Gas sensor testing method and dynamic calibration system

Abstract

The invention relates to the technical field of gas sensors, and provides a gas sensor testing method and a dynamic calibration system.The method comprises the following steps that a gas supply unit generates testing gas with the temperature-humidity-flow physical property meeting the actual application scene of the gas sensor; starting a pressure control unit to control the pressure of the test gas; starting a gas circuit control unit, and controlling the test gas to orderly enter and exit from the multi-channel probe test bench on which the gas sensor to be tested is placed according to a preset time sequence; a high-precision semiconductor analyzer is connected to a multi-channel probe test bench through a BNC connector so as to realize dynamic calibration of response electric signals of a gas sensor. According to the gas sensor testing method provided by the invention, dynamic working conditions such as pressure transient simulation and the like are more easily performed on the gas sensor through the steps, and a temperature-humidity-pressure-flow multi-physical field collaborative dynamic simulation test is performed, so that response signals of the gas sensor can be automatically, quickly and dynamically calibrated.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of gas sensor, in particular to a gas sensor testing method and dynamic calibration system. BACKGROUND

[0002] The gas sensor is the core sensing device of environmental monitoring, industrial safety and new energy system, and its reliability is directly related to the safety of toxic gas leakage early warning, chemical process control and hydrogen energy automobile and other key scenes.

[0003] With the popularity of vehicle-mounted hydrogen fuel cells and the upgrading of chemical process monitoring demand, the gas sensor needs to maintain high-precision detection capability in complex working conditions. In order to meet the calibration needs of modern high-precision gas sensors in complex working conditions, people usually use a test system to simulate the environmental conditions of the gas sensor, and then test the gas sensor.

[0004] However, in the related gas sensor technology, the test system is difficult to simulate dynamic working conditions such as pressure transients, and difficult to perform coordinated dynamic simulation testing of temperature-humidity-pressure-flow multi-physical fields. SUMMARY

[0005] In view of the shortcomings of the prior art, the present application provides a gas sensor testing method to solve at least one of the above technical defects in the prior art, which is easier to simulate dynamic working conditions such as pressure transients for gas sensors, and to perform coordinated dynamic simulation testing of temperature-humidity-pressure-flow multi-physical fields.

[0006] In order to achieve the purpose of the present application, the present application provides a gas sensor testing method, which comprises the following steps: Generating test gas with temperature-humidity-flow physical characteristics conforming to the actual application scene of the gas sensor through a gas supply unit; Starting a pressure control unit to control the pressure of the test gas; Starting a gas path control unit to control the test gas to orderly enter and exit the multi-channel probe test table on which the gas sensor to be tested is placed according to a preset time sequence; Connecting a high-precision semiconductor analyzer to the multi-channel probe test table through a BNC connector to realize dynamic calibration of the response electrical signal of the gas sensor.

[0007] Preferably, in the step of generating test gas with temperature-humidity-flow physical characteristics conforming to the actual application scene of the gas sensor through a gas supply unit, The flow controller is arranged to control the flow of the detection gas and the background gas, the humidity control device is arranged to control the humidity of the test gas after mixing the detection gas and the background gas, and the gas dynamic mixing device with the temperature controller is arranged to control the temperature of the test gas after mixing the detection gas and the background gas.

[0008] Preferably, the pressure control unit is started to control the pressure of the test gas, and the gas path control unit is started to control the test gas to orderly enter and exit the multi-channel probe test table in which the to-be-tested gas sensor is placed according to a preset time sequence, The gas path control unit is provided with at least a first electromagnetic valve, a second electromagnetic valve and a third electromagnetic valve, The first electromagnetic valve is arranged at the output port of the gas dynamic mixing device, the second electromagnetic valve is arranged at the input end of the pressure control unit, and the first electromagnetic valve is communicated with the second electromagnetic valve, and the second electromagnetic valve is communicated with the background gas, The pressure control unit is connected to the multi-channel probe test table through the third electromagnetic valve.

[0009] Preferably, in the step of connecting the high-precision semiconductor analyzer to the multi-channel probe test table through the BNC connector to realize dynamic calibration of the response electric signal of the gas sensor, The environmental simulation unit is also connected to the multi-channel probe test table to realize compensation of the environmental temperature; The replaceable probe array is arranged in the multi-channel probe test table, and the replaceable probe array forms an ohmic contact with the to-be-tested gas sensor, The response electric signal of the to-be-tested gas sensor generated under complex working conditions is dynamically collected, analyzed and calibrated by the high-precision semiconductor analyzer, and finally the electric signal characteristic test result of the to-be-tested gas sensor under complex working conditions is output. The vacuum generating unit is connected to the multi-channel probe test table to perform cleaning.

[0010] The application also provides a dynamic calibration system, comprising: The gas supply unit comprises a gas bottle, a flow controller, a humidity control device and a gas dynamic mixing device with a temperature controller, The gas dynamic mixing device is provided with an input port and an output port, the gas bottle is connected to the input port through the flow controller, and the humidity control device is connected to the gas dynamic mixing device; The pressure control unit has an input end and an output end, and the input end is connected to the output port; The multi-channel probe test table is connected to the output end; The gas path control unit has a first electromagnetic valve and a third electromagnetic valve, the first electromagnetic valve is arranged between the output port and the input end, and the third electromagnetic valve is arranged between the output end and the multi-channel probe test table. The signal processing unit is connected to the multi-channel probe test table and is adapted to collect the electrical signal change of the to-be-tested gas sensor located on the multi-channel probe test table.

[0011] Preferably, the gas bottle includes a detection gas bottle and a background gas bottle, the flow controller includes a detection flow controller and a background flow controller, the input port includes a detection input port and a background input port, The gas path control unit further includes a second electromagnetic valve, the second electromagnetic valve is connected in series with the first electromagnetic valve, and the second electromagnetic valve is arranged between the first electromagnetic valve and the input end, The detection gas bottle is connected to the detection input port through the detection flow controller, The background gas bottle is connected to the background input port through the background flow controller, The second electromagnetic valve is connected with the background flow controller.

[0012] Preferably, the signal processing unit includes a high-precision semiconductor analyzer and a BNC connector, The high-precision semiconductor analyzer is connected to the multi-channel probe test table through the BNC connector, The multi-channel probe test table has a replaceable probe array.

[0013] Preferably, the pressure control unit includes a pressure storage bottle, a pressure sensor and a digital pressure gauge, The pressure sensor is arranged in the pressure storage bottle, and the digital pressure gauge is arranged in the pressure storage bottle, The input end and the output end are arranged in the pressure storage bottle.

[0014] Preferably, it further includes an environment simulation unit, The environment simulation unit is connected to the multi-channel probe test table.

[0015] Preferably, it further includes a vacuum generating unit and a programmable controller, The vacuum generating unit includes a vacuum pump, a vacuum storage bottle and a vacuum pressure gauge, The vacuum pressure gauge is arranged in the vacuum storage bottle, and the vacuum pump is connected to the vacuum storage bottle, The vacuum storage bottle is connected to the multi-channel probe test table, The gas path control unit further comprises a fourth electromagnetic valve, which is arranged between the vacuum gas cylinder and the multi-channel probe test table, The first electromagnetic valve, the second electromagnetic valve, the third electromagnetic valve and the fourth electromagnetic valve are electrically connected with the programmable controller.

[0016] The gas sensor test method provided by the application generates test gas with temperature-humidity-flow physical characteristics conforming to the actual application scene of the gas sensor by setting a gas supply unit; controls the pressure of the test gas by using a pressure control unit; uses a gas path control unit to control the orderly entry and exit of the test gas into the multi-channel probe test table on which the gas sensor to be tested is placed according to a preset time sequence; and connects a high-precision semiconductor analyzer to the multi-channel probe test table through a BNC connector to realize dynamic calibration of the response electrical signal of the gas sensor. In this way, it is easier to simulate dynamic working conditions such as pressure transient of the gas sensor, and to perform coordinated dynamic simulation testing of multiple physical fields such as temperature-humidity-pressure-flow, thereby enabling automatic and rapid dynamic calibration of the response signal of the gas sensor, and significantly improving the calibration efficiency of the gas sensor under complex working conditions such as vehicle-mounted hydrogen energy system and chemical process monitoring.

[0017] The dynamic calibration system provided by the application supplies test gas conforming to temperature-humidity-flow conditions to the multi-channel probe test table by setting a gas supply unit comprising a gas cylinder, a flow controller, a humidity control device and a gas dynamic mixing device with a temperature controller; a pressure control unit is further arranged to adjust the test gas to meet the conditions, and a gas path control unit with a first electromagnetic valve and a third electromagnetic valve is arranged to control the entry and exit of the test gas into the multi-channel probe test table; a signal processing unit is connected to the multi-channel probe test table to process the electrical signal changes of the sensor to be tested under complex working conditions; thereby realizing easier simulation of dynamic working conditions such as pressure transient of the gas sensor, and coordinated dynamic simulation testing of multiple physical fields such as temperature-humidity-pressure-flow, thereby enabling automatic and rapid dynamic calibration of the response signal of the gas sensor, and significantly improving the calibration efficiency of the gas sensor under complex working conditions such as vehicle-mounted hydrogen energy system and chemical process monitoring. BRIEF DESCRIPTION OF DRAWINGS

[0018] The above and other objects, features and advantages of the present application will become more apparent from the following detailed description when taken in conjunction with the accompanying drawings in which preferred embodiments of the application are shown. Like reference numerals refer to like elements throughout the drawings and the description, and the drawings are not necessarily drawn to scale, with emphasis being placed upon illustrating the principles of the application.

[0019] Figure 1 A flow chart of the gas sensor test method provided by the embodiment of the application; Figure 2 The overall structure schematic diagram of the dynamic calibration system provided by the embodiment of the present application is shown in the figure. Figure 3 The structure schematic diagram of the gas supply unit in the dynamic calibration system provided by the embodiment of the present application is shown in the figure. Figure 4 The structure relationship schematic diagram between the pressure control unit, the multi-channel probe test table, the environment simulation unit and the vacuum generation unit in the dynamic calibration system provided by the embodiment of the present application is shown in the figure. Figure 5 The structure relationship schematic diagram between the environment simulation unit and the signal processing unit in the dynamic calibration system provided by the embodiment of the present application is shown in the figure.

[0020] In the figure: 1, the sensor to be tested; 100, the gas supply unit; 110, the gas bottle; 111, the detection gas bottle; 112, the background gas bottle; 120, the flow controller; 121, the detection flow controller; 122, the background flow controller; 130, the humidity control device; 140, the gas dynamic mixing device; 141, the input port; 1411, the detection input port; 1412, the background input port; 142, the output port; 200, the pressure control unit; 210, the input end; 220, the output end; 230, the pressure storage bottle; 240, the pressure sensor; 250, the digital pressure gauge; 300, the multi-channel probe test table; 310, the temperature control table; 320, the replaceable probe array; 400, the gas path control unit; 410, the first electromagnetic valve; 420, the second electromagnetic valve; 430, the third electromagnetic valve; 440, the fourth electromagnetic valve; 450, the programmable controller; 500, the signal processing unit; 510, the high-precision semiconductor analyzer; 520, the BNC connector; 600, the environment simulation unit; 700, the vacuum generation unit; 710, the vacuum pump; 720, the vacuum storage bottle; 730, the vacuum pressure gauge. DETAILED DESCRIPTION

[0021] In order to facilitate the understanding of the present application, the present application will be described more fully below with reference to the relevant drawings.

[0022] It should be noted that when an element is considered to be "connected" to another element, it can be directly connected to the other element and integrated with it as a whole, or there can be a middle element. The terms "mount", "one end", "the other end" and similar expressions used herein are only for illustrative purposes.

[0023] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs. The terminology used in the description herein is for describing specific embodiments only and is not intended to be limiting of the application. The use herein of the terms "and / or" includes a set of one or more associated listed items.

[0024] The embodiments of the present application will be described below in conjunction with Figures 1 to 5 The embodiments of the present application will be described below in conjunction with

[0025] Embodiment 1

[0026] Referring to Figures 1 to 5 Embodiment 1 of the present application provides a gas sensor test method, the steps of which include: First step: generate a test gas with temperature-humidity-flow physical properties conforming to the actual application scene of the gas sensor by the gas supply unit 100.

[0027] Second step: start the pressure control unit 200 to control the pressure of the test gas.

[0028] Third step: start the gas path control unit 400 to control the orderly entry and exit of the test gas into the multi-channel probe test table 300 where the to-be-tested gas sensor is placed according to the preset timing.

[0029] Fourth step: connect the high-precision semiconductor analyzer 510 to the multi-channel probe test table 300 through the BNC connector 520 to realize dynamic calibration of the response electrical signal of the gas sensor.

[0030] Specifically, in the first step, the flow controller 120 is set to control the flow of the detection gas and the background gas, and the flow controller 120 can generate a test gas with a preset concentration gradient by flow proportioning to provide a more accurate test gas for the to-be-tested sensor 1, thereby improving the accuracy.

[0031] The humidity control device 130 is set to control the humidity of the test gas after the detection gas and the background gas are mixed, and the gas dynamic mixing device 140 with a temperature controller is set to control the temperature of the test gas after the detection gas and the background gas are mixed, thereby providing a more accurate test gas for the to-be-tested sensor 1, which can also improve the accuracy.

[0032] In conjunction with Figure 1 , Figure 2 and Figure 4 , in the second and third steps, the gas path control unit 400 is provided with at least a first electromagnetic valve 410, a second electromagnetic valve 420, and a third electromagnetic valve 430.

[0033] The first electromagnetic valve 410 is arranged at the output port 142 of the gas dynamic mixing device 140, the second electromagnetic valve 420 is arranged at the input end 210 of the pressure control unit 200, and the first electromagnetic valve 410 is communicated with the second electromagnetic valve 420, and the second electromagnetic valve 420 is communicated to the background gas.

[0034] The pressure control unit 200 is connected to the multi-channel probe test table 300 through the third electromagnetic valve 430.

[0035] The preset timing control in the gas path control unit 400 can refer to the following examples: First, open the second electromagnetic valve 420, and input the background gas into the multi-channel probe test table 300, so as to discharge the original gas in the cavity of the multi-channel probe test table 300, ensure that the test environment does not contain interfering substances, and improve the accuracy of the test results.

[0036] Then, close the second electromagnetic valve 420 and open the first electromagnetic valve 410, and the test gas generated in the first step is injected into the pressure control unit 200; when the pressure reaches the expected threshold value, the third electromagnetic valve 430 is opened, and the test gas is input into the multi-channel probe test table 300 at a stable pressure.

[0037] The electromagnetic valve is arranged to control the on-off of the test gas, which can make the control more accurate and improve the accuracy of the sensor test.

[0038] In addition, in combination with Figure 5 In the fourth step, the environmental simulation unit 600 is also connected to the multi-channel probe test table 300, so as to compensate for the environmental temperature of the to-be-tested sensor 1 located in the multi-channel probe test table 300, and improve the test accuracy.

[0039] The replaceable probe array 320 is arranged in the multi-channel probe test table 300, and the replaceable probe array 320 forms an ohmic contact with the to-be-tested gas sensor.

[0040] The response electric signal of the to-be-tested gas sensor generated under complex working conditions is dynamically collected, analyzed and calibrated by the high-precision semiconductor analyzer 510, and finally the electric signal characteristic test result of the to-be-tested gas sensor under complex working conditions is output.

[0041] After the test is completed, the vacuum generating unit 700 is arranged to be connected to the multi-channel probe test table 300 for cleaning.

[0042] The environmental simulation unit 600 uses the thermocouple principle to collect the environmental parameters in the cavity of the multi-channel probe test table 300 in real time, and accurately compensates for the test environment temperature.

[0043] After the test is completed, the first electromagnetic valve 410 is closed, the second electromagnetic valve 420 and the third electromagnetic valve 430 are opened, the vacuum generating unit 700 is connected in parallel, then the fourth electromagnetic valve 440 is opened and the vacuum pump 710 is started, and the gas in the cavity of the multi-channel probe test table 300 is extracted, and the cleaning operation of the cavity is performed.

[0044] It can be understood that the gas sensor test method provided by the embodiment generates test gas with temperature-humidity-flow physical characteristics consistent with the actual application scene of the gas sensor by setting the gas supply unit 100; controls the pressure of the test gas by using the pressure control unit 200; uses the gas path control unit 400 to control the test gas to enter and exit the multi-channel probe test table 300 where the gas sensor to be tested is placed in order according to the preset time sequence; and connects the high-precision semiconductor analyzer 510 to the multi-channel probe test table 300 through the BNC connector 520 to realize dynamic calibration of the response electrical signal of the gas sensor. In this way, it is easier to simulate dynamic working conditions such as pressure transient of the gas sensor, and to perform coordinated dynamic simulation test of temperature-humidity-pressure-flow multi-physical field, so that the response signal of the gas sensor can be automatically and quickly calibrated, thereby significantly improving the calibration efficiency of the gas sensor under complex working conditions such as vehicle-mounted hydrogen energy system and chemical process monitoring.

[0045] Embodiment 2

[0046] In combination Figures 2 to 5 , the embodiment 2 also provides a gas sensor dynamic calibration system manufactured based on the gas sensor test method provided by the embodiment 1, and the dynamic calibration system comprises the gas supply unit 100, the pressure control unit 200, the multi-channel probe test table 300, the gas path control unit 400 and the signal processing unit 500.

[0047] The gas supply unit 100 comprises a gas bottle 110, a flow controller 120, a humidity control device 130 and a gas dynamic mixing device 140 with a temperature controller.

[0048] The gas dynamic mixing device 140 is provided with an input port 141 and an output port 142, and the gas bottle 110 is connected to the input port 141 through the flow controller 120, that is, the flow controller 120 is installed at the gas bottle 110, and then the flow controller 120 can be connected to the input port 141 of the gas dynamic mixing device 140 through a gas path pipeline to supply gas to the gas dynamic mixing device 140. The humidity control device 130 is connected to the gas dynamic mixing device 140 to adjust the humidity of the test gas in the gas dynamic mixing device 140.

[0049] The pressure control unit 200 has an input end 210 and an output end 220, the input end 210 is connected to the output port 142, and the test gas mixed by the gas dynamic mixing device 140 can be input to the pressure control unit 200 from the input end 210, so as to ensure that the pressure of the test gas meets the demand condition.

[0050] The multi-channel probe test table 300 is connected to the output end 220 of the pressure control unit 200, and the test gas adjusted by the pressure control unit 200 is input to the multi-channel probe test table 300 from the output end 220.

[0051] The gas path control unit 400 has a first electromagnetic valve 410 and a third electromagnetic valve 430, the first electromagnetic valve 410 is arranged between the output port 142 and the input end 210, and the first electromagnetic valve 410 can be connected to the output port 142 of the gas dynamic mixing device 140 and the input end 210 of the pressure control unit 200 through a gas path pipeline; the third electromagnetic valve 430 is arranged between the output end 220 of the pressure control unit 200 and the multi-channel probe test table 300, which facilitates the control of the test gas entering and exiting the multi-channel probe test table 300.

[0052] The signal processing unit 500 is connected to the multi-channel probe test table 300, and can collect the electrical signal change of the to-be-tested gas sensor located in the multi-channel probe test table 300, so as to dynamically calibrate the electrical signal response of the to-be-tested sensor 1.

[0053] It can be understood that the gas sensor dynamic calibration system provided by the embodiment supplies the multi-channel probe test table 300 with test gas meeting the temperature-humidity-flow condition by arranging the gas supply unit 100 including the gas bottle 110, the flow controller 120, the humidity control device 130 and the gas dynamic mixing device 140 with the temperature controller; and further arranging the pressure control unit 200 to adjust the test gas meeting the condition, and arranging the gas path control unit 400 with the first electromagnetic valve 410 and the third electromagnetic valve 430 to control the test gas entering and exiting the multi-channel probe test table 300; connecting the multi-channel probe test table 300 to the signal processing unit 500 to process the electrical signal change of the to-be-tested sensor 1 under complex working conditions; so as to more easily simulate the dynamic working conditions such as pressure transient of the gas sensor, and perform the coordinated dynamic simulation test of the temperature-humidity-pressure-flow multi-physical field, and further automatically and quickly dynamically calibrate the response signal of the gas sensor, and significantly improve the calibration efficiency of the gas sensor under complex working conditions such as the vehicle-mounted hydrogen energy system and the chemical process monitoring.

[0054] In combination with Figure 2 and Figure 3The gas bottle 110 includes a detection gas bottle 111 and a background gas bottle 112, the flow controller 120 includes a detection flow controller 121 and a background flow controller 122, and the input port 141 includes a detection input port 1411 and a background input port 1412.

[0055] The gas path control unit 400 further includes a second electromagnetic valve 420, which is connected in series with the first electromagnetic valve 410 and is arranged between the first electromagnetic valve 410 and the input end 210.

[0056] The detection gas bottle 111 is connected to the detection input port 1411 through the detection flow controller 121.

[0057] The background gas bottle 112 is connected to the background input port 1412 through the background flow controller 122.

[0058] The second electromagnetic valve 420 is connected to the background flow controller 122.

[0059] When the second electromagnetic valve 420 is opened, the original gas in the cavity of the multi-channel probe test table 300 can be discharged, so that the test environment does not contain interfering substances, and the accuracy of the test results is improved.

[0060] Then, the second electromagnetic valve 420 is closed and the first electromagnetic valve 410 is opened, and the test gas generated in the first step is injected into the pressure control unit 200; when the pressure reaches the expected threshold value, the third electromagnetic valve 430 is opened, and the test gas is input to the multi-channel probe test table 300 at a stable pressure. The electromagnetic valve is arranged to control the on-off of the test gas, which can make the control more accurate and improve the accuracy of the sensor test.

[0061] In addition, in combination with Figure 2 and Figure 5 The signal processing unit 500 includes a high-precision semiconductor analyzer 510 and a BNC connector 520.

[0062] The high-precision semiconductor analyzer 510 is connected to the multi-channel probe test table 300 through the BNC connector 520.

[0063] The multi-channel probe test table 300 has a replaceable probe array 320. The replaceable probe array 320 can be made of gold-nickel alloy material, the probe spacing is adjustable and set to 50-500 μm, and the contact resistance is ≤10 mΩ; the replaceable probe array 320 forms an ohmic contact with the electrodes of the sensor 1 to be tested located in the multi-channel probe test table 300.

[0064] The electrical signals of the sensors collected by the replaceable probe array 320 are transmitted to the high-precision semiconductor analyzer 510 for dynamic collection, analysis and calibration of the sensor response electrical signals generated due to complex working conditions. Finally, after the above analysis and processing, the electrical signal characteristic test results of the gas sensor under complex working conditions are output, ensuring the accuracy and reliability of the detection data.

[0065] The multi-channel probe test table 300 is internally integrated with a temperature control table 310, which is internally provided with a multi-section thermoelectric refrigerator. The surface temperature of the sensor to be tested 1 is regulated by the environment simulation unit 600, so as to realize rapid dynamic change of the sensor temperature.

[0066] In combination Figure 2 In order to more accurately adjust and control the pressure of the test gas, the pressure control unit 200 includes a pressure storage cylinder 230, a pressure sensor 240 and a digital pressure gauge 250.

[0067] The pressure sensor 240 is arranged on the pressure storage cylinder 230, and the digital pressure gauge 250 is arranged on the pressure storage cylinder 230.

[0068] The input end 210 and the output end 220 are both arranged on the pressure storage cylinder 230.

[0069] In combination Figure 5 The gas sensor dynamic calibration system further includes an environment simulation unit 600, which is connected to the multi-channel probe test table 300.

[0070] The environment simulation unit 600 can collect the environmental parameters in the multi-channel probe test table 300 in real time through a thermocouple, can control the temperature inside, realizes dynamic compensation of the test environment, and improves the test accuracy.

[0071] In combination Figure 4 The gas sensor dynamic calibration system further includes a vacuum generating unit 700 and a programmable controller 450.

[0072] The vacuum generating unit 700 includes a vacuum pump 710, a vacuum storage cylinder 720 and a vacuum pressure gauge 730.

[0073] The vacuum pressure gauge 730 is arranged on the vacuum storage cylinder 720, and the vacuum pump 710 is connected to the vacuum storage cylinder 720.

[0074] The vacuum storage cylinder 720 is connected to the multi-channel probe test table 300.

[0075] The vacuum generating unit 700 can be used to provide a vacuum environment in the cavity of the multi-channel probe test table 300.

[0076] The gas path control unit 400 further comprises a fourth electromagnetic valve 440, which is arranged between the vacuum gas cylinder 720 and the multi-channel probe test table 300.

[0077] After the test is completed, the first electromagnetic valve 410 is closed, the second electromagnetic valve 420 and the third electromagnetic valve 430 are opened, the vacuum generating unit 700 is connected in parallel, then the fourth electromagnetic valve 440 is opened and the vacuum pump 710 is started, so as to extract the gas in the cavity of the multi-channel probe test table 300, and perform a cleaning operation, so that the concentration of residual gas in the cavity of the multi-channel probe test table 300 is reduced to below 1 ppm within 10 seconds.

[0078] The first electromagnetic valve 410, the second electromagnetic valve 420, the third electromagnetic valve 430 and the fourth electromagnetic valve 440 are electrically connected with the programmable controller 450.

[0079] The programmable controller 450 can preset a control PLC program to control the above-mentioned electromagnetic valves, so that the gas sensor dynamic calibration system is more intelligent; and the multi-mode of test gas injection, background gas replacement and cavity cleaning can be automatically switched under the preset time.

[0080] In the present specification, unless explicitly specified and limited, a first feature is "on" or "under" a second feature, which can be direct contact between the first and second features, or indirect contact between the first and second features through an intermediate medium. Moreover, the first feature "above", "over" and "on" the second feature can be directly above or obliquely above the first feature, or only means that the horizontal height of the first feature is higher than that of the second feature. The first feature "below", "under" and "under" the second feature can be directly below or obliquely below the first feature, or only means that the horizontal height of the first feature is less than that of the second feature.

[0081] In the description of the present specification, the description of the terms "preferred embodiment", "further embodiment", "some embodiments", "other embodiments" or "specific examples" means that the specific features, structures, materials or characteristics described in combination with the embodiment or example are included in at least one embodiment or example of the present application. In the present specification, the illustrative description of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner. In addition, the skilled in the art can combine and combine the different embodiments or examples described in the present specification and the features of the different embodiments or examples without contradiction.

[0082] Although the embodiments of the present application have been shown and described above, it is understood that the above embodiments are exemplary, and are not to be interpreted as limiting the present application, and those skilled in the art can make changes, modifications, replacements and variations to the above embodiments within the scope of the present application.

Claims

1. A gas sensor testing method, characterized in that, Includes the following steps: The gas supply unit generates test gas whose temperature, humidity, and flow rate physical characteristics conform to the actual application scenario of the gas sensor; The pressure control unit is activated to control the pressure of the test gas. Start the gas path control unit to control the test gas to enter and exit the multi-channel probe test station containing the gas sensor according to the preset timing sequence. A high-precision semiconductor analyzer is connected to a multi-channel probe test station via a BNC connector to achieve dynamic calibration of the gas sensor's response electrical signal.

2. The gas sensor testing method as described in claim 1, characterized in that, In the step of generating test gas with temperature, humidity, and flow rate physical characteristics that conform to the actual application scenario of the gas sensor through the gas supply unit... A flow controller is set to control the flow rate of the detection gas and the background gas. A humidity control device is set to control the humidity of the test gas after the detection gas and the background gas are mixed. A gas dynamic mixing device with a temperature controller is set to control the temperature of the test gas after the detection gas and the background gas are mixed.

3. The gas sensor testing method as described in claim 2, characterized in that, In the steps of activating the pressure control unit to control the pressure of the test gas and activating the gas path control unit to control the orderly entry and exit of the test gas into the multi-channel probe test stage containing the sensor of the gas to be tested according to a preset timing sequence,... The pneumatic control unit is equipped with at least a first solenoid valve, a second solenoid valve, and a third solenoid valve. The first solenoid valve is located at the output port of the gas dynamic mixing device, and the second solenoid valve is located at the input port of the pressure control unit. The first solenoid valve and the second solenoid valve are connected together, and the second solenoid valve is connected to the background gas. The pressure control unit is connected to the multi-channel probe test station via the third solenoid valve.

4. The gas sensor testing method as described in claim 3, characterized in that, In the step of connecting a high-precision semiconductor analyzer to a multi-channel probe test station via a BNC connector to achieve dynamic calibration of the gas sensor's response electrical signal, The environmental simulation unit is also connected to a multi-channel probe test station to achieve environmental temperature compensation; A replaceable probe array is provided within the multi-channel probe test station, and the replaceable probe array forms an ohmic contact with the gas sensor under test. The response electrical signals of the gas sensor under test under complex working conditions are dynamically acquired, analyzed and calibrated using a high-precision semiconductor analyzer, and finally the test results of the electrical signal characteristics of the gas sensor under test under complex working conditions are output. The vacuum generating unit is connected to the multi-channel probe test station for cleaning.

5. A dynamic calibration system for a gas sensor, manufactured based on the gas sensor testing method according to any one of claims 1 to 4, characterized in that, The gas sensor dynamic calibration system includes: The gas supply unit includes a gas cylinder, a flow controller, a humidity control device, and a dynamic gas mixing device with a temperature controller. The gas dynamic mixing device is provided with an inlet and an outlet. The gas cylinder is connected to the inlet via the flow controller, and the humidity control device is connected to the gas dynamic mixing device. A pressure control unit has an input terminal and an output terminal, wherein the input terminal is connected to the output port; A multi-channel probe test station is connected to the output terminal; The gas circuit control unit has a first solenoid valve and a third solenoid valve. The first solenoid valve is located between the output port and the input port, and the third solenoid valve is located between the output port and the multi-channel probe test station. The signal processing unit is connected to the multi-channel probe test station and is adapted to collect the electrical signal changes of the gas sensor under test located on the multi-channel probe test station.

6. The gas sensor dynamic calibration system as described in claim 5, characterized in that, The gas cylinder includes a detection gas cylinder and a background gas cylinder; the flow controller includes a detection flow controller and a background flow controller; and the input port includes a detection input port and a background input port. The pneumatic control unit further includes a second solenoid valve, which is connected in series with the first solenoid valve and is located between the first solenoid valve and the input terminal. The detection gas cylinder is connected to the detection input port via the detection flow controller. The background gas cylinder is connected to the background inlet via the background flow controller. The second solenoid valve is connected to the background flow controller.

7. The gas sensor dynamic calibration system as described in claim 6, characterized in that, The signal processing unit includes a high-precision semiconductor analyzer and a BNC connector. The high-precision semiconductor analyzer is connected to the multi-channel probe test station via the BNC connector. The multi-channel probe test station has a replaceable probe array.

8. The gas sensor dynamic calibration system as described in claim 7, characterized in that, The pressure control unit includes a pressure storage cylinder, a pressure sensor, and a digital pressure gauge. The pressure sensor is located in the pressure storage cylinder, and the digital pressure gauge is located in the pressure storage cylinder. Both the input terminal and the output terminal are located in the pressure storage cylinder.

9. The gas sensor dynamic calibration system as described in claim 8, characterized in that, It also includes an environmental simulation unit. The environmental simulation unit is connected to the multi-channel probe test station.

10. The gas sensor dynamic calibration system as described in claim 9, characterized in that, It also includes a vacuum generating unit and a programmable controller. The vacuum generating unit includes a vacuum pump, a vacuum storage cylinder, and a vacuum pressure gauge. The vacuum pressure gauge is installed in the vacuum storage cylinder, and the vacuum pump is connected to the vacuum storage cylinder. The vacuum gas storage cylinder is connected to the multi-channel probe test station. The gas path control unit also includes a fourth solenoid valve, which is located between the vacuum gas storage cylinder and the multi-channel probe test station. The first solenoid valve, the second solenoid valve, the third solenoid valve, and the fourth solenoid valve are all electrically connected to the programmable controller.

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