High-resolution LDI photoresist resin curing system

Abstract

The invention relates to the technical field of semiconductor manufacturing equipment, and discloses a high-resolution LDI photoresist resin curing system which comprises an optical path calibration module, an energy regulation and control module, a temperature compensation module and a feedback control module. The light path calibration module constructs a precise light path network through a laser transmitter, a collimating lens group, a beam splitter prism and a light intensity sensor; the energy regulation and control module analyzes photoresist energy absorption distribution in real time and judges compensation requirements; the temperature compensation module identifies preheating and stabilizing stages and measures and calculates temperature gradient distribution; and the feedback control module dynamically adjusts the laser power and the lens group position according to the temperature gradient data. The system realizes precise calibration of an optical path, uniform energy distribution and stable temperature control through cooperation of multiple modules, remarkably improves the photoresist curing resolution and the process consistency, and is suitable for manufacturing of high-precision semiconductors.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of semiconductor manufacturing equipment, in particular to a high-resolution LDI photoresist resin curing system. BACKGROUND

[0002] In the field of semiconductor manufacturing, photolithography technology is one of the core processes of chip production, and its resolution directly determines the fineness of integrated circuits. Traditional photoresist resin curing systems mainly rely on ultraviolet light sources or electron beams, but there are problems such as uneven energy distribution and inaccurate temperature gradient control, which leads to poor photoresist curing effect and affects the performance of the final device. With the development of integrated circuits towards higher integration and smaller line width, the precision requirements of the photoresist curing process are increasingly stringent.

[0003] In the prior art, the photoresist curing system usually uses a laser light source with fixed energy output, lacking real-time monitoring and adjustment capabilities for the state of the optical path. For example, the light intensity and wavelength output by the laser emitter may shift due to changes in environmental temperature or aging of optical elements, which in turn leads to uneven absorption of energy by the photoresist and defects in the curing effect. In addition, uneven temperature distribution in the curing cavity also affects the curing rate and topography of the photoresist, and traditional systems often rely on experience to set temperature parameters, making it difficult to dynamically adapt to process changes.

[0004] To solve these problems, some research attempts to introduce a feedback control mechanism, but most of the schemes only adjust a single parameter (such as light intensity or temperature), lacking the ability to optimize multiple modules collaboratively. For example, some systems monitor the energy distribution through light intensity sensors, but do not combine temperature compensation mechanisms, leading to failure of optical path calibration in high temperature environments. Some other systems integrate temperature control functions, but do not consider the linkage between energy regulation and optical path state, making it impossible to achieve high-resolution curing effect.

[0005] Therefore, a high-resolution LDI photoresist resin curing system that integrates optical path calibration, energy regulation, temperature compensation, and feedback control is needed to improve the uniformity and precision of photoresist curing and meet the needs of advanced semiconductor manufacturing. SUMMARY

[0006] The purpose of the present application is to provide a high-resolution LDI photoresist resin curing system to solve the problems raised in the background art.

[0007] To achieve the above purpose, the present application provides the following technical solution: a high-resolution LDI photoresist resin curing system, the system comprising: an optical path calibration module, an energy regulation module, a temperature compensation module, and a feedback control module; The light path calibration module is based on the laser emitter, the collimating lens group, the light splitting prism, the light intensity sensor and the communication bus arranged inside the curing cavity, and constructs a precise light path calibration network for the photoresist curing. The energy regulation module analyzes the energy absorption distribution of the photoresist in the curing cavity according to the real-time light intensity data and wavelength data output by the laser emitter, and determines the energy compensation demand in the curing cavity in real time according to the analysis result. The temperature compensation module is used to identify the preheating stage and the stable stage of the curing cavity, and calculate the temperature gradient distribution in the curing cavity in combination with the historical operation parameters of the laser emitter. The feedback control module feeds back the output power of the laser emitter and the position state of the collimating lens group according to the temperature gradient distribution in the curing cavity calculated by the temperature compensation module.

[0008] Preferably, the output end of the laser emitter is connected with the input end of the collimating lens group through an optical fiber transmission link, the output end of the collimating lens group is connected with the input end of the light splitting prism through an optical channel, and the output end of the light splitting prism is connected with the input end of the light intensity sensor through a detection light path. The output ends of the light intensity sensor and the temperature compensation module are connected with the input end of the light path calibration module through a communication bus, the light path calibration module is used to collect the light intensity attenuation data, the wavelength shift data of the light intensity sensor, and the temperature fluctuation data of the temperature compensation module, the light intensity attenuation data includes incident light intensity and exit light intensity, the wavelength shift data is a numerical value ±1 or a numerical value 0, when the wavelength shift data is the numerical value ±1, it indicates that the laser emitter or the collimating lens group is in a shift state, and when the wavelength shift data is the numerical value 0, it indicates that the laser emitter or the collimating lens group is in a calibration state. The output end of the laser emitter is connected with the input end of the energy regulation module through an optical fiber transmission link, and the energy regulation module is used to collect the energy parameters of the laser emitter, including the exposure energy density, the spot uniformity and the wavelength stability. The output ends of the energy regulation module and the light path calibration module are connected with the input end of the feedback control module through a communication bus, and the output end of the feedback control module is connected with the input ends of the laser emitter and the collimating lens group through a control bus.

[0009] Preferably, the energy regulation module includes a light intensity anomaly identification unit, a wavelength matching unit and an energy compensation evaluation unit. The light intensity anomaly identification unit calculates the total amount of energy that can be effectively absorbed in the curing cavity and the total amount of energy actually received by the curing cavity according to the real-time light intensity data and wavelength data output by the laser emitter, and judges whether there is light intensity anomaly in the curing cavity according to the calculation result. The wavelength matching unit calculates the real-time wavelength mismatch coefficient of the curing cavity according to the judgment result of the light intensity anomaly recognition unit on whether the curing cavity has light intensity anomaly; The energy compensation evaluation unit determines the real-time energy compensation demand level of the curing cavity according to the real-time distribution characteristic value of the energy in the curing cavity.

[0010] Preferably, the specific method for the light intensity anomaly recognition unit to calculate the total amount of energy that can be effectively absorbed in the curing cavity and the total amount of energy actually received by the curing cavity is as follows: Randomly select an exposure time point, and collect the real-time light intensity data and wavelength data output by the laser emitter at an interval period; Calculate the sum of the light spot uniformity cumulative value and the wavelength stability cumulative value of the laser emitter at the time point, and calculate the product of the sum, the effective irradiation area of the laser emitter at the time point, and the interval period, to obtain the total amount of energy that can be effectively absorbed by the curing cavity in the time period; Calculate the product of the exposure energy density output by the laser emitter at the time point, the curing cavity ambient temperature, and the effective irradiation area, and calculate the product of the product and the interval period, to obtain the total amount of energy actually received by the curing cavity in the time period; If the total amount of energy that can be effectively absorbed is greater than the total amount of energy actually received, it is considered that the curing cavity has light intensity anomaly in the time period; If the total amount of energy that can be effectively absorbed is less than or equal to the total amount of energy actually received, it is considered that the curing cavity does not have light intensity anomaly in the time period.

[0011] Preferably, the specific method for the wavelength matching unit to calculate the real-time wavelength mismatch coefficient of the curing cavity is as follows: When the curing cavity has light intensity anomaly in the time period, calculate the difference between the total amount of absorbed energy and the total amount of actually received energy, and calculate the ratio between the difference and the total amount of absorbed energy, to obtain the wavelength mismatch coefficient of the curing cavity in the time period, which is greater than 0 and less than 1; When the curing cavity does not have light intensity anomaly in the time period, the wavelength mismatch coefficient of the curing cavity in the time period is 0.

[0012] Preferably, the specific method for the energy compensation evaluation unit to determine the real-time energy compensation demand level of the curing cavity is as follows: Take the wavelength mismatch coefficient of the curing cavity in the time period as the distribution characteristic value of the curing cavity in the time period, and mark the historical distribution characteristic values of the curing cavity in the historical time periods in the coordinate system, wherein the current time point represents the current time; In the coordinate system, the latest critical time point of the historical time period is searched, and the specific searching method is as follows: the latest critical time point is recorded as a specific time point, the distribution characteristic value of the curing cavity in an interval period before the specific time point is 0, and the distribution characteristic value of the curing cavity in a time period from the specific time point to the current time point is greater than 0; The interval period between the specific time point and the current time point is calculated, and the ratio between the interval period and the energy duration deviation limit period is calculated to obtain the energy compensation coefficient of the curing cavity at the current time point.

[0013] Preferably, the feedback control module comprises a regulation mode judgment unit and a strategy generation unit. The regulation mode judgment unit judges the regulation mode of the curing cavity at the current time point according to the real-time energy compensation coefficient of the curing cavity, when the compensation coefficient is greater than 0 and less than 0.7, it is judged that the regulation mode of the curing cavity at the current time point is early warning regulation, and when the compensation coefficient is greater than or equal to 0.7 and less than or equal to 1, it is judged that the regulation mode of the curing cavity at the current time point is emergency regulation. The strategy generation unit analyzes the energy distribution of the curing cavity in the current time period according to the regulation mode of the curing cavity at the current time point and the running parameters of the laser emitter in the historical time period.

[0014] Preferably, the specific method for the strategy generation unit to analyze the energy distribution of the curing cavity is as follows: When the regulation mode is judged as early warning regulation: The total amount of energy that can be absorbed by the curing cavity in the historical time period is calculated, the total amount of energy actually received by the curing cavity in the historical time period is determined, and the ratio between the interval period and the total amount of energy actually received by the curing cavity in the historical time period is calculated to obtain the power adjustment value of the laser emitter at the current time point, wherein the energy loss represents the energy loss generated in the process of transmitting the light intensity data from the laser emitter to the curing cavity. The total amount of energy that can be absorbed by the curing cavity in the current time period is the product of the power adjustment value of the laser emitter at the current time point and the interval period, the supplemental energy of the standby light source to the curing cavity at the current time point is 0, and the energy supply of the laser emitter to the curing cavity is the total amount of energy that can be absorbed in the current time period. When the regulation mode is judged as emergency regulation: At the current time point, the supplemental energy of the standby light source to the curing cavity is a set value, and the energy supply of the laser emitter to the curing cavity is 0, wherein the energy loss represents the energy loss generated in the process of transmitting the monitoring data from the standby light source to the curing cavity.

[0015] Preferably, when the feedback control module determines that the control mode is early warning control, the output power of the laser emitter is remotely controlled at the current time point through the control bus, and the output power value after the control is the power adjustment value. When the control mode is determined to be emergency control, the position state of the collimating lens group is remotely controlled at the current time point through the control bus, and the position data of the collimating lens group after the control is the initial value.

[0016] Preferably, the specific method for measuring the temperature gradient distribution in the curing cavity by the temperature compensation module is as follows: When the curing cavity is in the preheating stage, the difference between the real-time temperature value of the inner wall of the curing cavity and the target temperature value is calculated, and the ratio between the difference and the preheating time is calculated to obtain the power adjustment coefficient of the heating element. When the curing cavity is in the stable stage, the temperature difference between the center region and the edge region of the curing cavity is calculated, and the product of the temperature difference and the sampling frequency of the temperature sensor is calculated to obtain the power adjustment coefficient of the cooling element.

[0017] Compared with the prior art, the present application has the following advantages: The high-resolution LDI photoresist curing system provided by the present application significantly improves the precision and uniformity of photoresist curing through the cooperation of multiple modules. The system uses a light path calibration module to construct a precise light path network, which monitors the state of the laser emitter, collimating lens group and beam splitter in real time, ensuring that the light path is always in the best calibrated state. The data acquisition function of the light intensity sensor and the temperature compensation module further enhances the stability of the system, which can detect light intensity attenuation and wavelength shift in time, and dynamically adjust the output power of the laser emitter and the position of the collimating lens group through the feedback control module, effectively avoiding curing defects caused by optical element offset or environmental changes.

[0018] The energy control module accurately determines the energy compensation requirement by analyzing the energy absorption distribution of the photoresist in real time, combining the light intensity anomaly recognition and wavelength matching functions. This module can distinguish between early warning control and emergency control mode, dynamically adjust the power of the laser emitter or enable the standby light source according to the energy compensation coefficient, to ensure the uniformity of energy distribution in the curing cavity. The temperature compensation module identifies the preheating stage and the stable stage, and calculates the temperature gradient distribution based on the historical operation parameters, to provide accurate basis for feedback control, thereby optimizing the power adjustment of the heating and cooling elements and reducing the impact of temperature fluctuations on the curing effect.

[0019] The feedback control module of the system realizes closed-loop regulation, can quickly respond according to real-time data, and avoids the hysteresis problem of traditional open-loop control. For example, in the early warning regulation mode, the system maintains energy balance by fine-tuning the laser power; in the emergency regulation mode, the light path state is quickly restored by resetting the position of the collimating lens group. This flexible regulation strategy not only improves the process stability, but also prolongs the service life of the key components of the equipment.

[0020] In addition, the modular design of the system facilitates maintenance and upgrading, and the integration of the communication bus and the control bus simplifies the data transmission and instruction execution process, reducing the complexity of the system. Overall, the system improves the resolution of the photoresist curing while taking into account production efficiency and equipment reliability, providing an efficient and accurate solution for semiconductor manufacturing. BRIEF DESCRIPTION OF DRAWINGS

[0021] Figure 1 The working principle diagram of the high-resolution LDI photoresist resin curing system described in the present application; Figure 2 Flowchart for light intensity anomaly identification unit calculation; Figure 3 Flowchart for energy compensation evaluation unit determination; Figure 4 Flowchart for strategy generation unit energy distribution analysis. DETAILED DESCRIPTION

[0022] The technical solutions in the embodiments of the present application will be described clearly and completely below with reference to the accompanying drawings in the embodiments of the present application. Obviously, the described embodiments are only a part of the embodiments of the present application, not all. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor are within the scope of protection of the present application.

[0023] Please refer to Figures 1-4 The present application relates to a high-resolution LDI photoresist resin curing system, which includes a system containing a light path calibration module, an energy regulation module, a temperature compensation module and a feedback control module. The specific implementation steps are as follows: The light path calibration module relies on the laser emitter, the collimating lens group, the light splitting prism, the light intensity sensor and the communication bus deployed inside the curing cavity to build a precise light path calibration network for photoresist curing. The energy regulation module analyzes the energy absorption distribution of the photoresist in the curing cavity according to the real-time light intensity data and wavelength data output by the laser emitter, and determines the energy compensation requirement in the curing cavity in real time according to the analysis result. The temperature compensation module is used to identify the preheating stage and the stable stage of the curing cavity, and calculate the temperature gradient distribution in the curing cavity in combination with the historical operation parameters of the laser emitter. The feedback control module feeds back the output power of the laser emitter and the position state of the collimating lens group according to the temperature gradient distribution in the curing cavity calculated by the temperature compensation module.

[0024] Embodiment 1: The various components in the system work cooperatively through specific connection methods and data transmission paths. The output end of the laser emitter is connected to one end of the optical fiber transmission link, and the other end of the optical fiber transmission link is connected to the input end of the collimating lens group. This connection method enables the light beam emitted by the laser emitter to be stably transmitted to the collimating lens group through the optical fiber transmission link. The output end of the collimating lens group is connected to the input end of the light splitting prism through an optical channel, which provides a specific light path environment for the transmission of the light beam and ensures that the light beam can accurately enter the light splitting prism. The output end of the light splitting prism is connected to the input end of the light intensity sensor through a detection light path, which is used to guide part of the light beam split by the light splitting prism into the light intensity sensor for real-time monitoring of the light intensity.

[0025] The output end of the light intensity sensor is connected to the input end of the light path calibration module through the communication bus, and the output end of the temperature compensation module is also connected to the input end of the light path calibration module through the communication bus. As a data transmission channel, the communication bus can accurately transmit the light intensity attenuation data, wavelength shift data and temperature fluctuation data measured by the temperature compensation module to the light path calibration module. The light path calibration module collects and processes these data, wherein the light intensity attenuation data includes incident light intensity and exit light intensity. By analyzing these two parameters, the energy loss of the light beam during transmission can be understood. The wavelength shift data is a numerical value ±1 or a numerical value 0. When the data is a numerical value ±1, it indicates that the position or state of the laser emitter or the collimating lens group has shifted, which may affect the wavelength stability and transmission accuracy of the light beam. When the wavelength shift data is a numerical value 0, it indicates that the laser emitter or the collimating lens group is in a calibrated state, which can ensure the wavelength stability and accurate transmission path of the light beam.

[0026] In addition, the output end of the laser emitter is also connected with the input end of the energy regulation module through another optical fiber transmission link, which is used to transmit the energy parameters of the laser emitter to the energy regulation module. The energy parameters mainly include exposure energy density, spot uniformity and wavelength stability, which are crucial for evaluating the working state of the laser emitter and the energy distribution in the curing cavity. The energy regulation module collects and analyzes these energy parameters in order to subsequently judge and handle the energy absorption distribution in the curing cavity.

[0027] The output end of the energy regulation module is connected with the input end of the feedback control module through a communication bus, and the output end of the optical path calibration module is also connected with the input end of the feedback control module through the communication bus. The communication bus transmits the energy compensation demand information analyzed by the energy regulation module and the optical path state information processed by the optical path calibration module to the feedback control module. The output end of the feedback control module is connected with the input end of the laser emitter and the input end of the collimating lens group through a control bus respectively, and the control bus is used to transmit the control instructions generated by the feedback control module, so as to realize the feedback control of the output power of the laser emitter and the position state of the collimating lens group.

[0028] In actual work process, the light beam emitted by the laser emitter is transmitted to the collimating lens group through the optical fiber transmission link, and the collimating lens group collimates the light beam to make it become parallel light beam, so as to improve the transmission accuracy and uniformity of the light beam. The collimated light beam enters the beam splitter prism through the optical channel, and the beam splitter prism divides the light beam into light beams in different directions. Part of the light beam enters the light intensity sensor through the detection light path, and the light intensity sensor collects the incident light intensity and exit light intensity data in real time and transmits these data to the optical path calibration module through the communication bus. The optical path calibration module evaluates and calibrates the state of the optical path according to the light intensity attenuation data and the wavelength shift data, so as to ensure the accuracy and stability of the optical path.

[0029] At the same time, the temperature compensation module identifies the preheating stage and the stable stage of the curing cavity, and calculates the temperature gradient distribution in the curing cavity combined with the historical running parameters of the laser emitter, and transmits the temperature fluctuation data to the optical path calibration module through the communication bus. The optical path calibration module comprehensively considers the light intensity data and the temperature data to further optimize the effect of optical path calibration.

[0030] The energy regulation module collects the exposure energy density, spot uniformity and wavelength stability of the laser emitter through the optical fiber transmission link, and analyzes the energy absorption distribution of the photoresist in the curing cavity. According to the analysis result, the energy compensation demand in the curing cavity is determined in real time, and the related information is transmitted to the feedback control module through the communication bus.

[0031] The feedback control module generates a corresponding control strategy according to the received energy compensation demand information and optical path state information. When it is necessary to adjust the output power of the laser emitter, the feedback control module sends a power adjustment instruction to the laser emitter through the control bus; when it is necessary to adjust the position state of the collimating lens group, the feedback control module sends a position adjustment instruction to the collimating lens group through the control bus, thereby realizing precise control of the curing system and ensuring that the photoresist can be cured under appropriate energy and temperature conditions, improving curing quality and resolution.

[0032] Through the close cooperation and data interaction between various modules, the whole system realizes precise regulation of the optical path, energy and temperature, ensures that the high-resolution LDI photoresist curing system can operate stably and efficiently, and meets the requirements of high precision and high resolution in the photoresist curing process. In the data transmission process, the communication bus and the control bus play an important role in ensuring the accuracy of the data and the real-time of the transmission, so that each module can obtain the required information in time and make corresponding response. The connection mode and working process of each component cooperate with each other to form a complete curing system, providing reliable technical support for the curing of photoresist.

[0033] Example 2: The energy regulation module, as the core part of the system for realizing precise energy management, is composed of a light intensity abnormality identification unit, a wavelength matching unit and an energy compensation evaluation unit. Each unit realizes dynamic monitoring of the energy distribution in the curing cavity and compensation demand determination through specific data processing logic and interaction process. The work of the light intensity abnormality identification unit starts from the collection of real-time light intensity data and wavelength data output by the laser emitter. Its specific operation is to randomly select an exposure time point and continuously acquire the above-mentioned data at a preset interval period. These data contain the intensity change and wavelength stability information of the laser in the transmission process, which is the basis for subsequent energy calculation.

[0034] After obtaining the data, the light intensity anomaly identification unit needs to complete two key energy calculations. First, the total amount of energy that can be effectively absorbed by the curing cavity in this time period is calculated: the sum of the spot uniformity cumulative value and the wavelength stability cumulative value of the laser emitter at this time point is calculated, which reflects the comprehensive quality of the spatial distribution and wavelength characteristics of the laser beam; then the sum is multiplied by the effective irradiation area and the interval period of the laser emitter at this time point, and the product obtained is the total amount of energy that can be effectively absorbed, which takes into account the spatial distribution, wavelength stability, and time and area factors of the laser. Second, the total amount of energy actually received by the curing cavity is calculated: the exposure energy density output by the laser emitter at this time point, the ambient temperature of the curing cavity, and the effective irradiation area are multiplied, where the ambient temperature affects the energy absorption efficiency of the photoresist; then the product is multiplied by the interval period, thereby obtaining the total amount of energy actually received, which represents the actual energy obtained by the curing cavity after considering environmental factors.

[0035] After completing the two energy calculations, the light intensity anomaly identification unit compares and judges the two: if the total amount of energy that can be effectively absorbed is greater than the total amount of energy actually received, it indicates that there is abnormal loss in the energy transmission or absorption process, and it is determined that there is a light intensity anomaly in the curing cavity in this time period; if the former is less than or equal to the latter, it is considered that the energy transmission and absorption process is normal, and there is no light intensity anomaly. This judgment logic provides a key basis for subsequent wavelength matching calculation and energy compensation.

[0036] The wavelength matching unit works based on the judgment result of the light intensity anomaly identification unit. When it is determined that there is a light intensity anomaly, the unit first calculates the difference between the total amount of absorbed energy and the total amount of energy actually received, which reflects the specific amount of energy loss; then the difference is compared with the total amount of absorbed energy, and the ratio obtained is the wavelength mismatch coefficient, which is between 0 and 1, and its numerical value directly reflects the deviation of the wavelength matching degree, the larger the coefficient, the more significant the energy loss caused by wavelength mismatch. When there is no light intensity anomaly, the wavelength mismatch coefficient is directly set to 0, indicating that the wavelength matching is good at this time and has no negative impact on energy absorption.

[0037] The energy compensation evaluation unit works on the basis of the wavelength mismatch coefficient output by the wavelength matching unit. The unit first takes the wavelength mismatch coefficient in the current time period as the distribution characteristic value, and labels the historical distribution characteristic values of the curing cavity in the historical time period in the coordinate system, taking the current time point as the coordinate origin, to construct a two-dimensional coordinate system of time-characteristic value. Then, the nearest critical time point in the historical time period is found in the coordinate system, with the specific standard being: the distribution characteristic value of the previous interval period of the specific time point is 0, and all distribution characteristic values from the specific time point to the current time point are greater than 0, which aims to determine the starting boundary of energy deviation.

[0038] After finding the nearest critical time point, the energy compensation evaluation unit calculates the interval period between the specific time point and the current time point, and then divides the interval period by the preset energy duration deviation limit period to obtain the quotient, which is the energy compensation coefficient of the curing cavity at the current time point. The coefficient comprehensively considers the duration of energy deviation and the limit period allowed by the system, and can quantitatively reflect the urgency of the current energy compensation demand, providing a key parameter for the judgment of the regulation mode of the subsequent feedback control module.

[0039] During the entire energy regulation process, the data transmission between units has strict timing and logic. The calculation results of the light intensity anomaly recognition unit directly affect the coefficient generation of the wavelength matching unit, and the output of the wavelength matching unit is used as the core input parameter of the energy compensation evaluation unit. The three are closely linked, forming a complete chain from energy anomaly detection to compensation demand evaluation. At the same time, in the data processing process, each unit needs to rely on the real-time output of the light intensity, wavelength and other basic parameters of the laser emitter, as well as the environmental temperature, effective irradiation area and other environmental parameters of the curing cavity. The accuracy and real-time performance of these parameters directly affect the accuracy of energy regulation.

[0040] In addition, the energy regulation module and other modules in the system (such as the optical path calibration module and the feedback control module) realize data interaction through the communication bus. The laser energy parameters collected by the light intensity anomaly recognition unit need to be obtained from the laser emitter through the optical fiber transmission link, and the energy compensation coefficient obtained by evaluation needs to be transmitted to the feedback control module to trigger the corresponding regulation strategy. This inter-module cooperative working mechanism ensures the organic combination of energy regulation process and optical path calibration, temperature compensation and other links, thereby realizing the overall optimization control of the curing system.

[0041] It is worth noting that each unit of the energy regulation module uses a dynamic calculation method based on time period when processing data, which can respond to changes in laser parameters and curing environment in real time. For example, the setting of the interval period directly affects the frequency of data acquisition and the timeliness of energy calculation, and the labeling of historical characteristic values in the coordinate system and the finding of critical time points reflect the analysis ability of the historical trend of energy deviation. This dynamic analysis mechanism enables the system to adapt to energy regulation requirements under different working conditions, improving the stability and reliability of the curing process.

[0042] The implementation of the whole energy regulation module builds a complete energy management system through accurate identification of light intensity abnormalities, dynamic calculation of wavelength matching coefficients, and scientific evaluation of energy compensation needs. This system can monitor the energy distribution state in the curing cavity in real time, accurately determine the cause of energy abnormalities, and quantitatively evaluate the compensation needs, providing accurate decision-making basis for subsequent feedback control, thereby ensuring that the photoresist can obtain stable and suitable energy input during the curing process, and ultimately achieving high-resolution curing effect.

[0043] Embodiment 3: The feedback control module, as the core component of the system to realize closed-loop control, is composed of a regulation mode judgment unit and a strategy generation unit. Through the analysis of the energy compensation coefficient and the integration of historical operating parameters, it realizes the dynamic regulation of the energy distribution of the curing cavity. The work of the regulation mode judgment unit starts from the acquisition of the real-time energy compensation coefficient of the curing cavity. This coefficient is calculated by the energy compensation evaluation unit based on the wavelength mismatch coefficient and historical data, reflecting the degree and duration of the current energy deviation. The regulation mode judgment unit determines the regulation mode according to the preset threshold range: when the compensation coefficient is greater than 0 and less than 0.7, it is determined as the early warning regulation mode, indicating that the energy deviation is in the initial stage and has not yet had a significant impact on the curing effect, but timely intervention is needed; when the compensation coefficient is greater than or equal to 0.7 and less than or equal to 1, it is determined as the emergency regulation mode, at which time the energy deviation is already quite serious and emergency measures need to be taken to avoid a decline in curing quality.

[0044] Based on the regulation mode judgment, the strategy generation unit carries out energy distribution analysis combined with historical operating parameters of the laser emitter. When the early warning regulation mode is determined, the strategy generation unit first calculates the total amount of energy that can be absorbed by the curing cavity in the historical time period. This total amount is determined based on parameters such as the output power of the laser emitter, exposure time, and effective irradiation area. At the same time, the energy loss is calculated based on the actual amount of energy received by the curing cavity. This loss includes factors such as transmission loss during the transmission of light intensity data from the laser emitter to the curing cavity and differences in photoresist absorption efficiency. Subsequently, the energy loss is divided by the interval period to obtain the power adjustment value of the laser emitter at the current time point. This adjustment value is used to compensate for energy loss to maintain energy balance.

[0045] In the energy distribution of the current time period, the total amount of energy that can be absorbed by the curing cavity is the product of the power adjustment value of the laser emitter at the current time point and the interval period. At this time, the supplemental energy of the standby light source is set to 0, and the laser emitter undertakes all energy supply tasks. This distribution method ensures energy supply while gradually correcting energy deviation by fine-tuning laser power, avoiding the disturbance of large power adjustments to the curing process.

[0046] When the emergency regulation mode is determined, the strategy generation unit adopts a more aggressive energy allocation strategy. At the current time point, the supplementary energy of the backup light source is set to a preset fixed value, which is determined according to the curing process requirements and historical experience, and can quickly make up for serious energy deviation; while the energy supply of the laser emitter is set to 0, and the work is temporarily stopped to avoid further deterioration of the curing quality due to continuous energy deviation. The energy loss at this time mainly refers to the loss generated in the process of monitoring data transmission from the backup light source to the curing cavity, such as the reflection loss of optical elements and the transmission loss of optical fibers, and the strategy generation unit has compensated for this loss when setting the backup light source supplementary energy, ensuring that the actual energy received by the curing cavity meets the process requirements.

[0047] During the entire feedback control process, there is a strict data interaction logic between the regulation mode judgment unit and the strategy generation unit. The determination result of the regulation mode directly determines the energy allocation method of the strategy generation unit, and the strategy generation unit needs to call historical running parameters of the laser emitter (such as historical output power, exposure energy density, wavelength stability, etc.) in the analysis process to ensure the rationality and adaptability of the energy allocation strategy. For example, when calculating the power adjustment value, the effect data of historical power adjustment needs to be referred to to avoid energy fluctuation caused by repeated adjustment; when setting the backup light source supplementary energy, the energy demand data during the historical emergency regulation needs to be referred to to ensure that the supplementary energy can effectively make up for the deviation.

[0048] The feedback control module and other modules of the system (such as the energy regulation module and the optical path calibration module) realize data interaction through the communication bus. The energy compensation coefficient required by the regulation mode judgment unit is provided by the energy compensation evaluation unit of the energy regulation module, and the strategy generation unit needs to obtain the optical path state data (such as light intensity attenuation data and wavelength shift data) of the optical path calibration module when analyzing energy allocation to comprehensively evaluate the energy transmission efficiency. In addition, the regulation strategy generated by the feedback control module needs to be transmitted to the laser emitter and the collimating lens group through the control bus to realize real-time control of hardware devices.

[0049] It is worth noting that the energy allocation strategies of the feedback control module in the two regulation modes reflect different control logics. The pre-warning regulation mode adopts gradual adjustment, which realizes energy balance through continuous fine-tuning of laser power, and is suitable for scenarios with small energy deviation, which can complete energy correction without interrupting the curing process; the emergency regulation mode adopts the way of switching the energy supply subject, which quickly supplements energy through the backup light source, and is suitable for emergency situations with serious energy deviation, which can restore energy supply in the shortest time and avoid curing failure. This hierarchical regulation mechanism not only guarantees the stability of the system, but also improves the ability to respond to emergencies.

[0050] In the implementation process, the parameter settings of the feedback control module (such as the control mode threshold, the standby light source energy supplement setting value, and the interval period) need to be optimized according to the specific curing process requirements and equipment characteristics. For example, for high-precision curing scenarios, the threshold of the early warning control can be set to a lower value (such as 0.5) to trigger energy correction in advance; for photoresist with high energy stability requirements, the energy supplement setting value of the standby light source can be appropriately increased to ensure energy supply during emergency control. This customizable control strategy enables the system to adapt to different types of photoresist curing needs.

[0051] The implementation of the entire feedback control module builds a complete closed-loop control system through accurate judgment of the control mode and scientific generation of the energy distribution strategy. This system can respond to energy deviations in real time, take appropriate control measures according to the deviation level, and ensure stable energy input in different working conditions, thereby ensuring the consistency and high-resolution requirements of photoresist curing. The coordinated work between modules and the organic combination with other system components further improves the intelligence level and reliability of the entire curing system.

[0052] Example 4: After the feedback control module determines the control mode, it needs to implement accurate adjustment of the system through specific hardware control instructions. When the control mode judgment unit determines that the current compensation coefficient is greater than 0 and less than 0.7, it determines that the early warning control mode is triggered, and the feedback control module sends a power adjustment instruction to the laser emitter through the control bus. For example, assume that the energy compensation evaluation unit calculates an energy compensation coefficient of 0.5 in a certain exposure time period, which falls within the early warning control range. At this time, the strategy generation unit calculates a power adjustment value of 105% of the original output power (assuming the original power is 100 mW, then the adjusted value is 105 mW) based on historical data. The feedback control module transmits this power adjustment value to the control unit of the laser emitter through the control bus, and the laser emitter adjusts the internal drive circuit or current output after receiving the instruction, so that the output power stabilizes at 105 mW.

[0053] In this process, the control bus uses a specific communication protocol (such as SPI, CAN, or Ethernet protocol) to ensure the real-time and accuracy of instruction transmission. Taking the SPI protocol as an example, the feedback control module acts as the host and communicates with the slave chip of the laser emitter through the clock line, data line, and chip select line, encodes the power adjustment value into a specific binary data frame, and sends it out. The control chip of the laser emitter decodes and verifies the received data frame, confirms that it is correct, and then executes the power adjustment operation, and notifies the control module that the adjustment has been completed through a feedback signal. This closed-loop control mechanism ensures the accuracy of power adjustment and avoids control failure due to transmission delay or data errors.

[0054] When the regulation mode judging unit determines that the compensation coefficient is greater than or equal to 0.7 and less than or equal to 1, enters the emergency regulation mode, the feedback control module turns the regulation target to the position state of the collimating lens group. For example, if the energy compensation coefficient reaches 0.8 at a certain moment, it indicates that the energy deviation is serious, at this time the strategy generation unit determines that the standby light source needs to be started and the optical path needs to be adjusted. The feedback control module sends a position adjustment instruction to the driving mechanism of the collimating lens group through the control bus, requiring the position to be restored to the initial value. The initial value here refers to the standard position parameter determined by the system during factory calibration or first debugging, which is usually stored in the register or non-volatile memory of the feedback control module, such as X-axis offset 0 mm, Y-axis offset 0 mm, tilt angle 0°, etc.

[0055] The driving mechanism of the collimating lens group is usually composed of a stepping motor or a servo motor combined with a precision guide rail. When the control bus transmits the position adjustment instruction, the controller of the driving mechanism parses the initial position parameter in the instruction, calculates the difference between the current position and the initial position, and generates a motor control pulse sequence. Taking a stepping motor as an example, the controller calculates the number of steps and direction that need to be rotated according to the difference, controls the motor to rotate step by step through the pulse signal, drives the collimating lens group to move on the guide rail, and stops until it reaches the initial position. In this process, the position sensor (such as a grating ruler or an encoder) will monitor the position of the lens group in real time and feed back the data to the controller, forming a position closed-loop control to ensure that the position adjustment accuracy reaches microns (such as ±5μm).

[0056] In the switching process of the two regulation modes, the feedback control module needs to follow strict timing logic. For example, when switching from early warning regulation to emergency regulation, the control module will first send an instruction to turn off the output of the laser emitter to avoid energy superposition or interruption when switching the energy supply subject; then start the standby light source and send the collimating lens group position adjustment instruction to ensure that the light beam of the standby light source can accurately pass through the adjusted optical path to the curing cavity. This timing control is achieved through the instruction queue and state feedback mechanism of the control bus. The execution state of each instruction (such as sent, executing, completed) will be monitored by the feedback control module in real time. If a certain instruction does not receive an execution completion signal within a specified time (such as more than 100ms), the control module will resend the instruction or trigger the fault alarm mechanism.

[0057] In practical applications, the control accuracy of the feedback control module is also affected by the hardware performance. For example, the power adjustment resolution of the laser transmitter determines the power adjustment accuracy during the early warning control. If the power adjustment resolution of a certain type of laser transmitter is 1 mW, when the power adjustment value is 105.3 mW, the actual output power will be quantized to 105 mW or 106 mW. Similarly, the accuracy of the position adjustment is determined by the precision of the driving mechanism of the collimating lens group. If the minimum movement step of the driving mechanism is 1 μm, the accuracy of the position adjustment is at most 1 μm. Therefore, during the system design stage, appropriate hardware components should be selected according to the solidification resolution requirements (e.g., the target resolution is 10 μm) to ensure that the accuracy of the feedback control meets the process requirements.

[0058] In addition, the feedback control module also needs to have anti-interference ability to avoid incorrect control instructions caused by electromagnetic interference or signal noise. The control bus usually uses shielded cables or differential signal transmission (such as RS-485) to reduce the influence of external interference on the signal. At the same time, at the software level, the feedback control module will perform CRC check or parity check on the received instructions and feedback signals to ensure data integrity. For example, the power adjustment value data frame transmitted by the control bus will contain a CRC check byte, and the laser transmitter will recalculate the CRC value after receiving the data and compare it with the received check byte. If they are not consistent, the data frame is discarded and a retransmission request is sent.

[0059] During long-term operation, the feedback control module also needs to consider the effects of device aging. For example, the output power of the laser transmitter may decrease over time, and the position of the collimating lens group may shift due to mechanical wear. Therefore, the system will trigger an automatic calibration program periodically (e.g., every 100 hours of operation), and the feedback control module will cooperate with the optical path calibration module to recalibrate the laser power and lens group position, update the initial position parameters and power reference values, and ensure the long-term stability of the control accuracy.

[0060] The entire control process of this embodiment realizes stable operation of the system under different energy deviation levels through precise control of the laser transmitter power and collimating lens group position by the feedback control module. The power fine adjustment in the early warning control mode can correct the energy deviation in the early stage and prevent the deviation from expanding. The optical path reset and standby light source switching in the emergency control mode can quickly restore the system to normal operation when the energy deviation is severe. The combination of the two ensures the continuity and reliability of the high-resolution LDI photoresist curing process. The high-speed data transmission of the control bus, the precise execution of the hardware driving mechanism, and the timing control and anti-interference design at the software level together form a complete technical chain for this implementation, which can meet the process requirements of high-precision solidification in actual production.

[0061] Example 5: The temperature compensation module plays an important role in accurately measuring the temperature gradient distribution in the high-resolution LDI photoresist curing system. Its implementation varies according to the different stages of the curing cavity, such as the preheating stage and the stable stage. For example, when the curing cavity starts and enters the preheating stage, the temperature compensation module will collect the temperature data of the inner wall of the curing cavity in real time. Assuming that the target temperature of the curing cavity is set to 80°C, in the early stage of preheating, the real-time temperature of the inner wall may be 25°C, at this time the temperature compensation module will calculate the difference between the real-time temperature value and the target temperature value, that is, 80°C-25°C=55°C.

[0062] The temperature compensation module will obtain the current preheating time. For example, from the start to the current time, the preheating has lasted for 10 minutes, the module will calculate the ratio of the above temperature difference and the preheating time, that is, 55°C ÷ 10 minutes = 5.5°C / minute, which is the power adjustment coefficient of the heating element. The role of this coefficient is to guide the heating element to adjust the output power to speed up or slow down the heating rate. If the calculated power adjustment coefficient is large, it means that the current heating speed is slow, and the power of the heating element needs to be increased; on the contrary, if the coefficient is small, the power of the heating element can be appropriately reduced to avoid the temperature overshoot caused by too fast heating.

[0063] In the actual operation of the preheating stage, the temperature compensation module will continuously collect temperature data and calculate the power adjustment coefficient at certain time intervals (such as every second), forming a dynamic adjustment mechanism. For example, when the preheating is carried out to 20 minutes, the inner wall temperature rises to 50°C, at this time the temperature difference is 30°C, the preheating time is 20 minutes, and the calculated power adjustment coefficient is 1.5°C / minute, which is significantly smaller than the coefficient at 10 minutes, indicating that the heating rate has been accelerated, at this time the module will send instructions to reduce the power of the heating element, making the heating process more stable and avoiding the temperature exceeding the target value.

[0064] When the temperature of the curing cavity reaches the target temperature and maintains for a period of time, the system enters the stable stage. At this time, the focus of the work of the temperature compensation module changes to monitor the temperature difference between the center region and the edge region of the curing cavity. For example, a curing cavity with a diameter of 300mm, in the stable stage, real-time temperature data is collected through temperature sensors distributed in the cavity (such as 1 in the center and 4 uniformly distributed at the edge). Assuming that the temperature of the center region is 80.5°C and the temperature of a certain edge region is 78.2°C, the temperature difference between the two is 80.5°C-78.2°C=2.3°C.

[0065] The temperature compensation module also acquires the sampling frequency of the temperature sensor, assuming it is 10 Hz (i.e., 10 data collections per second). The module multiplies the temperature difference by the sampling frequency, i.e., 2.3°C x 10 Hz = 23°C·Hz, to obtain the power adjustment coefficient of the cooling element. This coefficient is used to control the output power of the cooling element to reduce the temperature difference between the center and edge regions. If the temperature difference is large, the calculated coefficient will also be large, and the power of the cooling element needs to be increased to dissipate heat from the center region with a higher temperature; if the difference is small, the power of the cooling element is correspondingly reduced to maintain the stability of the temperature field.

[0066] In the continuous operation of the stable stage, the temperature compensation module updates the product of the temperature difference and the sampling frequency in real time to dynamically adjust the power of the cooling element. For example, after the system has been running for 30 minutes, the center temperature may have decreased slightly to 80.2°C, the edge temperature has risen to 79.0°C, and the temperature difference has narrowed to 1.2°C. At this time, the calculated power adjustment coefficient is 1.2°C x 10 Hz = 12°C·Hz, and the module will reduce the power of the cooling element according to this coefficient to avoid excessive cooling and cause the temperature field to become unbalanced.

[0067] When calculating the temperature gradient distribution, the temperature compensation module needs to interact with other modules in the system. In the preheating stage, the module needs to obtain historical operating parameters of the laser emitter, such as laser emission power, exposure time, etc., because these parameters will affect the temperature distribution in the curing cavity. For example, if the laser emitter has been running at a high power for a period of time in the preheating stage, it may cause the local temperature in the curing cavity to rise, and the module will consider these historical data when calculating the power adjustment coefficient to make the power adjustment of the heating element more accurate.

[0068] In the stable stage, the temperature compensation module also needs to refer to the historical operating parameters of the laser emitter to determine whether the change in the temperature gradient is related to the input of laser energy. For example, when the laser emitter continuously outputs at a high power for a certain period of time, it may cause the temperature in the center region to rise, and the module can more accurately determine the cause of the temperature difference by analyzing the historical parameters to more reasonably adjust the power of the cooling element.

[0069] The calculation results of the temperature compensation module are transmitted to the feedback control module through the communication bus as an important basis for regulating the output power of the laser emitter and the position state of the collimating lens group. For example, in the preheating stage, if the temperature compensation module calculates that the temperature is rising too slowly, the feedback control module may appropriately increase the power of the laser emitter to assist the heating element in accelerating the temperature rise; in the stable stage, if the temperature gradient is large, the feedback control module may adjust the position of the collimating lens group to make the distribution of laser energy more uniform, thereby cooperating with the cooling element to improve the temperature field distribution.

[0070] In practical applications, the measurement accuracy of the temperature compensation module is affected by the arrangement density and accuracy of the temperature sensors. For example, if there are too few temperature sensors arranged in the curing cavity, the actual temperature gradient distribution may not be accurately reflected; if the measurement accuracy of the sensors is low (e.g., ±1°C), the temperature difference calculation error will be large, thereby affecting the accuracy of the power adjustment coefficient. Therefore, when designing the system, the temperature sensors need to be arranged reasonably according to the size and shape of the curing cavity, and high-precision sensors (e.g., with an accuracy of ±0.5°C) need to be selected, so as to ensure that the measurement results of the temperature compensation module can meet the requirements of high-resolution curing.

[0071] In addition, the temperature compensation module also needs to consider the influence of environmental temperature changes on the temperature of the curing cavity. For example, when the workshop environmental temperature rises from 25°C to 30°C, the heat dissipation conditions of the curing cavity will change, which may cause the preheating stage to accelerate and the temperature gradient distribution in the stable stage to change. When calculating the temperature gradient, the module will collect environmental temperature data in real time and take it as a correction factor for calculation, so that the power adjustment coefficient is more in line with the actual working conditions.

[0072] The entire temperature compensation process of the embodiment realizes accurate measurement and dynamic adjustment of the temperature gradient distribution in the curing cavity through differential processing of the preheating stage and the stable stage. The calculation of the power adjustment coefficient in the preheating stage ensures that the curing cavity can reach the target temperature at a reasonable rate, avoiding temperature overshoot or slow heating; the calculation of the power adjustment coefficient in the stable stage ensures the uniformity of the temperature field in the curing cavity, providing a stable temperature environment for high-resolution curing of the photoresist. The data interaction and collaborative work of the temperature compensation module with other modules further improve the adaptability and control accuracy of the entire curing system to temperature changes, ensuring the stability and reliability of the curing process.

[0073] It should be noted that, in this document, the terms such as first and second are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "contain" or any other variant thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements not only includes those elements, but also includes other elements not explicitly listed or inherent to such a process, method, article or device.

[0074] Although embodiments of the present application have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present application, and the scope of the present application is defined by the appended claims and their equivalents.

Claims

1. A high resolution LDI photoresist resin curing system, characterized by: The system comprises a light path calibration module, an energy regulation module, a temperature compensation module and a feedback control module; The light path calibration module is based on the laser emitter, the collimating lens group, the light splitting prism, the light intensity sensor and the communication bus arranged inside the curing cavity, and constructs a precise light path calibration network for the photoresist curing; The energy regulation module analyzes the energy absorption distribution of the photoresist in the curing cavity according to the real-time light intensity data and wavelength data output by the laser emitter, and determines the real-time energy compensation requirement in the curing cavity according to the analysis result; The temperature compensation module is used for identifying the preheating stage and the stable stage of the curing cavity, and calculating the temperature gradient distribution in the curing cavity in combination with the historical operation parameters of the laser emitter; The feedback control module feeds back the output power of the laser emitter and the position state of the collimating lens group according to the temperature gradient distribution in the curing cavity calculated by the temperature compensation module.

2. The high resolution LDI photoresist resin curing system of claim 1, wherein: The output end of the laser emitter is connected with the input end of the collimating lens group through an optical fiber transmission link, the output end of the collimating lens group is connected with the input end of the light splitting prism through an optical channel, and the output end of the light splitting prism is connected with the input end of the light intensity sensor through a detection light path; The output ends of the light intensity sensor and the temperature compensation module are connected with the input end of the light path calibration module through a communication bus, the light path calibration module is used for collecting the light intensity attenuation data, the wavelength shift data and the temperature fluctuation data of the light intensity sensor and the temperature compensation module, the light intensity attenuation data includes incident light intensity and emergent light intensity, the wavelength shift data is a numerical value ±1 or a numerical value 0, when the wavelength shift data is the numerical value ±1, it indicates that the laser emitter or the collimating lens group is in a shift state, and when the wavelength shift data is the numerical value 0, it indicates that the laser emitter or the collimating lens group is in a calibration state; The output end of the laser emitter is connected with the input end of the energy regulation module through an optical fiber transmission link, and the energy regulation module is used for collecting the energy parameters of the laser emitter, including the exposure energy density, the light spot uniformity and the wavelength stability; The output ends of the energy regulation module and the light path calibration module are connected with the input end of the feedback control module through a communication bus, and the output end of the feedback control module is connected with the input ends of the laser emitter and the collimating lens group through a control bus.

3. The high resolution LDI photoresist resin curing system of claim 2, wherein: The energy regulation module comprises a light intensity anomaly identification unit, a wavelength matching unit and an energy compensation evaluation unit; The light intensity anomaly identification unit calculates the total amount of energy that can be effectively absorbed in the curing cavity and the total amount of energy actually received by the curing cavity according to the real-time light intensity data and wavelength data output by the laser emitter, and judges whether there is light intensity anomaly in the curing cavity according to the calculation result; The wavelength matching unit calculates the real-time wavelength mismatch coefficient of the curing cavity according to the judgment result of the light intensity anomaly identification unit on whether there is light intensity anomaly in the curing cavity; The energy compensation evaluation unit determines the real-time energy compensation requirement level of the curing cavity according to the real-time distribution characteristic value of the energy in the curing cavity.

4. The high resolution LDI photoresist resin curing system of claim 3, wherein: The specific method for the light intensity anomaly identification unit to calculate the total amount of energy that can be effectively absorbed by the curing cavity and the total amount of energy actually received by the curing cavity is as follows: Randomly select an exposure time point, and collect real-time light intensity data and wavelength data output by the laser emitter at an interval period; Calculate the sum of the accumulated value of the spot uniformity of the laser emitter at the time point and the accumulated value of the wavelength stability, and calculate the product of the sum, the effective irradiation area of the laser emitter at the time point, and the interval period, to obtain the total amount of energy that can be effectively absorbed by the curing cavity in the time period; Calculate the product of the exposure energy density output by the laser emitter at the time point, the ambient temperature of the curing cavity, and the effective irradiation area, and calculate the product of the product and the interval period, to obtain the total amount of energy actually received by the curing cavity in the time period; If the total amount of energy that can be effectively absorbed is greater than the total amount of energy actually received, it is considered that the curing cavity has light intensity anomaly in the time period; If the total amount of energy that can be effectively absorbed is less than or equal to the total amount of energy actually received, it is considered that the curing cavity has no light intensity anomaly in the time period.

5. The high resolution LDI photoresist resin curing system of claim 4, wherein: The specific method for the wavelength matching unit to calculate the real-time wavelength mismatch coefficient of the curing cavity is as follows: When the curing cavity has light intensity anomaly in the time period, calculate the difference between the total amount of energy that can be absorbed and the total amount of energy actually received, and calculate the ratio between the difference and the total amount of energy that can be absorbed, to obtain the wavelength mismatch coefficient of the curing cavity in the time period, which is greater than 0 and less than 1; When the curing cavity has no light intensity anomaly in the time period, the wavelength mismatch coefficient of the curing cavity in the time period is 0.

6. The high resolution LDI photoresist resin curing system of claim 5, wherein: The specific method for the energy compensation evaluation unit to determine the real-time energy compensation demand level of the curing cavity is as follows: Take the wavelength mismatch coefficient of the curing cavity in the time period as the distribution characteristic value of the curing cavity in the time period, and mark the historical distribution characteristic values of the curing cavity in the historical time period in the coordinate system, where the current time point represents the current time; In the coordinate system, find the nearest critical time point of the historical time period. The specific finding method is as follows: let the nearest critical time point be a specific time point, the distribution characteristic value of the curing cavity one interval period before the specific time point is 0, and the distribution characteristic values of the curing cavity in the time period from the specific time point to the current time point are all greater than 0; Calculate the interval period between the specific time point and the current time point, and calculate the ratio between the interval period and the energy continuous deviation limit period, to obtain the energy compensation coefficient of the curing cavity at the current time point.

7. The high resolution LDI photoresist resin curing system of claim 6, wherein: The feedback control module includes a regulation mode judgment unit and a strategy generation unit; The regulation mode judgment unit determines the regulation mode of the curing cavity at the current time point according to the real-time energy compensation coefficient of the curing cavity. When the compensation coefficient is greater than 0 and less than 0.7, it is determined that the regulation mode of the curing cavity at the current time point is pre-warning regulation. When the compensation coefficient is greater than or equal to 0.7 and less than or equal to 1, it is determined that the regulation mode of the curing cavity at the current time point is emergency regulation. The strategy generation unit analyzes energy distribution of the solidification cavity in the current time period according to the regulation mode of the solidification cavity at the current time point and operation parameters of the laser emitter in the historical time period.

8. The high resolution LDI photoresist resin curing system of claim 7, wherein: The specific method for the strategy generation unit to analyze the energy distribution of the solidification cavity is: When it is judged that the regulation mode is the early warning regulation: The total amount of energy that can be absorbed by the solidification cavity in the historical time period is calculated, the ratio between the total amount of energy actually received by the solidification cavity in the historical time period and the interval period is calculated to obtain the power adjustment value of the laser emitter at the current time point, wherein the energy loss represents energy loss generated in the process of transmitting the light intensity data from the laser emitter to the solidification cavity; The total amount of energy that can be absorbed by the solidification cavity in the current time period is the product of the power adjustment value of the laser emitter at the current time point and the interval period, at the current time point, the supplemental energy of the solidification cavity by the backup light source is 0, and the energy supply of the solidification cavity by the laser emitter is the total amount of energy that can be absorbed in the current time period; When it is judged that the regulation mode is the emergency regulation: At the current time point, the supplemental energy of the solidification cavity by the backup light source is a set value, and the energy supply of the solidification cavity by the laser emitter is 0, wherein the energy loss represents energy loss generated in the process of transmitting the monitoring data from the backup light source to the solidification cavity.

9. The high resolution LDI photoresist resin curing system of claim 8, wherein: When it is judged that the regulation mode is the early warning regulation, the feedback control module remotely regulates the output power of the laser emitter at the current time point through the control bus, and the regulated output power value is the power adjustment value; When it is judged that the regulation mode is the emergency regulation, the position state of the collimating lens group at the current time point is regulated through the control bus, and the regulated position data of the collimating lens group is the initial value.

10. The high resolution LDI photoresist resin curing system of claim 9, wherein: The specific method for the temperature compensation module to measure and calculate the temperature gradient distribution in the solidification cavity is: When the solidification cavity is in the preheating stage, the difference between the real-time temperature value of the inner wall of the solidification cavity and the target temperature value is calculated, and the ratio between the difference and the preheating time is calculated to obtain the power adjustment coefficient of the heating element; When the solidification cavity is in the stable stage, the temperature difference between the center region and the edge region of the solidification cavity is calculated, and the product of the difference and the sampling frequency of the temperature sensor is calculated to obtain the power adjustment coefficient of the cooling element.

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