A polishing device and a polishing method for processing a silicon carbide chuck

Abstract

The application relates to the field of grinding technology and discloses a grinding device and a grinding method for processing a silicon carbide suction disc, which comprises a box body, a suction disc main body and a box door hingedly connected on one side of the front face of the box body, a placing plate is fixedly connected to the lower part of the inside of the box body, a collecting box is slidably installed on the inner bottom surface of the box body, the inner top surface of the box body is provided with a grinding assembly in the middle, the inner top surface of the box body is provided with spraying assemblies on both sides, the grinding assembly comprises a servo motor fixedly installed in the middle of the top of the box body, an output end of the servo motor is fixedly connected with a rotating shaft, the bottom of the rotating shaft is fixedly installed with a lead screw, the outer side of the lead screw is threadedly connected with an extrusion sleeve, and the top side of the box body is rotationally connected with a side shaft, the grinding device solves the problem that the existing grinding and polishing equipment usually needs to be stopped to replace different grinding tools to realize the separate processing of coarse grinding and fine grinding, and the grinding and polishing efficiency of the silicon carbide suction disc is affected.

Description

TECHNICAL FIELD

[0001] The application relates to the technical field of transformers, in particular to a polishing device and polishing method for processing a silicon carbide chuck. BACKGROUND

[0002] In a wafer manufacturing device, a vacuum chuck is needed to stably fix the wafer, so as to ensure that the wafer does not slide in the processing process. After the blank manufacturing is completed, the vacuum chuck needs to be polished, polished and cleaned.

[0003] For example, a polishing and grinding device for producing a silicon carbide sealing element is disclosed in CN112318299A, which comprises a base, a first support plate fixedly installed at the top front side of the base, a fan unit fixedly connected to the rear side of the first support plate, a clamping unit fixedly installed at the top center of the base, a water flow polishing unit arranged on one side of the clamping unit, a movable polishing unit arranged on the rear side of the clamping unit, a second support plate fixedly connected to the rear side of the movable polishing unit, and the second support plate is fixedly connected to the base. The water pump box in the water flow polishing unit sprays high-pressure water through the water flow polishing nozzle, so as to polish the silicon carbide sealing element with water flow, which is not easy to damage the polishing surface. At the same time, the second gear is driven to rotate by the motor, and then the second outer gear ring is driven to rotate by the second gear, so that the water flow polishing nozzle rotates, thereby enhancing the polishing effect.

[0004] However, when polishing the carbonized silicon material, the existing technology needs to follow the steps from coarse grinding to fine grinding, that is, first use a coarse-grained grinding wheel for coarse grinding to remove large protrusions and uneven parts on the surface, and then gradually replace the fine-grained grinding wheel for fine grinding to obtain a smoother surface. The existing polishing and grinding equipment usually needs to be stopped to replace different abrasive tools to realize separate processing of coarse grinding and fine grinding, which is inconvenient to operate and affects the polishing and grinding efficiency of the carbonized silicon chuck.

[0005] Therefore, a polishing device and polishing method for processing a carbonized silicon chuck are proposed to solve the above problems. SUMMARY

[0006] The purpose of the present application is to provide a polishing device and polishing method for processing a carbonized silicon chuck to solve the problem that the existing polishing and grinding equipment usually needs to be stopped to replace different abrasive tools to realize separate processing of coarse grinding and fine grinding, which affects the polishing and grinding efficiency of the carbonized silicon chuck.

[0007] To achieve the above purpose, the present application provides the following technical scheme: a polishing device for processing a carbonized silicon chuck, comprising a box body, a chuck main body and a box door hinged on one side of the front face of the box body, a placing plate fixedly connected to the inside lower part of the box body, and a collection box slidingly installed on the inner bottom surface of the box body.

[0008] Also includes:

[0009] The inner top surface of the box is provided with a polishing assembly, and the both sides of the inner top surface of the box are provided with a spraying assembly, the polishing assembly comprises a servo motor fixedly installed in the middle of the top of the box, the output end of the servo motor is fixedly connected with a rotating shaft, the bottom of the rotating shaft is fixedly installed with a lead screw, and the outer side of the lead screw is threadedly connected with an extrusion sleeve.

[0010] The top side of the box is rotatably connected with a side shaft, the side shaft and the rotating shaft are fixedly installed with a belt transmission part, the bottom of the side shaft is fixedly connected with a side gear, the outer side of the side gear is meshingly connected with an inner ring gear, and the bottom of the inner ring gear is fixedly installed with a mounting cover.

[0011] The inside of the mounting cover is horizontally slidably installed with a push block, the bottom of the mounting cover is vertically slidably installed with a vertical rod, the top of the vertical rod is fixedly connected with a contact inclined block, and the bottom of the vertical rod is installed with a grinding head.

[0012] Preferably, the servo motor is fixedly installed with the box through the mounting plate, the rotating shaft is rotatably connected with the box, the bottom of the rotating shaft is fixedly connected with a main gear, the outer side of the main gear is meshingly connected with a gear ring part, the gear ring part is rotatably connected with the inner top surface of the box, the bottom of the gear ring part is fixedly connected with the lead screw, the outer side of the extrusion sleeve is fixedly connected with a guide rod, the guide rod is slidably connected with the top of the box, and the outer side of the extrusion sleeve is fixedly connected with extrusion inclined blocks.

[0013] By adopting the above technical scheme, the driving motor drives the grinding head to rotate, the servo motor drives the rotating shaft and the main gear to rotate, the main gear drives the gear ring part to rotate, the gear ring part drives the lead screw to rotate, the guide rod slides up and down to limit the extrusion sleeve, and the lead screw rotates to make the extrusion sleeve descend, and at the same time, the rotating shaft drives the side shaft to rotate through the belt transmission part, so that the grinding head rotates around its own axis while revolving around the sun.

[0014] Preferably, the rotating shaft drives the side shaft to rotate through the belt transmission part, the inner top surface of the box is fixedly connected with a limiting rod, the inner ring gear is rotatably connected with the limiting rod, the inner wall of the mounting cover is symmetrically provided with an inner groove, and the outer sides of the push block are fixedly connected with side blocks.

[0015] By adopting the above technical scheme, the side shaft drives the side gear to rotate, the side gear drives the inner ring gear to rotate, the limiting rod is used for assisting the stable rotation of the inner ring gear, and the inner ring gear drives the mounting cover to rotate.

[0016] Preferably, the side block is in sliding connection with the inner groove, one side of the inner groove is fixedly connected with a spring one, the side block is fixedly connected with the spring one, the other side of the inner groove is fixedly connected with a magnetic block, the magnetic block is in magnetic connection with the side block, and the inclined surfaces of the left contact inclined block and the right contact inclined block are opposite.

[0017] By adopting the above technical scheme, the extrusion of the extrusion sleeve will extrude the push blocks on both sides, the push blocks will be driven to move by the extrusion, the side blocks will slide in the inner groove and separate from the magnetic blocks, and the side blocks will compress the spring one, and the movement of the push blocks will extrude the contact inclined blocks.

[0018] Preferably, the bottom of the contact inclined block is fixedly connected with a spring two, the bottom end of the spring two is fixedly connected with the inner bottom surface of the mounting cover, the spring two is not less than two, one side of the top of the contact inclined block is fixedly connected with a U-shaped rod, and the top of the push block is provided with an inclined slot.

[0019] By adopting the above technical scheme, the right contact inclined block rises, the left contact inclined block descends, the contact inclined block rises and falls to act on the spring two, the movement of the contact inclined block drives the U-shaped rod to move in the inclined slot, so that the left contact inclined block only drives the left U-shaped rod to descend, and the right contact inclined block only drives the U-shaped rod to rise.

[0020] Preferably, the inner bottom surface of the inclined slot is inclined, the U-shaped rod abuts against the inclined surface of the inclined slot, the bottom of the vertical rod is fixedly connected with a lower plate, the lower plate is located below the outer side of the mounting cover, the inner side of the lower plate is fixedly connected with a driving motor, and the output end of the driving motor is fixedly connected with the grinding head.

[0021] By adopting the above technical scheme, the right grinding head is polished first, the left grinding head is polished later, the right grinding head adopts a coarse grinding head, the left grinding head adopts a fine grinding head, the extrusion inclined block limits and blocks the push block, and the left grinding head is kept stable and pressed for polishing.

[0022] Preferably, the spraying assembly comprises two connecting pipes which are symmetrically and fixedly installed on the top of the box body, the bottom of each of the two connecting pipes is rotatably connected with the same annular cylinder, the bottom of the annular cylinder is symmetrically and fixedly connected with a plurality of spraying pipes, the inner side of the annular cylinder is fixedly connected with a connecting block, the bottom of the inner gear ring is fixedly connected with a pushing rod, and the pushing rod abuts against the connecting block.

[0023] By adopting the above technical scheme, the external cooling liquid is input through the connecting pipe and flows into the annular cylinder, and is sprayed out through the plurality of spraying pipes, and at the same time that the inner gear ring rotates, the inner gear ring also drives the pushing rod to rotate, the pushing rod drives the connecting block to rotate, and the connecting block drives the annular cylinder and the spraying pipes to rotate, so that the spraying pipes can be rotated and sprayed.

[0024] Preferably, the inside of the collecting box is fixedly provided with a filter screen, the top of the placing plate is fixedly provided with a fixed plate in a symmetrical manner, the inside of the fixed plate is threadedly connected with a screw rod, one end of the screw rod is rotatably connected with a pressing block, the pressing block is attached to the negative pressure suction disc part, and the top of the placing plate is uniformly provided with a circular hole.

[0025] By adopting the above technical scheme, the suction disc body is arranged on the top of the negative pressure suction disc part, the screw rods on the two sides are rotated, the screw rods drive the pressing blocks to move, the two pressing blocks are tightly pressed against the suction disc body, the negative pressure suction disc part is started to adsorb the suction disc body, the fixation of the suction disc body is completed, and the liquid and the debris flow into the collecting box through the circular hole.

[0026] A polishing method of a polishing device for processing a silicon carbide suction disc, comprising the following steps:

[0027] Step one: first, the suction disc body is fixed, the operator places the suction disc body on the top of the negative pressure suction disc part, rotates the screw rods on the two sides, the two pressing blocks are tightly pressed against the suction disc body, and the negative pressure suction disc part is started to adsorb the suction disc body, so that the fixation of the suction disc body is completed;

[0028] Step two: the operator places the suction disc body on the top of the negative pressure suction disc part, rotates the screw rods on the two sides, the screw rods drive the pressing blocks to move, the two pressing blocks are tightly pressed against the suction disc body, the negative pressure suction disc part is started to adsorb the suction disc body, the fixation of the suction disc body is completed, the external cooling liquid is input through the connecting pipe and flows into the annular cylinder, and is sprayed out through the plurality of spray pipes;

[0029] Step three: when polishing, the servo motor and the driving motor of the grinding head are started, the driving motor drives the grinding head to rotate, the servo motor drives the rotating shaft and the main gear to rotate, the main gear drives the gear ring part to rotate, the gear ring part drives the lead screw to rotate, the lead screw rotates to make the extrusion sleeve descend, the right grinding head polishes first, and the left grinding head polishes later, the right grinding head adopts a coarse grinding head, and the left grinding head adopts a fine grinding head, until the extrusion sleeve is tightly pressed at the bottom end of the lead screw, the rotation of the servo motor is stopped, and one cycle of polishing is completed;

[0030] Step four: while polishing the suction disc body, the polishing surface of the suction disc body is conveniently sprayed and cooled, and the debris is conveniently flushed, the liquid and the debris flow into the collecting box through the circular hole, and are filtered through the filter screen, so that the separation and collection of the debris and the liquid are realized.

[0031] Compared with the prior art, the polishing device has the following beneficial effects:

[0032] By setting the polishing assembly, the operator starts the servo motor and the drive motor of the grinding head, the drive motor drives the grinding head to rotate, the servo motor drives the rotating shaft and the main gear to rotate, the main gear drives the gear ring part to rotate, the gear ring part drives the screw rod to rotate, the guide rod slides up and down, which is used for limiting the extrusion sleeve, the screw rod rotates to make the extrusion sleeve descend, at the same time, the rotating shaft drives the side shaft to rotate through the belt transmission part, the side shaft drives the side gear to rotate, the side gear drives the inner gear ring to rotate, the limiting rod is used for assisting the stable rotation of the inner gear ring, the inner gear ring drives the mounting cover to rotate, so that the grinding head rotates while revolving, which is convenient for overall polishing treatment of the top surface of the suction cup body, and the extrusion sleeve descending will extrude the push block on both sides, the push block is driven to move by extrusion, the side block slides in the inner groove and separates from the magnetic block, and the side block will compress the spring one, the push block moves to extrude the contact inclined block, the inclined surfaces of the contact inclined blocks on both sides are opposite, so that the right contact inclined block rises and the left contact inclined block descends, the contact inclined block rising and descending will act on the spring two, the contact inclined block moves to drive the U-shaped rod to move in the inclined groove, the left contact inclined block will only drive the left U-shaped rod to descend, and the right contact inclined block will only drive the U-shaped rod to ascend, and the extrusion sleeve descending to the position of the push block exists for a certain time, so that the right grinding head polishes first and the left grinding head polishes later, the right grinding head adopts a coarse grinding head, and the left grinding head adopts a fine grinding head, the extrusion inclined block limits and blocks the push block, keeps the left grinding head stable and tight, and polishes until the extrusion sleeve is pressed tightly at the bottom end of the screw rod, the rotation of the servo motor is stopped, and one cycle of polishing is completed, the initial state of the extrusion sleeve limits the height of the coarse grinding head, the extrusion inclined block limits the height of the fine grinding head when being at the lowest end, and the extrusion sleeve keeps descending, the coarse grinding head can only ascend and the fine grinding head can only descend, so that the problem that the existing polishing and polishing equipment usually needs to be stopped to replace different abrasive tools to realize separate processing of coarse grinding and fine grinding and affects the polishing and polishing efficiency of the silicon carbide suction cup is solved.

[0033] By setting the spraying assembly, the operator places the suction cup body on the top of the negative pressure suction cup part, rotates the screws on both sides, the screws drive the pressing blocks to move, the two pressing blocks are tightly pressed against the suction cup body, and then the negative pressure suction cup part is started to adsorb the suction cup body, the fixation of the suction cup body is completed, the cooling liquid outside is input through the connecting pipe and flows into the annular cylinder, and is sprayed out from the plurality of spraying pipes, and at the same time of the rotation of the inner gear ring, the inner gear ring also drives the push rod to rotate, the push rod drives the connecting block to rotate, the connecting block drives the annular cylinder and the spraying pipe to rotate, the spraying pipe is convenient for rotating and spraying, the polishing surface of the suction cup body is convenient for being sprayed, cooled and washed while being polished. BRIEF DESCRIPTION OF DRAWINGS

[0034] Figure 1 It is a schematic view of the collecting box structure of the present application.

[0035] Figure 2 Schematic diagram of the whole structure of the present application;

[0036] Figure 3 Schematic diagram of the sectional structure of the box of the present application;

[0037] Figure 4 Schematic diagram of the whole structure of the present application; Figure 3 Schematic diagram of the enlarged structure at A of the present application;

[0038] Figure 5 Schematic diagram of the whole structure of the present application; Figure 3 Schematic diagram of the enlarged structure at B of the present application;

[0039] Figure 6 Schematic diagram of the sectional structure of the inner gear ring of the present application;

[0040] Figure 7 Schematic diagram of the whole structure of the present application; Figure 6 Schematic diagram of the enlarged structure at C of the present application;

[0041] Figure 8 Schematic diagram of the sectional structure of the mounting cover of the present application;

[0042] Figure 9 Schematic diagram of the whole structure of the present application; Figure 8 Schematic diagram of the enlarged structure at D of the present application;

[0043] Figure 10 Schematic diagram of the grinding head structure of the present application;

[0044] Figure 11 Schematic diagram of the lifting of the grinding head of the present application;

[0045] Figure 12 Schematic diagram of the placement plate structure of the present application;

[0046] Figure 13 Schematic diagram of the connecting pipe structure of the present application;

[0047] Figure 14 Schematic diagram of the connecting block structure of the present application.

[0048] In the figure: 1, box; 2, box door; 3, placing plate; 4, collecting box; 5, filter screen; 6, suction cup main body; 7, polishing assembly; 71, servo motor; 72, rotating shaft; 73, main gear; 74, gear ring part; 75, screw rod; 76, extrusion sleeve; 77, guide rod; 78, extrusion inclined block; 79, belt transmission part; 710, side shaft; 711, side gear; 712, limiting rod; 713, inner gear ring; 714, mounting cover; 715, inner groove; 716, push block; 717, side block; 718, spring one; 719, magnetic attraction block; 720, vertical rod; 721, contact inclined block; 722, spring two; 723, U-shaped rod; 724, inclined groove; 725, lower plate; 726, grinding head; 8, spraying assembly; 81, connecting pipe; 82, annular cylinder; 83, spraying pipe; 84, connecting block; 85, push rod; 9, negative pressure suction cup part; 10, fixed plate; 11, screw rod; 12, pressing block; 13, circular hole. DETAILED DESCRIPTION

[0049] The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of protection of the present application.

[0050] Please refer to Figure 1 Figure 3 The present application provides a technical solution: a polishing device for processing silicon carbide suction cups, comprising a box body 1, a suction cup main body 6 and a box door 2 hinged on one side of the front face of the box body 1, a placing plate 3 fixedly connected inside the lower part of the box body 1, and a collecting box 4 slidingly installed on the inner bottom surface of the box body 1.

[0051] A polishing assembly 7 is arranged in the middle of the inner top surface of the box body 1, the polishing assembly 7 comprising a servo motor 71 fixedly installed in the middle of the top of the box body 1, a rotating shaft 72 fixedly connected to the output end of the servo motor 71, a screw rod 75 fixedly installed at the bottom of the rotating shaft 72, and an extrusion sleeve 76 threadedly connected to the outer side of the screw rod 75.

[0052] The servo motor 71 is fixedly installed with the box body 1 through a mounting plate, the rotating shaft 72 is rotatably connected with the box body 1, the bottom of the rotating shaft 72 is fixedly connected with a main gear 73, the outer side of the main gear 73 is meshingly connected with a gear ring part 74, the gear ring part 74 is rotatably connected with the inner top surface of the box body 1, the bottom of the gear ring part 74 is fixedly connected with the screw rod 75, the outer part of the extrusion sleeve 76 is fixedly connected with a guide rod 77, the guide rod 77 is slidingly connected with the top of the box body 1, and the outer side of the extrusion sleeve 76 is fixedly connected with extrusion inclined blocks 78 in a symmetrical manner.

[0053] ​The top side of the box body 1 is rotatably connected with a side shaft 710, the side shaft 710 is fixedly installed with a belt transmission part 79 between the rotating shaft 72, the bottom of the side shaft 710 is fixedly connected with a side gear 711, the outer side of the side gear 711 is meshingly connected with an inner ring gear 713, the bottom of the inner ring gear 713 is symmetrically fixedly installed with a mounting cover 714.

[0054] The rotating shaft 72 drives the side shaft 710 to rotate through the belt transmission part 79, the inner top surface of the box body 1 is symmetrically fixedly connected with a limiting rod 712, the inner ring gear 713 is rotatably connected with the limiting rod 712, the inner wall of the mounting cover 714 is symmetrically provided with an inner groove 715, the outer two sides of the push block 716 are symmetrically fixedly connected with side blocks 717.

[0055] The mounting cover 714 is internally slidably installed with the push block 716, the bottom of the mounting cover 714 is vertically slidably installed with a vertical rod 720, the top of the vertical rod 720 is fixedly connected with contact inclined blocks 721, the bottom of the vertical rod 720 is installed with a grinding head 726.

[0056] The side blocks 717 are slidably connected with the inner groove 715, one side of the inner groove 715 is fixedly connected with a spring 718, the side blocks 717 are fixedly connected with the spring 718, the other side of the inner groove 715 is fixedly installed with magnetic attraction blocks 719, the magnetic attraction blocks 719 are magnetically connected with the side blocks 717, the inclined surface directions of the left and right contact inclined blocks 721 are opposite.

[0057] The bottom of the contact inclined block 721 is fixedly connected with springs 722, the bottom ends of the springs 722 are fixedly connected with the inner bottom surface of the mounting cover 714, the springs 722 are not less than two, one side of the top of the contact inclined block 721 is fixedly connected with a U-shaped rod 723, the top of the push block 716 is provided with an inclined groove 724.

[0058] The inner bottom surface of the inclined groove 724 is obliquely arranged, the U-shaped rod 723 abuts against the inclined surface of the inclined groove 724, the bottom of the vertical rod 720 is fixedly connected with a lower plate 725, the lower plate 725 is located below the outer side of the mounting cover 714, the inner side of the lower plate 725 is fixedly installed with a driving motor, the output end of the driving motor is fixedly connected with the grinding head 726.

[0059] Embodiment one: as Figure 4 - Figure 11As shown, the operator starts the servo motor 71 and the driving motor of the grinding head 726, the driving motor drives the grinding head 726 to rotate, the servo motor 71 drives the rotating shaft 72 and the main gear 73 to rotate, the main gear 73 drives the gear ring part 74 to rotate, the gear ring part 74 drives the lead screw 75 to rotate, the guide rod 77 slides up and down to limit the extrusion sleeve 76, the lead screw 75 rotates to make the extrusion sleeve 76 descend, at the same time, the rotating shaft 72 drives the side shaft 710 to rotate through the belt transmission part 79, the side shaft 710 drives the side gear 711 to rotate, the side gear 711 drives the inner gear ring 713 to rotate, the limiting rod 712 is used to assist the stable rotation of the inner gear ring 713, the inner gear ring 713 drives the mounting cover 714 to rotate, so that the grinding head 726 rotates while revolving, which is convenient for polishing the top surface of the suction cup body 6 as a whole.

[0060] The extrusion sleeve 76 descends to extrude the push block 716 on both sides, the push block 716 is extruded to drive the side block 717 to move, the side block 717 slides in the inner groove 715 and is separated from the magnetic block 719, and the side block 717 compresses the spring one 718, the push block 716 moves to extrude and contact the inclined block 721, the inclined surfaces of the inclined blocks 721 on both sides are opposite, so that the right inclined block 721 rises and the left inclined block 721 descends, the rising and descending of the inclined block 721 acts on the spring two 722, and the movement of the inclined block 721 drives the U-shaped rod 723 to move in the inclined groove 724.

[0061] The left inclined block 721 only drives the left U-shaped rod 723 to descend, and the right inclined block 721 only drives the U-shaped rod 723 to ascend, and the extrusion sleeve 76 descends to the position of the push block 716 for a certain period of time, so that the right grinding head 726 polishes first and the left grinding head 726 polishes later, the right grinding head 726 adopts a coarse grinding head and the left grinding head 726 adopts a fine grinding head, the extrusion inclined block 78 limits and blocks the push block 716 to keep the left grinding head 726 stable and tightly polished, until the extrusion sleeve 76 is tightly pressed at the bottom end of the lead screw 75, the rotation of the servo motor 71 is stopped, and one cycle of polishing is completed, which realizes the height limitation of the coarse grinding head in the initial state of the extrusion sleeve 76 and the height limitation of the fine grinding head when the extrusion inclined block 78 is at the lowest end, and keeps the coarse grinding head only rising and the fine grinding head only descending when the extrusion sleeve 76 descends.

[0062] The inner top surface of the box body 1 is provided with a spraying assembly 8 on both sides, the spraying assembly 8 comprises two connecting pipes 81 symmetrically and fixedly installed at the top of the box body 1, the same annular cylinder 82 is rotatably installed at the bottom of the two connecting pipes 81, the spraying pipes 83 are symmetrically and fixedly installed at the bottom of the annular cylinder 82, the connecting block 84 is fixedly connected to the inner side of the annular cylinder 82, the push rod 85 is fixedly connected to the bottom of the inner gear ring 713, and the push rod 85 abuts against the connecting block 84.

[0063] The inside of the collecting box 4 is fixedly installed with a filter screen 5, the top of the placing plate 3 is fixedly installed with a fixed plate 10 in symmetry, the inside of the fixed plate 10 is threadedly connected with a screw rod 11, one end of the screw rod 11 is rotationally connected with a pressing block 12, the pressing block 12 is attached to the negative pressure suction disc part 9, and the top of the placing plate 3 is uniformly provided with a circular hole 13.

[0064] As shown in the second embodiment, Figure 12 - Figure 14 The operator places the suction disc body 6 on the top of the negative pressure suction disc part 9, rotates the screw rods 11 on both sides, moves the pressing blocks 12 through the screw rods 11, tightly presses the two pressing blocks 12 against the suction disc body 6, starts the negative pressure suction disc part 9 to adsorb the suction disc body 6, completes the fixation of the suction disc body 6, and the external cooling liquid is input through the connecting pipe 81 and flows into the annular cylinder 82, and is sprayed out through the multiple spray pipes 83.

[0065] When the inner ring gear 713 rotates, the inner ring gear 713 also drives the pushing rod 85 to rotate, the pushing rod 85 pushes the connecting block 84 to rotate, the connecting block 84 drives the annular cylinder 82 and the spray pipe 83 to rotate, the spray pipe 83 is conveniently rotated and sprayed, the suction disc body 6 is conveniently sprayed and cooled and washed of the debris while being polished, the liquid and the debris flow into the collecting box 4 through the circular hole 13 and are filtered through the filter screen 5, the separation and collection of the debris and the liquid are realized.

[0066] Working principle: when the device is used, first, Figure 1 - Figure 14As shown, the operator places the suction cup body 6 on the top of the negative pressure suction cup part 9, the pressure blocks 12 on both sides abut against the suction cup body 6, and then starts the negative pressure suction cup part 9 to adsorb the suction cup body 6, and then starts the servo motor 71 and the driving motor of the grinding head 726, the servo motor 71 drives the rotating shaft 72 and the main gear 73 to rotate, the main gear 73 drives the gear ring part 74 to rotate, the gear ring part 74 drives the lead screw 75 to rotate, the lead screw 75 rotates to make the extrusion sleeve 76 descend, at the same time, the rotating shaft 72 drives the side shaft 710 to rotate through the belt transmission part 79, the side shaft 710 drives the side gear 711 to rotate, so that the grinding head 726 rotates simultaneously with the revolution, which is convenient for overall polishing of the top surface of the suction cup body 6, and the extrusion sleeve 76 descending extrudes the push block 716 on both sides, the push block 716 is extruded to drive the side block 717 to move, the right contact inclined block 721 rises, and the left contact inclined block 721 descends, the lifting of the contact inclined block 721 acts on the spring two 722, the movement of the contact inclined block 721 drives the U-shaped rod 723 to move in the inclined groove 724, and the extrusion sleeve 76 descending to the position of the push block 716 for a certain period of time makes the right grinding head 726 polish first and the left grinding head 726 polish later, the right grinding head 726 adopts a coarse grinding head, and the left grinding head 726 adopts a fine grinding head, the extrusion inclined block 78 limits and blocks the push block 716 to keep the left grinding head 726 stable and tightly polished, until the extrusion sleeve 76 is tightly pressed at the bottom end of the lead screw 75, the rotation of the servo motor 71 is stopped, and one cycle of polishing is completed, the cooling liquid outside is input through the connecting pipe 81 and flows into the annular cylinder 82, and is sprayed out by the plurality of spray pipes 83, the inner gear ring 713 also drives the push rod 85 to rotate, which is convenient for the rotation and spraying of the spray pipe 83, the liquid and debris flow into the collection box 4 through the circular hole 13 and are filtered by the filter screen 5, so as to realize the separation and collection of the debris and the liquid.

[0067] The contents not described in detail in the specification belong to the prior art known to those skilled in the art.

[0068] Although the present application has been described in detail with reference to the foregoing embodiments, those skilled in the art can modify the technical solutions recorded in the foregoing embodiments or make equivalent replacements for part of the technical features, and any modification, equivalent replacement, improvement, etc. made within the spirit and principles of the present application shall be included in the protection scope of the present application.

Claims

1. A polishing device for processing silicon carbide chuck, comprising a box body (1), a chuck body (6) and a box door (2) hinged on one side of the front of the box body (1), a placing plate (3) is fixedly connected to the inside bottom of the box body (1), and a collecting box (4) is slidingly installed on the inner bottom surface of the box body (1); characterized in that Further comprising: a polishing assembly (7) is arranged on the inner top surface of the box body (1), a spraying assembly (8) is arranged on both sides of the inner top surface of the box body (1), the polishing assembly (7) comprises a servo motor (71) fixedly installed on the top middle of the box body (1), an output end of the servo motor (71) is fixedly connected with a rotating shaft (72), a screw rod (75) is fixedly installed on the bottom of the rotating shaft (72), and an extrusion sleeve (76) is threadedly connected to the outer side of the screw rod (75); a side shaft (710) is rotatably connected to one side of the top of the box body (1), a belt transmission part (79) is fixedly installed between the side shaft (710) and the rotating shaft (72), a side gear (711) is fixedly connected to the bottom of the side shaft (710), an inner gear ring (713) is meshingly connected to the outer side of the side gear (711), and mounting covers (714) are fixedly installed on the bottom of the inner gear ring (713) in a symmetrical manner; a push block (716) is slidingly installed in the inside of the mounting cover (714), a vertical rod (720) is slidingly installed on the bottom of the mounting cover (714) in a vertical manner, a contact inclined block (721) is fixedly connected to the top of the vertical rod (720), and a grinding head (726) is installed on the bottom of the vertical rod (720).

2. The polishing apparatus for processing a silicon carbide chuck according to claim 1, wherein: The servo motor (71) is fixedly installed on the box body (1) through a mounting plate, the rotating shaft (72) is rotatably connected to the box body (1), a main gear (73) is fixedly connected to the bottom of the rotating shaft (72), a gear ring part (74) is meshingly connected to the outer side of the main gear (73), the gear ring part (74) is rotatably connected to the inner top surface of the box body (1), the bottom of the gear ring part (74) is fixedly connected with the screw rod (75), a guide rod (77) is fixedly connected to the outside of the extrusion sleeve (76), the guide rod (77) is slidingly connected to the top of the box body (1), and extrusion inclined blocks (78) are fixedly connected to the outer side of the extrusion sleeve (76) in a symmetrical manner.

3. The polishing apparatus for processing a silicon carbide chuck according to claim 2, wherein: The rotating shaft (72) drives the side shaft (710) to rotate through the belt transmission part (79), limit rods (712) are fixedly connected to the inner top surface of the box body (1) in a symmetrical manner, the inner gear ring (713) is rotatably connected with the limit rods (712), inner grooves (715) are formed in the inner walls of the mounting covers (714) in a symmetrical manner, and side blocks (717) are fixedly connected to the outer sides of both sides of the push block (716).

4. The polishing apparatus for processing a silicon carbide chuck according to claim 3, wherein: The side block (717) is slidably connected to the inner groove (715). A spring (718) is fixedly connected to one side of the inner groove (715). The side block (717) is fixedly connected to the spring (718). A magnetic block (719) is fixedly installed on the other side of the inner groove (715). The magnetic block (719) is magnetically connected to the side block (717). The inclined planes of the left contact inclined block (721) and the right contact inclined block (721) are opposite in direction.

5. The polishing apparatus for processing a silicon carbide chuck according to claim 4, wherein: The bottom of the contact inclined block (721) is fixedly connected to a second spring (722), the bottom end of the second spring (722) is fixedly connected to the inner bottom surface of the mounting cover (714), there are at least two second springs (722), a U-shaped rod (723) is fixedly connected to one side of the top of the contact inclined block (721), and a groove (724) is opened on the top of the push block (716).

6. The polishing apparatus for processing a silicon carbide chuck according to claim 5, wherein: The inner bottom surface of the inclined groove (724) is inclined, the U-shaped rod (723) abuts against the inclined surface of the inclined groove (724), the bottom of the vertical rod (720) is fixedly connected to the lower plate (725), the lower plate (725) is located below the outer side of the mounting cover (714), the inner side of the lower plate (725) is fixedly installed with a drive motor, and the output end of the drive motor is fixedly connected to the grinding head (726).

7. The polishing apparatus for processing a silicon carbide chuck according to claim 6, wherein: The spray assembly (8) includes two connecting pipes (81) symmetrically fixedly installed on the top of the housing (1). The bottom of the two connecting pipes (81) is rotatably installed with the same annular cylinder (82). Spray pipes (83) are symmetrically fixedly installed on the bottom of the annular cylinder (82). A connecting block (84) is fixedly connected to the inner side of the annular cylinder (82). A push rod (85) is fixedly connected to the bottom of the internal gear ring (713). The push rod (85) abuts against the connecting block (84).

8. The polishing apparatus for processing a silicon carbide chuck according to claim 7, wherein: The collection box (4) is fixedly installed with a filter screen (5), and a fixing plate (10) is symmetrically fixedly installed on the top of the placement plate (3). The fixing plate (10) is threadedly connected with a screw (11), and a pressure block (12) is rotatably connected to one end of the screw (11). The pressure block (12) is in contact with the negative pressure suction cup part (9), and round holes (13) are evenly opened on the top of the placement plate (3).

9. A polishing method of a polishing apparatus for processing a silicon carbide chuck, characterized by, The grinding device for processing silicon carbide chucks as described in claim 8 is used in the following steps: Step 1: First, fix the suction cup body (6). The operator places the suction cup body (6) on the top of the negative pressure suction cup part (9), rotates the screws (11) on both sides, and the two pressure blocks (12) press against the suction cup body (6). The negative pressure suction cup part (9) is activated to suck up the suction cup body (6) and complete the fixation of the suction cup body (6). Step two: the operator will suction cup body (6) is placed on the top of the negative pressure suction cup (9), turn the two sides of the screw (11), screw (11) driven block (12) to move, two block (12) to close the suction cup body (6), and then start the negative pressure suction cup (9) will suction cup body (6) adsorbed, complete the fixing of the suction cup body (6), the external cooling liquid through the connecting pipe (81) input, and flow into the annular cylinder (82), and then by a plurality of spray pipe (83) spray out; Step three: in the polishing, start servo motor (71) and the drive motor of the grinding head (726), drive motor driven grinding head (726) rotation, servo motor (71) driven shaft (72) and the main gear (73) rotation, main gear (73) driven gear ring (74) rotation, gear ring (74) driven screw rod (75) rotation, screw rod (75) rotation makes the extrusion sleeve (76) down, so that the right side of the grinding head (726) first polishing, left grinding head (726) polishing, right grinding head (726) using coarse grinding head, left grinding head (726) using fine grinding head, until the extrusion sleeve (76) compression in the bottom end of the screw rod (75), stop servo motor (71) rotation, complete a cycle of polishing; Step four: in the polishing of the suction cup body (6), it is convenient to spray cooling and flush the polishing surface of the suction cup body (6). Liquid and debris flow into the collection box (4) through the round hole (13), and are filtered by the filter screen (5), realizing the separation and collection of debris and liquid.

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