Coating turnover device

Abstract

The invention discloses a coating turnover device, and relates to the technical field of coating devices, the coating turnover device comprises: a bearing plate, one end of which is fixedly provided with a connecting rod; a clamping block and a telescopic first limiting part are fixedly arranged on the connecting rod; the first mounting plate and the second mounting plate are fixedly connected, and the two ends of the bearing plate are rotationally connected with the first mounting plate and the second mounting plate correspondingly; the connecting rod penetrates through the first mounting plate, and the clamping block and the first limiting part are located on the side, away from the bearing plate, of the first mounting plate; two oppositely arranged second limiting parts are fixedly arranged on one side, deviating from the bearing plate, of the first mounting plate; the driving piece is connected with the first mounting plate and the second mounting plate; the driving rod is detachably and fixedly arranged; in the process that the driving piece drives the first mounting plate and the second mounting plate to rotate around the first axis, the driving rod can be matched with the clamping block so as to drive the clamping block to drive the bearing plate to rotate around the second axis. The coating turnover mechanism can automatically turn over a plurality of workpieces in the coating cavity, so that the working efficiency is improved.

Description

TECHNICAL FIELD

[0001] The present specification relates to the technical field of coating device, in particular to a coating turnover device. BACKGROUND

[0002] Vacuum coating refers to a method of heating metal or non-metallic materials under high vacuum conditions, evaporating and condensing on the surface of the coated part (metal, semiconductor or insulator) to form a thin film. Vacuum coating is an important aspect of vacuum application field, which is based on vacuum technology, uses physical or chemical methods, and absorbs a series of new technologies such as electron beam, molecular beam, ion beam, plasma beam, radio frequency and magnetic control, to provide a new process for thin film preparation for scientific research and actual production. Simply speaking, the method of evaporating or sputtering metal, alloy or compound in vacuum, and condensing and depositing on the object to be coated (called substrate, wafer or base) is called vacuum coating.

[0003] In some practical applications, the front and back surfaces of the workpiece need to be coated. When one side is coated, the workpiece needs to be turned over for coating the other side. The coating chamber can generally accommodate multiple workpieces for coating. If manual turning is used to turn over multiple workpieces, the efficiency is low. SUMMARY

[0004] In view of the deficiencies of the prior art, one object of the present specification is to provide a coating turnover mechanism which can automatically turn over multiple workpieces in the coating chamber and improve work efficiency.

[0005] To achieve the above-mentioned purpose, the present specification provides a coating turnover device, comprising: a bearing plate for placing workpieces, one end of the bearing plate is fixedly provided with a connecting rod; a clamping block and a first limiting part which can be extended and retracted are fixedly provided on the connecting rod; a first mounting plate and a second mounting plate are fixedly connected, the bearing plate is located between the first mounting plate and the second mounting plate, and both ends of the bearing plate are rotatably connected with the first mounting plate and the second mounting plate respectively; the connecting rod is provided through the first mounting plate, and the clamping block and the first limiting part are located on the side of the first mounting plate away from the bearing plate; two second limiting parts which are oppositely arranged are fixedly provided on the side of the first mounting plate away from the bearing plate; when the first limiting part cooperates with the second limiting part, the bearing plate is fixed relative to the first mounting plate; a driving member connected with the first mounting plate and the second mounting plate, for driving the first mounting plate and the second mounting plate to rotate around a first axis; The driving rod is detachably fixed; during the rotation of the first mounting plate and the second mounting plate driven by the driving member, the driving rod can be matched with the clamping block to drive the clamping block to rotate the bearing plate around the second axis; the second axis is parallel to the first axis; the rotation direction of the bearing plate is the same as the rotation direction of the first mounting plate.

[0006] As a preferred embodiment, the driving rod comprises a first rod body and a second rod body arranged adjacent in the circumferential direction; the clamping block is provided with a first clamping hole and a second clamping hole; during the rotation of the first mounting plate and the second mounting plate driven by the driving member, the first rod body is first matched with the first clamping hole, then the clamping block drives the bearing plate to be rotated by a first predetermined angle pushed by the first rod body, subsequently the first rod body leaves the first clamping hole and the second rod body is matched with the second clamping hole, then the clamping block drives the bearing plate to be rotated by a second predetermined angle pushed by the second rod body, and then the second rod body leaves the second clamping hole.

[0007] As a preferred embodiment, the first predetermined angle and the second predetermined angle are both 90°; the extension directions of the first rod body and the second rod body are both parallel to the first axis.

[0008] As a preferred embodiment, the clamping block is provided with two first clamping holes and two second clamping holes, and the first clamping holes and the second clamping holes are arranged adjacent in the circumferential direction; the two first clamping holes are oppositely arranged; the two second clamping holes are oppositely arranged.

[0009] As a preferred embodiment, the first clamping hole has two side walls and a bottom wall, the distance between the two side walls is greater than the diameter of the first rod body, and the lengths of the two side walls are not equal; when the first rod body is matched with the first clamping hole, the first rod body is in contact with the longer side wall of the two side walls.

[0010] As a preferred embodiment, the shape of the second clamping hole is the same as that of the first clamping hole, and the diameter of the second rod body is the same as that of the first rod body; when the second rod body is matched with the second clamping hole, the second rod body is in contact with the longer side wall of the two side walls of the second clamping hole.

[0011] As a preferred embodiment, the number of the bearing plates is multiple, and the multiple bearing plates are continuously arranged in the circumferential direction; the multiple bearing plates share one first mounting plate and one second mounting plate; during the rotation of the first mounting plate and the second mounting plate driven by the driving member, when the second rod body leaves the second clamping hole of one clamping block, the first rod body is matched with the first clamping hole of the clamping block adjacent to the one clamping block.

[0012] As a preferred implementation, the film plating turnover device further comprises a mounting seat, the first mounting plate and the second mounting plate are rotationally connected to the mounting seat, the driving rod is fixedly connected to the mounting seat, the driving rod comprises a first connecting rod connecting the first rod body to the mounting seat and a second connecting rod connecting the second rod body to the mounting seat, the first connecting rod and the second connecting rod are both perpendicular to the first axis in the extension direction, and the first connecting rod and the second connecting rod are staggered in the direction of the first axis.

[0013] As a preferred implementation, the first limiting part is located between the clamping block and the first mounting plate, two first limiting parts are arranged opposite to each other on the connecting rod, two adjacent clamping blocks share one second limiting part, the second limiting part is provided with an arc-shaped clamping groove, and the end of the first limiting part away from the clamping block is provided with a retractable curved block, and the clamping groove is used for accommodating the curved block.

[0014] As a preferred implementation, the bearing plate is provided with an opening for fixing the workpiece, and the opening is arranged through in the direction perpendicular to the first axis. Advantages

[0015] The film plating turnover mechanism provided by the embodiment comprises a bearing plate, a first mounting plate, a second mounting plate, a driving member and a driving rod, the workpiece is placed on the bearing plate, the bearing plate is arranged between the first mounting plate and the second mounting plate, the driving rod remains stationary, the first mounting plate and the second mounting plate are driven to rotate around the first axis by the driving member, the clamping block on the bearing plate cooperates with the driving rod, the clamping block drives the bearing plate to rotate around the second axis, and the turnover of the bearing plate is realized, so that the plurality of workpieces in the film plating cavity can be automatically turned over, and the work efficiency is improved.

[0016] In the film plating process, the first mounting plate and the second mounting plate should be rotated, so that the bearing plates at different positions in the circumferential direction are sequentially faced with the film plating source to realize film plating. The part of the bearing plate beyond the first mounting plate and the side of the first mounting plate away from the bearing plate are specially designed, and the detachable driving rod is added, so that the rapid automatic turnover of the bearing plate is realized. When both sides of the workpiece in the film plating cavity need to be plated, the driving rod can be installed to the corresponding position in the film plating cavity, so that the plurality of workpieces in the film plating cavity can be automatically turned over; when only one side of the workpiece in the film plating cavity needs to be plated, the driving rod can be removed from the corresponding position in the film plating cavity, and the bearing plate is not turned over in the film plating process. Therefore, the film plating turnover device is widely applicable, and can be applied to the working condition that only one side of the workpiece needs to be plated, and can also be applied to the working condition that both sides of the workpiece need to be plated.

[0017] The particular embodiments of the application herein described and demonstrated in the drawings are illustrative of the principles of the application and the manner in which the principles of the application can be employed. It is understood that the scope of the application is not limited to the scope of the embodiments.

[0018] Features described and / or illustrated in relation to one embodiment can be used in one or more other embodiments in the same or similar way, in combination with or in place of features on other embodiments.

[0019] It should be emphasized that the term "comprises / comprising" when used in this specification is taken to mean the presence of stated features, integers, steps or components but does not preclude the presence or addition of one or more other features, integers, steps, components or groups thereof. BRIEF DESCRIPTION OF DRAWINGS

[0020] In order to more clearly illustrate the technical solutions of the embodiments of the present application or the prior art, the drawings needed to be used in the description of the embodiments or the prior art will be briefly introduced. Obviously, the drawings in the following description only constitute some embodiments of the present application, and for those skilled in the art, other drawings can also be obtained from these drawings without creative labor.

[0021] Figure 1 Fig. 1 is a perspective view of a coating and turning device provided in the present embodiment; Figure 2 Fig. 2 is a top view of the coating and turning device of Fig. 1; Figure 1 Figure 3 Fig. 3 is an enlarged view of the position A in Fig. 2; Figure 1 Figure 4 Fig. 4 is a perspective view of a bearing plate provided in the present embodiment; Figure 5 Fig. 5 is a perspective view of a clamping block provided in the present embodiment; Figures 6 to 8 Fig. 6 is a schematic view of the turning process of the coating and turning device; Figure 6 Fig. 7 is a top view of the bearing plate of Fig. 4, which is not turned, and is 0°; Figure 7 Fig. 8 is a top view of the bearing plate of Fig. 4, which is turned 90°; Figure 8 Fig. 9 is a top view of the bearing plate of Fig. 4, which is turned 180°.

[0022] KEY ​​1, bearing plate; 11, connecting rod; 12, clamping block; 121, first clamping hole; 1211, side wall; 1212, bottom wall; 122, second clamping hole; 13, first limiting portion; 131, curved block; 14, opening; 2, first mounting plate; 21, second limiting portion; 211, clamping groove; 3, second mounting plate; 4, driving rod; 41, first rod body; 42, second rod body; 43, first connecting rod; 44, second connecting rod; 5, mounting seat; 51, base; 52, support column; 61, first connecting plate; 62, second connecting plate; 7, first axis; 8, second axis. DETAILED DESCRIPTION

[0023] For those skilled in the technical field, the technical solutions in the present application will be better understood. The technical solutions in the embodiments of the present application will be described clearly and completely below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor should belong to the scope of protection of the present application.

[0024] It should be noted that when an element is referred to as being "disposed on" another element, it can be directly on the other element or there can be another element in between. When an element is referred to as being "connected" to another element, it can be directly connected to the other element or there can be another element in between. The terms "vertical", "horizontal", "left", "right", and similar expressions used herein are for illustrative purposes only and are not intended to be limiting.

[0025] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs. The terminology used in the description of the application herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the application. As used herein, the term "and / or" includes any and all combinations of one or more of the associated listed items.

[0026] Please refer to Figures 1 to 8 The embodiment of the present application provides a film plating turnover device, which comprises a bearing plate 1, a first mounting plate 2, a second mounting plate 3, a driving member (not shown in the figure) and a driving rod 4.

[0027] The bearing plate 1 is used for placing workpieces. One end of the bearing plate 1 is fixedly provided with a connecting rod 11. The connecting rod 11 is fixedly provided with a clamping block 12 and a telescopic first limiting part 13. The first mounting plate 2 and the second mounting plate 3 are fixedly connected. The bearing plate 1 is located between the first mounting plate 2 and the second mounting plate 3, and the two ends of the bearing plate 1 are rotationally connected with the first mounting plate 2 and the second mounting plate 3 respectively. The connecting rod 11 penetrates through the first mounting plate 2, and the clamping block 12 and the first limiting part 13 are located on the side of the first mounting plate 2 away from the bearing plate 1. The side of the first mounting plate 2 away from the bearing plate 1 is fixedly provided with two oppositely arranged second limiting parts 21. When the first limiting part 13 cooperates with the second limiting part 21, the bearing plate 1 is relatively fixed with the first mounting plate 2. A driving member is connected with the first mounting plate 2 and the second mounting plate 3, and is used for driving the first mounting plate 2 and the second mounting plate 3 to rotate around the first axis 7. A driving rod 4 is detachably fixedly arranged. In the process of driving the first mounting plate 2 and the second mounting plate 3 to rotate by the driving member, the driving rod 4 can cooperate with the clamping block 12 to drive the clamping block 12 to drive the bearing plate 1 to rotate around the second axis 8. The second axis 8 is parallel to the first axis 7. The rotation direction of the bearing plate 1 and the rotation direction of the first mounting plate 2 are the same, and both are counterclockwise rotation or both are clockwise rotation.

[0028] The coating turnover mechanism provided by the embodiment is provided with a bearing plate 1, a first mounting plate 2, a second mounting plate 3, a driving member and a driving rod 4. The workpieces are placed on the bearing plate 1, and the bearing plate 1 is arranged between the first mounting plate 2 and the second mounting plate 3. The driving rod 4 remains stationary, the first mounting plate 2 and the second mounting plate 3 are driven to rotate around the first axis 7 by the driving member, so that the clamping block 12 on the bearing plate 1 cooperates with the driving rod 4, thereby driving the clamping block 12 to drive the bearing plate 1 to rotate around the second axis 8, realizing the turnover of the bearing plate 1, thereby automatically turning over multiple workpieces in the coating cavity, improving work efficiency.

[0029] In the coating process, the first mounting plate 2 and the second mounting plate 3 should be rotated, so that the bearing plates 1 at different circumferential positions are sequentially faced with a coating source (such as an evaporation source, a sputtering source, etc.), realizing coating. On this basis, the part of the bearing plate 1 beyond the first mounting plate 2 and the side of the first mounting plate 2 away from the bearing plate 1 are specially designed, and the detachable driving rod 4 is added, which can realize the rapid automatic turnover of the bearing plate 1. When both sides of the workpieces in the coating cavity need to be coated, the driving rod 4 can be installed to the corresponding position in the coating cavity, thereby automatically turning over multiple workpieces in the coating cavity; when only one side of the workpieces in the coating cavity needs to be coated, the driving rod 4 can be removed from the corresponding position in the coating cavity, and the bearing plate 1 is not turned over in the coating process. Therefore, the coating turnover device is widely applicable, and can be applied to the working condition that only one side of the workpiece needs to be coated, and can also be applied to the working condition that both sides of the workpiece need to be coated.

[0030] In the embodiment, the driving rod 4 comprises a first rod body 41 and a second rod body 42 arranged adjacently in the circumferential direction. The clamping block 12 is provided with a first clamping hole 121 and a second clamping hole 122. During the process of driving the first mounting plate 2 and the second mounting plate 3 to rotate by the driving member, the first rod body 41 is first matched with the first clamping hole 121 (as shown in Figure 6 ), then the clamping block 12 drives the carrier plate 1 to be pushed to rotate a first predetermined angle by the first rod body 41, subsequently the first rod body 41 leaves the first clamping hole 121 and the second rod body 42 is matched with the second clamping hole 122 (as shown in Figure 7 ), then the clamping block 12 drives the carrier plate 1 to be pushed to rotate a second predetermined angle by the second rod body 42, and then the second rod body 42 leaves the second clamping hole 122 (as shown in Figure 8 ).

[0031] Preferably, the first predetermined angle and the second predetermined angle are both 90°, so that the carrier plate 1 drives the workpiece to rotate 180° together, realizing the overturning. The extension directions of the first rod body 41 and the second rod body 42 are both parallel to the first axis 7, which can more labor-savingly push the clamping block 12 to rotate.

[0032] As shown in Figure 2 , the clamping block 12 is provided with two first clamping holes 121 and two second clamping holes 122, and the first clamping holes 121 and the second clamping holes 122 are arranged adjacently in the circumferential direction. The two first clamping holes 121 are oppositely arranged, and the two second clamping holes 122 are oppositely arranged, so that after the carrier plate 1 is overturned by 180°, the positions of the other set of first clamping holes 121 and second clamping holes 122 replace the positions of the original set of first clamping holes 121 and second clamping holes 122, preparing for the next overturning.

[0033] Specifically, as shown in Figure 5 , the first clamping hole 121 has two side walls 1211 and a bottom wall 1212, and the distance between the two side walls 1211 is greater than the diameter of the first rod body 41, so as to avoid the first rod body 41 from being stuck in the first clamping hole 121. The lengths of the two side walls 1211 are not equal, and the longer side wall 1211 is used for contacting and being pushed by the first rod body 41, and the shorter side wall 1211 can give way to the arrival of the first rod body 41. When the first rod body 41 is matched with the first clamping hole 121, the first rod body 41 contacts the longer side wall 1211 of the two side walls 1211.

[0034] In order to simplify the structure and reduce the manufacturing cost, the shape of the second clamping hole 122 is the same as that of the first clamping hole 121, and the diameter of the second rod body 42 is the same as that of the first rod body 41. When the second rod body 42 is matched with the second clamping hole 122, the second rod body 42 contacts the longer side wall 1211 of the two side walls 1211 of the second clamping hole 122.

[0035] In the present application, the distance between the first rod body 41 and the second rod body 42 needs to be set according to the distance between the first clamping hole 121 and the second clamping hole 122 on the card block 12 in the circumferential direction, so that the first rod body 41 and the second rod body 42 can smoothly drive the card block 12 to rotate. Specifically, in the circumferential direction with the second axis 8 as the center, the distance between the first clamping hole 121 and the second clamping hole 122 can be calculated as the distance from the center of the first clamping hole 121 to the center of the second clamping hole 122, and is recorded as the first distance; in the circumferential direction with the first axis 7 as the center, the distance between the first rod body 41 and the second rod body 42 can be calculated as the distance from the center of the first rod body 41 to the center of the second rod body 42, and is recorded as the second distance. The second distance is preferably set to be equal to the first distance.

[0036] In the present embodiment, the number of the bearing plates 1 is multiple, and the multiple bearing plates 1 are arranged continuously in the circumferential direction, and Figure 1 、 Figures 6 to 8 In order to show more clearly and concisely, only two bearing plates 1 in the circumferential direction are drawn. In actual application, the number of the bearing plates 1 can be set according to the needs. The multiple bearing plates 1 share one first mounting plate 2 and one second mounting plate 3, and in the coating process, the coating source can be fixedly arranged inside the cylindrical structure surrounded by the multiple bearing plates 1, or can be fixedly arranged outside the cylindrical structure. By driving the first mounting plate 2 and the second mounting plate 3 to rotate by the driving member, the bearing plates 1 at different positions in the circumferential direction can be sequentially faced with the coating source, so as to realize the coating of the same surface of each workpiece.

[0037] As shown in Figure 8 , in the process of driving the first mounting plate 2 and the second mounting plate 3 to rotate by the driving member, when the second rod body 42 leaves the second clamping hole 122 of one card block 12, the first rod body 41 cooperates with the first clamping hole 121 of the card block 12 adjacent to the one card block 12, so that after the turnover of one bearing plate 1 is completed, the turnover of the next bearing plate 1 can be immediately performed, and the process is smooth and has high efficiency.

[0038] In the present embodiment, the coating turnover device further comprises a mounting seat 5, and the first mounting plate 2 and the second mounting plate 3 are rotationally connected to the mounting seat 5. The driving rod 4 is fixedly connected to the mounting seat 5. The driving rod 4 comprises a first connecting rod 43 connecting the first rod body 41 to the mounting seat 5 and a second connecting rod 44 connecting the second rod body 42 to the mounting seat 5. The extension directions of the first connecting rod 43 and the second connecting rod 44 are both perpendicular to the first axis 7, and the first connecting rod 43 and the second connecting rod 44 are arranged staggered in the direction of the first axis 7, so as to ensure the connection strength of the first rod body 41 and the second rod body 42 while avoiding interference.

[0039] Preferably, the mounting base 5 comprises a base 51 and a support column 52 extending along the direction of the first axis 7 and fixedly connected to the base 51. The first mounting plate 2 and the second mounting plate 3 are rotatably connected to the support column 52 through a first connecting plate 61 and a second connecting plate 62 respectively. The first connecting rod 43 and the second connecting rod 44 are detachably fixedly connected to the support column 52 through fasteners such as nuts, and the first connecting rod 43 and the second connecting rod 44 are located above the first connecting plate 61.

[0040] As shown in Figure 3 , the first limiting portion 13 is located between the clamping block 12 and the first mounting plate 2, so that the first limiting portion 13 can cooperate with the second limiting portion 21 located on the first mounting plate 2. The connecting rod 11 is provided with two oppositely arranged first limiting portions 13, and the two first limiting portions 13 cooperate with two second limiting portions 21 respectively, so as to stably fix the bearing plate 1. Adjacent two clamping blocks 12 share one second limiting portion 21. The second limiting portion 21 is provided with an arc-shaped clamping groove 211, and the end of the first limiting portion 13 away from the clamping block 12 is provided with an extendable curved block 131. The clamping groove 211 is used for accommodating the curved block 131, so as to facilitate the bearing plate 1 and the clamping block 12 to switch between the fixed position and the rotating state.

[0041] As shown in Figure 4 , the bearing plate 1 is provided with an opening 14 for fixing a bearing workpiece, and the opening 14 is provided in the direction perpendicular to the first axis 7, so as not to block the two surfaces of the workpiece which need to be plated, and to facilitate the cooperation of the turnover device to plate the workpiece on both sides.

[0042] It should be noted that in the description of the present specification, the terms "first", "second" and the like are only used for the purpose of description and distinguishing similar objects, and there is no prior and posterior order between them, nor can it be understood as indicating or implying relative importance. In addition, in the description of the present specification, unless otherwise stated, the meaning of "a plurality of" is two or more.

[0043] Any numerical values cited in the present disclosure include all values from the lower value to the upper value in increments of one unit, and there is at least a two-unit interval between any lower value and any higher value. For example, if it is stated that the value of a component or process variable (such as temperature, pressure, time, etc.) is from 1 to 90, preferably from 20 to 80, and more preferably from 30 to 70, the purpose is to state that values such as 15 to 85, 22 to 68, 43 to 51, 30 to 32, etc. are also explicitly listed in the specification. For values less than 1, it is appropriate to consider that one unit is 0.0001, 0.001, 0.01, 0.1. These are just examples of what is intended to be explicitly stated in the specification. It can be considered that all possible combinations of numerical values listed between the lowest value and the highest value are explicitly stated in a similar manner in the specification.

[0044] Unless otherwise stated, all ranges include endpoints and all numerical values contained therein are "approximate" means that the value + / - 10% of the stated value. "Approximately" or "about" when used before a quantitative description means that the cited numeric value "falls within" the stated range. Thus, "about 20 to 30" is intended to cover "about 20 to about 30," including at least the stated endpoints.

[0045] All articles and references, including patents and publications, disclosed below are incorporated herein by reference for all purposes. The term "consisting essentially of to describe combinations shall include the elements, ingredients, components or steps identified, and such other elements ingredients, components or steps that do not materially affect the basic and novel characteristics of the combination. The use of the term "comprising" or "including" to describe combinations of elements, ingredients, components or steps herein also is taken to mean that other elements, ingredients, components or steps that do not materially affect the basic and novel characteristics of the combinations are optionally present. The use of the term "or" in the embodiments herein is meant to inclusive and otherwise.

[0046] Plural elements, ingredients, components or steps can be provided by a single integrated element, ingredient, component or step. Alternatively, a single integrated element, ingredient, component or step might be divided into separate plural elements, ingredients, components or steps. To "comprise" or "comprising" means "including principally" and not excluding other not recited elements or method steps. The indefinite articles "a" or "an" preceding an element, ingredient, component or step also means including "one or more" of the element, ingredient, component or step.

[0047] It is understood that the above description is intended to be illustrative and not restrictive. Many embodiments and applications other than the examples provided would be apparent to those of skill in the art upon reading the above description. The scope of the technology should, therefore, be determined not with reference to the above description, but should instead be determined with reference to the appended claims, along with the full scope of equivalents to which such claims are entitled. The disclosures of all articles and references, including patent applications and publications, are incorporated by reference for all purposes. The omission of any aspect of the subject matter disclosed herein does not preclude coverage of that aspect of the subject matter in the claims.

Claims

1. A film-coating inverting device, characterized in that, The utility model provides a workpiece loading device, comprising: a carrier plate for placing a workpiece, one end of the carrier plate is fixedly provided with a connecting rod; the connecting rod is fixedly provided with a clamping block and a first limiting part which can be extended and retracted; a first mounting plate and a second mounting plate are fixedly connected, the carrier plate is located between the first mounting plate and the second mounting plate, and the two ends of the carrier plate are rotatably connected with the first mounting plate and the second mounting plate respectively; the connecting rod is arranged through the first mounting plate, and the clamping block and the first limiting part are located on the side of the first mounting plate away from the carrier plate; the side of the first mounting plate away from the carrier plate is fixedly provided with two oppositely arranged second limiting parts; when the first limiting part cooperates with the second limiting part, the carrier plate is relatively fixed with the first mounting plate; a driving member connected with the first mounting plate and the second mounting plate is used to drive the first mounting plate and the second mounting plate to rotate about a first axis; a driving rod is fixedly arranged in a detachable mode; in the process that the driving member drives the first mounting plate and the second mounting plate to rotate, the driving rod can cooperate with the clamping block to drive the clamping block to drive the carrier plate to rotate about a second axis; the second axis is parallel to the first axis; the rotating direction of the carrier plate is the same as the rotating direction of the first mounting plate.

2. The coating inverting apparatus of claim 1, wherein the driving rod comprises a first rod body and a second rod body which are arranged adjacent in a circumferential direction; the clamping block is provided with a first clamping opening and a second clamping opening; in the process that the driving member drives the first mounting plate and the second mounting plate to rotate, the first rod body first cooperates with the first clamping opening, then the clamping block drives the carrier plate to be pushed to rotate a first predetermined angle by the first rod body, subsequently the first rod body leaves the first clamping opening and the second rod body cooperates with the second clamping opening, then the clamping block drives the carrier plate to be pushed to rotate a second predetermined angle by the second rod body, and then the second rod body leaves the second clamping opening.

3. The coating inverting apparatus of claim 2, wherein the first predetermined angle and the second predetermined angle are both 90 degrees; the extending directions of the first rod body and the second rod body are both parallel to the first axis.

4. The coating inverting apparatus of claim 3, wherein the clamping block is provided with two first clamping openings and two second clamping openings, the first clamping openings and the second clamping openings are arranged adjacent in a circumferential direction; the two first clamping openings are oppositely arranged; the two second clamping openings are oppositely arranged.

5. The coating inverting apparatus of claim 2, wherein the first clamping opening has two side walls and a bottom wall, the distance between the two side walls is greater than the diameter of the first rod body, and the lengths of the two side walls are not equal; when the first rod body cooperates with the first clamping opening, the first rod body contacts the longer side wall of the two side walls.

6. The coating inverting apparatus of claim 5, wherein the shape of the second clamping opening is the same as that of the first clamping opening, the diameter of the second rod body is the same as that of the first rod body; when the second rod body cooperates with the second clamping opening, the second rod body contacts the longer side wall of the two side walls of the second clamping opening.

7. The coating inverting apparatus of claim 2, wherein the number of the carrier plates is multiple, the multiple carrier plates are continuously arranged in a circumferential direction; the multiple carrier plates share one first mounting plate and one second mounting plate; in the process that the driving member drives the first mounting plate and the second mounting plate to rotate, when the second rod body leaves the second clamping opening of one clamping block, the first rod body cooperates with the first clamping opening of one clamping block adjacent to the clamping block.

8. The coating inverting apparatus of claim 2, wherein The film-coated turnover device further comprises a mounting seat, the first mounting plate and the second mounting plate are rotationally connected to the mounting seat, the driving rod is fixedly connected to the mounting seat, the driving rod comprises a first connecting rod connecting the first rod body to the mounting seat and a second connecting rod connecting the second rod body to the mounting seat, the first connecting rod and the second connecting rod are both perpendicular to the first axis in the extension direction, and the first connecting rod and the second connecting rod are staggered in the direction of the first axis.

9. The coating inverting apparatus of claim 1, wherein The first limiting part is located between the clamping block and the first mounting plate, two first limiting parts are oppositely arranged on the connecting rod, two adjacent clamping blocks share one second limiting part, the second limiting part is provided with an arc-shaped clamping groove, one end of the first limiting part away from the clamping block is provided with a retractable curved block, and the clamping groove is used for accommodating the curved block.

10. The coating inverting apparatus of claim 1, wherein The bearing plate is provided with an opening for fixing the workpiece, and the opening is provided in a penetrating manner in the direction perpendicular to the first axis.

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