Memsm atmospheric electric field sensor, assembly method, and atmospheric electric field meter

Abstract

The application provides a MEMS atmospheric electric field sensor, an assembling method and an atmospheric electric field instrument, which comprise a shell, a middle cylinder assembly, a sensing electrode, a MEMS electric field measuring module and a connector, wherein the shell comprises a cavity a which is open at the bottom and hollow inside; at least a part of the middle cylinder assembly is fixed in the cavity a; the sensing electrode is fixed to face the ground to sense the electric charge generated between the sensing electrode and the ground; the sensing electrode is shielded by the shell in the orthographic projection visual angle; the MEMS electric field measuring module is fixed on the middle cylinder assembly and connected with the sensing electrode; after the sensed electric charge is input into the MEMS electric field measuring module, the atmospheric electric field value is obtained, the measurement of the external electric field is realized, and the size of the external electric field is known; the connector is connected with the MEMS electric field measuring module and fixed on the shell or the middle cylinder assembly to transmit the electric field value. The application can avoid the electromagnetic interference signal from reducing the sensitivity of the MEMS atmospheric electric field sensor and ensure the stability and accuracy of the electric field measurement result.

Description

Technical Field

[0001] This invention relates to the field of sensor technology, and in particular to a MEMS atmospheric electric field sensor, assembly method, and atmospheric electric field meter. Background Technology

[0002] Lightning is one of the ten major natural disasters listed by the United Nations. It is also a crucial weather factor directly affecting the success or failure of space launches; atmospheric electric field strength is now listed as a primary condition for spacecraft launch eligibility in spacecraft launch specifications. Lightning strikes can cause severe damage to power grids, including line tripping, transmission and transformation equipment failures, and unplanned line outages, all directly impacting the safe and stable operation of the power grid and the reliability of power supply. The petrochemical industry, in addition to employing numerous lightning-sensitive electrical and electronic devices and auxiliary facilities, also has a significant portion of its materials and finished product storage and transportation processes being flammable and explosive, making it one of the most sensitive industries prone to lightning-related accidents. Currently, MEMS atmospheric electric field sensors are widely used to monitor and analyze changes in atmospheric electric field strength and polarity, identifying potential lightning strike hazards and providing early warnings before disasters occur. This is of great significance for lightning protection and disaster mitigation and represents the future trend for meteorological departments in forecasting lightning and other severe weather events.

[0003] like Figure 1 As shown in the publication (announcement) number CN118169480A, a MEMS atmospheric electric field sensor and its assembly method are disclosed, including a conductive shell, a conductive component, an insulating component, a middle cylinder component, and a MEMS electric field measurement module. A first groove is formed on the bottom end face of the conductive shell, facing its top. The conductive component is placed inside the first groove, and the insulating component is placed inside the first groove and fixed to the bottom of the conductive component. At least a portion of the middle cylinder component is placed inside the first groove and positioned at the bottom of the insulating component. A first internal cavity is formed inside the middle cylinder component, and the first internal cavity is filled with adhesive. The MEMS electric field measurement module is vertically clamped inside the first internal cavity and wrapped with adhesive. The MEMS electric field measurement module includes a wire connected to it. The tip of the wire passes through the middle cylinder component and the insulating component sequentially and connects to the conductive component, so as to detect the external electric field through the conductive component and the conductive shell. Since the sensing direction of the conductive shell is mainly towards the side and top regions of the MEMS atmospheric electric field sensor, and there are a large number of electromagnetic interference signals in the air, the electromagnetic interference signals will reduce the sensitivity of the MEMS atmospheric electric field sensor and affect the accuracy of electric field measurement when the conductive shell senses charges.

[0004] Therefore, how to avoid electromagnetic interference signals from reducing the sensitivity of MEMS atmospheric electric field sensors and ensure the accuracy of electric field measurements is a technical problem that urgently needs to be solved. Summary of the Invention

[0005] To address the shortcomings mentioned above, this invention provides a MEMS atmospheric electric field sensor, assembly method, and atmospheric electric field meter that can avoid electromagnetic interference signals reducing the sensitivity of the MEMS atmospheric electric field sensor and ensure the stability and accuracy of electric field measurement results.

[0006] To achieve the above objectives, in a first aspect, the present invention provides a MEMS atmospheric electric field sensor, comprising a housing, a middle cylinder assembly, a sensing electrode, a MEMS electric field measurement module, and a connector, wherein: The outer shell includes a cavity a that is open at the bottom and hollow inside; At least a portion of the middle cylinder assembly is fixed within the cavity a; The sensing electrode, after being fixed and facing the ground, is used to sense the charge generated between the sensing electrode and the ground. In a frontal projection view, the sensing electrode is blocked by the outer shell. The MEMS electric field measurement module is fixed on the middle cylinder assembly and connected to the sensing electrode. After the sensing electrode inputs the sensed charge into the MEMS electric field measurement module, it obtains the atmospheric electric field value, realizes the measurement of the external electric field, and knows the magnitude of the external electric field. The connector is connected to the MEMS electric field measurement module and fixed to the outer shell or middle cylinder assembly to transmit the atmospheric electric field value.

[0007] In one embodiment, the middle cylinder assembly is fixed inside the cavity a, and includes a middle cylinder, a polytetrafluoroethylene ring a sequentially fixed to the bottom end face of the middle cylinder, and an outer cylinder fixing member, wherein: The middle cylinder has a hollow cavity b inside, and the MEMS electric field measurement module is fixed inside the cavity b. The cavity b is filled with adhesive to fix the MEMS electric field measurement module. The polytetrafluoroethylene ring a is fixed to the bottom end face of the middle cylinder; The outer cylinder fixing component is fixed to the bottom end face of the polytetrafluoroethylene ring a, and one end of the MEMS electric field measurement module is connected to the outer cylinder fixing component through a connecting component.

[0008] In one embodiment, the sensing electrode is a sheet-like electrode sheet, which is fixed to the bottom end face of the outer cylinder fixing member and faces the ground, wherein the edge of the electrode sheet does not contact the inner wall surface of the outer shell; When the electrode plate senses the charge between the MEMS atmospheric electric field sensor and the ground, the charge is input to the MEMS electric field measurement module through the communication component to obtain the atmospheric electric field value, thereby realizing the measurement of the external electric field and determining the magnitude of the external electric field.

[0009] In one embodiment, the connectivity component includes connected wires and conductive parts, wherein: When the MEMS electric field measurement module is vertically arranged inside the cavity b, the end of the wire is connected to the MEMS electric field measurement module, and the top of the wire passes through the middle cylinder and the polytetrafluoroethylene ring a in sequence, and then connects to the sensing electrode through the conductive component and the outer cylinder fixing component to transmit the sensed charge.

[0010] In one embodiment, a portion of the middle cylinder assembly is fixed inside the cavity a, and another portion is located outside the cavity a, including the middle cylinder, a support, and a polytetrafluoroethylene ring b, wherein: The middle cylinder is connected to the outer shell via the polytetrafluoroethylene ring b, and the bracket is fixed to the top of the middle cylinder; The MEMS electric field measurement module is fixed to the top of the bracket and connected to the sensing electrode through a connecting component.

[0011] In one embodiment, the sensing electrode is an electrode ring with a ring structure. The electrode ring is fixed to the bottom end face of the polytetrafluoroethylene ring b and faces the ground. The edge of the electrode ring does not contact the inner wall surface of the outer shell or the outer wall surface of the middle cylinder. When the electrode ring senses the charge between the MEMS atmospheric electric field sensor and the ground, the charge is input to the MEMS electric field measurement module through the communication component to obtain the atmospheric electric field value, thereby realizing the measurement of the external electric field and determining the magnitude of the external electric field.

[0012] In one embodiment, the connectivity component includes connected wires and conductive parts, wherein: When the MEMS electric field measurement module is fixed horizontally on the bracket, the end of the wire is connected to the MEMS electric field measurement module, and the top of the wire is connected to the sensing electrode through a conductive component to transmit the sensed charge.

[0013] In one embodiment, the housing includes a first housing and a second housing, with at least a portion of the sensing electrode located in the second housing, wherein the second housing has a horn-shaped structure.

[0014] Secondly, the present invention also provides an assembly method for assembling the above-mentioned MEMS atmospheric electric field sensor, comprising the following steps: The MEMS electric field measurement module is fixed inside or on top of the middle cylinder assembly, and the MEMS electric field measurement module is fixed with adhesive. The position of the sensing electrode facing the ground after it is fixed is used to sense the charge generated between the sensing electrode and the ground; The MEMS electric field measurement module is connected to the sensing electrode. After the sensing electrode inputs the sensed charge into the MEMS electric field measurement module, the atmospheric electric field value is obtained, thereby realizing the measurement of the external electric field and determining the magnitude of the external electric field.

[0015] Thirdly, the present invention also provides an atmospheric electric field meter, comprising the aforementioned MEMS atmospheric electric field sensor, a connecting bend, a main body, a solar panel, and a control box, wherein the control box includes a control module, wherein: The connecting bend, the solar panel, and the control box are all fixed to the main body. The MEMS atmospheric electric field sensor is connected to one end of the connecting bend and faces the ground to sense the charge generated between the sensing electrode and the ground. The electric field value obtained from the charge is input into the control module. When the analysis result of the atmospheric electric field value meets the preset conditions, an early warning is issued.

[0016] Compared with the prior art, the present invention has one of the following advantages: Because the ground has a certain shielding effect, it can cancel out some of the electromagnetic interference from the sky. When the sensing electrode is facing the ground, a stable electric field distribution is formed between the sensing electrode and the ground. When the charge generated between the sensing electrode and the ground is sensed, compared with the existing MEMS atmospheric electric field sensors, the electromagnetic interference signal can be avoided from reducing the sensitivity of the MEMS atmospheric electric field sensor, ensuring the stability and accuracy of the electric field measurement results. In the orthographic projection view, the sensing electrode is shielded by the outer casing, which can prevent the sensing electrode from colliding with objects from above or to the side, thus avoiding damage to the sensing electrode. Since the edges of the electrode plates do not contact the inner wall of the outer casing, when the outer casing is made of metal, it can be ensured that the sensed charge will only be guided to the outer cylinder fixture. Attached Figure Description

[0017] Figure 1 A cross-sectional view of an existing MEMS atmospheric electric field sensor; Figure 2 This is a perspective view of the first embodiment of the MEMS atmospheric electric field sensor in this invention; Figure 3 for Figure 2 A sectional view; Figure 4 forFigure 2 Exploded view; Figure 5 This is a perspective view of the second embodiment of the MEMS atmospheric electric field sensor in this invention; Figure 6 for Figure 5 A sectional view; Figure 7 This is a perspective view of the first embodiment of the atmospheric electric field instrument in this invention; Figure 8 for Figure 7 A stereoscopic view from another perspective; Figure 9 This is a perspective view of the second embodiment of the atmospheric electric field meter in this invention; Figure 10 for Figure 9 A stereoscopic view from another perspective.

[0018] The main reference numerals are as follows: 1-Outer shell; 101-First shell; 102-Second shell; 103-Cavity a; 2-Sensing electrode; 3-Outer cylinder fixing component; 4-PTFE ring a; 5-Middle cylinder; 501-Cavity b; 6-MEMS electric field measurement module; 600-MEMS electric field sensitive chip; 601-Preamplifier circuit board; 602-Drive demodulation circuit board; 603-Insulating sealing box; 604-Wire; 605-Conductive component; 7-Connector; 8-Connecting bend; 9-Main body; 901-Main body bracket; 902-Solar energy mounting inclined beam; 903-Solar energy mounting crossbar; 904-Bracket base; 10-Control box; 11-Solar panel; 12-MEMS atmospheric electric field sensor; 13-PTFE ring b; 14-Bracket. Detailed Implementation

[0019] To make the objectives, technical solutions, and advantages of this invention clearer, the technical solutions of this invention will be clearly and completely described below in conjunction with specific embodiments and corresponding drawings. Obviously, the described embodiments are only a part of the embodiments of this invention, and not all of them. Based on the embodiments of this invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this invention.

[0020] In the description of this invention, it should be understood that the terms "upper," "lower," "top surface," "bottom surface," and "inner," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing the invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of the invention. It should be noted that when a component is considered to be "connected" to another component, it can be directly connected to the other component or there may be a component positioned centrally. Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance. Example 1

[0021] like Figures 2 to 4 As shown, this embodiment provides a MEMS atmospheric electric field sensor 12, including a housing 1, a middle cylinder assembly, a sensing electrode 2, a MEMS electric field measurement module 6, and a connector 7, wherein: The outer shell 1 includes a cavity a103 that is open at the bottom and hollow inside; The middle cylinder assembly is at least partially fixed in the cavity a103; The sensing electrode 2 is fixed and faces the ground to sense the charge generated between the sensing electrode 2 and the ground. In the orthographic projection view, the sensing electrode 2 is blocked by the outer shell 1. MEMS electric field measurement module 6 is fixed on the middle cylinder assembly and connected to the sensing electrode 2. After the sensing electrode 2 inputs the induced charge into the MEMS electric field measurement module 6, the atmospheric electric field value is obtained, and the external electric field is measured to determine the magnitude of the external electric field. Connector 7 is connected to MEMS electric field measurement module 6 and fixed to housing 1 to transmit electric field values.

[0022] Specifically, the outer casing 1 includes a first casing 101 and a second casing 102 connected to each other. The first casing 101 is a cylindrical structure with an open bottom and a hollow interior, and its internal cavity a103 is used to accommodate the middle cylinder assembly and the MEMS electric field measurement module 6. A connector fixing hole for fixing the connector 7 and a screw hole for connecting to the connecting bend 8 are formed on the top end face of the first casing 101. The second casing 102 has a flared structure; after the sensing electrode 2 is fixed to the bottom end face of the middle cylinder assembly, it is placed in the second casing 102, and the edge of the sensing electrode 2 does not contact the inner wall surface of the second casing 102.

[0023] Optionally, the housing 1 can be made of metallic or non-metallic materials. When the housing 1 is made of metallic material, grounding is achieved after the housing 1 is connected to the connecting bend. When the housing 1 is made of non-metallic material, it is possible to prevent electrical charge from adhering to the surface of the housing 1.

[0024] Specifically, the middle cylinder assembly is fixed inside the cavity a103, including the middle cylinder 5, the polytetrafluoroethylene ring a4 and the outer cylinder fixing member 3 arranged coaxially. The polytetrafluoroethylene ring a4 is fixed on the bottom end face of the middle cylinder 5, and the outer cylinder fixing member 3 is fixed on the bottom end face of the polytetrafluoroethylene ring a4.

[0025] Furthermore, the middle cylinder 5 is a hollow columnar body with a hollow cavity b501 formed inside. Its top end is open and connected to the inner side of the top end face of the first housing 101, such that a portion of the top end face of the first housing 101 forms the top end face of the middle cylinder 5. A first through hole is formed on the bottom end face of the middle cylinder 5, and an annular positioning post a is formed outside the first through hole.

[0026] Preferably, the top end of the middle cylinder 5 can be connected to the inner side of the top end face of the first housing 101 by an adhesive.

[0027] Furthermore, the PTFE ring a4 is a ring-shaped cylindrical structure and is fixed to the bottom of the middle cylinder 5 by screws. The diameter of the PTFE ring a4 is approximately the same as the diameter of the middle cylinder 5. When the PTFE ring a4 is fixed to the bottom end face of the middle cylinder 5, the positioning post a is located inside the ring-shaped area, which facilitates the positioning of the PTFE ring a4.

[0028] Furthermore, a downwardly protruding positioning post b is formed on the bottom end face of the polytetrafluoroethylene ring a4. The annular region penetrates the interior of the positioning post b.

[0029] Furthermore, the outer cylinder fastener 3 includes a base plate and an annular sidewall, which can be an integral structure or a separate structure. A second through hole is formed on the base plate, and a plurality of mounting holes are also formed on the base plate surrounding the outer side of the second through hole, as well as conductive fixing positions formed on the base plate.

[0030] Optionally, the second through hole can be a axial hole coaxial with the base plate, or an eccentric hole coaxial with the base plate.

[0031] Preferably, the second through hole is a axial hole formed on the base plate, and the annular sidewall and the base plate are an integral structure, which can ensure the connection performance between the two compared with a split structure. When the outer cylinder fixing part 3 is assembled with the polytetrafluoroethylene ring a4, the second through hole is sleeved on the outside of the positioning post b, and the bottom end face of the positioning post b and the inner wall surface of the top end face of the base plate are located on the same plane.

[0032] In this embodiment, since the outer cylinder fixing part 3, the polytetrafluoroethylene ring a4 and the middle cylinder 5 are coaxially assembled from bottom to top, the second through hole, the annular area and the first through hole are also coaxially arranged.

[0033] Specifically, the sensing electrode 2 is a sheet-like electrode sheet, including a sheet body and an upper edge connected to each other. The upper edge is a columnar structure and is fixed to the top end face of the sheet body. A thread is formed on the outer wall of the upper edge to mate with the annular sidewall, so that the electrode sheet is threaded onto the bottom end face of the outer cylinder fixing member 3 and positioned facing the ground to sense the charge between the MEMS atmospheric electric field sensor 12 and the ground.

[0034] Optionally, when the electrode sheet is installed on the bottom end face of the outer cylinder fixing member 3, the bottom end face of the electrode sheet is set parallel to the ground, or the bottom end face of the electrode sheet is set at an angle, forming an angle with the ground.

[0035] Preferably, the bottom end face of the electrode sheet is arranged parallel to the ground. When the electrode sheet senses the charge between the MEMS atmospheric electric field sensor 12 and the ground, electromagnetic interference can be reduced, ensuring the stability and accuracy of the electric field measurement results.

[0036] Since the outer diameter of the upper edge is approximately the same as the inner diameter of the annular sidewall, when the two are assembled, not only can the contact area between them be increased to ensure the charge transfer effect, but the electrode plates can also be prevented from shaking after installation.

[0037] Since the outer cylinder fixing component 3 is made of metal, when the electrode plate senses the charge between the MEMS atmospheric electric field sensor 12 and the ground, the charge can be transferred to the outer cylinder fixing component 3 to enhance the charge intensity and improve the accuracy of detecting external charges.

[0038] Furthermore, after the electrode plate is assembled with the outer cylinder fixing member 3, it is located in the second housing 102. However, the inner diameter of each position of the second housing 102 is larger than the diameter of the electrode plate, so that the edge of the electrode plate does not contact the inner wall surface of the second housing 102. When the outer shell 1 is made of metal, since the edge of the electrode plate does not contact the inner wall surface of the second housing 102, the induced charge will not be guided into the outer shell 1, ensuring that the induced charge is only guided into the outer cylinder fixing member 3.

[0039] In addition, when the electrode sheet is assembled with the outer cylinder fixing part 3, the electrode sheet is shielded by the second housing 102 in the orthographic projection view, which can prevent the electrode sheet from being hit by objects from above or to the side, thus avoiding damage to the electrode sheet.

[0040] In addition, the second housing 102 has a horn-shaped structure, which provides a certain direction for the charge between the MEMS atmospheric electric field sensor 12 and the ground, making it easier for the charge to accumulate on the electrode sheet and make full contact with the electrode sheet, thereby improving the sensitivity of the sensed charge.

[0041] Specifically, the MEMS electric field measurement module 6 analyzes the input charge to obtain the atmospheric electric field value, thereby measuring the external electric field and determining its magnitude. The MEMS electric field measurement module 6 is vertically positioned inside the cavity b501 and is surrounded by adhesive filling the cavity b501 to secure it. The MEMS electric field measurement module 6 is connected to the connector 7 and the connecting component. The connecting component is connected to the outer cylinder fixing member 3, inputting the induced charge into the MEMS electric field measurement module 6. The connector 7 connects the MEMS atmospheric electric field sensor 12 to an external device to output the analyzed atmospheric electric field value.

[0042] Furthermore, the MEMS electric field measurement module 6 includes a MEMS electric field sensing chip 600, a preamplifier circuit board 601, and a drive demodulation circuit board 602, the shape of which can be circular, elliptical, rectangular, square, or polygonal. The shielded electrode in the MEMS electric field sensing chip 600 periodically vibrates to modulate the detection electrode to generate a detection current. The MEMS electric field sensing chip 600 is placed in an insulating sealed box 603, which is made of insulating material and has a metal cover on its top. The preamplifier circuit board 601 converts the electric field current signal into a voltage signal. The drive demodulation circuit board 602 generates the dual differential signal required for the normal operation of the MEMS electric field sensing chip 600 and calculates the electric field information from the voltage signal output by the preamplifier circuit board 601, thereby obtaining the atmospheric electric field value.

[0043] Specifically, the connecting component includes a connected wire 604 and a conductive component 605. The top end of the wire 604 is connected to the MEMS electric field sensitive chip 600 or a metal cover plate on top of the insulating sealed box 603. The end of the wire 604 extends downwards through a first through hole, an annular region, and a second through hole before reaching the outer cylinder fixing component 3. The wire 604 can be a regular wire 604, a shielded wire 604, a high-frequency radio frequency (RF) wire, a semi-steel semi-flexible RF wire, etc. The conductive component 605 is a screw, or a screw and a connecting piece connected to it. When the conductive component is a screw, the end of the wire 604 is wrapped around the outside of the screw. When the screw is tightened inside the conductive fixing position, the wire 604 is connected to the conductive fixing position through the screw, and the charge accumulated on the outer cylinder fixing component 3 is input into the wire 604 through the screw. When the conductive component is a screw and a connecting piece sleeved on the outside of the screw and connected to it, the end of the wire 604 is welded to the connecting piece. When the screw is tightened inside the conductive fixing position, the wire 604 is connected to the conductive fixing position through the connecting piece and the screw, and the charge accumulated on the outer cylinder fixing part 3 is input into the wire 604 through the screw and the connecting piece.

[0044] Example 2 like Figure 5 and Figure 6As shown, this embodiment provides a MEMS atmospheric electric field sensor 12, including a housing 1, a middle cylinder assembly, a sensing electrode 2, a MEMS electric field measurement module 6, and a connector 7. The difference between this embodiment and the first embodiment described above is: A portion of the middle cylinder assembly is fixed inside the cavity a103, while another portion is located outside the cavity a103. The assembly includes a middle cylinder 5, a support 14, and a PTFE ring b13. The middle cylinder 5 is connected to the outer shell 1 via the PTFE ring b13, and the support 14 is fixed to the top of the middle cylinder 5. The middle cylinder 5 comprises a first portion located inside the outer shell 1 and a second portion located outside the outer shell 1. The MEMS electric field measurement module 6 is fixed to the top of the support 14 and connected to the sensing electrode 2 via a connecting assembly.

[0045] The sensing electrode 2 is a ring-shaped electrode ring, fixed to the bottom end face of the polytetrafluoroethylene ring b13, facing the ground. The edge of the electrode ring does not contact the inner wall of the second housing 102 or the outer wall of the middle cylinder 5. When the electrode ring senses the charge between the MEMS atmospheric electric field sensor 12 and the ground, the charge is input to the MEMS electric field measurement module 6 via the communication component to obtain the atmospheric electric field value, thus measuring the magnitude of the external electric field.

[0046] When the MEMS electric field measurement module 6 is horizontally fixed on the bracket 14, the top end of the wire 604 is connected to the MEMS electric field measurement module 6, and the end of the wire 604 is connected to the sensing electrode 2 through a conductive component to transmit the sensed charge. After the charge is input into the MEMS electric field measurement module 6, the atmospheric electric field value is obtained after analysis. In addition, the MEMS electric field measurement module 6 is also connected to the connector 7 fixed on the middle cylinder 5 to output the obtained atmospheric electric field value.

[0047] In Embodiment 1 and Embodiment 2, the working principle of the MEMS atmospheric electric field sensor 12 is as follows: The electrode sheet is electrically connected to the MEMS electric field measurement module 6 through the outer cylinder fixing component 3 and the connecting component. When there is a DC electric field E in the outside, the electrode sheet senses the charge generated between the MEMS atmospheric electric field sensor 12 and the ground, and it is linearly related to the DC electric field E. The charge sensed by the electrode sheet generates an electric field Eg, which is linearly related to the DC electric field E. The MEMS electric field sensitive chip 600 obtains the value of the external atmospheric electric field by measuring the electric field Eg. Example 3

[0048] This embodiment provides an assembly method for assembling the MEMS atmospheric electric field sensor described in Embodiment 1 above, including the following steps: The middle cylinder, PTFE ring a, and outer cylinder fasteners are assembled into a middle cylinder assembly; The MEMS electric field measurement module is placed in the middle cylinder. The end of the connecting component passes through the outer cylinder, the polytetrafluoroethylene ring a, and the outer cylinder fixing component in sequence, and is then fixedly connected to the outer cylinder fixing component. The interior of the middle cylinder is filled with adhesive so that the adhesive wraps around the outside of the MEMS electric field measurement module 6 to fix the MEMS electric field measurement module. The sensing electrode is fixed to the bottom end face of the outer cylinder fixing component, so that the sensing electrode faces the ground after fixing, so as to sense the charge generated between the sensing electrode and the ground; The sensing electrode is connected to the MEMS electric field measurement module via a connecting component and an outer cylinder fixing component. After the sensing electrode inputs the induced charge into the MEMS electric field measurement module, the atmospheric electric field value is obtained, thereby realizing the measurement of the external electric field and determining the magnitude of the external electric field. Example 4

[0049] This embodiment provides an assembly method for assembling the MEMS atmospheric electric field sensor described in Embodiment 2 above, including the following steps: After the MEMS electric field measurement module and the bracket are fixed to the top end face of the middle cylinder in sequence, the MEMS electric field measurement module and the connector are connected. After the adhesive is injected into the inside of the outer shell, the middle cylinder is connected to the outer shell through the polytetrafluoroethylene ring b, so that the MEMS electric field measurement module, the bracket and the first part of the middle cylinder are located inside the outer shell, and the adhesive is wrapped around the outside of the MEMS electric field measurement module to fix the MEMS electric field measurement module. After the end of the connecting component is connected to the sensing electrode, the sensing electrode is fixed to the bottom end face of the polytetrafluoroethylene ring b, so that the sensing electrode is fixed and faces the ground, so as to sense the charge generated between the sensing electrode and the ground. After the sensing electrode inputs the induced charge into the MEMS electric field measurement module, it obtains the atmospheric electric field value, realizes the measurement of the external electric field, and knows the magnitude of the external electric field. Example 5

[0050] like Figure 7 and Figure 8As shown, this embodiment provides an atmospheric electric field meter, including the MEMS atmospheric electric field sensor 12 described in Embodiment 1 above, a connecting bend 8, a main body 9, a solar panel 11, and a control box 10. The control box 10 includes a control module fixed inside it. The main body 9 includes a main support 901, a solar mounting beam 902, a solar mounting crossbar 903, and a support base 904. The solar panel 11 is fixed to the main support 901 via the solar mounting beam 902 and the solar mounting crossbar 903. The control box 10 is fixed to the main support 901. One end of the connecting bend 8 is connected to the main support 901, and the MEMS atmospheric electric field sensor 12 is connected to the other end of the connecting bend 8. The sensing electrode 2 in the MEMS atmospheric electric field sensor 12 faces the ground to sense the charge generated between the sensing electrode 2 and the ground.

[0051] When the sensing electrode 2 in the MEMS atmospheric electric field sensor 12 senses the charge generated between the MEMS atmospheric electric field sensor 12 and the ground, it obtains the atmospheric electric field value. The atmospheric electric field value is input into the control module via connector 7 and wires for analysis, and an early warning is issued based on the preset conditions satisfied by the analyzed atmospheric electric field value.

[0052] After analysis, a first warning is issued when the atmospheric electric field value meets the first preset condition; a second warning is issued when the atmospheric electric field value meets the second preset condition; and a third warning is issued when the atmospheric electric field value meets the third preset condition. Example 6

[0053] like Figure 9 and Figure 10 As shown, this embodiment provides an atmospheric electric field meter, including the MEMS atmospheric electric field sensor 12 described in Embodiment 2 above, a connecting bend 8, a main body 9, a solar panel 11, and a control box 10. The control box 10 includes a control module fixed inside it. The main body 9 includes a main support 901, a solar mounting beam 902, a solar mounting crossbar 903, and a support base 904. The solar panel 11 is fixed to the main support 901 via the solar mounting beam 902 and the solar mounting crossbar 903. The control box 10 is fixed to the main support 901. One end of the connecting bend 8 is connected to the main support 901, and the MEMS atmospheric electric field sensor 12 is connected to the other end of the connecting bend 8. The sensing electrode 2 in the MEMS atmospheric electric field sensor 12 faces the ground to sense the charge generated between the sensing electrode 2 and the ground.

[0054] When the sensing electrode 2 in the MEMS atmospheric electric field sensor 12 senses the charge generated between the MEMS atmospheric electric field sensor 12 and the ground, it obtains the atmospheric electric field value. The atmospheric electric field value is input into the control module via connector 7 and wires for analysis, and an early warning is issued based on the preset conditions satisfied by the analyzed atmospheric electric field value.

[0055] After analysis, a first warning is issued when the atmospheric electric field value meets the first preset condition; a second warning is issued when the atmospheric electric field value meets the second preset condition; and a third warning is issued when the atmospheric electric field value meets the third preset condition.

[0056] In the above embodiments five and six, for example, after analysis, the atmospheric electric field value is 3kV / m, which is the same as the first preset condition (3kV / m). Therefore, a first warning can be issued; the atmospheric electric field value is 5kV / m, which is the same as the second preset condition (5kV / m). Therefore, a second warning can be issued; the atmospheric electric field value is 7kV / m, which is the same as the third preset condition (7kV / m). Therefore, a third warning can be issued.

[0057] The above description is merely a preferred embodiment of the present invention and is illustrative rather than restrictive. Those skilled in the art will understand that many changes, modifications, and even equivalents can be made within the spirit and scope defined by the claims of the present invention, all of which will fall within the protection scope of the present invention.

Claims

1. A MEMS atmospheric electric field sensor, characterized in that, Includes a housing, a middle cylinder assembly, sensing electrodes, a MEMS electric field measurement module, and connectors, among which: The outer shell includes a cavity a that is open at the bottom and hollow inside. The outer shell includes a first shell and a second shell that are connected to each other. The cavity a forms the internal region of the first shell. The second shell has a trumpet-shaped structure. The middle cylinder assembly is at least partially fixed in the cavity a, including the middle cylinder, the polytetrafluoroethylene ring a, and the outer cylinder fixing component. The polytetrafluoroethylene ring a and the outer cylinder fixing component are sequentially fixed to the bottom end face of the middle cylinder. Alternatively, it includes the middle cylinder, the bracket, and the polytetrafluoroethylene ring b. The middle cylinder is connected to the outer shell through the polytetrafluoroethylene ring b, and the bracket is fixed to the top of the middle cylinder. The sensing electrode, after being fixed and facing the ground, is used to sense the charge generated between the sensing electrode and the ground. In a normal projection view, the sensing electrode is shielded by the second housing, wherein: The sensing electrode is a sheet-like electrode plate, which is fixed to the bottom end face of the outer cylinder fixing component and faces the ground; or, the sensing electrode is an electrode ring, which is fixed to the bottom end face of the polytetrafluoroethylene ring b and faces the ground. The MEMS electric field measurement module is fixed on the middle cylinder assembly and connected to the sensing electrode. After the sensing electrode inputs the sensed charge into the MEMS electric field measurement module, it obtains the atmospheric electric field value, realizes the measurement of the external electric field, and knows the magnitude of the external electric field. The connector is connected to the MEMS electric field measurement module and fixed to the outer shell or middle cylinder assembly to transmit the atmospheric electric field value.

2. The MEMS atmospheric electric field sensor according to claim 1, characterized in that, The middle cylinder assembly is fixed inside the cavity a, wherein: The middle cylinder has a hollow cavity b inside, and the MEMS electric field measurement module is fixed inside the cavity b. The cavity b is filled with adhesive to fix the MEMS electric field measurement module. The polytetrafluoroethylene ring a is fixed to the bottom end face of the middle cylinder; The outer cylinder fixing component is fixed to the bottom end face of the polytetrafluoroethylene ring a, and one end of the MEMS electric field measurement module is connected to the outer cylinder fixing component through a connecting component.

3. The MEMS atmospheric electric field sensor according to claim 2, characterized in that, The edge of the electrode sheet does not contact the inner wall surface of the outer casing; When the electrode plate senses the charge between the MEMS atmospheric electric field sensor and the ground, the charge is input to the MEMS electric field measurement module through the communication component to obtain the atmospheric electric field value, thereby realizing the measurement of the external electric field and determining the magnitude of the external electric field.

4. The MEMS atmospheric electric field sensor according to claim 2 or 3, characterized in that, The connectivity component includes connected wires and conductive parts, wherein: When the MEMS electric field measurement module is vertically arranged inside the cavity b, the end of the wire is connected to the MEMS electric field measurement module, and the top of the wire passes through the middle cylinder and the polytetrafluoroethylene ring a in sequence, and then connects to the sensing electrode through the conductive component and the outer cylinder fixing component to transmit the sensed charge.

5. The MEMS atmospheric electric field sensor according to claim 1, characterized in that, A portion of the middle cylinder assembly is fixed inside the cavity a, and another portion is located outside the cavity a. The MEMS electric field measurement module is fixed to the top of the bracket and connected to the sensing electrode through a connecting component.

6. The MEMS atmospheric electric field sensor according to claim 5, characterized in that, The edge of the electrode ring does not contact the inner wall surface of the outer shell or the outer wall surface of the middle cylinder; When the electrode ring senses the charge between the MEMS atmospheric electric field sensor and the ground, the charge is input to the MEMS electric field measurement module through the communication component to obtain the atmospheric electric field value, thereby realizing the measurement of the external electric field and determining the magnitude of the external electric field.

7. The MEMS atmospheric electric field sensor according to claim 5 or 6, characterized in that, The connectivity component includes connected wires and conductive parts, wherein: When the MEMS electric field measurement module is fixed horizontally on the bracket, the end of the wire is connected to the MEMS electric field measurement module, and the top of the wire is connected to the sensing electrode through a conductive component to transmit the sensed charge.

8. An assembly method, characterized in that, The assembly of the MEMS atmospheric electric field sensor according to any one of claims 1 to 7 includes the following steps: The MEMS electric field measurement module is fixed inside or on top of the middle cylinder assembly, and the MEMS electric field measurement module is fixed with adhesive. The position of the sensing electrode facing the ground after it is fixed is used to sense the charge generated between the sensing electrode and the ground; The MEMS electric field measurement module is connected to the sensing electrode. After the sensing electrode inputs the sensed charge into the MEMS electric field measurement module, the atmospheric electric field value is obtained, thereby realizing the measurement of the external electric field and determining the magnitude of the external electric field.

9. An atmospheric electric field meter, characterized in that, The system comprises a MEMS atmospheric electric field sensor according to any one of claims 1 to 7, a connecting bend, a main body, a solar panel, and a control box, wherein the control box includes a control module, wherein: The connecting bend, the solar panel, and the control box are all fixed to the main body. The MEMS atmospheric electric field sensor is connected to one end of the connecting bend and faces the ground to sense the charge generated between the sensing electrode and the ground. The electric field value obtained from the charge is input into the control module. When the analysis result of the atmospheric electric field value meets the preset conditions, an early warning is issued.

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