Deep ultraviolet aero-thermal management beam expander mirror system

Abstract

The application discloses a kind of deep ultraviolet pneumatic heat management beam expander systems, it is related to the technical field of beam expander, wherein, deep ultraviolet pneumatic heat management beam expander system includes lens barrel, first mirror frame and second mirror frame, rack is equipped with variable-diameter mirror cavity, to accelerate to flow through gas, first mirror frame is equipped with first lens, first mirror frame side wall is equipped with first air hole, to make first gas curtain form in the inside of first lens by flow through gas;Second mirror frame is equipped with second lens, second mirror frame side wall is equipped with second air hole, to make second gas curtain form in the inside of second lens by flow through gas;Gas curtain can continuously blow mirror surface, effectively prevent and remove the deposition and accumulation of contaminant on mirror surface, accelerate clean cooling gas using variable-diameter mirror cavity, transient response is faster, avoid the problem that the temperature difference of lens center and edge is too large caused by local cooling, secondly, variable-diameter mirror cavity is also the place of laser light path, both are integrally arranged, simplify overall structure, it is convenient for production and manufacture.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of beam expander, in particular to a deep ultraviolet pneumatic thermal management beam expander system. BACKGROUND

[0002] The beam expander is an optical assembly for changing the diameter and divergence angle of the laser beam, which has important applications in laser processing, lithography, precision measurement and other fields, especially in the 193nm deep ultraviolet band, because of the high photon energy (up to 6.4eV) and short wavelength, atomic level processing precision can be achieved, so it has become one of the key technologies in the field of high-precision manufacturing such as semiconductor lithography. As the core component of the lithography machine illumination system, the performance of the deep ultraviolet beam expander directly affects the lithography resolution and processing quality.

[0003] At present, there are still many technical bottlenecks in the actual application of the beam expander system for 193nm band. The common scheme mostly adopts a fully sealed mirror cavity structure, which can prevent external pollution to a certain extent, but also brings the following problems:

[0004] The sealed structure is easy to accumulate suspended molecules such as organic pollutants, which will degrade or deposit under deep ultraviolet light, damage the optical film layer, increase light scattering, reduce system transmittance and service life, and the sealing material (such as rubber ring) is easy to age in deep ultraviolet environment, with low service life. And the traditional water cooling system has large response delay (usually more than 10 seconds), which cannot realize rapid thermal equilibrium, and the local cooling effect of the cooling liquid of the water cooling structure causes large temperature difference between the edge and the center of the lens, causing asymmetric thermal stress and wavefront distortion. SUMMARY

[0005] The main purpose of the present application is to provide a deep ultraviolet pneumatic thermal management beam expander system, which aims to improve the stability of the equipment.

[0006] In order to achieve the above purpose, the deep ultraviolet pneumatic thermal management beam expander system provided by the present application comprises:

[0007] The lens barrel is provided with a variable-diameter mirror cavity for accelerating the flowing gas;

[0008] The first mirror frame and the second mirror frame are connected to the lens barrel, and the first mirror frame and the second mirror frame are located at the two ends of the variable-diameter mirror cavity in the axial direction and are in communication with the variable-diameter mirror cavity;

[0009] The first mirror frame is provided with a first lens, and the first mirror frame side wall is provided with a first air hole, and the first air hole is located on the side of the inner end surface of the first lens, so that the flowing gas forms a first air curtain on the inner side of the first lens;

[0010] The second mirror frame is provided with a second lens, and a second air hole is formed in the side wall of the second mirror frame and located at the circumferential side of the inner end surface of the second lens to form a second air curtain on the inner side of the second lens by the flowing gas;

[0011] The variable-diameter mirror cavity comprises a large-diameter end and a small-diameter end, the first mirror frame is arranged close to the small-diameter end, the second mirror frame is arranged close to the large-diameter end, and the gas flowing into the second mirror frame from the second air hole flows through the variable-diameter mirror cavity and the first mirror frame in sequence and then flows out from the first air hole to form the first air curtain and the second air curtain.

[0012] In an embodiment, the first lens is an incident mirror, and the second lens is an exit mirror.

[0013] In an embodiment, a plurality of first air holes are formed in the side wall of the first mirror frame and are arranged at intervals along the circumferential direction of the inner side of the first lens;

[0014] A plurality of second air holes are formed in the side wall of the second mirror frame and are arranged at intervals along the circumferential direction of the inner side of the second lens.

[0015] In an embodiment, the outer side wall of the first mirror frame is provided with an annular first air guide groove, and the plurality of first air holes are all connected to the first air guide groove.

[0016] The outer side wall of the second mirror frame is provided with an annular second air guide groove, and the plurality of second air holes are all connected to the second air guide groove.

[0017] The first air guide groove and the second air guide groove are both connected to the outside.

[0018] In an embodiment, the lens barrel is provided with a first air passage and a second air passage, one end of the first air passage is connected to the outside, the other end is connected to the first air guide groove, one end of the second air passage is connected to the outside, and the other end is connected to the second air guide groove.

[0019] The cross-sectional size of the second air passage is larger than that of the first air passage.

[0020] In an embodiment, the end of the second air passage facing the second air guide groove is staggered with the second air hole.

[0021] In an embodiment, the deep-ultraviolet aerodynamic thermal management beam expander mirror system further comprises a linear bearing, the linear bearing is fixedly connected to the lens barrel, and the first mirror frame is slidingly connected to the linear bearing.

[0022] The first air passage is located at one side of the linear bearing, and an air gap is arranged between the outer edge of the first mirror frame and the inner side wall of the linear bearing, the air gap is located between the first air guide groove and the first air passage, and the first air guide groove and the first air passage are respectively.

[0023] In an embodiment, the deep ultraviolet pneumatic thermal management beam expander system further comprises an adjusting spacer, the adjusting spacer is fixedly connected to the first mirror frame, and is slidingly connected to the lens barrel, so as to drive the first mirror frame to move axially.

[0024] An adjusting opening is arranged on the outer side of the lens barrel, and the adjusting opening is communicated to the side of the adjusting spacer.

[0025] An adjusting lever is fixedly connected to the side of the adjusting spacer, the adjusting lever extends in the radial direction of the adjusting spacer, and the adjusting lever is exposed outside through the adjusting opening.

[0026] In an embodiment, the deep ultraviolet pneumatic thermal management beam expander system further comprises an adjusting motor, the adjusting motor is fixedly connected to the lens barrel, a connecting rod is fixedly connected to the driving rod of the adjusting motor, the connecting rod extends in the radial direction of the driving rod, and one end of the connecting rod away from the driving rod is movably connected to the adjusting lever.

[0027] The connecting rod rotates around the axis of the driving rod, drives the connecting rod to move and tilt, so that the adjusting spacer moves axially.

[0028] In an embodiment, the connecting rod is provided with a joint bearing, the joint bearing is rotatably connected to the connecting rod, and the adjusting lever is slidingly connected to the joint bearing.

[0029] The technical scheme of the present application forms the first air curtain and the second air curtain around the inner end surface of the first lens and the second lens, the air curtain can continuously blow the mirror surface, effectively prevents and removes the deposition and accumulation of pollutants on the mirror surface, the Venturi effect can accelerate the airflow, the clean cooling gas is accelerated by the variable-diameter mirror cavity, a high-speed airflow is formed through the variable-diameter mirror cavity, the airflow not only has a cleaning effect, but also can efficiently take away the heat generated by the lens due to absorption of high-energy laser, the transient response is faster, the problem of too large temperature difference between the center and the edge of the lens caused by local cooling is avoided, and secondly, the variable-diameter mirror cavity is also the light path of the laser, the two are integrally arranged, the overall structure is simplified, and production and manufacturing are facilitated. BRIEF DESCRIPTION OF DRAWINGS

[0030] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the following will briefly introduce the drawings needed to be used in the embodiments or prior art description. Obviously, the drawings described below only show some of the embodiments of the present application, and for those skilled in the art, other drawings can also be obtained from the structures shown in the drawings without creative labor.

[0031] Figure 1 Structure schematic diagram of an embodiment of the deep ultraviolet pneumatic thermal management beam expander system provided by the present application.

[0032] Figure 2 Structure schematic diagram of the first mirror frame and the adjusting motor.

[0033] Figure 3 Structure schematic diagram of Figure 2 Enlarged view of part A.

[0034] Figure 4 Structure schematic diagram of the second mirror frame.

[0035] Figure 5 Assembly structure schematic diagram of the deep ultraviolet pneumatic thermal management beam expander system.

[0036] Explanation of reference numerals:

[0037] 1, lens barrel; 11, variable diameter mirror cavity; 12, first air passage; 13, second air passage; 14, adjusting port; 2, first mirror frame; 21, first lens; 22, first air hole; 23, first air guide groove; 3, second mirror frame; 31, second lens; 32, second air hole; 33, second air guide groove; 4, linear bearing; 41, air gap; 5, adjusting spacer; 51, adjusting lever; 52, first spacer part; 53, second spacer part; 6, adjusting motor; 61, driving rod; 62, connecting rod; 621, knuckle bearing; 7, air nozzle.

[0038] The implementation, functional features and advantages of the present application will be further described with reference to the embodiments and the accompanying drawings. DETAILED DESCRIPTION

[0039] The technical solutions in the embodiments of the present application will be described clearly and completely below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only some of the embodiments of the present application, but not all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of protection of the present application.

[0040] It should be noted that if the embodiments of the present application involve directional indications (such as up, down, left, right, front, back, etc.), the directional indications are only used to explain the relative position relationship, motion condition, etc. between the components in a certain posture, and if the certain posture changes, the directional indications will also change accordingly.

[0041] In addition, if the embodiments of the present application involve descriptions such as "first", "second", etc., the descriptions of "first", "second", etc. are only for description purposes and cannot be understood as indicating or implying the relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features limited by "first" and "second" can be explicitly or implicitly included at least one of the features. In addition, "and / or" or "and / or" appearing throughout the text means that the three parallel schemes are included, for example, "A and / or B" includes A scheme, or B scheme, or A and B scheme. In addition, the technical solutions of each embodiment can be combined with each other, but it must be based on the realization of the ordinary skilled in the art, when the combination of technical solutions appears contradictory or unachievable, it should be considered that the combination of technical solutions does not exist, nor within the scope of protection claimed by the present application.

[0042] The beam expander is an optical assembly for changing the diameter and divergence angle of the laser beam, which has important applications in laser processing, lithography, precision measurement and other fields, especially in the 193nm deep ultraviolet band. Due to the high photon energy (up to 6.4eV) and short wavelength, atomic-level processing precision can be achieved, so it has become one of the key technologies in the field of high-precision manufacturing such as semiconductor lithography. As the core component of the lithography machine illumination system, the performance of the deep ultraviolet beam expander directly affects the lithography resolution and processing quality.

[0043] At present, there are still many technical bottlenecks in the practical application of the beam expander system for the 193nm band. The common prior art scheme mostly adopts a fully sealed mirror cavity structure, which can prevent external pollution to a certain extent, but also brings the following problems:

[0044] Organic pollutants and other suspended molecules are easily accumulated inside the sealed structure, which will degrade or deposit under deep ultraviolet light, damage the optical film layer, increase light scattering, reduce system transmittance and service life, and the sealing material (such as rubber ring) is easily aged in deep ultraviolet environment, with low service life. And the traditional water cooling system has large response delay (usually more than 10 seconds), which cannot realize rapid thermal equilibrium, and the local cooling effect of the cooling liquid of the water cooling structure causes large temperature difference between the edge and the center of the lens, causing asymmetric thermal stress and wavefront distortion.

[0045] The present application provides a deep ultraviolet pneumatic thermal management beam expander system.

[0046] Please refer to Figures 1 to 5In an embodiment of the present application, the deep ultraviolet pneumatic thermal management beam expander system comprises:

[0047] A lens barrel 1 is provided with a variable-diameter mirror cavity 11 for accelerating the flowing gas;

[0048] A first mirror frame 2 and a second mirror frame 3 are connected to the lens barrel 1, and are located at the two ends of the variable-diameter mirror cavity 11 in the axial direction and communicate with the variable-diameter mirror cavity 11;

[0049] The first mirror frame 2 is provided with a first lens 21, and a first air hole 22 is formed in the side wall of the first mirror frame 2 and located at the periphery of the inner end surface of the first lens 21 to form a first gas curtain on the inner side of the first lens 21;

[0050] The second mirror frame 3 is provided with a second lens 31, and a second air hole 32 is formed in the side wall of the second mirror frame 3 and located at the periphery of the inner end surface of the second lens 31 to form a second gas curtain on the inner side of the second lens 31;

[0051] The variable-diameter mirror cavity 11 comprises a large-diameter end and a small-diameter end, the first mirror frame 2 is arranged close to the small-diameter end, the second mirror frame 3 is arranged close to the large-diameter end, and the gas flows through the variable-diameter mirror cavity 11 and the first mirror frame 2 in sequence after being filled into the second mirror frame 3 from the second air hole 32 and then discharged from the first air hole, and the first gas curtain and the second gas curtain are formed;

[0052] The technical scheme of the present application forms the first gas curtain and the second gas curtain at the periphery of the inner end surface of the first lens 21 and the second lens 31, the gas curtain can continuously blow the mirror surface, effectively prevents and removes the deposition and accumulation of pollutants on the mirror surface, the Venturi effect can accelerate the airflow, the clean cooling gas is accelerated by the variable-diameter mirror cavity 11, a high-speed airflow is formed through the variable-diameter mirror cavity 11, the airflow not only has a cleaning effect, but also can efficiently take away the heat generated by the lens due to the absorption of high-energy laser, the transient response is faster, the problem of too large temperature difference between the center and the edge of the lens caused by local cooling is avoided, and secondly, the variable-diameter mirror cavity 11 is also the light path of the laser, and the two are integrally arranged, which simplifies the overall structure and facilitates production and manufacturing.

[0053] It should be noted that the filled gas is a low-temperature clean gas to further improve the cooling effect and prevent the pollution of the inside of the lens barrel 1.

[0054] It should be noted that the laser spreads after entering the incident end, and the light path spreads outward;

[0055] In one embodiment, the first lens 21 is an exit lens and the second lens 31 is an entrance lens. In this case, the shape of the variable diameter mirror cavity 11 is opposite to the direction of light propagation. The variable diameter mirror cavity 11 is enlarged to avoid obstructing the light path. However, the cross-sectional size of the smaller diameter end must be larger than the maximum cross-sectional size of the light path to avoid obstruction.

[0056] In one embodiment, the diameter of the large-diameter end is 17 mm, and the diameter of the small-diameter end is 8.5 mm.

[0057] Preferably, the first lens 21 is an incident lens, and the second lens 31 is an exit lens.

[0058] like Figure 1 As shown, at this time, the smaller diameter end corresponds to the laser incident end, and the larger diameter end corresponds to the laser emitting end. There is no need to additionally increase the volume of the variable diameter mirror cavity 11, and the gas flow direction is opposite to the light propagation direction. The fastest-flowing cooling gas ultimately acts on the first lens 21, which has the highest temperature and requires the most heat dissipation, achieving targeted heat dissipation of the core heat source and optimizing thermal management efficiency.

[0059] Preferably, the first lens frame 2 has a plurality of first ventilation holes 22 on its side wall, and the plurality of first ventilation holes 22 are arranged at intervals along the circumferential direction inside the first lens 21.

[0060] The second lens frame 3 has a plurality of second vent holes 32 on its side wall, and the plurality of second vent holes 32 are arranged at circumferential intervals along the inner side of the two lenses.

[0061] like Figure 2 and Figure 4 As shown, by creating multiple vent holes spaced circumferentially on the first lens frame 2 and the second lens frame 3, a uniform, continuous, and seamless air curtain can be formed around the entire inner end face of the first lens 21 and the second lens 31. This circumferentially uniform air distribution method ensures that the air curtain completely covers the mirror surface, effectively preventing and removing the deposition and accumulation of contaminants on the mirror surface. This significantly reduces the risk of contaminant degradation and film damage under deep ultraviolet light irradiation, greatly extending the service life of optical components.

[0062] Furthermore, it avoids the problem of uneven local cooling of the lens caused by single-point or asymmetrical air intake, achieving uniform and symmetrical heat dissipation of the lens. This effectively eliminates the temperature difference between the lens center and edge, reduces wavefront distortion caused by asymmetrical thermal stress, and ensures the quality of beam transmission. Combined with the airflow acceleration of the variable-diameter cavity, the heat dissipation efficiency is even higher.

[0063] Optionally, the first vent 22 is a straight hole, and the axis of the first vent 22 is aligned with the radial direction of the first lens 21; the second vent 32 is a straight hole, and the axis of the second vent 32 is aligned with the radial direction of the second lens 31.

[0064] Preferably, the second vent 32 is an oblique hole, the axis of the second vent 32 is inclined relative to the second lens 31, and the axes of multiple second vent holes 32 intersect on the inner side of the second lens 31 to ensure that the gas still maintains an outflow velocity along the axis of the variable diameter mirror cavity 11 after entering.

[0065] In some embodiments, there are eight of each of the first vent 22 and the second vent 32, which are evenly distributed on the first frame 2 and the second frame 3, respectively.

[0066] Optionally, the outer wall of the first frame 2 is provided with an annular first air guide groove 23, and the plurality of first air holes 22 are all connected to the first air guide groove 23.

[0067] The outer wall of the second frame 3 is provided with an annular second air guide groove 33, and the plurality of second air vents 32 are all connected to the second air guide groove 33;

[0068] Both the first air guide groove 23 and the second air guide groove 33 are connected to the outside.

[0069] like Figure 4 As shown, the annular second air guide groove 33, as a shared air chamber, can equalize and redistribute the externally introduced gas, ensuring that the gas can be blown out through the multiple circumferentially distributed second air holes 32 with stable and uniform pressure, thereby forming a uniform, stable and symmetrical air curtain inside the second lens 31.

[0070] Furthermore, there is no need to set up a separate venting line for each of the second vent holes 32. The external air source only needs to be connected to the second air guide groove 33 through one or a few interfaces to supply air to all the circumferentially arranged second vent holes 32 at the same time. This greatly simplifies the design, installation and sealing of the external pipeline, reduces potential leakage points, and improves the sealing reliability and overall rigidity of the entire air circuit system. At the same time, it reduces the assembly difficulty and complexity.

[0071] like Figure 3 As shown, the first air guide groove 23 can effectively collect the gas blown out from the first air vent 22 so as to discharge it uniformly and reduce the complexity of the pipeline.

[0072] It can be understood that the first gas guide groove 23 and the second gas guide groove 33 make the lens barrel 1 not need to be provided with a corresponding air pipe for each air vent, thereby reducing the structural complexity.

[0073] Optionally, the lens barrel 1 is provided with a first air passage 12 and a second air passage 13, one end of the first air passage 12 is communicated with the outside, and the other end is communicated with the first gas guide groove 23, one end of the second air passage 13 is communicated with the outside, and the other end is communicated with the second gas guide groove 33.

[0074] The cross-sectional size of the second air passage 13 is greater than the cross-sectional size of the first air passage 12.

[0075] It should be noted that the large cross-section air inlet ensures the air supply amount, so that the air can be accelerated more effectively when flowing through the converging section of the variable-diameter mirror cavity 11, thereby strengthening the Venturi effect and ensuring that a higher-speed air flow with better heat dissipation and cleaning effect is obtained on the surface of the first lens 21.

[0076] In an embodiment, the diameter of the first air passage 12 is 1.5 mm, and the diameter of the second air passage 13 is 3 mm.

[0077] Optionally, one end of the second air passage 13 towards the second gas guide groove 33 is staggered with the second air hole 32.

[0078] As shown in Figure 1 The staggered design forces the gas entering from the second air passage 13 to not flow out directly and quickly through the nearest second air hole 32, but must first enter the annular second gas guide groove 33 for sufficient buffering and mixing, thereby avoiding the problem of uneven flow of each air hole caused by the position of the air inlet, providing a basis for forming a stable and symmetrical second air curtain in the core area, and improving the uniformity of the cleaning and heat dissipation effect.

[0079] In some embodiments, the second air passage 13 is communicated with an air pump, and a gas nozzle 7 of the air pump is fixedly connected with the second air hole 32 to provide air.

[0080] As shown in Figure 2 and Figure 3 The deep-ultraviolet aerodynamic thermal management beam expander mirror system further includes a linear bearing 4, the linear bearing 4 is fixedly connected with the lens barrel 1, and the first lens frame 2 is slidingly connected with the linear bearing 4.

[0081] The first air passage 12 is located on one side of the linear bearing 4, and an air passage gap 41 is arranged between the outer edge of the first lens frame 2 and the inner side wall of the linear bearing 4. The air passage gap 41 is located between the first air guide groove 23 and the first air passage 12.

[0082] It can be understood that the first lens frame 2 is connected to the lens barrel 1 through the linear bearing 4 to ensure that the first lens frame 2 and the first lens 21 carried thereby move along a strict linear track during adjustment, eliminating possible eccentricity and inclination, thereby ensuring high precision and optical axis stability required for optical adjustment. At the same time, the air passage gap 41 is integrated at the mating interface of the linear bearing 4 and the first lens frame 2, so that the mechanical structure simultaneously assumes the air guide function, without the need for additional independent connection channels that may affect rigidity and precision, thereby simplifying the overall structure.

[0083] It can be understood that the linear bearing 4 is a precision device with high precision and rigidity, which is inconvenient to process. Through the air passage gap 41, additional processing of the linear bearing 4 is not required, thereby reducing production difficulty.

[0084] Furthermore, it is ensured that regardless of the adjustment position of the first lens frame 2, gas can flow stably from the first air guide groove 23 to the first air passage 12 through this fixed and controllable air passage gap 41. It is ensured that the gas flow channel is always reliable and stable in dynamic adjustment, and there is no risk of pollution.

[0085] It can be understood that the outer side wall of the first lens frame 2 is in gap fit with the linear bearing 4 except for the region corresponding to the air passage gap 41 and the first air guide groove 23, so as to ensure the stability of the fit.

[0086] Optionally, the deep ultraviolet pneumatic thermal management beam expander mirror system further comprises an adjustment spacer 5, which is fixedly connected to the first lens frame 2 and is in sliding connection with the lens barrel 1, and is used to drive the first lens frame 2 to move axially.

[0087] An adjustment opening 14 is formed in the outer side surface of the lens barrel 1, and the adjustment opening 14 is communicated to the side surface of the adjustment spacer 5.

[0088] The side surface of the adjustment spacer 5 is fixedly connected with an adjustment lever 51, and the adjustment lever 51 extends in the radial direction of the adjustment spacer 5. The adjustment lever 51 penetrates the adjustment opening 14 to be exposed to the outside.

[0089] As Figure 1As shown, the adjustment spacer ring 5 is in sliding connection with the lens barrel 1, providing a high-precision and high-rigidity guiding basis for the axial movement of the first lens frame 2. The adjustment lever 51 extends radially and is arranged in the adjustment opening 14, guiding the adjustment operation point to the outside of the lens barrel 1. This allows the operator to operate the adjustment lever 51 externally without disassembling the entire optical system, thereby achieving precise and online adjustment of the lens spacing. This avoids the risk of introducing contaminants or damaging the system's air tightness due to repeated disassembly, ensuring a high level of cleanliness inside the system.

[0090] It should be noted that the adjustment spacer ring 5 remains in a shielding state when moving, to avoid external contaminants falling into the interior of the lens barrel 1 through the adjustment opening 14.

[0091] As shown in the figure, Figure 1 The adjustment spacer ring 5 is circumferentially provided with an axial through hole, and the first lens frame 2 is correspondingly provided with a threaded mounting hole. A connecting member such as a bolt is arranged through the through hole and threadedly connected with the threaded mounting hole, to relatively fix the adjustment spacer ring 5 and the first lens frame 2.

[0092] Optionally, the deep ultraviolet pneumatic thermal management beam expander mirror system further comprises an adjustment motor 6 fixedly connected with the lens barrel 1. The drive rod 61 of the adjustment motor 6 is fixedly connected with a connecting rod 62 extending along the radial direction of the drive rod 61. The end of the connecting rod 62 away from the drive rod 61 is movably connected with the adjustment lever 51.

[0093] The connecting rod 62 rotates around the axis of the drive rod 61, driving the connecting rod 62 to move and tilt, so that the adjustment spacer ring 5 moves axially.

[0094] As shown in the figure, Figure 5 The operator can remotely adjust without touching the optical system, improving the convenience and safety of operation, and eliminating the risk of misoperation, contamination or mechanical damage caused by manual adjustment.

[0095] Furthermore, the rotational motion of the motor drive rod 61 is converted into the precise axial linear motion of the adjustment lever 51 and the adjustment spacer ring 5 through the swinging of the connecting rod 62. The rotational motion of the adjustment motor 6 is converted into the linear displacement required by the optical system.

[0096] Further, the adjustment motor 6 is a stepper motor, which can control the rotational angle of the drive rod 61 very precisely in combination with its micro-step control function. A small angular displacement can be amplified or converted into a precise axial displacement of sub-micron level to meet the requirements of optical design.

[0097] In some embodiments, 128 sub-steps can be achieved by micro-step control of the stepper motor, and axial adjustment of 0.005mm can be achieved; the axial adjustment accuracy required by the optical design is less than 0.01mm;

[0098] It should be noted that when the adjusting motor 6 drives the adjusting spacer ring 5 to move axially, the adjusting rod 51 is not only moved along the axial direction of the adjusting spacer ring 5, but also rotates around the axis of the adjusting spacer ring 5, and the size of the adjusting port 14 meets the movement space required by the adjusting rod 51, and the adjusting rod 51 interferes with the side wall of the adjusting port 14.

[0099] In some embodiments, the shape of the adjusting port 14 is adapted to the movement track of the adjusting rod 51, and the movement of the adjusting rod 51 is further limited.

[0100] Optionally, the connecting rod 62 is provided with a joint bearing 621, the joint bearing 621 is rotatably connected to the connecting rod 62, and the adjusting rod 51 is slidably connected to the joint bearing 621.

[0101] It should be noted that during the adjustment process, the adjusting rod 51 not only tilts relative to the connecting rod 62, but also slides relative to the connecting rod 62, and through the joint bearing 621 and the sliding connection with the adjusting rod 51, the movement requirement of the adjusting rod 51 is met, and the position of the adjusting rod 51 is limited to achieve precise control.

[0102] It should be noted that the adjusting spacer ring 5 includes a stepped shape, including a first spacer ring part 52 with a smaller diameter and a second spacer ring part 53 with a larger diameter, the first spacer ring part 52 and the second spacer ring part 53 are integrally connected, the first spacer ring part 52 is fixedly connected to the first frame 2 through a connecting piece, and the outer wall of the first spacer ring part 52 at the connecting position is smoothly connected to the outer wall of the first frame 2, the first spacer ring and the lens barrel 1 are in clearance fit, and the position of the first spacer ring corresponds to the position of the first air passage 12, and the gas flows out through the gap between the first spacer ring part 52 and the lens barrel 1.

[0103] Further, the second spacer ring part 53 and the lens barrel 1 are in clearance fit and are slidably connected to the lens barrel 1, and the adjusting rod 51 is fixedly connected to the outer side wall of the second spacer ring part 53.

[0104] In some embodiments, the outer side wall of the second spacer ring part 53 is provided with a threaded hole, and the end of the adjusting rod 51 is provided with a matched external thread, and the second spacer ring part 53 is fixedly connected through the threaded hole.

[0105] It should be noted that a gap is left between the second spacer ring 53 and the port of the first air passage 12 to avoid covering the first air passage 12 during adjustment.

[0106] Optionally, the first air passage 12 is provided with a filter screen to avoid contaminants from falling in when the device stops running. It should be noted that during normal use, the air pump will continuously work, and the first air passage 12 will also continuously exhaust, so that external contaminants are not easy to fall in from there, ensuring stable operation of the device.

[0107] The test is carried out at an air inlet flow rate of 1 L / min, a flow rate of 1 m / s, and an air inlet temperature of 22℃, and the power density inside the lens is 300 w / m 3 The internal airflow is stable, the gas flow rate at the outlet of the variable-diameter cavity is 5 m / s, the internal pressure is stably kept at 68 Pa, the conventional pressure requirement is within 100 Pa, the lens surface gas flow rate effect is good, and the cavity temperature trend is stable without obvious warming.

[0108] The above merely describes exemplary embodiments of the present application, and does not limit the protection scope of the present application, and any equivalent structural transformation made by using the content of the present application specification and drawings, or direct / indirect application in other related technical fields is included in the protection scope of the present application.

Claims

1. A deep ultraviolet aerothermodynamic management beam expander mirror system, characterized by, The utility model relates to a deep ultraviolet aerodynamic thermal management beam expander mirror system, including: A mirror barrel is equipped with a variable-diameter mirror cavity to accelerate the flowing gas; A first mirror frame and a second mirror frame are connected to the mirror barrel, and the first mirror frame and the second mirror frame are located at the two ends of the variable-diameter mirror cavity respectively and communicate with the variable-diameter mirror cavity; The first mirror frame is provided with a first lens, and a plurality of first air holes are circumferentially spaced apart on the side wall of the first mirror frame, and the first air holes are located on the circumferential side of the inner end surface of the first lens to form a first air curtain on the inner side of the first lens; The second mirror frame is provided with a second lens, and a plurality of second air holes are circumferentially spaced apart on the side wall of the second mirror frame, and the second air holes are located on the circumferential side of the inner end surface of the second lens to form a second air curtain on the inner side of the second lens; The variable-diameter mirror cavity includes a large-diameter end and a small-diameter end, the first mirror frame is arranged close to the small-diameter end, the second mirror frame is arranged close to the large-diameter end, and the gas flows through the variable-diameter mirror cavity and the first mirror frame in sequence after being poured into the second mirror frame from the second air hole and then discharged from the first air hole, and the first air curtain and the second air curtain are formed.

2. The deep ultraviolet pneumatic thermal management expander mirror system of claim 1, wherein, The first lens is an incident mirror, and the second lens is an exit mirror.

3. The deep ultraviolet pneumatic thermal management expander mirror system of claim 2, wherein, A plurality of first air holes are opened on the side wall of the first mirror frame, and the plurality of first air holes are spaced apart along the circumferential direction inside the first lens; A plurality of second air holes are opened on the side wall of the second mirror frame, and the plurality of second air holes are spaced apart along the circumferential direction inside the second lens.

4. The deep ultraviolet pneumatic thermal management expander mirror system of claim 3, wherein, The outer side wall of the first mirror frame is provided with an annular first air guide groove, and the plurality of first air holes all communicate with the first air guide groove; The outer side wall of the second mirror frame is provided with an annular second air guide groove, and the plurality of second air holes all communicate with the second air guide groove; The first air guide groove and the second air guide groove both communicate with the outside.

5. The deep ultraviolet pneumatic thermal management expander mirror system of claim 4, wherein, The mirror barrel is provided with a first air passage and a second air passage, one end of the first air passage communicates with the outside, the other end communicates with the first air guide groove, one end of the second air passage communicates with the outside, and the other end communicates with the second air guide groove; The cross-sectional size of the second air passage is larger than that of the first air passage.

6. The deep ultraviolet pneumatic thermal management expander mirror system of claim 5, wherein, The end of the second air passage towards the second air guide groove is staggered with the second air hole.

7. The deep ultraviolet pneumatic thermal management expander mirror system of claim 6, wherein, The deep ultraviolet aerodynamic thermal management beam expander mirror system further includes a linear bearing, the linear bearing is fixedly connected to the mirror barrel, and the first mirror frame is slidingly connected to the linear bearing; The first air passage is located on one side of the linear bearing, an air gap is provided between the outer edge of the first mirror frame and the inner side wall of the linear bearing, the air gap is located between the first air guide groove and the first air passage, and respectively communicates with the first air guide groove and the first air passage.

8. The deep ultraviolet pneumatic thermal management expander mirror system of claim 7, wherein, The deep ultraviolet aerodynamic thermal management beam expander mirror system further includes an adjusting spacer, the adjusting spacer is fixedly connected to the first mirror frame and slidingly connected to the mirror barrel to drive the first mirror frame to move axially; An adjusting port is opened on the outer side of the mirror barrel, and the adjusting port communicates with the side of the adjusting spacer; The adjusting spacer is fixedly connected with an adjusting lever on the side surface, the adjusting lever extends along the radial direction of the adjusting spacer, and the adjusting lever penetrates through the adjusting port to be exposed outside.

9. The deep ultraviolet pneumatic thermal management expander mirror system of claim 8, wherein, The DUV pneumatic thermal management expander system further comprises an adjusting motor fixedly connected with the lens barrel, a connecting rod fixedly connected with a driving rod of the adjusting motor, the connecting rod extending along the radial direction of the driving rod, and the adjusting lever movably connected with one end of the connecting rod away from the driving rod. The connecting rod rotates around the axis of the driving rod, drives the connecting rod to move and tilt, and enables the adjusting spacer to move axially.

10. The deep ultraviolet pneumatic thermal management expander mirror system of claim 9, wherein, The connecting rod is provided with a joint bearing rotatably connected with the connecting rod, and the adjusting lever is slidably connected with the joint bearing.

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