Fork structure, mask transmission device and semiconductor equipment

Abstract

The embodiment of the invention provides a plate fork structure, a mask plate transmission device and semiconductor equipment. The plate fork structure comprises a plate fork main body which forms a space for accommodating a mask plate; the two clamping jaw groups are rotationally connected with the forking main body; and the position adjusting mechanism is arranged on the plate fork main body and is used for driving the two clamping jaw groups to rotate by a preset angle relative to the plate fork main body, so that one of the two clamping jaw groups is located at a clamping working position so as to clamp the mask plate of which the lap joint position corresponds to the clamping working position. By rotating the two sets of clamping jaw groups, efficient compatibility of the two types of mask plates is realized, cavity opening is not needed, and the productivity and reliability of the whole machine are improved.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of semiconductor manufacturing equipment, in particular to a mask fork structure, a mask plate conveying device and a semiconductor device. BACKGROUND

[0002] In the semiconductor manufacturing process, as a key lithography pattern carrier, the mask plate needs to be frequently and accurately conveyed and positioned between different machines and processes. In the prior art, a mask fork structure is often used to realize the taking and placing and supporting of the mask plate. The conventional mask fork usually includes a main frame and a clamping mechanism fixed thereon, and the clamping position thereof is fixedly designed and is only suitable for mask plates of specific sizes or lap joint positions. In actual production, due to the variety of product types, the sizes, shapes and edge lap joint positions of the mask plates are different, and the fixed mask fork structure cannot adapt to the clamping requirements of mask plates of various specifications.

[0003] To solve the above problems, the prior art realizes the compatibility of multiple specifications by using multiple special mask fork structures, but multiple special mask fork structures often occupy a large space and are prone to interference with surrounding mechanisms. SUMMARY

[0004] The mask fork structure, the mask plate conveying device and the semiconductor device provided by the embodiments of the present application are used to solve the technical problem that the mask fork structure occupies a large space and is prone to interference with surrounding mechanisms.

[0005] In a first aspect, the present application provides a mask fork structure, comprising: a mask fork main body; two jaw sets, both of which are rotationally connected with the mask fork main body; and a position adjusting mechanism, which is arranged on the mask fork main body and is used to drive the two jaw sets to rotate by a preset angle relative to the mask fork main body, so that one of the two jaw sets is in a clamping working position to clamp a mask plate corresponding to the clamping working position in terms of the lap joint position.

[0006] The mask fork structure provided by the present application can control the rotation of the jaw sets relative to the mask fork main body through the precise driving of the position adjusting mechanism, so as to adapt to the lap joint positions of different mask plates, and realize the accurate clamping of mask plates of two specifications without increasing the height and complexity of the mask fork structure. This not only avoids the interference between the mask fork structure and other structural components, but also realizes a simple implementation, effectively avoids the cleanliness pollution risk caused by manual intervention, and significantly improves the production capacity and operation reliability while maintaining a high cleanliness standard.

[0007] In one possible implementation, the fork structure further includes a first connector and a second connector, with a space for accommodating the mask formed between the first connector and the second connector; each gripper assembly includes a first gripper unit and a second gripper unit, the first gripper unit being fixedly connected to the first connector and the second gripper unit being fixedly connected to the second connector; both the first connector and the second connector are rotatably connected to the fork body; a position adjustment mechanism is used to drive the first connector relative to the fork body and drive the second connector to rotate relative to the fork body by a preset angle.

[0008] In this embodiment, since each gripper group includes a first gripper unit and a second gripper unit, and the space between the first connector and the second connector is clearly defined to accommodate the mask, and both the first connector and the second connector are rotatably connected to the fork body and driven to rotate by the position adjustment mechanism respectively, the modularity and independent movement of the gripper unit can be realized. Furthermore, it provides the position adjustment mechanism with a clear and independent execution object and rotation fulcrum. Therefore, the position adjustment mechanism can drive the first gripper unit and the second gripper unit (i.e., the entire gripper group) that are fixedly connected to them to perform synchronous and stable angle switching by directly and accurately controlling the synchronous rotation of the first connector and the second connector. This ensures that the entire gripper group has higher structural rigidity and synchronization when rotating and switching working states, and the transmission path of the clamping force is more direct. It avoids positioning errors or unstable clamping caused by internal relative motion, and ultimately achieves more reliable and accurate clamping and positioning of the mask.

[0009] In one possible implementation, the fork body includes a first support member and a second support member, a first connector is rotatably connected to the first support member, a second connector is rotatably connected to the second support member, and a position adjustment mechanism is used to drive the first connector to rotate relative to the first support member by a preset angle, and to drive the second connector to rotate relative to the second support member by a preset angle.

[0010] The fork body is split into a first support component and a second support component, so that each connector rotates and is driven independently with respect to its corresponding support component. This independent support and drive design ensures that the adjustment of the two connectors does not interfere with each other, and can more accurately match different overlapping positions on both sides of the mask. At the same time, the dispersed support structure reduces the load on individual support components, improves the stability of the overall structure, reduces errors caused by linkage adjustment, has a wider range of adaptability, and effectively improves the equipment's compatibility with diverse masks.

[0011] In one possible implementation, the position adjustment mechanism is used to drive the first connector and the second connector to rotate around a first direction by a preset angle; of the two gripper groups, one gripper group is disposed on the upper side of the corresponding connector, and the other gripper group is disposed on the lower side of the corresponding connector, and both gripper groups face the space accommodating the mask and are staggered in a second direction; the corresponding connector is the first connector or the second connector, the first direction is the direction from the first connector to the second connector, the second direction is the direction in which the first connector and the second connector extend, and the first direction is perpendicular to the second direction.

[0012] By driving the connector to rotate around the first direction (the direction between connectors), and with the gripper assemblies staggered vertically and all facing the receiving space, two gripper assemblies can be compactly arranged in the height direction, avoiding interference between the assemblies; at the same time, rotation adjustment can quickly switch between different gripping working positions, accurately adapting to different overlap heights of the mask plate, without the need to raise or lower the main body of the fork, reducing space occupation, avoiding collisions with surrounding structures, and significantly improving switching efficiency and ease of operation while ensuring cleanliness.

[0013] In one possible implementation, the position adjustment mechanism is used to drive the first connector and the second connector to rotate around a second direction by a preset angle; of the two gripper groups, one gripper group is disposed on the upper side of the corresponding connector and away from the space for receiving the mask, and the other gripper group is disposed on the lower side of the corresponding connector and facing the space for receiving the mask, and the two gripper groups are staggered in the second direction; the corresponding connector is the first connector or the second connector, and the second direction is the direction in which the first connector and the second connector extend.

[0014] By driving the connector to rotate around the second direction (the direction of the connector's extension), combined with the design of the gripper group being staggered vertically and facing one direction and facing away from the receiving space, the orientation of the gripper group can be switched by rotation without the need for additional structural movement, which greatly saves space. This layout allows the two gripper groups to not interfere with each other when not in operation, and can quickly adapt to the different overlapping requirements of the front and back of the mask. The structure is simple and reliable, reducing the risk of failure caused by complex movements and improving the response speed of the equipment.

[0015] In one possible implementation, the position adjustment mechanism is used to drive the first connector and the second connector to rotate around a third direction by a preset angle; both gripper groups are located on the upper or lower side of the corresponding connector, one gripper group faces the space accommodating the mask, and the other gripper group faces away from the space accommodating the mask, and the two gripper groups are staggered in the second direction; the corresponding connector is the first connector or the second connector, the second direction is the direction in which the first connector and the second connector extend, and the third direction is the up and down direction.

[0016] By driving the connector to rotate around a third direction (up and down), and with the gripper assembly arranged on the same side and with one facing and one facing away from the accommodating space in a staggered design, the orientation of the gripper assembly can be precisely adjusted in the horizontal plane to adapt to different overlapping positions of the mask plate in the horizontal direction. The rotational movement is small, avoiding collisions with surrounding structures. At the same time, the same-side layout reduces the space occupied in the vertical direction, making the fork structure more compact and enabling stable operation even in narrow spaces, further improving the space utilization and operational safety of the equipment.

[0017] In one possible implementation, the position adjustment mechanism includes a drive member, a first rotating shaft, and a second rotating shaft. The drive member is rotatably connected to the first rotating shaft and the second rotating shaft, respectively. The first rotating shaft is disposed on the fork body or the first support member, and the second rotating shaft is disposed on the fork body or the second support member. The first rotating shaft is fixedly connected to the first connecting member, and the second rotating shaft is fixedly connected to the second connecting member.

[0018] The position adjustment mechanism uses a single drive component to link the first and second rotating shafts, causing the two connecting parts to rotate synchronously. This single-drive dual-shaft design reduces the number of drive components, simplifies the overall structure, and lowers equipment costs and potential failure points. At the same time, synchronous drive ensures that the rotation angles of the two connecting parts are consistent, which can accurately fit the symmetrically positioned mask plates, reduce deviations caused by independent adjustment, and make maintenance more convenient. While improving equipment stability, it also ensures the consistency of clamping actions.

[0019] In one possible implementation, the position adjustment mechanism includes a first driving member, a first rotating shaft, a second driving member, and a second rotating shaft. The first driving member is disposed on the fork body, the first rotating shaft is disposed on the first support member, the first driving member is rotatably connected to the first rotating shaft, and the first rotating shaft is fixedly connected to the first connecting member; the second driving member is disposed on the fork body, the second rotating shaft is disposed on the second support member, the second driving member is rotatably connected to the second rotating shaft, and the second rotating shaft is fixedly connected to the second connecting member.

[0020] By driving the first and second rotating shafts with two drive components respectively, the two connectors can be adjusted independently. This independent drive design allows the two connectors to flexibly adjust their angles according to different overlapping requirements on both sides of the mask, adapting to more complex overlapping scenarios. At the same time, independent control improves the adjustment accuracy, enabling precise clamping even when facing asymmetrical overlapping masks, greatly expanding the applicability of the equipment and enhancing its responsiveness to diverse production needs.

[0021] In one possible implementation, the fork structure further includes a first connector and a second connector, with a space for accommodating a mask formed between the first connector and the second connector; each gripper assembly includes a first gripper unit and a second gripper unit, the first gripper unit being rotatably connected to the first connector, and the second gripper unit being rotatably connected to the second connector; both the first connector and the second connector are fixedly connected to the fork body; a position adjustment mechanism is used to drive the first gripper unit relative to the first connector and to drive the second gripper unit relative to the second gripper unit to rotate by a preset angle around a first direction or a second direction, the first direction being the direction from the first connector to the second connector, and the second direction being the direction in which the first connector and the second connector extend.

[0022] By fixing the connector to the fork body and allowing the gripper unit to rotate directly relative to the connector, this design simplifies the structure of the rotation mechanism and reduces the overall weight of the fork structure. The direct rotation of the gripper unit reduces the force transmission path, resulting in faster adjustment response and more flexible adaptation to the overlapping positions of small-sized or specially shaped masks. At the same time, it saves the space required for rotation, making the fork structure lighter and more compact, improving operational flexibility and equipment operating efficiency.

[0023] In one possible implementation, the fork structure further includes a locking mechanism located on the fork body. The locking mechanism is used to lock the angle of the gripper group after each gripper group has rotated a preset angle.

[0024] By locking the angle after the gripper assembly is in place, the locking mechanism can effectively prevent the gripper assembly or connecting parts from shifting due to unexpected factors such as vibration or external force. This ensures that the mask remains stable during transmission or clamping, avoiding mask damage or production failures caused by positional deviations. This locking function improves operational safety, reduces the frequency of manual inspections, and further guarantees product quality and production continuity while ensuring high cleanliness.

[0025] In one possible implementation, the fork structure further includes a controller electrically connected to the locking mechanism, the controller being used to control the locking and unlocking operations of the locking mechanism to lock or unlock the gripper assembly.

[0026] The locking mechanism is controlled by a controller, realizing a fully automated process for adjusting and locking the gripper assembly, which greatly improves operational efficiency.

[0027] In one possible implementation, the fork body is provided with a limiting mechanism for limiting the rotation angle of the gripper assembly.

[0028] By limiting the rotation angle of the gripper assembly through the limiting mechanism, collisions between the gripper assembly and the fork body, mask plate, or other structures caused by excessive rotation can be effectively prevented, avoiding damage to components and scratches on the mask plate. At the same time, the clearly defined angle limit range makes the adjustment action more controllable, reduces failures caused by operational errors, extends the service life of the equipment, ensures that all adjustments are carried out within a safe range, and significantly improves the reliability and stability of the equipment operation.

[0029] In one possible implementation, the fork structure further includes a controller electrically connected to a position adjustment mechanism. The controller is used to: determine whether the overlap position of the gripper group in the gripping working position matches the mask to be gripped; if they do not match, generate a control command for the position adjustment mechanism to switch the gripper group in the gripping working position.

[0030] The controller automatically judges and switches the gripper assembly and the overlapping position, completing the adaptation and adjustment without manual intervention. This automated control not only avoids the risk of cleanliness contamination that may be caused by manual operation, but also significantly improves the response speed and accuracy of gripper assembly switching. At the same time, the controller can judge the matching status in real time and dynamically adjust to ensure that each gripping action corresponds precisely to the mask overlapping position, effectively reducing mask damage or equipment failure caused by position misjudgment. While ensuring a high-cleanliness production environment, it further improves the automation level and production efficiency of the machine, and enhances the equipment's flexible adaptability to diverse production needs.

[0031] In one possible implementation, the controller is specifically configured to: if the gripper group in the gripping working position does not match the overlapping position of the mask to be gripped, generate a control command for the position adjustment mechanism to control the position adjustment mechanism to drive the first gripper unit to rotate relative to the first connector by a preset angle, and drive the second gripper unit to rotate relative to the second connector by a preset angle.

[0032] By adding a controller, closed-loop control was achieved. The controller can accurately determine the matching degree between the working position gripper group and the overlap position of the mask to be held. Once a mismatch is detected, a motion command is immediately generated to drive the position adjustment mechanism to switch the working position gripper group. This automated control significantly improves the accuracy and efficiency of adjustment, and can also respond in real time to the overlap requirements of different masks, making the adaptation process of the fork structure smoother. This further enhances the adaptability to the handling of diverse masks, providing more reliable intelligent support for the stable operation of semiconductor manufacturing processes.

[0033] In one possible implementation, the controller is further configured to: obtain the type of the mask template container to be clamped, and query the overlap position of the mask template to be clamped from a first mapping relationship according to the type; the first mapping relationship is used to characterize the mapping relationship between various types of masks and overlap positions.

[0034] By pre-setting multiple mapping relationships between mask types and overlapping positions, the controller can quickly call up the corresponding parameters and accurately determine the target position without complex real-time calculations, which greatly improves the response speed and adaptation efficiency to different types of masks. At the same time, this query method based on pre-stored mapping relationships avoids position judgment errors caused by on-site identification deviations, ensures the accuracy of the overlapping position, and makes the adjustment of the gripper assembly more targeted.

[0035] In one possible implementation, the controller is further configured to determine whether the overlap position of the gripper group in the gripping position matches the mask to be gripped by at least one of the following methods: receiving a detection signal from a sensor on the fork structure, and determining whether the overlap position of the gripper group in the gripping position matches the mask to be gripped based on the detection signal; determining the gripper group in the gripping position according to the historical control instructions of the position adjustment mechanism; obtaining the mask type corresponding to the gripper group in the gripping position; and determining whether the mask type corresponding to the gripper group in the gripping position is consistent with the type of the mask to be gripped.

[0036] The controller determines whether the overlap position of the working position gripper assembly matches the mask to be gripped by receiving sensor detection signals or calculating the current position based on historical motion commands from the position adjustment mechanism. This design further improves the accuracy and reliability of the matching judgment. Using sensor detection signals can reflect the actual position or state of the gripper in real time and directly, thereby improving the accuracy of the matching judgment. Historical motion commands can ensure the continuity of the working position gripper assembly's state determination through logical tracing, maintaining basic judgment functions even in the event of temporary sensor failure. The combination of these two methods forms a complementary matching verification mechanism, effectively avoiding the omissions that may exist with a single judgment method, ensuring the accuracy of the matching judgment between the working position gripper assembly and the overlap position, and providing a reliable basis for the precise execution of subsequent adjustment actions.

[0037] In one possible implementation, the controller is further configured to perform the following steps after the control position adjustment mechanism drives the first gripper unit to rotate relative to the first connector by a preset angle and drives the second gripper unit to rotate relative to the second connector by a preset angle: obtain the detection result of the current detection optical path; if the detection result indicates that the configuration parameters of the current detection optical path do not match the mask located at the detection station, generate an optical path switching command for the optical path switching drive device so that the switched detection optical path matches the mask located at the detection station.

[0038] Through the aforementioned steps, dynamic adaptation between the detection optical path and the mask is achieved, avoiding detection errors caused by optical path mismatch and ensuring the detection accuracy of the mask. At the same time, optical path switching can be completed without manual intervention, improving the automation and efficiency of the detection process, making the entire mask picking, placing, and detection process more coherent and smooth, and further enhancing the adaptability and reliability of the equipment when handling different types of masks.

[0039] In one possible implementation, the controller is further configured to determine whether the current detection optical path matches the mask located at the detection station by at least one of the following methods: detecting the signal characteristics of the current detection optical path after it is incident on the mask located at the detection station, determining the alignment state of the current detection optical path based on the signal characteristics, and determining whether it matches based on the alignment state; reading the encoder reading of the optical path switching drive device, determining the alignment state of the current detection optical path based on the encoder reading, and determining whether it matches based on the alignment state.

[0040] By using a controller to detect the match between the optical path and the mask, the intelligence and automation of the detection process are improved, ensuring that the detection process is always carried out under optimal optical path conditions, thereby significantly improving the accuracy of mask detection. The signal characteristic-based judgment method directly reflects the actual effect of the interaction between the optical path and the mask. By analyzing the signal intensity, phase, and other characteristics, the alignment status can be accurately determined, avoiding misjudgments caused by mechanical positioning errors. The encoder-based judgment method, starting from the position parameters of the optical path itself, accurately traces the alignment of the optical path through quantified values, ensuring the objectivity of the judgment results. These two methods complement each other, taking into account both the actual effect of the interaction between the optical path and the mask and relying on mechanical parameters to ensure the stability of the judgment, effectively reducing the deviation that may exist with a single judgment method, providing a reliable basis for precise switching of the optical path, and further ensuring the accuracy and efficiency of mask detection.

[0041] In one possible implementation, the controller is also used to: after the detection optical path matches the mask template located at the detection station, control the mask template transmission device to transmit the mask template held by the gripper assembly to the motion mechanism based on the received mask template transmission command.

[0042] After confirming that the detection optical path matches the mask at the detection station, the controller controls the transmission device to deliver the clamped mask to the motion mechanism according to the received mask transmission command. This design significantly improves the continuity and automation of the mask processing flow, ensuring seamless connection between mask detection and transmission, and greatly improving the overall process efficiency. At the same time, the controller uniformly schedules the transmission process, strictly following the preset transmission path and timing, avoiding interference with other components during transmission, and ensuring the safety of the mask during the transfer process.

[0043] In one possible implementation, the controller is also configured to perform the following operations after the clamped mask is transferred to the motion mechanism: adjust the configuration parameters of the detection optical path; and control the motion mechanism to scan the transferred mask.

[0044] After the controller transfers the clamped mask to the motion mechanism, it adjusts the configuration parameters of the detection optical path and controls the motion mechanism to scan the mask, further optimizing the entire mask processing workflow. Adjusting the detection optical path configuration parameters ensures that the optical path and the mask on the motion mechanism maintain optimal fit during scanning, avoiding detection deviations caused by minor positional changes after transfer and significantly improving scanning accuracy. Simultaneously, the controller coordinates the optical path adjustment and the motion mechanism's scanning, achieving seamless integration from transfer to scanning, reducing inter-process waiting time, and significantly improving overall process efficiency.

[0045] Secondly, embodiments of this application provide a mask transfer device, including: the fork structure provided in the first aspect of this application and a robotic arm, wherein the fork structure is disposed at the end of the robotic arm.

[0046] Thirdly, embodiments of this application provide a semiconductor device, including: the mask transmission device provided in the second aspect of this application. Attached Figure Description

[0047] The accompanying drawings, which are incorporated in and form part of this specification, illustrate embodiments consistent with this application and, together with the description, serve to explain the principles of this application.

[0048] Figure 1a This is a schematic diagram of the first type of photomask;

[0049] Figure 1b This is a schematic diagram of the second type of mask;

[0050] Figure 2 This is a schematic diagram of the fork structure provided in Embodiment 1 of this application;

[0051] Figure 3 This is a schematic diagram of the gripper assembly provided in Embodiment 2 of this application;

[0052] Figure 4 This is a schematic diagram of the fork structure provided in Embodiment 3 of this application;

[0053] Figure 5a This is a bottom view of the fork structure for picking up and placing the first type of mask provided in Embodiment 4 of this application;

[0054] Figure 5b This is a bottom view of the fork structure for picking up and placing the second type of mask provided in Embodiment 4 of this application;

[0055] Figure 5c This is a front view of the fork structure provided in Embodiment 4 of this application;

[0056] Figure 5d This is a schematic diagram of the process of the connector rotating about the x-axis according to Embodiment 4 of this application;

[0057] Figure 6a This is a bottom view of the fork structure for picking up and placing the first type of mask provided in Embodiment 5 of this application;

[0058] Figure 6b This is a bottom view of the fork structure for picking up and placing the second type of mask provided in Embodiment 5 of this application;

[0059] Figure 6c This is a front view of the fork structure provided in Embodiment 5 of this application;

[0060] Figure 6d This is a schematic diagram of the process of the connector rotating about the y-axis according to Embodiment 5 of this application;

[0061] Figure 7a This is a bottom view of the fork structure for picking up and placing the first type of mask provided in Embodiment Six of this application;

[0062] Figure 7b This is a bottom view of the fork structure for picking up and placing the second type of mask provided in Embodiment Six of this application;

[0063] Figure 7c This is a front view of the fork structure provided in Embodiment Six of this application;

[0064] Figure 7d This is a bottom view of the connecting member provided in Embodiment Six of this application during its rotation around the z-axis;

[0065] Figure 7e For along Figure 7b A cross-sectional side view of the middle AA' line;

[0066] Figure 8 This is a schematic diagram of the structure of the mask transmission device provided in Embodiment 7 of this application;

[0067] Figure 9 This is a schematic diagram of the structure of the semiconductor device provided in Embodiment 8 of this application;

[0068] Figure 10 This is a schematic diagram of the working process of the semiconductor device provided in Embodiment 9 of this application.

[0069] Figure label:

[0070] 10-Mask;

[0071] 100 - Space to accommodate the photomask;

[0072] 20-page fork structure;

[0073] 210 - Fork body; 211 - First support member; 212 - Second support member; 213 - Fixing component; 220 - Gripper assembly; 220a - First gripper assembly; 220b - Second gripper assembly; 221 - First gripper unit; 222 - Second gripper unit; 223 - First connector; 224 - Second connector; 22 - Gripper; 23 - Support finger;

[0074] 230 - Position adjustment mechanism; 231 - Driving component; 2311 - First driving component; 2312 - Second driving component; 232 - First rotating shaft; 233 - Second rotating shaft;

[0075] 240-Controller;

[0076] 40 - Mask transfer device; 41 - Robotic arm;

[0077] 50-Semiconductor equipment; 51-Material transfer system; 52-Defect detection optical system; 53-Host computer; 54-Scanning motion system; 55-Image processing cluster.

[0078] The accompanying drawings have illustrated specific embodiments of this application, which will be described in more detail below. These drawings and descriptions are not intended to limit the scope of the concept in any way, but rather to illustrate the concept of this application to those skilled in the art through reference to specific embodiments. Detailed Implementation

[0079] Exemplary embodiments will now be described in detail, examples of which are illustrated in the accompanying drawings. When the following description relates to the drawings, unless otherwise indicated, the same numbers in different drawings denote the same or similar elements. The embodiments described in the following exemplary embodiments do not represent all embodiments consistent with this application. Rather, they are merely examples of apparatuses and methods consistent with some aspects of this application as detailed in the appended claims.

[0080] First, let me explain the terms used in this application:

[0081] PMI (Patterned Mask Inspection) is a key inspection process in semiconductor manufacturing for patterned masks. It aims to check for defects, dimensional accuracy, and integrity of the lithographic patterns on the mask, ensuring that the design patterns can be accurately transferred to the wafer and avoiding chip yield reduction or functional failure due to mask problems.

[0082] EFEM (Equipment Front End Module): This is the front-end component of semiconductor manufacturing equipment, located between the cleanroom and the process module. Its main functions include material management, transfer control, and automation integration. It is responsible for receiving and storing wafer cassettes or masks, loading and unloading and positioning the containers through robotic arms, and removing wafers or masks from the containers in cooperation with robotic arms such as grippers, and transferring them to the PMI or process module. It also enables status monitoring and fault alarms.

[0083] EE (End Effector): In semiconductor manufacturing equipment, it is the end-effector of a robotic arm or transport mechanism, responsible for performing actions such as gripping, placing, and transporting. In the EFEM scenario, EE specifically refers to the component that interfaces with the POD or wafer cassette and is responsible for gripping and transporting masks or wafers.

[0084] Photo-mask Open Cassette (POD): A special container for storing and transporting graphic photo masks. It has an open cassette structure and is designed to meet the requirements of cleanroom environments. It can protect the photo mask from contamination, physical damage or positional displacement during transportation, while facilitating gripping and positioning by automated equipment (such as EFEM).

[0085] Landing Zone: This is a specific structural area on the mask used for docking with automated equipment such as the EFEM robotic arm and EE. It is usually a flat metal or ceramic platform with positioning marks (such as grooves or scale lines) engraved on the surface.

[0086] Gripper: A mechanical device used in semiconductor automation equipment to grasp and transport precision components such as masks and wafers. It is usually installed at the end of the EFEM robotic arm or a dedicated transfer mechanism and opens and closes through pneumatic, electric or vacuum adsorption to pick up and release objects.

[0087] Gripper Finger: This is the core actuator of the gripper. It is a slender, finger-like structure located at the end of the gripper, directly contacting the edge of the mask. It achieves stable gripping of the mask through mechanical support or in conjunction with vacuum adsorption.

[0088] The technical solution of this application and how the technical solution of this application solves the above-mentioned technical problems are described in detail below with specific embodiments. These specific embodiments can be combined with each other, and the same or similar concepts or processes may not be described again in some embodiments. The embodiments of this application will be described below with reference to the accompanying drawings.

[0089] With the development of semiconductor technology, the demand for mask defect detection is increasing. Masks are classified in a refined manner based on process scenarios, and the design specifications of the container PODs they are paired with also show significant differentiation due to differences in mask type.

[0090] Taking the commonly used 6025 specification mask as an example, its matching containers include two types. The two types of containers have different dimensions, clearance design, and overlap positions, which means that different EFEM grippers are needed to pick up and place different types of masks.

[0091] Figure 1a This is a schematic diagram of the first type of photomask. Figure 1b This is a schematic diagram of the second type of mask. The specific differences in the overlap position and clearance space between the two types of masks are as follows: Figure 1a and Figure 1b As shown. Each type of mask includes 4 overlapping positions and 4 gripper clearance spaces. The overlapping positions are usually protrusions to provide a support platform for the gripper fingers. The gripper clearance spaces are spaces reserved in the POD frame for gripper operations (such as gripping and releasing), used to avoid interference and collision between the gripper and the POD frame, and are usually grooves, chamfers, etc.

[0092] See Figure 1a The first type of mask also includes vertical protective film clearance space and horizontal protective film clearance space, which are used to prevent the POD structure from contacting the protective film (Pellicle), to prevent damage to the protective film, and to ensure its protective function for the mask.

[0093] See Figure 1b The second type of mask eliminates the protective film, thus eliminating the need for space to avoid the protective film. Furthermore, the layout of the overlap position and the gripper clearance space differs from that of the first type of mask.

[0094] because Figure 1a and 1b It is known that for the two types of photomasks mentioned above, two sets of grippers are needed for picking and placing.

[0095] Traditionally, the clamping mechanism is replaced manually by opening a cavity, which poses a risk of contamination and is inefficient. To overcome this problem, one option is to configure multiple sets (or clusters) of clamping mechanisms on a single end effector (EE), with each set corresponding to a type of mask. To avoid motion interference between different sets of clamping mechanisms, they can be staggered in the vertical direction. However, this method involves multiple sets of clamping mechanisms interacting with the mask during the loading and unloading process, increasing the risk of interference. Furthermore, multiple sets of clamping mechanisms occupy a significant amount of space, resulting in a larger overall machine size and making a compact design difficult.

[0096] Another option is to configure multiple end effectors (EEs) on the EFEM robotic arm, with different types of masks corresponding to the gripping mechanisms configured on different EEs. However, this approach requires multiple EEs, resulting in a complex structure, a large overall size, and difficulty in achieving a compact design. Furthermore, the motion interference between EEs needs to be considered during film loading and unloading.

[0097] To address the aforementioned issues, this application provides a fork structure that, without increasing the number of clamping mechanisms, introduces a position adjustment mechanism to control the movement of a single set of clamping mechanisms (including two) along the supporting crossbeam. This allows for adaptation to different types of mask plates by changing the position of the clamping mechanisms. Since there is no need to set up multiple sets of clamping mechanisms, the structure is simple and saves space, eliminating the risk of motion interference caused by multiple sets of clamping mechanisms or multiple EEs. At the same time, the motion control complexity of the clamping mechanisms is low and the reliability is high.

[0098] Example 1

[0099] Figure 2 This is a bottom view of the fork structure provided in Embodiment 1 of this application, as shown below. Figure 2 As shown, the fork structure 20 includes a fork body 210, two gripper assemblies 220, and a position adjustment mechanism 230.

[0100] Both gripper assemblies 220 are rotatably connected to the fork body 210, either directly or indirectly through other components. The position adjustment mechanism 230 is disposed on the fork body 210 and is used to drive the two gripper assemblies 220 to rotate relative to the fork body 210 by a preset angle, so that one of the two gripper assemblies 220 is in the clamping working position to clamp the mask plate 10 whose overlapping position corresponds to the clamping working position. Figure 2 Taking each gripper group as an example, which includes two grippers, the grippers of the gripper group form a space 100 for accommodating the mask.

[0101] The fork body 210 is the load-bearing foundation of the entire structure. On the one hand, it provides an installation reference for the gripper assembly 220 and subsequent connecting parts. On the other hand, its own rigidity ensures the stability of the mask plate 10 during the picking and placing process, and avoids the mask plate from shifting or colliding due to frame shaking.

[0102] See also Figure 2 The fork body 210 has an overall "door" shaped frame structure, including a main body and two parallel extending crossbeams. The main body is set perpendicular to the two crossbeams, and its length matches the spacing between the two crossbeams, forming a stable frame structure.

[0103] The two gripper assemblies 220 can be rotatably connected to the fork body 210 in various ways. A direct rotatable connection can be achieved by setting a pivot at the connection point between the gripper assemblies 220 and the fork body 210. The two ends of the pivot are respectively embedded in the corresponding mounting holes of the fork body 210 and the gripper assemblies 220, allowing the gripper assemblies 220 to rotate freely around the pivot. An indirect rotatable connection can be achieved using intermediate components such as connecting arms, connectors, or supports. One end of the intermediate component is connected to the fork body 210 via a pivot, and the other end is also connected to the gripper assemblies 220 via a pivot, thus enabling the gripper assemblies 220 to rotate relative to the fork body 210.

[0104] The position adjustment mechanism 230 can be flexibly installed on the fork body 210. It can be embedded inside the fork body 210, for example, by reserving installation space in the cavity of the fork body 210 and installing the main components of the position adjustment mechanism 230 therein, with only the drive end connected to the gripper assembly 220 exposed; or the position adjustment mechanism 230 can be fixed to the outer surface of the fork body 210 and securely installed by brackets or other connectors to ensure that there is no position shift during driving.

[0105] The clamping working position refers to the specific position where the gripper assembly 220 can accurately and stably clamp the mask 10. When the mask 10 is transported to the space 100 that contains the mask, its overlapping position needs to correspond to the clamping working position of the gripper assembly 220 in order to be effectively clamped. Driving the two gripper assemblies 220 to rotate by a preset angle so that one of them is in the clamping working position is achieved by the driving action of the position adjustment mechanism 230. The position adjustment mechanism 230 can apply a driving force to the rotatable parts, such as the two gripper assemblies 220 or the connection between the gripper assembly 220 and the fork body 210, according to a preset program or the mask position information detected by the sensor, causing them to rotate around their respective rotation axes. When one of the gripper assemblies 220 rotates to an angle and position that matches the overlapping position of the mask 10, that gripper assembly 220 is in the clamping working position.

[0106] When the position adjustment mechanism 230 receives a corresponding instruction, it can call a preset program to start the drive component, such as a stepper motor, and transmit power to the rotatable part through a transmission structure, such as a gear set or a lead screw, to rotate it by a preset angle, such as 180°. The drive component then stops running, thereby switching the gripper group 220 in the clamping working position.

[0107] The fork body 210 serves as the basic frame of the fork structure 20. It can be a rectangular plate-like structure, the size of which depends on the dimensions of the mask plate 10, generally slightly larger than the mask plate 10 to ensure sufficient space for it. The fork body 210 is located in the central area of ​​the fork structure 20 and is the "skeleton" of the entire structure. All components are directly or indirectly connected to its body. Its main function is to provide mounting support for the gripper assembly 220 and the position adjustment mechanism 230, while ensuring the structural stability of the entire fork structure 20.

[0108] To balance lightweight design and high strength, the fork body 210 can be made of aerospace-grade aluminum alloy (such as 6061-T6) or carbon fiber composite material. Both materials have low deformation rates (coefficient of thermal expansion ≤20×10⁻). 6 With high rigidity (elastic modulus ≥69GPa) and high temperature (℃), it can avoid affecting the positioning accuracy of the mask due to its own deformation; at the same time, the surface can be anodized or polished to reduce the risk of particulate contamination and meet the environmental requirements of semiconductor cleanrooms (Class 10 and above).

[0109] The gripper assembly 220 is a component that directly contacts the mask, using mechanical clamping force to pick up, place, and support the mask. Different gripper assemblies 220 correspond to different types of mask 10 at their overlapping positions, thus allowing adaptation to different types of mask 10 by switching the gripper assembly 220 in the clamping working position. Specifically, the gripper assembly 220 in the clamping working position (which can be simply referred to as the working position) faces the space 100 that accommodates the mask to clamp it.

[0110] Each gripper group 220 can have one or more grippers 22 deployed on each connector. If there is only one gripper, it can be located on one side or in the center of the connector; if there are multiple grippers, they can be deployed along the direction in which the connector extends.

[0111] The two gripper groups 220 have the same structure. Each gripper group 220 contains multiple gripper units. Each gripper unit may include one or more grippers 22. The gripper 22 is composed of a gripper 22 unit and a connecting structure. The gripper 22 unit is L-shaped and its size is adapted to the overlapping edge of the mask 10. The multiple grippers 22 are evenly distributed.

[0112] Two gripper assemblies 220 are symmetrically mounted on both sides of the fork body 210, and can face or turn away from the space 100 that accommodates the mask plate. The gripper assemblies 220 are directly or indirectly connected to the fork body 210 through a rotating connection structure. Their main function is to clamp and fix the mask plate 10 when it is in the gripping working position, so as to prevent the mask plate 10 from shaking or falling during the conveying or processing.

[0113] The layout position of a gripper assembly 220 on the fork body 210 corresponds to the overlapping position of a type of mask plate 10, and different gripper assemblies 220 correspond to different types of mask plates 10.

[0114] See also Figure 2 For ease of description, the two gripper groups 220 are divided into a first gripper group 220a (without fill) and a second gripper group 220b (with diagonal fill). The first gripper group 220a is configured to hold a first type of mask, and the second gripper group 220b is configured to hold a second type of mask. Figure 2 Taking the first gripper group 220a in the gripping working position as an example. When it is necessary to grip the second type of mask, the position adjustment mechanism 230 is used to drive the two gripper groups 220 to rotate, so that the second gripper group 220b is in the gripping working position.

[0115] The heights of the two gripper groups 220 can be the same or different, and the grippers 22 in the same gripper group 220 are at the same height. The grippers 22 in the same gripper group 220 are symmetrically distributed at the four corners, and their spacing is consistent with the spacing of the overlapping positions of the corresponding type of mask 10.

[0116] When the two gripper groups 220 are at the same height, their orientations can be different. One is facing the space 100 that accommodates the mask, while the other is away from the space 100 that accommodates the mask. By rotating a preset angle, the orientations of the two gripper groups 220 can be changed. The gripper group 220 facing the space 100 that accommodates the mask is the gripper group 220 in the gripping working position.

[0117] When the two gripper assemblies 220 are at different heights, their orientations can be the same or different. Thus, by rotating a preset angle, the heights of the two gripper assemblies 220 are changed, so that the gripper assembly 220 closer to the space 100 containing the mask is the gripper assembly 220 in the clamping working position.

[0118] The position adjustment mechanism 230 may include a drive assembly and a transmission assembly. The drive assembly may be housed within the fork body 210, while the transmission assembly is directly or indirectly rotatably connected to the gripper assembly 220. Driven by the drive assembly, the transmission assembly rotates the gripper assembly 220, thereby switching the gripper assembly 220 between different gripping positions.

[0119] The position adjustment mechanism 230 may also include a detection component and a control component. The detection component may include sensors, angle encoders, etc., to detect the position of each gripper 22 in the gripper group 220 and the rotation angle of the gripper group 220. The control component may be a controller 240, such as a microcontroller 240, which may be integrated into the drive component to receive the data collected by the detection component, perform data processing, and realize the control of the drive component.

[0120] The position adjustment mechanism 230 can be a single unit, or a set of position adjustment mechanisms 230 can be provided for each gripper group 220.

[0121] In one possible implementation, the position adjustment mechanism 230 can be driven by electric, pneumatic, hydraulic, or by principles such as shape memory alloys, piezoelectric ceramics, or electromagnetic effects.

[0122] In some embodiments, the position adjustment mechanism 230 may include a drive motor and a reduction gear assembly. The reduction gear assembly includes a driving gear and a driven gear that mesh with each other. The driving gear is disposed on the output shaft of the drive motor, and the driven gear is sleeved on the rotating shaft.

[0123] In some embodiments, the transmission component includes at least one of gear drive, belt drive, or chain drive.

[0124] The coordination and switching process of each structure is as follows: When a certain mask plate 10 needs to be clamped, the mask plate 10 is transported into the space 100 formed by the fork body 210 to accommodate the mask plate. If the gripper group 220 currently in the clamping working position does not match the mask plate 10, a control command can be issued manually or by the host computer 53, controller 240, etc. After receiving the control command, the position adjustment mechanism 230 starts the drive component and drives the two gripper groups 220 to rotate through the transmission component, thereby switching the gripper group 220 that was originally in the non-clamping working position to the clamping working position to match the mask plate 10, that is, the overlapping position of each gripper 22 and the mask plate 10 is aligned, and then the mask plate is clamped by the gripper group 220 in the clamping working position; while the other gripper group 220 is in the non-working position, does not contact the mask plate 10, and does not have any motion interaction.

[0125] The fork structure 20 provided in this embodiment can control the rotation of the gripper assembly 220 relative to the fork body 210 through the precise drive of the position adjustment mechanism 230, thereby adapting to the overlapping position of different mask plates 10. It can achieve precise clamping of two specifications of mask plates 10 without increasing the height and complexity of the fork structure 20. It can not only avoid interference between the fork structure 20 and other structural components, but also achieve simple implementation. At the same time, it effectively avoids the risk of cleanliness contamination caused by human intervention, so that the machine can maintain a high cleanliness standard while significantly improving production capacity and operational reliability.

[0126] Example 2

[0127] Figure 3 This is a schematic diagram of the gripper assembly provided in Embodiment 2 of this application, as shown below. Figure 3As shown, the fork structure 20 also includes a first connector 223 and a second connector 224, forming a space 100 for accommodating the mask between the first connector 223 and the second connector 224. The first connector 223 and the second connector 224 are connected to the fork body 210, which can be a fixed connection or a rotatable connection.

[0128] The fork structure 20 has an overall "door" shaped frame structure, including the fork body 210 and two parallel connecting parts, namely the first connecting part 223 and the second connecting part 224. The connecting parts can be referred to as crossbeams and are long strip structures; the fork body 210 is set perpendicular to the two connecting parts, and its length matches the distance between the two connecting parts, forming a stable frame structure.

[0129] Both the first connector 223 and the second connector 224 are elongated strips, and one end of the first connector 223 or the second connector 224 is connected to the fork body 210.

[0130] The first connector 223 and the second connector 224 can be made of high-strength aluminum alloy profiles (such as 7075-T6), and their dimensions match the dimensions of the mask plate 10. The first connector 223 and the second connector 224 can be symmetrical structures, arranged in parallel on the same side of the fork body 210.

[0131] The first connector 223 and the second connector 224 are arranged horizontally, parallel and symmetrically, and the spacing can be designed according to the width of the mask. The first connector 223 and the second connector 224 form a space 100 to accommodate the mask, so as to ensure that the mask does not collide with the connector when it is picked up and put down, while reserving the operating space for the gripper assembly 220.

[0132] The first connector 223 and the second connector 224 are long, straight structures with rectangular or I-shaped cross-sections. Both ends of the first connector 223 or the second connector 224 are typically chamfered to prevent sharp edges from generating particles or scratching operators, while also reducing airflow disturbance.

[0133] The dimensions of the first connector 223 and the second connector 224 can be determined according to the specifications of the various types of masks being clamped. For example, when the largest mask to be adapted is 12 inches, the length of the connector can be 800 mm, and the distance between the two connectors can be 320 mm ± 0.1 mm.

[0134] The first connector 223 and the second connector 224 may be made of high-strength aluminum alloy and have internal cavities to integrate the position adjustment mechanism 230.

[0135] Each gripper assembly 220 includes a first gripper unit 221 and a second gripper unit 222. The first gripper unit 221 of both gripper assemblies 220 is connected to the first connector 223, which can be a fixed connection or a rotatable connection. The second gripper unit 222 is connected to the second connector 224, which can be a fixed connection or a rotatable connection.

[0136] The fork structure 20 is used to pick up and put down two types of mask plates 10. By setting the position of the gripper units of the two gripper groups 220 on the connector to align with the overlapping position of the two types of mask plates 10, the gripping, moving and putting back of the two types of mask plates 10 can be realized.

[0137] Each gripper assembly 220 includes a first gripper unit 221 and a second gripper unit 222. The first gripper unit 221 can be integrally formed with a first connector 223, and the second gripper unit 222 can be integrally formed with a second connector 224. The first gripper unit 221 and the second gripper unit 222 can also be rotatably or fixedly connected to the corresponding connectors (first connector 223 and second connector 224) through connecting components.

[0138] For example, the first gripper unit 221 can be fixed to the first connector 223 by means of bolts, welding, adhesive bonding, etc., to form a rigid whole. Similarly, the second gripper unit 222 can also be fixed to the second connector 224 by means of bolts, welding, adhesive bonding, etc., to form a rigid whole.

[0139] The first connector 223 and the second connector 224 can both be fixedly connected to the fork body 210, for example, by means of connecting flanges, welding, etc. Each gripper unit (including the first gripper unit 221 and the second gripper unit 222) is rotatably connected to the corresponding connector (including the first connector 223 and the second connector 224) so ​​as to drive the gripper unit to rotate through the position adjustment mechanism 230.

[0140] The first connector 223 and the second connector 224 can both be rotatably connected to the fork body 210, for example, through bearings and shafts, hinge shafts and bushings, joints and bearings, etc. Each gripper unit (including the first gripper unit 221 and the second gripper unit 222) is fixedly connected to the corresponding connector (including the first connector 223 and the second connector 224) so ​​as to drive the connector to rotate through the position adjustment mechanism 230.

[0141] In one possible implementation, the first gripper unit 221 is fixedly connected to the first connector 223, and the second gripper unit 222 is fixedly connected to the second connector 224. Both the first connector 223 and the second connector 224 are rotatably connected to the fork body 210. The position adjustment mechanism 230 is used to drive the first gripper unit 221 to rotate relative to the first connector 223 by a preset angle, and to drive the second gripper unit 222 to rotate relative to the second connector 224 by a preset angle, so that one of the two gripper groups 220 is in the clamping working position to clamp the mask 10 with the overlapping position corresponding to the clamping working position. In the figure, the grippers 22 of the same gripper group 220 have the same filling method, while the grippers 22 of different gripper groups 220 have different filling methods.

[0142] A gripper unit may include one or more grippers 22, such as two grippers 22. Grippers 22 of the same gripper unit in different gripper groups 220 are disposed on the same connector, while grippers 22 of different gripper units are disposed on different connectors. Grippers 22 of the same gripper group disposed on the first connector 223 form the first gripper unit 221, and grippers 22 of the same gripper group disposed on the second connector 224 form the second gripper unit 222. Gripper units may be disposed on the bottom surface, top surface, or on opposite sides of the first connector 223 and the second connector 224.

[0143] The gripper 22 has an L-shaped block structure, and the clamping surface in contact with the mask can be rounded to avoid scratching the mask edges. The main body of the gripper 22 is an L-shaped block structure, and its horizontal section extends to form a support finger 23. The support finger 23 is integrally formed with the main body of the gripper 22 or fixed by bolts. As a direct load-bearing structure, the top surface of the support finger 23 contacts the back of the mask, providing vertical support force.

[0144] The end of the gripper 22 can be made of elastic silicone material with anti-slip texture on the surface to adapt to the grasping needs of the mask and avoid scratching the precision components.

[0145] For example, see Figure 3 A gripper assembly 220 may include four grippers 22, including two grippers 22 on the first connector 223 and two grippers 22 on the second connector 224. The grippers 22 on the two connectors are symmetrically distributed, so that each gripper assembly 220 includes two pairs of spatially aligned grippers 22, thereby improving the stability of the pick-and-place operation.

[0146] When the extension direction of the rotating shaft is the first direction, the connecting part can be a hollow structure, with the rotating shaft passing through the hollow part of the connecting part and rotatingly connected to the connecting part through a bearing.

[0147] See also Figure 3The position adjustment mechanism 230 is a functional component that enables rotation. The rotation axis of the position adjustment mechanism 230 can be configured differently depending on the orientation of the gripper unit. Figure 2 Taking the position adjustment mechanism 230 with the drive component 231 set in the fork body 210 and the rotating shaft set in the first connector 223 and the second connector 224 as an example, there are two rotating shafts, including the first rotating shaft 232 and the second rotating shaft 233.

[0148] The position adjustment mechanism 230 is configured to drive the gripper assembly 220 to rotate about a pivot axis to switch the gripper assembly 220 in the gripping working position. During rotation, the relative positions of each gripper unit or each gripper 22 in each gripper assembly 220 remain unchanged.

[0149] The power source for the position adjustment mechanism 230 can be electric, pneumatic, hydraulic, etc. The position adjustment mechanism 230 may include a transmission component to transmit the kinetic energy of the power source to the gripper assembly, controlling the gripper assembly to rotate a preset angle.

[0150] For example, the preset angle can be 180°.

[0151] In this embodiment, the position adjustment mechanism 230 drives each connector to rotate, which in turn drives the gripper unit on it to rotate. This design makes the rotation of the gripper group more stable and controllable, and can more accurately adapt to the overlapping positions of different mask plates 10.

[0152] Example 3

[0153] Figure 4 This is a schematic diagram of the fork structure provided in Embodiment 3 of this application. In this embodiment, the fork body 210 includes a first support member 211, a second support member 212, and a fixing component 213; a first connector 223 is rotatably connected to the first support member 211, and a second connector 224 is rotatably connected to the second support member 212. The position adjustment mechanism 230 is used to drive the first connector 223 to rotate relative to the first support member 211 by a preset angle, and to drive the second connector 224 to rotate relative to the second support member 212 by a preset angle.

[0154] The first support member 211 and the second support member 212 are key structures in the fork body 210 used to connect and support the first connector 223 and the second connector 224. Their core function is to provide a stable fulcrum for the rotation of the connectors, and at the same time to form an organic whole between the connectors and the fixed component 213.

[0155] For example, one end of the first support member 211 is fixedly connected to (or integrally formed with) the fixing component 213, and the other end is connected to the first connector 223 through a rotating structure (such as a bearing, a shaft mating hole, etc.), so that the first connector 223 can rotate with the first support member 211 as the fulcrum. Similarly, one end of the second support member 212 is fixed to the fixing component 213, and the other end is connected to the second connector 224 through a rotating structure, providing an independent fulcrum for the rotation of the second connector 224.

[0156] For example, the fixed component 213 has two parallel ear plates (first support member 211 and second support member 212) integrally formed at its end, and a through hole is machined in the center of the ear plate; the connecting end of the first connector 223 is inserted into one of the ear plates (first support member 211), and is rotatably connected to the first support member 211 by passing through the ear plate (first support member 211) with a steel shaft pin. Similarly, the connecting end of the second connector 224 is inserted into the other ear plate (second support member 212), and is rotatably connected to the second support member 212 by passing through the ear plate (second support member 212) with a steel shaft pin.

[0157] For example, stepped holes are machined at the ends of each support member (first support member 211 or second support member 212), and double-row angular contact ball bearings are built in. The outer ring of the bearing is fixed to the stepped hole by interference fit, and the inner ring is interference fit with the shaft at the end of the connector. The end of the shaft is limited by a shoulder and a nut to prevent axial movement. A gap is reserved between the contact surfaces of the support member and the connector to avoid friction interference during rotation.

[0158] Through the aforementioned design, each connector can rotate and be driven independently relative to its corresponding support. This independent support and drive design ensures that the adjustment of the two connectors does not interfere with each other, enabling more precise matching of different overlapping positions on both sides of the mask. At the same time, the dispersed support structure reduces the load on individual support components, improves the stability of the overall structure, reduces errors caused by linkage adjustment, has a wider range of adaptability, and effectively improves the equipment's compatibility with diverse masks.

[0159] See also Figure 4 In one possible implementation, the position adjustment mechanism 230 is used to drive the first connector 223 and the second connector 224 to rotate around a first direction by a preset angle; of the two gripper groups 220, one gripper group 220 is disposed on the upper side of the corresponding connector, and the other gripper group 220 is disposed on the lower side of the corresponding connector, and both gripper groups 220 are facing the space 100 that accommodates the mask and are staggered in a second direction; the corresponding connector is the first connector 223 or the second connector 224, the first direction is the direction from the first connector 223 to the second connector 224, the second direction is the direction in which the first connector 223 and the second connector 224 extend, and the first direction is perpendicular to the second direction.

[0160] For ease of description, the direction from the first connector 223 to the second connector 224, i.e., the left-right direction, is denoted as the first direction; the extension direction of the connector, i.e., the front-back direction, is denoted as the second direction; and the height, i.e., the up-down direction, is denoted as the third direction. The first, second, and third directions are perpendicular to each other and can be the directions of the x-axis, y-axis, and z-axis in a three-dimensional coordinate system, respectively. The extension direction of the rotation axis can be the first direction (i.e., the y-axis direction), the second direction (i.e., the z-axis direction), or the third direction (i.e., the x-axis direction).

[0161] The connecting parts corresponding to the gripper assembly 220 are the connecting parts provided in the gripper assembly 220, namely the first connecting part 223 corresponding to the first gripper unit 221 and the second connecting part 224 corresponding to the second gripper unit 222.

[0162] The gripper group 220 on the lower side of the connector is in the clamping working position, while the gripper group 220 on the upper side is in the non-clamping working position. The grippers 22 of different groups that are close in the x-axis direction have different heights and are staggered in the y-axis direction to align with the overlapping positions of different types of mask plates 10.

[0163] In this embodiment, the rotating axis is the x-axis. When it is necessary to switch the gripper group 220 in the clamping working position, each gripper group 220 is driven to rotate around the x-axis. The movement trajectories of the upper gripper group 220 and the lower gripper group 220 are centrally symmetrical. After rotating 180°, the gripper group 220 that was originally located on the upper side will move to the lower side, thereby realizing the switching. Since the two gripper groups 220 are staggered in the y-axis direction, no mechanical interference will occur during the rotation, ensuring smooth switching action.

[0164] By driving the connector to rotate around the first direction (the direction between connectors), and with the gripper group 220 staggered vertically and all facing the receiving space, two gripper groups 220 can be compactly arranged in the height direction, avoiding interference between groups; rotation adjustment can quickly switch between different gripping working positions, accurately adapting to different overlap heights of the mask plate, without the need to raise or lower the fork body 210, reducing space occupation, avoiding collisions with surrounding structures, and significantly improving switching efficiency and ease of operation while ensuring cleanliness.

[0165] See also Figure 3 In one possible implementation, the position adjustment mechanism 230 is used to drive the first connector 223 and the second connector 224 to rotate around the second direction by a preset angle; of the two gripper groups 220, one gripper group 220 is disposed on the upper side of the corresponding connector and away from the space 100 for accommodating the mask, and the other gripper group 220 is disposed on the lower side of the corresponding connector and facing the space 100 for accommodating the mask, and the two gripper groups 220 are staggered in the second direction.

[0166] In this embodiment, the position adjustment mechanism 230 drives the first connector 223 and the second connector 224 to rotate around the y-axis (the rotation axis is the y-axis), and the special layout of the gripper group 220 realizes the switching of the working position.

[0167] Initially, the lower gripper assembly 220 (facing the space 100 containing the mask) is in the gripping working position, while the upper gripper assembly 220 (facing away from the space 100 containing the mask) is in the non-working position. When switching is required, the position adjustment mechanism 230 drives the connecting member to rotate 180° around the y-axis. The upper gripper assembly 220 facing away from the space 100 containing the mask rotates with the connecting member to the lower side, simultaneously turning towards the space 100 containing the mask and entering the gripping working position. The lower gripper assembly 220 facing the space 100 containing the mask rotates with the connecting member to the upper side, facing away from the space 100 containing the mask and entering the non-gripping working position, thus achieving the switching. Simultaneously, because the orientations are opposite and they are staggered, motion interference is avoided.

[0168] By driving the connector to rotate around the second direction (the direction of connector extension), combined with the design of the gripper group 220 being staggered vertically and facing one direction and facing away from the accommodating space, the orientation of the gripper group 220 can be switched by rotation without the need for additional structural movement, which greatly saves space. This layout allows the two gripper groups 220 to not interfere with each other when not in operation, and can quickly adapt to different overlapping requirements on the front and back of the mask. The structure is simple and reliable, reducing the risk of failure caused by complex movements and improving the response speed of the equipment.

[0169] In one possible implementation, the position adjustment mechanism 230 is used to drive the first connector 223 and the second connector 224 to rotate around a third direction by a preset angle; both gripper groups 220 are located above or below the corresponding connectors, one gripper group 220 faces the space 100 that accommodates the mask, and the other gripper group 220 is away from the space 100 that accommodates the mask, and the two gripper groups 220 are staggered in the second direction; the corresponding connector is the first connector 223 or the second connector 224, the second direction is the direction in which the first connector 223 and the second connector 224 extend, and the third direction is the up and down direction.

[0170] In this embodiment, the position adjustment mechanism 230 drives the first connector 223 and the second connector 224 to rotate around the z-axis (the rotation axis is the z-axis), and the special layout of the gripper group 220 realizes the switching of the working position.

[0171] Both gripper assemblies 220 are located on the same side of the connector, either on the upper side or both on the lower side. To avoid motion interference, the two gripper assemblies 220 are oriented in opposite directions, with one set facing the space 100 that accommodates the mask and the other set facing away from the space 100 that accommodates the mask.

[0172] Initially, the gripper assembly 220 facing the space 100 containing the mask is in the gripping working position, while the gripper assembly 220 facing away from the space 100 is in the non-working position. When switching is required, the position adjustment mechanism 230 drives the connecting member to rotate 180° around the z-axis. The gripper assembly 220 originally facing away from the space 100 containing the mask rotates inward with the connecting member, facing the space 100 containing the mask, and is in the gripping working position. The gripper assembly 220 originally facing the space 100 containing the mask rotates outward with the connecting member, facing away from the space 100 containing the mask, and is in the non-gripping working position, thus achieving the switching. Because the orientations are opposite and they are misaligned, motion interference is avoided.

[0173] By driving the connector to rotate around a third direction (up and down), and with the gripper assembly 220 arranged on the same side and with one facing and one facing away from the accommodating space in a staggered design, the orientation of the gripper assembly 220 can be precisely adjusted in the horizontal plane to adapt to different overlapping positions of the mask plate in the horizontal direction. The rotational movement is small, avoiding collisions with surrounding structures. At the same time, the same-side layout reduces the space occupied in the vertical direction, making the fork structure 20 more compact and stable in narrow spaces, further improving the space utilization and operational safety of the equipment.

[0174] See also Figure 3 In one possible implementation, the position adjustment mechanism 230 may include a drive member 231, a first rotating shaft 232, and a second rotating shaft 233. The drive member 231 is rotatably connected to the first rotating shaft 232 and the second rotating shaft 233, respectively. The first rotating shaft 232 is disposed on the fork body 210 or the first support member 211, and the second rotating shaft 233 is disposed on the fork body 210 or the second support member 212. The first rotating shaft 232 is fixedly connected to the first connecting member 223, and the second rotating shaft 233 is fixedly connected to the second connecting member 224.

[0175] The drive component 231 is the power source of the position adjustment mechanism 230, used to output torque or power to drive the rotating shaft and connecting parts to rotate. The drive component 231 can be a servo motor, stepper motor, hydraulic motor, pneumatic motor, etc., to convert electrical energy, pneumatic energy or hydraulic energy into mechanical energy.

[0176] The two shafts can be driven by one drive unit 231 or by two drive units 231 respectively.

[0177] The rotating shaft, including the first rotating shaft 232 and the second rotating shaft 233, is a rigid component that transmits torque. One end is connected to the drive component 231 to receive power, and the other end is fixed to the connecting component to transmit rotational motion to the connecting component, while being supported by the support component.

[0178] The shaft can be a solid shaft, a hollow shaft, a stepped shaft, a flexible shaft, etc.

[0179] The shaft and drive component 231 can be connected by gear meshing, coupling, or transmission via belt, chain, etc. The shaft and connecting components can be connected by key connection, flange connection, welding fixation, etc. The shaft and support component can be connected by bearings, bushings, etc. Figure 3 Taking the example of a first rotating shaft 232 being disposed on a first connecting member 223 and a second rotating shaft 233 being disposed on a second connecting member 224.

[0180] There may be one drive element 231, which synchronously drives two rotating shafts, namely the first rotating shaft 232 and the second rotating shaft 233, to rotate. In some embodiments, there may also be two drive elements 231.

[0181] The position adjustment mechanism 230 drives the first rotating shaft 232 and the second rotating shaft 233 through a single drive component 231, which drives the two connecting parts to rotate synchronously. This single-drive dual-shaft design reduces the number of drive components 231, simplifies the overall structure, and reduces equipment cost and failure points. At the same time, synchronous drive ensures that the rotation angle of the two connecting parts is consistent, which can accurately adapt to the symmetrical overlapping mask plate 10, reduce the deviation caused by independent adjustment, and make maintenance more convenient. While improving equipment stability, it also ensures the consistency of clamping action.

[0182] For example, see Figure 4 The driving component 231 may include a first driving component 2311 and a second driving component 2312. That is, the position adjustment mechanism 230 includes a first driving component 2311, a first rotating shaft 232, a second driving component 2312, and a second rotating shaft 233. The first driving component 2311 is disposed on the fork body 210, and the first rotating shaft 232 is disposed on the first support member. The first driving component 2311 is rotatably connected to the first rotating shaft 232, and the first rotating shaft 232 is fixedly connected to the first connecting member 223. The second driving component 2312 is disposed on the fork body 210, and the second rotating shaft 233 is disposed on the second support member. The second driving component 2312 is rotatably connected to the second rotating shaft 233, and the second rotating shaft 233 is fixedly connected to the second connecting member 224. Figure 4 Taking the example where both the first driving component 2311 and the second driving component 2312 are disposed on the fixed component 213.

[0183] In this embodiment, a dual-drive mechanism 231 is used for separate driving. Two independent power sources, the first drive component 2311 and the second drive component 2312, provide torque to the first rotating shaft 232 and the second rotating shaft 233 respectively, and can independently control the rotation angle of the corresponding connecting parts.

[0184] The first drive component 2311 and the second drive component 2312 continue the core technical features of the drive component 231 in terms of structural design. Their power output form, transmission adaptation specifications and installation and fixing methods are consistent with those of the drive component 231.

[0185] The first and second rotating shafts 233 are driven by two drive components 231 respectively, enabling independent adjustment of the two connectors. This independent drive design allows the two connectors to flexibly adjust their angles according to different overlapping requirements on both sides of the mask, adapting to more complex overlapping scenarios. At the same time, independent control improves the adjustment accuracy, enabling precise clamping even when facing asymmetrical overlapping masks, greatly expanding the applicability of the equipment and enhancing its responsiveness to diverse production needs.

[0186] In some embodiments, the fork structure 20 may further include a locking mechanism for locking the gripper assembly 220 after the gripper assembly 220 has rotated a preset angle.

[0187] The locking mechanism, as a supporting component of the position adjustment mechanism 230, is used to rigidly lock the gripper assembly 220 after it has completed a preset angle rotation, preventing positional shifts caused by vibration or load changes during clamping. Its core function is to ensure the stability and accuracy of the mask plate 10 clamping. When the extension direction of the rotating shaft is the second direction, i.e., the extension direction of the connector, the connector can be a hollow structure, with the rotating shaft passing through the hollow part of the connector and rotatably connected to the connector via a bearing. The position adjustment mechanism 230 can be located at one end of the connector, and the locking mechanism at the other end.

[0188] In one possible implementation, the locking mechanism can be implemented in two ways. One is an independent mechanical pin, which can be a motor-driven or electromagnetically driven pin, inserted into the preset locking hole of the gripper assembly to form a mechanical rigid connection and prevent rotation or displacement. The other is to achieve locking through the physical characteristics of the position adjustment mechanism 230 itself, without the need for an additional locking mechanism. For example, after the stepper motor or servo motor is powered off, it can maintain a stationary state by relying on the rotor permanent magnet or electromagnetic force to achieve "electric braking" locking. Alternatively, the shape memory alloy drive element can maintain its shape within a specific temperature range after being heated and deformed, and can maintain locking without continuous power supply.

[0189] In some embodiments, the locking mechanism includes at least one of an electromagnetic lock, a mechanical locking pin, or a hydraulic locking device.

[0190] For example, the locking mechanism includes: a locking seat disposed on the crossbeam, the locking seat having an axial through hole; a locking pin slidably disposed in the axial through hole, one end of the locking pin having a wedge-shaped head; an elastic element sleeved on the locking pin for providing a preload force to move the locking pin toward the rotating shaft; and a plurality of positioning grooves disposed on the outer circumferential surface of the rotating shaft, the shape of the positioning grooves being adapted to the wedge-shaped head; when the wedge-shaped head of the locking pin is engaged in the positioning groove, the crossbeam and the rotating shaft are relatively fixed, achieving position locking; when a reverse force is applied to the locking pin to overcome the preload force, the wedge-shaped head disengages from the positioning groove, and the crossbeam and the rotating shaft can rotate relative to each other, achieving lock release.

[0191] In one possible implementation, the fork body 210 is further provided with a limiting mechanism for limiting the rotation angle of the gripper assembly.

[0192] The limiting mechanism is used to engage with the first connector 223 or the second connector 224 when the gripper assembly 220 is rotated to the gripping position or the non-gripping position, so as to prevent the gripper assembly 220 from rotating excessively and to maintain the current angle.

[0193] The limiting mechanism is a mechanical or electronically controlled structure used to precisely limit the rotation angle of the gripper assembly 220, such as the first connector 223, the second connector 224, or the gripper unit. Its core function is to constrain the rotation range of the gripper assembly within a preset safe range through physical obstruction or signal feedback.

[0194] The limiting mechanism can be a mechanical stop. The gripper assembly 220 is provided with a protrusion that cooperates with the mechanical stop. When the gripper assembly 220 rotates to a preset angle, the cooperating protrusion contacts the limiting stop and is blocked, preventing further rotation.

[0195] The limiting mechanism can achieve point-type limiting through elastic elements. Positioning holes (or grooves) are opened on the gripper assembly, and spring-loaded pins (or balls) are installed at corresponding positions on the fork body 210. The spring pushes the pin or ball to embed into the positioning hole to achieve limiting.

[0196] The limit mechanism can be an electric limit mechanism, which detects the position of the gripper assembly through electronic sensors and sends a stop signal in conjunction with the controller 240 to achieve non-contact limiting, suitable for high-precision adjustment scenarios.

[0197] By limiting the rotation angle of the gripper assembly through the limiting mechanism, it is possible to effectively prevent the gripper assembly 220 from colliding with the fork body 210, the mask plate 10 or other structures due to excessive rotation, thus avoiding damage to components and scratches on the mask plate. At the same time, the clearly defined angle limit range makes the adjustment action more controllable, reduces failures caused by operational errors, extends the service life of the equipment, ensures that all adjustments are carried out within a safe range, and significantly improves the reliability and stability of the equipment operation.

[0198] The gripper units of the two gripper assemblies 220 can be respectively disposed on the bottom and top surfaces of the connector, or both can be disposed on the bottom surface of the connector. The support fingers 23 of one gripper assembly 220 are oriented opposite to each other, either towards the space 100 that accommodates the mask or away from the space 100 that accommodates the mask. The support fingers 23 of the gripper assembly 220 located on the bottom surface are oriented towards the space 100 that accommodates the mask. If both gripper assemblies 220 are located on the bottom surface, then the support fingers 23 of one of the gripper assemblies 220 are oriented towards the space 100 that accommodates the mask. The bottom and top surfaces of the connector are two opposite sides along the second direction z-axis.

[0199] When it is necessary to grasp the mask 10, if the gripper group 220 currently located on the bottom surface of the connector and with the support finger 23 facing the space 100 containing the mask, i.e., the gripper group 220 in the gripping position or the active gripper group 220, does not match the type of the mask 10 to be grasped, then the host computer 53, controller 240, etc. generate control commands for the position adjustment mechanism 230, thereby driving the gripper group to rotate, realizing the switching of the gripper group 220 at the gripping position, so that the gripper group 220 at the gripping position matches the type of the mask 10 to be grasped; then, the mask 10 is grasped by the gripper group 220, and the grasped mask 10 is supported by the support finger 23.

[0200] The controller 240 can be integrated into the fork structure 20, or it can be an external device that communicates with the fork structure 20, such as being integrated into the host computer 53.

[0201] The mask type can be provided by other devices, manually entered, or identified by the controller 240 or the host computer 53.

[0202] In some embodiments, the controller 240 or the host computer 53 can first identify the type of the loaded mask 10 and determine whether the type matches the gripper group 220 at the clamping work position; if not, a control command for the position adjustment mechanism 230 is generated. The gripper group 220 at the clamping work position is aligned with the overlapping position of the mask 10 that matches the type.

[0203] The host computer 53 or the controller 240 can determine its type by reading the identification code on the mask, or by detecting the dimensional characteristics of the mask 10.

[0204] In one possible implementation, the rotating component is a connector, and the axis of rotation can be the x, y, or z axis. The rotating component is the rotatable part of the gripper assembly 220.

[0205] In one possible implementation, the rotating component is a gripper unit, and the rotating axis can be the x or y axis.

[0206] In one possible implementation, the first connector 223 and the second connector 224 both extend along the second direction, and the first connector 223 and the second connector 224 are rotatably connected to the fixing component 213. The position adjustment mechanism 230 is specifically used to drive the first connector 223 and the second connector 224 to rotate around the axis by a preset angle.

[0207] Rotary connections can be achieved through rotating bushings, deep groove ball bearings, or hinge assemblies.

[0208] When the connector rotates around the x-axis, the gripper unit it carries will flip in the vertical plane, thereby enabling the switching of different sets of gripper unit heights.

[0209] When the connector rotates around the z-axis, the whole rotates in the horizontal plane, causing the gripper unit to change its circumferential position.

[0210] The position and orientation of each gripper 22 in the gripper group 220 can be determined based on the rotating component and the rotating shaft, so that the gripper group 220 located in the working gripping position can be switched by rotating the rotating component by a preset angle, and at the same time, the gripper group 220 located in the working gripping position is oriented towards the space 100 that accommodates the mask.

[0211] By driving the first connector 223 and the second connector 224 to rotate, the two gripper groups 220 set on them are rotated, thereby realizing the switching of the gripper group 220 in the working position. There is no need to adjust each gripper unit individually, and the switching can be completed quickly. At the same time, the gripper group 220 can always maintain symmetrical alignment with the mask plate after rotating with the connector, thereby improving the force balance during clamping.

[0212] In one possible implementation, the different gripper groups 220 are set at different heights, with the gripper group 220 in the gripping working position being lower than the other gripper group 220.

[0213] For example, the gripper assembly 220 in the clamping position can be located on the bottom surface of the connector, while another gripper assembly 220 is located on the top surface of the connector.

[0214] For example, the two gripper groups 220 can both be located on the opposite sides of the two connectors, and the height of the gripper group 220 in the gripping position is lower than that of the other gripper group 220.

[0215] By setting different gripper groups 220 at different heights, the non-working position gripper group 220 is positioned higher in space, avoiding mechanical interference between the two gripper groups 220 during mask placement and removal. At the same time, the lower height of the working position gripper group 220 is closer to the overlapping plane of the mask, making it easier to clamp the mask.

[0216] In one possible implementation, the grippers 22 in both gripper assemblies 220 are oriented toward the space 100 that accommodates the mask, and the pivot is located in the first direction.

[0217] The orientation of the gripper 22 can be characterized by the orientation of the gripper finger 23.

[0218] When the gripper assembly is a connector and the rotation axis is located in the first direction (x-axis direction), that is, when the rotation axis is the x-axis, during the rotation process, the connector can rotate around its center in the yz plane, thereby changing the height of the gripper 22 and realizing the switching of the gripper assembly 220. At the same time, since the orientation of the gripper 22 does not change during the rotation process, and the orientation of each gripper 22 is towards the space 100 that accommodates the mask, it can be ensured that the gripper assembly 220 in the clamping working position is oriented towards the space 100 that accommodates the mask.

[0219] By controlling the connecting piece to rotate around a third-direction axis, the high and low positions of the two gripper groups 220 can be quickly interchanged, thereby achieving the switching of the working gripper group 220.

[0220] In one possible implementation, the lower-height gripper assembly 220 is oriented toward the space 100 that accommodates the mask, while the higher-height gripper assembly 220 is oriented away from the space 100 that accommodates the mask, and the pivot is located in a second direction, i.e., the direction in which the connector extends.

[0221] When the gripper assembly is a connector and the rotation axis is located in the second direction (y-axis direction, which is the direction in which the connector extends), that is, when the rotation axis is the y-axis, during the rotation process, the connector can rotate around its center in the xz plane, thereby changing the height and orientation of the gripper 22 and realizing the switching of the gripper assembly 220. At the same time, since the orientation of the gripper 22 changes during the rotation process, and the orientations of different sets of gripper 22 are opposite, it can always be ensured that the gripper assembly 220 in the clamping working position faces the space 100 that accommodates the mask.

[0222] By setting the two gripper groups 220 to face opposite directions and controlling the connector to rotate along the first direction, the gripper group 220 in the non-working position (high height) completely avoids the space 100 containing the mask due to the opposite orientation, and will not interfere with the mask or the working position gripper 22. At the same time, when rotating around the first direction axis, the two gripper groups 220 can achieve synchronous switching of high and low positions and orientation by flipping, without the need for additional orientation adjustment, so the working position switching can be completed in one step, simplifying the operation logic.

[0223] In one possible implementation, the first connector 223 and the second connector 224 are both fixedly connected to the fork body 210, the first gripper unit 221 is rotatably connected to the first connector 223, and the second gripper unit 222 is rotatably connected to the second connector 224; the position adjustment mechanism 230 is specifically used to drive the first gripper unit 221 and the second gripper unit 222 to rotate around a first direction or a second direction by a preset angle.

[0224] In this embodiment, the rotating component is a gripper unit. The gripper unit rotates about the extension direction of the connector or the direction between the connectors, that is, the axis of rotation is the x-axis or the y-axis.

[0225] By fixing the connector to the fixing component 213, the gripper unit can rotate directly relative to the connector. This design simplifies the structure of the connector and reduces the overall weight of the fork body 210. The direct rotation of the gripper unit reduces the force transmission path, resulting in faster adjustment response and more flexible adaptation to the overlapping position of small-sized or specially shaped mask plates 10. At the same time, it saves the space required for the connector to rotate, making the fork structure 20 lighter and more compact, improving operational flexibility and equipment operating efficiency.

[0226] Example 4

[0227] Figure 5a This is a bottom view of the fork structure for picking up and placing the first type of mask provided in Embodiment 4 of this application. Figure 5b This is a bottom view of the fork structure for picking up and placing the second type of mask as provided in Embodiment 4 of this application. Figure 5c This is a front view of the fork structure provided in Embodiment 4 of this application. In order to facilitate the display, the fork body 210 is omitted when drawing the front view.

[0228] Combined with 5a to Figure 5c As can be seen, in this embodiment, the gripper units of the two gripper groups 220 of the fork structure 20 are respectively disposed on two opposite sides (also called top and bottom surfaces) of the two connectors along the third direction, i.e., the z-axis direction, i.e., disposed on the upper and lower sides of the connectors, and the orientation of the support fingers 23 of the two gripper groups 220 is towards the space 100 that accommodates the mask, thus forming a C-shape in the front view; the axis of rotation extends along the first direction (i.e., the x-axis direction) to be the x-axis, and the position adjustment mechanism 230 is configured to drive the gripper unit to rotate around the axis relative to the disposed connector by a preset angle, or drive the two connectors to rotate around the fork body 210 relative to the axis by a preset angle.

[0229] Through the precise position adjustment mechanism 230 and the rotating shaft, each gripper unit or two connectors can be rotated around the x-axis, thereby rotating a set of grippers 22 that was originally located at the bottom of the connector to the top of the connector, and correspondingly rotating a set of grippers 22 located at the top of the connector to the bottom of the connector, thus realizing the switching of gripper group 220; the gripper group 220 located at the bottom is in the clamping working position.

[0230] After the gripper unit rotates to a preset angle, the position of the gripper unit is locked by a locking mechanism set in the connector to stabilize its mechanical shape.

[0231] Specifically, the two connectors rotate around their respective centers on a pivot axis. At the pivot axis, a precision pivot extending along the x-axis is provided inside the connector. The end of the precision pivot away from the connector is connected to a support structure, such as a support portion (including a first support portion and a second support portion) in the fork body 210.

[0232] Figure 5d This is a schematic diagram of the process of the connector rotating about the x-axis according to Embodiment 4 of this application. Figure 5d Taking a sectional side view as an example, such as Figure 5d As shown, Figure 5d Taking the connector as a rotating component as an example, when the connector rotates around the x-axis, the center of rotation is the center o1 of the connector. The gripper units of different gripper groups are respectively arranged on the upper and lower sides of the connector. The upper and lower direction is the z-axis direction, and the positions of the gripper units of different gripper groups 220 in the y-axis direction correspond one-to-one with the overlapping positions of the corresponding type of mask plate 10. The fork body 210 includes a first support member 211, a second support member 212, and a fixing component 213. The first connector 223 is rotatably connected to the first support member 211, and the second connector 224 is rotatably connected to the second support member 212. (Continue to see...) Figure 5d Before rotation, the jaws with diagonal fill are positioned above the jaws without fill, allowing for gripping of masks of type 1 using the unfilled jaws. If the loaded mask is of type 2, the connector needs to be rotated. After rotation, the jaws with diagonal fill are positioned below the jaws without fill, allowing for gripping of masks of type 2 using the diagonal fill. That is, when gripping mask 10, gripping is performed using the jaw group 220 located at the bottom of the connector, i.e., the jaw group 220 with the lowest height.

[0233] When the gripper unit of the gripper assembly 220 located on the bottom surface of the connector grips the mask plate 10, the gripper unit of the gripper assembly 220 located on the top surface of the connector will not interact with the mask plate 10, thereby improving the safety of operation.

[0234] Example 5

[0235] Figure 6a This is a bottom view of the fork structure for picking up and placing the first type of mask provided in Embodiment 5 of this application. Figure 6b This is a bottom view of the fork structure for picking up and placing the second type of mask as provided in Embodiment 5 of this application. Figure 6c For this application Figure 6a The provided front view of the fork structure.

[0236] Combining 6a to Figure 6c As can be seen, in this embodiment, the gripper units of the two gripper groups 220 of the fork structure 20 are respectively disposed on two opposite sides of the two connectors along a third direction, that is, disposed on the upper and lower sides of the connectors. In other words, the horizontal heights of the gripper units of the two gripper groups 220 are different, and the orientations of the fingers 23 of the two gripper groups 220 (including the first gripper group 220a and the second gripper group 220b) are opposite. The orientation of the fingers 23 of the first gripper group 220a is towards the space 100 that accommodates the mask, while the orientation of the fingers 23 of the second gripper group 220b is away from the space 100 that accommodates the mask. That is, the orientations of the fingers 23 of the two gripper groups 220 are opposite, thus forming a Z-shape in the front view. The gripper unit of the first gripper group 220a is located below the gripper unit of the second gripper group 220b along the second direction, i.e., the z-axis. That is, the first gripper group 220a is disposed on the gripper group on the bottom surface of the connector. The rotating shaft extends along the second direction (y-axis direction), which is the y-axis. The position adjustment mechanism 230 is configured to drive the connecting member and the gripper 22 thereon to rotate around the rotating shaft. The grippers of different gripper groups in the figure use different filling methods.

[0237] Through the precise position adjustment mechanism 230 and the rotating shaft, the two connecting parts can be rotated around their respective midpoints along the y-axis. The gripper 22 is rotated by the rotation of the connecting parts, thereby rotating the gripper unit of the gripper group 220, which was originally located at the bottom of the connecting parts, to the top of the connecting parts. Correspondingly, the gripper unit of the gripper group 220, which was located at the top of the connecting parts, will rotate to the bottom of the connecting parts, thus realizing the switching of the gripper group 220 in the clamping working position.

[0238] After rotating to a preset angle, the position of the connector can be locked by a locking mechanism to stabilize its mechanical shape. By combining the opposite orientations of the two sets of grippers 22, the orientation of the gripper finger 23 of the set of grippers 22 rotated to the bottom of the connector can be kept facing the space 100 that accommodates the mask, so as to grasp the mask 10.

[0239] Figure 6d This is a schematic diagram of the process of the connector rotating about the y-axis according to Embodiment 5 of this application, as shown below. Figure 6d As shown, the gripper units of different gripper groups are respectively set on the upper and lower sides of the connector, and the positions of the gripper units of different gripper groups 220 in the y-axis direction correspond one-to-one with the overlapping positions of the corresponding type of mask plate 10.

[0240] Depend on Figure 6d It can be seen that before the connector rotates around the y-axis, the gripper fingers 23 of the first gripper group 220a (without fill) located at the bottom of the connector face the space 100 containing the mask, while the gripper fingers 23 of the second gripper group 220b (with diagonal fill) located at the top of the connector face away from the space 100 containing the mask. After rotation, the grippers of the first gripper group 220a move to above the grippers of the second gripper group 220b, i.e., to the top of the connector, and the gripper fingers 23 face away from the space 100 containing the mask. Meanwhile, the grippers of the second gripper group 220b are located below the grippers of the first gripper group 220a, and the gripper fingers 23 face towards the space 100 containing the mask. In other words, the gripper fingers 23 of the gripper group 220a at the bottom of the connector remain facing towards the space 100 containing the mask, while the gripper fingers 23 of the gripper group 220a at the top of the connector remain facing away from the space 100 containing the mask. Thus, when picking up or placing the mask 10, it can be clamped by the gripper group 220 located at the bottom of the connector (clamping work position).

[0241] The gripper assembly 220, located at the bottom or bottom surface of the connector and facing the space 100 that accommodates the mask, is closer to the space 100 that accommodates the mask.

[0242] pass Figure 6d It can be concluded that when the gripper group 220 located at the bottom of the connector grips the mask plate 10, the gripper group 220 located at the top of the connector will not interact with the mask plate 10, thereby improving the safety of operation.

[0243] In addition to the aforementioned embodiment where the two sets of grippers 22 are respectively disposed on opposite sides of the connector, both sets of grippers 22 can also be disposed on the bottom or bottom surface of the connector. The connector may include two layers, with the layer containing the grippers 22 being the lower layer, which can rotate relative to the upper layer around a pivot axis; that is, the lower layer is a rotating component. The pivot axis is the z-axis, meaning it extends along a third direction.

[0244] Example 6

[0245] Figure 7a This is a bottom view of the fork structure for picking up and placing the first type of mask provided in Embodiment Six of this application. Figure 7b This is a bottom view of the fork structure for picking up and placing the second type of mask as provided in Embodiment Six of this application. Figure 7c For this application Figure 7a The provided front view of the fork structure. Figure 7d This is a bottom view of the connecting member in Embodiment Six of this application rotating about the z-axis. Figure 7e For along Figure 7d A cross-sectional side view of the AA' line.

[0246] Combined with 7a to Figure 7e As can be seen, in this embodiment, the fork body 210 includes a first support member 211 and a second support member 212; the first connector 223 is located below the first support member 211, and the second connector 224 is located below the second support member 212. That is, the first support member 211 and the first connector form an upper and lower two-layer structure along a third direction (z-axis direction), with the support member on the upper layer and the connector on the lower layer. The support member is fixedly connected to the fixing component 213, while the connector is movably connected to the support member; the gripper units of the two gripper groups 220 are both disposed on the connector; the gripper fingers 23 of the two gripper groups 220 face opposite directions, and the gripper fingers 23 of the gripper group 220 in the gripping working position face the space 100 that accommodates the mask; the position adjustment mechanism 230 is used to drive the connector to rotate around a third direction by a preset angle, which is the up and down direction.

[0247] Through a layered design, the upper support provides rigid support, while the lower connector enables rotational adjustment, avoiding structural redundancy caused by overall rotation and reducing the weight of rotating components.

[0248] The gripper units of the gripper assembly 220 rotate synchronously with the connecting parts. Due to their opposite orientation, a 180° rotation directly enables switching between the "inner side (gripping work position)" and the "outer side (non-gripping work position)" without additional orientation adjustments, simplifying the switching logic. Simultaneously, the opposite orientation ensures that the gripper assembly 220 in the non-gripping work position naturally avoids the space 100 containing the mask, preventing interference. Rotation around the z-axis ensures that the gripper assembly 220 moves in the horizontal plane, avoiding collisions caused by vertical displacement.

[0249] See also Figure 7a to Figure 7c The gripper units of the two gripper assemblies 220 are both located on the bottom surface of the connector. The support finger 23 of one gripper assembly 220 faces the space 100 that accommodates the mask, and this gripper assembly 220 is closer to the space 100 that accommodates the mask. The support finger 23 of the other gripper assembly 220 is away from the space 100 that accommodates the mask. The rotating shaft extends along the second direction, and the position adjustment mechanism 230 is configured to drive the connector to rotate around the rotating shaft by a preset angle, i.e., 180°.

[0250] In this embodiment, the gripper assembly 220 facing the space 100 that accommodates the mask is located in the gripping position.

[0251] Through the precise position adjustment mechanism 230 and the rotating shaft, the connector can be rotated relative to the upper support member around the z-axis, thereby turning the gripper group 220, which was originally facing the space 100 (located in the clamping work position) that accommodates the mask, away from the space 100 that accommodates the mask, and correspondingly, the gripper group 220, which was originally away from the space 100 that accommodates the mask, turns towards the space 100 that accommodates the mask, thus realizing the switching of the gripper group 220.

[0252] After the connector is rotated to a preset angle, its position can be locked by the locking mechanism inside the support, thus stabilizing its mechanical shape.

[0253] Specifically, the two connecting parts rotate around their respective centers, i.e., the z-axis. At this center of rotation, a precision shaft extending along the z-axis is installed inside the support.

[0254] Combination Figure 7a to Figure 7e It can be seen that when the connector rotates around the z-axis, the center of rotation is the center o2 of the connector, the axis of rotation is located at the center o2, and both gripper groups 220 are located on the bottom surface of the connector. The positions of the grippers of different gripper groups 220 in the y-axis direction correspond one-to-one with the overlapping positions of the corresponding types of mask plates 10. Before rotation, the grippers of the gripper group 220 that were originally away from the space 100 containing the mask plate were filled with diagonal lines. After rotation, the orientation of the finger 23 of the diagonally filled gripper group 220 is changed to face the space 100 containing the mask plate, while the orientation of the finger 23 of the other gripper group 220 is changed from facing the space 100 containing the mask plate to facing away from the space 100 containing the mask plate. When clamping the mask plate 10, it is clamped by the gripper group 220 facing the space 100 containing the mask plate, that is, the gripper group 220 located in the clamping working position.

[0255] In this embodiment, although the grippers of the two gripper groups 220 are located on the same bottom surface, i.e. at the same horizontal height, since the gripper fingers 23 of the two gripper groups 220 are facing opposite directions, when the gripper group 220 facing the space 100 containing the mask grabs the mask, the other gripper group 220 will not interact with the mask, thereby improving the safety of operation.

[0256] The aforementioned embodiments provide various differentiated solutions for the configuration of the two gripper groups 220. The core is to control the connector to drive the gripper group 220 to rotate by a preset angle or the gripper group 220 itself to rotate by a preset angle, thereby constructing a "single group in action, single group in standby" working mode. This allows the active gripper group 220 to accurately align with the mask plate 10 and directly perform the overlapping and clamping actions of the mask plate 10. At the same time, the inactive gripper group 220 can be switched to a non-interference state by rotation, avoiding simultaneous movement and interaction between the two gripper groups 220 and the mask plate 10. This eliminates the risk of interference between the grippers 220 and the mask plate 10 from both spatial layout and action logic perspectives, ensuring that there is no collision or displacement during the removal and placement of the mask plate 10, and ultimately guaranteeing the safety and reliability of the operation.

[0257] In one possible implementation, see Figure 2 The fork structure 20 also includes a controller 240 for controlling the operation of the position adjustment mechanism 230.

[0258] The controller 240 can be an embedded microcontroller unit (MCU) integrated on the control circuit board of the fork structure 20.

[0259] The controller 240 can receive external commands and convert them into control commands, i.e. motion mass, for the position adjustment mechanism 230, thereby controlling the position adjustment mechanism 230.

[0260] The controller 240 can also automatically generate motion commands for the position adjustment mechanism 230 based on the identified type of the mask 10 to be clamped.

[0261] In one possible implementation, the controller 240 is electrically connected to the position adjustment mechanism 230 and is used to: determine whether the overlap position of the gripper group 220 in the gripping working position matches the mask 10 to be gripped; if they do not match, a control command is generated for the position adjustment mechanism 230 to switch the gripper group 220 in the gripping working position. If they match, there is no need to generate a motion command for the position adjustment mechanism 230, that is, there is no need to adjust the positions of the two gripper groups 220.

[0262] The controller 240, as the decision-making center of the fork structure 20, controls the gripper assembly 220 through electrical connection with the position adjustment mechanism 230, such as through signal lines or control lines.

[0263] The controller 240 obtains the current position of the two gripper groups 220 by inputting preset parameters, collecting data from sensors, or using external devices such as the host computer 53 or a barcode scanner.

[0264] For example, the current position of the two gripper groups 220 can be fed back by the position feedback element integrated into the position adjustment mechanism 230, such as an encoder, grating ruler, displacement sensor, etc.

[0265] Whether the current position of the two gripper groups 220 matches the overlapping position of the mask 10 to be gripped can be determined by the difference between the current position of the two gripper groups 220 and the target position, where the target position is the position of the two gripper groups 220 corresponding to the overlapping position of the mask 10 to be gripped. If the difference between the current position and the target position is small, for example, less than or equal to a preset threshold, then the two positions are considered to match; otherwise, if the difference is greater than the preset threshold, then they do not match.

[0266] After determining that the current position of the two gripper groups 220 or their gripper units does not match the overlapping position of the mask 10 to be gripped, the controller 240 can generate motion commands for the position adjustment mechanism 230 based on the difference between the current position of the two gripper groups 220 or their gripper units and the target position.

[0267] When the fork structure 20 corresponds to only two types of mask plates 10, after determining that the gripper unit of the gripper group 220 in the gripping working position does not match the overlapping position of the mask plate 10 to be gripped, the controller 240 can send the preset motion command corresponding to the mask plate 10 to be gripped to the position adjustment mechanism 230 to control the position adjustment mechanism 230 to switch the gripper group 220 in the gripping working position of the mask plate 10 to be gripped.

[0268] The overlap position of the mask 10 to be clamped can be manually input, input through an external device, or automatically determined by the controller 240. The controller 240 can determine the overlap position based on the type of the mask 10 to be clamped, or it can determine the overlap position of the mask 10 to be clamped through an image captured by a camera.

[0269] By adding controller 240, a closed-loop control for position adjustment is formed. Controller 240 can accurately determine the matching degree between the gripper assembly 220 in the clamping working position and the mask 10 to be clamped. Once a deviation is detected, it immediately generates a motion command to drive the position adjustment mechanism 230 to adjust the gripper assembly 220 to the target position. This automated control not only avoids errors that may occur with manual adjustment, greatly improving the accuracy and efficiency of position adjustment, but also responds in real time to the overlapping requirements of different mask 10s, making the adaptation process of the fork structure 20 smoother, further enhancing the adaptability to the handling of diverse mask 10s, and providing more reliable intelligent support for the stable operation of semiconductor manufacturing processes.

[0270] In one possible implementation, the controller 240 is further configured to: identify the type of the mask 10 to be clamped, and determine the overlap position of the mask 10 to be clamped based on the identified type.

[0271] The type of mask 10 can be sent to the controller 240 via an external device. The controller 240 can also automatically determine the type of mask 10 by reading the mask 10 or its identification code, and / or by detecting the physical size characteristics of the mask 10 or its container.

[0272] By adding controller 240 to achieve rotation control, the automation level of the whole machine is improved, and the efficiency of mask plate 10 picking and placing is further improved.

[0273] In one possible implementation, the controller 240 is further configured to: obtain the type of the mask 10 to be clamped, and query the overlap position of the mask 10 to be clamped from a first mapping relationship based on the type; the first mapping relationship is used to characterize the mapping relationship between various types of mask 10 and overlap positions.

[0274] By pre-setting various mapping relationships between mask types 10 and overlapping positions, the controller 240 can quickly call the corresponding parameters and accurately determine the target position without complex real-time calculations, which greatly improves the response speed and adaptation efficiency for different types of mask 10. At the same time, this query method based on pre-stored mapping relationships avoids position judgment errors caused by on-site identification deviations, ensures the accuracy of the overlapping position, and makes the adjustment of the gripper assembly 220 more targeted.

[0275] In one possible implementation, the controller 240 is further configured to determine whether the overlap position of the gripper group 220 in the gripping position matches the mask 10 to be gripped by at least one of the following methods: receiving a detection signal from a sensor on the fork structure 20, and determining whether the overlap position of the gripper group 220 in the gripping position matches the mask 10 to be gripped based on the detection signal; determining the gripper group 220 in the gripping position according to the historical control commands of the position adjustment mechanism 230; obtaining the type of mask 10 corresponding to the gripper group 220 in the gripping position; and determining whether the type of mask 10 corresponding to the gripper group 220 in the gripping position is consistent with the type of mask 10 to be gripped.

[0276] The mask plate 10 sensor can be a displacement sensor, position encoder, vision sensor, etc.

[0277] The controller 240 can store each issued motion command, with an upper limit set, such as 10,000 commands. Once the stored motion commands reach this upper limit, a first-in-first-out (FIFO) approach is used to overwrite the old motion commands with the newly generated ones. The historical motion commands can include motion commands issued at historical times. Based on the historical motion commands and the gripper group 220 initially in the gripping position, the controller can determine the gripper group 220 in the gripping position after each motion command is executed.

[0278] When the sensor fails to receive the detection signal, the gripper group 220 currently in the clamping position can be determined based on the historical motion commands of the position adjustment mechanism 230.

[0279] The controller 240 determines whether the overlap position of the working gripper group 220 matches the mask 10 to be gripped by receiving sensor detection signals or calculating the current position based on historical motion commands from the position adjustment mechanism 230. This design further improves the accuracy and reliability of the matching judgment. Using sensor detection signals can reflect the actual position or state of the gripper 220 in real time and directly, thereby improving the accuracy of the matching judgment. Historical motion commands can ensure the continuity of the working gripper group 220's state determination through logical tracing, maintaining basic judgment functions even in the event of temporary sensor failure. The combination of these two methods forms a complementary matching verification mechanism, effectively avoiding the omissions that may exist with a single judgment method, ensuring the accuracy of the matching judgment between the working gripper group 220 and the overlap position, and providing a reliable basis for the precise execution of subsequent adjustment actions.

[0280] In one possible implementation of the mask 10, the controller 240 is further configured to control the position adjustment mechanism 230 to drive the gripper assembly 220 to move by: calculating the deviation distance between the current position of the gripper assembly 220 and the target position; and generating motion commands for the position adjustment mechanism 230 based on the deviation distance.

[0281] Movement commands can include the direction of movement, the amount of movement, and the speed of movement. The direction of movement is determined by the sign of the deviation distance, while the amount of movement is determined by the absolute value of the deviation distance. The speed of movement can be dynamically determined based on the magnitude of the deviation distance, or it can be a default value.

[0282] After receiving the instruction, the position adjustment mechanism 230 starts to drive the gripper assembly 220 to move. The controller 240 monitors the actual moving distance through real-time feedback to generate supplementary mass based on the actual moving distance until the target position is reached, or the deviation distance from the target position is less than a preset distance, such as 0.1mm.

[0283] By controlling the position adjustment mechanism 230 based on the deviation distance between the current position and the target position of the gripper assembly 220 by the controller 240, the accuracy and controllability of the movement of the gripper assembly 220 are significantly improved, ensuring that the gripper assembly 220 can move accurately to the target position and effectively adapt to the overlapping position of the mask plate 10 to be clamped.

[0284] In one possible implementation, the controller 240 is further configured to: determine whether the gripper group 220 has reached the target position by means of a sensor trigger signal; if not, return to the step of calculating the deviation distance between the current position of the gripper group 220 and the target position.

[0285] The sensor can be a position sensor, such as a laser proximity switch or an inductive proximity sensor, or it can be a grating ruler, a magnetic grating ruler, or a limit sensor.

[0286] The sensor trigger signal is different before the gripper assembly 220 reaches the target position and when it reaches the target position, for example, the signal is "0" and "1" respectively.

[0287] During the movement of the gripper assembly 220 driven by the position adjustment mechanism 230, the controller 240 continuously collects signals from the sensors and determines whether a valid trigger signal is received. If so, it determines whether the gripper assembly 220 has reached the target position based on the value of the trigger signal. If so, it stops driving the gripper assembly 220 to move. If not, it continues to generate motion commands for the position adjustment mechanism 230 based on the deviation distance between the current position and the target position of the gripper assembly 220.

[0288] The controller 240 uses sensor trigger signals to determine whether the gripper assembly 220 has reached the target position, thus determining whether to continue adjusting the position of the gripper assembly 220, forming a closed-loop adjustment mechanism that further improves the accuracy and reliability of position adjustment. The sensor trigger signals can provide real-time and intuitive feedback on the actual position status of the gripper assembly 220. Compared to simply relying on commands to calculate the position, it can more accurately determine whether the target position has been reached, effectively avoiding "false positioning" caused by mechanical transmission errors or command execution deviations.

[0289] In one possible implementation, the controller 240 is further configured to perform the following steps after the control position adjustment mechanism 230 drives the first gripper unit 221 to rotate relative to the first connector 223 by a preset angle, and drives the second gripper unit 222 to rotate relative to the second connector 224 by a preset angle, or drives the first connector 223 and the second connector 224 to rotate relative to the fork body 210 by a preset angle: obtain the detection result of the current detection optical path; if the detection result indicates that the configuration parameters of the current detection optical path do not match the mask template located at the detection station, generate an optical path switching command for the optical path switching drive device so that the switched detection optical path matches the mask template located at the detection station.

[0290] The inspection station is a location used to perform quality inspection on the mask 10. After the mask 10 is sent to the inspection station by the gripper assembly 220, defect inspection, dimensional calibration and other processes need to be completed here.

[0291] The detection optical path refers to the optical system path used for quality inspection of the mask 10. It consists of a light source, lens group, filter, mirror and detector, etc. Its function is to convert information such as patterns and defects on the mask 10 into detectable optical signals.

[0292] The configuration parameters of the detection optical path include, but are not limited to: light source wavelength, focal length / magnification, light intensity, detection mode, etc.

[0293] A set of configuration parameters can be pre-matched to various mask 10s based on their physical characteristics and inspection requirements, forming a second correspondence. Based on this second correspondence, it can be determined whether the configuration parameters of the current inspection optical path match the mask located at the inspection station.

[0294] If they do not match, the configuration parameters need to be adjusted, specifically through the optical path switching command of the optical path switching driver. If they match, the detection is directly based on the detection optical path and the detection mask 10.

[0295] The matching of the current detection optical path configuration parameters with the mask at the detection station can be determined by examining factors such as image quality, feature recognition failure, and signal data anomalies. For example, if the following phenomena exist, it is determined that the current detection optical path configuration parameters do not match the mask at the detection station: image blurring, abnormal contrast, missed detection of key features, presence of artifacts, excessively low signal-to-noise ratio, or data exceeding the measurement range.

[0296] The detection optical path and the mask 10 are dynamically adapted to avoid detection errors caused by optical path mismatch and ensure the detection accuracy of the mask 10. At the same time, the optical path switching can be completed without manual intervention, which improves the automation and efficiency of the detection process and makes the entire mask 10 picking, placing and detecting process more smooth and seamless. This further enhances the adaptability and reliability of the equipment when handling different types of mask 10.

[0297] In one possible implementation, the controller 240 is further configured to determine whether the current detection optical path matches the mask located at the detection station by at least one of the following methods: detecting the signal characteristics after the current detection optical path is incident on the mask located at the detection station, determining the alignment state of the current detection optical path based on the signal characteristics, and determining whether it matches based on the alignment state; reading the encoder reading of the optical path switching drive device, determining the alignment state of the current detection optical path based on the encoder reading, and determining whether it matches based on the alignment state.

[0298] Signal characteristics may include at least one of the following: image sharpness, contrast, signal-to-noise ratio, feature completeness, etc.

[0299] The controller 240 compares the real-time detected signal features with the standard feature thresholds corresponding to the detection station mask 10 to determine the optical path alignment status. If all features meet the standards, the alignment status is determined to be good and the optical path matches the mask 10. If any feature does not meet the standards, the alignment status is determined to be abnormal and the optical path does not match the mask 10.

[0300] Optical path switching drive devices, such as servo motors for adjusting lens positions and stepper motors for switching filters, have built-in encoders. These can be incremental encoders or absolute encoders, and their readings directly reflect the physical positions of key optical path components. For example, the lens encoder reading reflects the focal length or magnification, the filter encoder reading reflects the light source wavelength, and the shutter encoder reading reflects the detection mode. The controller 240 can pre-store the encoder readings corresponding to various types of masks 10 as target readings. By comparing the encoder readings of the optical path switching drive device with the target readings corresponding to the masks at the detection station, the alignment status can be determined. For example, if the difference between the two readings is within the allowable range, the alignment status is determined to be good; otherwise, the alignment status is determined to be abnormal.

[0301] The controller 240 detects whether the optical path matches the mask 10, improving the intelligence and automation of the detection process and ensuring that the detection is always performed under optimal optical path conditions, thereby significantly improving the accuracy of mask 10 detection. The signal characteristic-based judgment method directly reflects the actual effect of the interaction between the optical path and the mask. By analyzing the signal intensity, phase, and other characteristics, the alignment status can be accurately determined, avoiding misjudgments caused by mechanical positioning errors. The encoder reading-based judgment method, starting from the optical path's own position parameters, accurately traces the alignment of the optical path through quantified values, ensuring the objectivity of the judgment results. These two methods complement each other, taking into account both the actual effect of the interaction between the optical path and the mask and relying on mechanical parameters to ensure the stability of the judgment, effectively reducing the potential deviations of a single judgment method. This provides a reliable basis for precise switching of the optical path, further ensuring the accuracy and efficiency of mask 10 detection.

[0302] In one possible implementation, the controller 240 is also configured to: after the detection optical path matches the mask plate located at the detection station, based on the received mask plate 10 transmission command, control the mask plate 10 transmission device to transmit the mask plate 10 held by the gripper group 220 to the motion mechanism.

[0303] After confirming that the detection optical path matches the mask 10 at the detection station and the detection is completed, the controller 240 needs to transfer the qualified mask 10 from the detection station to the motion mechanism by controlling the mask 10 transmission device.

[0304] The transmission command of the mask 10 can be sent from the host computer 53 to the controller 240. The transmission command of the mask 10 can include information such as transmission target, transmission priority, and transmission path, and can be transmitted in the form of digital signals or protocol messages.

[0305] The mask 10 transfer device is an actuator for transferring the mask 10. The motion mechanism is a downstream device or mechanism that receives the mask 10. It can be the stage of an exposure machine for photolithography, the robotic arm 41 of a storage warehouse for archiving qualified masks 10, or the conveying mechanism of a rework area for secondary processing of unqualified masks 10.

[0306] After confirming that the detection optical path matches the mask 10 at the detection station, the controller 240 controls the transmission device to send the clamped mask 10 to the motion mechanism according to the received transmission command of the mask 10. This design significantly improves the continuity and automation of the mask 10 processing flow, ensuring seamless connection of the mask 10 from detection to transmission, and greatly improving the overall process efficiency. At the same time, the transmission process is uniformly scheduled by the controller 240, which can strictly follow the preset transmission path and timing, avoid interference with other components during transmission, and ensure the safety of the mask 10 in the transfer process.

[0307] In one possible implementation, the controller 240 is also configured to perform the following operations after the clamped mask 10 is transferred to the motion mechanism: adjust the configuration parameters of the detection optical path; and control the motion mechanism to scan the transferred mask 10.

[0308] After the mask 10 is transmitted to the motion mechanism, the configuration parameters of the detection optical path need to be adjusted according to the specific type and detection requirements in order to scan the mask 10.

[0309] The controller 240 can send parameter adjustment commands to the optical path switching drive device to adjust the configuration parameters.

[0310] In order to fully inspect the mask plate 10, the motion mechanism drives the mask plate 10 to move along a preset path, so that the detection optical path fully covers the mask plate 10, providing complete data for subsequent defect identification, size measurement and other tasks.

[0311] During scanning, the detection optical path synchronously acquires optical signals, and the controller 240 receives and temporarily stores the data in real time. If an abnormal signal is detected in a local area during scanning, the controller 240 automatically controls the motion mechanism to decelerate or pause, and performs a second scan of that area to obtain more detailed data. The magnification is higher during the second scan. After scanning is completed, the motion mechanism returns to its initial position to await the next mask 10. The controller 240 sends the complete data to the back-end processing system for processing, such as defect detection.

[0312] After transferring the clamped mask 10 to the motion mechanism, the controller 240 adjusts the configuration parameters of the detection optical path and controls the motion mechanism to scan the mask 10, further optimizing the entire process of mask 10 processing. Adjusting the detection optical path configuration parameters ensures that the optical path and the mask 10 on the motion mechanism maintain optimal fit during the scanning process, avoiding detection deviations caused by slight changes in position after transmission, and significantly improving the accuracy of scanning detection. At the same time, the controller 240 coordinates the adjustment of the optical path and the scanning of the motion mechanism, achieving seamless connection from transmission to scanning, reducing waiting time between processes, and significantly improving overall process efficiency.

[0313] The fork structure 20 can be an end effector (EE) of the device front-end module (EFEM). This end effector is configured with only one set of gripper group 220, and can adapt to various types of mask 10 by switching the state of the gripper group 220.

[0314] The end effector (EE) is specifically integrated into the end of the robotic arm 41 to perform operations such as grasping and placing the mask 10.

[0315] Example 7

[0316] Figure 8 This is a schematic diagram of the structure of the mask transmission device 40 provided in Embodiment 7 of this application, as shown below. Figure 8 As shown, the mask plate transfer device 40 includes the plate fork structure 20 and the robotic arm 41 provided in any of the foregoing embodiments, with the plate fork structure 20 disposed at the end of the robotic arm 41.

[0317] The fork structure 20, as the end effector (EE) of the device, interacts directly with the mask plate 10.

[0318] The robotic arm 41 serves as the motion drive component of the device, enabling the fork structure 20 to move over a wide range of distances and in multiple postures. It typically has multiple degrees of freedom, such as a 4-axis or 6-axis robotic arm 41.

[0319] The fork structure 20 can be rigidly connected to the robotic arm 41 via a flange, locating pin, etc.

[0320] To buffer the impact force when the robotic arm 41 starts and stops, springs, dampers and other components can be added to the connection design between the fork structure 20 and the robotic arm 41.

[0321] The fork structure 20 also includes a processor and a memory. The processor is integrated into the robotic arm 41 or its main control board. The processor communicates with the controller 240 via Ethernet protocol, receiving and processing the position data of the gripper assembly 220 in the fork structure 20. The processor is connected to the memory, which stores the data required for calculation, such as the mapping relationship between various types of mask plates 10 and their overlapping positions.

[0322] Example 8

[0323] This application also provides a semiconductor device 50, including the mask transmission device 40 provided in any of the foregoing embodiments.

[0324] The semiconductor device 50 may also include a defect detection optical system 52 to automatically detect the pattern accuracy and surface defects of the mask after the mask has been transported and positioned by the mask transfer device 40.

[0325] The defect detection optical system 52 is the core of pattern transfer and quality inspection, and typically includes a light source, optical lenses, a mirror assembly, and an imaging system.

[0326] The geometric center of the space 100 accommodating the mask is located on the optical axis of the defect detection optical system 52. The optical axis is the central axis of the detection optical path of the defect detection optical system 52 and serves as the alignment reference between the imaging module and the light source module. The layout of the fork structure 20 ensures that the center of the space 100 accommodating the mask is located on the optical axis of the defect detection optical system 52, guaranteeing that the effective working area of ​​the mask 10, i.e., the pattern area to be detected on the mask, is precisely aligned with the optical axis of the defect detection optical system 52.

[0327] In this embodiment, the semiconductor device 50 includes the mask transfer device 40 in the above embodiment. The mask transfer device 40 can pick up, place and clamp masks of various specifications, and can accurately transfer the mask to the working position of the optical mechanism, ensuring the positioning accuracy and repeatability of the exposure or photolithography process, and improving the manufacturing accuracy and product yield of semiconductor devices.

[0328] Example 9

[0329] Figure 9 This is a schematic diagram of the structure of the semiconductor device 50 provided in Embodiment 9 of this application, as shown below. Figure 9 As shown, the semiconductor device 50 includes the mask transfer device 40, material transfer system 51, defect detection optical system 52, host computer 53, scanning motion system 54 and image processing cluster 55 provided in any of the foregoing embodiments.

[0330] The material transfer system 51 is the "traffic hub" for the movement of the mask between various workstations within the equipment, providing global motion support for the mask transfer device 40. The material transfer system 51 may include high-precision linear guides, brushless linear motors, laser displacement sensors, etc., and is used to receive instructions from the host computer 53 to drive the mask transfer device 40 to complete the entire path operation, including mask storage and transportation to the detection workstation, and supports multi-workstation scheduling.

[0331] The defect detection optical system 52 includes a light source, a telecentric lens, a camera, and a polarizing filter group, which can identify particles, scratches, etc. on the surface of the mask, as well as detect image edge deviations and effective image areas.

[0332] The host computer 53 serves as the brain of the semiconductor device 50, undertaking instruction scheduling, status monitoring, and logical decision-making functions. It may include a human-machine interface, motion control algorithms, fault diagnosis modules, etc.

[0333] After receiving the mask processing instruction from the external production system, the host computer 53 sends control signals to the material transfer system 51, the mask transfer device 40, and the defect detection optical system 52 in sequence to synchronize and coordinate the timing of each module. For example, the detection is started 0.5 seconds after the material is transferred to the designated location to avoid vibration interference.

[0334] The scanning motion system 54 provides precise scanning motion support for the imaging module, such as the camera, of the defect detection optical system 52. It can adopt a cross slide structure, and both the X-axis and Y-axis are equipped with piezoelectric ceramic drive units.

[0335] The scanning motion system 54 receives instructions from the host computer 53 and drives the camera of the defect detection optical system 52 to scan along a plane perpendicular to the optical axis. The scanning step distance is set according to the camera's field of view (e.g., 5μm / step) to ensure that the imaging is non-overlapping and has no blind spots.

[0336] The image processing cluster 55 achieves rapid identification and quantification of defects through high-performance computing. It can include multiple high-performance servers, support parallel computing, integrate deep learning models for defect detection, and output a detection report after detection and synchronize it to the host computer 53.

[0337] The host computer 53 can connect to the material handling system 51 and the scanning motion system 54 via industrial Ethernet to send motion control commands and receive feedback signals. The host computer 53 can also connect to the image processing cluster 55 via an interface to transmit images and receive inspection reports. Furthermore, the host computer 53 can control the light source switching and lens parameter adjustment of the defect detection optical system 52 via I / O modules, achieving synchronization between the optical path and the inspection process.

[0338] In actual operation, the material transfer system 51 uses a configured box opener to automate the loading of the mask 10, such as grabbing and securing containers from the storage rack. Simultaneously, the box opener's built-in identification units, such as vision sensors and RFID modules, read container information, such as dimensions, overlap direction, and mask material, and report this information to the host computer 53. Based on the received information, the host computer 53 generates targeted processing instructions: on the one hand, it sends configuration parameters for the gripper group 220 to the mask transfer device 40 to determine whether to switch the gripper group 220 in the gripping position; on the other hand, it synchronizes container type data with the defect detection optical system 52 to ensure that the detection process matches the container characteristics. The material transfer system 51 determines whether the mechanical state of the gripper group 220 of the plate fork structure 20 needs to be switched according to the instructions of the host computer 53. If the container type is compatible with the currently active gripper group 220 (the group in the gripping working position), the current state is maintained; if a switch is required, a control instruction is sent to the position adjustment mechanism 230 to drive the gripper group 220 to complete the switch. After the switch is completed, the position sensor feeds back the position signal to the host computer 53. Then, the material transfer system 51 drives the plate fork structure 20 to smoothly remove the mask 10 from the mask container and transfer it along a preset path (planned by the host computer 53) to the motion support platform of the defect detection optical system 52. The positioning pin and the reference hole of the support platform are used to achieve precise docking and complete the film loading; after the defect detection is completed, the material transfer system 51 drives the plate fork structure 20 again to grab the mask 10 from the motion support platform, return along the original path and send it into the storage container to complete the film unloading.

[0339] Defect detection includes steps such as optical path initialization, scanning motion planning, image acquisition, and defect identification and analysis. Specifically, optical path initialization involves the defect detection optical system 52 switching to an optical path matching the type of the mask 10. Scanning motion planning involves the host computer 53 generating the scanning path for the scanning motion system 54 based on the size of the mask 10 and the defect type. In the image acquisition step, the scanning motion system 54 drives the mask 10 to move at a constant speed, while the defect detection optical system 52 simultaneously acquires images. The defect identification and analysis step uses the image processing cluster 55 to call image processing algorithms such as AI (Artificial Intelligence) algorithms to analyze the acquired images frame by frame, marking defect coordinates, size, and type to obtain defect data. Based on this defect data, an analysis report is generated, such as a defect distribution heatmap.

[0340] The image processing cluster 55 can call deep learning algorithms to analyze images frame by frame, automatically identify and mark defect information, including the coordinates, size, and type of particles, scratches, and graphic deviations. It ultimately generates a multi-dimensional analysis report, such as a defect distribution heatmap, type percentage statistics, and yield prediction curve, and feeds this report back to the host computer 53. After receiving the analysis report from the image processing cluster 55, the host computer 53 determines whether the mask is qualified. If qualified, it controls the material transfer system 51 to execute the unloading process, transferring the mask 10 to the next process. If unqualified, it triggers an alarm, locks the container position, and awaits manual re-inspection or initiates a repair process.

[0341] Figure 10 This is a schematic diagram of the working process of the semiconductor device 50 provided in Embodiment 9 of this application, as follows: Figure 10 As shown, the method mainly includes the following steps:

[0342] After the mask 10 is loaded into the material transfer system 51, the type of the loaded mask 10 is identified and uploaded to the host computer 53. The host computer 53 determines whether the identified mask 10 type is consistent with the current configuration of the fork structure 20. If they are inconsistent, a switching control command for the fork structure 20 is generated to control the fork structure 20 to switch the gripper group 220. After the switching is completed, a switching completion message is sent back to the host computer 53. After receiving the switching completion message, the host computer 53 generates an optical path switching command for the mask 10. The defect detection optical system 52 performs optical path switching based on the optical path switching command for the mask 10. After the path switching is completed, the switch completion information is fed back to the host computer 53; the host computer 53 issues a material transfer instruction to the material transfer system 51; the material transfer system 51 transfers the mask 10 to the scanning motion system 54; the host computer 53 issues an optical parameter configuration instruction to the defect detection optical system 52 to configure the parameters, and issues a scanning motion instruction to the scanning motion system 54 to perform defect detection scanning and acquire images. After the scanning is completed, the scanning completion information is fed back to the host computer 53; the host computer 53 instructs the image processing cluster 55 to call the algorithm to perform image processing, realize defect identification and analysis, and output a defect detection report.

Claims

1. A fork structure, characterized in that, include: Fork body; Two gripper assemblies, both of which are rotatably connected to the fork body; A position adjustment mechanism is provided on the fork body to drive the two gripper groups to rotate relative to the fork body by a preset angle, so that one of the two gripper groups is in the clamping working position to clamp the mask plate whose overlapping position corresponds to the clamping working position.

2. The fork structure according to claim 1, characterized in that, The fork structure further includes a first connector and a second connector, with a space for accommodating the mask plate formed between the first connector and the second connector; each gripper group includes a first gripper unit and a second gripper unit, the first gripper unit being fixedly connected to the first connector, and the second gripper unit being fixedly connected to the second connector; both the first connector and the second connector are rotatably connected to the fork body; the position adjustment mechanism is used to drive the first connector relative to the fork body and drive the second connector relative to the fork body to rotate by the preset angle.

3. The fork structure according to claim 2, characterized in that, The fork body includes a first support member and a second support member. The first connecting member is rotatably connected to the first support member, and the second connecting member is rotatably connected to the second support member. The position adjustment mechanism is used to drive the first connecting member to rotate relative to the first support member by a preset angle, and to drive the second connecting member to rotate relative to the second support member by a preset angle.

4. The fork structure according to claim 2 or 3, characterized in that: The position adjustment mechanism is used to drive the first connector and the second connector to rotate around the first direction by the preset angle; Of the two gripper assemblies, one gripper assembly is disposed on the upper side of the corresponding connector, and the other gripper assembly is disposed on the lower side of the corresponding connector. Both gripper assemblies face the space accommodating the mask and are staggered in the second direction. The corresponding connector is either a first connector or a second connector. The first direction is the direction from the first connector to the second connector, and the second direction is the direction in which the first connector and the second connector extend. The first direction is perpendicular to the second direction.

5. The fork structure according to claim 2 or 3, characterized in that, The position adjustment mechanism is used to drive the first connector and the second connector to rotate around the second direction by the preset angle; Of the two gripper assemblies, one gripper assembly is located on the upper side of the corresponding connector and away from the space containing the mask, while the other gripper assembly is located on the lower side of the corresponding connector and facing the space containing the mask. The two gripper assemblies are staggered in the second direction. The corresponding connector is either a first connector or a second connector, and the second direction is the direction in which the first connector and the second connector extend.

6. The fork structure according to claim 2 or 3, characterized in that, The position adjustment mechanism is used to drive the first connector and the second connector to rotate around a third direction by the preset angle; Both gripper groups are located on the upper or lower side of the corresponding connector, with one gripper group facing the space containing the mask and the other gripper group facing away from the space containing the mask, and the two gripper groups are staggered in the second direction; The corresponding connector is either a first connector or a second connector, the second direction is the direction in which the first connector and the second connector extend, and the third direction is the up and down direction.

7. The fork structure according to any one of claims 3 to 6, characterized in that, The position adjustment mechanism includes a driving component, a first rotating shaft, and a second rotating shaft. The driving component is rotatably connected to the first rotating shaft and the second rotating shaft, respectively. The first rotating shaft is disposed on the fork body or the first support component, and the second rotating shaft is disposed on the fork body or the second support component. The first rotating shaft is fixedly connected to the first connecting component, and the second rotating shaft is fixedly connected to the second connecting component.

8. The fork structure according to any one of claims 3 to 6, characterized in that, The position adjustment mechanism includes a first driving member, a first rotating shaft, a second driving member, and a second rotating shaft. The first driving member is disposed on the fork body, and the first rotating shaft is disposed on the first support member. The first driving member is rotatably connected to the first rotating shaft, and the first rotating shaft is fixedly connected to the first connecting member. The second driving member is disposed on the fork body, and the second rotating shaft is disposed on the second support member. The second driving member is rotatably connected to the second rotating shaft, and the second rotating shaft is fixedly connected to the second connecting member.

9. The fork structure according to claim 1, characterized in that, The fork structure further includes a first connector and a second connector, with a space for accommodating the mask plate formed between the first connector and the second connector; each gripper group includes a first gripper unit and a second gripper unit, the first gripper unit being rotatably connected to the first connector, and the second gripper unit being rotatably connected to the second connector; both the first connector and the second connector are fixedly connected to the fork body; The position adjustment mechanism is used to drive the first gripper unit relative to the first connector and to drive the second gripper unit relative to the second gripper unit to rotate around the preset angle in a first direction or a second direction; the first direction is the direction from the first connector to the second connector, and the second direction is the direction in which the first connector and the second connector extend.

10. The fork structure according to any one of claims 2-9, characterized in that, The fork structure also includes a locking mechanism located on the fork body. The locking mechanism is used to lock the angle of the gripper group after each gripper group rotates the preset angle.

11. The fork structure according to any one of claims 1-10, characterized in that, The fork body is provided with a limiting mechanism, which is used to limit the rotation angle of each of the gripper groups.

12. A mask transmission device, characterized in that, include: The fork structure as described in any one of claims 1 to 11; The robotic arm has the fork structure located at its end.

13. A semiconductor device, characterized in that, include: The mask transmission device as described in claim 12.

Images