Nitrogen transmission control system of wafer loading equipment

Abstract

The invention belongs to the technical field of semiconductor wafer loading, and particularly relates to a nitrogen transmission control system of wafer loading equipment, which comprises a nitrogen input component mounting substrate, a nitrogen input component, a plurality of air injection nozzles, a plurality of exhaust nozzles and a plurality of exhaust pipe joints. And each air injection nozzle and each exhaust nozzle are respectively arranged at a Foup loading horizontal table of the wafer loading equipment. The input end of the nitrogen input assembly is communicated with an external nitrogen source, the output end of the nitrogen input assembly is communicated with the air injection nozzles, one end of each exhaust pipe connector is communicated with one corresponding exhaust nozzle, and the other end of each exhaust pipe connector is communicated with an external main exhaust pipeline. According to the invention, nitrogen can be fully blown and discharged from the inside of the Fop, the flow of consumed gas can be accurately controlled, the use function of multi-type 12-inch wafer loading equipment can be met, the structure is compact, the applicability is good, and the use cost of the equipment is reduced.

Description

TECHNICAL FIELD

[0001] The application belongs to the technical field of semiconductor wafer loading, in particular to a nitrogen transmission control system of a wafer loading equipment. BACKGROUND

[0002] Currently, 12-inch wafers are mainly contained by Foup (Front Opening Unified Pods), which fixes 12-inch wafers at the required position through the internal structure and replaces the bottom opening with a front opening door. When used for transferring wafers, the Foup is placed on the Foup loading water platform of the corresponding wafer loading equipment, thereby supporting the mechanical hand to directly enter the Foup to transfer the wafers.

[0003] In the transfer process, in order to prevent the wafers from being attached by external particles, nitrogen gas needs to be input through the gas inlet at the bottom of the Foup to blow the inside of the Foup, and the nitrogen gas needs to be discharged from the exhaust port at the bottom of the Foup. Therefore, the wafer loading equipment needs to have a corresponding nitrogen control system to input and discharge nitrogen gas into the Foup. SUMMARY

[0004] In view of the above problems, the purpose of the present application is to provide a nitrogen transmission control system of a wafer loading equipment.

[0005] The purpose of the present application is achieved by the following technical solutions:

[0006] A nitrogen transmission control system of a wafer loading equipment, comprising a nitrogen input assembly mounting base plate, a nitrogen input assembly, a plurality of jet nozzles, a plurality of exhaust nozzles, and a plurality of exhaust pipe joints.

[0007] Each of the jet nozzles and the exhaust nozzles is arranged at the Foup loading water platform of the wafer loading equipment, the arrangement position of each of the jet nozzles corresponds to the gas inlet at the bottom of the Foup loaded on the Foup loading water platform, and the arrangement position of each of the exhaust nozzles corresponds to the exhaust port at the bottom of the Foup loaded on the Foup loading water platform.

[0008] The nitrogen input assembly mounting base plate is mounted on the rack of the wafer loading equipment, the nitrogen input assembly is arranged on the nitrogen input assembly mounting base plate, the input end of the nitrogen input assembly is in communication with an external nitrogen gas source, the output end of the nitrogen input assembly is in communication with each of the jet nozzles, and each of the exhaust pipe joints is arranged on the nitrogen input assembly mounting base plate, one end of each of the exhaust pipe joints is in communication with a corresponding exhaust nozzle, and the other end of each of the exhaust pipe joints is in communication with an external total exhaust pipeline.

[0009] The nitrogen input assembly comprises a ball valve, a flow controller and a diaphragm pump respectively installed on a nitrogen input assembly mounting base plate;

[0010] The input end of the ball valve is connected with an external nitrogen source as the input end of the nitrogen input assembly, the output end of the ball valve is connected with the input end of the flow controller, the output end of the flow controller is connected with the input end of the diaphragm pump, and the output end of the diaphragm pump is connected with each of the jet nozzles as the output end of the nitrogen input assembly.

[0011] The output end of the ball valve is connected with the input end of the flow controller through a pipeline A, a three-way sleeve joint A is arranged on the pipeline A, two interfaces of the three-way sleeve joint are respectively connected with the pipeline A, and a third interface of the three-way sleeve joint is connected with a digital pressure switch.

[0012] The output end of the flow controller is connected with the input end of the diaphragm pump through a metal sleeve joint and a pipeline B.

[0013] The diaphragm pump is connected with a single valve for controlling the opening of the diaphragm pump.

[0014] A filter is further arranged on the pipeline through which the output end of the nitrogen input assembly is connected with each of the jet nozzles, the filter is arranged on a translation structure mounting base plate, and the translation structure mounting base plate is arranged on a wafer loading device rack and located above the nitrogen input assembly mounting base plate.

[0015] A translation structure is further arranged on the translation structure mounting base plate, the translation structure is connected with a Foup loading water platform and used for driving the Foup loading water platform to translate.

[0016] The translation structure comprises a translation air cylinder, a cylinder rod fixing seat, a sliding plate, a plurality of translation guide rails and a plurality of support columns, the cylinder rod fixing seat and each translation guide rail are respectively arranged on the translation structure mounting base plate, the cylinder rod of the translation air cylinder is connected with the cylinder rod fixing seat, the cylinder body of the translation air cylinder is fixedly connected with the sliding plate, a sliding block is arranged on the lower side of the sliding plate and corresponding to each translation guide rail, each sliding block is slidably connected with the corresponding translation guide rail, and the lower end of each support column is arranged on the sliding plate and the upper end of each support column is connected with the Foup loading water platform.

[0017] The application further comprises a jet nozzle lifting structure and an exhaust nozzle lifting structure.

[0018] The jet nozzle lifting structure comprises a lifting cylinder A, a connecting plate, and a clamping block A, the cylinder body of the lifting cylinder A is installed on the bottom surface of the Foup loading water platform, the output end of the lifting cylinder A is fixedly connected with the connecting plate and drives the connecting plate to lift, and the two ends of the connecting plate are respectively provided with the clamping block A, and each clamping block A is used for clamping and fixing one jet nozzle.

[0019] The exhaust nozzle lifting structure is provided with two groups, each group of the exhaust nozzle lifting structure corresponds to one exhaust nozzle, and each group of the exhaust nozzle lifting structure comprises a lifting cylinder B, a clamping block mounting rack, and a clamping block B, the cylinder body of the lifting cylinder B of each group of the exhaust nozzle lifting structure is installed on the bottom surface of the Foup loading water platform, the output end of the lifting cylinder B of each group of the exhaust nozzle lifting structure is fixedly connected with the clamping block mounting rack of the same group of the exhaust nozzle lifting structure and drives the clamping block mounting rack to lift, and the clamping block B of each group of the exhaust nozzle lifting structure is installed on the clamping block mounting rack of the same group of the exhaust nozzle lifting structure and is used for clamping and fixing one corresponding exhaust nozzle.

[0020] The outer periphery of each jet nozzle is provided with a nozzle fixing sleeve, the outer periphery of each exhaust nozzle is also provided with a nozzle fixing sleeve, the Foup loading water platform is respectively provided with a jet nozzle through port and an exhaust nozzle through port, the shape of the jet nozzle through port is matched with the outer peripheral contour shape of the nozzle fixing sleeve on the corresponding jet nozzle, and the shape of the exhaust nozzle through port is matched with the outer peripheral contour shape of the nozzle fixing sleeve on the corresponding exhaust nozzle.

[0021] The advantages and positive effects of the present application are as follows:

[0022] The present application can fully purge and discharge nitrogen in the Foup, can accurately control the gas flow, can meet the functions of various 12-inch wafer loading equipment, has compact structure, good applicability, and reduces the use cost of the equipment. BRIEF DESCRIPTION OF DRAWINGS

[0023] Figure 1 It is a whole setting structure schematic view of the present application;

[0024] Figure 2 It is a setting structure schematic view of the nitrogen input assembly of the present application;

[0025] Figure 3 It is a whole setting structure schematic view of the Foup loading water platform and the translation structure mounting base plate of the present application;

[0026] Figure 4 It is a setting structure schematic view of the translation structure, the jet nozzle lifting structure, and the exhaust nozzle lifting structure of the present application;

[0027] Figure 5 This is the second schematic diagram of the installation structure of the translation structure, the jet nozzle lifting structure and the exhaust nozzle lifting structure of the present invention.

[0028] In the diagram: 1 is the nitrogen input component mounting base, 2 is the jet nozzle, 3 is the exhaust nozzle, 4 is the exhaust pipe connector, 5 is the ball valve, 6 is the flow controller, 7 is the diaphragm pump, 8 is the three-way compression fitting, 9 is the digital pressure switch, 10 is the individual valve, 11 is the filter, 12 is the translation structure mounting base, 13 is the translation cylinder, 14 is the cylinder rod fixing seat, 15 is the sliding plate, 16 is the translation guide rail, 17 is the support column, 18 is the lifting cylinder A, 19 is the connecting plate, 20 is the clamping block A, 21 is the lifting cylinder B, 22 is the clamping block mounting bracket, 23 is the clamping block B, 24 is the nozzle fixing sleeve, 25 is the lifting cylinder mounting seat A, 26 is the lifting cylinder mounting seat B, and 27 is the three-way compression fitting B.

[0029] 001 is the wafer loading equipment rack, and 002 is the Foup loading water platform. Detailed Implementation

[0030] The following is in conjunction with the appendix Figures 1-5 The present invention will be described in further detail below.

[0031] A nitrogen transfer control system for a wafer loading device, such as Figures 1-5 As shown, this embodiment includes a nitrogen input component mounting base plate 1, a nitrogen input component, two jet nozzles 2, two exhaust nozzles 3, and two exhaust pipe connectors 4. In this embodiment, the jet nozzles 2, exhaust nozzles 3, and exhaust pipe connectors 4 are all commercially available products.

[0032] Each jet nozzle 2 and each exhaust nozzle 3 are respectively installed at the Foup loading platform 002 of the wafer loading equipment. The installation position of each jet nozzle 2 corresponds to the air inlet at the bottom of the Foup loaded on the Foup loading platform 002, and the installation position of each exhaust nozzle 3 corresponds to the exhaust outlet at the bottom of the Foup loaded on the Foup loading platform 002.

[0033] The nitrogen input component mounting base plate 1 is mounted on the wafer loading equipment rack 001 with screws. The nitrogen input component is mounted on the nitrogen input component mounting base plate 1. The input end of the nitrogen input component is connected to an external nitrogen source, and the output end of the nitrogen input component is connected to each of the jet nozzles 2. Each exhaust pipe connector 4 is mounted on the nitrogen input component mounting base plate 1. One end of each exhaust pipe connector 4 is connected to a corresponding exhaust nozzle 3, and the other end of each exhaust pipe connector 4 is connected to an external main exhaust pipe, which can concentrate the exhaust gas for easy collection and discharge later.

[0034] Specifically, as shown in Figure 2 The ball valve 5, the flow controller 6, and the diaphragm pump 7 are respectively installed on the nitrogen input assembly mounting substrate 1. The input end of the ball valve 5 is connected with the external nitrogen source as the input end of the nitrogen input assembly. The output end of the ball valve 5 is connected with the input end of the flow controller 6. The output end of the flow controller 6 is connected with the input end of the diaphragm pump 7. The output end of the diaphragm pump 7 is connected with each gas jet nozzle 2 as the output end of the nitrogen input assembly. In this embodiment, the ball valve 5, the flow controller 6, and the diaphragm pump 7 are all commercially available products. The input end of the ball valve 5 can be closed by installing a plug when not in use. The ball valve 5 is used for manual control of the on-off of the external nitrogen source. The diaphragm valve 7 is used for automatic and accurate control of the on-off of the nitrogen. The diaphragm pump 7 is connected with a single valve 10 for controlling the opening and closing of the diaphragm pump 7, thereby ensuring the airtightness of the diaphragm pump 7 during the on-off control of the gas. The single valve 10 and the diaphragm pump 7 are arranged in the prior art manner. The flow controller 6 adjusts the nitrogen blowing flow according to the nitrogen pressure on site and the nitrogen concentration in the Foup to meet the working conditions, so as to control the flow of the input nitrogen, so as to ensure that the Foup after blowing nitrogen can meet the working requirements. The flow controller 6 and the single valve 10 are connected with the upper computer.

[0035] In this embodiment, the output end of the ball valve 5 is connected with the input end of the flow controller 6 through the pipeline A. The three-way sleeve joint A 8 is arranged on the pipeline A. Two interfaces of the three-way sleeve joint 8 are respectively connected with the pipeline A. The third interface of the three-way sleeve joint 8 is connected with the digital pressure switch 9. The digital pressure switch 9 is a commercially available product and is connected with the upper computer, which is used for real-time monitoring of the nitrogen pressure. The three-way sleeve joint A 8 is a commercially available metal sleeve joint product. The output end of the flow controller 6 is connected with the input end of the diaphragm pump 7 through the metal sleeve joint and the pipeline B. The pipelines at various positions can be connected through the use of metal sleeve joints, which can ensure that the installation personnel can complete the pipeline connection with better consistency and leakage prevention.

[0036] Specifically, as shown in Figure 3 In this embodiment, the output end of the nitrogen input assembly, that is, the output end of the diaphragm pump 7, is further provided with a filter 11 on the pipeline connected with each gas jet nozzle 2. The filter 11 is arranged on the translation structure mounting substrate 12, which is arranged on the wafer loading equipment rack 001 and located above the nitrogen input assembly mounting substrate 1. In this embodiment, the filter 11 is a commercially available product. Through the arrangement of the filter 11, the nitrogen can be efficiently and stably filtered, thereby ensuring that the cleanliness of the nitrogen entering the Foup meets the requirements.

[0037] Specifically, as shown in Figures 3-5As shown, in this embodiment, the mounting base 12 of the translation structure is also provided with a translation structure, which is connected to the Foup loading platform 002 and is used to drive the Foup loading platform 002 to translate. With the translation structure, when the air concentration inside the Foup decreases to the required level, the Foup can be driven to move smoothly back and forth to adapt to the needs of subsequent processes. In this embodiment, the translation structure includes a translation cylinder 13, a cylinder rod fixing seat 14, a sliding plate 15, two translation guide rails 16, and three support columns 17. The cylinder rod fixing seat 14 and each translation guide rail 16 are respectively mounted on the translation structure mounting base plate 12. The cylinder rod of the translation cylinder 13 is connected to the cylinder rod fixing seat 14, and the cylinder body of the translation cylinder 13 is fixedly connected to the sliding plate 15. Slider blocks are respectively installed on the lower side of the sliding plate 15 at the corresponding positions of each translation guide rail 16. Each slider is slidably connected to the corresponding translation guide rail 16. The lower ends of each support column 17 are respectively mounted on the sliding plate 15, and the upper ends of each support column 17 are respectively connected to the Foup loading platform 002. In this embodiment, the translation cylinder 13 is a commercially available product, and its extension and retraction are controlled by the host computer to realize the translation of the sliding plate 15 and the Foup loading platform 002; other existing technologies can also be used for the translation structure.

[0038] Specifically, such as Figures 3-5 As shown, this embodiment also includes a jet nozzle lifting structure and an exhaust nozzle lifting structure. The filter 11 is connected to each jet nozzle 2 via a flexible hose to accommodate the translational movement of each jet nozzle 2 with the Foup loading water platform 002 and the lifting movement of each jet nozzle 2; each exhaust nozzle 3 is connected to the exhaust pipe connector 4 via a flexible hose to accommodate the translational movement of each exhaust nozzle 3 with the Foup loading water platform 002 and the lifting movement of each exhaust nozzle 3.

[0039] The jet nozzle lifting structure includes a lifting cylinder A18, a connecting plate 19, and clamping blocks A20. The cylinder body of the lifting cylinder A18 is mounted on the bottom surface of the Foup loading water platform 002 via a lifting cylinder mounting seat A25. The output end of the lifting cylinder A18 is fixedly connected to the connecting plate 19 and drives the connecting plate 19 to rise and fall. Clamping blocks A20 are respectively installed at both ends of the connecting plate 19, and each clamping block A20 is used to clamp and fix one jet nozzle 2. The clamping block A20 adopts an existing clamping block structure that clamps by tightening screws. A three-way ferrule connector B27 is also installed below the cylinder body of the lifting cylinder A18. The three-way ferrule connector B27 is a commercially available reducing metal three-way ferrule connector, used to connect the two jet nozzles 2 and the filter 11 respectively. In this embodiment, the lifting cylinder A18 is a commercially available product, and its extension and retraction are controlled by the host computer, thereby driving the connecting plate 19 and the clamped jet nozzles 2 to rise and fall.

[0040] The exhaust nozzle lifting structure is provided with two groups, and each group of exhaust nozzle lifting structure corresponds to one exhaust nozzle 3. Each group of exhaust nozzle lifting structure includes lifting cylinder B 21, clamping block mounting frame 22 and clamping block B 23. The cylinder body of the lifting cylinder B 21 of each group of exhaust nozzle lifting structure is installed on the bottom surface of the Foup loading water platform 002 through the lifting cylinder mounting seat B 26. The output end of the lifting cylinder B 21 of each group of exhaust nozzle lifting structure is fixedly connected with the clamping block mounting frame 22 of the same group of exhaust nozzle lifting structure, and drives the clamping block mounting frame 22 to lift. The clamping block B 23 of each group of exhaust nozzle lifting structure is installed on the clamping block mounting frame 22 of the same group of exhaust nozzle lifting structure, and is used for clamping and fixing one corresponding exhaust nozzle 3. The clamping block B 23 adopts the existing clamping block structure which is clamped by a tightening screw. In this embodiment, the lifting cylinder B 21 is a commercially available product, which is controlled by the upper computer to perform telescopic action, so as to drive the clamping block mounting frame 22 and the clamping fixed exhaust nozzle 3 to move up and down. When nitrogen is blown, the jet nozzle 2 and the exhaust nozzle 3 are controlled to rise and tightly adhere to the bottom surface of the Foup respectively. The jet nozzle 2 is connected with the gas inlet at the bottom of the Foup, and the exhaust nozzle 3 is connected with the exhaust port at the bottom of the Foup, so as to ensure that nitrogen is fully input into the gas inlet of the Foup and gas is fully discharged from the exhaust port of the Foup, and it can be applied to Foup with slightly different specifications. In this embodiment, a sealing ring is also embedded on the top surface of the jet nozzle 2 and the top surface of the exhaust nozzle 3. When the jet nozzle 2 and the exhaust nozzle 3 tightly adhere to the bottom surface of the Foup respectively, the sealing effect of the gas inlet and the exhaust port is achieved and nitrogen leakage is prevented.

[0041] Specifically, as shown in Figure 3 each jet nozzle 2 is provided with a nozzle fixing sleeve 24, and each exhaust nozzle 3 is also provided with a nozzle fixing sleeve 24. The Foup loading water platform 002 is provided with a jet nozzle through hole and an exhaust nozzle through hole respectively. The shape of the jet nozzle through hole is matched with the outer peripheral contour shape of the nozzle fixing sleeve 24 on the corresponding jet nozzle 2, and the shape of the exhaust nozzle through hole is matched with the outer peripheral contour shape of the nozzle fixing sleeve 24 on the corresponding exhaust nozzle 3, which can play a guiding role when the jet nozzle 2 and the exhaust nozzle 3 are lifted.

[0042] Working principle:

[0043] When purging, each jet nozzle 2 is connected with the corresponding air inlet at the bottom of the Foup, and each exhaust nozzle 3 is connected with the corresponding air outlet at the bottom of the Foup; the ball valve 5 is connected with the external nitrogen source and kept open, the diaphragm valve 7 is controlled to be open to transport nitrogen to each jet nozzle 2, each jet nozzle 2 sprays nitrogen into the Foup, the spraying direction is from bottom to top, at the same time, each exhaust nozzle 3 can exhaust the air in the Foup, until the nitrogen concentration in the Foup is higher than the minimum requirement for use, and then stop spraying nitrogen.

Claims

1. A nitrogen gas transfer control system of a wafer loading apparatus, characterized by: The nitrogen input assembly mounting base plate (1), the nitrogen input assembly, a plurality of jet nozzles (2), a plurality of exhaust nozzles (3), and a plurality of exhaust pipe joints (4) are provided. Each of the jet nozzles (2) and the exhaust nozzles (3) is arranged at the Foup loading water platform (002) of the wafer loading equipment, and the arrangement position of each of the jet nozzles (2) corresponds to the gas inlet of the bottom of the Foup loaded on the Foup loading water platform (002), and the arrangement position of each of the exhaust nozzles (3) corresponds to the gas outlet of the bottom of the Foup loaded on the Foup loading water platform (002). The nitrogen input assembly mounting base plate (1) is mounted on the rack (001) of the wafer loading equipment, the nitrogen input assembly is arranged on the nitrogen input assembly mounting base plate (1), the input end of the nitrogen input assembly is connected with the external nitrogen source in communication, the output end of the nitrogen input assembly is connected with each of the jet nozzles (2) in communication, and each of the exhaust pipe joints (4) is arranged on the nitrogen input assembly mounting base plate (1). One end of each of the exhaust pipe joints (4) is connected with one corresponding exhaust nozzle (3) in communication, and the other end of each of the exhaust pipe joints (4) is connected with the external total exhaust pipeline in communication.

2. The nitrogen gas transfer control system of a wafer load apparatus according to claim 1, wherein: The nitrogen input assembly includes a ball valve (5), a flow controller (6), and a diaphragm pump (7) mounted on the nitrogen input assembly mounting base plate (1) respectively. The input end of the ball valve (5) is connected with the external nitrogen source in communication as the input end of the nitrogen input assembly, the output end of the ball valve (5) is connected with the input end of the flow controller (6) in communication, the output end of the flow controller (6) is connected with the input end of the diaphragm pump (7) in communication, and the output end of the diaphragm pump (7) is connected with each of the jet nozzles (2) in communication as the output end of the nitrogen input assembly.

3. The nitrogen delivery control system of a wafer load apparatus according to claim 2, wherein: The output end of the ball valve (5) and the input end of the flow controller (6) are connected in communication through a pipeline A, a three-way sleeve joint A (8) is arranged on the pipeline A, two interfaces of the three-way sleeve joint (8) are connected with the pipeline A in communication, and a third interface of the three-way sleeve joint (8) is connected with a digital pressure switch (9).

4. The nitrogen delivery control system of a wafer load apparatus according to claim 2, wherein: The output end of the flow controller (6) and the input end of the diaphragm pump (7) are connected in communication through a metal sleeve joint and a pipeline B.

5. The nitrogen delivery control system of a wafer load apparatus according to claim 2, wherein: The diaphragm pump (7) is connected with a single valve (10) for controlling the opening of the diaphragm pump (7).

6. The nitrogen delivery control system of a wafer load apparatus according to claim 1, wherein: A filter (11) is further arranged on the pipeline through which the output end of the nitrogen input assembly is connected with each of the jet nozzles (2), and the filter (11) is arranged on a translation structure mounting base plate (12) arranged on the rack (001) of the wafer loading equipment and above the nitrogen input assembly mounting base plate (1).

7. The nitrogen delivery control system of a wafer load apparatus according to claim 6, wherein: A translation structure is further arranged on the translation structure mounting base plate (12), and the translation structure is connected with the Foup loading water platform (002) and used to drive the Foup loading water platform (002) to translate.

8. The nitrogen delivery control system of a wafer load apparatus according to claim 7, wherein: The translation structure comprises a translation cylinder (13), a cylinder rod fixing seat (14), a sliding plate (15), a plurality of translation guide rails (16) and a plurality of support columns (17); the cylinder rod fixing seat (14) and each translation guide rail (16) are respectively installed on the translation structure mounting base plate (12), the cylinder rod of the translation cylinder (13) is connected with the cylinder rod fixing seat (14), the cylinder body of the translation cylinder (13) is fixedly connected with the sliding plate (15), the lower side of the sliding plate (15) is provided with a sliding block corresponding to each translation guide rail (16), each sliding block is slidably connected with the corresponding translation guide rail (16), and the lower end of each support column (17) is installed on the sliding plate (15), and the upper end of each support column (17) is connected with the Foup loading water platform (002).

9. The nitrogen delivery control system of a wafer load apparatus according to claim 1, wherein: Further comprising a gas injection nozzle lifting structure and an exhaust nozzle lifting structure; The gas injection nozzle lifting structure comprises a lifting cylinder A (18), a connecting plate (19) and clamping blocks A (20), the cylinder body of the lifting cylinder A (18) is installed on the bottom surface of the Foup loading water platform (002), the output end of the lifting cylinder A (18) is fixedly connected with the connecting plate (19) and drives the connecting plate (19) to lift, and the two ends of the connecting plate (19) are respectively provided with the clamping blocks A (20), and each clamping block A (20) is used for clamping and fixing one gas injection nozzle (2). Each group of the exhaust nozzle lifting structure comprises a lifting cylinder B (21), a clamping block mounting rack (22) and clamping blocks B (23), the cylinder body of the lifting cylinder B (21) of each group of the exhaust nozzle lifting structure is installed on the bottom surface of the Foup loading water platform (002), the output end of the lifting cylinder B (21) of each group of the exhaust nozzle lifting structure is fixedly connected with the clamping block mounting rack (22) of the same group of the exhaust nozzle lifting structure and drives the clamping block mounting rack (22) to lift, and the clamping blocks B (23) of each group of the exhaust nozzle lifting structure are installed on the clamping block mounting rack (22) of the same group of the exhaust nozzle lifting structure and are used for clamping and fixing one corresponding exhaust nozzle (3).

10. The nitrogen gas transfer control system of a wafer load apparatus according to claim 9, wherein: The outer periphery of each gas injection nozzle (2) is provided with a nozzle fixing sleeve (24), the outer periphery of each exhaust nozzle (3) is also provided with a nozzle fixing sleeve (24), the Foup loading water platform (002) is respectively provided with a gas injection nozzle through hole and an exhaust nozzle through hole, the shape of the gas injection nozzle through hole is matched with the outer peripheral contour shape of the nozzle fixing sleeve (24) on the corresponding gas injection nozzle (2), and the shape of the exhaust nozzle through hole is matched with the outer peripheral contour shape of the nozzle fixing sleeve (24) on the corresponding exhaust nozzle (3).

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