Continuous coating equipment
By designing a continuous coating equipment, utilizing multiple coating chambers and a conveying and rotating mechanism, continuous batch vacuum coating was achieved, solving the problem that traditional equipment could not operate continuously, improving production efficiency and ensuring coating stability.
Patent Information
- Application Number
- CN202511138405.6
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2025-08-14
- Publication Date
- 2025-12-05
AI Technical Summary
Traditional single-chamber or batch vacuum coating equipment cannot achieve continuous operation, making it difficult to increase production cycle time. Furthermore, the hoisting and conveying methods are cumbersome and cause shaking during coating.
Design a continuous coating equipment, including several coating chambers, conveying and rotating mechanisms connected in sequence. It adopts a bottom-supported conveying path, and realizes the continuous flow of the coating rack through the conveying table and conveying mechanism. Combined with the rotating mechanism, it ensures the stability of coating.
It enables continuous batch vacuum coating operations, improves production efficiency, and ensures the stability and easy handling of the coating rack during coating.
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Figure CN121065655A_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The present application relates to the technical field of vacuum coating, in particular to a coating equipment capable of continuous vacuum coating. BACKGROUND
[0002] The vacuum coating equipment is an industrial device that forms a functional film on the surface of a substrate (such as glass, metal, plastic, etc.) by physical vapor deposition (PVD) or chemical vapor deposition (CVD) technology under a high vacuum environment. The core process includes evaporation coating, sputtering coating, and ion plating, etc.
[0003] However, the traditional single-chamber or batch-type vacuum coating equipment cannot be continuously operated because it needs to break the vacuum to take and place the substrate for each batch of coating, which consumes time and energy to re-evacuate, making it difficult to improve the production rhythm.
[0004] In order to solve the shortcomings of the traditional coating equipment, a continuous coating equipment has been developed. For example, Chinese patent CN119736601A discloses a vertical continuous vacuum coating equipment, which adopts a continuous coating scheme with multiple coating chambers connected in series. However, in this scheme, the hoisting and conveying of the shelves and the rotating coating method have the problems of hoisting inconvenience and easy shaking during coating.
[0005] Therefore, it is an urgent problem for those skilled in the art to develop a new continuous coating equipment. SUMMARY
[0006] In order to overcome the shortcomings of the prior art, the present application provides a continuous coating equipment, which can realize continuous batch vacuum coating and improve production efficiency.
[0007] Specifically, the continuous coating equipment provided by the present application comprises: a plurality of coating chambers connected in series, opposite sides of each coating chamber are provided with through openings for the coating shelves to pass through, a partition door is arranged between adjacent coating chambers for isolating the adjacent coating chambers, and a chamber door is arranged outside the coating chamber at the end of the continuous coating equipment for closing the through opening; a conveying mechanism is arranged at the bottom of the inner cavity of each coating chamber, and the conveying mechanism is arranged in connection with the through openings on both sides of the coating chamber; a rotating mechanism is arranged at the bottom of each coating chamber, and the top driving end of the rotating mechanism penetrates upward from the bottom of the coating chamber and extends into the interior of the coating chamber for driving the coating shelves entering the coating chamber to rotate; at least one transfer table connected with the coating chamber at the end of the continuous coating equipment, the transfer table is provided with a transfer mechanism for transferring the coating shelves, the transfer mechanism is arranged in alignment with the conveying mechanism of the coating chamber, and the transfer mechanism and the conveying mechanisms form a transfer path for transferring the coating shelves; a carrier plate for carrying the coating shelves, the carrier plate is movably arranged on the transfer mechanism or the conveying mechanism of the continuous coating equipment.
[0008] In one alternative implementation, the conveying mechanism includes a support, a conveying drive mechanism, and a transmission assembly. The transmission assembly is mounted on the support, the conveying drive mechanism is driven to connect with the transmission assembly, and the conveying assembly supports and moves the carrier plate.
[0009] In one alternative implementation, the transmission assembly includes several gear rods rotatably mounted on the support, with each gear rod arranged in parallel and connected to the others via chain drive. The transmission drive mechanism is driven by at least one gear rod. The carrier plate is in contact with the gear rod, and the rotation of the gear rod causes the carrier plate to translate.
[0010] In one alternative implementation, the gear lever includes a first gear lever, a second gear lever, a third gear lever, and a fourth gear lever arranged in parallel. An internal gear and an external gear are fixedly mounted at the same end of each of the first, second, third, and fourth gear levers. The first gear lever is connected to a transmission drive mechanism. The internal gear of the first gear lever is connected to the internal gear of the second gear lever via a first chain. The internal gear of the third gear lever is connected to the internal gear of the fourth gear lever via a second chain. The external gear of the second gear lever is connected to the external gear of the third gear lever via a third chain.
[0011] In one alternative implementation, the rotating mechanism includes a support plate, a support rod, a fixed plate, a lifting drive mechanism, a lifting rod, a movable plate, and a rotating drive mechanism. The rotation output end of the rotating drive mechanism is connected to the bottom of the support rod, the top of the support rod is fixedly connected to the support plate, the lifting drive mechanism is fixedly connected to the fixed plate, the lifting drive mechanism is connected to one end of the lifting rod for telescopic drive, the other end of the lifting rod is connected to the movable plate, and the rotating drive mechanism is connected to the movable plate. The upper surface of the fixed plate is fixedly connected to the bottom outer surface of the coating chamber, the top of the support rod extends through the interior of the coating chamber, and the support plate is located inside the coating chamber.
[0012] In one alternative implementation, the transfer station includes a frame, a transfer mechanism mounted on the upper surface of the frame, the transfer mechanism including a transfer drive mechanism and a transfer component drivenly connected to the transfer drive mechanism, the transfer component carrying and moving a carrier plate.
[0013] In one alternative implementation, the coating chamber is provided with a closed drive mechanism for driving the chamber door to move and an isolated drive mechanism for driving the partition door to move.
[0014] The technical solution provided by the aforementioned implementation method has at least the following beneficial effects: (1) The continuous coating equipment of this application can make the coated workpieces flow between different coating chambers by setting multiple coating chambers in sequence, thereby realizing continuous coating operations between batches.
[0015] (2) The continuous coating equipment of this application uses a bottom-carrying transmission path to transfer the coating rack, which not only facilitates the picking and placing of the coating rack, but also ensures the rotational stability of the coating rack during coating. Attached Figure Description
[0016] To more clearly illustrate the technical solutions in the embodiments of this application, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the accompanying drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.
[0017] Figure 1 This is a schematic diagram of the structure of a continuous coating apparatus provided in one embodiment of this application; Figure 2 Another structural schematic diagram of the continuous coating apparatus provided in one embodiment of this application; Figure 3 A schematic diagram of the coating chamber of a continuous coating apparatus provided in one embodiment of this application; Figure 4 Another structural schematic diagram of the coating chamber of the continuous coating apparatus provided in one embodiment of this application; Figure 5 A schematic diagram of the internal structure of the coating chamber of a continuous coating apparatus provided in one embodiment of this application; Figure 6 A schematic diagram of the conveying mechanism and rotating mechanism of a continuous coating apparatus provided in one embodiment of this application; Figure 7 A top view of the conveying mechanism and rotating mechanism of a continuous coating apparatus provided in one embodiment of this application; Figure 8 A side view of the conveying mechanism and rotating mechanism of a continuous coating apparatus provided in one embodiment of this application; Figure 9 A schematic diagram of the fit between the carrier plate and the roller in a continuous coating apparatus provided in one embodiment of this application; Figure 10 A schematic diagram of the rotating mechanism of a continuous coating apparatus provided in one embodiment of this application; Figure 11 A side view of the rotating mechanism of a continuous coating apparatus provided in one embodiment of this application; Figure 12 This is a schematic diagram of the internal structure of the transfer stage of a continuous coating apparatus provided in one embodiment of this application.
[0018] Explanation of reference numerals in the attached figures: 1. Coating chamber; 2. Transfer table; 3. Carrier plate; 4. Coating rack; 101. Through port; 102. Chamber door; 103. Partition door; 104. Enclosure drive mechanism; 105. Isolation drive mechanism; 106. Position sensor; 107. Target mounting hole; 108. Heat pipe mounting hole; 110. Conveying mechanism; 111. Support; 112. Conveying drive mechanism; 1131. First gear rod; 1132. Second gear rod; 1133. Third gear rod; 1134. Fourth gear rod; 1135. First adjusting rod; 1136. Second adjusting rod; 1137. Third adjusting rod; 1141. First chain; 1142. Second chain; 11 43. Third chain; 1151. Internal gear; 1152. External gear; 1153. Adjusting gear; 1161. Roller; 1162. Groove; 117. Buffer pad; 120. Rotating mechanism; 121. Support plate; 122. Support rod; 123. Fixing plate; 124. Lifting drive mechanism; 125. Lifting rod; 126. Movable plate; 127. Rotating drive mechanism; 128. Guide rod; 129. Guide sleeve; 210. Transmission mechanism; 211. Transmission drive mechanism; 212. Transmission assembly; 220. Stand; 221. Positioning sensor; 222. Cover; 301. Center hole; 302. Positioning block; 303. Positioning edge. Detailed Implementation
[0019] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of this application, and not all of them. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.
[0020] In this document, the terms "first," "second," etc., are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Therefore, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this application, unless otherwise stated, "multiple" means two or more.
[0021] Furthermore, in this article, directional terms such as "upper" and "lower" are defined relative to the orientation of the structure as shown in the attached drawings. It should be understood that these directional terms are relative concepts, used for relative description and clarification, and can change accordingly depending on the orientation of the structure.
[0022] For ease of understanding, the English abbreviations and related technical terms used in the embodiments of this application will be explained and described below.
[0023] Please see Figures 1 to 12 One embodiment of this application provides a continuous coating apparatus for vacuum coating of workpieces in consecutive batches.
[0024] Combination Figures 1 to 5 As shown, in this embodiment, the continuous coating equipment includes: Several coating chambers 1 are connected in sequence. Each coating chamber 1 has openings 101 on both sides for the coating rack 4 to pass through. Adjacent coating chambers 1 are separated by partition doors 103. The coating chamber 1 at the end of the continuous coating equipment has a door 102 on its outside for closing the openings 101. A conveying mechanism 110 is provided at the bottom of the inner cavity of each coating chamber 1. The conveying mechanism 110 is connected to the openings 101 on both sides of the coating chamber 1. A rotating mechanism 120 is provided at the bottom of each coating chamber 1. The top of the rotating mechanism 120 extends upward from the bottom of the coating chamber 1 into the interior of the coating chamber 1 to drive the coating rack 4 entering the coating chamber 1 to rotate. At least one transfer station 2 is connected to the coating chamber 1 at the end of the continuous coating equipment. The transfer station 2 is provided with a transfer mechanism 210 for transferring the coating frame 4. The transfer mechanism 210 is aligned with the conveying mechanism 110 of the coating chamber 1. The transfer mechanism 210 and each conveying mechanism 110 form a transfer path for transferring the coating frame 4. Carrier plate 3 is used to support coating rack 4. Carrier plate 3 is movably mounted on the transmission mechanism 210 or conveying mechanism 110 of continuous coating equipment.
[0025] Among them, combined Figure 1 and Figure 2 As shown, in this embodiment, there are two coating chambers 1. In other embodiments, the number of coating chambers 1 can be increased according to production needs, and the structure of each coating chamber 1 can be configured according to the scheme of this application.
[0026] In this embodiment, two transfer stations 2 are configured, located at opposite ends of the continuous coating equipment, namely the upper and lower ends, to facilitate the loading and unloading of the coating rack 4. In other embodiments, depending on actual needs, only one transfer station 2 may be configured, located at either the upper or lower end.
[0027] In this embodiment, the carrier plate 3 adopts a flat plate structure to stably support the coating rack 4. Furthermore, combined with... Figure 11 As shown, a central hole 301 is provided in the middle of the carrier plate 3. The central hole 301 allows the top of the rotating mechanism 120 to pass through and abut against the coating frame 4, so as to drive the coating frame 4 to rotate and perform uniform vacuum coating on the workpiece of the coating frame 4.
[0028] It should be noted that the coating rack 4 in the accompanying drawings is only for illustrating the technical solution of this application. It does not show the hanger and workpiece installed on the coating rack 4. Those skilled in the art can set the coating rack 4 according to actual needs.
[0029] In this application, the conveying mechanism 110 includes a bracket 111, a conveying drive mechanism 112, and a transmission assembly. The transmission assembly is mounted on the bracket 111, and the conveying drive mechanism 112 is drivenly connected to the transmission assembly. The conveying assembly supports and moves the carrier plate 3.
[0030] Specifically, the transmission assembly includes several gear rods rotatably mounted on the bracket 111. The gear rods are arranged in parallel and connected to each other by chain transmission. The transmission drive mechanism 112 is driven by at least one gear rod. The carrier plate 3 is in contact with the gear rods, and the carrier plate 3 is moved horizontally when the gear rods rotate.
[0031] Combination Figures 6 to 8 As shown, in this embodiment, the gear rod includes a first gear rod 1131, a second gear rod 1132, a third gear rod 1133, and a fourth gear rod 1134 arranged in parallel. An internal gear 1151 and an external gear 1152 are fixedly provided at the same end of each of the first gear rod 1131, the second gear rod 1132, the third gear rod 1133, and the fourth gear rod 1134. The first gear rod 1131 is connected to the transmission drive mechanism 112. The internal gear 1151 of the first gear rod 1131 is connected to the internal gear 1151 of the second gear rod 1132 via a first chain 1141. The internal gear 1151 of the third gear rod 1133 is connected to the internal gear 1151 of the fourth gear rod 1134 via a second chain 1142. The external gear 1152 of the second gear rod 1132 is connected to the external gear 1152 of the third gear rod 1133 via a third chain 1143.
[0032] By staggering the first chain 1141, the second chain 1142, and the third chain 1143, more space can be reserved on the side of the transmission assembly to accommodate the installation of other functional components.
[0033] To facilitate adjustment of the tension of each chain, in this embodiment, the transmission assembly further includes a first adjusting rod 1135, a second adjusting rod 1136, and a third adjusting rod 1137 movably disposed on the bracket 111. The first adjusting rod 1135, the second adjusting rod 1136, and the third adjusting rod 1137 are movably adjusted along the vertical direction of the bracket 111. An adjusting gear 1153 is rotatably disposed at the same end of the first adjusting rod 1135, the second adjusting rod 1136, and the third adjusting rod 1137. The adjusting gear 1153 of the first adjusting rod 1135 is meshed with the inner side of the first chain 1141, the adjusting gear 1153 of the second adjusting rod 1136 is meshed with the inner side of the second chain 1142, and the adjusting gear 1153 of the third adjusting rod 1137 is meshed with the inner side of the third chain 1143.
[0034] If a chain becomes loose during use, causing unstable transmission, the tension of the corresponding chain can be adjusted by adjusting the position of the adjusting rod.
[0035] Combination Figure 6 and Figure 7 As shown, in order to make the movement of the carrier plate 3 more stable, in this embodiment, rollers 1161 are provided at the other ends of the first gear rod 1131, the second gear rod 1132, the third gear rod 1133 and the fourth gear rod 1134. The rollers 1161 can be driven by the gear rods to rotate, thereby pushing the carrier plate 3 to translate.
[0036] Combination Figure 6 , Figure 7 and Figure 9 As shown, in order to prevent the carrier plate 3 from slipping, a positioning edge 303 is provided on one side of the carrier plate 3 protruding downward. The first gear rod 1131, the second gear rod 1132, the third gear rod 1133 and the fourth gear rod 1134 are all provided with a groove 1162 that cooperates with the positioning edge 303.
[0037] Since the coating rack 4 is quite heavy when fully loaded, in order to avoid the coating rack 4 having a significant impact on the conveying mechanism 110 when placed on the carrier plate 3, in this embodiment, the bracket 111 is fixedly provided with a buffer pad 117 for abutting against the carrier plate 3. Specifically, a damping shock-absorbing pad may be provided at the top of the buffer pad 117 to reduce the pressure of the carrier plate 3.
[0038] Combination Figure 5 and Figure 12As shown, in order to make the position of the coating rack 4 more accurate so that the rotating mechanism 120 can drive it to rotate smoothly, in this embodiment, a positioning block 302 for positioning sensing can be provided on the carrier plate 3, and a position sensor 106 for positioning can be installed in the coating chamber 1. When the carrier plate 3 is moved to the position by the conveying mechanism 110, the position sensor 106 receives the positioning signal and can stop the movement of the conveying mechanism 110, so that the carrier plate 3 on which the coating rack 4 is placed is stationary for vacuum coating operation.
[0039] Specifically, in this embodiment, the transmission drive mechanism 112 may be a servo motor. In other embodiments, the transmission drive mechanism 112 may also be other actuators that can provide driving force, such as rotary cylinders.
[0040] Combination Figure 10 and Figure 11 As shown, in this embodiment, the rotating mechanism 120 includes a support plate 121, a support rod 122, a fixed plate 123, a lifting drive mechanism 124, a lifting rod 125, a movable plate 126, and a rotating drive mechanism 127. The rotation output end of the rotating drive mechanism 127 is connected to the bottom of the support rod 122. The top of the support rod 122 is fixedly connected to the support plate 121. The lifting drive mechanism 124 is fixedly connected to the fixed plate 123. The lifting drive mechanism 124 is connected to one end of the lifting rod 125 via a telescopic drive. The other end of the lifting rod 125 is connected to the movable plate 126. The rotating drive mechanism 127 is connected to the movable plate 126. The upper surface of the fixed plate 123 is fixedly connected to the bottom outer surface of the coating chamber 1. The top of the support rod 122 extends into the interior of the coating chamber 1. The support plate 121 is located inside the coating chamber 1.
[0041] Specifically, the support plate 121 can engage with the bottom of the coating frame 4 to drive the coating frame 4 to rotate. The engagement method can be implemented using existing technology, and this application does not provide special explanation or limitation.
[0042] In this embodiment, the lifting drive mechanism 124 is a telescopic cylinder, and the lifting rod 125 is drivenly connected to the telescopic cylinder to control the lifting and lowering of the movable plate 126. In other embodiments, the lifting drive mechanism 124 may also be a motor, and the lifting rod 125 may be a lead screw, which is drivenly connected to the motor and meshes with the movable plate 126. The rotation of the lead screw drives the movable plate 126 to lift and lower.
[0043] In this embodiment, the rotary drive mechanism 127 can be a servo motor, whose rotation output end is connected to the support rod 122 to drive the support plate 121 to rotate. In other embodiments, the rotary drive mechanism 127 can also be a driver that can realize rotation output, such as a rotary cylinder.
[0044] Combination Figure 10 andFigure 11 As shown, in order to ensure the stable lifting and lowering of the movable plate 126, in this embodiment, a downwardly extending guide rod 128 is provided at the lower end of the fixed plate 123, and the movable plate 126 is provided with a guide sleeve 129 adapted to the guide rod 128. The guide rod 128 allows the movable plate 126 to lift and lower along a stable path.
[0045] Combination Figure 12 As shown, in this embodiment, the transmission platform 2 includes a frame 220, and the transmission mechanism 210 is installed on the upper surface of the frame 220. The transmission mechanism 210 includes a transmission drive mechanism 211 and a transmission component 212 that is connected to the transmission drive mechanism 211 in a transmission manner. The transmission component 212 carries and moves the carrier plate 3.
[0046] The transmission component 212 can be connected to a gear chain similar to the transmission mechanism 110 of this application, or it can be connected to a transmission structure such as a belt and a rotating wheel, or a screw and a threaded sleeve.
[0047] Combination Figure 12 As shown, in order to stop the movement of the carrier plate 3 with the coating rack 4 in place, the transfer table 2 can be equipped with a positioning sensor 221. The positioning sensor 221 cooperates with the positioning block 302 of the carrier plate 3 to realize automatic stop control of the transfer drive mechanism 211.
[0048] To prevent foreign objects from falling or accidental contact by personnel, a shield 222 is provided on the outside of the transmission mechanism 210.
[0049] In this embodiment, the transmission drive mechanism 211 may be a servo motor. In other embodiments, the transmission drive mechanism 211 may also be other actuators that can provide driving force, such as rotary cylinders.
[0050] Combination Figures 3 to 5 As shown, in order to facilitate the control of the closing and opening of the compartment door 102, the coating chamber 1 is provided with a closed drive mechanism 104 for driving the compartment door 102 to move; and in order to facilitate the control of the closing and opening of the partition door 103, the coating chamber 1 is provided with an isolation drive mechanism 105 for driving the partition door 103 to move.
[0051] Specifically, the closing drive mechanism 104 and the isolation drive mechanism 105 may employ telescopic cylinders to drive the movement of the compartment door 102 or the partition door 103. To provide sufficient driving force, the closing drive mechanism 104 or the isolation drive mechanism 105 may be configured as one or more as needed.
[0052] To facilitate the installation of devices such as electrodes and heating tubes required for vacuum coating, the top of the coating chamber 1 may be provided with electrode mounting holes 107 and heat pipe mounting holes 108.
[0053] The technical solutions provided by the embodiments of this application have been described in detail above. Specific embodiments have been used to explain the principles and implementation methods of this application. The above description is only for the purpose of helping to understand the method and core mechanism of this application. At the same time, for those skilled in the art, there will be changes in specific embodiments and application scope based on the ideas of this application. Therefore, the content of this specification should not be construed as a limitation of this application.
Claims
1. A continuous coating apparatus, characterized by, The continuous coating equipment comprises: a plurality of coating chambers, each of the coating chambers being connected in sequence, opposite sides of each of the coating chambers being provided with an opening for the passage of a coating rack, a partition door being provided between adjacent coating chambers for isolating the adjacent coating chambers, an outer side of the coating chamber at an end of the continuous coating equipment being provided with a warehouse door for closing the opening, an inner cavity of each of the coating chambers being provided with a conveying mechanism, the conveying mechanism being connected to the openings on both sides of the coating chamber, a rotating mechanism being provided at the bottom of each of the coating chambers, a top of the rotating mechanism extending upward from the bottom of the coating chamber and penetrating into the interior of the coating chamber for driving the coating rack entering the coating chamber to rotate; at least one transfer table, the transfer table being connected to the coating chamber at the end of the continuous coating equipment, the transfer table being provided with a transfer mechanism for transferring the coating rack, the transfer mechanism being arranged in position with the conveying mechanism of the coating chamber, the transfer mechanism and each of the conveying mechanisms forming a transfer path for transferring the coating rack; a carrier plate for carrying the coating rack, the carrier plate being movably arranged on the transfer mechanism or the conveying mechanism of the continuous coating equipment.
2. The continuous coating apparatus of claim 1, wherein: The conveying mechanism comprises a support, a conveying drive mechanism and a transmission assembly, the transmission assembly being mounted on the support, the conveying drive mechanism being drivingly connected to the transmission assembly, the conveying assembly supporting and moving the carrier plate.
3. The continuous coating apparatus of claim 2, wherein: The transmission assembly comprises a plurality of gear rods rotatably arranged on the support, each of the gear rods being arranged in parallel, the gear rods being drivingly connected by a chain, the conveying drive mechanism being drivingly connected to at least one of the gear rods, the carrier plate being in contact with the gear rods, the gear rods rotating to drive the carrier plate to translate.
4. The continuous coating apparatus of claim 3, wherein: The gear rods comprise first, second, third and fourth gear rods arranged in parallel, the same end of each of the first, second, third and fourth gear rods being fixedly provided with an internal gear and an external gear, the first gear rod being drivingly connected to the conveying drive mechanism, the internal gear of the first gear rod being drivingly connected to the internal gear of the second gear rod by a first chain, the internal gear of the third gear rod being drivingly connected to the internal gear of the fourth gear rod by a second chain, the external gear of the second gear rod being drivingly connected to the external gear of the third gear rod by a third chain.
5. The continuous coating apparatus of claim 4, wherein: The transmission assembly further comprises first, second and third adjusting rods movably arranged on the support, the first, second and third adjusting rods being movably adjusted along the vertical direction of the support, the same end of each of the first, second and third adjusting rods being rotatably provided with an adjusting gear, the adjusting gear of the first adjusting rod being meshingly connected to the inner side of the first chain, the adjusting gear of the second adjusting rod being meshingly connected to the inner side of the second chain, the adjusting gear of the third adjusting rod being meshingly connected to the inner side of the third chain.
6. The continuous coating apparatus of claim 4, wherein: Another end of the first gear rod, the second gear rod, the third gear rod and the fourth gear rod is provided with a roller.
7. The continuous coating apparatus of claim 4, wherein: The support is fixedly provided with a buffer pad for abutting against the carrier plate.
8. The continuous coating apparatus of claim 3, wherein: The rotating mechanism comprises a supporting plate, a supporting rod, a fixed plate, a lifting driving mechanism, a lifting rod, a movable plate and a rotating driving mechanism, the rotating driving mechanism is in transmission connection with the bottom of the supporting rod, the top of the supporting rod is in fixed connection with the supporting plate, the lifting driving mechanism is in fixed connection with the fixed plate, the lifting driving mechanism is in telescopic driving connection with one end of the lifting rod, the other end of the lifting rod is connected with the movable plate, and the rotating driving mechanism is connected with the movable plate; the upper surface of the fixed plate is in fixed connection with the bottom outer surface of the coating chamber, the top of the supporting rod penetrates into the inside of the coating chamber, and the supporting plate is located in the inside of the coating chamber.
9. The continuous coating apparatus of claim 1, wherein: The transmission table comprises a table frame, the transmission mechanism is installed on the upper surface of the table frame, the transmission mechanism comprises a transmission driving mechanism and a transmission assembly in transmission connection with the transmission driving mechanism, and the transmission assembly carries and moves the carrier plate.
10. The continuous coating apparatus of claim 1, wherein: The coating chamber is provided with a closing driving mechanism for driving the movement of the bin door and an isolation driving mechanism for driving the movement of the isolation door.
Citation Information
Patent Citations
A vertical continuous vacuum coating equipment
CN119736601A