture an image of the second alignment key AK2 to calculate a skew amount of the substrate SUB. The camera CA can further capture an image of the second alignment key AK2 and check whether the second alignment key AK2 is in focus. The second alignment key AK2 can be in focus when the second alignment key AK2 and the camera CA are spaced apart by a third distance L3. When the second alignment key AK2 is not in focus, the control part CP can align or adjust the first moving part MP1 and / or the second moving part MP2 in a third direction D3 or a direction opposite to the third direction D3 until the second alignment key AK2 is in focus. Thereby, a skew amount of the substrate SUB (e.g., a skew amount DEF in Figure 10 ).

[0072] In an embodiment, the substrate SUB can have a first length WT1 in the first direction D1 and a second length WT2 in the second direction D2. Each of the first length WT1 and the second length WT2 can be about 500 mm or more and about 2000 mm or less. Preferably, each of the first length WT1 and the second length WT2 can be about 1000 mm or more and about 2000 mm or less. However, the present disclosure is not necessarily limited thereto.

[0073] Figure 5 、 Figure 6 、 Figure 7 、 Figure 8 、 Figure 9 and Figure 10 are views for explaining an inspection method of an inspection apparatus using Figure 1 . Specifically, Figure 6 、 Figure 7 and Figure 8 are views showing an image IM captured by a first alignment key AK1 and / or a second alignment key AK2 using a camera CA. Figure 10 is an enlarged view of a region A of Figure 9 .

[0074] Referring to Figure 5 , Figure 6 , Figure 7 and Figure 8 , an image IM of the first alignment key AK1 can be captured using the camera CA. Based on the captured image IM of the first alignment key AK1, the camera CA can check whether the first alignment key AK1 is disposed at the center of the image IM and whether the first alignment key AK1 is in focus.

[0075] In an embodiment, the image IM of the first alignment key AK1 can be captured using the camera CA before the light emitting part LP and the light receiving part RP are moved in the second direction D2 or in a direction opposite to the second direction D2. At this time, since the first alignment key AK1 and the camera CA overlap in a plan view, as shown in FIG. 1B, the captured image IM can have a cross shape of the first alignment key AK1 disposed at the center of the image IM and in focus. Figure 6

[0076] Thereafter, the first moving part MP1 can move the light emitting part LP and the first alignment key AK1 in the second direction D2 or in a direction opposite to the second direction D2 by a first moving distance DT1, and the second moving part MP2 can move the light receiving part RP and the camera CA in the second direction D2 or in a direction opposite to the second direction D2 by a second moving distance DT2. The first moving distance DT1 and the second moving distance DT2 can be substantially the same moving distance. However, due to mechanical errors, a positional deviation can occur in the first moving distance DT1 and the second moving distance DT2 due to the movement.

[0077] When the positional deviation occurs between the first moving distance DT1 and the second moving distance DT2, as the camera CA captures the image IM of the first alignment key AK1, the cross shape of the captured image IM can deviate from the center of the image IM, as shown in FIG. 2B. In this case, the movement of the first moving part MP1 and / or the second moving part MP2 in the second direction D2 or in a direction opposite to the second direction D2 can be controlled by the control part CP so that the cross shape of the first alignment key AK1 is moved at the center of the captured image IM. Figure 7

[0078] In another embodiment, the image IM of the first alignment key AK1 can be captured using the camera CA before the light emitting part LP and the light receiving part RP are moved in the second direction D2 or in a direction opposite to the second direction D2. At this time, as shown in FIG. 3B, the image IM of the first alignment key AK1 captured by the camera CA can be in focus. In order to focus the image IM of the first alignment key AK1, a first distance (e.g., the first distance L1 in FIG. 3A) can be about 100 mm. Figure 6 Figure 3

[0079] ​​​​Thereafter, the first moving member MP1 can move the light emitting part LP and the first alignment key AK1 in the second direction D2 or in a direction opposite to the second direction D2 by a first moving distance DT1, and the second moving member MP1 can move the light receiving part RP and the camera CA in the second direction D2 or in a direction opposite to the second direction D2 by a second moving distance DT2. When the light emitting part LP and the light receiving part RP are moved in the second direction D2 or in a direction opposite to the second direction D2, the first distance (e.g., the first distance L1 in Figure 3 between the light emitting part LP and the light receiving part RP can have a separation deviation due to mechanical errors.

[0080] When the separation deviation between the first moving member MP1 and the second moving member MP2 occurs, as shown in Figure 8 , the cross shape of the first alignment key AK1 can not be focused in the image IM capturing the first alignment key AK. Accordingly, the control part CP 5 can control the movement of the first moving member MP1 and / or the second moving member MP2 in the third direction D3 or in a direction opposite to the third direction D3 so that the cross shape of the first alignment key AK1 is focused in the image IM, as shown in Figure 6 .

[0081] Thereby, when the first moving member MP1 moves the light emitting part LP and the first alignment key AK1 in the second direction D2 or in a direction opposite to the second direction D2, and the second moving member MP2 moves the light emitting part LP and the camera CA in the second direction D2 or in a direction opposite to the second direction D2, a position deviation in the second direction D2 or in a direction opposite to the second direction D2 and a separation deviation in the third direction D3 or in a direction opposite to the third direction D3 between the light emitting part LP and the light receiving part RP can occur. The position deviation and the separation deviation can be corrected by the control part CP. As a result, the deviations that can occur when the first moving member MP1 and the second moving member MP2 are driven individually can be prevented or reduced by the correction of the control part CP.

[0082] With reference to Figure 4 , Figure 5 , Figure 6 , Figure 7 , Figure 8 and Figure 9 , after correcting the position deviation in the second direction D2 or in a direction opposite to the second direction D2 and the separation deviation in the third direction D3 or in a direction opposite to the third direction D3 between the first moving member MP1 and the second moving member MP2, the inspection apparatus IA can measure the amount of deflection of the substrate SUB (e.g., the amount of deflection DEF in Figure 10 by the camera CA.

[0083] In an embodiment, before the light emitting part LP and the light receiving part RP are moved in the second direction D2 or the direction opposite to the second direction D2, the camera CA can capture an image IM of one of the second alignment keys arranged in the substrate SUB. When the light receiving part RP of the substrate SUB and the second alignment key AK2 are spaced apart by a third distance L3, as shown in Figure 6 , the captured image IM of the second alignment key AK2 can be in focus. In an embodiment, for example, the third distance L3 can be about 30 mm. In the description, since the image IM can be an image of the first alignment key AK1 or an image of the second alignment key AK2, and the image of the first alignment key AK1 and the image of the second alignment key AK2 can be collectively referred to as an image of the alignment key AK, the image IM can be collectively referred to as an image of the alignment key AK.

[0084] However, after the camera CA is moved in the second direction D2 or the direction opposite to the second direction D2 and the image IM of the second alignment key AK2 is captured, since the substrate SUB is sagged, as shown in Figure 8 , the image IM of the second alignment key AK2 can not be in focus. In this case, the control part CP can move the second moving part MP2 in the third direction D3 or the direction opposite to the third direction D3 so that the image IM of the second alignment key AK2 captured by the camera CA is in focus. That is, when the camera CA and the second alignment key AK2 are spaced apart by the third distance L3 in the third direction D3, the amount of sag (for example, the amount of sag DEF in Figure 10 ) of the substrate can be measured.

[0085] Further referring to Figure 9 and Figure 10 , after the amount of deflection DEF of the substrate SUB is measured, as the light emitting part LP and the light receiving part RP are moved in the second direction D2 or the direction opposite to the second direction D2, the light transmittance of the substrate SUB can be measured. However, since the substrate SUB can be sagged in the direction opposite to the third direction D3, the movement deviation DEV in the second direction D2 can be caused.

[0086] In an embodiment, a third movement distance DT3 of the light emitting part LP (or the first alignment key AK1) or the second movement distance DT2 of the light receiving part RP (or the camera CA) in the second direction D2 or the direction opposite to the second direction D2 can be substantially the same as a fourth movement distance DT4 of the light emitting part LP (or the first alignment key AK1) or the second movement distance DT2 of the light receiving part RP (or the camera CA) in the sagging curve of the substrate SUB. The third movement distance DT3 can indicate the first movement distance DT1 of the light emitting part LP (or the first alignment key AK1) or the second movement distance DT2 of the light receiving part RP (or the camera CA) as a straight line distance. The fourth movement distance DT4 can be an imaginary curved distance of the light emitting part LP (or the first alignment key AK1) or the second movement distance DT2 of the light receiving part RP (or the camera CA) when moving along the sagging substrate SUB. Even though the third movement distance DT3 as a straight line distance and the fourth movement distance DT4 as a curved distance are substantially the same, for example, a movement deviation DEV in the second direction D2 or the direction opposite to the second direction D2 due to the sagging of the substrate SUB can occur. When the movement deviation DEV occurs, the light transmittance of the substrate SUB can be measured at a position different from the preset position. In other words, when the movement deviation DEV occurs, the light transmittance of the substrate SUB can be measured at different positions.

[0087] To compensate or correct the movement deviation DEV, after the deflection amount DEF of the substrate SUB is measured, the movement deviation DEV of at least one of the light emitting part LP and the light receiving part RP can be measured and corrected (e.g., corrected by the deflection amount DEF of the substrate SUB) when the light transmittance is measured. In this way, the accurate light transmittance at each position on the substrate SUB can be measured.

[0088] As a result, since the light emitting part LP is independently moved by the first moving part MP1 and the light receiving part RP is independently moved by the second moving part MP2, the light transmittance test can be performed on the substrate having a long side. In addition, by measuring the deflection amount DEF of the substrate through the camera CA and the second alignment key AK2, the accurate light transmittance can be measured for each position of the substrate.

[0089] Figure 11 FIG. 6 is a schematic view illustrating another embodiment of the inspection apparatus according to the present disclosure. Figure 11 The inspection apparatus IA described in FIG. 1A can be different from the inspection apparatus IA described in FIG. 1A only in the arrangement of the camera CA and the first alignment key AK1, and other configurations can be substantially the same. Figure 1 The inspection apparatus IA described in FIG. 1A can be different from the inspection apparatus IA described in FIG. 1A only in the arrangement of the camera CA and the first alignment key AK1, and other configurations can be substantially the same.

[0090] Reference Figure 11The light emitting part LP can be attached to the first moving part MP1. The light emitting part LP can be attached to the first moving part MP1 in a direction opposite to the third direction D3. The camera CA can be attached to one side of the light emitting part LP. The camera CA can capture an image of the first alignment key AK1 disposed spaced apart in the third direction D3. That is, the camera CA can overlap the first alignment key AK1 in a plan view.

[0091] The light receiving part RP can be attached to the second moving part MP2. The light receiving part RP can be attached to the second moving part MP2 in the third direction D3. The first alignment key AK1 can be attached to one side of the light receiving part RP. The first alignment key AK1 can be configured as a reference for measuring the relative positions of the light emitting part LP and the light receiving part RP.

[0092] The present disclosure can be applied to a display device and an electronic device including the same. In an embodiment, the present disclosure can be applied to, for example, a high-resolution smart phone, a mobile phone, a smart pad, a smart watch, a tablet personal computer (PC), a vehicle navigation system, a television, a computer monitor, a laptop computer, or the like.

[0093] Figure 12 A block diagram of an electronic device according to an embodiment of the present disclosure is illustrated.

[0094] Reference Figure 12 The display device according to an embodiment of the present disclosure can be applied to various electronic devices 10. The electronic device 10 according to an embodiment can include a display device, and can further include a module or a means for an additional function other than the display device.

[0095] The electronic device 10 can include a display module 11, a processor 12, a memory 13, and a power module 14.

[0096] The processor 12 can include at least one of a central processing unit (CPU), an application processor (AP), a graphics processing unit (GPU), a communication processor (CP), an image signal processor (ISP), and a controller.

[0097] The memory 13 can store data information necessary for the operation of the processor 12 or the display module 11. When the processor 12 executes an application program stored in the memory 13, an image data signal and / or an input control signal can be transmitted to the display module 11, and the display module 11 can process a signal received through a display screen and output image information.

[0098] The power module 14 can include a power module such as a power adapter or a battery device, and a power conversion module that converts power supplied from the power module into power necessary for generating an operation electronic device 10.

[0099] In addition, some of the individual modules functionally included in one module can be included in the display device, and other parts can be provided separately from the display device. For example, the display device can include the display module 11, and the processor 12, the memory 13, and the power module 14 can be provided in the form of other devices than the display device within the electronic device 10.

[0100] Figure 13 for illustrating electronic devices according to various embodiments of the disclosure. Figure 12

[0101] Referring to Figure 12 and Figure 13 , various electronic devices to which the display device according to the embodiments is applied can not only include image display electronic devices such as a smart phone 10_1a, a tablet personal computer 10_1b, a laptop computer 10_1c, a television 10_1d, and a desktop monitor 10_1e, but also include wearable electronic devices including display modules such as smart glasses 10_2a, a head-mounted display 10_2b, and a smart watch 10_2c, and vehicle electronic devices 10_3 including display modules placed on a dashboard, a center console, or an instrument panel of an automobile, such as a CID (Center Information Display) and an in-dash mirror display.

[0102] However, this is exemplary, and the electronic device 10 according to the embodiments of the disclosure is not limited thereto. For example, the electronic device 10 can be implemented as a mobile phone, a video phone, a smart pad, a smart watch, a tablet personal computer, a car display, a computer monitor, a notebook computer, a head-mounted display device, etc. In addition, the electronic device 10 can be a television, a monitor, a notebook computer, or a tablet computer. In addition, the electronic device 10 can be an automobile.

[0103] While the disclosure has been particularly shown and described with reference to embodiments thereof, it will be understood by those of ordinary skill in the art that various changes in form and details can be made therein without departing from the spirit or scope of the disclosure as defined by the following claims.​

Claims

1. An inspection device, comprising: A light-emitting component, used to emit light; Alignment key, attached to one side of the light emitting component; A light receiving component is spaced apart from the light emitting component in a first direction and is used to receive the light emitted from the light emitting component; as well as A camera, attached to one side of the light receiving component, is spaced apart from the alignment key in the first direction and is used to capture an image of the alignment key.

2. The inspection device according to claim 1, further comprising: A first moving component is connected to the light emitting component and the alignment key, and is used to move the light emitting component and the alignment key; as well as A second moving component, spaced apart from the first moving component in the first direction, is connected to the light receiving component and the camera, and is used to move the light receiving component and the camera.

3. The inspection apparatus of claim 1, wherein the camera is used to inspect whether the alignment key is centered and whether the alignment key is in focus based on the image of the alignment key.

4. The inspection apparatus according to claim 1, wherein the light receiving component and the light emitting component are spaced apart from each other by a first distance in the first direction, and The first distance is between 99.6 mm and 100.4 mm.

5. The inspection device according to claim 1, further comprising: A platform is used to accommodate a substrate between the light emitting component and the light receiving component.

6. The inspection apparatus according to claim 5, wherein the light emitting component and the substrate are spaced apart from each other by a second distance in the first direction, and The second distance is 69.2 mm to 70 mm.

7. The inspection apparatus according to claim 5, wherein the light receiving component and the substrate are spaced apart from each other by a third distance in the first direction, and The third distance is between 29.6 mm and 30.4 mm.

8. An inspection device, comprising: The light-emitting part is used to emit light; A camera is attached to one side of the light-emitting component; A light receiving component is spaced apart from the light emitting component in a first direction and is used to receive the light emitted from the light emitting component; Alignment key, attached to one side of the light receiving component and spaced apart from the camera in the first direction; as well as A platform is used to accommodate a substrate between the light emitting component and the light receiving component.

9. An inspection method, comprising: The separation distance between a light emitting component and a light receiving component in a first direction is measured and corrected. The light emitting component is connected to a first moving component, and the light receiving component is connected to a second moving component spaced apart from the first moving component in the first direction. Measure and correct the movement distance of each of the light emitting component and the light receiving component in a second direction intersecting the first direction; The skewness of the substrate positioned between the first and second moving parts is measured using a camera attached to one side of either the light emitting component or the light receiving component; and The skewness of the substrate corrects the movement deviation of each of the light emitting component and the light receiving component in the second direction.

10. An electronic device, comprising: Display module; as well as The processor is configured to drive the display module, and The display module is a light-emitting component manufactured using a process that performs a transmittance test using the inspection apparatus according to any one of claims 1 to 8.

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