A nitrogen-protected tunnel furnace for baking chips and a baking method

Abstract

The application discloses a kind of nitrogen protection tunnel furnace for chip baking and baking method, belong to baking furnace kiln technical field.The tunnel furnace includes upper and lower material module, atmosphere conversion module, several furnace body module, atmosphere conversion module and upper and lower material module connected in sequence.The upper and lower material module realizes the automatic loading and unloading of carrier;Atmosphere conversion module carries out atmosphere replacement and isolation through its sealing assembly, inflation assembly and monitoring assembly before carrier enters and exits furnace body, to ensure the purity of core section atmosphere;Furnace body module is under the protection of nitrogen, and uniform baking of chip is carried out by using circulating hot air assembly.The precise, smooth and pollution-free transmission of carrier is realized by transfer module and step lifting and step transport module in the furnace.The application effectively solves the problems of unstable atmosphere control, easy pollution during transmission, poor baking uniformity and low automation degree of existing equipment, and is especially suitable for chip manufacturing baking process with strict cleanliness and atmosphere requirements.

Description

Technical Field

[0001] This invention relates to the field of baking ovens and kilns, specifically to a nitrogen-protected tunnel oven for chip baking and a baking method. Background Technology

[0002] In semiconductor chip manufacturing, baking is one of the key processes in chip production, used to remove moisture and organic residues from the chip surface or to complete specific heat treatment processes. Traditional baking equipment often uses ordinary tunnel ovens, which have difficulty effectively controlling the atmosphere inside the oven during the baking process. Especially in high-temperature environments, the presence of oxygen and moisture can easily lead to chip oxidation, surface contamination, or a decline in electrical performance, seriously affecting the reliability and yield of the chips.

[0003] With the miniaturization and increasing integration of chips, the environmental requirements for baking processes are becoming increasingly stringent. Baking in a low-oxygen environment under nitrogen protection has become an essential condition for high-precision chip manufacturing. While some existing nitrogen-protected baking equipment can achieve atmosphere control, the following problems remain: In existing tunnel ovens, outside air easily enters the oven during loading and unloading, disrupting the purity of the atmosphere and resulting in high nitrogen consumption and long recovery times; vibrations or positional deviations can easily occur during carrier transport within the oven, affecting baking uniformity and product consistency; and gear and rack drives generate metal debris, impacting product quality. Furthermore, multi-layer ovens require a relatively long period of resting time within the oven to complete the baking process, leading to discontinuities in the production line.

[0004] Therefore, there is an urgent need to develop a nitrogen-protected tunnel oven for chip baking that is structurally sound, reliably sealed, has precise atmosphere control, and is highly automated, in order to meet the stringent requirements of high-end chip manufacturing for baking processes. Summary of the Invention

[0005] To address the shortcomings of existing technologies, the present invention aims to provide a nitrogen-protected tunnel oven and baking method for chip baking, which, through modular design and collaborative control, aims to achieve an efficient, stable and clean chip baking process.

[0006] To address the aforementioned technical problems, this invention first provides a nitrogen-protected tunnel oven for chip baking. With the material flow direction as the front-to-back direction, it sequentially includes a sealed loading / unloading module, an atmosphere conversion module, several furnace body modules, and a loading / unloading module. Each of the loading / unloading module, atmosphere conversion module, and furnace body module has a chamber for a carrier to pass through. The loading / unloading module and atmosphere conversion module are connected via a transfer module, while the furnace body module uses a stepping lifting module and a stepping transport module to achieve stepping movement of the carrier. Wherein:

[0007] The loading and unloading module is used to load or unload products onto containers.

[0008] An atmosphere conversion module is used to allow a carrier inside its chamber to enter a set atmosphere environment after being isolated from the outside world, or to connect with the outside world after being isolated from the furnace module chamber. The atmosphere conversion module includes an atmosphere conversion frame, a sealing component, a sealing transmission frame, a gas filling component, and a monitoring component. A sealing component is provided on each of the front and rear sides of the atmosphere conversion frame. Each sealing component is connected to a sealing transmission frame. The sealing transmission frame can drive the sealing component to move to open or isolate the chamber between the atmosphere conversion module and the loading / unloading module or the furnace module. The gas filling component is located on the outside of the atmosphere conversion frame and extends through and connects to the chamber of the atmosphere conversion module. It is used to fill the chamber of the atmosphere conversion module with a set gas so that the chamber of the atmosphere conversion module enters the set atmosphere environment. The monitoring component is located on the atmosphere conversion frame and is used to monitor whether the atmosphere environment inside the chamber of the atmosphere conversion module has reached the set atmosphere environment.

[0009] The oven module is used to bake products placed in a carrier under a set atmosphere.

[0010] As a preferred embodiment of some embodiments of this application, the inflation assembly is used to fill nitrogen gas, so that the oxygen content in the chamber of the atmosphere conversion module is less than 100 ppm.

[0011] As some embodiments of this application, the atmosphere conversion module further includes a preheating component and a heat preservation component. The preheating component is disposed on the atmosphere conversion frame and is used to heat the atmosphere inside the atmosphere conversion module chamber. The heat preservation component is disposed on the atmosphere conversion frame and located around the atmosphere conversion module chamber to reduce heat loss.

[0012] As some embodiments of this application, the front and rear sides of the atmosphere conversion module are also provided with module seals, and the module seals are provided with high-temperature resistant sealing rings.

[0013] As some embodiments of this application, the sealing assembly includes a sealing plate, a sealing strip, and a sealing slide rail. The sealing slide rails are symmetrically arranged in the left-right direction, and a sealing plate is slidably connected between the sealing slide rails on the left and right sides. A sealing strip is provided on the outer edge of the sealing plate on the side away from the atmosphere conversion module chamber.

[0014] As some embodiments of this application, the sealing transmission frame includes a sealing drive component, a connecting rod, and a push rod. The sealing drive components are symmetrically fixed on the atmosphere conversion frame. The upper ends of the top rods of the sealing drive components on both sides are connected to the two ends of the same connecting rod. Several push rods are provided below the connecting rod, and the lower ends of the push rods are connected to the upper ends of the sealing plate.

[0015] As a preferred embodiment of this application, two push rods are symmetrically arranged on the left and right sides, and a guiding linear bearing is provided on the atmosphere conversion frame so that the push rod can move smoothly up and down when it drives the sealing plate.

[0016] As some embodiments of this application, the lower section of the sealing slide rail protrudes slightly away from the atmosphere conversion module chamber, so that when the sealing plate moves to the lower section, it will achieve sealing by slightly moving the sealing slide rail. The connection between the push rod and the sealing plate has a structure that allows the sealing plate to move slightly back and forth.

[0017] As some embodiments of this application, the loading and unloading module includes a loading and unloading frame, a hoisting component, and a gripper component. The hoisting component is installed on the upper inner side of the loading and unloading frame and is used to hoist the carrier onto the transfer module or to hoist the carrier from the transfer module. The gripper component is located on the lower side of the hoisting component and is used to grip the carrier.

[0018] As some embodiments of this application, in order to facilitate the transportation of the vehicle, in actual production, a transport vehicle is used to transport the vehicle to or from the loading / unloading module. In production, the transport vehicle is generally a manually pushed trolley or an AGV trolley. In order to enable the vehicle to be accurately picked up from or placed on the transport vehicle, a guide component and a positioning component are also provided on one side of the loading / unloading module. The guide component guides the transport vehicle into the loading / unloading module, and the positioning component senses and positions the transport vehicle.

[0019] As some embodiments of this application, the hoisting assembly includes a hoisting rod, a vertical moving assembly, and a horizontal moving assembly. The horizontal moving assembly is fixedly installed above the loading and unloading frame. The horizontal moving assembly drives the vertical moving assembly installed thereon to move horizontally, and the vertical moving assembly drives the hoisting rod installed thereon to move vertically up and down.

[0020] As some embodiments of this application, the lateral movement assembly includes a lateral movement drive, a lateral movement transmission assembly, and a lateral movement sliding assembly. The lateral movement drive drives the lateral movement transmission assembly to cause the vertical movement assembly to move laterally left and right. The lateral movement sliding assembly is used for sliding guidance to ensure smooth movement.

[0021] As a preferred embodiment of this application, the lateral movement drive is a motor, the lateral movement transmission assembly is a gear and rack assembly, and the lateral movement sliding assembly is a slide rail and slider assembly.

[0022] As some embodiments of this application, the vertical movement assembly includes a vertical movement drive, a vertical movement transmission assembly, and a vertical movement sliding assembly. The vertical movement drive drives the vertical movement transmission assembly to move the hoisting rod vertically up and down, and the vertical movement sliding assembly is used for sliding guidance to ensure smooth operation.

[0023] As a preferred embodiment of this application, the vertical movement drive is a motor, the vertical movement transmission assembly is a gear and rack assembly, and the vertical movement sliding assembly is a slide rail and slider assembly.

[0024] As some embodiments of this application, the gripper assembly is fixedly installed at the lower end of the hoisting rod, including a gripper drive, a gripper slide, and hooks. Two hooks are symmetrically arranged front and back, and the two hooks are slidably mounted on the gripper slide. The gripper drive is fixed at the lower end of the hoisting rod, and its output end is connected to the hooks, which can drive the two hooks to move closer or further apart.

[0025] As some embodiments of this application, the carrier has an outer frame. When the carrier needs to be hoisted, the two hooks are first moved away from each other. The gripper assembly below the hoisting rod is moved to the top of the carrier by the horizontal and vertical moving components. Then, the two hooks are brought closer to each other, so that the hooks are assembled with the outer frame. Then, the horizontal and vertical moving components are controlled to move, and the carrier can be hoisted.

[0026] As some embodiments of this application, the transfer module includes a transfer trolley, a transfer track, a transfer drive component, a transfer transmission component, and a limiting component. The transfer track is fixedly installed at the bottom of the inner cavity of the loading / unloading module and the atmosphere conversion module. The transfer trolley is slidably connected on the transfer track. The transfer drive component and the transfer transmission component that drive the transfer trolley to move are provided under the transfer track. Limiting components are provided at the front and rear ends of the transfer track.

[0027] As some embodiments of this application, the transfer trolley includes a support plate, limit terminals, pulleys and positioning pins. Limit terminals corresponding to the positions of the limit components are provided on the front and rear sides of the support plate. Pulleys for auxiliary movement and guidance are provided on the left and right sides of the support plate. Positioning pins are provided on the support plate for positioning the carrier.

[0028] As some embodiments of this application, the transfer transmission assembly includes a first transmission shaft, a first conical gear set, a second transmission shaft, a second conical gear set, a third transmission shaft, a third conical gear set, a fourth transmission shaft, a fourth conical gear set, and rollers. The transfer drive unit drives the first transmission shaft to rotate in the forward / backward direction. The first transmission shaft drives one bevel gear in one of the several first conical gear sets located thereon to rotate. The meshing of the first conical gear sets further drives another bevel gear in the first conical gear set mounted on one end of the second transmission shaft to rotate, which in turn drives the second transmission shaft to rotate in the vertical direction. The second transmission shaft drives one bevel gear in the second conical gear set located at its other end to rotate. The meshing of the second conical gear set further drives... The rotation of another bevel gear in the second bevel gear set, mounted on the third drive shaft, causes the third drive shaft to rotate in the left-right direction. The rotation of the third drive shaft causes one of the bevel gears in the third bevel gear set located at both ends of it to rotate. The meshing of the third bevel gear set causes another bevel gear in the third bevel gear set, mounted on the fourth drive shaft, to rotate. This causes the fourth drive shaft to rotate in the front-back direction. The rotation of the fourth drive shaft causes one of the bevel gears in several fourth bevel gear sets to rotate. The meshing of the fourth bevel gear sets causes another bevel gear in the fourth bevel gear set connected to the roller to rotate. This causes the roller to rotate, and the rotation of the roller can drive the transfer trolley on it to move in the front-back direction.

[0029] As some embodiments of this application, the limiting component includes a limiting drive, a linear slide bar, and a detection limiting block. The limiting drive is fixedly installed below the transfer track. The output end of the limiting drive is connected to the linear slide bar and can drive the linear slide bar to slide up and down. The detection limiting block is installed on the upper end of the linear slide bar. After the limiting drive drives the linear slide bar to move upward, the detection limiting block corresponds to the limiting terminal of the transfer trolley, which can prevent the transfer trolley from moving forward or backward, thereby achieving positioning of the transfer trolley. After the limiting drive drives the linear slide bar to move downward, the detection limiting block retracts below the transfer track and no longer obstructs the movement of the transfer trolley.

[0030] As some embodiments of this application, the furnace module includes a furnace frame, a circulating hot air assembly, an air inlet assembly, an air guide plate, an insulation shell assembly, an air outlet assembly, a flow meter, and a detection head. The circulating hot air assembly is fixedly installed above the furnace frame to provide baking heat and circulate air within the furnace module cavity. The air inlet assembly is located outside the furnace frame and extends through and connects to the furnace module cavity to fill the cavity with a predetermined amount of gas, maintaining a set atmospheric environment within the furnace module cavity. The air guide plates are located on the left and right sides of the furnace module cavity. The circulating hot air assembly guides the circulating air supplied by the circulating hot air assembly from both sides of the chamber towards the center; the heat insulation shell assembly is set around the perimeter of the furnace module chamber; a space is left between the heat insulation shell assembly on the left and right sides and the corresponding air guide mesh plate to form a circulating air duct; the air outlet assembly is set below the furnace frame to exhaust the air in the furnace module chamber and maintain the pressure balance in the furnace module chamber; both the air inlet assembly and the air outlet assembly are connected to flow meters to control the air inlet or outlet volume; several detection heads are set in the furnace module chamber to monitor the atmosphere in the furnace module chamber.

[0031] As a preferred embodiment of this application, the air intake assembly is used to fill nitrogen gas, the oxygen content in the furnace module cavity is monitored by a detection head, and the flow rate of the air intake and exhaust is controlled by a flow meter so that the oxygen content in the furnace module cavity is always kept at a level of less than 100 ppm.

[0032] As some embodiments of this application, the circulating hot air assembly includes a circulating drive component, a circulating air guide component, and a heating component. The circulating drive component is fixed on the furnace frame and is used to drive the airflow. The circulating air guide component is located at the top of the furnace module chamber and has a heating component installed inside. The circulating drive component drives the airflow, and the circulating air guide component guides the airflow through the heating component and then into the circulating air duct. The airflow then flows through the chamber from the air guide plate to bake the product.

[0033] As some embodiments of this application, the stepping lifting module includes a lifting drive, a synchronous belt assembly, a transmission shaft, a bevel gear set, a camshaft, cams, cams, lifting rods, lifting plates, and stepping guide rails. The lifting drive is fixedly installed below the furnace frame. The output shaft of the lifting drive is connected to one end of the synchronous belt assembly and drives the synchronous belt assembly to rotate. The other end of the synchronous belt assembly is connected to the transmission shaft and drives the transmission shaft to rotate. The bevel gear set has several sets. In each set, one bevel gear is installed on the transmission shaft in the front-to-back direction, and the other bevel gear in each set is installed on the camshaft in the left-to-right direction. The bevel gear set drives the camshaft to rotate. Two cams are symmetrically installed on each camshaft. Each cam is provided with a vertical cam. The top of all the cams on the left and right sides is connected to a lifting plate. Each lifting plate is provided with a stepping guide rail. Activating the lifting drive can drive the stepping guide rail to move up and down reciprocally.

[0034] As some embodiments of this application, the stepping transport module includes a stepping drive, a stepping transmission shaft, a stepping wheel assembly, a stepping slide plate, a stepping slide rail, a stepping connecting plate, a stepping lifting frame, and a stepping bracket. Two stepping brackets are provided and fixedly installed on the left and right sides of the furnace frame. A stepping lifting frame is slidably connected to the top of the two stepping brackets in the horizontal two stepping guide rails. A stepping connecting plate is connected between the left and right stepping lifting frames. A stepping slide plate that can slide back and forth is provided below the stepping connecting plate. The vertical distance between the stepping connecting plate and the stepping slide plate can be adaptively adjusted. The stepping slide plate is slidably connected to the stepping slide rail. A rack of the stepping wheel assembly is also provided below the stepping slide plate. The gear in the stepping wheel assembly is sleeved on the stepping transmission shaft. The stepping transmission shaft is fixedly connected to the output shaft of the stepping drive.

[0035] As some embodiments of this application, the top of the stepping bracket is higher than the top of the stepping lifter when the stepping guide rail is in its lowest position, and lower than the top of the stepping lifter when the stepping guide rail is in its highest position. The bottom of the carrier is provided with a base for supporting the stepping lifter and the stepping bracket.

[0036] As some embodiments of this application, in order to better control the coordinated operation of the nitrogen-protected tunnel furnace, a control module is also included, which is used to programmatically control the operation of the nitrogen-protected tunnel furnace and visualize the operating status of the nitrogen-protected tunnel furnace.

[0037] This invention also provides a chip baking method, which employs any of the above-described nitrogen-protected tunnel ovens for chip baking, and includes the following steps:

[0038] S1. Load the container holding the product to be baked into the front loading and unloading module chamber through the front loading and unloading module.

[0039] S2. Open the front sealing component of the atmosphere conversion module located on the front side, close the rear sealing component, and then transfer the carrier from the loading and unloading module chamber on the front side to the atmosphere conversion module chamber on the front side through the transfer module, and close the front sealing component of the atmosphere conversion module on the front side.

[0040] S3. Start the gas filling component to fill the front atmosphere conversion module chamber with the set gas, so that the front atmosphere conversion module chamber enters the set atmosphere environment. Open the rear sealing component of the front atmosphere conversion module. At this time, the atmosphere environment in the front atmosphere conversion module chamber is the same as that in the furnace module, and does not affect the baking atmosphere environment requirements in the furnace module.

[0041] S4. The carrier is transported from the chamber of the front atmosphere conversion module to the chamber of the furnace body module through the step lifting module and the step transport module, and then the rear sealing assembly of the front atmosphere conversion module is closed.

[0042] S5. While the carrier moves backward step by step within the cavity of the furnace module, it bakes the products to be baked inside the carrier.

[0043] S6. After the product baking is completed, the sealing component on the front side of the atmosphere conversion module located at the rear side is opened. At this time, the sealing component on the rear side is in the closed state. The atmosphere environment in the chamber of the atmosphere conversion module on the rear side has been filled by the gas filling component to a state consistent with the atmosphere environment in the chamber of the furnace body module. The carrier is transported from the chamber of the furnace body module to the chamber of the atmosphere conversion module on the rear side through the step lifting module and the step transport module.

[0044] S7. Close the sealing assembly at the front of the rear atmosphere conversion module, then open the sealing assembly at the rear of the rear atmosphere conversion module, and transfer the carrier from the rear atmosphere conversion module chamber to the rear loading / unloading module chamber via the transfer module, and close the sealing assembly at the rear of the rear atmosphere conversion module.

[0045] S8. The container holding the baked product is unloaded from the cavity through the loading and unloading module on the rear side.

[0046] Compared with the prior art, the beneficial effects of the present invention are as follows:

[0047] 1. Achieved efficient and stable control and maintenance of ultra-low oxygen atmosphere: By setting up dedicated atmosphere conversion modules at both ends, and in conjunction with sealing components, gas filling components and monitoring components, the atmosphere can be replaced and isolated before the carrier enters or leaves the furnace body, effectively preventing outside air from entering the core baking area, ensuring that the oxygen content in the inner chamber of the furnace body module is stably maintained at an extremely high purity level of less than 100ppm, significantly improving the quality and reliability of chip baking.

[0048] 2. Modular design enhances the flexibility and maintainability of the equipment: The entire tunnel furnace system is divided into multiple functional modules, such as a loading and unloading module, an atmosphere conversion module, and a furnace body module, which are connected by a transfer module and a stepping mechanism. This design not only facilitates the manufacturing, transportation, and on-site assembly of the equipment, but also allows for flexible increases or decreases in the number of furnace body modules according to capacity requirements, while simplifying subsequent maintenance and component replacement processes.

[0049] 3. Precise, stable, and pollution-free transmission system: Inside the furnace module, a driving method combining a stepping lifting module and a stepping transport module is adopted. Through the precise coordination of mechanisms such as cams, lifting plates, and stepping lifting frames, smooth, step-by-step transmission of the carrier is achieved, avoiding metal shavings contamination that may occur with traditional chain or rack and pinion drives. This is particularly suitable for chip manufacturing environments with extremely high cleanliness requirements. In the loading and unloading area, the coordinated work of the hoisting components, gripper components, and guiding and positioning components enables automatic and precise gripping and placement between the carrier and the external transport vehicle, improving the automation level and positioning accuracy of loading and unloading.

[0050] 4. High Baking Uniformity and Thermal Efficiency: The oven module adopts a unique circulating hot air structure. Hot air is evenly blown to the product in the center of the chamber through the top circulating air guide, the side circulating air ducts, and finally the air guide mesh plate, forming a uniform and stable temperature field. This ensures that all products are heated consistently, improving the uniformity of the baking process. At the same time, the insulation components in the heat-insulating shell assembly and the atmosphere conversion module effectively reduce heat loss and lower energy consumption.

[0051] 5. High degree of system automation and intelligence: The entire tunnel oven is centrally programmed and controlled by a control module, realizing fully automated operation from feeding, atmosphere conversion, stepping transmission, baking process to unloading. The system can monitor the atmosphere environment and equipment operating status of each chamber in real time and display them visually, greatly reducing the intensity of manual operation and production risks, and ensuring the controllability and repeatability of the process.

[0052] In summary, this invention, through its innovative modular structure, precise atmosphere control system, clean and stable transmission mechanism, and intelligent overall control, effectively overcomes the shortcomings of existing technologies and provides an ideal solution with high reliability, high efficiency, and high cleanliness for the baking process of high-end chips. Attached Figure Description

[0053] To more clearly illustrate the specific embodiments of the present invention or the technical solutions in the prior art, the accompanying drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only one embodiment of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0054] Figure 1 This is a three-dimensional structural diagram of a nitrogen-protected tunnel furnace according to an embodiment of this application;

[0055] Figure 2 This is a three-dimensional structural diagram of the loading and unloading module in an embodiment of this application;

[0056] Figure 3This is a schematic diagram of the internal three-dimensional structure of the loading and unloading module in an embodiment of this application;

[0057] Figure 4 This is a three-dimensional structural diagram of the loading and unloading module from another perspective in an embodiment of this application;

[0058] Figure 5 This is a three-dimensional structural diagram of the loading and unloading module from another perspective in an embodiment of this application.

[0059] Figure 6 This is a three-dimensional structural diagram of the hoisting assembly and gripper assembly according to an embodiment of this application;

[0060] Figure 7 This is a three-dimensional structural diagram of the atmosphere conversion module in an embodiment of this application;

[0061] Figure 8 This is a three-dimensional structural diagram of the atmosphere conversion module from another perspective in an embodiment of this application;

[0062] Figure 9 This is a three-dimensional structural schematic diagram of the atmosphere conversion module from another perspective in an embodiment of this application;

[0063] Figure 10 This is a three-dimensional structural diagram of the transfer module in an embodiment of this application;

[0064] Figure 11 for Figure 10 Enlarged view of a portion of point A in the middle;

[0065] Figure 12 This is a three-dimensional structural diagram of the furnace body module according to an embodiment of this application;

[0066] Figure 13 This is a three-dimensional structural diagram of the furnace body module in an embodiment of this application;

[0067] Figure 14 This is a three-dimensional structural diagram of the step lifting module and the step transport module according to an embodiment of this application;

[0068] Figure 15 This is a three-dimensional structural diagram of the stepping lifting module and the stepping transport module from another perspective in an embodiment of this application;

[0069] Figure 16 This is a three-dimensional structural diagram of the step lifting module and the step transport module from another perspective in the embodiments of this application.

[0070] The labels in the attached diagram are as follows: 1. Loading / unloading module; 11. Loading / unloading frame; 12. Lifting assembly; 121. Lifting rod; 122. Vertical movement assembly; 1221. Vertical movement drive; 1222. Vertical movement transmission assembly; 1223. Vertical movement sliding assembly; 123. Horizontal movement assembly; 1231. Horizontal movement drive; 1232. Horizontal movement transmission assembly; 1233. Horizontal movement sliding assembly; 13. Gripper assembly; 131. Gripper drive; 132. Gripper sliding component; 133. Hook; 14. Guide assembly; 15. Positioning assembly; 2. Atmosphere conversion module; 21. Atmosphere conversion frame; 22. Sealing assembly; 221. Sealing plate; 222. Sealing strip; 223. Sealing slide rail; 23. Sealing transmission frame; 231. Sealing drive component; 232. Connecting rod; 233. Push rod; 24. Inflation assembly; 25. Monitoring assembly; 26. Preheating assembly; 27. Insulation assembly; 28. Module seal; 3. Furnace body module; 31. Furnace body frame; 32. Circulating hot air assembly; 321. Circulation drive component; 322. Circulating air guide component; 323. Heating component; 33. Air inlet assembly; 34. Air guide mesh plate; 35. Insulation shell assembly; 36. Circulating air duct; 37. Air outlet. Components; 38. Flow meter; 39. Detection head; 4. Transfer module; 41. Transfer trolley; 411. Support plate; 412. Limit terminal; 413. Pulley; 414. Positioning pin; 42. Transfer track; 43. Transfer drive component; 44. Transfer transmission assembly; 441. First drive shaft; 442. First conical wheel assembly; 443. Second drive shaft; 444. Second conical wheel assembly; 445. Third drive shaft; 446. Third conical wheel assembly; 447. Fourth drive shaft; 448. Fourth conical wheel assembly; 449. Roller; 45. Limit assembly; 451. Limit drive component; 452. 1. Linear slide bar; 2. Detection limit block; 3. Stepping lifting module; 4. Lifting drive component; 5. Synchronous belt assembly; 6. Drive shaft; 7. Bevel gear set; 8. Camshaft; 9. Cam; 10. Protruding rod; 11. Lifting plate; 22. Stepping guide rail; 33. Stepping transport module; 44. Stepping drive component; 55. Stepping drive shaft; 66. Stepping wheel assembly; 77. Stepping slide plate; 88. Stepping connecting plate; 9. Stepping lifting frame; 10. Stepping bracket; 11. Carrier; 22. Outer frame; 33. Base; 44. Transport vehicle; 55. Control module. Detailed Implementation

[0071] To make the technical means, creative features, objectives and effects of this invention easier to understand, the technical solutions in the specific embodiments of this invention are described clearly and completely below to further illustrate this invention. Obviously, the specific embodiments described are only a part of the embodiments of this invention, and not all of them.

[0072] Example 1: This example discloses a nitrogen-protected tunnel oven for chip baking, such as... Figures 1-5 As shown in Figures 6-9 and 12-13, with the material flow direction as the front and back sides, the furnace consists of a sealed loading / unloading module 1, an atmosphere conversion module 2, several furnace body modules 3, and the loading / unloading module 1, arranged sequentially from front to back. Each of the loading / unloading module 1, atmosphere conversion module 2, and furnace body module 3 has a chamber for the carrier 7 to pass through. The loading / unloading module 1 and atmosphere conversion module 2 are connected by a transfer module 4 to transfer the carrier 7. Within the furnace body module 3, the carrier 7 moves stepwise through a stepping lifting module 5 and a stepping transport module 6.

[0073] The loading / unloading module 1 is used to load or unload products onto the carrier 7 containing the products.

[0074] Atmosphere conversion module 2 is used to allow the carrier 7 inside its chamber to enter a set atmosphere environment after being isolated from the outside world, or to connect with the outside world after being isolated from the furnace body module 3 chamber. Atmosphere conversion module 2 includes atmosphere conversion frame 21, sealing assembly 22, sealing transmission frame 23, gas filling assembly 24, and monitoring assembly 25. There is a sealing assembly 22 on each of the front and rear sides of atmosphere conversion frame 21. Each sealing assembly 22 is connected to a sealing transmission frame 23. The sealing transmission frame 23 can drive the sealing assembly 22 to move to open or isolate atmosphere conversion module 2 from loading and unloading module. The chamber between the atmosphere conversion module 1 and the furnace body module 3 is filled with a gas filling component 24 located outside the atmosphere conversion frame 21 and connected through the chamber of the atmosphere conversion module 2. The gas filling component 24 is used to fill the chamber of the atmosphere conversion module 2 with a set gas so that the chamber of the atmosphere conversion module 2 enters the set atmosphere environment. In this embodiment, the gas filling component 24 is used to fill with nitrogen so that the oxygen content in the chamber of the atmosphere conversion module 2 is less than 100ppm. The monitoring component 25 is located on the atmosphere conversion frame 21 and is used to monitor whether the atmosphere environment in the chamber of the atmosphere conversion module 2 reaches the set atmosphere environment.

[0075] The oven module 3 is used to bake the products placed in the carrier 7 under a set atmosphere.

[0076] Example 2: This example is a chip baking method. The method uses the nitrogen-protected tunnel oven described in Example 1 and includes the following steps:

[0077] S1. Load the product to be baked into the chamber of the front loading and unloading module 1 through the front loading and unloading module 1.

[0078] S2. Open the front sealing component 22 of the atmosphere conversion module 2 located on the front side, close the rear sealing component 22, and then transfer the carrier 7 from the loading and unloading module 1 chamber on the front side to the atmosphere conversion module 2 chamber on the front side through the transfer module 4, and close the front sealing component 22 of the atmosphere conversion module 2 on the front side.

[0079] S3. Start the gas filling component 24 to fill the chamber of the front atmosphere conversion module 2 with the set gas, so that the chamber of the front atmosphere conversion module 2 enters the set atmosphere environment. Open the rear sealing component 22 of the front atmosphere conversion module 2. At this time, the atmosphere environment in the chamber of the front atmosphere conversion module 2 is the same as that in the furnace module 3, and does not affect the baking atmosphere environment requirements in the furnace module 3.

[0080] S4. The carrier 7 is transported from the chamber of the front atmosphere conversion module 2 to the chamber of the furnace body module 3 through the step lifting module 5 and the step transport module 6, and then the rear sealing assembly 22 of the front atmosphere conversion module 2 is closed.

[0081] S5. While the carrier 7 is moving backward in the cavity of the furnace module 3, it bakes the products to be baked inside the carrier 7.

[0082] S6. After the product baking is completed, the sealing component 22 on the front side of the atmosphere conversion module 2 located at the rear side is opened. At this time, the sealing component 22 on the rear side is closed. The atmosphere environment in the chamber of the atmosphere conversion module 2 on the rear side has been filled by the gas filling component 24 to a state consistent with the atmosphere environment in the chamber of the furnace body module 3. The carrier 7 is transported from the chamber of the furnace body module 3 to the chamber of the atmosphere conversion module 2 on the rear side through the step lifting module 5 and the step transport module 6.

[0083] S7. Close the sealing component 22 on the front side of the rear atmosphere conversion module 2, then open the sealing component 22 on the rear side of the rear atmosphere conversion module 2, and transfer the carrier 7 from the chamber of the rear atmosphere conversion module 2 to the chamber of the rear loading and unloading module 1 through the transfer module 4, and close the sealing component 22 on the rear side of the rear atmosphere conversion module 2.

[0084] S8. The container 7 containing the baked product is unloaded from the cavity through the loading and unloading module 1 on the rear side.

[0085] Example 3: This embodiment is a nitrogen-protected tunnel oven for chip baking. It is based on Example 1 and elaborates on one feasible specific structure of the atmosphere conversion module 2, such as... Figures 7-9 As shown, the atmosphere conversion module 2 also includes a preheating component 26 and a heat preservation component 27. The preheating component 26 is mounted on the atmosphere conversion frame 21 and is used to heat the atmosphere inside the atmosphere conversion module 2. The heat preservation component 27 is mounted on the atmosphere conversion frame 21 and is located around the atmosphere conversion module 2, and is used to reduce heat loss.

[0086] To ensure the sealing effect between the loading / unloading module 1 and the atmosphere conversion module 2, and between the atmosphere conversion module 2 and the furnace body module 3, module seals 28 are provided on the front and rear sides of the atmosphere conversion module 2. In this embodiment, the module seals 28 are provided with high-temperature resistant sealing rings.

[0087] The sealing assembly 22 includes a sealing plate 221, a sealing strip 222, and a sealing slide rail 223. The sealing slide rail 223 is symmetrically arranged in the left and right directions. The sealing plate 221 is slidably connected between the sealing slide rails 223 on the left and right sides. The sealing plate 221 has a sealing strip 222 on the outer edge of the side away from the atmosphere conversion module 2 chamber.

[0088] The sealing transmission frame 23 includes a sealing drive component 231, a connecting rod 232, and push rods 233. The sealing drive components 231 are symmetrically fixedly arranged on the atmosphere conversion frame 21. The upper ends of the push rods of the sealing drive components 231 on both sides are connected to the two ends of the same connecting rod 232. Several push rods 233 are arranged below the connecting rod 232, and the lower ends of the push rods 233 are connected to the upper ends of the sealing plate 221. In this embodiment, two push rods 233 are symmetrically arranged on the left and right sides, and a guide linear bearing is provided on the atmosphere conversion frame 21 to ensure smooth operation when driving the sealing plate 221 to move up and down.

[0089] In this embodiment, the lower section of the sealing slide rail 223 protrudes slightly away from the chamber of the atmosphere conversion module 2, so that when the sealing plate 221 moves to the lower section, it will slightly move along the sealing slide rail 223 to achieve sealing. The connection between the push rod 233 and the sealing plate 221 has a structure that allows the sealing plate 221 to move slightly back and forth. Since the structure of the sealing slide rail 223 sliding up and down while simultaneously moving slightly back and forth, and the push rod 233 and the sealing plate 221 being able to move slightly back and forth while being pushed, are existing technologies, and those skilled in the art can assemble them as needed, they will not be described in detail here, nor are their structures shown in detailed enlarged views.

[0090] Example 4: This embodiment is a nitrogen-protected tunnel oven for chip baking. It is based on Example 1 and elaborates on one feasible specific structure of the loading and unloading module 1, such as... Figures 2-6 As shown, the loading and unloading module 1 includes a loading and unloading frame 11, a hoisting component 12, and a gripper component 13. The hoisting component 12 is installed on the upper inner side of the loading and unloading frame 11 and is used to hoist the carrier 7 onto the transfer module 4 or to hoist the carrier 7 from the transfer module 4. The gripper component 13 is located on the lower side of the hoisting component 12 and is used to grip the carrier 7.

[0091] To facilitate the transportation of the carrier 7, in actual production, a transport vehicle 8 is used to transport the carrier 7 to or from the loading / unloading module 1. In production, the transport vehicle 8 is usually a manually pushed trolley or an AGV. In order to ensure that the carrier 7 can be accurately picked up from or placed on the transport vehicle 8, a guide component 14 and a positioning component 15 are also provided on one side of the loading / unloading module 1. The guide component 14 guides the transport vehicle 8 into the loading / unloading module 1, and the positioning component 15 senses and positions the transport vehicle 8.

[0092] The hoisting assembly 12 includes a hoisting rod 121, a vertical moving assembly 122, and a horizontal moving assembly 123. The horizontal moving assembly 123 is fixedly installed above the loading and unloading frame 11. The horizontal moving assembly 123 drives the vertical moving assembly 122 installed on it to move horizontally, and the vertical moving assembly 122 drives the hoisting rod 121 installed on it to move vertically up and down.

[0093] The lateral movement assembly 123 includes a lateral movement drive 1231, a lateral movement transmission assembly 1232, and a lateral movement sliding assembly 1233. The lateral movement drive 1231 drives the lateral movement transmission assembly 1232 to move the vertical movement assembly 122 laterally. The lateral movement sliding assembly 1233 is used for sliding guidance to ensure smooth movement. In this embodiment, the lateral movement drive 1231 is a motor, the lateral movement transmission assembly 1232 is a gear and rack assembly, and the lateral movement sliding assembly 1233 is a slide rail and slider assembly.

[0094] The vertical movement assembly 122 includes a vertical movement drive 1221, a vertical movement transmission assembly 1222, and a vertical movement sliding assembly 1223. The vertical movement drive 1221 drives the vertical movement transmission assembly 1222 to move the hoisting rod 121 vertically up and down. The vertical movement sliding assembly 1223 is used for sliding guidance to ensure smooth operation. In this embodiment, the vertical movement drive 1221 is a motor, the vertical movement transmission assembly 1222 is a gear and rack assembly, and the vertical movement sliding assembly 1223 is a slide rail and slider assembly.

[0095] The gripper assembly 13 is fixedly installed at the lower end of the hoisting rod 121, and includes a gripper drive 131, a gripper slide 132, and hooks 133. Two hooks 133 are symmetrically arranged at the front and rear. The two hooks 133 are slidably mounted on the gripper slide 132. The gripper drive 131 is fixed at the lower end of the hoisting rod 121, and its output end is connected to the hooks 133, which can drive the two hooks 133 to move closer or further apart.

[0096] The vehicle 7 has an outer frame 71. When the vehicle 7 needs to be hoisted, the two hooks 133 are first moved away from each other. The gripper assembly 13 below the hoisting rod 121 is moved above the vehicle 7 by the horizontal movement assembly 123 and the vertical movement assembly 122. Then, the two hooks 133 are brought closer to each other, so that the hooks 133 are assembled with the outer frame 71. Then, the horizontal movement assembly 123 and the vertical movement assembly 122 are controlled to move, and the vehicle 7 can be hoisted.

[0097] Example 5: This embodiment is a nitrogen-protected tunnel oven for chip baking. It is based on Example 1 and elaborates on one feasible specific structure of the transfer module 4, such as... Figures 10-11 As shown, the transfer module 4 includes a transfer trolley 41, a transfer track 42, a transfer drive component 43, a transfer transmission component 44, and a limiting component 45. The transfer track 42 is fixedly installed at the bottom of the inner cavity of the loading / unloading module 1 and the atmosphere conversion module 2. The transfer trolley 41 is slidably connected to the transfer track 42. The transfer drive component 43 and the transfer transmission component 44, which drive the transfer trolley 41 to move, are installed under the transfer track 42. The limiting components 45 are installed at both the front and rear ends of the transfer track 42.

[0098] The transfer trolley 41 includes a support plate 411, limit terminals 412, pulleys 413 and positioning pins 414. Limit terminals 412 corresponding to the positions of the limit components 45 are provided on the front and rear sides of the support plate 411. Pulleys 413 for auxiliary movement and guidance are provided on the left and right sides of the support plate 411. Positioning pins 414 are provided on the support plate 411. Positioning pins 414 are used to position the carrier 7.

[0099] The transfer transmission assembly 44 includes a first transmission shaft 441, a first conical gear set 442, a second transmission shaft 443, a second conical gear set 444, a third transmission shaft 445, a third conical gear set 446, a fourth transmission shaft 447, a fourth conical gear set 448, and a roller 449. The transfer drive 43 drives the first transmission shaft 441 to rotate in the forward and backward direction. The first transmission shaft 441 drives one of the first conical gear sets 442 located on it to rotate. The meshing of the first conical gear set 442 drives another bevel gear in the first conical gear set 442 mounted on one end of the second transmission shaft 443 to rotate, which in turn drives the second transmission shaft 443 to rotate in the vertical direction. The second transmission shaft 443 drives one of the bevel gears in the second conical gear set 444 located at its other end to rotate. The meshing of the second conical gear set 444 drives the first conical gear set 445 to rotate. Another bevel gear in the second bevel gear set 444, mounted on the third drive shaft 445, rotates, which in turn drives the third drive shaft 445 to rotate in the left-right direction. The rotation of the third drive shaft 445 drives one of the bevel gears in the third bevel gear set 446 located at both ends of it to rotate. The meshing of the third bevel gear set 446 drives another bevel gear in the third bevel gear set 446, mounted on the fourth drive shaft 447, to rotate, which in turn drives the fourth drive shaft 447 to rotate in the front-back direction. The rotation of the fourth drive shaft 447 drives one of the bevel gears in the fourth bevel gear set 448 to rotate. The meshing of the fourth bevel gear set 448 drives another bevel gear in the fourth bevel gear set 448 connected to the roller 449 to rotate, which in turn drives the roller 449 to rotate. The rotation of the roller 449 can drive the transfer trolley 41 on it to move in the front-back direction.

[0100] The limiting assembly 45 includes a limiting drive 451, a linear slide bar 452, and a detection limiting block 453. The limiting drive 451 is fixedly installed below the transfer track 42. The output end of the limiting drive 451 is connected to the linear slide bar 452 and can drive the linear slide bar 452 to slide up and down. The detection limiting block 453 is installed on the upper end of the linear slide bar 452. After the limiting drive 451 drives the linear slide bar 452 to move upward, the detection limiting block 453 corresponds to the position of the limiting terminal 412 of the transfer trolley 41, which can prevent the transfer trolley 41 from moving forward or backward, thereby achieving the positioning of the transfer trolley 41. After the limiting drive 451 drives the linear slide bar 452 to move downward, the detection limiting block 453 retracts below the transfer track 42 and no longer obstructs the movement of the transfer trolley 41.

[0101] Example 6: This embodiment is a nitrogen-protected tunnel oven for chip baking. It is based on Example 1, and elaborates on one feasible specific structure of the oven body module 3, such as... Figures 12-13 As shown, the furnace module 3 includes a furnace frame 31, a circulating hot air assembly 32, an air inlet assembly 33, an air guide plate 34, an insulation shell assembly 35, an air outlet assembly 37, a flow meter 38, and a detection head 39. The circulating hot air assembly 32 is fixedly installed above the furnace frame 31 to provide baking heat and circulate the air inside the furnace module 3. The air inlet assembly 33 is located outside the furnace frame 31 and extends through the chamber of the furnace module 3 to fill the chamber with a predetermined amount of gas, maintaining a set atmosphere within the chamber. The air guide plate 34 is located on the left and right sides of the chamber of the furnace module 3 to... The circulating air supplied by the circulating hot air assembly 32 is guided from both sides of the chamber towards the center; the heat insulation shell assembly 35 is disposed around the chamber of the furnace module 3; a space is left between the heat insulation shell assembly 35 on the left and right sides and the corresponding air guide mesh plate 34 to form a circulating air duct 36; the air outlet assembly 37 is disposed below the furnace frame 31 to exhaust the air in the chamber of the furnace module 3 and maintain the pressure balance in the chamber of the furnace module 3; both the air inlet assembly 33 and the air outlet assembly 37 are connected to flow meters 38 to control the air inlet or outlet volume; several detection heads 39 are disposed in the chamber of the furnace module 3 to monitor the atmosphere in the chamber of the furnace module 3. In this embodiment, the air inlet assembly 33 is used to fill nitrogen, the oxygen content in the chamber of the furnace module 3 is monitored by the detection heads 39, and the air inlet and outlet flow rates are controlled by the flow meters 38 to keep the oxygen content in the chamber of the furnace module 3 at a level of less than 100 ppm.

[0102] The circulating hot air assembly 32 includes a circulating drive component 321, a circulating air guide component 322, and a heating component 323. The circulating drive component 321 is fixed on the furnace frame 31 and is used to drive the airflow. The circulating air guide component 322 is located at the top of the chamber of the furnace module 3 and has the heating component 323 installed inside. The circulating drive component 321 drives the airflow, and the circulating air guide component 322 guides the airflow through the heating component 323 and then into the circulating air duct 36. Then, the airflow flows through the chamber from the air guide plate 34 to bake the product.

[0103] Example 7: This embodiment is a nitrogen-protected tunnel oven for chip baking. Based on Example 1, it expands upon one feasible specific structure of the stepper lifting module 5 and the stepper transport module 6, such as... Figures 14-16 As shown, the stepping lifting module 5 includes a lifting drive component 51, a synchronous belt assembly 52, a drive shaft 53, a bevel gear set 54, a camshaft 55, a cam 56, a cam rod 57, a lifting plate 58, and a stepping guide rail 59. The lifting drive component 51 is fixedly installed below the furnace frame 31. The output shaft of the lifting drive component 51 is connected to one end of the synchronous belt assembly 52 and drives the synchronous belt assembly 52 to rotate. The other end of the synchronous belt assembly 52 is connected to the drive shaft 53 and drives the drive shaft 53 to rotate. The bevel gear set 54 has several sets, with one bevel gear in each set. The wheel is mounted on the drive shaft 53 in the front-to-back direction. Another bevel gear of each bevel gear set 54 is mounted on the camshaft 55 in the left-to-right direction. The bevel gear set 54 drives the camshaft 55 to rotate. Two cams 56 are symmetrically mounted on each camshaft 55. Each cam 56 is provided with a vertical cam 57. The top of all the cams 57 on the left and all the cams 57 on the right are connected to a lifting plate 58. Each lifting plate 58 is provided with a stepping guide rail 59. Activating the lifting drive component 51 can drive the stepping guide rail 59 to move up and down reciprocally.

[0104] The stepping transport module 6 includes a stepping drive component 61, a stepping transmission shaft 62, a stepping wheel assembly 63, a stepping slide plate 64, a stepping slide rail 65, a stepping connecting plate 66, a stepping lifting frame 67, and a stepping bracket 68. Two stepping brackets 68 are provided and fixedly installed on the left and right sides of the furnace frame 31. A stepping lifting frame 67 is slidably connected to the top of the two stepping guide rails 59. A stepping connecting plate 66 is connected between the left and right stepping lifting frames 67. A stepping slide plate 64 that can slide back and forth is provided below the stepping connecting plate 66. The vertical distance between the stepping connecting plate 66 and the stepping slide plate 64 can be adaptively adjusted. The stepping slide plate 64 is slidably connected to the stepping slide rail 65. A rack of the stepping wheel assembly 63 is also provided below the stepping slide plate 64. The gear in the stepping wheel assembly 63 is sleeved on the stepping transmission shaft 62. The stepping transmission shaft 62 is fixedly connected to the output shaft of the stepping drive component 61.

[0105] The top of the stepping bracket 68 is higher than the top of the stepping lifter 67 when the stepping guide rail 59 moves to the lowest position, and lower than the top of the stepping lifter 67 when the stepping guide rail 59 moves to the highest position. The bottom of the carrier 7 is provided with a base 72 for the stepping lifter 67 and the stepping bracket 68 to support.

[0106] To better control the coordinated operation of the nitrogen-protected tunnel furnace, a control module 9 is also included, which is used to programmatically control the operation of the nitrogen-protected tunnel furnace and visualize its operating status.

[0107] The main technical features, basic principles, and related advantages of the present invention have been described above. It will be apparent to those skilled in the art that the present invention is not limited to the details of the exemplary embodiments described above, and that the present invention can be implemented in other specific forms without departing from the concept or basic characteristics of the invention. Therefore, the above-described embodiments should be considered exemplary and non-limiting in all respects. The scope of the present invention is defined by the appended claims rather than the foregoing description, and thus all variations falling within the meaning and scope of the equivalents of the claims are intended to be included within the present invention.

[0108] Furthermore, it should be understood that although this specification describes various embodiments, not every embodiment contains only one independent technical solution. This way of describing the specification is only for clarity. Those skilled in the art should regard the specification as a whole, and the technical solutions in each embodiment can also be appropriately combined to form other embodiments that can be understood by those skilled in the art.

Claims

1. A nitrogen-protecting tunnel furnace for baking a chip, characterized by comprising: An upper and lower material module (1), an atmosphere conversion module (2), a plurality of furnace modules (3), another atmosphere conversion module (2) and another upper and lower material module (1) are sequentially sealed and connected from front to back along the material flow direction, the upper and lower material module (1), the atmosphere conversion module (2) and the furnace module (3) are internally provided with cavities for the passing of a carrier (7), the upper and lower material module (1) and the atmosphere conversion module (2) are connected through a transfer module (4) to realize the transfer of the carrier (7), and the furnace module (3) is internally provided with a step lifting module (5) and a step transport module (6) to realize the step movement of the carrier (7); wherein: The upper and lower material module (1) is used for loading or unloading the carrier (7) containing products; The atmosphere conversion module (2) is used for isolating the carrier (7) in the cavity from the outside environment and entering a set atmosphere environment or being in communication with the outside environment after being isolated from the cavity of the furnace module (3); the atmosphere conversion module (2) comprises an atmosphere conversion rack (21), a sealing assembly (22), a sealing transmission rack (23), a gas filling assembly (24) and a monitoring assembly (25), the atmosphere conversion rack (21) is provided with a sealing assembly (22) on each of the front and back sides, each sealing assembly (22) is connected with a sealing transmission rack (23), the sealing transmission rack (23) drives the sealing assembly (22) to move to open or isolate the cavity between the atmosphere conversion module (2) and the upper and lower material module (1) or the furnace module (3), the gas filling assembly (24) is arranged outside the atmosphere conversion rack (21) and penetrates the cavity of the atmosphere conversion module (2) to fill the cavity of the atmosphere conversion module (2) with a set gas, so that the cavity of the atmosphere conversion module (2) enters a set atmosphere environment, and the monitoring assembly (25) is arranged on the atmosphere conversion rack (21) to monitor whether the atmosphere environment in the cavity of the atmosphere conversion module (2) reaches a set atmosphere environment; The furnace module (3) is used for baking the products contained in the carrier (7) under a set atmosphere. The step lifting module (5) comprises a lifting drive (51), a synchronous belt assembly (52), a transmission shaft (53), a bevel gear set (54), a camshaft (55), a cam (56), a protruding rod (57), a lifting plate (58) and a step guide rail (59), the lifting drive (51) is fixedly arranged below the furnace body frame (31), the output shaft of the lifting drive (51) is connected with one end of the synchronous belt assembly (52) and drives the synchronous belt assembly (52) to rotate, the other end of the synchronous belt assembly (52) is connected with the transmission shaft (53) and drives the transmission shaft (53) to rotate, the bevel gear set (54) is provided with a plurality of groups, one bevel gear in each group of the bevel gear set (54) is installed on the transmission shaft (53) in the front-rear direction, the other bevel gear in each group of the bevel gear set (54) is installed on the camshaft (55) in the left-right direction, the bevel gear set (54) drives the camshaft (55) to rotate, two cams (56) are symmetrically installed on each camshaft (55) in the left-right direction, each cam (56) is correspondingly provided with a protruding rod (57) in the vertical direction, the top ends of all the protruding rods (57) on the left side and all the protruding rods (57) on the right side are connected with a lifting plate (58), and the lifting plate (58) is provided with a step guide rail (59) at each position. The step lifting module (5) comprises a lifting drive (51), a synchronous belt assembly (52), a transmission shaft (53), a bevel gear set (54), a camshaft (55), a cam (56), a protruding rod (57), a lifting plate (58) and a step guide rail (59), the lifting drive (51) is fixedly arranged below the furnace body frame (31), the output shaft of the lifting drive (51) is connected with one end of the synchronous belt assembly (52) and drives the synchronous belt assembly (52) to rotate, the other end of the synchronous belt assembly (52) is connected with the transmission shaft (53) and drives the transmission shaft (53) to rotate, the bevel gear set (54) is provided with a plurality of groups, one bevel gear in each group of the bevel gear set (54) is installed on the transmission shaft (53) in the front-rear direction, the other bevel gear in each group of the bevel gear set (54) is installed on the camshaft (55) in the left-right direction, the bevel gear set (54) drives the camshaft (55) to rotate, two cams (56) are symmetrically installed on each camshaft (55) in the left-right direction, each cam (56) is correspondingly provided with a protruding rod (57) in the vertical direction, the top ends of all the protruding rods (57) on the left side and all the protruding rods (57) on the right side are connected with a lifting plate (58), and the lifting plate (58) is provided with a step guide rail (59) at each position. The step lifting module (5) comprises a lifting drive (51), a synchronous belt assembly (52), a transmission shaft (53), a bevel gear set (54), a camshaft (55), a cam (56), a protruding rod (57), a lifting plate (58) and a step guide rail (59), the lifting drive (51) is fixedly arranged below the furnace body frame (31), the output shaft of the lifting drive (51) is connected with one end of the synchronous belt assembly (52) and drives the synchronous belt assembly (52) to rotate, the other end of the synchronous belt assembly (52) is connected with the transmission shaft (53) and drives the transmission shaft (53) to rotate, the bevel gear set (54) is provided with a plurality of groups, one bevel gear in each group of the bevel gear set (54) is installed on the transmission shaft (53) in the front-rear direction, the other bevel gear in each group of the bevel gear set (54) is installed on the camshaft (55) in the left-right direction, the bevel gear set (54) drives the camshaft (55) to rotate, two cams (56) are symmetrically installed on each camshaft (55) in the left-right direction, each cam (56) is correspondingly provided with a protruding rod (57) in the vertical direction, the top ends of all the protruding rods (57) on the left side and all the protruding rods (57) on the right side are connected with a lifting plate (58), and the lifting plate (58) is provided with a step guide rail (59) at each position. The control module (9) is used for programming control of the nitrogen protection tunnel furnace and visualization of the running state of the nitrogen protection tunnel furnace.

2. The nitrogen-purged tunnel furnace for baking a chip according to claim 1, wherein The atmosphere conversion module (2) further comprises a preheating assembly (26) and a heat preservation assembly (27), the preheating assembly (26) is arranged on the atmosphere conversion rack (21) and is used for heating the atmosphere in the chamber of the atmosphere conversion module (2), and the heat preservation assembly (27) is arranged on the atmosphere conversion rack (21) and surrounds the chamber of the atmosphere conversion module (2) and is used for reducing heat loss; The front and rear sides of the atmosphere conversion module (2) are further provided with a module sealing piece (28), and the module sealing piece (28) is provided with a high-temperature-resistant sealing ring.

3. The nitrogen-purged tunnel furnace for baking a chip according to claim 2, wherein The sealing assembly (22) comprises a sealing plate (221), a sealing strip (222) and a sealing sliding rail (223), the sealing sliding rails (223) are symmetrically arranged in the left-right direction, the sealing plate (221) is slidably connected between the left and right sealing sliding rails (223), and the sealing strip (222) is arranged on the outer edge of the side of the sealing plate (221) away from the chamber of the atmosphere conversion module (2); The sealing transmission rack (23) comprises a sealing driving piece (231), a connecting rod (232) and a push rod (233), the sealing driving pieces (231) are symmetrically fixed on the atmosphere conversion rack (21), the top rod upper ends of the left and right sealing driving pieces (231) are connected to the two ends of the same connecting rod (232), and the push rods (233) are arranged below the connecting rod (232), and the lower ends of the push rods (233) are connected to the upper ends of the sealing plate (221).

4. The nitrogen-purged tunnel furnace for baking a chip according to claim 1, wherein The feeding and discharging module (1) comprises a feeding and discharging rack (11), a hoisting assembly (12) and a clamping jaw assembly (13), the hoisting assembly (12) is arranged above the inner side of the feeding and discharging rack (11) and is used for hoisting the carrier (7) to the transfer module (4) or hoisting the carrier (7) from the transfer module (4), and the clamping jaw assembly (13) is arranged on the lower side of the hoisting assembly (12) and is used for grabbing the carrier (7); The feeding and discharging module (1) is further provided with a guide assembly (14) and a positioning assembly (15), the guide assembly (14) guides the transport vehicle (8) to enter the feeding and discharging module (1), and the positioning assembly (15) senses and positions the transport vehicle (8).

5. The nitrogen-purged tunnel furnace for baking a chip according to claim 4, wherein The hoisting assembly (12) comprises a hoisting rod (121), a vertical moving assembly (122) and a horizontal moving assembly (123), the horizontal moving assembly (123) is fixedly arranged above the feeding and discharging rack (11), the horizontal moving assembly (123) drives the vertical moving assembly (122) arranged thereon to move horizontally, and the vertical moving assembly (122) drives the hoisting rod (121) arranged thereon to move up and down in the vertical direction; The horizontal moving assembly (123) comprises a horizontal moving driving piece (1231), a horizontal moving transmission assembly (1232) and a horizontal moving sliding assembly (1233), the horizontal moving driving piece (1231) drives the horizontal moving transmission assembly (1232) to drive the vertical moving assembly (122) to move left and right, and the horizontal moving sliding assembly (1233) is used for sliding guidance. The vertical moving assembly (122) comprises a vertical moving driving member (1221), a vertical moving transmission assembly (1222) and a vertical moving sliding assembly (1223), the vertical moving driving member (1221) drives the vertical moving transmission assembly (1222) to move the lifting rod (121) vertically up and down, and the vertical moving sliding assembly (1223) is used for sliding guidance; The clamping jaw assembly (13) is fixedly arranged at the lower end of the lifting rod (121) and comprises a clamping jaw driving member (131), a clamping jaw sliding member (132) and two clamping jaws (133), the two clamping jaws (133) are symmetrically arranged at the front and back of the clamping jaw sliding member (132), the clamping jaw driving member (131) is fixed at the lower end of the lifting rod (121), and the output end of the clamping jaw driving member (131) is connected with the clamping jaws (133) to drive the two clamping jaws (133) to move close to or away from each other; The carrier (7) has an outer frame (71), and the clamping jaws (133) are assembled with the outer frame (71).

6. The nitrogen-purged tunnel furnace for baking a chip according to claim 1, wherein The transfer module (4) comprises a transfer trolley (41), a transfer track (42), a transfer driving member (43), a transfer transmission assembly (44) and a limiting assembly (45), the transfer track (42) is fixedly arranged at the bottom of the inner cavities of the feeding and discharging module (1) and the atmosphere conversion module (2), the transfer trolley (41) is slidably connected to the transfer track (42), the transfer driving member (43) and the transfer transmission assembly (44) are arranged below the transfer track (42) and drive the transfer trolley (41) to move, and the limiting assembly (45) is arranged at the front and back ends of the transfer track (42).

7. The nitrogen-purged tunnel furnace for baking a chip according to claim 6, wherein The transfer trolley (41) comprises a support plate (411), limiting terminals (412), pulleys (413) and positioning pins (414), the limiting terminals (412) corresponding to the positions of the limiting assembly (45) are arranged at the front and back sides of the support plate (411), the pulleys (413) for assisting movement and guidance are arranged at the left and right sides of the support plate (411), the positioning pins (414) are arranged on the upper surface of the support plate (411), and the positioning pins (414) are used for positioning the carrier (7); The transfer transmission assembly (44) comprises a first transmission shaft (441), a first bevel gear set (442), a second transmission shaft (443), a second bevel gear set (444), a third transmission shaft (445), a third bevel gear set (446), a fourth transmission shaft (447), a fourth bevel gear set (448) and a roller (449), the transfer drive (43) drives the first transmission shaft (441) in the front-rear direction to rotate, the first transmission shaft (441) drives one of the bevel gears in the first bevel gear set (442) to rotate, the first bevel gear set (442) meshes and drives another bevel gear in the first bevel gear set (442) mounted on one end of the second transmission shaft (443) to rotate, thereby driving the second transmission shaft (443) in the vertical direction to rotate, the second transmission shaft (443) drives one of the bevel gears in the second bevel gear set (444) at the other end to rotate, the second bevel gear set (444) meshes and drives another bevel gear in the second bevel gear set (444) mounted on the third transmission shaft (445) to rotate, thereby driving the third transmission shaft (445) in the left-right direction to rotate, the third transmission shaft (445) drives one of the bevel gears in the third bevel gear set (446) at both ends to rotate, the third bevel gear set (446) meshes and drives another bevel gear in the third bevel gear set (446) mounted on the fourth transmission shaft (447) to rotate, thereby driving the fourth transmission shaft (447) in the front-rear direction to rotate, the fourth transmission shaft (447) drives one of the bevel gears in the fourth bevel gear set (448) to rotate, the fourth bevel gear set (448) meshes and drives another bevel gear in the fourth bevel gear set (448) connected with the roller (449) to rotate, thereby driving the roller (449) to rotate, and the roller (449) drives the transfer trolley (41) in the front-rear direction to move. The limiting assembly (45) comprises a limiting drive (451), a straight sliding rod (452) and a detection limiting block (453), the limiting drive (451) is fixedly installed below the transfer track (42), the output end of the limiting drive (451) is connected with the straight sliding rod (452) and drives the straight sliding rod (452) to slide up and down, and the detection limiting block (453) is installed at the upper end of the straight sliding rod (452).

8. The nitrogen-purged tunnel furnace for baking a chip according to claim 1, wherein The furnace body module (3) comprises a furnace body frame (31), a circulating hot air assembly (32), an air inlet assembly (33), a guide air net plate (34), a heat preservation shell assembly (35), an air outlet assembly (37), a flow meter (38) and a detection head (39). The circulating hot air assembly (32) is fixedly arranged above the furnace body frame (31) and is used for providing baking heat and making air in the cavity of the furnace body module (3) circulate. The air inlet assembly (33) is arranged outside the furnace body frame (31) and penetrates the cavity of the furnace body module (3) and is used for filling the cavity of the furnace body module (3) with set gas and keeping the cavity of the furnace body module (3) in a set atmosphere environment. The guide air net plate (34) is arranged on the left and right sides of the cavity of the furnace body module (3) and is used for guiding the circulating air provided by the circulating hot air assembly (32) from the left and right sides of the cavity to the middle. The heat preservation shell assembly (35) is arranged around the cavity of the furnace body module (3). Spaces are left between the heat preservation shell assemblies (35) on the left and right sides and the corresponding guide air net plates (34) to form circulating air ducts (36). The air outlet assembly (37) is arranged below the furnace body frame (31) and is used for discharging air in the cavity of the furnace body module (3) and keeping the pressure in the cavity of the furnace body module (3) balanced. The air inlet assembly (33) and the air outlet assembly (37) are connected with the flow meter (38) and are used for controlling the air inlet amount or the air outlet amount. The cavity of the furnace body module (3) is provided with a plurality of detection heads (39) and is used for monitoring the atmosphere environment in the cavity of the furnace body module (3). The circulating hot air assembly (32) comprises a circulating driving member (321), a circulating air guide member (322) and a heating member (323). The circulating driving member (321) is fixed on the furnace body frame (31) and is used for driving air flow. The circulating air guide member (322) is arranged on the top of the cavity of the furnace body module (3) and is provided with the heating member (323) arranged therein. The circulating driving member (321) drives air flow. The circulating air guide member (322) guides the air flow to pass through the heating member (323) and then enters the circulating air duct (36) and then flows through the cavity from the guide air net plate (34) to bake the product.

9. A chip baking method characterized by, The chip baking nitrogen protection tunnel furnace comprises the following steps: S1, loading the carrier (7) containing the products to be baked into the cavity of the front side upper and lower module (1) through the front side upper and lower module (1); S2, opening the front side sealing assembly (22) of the front side atmosphere conversion module (2), closing the rear side sealing assembly (22), and then transferring the carrier (7) from the cavity of the front side upper and lower module (1) to the cavity of the front side atmosphere conversion module (2) through the transfer module (4) and closing the front side sealing assembly (22) of the front side atmosphere conversion module (2); S3, the inflation assembly (24) to the front side of the atmosphere conversion module (2) chamber filled with a set of gas, the front side of the atmosphere conversion module (2) chamber into the set of atmosphere environment, open the rear side of the front side of the atmosphere conversion module (2) sealing assembly (22), at this time, the front side of the atmosphere conversion module (2) chamber atmosphere environment with the furnace module (3) is the same, does not affect the oven module (3) in the atmosphere environment requirements; S4, through the step lifting module (5) and step transport module (6) will be transported from the front side of the atmosphere conversion module (2) chamber to the furnace module (3) of the chamber, and then close the rear side of the front side of the atmosphere conversion module (2) sealing assembly (22); S5, the carrier (7) in the chamber of the furnace module (3) step back transport while, the carrier (7) in the holding of the products to be baked for baking; S6, product baking is completed, the front side of the rear side of the atmosphere conversion module (2) sealing assembly (22) is opened, at this time, the rear side of the sealing assembly (22) is in the closed state, the rear side of the atmosphere conversion module (2) chamber atmosphere environment has been filled into the state of the same atmosphere environment with the furnace module (3) chamber through the inflation assembly (24), through the step lifting module (5) and step transport module (6) will be transported from the furnace module (3) of the chamber to the rear side of the atmosphere conversion module (2) chamber; S7, close the rear side of the front side of the atmosphere conversion module (2) sealing assembly (22), and then open the rear side of the rear side of the atmosphere conversion module (2) sealing assembly (22), through the transfer module (4) will be transported from the rear side of the atmosphere conversion module (2) chamber to the rear side of the loading and unloading module (1) chamber, close the rear side of the rear side of the atmosphere conversion module (2) sealing assembly (22); S8, through the rear side of the loading and unloading module (1) from the chamber of the carrier (7) containing baked products.

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