Ultra-pure tube valve body defect detection equipment

Abstract

The invention relates to the technical field of valve body defect detection, and discloses an ultrapure tube valve body defect detection device which comprises a detection base, a hollow column is rotationally connected to the detection base, a rotating disc is fixed to the hollow column, a plurality of clamping grooves are formed in the rotating disc, valve bodies are arranged in the clamping grooves, and the valve bodies are arranged in the clamping grooves. A movable supporting ring is arranged at the lower end of the rotating disc, a plurality of first plugs are fixed to the supporting ring, a first hollow rod and a second hollow rod are arranged above the rotating disc, a detection camera is installed at the lower end of the first hollow rod, and an annular brush block is installed at the lower end of the second hollow rod; according to the valve body cleaning and detecting device, the purpose of synchronously cleaning and detecting corresponding valve bodies can be achieved, time and labor are saved, convenience and rapidness are achieved, transfer is not needed, and the detection quality and efficiency of the valve bodies are effectively improved.

Description

Technical Field

[0001] This invention relates to the field of valve body defect detection technology, specifically to an ultrapure pipe valve body defect detection device. Background Technology

[0002] Ultrapure valves play a crucial role in high-end industrial fields such as semiconductor manufacturing. They are mainly used to control the transmission of high-purity fluids such as ultrapure water, electronic chemicals, and specialty gases, ensuring the cleanliness and precision of the process. During the production process, defects such as sand holes, air holes, and cracks may appear on the surface of the valve body. In order to ensure product quality, it is necessary to perform defect detection on the inner wall of the valve body.

[0003] Currently, defects on the inner wall of valve bodies are mainly detected and identified using visual sensors. In existing technologies, before defect detection, impurities on the inner wall of the valve body need to be thoroughly cleaned using cleaning equipment. Then, the valve body is fixed to the detection equipment, and the visual sensor is inserted into the valve body to detect surface defects. Valve bodies that pass the initial inspection are then tested using airtightness testing equipment. The entire inspection process involves numerous pieces of equipment and requires repeated disassembly, assembly, and transport of the valve body from various devices, significantly reducing the efficiency of valve body defect detection. Summary of the Invention

[0004] This invention provides an ultrapure pipe valve body defect detection device, which enables simultaneous cleaning and detection of the corresponding valve body, saving time and effort, and is convenient and fast. It eliminates the need for transportation and effectively improves the detection quality and efficiency of the valve body. It solves the problem mentioned in the background art that the entire detection process involves a large number of devices, requiring constant disassembly and transportation of the valve body from related devices, which greatly reduces the efficiency of valve body defect detection.

[0005] The present invention provides the following technical solution: an ultrapure pipe valve body defect detection device, including a detection base, a hollow column rotatably connected to the detection base, a turntable fixed on the hollow column, a plurality of slots opened on the turntable, a valve body disposed in the slots, a movable support ring provided at the lower end of the turntable, and a plurality of first plugs fixed on the support ring, a first hollow rod and a second hollow rod respectively provided above the turntable, a detection camera installed at the lower end of the first hollow rod, and an annular brush block installed at the lower end of the second hollow rod; A sealing seat is slidably connected to the first hollow rod. A second plug and an annular sealing airbag are fixed on the sealing seat. A movable third plug is provided on one side of the detection base. An air supply rod is connected to the third plug.

[0006] As an optional solution of the ultrapure pipe valve body defect detection equipment of the present invention, wherein: a first electric push rod is fixed on the detection base, a strip mounting plate is connected to the piston rod of the first electric push rod, the first hollow rod and the second hollow rod are both rotatably connected to the strip mounting plate, and an abutment head is fixed at one end of the strip mounting plate.

[0007] As an optional solution of the ultrapure pipe valve body defect detection device of the present invention, wherein: a sliding groove is provided on the detection base, an L-shaped abutment strip is provided in the sliding groove, the L-shaped abutment strip is elastically connected to the detection base through a first spring, the air supply rod is elastically connected to the detection base through a second spring, and a pressure sensor and a push plate are respectively fixed on the air supply rod, the lower end of the push plate abuts against a rocker plate, the rocker plate is rotatably connected to the detection base, and a fourth plug is fixed on the L-shaped abutment strip.

[0008] As an optional solution for the ultrapure pipe valve body defect detection device of the present invention, a baffle is fitted on the second hollow rod, and a third spring is fitted on the first hollow rod, with the two ends of the third spring abutting against the sealing seat and the strip mounting plate respectively.

[0009] As an optional solution of the ultrapure pipe valve body defect detection device of the present invention, wherein: a second electric push rod is fixed to one end of the detection base, a first abutting frame is fixed on the piston rod of the second electric push rod, a first push rod and a second push rod are respectively abutted on the first abutting frame, the first push rod is elastically connected to the detection base through a fifth spring, and the upper end of the first push rod abuts on the support ring, a guide rod is fixed on the support ring, and the guide rod is slidably connected to the turntable.

[0010] As an optional solution of the ultrapure pipe valve body defect detection device of the present invention, wherein: a strip block is fixed at the upper end of the second push rod, a plurality of first sliding brackets are fixed on the turntable, a second abutting bracket is slidably connected to the first sliding bracket, and a sixth spring is connected between the second abutting bracket and the first sliding bracket.

[0011] As an optional solution of the ultrapure pipe valve body defect detection device of the present invention, the turntable is provided with a plurality of mounting slots, a third push rod is slidably connected in the mounting slots, an abutting wedge is installed at one end of the third push rod, the abutting wedge is elastically connected to the turntable by a fourth spring, and inserts are fixed on the push plate and the L-shaped abutting strip.

[0012] As an optional solution for the ultrapure pipe valve body defect detection device of the present invention, wherein: a sealing cylinder is fixed on the baffle, a piston plate is slidably connected on the sealing cylinder, a venting rod is fixed on the piston plate, the upper end of the venting rod is elastically connected to the strip mounting plate through a seventh spring, and the venting rod is connected to the annular sealing airbag through a pipe.

[0013] As an optional solution of the ultrapure pipe valve body defect detection equipment of the present invention, wherein: a cleaning seat is provided above the turntable, a second guide rod is fixed on the cleaning seat, the second guide rod is elastically connected to the detection base through an eighth spring, a first servo motor is fixed on the cleaning seat, a soft brush is installed on the motor shaft of the first servo motor, a push block is fixed on the piston rod of the second electric push rod, and a dust suction cover is installed at the bottom of the cleaning seat.

[0014] As an optional solution of the ultrapure pipe valve body defect detection device of the present invention, wherein: a second sliding bracket is fixed on the detection base, a dust cover is fitted on the cleaning seat, the dust cover is elastically connected to the second sliding bracket through a ninth spring, and a third abutment is fixed on one side of the dust cover.

[0015] The present invention has the following beneficial effects: 1. In this ultrapure pipe valve body defect detection equipment, the cooperation of the slot and the support ring facilitates the placement of the valve body to be tested on the turntable. The second hollow rod can drive the annular brush block to rotate synchronously, which facilitates the cleaning of impurities in the inner wall of the valve body. The second hollow rod can be connected to a vacuum cleaner to absorb and remove the brushed impurities, thereby improving the cleaning quality. The first hollow rod can drive the detection camera to rotate synchronously, allowing it to extend into the inner side of the valve body to be tested for all-round scanning, identify inner wall defects, and improve the detection quality. By adjusting the height of the strip mounting plate through the first electric push rod, the annular brush block and the detection camera can be moved down into the corresponding valve body at the same time, so as to achieve the purpose of simultaneous cleaning and detection of the corresponding valve body. This is time-saving, labor-saving, convenient and fast, and requires no transportation, effectively improving the detection quality and efficiency of the valve body. By cooperating with the fourth plug and the baffle on the second hollow rod, the opening of the cleaned valve body can be sealed. On the one hand, this prevents impurities from escaping during the cleaning process; on the other hand, it reduces the airflow gap between the valve body and the outside air, improving the adsorption effect of impurities. The first plug can seal the lower port of the valve body on the turntable, the third plug on the air supply rod can seal the side port of the test valve body, and the second plug on the sealing seat can seal the upper port of the test valve body. The air supply rod can inject air at a certain pressure into the valve body under test to simulate its working environment. On the one hand, when the internal pressure of the test valve body increases, defects are more easily exposed under high pressure, making it easier for the detection camera to identify and improving detection accuracy. On the other hand, with the cooperation of the pressure sensor, the overall airtightness of the valve body can be tested, making it convenient to detect unqualified products.

[0016] 2. In this ultrapure pipe valve body defect detection equipment, the strip mounting plate can drive the contact head to move down and make contact with the L-shaped contact strip. This facilitates the automatic insertion of the L-shaped contact strip and the plug fixed on the push plate into the mounting groove and into contact with the contact wedge. This causes the third push rod to press against the side port of the valve body, which causes the valve body that has been deflected to automatically straighten. This ensures that the fourth plug and the third plug can be accurately inserted into the corresponding side port of the valve body, thus achieving the purpose of automatically sealing the side port of the valve body to be cleaned and inspected. The rotating soft brush inside the cleaning seat removes dust from the inspection camera, improving the clarity of image data acquisition and the accuracy of defect detection. The dust cover installed at the bottom of the cleaning seat can be connected to a vacuum cleaner to easily remove the dust cleaned inside the cleaning seat. The dust cover also prevents dust from adhering to the soft brush when the cleaning seat is not in use, thus improving the cleaning effect of the soft brush.

[0017] 3. In this ultrapure pipe valve body defect detection equipment, the first contact frame can simultaneously contact the first push rod and the second push rod. On the one hand, it causes the first push rod to push the support ring upward, enhancing the sealing between the first plug and the valve body. On the other hand, the second push rod drives the strip block to contact the second contact bracket, making the second contact bracket tightly abut against the sealing seat, improving the sealing between the second plug and the test valve body. By cooperating with the sealing cylinder, piston plate, and venting rod, the annular brush block moves down and is inserted into the valve body for cleaning, which can achieve the purpose of automatically inflating the annular sealing airbag. The expanded annular sealing airbag can improve the sealing performance between the first hollow rod and the sealing seat when rotating, and avoid air leakage that would reduce the internal pressure of the valve body and affect the detection accuracy. Attached Figure Description

[0018] Figure 1 This is one of the three-dimensional structural schematic diagrams of the present invention.

[0019] Figure 2This is the second three-dimensional structural schematic diagram of the present invention.

[0020] Figure 3 This is a cross-sectional view of the structure of the present invention.

[0021] Figure 4 This is a schematic diagram of the turntable structure of the present invention.

[0022] Figure 5 This is a schematic diagram of the cleaning seat structure of the present invention.

[0023] Figure 6 for Figure 3 Enlarged view of a portion of point A in the middle.

[0024] Figure 7 for Figure 4 Enlarged view of section B in the middle.

[0025] Figure 8 for Figure 4 Enlarged view of a section at point C.

[0026] In the diagram: 1. Detection base; 2. Hollow column; 3. Turntable; 4. Slot; 5. Valve body; 6. Support ring; 7. First plug; 8. First hollow rod; 9. Second hollow rod; 10. Detection camera; 11. Annular brush block; 12. Sealing seat; 13. Second plug; 14. Annular sealing airbag; 15. Third plug; 16. Air delivery rod; 17. Pressure sensor; 18. First electric push rod; 19. Strip mounting plate; 20. Contact head; 21. Slide groove; 22. L-shaped contact strip; 23. First spring; 24. Second spring; 25. Push plate; 26. Rocker; 27. Fourth plug; 28. Baffle; 29. ​​Third spring; 30. Mounting groove; 31. 32. Push rod; 33. Abutting wedge; 34. Fourth spring; 35. Second electric push rod; 36. First abutting frame; 37. First push rod; 38. Fifth spring; 39. Guide rod; 40. Strip block; 41. First sliding bracket; 42. Second abutting bracket; 43. Sixth spring; 44. Sealing cylinder; 45. Piston plate; 46. Vent rod; 47. Seventh spring; 48. Second guide rod; 49. Eighth spring; 50. Cleaning seat; 51. First servo motor; 52. Soft brush; 53. Push block; 54. Dust hood; 55. Second sliding bracket; 56. Dust cover; 57. Ninth spring; 58. Third abutting frame; 59. Insert block. Detailed Implementation

[0027] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0028] Example 1, please refer to Figures 1 to 8 An ultrapure pipe valve body defect detection device includes a detection base 1, a hollow column 2 rotatably connected to the detection base 1, a turntable 3 fixed on the hollow column 2, a plurality of slots 4 opened on the turntable 3, a valve body 5 disposed in the slots 4, a movable support ring 6 at the lower end of the turntable 3, and a plurality of first plugs 7 fixed on the support ring 6, a first hollow rod 8 and a second hollow rod 9 respectively disposed above the turntable 3, a detection camera 10 installed at the lower end of the first hollow rod 8, and an annular brush block 11 installed at the lower end of the second hollow rod 9; A sealing seat 12 is slidably connected to the first hollow rod 8. A second plug 13 and an annular sealing airbag 14 are fixed on the sealing seat 12. A movable third plug 15 is provided on one side of the detection base 1. An air supply rod 16 is connected to the third plug 15.

[0029] A first electric push rod 18 is fixed on the detection base 1. A strip mounting plate 19 is connected to the piston rod of the first electric push rod 18. The first hollow rod 8 and the second hollow rod 9 are both rotatably connected to the strip mounting plate 19. An abutment head 20 is fixed to one end of the strip mounting plate 19.

[0030] The detection base 1 has a sliding groove 21, and an L-shaped abutment strip 22 is provided in the sliding groove 21. The L-shaped abutment strip 22 is elastically connected to the detection base 1 through a first spring 23. The air supply rod 16 is elastically connected to the detection base 1 through a second spring 24. A pressure sensor 17 and a push plate 25 are fixed on the air supply rod 16 respectively. The lower end of the push plate 25 abuts against a rocker plate 26. The rocker plate 26 is rotatably connected to the detection base 1. A fourth plug 27 is fixed on the L-shaped abutment strip 22.

[0031] A baffle 28 is fitted on the second hollow rod 9, and a third spring 29 is fitted on the first hollow rod 8. The two ends of the third spring 29 abut against the sealing seat 12 and the strip mounting plate 19, respectively.

[0032] A second electric push rod 34 is fixed to one end of the detection base 1. A first contact frame 35 is fixed to the piston rod of the second electric push rod 34. A first push rod 36 and a second push rod 37 are respectively contacted on the first contact frame 35. The first push rod 36 is elastically connected to the detection base 1 through a fifth spring 38, and the upper end of the first push rod 36 abuts against the support ring 6. A guide rod 39 is fixed on the support ring 6, and the guide rod 39 is slidably connected to the turntable 3.

[0033] The upper end of the second push rod 37 is fixed with a strip block 40, and several first sliding brackets 41 are fixed on the turntable 3. The first sliding brackets 41 are slidably connected with second abutment brackets 42, and a sixth spring 43 is connected between the second abutment brackets 42 and the first sliding brackets 41.

[0034] The turntable 3 has several mounting slots 30. A third push rod 31 is slidably connected in the mounting slot 30. A contact wedge 32 is installed at one end of the third push rod 31. The contact wedge 32 is elastically connected to the turntable 3 through a fourth spring 33. Insert blocks 58 are fixed on the push plate 25 and the L-shaped contact strip 22.

[0035] refer to Figures 1 to 8 In use, the testing base 1 is equipped with a second servo motor for driving the hollow column 2 to rotate, and for adjusting the rotation angle of the turntable 3. During the rotation of the turntable 3, when the slot 4 passes one side of the testing base 1, the mechanical gripper can place the valve body 5 to be tested. The lower end of the valve body 5 to be tested is inserted into the first plug 7 on the support ring 6, thus completing the loading. When the valve body 5 to be tested rotates to the cleaning station, the valve body 5 to be tested that has been cleaned in one of the slots 4 will rotate to the testing station. The strip mounting plate 19 is equipped with a third servo motor for driving the first hollow rod 8 to rotate and a fourth servo motor for driving the second hollow rod 9 to rotate, both driven by gear meshing. The piston rod of the first electric push rod 18 drives the strip mounting plate 19 to initially move downward, so that... The contact head 20 abuts against the L-shaped contact strip 22, causing the L-shaped contact strip 22 to slide in the slide groove 21. The first spring 23 stores force, and one end of the L-shaped contact strip 22 abuts against one end of the rocker plate 26, causing the rocker plate 26 to deflect and drive the push plate 25 to move horizontally, causing the air delivery rod 16 to drive the third plug 15 to slide initially on the detection base 1. The second spring 24 stores force. At this time, the L-shaped contact strip 22 and the plug 58 fixed on the push plate 25 are simultaneously inserted into the mounting groove 30 in the turntable 3 and abut against the contact wedge 32. The fourth spring 33 stores force, causing the contact wedge 32 to drive the third push rod 31 to slide on the turntable 3 and abut against the side port of the valve body 5 in the deflected state, so that the side port of the valve body 5 to be cleaned and tested on the turntable 3 can be aligned, which facilitates the subsequent improvement of the sealing accuracy of the side port of the valve body 5. As the piston rod of the first electric push rod 18 continues to drive the strip mounting plate 19 downward, the contact head 20 continues to abut against the L-shaped contact strip 22. On the one hand, this causes the fourth plug 27 to abut against the side port of the valve body 5 to be cleaned, while the third plug 15 seals the side port of the valve body 5 to be tested. On the other hand, it causes the second hollow rod 9 to drive the annular brush block 11 to be inserted into the valve body 5 to be cleaned in a spiral rotation state, and the baffle 28 abuts against the upper end surface of the valve body 5. The first hollow rod 8 drives the detection camera 10 to be inserted into the valve body 5 to be detected in a spiral rotation state, and the second plug 13 on the sealing seat 12 is inserted into the upper port of the valve body 5 to seal it. At the same time, the third spring 29 in the sleeve stores force to improve the sealing effect of the sealing seat 12 on the detection valve body 5. The piston rod of the second electric push rod 34 retracts, causing the first contact bracket 35 to contact the first push rod 36 and the second push rod 37 respectively. On one hand, the first push rod 36 slides on the detection base 1, the fifth spring 38 stores force, thereby pushing the support ring 6 upward, and the guide rod 39 slides on the turntable 3, so that several first plugs 7 on the support ring 6 abut against the lower port of the valve body 5 on the turntable 3, achieving the purpose of automatic sealing; on the other hand, the second push rod 37 slides on the hollow column 2, thereby driving the strip block 40 to contact one of the second contact brackets 42, so that the second contact bracket 42... The first sliding bracket 41 slides upwards, the sixth spring 43 stores force, and one end of the second abutting bracket 42 abuts against the sealing seat 12, so that the sealing seat 12 firmly abuts against the valve body 5 to be tested, further improving the sealing effect. The upper end of the second hollow rod 9 is connected to the vacuum cleaner through a rotary joint, so that after the annular brush block 11 rotates to clean the impurities on the inner wall of the valve body 5, the brushed impurities can be absorbed cleanly in time, so as to improve the cleaning quality of the inner wall of the valve body 5. With the cooperation of one of the first plugs 7, the baffle 28 and the fourth plug 27, the impurity adsorption effect can be improved, and the impurities can be prevented from escaping when the valve body 5 is cleaned. One end of the air supply rod 16 is connected to the air pressurization device, which facilitates the injection of air at a certain pressure into the valve body 5 under test to simulate its working environment. On the one hand, when the internal pressure of the valve body 5 increases, defects are more easily exposed under high pressure, which is convenient for the detection camera 10 to identify and improve the detection accuracy. On the other hand, with the cooperation of the pressure sensor 17, the valve body 5 can be tested for overall air tightness, which makes it easy to detect unqualified products.

[0036] Example 2 is an improvement upon Example 1. For details, please refer to [link / reference]. Figures 1 to 8A cleaning seat 49 is provided above the turntable 3. A second guide rod 47 is fixed on the cleaning seat 49. The second guide rod 47 is elastically connected to the detection base 1 through an eighth spring 48. A first servo motor 50 is fixed on the cleaning seat 49. A soft brush 51 is installed on the motor shaft of the first servo motor 50. A push block 52 is fixed on the piston rod of the second electric push rod 34. A dust suction cover 53 is installed at the bottom of the cleaning seat 49.

[0037] A second sliding bracket 54 is fixed on the detection base 1, and a dust cover 55 is fitted on the cleaning seat 49. The dust cover 55 is elastically connected to the second sliding bracket 54 through a ninth spring 56, and a third abutment bracket 57 is fixed on one side of the dust cover 55.

[0038] refer to Figures 1 to 6 To avoid dust adhering to the lens of the inspection camera 10 and affecting the defect identification effect, the inspection camera 10 needs to be cleaned before operation. When the strip mounting plate 19 initially moves down, the rocker arm 26 deflects, causing the push plate 25 to move horizontally, causing the upper end of the push plate 25 to contact the third contact bracket 57, so that the third contact bracket 57 moves horizontally on the second sliding bracket 54. The ninth spring 56 stores force, causing the dust cover 55 to move out from one side of the cleaning seat 49, thereby avoiding obstruction to the position adjustment of the cleaning seat 49. The piston rod of the second electric push rod 34 The extension causes the pusher 52 to push the second guide rod 47 to slide on the detection base 1, causing the cleaning seat 49 to move horizontally to the detection camera 10, so that the soft brush 51 inside the cleaning seat 49 fits against the lens surface of the detection camera 10. When the first servo motor 50 drives the soft brush 51 to rotate, it can remove the dust on the detection camera 10, which is beneficial to improving the clarity of image data acquisition and the accuracy of defect detection. The dust collection cover 53 installed at the bottom of the cleaning seat 49 can be connected to a vacuuming device to easily remove the dust cleaned from the cleaning seat 49.

[0039] Example 3 is an improvement upon Example 1. For details, please refer to [link / reference]. Figures 1 to 8 A sealing cylinder 44 is fixed on the baffle 28. A piston plate 45 is slidably connected to the sealing cylinder 44. A venting rod 46 is fixed on the piston plate 45. The upper end of the venting rod 46 is elastically connected to the strip mounting plate 19 through a seventh spring 461. The venting rod 46 is connected to the annular sealing airbag 14 through a pipe.

[0040] refer to Figures 3 to 6To prevent air leakage between the sealing seat 12 and the rotating first hollow rod 8 during valve body 5 testing, which would affect the testing quality, it is necessary to improve the sealing performance between the sealing seat 12 and the rotating first hollow rod 8. When the baffle 28 is pressed against the valve body 5 to be cleaned, as the second hollow rod 9 drives the annular brush block 11 to move downward, the piston plate 45 on the venting rod 46 slides inside the sealing cylinder 44 on the baffle 28, which can compress the air inside the sealing cylinder 44. This allows the air inside the sealing cylinder 44 to flow into the annular sealing airbag 14 through the venting rod 46 and the pipe, thereby achieving the purpose of automatically inflating the annular sealing airbag 14. The expanded annular sealing airbag 14 can improve the sealing performance between the sealing seat 12 and the rotating first hollow rod 8 to prevent air leakage and thus improve the testing accuracy. During the downward movement of the second hollow rod 9, the venting rod 46 slides on the strip mounting plate 19, and the seventh spring 461 stores force.

[0041] The detection camera 10, pressure sensor 17, first electric push rod 18, second electric push rod 34, first servo motor 50, and several drive motors are all electrically connected to the controller via wires.

[0042] It should be noted that, in this document, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such process, method, article, or apparatus.

[0043] The above description is only a preferred embodiment of the present invention. It should be noted that for those skilled in the art, several improvements and modifications can be made without departing from the technical principles of the present invention, and these improvements and modifications should also be considered within the scope of protection of the present invention.

Claims

1. An ultra-pure pipe valve body defect detection apparatus comprising a detection base (1), characterized in that: The detection base (1) is rotatably connected with a hollow column (2), the hollow column (2) is fixedly connected with a rotating disc (3), a plurality of clamping grooves (4) are formed in the rotating disc (3), a valve body (5) is arranged in the clamping groove (4), the lower end of the rotating disc (3) is movably provided with a supporting ring (6), a plurality of first plugs (7) are fixedly arranged on the supporting ring (6), the upper side of the rotating disc (3) is respectively provided with a first hollow rod (8) and a second hollow rod (9), the lower end of the first hollow rod (8) is provided with a detection camera (10), the lower end of the second hollow rod (9) is provided with an annular brush block (11). The first hollow rod (8) is slidably connected with a sealing seat (12), the sealing seat (12) is respectively fixedly provided with a second plug (13) and an annular sealing air bag (14), one side of the detection base (1) is movably provided with a third plug (15), the third plug (15) is connected with a gas conveying rod (16).

2. The ultra-pure tube valve body defect detection apparatus according to claim 1, characterized by: The detection base (1) is fixedly provided with a first electric push rod (18), the piston rod of the first electric push rod (18) is connected with a strip-shaped mounting plate (19), the first hollow rod (8) and the second hollow rod (9) are rotatably connected with the strip-shaped mounting plate (19), one end of the strip-shaped mounting plate (19) is fixedly provided with a contact head (20).

3. The ultra-pure tube valve body defect detection apparatus according to claim 2, characterized by: The detection base (1) is provided with a sliding groove (21), the sliding groove (21) is provided with an L-shaped contact strip (22), the L-shaped contact strip (22) is elastically connected with the detection base (1) through a first spring (23), the gas conveying rod (16) is elastically connected with the detection base (1) through a second spring (24), the gas conveying rod (16) is respectively fixedly provided with a pressure sensor (17) and a push plate (25), the lower end of the push plate (25) is in contact with a warped plate (26), the warped plate (26) is rotatably connected with the detection base (1), the L-shaped contact strip (22) is fixedly provided with a fourth plug (27).

4. The ultra-pure tube valve body defect detection apparatus according to claim 2, characterized by: The second hollow rod (9) is sleeved with a baffle (28), the first hollow rod (8) is sleeved with a third spring (29), the two ends of the third spring (29) are respectively in contact with the sealing seat (12) and the strip-shaped mounting plate (19).

5. The ultra-pure tube valve body defect detection apparatus according to claim 4, characterized by: One end of the detection base (1) is fixedly provided with a second electric push rod (34), the piston rod of the second electric push rod (34) is fixedly provided with a first contact frame (35), the first contact frame (35) is respectively in contact with a first push rod (36) and a second push rod (37), the first push rod (36) is elastically connected with the detection base (1) through a fifth spring (38), the upper end of the first push rod (36) is in contact with the supporting ring (6), the supporting ring (6) is fixedly provided with a guide rod (39), the guide rod (39) is slidably connected with the rotating disc (3).

6. The ultra-pure tube valve body defect detection apparatus according to claim 5, characterized by: The upper end of the second push rod (37) is fixed with a strip-shaped block (40), a plurality of first sliding supports (41) are fixed on the rotating disc (3), a second abutting support (42) is slidably connected to the first sliding support (41), and a sixth spring (43) is connected between the second abutting support (42) and the first sliding support (41).

7. The ultra-pure tube valve body defect detection apparatus of claim 6, wherein: A plurality of installation grooves (30) are formed in the rotating disc (3), a third push rod (31) is slidably connected in the installation groove (30), an abutting wedge (32) is installed at one end of the third push rod (31), the abutting wedge (32) is elastically connected with the rotating disc (3) through a fourth spring (33), and the push plate (25) and the L-shaped abutting strip (22) are both fixed with an insertion block (58).

8. The ultra-pure tube valve body defect detection apparatus according to claim 4, characterized by: A sealing cylinder (44) is fixed on the baffle (28), a piston sheet (45) is slidably connected to the sealing cylinder (44), a ventilation rod (46) is fixed on the piston sheet (45), the upper end of the ventilation rod (46) is elastically connected with the strip-shaped installation plate (19) through a seventh spring (461), and the ventilation rod (46) is connected with the annular sealing air bag (14) in communication through a pipeline.

9. The ultra-pure tube valve body defect detection apparatus according to claim 5, characterized by: A cleaning seat (49) is arranged above the rotating disc (3), a second guide rod (47) is fixed on the cleaning seat (49), the second guide rod (47) is elastically connected with the detection base (1) through an eighth spring (48), a first servo motor (50) is fixed on the cleaning seat (49), a soft hair brush (51) is installed on the motor shaft of the first servo motor (50), a push block (52) is fixed on the piston rod of the second electric push rod (34), and a dust suction cover (53) is installed at the bottom of the cleaning seat (49).

10. The ultra-pure tube valve body defect detection apparatus of claim 9, wherein: A second sliding support (54) is fixed on the detection base (1), a dustproof cover (55) is sleeved on the cleaning seat (49), the dustproof cover (55) is elastically connected with the second sliding support (54) through a ninth spring (56), and a third abutting frame (57) is fixed on one side of the dustproof cover (55).

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