Spin coating device and method for glass coating

Abstract

The invention relates to the technical field of glass coating, in particular to a spin coating device and method for glass coating, the spin coating device comprises a spin coating box, a spin coating material supply mechanism, a power pumping-back mechanism and a hot air supply mechanism are arranged in the spin coating box, and the spin coating material supply mechanism and the hot air supply mechanism both penetrate through the inner wall of the spin coating box; the power pumping-back mechanism and the rotary coating material supplying mechanism are installed in a communicating mode, an annular cylinder frame mechanism is arranged on the upper surface of the rotary coating box in a penetrating mode, a plurality of material clamping mechanisms capable of fixing glass wafers are installed on the inner side of the annular cylinder frame mechanism, and multipurpose spraying discs are arranged on the two sides of each material clamping mechanism. During rotation of the annular cylinder frame mechanism, the rotary coating material supply mechanism, the power pumping-back mechanism and the hot air supply mechanism are made to conduct spraying and drying treatment on the wafers through the multi-purpose spraying disc in sequence, when multiple wafers are coated, coating does not need to be stopped when the wafers are replaced, and the coating efficiency is improved.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of glass coating, in particular to a spin coating device and method for glass coating. BACKGROUND

[0002] In the processing of glass wafers, in order to improve the mechanical properties of the glass wafers, the surface of the glass wafers needs to be coated. Currently, the glass wafers are usually coated by spin coating on the glass wafers, and then a high-temperature solidification is performed to form a layer of anti-reflective and anti-fouling film on the glass surface.

[0003] Chinese patent CN119140347A discloses a spin coating device and method for glass coating, which comprises a control base, an upper portion of the control base is fixed with a machine cover, one side of the machine cover is provided with a vacuum pipe for vacuumizing the machine cover and an exhaust pipe for exhausting the machine cover. The application cooperates the IR coating mechanism, the AR coating mechanism and the Ink spin coating mechanism to perform IR coating on the wafer first, then perform AR coating on the wafer, which helps to further optimize the light transmittance and imaging quality of the final product. The process of performing IR coating on the wafer first, then performing AR coating on the wafer, then performing Ink spin coating, and finally performing AR coating, not only can improve the optical performance, enhance the adhesion of the coating, optimize the process flow, and improve the product performance, but also can improve the production efficiency and reduce the cost, enhance the product reliability, reduce the probability of color dispersion and high-temperature resistance phenomenon in the baking process. The above-mentioned related technology has the following defects: in the existing technology, after the coating is completely coated on the glass wafer, the whole is dried, so that the coating is not uniform due to the flow in the once-coated thick coating, and it is not convenient to replace the new wafer in the coating, and the coating gap occurs every time the coating is stopped. SUMMARY

[0004] In order to replace the wafer without stopping the coating, continuously coating different wafers, the present application provides a spin coating device and method for glass coating.

[0005] The spin coating device for glass coating provided by the present application adopts the following technical scheme: a spin coating box is provided, a spin coating material providing mechanism, a power back-pumping mechanism and a hot gas providing mechanism are arranged inside the spin coating box, the spin coating material providing mechanism and the hot gas providing mechanism both penetrate the inner wall of the spin coating box, the power back-pumping mechanism is installed in communication with the spin coating material providing mechanism, an annular cylinder frame mechanism is arranged penetrating the upper surface of the spin coating box, a plurality of clamping mechanisms capable of fixing the glass wafers are installed on the inner side of the annular cylinder frame mechanism, and a multi-purpose spray disc is arranged on both sides of each clamping mechanism.

[0006] A connecting mechanism is provided at the axis of the annular cylindrical frame mechanism. The connecting mechanism consists of a fixed part and a rotating part. The rotating part of the connecting mechanism passes through the inner ring surface of the annular cylindrical frame mechanism and is connected and installed with each multi-purpose spray disc. Multiple transmission chambers are opened on the inner side of the fixed part of the connecting mechanism. The spin coating supply mechanism, the power return mechanism, and the hot air supply mechanism are respectively connected and installed with different transmission chambers. The spin coating box is equipped with a power mechanism to control the rotation of the annular cylindrical frame mechanism.

[0007] Optionally, the spin coating supply mechanism includes a spin coating supply pipe and a spin coating disc. The spin coating supply pipe penetrates the outer surface of the spin coating box. One end of the spin coating supply pipe is connected to the spin coating disc on the inner side of the spin coating box. Multiple spin coating pipes are connected to the outer ring surface of the spin coating disc. The number of spin coating pipes is equal to one-third of the number of transfer chambers. The spin coating pipes are connected to the corresponding transfer chambers.

[0008] The power retraction mechanism includes a retraction disc, a one-way retraction pump, and multiple retraction pipes. The two ends of the one-way retraction pump are respectively connected to the retraction disc and the spin coating disc. The number of retraction pipes is the same as that of the spin coating pipes, and the retraction pipes are connected to the corresponding transmission chambers.

[0009] The hot gas supply mechanism includes a hot gas ring and a hot gas supply pipe. One end of the hot gas supply pipe penetrates the inner wall of the spin coating box, and the other end of the hot gas supply pipe located inside the spin coating box is connected to the hot gas ring. Multiple hot gas pipes are connected to the outer ring surface of the hot gas ring. The number of hot gas pipes is equal to the number of spin coating pipes, and the hot gas pipes are connected to the corresponding transfer chambers.

[0010] Optionally, multiple swirling coating pipes, multiple retraction pipes, and multiple hot gas pipes are connected to different transfer chambers, with the swirling coating pipes, retraction pipes, and hot gas pipes distributed sequentially.

[0011] Optionally, the annular cylinder frame mechanism includes multiple open cylinders and multiple partition cylinders, with the partition cylinders and open cylinders arranged alternately. The two ends of the open cylinders are respectively fixed to the adjacent partition cylinders, and the clamping mechanism and the multi-purpose spray disc are located inside the open cylinders.

[0012] The middle part of the separator cylinder is solid, and multiple clamping mechanisms are installed one-to-one inside the multiple open cylinders. The multiple open cylinders and multiple separator cylinders are arranged in a ring, and the outer ring of the open cylinders is open.

[0013] Optionally, the clamping mechanism includes two side rings, two movable rings, and multiple ring mechanisms. The two side rings are located between the two movable rings. The sides of the two side rings that are far apart from each other are elastically connected to the ends of the two movable rings that are close to each other. The inner ring surfaces of the two side rings are fixed to the outer ring surfaces of two multi-purpose spray discs located inside the same open cylinder.

[0014] The ring material mechanism is located between two side rings. The sides of the two side rings that are far apart from each other are open. A ring spring is provided on the inner side of each side ring. A sliding plate is fixed at both ends of the ring spring. The sliding plate is slidably inserted into the inner side of the corresponding side ring. The two sliding plates located on the inner side of the same side ring are respectively fixed to two adjacent ring material mechanisms. The two ends of the ring material mechanism are slidably sleeved on the outer surface of the two side rings. The two sides of the ring material mechanism are respectively in contact with the side of the two movable rings that are close to each other.

[0015] Each pair of adjacent ring material mechanisms located within the large angle range of the two slides is connected by a fixed-distance rope.

[0016] Optionally, the connecting mechanism includes a cover ring and a fixed inner disc. The fixed inner disc is coaxially rotatably inserted into the inner side of the cover ring. The cover ring is coaxially located within the annular structure formed by the opening cylinder and the partition cylinder. The cover ring is connected to the power mechanism. A three-head tube frame is installed through the opening cylinder near the cover ring. The three-head tube frame has two openings at one end inside the opening cylinder. The two opening ends of the three-head tube frame inside the opening cylinder are respectively connected and installed to two multi-purpose spray discs. The three-head tube frame has one end outside the opening cylinder that penetrates the outer ring surface of the cover ring.

[0017] The transfer chamber is located on the outer ring surface of the fixed inner disc, and the thickness between two adjacent transfer chambers is greater than the outer diameter of the three-headed pipe rack.

[0018] Optionally, the ring material mechanism includes a limiting horizontal cylinder and two push rods. The two push rods are slidably inserted into both ends of the limiting horizontal cylinder. A contact clamp is provided on the side of the limiting horizontal cylinder near the axis of the side ring. Two hinge rods are hinged to the side of the contact clamp near the limiting horizontal cylinder. The two hinge rods are respectively hinged to the two push rods at their respective ends close to each other. The two push rods at their respective ends far from each other are in contact with the two movable rings at their respective ends close to each other. The two ends of the limiting horizontal cylinder are slidably sleeved on the outside of the two side rings.

[0019] The slide block is fixed to the corresponding limiting horizontal cylinder, and the two ends of the distance rope are fixed to the corresponding limiting horizontal cylinder.

[0020] Optionally, a gear is rotatably inserted through the inner side of the open cylinder, the gear is elastically connected to the open cylinder, and toothed plates mesh parallel to each other on both sides of the gear. The two ends of the two toothed plates are respectively fixed to two movable rings located inside the same open cylinder.

[0021] Optionally, the limiting cross cylinder has an open end near the connecting side ring axis, and the multiple fixed-distance ropes are of equal length.

[0022] The method of using a spin coating apparatus for glass coating includes the following steps: S1. Place the wafer to be processed into the inside of the open cylinder located outside the spin coater. During placement, push the two limiting cylinders that are not connected by a spacer rope away from each other, so that the wafer disk is placed between multiple contact clamps between the two side rings. Then, the limiting cylinders return to the ring distribution under the action of the ring spring.

[0023] S2. The movable ring, in its elastic connection with the side ring, approaches the side ring. By pushing the push rod closer to the center of the limiting cross cylinder, the hinge rod rotates and pushes the contact clamping rods to clamp the outer ring surface of the wafer disk in a ring-shaped distribution.

[0024] S3. During the rotation of the open cylinder and the dividing cylinder, the three-headed pipe rack is sequentially connected to the swirling paint pipe, the return pipe and the hot gas pipe.

[0025] S4. When the three-head tube rack is connected to the coating tube, the coating is sprayed onto the wafer through the multi-purpose spray disc. When the three-head tube rack is connected to the return tube, the coating in the three-head tube rack and the multi-purpose spray disc is drawn back. Then, when the three-head tube rack is connected to the hot air pipe, hot air is sprayed onto the wafer through the multi-purpose spray disc to dry it.

[0026] S5. Then, as the cover ring continues to rotate, the sprayed paint is dried in layers in a timely manner to improve the spraying effect.

[0027] S6. While controlling the continuous rotation of the opening cylinder and the separator cylinder, new wafers can be placed into the outer opening cylinder during the internal wafer coating process, and different wafers can be continuously coated.

[0028] In summary, the present invention has the following beneficial technical effects: This invention, by setting up components such as a clamping mechanism, a connecting mechanism, and an annular cylinder mechanism, allows the coating supply mechanism, the power retraction mechanism, and the hot air supply mechanism to sequentially spray and dry the wafers through a multi-purpose spray plate while the annular cylinder mechanism rotates. When coating multiple wafers, coating does not need to be stopped when changing wafers, thus improving coating efficiency.

[0029] This invention improves coating and drying effects by using components such as a cover ring, a fixed inner plate, and a transfer cavity. As the cover ring drives the three-head tube frame to rotate, the three-head tube frame is sequentially connected to the coating tube and the hot air tube. When the three-head tube frame is connected to the coating tube, it is sprayed onto the wafer through a multi-purpose spray disc. Then, when the three-head tube frame is connected to the hot air tube, it is dried by spraying hot air onto the wafer through the multi-purpose spray disc.

[0030] This invention, by setting up components such as a return pipe and a return plate, allows the paint to be drawn back from the three-headed pipe and the multi-purpose spray plate after the three-headed pipe is disconnected from the swirl paint pipe. Before the three-headed pipe is connected to the hot air pipe, the paint in the multi-purpose spray plate and the three-headed pipe is drawn back, preventing the paint from adhering to and clogging inside the multi-purpose spray plate and the three-headed pipe when the hot air passes through them. Attached Figure Description

[0031] Figure 1 This is a schematic diagram of the overall structure in an embodiment of the present invention; Figure 2 This is a top view schematic diagram of some structures in an embodiment of the present invention; Figure 3 This is a schematic diagram of the internal structure of the spin coating box in an embodiment of the present invention; Figure 4 This is a schematic diagram of the connection between the three-head tube frame and the multi-purpose spray disc in an embodiment of the present invention; Figure 5 This is a schematic diagram of the connection between the unidirectional return pump and the return plate in an embodiment of the present invention; Figure 6 This is a side view schematic diagram of some structures in an embodiment of the present invention; Figure 7 This is a schematic diagram of the connection between the open cylinder and the partition cylinder in an embodiment of the present invention; Figure 8 This is a schematic diagram of the connection between the side ring and the movable ring in an embodiment of the present invention; Figure 9 This is a schematic diagram of the connection between the side ring and the slide in an embodiment of the present invention; Figure 10 This is a schematic diagram of the connection between the push rod and the hinge rod in an embodiment of the present invention.

[0032] Reference numerals: 1. Spin coating box; 2. Spin coating material supply mechanism; 21. Spin coating material supply pipe; 22. Spin coating disc; 23. Spin coating material pipe; 3. Hot air supply mechanism; 31. Hot air ring; 32. Hot air supply pipe; 33. Hot air pipe; 4. Power retraction mechanism; 41. Retraction disc; 42. One-way retraction pump; 43. Retraction pipe; 5. Annular cylinder frame mechanism; 51. Open cylinder; 511. Gear; 512. Tooth plate 52. Divider cylinder; 6. Clamping mechanism; 61. Side ring; 62. Movable ring; 63. Ring material mechanism; 631. Limiting cross cylinder; 632. Push rod; 633. Contact clamping rod; 634. Hinge rod; 64. Ring spring; 65. Slide plate; 66. Distance rope; 7. Connecting mechanism; 71. Cover ring; 72. Fixed inner plate; 73. Three-head tube frame; 8. Power mechanism; 9. Multi-purpose spray disc; 10. Transfer chamber. Detailed Implementation

[0033] The following is in conjunction with the appendix Figures 1-10 The present invention will be described in further detail below.

[0034] This invention discloses a spin-coating apparatus for glass coating. For example... Figures 1-10 As shown, the device includes a spin coating box 1. Inside the spin coating box 1, there is a spin coating material supply mechanism 2, a power retraction mechanism 4, and a hot air supply mechanism 3. The spin coating material supply mechanism 2 and the hot air supply mechanism 3 both penetrate the inner wall of the spin coating box 1. The power retraction mechanism 4 is connected to the spin coating material supply mechanism 2.

[0035] The spin coating supply mechanism 2 includes a spin coating supply pipe 21 and a spin coating disc 22. The spin coating supply pipe 21 penetrates the outer surface of the spin coating box 1. The outer end of the spin coating supply pipe 21 is connected to the spin coating supply equipment. The spin coating supply equipment fills the spin coating supply pipe 21 with coating. One end of the spin coating supply pipe 21 located inside the spin coating box 1 is connected to the spin coating disc 22. Multiple spin coating pipes 23 are connected to the outer ring surface of the spin coating disc 22. The number of spin coating pipes 23 is equal to one-third of the number of transfer chambers 10.

[0036] The power retraction mechanism 4 includes a retraction plate 41, a one-way retraction pump 42, and multiple retraction pipes 43. The two ends of the one-way retraction pump 42 are connected to the retraction plate 41 and the spin coating plate 22, respectively. The one-way retraction pump 42 retracts the corresponding coating into the spin coating plate 22 through the retraction plate 41 and the retraction pipes 43. The coating flows unidirectionally in the one-way retraction pump 42. The number of retraction pipes 43 is the same as the number of spin coating pipes 23.

[0037] The hot gas supply mechanism 3 includes a hot gas ring 31 and a hot gas supply pipe 32. One end of the hot gas supply pipe 32 penetrates the inner wall of the spin coating box 1. The other end of the hot gas supply pipe 32 located inside the spin coating box 1 is connected to the hot gas ring 31. Multiple hot gas pipes 33 are connected to the outer ring surface of the hot gas ring 31. The number of hot gas pipes 33 is equal to the number of spin coating pipes 23. The outer end of the hot gas supply pipe 32 is connected to the hot gas supply equipment. The hot gas supply equipment fills the hot gas supply pipe 32 with hot gas to dry the wafers inside the spin coating box 1.

[0038] A ring-shaped cylindrical frame mechanism 5 is installed through the upper surface of the spin coating box 1. Multiple clamping mechanisms 6 that can fix glass wafers are installed inside the ring-shaped cylindrical frame mechanism 5. Multi-purpose spray discs 9 are provided on both sides of the clamping mechanism 6. The multi-purpose spray discs 9 spray paint and hot air outward to coat and dry the wafers.

[0039] The annular cylinder frame mechanism 5 includes multiple open cylinders 51 and multiple partition cylinders 52. The outer ring of the open cylinder 51 is open. The multiple partition cylinders 52 and the multiple open cylinders 51 are alternately arranged. The two ends of the open cylinder 51 are respectively fixed to the adjacent partition cylinders 52. The clamping mechanism 6 and the multi-purpose spray plate 9 are located inside the open cylinder 51. When the open cylinder 51 moves to the outside of the spin coating box 1, the wafers on the corresponding inner side can be replaced through the opening of the open cylinder 51. The middle position of the partition cylinder 52 is solid. The wafers on the inner side of the open cylinder 51 are separated between two adjacent partition cylinders 52.

[0040] A connecting mechanism 7 is provided at the axis of the annular cylindrical frame mechanism 5. The connecting mechanism 7 consists of a fixed part and a rotating part. The rotating part of the connecting mechanism 7 passes through the inner ring surface of the annular cylindrical frame mechanism 5 and is connected to each multi-purpose spray disc 9. Multiple transfer chambers 10 are opened on the inner side of the fixed part of the connecting mechanism 7. The spin coating supply mechanism 2, the power retraction mechanism 4, and the hot air supply mechanism 3 are respectively connected to different transfer chambers 10. The connecting mechanism 7 is located at the position outside the spin coating box 1 of the annular cylindrical frame mechanism 5 without a transfer chamber 10, ensuring that the multi-purpose spray disc 9 of the annular cylindrical frame mechanism 5 rotates to the outside of the spin coating box 1 and is not connected to the transfer chamber 10.

[0041] The connecting mechanism 7 includes a cover ring 71 and a fixed inner plate 72. The fixed inner plate 72 is coaxially rotatably inserted into the inner side of the cover ring 71. Multiple open cylinders 51 and multiple partition cylinders 52 are arranged in a ring. The cover ring 71 is coaxially located in the ring structure formed by the open cylinders 51 and the partition cylinders 52. A three-head tube frame 73 is installed through the open cylinder 51 near the cover ring 71. The transfer cavity 10 is opened on the outer ring surface of the fixed inner plate 72. The thickness between two adjacent transfer cavities 10 is greater than the outer diameter of the three-head tube frame 73. When the cover ring 71 drives the three-head tube frame 73 to rotate, the three-head tube frame 73 will not communicate with the two adjacent transfer cavities 10. The three-head tube frame 73 has two openings at one end inside the open cylinder 51. The two opening ends of the three-head tube frame 73 inside the open cylinder 51 are respectively connected and installed with two multi-purpose spray discs 9. The three-head tube frame 73 has one end outside the open cylinder 51 that passes through the outer ring surface of the cover ring 71.

[0042] The swirling coating pipe 23 is connected to the corresponding transfer chamber 10 and installed. The return pipe 43 is connected to the corresponding transfer chamber 10 and installed. The hot air pipe 33 is connected to the corresponding transfer chamber 10 and installed. Multiple swirling coating pipes 23, multiple return pipes 43 and multiple hot air pipes 33 are connected to different transfer chambers 10 respectively. The swirling coating pipes 23, return pipes 43 and hot air pipes 33 are distributed in sequence.

[0043] As the cover ring 71 drives the three-headed pipe rack 73 to rotate, it sequentially connects with the transfer chambers 10 corresponding to the swirling paint pipe 23, the return pipe 43, and the hot gas pipe 33.

[0044] When the three-head tube rack 73 is connected to the coating tube 23, the coating is sprayed onto the wafer through the multi-purpose spray plate 9. When the three-head tube rack 73 is connected to the return tube 43, the coating in the three-head tube rack 73 and the multi-purpose spray plate 9 is drawn back, reducing the coating residue inside when hot air passes through, and effectively preventing the coating from accumulating in the three-head tube rack 73 and the multi-purpose spray plate 9. Then, when the three-head tube rack 73 is connected to the hot air pipe 33, hot air is sprayed onto the wafer through the multi-purpose spray plate 9 to dry it.

[0045] Multiple clamping mechanisms 6 are installed one-to-one inside multiple open cylinders 51.

[0046] The clamping mechanism 6 includes two side rings 61, two movable rings 62, and multiple ring mechanisms 63. The two side rings 61 are located between the two movable rings 62. The sides of the two side rings 61 that are far apart from each other are elastically connected to the ends of the two movable rings 62 that are close to each other. The side rings 61 are connected to the movable rings 62 by elastic telescopic rods, which have the tendency to pull the movable rings 62 closer to the side rings 61. The inner ring surfaces of the two side rings 61 are fixed to the outer ring surfaces of the two multi-purpose spray discs 9 located inside the same open cylinder 51.

[0047] A gear 511 is rotatably inserted through the inner side of the open cylinder 51. The gear 511 is elastically connected to the open cylinder 51, preferably by a torsion spring. Two toothed plates 512 mesh parallel to each other on both sides of the gear 511. The two ends of the two toothed plates 512 are respectively fixed to two movable rings 62 located inside the same open cylinder 51. The elastically connected gear 511, by meshing with the corresponding two toothed plates 512, has a tendency to pull the corresponding two movable rings 62 to move closer to each other synchronously, ensuring that the two movable rings 62 move synchronously.

[0048] The ring material mechanism 63 is located between two side rings 61. The sides of the two side rings 61 that are far apart from each other are open. A ring spring 64 is provided on the inner side of each side ring 61. A sliding plate 65 is fixed at both ends of the ring spring 64. The ring spring 64 has the tendency to push the two connected sliding plates 65 away from each other. The sliding plates 65 are slidably inserted into the inner side of the corresponding side ring 61. The two sliding plates 65 located on the inner side of the same side ring 61 are respectively fixed to the two adjacent ring material mechanisms 63. The two ends of the ring material mechanism 63 are slidably sleeved on the outer surface of the two side rings 61. The two sides of the ring material mechanism 63 are respectively in contact with the side of the two movable rings 62 that are close to each other. The ring material mechanism 63 remains horizontal when sliding on the surface of the side ring 61.

[0049] Each pair of adjacent ring material mechanisms 63 located within the large angle range of the two sliding discs 65 is connected by a fixed-distance rope 66. The fixed-distance rope 66 limits the distance between the two connected ring material mechanisms 63. The ring spring 64 drives the corresponding ring material mechanism 63 and the ring material mechanism 63 between them to be distributed in a ring at equal distances through the two connected sliding discs 65. When two ring material mechanisms 63 that are not connected by a fixed-distance rope 66 are moved away from each other, the wafer can be placed between the ring material mechanisms 63. Then, after releasing the ring material mechanism 63, multiple ring material mechanisms 63 are distributed in a ring around the wafer, providing uniform support around the wafer.

[0050] The ring material mechanism 63 includes a limiting cross cylinder 631 and two push rods 632. The two push rods 632 are slidably inserted into both ends of the limiting cross cylinder 631. A contact clamping rod 633 is provided on the side of the limiting cross cylinder 631 near the axis of the side ring 61. Two hinge rods 634 are hinged to the side of the contact clamping rod 633 near the limiting cross cylinder 631. The two hinge rods 634 are respectively hinged to one end of the two push rods 632. When the two push rods 632 on the inner side of the limiting cross cylinder 631 approach each other, the contact clamping rod is pushed by the hinge rods 634. 633 is away from the limiting horizontal cylinder 631. The wafer between multiple contact clamping rods 633 is coaxially limited with the side ring 61. The two push rods 632 are far apart at one end and respectively contact the two movable rings 62 on the side that are close to each other. The two ends of the limiting horizontal cylinder 631 are respectively slidably sleeved on the outside of the two side rings 61. The slide plate 65 is fixed to the corresponding limiting horizontal cylinder 631. The two ends of the fixed distance rope 66 are fixed to the corresponding limiting horizontal cylinder 631. When the two movable rings 62 are close to each other, they can push the corresponding push rod 632 to move inside the limiting horizontal cylinder 631.

[0051] The spin coating box 1 is equipped with a power mechanism 8 that controls the rotation of the annular cylinder frame mechanism 5. The cover ring 71 is connected to the power mechanism 8. The power mechanism 8 includes a motor and a shaft. The shaft is fixed to the output end of the motor, and the other end of the shaft is fixed to the cover ring 71. The motor is connected to the spin coating box 1, and the motor controls the rotation of the cover ring 71 through the shaft.

[0052] The limiting cross cylinder 631 is open at one end near the axis of the connected side ring 61. Multiple spacer ropes 66 are of equal length, so that after the ring spring 64 is fully extended, the distance between each two adjacent limiting cross cylinders 631 connected by the same side ring 61 is the same.

[0053] The method of using a spin coating apparatus for glass coating includes the following steps: S1. Place the wafer to be processed into the inner side of the open cylinder 51 located outside the spin coating box 1. During placement, push the two limiting cylinders 631 that are not connected by the spacer rope 66 away from each other, so that the wafer disk is placed between the multiple contact clamps 633 between the two side rings 61. Then, the limiting cylinders 631 return to the ring distribution under the action of the ring spring 64.

[0054] S2. The movable ring 62, in its elastic connection with the side ring 61, approaches the side ring 61, and pushes the push rod 632 to approach the center of the limiting cross cylinder 631. The hinge rod 634 rotates to push the contact clamping rods 633 to clamp the outer ring surface of the wafer disk in a ring distribution.

[0055] S3. As the open cylinder 51 and the dividing cylinder 52 rotate, the three-headed pipe rack 73 is sequentially connected to the swirling paint pipe 23, the return pipe 43 and the hot gas pipe 33.

[0056] S4. When the three-head tube frame 73 is connected to the coating tube 23, the coating is sprayed onto the wafer through the multi-purpose spray plate 9. When the three-head tube frame 73 is connected to the return tube 43, the coating in the three-head tube frame 73 and the multi-purpose spray plate 9 is drawn back. Then, when the three-head tube frame 73 is connected to the hot air tube 33, hot air is sprayed onto the wafer through the multi-purpose spray plate 9 to dry it.

[0057] S5. Then, as the cover ring 71 continues to rotate, the sprayed paint is dried in layers in a timely manner to improve the spraying effect.

[0058] S6. While controlling the opening cylinder 51 and the separator cylinder 52 to rotate continuously, new wafers can be placed into the outer opening cylinder 51 during the internal wafer coating process, and different wafers can be continuously coated.

[0059] The working principle is as follows: The wafer is placed into the inner side of the spin coating box 1 located on the outer side of the annular cylindrical frame mechanism 5. The wafer is fixed between the two corresponding multi-purpose spray discs 9 by the corresponding clamping mechanism 6. As the annular cylindrical frame mechanism 5 rotates, the spin coating supply mechanism 2, the power return mechanism 4, and the hot air supply mechanism 3 sequentially pass through the corresponding transfer cavity 10 to the connecting mechanism 7 and the multi-purpose spray disc 9 to spray and dry the wafer. When coating multiple wafers, it is not necessary to stop coating when changing wafers, thus improving coating efficiency.

[0060] The above are all preferred embodiments of the present invention and are not intended to limit the scope of protection of the present invention. Therefore, all equivalent changes made in accordance with the structure, shape and principle of the present invention should be covered within the scope of protection of the present invention.

Claims

1. A spin coating apparatus for glass coating, comprising a spin coating box (1), characterized in that: The spin coating box (1) is equipped with a spin coating material supply mechanism (2), a power retraction mechanism (4) and a hot air supply mechanism (3). The spin coating material supply mechanism (2) and the hot air supply mechanism (3) both penetrate the inner wall of the spin coating box (1). The power retraction mechanism (4) is connected to the spin coating material supply mechanism (2). A ring-shaped cylindrical frame mechanism (5) is installed through the upper surface of the spin coating box (1). Multiple clamping mechanisms (6) capable of fixing glass wafers are installed inside the ring-shaped cylindrical frame mechanism (5). Multi-purpose spray discs (9) are provided on both sides of the clamping mechanism (6). A connecting mechanism (7) is provided at the axis of the annular cylinder frame mechanism (5). The connecting mechanism (7) consists of a fixed part and a rotating part. The rotating part of the connecting mechanism (7) passes through the inner ring surface of the annular cylinder frame mechanism (5) and is connected to each multi-purpose spray plate (9). Multiple transmission chambers (10) are opened on the inner side of the fixed part of the connecting mechanism (7). The spin coating supply mechanism (2), the power return mechanism (4) and the hot air supply mechanism (3) are connected to different transmission chambers (10) respectively. The spin coating box (1) is equipped with a power mechanism (8) to control the rotation of the annular cylinder frame mechanism (5).

2. The spin coating apparatus for glass coating according to claim 1, characterized in that: The spin coating supply mechanism (2) includes a spin coating supply pipe (21) and a spin coating disc (22). The spin coating supply pipe (21) penetrates the outer surface of the spin coating box (1). One end of the spin coating supply pipe (21) is connected to the spin coating disc (22) on the inner side of the spin coating box (1). Multiple spin coating pipes (23) are connected to the outer ring surface of the spin coating disc (22). The number of spin coating pipes (23) is equal to one-third of the number of transfer chambers (10). The spin coating pipes (23) are connected to the corresponding transfer chambers (10). The power retraction mechanism (4) includes a retraction plate (41), a one-way retraction pump (42) and multiple retraction pipes (43). The two ends of the one-way retraction pump (42) are connected to the retraction plate (41) and the spin coating plate (22) respectively. The number of retraction pipes (43) is the same as that of the spin coating pipes (23). The retraction pipes (43) are connected to the corresponding transmission chambers (10). The hot gas supply mechanism (3) includes a hot gas ring (31) and a hot gas supply pipe (32). One end of the hot gas supply pipe (32) penetrates the inner wall of the spin coating box (1). The hot gas supply pipe (32) is located inside the spin coating box (1) and is connected to the hot gas ring (31). Multiple hot gas pipes (33) are connected to the outer ring surface of the hot gas ring (31). The number of hot gas pipes (33) is equal to the number of spin coating pipes (23). The hot gas pipes (33) are connected to the corresponding transfer chambers (10).

3. The spin coating apparatus for glass coating according to claim 2, characterized in that: Multiple swirling coating pipes (23), multiple retraction pipes (43), and multiple hot gas pipes (33) are connected to different transfer chambers (10), and the swirling coating pipes (23), retraction pipes (43), and hot gas pipes (33) are distributed in sequence.

4. A spin-coating apparatus for glass coating according to claim 1 or 3, characterized in that: The annular cylinder frame mechanism (5) includes multiple open cylinders (51) and multiple partition cylinders (52). The multiple partition cylinders (52) and multiple open cylinders (51) are alternately arranged. The two ends of the open cylinders (51) are respectively fixed to the adjacent partition cylinders (52). The clamping mechanism (6) and the multi-purpose spray plate (9) are located inside the open cylinders (51). The middle position of the separator cylinder (52) is solid, and multiple clamping mechanisms (6) are installed one-to-one inside the multiple open cylinders (51). The multiple open cylinders (51) and the multiple separator cylinders (52) are arranged in a ring, and the outer ring side of the open cylinders (51) is open.

5. A spin coating apparatus for glass coating according to claim 4, characterized in that: The clamping mechanism (6) includes two side rings (61), two movable rings (62) and multiple ring mechanisms (63). The two side rings (61) are located between the two movable rings (62). The sides of the two side rings (61) that are far apart from each other are elastically connected to the ends of the two movable rings (62) that are close to each other. The inner ring surfaces of the two side rings (61) are fixed to the outer ring surfaces of two multi-purpose spray discs (9) located inside the same open cylinder (51). The ring material mechanism (63) is located between two side rings (61). The two side rings (61) are open on the side away from each other. A ring spring (64) is provided on the inner side of each side ring (61). A sliding plate (65) is fixed at both ends of the ring spring (64). The sliding plate (65) is slidably inserted into the inner side of the corresponding side ring (61). The two sliding plates (65) located on the inner side of the same side ring (61) are fixed to the two adjacent ring material mechanisms (63). The two ends of the ring material mechanism (63) are slidably sleeved on the outer surface of the two side rings (61). The two sides of the ring material mechanism (63) are in contact with the side of the two movable rings (62) that are close to each other. Each pair of adjacent ring mechanisms (63) located within the large angle range of the two slides (65) are connected by a fixed-distance rope (66).

6. A spin coating apparatus for glass coating according to claim 4, characterized in that: The connecting mechanism (7) includes a cover ring (71) and a fixed inner plate (72). The fixed inner plate (72) is coaxially rotatably inserted into the inner side of the cover ring (71). The cover ring (71) is coaxially located in the annular structure formed by the opening cylinder (51) and the partition cylinder (52). The cover ring (71) is connected to the power mechanism (8). A three-head tube frame (73) is installed through the side of the opening cylinder (51) near the cover ring (71). The three-head tube frame (73) has two openings at one end inside the opening cylinder (51). The two opening ends of the three-head tube frame (73) inside the opening cylinder (51) are respectively connected and installed with two multi-purpose spray discs (9). The three-head tube frame (73) has one end outside the opening cylinder (51) penetrating the outer ring surface of the cover ring (71). The transfer cavity (10) is opened on the outer ring surface of the fixed inner plate (72), and the thickness between two adjacent transfer cavities (10) is greater than the outer diameter of the three-headed pipe rack (73).

7. A spin coating apparatus for glass coating according to claim 5, characterized in that: The ring material mechanism (63) includes a limiting horizontal cylinder (631) and two push rods (632). The two push rods (632) are slidably inserted into both ends of the limiting horizontal cylinder (631). A contact clamp rod (633) is provided on the side of the limiting horizontal cylinder (631) near the axis of the side ring (61). Two hinge rods (634) are hinged on the side of the contact clamp rod (633) near the limiting horizontal cylinder (631). The two hinge rods (634) are respectively hinged to the two push rods (632) at one end close to each other. The two push rods (632) at one end far from each other are respectively in contact with the two movable rings (62) at one end close to each other. The two ends of the limiting horizontal cylinder (631) are slidably sleeved on the outside of the two side rings (61). The slide (65) is fixed to the corresponding limiting cylinder (631), and the two ends of the distance rope (66) are fixed to the corresponding limiting cylinder (631).

8. A spin coating apparatus for glass coating according to claim 5, characterized in that: The gear (511) is rotatably passed through the inner side of the open cylinder (51). The gear (511) is elastically connected to the open cylinder (51). The gear (511) has toothed plates (512) meshing parallel on both sides. The two ends of the two toothed plates (512) are respectively fixed to two movable rings (62) located inside the same open cylinder (51).

9. A spin-coating apparatus for glass coating according to claim 7, characterized in that: The limiting cross tube (631) is open at one end near the axis of the connected side ring (61), and multiple fixed-distance ropes (66) are of equal length.

10. The method of using the spin coating apparatus for glass coating according to any one of claims 1-9, characterized in that: Includes the following steps: S1. Place the wafer to be processed into the inner side of the open cylinder (51) located outside the spin coating box (1). During placement, push the two limiting cylinders (631) that are not connected by the fixed distance rope (66) away from each other, so that the wafer disk is placed between the multiple contact clamps (633) between the two side rings (61). Then the limiting cylinders (631) return to the ring distribution under the action of the ring spring (64). S2. The movable ring (62) is elastically connected to the side ring (61) and approaches the side ring (61). By pushing the push rod (632) to approach the center of the limiting cross cylinder (631), the hinge rod (634) rotates and pushes the contact clamping rod (633) to clamp the outer ring surface of the wafer disk in a ring distribution. S3. During the rotation of the open tube (51) and the dividing tube (52), the three-headed tube rack (73) is sequentially connected to the swirling paint tube (23), the return tube (43) and the hot air tube (33); S4. When the three-head tube rack (73) is connected to the coating tube (23), the coating is sprayed onto the wafer through the multi-purpose spray plate (9). When the three-head tube rack (73) is connected to the return tube (43), the coating in the three-head tube rack (73) and the multi-purpose spray plate (9) is drawn back. Then, when the three-head tube rack (73) is connected to the hot air pipe (33), hot air is sprayed onto the wafer through the multi-purpose spray plate (9) to dry it. S5. Then, as the cover ring (71) continues to rotate, the sprayed paint is dried in layers in a timely manner to improve the spraying effect; S6. While the control opening cylinder (51) and the separator cylinder (52) are rotating continuously, new wafers can be placed into the outer opening cylinder (51) during the inner wafer coating process, and different wafers can be continuously coated.

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