Chain transmission system and fault detection method thereof

Abstract

The invention belongs to the technical field of chain transmission systems, and discloses a chain transmission system and a fault detection method thereof. The chain transmission system comprises a supporting frame, a plurality of bearing pedestals, a transmission shaft and a transmission assembly, the bearing pedestals are all installed on the supporting frame, at least part of the bearing pedestals are provided with vibration sensors, at least part of the bearing pedestals are provided with temperature sensors, and a plurality of first bearings are arranged on the transmission shaft at intervals in the axial direction; the multiple first bearings and the multiple bearing seats are arranged in a one-to-one correspondence mode, and the conveying assembly comprises a conveying shaft and a conveying wheel arranged on the conveying shaft. According to the chain transmission system, the vibration driver and the temperature sensor are arranged on the bearing seat, the vibration value and the temperature value of the bearing seat can be obtained, the working state of the first bearing and the working state of the transmission shaft can be indirectly obtained by monitoring the vibration value and the temperature value of the bearing seat, the monitoring difficulty of the working state of the chain transmission system can be lowered, and the monitoring efficiency is improved. A chain transmission system is prevented from breaking down, and therefore production efficiency can be guaranteed.

Description

Technical Field

[0001] This invention relates to the field of chain drive system technology, and in particular to chain drive systems and fault detection methods thereof. Background Technology

[0002] Photovoltaic wet etching is one of the core processes in the manufacturing of crystalline silicon solar cells. It involves chemically etching the surface of silicon wafers with acidic or alkaline solutions (such as a mixture of HNO3 and HF) to form an anti-reflective textured surface. Since this is a single-sided process, a chain drive system is essential. The chain drive system plays a crucial role in transporting the silicon wafers during photovoltaic wet etching. Because this process involves continuous production for extended periods, high precision in wafer placement is crucial; otherwise, uneven etching will occur, affecting product quality. Furthermore, the production environment for photovoltaic wet etching is quite harsh, requiring the chain drive system to be exposed to acidic, high-humidity, and highly volatile steam for extended periods. The main load-bearing components of the chain drive system are the drive shaft and bearings. Misalignment of the drive shaft can lead to wafer displacement or vibration, affecting product quality. A broken drive shaft will cause production line shutdown for maintenance, impacting normal production efficiency. A jammed bearing will cause chain slippage, disrupting the normal production cycle. However, the existing technology for detecting the working condition of drive shafts and bearings is still insufficient. Prevention is only achieved through periodic inspections or periodic replacement of spare parts. Periodic inspections are time-consuming and affect production efficiency, while periodic replacement of spare parts results in low spare parts utilization and increased costs. Summary of the Invention

[0003] The purpose of this invention is to provide a chain drive system and its fault detection method, which can monitor the working status of the drive shaft in real time, avoid drive shaft misalignment and breakage, and prevent bearing jamming, thereby ensuring the performance of the chain drive system.

[0004] To achieve this objective, the present invention adopts the following technical solution:

[0005] Chain drive system, the chain drive system comprising:

[0006] Support frame;

[0007] A plurality of bearing housings are mounted on the support frame, and at least some of the bearing housings are provided with vibration sensors and at least some of the bearing housings are provided with temperature sensors;

[0008] A drive shaft, wherein a plurality of first bearings are spaced apart along the axial direction on the drive shaft, and the plurality of first bearings are arranged in a one-to-one correspondence with a plurality of bearing seats;

[0009] The transmission assembly includes several transmission shafts that are rotatably arranged in parallel and spaced intervals on the support frame. Each transmission shaft is connected to the drive shaft, and the drive shaft can simultaneously drive all the transmission shafts to rotate in the same direction. Each transmission shaft is provided with several transmission wheels that are spaced apart along the axial direction of the transmission shaft.

[0010] As an optional technical solution, the bearing housing includes a fixed seat and a limiting member. The fixed seat is disposed on the support frame and has a receiving groove. The first bearing is disposed in the receiving groove. The limiting member is detachably connected to the fixed seat and can abut against the outer ring of the first bearing. A temperature measuring hole is provided on the fixed seat, and the temperature sensor is installed in the temperature measuring hole.

[0011] As an optional technical solution, the extension direction of the temperature measuring hole is parallel to the extension direction of the transmission shaft.

[0012] As an optional technical solution, the temperature measuring part of the temperature sensor is located directly below the receiving tank.

[0013] As an optional technical solution, the temperature measuring hole is a threaded hole.

[0014] As an optional technical solution, the outer surface of the temperature sensor and / or the outer surface of the vibration sensor is coated with an anti-corrosion coating.

[0015] As an optional technical solution, the vibration sensor is internally potted with adhesive.

[0016] As an optional technical solution, the chain drive system further includes a plurality of first adjustment components, and the plurality of first adjustment components and the plurality of bearing seats are respectively arranged one-to-one; the first adjustment component includes a first adjustment element and a second adjustment element, and the first adjustment element and the second adjustment element are both arranged between the bearing seat and the support frame. The first adjustment element and the second adjustment element are used in cooperation to adjust the setting position of the first end of the bearing seat relative to the support frame.

[0017] And / or, the chain drive system further includes a plurality of second adjustment components, with a plurality of first adjustment components and a plurality of bearing seats corresponding to each other; the second adjustment component includes an adjustment groove and a third adjustment member, one of the bearing seats and the support frame is provided with an adjustment groove, and the other of the bearing seats and the support frame is provided with a third adjustment member, the third adjustment member is slidably disposed in the adjustment groove, and the third adjustment member can lock the second end of the bearing seat relative to the support frame in the setting position.

[0018] As an optional technical solution, the bearing housing is provided with a first through hole and a first threaded hole, the support frame is provided with a second threaded hole, the first through hole and the second threaded hole are connected, the first adjusting member is a first bolt, the second adjusting member is a second bolt, the first bolt passes through the first through hole and is threadedly connected to the second threaded hole, the second bolt is threadedly connected to the second threaded hole, and the second bolt extends out of the second threaded hole and abuts against the support frame;

[0019] And / or, the support frame is provided with the adjustment groove, the third adjustment element is a third bolt, the bearing seat is provided with a third threaded hole, and the third bolt passes through the adjustment groove and is threadedly connected to the third threaded hole.

[0020] The present invention also adopts the following technical solutions:

[0021] A fault detection method, used in the aforementioned chain drive system, comprising:

[0022] The vibration value A of the vibration sensor is collected and compared with the preset upper vibration limit A1 and the preset lower vibration limit A2. At the same time, the temperature value B of the temperature sensor is collected and compared with the preset temperature value B1. If A≤A2 or A≥A1 and B≥B1, the chain drive system is determined to be faulty.

[0023] The beneficial effects of this invention are:

[0024] This invention discloses a chain drive system, which includes a support frame, several bearing seats, a drive shaft, and a transmission assembly. The bearing seats are mounted on the support frame, and at least some of the bearing seats are equipped with vibration sensors and temperature sensors. Several first bearings are spaced apart along the axial direction on the drive shaft, with each first bearing corresponding to one of the bearing seats. The transmission assembly includes several transmission shafts rotatably mounted on the support frame in parallel and at intervals. Each transmission shaft is drively connected to the drive shaft, and the drive shaft can simultaneously drive all the transmission shafts to rotate in the same direction. Each transmission shaft is equipped with several transmission wheels spaced apart along the axial direction of the transmission shaft. This chain drive system, by installing a vibration actuator and a temperature sensor on the bearing housing, can obtain the vibration and temperature values ​​of the bearing housing. Since the bearing housing is connected to the drive shaft through the first bearing, the working state of the drive shaft can affect the vibration or temperature of the first bearing. Therefore, by monitoring the vibration and temperature values ​​of the bearing housing, the working state of the first bearing and the drive shaft can be indirectly obtained. This allows for real-time monitoring of whether the chain drive system is operating normally or has malfunctioned, thereby reducing the difficulty of monitoring the working state of the chain drive system, preventing chain drive system failures, and ensuring production efficiency.

[0025] This embodiment also discloses a fault detection method for the aforementioned chain drive system. The method includes: acquiring a vibration value A from a vibration sensor and comparing it with a preset upper vibration limit A1 and a preset lower vibration limit A2; simultaneously, acquiring a temperature value B from a temperature sensor and comparing it with a preset temperature value B1; if A ≤ A2 or A ≥ A1, and B ≥ B1, then a fault is determined in the chain drive system. This fault detection method can monitor the working status of the chain drive system in real time, enabling early warning and fault prevention, reducing the risk of shaft breakage, monitoring transmission accuracy, and detecting the horizontal installation status of the drive shaft, thereby ensuring the normal operation of the drive shaft. Attached Figure Description

[0026] Figure 1 This is a schematic diagram of the chain drive system according to an embodiment of the present invention;

[0027] Figure 2 yes Figure 1 A magnified view of a section at point A in the middle;

[0028] Figure 3 yes Figure 1 A magnified view of a section at point B in the middle;

[0029] Figure 4 yes Figure 1 A magnified view of a section at point C.

[0030] In the picture:

[0031] 10. Support frame; 11. Support plate; 12. Vertical plate;

[0032] 20. Bearing housing; 21. Vibration sensor; 22. Temperature sensor; 23. Mounting base; 24. Limiting component;

[0033] 30. Drive shaft; 31. First bearing;

[0034] 40. Transmission assembly; 41. Transmission shaft; 42. Transmission wheel; 43. Second bearing;

[0035] 51. First bolt; 52. Second bolt;

[0036] 60. Drive assembly; 61. Drive motor; 621. Belt; 622. Pulley;

[0037] 70. Second transmission component; 71. First bevel gear; 72. Second bevel gear; 73. First gear; 74. Second gear. Detailed Implementation

[0038] The present invention will now be described in further detail with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and not intended to limit it. Furthermore, it should be noted that, for ease of description, the accompanying drawings show only the parts relevant to the present invention, and not all of the structures.

[0039] In the description of this invention, unless otherwise explicitly specified and limited, the terms "connected," "linked," and "fixed" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this invention based on the specific circumstances.

[0040] In this invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0041] In the description of this embodiment, the terms "upper," "lower," "right," etc., refer to the orientation or positional relationship shown in the accompanying drawings. They are used only for ease of description and simplification of operation, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the present invention. In addition, the terms "first" and "second" are used only for distinction in description and have no special meaning.

[0042] like Figures 1 to 4As shown, this embodiment provides a chain drive system, which includes a support frame 10, a plurality of bearing seats 20, a drive shaft 30, and a plurality of transmission components 40. The plurality of bearing seats 20 are all mounted on the support frame 10, and at least some of the bearing seats 20 are provided with vibration sensors 21 and temperature sensors 22. The drive shaft 30 is provided with a plurality of first bearings 31 spaced apart along the axial direction, and the plurality of first bearings 31 are provided in a one-to-one correspondence with the plurality of bearing seats 20. The transmission components 40 include a plurality of transmission shafts 41 that are rotatably mounted on the support frame 10 in parallel and spaced apart. Each transmission shaft 41 is connected to the drive shaft 30 in a transmission manner, and the drive shaft 30 can simultaneously drive all the transmission shafts 41 to rotate in the same direction. Each transmission shaft 41 is provided with a plurality of transmission wheels 42 that are spaced apart along the axial direction of the transmission shaft 41.

[0043] Specifically, in this embodiment, the support frame 10 can support a plurality of bearing seats 20, and at the same time, the support frame 10 can support the transmission component 40, thereby ensuring the stability of the transmission shaft 30 and the transmission component 40 in use; a plurality of transmission shafts 41 are all connected to the transmission shaft 30 in a transmission connection, and the transmission shaft 30 can simultaneously drive a plurality of transmission shafts 41 to rotate in the same direction, thereby ensuring the transmission effect of the transmission component 40.

[0044] Optionally, in this embodiment, as Figure 3 As shown, the support frame 10 includes a support plate 11, an upright plate 12, and a support block. The support plate 11 is fixedly mounted on an external support member. The upright plate 12 is perpendicular to the support plate 11 and fixedly connected to the support plate 11. The support block is mounted on the support plate 11, and the first end of the bearing seat 20 is connected to the support block, while the second end of the bearing seat 20 is connected to the upright plate 12.

[0045] It is understandable that, such as Figure 1 As shown, the transmission shafts 41 of the transmission component 40 are at the same height, which can ensure the transmission effect. The number and position of the transmission wheels 42 on each transmission shaft 41 can be set according to actual use, and there is no limitation here. The specific structure of the transmission component 40 is all in the prior art.

[0046] Optionally, in this embodiment, as Figure 4 As shown, both ends of the transmission shaft 41 are rotatably mounted on the support frame 10 via the second bearing 43.

[0047] It is understood that the drive shaft 30 can be a single shaft or several coaxial shafts connected by a coupling; no specific restrictions are imposed here.

[0048] Preferably, each bearing housing 20 is equipped with both a vibration sensor 21 and a temperature sensor 22, thereby ensuring the accuracy of monitoring the chain drive system.

[0049] Alternatively, in another embodiment, a vibration sensor 21 may be provided on a portion of the bearing housing 20, and a temperature sensor 22 may be provided on a portion of the bearing housing 20. The vibration sensor 21 and the temperature sensor 22 may be provided on the same bearing housing 20. No specific limitation is made here, and the configuration can be made according to the actual situation.

[0050] This chain drive system, by installing a vibration actuator and a temperature sensor 22 on the bearing housing 20, can obtain the vibration and temperature values ​​of the bearing housing 20. Since the bearing housing 20 is connected to the drive shaft 30 through the first bearing 31, the working state of the drive shaft 30 can affect the vibration or temperature of the first bearing 31. Therefore, by monitoring the vibration and temperature values ​​of the bearing housing 20, the working state of the first bearing 31 and the drive shaft 30 can be indirectly obtained. This allows for real-time monitoring of whether the chain drive system is operating normally or has malfunctioned, thereby reducing the difficulty of monitoring the working state of the chain drive system, preventing malfunctions, and ensuring production efficiency.

[0051] Specifically, in this embodiment, the chain drive system also includes a control unit. The temperature sensor 22 and the vibration sensor 21 are both electrically connected to the control unit. The control unit can obtain the temperature value of the temperature sensor 22 and the vibration value of the vibration sensor 21, and determine the working state of the drive shaft 30 based on the temperature value and the vibration value. The control unit is a PLC or similar technology in the prior art, and no specific limitation is made here.

[0052] Optionally, in this embodiment, both the temperature sensor 22 and the vibration sensor 21 are electrically connected to the control unit via shielded twisted-pair cables to improve signal transmission.

[0053] Specifically, in this embodiment, as Figure 1 and Figure 2 As shown, the chain drive system also includes a drive assembly 60, which is connected to the drive shaft 30 and is used to drive the drive shaft 30 to rotate.

[0054] Optionally, in this embodiment, as Figure 1 and Figure 2As shown, the drive assembly 60 includes a drive motor 61 and a first transmission assembly. The output end of the drive motor 61 is connected to the input end of the first transmission assembly, and the output end of the first transmission assembly is connected to the transmission shaft 30. Optionally, the first transmission assembly includes a belt 621 and two pulleys 622. One pulley 622 is fixedly mounted on the transmission shaft 30, and the other pulley 622 is mounted on the output end of the drive motor 61. The drive motor 61 drives the pulley 622 fixedly connected to its output end to rotate, thereby causing the belt 621 to move. The movement of the belt 621 drives the pulley 622 fixedly connected to the transmission shaft 30 to rotate, thereby causing the transmission shaft 30 to move. The specific principle of the belt drive structure is prior art and will not be elaborated here.

[0055] Alternatively, in another embodiment, the first transmission component may also be a transmission structure commonly found in the prior art, such as a gear transmission component, and no specific limitation is made here.

[0056] Preferably, in this embodiment, as Figure 1 and Figure 4 As shown, the chain drive system also includes a second transmission component 70, which is disposed between the drive shaft 30 and the transmission component 40, and is used to synchronously drive the transmission shaft 41 to rotate in the same direction.

[0057] Optionally, in this embodiment, as Figure 4 As shown, the second transmission assembly 70 includes a first bevel gear 71, a second bevel gear 72, a first gear 73, a second gear 74, and transition shafts. A plurality of first bevel gears 71 are spaced apart along the axial direction of the transmission shaft 30. A plurality of transition shafts are rotatably mounted on the support frame 10, and the axial direction of each transition shaft is perpendicular to the axial direction of the transmission shaft 30. A plurality of second bevel gears 72 and a plurality of first gears 73 are correspondingly arranged on the plurality of transition shafts, and a plurality of second gears 74 are correspondingly arranged on the plurality of transmission shafts 41. A plurality of first bevel gears 71 mesh with a plurality of second bevel gears 72, and a plurality of first gears 73 mesh with a plurality of second gears 74. This arrangement allows the transmission shafts 41 to be perpendicular to the transmission shaft 30, thereby reducing the space occupied by the chain drive system and improving space utilization.

[0058] Furthermore, such as Figure 3As shown, the bearing housing 20 includes a fixed base 23 and a limiting member 24. The fixed base 23 is provided with a receiving groove, in which the first bearing 31 is disposed. The limiting member 24 is detachably connected to the fixed base 23 and can abut against the outer ring of the first bearing 31. A temperature measuring hole is provided on the fixed base 23, and a temperature sensor 22 is installed in the temperature measuring hole. Specifically, in this embodiment, the fixed base 23 is disposed on the support frame 10, which can ensure its own installation stability. After the first bearing 31 is installed into the receiving groove, the limiting member 24 is connected to the fixed base 23 and abuts against the outer ring of the first bearing 31, thereby ensuring that the outer ring of the first bearing 31 is fixed and ensuring the function of the first bearing 31. The temperature measuring hole is provided on the fixed base 23, in which the temperature sensor 22 is installed. The heat dissipation rate in the temperature measuring hole is slow, thereby improving the accuracy of temperature detection.

[0059] Specifically, in this embodiment, the first end of the fixing seat 23 is disposed on the support block, and the second end of the fixing seat 23 is disposed on the upright plate 12.

[0060] Optionally, in another embodiment, the limiting member 24 is provided with a limiting groove, which is configured to cooperate with the outer ring of the first bearing 31, thereby enhancing the limiting effect on the outer ring of the first bearing 31 and further ensuring the performance of the first bearing 31.

[0061] Furthermore, the extension direction of the temperature sensing hole is parallel to the extension direction of the transmission shaft 41. Specifically, in this embodiment, this arrangement makes the temperature sensor 22 easier to install, improving installation convenience and reducing operational difficulty.

[0062] Furthermore, the temperature measuring part of the temperature sensor 22 is located directly below the receiving groove. Specifically, in this embodiment, since the temperature measuring hole is a straight hole, the distance from the bottom of the receiving hole to the side wall of the temperature measuring hole is minimized. Therefore, placing the temperature measuring part of the temperature sensor 22 directly below the receiving groove can improve the accuracy and effectiveness of temperature detection, thereby enhancing the detection effect.

[0063] Furthermore, the temperature measuring hole is a threaded hole. Specifically, in this embodiment, the temperature sensor 22 is provided with an external thread, which can be threadedly connected to the temperature measuring hole. This not only improves the installation stability of the temperature sensor 22, but also reduces the need for additional fasteners, thus helping to reduce costs.

[0064] Furthermore, an anti-corrosion coating is sprayed onto the outer surface of the temperature sensor 22 and / or the outer surface of the vibration sensor 21. Specifically, in this embodiment, an anti-corrosion coating is sprayed onto the outer surface of both the temperature sensor 22 and the vibration sensor 21. This reduces the impact of highly acidic and humidified vapors on the temperature sensor 22 and the vibration sensor 21, extends their service life, and ensures their detection accuracy.

[0065] Preferably, the temperature sensor 22 is a platinum resistance thermometer from the PT100 and PT1000 series, and the surface of the temperature sensor 22 is coated with a PTFE coating. The temperature sensor 22 is prior art and will not be described in detail here.

[0066] Preferably, the vibration sensor 21 is made of 316 stainless steel, which is effective in preventing corrosion, and the outer surface of the temperature sensor 22 is coated with a PTFE coating to enhance its corrosion resistance. The vibration sensor 21 is prior art and will not be described in detail here.

[0067] Alternatively, in another embodiment, an anti-corrosion coating may be applied only to the outer surface of the temperature sensor or the outer surface of the vibration sensor 21, depending on the specific application.

[0068] Furthermore, the vibration sensor 21 is internally potted with adhesive. Specifically, the internal potting treatment of the vibration sensor 21 in this embodiment can isolate the sensor from interference from the external environment, fix the internal components and circuits of the vibration sensor 21, prevent movement or loosening, improve the vibration resistance of the vibration sensor 21, and enhance its overall stability and reliability; it can also effectively isolate moisture, prevent moisture from seeping into the sensor, and enhance its waterproof capability; and it can also conduct internal heat to the outside, extending the service life of the sensor.

[0069] Furthermore, such as Figures 1 to 3 As shown, the chain drive system also includes several first adjustment components, which are correspondingly arranged with several bearing seats 20. Each first adjustment component includes a first adjusting member and a second adjusting member, both disposed between the bearing seat 20 and the support frame 10. The first and second adjusting members work together to adjust the position of the first end of the bearing seat 20 relative to the support frame 10. Specifically, in this embodiment, several first adjustment components and several bearing seats 20 are correspondingly arranged. The first adjustment components are used to adjust the position of the first end of the bearing seat 20 relative to the support block, thereby correspondingly adjusting the position of the first bearing 31, ensuring that the several first bearings 31 are coaxially arranged, and thus adjusting the position of the drive shaft 30, ensuring the smooth rotation of the drive shaft 30.

[0070] Furthermore, such as Figure 3As shown, the bearing housing 20 is provided with a first through hole and a first threaded hole, and the support frame 10 is provided with a second threaded hole. The first through hole and the second threaded hole are connected. The first adjusting component is a first bolt 51, and the second adjusting component is a second bolt 52. The first bolt 51 passes through the first through hole and is threadedly connected to the second threaded hole. The second bolt 52 is threadedly connected to the second threaded hole, and after extending out of the second threaded hole, it abuts against the support frame 10. Specifically, in this embodiment, the first end of the bearing housing 20 is provided with a first through hole and a first threaded hole, and the support block is provided with a second threaded hole. The first bolt 51 passes through the first through hole and is threadedly connected to the second threaded hole, which can connect the bearing housing 20 to the support block. The second bolt 52 is threadedly connected to the first threaded hole, and the second bolt 52 abuts against the support block. Tightening the first bolt 51 can ensure the connection stability between the bearing housing 20 and the support block. When it is necessary to adjust the position of the first end of the bearing housing 20 relative to the support block, first loosen the first bolt 51, then adjust the length of the second bolt 52 extending out of the first threaded hole, thereby adjusting the gap between the first end of the bearing housing 20 and the support block, and then tighten the first bolt 51 to complete the adjustment. This connection method is not only convenient to adjust, but also has good connection stability.

[0071] Furthermore, the chain drive system also includes several second adjustment components, each corresponding to a number of bearing seats 20. Each second adjustment component includes an adjustment groove and a third adjustment member. One of the bearing seats 20 and the support frame 10 is provided with an adjustment groove, and the other is provided with a third adjustment member. The third adjustment member is slidably disposed in the adjustment groove and can lock the position of the second end of the bearing seat 20 relative to the support frame 10. Specifically, in this embodiment, several second adjustment components and several bearing seats 20 are correspondingly arranged. The second adjustment components are used to adjust the position of the second end of the bearing seat 20 relative to the vertical plate 12, thereby cooperating with the first adjustment components to adjust the position of the first bearings 31 accordingly, ensuring that the several first bearings 31 can be coaxially arranged, and thus adjusting the position of the drive shaft 30 to ensure the smooth rotation of the drive shaft 30.

[0072] It is understandable that when adjusting the position of the bearing housing 20, if the adjustment amount of the bearing housing 20 is small, the setting position of the bearing housing 20 can be finely adjusted by adjusting only the first adjustment component. This is because the material of the bearing housing 20 has a certain amount of deformation when the extension amount of the second bolt 52 is different, which can meet the needs of the small adjustment amount of the bearing housing 20. When the adjustment amount of the bearing housing 20 is large, the first adjustment component and the second adjustment component are used to ensure the accuracy of the setting position of the bearing housing 20, which will not be elaborated here.

[0073] Furthermore, the support frame 10 is provided with an adjustment groove, the third adjustment component is a third bolt, and the bearing seat 20 is provided with a third threaded hole. The third bolt passes through the adjustment groove and is threadedly connected to the third threaded hole. Specifically, in this embodiment, the upright plate 12 is provided with an adjustment groove, the second end of the bearing seat 20 is provided with a third threaded hole, and the third bolt passes through the adjustment hole and is threadedly connected to the third threaded hole, thereby connecting the second end of the bearing seat 20 to the upright plate 12. When the position of the second end of the bearing seat 20 needs to be adjusted, the third bolt is first loosened, and then the third bolt drives the second end of the bearing seat 20 to slide along the adjustment groove to a suitable position. Then the third bolt is tightened to complete the adjustment.

[0074] Optionally, the chain drive system also includes an alarm to alert the system in the event of a chain drive system failure.

[0075] This embodiment also provides a fault detection method for the chain drive system described above. The fault detection method includes: acquiring the vibration value A of the vibration sensor 21 and comparing the vibration value A with a preset upper vibration limit value A1 and a preset lower vibration limit value A2; simultaneously, acquiring the temperature value B of the temperature sensor 22 and comparing the temperature value B with a preset temperature value B1; if A≤A2 or A≥A1 and B≥B1, then the chain drive system is determined to be faulty.

[0076] Specifically, in this embodiment, both the vibration sensor 21 and the temperature sensor 22 are connected to the control unit. The vibration sensor 21 can monitor the vibration value A of the bearing housing 20 in real time and transmit the vibration value A to the control unit in real time. The temperature sensor 22 can monitor the temperature B of the bearing housing 20 in real time and transmit the temperature value B to the control unit in real time. The control unit can obtain the vibration value A and the temperature value B, and can compare the vibration value A with the upper vibration limit A1 and the lower vibration limit A2 stored in the memory of the control unit in advance, and compare the temperature value B with the lower temperature limit B1 stored in the memory of the control unit in advance. If A≤A2, the vibration of the bearing housing 20 is lower than the lower vibration limit A2, which may lead to abnormal conditions such as jamming of the first bearing 31. If A≥A1, the vibration of the bearing housing 20 is higher than the upper vibration limit A1, and abnormal vibration of the first bearing 31 occurs, indicating that the working state of the drive shaft 30 is abnormal. At the same time, if B≥B1, the temperature of the bearing housing 20 is higher than the preset temperature, which indicates that the first bearing 31 is generating abnormal heat, and the chain drive system can be determined to be faulty. This fault detection method uses the vibration and temperature of the bearing housing 20 as the criteria for determining whether the first bearing 31 is working properly. It can filter out environmental interference and has higher accuracy. For example, when the temperature rises suddenly, but the vibration kurtosis detection is normal, it can be determined that the abnormal temperature of the bearing housing 20 is caused by the ambient temperature.

[0077] Optionally, after a fault is determined in the chain drive system, the alarm of the chain drive system will sound.

[0078] Optionally, taking the application of this chain drive system in photovoltaic wet etching as an example, when transporting silicon wafers, the chain drive system needs to pass through different working areas, including the loading section, acid tank section, water tank section, drying tank section, and unloading section. Since the working temperatures of the loading section, acid tank section, water tank section, drying tank section, and unloading section may be different, the preset temperature value B1 corresponding to the loading section, acid tank section, water tank section, drying tank section, and unloading section is different.

[0079] Specifically, in the feeding section and the acid tank section, the operating temperature is between 24.6℃ and 28.1℃, which is close to the ambient temperature of the workshop. For example, the preset temperature value for these two locations is set to 35℃. 35℃ is an empirical value set according to actual conditions. In another embodiment, the preset temperature value for these two locations can also be specifically set according to actual use, such as 34℃, 34.5℃, etc., without limitation.

[0080] Specifically, the operating temperature in the water tank section and the feeding section is between 39.8℃ and 44.1℃. This is mainly because the water tank is close to the drying tank, and the temperature is higher due to the heat diffusion effect from the drying tank. When the drying tank is in use, the preset temperature value of the water tank section can be set to 50℃, for example. When the drying tank is not in use, the preset temperature value of the water tank section needs to be adjusted appropriately; no specific restrictions are made here. Furthermore, the preset temperature value of the water tank section can also be set according to actual use, such as 52℃, 48℃, etc., without limitation.

[0081] Specifically, in the drying tank section, the operating temperature is 73.6℃ to 88.2℃. During operation, a large amount of hot air is blown out by the high-pressure fan, causing the drive shaft 30 to heat up. Therefore, the preset temperature value here can be set to 90℃ as an example. Furthermore, the preset temperature value of the drying tank section can also be set according to actual use, such as 92℃, 88℃, etc., without limitation.

[0082] For example, taking an example where temperature sensors 22 are provided with 8 sensors, namely a first temperature sensor, a second temperature sensor, a third temperature sensor, a fourth temperature sensor, a fifth temperature sensor, a sixth temperature sensor, a seventh temperature sensor, and an eighth temperature sensor. The first temperature sensor is correspondingly set in the feeding section, the second, third, and fourth temperature sensors are all set in the acid tank section, and are arranged sequentially along the silicon wafer conveying direction; the fifth temperature sensor is set in the water tank section, the sixth and seventh temperature sensors are both set in the drying tank section, and are arranged sequentially along the silicon wafer conveying direction; the eighth sensor is set in the unloading section.

[0083] For example, in this embodiment, in order to save costs, only the first vibration sensor and the second vibration sensor are set at the feeding section and the unloading section, respectively. Since the vibration values ​​of the chain drive system are basically the same when it is working normally, the preset upper limit value A1 and the preset lower limit value A2 of the feeding section and the unloading section are set to be the same. The specific values ​​of the preset upper limit value A1 and the preset lower limit value A2 can be obtained from actual experiments or experience, and will not be elaborated here.

[0084] Alternatively, in another embodiment, if the horizontal performance of the drive shaft 30 is poor, the first bearing 31 will also rotate abnormally, which will also cause A≤A2 or A≥A1 and B≥B1. This allows the chain drive system and its fault detection method to also be used to detect the horizontal state of the drive shaft 30, thereby ensuring the normal operation of the chain drive system.

[0085] For example, by adjusting the first adjustment component of multiple bearing seats 20, the bearing seats 20 are raised by 15mm, creating an abnormal horizontal condition of the drive shaft 30. At this time, the chain drive system is switched to automatic operation. After running for 10 minutes, the temperature value of the first temperature sensor rises from 27.7℃ to 35.6℃, and the temperature value of the second temperature sensor rises from 25.2℃ to 28.5℃. The subsequent temperature sensor 22 does not change much. The vibration sensor 21 of the feeding section triggers an alarm. Therefore, this chain drive system and its fault detection method are also applicable to the detection of the horizontal state of the drive shaft 30.

[0086] Obviously, the above embodiments of the present invention are merely examples for clearly illustrating the present invention, and are not intended to limit the implementation of the present invention. Those skilled in the art will be able to make various obvious changes, readjustments, and substitutions without departing from the scope of protection of the present invention. It is neither necessary nor possible to exhaustively describe all embodiments here. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present invention should be included within the scope of protection of the claims of the present invention.

Claims

1. A chain drive system, characterized in that, The chain drive system includes: Support frame (10); A plurality of bearing housings (20) are mounted on the support frame (10), at least some of the bearing housings (20) are provided with vibration sensors (21), and at least some of the bearing housings (20) are provided with temperature sensors (22); A drive shaft (30) is provided with a plurality of first bearings (31) spaced apart along the axial direction, and the plurality of first bearings (31) are provided in a one-to-one correspondence with the plurality of bearing seats (20); The transmission assembly (40) includes a plurality of transmission shafts (41) that are rotatably arranged in parallel and spaced intervals on the support frame (10). Each transmission shaft (41) is connected to the drive shaft (30) for transmission. The drive shaft (30) can simultaneously drive all the transmission shafts (41) to rotate in the same direction. Each transmission shaft (41) is provided with a plurality of transmission wheels (42) that are spaced apart along the axial direction of the transmission shaft (41).

2. The chain drive system according to claim 1, characterized in that, The bearing housing (20) includes a fixed seat (23) and a limiting member (24). The fixed seat (23) is disposed on the support frame (10) and has a receiving groove. The first bearing (31) is disposed in the receiving groove. The limiting member (24) is detachably connected to the fixed seat (23) and can abut against the outer ring of the first bearing (31). A temperature measuring hole is provided on the fixed seat (23) and the temperature sensor (22) is installed in the temperature measuring hole.

3. The chain drive system according to claim 2, characterized in that, The extension direction of the temperature measuring hole is parallel to the extension direction of the transmission shaft (41).

4. The chain drive system according to claim 2, characterized in that, The temperature measuring part of the temperature sensor (22) is located directly below the receiving tank.

5. The chain drive system according to claim 2, characterized in that, The temperature measuring hole is a threaded hole.

6. The chain drive system according to claim 1, characterized in that, The outer surface of the temperature sensor (22) and / or the outer surface of the vibration sensor (21) are coated with an anti-corrosion coating.

7. The chain drive system according to claim 1, characterized in that, The vibration sensor (21) is internally potted with glue.

8. The chain drive system according to any one of claims 1-7, characterized in that, The chain drive system further includes several first adjustment components, and several first adjustment components and several bearing seats (20) are arranged in a one-to-one correspondence; the first adjustment component includes a first adjustment member and a second adjustment member, and the first adjustment member and the second adjustment member are both arranged between the bearing seat (20) and the support frame (10). The first adjustment member and the second adjustment member are used in cooperation to adjust the setting position of the first end of the bearing seat (20) relative to the support frame (10); And / or, the chain drive system further includes a plurality of second adjustment components, and the plurality of second adjustment components and the plurality of bearing seats (20) are respectively arranged in a corresponding manner; the second adjustment component includes an adjustment groove and a third adjustment member, one of the bearing seats (20) and the support frame (10) is provided with an adjustment groove, and the other of the bearing seats (20) and the support frame (10) is provided with a third adjustment member, the third adjustment member is slidably disposed in the adjustment groove, and the third adjustment member can lock the setting position of the second end of the bearing seat (20) relative to the support frame (10).

9. The chain drive system according to claim 8, characterized in that, The bearing housing (20) is provided with a first through hole and a first threaded hole, and the support frame (10) is provided with a second threaded hole. The first through hole and the second threaded hole are connected. The first adjusting member is a first bolt (51), and the second adjusting member is a second bolt (52). The first bolt (51) passes through the first through hole and is threadedly connected to the second threaded hole. The second bolt (52) is threadedly connected to the second threaded hole, and the second bolt (52) extends out of the second threaded hole and abuts against the support frame (10). And / or, the support frame (10) is provided with the adjustment groove, the third adjustment element is the third bolt, the bearing seat (20) is provided with the third threaded hole, and the third bolt passes through the adjustment groove and is threadedly connected to the third threaded hole.

10. A fault detection method, characterized in that, The fault detection method is used in the chain drive system according to any one of claims 1-9, and the fault detection method includes: The vibration value A of the vibration sensor (21) is collected and compared with the preset upper vibration value A1 and the preset lower vibration value A2. At the same time, the temperature value B of the temperature sensor (22) is collected and compared with the preset temperature value B1. If A≤A2 or A≥A1 and B≥B1, the chain drive system is determined to be faulty.

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