Sound absorption device and noise elimination type dry pump

By installing a sound-absorbing device on the tailpipe of the dry pump, and utilizing a conical wedge and ultra-fine glass wool cloth, the problems of easy structural changes and poor sound absorption effect of existing dry pump silencers are solved, achieving efficient and stable noise absorption and noise reduction.

CN121007133APending Publication Date: 2025-11-25ZHEJIANG XINKE SEMICON CO LTD
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Patent Information

Application Number
CN202510995903.6
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2025-07-18
Publication Date
2025-11-25

AI Technical Summary

Technical Problem

Existing silencers for dry pumps are prone to changes in the internal structure of the silencer housing due to airflow and vibration during use, resulting in poor noise reduction effect. They are also costly to manufacture and involve complicated procedures.

Method used

The sound-absorbing device includes an inner ring and an outer ring arranged coaxially. The sound-absorbing plate has a conical wedge protruding along the axial direction. The sound-absorbing material is ultra-fine glass wool and glass cloth. The sound-absorbing plate is sleeved on the dry pump tail pipe through the inner ring. The airflow does not flow through the inside of the device. The multi-layered conical wedge, together with the sound-absorbing material, improves the sound absorption effect.

Benefits of technology

It simplifies the production process, reduces costs, improves the sound absorption effect, has high stability, can effectively absorb noise of specific frequencies, expands the sound absorption frequency range, and reduces sound wave reflection.

✦ Generated by Eureka AI based on patent content.

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Abstract

The invention discloses a sound absorption device and a silencing type dry pump. The sound absorption device comprises a frame body, a sound absorption plate and a sound absorption material. The frame body comprises an inner ring body and an outer ring body which are coaxially arranged; the sound absorption plate is annular, and the middle ring position of the annular sound absorption plate protrudes towards the end face of one side in the axis direction to form a conical wedge part. The multiple sound absorption plates are arranged between the inner ring body and the outer ring body in a stacked mode at intervals, and the space between every two adjacent sound absorption plates is filled with a sound absorption material. The noise elimination type dry pump comprises the sound absorption device. The dry pump tail pipe is sleeved with the inner ring body, and the sound absorption device does not need to be connected into the dry pump tail pipe, so that the production cost and production procedures are reduced; the air flow does not need to flow through the sound absorption device, so that the coaxiality of the sound absorption plate and the tail pipe is not easily influenced by the flowing of the air flow, and the continuous absorption of noise with specific frequency is facilitated; multiple layers of sound absorption plates with conical wedge parts can be stacked in the length direction of the tail pipe, and the sound absorption material is matched, so that the sound attenuation effect is greatly improved.
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Description

Technical Field

[0001] This invention relates to the field of silencer dry pump technology, and more particularly to a sound-absorbing device and a silencer dry pump. Background Technology

[0002] Sub-fab refers to the back-end solution of a semiconductor manufacturing facility. Unlike the main processing corridor (FAB), the equipment in a sub-fab primarily involves basic tooling management and waste treatment systems. These mainly include dry vacuum pumps, combustion and absorber emission reduction systems, water processors, and coolers, used for the transport and management of bulk materials and exhaust gases. Dry vacuum pumps, also known as dry vortex pumps or simply dry pumps, can operate at pressures from atmospheric pressure to 10... -2 Operating within the Pa pressure range, no oils or liquids can be used in the pump's suction channels (such as the pump chamber). The exhaust port is open to the atmosphere, allowing continuous exhaust into the atmosphere. Dry pumps generate noise during operation. On one hand, high-intensity noise can affect the safe production of semiconductors; on the other hand, prolonged exposure to noise can lead to hearing damage, decreased sleep quality, and increased psychological stress. Testing and analysis of dry pumps indicate that noise reduction is primarily concentrated in the tailpipe section.

[0003] Existing patent application number 201821368936X discloses a composite silencer with S-shaped channels. It involves setting an air inlet and an air outlet at both ends of the silencer housing, and inside the housing is a waveform silencing device with multiple S-shaped channels (S-shaped guide plates arranged concentrically, with the gap between adjacent S-shaped guide plates forming the S-shaped channel). Airflow sequentially passes through the air inlet, the waveform silencing device, and the air outlet, and noise is reduced as the airflow passes through the silencing device. This device has the following disadvantages: 1. Since the silencer is connected to the airflow duct, when it is used for silencing the tailpipe of a dry pump, the installation position of the S-shaped guide plate inside the silencer housing is easily changed under the continuous flow of air and the vibration of the dry pump (for example, the S-shaped guide plate deviates from the axis of the tailpipe, causing the frequency range of sound absorption of the waveform silencer to change). 2. Since the airflow passes through the air inlet, the S-shaped waveform silencer and the air outlet in sequence, this is a "one-layer" S-shaped silencer, which has a poor noise reduction effect. 3. This type of muffler connected to the tailpipe requires a particularly strict sealing device, which results in high manufacturing costs and a relatively complicated manufacturing process, making it unfavorable for widespread use. Summary of the Invention

[0004] To address the above-mentioned problems, this invention proposes a sound-absorbing device and a silencer dry pump.

[0005] The technical solution adopted in this invention is as follows: This application provides a sound-absorbing device, including a frame, a sound-absorbing panel, and a sound-absorbing material; The frame includes an inner ring and an outer ring arranged coaxially; The sound-absorbing plate is ring-shaped, and the middle ring of the ring-shaped sound-absorbing plate protrudes to one side along the axial direction to form a conical wedge. The sound-absorbing panels include multiple panels, which are stacked at intervals between the inner and outer rings, and the sound-absorbing material is filled between two adjacent sound-absorbing panels.

[0006] When the sound-absorbing device is used in the tailpipe of a dry pump, the sound-absorbing device is fitted onto the tailpipe through an inner ring, without needing to be connected to the tailpipe. On the one hand, the structure of the sound-absorbing device provided in this application is simpler, which helps to reduce production costs and production processes. On the other hand, when the sound-absorbing device provided in this application is in use, the airflow does not need to flow through the sound-absorbing device, but still flows through the tailpipe, so that the coaxiality of the sound-absorbing plate and the tailpipe is not easily affected by the airflow, which is conducive to continuous absorption of noise at a specific frequency. Furthermore, since the sound-absorbing device is fitted onto the tailpipe, multiple layers of sound-absorbing plates with conical wedges can be stacked along the length of the tailpipe, and in conjunction with sound-absorbing materials, the sound absorption effect is greatly improved.

[0007] Furthermore, the sound-absorbing material is ultrafine glass wool and / or glass cloth. When the sound-absorbing material is ultrafine glass wool and glass cloth, the ultrafine glass wool and the glass cloth are respectively filled in two adjacent layers of sound-absorbing panels.

[0008] Furthermore, the sound-absorbing plate is provided with micropores, and the sound-absorbing plate includes 5 to 10 micropores.

[0009] The micropores in the sound-absorbing panels effectively help reduce noise by altering the propagation characteristics of sound waves and increasing their energy loss. Each panel, in conjunction with sound-absorbing material, forms a sound-absorbing layer; 5-10 panels create a multi-layered sound-absorbing device. In practical applications of this device in dry pump tailpipes, with a normal dry pump spacing of five meters, at least four layers are needed to reduce noise from 80 decibels to 50 decibels or below, and seven layers are needed to reduce it to below 30 decibels. The more layers, the better the noise reduction effect. Fewer than four layers result in insufficient sound wedges and poor sound absorption. Seven layers are preferred, as 30-40 decibels is considered a comfortable range for human perception.

[0010] Furthermore, end plates are respectively provided at both ends of the inner ring body and the outer ring body; The inner and outer rings are respectively provided with slots on their inner sidewalls. The inner ring end of the sound-absorbing plate is engaged with the slot of the inner ring, and the outer ring end of the sound-absorbing plate is engaged with the slot of the outer ring.

[0011] When the sound-absorbing device is actually used in the tailpipe of a dry pump, the device is fitted onto the tailpipe via an inner ring. When the dry pump vibrates during operation, the tailpipe vibrates accordingly. Compared to an S-shaped channel silencer connected to the tailpipe, the sound-absorbing plate has two stress points on the frame because its inner and outer ring ends are respectively engaged in the grooves of the inner and outer rings. Combined with the wedge-shaped end of the sound-absorbing plate, the plate has higher stability and is easier to maintain concentricity with the tailpipe, resulting in better noise reduction.

[0012] Furthermore, the wedge portion has a wedge angle, the angle of which is between 110° and 130°.

[0013] When the sound-absorbing device is actually used in the tailpipe of a dry pump, the noise range of the dry pump is mid-frequency noise, and the noise at the tail end of the dry pump is about 80 decibels, which is in the mid-frequency range. The wedge angle is between 110° and 130° to facilitate mid-frequency sound absorption at the tail outlet of the dry pump.

[0014] This application also provides a silencer dry pump, including a pump casing, a tailpipe, and a sound-absorbing device; The tailpipe is installed on the pump casing; The sound-absorbing device includes a frame, sound-absorbing panels, and sound-absorbing materials: The frame includes an inner ring and an outer ring arranged coaxially. End plates are provided at both ends of the inner ring and the outer ring. The sound-absorbing device is sleeved on the tail pipe through the inner ring, and the end plates are fixedly connected to the pump casing. The sound-absorbing plate is ring-shaped, and the middle ring of the ring-shaped sound-absorbing plate protrudes to one side along the axial direction to form a conical wedge, with the tip of the wedge facing the pump casing. The sound-absorbing panels include multiple panels, which are stacked at intervals between the inner and outer rings, and the sound-absorbing material is filled between two adjacent sound-absorbing panels.

[0015] The conical wedge shape of the sound-absorbing panel (sound-absorbing wedge) is designed based on acoustic principles. When its tip faces the sound source, it allows sound waves to enter the sound-absorbing material more effectively. When a sound wave encounters the tip of the sound-absorbing wedge, it is gradually guided into the interior of the wedge, increasing the contact area and contact time between the sound wave and the sound-absorbing material. Furthermore, different frequencies of sound waves have different characteristics during propagation, and the wedge tip facing the sound source helps to broaden the absorption range for different frequencies. For low-frequency sound waves, the wedge tip structure provides a larger effective space, allowing the low-frequency sound waves to undergo more reflection and scattering as they enter the wedge, thus increasing the chance of absorption. For high-frequency sound waves, the wedge tip also guides and scatters, resulting in a more uniform distribution of high-frequency sound waves within the sound-absorbing material. Finally, when a sound wave propagates to the sound-absorbing wedge, if the tip faces the sound source, the sound wave will gradually enter the interior of the sound-absorbing material along the shape of the wedge, rather than directly impacting a flat surface and causing strong reflection. The wedge tip is positioned so that it faces the pump casing, which can enhance the sound absorption effect, expand the sound absorption frequency range, and reduce sound wave reflection.

[0016] Furthermore, the inner ring body has a cylindrical structure, the outer diameter of the tail tube is smaller than the inner diameter of the ring cylinder, and the difference between the outer diameter of the tail tube and the inner diameter of the inner ring body is 0.3cm~0.5cm.

[0017] The difference in inner diameter between the inner ring and the tail tube facilitates the installation of the sound-absorbing device during use (the inner ring smoothly fits onto the tail tube). An excessively large difference in inner diameter between the inner ring and the tail tube is detrimental to improving the sound absorption effect, while an excessively small difference is detrimental to the installation of the sound-absorbing device.

[0018] Furthermore, the sound-absorbing device also includes a tail end connector. A connecting ring is provided on the end plate of the frame away from the pump casing. One end of the tail end connector is sleeved on the connecting ring and tightly connected to the connecting ring, and the other end is sleeved on the tail pipe and tightly connected to the tail pipe.

[0019] The tail end connector securely mounts the sound-absorbing device onto the tail pipe, reducing the shaking of the sound-absorbing device when the dry pump vibrates. On the other hand, there is a gap between the tail pipe and the sound-absorbing device, and the tail end connector seals the sound-absorbing device to the tail pipe, reducing noise leakage or transmission through gas and improving the noise reduction effect.

[0020] In actual use, the tail connector can be a flexible rubber ring.

[0021] Furthermore, the sound-absorbing device has a structure of two interlocking semi-annular cylinders, and the outer diameter of the tail tube is equal to the inner diameter of the inner ring.

[0022] Furthermore, the sound-absorbing material is ultrafine glass wool and / or glass cloth. When the sound-absorbing material is ultrafine glass wool and glass cloth, the ultrafine glass wool and the glass cloth are alternately layered and filled between two adjacent sound-absorbing panels. The sound-absorbing panel is provided with micropores, and the sound-absorbing panel includes 5 to 10 micropores. The inner and outer rings are respectively provided with slots on their inner sidewalls. The inner ring end of the sound-absorbing plate is engaged with the slot of the inner ring, and the outer ring end of the sound-absorbing plate is engaged with the slot of the outer ring. The angle of the wedge is between 110° and 130°.

[0023] Furthermore, in the multi-layered sound-absorbing device, ultrafine glass wool and glass cloth are arranged in alternating layers, and the sound-absorbing material of the sound-absorbing layer closest to the pump casing is glass cloth.

[0024] Furthermore, micropores are also provided on the inner and outer ring bodies.

[0025] Furthermore, the pump casing has mounting bosses, and the end plate near the pump casing is connected to the mounting bosses by fasteners. In actual use, a buffer pad can also be provided between the mounting bosses and the end plate to enhance the connection.

[0026] The beneficial effects of this invention are: (1) When the sound-absorbing device is used in the tailpipe of a dry pump, the sound-absorbing device is sleeved on the tailpipe through an inner ring body, without needing to be connected to the tailpipe. On the one hand, the structure is simpler, which helps to reduce production costs and production processes; on the other hand, the airflow does not need to flow through the sound-absorbing device during use, but still flows through the tailpipe, so that the coaxiality of the sound-absorbing plate and the tailpipe is not easily affected by the airflow, which is conducive to continuous absorption of noise at a specific frequency; in addition, multiple layers of sound-absorbing plates with conical wedges can be stacked along the length of the tailpipe, and with the help of sound-absorbing materials, the sound absorption effect is greatly improved. The tip of the wedge is set towards the pump casing side, which can enhance the sound absorption effect, expand the sound absorption frequency range, and reduce sound wave reflection.

[0027] (2) The wedge angle of the sound absorption device is between 110° and 130°, which facilitates the mid-frequency sound absorption of the tail outlet of the dry pump.

[0028] (3) The inner and outer ring ends of the sound-absorbing plate are respectively engaged in the slots of the inner and outer ring bodies, so that the sound-absorbing plate has two stress points on the frame. Combined with the end point of the sound-absorbing plate at the wedge, the stability of the sound-absorbing plate is higher and it is easier to maintain the concentricity with the tail pipe, resulting in better noise reduction effect. Attached Figure Description

[0029] Figure 1 This is a schematic diagram of the shaft side structure of the silencer dry pump according to Embodiment 1 of the present invention; Figure 2 yes Figure 1 A magnified schematic diagram of the structure of part A in the diagram; Figure 3 This is a top view of the silent dry pump of Embodiment 1 of the present invention; Figure 4 yes Figure 3 Schematic diagram of the cross-sectional structure of AA; Figure 5 yes Figure 4 A magnified schematic diagram of the partial structure of B in the diagram; Figure 6 This is a schematic diagram of the axial structure of the frame in Embodiment 1 of the present invention (with one end plate hidden). Figure 7 This is a schematic diagram of the axial structure of the sound-absorbing plate in Embodiment 1 of the present invention; Figure 8 This is a schematic diagram of the axial structure of the sound-absorbing device in Embodiment 2 of the present invention (with the sound-absorbing material hidden). Figure 9 yes Figure 8 A magnified schematic diagram of the structure of C.

[0030] The labels for the attached figures are as follows: 10. Frame; 110. Inner ring; 111. Slot; 120. Outer ring; 20. Sound-absorbing panel; 210. Wedge; 220. Inner ring end; 230. Outer ring end; 30. Ultrafine glass wool; 40. Glass cloth; 50. End plate; 510. Connecting ring; 60. Tail end connector; 70. Buffer pad; 80. Connecting protrusion; 100. Sound-absorbing device; 200. Pump casing; 201. Mounting boss; 300. Tail pipe. Detailed Implementation

[0031] The present invention will now be described in detail with reference to the accompanying drawings.

[0032] Example 1 like Figures 1-7 As shown, this application provides a sound-absorbing device, including a frame 10, a sound-absorbing panel 20, and a sound-absorbing material; The frame 10 includes an inner ring 110 and an outer ring 120 arranged coaxially; The sound-absorbing panel 20 is annular, and the middle ring of the annular sound-absorbing panel 20 protrudes to one side along the axial direction to form a conical wedge 210. The sound-absorbing panel 20 comprises 7 panels, which are stacked at intervals between the inner ring 110 and the outer ring 120, and the space between two adjacent sound-absorbing panels 20 is filled with sound-absorbing material.

[0033] When the sound-absorbing device 100 is used in the dry pump tailpipe 300, the sound-absorbing device 100 is sleeved on the dry pump tailpipe 300 through the inner ring body 110, without needing to connect the sound-absorbing device 100 into the dry pump tailpipe 300. On the one hand, the structure of the sound-absorbing device provided by this application is simpler, which is conducive to reducing production costs and production processes. On the other hand, when the sound-absorbing device provided by this application is in use, the airflow does not need to flow through the sound-absorbing device 100, but still flows through the tailpipe 300, so that the coaxiality of the sound-absorbing plate 20 and the tailpipe 300 is not easily affected by the airflow, which is conducive to continuous absorption of noise at a specific frequency. Furthermore, since the sound-absorbing device 100 is sleeved on the tailpipe 300, multiple layers of sound-absorbing plates 20 with conical wedges 210 can be stacked along the length of the tailpipe 300. Combined with sound-absorbing materials, the sound absorption effect is greatly improved.

[0034] In this embodiment, the wedge portion 210 has a V-shaped structure along the longitudinal section of the sound-absorbing plate 20.

[0035] In this embodiment, the sound-absorbing materials are ultrafine glass wool 30 and glass cloth 40, which are respectively filled in two adjacent layers of sound-absorbing panels 20.

[0036] In this embodiment, the sound-absorbing plate 20 is provided with micropores (not shown in the figure).

[0037] In this embodiment, end plates 50 are respectively provided at both ends of the inner ring body 110 and the outer ring body 120; The inner ring body 110 and the outer ring body 120 are respectively provided with slots 111. The inner ring end 220 of the sound-absorbing plate 20 is engaged in the slot 111 of the inner ring body 110, and the outer ring end 230 of the sound-absorbing plate 20 is engaged in the slot 111 of the outer ring body 120.

[0038] When the sound-absorbing device 100 is actually used in the dry pump tailpipe 300, the sound-absorbing device 100 is sleeved on the dry pump tailpipe 300 through the inner ring body 110. When the dry pump vibrates during operation, the tailpipe 300 vibrates accordingly. Compared with the S-shaped channel silencer connected to the tailpipe 300, since the inner ring end 220 and the outer ring end 230 of the sound-absorbing plate 20 are respectively engaged in the slots 111 of the inner ring body 110 and the outer ring body 120, that is, the sound-absorbing plate 20 has two stress points on the frame 10. Combined with the end point of the wedge 210 of the sound-absorbing plate 20, the stability of the sound-absorbing plate 20 is higher, and it is easier to maintain the concentricity with the tailpipe 300, resulting in a better sound absorption effect.

[0039] In this embodiment, the inner ring body 110 and the outer ring body 120 are respectively welded and fixed to the end plates 50 at both ends, or connected or snapped together with fasteners.

[0040] In other embodiments, locking blocks may be formed at the inner ring end 220 and the outer ring end 230 of the sound-absorbing plate 20, respectively. The locking block at the inner ring end 220 is engaged with the locking groove 111 of the inner ring body 110, and the locking block at the outer ring end 230 is engaged with the locking groove 111 of the outer ring body 120.

[0041] In this embodiment, the wedge portion 210 has a wedge angle.

[0042] In this embodiment, the wedge angle is 120°.

[0043] When the sound-absorbing device 100 is actually used in the dry pump tailpipe 300, the noise range of the dry pump is mid-frequency noise, and the noise at the tail end of the dry pump is about 80 decibels, which is in the mid-frequency range. The wedge angle of 120° is convenient for mid-frequency sound absorption at the tail outlet of the dry pump.

[0044] This application also provides a silencer dry pump, including a pump casing 200, a tailpipe 300, and a sound-absorbing device 100; Tailpipe 300 is installed on pump casing 200; The sound-absorbing device 100 includes a frame 10, a sound-absorbing panel 20, and sound-absorbing material. The frame 10 includes an inner ring 110 and an outer ring 120 arranged coaxially. The two ends of the inner ring 110 and the outer ring 120 are respectively provided with end plates 50. The sound-absorbing device 100 is sleeved on the tail pipe 300 through the inner ring 110, and the end plates 50 are fixedly connected to the pump casing 200. The sound-absorbing plate 20 is annular, and the middle ring of the annular sound-absorbing plate 20 protrudes to one side along the axial direction to form a conical wedge 210. The tip of the wedge 210 is set towards the pump casing 200. The sound-absorbing panels 20 include multiple panels, which are stacked at intervals between the inner ring 110 and the outer ring 120, and the space between two adjacent sound-absorbing panels 20 is filled with sound-absorbing material.

[0045] In this embodiment, the inner ring body 110 is a cylindrical structure, the outer diameter of the tail tube 300 is smaller than the inner diameter of the ring cylinder, and the difference between the outer diameter of the tail tube 300 and the inner diameter of the inner ring body 110 is 0.4 cm.

[0046] The inner diameter difference between the inner ring body 110 and the tail tube 300 facilitates the installation of the sound-absorbing device 100 during use (the inner ring body 110 smoothly fits onto the tail tube 300). If the inner diameter difference between the inner ring body 110 and the tail tube 300 is too large, it will not be conducive to improving the sound absorption effect; if it is too small, it will not be conducive to the installation of the sound-absorbing device 100.

[0047] In this embodiment, the outer ring 120 is also a cylindrical structure, making the frame 10 a hollow annular cylindrical structure; the outer diameter of the tail tube 300 is 25cm, and the inner diameter of the inner ring 110 is 25.4cm.

[0048] In this embodiment, the sound-absorbing device 100 further includes a tail end connector 60. A connecting ring 510 is provided on the end plate 50 of the frame 10 away from the pump housing 200. One end of the tail end connector 60 is sleeved on the connecting ring 510 and tightly connected to the connecting ring 510, and the other end is sleeved on the tail pipe 300 and tightly connected to the tail pipe 300.

[0049] The tail connector 60 securely mounts the sound-absorbing device 100 onto the tail pipe 300, reducing the shaking of the sound-absorbing device 100 when the dry pump vibrates. On the other hand, there is a gap between the tail pipe 300 and the sound-absorbing device 100, and the tail connector 60 seals the sound-absorbing device 100 and the tail pipe 300 together, reducing noise leakage or transmission through gas and improving the noise reduction effect.

[0050] In actual use, the tail connector 60 can be an elastic rubber ring.

[0051] In this embodiment, the sound-absorbing material is ultrafine glass wool 30 and glass cloth 40. The ultrafine glass wool 30 and glass cloth 40 are alternately layered and filled between two adjacent sound-absorbing panels 20. The sound-absorbing panel 20 is provided with micropores, and the sound-absorbing panel 20 includes 7 micropores. The inner ring body 110 and the outer ring body 120 are respectively provided with slots 111. The inner ring end 220 of the sound-absorbing plate 20 is engaged in the slot 111 of the inner ring body 110, and the outer ring end 230 of the sound-absorbing plate 20 is engaged in the slot 111 of the outer ring body 120. The angle of the wedge 210 is 120°.

[0052] In this embodiment, in the multi-layered sound-absorbing device 100, the ultrafine glass wool 30 and glass cloth 40 are arranged in alternating layers, and the sound-absorbing material of the sound-absorbing layer closest to the pump housing 200 is glass cloth 40.

[0053] In this embodiment, micropores are also provided on the inner ring body 110 and the outer ring body 120 (not shown in the figure).

[0054] In this embodiment, the pump housing 200 has a mounting boss 201, and the end plate 50 near the pump housing 200 is connected to the mounting boss 201 by fasteners. In actual use, a buffer pad 70 can also be provided between the mounting boss 201 and the end plate 50 to enhance the connection.

[0055] Example 2 like Figures 1-9 As shown, the difference between this embodiment and embodiment 1 is that the sound-absorbing device 100 is different. In this embodiment, the sound-absorbing device 100 has a structure of two semi-annular cylinders interlocking together, and the outer diameter of the tail tube 300 is equal to the inner diameter of the inner ring 110.

[0056] In this embodiment, the inner ring body 110 is a structure of two semi-annular cylinders, and the outer ring body 120 is also a structure of two semi-annular cylinders. The two outer ring bodies 120 respectively have connecting protrusions 80 formed on the cross-sectional surface of the semi-annular cylinders, and the sound-absorbing device 100 is fixed to the tail pipe 300 by fastening the connecting protrusions 80.

[0057] In this embodiment, when the two semi-circular cylinders are fastened together, the two inner ring bodies 110 are respectively attached or fastened at the cross-sectional positions of the semi-circular cylinders.

[0058] Example 3 The difference between this embodiment and Embodiment 1 lies in the structure of the sound-absorbing panel 20. In this embodiment, at least the wedge portion 210 of the sound-absorbing panel 20 has a multi-layer structure, that is, the wedge portion 210 includes at least a first sound-absorbing layer and a second sound-absorbing layer (not shown in the figure). The first sound-absorbing layer is disposed on the side closer to the pump casing 200 and is used to absorb high-frequency noise; foam board can be used for this purpose. The second sound-absorbing layer is disposed on the side farther from the pump casing 200 and is used to absorb mid- and low-frequency noise; composite materials such as plywood, metal plate, plastic film, or canvas can be used for this purpose. The layered sound-absorbing panel 20 can further enhance the sound absorption effect.

[0059] In this embodiment, a coating is provided at least on the side of the first sound-absorbing layer near the pump casing 200 and / or on the side of the second sound-absorbing layer away from the pump casing 200. The coating is applied using inorganic fiber spraying. This coating is mainly composed of inorganic fibers and water-based adhesives, and is lightweight, non-toxic, odorless, sound-absorbing, weather-resistant, highly efficient insulated, and fire-resistant. The coating preparation method is as follows: after mixing the raw materials, they are sprayed using an air compressor. The mixture is sprayed onto the steel plate with atomized water to form the coating. This method is relatively simple to apply and can adapt to steel plate surfaces of various complex shapes.

[0060] The above description is merely a preferred embodiment of the present invention and does not limit the scope of patent protection of the present invention. Any equivalent structural transformations made based on the description and drawings of the present invention, whether directly or indirectly applied to other related technical fields, are similarly included within the scope of protection of the present invention.

Claims

1. A sound-absorbing device, characterized in that, This includes the frame, sound-absorbing panels, and sound-absorbing materials; The frame includes an inner ring and an outer ring arranged coaxially; The sound-absorbing plate is ring-shaped, and the middle ring of the ring-shaped sound-absorbing plate protrudes to one side along the axial direction to form a conical wedge. The sound-absorbing panels include multiple panels, which are stacked at intervals between the inner and outer rings, and the sound-absorbing material is filled between two adjacent sound-absorbing panels.

2. The sound-absorbing device as described in claim 1, characterized in that, The sound-absorbing material is ultrafine glass wool and / or glass cloth. When the sound-absorbing material is ultrafine glass wool and glass cloth, the ultrafine glass wool and the glass cloth are respectively filled in two adjacent layers of sound-absorbing panels.

3. The sound-absorbing device as described in claim 1, characterized in that, The sound-absorbing panel is provided with micropores, and the sound-absorbing panel includes 5 to 10 micropores.

4. The sound-absorbing device as described in claim 1, characterized in that, The inner ring body and the outer ring body are respectively provided with end plates at both ends; The inner and outer rings are respectively provided with slots on their inner sidewalls. The inner ring end of the sound-absorbing plate is engaged with the slot of the inner ring, and the outer ring end of the sound-absorbing plate is engaged with the slot of the outer ring.

5. The sound-absorbing device as described in claim 1, characterized in that, The wedge portion has a wedge angle, the angle of which is between 110° and 130°.

6. A silent dry pump, characterized in that, This includes the pump casing, tailpipe, and sound-absorbing device; The tailpipe is installed on the pump casing; The sound-absorbing device includes a frame, sound-absorbing panels, and sound-absorbing materials: The frame includes an inner ring and an outer ring arranged coaxially. End plates are provided at both ends of the inner ring and the outer ring. The sound-absorbing device is sleeved on the tail pipe through the inner ring, and the end plates are fixedly connected to the pump casing. The sound-absorbing plate is ring-shaped, and the middle ring of the ring-shaped sound-absorbing plate protrudes to one side along the axial direction to form a conical wedge, with the tip of the wedge facing the pump casing. The sound-absorbing panels include multiple panels, which are stacked at intervals between the inner and outer rings, and the sound-absorbing material is filled between two adjacent sound-absorbing panels.

7. A silent dry pump as described in claim 6, characterized in that, The inner ring body has a cylindrical structure, the outer diameter of the tail tube is smaller than the inner diameter of the ring body, and the difference between the outer diameter of the tail tube and the inner diameter of the inner ring body is 0.3cm~0.5cm.

8. A silent dry pump as described in claim 7, characterized in that, The sound-absorbing device also includes a tail end connector. A connecting ring is provided on the end plate of the frame away from the pump casing. One end of the tail end connector is sleeved on the connecting ring and tightly connected to the connecting ring, and the other end is sleeved on the tail pipe and tightly connected to the tail pipe.

9. A silent dry pump as described in claim 6, characterized in that, The sound-absorbing device has a structure of two semi-annular cylinders interlocking together, and the outer diameter of the tail tube is equal to the inner diameter of the inner ring.

10. A silent dry pump as described in claim 6, characterized in that, The sound-absorbing material is ultra-fine glass wool and / or glass cloth. When the sound-absorbing material is ultra-fine glass wool and glass cloth, the ultra-fine glass wool and the glass cloth are alternately layered and filled between two adjacent sound-absorbing panels. The sound-absorbing panel is provided with micropores, and the sound-absorbing panel includes 5 to 10 micropores. The inner and outer rings are respectively provided with slots on their inner sidewalls. The inner ring end of the sound-absorbing plate is engaged with the slot of the inner ring, and the outer ring end of the sound-absorbing plate is engaged with the slot of the outer ring. The angle of the wedge is between 110° and 130°.