Taper measurement tool and assembly error optimization method

Abstract

The invention discloses a conicity measurement tool and an optimization method of assembly errors, and relates to the technical field of wafer processing. The taper measuring tool comprises a base and a measuring mechanism, the base is configured to support a main shaft, one end of the main shaft is provided with a connecting shaft, the base is provided with a measuring support and a measuring shaft, a first space coordinate system is established with the axis of a measuring hole as the X axis, and a second space coordinate system is established with the axis of the measuring shaft as the X axis; the measuring mechanism comprises two sets of measuring assemblies, one measuring mechanism is arranged on the inner wall of the measuring hole so as to measure the coordinates of the corresponding points of the outer circumferential face of the connecting shaft in the first space coordinate system, and the other measuring mechanism is arranged on the periphery of the measuring shaft so as to measure the coordinates of the corresponding points of the inner wall of the assembling hole in the second space coordinate system. The conicity measuring tool can improve the conicity measuring precision, if the conicity measuring tool is qualified, the conicity measuring tool is directly assembled, and if the conicity measuring tool is unqualified, the conicity measuring tool is ground, so that the assembling error is reduced, and the production efficiency and the yield are improved.

Description

Technical Field

[0001] This invention relates to the field of wafer fabrication technology, and in particular to a taper measurement fixture and a method for optimizing assembly errors. Background Technology

[0002] In wafer dicing, the fit between the spindle and the cutter head is a key factor affecting the chip dicing quality. If the taper of the spindle and the taper of the cutter head are too different, the cutter head will tilt when it is assembled onto the spindle, causing the cutter head to jump too far and resulting in chip chipping and off-center cutting when dicing the wafer.

[0003] In existing technologies, the measurement of spindle taper and cutter head taper often relies on a coordinate measuring machine. The measurement is extremely unchanging, and it only measures a single taper, which cannot effectively reflect the fit between the spindle and the cutter head. This results in large errors after assembly, which seriously affects production efficiency and yield. Summary of the Invention

[0004] The purpose of this invention is to propose an optimization method for taper measurement tooling and assembly error, which can improve the accuracy of taper measurement. If the taper is qualified, it can be directly assembled; if it is unqualified, it can be ground, thereby reducing assembly error and improving production efficiency and yield.

[0005] To achieve this objective, the present invention adopts the following technical solution:

[0006] A taper measuring fixture, comprising:

[0007] A base is configured to support a spindle. One end of the spindle is provided with a connecting shaft. A measuring bracket and a measuring shaft are provided on the base. The measuring bracket has a measuring hole. The connecting shaft passes through the measuring hole. The measuring shaft passes through the mounting hole of the cutter head. A first spatial coordinate system is established with the axis of the measuring hole as the X-axis. A second spatial coordinate system is established with the axis of the measuring shaft as the X-axis.

[0008] The measuring mechanism includes two sets of measuring components. The two sets of measuring components of one measuring mechanism are axially spaced apart on the inner wall of the measuring hole to measure the coordinates of the corresponding point on the outer periphery of the connecting shaft in the first spatial coordinate system. The two sets of measuring components of the other measuring mechanism are circumferentially spaced apart on the outer periphery of the measuring shaft to measure the coordinates of the corresponding point on the inner wall of the assembly hole in the second spatial coordinate system.

[0009] As an optional solution for the above-mentioned taper measuring fixture, the measuring component includes several sets of measuring points, each set of measuring points includes two measuring elements arranged symmetrically, and each set of measuring points can measure coordinates.

[0010] As an optional solution for the aforementioned taper measuring fixture, the measuring element is a gas nozzle.

[0011] As an optional solution for the aforementioned taper measuring fixture, all the gas nozzles of the measuring components in the same group protrude from the inner wall of the measuring hole at the same height; and / or,

[0012] All the gas nozzles of the measuring components in the same group protrude from the outer peripheral surface of the measuring shaft at the same height.

[0013] As an optional solution for the aforementioned taper measuring fixture, the base is provided with an adjustment groove, and the measuring bracket is movably disposed within the adjustment groove, allowing the measuring bracket to move in a plane perpendicular to the axial direction of the connecting shaft.

[0014] As an optional solution for the above-mentioned taper measuring fixture, the base is provided with limiting grooves at intervals along the circumference of the measuring axis, and the cutter head has an annular flange that can be engaged with the limiting grooves so that the cutter head and the measuring axis are coaxially arranged.

[0015] A method for optimizing assembly errors, utilizing the aforementioned taper measuring fixture to measure the taper of the connecting shaft and the taper of the assembly hole of the cutter head, characterized in that the method for optimizing assembly errors includes:

[0016] Taper calculation: The taper C1 of the connecting shaft is calculated using the coordinates measured by two sets of measuring components set on the inner wall of the measuring hole, and the taper C2 of the assembly hole is calculated using the coordinates measured by two sets of measuring components set on the outer circumferential surface of the measuring shaft.

[0017] Calculate the generatrix inclination angle: the generatrix inclination angle of the connecting shaft. The generatrix inclination angle of the assembly hole

[0018] Determine whether the inclination angle α of the busbar meets the standard; if not, grind the connecting shaft.

[0019] Determine whether the inclination angle β of the busbar meets the standard. If it does not, grind the assembly hole.

[0020] As an optional solution to the above-mentioned method for optimizing assembly errors, the method for optimizing assembly errors further includes:

[0021] Calculate the cutter head end runout value: The maximum tilt angle γ of the cutter head relative to the spindle is γ = |β-α| / 2. Based on the diameter of the cutter head and the maximum tilt angle γ of the cutter head relative to the spindle, calculate the maximum end runout value λ of the cutter head.

[0022] Determine whether the maximum end jump value λ meets the standard. If it does not, grind the connecting shaft or the mounting hole to reduce the maximum tilt angle γ.

[0023] As an optional method for optimizing the above assembly error, if the maximum end runout value λ of the cutter head is ≤2μm, then the requirement is met.

[0024] As an optional solution to the above-mentioned method for optimizing assembly errors, the step of calculating the runout value at the cutter head end includes:

[0025] Establish a coordinate system: Assemble the cutter head onto the spindle, and establish a third spatial coordinate system with the axis of the connecting shaft as the X-axis, the horizontal diameter of the connecting shaft as the Y-axis, and the vertical direction as the Z-axis. Obtain the highest point A1 and the lowest point A2 of the cutter head. Project the line connecting A1 and A2 onto the XZ plane of the third spatial coordinate system to form a reference projection. Use the intersection of the reference projection and the spindle as the origin of the third spatial coordinate system to determine the coordinates (X1, Z1) of A1 and (X2, Z2) of A2.

[0026] When the cutter head is at its maximum tilt angle γ, the coordinates of A1 are (X3, Z3), and the coordinates of A2 are (X4, Z4).

[0027]

[0028] The actual maximum end jump value of the cutter head is λ1 = X3 - X4.

[0029] The beneficial effects of this invention are:

[0030] This invention provides a taper measuring fixture and an optimization method for assembly errors. In this taper measuring fixture, a base is used to fix the spindle and the cutter head, and a measuring bracket is used to measure the taper of the connecting shaft, while a measuring shaft is used to measure the taper of the assembly hole of the cutter head. Specifically, two sets of measuring components in one measuring mechanism can measure the coordinates of corresponding points on the outer circumferential surface of the connecting shaft in a first spatial coordinate system, while two sets of measuring components in another measuring mechanism can measure the coordinates of corresponding points on the inner wall of the assembly hole in a second spatial coordinate system. Using these coordinates to calculate the diameters of the connecting shaft and the assembly hole effectively improves the accuracy of taper calculation. Furthermore, by calculating the average taper of the connecting shaft and the assembly hole using the coordinates of multiple points, the accuracy is further improved.

[0031] This taper measuring fixture can improve the accuracy of taper measurement. If the taper is qualified, it can be directly assembled; if it is unqualified, it can be ground, thereby reducing assembly errors and improving production efficiency and yield. Attached Figure Description

[0032] Figure 1 This is a schematic diagram of the structure of a taper measuring fixture provided in one embodiment of the present invention;

[0033] Figure 2This is a cross-sectional view of a taper measuring fixture provided in an embodiment of the present invention;

[0034] Figure 3 This is a schematic diagram of the structure of a measuring bracket provided in one embodiment of the present invention;

[0035] Figure 4 This is a schematic diagram of the structure of a measuring shaft tooling provided in one embodiment of the present invention;

[0036] Figure 5 This is a schematic diagram of a structure in which the connecting shaft and the cutter head are coaxially assembled according to an embodiment of the present invention;

[0037] Figure 6 This is a schematic diagram of the cutter head at its maximum tilt angle according to an embodiment of the present invention;

[0038] Figure 7 This is a schematic diagram of the structure of a third spatial coordinate system provided in an embodiment of the present invention.

[0039] In the picture:

[0040] 100. Spindle; 101. Connecting shaft; 200. Tool head;

[0041] 1. Base; 11. Adjustment groove; 2. Measuring bracket; 21. Measuring hole; 22. Screw hole; 3. Measuring shaft; 4. Positioning plate; 5. Measuring component. Detailed Implementation

[0042] Embodiments of the present invention are described in detail below. Examples of these embodiments are illustrated in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and intended to explain the present invention, and should not be construed as limiting the present invention.

[0043] In the description of this invention, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing the invention and for simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the invention. Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance. The terms "first position" and "second position" refer to two different positions.

[0044] Unless otherwise explicitly specified and limited, the terms "installation," "connection," "linking," and "fixing" should be interpreted broadly. For example, they can refer to fixed connections or detachable connections; mechanical connections or electrical connections; direct connections or indirect connections through an intermediate medium; and connections within two components or interactions between two components. Those skilled in the art can understand the specific meaning of these terms in this invention based on the specific circumstances.

[0045] Unless otherwise expressly specified and limited, "above" or "below" a second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of a second feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" of a second feature includes the first feature directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0046] The technical solution of the present invention will be further described below with reference to the accompanying drawings and specific embodiments.

[0047] This embodiment provides a taper testing fixture, such as... Figure 1 and Figure 2 As shown, the taper testing fixture includes a base 1 and a measuring mechanism. The base 1 is configured to support a spindle 100. A connecting shaft 101 is provided at one end of the spindle 100. A measuring bracket 2 and a measuring shaft 3 are provided on the base 1. The measuring bracket 2 has a measuring hole 21. The connecting shaft 101 passes through the measuring hole 21. The measuring shaft 3 passes through the assembly hole of the cutter head 200. The measuring mechanism is provided on the inner wall of the measuring hole 21 and the outer peripheral surface of the measuring shaft 3.

[0048] Among them, the measuring bracket 2 is used to measure the outer diameter of the connecting shaft 101, and the measuring shaft 3 is used to measure the inner diameter of the assembly hole.

[0049] Specifically, a first spatial coordinate system is established with the axis of the measuring hole 21 as the X-axis, and a second spatial coordinate system is established with the axis of the measuring shaft 3 as the X-axis. The measuring mechanism includes two sets of measuring components. The two sets of measuring components of one measuring mechanism are axially spaced on the inner wall of the measuring hole 21 to measure the coordinates of the corresponding points on the outer periphery of the connecting shaft 101 in the first spatial coordinate system. The two sets of measuring components of the other measuring mechanism are circumferentially spaced on the outer periphery of the measuring shaft 3 to measure the coordinates of the corresponding points on the inner wall of the assembly hole in the second spatial coordinate system.

[0050] In this taper measuring fixture, the base 1 is used to fix the spindle 100 and the cutter head 200, and the measuring bracket 2 is used to measure the taper of the connecting shaft 101, and the measuring shaft 3 is used to measure the taper of the mounting hole of the cutter head 200. Among them, a set of measuring components installed on measuring hole 21 can measure the coordinates of the corresponding point of the major diameter of the outer peripheral surface of connecting shaft 101 in the first spatial coordinate system, and another set of measuring components installed on measuring hole 21 can measure the coordinates of the corresponding point of the minor diameter of the outer peripheral surface of connecting shaft 101 in the first spatial coordinate system, thereby calculating the major diameter D1 and minor diameter d1 of connecting shaft 101, and the distance between the two sets of measuring components is L1, then the taper C1 of connecting shaft 101 is C1 = (D1-d1) / L1; a set of measuring components installed on measuring shaft 3 can measure the coordinates of the corresponding point of the major diameter of the inner wall of the assembly hole in the second spatial coordinate system, and another set of measuring components installed on measuring shaft 3 can measure the coordinates of the corresponding point of the minor diameter of the inner wall of the assembly hole in the second spatial coordinate system, thereby calculating the major diameter D2 and minor diameter d2 of the assembly hole, and the distance between the two sets of measuring components is L2, then the taper C2 of the assembly hole is C2 = (D2-d2) / L2.

[0051] Using coordinates to calculate the diameters of the connecting shaft 101 and the assembly hole can effectively improve the accuracy of taper calculation. Furthermore, by calculating the coordinates of multiple points, the average taper of the connecting shaft 101 and the assembly hole can be obtained, further improving the accuracy.

[0052] This taper measuring fixture can improve the accuracy of taper measurement. If the taper is qualified, it can be directly assembled; if it is unqualified, it can be ground, thereby reducing assembly errors and improving production efficiency and yield.

[0053] In this embodiment, the measuring component includes several sets of measuring points, each set of measuring points including two symmetrically arranged measuring elements 5, and each set of measuring points can measure coordinates. The two symmetrically arranged measuring elements 5 can directly measure the coordinates of the two endpoints of the diameter at the corresponding position, thereby directly calculating the length of the diameter based on the coordinates, improving efficiency and accuracy.

[0054] like Figure 3 and Figure 4 As shown, preferably, in this taper measuring fixture, the measuring component includes four measuring elements 5, and the four measuring elements 5 are equally spaced along the circumference on the inner wall of the measuring hole 21 or the outer circumferential surface of the measuring shaft 3. That is, the four measuring elements 5 form two sets of measuring points, which can simultaneously measure two diameters on the same circumference, and then take the average value of the two diameters to obtain the average diameter of the corresponding position of the connecting shaft 101 or the assembly hole.

[0055] In this embodiment, the measuring element 5 is a gas nozzle. By sensing changes in air pressure, the displacement value is calculated, thereby calculating the distance between the gas nozzle and the connecting shaft 101 or the assembly hole. Compared with traditional coordinate measuring machines or laser measurement, this method is more convenient and has stronger compatibility.

[0056] It is worth noting that in this taper measuring fixture, the measurement reference for the connecting shaft 101 is the axis of the measuring hole 21, and the measurement reference for the assembly hole is the axis of the measuring shaft 3. To ensure measurement accuracy, all gas nozzles of the same group of measuring components protrude from the inner wall of the measuring hole 21 at equal heights, thus ensuring that even if the axis of the connecting shaft 101 does not coincide with the axis of the measuring hole 21, the taper of the connecting shaft 101 calculated by coordinates is accurate.

[0057] Similarly, all the gas nozzles of the same group of measuring components protrude from the outer circumference of the measuring shaft 3 at the same height, thus ensuring that even if the axis of the cutter head 200 does not coincide with the axis of the measuring shaft 3, the taper of the assembly hole calculated by coordinates is accurate.

[0058] In this embodiment, a positioning plate 4 is provided on the base 1, and the spindle 100 abuts against both the base 1 and the positioning plate 4. When the spindle 100 is placed on the base 1 and abuts against the positioning plate 4, the stability of the spindle 100 can be ensured, and the direction of the axis of the connecting shaft 101 can be ensured to be accurate, at least ensuring that the axis of the connecting shaft 101 is parallel to the axis of the measuring hole 21.

[0059] In this embodiment, to improve measurement accuracy by aligning the axis of the spindle 100 with the axis of the measuring hole 21, an adjustment groove 11 is provided on the base 1. The measuring bracket 2 is movably disposed within the adjustment groove 11, allowing it to move in a plane perpendicular to the axial direction of the connecting shaft 101. In other words, the measuring bracket 2 can be adjusted according to the position of the axis of the connecting shaft 101.

[0060] The width of the adjusting groove 11 is equal to the thickness of the measuring bracket 2 to ensure that the measuring bracket 2 will not move axially on the connecting shaft 101. At the same time, the measuring bracket 2 can move horizontally and vertically to adjust the relative position of the axis of the measuring hole 21 and the axis of the connecting shaft 101.

[0061] Furthermore, several shims can be selectively placed between the measuring bracket 2 and the bottom of the adjusting groove 11, and the measuring bracket 2 has screw holes 22 through which fastening screws can fix the measuring bracket 2 to the base 1. The shims can adjust the height of the measuring bracket 2. When the height of the measuring bracket 2 is appropriate and it is moved horizontally to a suitable position, the fastening screws can be used to fix the measuring bracket 2 to the base 1.

[0062] In this embodiment, the base 1 has circumferentially spaced limiting grooves along the measuring axis 3, and the cutter head 200 has an annular flange that can be engaged in the limiting grooves so that the cutter head 200 is coaxially arranged with the measuring axis 3, thereby improving the measurement accuracy.

[0063] This embodiment also provides a method for optimizing assembly errors. The method utilizes the aforementioned taper measuring fixture to measure the taper of the connecting shaft 101 and the taper of the assembly hole in the cutter head 200. This method for optimizing assembly errors (hereinafter referred to as the optimization method) includes:

[0064] Taper calculation: The taper C1 of the connecting shaft 101 is calculated using the coordinates measured by two sets of measuring components set on the inner wall of the measuring hole 21, and the taper C2 of the assembly hole is calculated using the coordinates measured by two sets of measuring components set on the outer circumferential surface of the measuring shaft 3.

[0065] Calculate the inclination angle of the generatrix: the inclination angle of the generatrix of connecting shaft 101. Generatrix inclination angle of assembly hole The generatrix refers to the intersection of the outer peripheral surface of the connecting shaft 101 and the plane passing through the axis, or the intersection of the inner wall of the mounting hole and the plane passing through the axis. The generatrix inclination angle refers to the degree of inclination of the outer peripheral surface of the connecting shaft 101 or the inner wall of the mounting hole. When α = β, the connecting shaft 101 and the mounting hole can be perfectly assembled, and the axis of the connecting shaft 101 coincides with the axis of the cutter head 200.

[0066] However, machining introduces errors, so α and β will not be exactly equal. Therefore, it is necessary to determine whether α and β meet the design requirements, that is, whether the deviations of α and β are within the tolerance range. Hence, it is necessary to:

[0067] Determine whether the inclination angle α of the busbar meets the standard. If it does not, grind the connecting shaft 101.

[0068] Determine whether the busbar inclination angle β meets the standard. If not, grind the assembly hole.

[0069] For example, assuming the tolerance range of the busbar inclination angle is within 20″, then the difference between the busbar inclination angle α and the inclination angle of the connecting shaft 101 is ≤20″, and the connecting shaft 101 meets the standard; if it is greater than 20″, then it does not meet the standard. Assuming the tolerance range of the busbar inclination angle is within 20″, then the difference between the busbar inclination angle β and the inclination angle of the connecting shaft 101 is ≤20″, and the mounting hole meets the standard; if it is greater than 20″, then it does not meet the standard.

[0070] It is worth noting that if the connecting shaft 101 needs to be ground, it is necessary to determine whether the position of the major diameter D1 or the minor diameter d1 needs to be ground, and then, based on the coordinates of multiple corresponding points at the corresponding position, the point farthest from the X-axis in the first spatial coordinate system is selected for grinding. Similarly, if the assembly hole needs to be ground, it is necessary to determine whether the position of the major diameter D2 or the minor diameter d2 needs to be ground, and then, based on the coordinates of multiple corresponding points at the corresponding position, the point farthest from the X-axis in the second spatial coordinate system is selected for grinding.

[0071] The taper calculation step, specifically calculating the taper C1 of the connecting shaft 101, includes:

[0072] Select at least two sets of corresponding points on the same circumference at one end of the main shaft 100. Each set of corresponding points consists of two symmetrical points with the axis of the main shaft 100 as the axis of symmetry. Calculate the distance between the two symmetrical points using the coordinates of the two symmetrical points in each set, and calculate the average major diameter D1 using at least two sets of corresponding points.

[0073] Select at least two sets of corresponding points on the same circumference at the other end of the main shaft 100. Each set of corresponding points consists of two symmetrical points with the axis of the main shaft 100 as the axis of symmetry. Calculate the distance between the two symmetrical points using the coordinates of the two symmetrical points in each set, and calculate the average minor diameter d1 using at least two sets of corresponding points.

[0074] The axial distance between the two circles is L1;

[0075] Then C1 = (D1 - d1) / L1.

[0076] Calculating the taper C2 of the assembly hole includes:

[0077] Select at least two sets of corresponding points on the same circumference at one end of the assembly hole. Each set of corresponding points consists of two symmetrical points with the axis of the main shaft 100 as the axis of symmetry. Calculate the distance between the two symmetrical points using the coordinates of the two symmetrical points in each set, and calculate the average major diameter D2 using at least two sets of corresponding points.

[0078] Select at least two sets of corresponding points on the same circumference at the other end of the assembly hole. Each set of corresponding points consists of two symmetrical points with the axis of the main shaft 100 as the axis of symmetry. Calculate the distance between the two symmetrical points using the coordinates of the two symmetrical points in each set, and calculate the average minor diameter d2 using at least two sets of corresponding points.

[0079] The axial distance between the two circumferences is L2;

[0080] Then C1 = (D2 - d2) / L2.

[0081] Understandably, when α and β are not equal, the cutter head 200 will rotate radially after being mounted on the spindle 100 until one generatrix of the mounting hole coincides with one generatrix of the connecting shaft 101. At this point, the cutter head 200 stops rotating and reaches a stable state. Since the cutter head 200 is tilted at this time, the cutting line of the cutter head 200 will jump when the spindle 100 drives the cutter head 200 to rotate. The maximum jump value of the cutting line becomes the maximum end runout value of the cutter head 200.

[0082] To ensure the stability of the cutter head 200 during wafer cutting, the optimization method also includes:

[0083] Calculate the runout value at the 200-degree end of the cutter head: (e.g.) Figure 5 and Figure 6 As shown, the maximum tilt angle γ of the cutter head 200 relative to the spindle 100 is 1β-α| / 2. Based on the diameter of the cutter head 200 and the maximum tilt angle γ of the cutter head 200 relative to the spindle 100, the maximum end runout value λ of the cutter head 200 is calculated.

[0084] Determine if the maximum end jump value λ meets the standard. If not, grind the connecting shaft 101 or the mounting hole to reduce the maximum tilt angle γ.

[0085] Generally, if the maximum end runout λ of the cutter head 200 is less than or equal to 2μm, the requirement is met. If λ is greater than 2μm, grinding is required to reduce the maximum tilt angle γ.

[0086] Specifically, in this embodiment, the step of calculating the runout value at the cutter head 200 includes:

[0087] Establish a coordinate system: Assemble the cutter head 200 onto the spindle 100. At this time, the axis of the mounting hole and the axis of the connecting shaft 101 may not coincide. Therefore, it is necessary to calculate the actual tilt angle a of the cutter head 200 at this time, and calculate the actual maximum end runout value λ1 based on the actual tilt angle a and the corresponding coordinate value.

[0088] like Figure 7 As shown, specifically, a third spatial coordinate system is established with the axis of the connecting shaft 101 as the X-axis, the horizontal diameter of the connecting shaft 101 as the Y-axis, and the vertical direction as the Z-axis. The highest point A1 and the lowest point A2 of the tool head 200 are obtained. The line connecting A1 and A2 is projected onto the XZ plane of the third spatial coordinate system to form a reference projection. The intersection of the reference projection and the main shaft 100 is taken as the origin of the third spatial coordinate system, and the coordinates of A1 (X1, Z1) and A2 (X2, Z2) are determined.

[0089] When the cutter head 200 is at its maximum tilt angle γ, the coordinates of A1 are (X3, Z3), and the coordinates of A2 are (X4, Z4).

[0090]

[0091] The actual maximum end jump value of the cutter head 200 is λ1 = X3 - X4.

[0092] Calculating the actual maximum end runout value λ1 of the cutter head 200 using existing measurement data can avoid the accumulation of errors in data such as the diameter of the cutter head 200, the taper of the mounting hole, and the taper of the connecting shaft 101. Compared with theoretical calculations, the actual maximum end runout value λ1 is more accurate.

[0093] The above description is only a preferred embodiment of the present invention. For those skilled in the art, there will be changes in the specific implementation and application scope based on the ideas of the present invention. The content of this specification should not be construed as a limitation of the present invention.

Claims

1. A taper measuring fixture, characterized in that, include: A base (1) is configured to support a spindle (100). A connecting shaft (101) is provided at one end of the spindle (100). A measuring bracket (2) and a measuring shaft (3) are provided on the base (1). The measuring bracket (2) has a measuring hole (21). The connecting shaft (101) passes through the measuring hole (21). The measuring shaft (3) passes through the mounting hole of the cutter head (200). A first spatial coordinate system is established with the axis of the measuring hole (21) as the X-axis. A second spatial coordinate system is established with the axis of the measuring shaft (3) as the X-axis. The measuring mechanism includes two sets of measuring components. The two sets of measuring components of one measuring mechanism are axially spaced on the inner wall of the measuring hole (21) to measure the coordinates of the corresponding point on the outer periphery of the connecting shaft (101) in the first spatial coordinate system. The two sets of measuring components of the other measuring mechanism are circumferentially spaced on the outer periphery of the measuring shaft (3) to measure the coordinates of the corresponding point on the inner wall of the assembly hole in the second spatial coordinate system.

2. The taper measuring fixture according to claim 1, characterized in that, The measurement component includes several sets of measurement points, each set of measurement points includes two symmetrically arranged measurement elements (5), and each set of measurement points can measure coordinates.

3. The taper measuring fixture according to claim 2, characterized in that, The measuring element (5) is a gas nozzle.

4. The taper measuring fixture according to claim 3, characterized in that, All the gas nozzles of the same group of measuring components protrude from the inner wall of the measuring hole (21) at equal heights; and / or, All the gas nozzles of the measuring components in the same group protrude from the outer peripheral surface of the measuring shaft (3) at the same height.

5. The taper measuring fixture according to claim 1, characterized in that, The base (1) is provided with an adjustment groove (11), and the measuring bracket (2) is movably disposed in the adjustment groove (11). The measuring bracket (2) is able to move in a plane perpendicular to the axial direction of the connecting shaft (101).

6. The taper measuring fixture according to claim 1, characterized in that, The base (1) has circumferentially spaced limiting grooves along the measuring axis (3), and the cutter head (200) has an annular flange that can be engaged in the limiting grooves so that the cutter head (200) and the measuring axis (3) are coaxially arranged.

7. A method for optimizing assembly errors, comprising using the taper measuring fixture as described in any one of claims 1 to 6 to measure the taper of the connecting shaft (101) and the taper of the assembly hole of the cutter head (200), characterized in that, The methods for optimizing assembly errors include: Taper calculation: The taper C1 of the connecting shaft (101) is calculated using the coordinates measured by two sets of measuring components set on the inner wall of the measuring hole (21), and the taper C2 of the assembly hole is calculated using the coordinates measured by two sets of measuring components set on the outer circumferential surface of the measuring shaft (3). Calculate the generatrix inclination angle: the generatrix inclination angle of the connecting shaft (101) The generatrix inclination angle of the assembly hole Determine whether the inclination angle α of the busbar meets the standard. If it does not, grind the connecting shaft (101). Determine whether the inclination angle β of the busbar meets the standard. If it does not, grind the assembly hole.

8. The method for optimizing assembly errors according to claim 7, characterized in that, The method for optimizing assembly errors also includes: Calculate the end runout value of the cutter head (200): The maximum tilt angle γ of the cutter head (200) relative to the spindle (100) is 1β-α| / 2. Based on the diameter of the cutter head (200) and the maximum tilt angle γ of the cutter head (200) relative to the spindle (100), calculate the maximum end runout value λ of the cutter head (200). Determine whether the maximum end jump value λ meets the standard. If it does not, grind the connecting shaft (101) or the mounting hole to reduce the maximum tilt angle γ.

9. The method for optimizing assembly errors according to claim 8, characterized in that, If the maximum end jump value λ of the cutter head (200) is less than or equal to 2 μm, then the requirement is met.

10. The method for optimizing assembly errors according to claim 8, characterized in that, The steps for calculating the end runout value of the cutter head (200) include: Establish a coordinate system: Assemble the cutter head (200) onto the spindle (100), and establish a third spatial coordinate system with the axis of the connecting shaft (101) as the X-axis, the horizontal diameter of the connecting shaft (101) as the Y-axis, and the vertical direction as the Z-axis. Obtain the highest point A1 and the lowest point A2 of the cutter head (200), and project the line connecting A1 and A2 onto the XZ plane of the third spatial coordinate system to form a reference projection. Take the intersection of the reference projection and the spindle (100) as the origin of the third spatial coordinate system, and determine the coordinates (X1, Z1) of A1 and (X2, Z2) of A2. When the cutter head (200) is at its maximum tilt angle γ, the coordinates of A1 are (X3, Z3), and the coordinates of A2 are (X4, Z4). Then the actual maximum end jump value of the cutter head (200) is λ1 = X3 - X4.

Images