Exposure apparatus

Abstract

The application relates to an exposure equipment in the field of exposure machines, which is used for double-face exposure of a strip-shaped material and comprises a mask device, two material conveying devices and a pair of light devices. The mask device comprises two mask mechanisms, the mask mechanisms comprise mask assemblies, the mask assemblies of the two mask mechanisms are symmetrically arranged at intervals and are adapted to be closely attached to each other so as to clamp and seal one section of the strip-shaped material. The mask assemblies of the exposure equipment of the application are provided with air suction holes on mask frames. When the two mask assemblies clamp and closely attach to the material to be exposed, the air suction holes are used to suck the air between the two mask assemblies, so that the material to be exposed and the mask plate are closely attached to each other through vacuum adsorption, thereby improving the exposure quality, reducing the projection error, and meanwhile, the mask plate itself is not deformed.

Description

Technical Field

[0001] This application relates to the field of exposure machines, and more particularly to an exposure device. Background Technology

[0002] Currently, in electronic device manufacturing, exposure technology is a core technology for assisting patterning. Certain strip materials, such as metal masks (FMMs), metal meshes (a nearly invisible conductive mesh woven from extremely fine metal wires on a transparent film in televisions and mobile phones), and flexible chip metal mounting frames, although having different specific applications, all require double-sided exposure to assist in patterning to achieve precise control of micron-level structures.

[0003] Current double-sided exposure technology involves passing a strip of material to be exposed (such as a metal mesh, chip mounting frame, or metal mask) through a pair of spaced-apart masks. Flat light passes through the masks and shines onto the material, exposing it. The exposed material is then etched or electroplated to obtain the finished product. The current problems with this exposure technology are that the exposure quality is not high, and there is an error between the position of the light projection on the material and the theoretical design position, which affects the accuracy of subsequent etching. Even if the pair of spaced-apart masks are squeezed tightly to fit the material, the error is still relatively large. At the same time, the squeezing force on the mask cannot be too large, otherwise, if the squeezing force on the mask is too large, it will cause the mask itself to deform, further degrading the exposure quality. Summary of the Invention

[0004] To address the problem of low mask exposure quality in current double-sided exposure processes mentioned in the background art, this application provides an exposure device.

[0005] This application provides an exposure device for double-sided exposure of strip materials, which includes a mask device, two feeding devices and a pair of light irradiation devices. The mask device includes two mask mechanisms, each mask mechanism including a mask assembly. The mask assemblies of the two mask mechanisms are symmetrically arranged at intervals and adapted to fit tightly together to clamp and seal one segment of the strip material.

[0006] The mask assembly includes a mask frame and a mask plate. The mask frame has a through hole. The mask plate is attached to a side of the mask frame with the through hole and blocks and seals one end of the through hole. The side has multiple suction holes distributed circumferentially around the through hole. A guide frame is attached to the side, and the suction holes are located between the mask plate and the guide frame. The thickness of the guide frame is not less than the thickness of the mask plate. The mask frame has an extraction hole communicating with the suction holes, and one end of the extraction hole extends to the outer wall of the mask frame. When a strip of material passes through between a pair of mask plates, the pair of guide frames fit tightly together, sealing and separating the strip of material inside the guide frames from the outside. At this time, the pair of mask plates are in close contact with the strip of material.

[0007] A pair of lighting devices are respectively disposed on both sides of a mask device, and respectively illuminate parallel light onto the mask plate of a mask assembly. The lighting device includes a frame 1 and a light source, a reflector 1, a reflector 2, and a reflector 3 disposed on the frame 1. The frame 1 is constructed with a light exit hole. The light emitted by the light source can be reflected upwards by the reflector 1, the reflector 2, and the reflector 3 in sequence to form horizontal parallel light, which passes through the light exit hole and shines onto the mask plate.

[0008] Two feeding devices are respectively installed on one side of a pair of illumination devices away from the mask device. One feeding device is used to unroll the rolled strip material to be exposed, and the unrolled strip material passes through the gap between the pair of masks. The other feeding device is used to retract the exposed strip material and wind it into a roll. The feeding device includes a frame two and a winding device and a tension adjustment assembly mounted on the frame two. The winding device has the following features:

[0009] The air shaft is connected to the second rotary shaft of the machine frame;

[0010] A coiled tube is fitted over the air shaft;

[0011] Drive component two is connected to the air shaft drive and is used to drive the air shaft to rotate.

[0012] The tension adjustment component has:

[0013] At least one pair of guide rollers are arranged in parallel at intervals and are rotatably connected to frame two.

[0014] Guide roller five is radially movable and rotatably connected to frame two;

[0015] The distance adjuster is located on frame 2 and connected to guide roller 5. It is used to drive guide roller 5 to move radially and adjust the distance between guide roller 5 and guide roller 4.

[0016] Tension detection elements are located at the axial ends of guide roller four and / or guide roller five;

[0017] One end of the strip material is adapted to be wound around the outer circumference of the tube after passing sequentially around one of the guide rollers four, five, and another guide roller four.

[0018] By adopting the above technical solution, after the two mask components clamp and tightly adhere the material to be exposed, the air between the two mask components is extracted by the air suction hole, so that the material to be exposed and the mask are vacuum adsorbed and tightly adhered together, thereby improving the exposure quality, reducing projection error, and at the same time, it will not cause deformation of the mask itself.

[0019] Preferably, the mask device further includes a fixed base and a movable base adapted to be slidably connected to the fixed base, and a pair of machine bases adapted to be slidably connected to the movable base. The sliding direction of the movable base is parallel to the side of the mask frame with the through hole, and the sliding direction of the machine bases is perpendicular to the side of the mask frame with the through hole. The pair of machine bases are spaced apart, and the two mask mechanisms are respectively mounted on the two machine bases.

[0020] The fixed base is provided with a guide roller located below between a pair of mask assemblies. The movable base is provided with a discharge port. The two mask mechanisms are covered with a machine cover. The top of the machine cover is provided with a feed port located above between a pair of mask assemblies.

[0021] The top of the machine cover is provided with a feeding mechanism 1, which is used to unwind the rolled strip material to be exposed. The strip material output by the feeding device is conveyed to the feed inlet through the feeding mechanism 1, and then passes down from the feed inlet through a pair of mask assemblies, passes around the guide roller 1, and extends out from the discharge outlet 1 into the feeding device used to collect and wind the exposed strip material into a roll.

[0022] By adopting the above technical solution, the exposure operation of strip materials can be realized on a production line, with fast exposure speed and high efficiency.

[0023] Preferably, the material conveying mechanism has:

[0024] The second active roller and the second regulating roller are arranged parallel to each other at intervals so that the strip material can pass between the second active roller and the second regulating roller. The second active roller is driven by a third driving component, which is used to drive the second active roller to rotate.

[0025] Push-pull device five is connected to the machine cover and adjusting roller two. It is used to drive adjusting roller two to move relative to the machine cover and adjust the distance between the active roller two and adjusting roller two to clamp the strip material.

[0026] By adopting the above technical solution, the conveying mechanism is used to transport the strip material.

[0027] Preferably, the frame is provided with a conveying mechanism 2 and a discharge port 2. The strip material extending from the discharge port 1 is conveyed by the conveying mechanism 2 and extends out of the light exposure device to enter the conveying device for collecting and winding the exposed strip material into a roll.

[0028] By adopting the above technical solution, the conveying mechanism 2 is used to transport the strip material, ensuring the smooth movement of the strip material.

[0029] Preferably, the second material conveying mechanism includes:

[0030] At least one guide roller is rotatably connected to the first frame;

[0031] Active roller 1 and regulating roller 1 are arranged parallel to each other at intervals so that the strip material can pass between active roller 1 and regulating roller 1. Active roller 1 is driven by a driving component 1, which is used to drive active roller 1 to rotate.

[0032] Push-pull device four is connected to frame one and adjusting roller one. It is used to drive adjusting roller one to move relative to frame one to adjust the distance between drive roller one and adjusting roller one, so as to clamp the strip material.

[0033] By adopting the above technical solution, the conveying mechanism 2 is used to transport the strip material, ensuring the smooth movement of the strip material.

[0034] Preferably, the side surface has a U-shaped groove, and the U-shaped groove has a suction hole that communicates with the suction hole. The through hole is located inside the U-shaped groove, and the mask covers the U-shaped groove.

[0035] By adopting the above technical solution, the mask frame can be used to attach the mask plate, reducing the difficulty of mask plate installation and facilitating mask plate disassembly and assembly.

[0036] Preferably, the side surface has a U-shaped groove 2 communicating with the air extraction hole, the guide frame covers the U-shaped groove 2, a sealing ring 1 is tightly clamped between the guide frame and the side surface, the U-shaped groove 2 is located inside the sealing ring 1, and a gap is constructed between the guide frame located inside the U-shaped groove 2 and the side surface, the gap being constructed to allow gas inside the guide frame to pass through and enter the U-shaped groove 2.

[0037] By adopting the above technical solution, the vacuum pressure around the mask can be homogenized, thereby improving the vacuum adsorption quality of the material and the mask.

[0038] Preferably, a second sealing ring is provided on the side of the guide frame facing away from the mask frame.

[0039] By adopting the above technical solution, the clamping and sealing performance of the two mask assemblies on the material to be exposed is improved, and the air between the two mask assemblies is removed better and faster.

[0040] Preferably, the upper and lower ends of the mask frame are respectively provided with roller one and roller two;

[0041] The side surface is provided with a plurality of limiting blocks around the circumference of the mask, and the limiting blocks abut against the edge of the mask;

[0042] One side is provided with a guide wheel, which is adapted to be rolled and connected with the bottom surface of the mask.

[0043] By adopting the above technical solution, it is convenient to assemble and disassemble the mask assembly and mask plate.

[0044] Preferably, the mask mechanism further includes a mounting bracket and a mounting frame, the mounting bracket and the mounting frame being connected by a connector, the connector being configured to drive the mounting frame to slide up and down and left and right relative to the mounting bracket.

[0045] The mounting frame 1 has a through hole 2 and a clamp is provided on the mounting frame 1. The clamp is configured to clamp and fix the mask assembly on the side of the mounting frame 1 with the through hole 2, and to make the through hole 1 and the through hole 2 face each other.

[0046] By adopting the above technical solution, it is easier to disassemble and assemble the mask assembly.

[0047] In summary, this application includes at least one of the following beneficial technical effects:

[0048] The mask assembly of the exposure device of this application has an air suction hole on the mask frame. When the two mask assemblies clamp the material to be exposed and fit it tightly, the air between the two mask assemblies is extracted by the air suction hole, so that the material to be exposed and the mask are vacuum adsorbed and tightly attached together, thereby improving the exposure quality, reducing the projection error, and at the same time, it will not cause the mask itself to deform. Attached Figure Description

[0049] Figure 1 This is a schematic diagram of the mask assembly in Embodiment 1 of this application.

[0050] Figure 2 yes Figure 1 A schematic diagram after removing the mask and guide frame.

[0051] Figure 3 yes Figure 2 A magnified view of a portion of the image.

[0052] Figure 4 This is a schematic diagram of the guide frame structure in Embodiment 1. Figure 1 .

[0053] Figure 5 This is a schematic diagram of the guide frame structure in Embodiment 1. Figure 2 .

[0054] Figure 6 This is a schematic diagram of the mask mechanism in Embodiment 2 of this application. Figure 1 .

[0055] Figure 7 This is a schematic diagram of the mask mechanism in Embodiment 2 of this application. Figure 2 .

[0056] Figure 8 This is a schematic diagram of the installation of mounting frame one and mask assembly in Embodiment 2 of this application. Figure 1 .

[0057] Figure 9 This is a schematic diagram of the installation of mounting frame one and mask assembly in Embodiment 2 of this application. Figure 2 .

[0058] Figure 10 This is a schematic diagram of the installation of mounting frame one and mask assembly in Embodiment 2 of this application. Figure 3 .

[0059] Figure 11 This is a schematic diagram of the structure of mounting bracket one in Embodiment 2 of this application. Figure 1 .

[0060] Figure 12 This is a schematic diagram of the structure of mounting bracket one in Embodiment 2 of this application. Figure 2 .

[0061] Figure 13 This is a schematic diagram of the mask mechanism in Embodiment 3 of this application. Figure 1 .

[0062] Figure 14 This is a schematic diagram of the mask mechanism in Embodiment 3 of this application. Figure 2 .

[0063] Figure 15 This is a schematic diagram of the structure of connector four in embodiment three of this application.

[0064] Figure 16 yes Figure 15 Enlarged view of section H in the image.

[0065] Figure 17 This is a schematic diagram of the mask device in Embodiment 4 of this application. Figure 1 .

[0066] Figure 18 This is a schematic diagram of the mask device in Embodiment 4 of this application. Figure 2 .

[0067] Figure 19 This is a schematic diagram of the mask device after the cover is removed in Embodiment 4 of this application. Figure 1 .

[0068] Figure 20 This is a schematic diagram of the mask device after the cover is removed in Embodiment 4 of this application. Figure 2 .

[0069] Figure 21 yes Figure 19 Schematic diagram after removing the two mask mechanisms Figure 1 .

[0070] Figure 22 yes Figure 19 Schematic diagram after removing the two mask mechanisms Figure 2 .

[0071] Figure 23 This is a schematic diagram of the lighting device in Embodiment 5 of this application. Figure 1 .

[0072] Figure 24 This is a schematic diagram of the lighting device in Embodiment 5 of this application. Figure 2 .

[0073] Figure 25 This is a schematic diagram of the lighting device in Embodiment 5 of this application. Figure 3 .

[0074] Figure 26 This is a schematic diagram of the material conveying mechanism 2 in Embodiment 5 of this application.

[0075] Figure 27 This is a schematic diagram of the material conveying mechanism 2 in Embodiment 5 of this application.

[0076] Figure 28 This is a schematic diagram of the winding mechanism in Embodiment Six of this application.

[0077] Figure 29 This is the internal structure of the winding mechanism in Embodiment Six of this application. Figure 1 .

[0078] Figure 30 This is the internal structure of the winding mechanism in Embodiment Six of this application. Figure 2 .

[0079] Figure 31 This is the internal structure of the winding mechanism in Embodiment Six of this application. Figure 3 .

[0080] Figure 32 This is a schematic diagram of the winding mechanism in Embodiment Six of this application.

[0081] Figure 33 This is a schematic diagram of the unwinding mechanism in Embodiment Six of this application.

[0082] Figure 34 This is an internal structural diagram of the unwinding mechanism in Embodiment Six of this application.

[0083] Figure 35 This is an internal structural diagram of the cleaner in Embodiment Six of this application.

[0084] Figure 36 This is a schematic diagram of the unwinding mechanism in Embodiment Six of this application.

[0085] Figure 37 This is a schematic diagram of the exposure device in Embodiment 7 of this application.

[0086] Figure 38 This is a schematic diagram of the exposure device in Embodiment 7 of this application.

[0087] Figure 39 This is a schematic diagram of the material conveying mechanism 1 in Embodiment 7 of this application.

[0088] Figure 40 yes Figure 39 Enlarged view of part J in the image.

[0089] Figure 41 This is a schematic diagram of the material conveying mechanism 1 in Embodiment 7 of this application.

[0090] Explanation of reference numerals in the attached drawings: A. Mask assembly; 1. Mask frame; 2. Guide frame; 3. Pipe connector; 4. Pressure block; 5. Air extraction hole; 6. Air intake hole one; 7. Limiting block; 8. Guide wheel; 9. Mask plate; 10. Handle; 11. Roller two; 12. Roller one; 13. U-shaped groove one; 14. U-shaped groove two; 15. Sealing ring one; 16. Air intake hole two; 17. U-shaped groove three; 18. Sealing ring two; 19. Through hole one;

[0091] B. Mask mechanism; 20. Mounting bracket one; 21. Connector one; 211. Lifting assembly one; 212. Slider one; 22. Connector two; 221. Lateral movement assembly one; 222. Slider two; 23. Connector three; 231. Slider three; 232. Slider four; 24. Positioning detector; 241. Three-axis translation assembly; 242. Vision camera; 25. Mounting frame one; 251. Through hole two; 26. Slide rail one; 27. Slide rail two; 28. Limiting wheel; 29. ​​Connecting... 30. Connecting block; 30. Clamp 1; 301. Push-pull device 1; 302. Mounting base 1; 303. Pressure rod 1; 31. Clamp 2; 310. Mounting base 2; 311. Push-pull device 2; 312. Push-pull device 3; 313. Pressure rod 2; 314. Mounting base 3; 32. Clamp 3; 33. Stop block; 34. Mounting frame 2; 35. Connector 4; 351. Mounting base 4; 352. Slider 5; 353. Lifting assembly 2; 354. Slider 6; 355. Slide rail 3;

[0092] C. Mask device; 39. Machine base; 40. Fixed base; 41. Transverse movement assembly two; 42. Movable base; 43. Transverse movement assembly three; 44. Guide roller one; 45. Roller frame one; 46. Discharge port one; 47. Carrier frame; 48. Guide rail; 49. Machine cover; 50. Feed port;

[0093] D. Illumination Device; 51. Frame 1; 52. Light Source; 53. Reflector 1; 54. Reflector 2; 55. Reflector 3; 56. Light Outlet; 57. Discharge Port 2; 58. Conveying Mechanism 2; 580. Roller Frame 2; 581. Guide Roller 2; 582. Drive Roller 1; 583. Adjusting Roller 1; 584. Drive Component 1; 585. Push-Pull Device 4; 586. Rotating Shaft 1; 587. Gear 1; 588. Rack 1; 589. Slide 1;

[0094] E. Unwinding mechanism; G. Rewinding mechanism; 60. Frame II; 61. Lateral movement assembly IV; 62. Positioning assembly; 621. Rotating shaft II; 622. Swing arm; 623. Shaft bracket; 63. Material coiler; 631. Drive component II; 632. Air shaft; 633. Winding tube; 64. Guide roller III; 65. Position detector; 66. Splicing assembly; 661. Splicing plate; 662. Pressure strip; 663. Lifting device I; 664. Drop groove; 67. Tensioner Force adjustment assembly; 671, guide roller four; 672, guide roller five; 673, distance adjuster; 68, guide roller six; 69, antistatic filter; 70, impurity cleaner; 701, machine housing; 702, sticky roller one; 703, lifting device two; 704, sticky roller two; 705, lifting device three; 706, roller frame three; 707, roller frame four; 71, transverse movement assembly five; 72, guide roller seven; 73, baffle; 74, frame three; 75, isolation cover;

[0095] F. Conveying Mechanism 1; 80. Frame 4; 81. Guide Roller 8; 82. Drive Roller 2; 83. Drive Component 3; 84. Adjusting Roller 2; 85. Roller Frame 5; 86. Slide 2; 87. Push-Pull Device 5; 88. Rotating Shaft 3; 89. Gear 2; 90. Rack 2; 91. Guide Roller 9; 92. Guide Roller 10;

[0096] K. Strip material. Detailed Implementation

[0097] The following is in conjunction with the appendix Figure 1-41 This application will be described in further detail.

[0098] This application provides an exposure device for double-sided exposure of strip-shaped materials, such as... Figure 40 and Figure 41 As shown, it includes a material feeding mechanism F, a mask device C, two material feeding devices and a pair of light-illuminating devices D. The mask device C includes two mask mechanisms B, each of which includes a mask assembly A. The two material feeding devices are an unwinding mechanism E and a winding mechanism G, respectively.

[0099] The following seven embodiments will be used to provide a detailed description of mask assembly A, mask mechanism B, mask device C, illumination device D, unwinding mechanism E, winding mechanism G, material conveying mechanism F, and exposure equipment.

[0100] Example 1:

[0101] This application discloses a mask assembly A. (Refer to...) Figures 1-3As shown, the mask assembly A includes a mask frame 1 and a mask plate 9. The mask frame 1 has a through hole 19. The mask plate 9 is attached to the side of the mask frame 1 with the through hole 19, and one end of the through hole 19 is blocked and sealed. The side has multiple suction holes 6, which are distributed circumferentially around the through hole 19. This design can quickly remove the air around the mask plate 9, quickly achieve vacuum adsorption of the material and the mask plate 9, and homogenize the vacuum pressure around the mask plate 9, thereby improving the vacuum adsorption quality of the material and the mask plate 9.

[0102] In this embodiment, as Figures 1-3 As shown, a guide frame 2 is attached to one side, and the air intake hole 6 is located between the mask plate 9 and the guide frame 2. The thickness of the guide frame 2 is not less than the thickness of the mask plate 9. This design can avoid the inability of a pair of mask components A to fit tightly together and to clamp and seal the material. The tight fit of a pair of mask components A is achieved by the tight fit of the two guide frames 2 of a pair of mask components A with each other.

[0103] In this embodiment, as Figures 1-3 As shown, the mask frame 1 has an internal air extraction hole 5 that communicates with the air intake hole 6. One end of the air extraction hole 5 extends to the outer wall of the mask frame 1. By connecting one end of the air extraction hole 5 to an air extraction device, the air between the pair of mask components A can be extracted after the pair of mask components A are tightly fitted together, creating a vacuum between the pair of mask components A. In this way, the material located between the pair of mask components A can adhere tightly to the mask plate 9. The material to be exposed and the mask plate 9 are vacuum-adhered and adhered together, thereby improving the exposure quality, reducing projection errors, and preventing deformation of the mask plate itself. To facilitate the connection of the air extraction hole 5 to the air extraction device, a pipe connector 3 can be installed at one end of the air extraction hole 5.

[0104] In this embodiment, further, such as Figure 2 As shown, the side has a U-shaped groove 13, and the U-shaped groove 13 has a suction hole 16 communicating with the air extraction hole 5. The through hole 19 is located inside the U-shaped groove 13. The mask plate 9 covers the U-shaped groove 13. With this design, the air extraction hole 5 extracts air from the U-shaped groove 13 through the suction hole 16, so that the mask frame 1 can adsorb and install the mask plate 9, reducing the installation difficulty of the mask plate 9 and making it easy to disassemble and assemble the mask plate 9. The mask plate 9 blocks and seals one end of the through hole 19 by vacuum adsorption.

[0105] In this embodiment, further, such as Figure 2 As shown, the side surface has a U-shaped groove 14 communicating with the air extraction hole 5. The guide frame 2 covers the U-shaped groove 14. A sealing ring 15 is tightly clamped between the guide frame 2 and the side surface. The position of the sealing ring 15 on the guide frame 2 is as follows: Figure 4As shown, the second groove 14 is located inside the sealing ring 15. A gap is constructed between the guide frame 2 and the side surface 1 inside the second groove 14. The gap is designed to allow gas inside the guide frame 2 to pass through and enter the second groove 14. The sealing ring 15 ensures a reliable seal between the guide frame 2 and the mask frame 1. When the air extraction hole 5 is used for extraction, the air between a pair of mask components A enters the second groove 14 through the gap between the guide frame 2 and the side surface 1 inside the second groove 14, and then enters the air extraction hole 5. The sealing ring 15 effectively prevents air leakage. By setting the gap and using the second groove 14 to assist the air extraction hole 6 for extraction, the extraction speed can be accelerated, and the vacuum pressure around the mask plate 9 can be further homogenized, thereby improving the vacuum adsorption quality of the material and the mask plate 9.

[0106] In this embodiment, further, such as Figure 5 As shown, a second sealing ring 18 is provided on the side of the guide frame 2 facing away from the mask frame 1. After a pair of mask components A are tightly fitted together, the pair of guide frames 2 compress the second sealing ring 18. The second sealing ring 18 improves the tightness of the fit between the pair of mask components A. To facilitate the installation of the second sealing ring 18 on the guide frame 2, as follows... Figure 5 As shown, a groove 3 17 can be provided on the side of the guide frame 2 facing away from the mask frame 1, and part of the sealing ring 2 18 can be placed into the groove 3 17.

[0107] In this embodiment, further, such as Figures 1-2 As shown, the side wall of the mask frame 1 is provided with a pressure block 4, which is used to cooperate with the clamp 32 of the mask mechanism B to clamp and fix the mask assembly A.

[0108] In this embodiment, further, such as Figures 1-3 As shown, roller 12 and roller 21 are respectively provided at the upper and lower ends of the mask frame 1. The roller 12 and roller 21 are adapted to slide rail 16 and slide rail 27 of the mask mechanism B so as to realize the mask assembly A sliding laterally on the mounting frame 125, which facilitates the assembly and disassembly of the mask assembly A.

[0109] In this embodiment, further, such as Figures 1-3 As shown, a plurality of limiting blocks 7 are arranged around the circumference of the mask plate 9 on the side side. The limiting blocks 7 abut against the edge of the mask plate 9 and are used to limit the mask plate 9 during installation, so that it can be quickly and accurately installed on the designated position on the mask frame 1. The side side is provided with guide wheels 8, which are adapted to roll and connect with the bottom surface of the mask plate 9. Since the mask plate 9 is heavy, the guide wheels 8 facilitate the movement of the mask plate 9 to the installation position on the mask frame 1, reduce the wear of the mask plate 9 during the disassembly and assembly process, and facilitate the disassembly and assembly of the mask plate 9.

[0110] In this embodiment, further, such as Figures 1-2As shown, a handle 10 is provided on the side of the mask frame 1 so that a person can pull the mask assembly A to slide it laterally on the mounting frame 25.

[0111] Example 2:

[0112] This embodiment discloses a mask mechanism B, such as Figure 6 and Figure 7 As shown, it includes a mounting bracket 20, a mounting frame 25, and a mask assembly A of embodiment one. The mounting bracket 20 and the mounting frame 25 are connected by a connector, which is configured to drive the mounting frame 25 to slide up and down and left and right relative to the mounting bracket 20.

[0113] Specifically, the connectors include connector one 21, connector two 22, and connector three 23. Connectors one 21, connector two 22, and connector three 23 are distributed around the mounting bracket one 20, and there is at least one of each. Figure 11 and Figure 12 Connector 21 is present in two parts, located on the left and right sides of the upper end of mounting bracket 20. Connector 22 and connector 23 are located on the left and right sides of the lower end of mounting bracket 20, respectively. Figure 12 As shown, the connector 21 includes a lifting assembly 211 fixedly connected to the mounting bracket 20 and a slider 212 laterally slidably connected to the lifting assembly 211; as Figure 11 As shown, connector 22 includes a transverse sliding component 221 fixedly connected to mounting bracket 20 and a slider 222 slidably connected to the transverse sliding component 221; connector 3 includes a slider 3 slidably connected to mounting bracket 20 laterally and a slider 4 slidably connected to the slider 3 slidably. The direction of movement of the lifting component 211 is parallel to the sliding direction of slider 222 and slider 4 232, and the direction of movement of the transverse sliding component 221 is parallel to the sliding direction of slider 1 212 and slider 3 231. Slider 1 212, slider 222, and slider 4 232 are all fixedly connected to mounting frame 25. The movement of the lifting component 211 causes the mounting frame 25 to move up and down, and the movement of the transverse sliding component 221 causes the mounting frame 25 to move left and right. This connector structure design enables the mounting frame 25 to move smoothly up and down and left and right to adjust the position of the mask component A on mounting bracket 20, with high movement accuracy of the mounting frame 25. Of course, in other embodiments, the connector can also use conventional moving mechanisms such as a two-axis translation mechanism to realize the vertical and horizontal movement of the mounting frame 25 relative to the mounting bracket 20.

[0114] To facilitate the connection of slider 1 212, slider 2 222, slider 4 232 with mounting frame 1 25, such as Figure 9 and Figure 10As shown, slider 1 212, slider 2 222, and slider 4 232 are connected to mounting frame 1 25 via connecting block 29. Slider 1 212, slider 2 222, and slider 4 232 are fixedly connected to connecting block 29, and connecting block 29 is rotatably connected to mounting frame 1 25.

[0115] In this embodiment, as Figures 8-10 As shown, the mounting frame 25 has a through hole 251 and a clamp is provided on the mounting frame 25. The clamp is designed to clamp and fix the mask assembly A on the side of the mounting frame 25 with the through hole 251, and to make the through hole 19 and the through hole 251 face each other. With this design, parallel light passes through the through hole 251 and the through hole 19 in sequence and then shines on the mask plate 9.

[0116] In this embodiment, further, such as Figure 6 and Figure 8 As shown, the mounting frame 25 is provided with a slide rail 26 and a slide rail 27. The roller 12 is rotatably connected to the slide rail 26, and the roller 11 is rotatably connected to the slide rail 27. The rolling direction of the roller 12 and the roller 11 is parallel to the side of the mounting frame 25 with the through hole 251. With this design, the mask assembly A can be pulled laterally on the mounting frame 25 by hand using the handle 10. During the sliding process, the roller 12 rolls along the slide rail 26, and the roller 11 rolls along the slide rail 27, thereby removing the mask assembly A from the mounting frame 25 or installing the mask assembly A on the mounting frame 25 at the installation position. The presence of the roller 12 and the roller 11 facilitates the movement of the mask assembly A on the mounting frame 25, reduces the friction loss between the mounting frame 25 and the mask assembly A, and facilitates the disassembly and assembly of the mask assembly A.

[0117] Preferred, such as Figure 9 and Figure 10 As shown, multiple limiting wheels 28 are arranged circumferentially around the through hole 251 on the mounting frame 25. Figure 6 and Figure 8As shown, the fixture includes a first fixture 30, a second fixture 31, and a third fixture 32. Multiple first fixtures 30 and second fixtures 31 are arranged circumferentially around the second through hole 251 to ensure reliable clamping and fixing of the mask assembly A. The first fixture 30 and second fixture 31 are adapted to press the mask assembly A against the limiting wheel 28, with the pressing direction perpendicular to the side of the mounting frame 25 where the second through hole 251 is formed. The third fixture 32 is located on one side of the mounting frame 25. A stop block 33 is fixedly provided on the other side of the frame 25. The clamp 32 is adapted to press the mask assembly A against the stop block 33. The pressing direction is parallel to the side of the mounting frame 25 with the through hole 251, so as to clamp and fix the mask assembly A on the mounting frame 25. The setting of the limiting wheel 28 ensures that the mask assembly A is clamped and fixed and does not easily cause wear on the mask assembly A and the mounting frame 25, and facilitates the movement of the mask assembly A on the mounting frame 25.

[0118] Specifically, such as Figure 8 As shown, the fixture 30 includes a push-pull device 301, a mounting base 302, and a pressure rod 303. The fixed end of the push-pull device 301 and the mounting base 302 are fixedly connected to the mounting frame 25. The movable end of the push-pull device 301 is hinged to one end of the pressure rod 303. The pressure rod 303 is hinged to the mounting base 302. When the push-pull device 301 moves, it drives the other end of the pressure rod 303 to approach or move away from the mask frame 1. When it is necessary to fix the mask assembly A, it abuts against the side of the mask frame 1, and then presses the mask frame 1 against the limiting wheel 28. The limiting wheel 28 and the other end of the pressure rod 303 clamp and fix the mask frame 1.

[0119] Preferred, such as Figure 6 As shown, the second clamp 31 is located on the side of the mask frame 1 where the handle 10 is provided. With this design, after the second clamp 31 is opened, the mask frame 1 can move along the first slide rail 26 and the second slide rail 27 under the pull of the handle 10. At this time, neither the first clamp 30 nor the second clamp 31 will obstruct the movement of the mask frame 1.

[0120] Specifically, the second clamp 31 includes a second mounting base 310, a second push-pull device 311, a third push-pull device 312, a second pressure rod 313, and a third mounting base 314. The second mounting base 310 is fixedly connected to the first mounting frame 25, and the third mounting base 314 is hinged to the first mounting frame 25. The fixed end and the movable end of the second push-pull device 311 are respectively hinged to the second mounting base 310 and the third mounting base 314, so that the second push-pull device 311 drives the third mounting base 314 to swing. The fixed end and movable end of fixture 2 are hinged to one end of mounting base 314 and pressure rod 313, respectively. One end of pressure rod 313 is also hinged to mounting base 314. Push-pull device 312 is used to move the other end of pressure rod 313 closer to or away from mask frame 1, and when it is necessary to fix mask assembly A, it abuts against the side of mask frame 1, and then presses mask frame 1 against limit wheel 28, and clamps and fixes mask frame 1 by limit wheel 28 and the other end of pressure rod 313. When fixture 21 is opened, push-pull device 311 drives mounting base 314 from Figure 6 Rotate the position shown by 90 degrees so that the pressure rod 313 leaves the moving path of the mask frame 1, so as to avoid the pressure rod 313 from obstructing the movement of the mask frame 1 along the slide rail 26 and slide rail 27 under the pull of the handle 10.

[0121] In this embodiment, further, such as Figure 7 , Figure 11 , Figure 12 As shown, the mounting bracket 20 is equipped with a positioning detector 24, which is used to detect the position of the mask assembly A relative to the mounting bracket 20, so as to control the connector to adjust the position of the mask assembly A in a timely manner according to the detection result, thereby positioning the mask assembly A installed on the mounting frame 25, and making it easy to adjust and install the mask assembly A into place accurately and quickly.

[0122] Preferred, such as Figure 12 As shown, the positioning detector 24 includes a three-axis translation component 241 and a vision camera 242. The three-axis translation component 241 is connected to the mounting bracket 20, and the vision camera 242 is connected to the three-axis translation component 241. The three-axis translation component 241 drives the vision camera 242 to move back and forth, left and right, and up and down to detect the position of the mask component A relative to the mounting bracket 20. Of course, in other embodiments, the positioning detector 24 can also use conventional positioning methods such as laser positioning.

[0123] Example 3:

[0124] The difference between this embodiment and embodiment two is that the connector is also configured to drive the mounting frame 25 to slide back and forth relative to the mounting bracket 20, so as to realize the mask assembly A moving back and forth relative to the mounting bracket 20, and cooperating with another mask assembly A to clamp and seal the strip material K to be exposed.

[0125] Specifically, the connector also includes connector four 35, and slider one 212, slider two 222, and slider four 232 are all fixedly connected to connector four 35. Furthermore, to facilitate the connection of slider one 212, slider two 222, slider four 232, and connector four 35, as follows... Figures 13-15 As shown, slider 1 212, slider 2 222, and slider 4 232 are all fixedly connected to a mounting frame 2 34. Connector 4 35 is installed and fixed on the mounting frame 2 34. There are multiple connectors 4 35, and they are all connected to the mounting frame 1 25. The mounting frame 1 25 is moved back and forth through the connectors 4 35.

[0126] Specifically, such as Figure 15 and Figure 16 As shown, the connector four 35 includes at least a slider five 352 and a lifting component two 353. The fixed end of the lifting component two 353 is fixedly connected to slider one 212, slider two 222, slider four 232, or mounting frame two 34. The mounting frame one 25 is slidably connected to the fixed end of the lifting component two 353. The slider five 352 is connected to the movable end of the lifting component two 353, and the slider five 352 is constructed to be slidably connected to the mounting frame one 25 at an angle, so that when the lifting component two 353 drives the slider five 352 to rise and fall, it drives the mounting frame one 25 to slide back and forth. This structure of the connector four 35 can realize the smooth back and forth movement of the mounting frame one 25 to adjust the position of the mask component A, and the movement accuracy of the mounting frame one 25 is high. Of course, in other embodiments, the connector four 35 can also adopt conventional linear actuators such as linear motors, cylinders, and hydraulic cylinders.

[0127] Furthermore, to facilitate the assembly and connection of slider five 352 and lifting component two 353 with slider one 212, slider two 222, slider four 232, mounting frame two 34, and mounting frame one 25, and to improve the sliding stability of mounting frame one 25, connector four 35 also includes mounting base four 351, slider six 354, and slide rail three 355, such as Figure 15 and Figure 16 As shown, the mounting base 351 is fixedly connected to slider 212, slider 222, slider 4, or mounting frame 2 34. The fixed end of the lifting component 2 353 is fixedly installed on the mounting base 351. Slider 5 352 is slidably installed on the mounting base 351. Slide rail 3 355 is horizontally fixedly installed on the mounting base 351. Slider 6 354 is slidably connected to slide rail 3 355. At the same time, slider 6 354 is also fixedly connected to mounting frame 1 25. Slider 5 352 and slider 6 354 are slidably connected. The lifting component 2 353 pushes slider 5 352 to rise and fall, causing slider 6 354 to slide back and forth along slide rail 3 355, which in turn causes mounting frame 1 25 to slide back and forth.

[0128] Example 4:

[0129] This embodiment discloses a mask device C for double-sided exposure of a strip material K. The mask device C includes at least two mask mechanisms B, and at least one of the mask mechanisms B is the mask mechanism B of Embodiment 3. Therefore, the two mask mechanisms B in this embodiment can both be the mask mechanism B of Embodiment 3, or one can be the mask mechanism B of Embodiment 3 and the other can be the mask mechanism B of Embodiment 2. In addition, at least one of the two mask components A of the two mask mechanisms B has a sealing ring 18 to ensure that one section of the strip material K is reliably clamped and sealed.

[0130] In this embodiment, as Figure 19 and Figure 20 As shown, the mask components A of the two mask mechanisms B are symmetrically arranged at intervals and are adapted to be tightly fitted to clamp and seal one section of the strip material K. After the two mask components A are tightly fitted, the air between the two mask components A can be removed through the air extraction hole 5 to achieve vacuum tight bonding between one section of the strip material K and the mask plate 9, thereby improving the exposure quality of the strip material K, reducing projection error, and at the same time preventing deformation of the mask plate itself.

[0131] Furthermore, such as Figures 19-22 As shown, the mask device C also includes a fixed base 40 and a movable base 42 adapted to be slidably connected to the fixed base 40, and a pair of bases 39 adapted to be slidably connected to the movable base 42. The sliding direction of the movable base 42 is parallel to the side of the mounting frame 25 with the through hole 251, and the sliding direction of the bases 39 is perpendicular to the side of the mounting frame 25 with the through hole 251. The pair of bases 39 are spaced apart, and two mask mechanisms B are respectively mounted on the two bases 39. The two bases 39 move closer or further away from each other, causing the two mask mechanisms B to move closer or further away from each other. The movable base 42 moves relative to the fixed base 40 to adjust the position of the two mask mechanisms B, facilitating precise clamping and sealing of the strip material K. Preferably, the horizontal movement of the two mask mechanisms B to move closer or further away from each other can be achieved by the transverse moving component 43, such as... Figure 21 and Figure 22 As shown, the transverse component 3 43 is mounted on the movable base 42 and connected to the base 39. The base 39 is moved by the transverse component 3 43. Correspondingly, the two mask mechanisms B can slide horizontally along the side parallel to the side of the mounting frame 25 with the through hole 251, which can be completed by the transverse component 2 41. The transverse component 2 41 is mounted on the fixed base 40 and connected to the movable base 42. The movable base 42 is moved on the fixed base 40 by the transverse component 2 41. Specifically, the transverse component 2 41 and the transverse component 3 43 are conventional linear actuators such as linear motors, cylinders or hydraulic cylinders.

[0132] In this embodiment, as Figure 21 and Figure 22 As shown, the fixed base 40 is provided with a guide roller 44 located below a pair of mask assemblies A. The guide roller 44 is rotatably mounted on a roller frame 45, which is fixedly connected to the fixed base 40. The movable base 42 is configured with a discharge port 46, as shown in the figure. Figure 17 and Figure 18 As shown, the two mask mechanisms B are covered by a shroud 49. The top of the shroud 49 has a feed inlet 50 located above the pair of mask assemblies A. Strip material K passes downwards from the feed inlet 50, through the pair of mask assemblies A, and then passes over guide roller 44, exiting from the discharge outlet 46. When the strip material K stops moving, the pair of mask assemblies A move closer together to clamp and seal one section of the strip material K, and then parallel light is directed from... Figure 18 The mask device C in the middle emits parallel light from the left and right sides toward the mask assembly A. The light passes through the second through hole 251 and the first through hole 19 in sequence and then shines onto the mask plate 9, exposing one section of the strip material K to double-sided exposure. After the exposure is completed, the pair of mask assemblies A separates from each other, and then the strip material K continues to move, so that the next section of material to be exposed enters between the pair of mask assemblies A. Then the above exposure action is repeated, so as to realize the continuous exposure operation of the production line, which has a fast exposure speed and high efficiency.

[0133] In this embodiment, further, such as Figure 17 and Figure 19 As shown, a carrier frame 47 is provided on the fixed base 40, and a guide rail 48 is provided on the carrier frame 47. The carrier frame 47 is located on the side of the mask frame 1 where the handle 10 is provided. With this design, after the mask assembly A is pulled out from the mask mechanism B, the mask assembly A can be temporarily placed on the carrier frame 47, and the roller 11 rolls on the guide rail 48, which facilitates the disassembly and assembly of the mask assembly A.

[0134] Of course, in other embodiments, both mask mechanisms B can be the mask mechanism B of Embodiment 2. In this case, the mask device C also has a moving mechanism that drives the mask components A of the two mask mechanisms B to move closer to each other.

[0135] Example 5:

[0136] This embodiment discloses an illumination device D for double-sided exposure of a strip-shaped material K, such as... Figures 23-25As shown, it includes a frame 51 and a light source 52, a reflector 53, a reflector 54, and a reflector 55 mounted on the frame 51. The light source 52 is an LED or a mercury lamp. The frame 51 has a light exit aperture 56. The light emitted by the light source 52 is reflected upwards by the reflector 53, the reflector 54, and the reflector 55 to form horizontal parallel light. The horizontal parallel light passes through the light exit aperture 56 and exits the frame 51. This achieves the emission of horizontal parallel light by the illumination device D. By setting one illumination device D on each side of the mask device C in embodiment four, double-sided exposure can be performed without modifying the mounting foundation or the mask device C itself. It is simple and convenient. Moreover, the symmetrical arrangement of the illumination devices D on the left and right sides of the mask device C does not cause slight changes in the optical path, ensuring the quality of the light.

[0137] In this embodiment, at least one of the reflector 53, reflector 54, and reflector 55 is a concave mirror, which is used to convert the light emitted by the light source 52 into parallel light. Preferably, reflector 53 and reflector 54 are plane mirrors, and reflector 55 is a concave mirror. This design allows for faster and simpler conversion of the light emitted by the light source 52 into parallel light.

[0138] In this embodiment, as Figure 24 and Figure 25 As shown, furthermore, the first reflector 53, the second reflector 54, and the third reflector 55 are all rotatably connected to the frame 51. The rotation axis of the first reflector 53 is horizontal, while the rotation axes of the second reflector 54 and the third reflector 55 are vertical. This design facilitates the adjustment of the incident direction of the parallel light according to the position of the mask device C, thereby achieving precise exposure.

[0139] In this embodiment, as Figure 24 and Figure 25 As shown, the frame 51 is further provided with a conveying mechanism 58 and a discharge port 57. The conveying mechanism 58 is used to convey the strip material K through the discharge port 57 and leave the light exposure device D. The exposed strip material K is conveyed by the conveying mechanism 58.

[0140] Specifically, such as Figure 25 and Figure 26 As shown, the material conveying mechanism 2 58 includes: at least one guide roller 2 581, a drive roller 1 582, an adjusting roller 1 583, and a push-pull device 4 585. At least one guide roller 2 581 is rotatably connected to the frame 1 51, for example... Figure 26The diagram shows two guide rollers 581, a drive roller 582 and an adjusting roller 583 arranged parallel to each other at intervals, and a drive member 584 driving the drive roller 582 to rotate. The push-pull device 585 is connected to the frame 51 and the adjusting roller 583, and is used to move the adjusting roller 583 relative to the frame 51 to adjust the distance between the drive roller 582 and the adjusting roller 583, so as to be suitable for conveying strip materials K of different thicknesses.

[0141] Preferred, such as Figure 25 and Figure 26 As shown, the active roller 582 is rotatably connected to the frame 51, and the drive component 584 is fixedly connected to the frame 51; the frame 51 is slidably connected to a slide block 589, the adjusting roller 583 is rotatably connected to the slide block 589, and the push-pull device 585 is connected to the slide block 589, used to drive the slide block 589 to slide relative to the frame 51 to adjust the distance between the active roller 582 and the adjusting roller 583; both ends of the adjusting roller 583 are provided with slide blocks 584. 9. Push-pull device 4 585, the slide 589 is provided with rack 588, the frame 51 is rotatably mounted with shaft 586, the two ends of the shaft 586 are equipped with gears 587 that mesh with the racks 588 on the two slides 589. The slide 589 drives the shaft 586 to rotate. This design makes the rotation of the drive roller 582 and the adjusting roller 583 stable and the spacing adjustment smooth, without the problem of asynchronous displacement at both ends of the adjusting roller 583.

[0142] Furthermore, to facilitate the connection of guide roller 2 581, drive roller 1 582, adjusting roller 1 583, drive component 1 584, slide block 1 589, rotating shaft 1 586, and push-pull device 4 585 to frame 1 51, roller frame 2 580 can be fixedly connected to frame 1 51. Then, guide roller 2 581, drive roller 1 582, adjusting roller 1 583, drive component 1 584, push-pull device 4 585, rotating shaft 1 586, and slide block 1 589 are installed on roller frame 2 580, such as... Figures 25-27 As shown.

[0143] The working process of the material conveying mechanism 258 in this embodiment is as follows: Figure 27 As shown, the strip material K extending from the outlet 46 of the mask device C in Embodiment 4 enters the conveying mechanism 58, passes around the guide roller 581, passes between the drive roller 582 and the adjusting roller 583, and then passes around the adjusting roller 583 and extends out from the outlet 57, leaving the illumination device D.

[0144] Example 6:

[0145] This embodiment discloses a material conveying device for conveying strip-shaped material K, referring to... Figures 28-36 As shown, the material conveying device includes a frame 60 and a material winding device 63 and a tension adjusting component 67 mounted on the frame 60. The material winding device 63 is used for winding or unwinding, and the tension adjusting component 67 is used to adjust the tension of the strip material K. When the material winding device 63 is used for winding, the material conveying device is a winding mechanism G; when the material winding device 63 is used for unwinding, the material conveying device is an unwinding mechanism E.

[0146] In this embodiment, as Figure 30 and Figure 34 As shown, the material reel 63 includes: an air shaft 632, a reel tube 633, and a second driving component 631. The air shaft 632 is rotatably connected to the second frame 60. The reel tube 633 is sleeved outside the air shaft 632. The second driving component 631 is drively connected to the air shaft 632 and is used to drive the air shaft 632 to rotate. The movement of the air shaft 632 causes the reel tube 633 to be fixedly connected to the air shaft 632, and then the reel tube 633 can be driven to rotate to perform the winding operation of the strip material K or to unwind the strip material K sleeved on the reel tube 633 for the unwinding operation.

[0147] In this embodiment, as Figure 29 and Figure 34 As shown, the tension adjustment assembly 67 includes: at least one pair of guide rollers 671, guide roller 672, distance adjuster 673, and tension detection element. The at least one pair of guide rollers 671 are arranged in parallel at intervals and are rotatably connected to the frame 60. The guide roller 672 is rotatably connected to the frame 60 in a radially movable manner (e.g., vertically). This radially movable rotatable connection to the frame 60 means that the guide roller 672 can move radially as needed and is also rotatably connected to the frame 60. The distance adjuster 673 is located on the frame 60 and connected to the guide roller 672. It is used to drive the guide roller 672 to move radially, adjusting the distance between the guide roller 672 and the guide roller 671, thereby adjusting the tension of the strip material K. The specific structure of the distance adjuster 673 is a conventional linear actuator such as a linear motor, cylinder, hydraulic cylinder, or synchronous belt assembly. Figure 29 The distance adjuster 673 shown is a synchronous belt assembly. The motor drives the synchronous belt to rotate, and the guide roller 672 is connected to the synchronous belt. The synchronous belt drives the guide roller 672 to move up and down on the frame 60. The tension detection element is located at the axial end of the guide roller 671 and / or the guide roller 672, and is used to detect the tension on the strip material K. The common tension detection element is a tension sensor.

[0148] In this embodiment, as Figure 32 and Figure 36As shown, one end of the strip material K is adapted to sequentially wrap around one guide roller 671, guide roller 672, and another guide roller 671 before being wound around the outer circumference of the winding tube 633. Therefore, regardless of whether the material winding device 63 is winding or unwinding, the tension on the strip material K can be accurately detected by the tension detection element, and then the tension on the strip material K can be adjusted by the distance adjuster 673. The tension detection and adjustment are highly accurate and fast, thereby ensuring that the tension on the strip material K is stable and does not fluctuate violently, ensuring the safe and stable conveying of the strip material K.

[0149] In this embodiment, further, such as Figure 29 and Figure 34 As shown, the second frame 60 is equipped with a splicing assembly 66 for splicing two strips of material K together. The splicing assembly 66 includes: a splicing plate 661, a lifting device 663, a pair of pressure strips 662, a cutter, and adhesive. The splicing plate 661 is fixedly connected to the second frame 60. The upper surface of the splicing plate 661 has a cutting groove 664. The strip of material K passes along the upper surface of the splicing plate 661 during the conveying process. The lifting device 663 is fixedly connected to the splicing plate 661. The pair of pressure strips 662 are located at both ends of the conveying direction of the strip of material K above the splicing plate 661 and are connected to the lifting device 663. The lifting device 663 is configured to drive the pressure strips 662. The 62-section descends to press and fix the strip material K on the upper surface of the splicing plate 661; the cutter (not shown in the figure) is located above the cutter groove 664. The cutter is driven by a person or machine to descend and insert into the cutter groove 664, and cuts the strip material K on the upper surface of the splicing plate 661, thereby forming a flat cut at one end of the strip material K. Subsequently, the cuts of the two strip materials K are aligned and tightly attached together. Then, the two strip materials K are glued together by a machine or a person using an adhesive. This design, relying on the splicing component 66 to splice and connect the two strip materials K, reduces the difficulty of manual splicing and improves the splicing efficiency compared to the method of splicing by hand without any equipment.

[0150] In this embodiment, further, such as Figure 30 and Figure 34As shown, the second frame 60 is equipped with a positioning component 62 for positioning the material roll wrapped around the tube 633. The positioning component 62 includes: a second rotating shaft 621, a swing arm 622, and a shaft frame 623. The shaft frame 623 is fixedly connected to the second frame 60. The second rotating shaft 621 is rotatably fixedly connected to the shaft frame 623. This means that the second rotating shaft 621 and the shaft frame 623 are normally kept fixedly connected. When the second rotating shaft 621 is moved, the second rotating shaft 621 can rotate. The swing arm 622 is fixedly connected to the second rotating shaft 621. This design allows the swing arm 622 to be moved as needed to rotate the second rotating shaft 621 and adjust the position of the swing arm 622, so that the swing arm 622 can better position the material roll wrapped around the tube 633 axially and prevent it from shifting and affecting the winding or unwinding of the strip material K.

[0151] Furthermore, such as Figure 30 and Figure 34 As shown, the second frame 60 is equipped with a third frame 74 suitable for sliding along the axial direction of the air expansion shaft 632. The material reel 63 and the positioning component 62 are mounted on the third frame 74. This design allows for fine-tuning of the positions of the material reel 63 and the positioning component 62 to the material reel take-up / unwind position after the material conveying device is installed and fixed, which is convenient and practical, eliminating the hassle of fine-tuning the position of the second frame 60. Furthermore, to facilitate the sliding of the third frame 74, a fourth transverse component 61 can be provided, which drives the third frame 74 to move relative to the second frame 60.

[0152] In this embodiment, as Figures 29-31 As shown, the second frame 60 or the third frame 74 is equipped with a position detector 65. The position detector 65 is used to detect the position of the strip material K so as to correct it in time after the strip material K deviates from its position, thereby ensuring the safety of material conveying. Furthermore, as... Figure 34 As shown, the frame 2 60 or the frame 3 74 is provided with a transverse component 5 71. The transverse component 5 71 is connected to a position detector 65, which is used to drive the position detector 65 to move axially along the air expansion shaft 632. This design makes it easy for the position detector 65 to be used for strip materials K of different widths.

[0153] Specifically, the position detector 65 includes conventional detection elements used to detect the position of materials, such as ultrasonic sensors, photoelectric sensors, and laser sensors.

[0154] In this embodiment, as Figure 28 and Figure 32As shown, the frame 60 is equipped with multiple baffles 73, which are configured as an isolation cover 75 to separate the internal environment of the conveying device from the outside. An antistatic filter 69 is installed outside the isolation cover 75. The antistatic filter 69 includes a plasma generator, a blower, and a filter element. The plasma generator provides plasma to the internal environment of the conveying device, and the blower drives the flow of outside air to enter the internal environment of the conveying device after being filtered by the filter element. This design relies on the antistatic filter 69 to, on the one hand, input clean air into the internal environment of the conveying device, preventing external dust-laden gas from entering the conveying device and contaminating the strip material K, thus keeping the strip material K clean. On the other hand, it provides plasma to the internal environment of the conveying device, which can eliminate the static electricity carried by the strip material K, avoiding secondary contamination of the strip material K caused by electrostatic dust attraction, and ensuring the exposure quality of the strip material K.

[0155] Specifically, the filter element is filter paper, and the plasma generator is located downstream or upstream of the filter element in the direction of airflow, using airflow to deliver plasma into various locations within the internal environment of the conveying device.

[0156] Furthermore, such as Figures 32-36 As shown, the frame 60 of the unwinding mechanism E is equipped with a debris remover 70. The debris remover 70 includes at least a pair of parallel and spaced-apart sticky rollers 702. The sticky rollers 702 are rotatably connected to the frame 60. The pair of sticky rollers 702 are configured such that when the strip material K passes between the pair of sticky rollers 702, the two sides of the strip material K respectively roll into contact with the outer circumferential surface of a sticky roller 702. The outer circumferential surface of the sticky roller 702 is configured to stick away the debris on the surface of the strip material K. The debris is removed from the surface of the strip material K by the debris remover 70, making the surface of the strip material K clean and tidy. The strip material K after cleaning by the debris remover 70 carries static electricity. The plasma injected into the internal environment of the conveying device by the static elimination filter 69 can eliminate the static electricity, avoid secondary contamination of the strip material K caused by static dust attraction, and ensure the exposure quality of the strip material K.

[0157] In this embodiment, as Figure 35As shown, the cleaning device 70 also includes at least two adhesive rollers 704 parallel to the first adhesive roller 702 and a lifting device 705 rotatably connected to the second adhesive roller 704. The lifting device 705 is mounted on the frame 60 and is used to drive the two second adhesive rollers 704 to move radially to contact the two first adhesive rollers 702 respectively. Adhesive paper is detachably attached to the outer circumferential surface of the second adhesive roller 704. After the adhesive paper contacts the first adhesive roller 702, it can remove the debris from the outer circumferential surface of the first adhesive roller 702. By adopting the above technical solution, when there is a lot of debris on the surface of the first adhesive roller 702 and it needs to be cleaned, the second adhesive roller 704 is controlled to move radially to contact the first adhesive roller 702, and the adhesive paper is used to remove the debris from the surface of the first adhesive roller 702, thereby cleaning the surface of the first adhesive roller 702. The adhesive paper is detachable for easy cleaning. Replacement is achieved by controlling the radial movement of the second adhesive roller 704 to separate it from the first adhesive roller 702 when the surface of the adhesive roller 702 does not need cleaning. This design facilitates the cleaning and maintenance of the first adhesive roller 702. Typically, to ensure good adhesive performance, the outer circumferential surface of the first adhesive roller 702 is made of adhesive silicone or latex. This type of adhesive material has good weather resistance, a long service life, and its adhesiveness does not easily decline, allowing it to cleanly and thoroughly remove debris from the surface of the strip material K. However, this also leads to the problem of inconvenient cleaning when there is a lot of debris on the outer circumferential surface of the first adhesive roller 702. Therefore, the second adhesive roller 704 is set up to clean the debris on the outer circumferential surface of the first adhesive roller 702 using adhesive tape. Afterward, the adhesive tape can be removed and replaced with a new one, making the cleaning and maintenance of the first adhesive roller 702 simple, convenient, and practical.

[0158] Furthermore, such as Figure 35 As shown, there are two pairs of adhesive rollers 702, which are parallel and spaced apart. One adhesive roller 704 can move radially to contact the two adhesive rollers 702. Multiple adhesive rollers 702 can better remove debris from the surface of the strip material K, ensuring that the surface of the strip material K is clean and tidy.

[0159] Furthermore, such as Figure 35 As shown, the cleaner 70 also includes a lifter 703 mounted on the frame 60. The lifter 703 is rotatably connected to the sticky roller 702 and is used to drive the sticky roller 702 to move radially to adjust the distance between the pair of sticky rollers 702 to adapt to strip materials K of different thicknesses.

[0160] Preferably, to facilitate the installation of the first adhesive roller 702 and the second adhesive roller 704 and their rotary connection with the third lifting device 705 and the second lifting device 703, such as Figure 35As shown, the impurity remover 70 has a housing 701, with lifting device three 705 and lifting device two 703 fixedly installed inside the housing 701. The housing 701 is fixedly connected to the frame two 60. Roller frame three 706 and roller frame four 707 are slidably installed inside the housing 701. Two pairs of sticky impurity rollers one 702 are rotatably installed on roller frame three 706. Lifting device two 703 is connected to roller frame three 706 to drive roller frame three 706 to lift and lower to adjust the distance between a pair of sticky impurity rollers one 702. Sticky impurity roller two 704 is rotatably installed on roller frame four 707. Roller frame four 707 is connected to lifting device three 705 to drive roller frame four 707 to lift and lower, causing sticky impurity roller two 704 to move radially to contact sticky impurity roller one 702.

[0161] Furthermore, such as Figure 32 and Figure 36 As shown, guide rollers 364 and 68 for guiding the conveying of strip material K are rotatably mounted on frame 2 60 or frame 3 74. Guide roller 3 64 is located between the feeder 63 and the tension adjustment component 67 in the conveying direction of strip material K. The splicing component 66 is located between guide roller 3 64 and the tension adjustment component 67 in the conveying direction of strip material K. In the winding mechanism G, guide roller 68 is located upstream of the tension adjustment component 67 in the conveying direction of strip material K. In the unwinding mechanism E, guide roller 68 is located downstream of the tension adjustment component 67 in the conveying direction of strip material K. The impurity remover 70 is located between guide roller 68 and the tension adjustment component 67 in the conveying direction of strip material K.

[0162] Furthermore, such as Figure 32 and Figure 36 As shown, the frame 2 60 is provided with a guide roller 72. The guide roller 72 is located downstream of the guide roller 68 in the conveying direction of the strip material K. The guide roller 72 is used to guide the strip material K released by the unwinding mechanism E away from the unwinding mechanism E.

[0163] Example 7:

[0164] This embodiment discloses an exposure device, such as... Figure 37 and Figure 38As shown, it includes the mask device C of Embodiment 4, two illumination devices D of Embodiment 5, and the winding mechanism G and unwinding mechanism E of Embodiment 6. One of the illumination devices D has a material feeding mechanism 58. The two illumination devices D are located on the left and right sides of the mask device C. The illumination devices D on the left and right sides of the mask device C respectively irradiate parallel light onto the mask plate 9 of a mask assembly A to perform double-sided exposure of the strip material K. The mask device C includes a mask mechanism B, and the mask mechanism B includes a mask assembly A. The specific structure and working principle of the mask device C, mask mechanism B, and mask assembly A have been described in detail in Embodiments 1 to 4 above, and will not be repeated here. The winding mechanism G and the unwinding mechanism E are located on the side of the two illumination devices D opposite to the mask device C. The unwinding mechanism E is used to unwind the rolled strip material K to be exposed. The unwound strip material K enters the mask device C and passes through the pair of mask plates 9. The winding mechanism G is used to roll up the exposed strip material K into a roll. When the strip material K passes through the space between a pair of mask plates 9, the pair of guide frames 2 fit tightly together to seal and isolate the strip material K located inside the guide frames 2 from the outside. At this time, the pair of mask plates 9 are in close contact with the strip material K. Subsequently, the gas between the pair of mask components A can be extracted to achieve vacuum adsorption and tight adhesion between the mask plate 9 and the strip material K.

[0165] Furthermore, such as Figures 37-39 As shown, the top of the machine cover 49 is provided with a material conveying mechanism F. The material conveying mechanism F is used to convey the strip material K output by the unwinding mechanism E to the feed port 50. Then, it passes through the pair of mask assemblies A downward from the feed port 50, passes around the guide roller 44, and extends out from the discharge port 46 into the material conveying mechanism 58. The material conveying mechanism 58 continues to convey the strip material K, which extends out from the discharge port 57, leaves the light exposure device D, and enters the winding mechanism G to wind up the exposed strip material K into a roll.

[0166] Specifically, such as Figures 39-41 As shown, the material conveying mechanism F includes: a second active roller 82 and a second adjusting roller 84, and a fifth push-pull device 87. The second active roller 82 and the second adjusting roller 84 are arranged parallel to each other at intervals so that the strip material K passes between the second active roller 82 and the second adjusting roller 84. The second active roller 82 is rotatably connected to the machine cover 49, and the second adjusting roller 84 is rotatably connected to the machine cover 49 in a radially movable manner. The second active roller 82 is driven by a third driving member 83, which is used to drive the second active roller 82 to rotate. The fifth push-pull device 87 is connected to the machine cover 49 and the second adjusting roller 84 and is used to drive the second adjusting roller 84 to move relative to the machine cover 49 to adjust the distance between the second active roller 82 and the second adjusting roller 84 so as to clamp strip materials K of different thicknesses.

[0167] Furthermore, such as Figures 39-41In order to facilitate the connection of the active roller 82, the adjusting roller 84, the push-pull device 87 and the machine cover 49, the material conveying mechanism 1F also has a frame 4 80. The frame 4 80 is fixedly connected to the machine cover 49. The frame 4 80 is fixedly installed with a roller frame 5 85. The active roller 82 is rotatably mounted on the roller frame 5 85. The push-pull device 5 87 is fixedly mounted on the roller frame 5 85. A slide block 2 86 is slidably mounted on the roller frame 5 85. The adjusting roller 84 is rotatably mounted on the roller frame 5 85. The push-pull device 5 87 is connected to the slide block 2 86. The distance between the active roller 82 and the adjusting roller 84 is adjusted by the sliding adjustment of the slide block 2 86 driven by the push-pull device 5 87. Furthermore, a rack 2 90 is fixedly installed on the slide block 2 86, and a rotating shaft 3 88 is rotatably installed on the roller frame 5 85. A gear 2 89 is installed on the rotating shaft 3 88, and the gear 2 89 meshes with the rack 2 90. The slide block 2 86 slides to drive the rotating shaft 3 88 to rotate. This design makes the rotation of the active roller 2 82 and the adjustment roller 2 84 stable and the spacing adjustment smooth, without the problem of asynchronous displacement at both ends of the adjustment roller 2 84.

[0168] In this embodiment, to further facilitate the conveying mechanism F in conveying the strip material K, such as... Figures 39-41 As shown, the roller frame 85 is rotatably equipped with guide roller 81, guide roller 91, and guide roller 102, as follows: Figure 36 and Figure 41 As shown, the strip material K output from guide roller 72 enters the conveying mechanism 1F, and then sequentially passes through guide roller 81, drive roller 2 82, guide roller 91, and guide roller 10 92 before flowing downwards through the feed inlet 50 into the mask device C. Inside the mask device C, the strip material K passes between a pair of mask assemblies A, then passes around guide roller 1 44 and extends out from the discharge outlet 1 46 into the conveying mechanism 2 58. The conveying path of the strip material K in the conveying mechanism 2 58 is as follows: Figure 27 As shown, the second conveying mechanism 58 continues to convey the strip material K, which extends out of the outlet 57, leaves the illumination device D, and enters the winding mechanism G, as shown. Figure 32 As shown, the strip material K leaving the illumination device D enters the winding mechanism G via guide roller 68 and is wound into a roll.

Claims

1. An exposure apparatus for double-sided exposure of strip materials, characterized in that: The application relates to a mask device, two material conveying devices and a pair of light irradiation devices, the mask device comprises two mask mechanisms, the mask mechanisms comprise mask assemblies, the mask assemblies of the two mask mechanisms are symmetrically arranged and adapted to be tightly attached to each other to tightly seal one section of a strip-shaped material; The mask assembly comprises a mask frame and a mask plate, the mask frame is provided with a through hole one, the mask plate is attached to one side of the mask frame provided with the through hole one and seals one end of the through hole one, the side is provided with a plurality of air suction holes one, the air suction holes one are distributed around the through hole one, a guide frame is attached to the side, the air suction holes one are located between the mask plate and the guide frame, the thickness of the guide frame is not less than that of the mask plate, the mask frame is internally provided with an air suction hole communicated with the air suction holes one, one end of the air suction hole extends to the outer wall of the mask frame, when the strip-shaped material penetrates between the two mask plates, the two guide frames tightly attach to each other to seal the strip-shaped material in the guide frames from the outside, and at this time, the two mask plates tightly attach to the strip-shaped material; The light irradiation devices are respectively arranged on the two sides of the mask device and respectively irradiate parallel light to the mask plates of the mask assemblies, the light irradiation device comprises a rack one, a light source, a reflecting mirror one, a reflecting mirror two and a reflecting mirror three arranged on the rack one, the rack one is provided with an out-light door, the light emitted by the light source can be reflected by the reflecting mirror one, the reflecting mirror two and the reflecting mirror three in sequence to form horizontal parallel light and penetrate the out-light door to irradiate the mask plate; The two material conveying devices are respectively arranged on the sides of the light irradiation devices away from the mask device, one of the two material conveying devices is used for unfolding the strip-shaped material to be exposed, the unfolded strip-shaped material penetrates between the two mask plates, and the other material conveying device is used for winding the exposed strip-shaped material into a roll; the material conveying device comprises a rack two and a material winding device and a tension adjusting assembly arranged on the rack two, the material winding device has: an air inflation shaft connected with the rack two, a winding pipe sleeved on the air inflation shaft, a driving part two in transmission connection with the air inflation shaft for driving the air inflation shaft to rotate, the tension adjusting assembly has: at least one pair of guide rollers four arranged in parallel and connected with the rack two, a guide roller five movably connected with the rack two, a distance adjuster arranged on the rack two and connected with the guide roller five for driving the guide roller five to move radially to adjust the distance between the guide roller five and the guide roller four, a tension detection element arranged on the axial end of the guide roller four and / or the guide roller five, one end of the strip-shaped material is adapted to pass through one of the guide rollers four, the guide roller five and the other guide roller four in sequence and then wind around the outer circumferential surface of the winding pipe, the side one is provided with a back-shaped groove one, the back-shaped groove one is provided with air suction holes two communicated with the air suction holes one, the through hole one is located in the back-shaped groove one, and the mask plate covers the back-shaped groove one, the side one is provided with a back-shaped groove two communicated with the air suction holes, the guide frame covers the back-shaped groove two, a sealing ring one is tightly arranged between the guide frame and the side one, the back-shaped groove two is located in the sealing ring one, a gap is formed between the guide frame and the side one located in the back-shaped groove two, and the gap is configured to allow the gas in the guide frame to penetrate into the back-shaped groove two.

2. The exposure apparatus according to claim 1, wherein: The mask device further comprises a fixed base and a movable base slidably connected with the fixed base, and a pair of housings slidably connected with the movable base, the sliding direction of the movable base being parallel to the side of the mask frame with the through hole one, the sliding direction of the housing being perpendicular to the side of the mask frame with the through hole one, the housings being spaced apart, and the two mask mechanisms being respectively installed on the housings; The fixed base is provided with a guide roller one below the pair of mask assemblies, the movable base is provided with a discharge port one, the outer cover of the two mask mechanisms is provided with a housing, the top of the housing is provided with an inlet, and the inlet is above the pair of mask assemblies; The top of the housing is provided with a feeding mechanism one, the feeding mechanism one is used for conveying the belt-shaped material output by the feeding device for unwinding the coiled belt-shaped material to be exposed to light to the inlet, and then the belt-shaped material is fed from the inlet downward, penetrates between the pair of mask assemblies, passes around the guide roller one, and then is stretched out from the discharge port one to enter the feeding device for winding the belt-shaped material after exposure into a roll.

3. The exposure apparatus according to claim 2, wherein: The feeding mechanism one has: A driving roller two and an adjusting roller two are spaced apart and arranged in parallel, so that the belt-shaped material passes between the driving roller two and the adjusting roller two, the driving roller two is connected with the housing rotation, the adjusting roller two is connected with the housing rotation and can move radially, the driving roller two is drivingly connected with a driving member three, and the driving member three is used to drive the driving roller two to rotate; A push-pull device five is connected with the housing and the adjusting roller two, and is used to drive the adjusting roller two to move relative to the housing to adjust the distance between the driving roller two and the adjusting roller two, so as to clamp the belt-shaped material with different thicknesses.

4. The exposure apparatus according to claim 2, wherein: The housing one is provided with a feeding mechanism two and a discharge port two, the belt-shaped material stretched out from the discharge port one is conveyed through the feeding mechanism two and stretched out from the discharge port two to enter the feeding device for winding the belt-shaped material after exposure into a roll.

5. The exposure apparatus according to claim 4, wherein: The feeding mechanism two includes: At least one guide roller two is connected with the housing one rotation; A driving roller one and an adjusting roller one are spaced apart and arranged in parallel, so that the belt-shaped material passes between the driving roller one and the adjusting roller one, the driving roller one is connected with the housing one rotation, the adjusting roller one is connected with the housing one rotation and can move radially, the driving roller one is drivingly connected with a driving member one, and the driving member one is used to drive the driving roller one to rotate; A push-pull device four is connected with the housing one and the adjusting roller one, and is used to drive the adjusting roller one to move relative to the housing one to adjust the distance between the driving roller one and the adjusting roller one, so as to clamp the belt-shaped material with different thicknesses.

6. The exposure apparatus according to one of claims 1, wherein: The guide frame is provided with a sealing ring two on the side opposite to the mask frame.

7. The exposure apparatus according to any one of claims 1, wherein: The upper and lower ends of the mask frame are respectively provided with a roller one and a roller two; The side one is provided with a plurality of limiting blocks arranged circumferentially around the mask plate, and the limiting blocks abut against the edges of the mask plate; The side one is provided with a guide wheel, and the guide wheel is adapted to be connected with the bottom surface of the mask plate in rolling mode.

8. The exposure apparatus according to one of claims 1, wherein: The mask mechanism further comprises a mounting frame one and a mounting frame one, the mounting frame one and the mounting frame one are connected through a connector, and the connector is connected with the mounting frame one and the mounting frame one. The mounting frame one is configured with a through hole two, the mounting frame one is provided with a clamp, the clamp is configured to be suitable for clamping and fixing the mask assembly on the side of the mounting frame one configured with the through hole two, and the through hole one and the through hole two are opposite.

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