APC data query method of semiconductor process equipment and related equipment
By automatically querying APC data through the host computer of semiconductor process equipment and using index information to obtain task data, the problems of low efficiency and high error rate of manual query are solved, and efficient and low-cost APC data detection is achieved.
Patent Information
- Application Number
- CN202410742364.0
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2024-06-07
- Publication Date
- 2025-12-09
AI Technical Summary
In existing technologies, APC data queries for semiconductor process equipment rely on manual methods, resulting in low query efficiency, high costs, and a high risk of errors.
The host computer of the semiconductor process equipment receives APC data query requests, uses index information to obtain historical task data, and automatically queries APC data according to the index identifier to achieve automated querying.
It improves the efficiency of APC data query, reduces query costs and error rates, and ensures the accuracy of data detection.
Smart Images
Figure CN121092579A_ABST
Abstract
Description
Technical Field
[0001] This invention relates to the field of semiconductor manufacturing technology, and more specifically to an APC data query method and related equipment for semiconductor process equipment. Background Technology
[0002] Advanced Process Control (APC) data generated during semiconductor manufacturing processes refers to data collected through sensors and specialized metering tools regarding process and product attributes. This data primarily includes information related to the product, process, equipment, and technology platform, such as temperature, pressure, flow rate, and process step names. By monitoring APC data generated during the process, various parameters can be monitored and controlled in real time. Furthermore, by adjusting process formulation parameters, product quality and production efficiency can be maximized.
[0003] Currently, APC data is manually compared with target data to check its accuracy. The target data is rationalized process-related data based on established process standards. However, given the massive amount of APC data from semiconductor process equipment, manually querying APC data is not only extremely labor-intensive but also makes rapid APC data detection difficult. Furthermore, human error in querying data can lead to inaccurate results. Summary of the Invention
[0004] This invention discloses an APC data query method and related equipment for semiconductor process equipment, so as to achieve low cost, high efficiency and low error rate of APC data query.
[0005] In a first aspect, the present invention discloses an APC data query method for semiconductor process equipment, applied to a host computer of the semiconductor process equipment. The method includes: receiving an APC data query request, the APC data query request carrying index information of APC data to be queried; the APC data being process-related data generated by the semiconductor process equipment during the execution of any historical task; the historical task being a task already executed by the semiconductor process equipment; responding to the APC data query request, obtaining task data of the historical task corresponding to the index information; the task data being task-related data generated by the semiconductor process equipment during the execution of any historical task; each historical task's task data carrying multiple index identifiers, the multiple index identifiers being used to identify multiple process-related data of the historical task; obtaining the index identifier corresponding to the index information from the multiple index identifiers carried by the historical task's task data; and obtaining the APC data to be queried from all APC data of the semiconductor process equipment according to the index identifier corresponding to the index information.
[0006] In some embodiments, obtaining the index identifier corresponding to the index information from multiple index identifiers carried by the historical task data includes: dividing the historical task data into multiple data blocks, where different data blocks are task data from different process chambers of different historical tasks; obtaining a portion of the index identifiers from the multiple index identifiers carried by each data block; the portion of the index identifiers is used to obtain the APC data corresponding to the data block from all APC data of the semiconductor process equipment.
[0007] In some embodiments, the plurality of index identifiers include a task identifier for a historical task, a chamber identifier for the process chamber in which the historical task was executed, a process start time identifier for the historical task, and an identifier for the task object of the historical task; wherein, the task identifier is used to identify different historical tasks, the chamber identifier is used to identify different process chambers, the process start time identifier is used to identify different process start times of historical tasks, and the task object identifier is used to identify different task objects of historical tasks.
[0008] In some embodiments, the index identifier corresponding to the index information includes the task identifier, the chamber identifier, the process start time identifier, and the identifier of the task object. Obtaining the APC data to be queried from all APC data of the semiconductor process equipment based on the index identifier corresponding to the index information includes: obtaining all APC data corresponding to the chamber identifier from all APC data of the semiconductor process equipment; and obtaining the APC data corresponding to the task identifier, the process start time identifier, and the identifier of the task object from all APC data corresponding to the chamber identifier.
[0009] In some embodiments, the method further includes: detecting whether the obtained APC data of the historical task is correct based on the task data of the historical task.
[0010] In some embodiments, detecting whether the obtained APC data of the historical task is correct based on the task data of the historical task includes: detecting whether the APC data of the historical task is correct, whether the number of APC files containing the APC data of the historical task is correct, and whether the name of the APC files containing the APC data of the historical task is correct based on the task data of the historical task.
[0011] In some embodiments, detecting whether the number of APC files containing the historical task's APC data is correct based on the historical task's task data includes: detecting whether a first condition and a second condition are simultaneously met; if both the first condition and the second condition are met, then the number of APC files containing the historical task's APC data is correct; wherein, the first condition includes: the number of folders containing the APC files containing the historical task's APC data is the same as the number of process chambers in which the historical task was executed, as recorded in the historical task's task data; the second condition includes: the number of APC files containing the historical task's APC data is the same as the number of task objects in the historical task, as recorded in the historical task's task data.
[0012] In some embodiments, detecting whether the name of the APC file containing the historical task's APC data is correct, based on the task data of the historical task, includes: detecting whether a third condition and a fourth condition are met simultaneously; if both the third and fourth conditions are met simultaneously, then the name of the APC file containing the historical task's APC data is correct; wherein, the third condition includes: the name of the folder containing the APC file containing the historical task's APC data is the same as the chamber identifier of the process chamber executing the historical task recorded in the task data of the historical task; the fourth condition includes: the task identifier, task object identifier, and process start time in the name of the APC file containing the historical task's APC data are the same as the task identifier, task object identifier, and process start time of the historical task recorded in the task data of the historical task, respectively.
[0013] In some embodiments, detecting whether the APC data of the historical task is correct based on the task data of the historical task includes: detecting whether a fifth condition, a sixth condition, and a seventh condition are simultaneously met; if the fifth condition, the sixth condition, and the seventh condition are simultaneously met, then the APC data of the historical task is correct; wherein, the fifth condition includes: the basic process information recorded in the APC data of the historical task is the same as the basic process information recorded in the task data of the historical task; the sixth condition includes: the process step information recorded in the APC data of the historical task is the same as the process step information recorded in the task data of the historical task; the seventh condition includes: the difference between the actual acquisition frequency and the preset acquisition frequency of the APC data of the historical task is less than a preset value.
[0014] In some embodiments, the APC data of multiple historical tasks are detected in parallel to determine whether they are correct; and / or, the APC data of multiple process chambers of any historical task are detected in parallel to determine whether they are correct; and / or, the APC data of any historical task is detected in parallel to determine whether the number of APC files containing the APC data of the historical task is correct, and the name of the APC file containing the APC data of the historical task is correct.
[0015] In a second aspect, the present invention discloses a host computer for semiconductor process equipment, including a memory, a processor, and a computer program stored in the memory and executable on the processor. When the processor executes the computer program, it implements the APC data query method for semiconductor process equipment as described in any of the preceding claims.
[0016] Thirdly, the present invention discloses a computer-readable storage medium storing a computer program, wherein when the computer program is executed by a processor, it implements the APC data query method for semiconductor process equipment as described in any of the preceding claims.
[0017] This invention discloses an APC data query method and related equipment for semiconductor process equipment. A host computer receives an APC data query request, which carries index information of the APC data to be queried. In response to the APC data query request, the host computer obtains the task data of the historical task corresponding to the index information. Each historical task's task data carries multiple index identifiers. The host computer obtains the index identifier corresponding to the index information from these multiple index identifiers. Since the index identifier is used to identify the process-related data of the historical task, and APC data is process-related data generated by the semiconductor process equipment during the execution of historical tasks, the required APC data can be obtained from all APC data of the semiconductor process equipment based on the index identifier corresponding to the index information. This enables automatic querying of APC data for the semiconductor process equipment, thereby improving query efficiency and reducing query costs and error rates. Attached Figure Description
[0018] To more clearly illustrate the technical solutions in the embodiments of the present invention or the background art, the accompanying drawings used in the embodiments of the present invention or the background art will be described below.
[0019] Figure 1 This is a flowchart of an APC data query method for semiconductor process equipment disclosed in an embodiment of the present invention.
[0020] Figure 2 This is a schematic diagram of the structure of APC data for a historical task disclosed in an embodiment of the present invention.
[0021] Figure 3 This is a schematic diagram of the structure of task data for a historical task disclosed in an embodiment of the present invention.
[0022] Figure 4 This is a flowchart of another APC data query method for semiconductor process equipment disclosed in an embodiment of the present invention.
[0023] Figure 5 This is a flowchart illustrating an APC data detection method disclosed in an embodiment of the present invention.
[0024] Figure 6 This is a schematic diagram of the structure of a host computer for a semiconductor process equipment disclosed in an embodiment of the present invention. Detailed Implementation
[0025] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. All other embodiments obtained by those skilled in the art based on the embodiments of this application without creative effort are within the scope of protection of this application.
[0026] Current semiconductor process equipment typically transmits APC (Automatic Process Control) data generated during each job to a host computer via a lower-level computer. The host computer then records this APC data according to preset rules and saves it as an APC file or database in a designated path. A job refers to the process of transferring wafers and other materials along a set path, ensuring that these materials complete the process at a specified location during transport.
[0027] Currently, process engineers query the APC data generated by each process chamber during the process after a task is completed. However, this querying speed is relatively slow. When dealing with a large amount of APC data, it not only consumes a lot of manpower but also makes it difficult to achieve fast APC data retrieval. Furthermore, human error in querying may lead to inaccurate APC data detection results.
[0028] Based on this, this application discloses an APC data query scheme, which uses the host computer of semiconductor process equipment to query APC data, which can not only improve the query efficiency of APC data, but also reduce the query cost and query error rate of APC data.
[0029] As an optional implementation of the disclosed content of this invention, an embodiment of this invention discloses an APC data query method for semiconductor process equipment, applied to the host computer of the semiconductor process equipment, such as... Figure 1 As shown, Figure 1 This is a flowchart of an APC data query method for semiconductor process equipment disclosed in an embodiment of the present invention. The method includes:
[0030] S101: Receive an APC data query request, which carries the index information of the APC data to be queried.
[0031] APC data refers to process-related data generated by semiconductor process equipment during the execution of any historical task. A historical task refers to a task that the semiconductor process equipment has already performed. For example, a historical task could be a process such as etching or deposition performed by the semiconductor process equipment on a task object (such as a wafer) transferred to the process chamber.
[0032] In some embodiments of the present invention, such as Figure 2As shown, Figure 2 This is a schematic diagram of the structure of APC data for a historical task disclosed in an embodiment of the present invention. The APC data for a historical task includes process-related data and formula-related data. The process-related data includes the task identifier of the historical task, the chamber identifier of the process chamber that performed the historical task, and the identifier of the task object of the historical task, etc. The formula-related data includes the name of the formula step, the formula step time, and the actual acquisition frequency of the APC data of the process formula of the historical task, etc.
[0033] The task identifier includes the batch number of the task (such as LotID), which is used to identify different historical tasks; the chamber identifier of the process chamber includes the name of the process chamber, which is used to identify different process chambers; the task object includes the wafer, and the task object identifier includes the name of the wafer, which is used to identify different task objects; the recipe step name includes the name of each step in the recipe, and the recipe step time includes the execution time of each step in the recipe.
[0034] Furthermore, APC data can be recorded either as .dc files (APC files) or as a database. Taking APC file storage as an example, the APC data for a single historical task in a process chamber is stored in one APC file, while all APC files for all historical tasks in a process chamber are stored in one folder.
[0035] When a user needs to query APC data, the index information required for the query is added to the APC data query request, which is then sent to the host computer of the semiconductor process equipment. Upon receiving the query request, the host computer retrieves the APC data based on the index information. For example, if a user needs to query APC data stored within a specific time period, that time period information is added as index information to the query request. Similarly, if a user needs to query APC data for a historical task, the task information of that historical task is added as index information to the query request.
[0036] S102: In response to the APC data query request, retrieve the task data of the historical task corresponding to the index information.
[0037] The task data refers to task-related data generated by the semiconductor process equipment during the execution of any historical task. In some embodiments of the present invention, the task data of historical tasks includes data recorded in files named with the task identifier and process start time identifier of the historical task. Figure 3 As shown, Figure 3This is a schematic diagram of the structure of task data for a historical task disclosed in an embodiment of the present invention. The task data includes task-related data, chamber-related data, and recipe-related data. The task-related data includes the task identifier (e.g., LotID), the process start time identifier, and the process end time identifier of the historical task. The chamber-related data includes the chamber identifier (e.g., chamber name) of the process chamber executing the historical task and the identifier of the task object (e.g., wafer name). The recipe-related data includes the recipe step name and recipe step time of the process recipe for the historical task. The process start time identifier is used to identify different process start times; the process end time identifier is used to identify different process end times.
[0038] Of course, the present invention is not limited to this. In other embodiments, the task data of historical tasks includes not only the data in the aforementioned files, but also data in the host computer logs, etc., which will not be elaborated here. For example, if the data in the aforementioned files does not include the process start time, the process start time can be obtained from the data in the host computer logs.
[0039] The historical task data carries multiple index identifiers, which are used to identify multiple process-related data of the historical task. In some embodiments, the multiple index identifiers include the historical task's task identifier (e.g., LotID), the chamber identifier of the process chamber that executed the historical task (e.g., chamber name), the historical task's process start time identifier (e.g., process start time), and the identifier of the historical task's task object (e.g., wafer name). Of course, the present invention is not limited to this; in other embodiments, the multiple index identifiers may also include a process end time identifier, etc.
[0040] Because the APC data for a historical task in a process chamber is recorded in an APC file named with the task identifier (e.g., LotID), process start time identifier (e.g., process start time), and task object identifier (e.g., wafer name), and all APC files for all historical tasks in a process chamber are stored in a folder named with the chamber identifier (e.g., chamber name), the required APC data cannot be accurately retrieved based on index information such as time period and task information.
[0041] Therefore, in this embodiment of the invention, the host computer responds to the APC data query request by first obtaining the task data of the historical task corresponding to the index information. Since both the task data and the APC data carry the above-mentioned multiple index identifiers, and the index identifiers of the task data and APC data of the same historical task are the same, after obtaining at least one index identifier required to query the APC data from the task data, the required APC data can be accurately queried according to the obtained index identifier.
[0042] S103: Obtain the index identifier corresponding to the index information from the multiple index identifiers carried in the task data of the historical task.
[0043] Because different index information corresponds to different index identifiers, after obtaining the task data of the historical task corresponding to the index information, it is necessary to obtain the index identifier corresponding to the index information from the multiple index identifiers carried by the task data of that historical task. The correspondence between index information and index identifiers can be pre-stored in the host computer.
[0044] For example, if the index information is the task information of a historical task, it is necessary to first obtain the task data of the historical task corresponding to the task information, and then obtain the corresponding index identifier from the multiple index identifiers it carries, such as the task identifier (e.g., LotID) and the chamber identifier (e.g., chamber name); if the index information is information of a certain time period, it is necessary to first obtain the task data of the historical tasks within that time period, and then obtain the corresponding index identifier from the multiple index identifiers it carries, such as the task identifier (e.g., LotID), the chamber identifier (e.g., chamber name), the process start time identifier (e.g., process start time), and the identifier of the task object (e.g., wafer name).
[0045] S104: Based on the index identifier corresponding to the index information, obtain the APC data to be queried from all APC data of the semiconductor process equipment.
[0046] Taking the index identifier corresponding to the index information as an example, which includes task identifier and chamber identifier, we can first obtain all APC data in the folder corresponding to the chamber identifier from all APC data of semiconductor process equipment, and then obtain the APC data corresponding to the task identifier from all APC data in the folder corresponding to the chamber identifier. The obtained APC data is the APC data that needs to be queried.
[0047] In this embodiment of the invention, the host computer responds to the APC data query request, obtains the task data of the historical task corresponding to the index information carried in the APC data query request, obtains the index identifier corresponding to the index information from multiple index identifiers carried in the historical task task data, and obtains the APC data to be queried from all APC data of the semiconductor process equipment according to the index identifier corresponding to the index information. This enables automatic querying of APC data of semiconductor process equipment, thereby improving the query efficiency of APC data and reducing the query cost and query error rate of APC data.
[0048] In some embodiments of the present invention, when the task data of the historical task corresponding to the index information is the task data of multiple process chambers, the task data of the historical task is divided into multiple blocks of data. Different blocks of data are the task data of different process chambers of different historical tasks. From the multiple index identifiers carried by each block of data, a partial index identifier is obtained from the index identifiers corresponding to the index information. Each partial index identifier is used to obtain the APC data corresponding to each block of data from all APC data of the semiconductor process equipment, and to detect whether the different APC data are correct according to the different block data.
[0049] It should be noted that by obtaining multiple partial index identifiers from multiple index identifiers carried by multiple blocks of data, a mapping relationship between multiple blocks of data and multiple APC data can be established, thereby enabling faster and more accurate retrieval of APC data and further improving the detection efficiency of APC data.
[0050] For example, a historical task includes a first historical task, a second historical task, and a third historical task. The process chambers executing the first historical task include a first process chamber and a second process chamber. The process chambers executing the second historical task include a third process chamber. The process chambers executing the third historical task include a fourth process chamber. Then, the task data of at least one historical task is divided into a first block of data to a fourth block of data. The first block of data is the task data of the first process chamber executing the first historical task. The second block of data is the task data of the second process chamber executing the first historical task. The third block of data is the task data of the third process chamber executing the second historical task. The fourth block of data is the task data of the fourth process chamber executing the third historical task.
[0051] Based on this, the first part of the index identifier corresponding to the index information can be obtained according to the multiple index identifiers carried by the first block of data, such as the task identifier of the first historical task (e.g., LotID) and the chamber identifier of the first process chamber (e.g., chamber name); the second part of the index identifier corresponding to the index information can be obtained according to the multiple index identifiers carried by the second block of data, such as the task identifier of the first historical task (e.g., LotID) and the chamber identifier of the second process chamber (e.g., chamber name); the third part of the index identifier corresponding to the index information can be obtained according to the multiple index identifiers carried by the third block of data, such as the task identifier of the second historical task (e.g., LotID) and the chamber identifier of the third process chamber (e.g., chamber name); the fourth part of the index identifier corresponding to the index information can be obtained according to the multiple index identifiers carried by the fourth block of data, such as the task identifier of the third historical task (e.g., LotID) and the chamber identifier of the fourth process chamber (e.g., chamber name).
[0052] Based on this, all APC files within a folder named after the chamber identifier (e.g., chamber name) of the first process chamber can be obtained based on the chamber identifier (e.g., chamber name). Similarly, APC files within the same folder named after the task identifier (e.g., LotID) of the first historical task can be obtained based on the task identifier (e.g., LotID) of the first historical task, thus obtaining the APC data for the first process chamber executing the first historical task. Likewise, all APC files within a folder named after the chamber identifier (e.g., chamber name) of the second process chamber can be obtained based on the chamber identifier (e.g., chamber name). The task identifier (e.g., LotID) is used to obtain the APC file named after the task identifier (e.g., LotID) of the first historical task within the folder, thereby obtaining the APC data of the second process chamber that performed the first historical task; similarly, the APC data of the third process chamber that performed the second historical task can be obtained based on the task identifier (e.g., LotID) of the second historical task and the chamber identifier (e.g., chamber name) of the third process chamber, and the APC data of the fourth process chamber that performed the third historical task can be obtained based on the task identifier (e.g., LotID) of the third historical task and the chamber identifier (e.g., chamber name) of the fourth process chamber. Further details are omitted here.
[0053] Of course, if the process chamber that performs any historical task in the semiconductor process equipment is a single process chamber, the APC data to be detected is stored in one APC file, so there is no need to divide the task data of the historical task into blocks, which will not be elaborated here.
[0054] It should be noted that after dividing the task data of any historical task into multiple data blocks, the task identifiers and chamber identifiers of these data blocks can be recorded in a table for later querying based on the corresponding index identifiers. In other words, different historical task task data can be retrieved and different index identifiers can be obtained according to different APC data query requirements.
[0055] In some embodiments of the present invention, if the APC data query request is used to query APC data within a preset time period, the historical task data obtained by the host computer is the historical task within the preset time period. In this case, using only the task identifier (such as LotID) and the chamber identifier (such as the chamber name) as index identifiers is not enough to obtain the APC data within the preset time period. Therefore, it is also necessary to use the process start time identifier (such as the process start time) and the identifier of the task object (such as the wafer name) as index identifiers.
[0056] In other words, the index identifier corresponding to the index information may include the task identifier (such as LotID) of the historical task within a preset time period, the chamber identifier (such as chamber name) of the process chamber that performed the historical task within the preset time period, the identifier of the task object of the historical task within the preset time period (such as wafer name), and the process start time identifier (such as process start time) of the historical task within the preset time period.
[0057] Based on this, according to the chamber identifier (such as chamber name) of the process chamber that performed the historical task within the preset time period, all APC data in the folder corresponding to the chamber identifier of the process chamber can be obtained from all APC data of the semiconductor process equipment. According to the task identifier (such as LotID), the task object identifier (such as wafer name) of the historical task within the preset time period, and the process start time identifier (such as process start time) of the historical task within the preset time period, all APC data within the folder corresponding to the chamber identifier of the process chamber can be obtained from all APC data in the folder corresponding to the chamber identifier of the process chamber. And the correctness of different APC data can be detected according to different block data.
[0058] For example, if an APC data query request is used to query APC data within the time period T1 to T2, then based on the execution time of each historical task, the historical tasks executed within the time period T1 to T2 can be determined as the first historical task, the second historical task, and the third historical task. Furthermore, within the time period T1 to T2, the process chambers executing the first historical task are the first process chamber and the second process chamber, the process chamber executing the second historical task is the third process chamber, and the process chamber executing the third historical task is the fourth process chamber. The task object in the first process chamber is the first wafer, the task object in the second process chamber is the second wafer, the task object in the third process chamber is the third wafer, and the task object in the fourth process chamber is the fourth wafer.
[0059] It is understandable that there can be multiple process chambers executing the same historical task, and one process chamber executing the same historical task can process multiple task objects. Therefore, it is necessary to use the task identifier (such as LotID), the process start time identifier (such as process start time), the chamber identifier of the process chamber (such as chamber name), and the identifier of the task object (such as wafer name) as index identifiers to accurately obtain the APC data in the time period from T1 to T2.
[0060] Similarly, the task data of historical tasks can be divided into four blocks: the first block is the task data of the first process chamber that performs the first historical task, the second block is the task data of the second process chamber that performs the first historical task, the third block is the task data of the third process chamber that performs the second historical task, and the fourth block is the task data of the fourth process chamber that performs the third historical task.
[0061] Based on this, the first part of the index identifier corresponding to the index information can be obtained according to the multiple index identifiers carried by the first block of data, such as the task identifier of the first historical task (e.g., LotID), the chamber identifier of the first process chamber (e.g., chamber name), the identifier of the first wafer (e.g., name), and the process start time. The second part of the index identifier corresponding to the index information can be obtained according to the multiple index identifiers carried by the second block of data, such as the task identifier of the first historical task (e.g., LotID), the chamber identifier of the second process chamber (e.g., chamber name), the identifier of the second wafer (e.g., name), and the process start time. The third part of the index identifier corresponding to the index information can be obtained according to the multiple index identifiers carried by the third block of data, such as the task identifier of the second historical task (e.g., LotID), the chamber identifier of the third process chamber (e.g., chamber name), the identifier of the third wafer (e.g., name), and the process start time. The fourth part of the index identifier corresponding to the index information can be obtained according to the multiple index identifiers carried by the fourth block of data, such as the task identifier of the third historical task (e.g., LotID), the chamber identifier of the fourth process chamber (e.g., chamber name), the identifier of the fourth wafer (e.g., name), and the process start time.
[0062] Based on this, all APC files in a folder named after the chamber identifier (e.g., chamber name) of the first process chamber can be obtained. Based on the task identifier (e.g., LotID), the identifier (e.g., name) of the first wafer, and the process start time identifier (e.g., process start time) of the first historical task, APC files in the same folder named after the task identifier (e.g., LotID), the identifier (e.g., name) of the first historical task, and the process start time identifier (e.g., process start time) of the first wafer can be obtained. Thus, the APC data of the first process chamber that executed the first historical task during the time period T1 to T2 can be obtained. Similarly, APC data for the second process chamber executing the first historical task during the T1-T2 period can be obtained based on the task identifier (e.g., LotID) of the first historical task, the chamber identifier (e.g., chamber name) of the second process chamber, the identifier (e.g., name) of the second wafer, and the process start time identifier (e.g., process start time). APC data for the third process chamber executing the second historical task during the T1-T2 period can be obtained based on the task identifier (e.g., LotID) of the second historical task, the chamber identifier (e.g., chamber name) of the third process chamber, the identifier (e.g., name) of the third wafer, and the process start time identifier (e.g., process start time). And APC data for the fourth process chamber executing the third historical task during the T1-T2 period can be obtained based on the task identifier (e.g., LotID) of the third historical task, the chamber identifier (e.g., chamber name) of the fourth process chamber, the identifier (e.g., name) of the fourth wafer, and the process start time identifier (e.g., process start time). This will not be elaborated further here.
[0063] Of course, the present invention is not limited to this. In some other embodiments, if the APC data query request is used to query the APC data of a certain task object of a certain historical task, it is necessary to obtain the task data of the historical task of the task object and obtain the corresponding index identifier. The index identifier may include the task identifier (such as LotID), the chamber identifier (such as the chamber name), and the identifier of the task object (such as the name of the wafer), which will not be elaborated here.
[0064] Based on the above embodiments, the correctness of the APC data for a process chamber performing a corresponding historical task can be detected based on any one data block. In other words, the correctness of the APC data in multiple APC files can be detected based on multiple data blocks.
[0065] For example, based on the first data block, it can be used to check whether the APC data of the first process chamber executing the first historical task is correct; based on the second data block, it can be used to check whether the APC data of the second process chamber executing the first historical task is correct; based on the third data block, it can be used to check whether the APC data of the third process chamber executing the second historical task is correct; based on the fourth data block, it can be used to check whether the APC data of the fourth process chamber executing the third historical task is correct.
[0066] In some embodiments of the present invention, such as Figure 4 As shown, Figure 4 This is a flowchart of an APC data detection method for semiconductor process equipment disclosed in an embodiment of the present invention. The detection method includes steps S101 to S105, wherein steps S101 to S104 are the same as described above.
[0067] S105: Based on the task data of the historical task, check whether the obtained APC data of the historical task is correct.
[0068] In this context, historical task data refers to the target data for the semiconductor process equipment during the execution of that historical task, while APC data is the actual data generated by the semiconductor process equipment during the execution of that historical task. For example, the target etching temperature of the wafer recorded in the task data might be a first temperature value. However, due to factors such as low heater power, the actual etching temperature of the wafer might be a second temperature value, which is lower than the first temperature value. Therefore, by comparing the second temperature value recorded in the APC data with the first temperature value recorded in the task data, it can be found that the heater power does not meet the requirements. Consequently, by adjusting the heater power, the wafer etching temperature can be ensured to reach the target etching temperature.
[0069] Based on this, task data can be used as target data and compared with APC data to check whether the APC data is correct. If the relevant information recorded in the task data matches the relevant information recorded in the APC data, the detection result is that the APC data is correct, and a correct indication message is output. This correct indication message can include a correct identifier and relevant APC data information, etc. If the relevant information recorded in the task data does not match the relevant information recorded in the APC data, the detection result is that the APC data is incorrect, and an error indication message is output. This error indication message can include an error identifier, error reason, error task name, process start time, and process end time, etc.
[0070] In some embodiments of the present invention, it is possible to detect whether the APC data of any historical task is correct. For example, it is possible to detect whether the basic process information and process step information recorded in the APC data are correct. Of course, the present invention is not limited to this. In other embodiments, it is also possible to detect whether the number and name of the APC files containing the APC data of the historical task are correct.
[0071] In some embodiments of the present invention, detecting whether the number of APC files containing the APC data of any historical task is correct, based on the task data of any historical task, includes: detecting whether a first condition and a second condition are met simultaneously; if the first condition and the second condition are met simultaneously, then the number of APC files containing the APC data of the historical task is correct; wherein, the first condition includes: the number of folders containing the APC files containing the APC data of the historical task is the same as the number of process chambers in which the historical task was executed, as recorded in the task data of the historical task; the second condition includes: the number of APC files containing the APC data of the historical task is the same as the number of task objects (such as wafers) in the historical task, as recorded in the task data of the historical task.
[0072] The APC file containing the APC data of this historical task refers to the APC file named after the task identifier (such as LotID), the identifier of the task object (such as the name of the wafer), and the process start time identifier (such as the process start time) of this historical task. The folder containing the APC file containing the APC data of this historical task refers to the folder named after the chamber identifier (such as the chamber name) of the process chamber that performed this historical task.
[0073] For example, if the number of folders containing the APC files for the historical task's APC data is 3, and the number of process chambers in which the historical task's task data records executed the historical task is also 3, then the first condition is met. If the number of task objects (such as wafers) for the historical task in the historical task's task data records is 5, and the number of APC files containing the historical task's APC data is also 5, then the second condition is met.
[0074] In some embodiments of the present invention, detecting whether the name of the APC file containing the APC data of any historical task is correct, based on the task data of any historical task, includes: detecting whether a third condition and a fourth condition are met simultaneously; if both the third and fourth conditions are met simultaneously, then the name of the APC file containing the APC data of the historical task is correct; wherein, the third condition includes: the name of the folder containing the APC file containing the APC data of the historical task is the same as the chamber identifier (such as chamber name) of the process chamber that executed the historical task recorded in the task data of the historical task; the fourth condition includes: the task identifier (such as LotID), the task object identifier (such as wafer name), and the process start time identifier (such as process start time) in the name of the APC file containing the APC data of the historical task are the same as the task identifier (such as LotID), the task object identifier (such as wafer name), and the process start time identifier (such as process start time) of the historical task recorded in the task data of the historical task.
[0075] In other words, if the name of the folder named after the chamber identifier (e.g., chamber name) of the process chamber that performed the historical task is the same as the chamber identifier (e.g., chamber name) of the process chamber that performed the historical task in the task data record, then the third condition is satisfied. If the file name of the APC file named after the task identifier (e.g., LotID), task object identifier (e.g., wafer name), and process start time identifier (e.g., process start time) of the historical task is the same as the task identifier (e.g., LotID), task object identifier (e.g., wafer name), and process start time identifier (e.g., process start time) of the historical task in the task data record, then the fourth condition is satisfied.
[0076] It should be noted that if the third and / or fourth conditions are not met, it indicates that there is a problem with the naming of the APC file and / or the folder containing the APC file. The naming needs to be modified in time to avoid errors or management difficulties in subsequent process analysis.
[0077] In some embodiments of the present invention, detecting whether the APC data of any historical task is correct based on the task data of any historical task includes: detecting whether the fifth, sixth, and seventh conditions are met simultaneously; if the fifth, sixth, and seventh conditions are met simultaneously, then the APC data of the historical task is correct; wherein, the fifth condition includes: the basic process information recorded in the APC data of the historical task is the same as the basic process information recorded in the task data of the historical task; the sixth condition includes: the process step information recorded in the APC data of the historical task is the same as the process step information recorded in the task data of the historical task; the seventh condition includes: the difference between the actual acquisition frequency of the APC data of the historical task and the preset acquisition frequency is less than a preset value. This preset value is generally in the range of 0 to 2 ms, including 2 ms.
[0078] The basic process information includes the task identifier (e.g., LotID), the identifier of the task object (e.g., wafer name), the slot location of the task object (e.g., Slot ID), and the recipe name of the historical task. The process step information includes the recipe step identifier (e.g., Step ID), recipe step name, and recipe step time for the historical task's process recipe.
[0079] In some embodiments of the present invention, in order to further improve the detection efficiency of APC data, the APC data of multiple historical tasks can be detected in parallel in a multi-threaded manner to determine whether the APC data is correct; and / or, the APC data of multiple process chambers executing any historical task can be detected in parallel to determine whether the APC data of any historical task is correct, whether the number of APC files containing the APC data of the historical task is correct, and whether the name of the APC file containing the APC data of the historical task is correct.
[0080] like Figure 5 As shown, Figure 5 This is a flowchart illustrating an APC data detection method disclosed in an embodiment of the present invention. After obtaining the APC data of a first historical task and the APC data of a second historical task, one thread can be used to detect the APC data of one historical task, or two threads can be used to detect the APC data of the first historical task and the APC data of the second historical task in parallel. Each thread may also include three first sub-threads, which respectively detect in parallel whether the APC data of a historical task is correct, whether the number of APC files containing the APC data of the historical task is correct, and whether the name of the APC file containing the APC data of the historical task is correct.
[0081] As another optional implementation of the disclosure of this invention, embodiments of this invention also disclose a host computer for semiconductor process equipment, such as... Figure 6 As shown, Figure 6 This is a schematic diagram of the structure of a host computer for a semiconductor process equipment disclosed in an embodiment of the present invention. The host computer includes a memory and a processor. The memory is used to store computer programs. The processor is used to execute the APC data query method for semiconductor process equipment disclosed in any of the above embodiments according to the computer programs stored in the memory.
[0082] As another optional implementation of the disclosure of this invention, the embodiments of this invention also disclose a computer-readable storage medium storing a computer program, which, when run by a processor, executes the APC data query method for semiconductor process equipment as disclosed in any of the above embodiments.
[0083] Those skilled in the art will understand that all or part of the processes in the methods of the above embodiments can be implemented by a computer program instructing related hardware. The computer program can be stored in a non-volatile computer-readable storage medium. When executed, the computer program can include the processes of the embodiments of the methods described above. Any references to memory, storage, databases, or other media used in the embodiments provided in this specification can include non-volatile and / or volatile memory. Non-volatile memory may include read-only memory (ROM), programmable ROM (PROM), electrically programmable ROM (EPROM), electrically erasable programmable ROM (EEPROM), or flash memory. Volatile memory may include random access memory (RAM) or external cache memory. By way of illustration and not limitation, RAM is available in various forms, such as static RAM (SRAM), dynamic RAM (DRAM), synchronous DRAM (SDRAM), dual data rate SDRAM (DDRSDRAM), enhanced SDRAM (ESDRAM), synchronous link DRAM (SLDRAM), RAMbus direct RAM (RDRAM), direct memory bus dynamic RAM (DRDRAM), and RAMbus dynamic RAM (RDRAM), etc.
[0084] As another optional implementation of the disclosure in this application, embodiments of this application also disclose a computer program product, which includes computer program instructions. When the computer program instructions are run by a processor, the processor executes the APC data query method for semiconductor process equipment as disclosed in any of the above embodiments.
[0085] Computer program products can be written in any combination of one or more programming languages to perform the operations of the embodiments of this application. The programming languages include object-oriented programming languages such as Python and C++, as well as conventional procedural programming languages such as C or similar languages. The program code can be executed entirely on the user's computing device, partially on the user's computing device, as a standalone software package, partially on the user's computing device and partially on a remote computing device, or entirely on a remote computing device or server.
[0086] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.
[0087] The above embodiments are merely illustrative of several implementation methods described in detail, but they should not be construed as limiting the scope of the invention patent. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this specification, and these all fall within the protection scope of this specification. Therefore, the protection scope of this patent should be determined by the appended claims.
Claims
1. A method for querying APC data of semiconductor process equipment, characterized in that, The method, applied to the host computer of the semiconductor process equipment, includes: The system receives an APC data query request, which carries index information of the APC data to be queried. The APC data is process-related data generated by the semiconductor process equipment during the execution of any historical task. The historical task is a task that the semiconductor process equipment has already executed. In response to the APC data query request, the system obtains the task data of the historical task corresponding to the index information. The task data is task-related data generated by the semiconductor process equipment during the execution of any historical task. The task data of any historical task carries multiple index identifiers, which are used to identify multiple process-related data of that historical task. From the multiple index identifiers carried by the historical task data, obtain the index identifier corresponding to the index information; Based on the index identifier corresponding to the index information, the APC data to be queried is obtained from all APC data of the semiconductor process equipment.
2. The APC data query method according to claim 1, characterized in that, The step of obtaining the index identifier corresponding to the index information from multiple index identifiers carried in the task data of the historical task includes: The task data of the historical tasks is divided into multiple data blocks, and the different data blocks are the task data of different process chambers of different historical tasks. From the multiple index identifiers carried by each block of data, a portion of the index identifiers corresponding to the index information are obtained; the portion of the index identifiers is used to obtain the APC data corresponding to the block of data from all APC data of the semiconductor process equipment.
3. The APC data query method according to claim 1 or 2, characterized in that, The multiple index identifiers include the task identifier of the historical task, the chamber identifier of the process chamber that executed the historical task, the process start time identifier of the historical task, and the identifier of the task object of the historical task. The task identifier is used to identify different historical tasks, the chamber identifier is used to identify different process chambers, the process start time identifier is used to identify different process start times, and the task object identifier is used to identify different task objects.
4. The APC data query method according to claim 3, characterized in that, The index identifier corresponding to the index information includes the task identifier, the chamber identifier, the process start time identifier, and the identifier of the task object. Obtaining the APC data to be queried from all APC data of the semiconductor process equipment based on the index identifier corresponding to the index information includes: Obtain all APC data corresponding to the chamber identifier from all APC data of the semiconductor process equipment; From all the APC data corresponding to the chamber identifier, obtain the APC data corresponding to the task identifier, the process start time identifier, and the task object identifier.
5. The APC data query method according to claim 1, characterized in that, Also includes: Based on the task data of the historical tasks, check whether the obtained APC data of the historical tasks is correct.
6. The APC data query method according to claim 5, characterized in that, The step of detecting whether the obtained APC data of the historical task is correct based on the task data of the historical task includes: Based on the task data of the historical tasks, check whether the APC data of the historical tasks is correct, whether the number of APC files containing the APC data of the historical tasks is correct, and whether the name of the APC files containing the APC data of the historical tasks is correct.
7. The APC data query method according to claim 6, characterized in that, Based on the task data of the historical tasks, checking whether the number of APC files containing the APC data of the historical tasks is correct includes: Check whether both the first and second conditions are met simultaneously; If both the first and second conditions are met, then the number of APC files containing the APC data of the historical task is correct. The first condition includes: the number of folders containing the APC files containing the APC data of the historical task is the same as the number of process chambers in which the historical task was executed, as recorded in the task data of the historical task. The second condition includes: the number of APC files containing the APC data of the historical task is the same as the number of task objects of the historical task recorded in the task data of the historical task.
8. The APC data query method according to claim 6, characterized in that, Based on the task data of the historical tasks, checking whether the name of the APC file containing the APC data of the historical tasks is correct includes: Check whether both the third and fourth conditions are met simultaneously; If both the third and fourth conditions are met, then the name of the APC file containing the APC data of the historical task is correct. The third condition includes: the name of the folder where the APC file containing the APC data of the historical task is located is the same as the chamber identifier of the process chamber that executed the historical task in the task data record of the historical task. The fourth condition includes: the task identifier, task object identifier, and process start time in the name of the APC file where the APC data of the historical task is located are the same as the task identifier, task object identifier, and process start time of the historical task in the task data record of the historical task.
9. The APC data query method according to claim 6, characterized in that, Detecting the correctness of the APC data of the historical tasks based on the task data of the historical tasks includes: Check whether conditions five, six, and seven are met simultaneously; If the fifth, sixth, and seventh conditions are met simultaneously, then the APC data of the historical task is correct. The fifth condition includes: the basic process information of the APC data record of the historical task is the same as the basic process information of the task data record of the historical task. The sixth condition includes: the process step information in the APC data record of the historical task is the same as the process step information in the task data record of the historical task; The seventh condition includes: the difference between the actual acquisition frequency and the preset acquisition frequency of the APC data of the historical task is less than a preset value.
10. The APC data query method according to claim 6, characterized in that, The system can simultaneously check whether the APC data of multiple historical tasks is correct; and / or, simultaneously check whether the APC data of multiple process chambers of any historical task is correct; and / or, simultaneously check whether the APC data of any historical task is correct, whether the number of APC files containing the APC data of the historical task is correct, and whether the name of the APC file containing the APC data of the historical task is correct.
11. A host computer for semiconductor process equipment, characterized in that, The device includes a memory, a processor, and a computer program stored in the memory and executable on the processor. When the processor executes the computer program, it implements the APC data query method for semiconductor process equipment according to any one of claims 1 to 10.
12. A computer-readable storage medium, characterized in that, The computer-readable storage medium stores a computer program, which, when executed by a processor, implements the APC data query method for semiconductor process equipment as described in any one of claims 1 to 10.