Optical microstructure detection method and device, terminal equipment and program product

Abstract

The invention is suitable for the technical field of optics, and provides an optical microstructure detection method and device, terminal equipment and a program product, and the method comprises the steps: obtaining the environment information of an area where a to-be-detected sample is located, the first position information of the to-be-detected sample, and the second position information of a light source; if the environment information, the first position information and the second position information meet the optical microstructure detection condition, controlling the light source to emit light to the sample to be detected; acquiring sample images of the to-be-detected sample at different inclination angles; and determining an optical microstructure detection result of the to-be-detected sample based on each sample image. According to the method, the product does not need to be damaged, a high-cost scanning electron microscope or an atomic force microscope does not need to be used for scanning the product, the detection of the optical microstructure of the product can be realized only by acquiring the sample images of the to-be-detected sample meeting the optical microstructure detection conditions at different inclination angles, and the detection cost is reduced.

Description

Technical Field

[0001] This application belongs to the field of optical technology, and in particular relates to an optical microstructure detection method, device, terminal equipment and program product. Background Technology

[0002] In practical applications, optical microstructures, also known as optical micro / nanostructures, refer to periodic or non-periodic geometric structures with characteristic dimensions ranging from nanometers to micrometers (typically 10 nanometers to 10 micrometers). Their scale is close to or smaller than the wavelength of light (visible light wavelength is approximately 400-760 nanometers), allowing for precise manipulation of the light field through the wave properties of light (such as diffraction, interference, and surface plasmon resonance). Therefore, to achieve precise control of the light field, it is necessary to inspect the integrity of the optical microstructures within the product.

[0003] However, existing technologies typically require cutting the product and then examining its surface morphology using scanning electron microscopy (SEM) or atomic force microscopy (AFM). Clearly, these technologies damage the product. Furthermore, the equipment required to visualize nanoscale microstructures using SEM or AFM is prohibitively expensive, resulting in excessively high testing costs. Summary of the Invention

[0004] This application provides an optical microstructure detection method, apparatus, terminal equipment, and program product to solve the problems of existing technologies that require product destruction and have excessively high detection costs.

[0005] In a first aspect, embodiments of this application provide an optical microstructure detection method, including:

[0006] The environmental information of the area where the sample to be tested is located, the first position information of the sample to be tested, and the second position information of the light source are obtained.

[0007] If the environmental information, the first location information, and the second location information meet the optical microstructure detection conditions, then control the light source to emit light towards the sample to be tested;

[0008] Acquire sample images of the sample under test at various tilt angles;

[0009] Based on the images of each sample, the optical microstructure detection results of the sample to be tested are determined.

[0010] Optionally, if the environmental information, the first location information, and the second location information meet the optical microstructure detection conditions, then controlling the light source to emit light towards the sample under test includes:

[0011] If the environmental information is a darkroom environment, and the first position information and the second position information constitute a grazing incidence condition for the light source, then it is determined that the optical microstructure detection conditions are met, and the light source is controlled to emit light towards the sample to be tested.

[0012] Optionally, the first position information includes a first angle between the placement tool on which the sample to be tested is placed and the platform, and the second position information includes a second angle between the light source and the platform.

[0013] Optionally, the grazing incidence condition of the light source refers to the angle between the sample under test and the light source being within the grazing incidence angle range.

[0014] Optionally, the sample to be tested is placed on a black storage tool.

[0015] Optionally, acquiring sample images of the sample under test at various tilt angles includes:

[0016] After the light source emits light onto the sample to be tested, the sample to be tested is controlled to move at each of the tilt angles.

[0017] The camera device is controlled to capture images of the sample under test at various tilt angles, thereby obtaining images of each sample.

[0018] Optionally, determining the optical microstructure detection result of the sample under test based on each of the sample images includes:

[0019] If rainbow patterns are present in all of the sample images, and the positions of the rainbow patterns meet the set conditions, then the optical microstructure detection result is determined to be structurally intact.

[0020] If no rainbow pattern is present in any sample image, and / or the position of the rainbow pattern does not meet the set conditions, then the optical microstructure detection result is determined to be structurally incomplete.

[0021] Secondly, embodiments of this application provide an optical microstructure detection device, comprising:

[0022] The first acquisition unit is used to acquire environmental information of the area where the sample to be tested is located, first position information of the sample to be tested, and second position information of the light source.

[0023] The first control unit is configured to control the light source to emit light toward the sample under test if the environmental information, the first position information, and the second position information meet the optical microstructure detection conditions.

[0024] The second acquisition unit is used to acquire sample images of the sample to be tested at various tilt angles;

[0025] The first determining unit is used to determine the optical microstructure detection result of the sample to be tested based on each of the sample images.

[0026] Thirdly, embodiments of this application provide a terminal device, including: a memory, a processor, and a computer program stored in the memory and executable on the processor, wherein the processor executes the computer program to implement the optical microstructure detection method as described in any one of the first aspects above.

[0027] Fourthly, embodiments of this application provide a computer-readable storage medium storing a computer program that, when executed by a processor, implements the optical microstructure detection method as described in any one of the first aspects above.

[0028] Fifthly, embodiments of this application provide a computer program product that, when run on a terminal device, enables the terminal device to execute the optical microstructure detection method described in any one of the first aspects.

[0029] The beneficial effects of the embodiments in this application compared with the prior art are:

[0030] This application provides an optical microstructure detection method. It acquires environmental information of the area where the sample is located, first position information of the sample, and second position information of the light source. If the environmental information, first position information, and second position information meet the optical microstructure detection conditions, the light source is controlled to emit light towards the sample. Sample images of the sample at various tilt angles are acquired. Based on these images, the optical microstructure detection result of the sample is determined. In practical applications, optical microstructures in the sample are prone to reflection and diffraction under light source illumination. Furthermore, through structural reflection or diffraction, the sample can exhibit rainbow patterns at certain angles. Therefore, this application eliminates the need to damage the product or use expensive scanning electron microscopes or atomic force microscopes. It only requires acquiring sample images of the sample at various tilt angles that meet the optical microstructure detection conditions to detect the product's optical microstructure, thus reducing detection costs. Attached Figure Description

[0031] To more clearly illustrate the technical solutions in the embodiments of this application, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0032] Figure 1This is a structural diagram of an optical microstructure detection system provided in an embodiment of this application;

[0033] Figure 2 This is a schematic diagram of a scene corresponding to the optical microstructure detection system provided in one embodiment of this application;

[0034] Figure 3 This is a flowchart illustrating the implementation of an optical microstructure detection method according to another embodiment of this application;

[0035] Figure 4 This is a schematic diagram of the structure of an optical microstructure detection device provided in an embodiment of this application;

[0036] Figure 5 This is a schematic diagram of the structure of a terminal device provided in an embodiment of this application. Detailed Implementation

[0037] In the following description, specific details such as particular system architectures and techniques are set forth for illustrative purposes and not for limitation, in order to provide a thorough understanding of the embodiments of this application. However, those skilled in the art will understand that this application may also be implemented in other embodiments without these specific details. In other instances, detailed descriptions of well-known systems, apparatuses, circuits, and methods have been omitted so as not to obscure the description of this application with unnecessary detail.

[0038] It should be understood that, when used in this application specification and the appended claims, the term "comprising" indicates the presence of the described features, integrals, steps, operations, elements and / or components, but does not exclude the presence or addition of one or more other features, integrals, steps, operations, elements, components and / or a collection thereof.

[0039] It should also be understood that the term “and / or” as used in this application specification and the appended claims means any combination of one or more of the associated listed items and all possible combinations, and includes such combinations.

[0040] As used in this application specification and the appended claims, the term "if" may be interpreted, depending on the context, as "when," "once," "in response to determination," or "in response to detection." Similarly, the phrase "if determined" or "if detected [the described condition or event]" may be interpreted, depending on the context, as meaning "once determined," "in response to determination," "once detected [the described condition or event]," or "in response to detection [the described condition or event]."

[0041] Furthermore, in the description of this application and the appended claims, the terms "first," "second," "third," etc., are used only to distinguish descriptions and should not be construed as indicating or implying relative importance.

[0042] References to "one embodiment" or "some embodiments" as described in this specification mean that one or more embodiments of this application include a specific feature, structure, or characteristic described in connection with that embodiment. Therefore, the phrases "in one embodiment," "in some embodiments," "in other embodiments," "in still other embodiments," etc., appearing in different parts of this specification do not necessarily refer to the same embodiment, but rather mean "one or more, but not all, embodiments," unless otherwise specifically emphasized. The terms "comprising," "including," "having," and variations thereof mean "including but not limited to," unless otherwise specifically emphasized.

[0043] In practical applications, optical microstructures, also known as optical micro / nanostructures, refer to periodic or non-periodic geometric structures with characteristic dimensions ranging from nanometers to micrometers (typically 10 nanometers to 10 micrometers). Their scale is close to or smaller than the wavelength of light (visible light wavelength is approximately 400-760 nanometers), allowing for precise manipulation of the light field through the wave properties of light (such as diffraction, interference, and surface plasmon resonance). Therefore, to achieve precise control of the light field, it is necessary to inspect the integrity of the optical microstructures within the product.

[0044] However, existing technologies typically require cutting the product and then examining its surface morphology using scanning electron microscopy (SEM) or atomic force microscopy (AFM). Clearly, these technologies damage the product. Furthermore, the equipment required to visualize nanoscale microstructures using SEM or AFM is prohibitively expensive, resulting in excessively high testing costs.

[0045] Therefore, this application provides an optical microstructure detection method that does not require damaging the product and does not require using high-cost scanning electron microscopes or atomic force microscopes to scan the product. It only requires acquiring sample images of the test sample at various tilt angles that meet the optical microstructure detection conditions to realize the detection of the product's optical microstructure, thereby reducing the detection cost.

[0046] Please see Figure 1 , Figure 1 This is a schematic diagram of the structure of an optical microstructure detection system provided in one embodiment of this application. Figure 1 As shown, the optical microstructure detection system includes: a terminal device 10, a camera device 20, a light source 30, a placement tool 40, and a sample to be tested 50. The terminal device 10 is communicatively connected to the camera device 20. This communication connection includes, but is not limited to, wired and wireless communication connections.

[0047] It should be noted that the camera device 20, the light source 30, and the object placement tool 40 are all placed on the platform.

[0048] In this embodiment, the camera device 20 can be parallel to the platform and located in front of the sample 50 to be tested, so as to capture images of the sample.

[0049] The placement tool 40 is used to place the sample to be tested 50. The sample to be tested 50 can be any optical thin film substrate with optical microstructure.

[0050] It should be noted that the terminal device 10 can control the movement of the storage tool 40 through the storage controller (not shown in the figure).

[0051] In practical applications, black can absorb ambient light and scattered light from the light source. Therefore, in one embodiment of this application, the placement tool 40 can be a black placement tool, which can not only prevent reflections from the surface of non-samples from entering the camera device 20, but also absorb stray light to avoid secondary reflections on the surface of the sample.

[0052] In one embodiment of this application, to facilitate the imaging device 20 in photographing the sample 50 under test, the placement tool 40 can be placed on the platform at a first preset tilt angle. The first preset tilt angle can be determined according to actual needs and is not limited here. For example, the first preset tilt angle can be any angle within [10°, 20°].

[0053] In this embodiment, the light source 30 is located above and behind the sample 50 to irradiate the sample 50.

[0054] It should be noted that the sample 50 to be tested is located between the camera device 20 and the light source 30.

[0055] In practical applications, the optical microstructures in the sample under test are prone to reflection and diffraction under illumination by a light source. Furthermore, through structural reflection or diffraction, the sample can exhibit rainbow-like patterns at certain angles. Therefore, in one embodiment of this application, to achieve accurate detection of the optical microstructure of the sample under test, the light source 30 can illuminate the sample 50 at a second predetermined tilt angle, so that the angle between the sample 50 and the light source 30 is within the grazing incidence angle range. Both the second predetermined tilt angle and the grazing incidence angle range can be determined according to actual needs and are not limited here.

[0056] Grazing incidence refers to light rays (or particle beams) incident at an angle very close to parallel to the sample surface (incident angle θ is close to 90°, usually θ < 10°), and its essence is to achieve specific physical effects by adjusting the incident angle.

[0057] For example, the grazing incidence angle range can be [5°, 10°].

[0058] In one embodiment of this application, please refer to the following: Figure 2 , Figure 2 This is a schematic diagram of a scene corresponding to an embodiment of the optical microstructure detection system provided in this application. For example... Figure 2 As shown, the second set tilt angle can be determined based on the range of grazing incidence angle and the first set tilt angle. For example, assuming the first set tilt angle is any angle in [10°, 20°] and the range of grazing incidence angle is [5°, 10°), then the second set tilt angle can be any angle in [15°, 30°].

[0059] Please see Figure 3 , Figure 3 This is a flowchart illustrating the implementation of an optical microstructure detection method according to an embodiment of this application. In this embodiment, the execution subject of the optical microstructure detection method is a terminal device. The terminal device includes, but is not limited to, devices such as laptops, desktop computers, and computers.

[0060] like Figure 2 As shown, an embodiment of the optical microstructure detection method provided in this application may include steps S101 to S104, which are described in detail below:

[0061] In S101, environmental information of the area where the sample to be tested is located, first position information of the sample to be tested, and second position information of the light source are obtained.

[0062] In this embodiment of the application, the environmental information of the area where the sample to be tested is located is used to describe whether the area where the sample to be tested is located is in a darkroom environment.

[0063] In practical applications, a darkroom refers to a special space that controls the ambient light intensity to an extremely low level (usually <0.1 lux, close to the moonlight environment) through physical isolation and optical shielding. Its essence is to achieve high-sensitivity optical detection by eliminating stray light interference.

[0064] The first positional information includes a first angle between the light source and the platform where the sample to be tested is located. The second positional information includes a second angle between the tool on which the sample to be tested is placed and the platform.

[0065] In this embodiment, after obtaining the environmental information of the area where the sample to be tested is located, the first position information of the sample to be tested, and the second position information of the light source, the terminal device can detect whether the environmental information, the first position information, and the second position information meet the optical microstructure detection conditions. The optical microstructure detection conditions can be determined according to actual needs and are not limited here.

[0066] In some possible embodiments, the optical microstructure detection conditions include: the area where the sample to be tested is located is in a darkroom environment, and the first position information and the second position information constitute grazing incidence conditions of the light source.

[0067] In some other possible embodiments, the grazing incidence condition refers to the angle between the sample under test and the light source being within the grazing incidence angle range.

[0068] In one embodiment of this application, when the terminal device detects that the environmental information, the first location information, and the second location information meet the optical microstructure detection conditions, it can execute steps S102 to S104.

[0069] In another embodiment of this application, when the terminal device detects that the environmental information, or the first location information, or the second location information does not meet the optical microstructure detection conditions, it indicates that optical microstructure detection of the sample under test cannot be performed at this time. Therefore, the terminal device can output a prompt message indicating that optical microstructure detection of the sample under test cannot be performed.

[0070] In S102, if the environmental information, the first position information, and the second position information meet the optical microstructure detection conditions, the light source is controlled to emit light toward the sample to be tested.

[0071] In this embodiment of the application, when the terminal device detects that the environmental information, the first location information, and the second location information meet the optical microstructure detection conditions, it indicates that optical microstructure detection of the sample to be tested can be performed at this time. Therefore, the terminal device can control the light source to emit light towards the sample to be tested.

[0072] In one embodiment of this application, in conjunction with S101, the terminal device detects that the environmental information, the first position information, and the second position information meet the optical microstructure detection conditions. Specifically, the terminal device detects that the environmental information is a darkroom environment, and the first position information and the second position information constitute the grazing incidence condition of the light source.

[0073] In S103, sample images of the sample to be tested at various tilt angles are acquired.

[0074] In this embodiment of the application, in order to achieve comprehensive detection of the optical microstructure in the sample under test, the terminal device can acquire sample images of the sample under test at various tilt angles. The various tilt angles can be determined according to actual needs and are not limited here.

[0075] It is understandable that the various tilt angles mentioned above can be the tilt angles between the tool holding the sample and the platform.

[0076] It should be noted that the various tilt angles mentioned above can be determined based on the first position information of the sample under test and the second position information of the light source.

[0077] Specifically, combining Figure 1 and Figure 2 In step S101, when the first position information includes the first angle between the placement tool on which the sample to be tested is placed and the platform, and the second position information includes the second angle between the light source and the platform, the minimum value among the above different tilt angles can be determined according to the lower limit of the range of the first set tilt angle, and the maximum value among the above different tilt angles can be determined according to the upper limit of the range of the first set tilt angle.

[0078] In some possible embodiments, combined Figure 1 and Figure 2 The various tilt angles mentioned above include, but are not limited to, 10°, 15° and 20°.

[0079] It should be noted that when the sample under test is at different tilt angles, the first position information of the sample under test and the second position information of the light source still meet the optical microstructure detection conditions.

[0080] In some possible embodiments, when the sample under test is at different tilt angles, the first position information of the sample under test and the second position information of the light source still constitute the grazing incidence condition of the light source.

[0081] In one embodiment of this application, the terminal device may implement step S103 according to the following steps, as detailed below:

[0082] After the light source emits light onto the sample to be tested, the sample to be tested is controlled to move at each of the tilt angles.

[0083] The camera device is controlled to capture images of the sample under test at various tilt angles, thereby obtaining images of each sample.

[0084] In this embodiment, after the light source emits light onto the sample to be tested, the terminal device can control the sample to be tested to move at various tilt angles.

[0085] It is understandable that the terminal device controls the movement of the sample under test at various tilt angles as follows: the terminal device uses the contact part between the sample under test and the platform as a fulcrum to control the movement of the sample under test so that the angle between the sample under test and the platform is the aforementioned tilt angle.

[0086] In this embodiment, after each time the terminal device controls the movement of the sample to be tested, that is, after the angle between the sample to be tested and the platform is any one of the above tilt angles, the terminal device can control the camera device to take a picture of the sample to be tested at any tilt angle, so as to obtain a sample image of the sample to be tested at any tilt angle.

[0087] Based on this, the terminal device can obtain sample images of the sample under test at various tilt angles.

[0088] In some possible embodiments, since the sample to be tested is placed on the placement tool, the terminal device controls the sample to be tested to move at various tilt angles by using the contact part between the placement tool and the platform as a fulcrum, so that the angle between the placement tool and the platform, that is, the angle between the sample to be tested and the platform, is the aforementioned tilt angle.

[0089] In S104, the optical microstructure detection result of the sample to be tested is determined based on each of the sample images.

[0090] It should be noted that the results of optical microstructure detection are used to describe the integrity of the optical microstructure in the sample under test. The results of optical microstructure detection include, but are not limited to, structural integrity and structural incompleteness.

[0091] It is understandable that the integrity of the optical microstructure in the sample to be tested specifically refers to the presence of rainbow patterns at various locations on the sample to be tested.

[0092] In this embodiment, since the sample under test can display rainbow patterns at different positions when it is at different tilt angles, the terminal device can input images of each sample into the optical microstructure detection model for processing to obtain the optical microstructure detection results of the sample under test in order to determine the integrity of the optical microstructure in the sample under test. The optical microstructure detection model is trained from a pre-built neural network model.

[0093] It should be noted that the optical microstructure detection model can be obtained by training a pre-built neural network model based on a preset sample set. Each sample data point in the preset sample set includes sample information (i.e., sample images at different tilt angles) and the corresponding optical microstructure detection result. When training the pre-built neural network model, the sample information from each sample data point is used as the input to the neural network model, and the corresponding optical microstructure detection result is used as the output. Through training, the neural network model can learn the correspondence between all possible sample information and the optical microstructure detection results. The trained neural network model then becomes the optical microstructure detection model.

[0094] In one embodiment of this application, the terminal device can also sequentially detect whether there are rainbow patterns in each sample image, and whether the positions of all rainbow patterns meet the set conditions.

[0095] In some possible embodiments, the setting condition may be that all positions of the rainbow pattern have covered the entire surface of the sample under test.

[0096] In this embodiment, when the terminal device detects that rainbow patterns exist in each sample image and the positions of the rainbow patterns meet the set conditions, it indicates that the positions of all rainbow patterns have covered the entire surface of the sample to be tested. In other words, there is a complete optical microstructure in the sample to be tested. Therefore, the terminal device can determine that the optical microstructure detection result is structurally complete.

[0097] If the terminal device detects that there is no rainbow pattern in any sample image and / or the position of the rainbow pattern does not meet the set conditions, it means that the position of the rainbow pattern in the sample does not cover the entire surface of the sample. In other words, there is no complete optical microstructure in the sample. Therefore, the terminal device can determine that the optical microstructure detection result is that the structure is incomplete.

[0098] As can be seen from the above, the optical microstructure detection method provided in this application acquires environmental information of the area where the sample to be tested is located, first position information of the sample to be tested, and second position information of the light source; if the environmental information, first position information, and second position information meet the optical microstructure detection conditions, the light source is controlled to emit light towards the sample to be tested; sample images of the sample to be tested at various tilt angles are acquired; and based on each sample image, the optical microstructure detection result of the sample to be tested is determined. In practical applications, the optical microstructures in the sample to be tested are prone to reflection and diffraction under light source illumination. Furthermore, through structural reflection or diffraction, the sample to be tested can exhibit rainbow patterns at certain angles. Therefore, this application does not require damaging the product or using expensive scanning electron microscopes or atomic force microscopes to scan the product. It only requires acquiring sample images of the sample to be tested at various tilt angles that meet the optical microstructure detection conditions to achieve the detection of the product's optical microstructure, thus reducing detection costs.

[0099] It should be understood that the sequence number of each step in the above embodiments does not imply the order of execution. The execution order of each process should be determined by its function and internal logic, and should not constitute any limitation on the implementation process of the embodiments of this application.

[0100] Corresponding to the optical microstructure detection method described in the above embodiments, Figure 4A schematic diagram of an optical microstructure detection device according to an embodiment of this application is shown. For ease of explanation, only the parts relevant to the embodiment of this application are shown. (Refer to...) Figure 4 The optical microstructure detection device 400 includes: a first acquisition unit 41, a first control unit 42, a second acquisition unit 43, and a first determination unit 44. Wherein:

[0101] The first acquisition unit 41 is used to acquire environmental information of the area where the sample to be tested is located, the first position information of the sample to be tested, and the second position information of the light source.

[0102] The first control unit 42 is used to control the light source to emit light onto the sample under test if the environmental information, the first position information, and the second position information meet the optical microstructure detection conditions.

[0103] The second acquisition unit 43 is used to acquire sample images of the sample to be tested at various tilt angles.

[0104] The first determining unit 44 is used to determine the optical microstructure detection result of the sample to be tested based on the images of each of the samples.

[0105] In one embodiment of this application, the first control unit 42 specifically includes: a second control unit. Wherein:

[0106] The second control unit is used to determine that the optical microstructure detection conditions are met if the environmental information is a darkroom environment and the first position information and the second position information constitute grazing incidence conditions of the light source, and to control the light source to emit light to the sample to be tested.

[0107] In one embodiment of this application, the first position information includes a first angle between the placement tool on which the sample to be tested is placed and the platform, and the second position information includes a second angle between the light source and the platform.

[0108] In one embodiment of this application, the grazing incidence condition of the light source refers to the angle between the sample to be tested and the light source being within the grazing incidence angle range.

[0109] In one embodiment of this application, the sample to be tested is placed on a black storage tool.

[0110] In one embodiment of this application, the second acquisition unit 43 specifically includes: a third control unit and an imaging unit. Wherein:

[0111] The third control unit is used to control the sample to be tested to move at various tilt angles after the light source emits light towards the sample to be tested.

[0112] The imaging unit is used to control the camera device to capture images of the sample to be tested at various tilt angles, thereby obtaining images of each sample.

[0113] In one embodiment of this application, the first determining unit 44 specifically includes: a second determining unit and a third determining unit. Wherein:

[0114] The second determining unit is used to determine that the optical microstructure detection result is structurally intact if rainbow patterns exist in all of the sample images and the positions of the rainbow patterns meet the set conditions.

[0115] The third determining unit is used to determine that the optical microstructure detection result is incomplete if there is no rainbow pattern in any sample image and / or the position of the rainbow pattern does not meet the set conditions.

[0116] It should be noted that the information interaction and execution process between the above-mentioned devices / units are based on the same concept as the method embodiments of this application. For details on their specific functions and technical effects, please refer to the method embodiments section, and they will not be repeated here.

[0117] Those skilled in the art will clearly understand that, for the sake of convenience and brevity, the above-described division of functional units and modules is merely an example. In practical applications, the above functions can be assigned to different functional units and modules as needed, that is, the internal structure of the device can be divided into different functional units or modules to complete all or part of the functions described above. The functional units and modules in the embodiments can be integrated into one processing unit, or each unit can exist physically separately, or two or more units can be integrated into one unit. The integrated unit can be implemented in hardware or as a software functional unit. Furthermore, the specific names of the functional units and modules are only for easy differentiation and are not intended to limit the scope of protection of this application. The specific working process of the units and modules in the above system can be referred to the corresponding process in the foregoing method embodiments, and will not be repeated here.

[0118] Figure 5 This is a schematic diagram of the structure of a terminal device provided in an embodiment of this application. Figure 5 As shown, the terminal device 5 in this embodiment includes: at least one processor 50 ( Figure 5 (Only one is shown in the diagram), memory 51, and computer program 52 stored in the memory 51 and executable on the at least one processor 50, wherein the processor 50 executes the computer program 52 to implement the steps in any of the above-described embodiments of the optical microstructure detection methods.

[0119] The terminal device 5 may include, but is not limited to, a processor 50 and a memory 51. Those skilled in the art will understand that... Figure 5 This is merely an example of terminal device 5 and does not constitute a limitation on terminal device 5. It may include more or fewer components than shown in the figure, or combine certain components, or different components, such as input / output devices, network access devices, etc.

[0120] The processor 50 may be a Central Processing Unit (CPU), or it may be other general-purpose processors, digital signal processors (DSPs), application-specific integrated circuits (ASICs), field-programmable gate arrays (FPGAs), or other programmable logic devices, discrete gate or transistor logic devices, discrete hardware components, etc. A general-purpose processor may be a microprocessor or any conventional processor.

[0121] In some embodiments, the memory 51 may be an internal storage unit of the terminal device 5, such as the RAM of the terminal device 5. In other embodiments, the memory 51 may be an external storage device of the terminal device 5, such as a plug-in hard drive, smart media card (SMC), secure digital (SD) card, flash card, etc., equipped on the terminal device 5. Furthermore, the memory 51 may include both internal and external storage units of the terminal device 5. The memory 51 is used to store the operating system, applications, bootloader, data, and other programs, such as the program code of the computer program. The memory 51 can also be used to temporarily store data that has been output or will be output.

[0122] This application also provides a computer-readable storage medium storing a computer program that, when executed by a processor, implements the steps described in the various method embodiments above.

[0123] This application provides a computer program product that, when run on a terminal device, enables the terminal device to implement the steps described in the various method embodiments above.

[0124] If the integrated unit is implemented as a software functional unit and sold or used as an independent product, it can be stored in a computer-readable storage medium. Based on this understanding, all or part of the processes in the methods of the above embodiments of this application can be implemented by a computer program instructing related hardware. The computer program can be stored in a computer-readable storage medium, and when executed by a processor, it can implement the steps of the various method embodiments described above. The computer program includes computer program code, which can be in the form of source code, object code, executable files, or certain intermediate forms. The computer-readable medium can include at least: any entity or device capable of carrying computer program code to a terminal device, a recording medium, a computer memory, a read-only memory (ROM), a random access memory (RAM), an electrical carrier signal, a telecommunication signal, and a software distribution medium. Examples include USB flash drives, portable hard drives, magnetic disks, or optical disks. In some jurisdictions, according to legislation and patent practice, computer-readable media cannot be electrical carrier signals or telecommunication signals.

[0125] In the above embodiments, the descriptions of each embodiment have different focuses. For parts that are not described in detail or recorded in a certain embodiment, please refer to the relevant descriptions of other embodiments.

[0126] The above-described embodiments are only used to illustrate the technical solutions of this application, and are not intended to limit them. Although this application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of this application, and should all be included within the protection scope of this application.

Claims

1. A method for detecting optical microstructures, characterized in that, include: The environmental information of the area where the sample to be tested is located, the first position information of the sample to be tested, and the second position information of the light source are obtained. If the environmental information, the first location information, and the second location information meet the optical microstructure detection conditions, then control the light source to emit light towards the sample to be tested; Acquire sample images of the sample under test at various tilt angles; Based on the images of each sample, the optical microstructure detection results of the sample to be tested are determined.

2. The optical microstructure detection method as described in claim 1, characterized in that, If the environmental information, the first location information, and the second location information meet the optical microstructure detection conditions, then controlling the light source to emit light towards the sample under test includes: If the environmental information is a darkroom environment, and the first position information and the second position information constitute a grazing incidence condition for the light source, then it is determined that the optical microstructure detection conditions are met, and the light source is controlled to emit light towards the sample to be tested.

3. The optical microstructure detection method as described in claim 2, characterized in that, The first position information includes a first angle between the placement tool on which the sample to be tested is placed and the platform, and the second position information includes a second angle between the light source and the platform.

4. The optical microstructure detection method as described in claim 2, characterized in that, The grazing incidence condition of the light source refers to the angle between the sample under test and the light source being within the grazing incidence angle range.

5. The optical microstructure detection method as described in claim 1, characterized in that, The sample to be tested was placed on a black storage tool.

6. The optical microstructure detection method as described in claim 1, characterized in that, The process of acquiring sample images of the sample under test at various tilt angles includes: After the light source emits light onto the sample to be tested, the sample to be tested is controlled to move at each of the tilt angles. The camera device is controlled to capture images of the sample under test at various tilt angles, thereby obtaining images of each sample.

7. The optical microstructure detection method according to any one of claims 1-6, characterized in that, The step of determining the optical microstructure detection result of the sample under test based on each of the sample images includes: If rainbow patterns are present in all of the sample images, and the positions of the rainbow patterns meet the set conditions, then the optical microstructure detection result is determined to be structurally intact. If no rainbow pattern is present in any sample image, and / or the position of the rainbow pattern does not meet the set conditions, then the optical microstructure detection result is determined to be structurally incomplete.

8. An optical microstructure detection device, characterized in that, include: The first acquisition unit is used to acquire environmental information of the area where the sample to be tested is located, first position information of the sample to be tested, and second position information of the light source. The first control unit is configured to control the light source to emit light toward the sample under test if the environmental information, the first position information, and the second position information meet the optical microstructure detection conditions. The second acquisition unit is used to acquire sample images of the sample to be tested at various tilt angles; The first determining unit is used to determine the optical microstructure detection result of the sample to be tested based on each of the sample images.

9. A terminal device, comprising a memory, a processor, and a computer program stored in the memory and executable on the processor, characterized in that, When the processor executes the computer program, it implements the optical microstructure detection method as described in any one of claims 1 to 7.

10. A computer program product, characterized in that, It includes a computer program that, when run, implements the optical microstructure detection method as described in any one of claims 1 to 7.

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