Evaporation equipment
By combining the design of limiting components and detection components, the problem of accidental closure or tipping of the cavity cover of the vapor deposition equipment is solved, achieving both safety and compactness of the equipment, and reducing costs.
Patent Information
- Application Number
- CN202511336211.7
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2025-09-18
- Publication Date
- 2025-12-12
AI Technical Summary
The existing vapor deposition equipment has a risk of accidental closure or tipping when the chamber cover is open, and lacks effective emergency handling capabilities, which affects the safety and compactness of the equipment and increases costs.
The design employs a combination of limiting and detection components. The limiting component prevents the cover from closing when it is open and releases the limiting component when it is closed. The logic control of the driving and detection components enables the interlocking operation of the cover, thus avoiding accidental triggering.
It effectively prevents the cover from closing or tipping over accidentally, improving the safety and compactness of the equipment, reducing costs, and avoiding the risk of equipment damage and personal injury.
Smart Images
Figure CN121109960A_ABST
Abstract
Description
Technical Field
[0001] This invention relates to the field of thin film preparation technology, and in particular to a vapor deposition apparatus. Background Technology
[0002] With the continuous development of photovoltaic cell manufacturing technology, the application of vapor deposition equipment is becoming more and more widespread.
[0003] The safety and reliability of the cavity flap are crucial during the vapor deposition process.
[0004] Currently, some devices employ independent flipping mechanisms. This independent design not only increases the overall size of the device but also increases costs. Furthermore, due to the large size and weight of the cover, and the lack of effective limiting and fixing mechanisms in the flipping mechanism, there is a risk of accidental closure or tipping when the cover is open. In particular, the device lacks effective emergency handling capabilities in the event of a power outage or motor failure, which can easily lead to safety accidents. Summary of the Invention
[0005] The purpose of this invention is to provide a vapor deposition equipment that ensures the compactness of the vapor deposition equipment and reduces costs; at the same time, it avoids the problem of the cover accidentally closing or tipping over, and has effective emergency handling capabilities.
[0006] To achieve this objective, the present invention adopts the following technical solution:
[0007] A vapor deposition apparatus, comprising:
[0008] The main body has a cavity inside;
[0009] A cover having a first state of opening the chamber and a second state of closing the chamber, and the cover having a mounting position;
[0010] A driving component, which is connected to the cover body in a transmission manner, is used to drive the cover body to switch between the first state and the second state;
[0011] A limiting member, which can be placed or removed from the mounting position, is used to prevent the cover from closing when the cover is in the first state;
[0012] A detection element is disposed on the cover body, the detection element is used to detect the limiting element, and the detection element is signal-connected to the driving element;
[0013] When the limiting member is disengaged from the mounting position, the detection member transmits a signal to the driving member, so that the driving member drives the cover to switch from the second state to the first state; when the limiting member is placed in the mounting position, the detection member transmits a signal to the driving member, so that the driving member drives the cover to switch from the first state to the second state.
[0014] As an alternative to vapor deposition equipment, the cover has a first hole and the body has a second hole. When the cover is in the first state, the first hole and the second hole are opposite to each other, and the limiting member is inserted into the first hole and the second hole in sequence.
[0015] As an optional solution for vapor deposition equipment, the cover is provided with an abutment portion, and the body is provided with a second hole. When the cover is in the first state, the limiting member passes through the second hole and abuts against the abutment portion to restrict the cover from flipping.
[0016] As an alternative to vapor deposition equipment, the main body is detachably connected to a mounting base, the cover is hinged to the mounting base, and the second hole is provided in the mounting base.
[0017] As an alternative to vapor deposition equipment, the mounting position is a third hole on the surface of the cover, and the limiting member can pass through the third hole.
[0018] As an alternative to the vapor deposition equipment, the cover body has a connecting plate on the side wall away from the chamber, the third hole is opened in the connecting plate, the connecting plate is hinged to the mounting base, and the detection element is located on the connecting plate with the detection end close to the third hole.
[0019] As an alternative to the vapor deposition equipment, the two connecting plates are symmetrically distributed on both sides of the drive component.
[0020] As an alternative to the vapor deposition equipment, the connecting plate has a shielding part, which closes the second hole when the cover is in the second state.
[0021] As an alternative to the vapor deposition equipment, the connecting plate has a shielding part, and the cover also has a third state, which is an intermediate movement state of the cover during the switching process between the first state and the second state. When the cover is in the third state, the shielding part closes the second hole.
[0022] As an alternative to the vapor deposition equipment, the vapor deposition equipment further includes a frame, on which the drive unit and the body are both mounted. The vapor deposition equipment also includes a support, with the drive end of the drive unit and the cover respectively hinged at both ends of the support.
[0023] Beneficial effects:
[0024] In this invention, when the cover is in the first state of opening the chamber, the limiting member prevents the cover from closing the chamber, thus achieving stable fixation of the cover. The limiting member effectively prevents the cover from accidentally closing or tipping over after opening, improving safety. Furthermore, this vapor deposition equipment does not require a complex and independent flipping mechanism, ensuring the compactness of the equipment and reducing costs. Further, when the cover needs to be opened (i.e., the cover switches from the second state to the first state), the operator removes the limiting member from its mounting position. At this time, the detection component detects the absence of the upper limit limiting member at the mounting position and transmits a signal to the driving component, thereby activating the driving component and causing the cover to flip open. When the cover needs to be closed (i.e., the cover switches from the first state to the second state), the operator returns the limiting member to its mounting position. At this time, the detection component detects the presence of the upper limit limiting member at the mounting position, thereby activating the driving component and causing the cover to flip close. Since the limiting component is used to limit and fix the cover when it is opened, and also needs to be released when the cover is closed, the limiting component is used as the detection object of the detection component. The driving component acts according to the information of the detection component. By using the logic start control of the detection component and the driving component, the opening and closing process of the cover can be interlocked, avoiding the problem of equipment damage and personal injury caused by accidental activation of the start / stop switch of the driving component. Attached Figure Description
[0025] Figure 1 This is a schematic diagram of the vapor deposition equipment with the cover in the second state according to an embodiment of the present invention;
[0026] Figure 2 This is a partial structural diagram of the detection component placed in the mounting position according to an embodiment of the present invention;
[0027] Figure 3 This is a schematic diagram of the vapor deposition equipment with the cover in the first state according to an embodiment of the present invention;
[0028] Figure 4 This is a partial structural diagram of the connecting plate relative to the mounting base provided in an embodiment of the present invention;
[0029] Figure 5 This is a partial structural diagram of the cover body in the second state with the limiting member inserted in the second hole, according to an embodiment of the present invention;
[0030] Figure 6 This is a partial cross-sectional view of the cover in the second state, provided in an embodiment of the present invention, showing the limiting member inserted into the second hole.
[0031] In the picture:
[0032] 1. Body; 11. Second hole; 2. Cover; 21. Mounting position; 22. Abutting part; 3. Driving component; 4. Limiting component; 5. Detecting component; 6. Connecting plate; 61. Covering part; 7. Mounting base; 71. Rotating shaft; 72. Mounting plate; 8. Frame; 9. Bracket. Detailed Implementation
[0033] The present invention will now be described in further detail with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and not intended to limit it. Furthermore, it should be noted that, for ease of description, the accompanying drawings show only the parts relevant to the present invention, and not all of the structures.
[0034] In the description of this invention, unless otherwise explicitly specified and limited, the terms "connected," "linked," and "fixed" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this invention based on the specific circumstances.
[0035] In this invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.
[0036] In the description of this embodiment, the terms "upper," "lower," "right," etc., refer to the orientation or positional relationship shown in the accompanying drawings. They are used only for ease of description and simplification of operation, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the present invention. In addition, the terms "first" and "second" are used only for distinction in description and have no special meaning.
[0037] Please see the appendix Figure 1 - Appendix Figure 3This embodiment relates to a vapor deposition apparatus, which includes a body 1, a cover 2, a drive unit 3, a limiting member 4, and a detection member 5. The body 1 has a chamber; the cover 2 has a first state with the chamber open and a second state with the chamber closed, and a mounting position 21 is provided on the cover 2; the drive unit 3 is drively connected to the cover 2 and is used to drive the cover 2 to switch between the first and second states; the limiting member 4 can be placed or removed from the mounting position 21, and the limiting member 4 is used to prevent the cover 2 from closing when it is in the first state; the detection member 5 is disposed on the cover 2 and is used to detect the limiting member 4, and the detection member 5 is signal-connected to the drive unit 3; wherein, when the limiting member 4 is removed from the mounting position 21, the detection member 5 transmits a signal to the drive unit 3, causing the drive unit 3 to drive the cover 2 to switch from the second state to the first state; when the limiting member 4 is placed in the mounting position 21, the detection member 5 transmits a signal to the drive unit 3 to drive the cover 2 to switch from the first state to the second state.
[0038] Specifically, the main body 1 is the functional core of the substrate coating process in the vapor deposition equipment. The main body 1 is a box-type structure, made of 304L or higher grade stainless steel or aluminum alloy, possessing corrosion resistance, low gas release rate, and mechanical strength, ensuring a high vacuum level inside the chamber. The chamber needs to maintain a high vacuum (the ultimate vacuum level is typically better than 1×10⁻⁶). -7 Torr is used to reduce collision interference between gas molecules and evaporating particles, avoid impurity contamination, and ensure the purity and density of the film.
[0039] The main body 1 has an opening at the top, which can be opened or closed via the cover 2, thereby opening and closing the chamber. The cover 2 has a mounting position 21 on the outer wall of the chamber, which is used for the insertion and removal of the limiting member 4. The mounting position 21 has a limiting function, used to stably insert the limiting member 4. The mounting position 21 includes, but is not limited to, structures such as grooves, bosses, or holes with limiting functions. Typically, the mounting position 21 can be directly formed on the cover 2, or it can be indirectly formed on the cover 2 through other components.
[0040] The driving component 3 can be an electric cylinder or a drive motor. The driving end of the driving component 3 can output linear motion; for example, a linear motor or a linear electric cylinder can be used. Of course, the driving component 3 can also output rotational motion. The driving end of the driving component 3 can be directly connected to the cover 2, or it can drive the cover 2 through an intermediate transmission mechanism. Those skilled in the art will understand that as long as the cover 2 can be flipped to open or close the chamber, this embodiment does not specifically limit the existence of an intermediate transmission mechanism or its specific type.
[0041] In this embodiment, when the cover 2 is in the first state of opening the chamber, the limiting member 4 prevents the cover 2 from closing the chamber, thus achieving stable fixation of the cover 2. Under the action of the limiting member 4, the cover 2 is effectively prevented from accidentally closing or tipping over after being opened, improving safety. In addition, this vapor deposition equipment does not require a complex and independent flipping mechanism, which can ensure the compactness of the vapor deposition equipment and reduce costs. Furthermore, when it is necessary to open the cover 2, that is, when the cover 2 switches from the second state to the first state, the operator removes the limiting member 4 from the mounting position 21. At this time, the detection member 5 detects the absence of the upper limit member 4 at the mounting position 21 and transmits a signal to the driving member 3, thereby activating the driving member 3 and causing the cover 2 to flip open. When it is necessary to close the cover 2, that is, when the cover 2 switches from the first state to the second state, the operator returns the limiting member 4 to the mounting position 21. At this time, the detection member 5 detects the presence of the upper limit member 4 at the mounting position 21, thereby activating the driving member 3 and causing the cover 2 to flip close. Since the limiting component 4 is needed to limit and fix the cover 2 when it is opened, and also needs to be released when the cover 2 is closed, the limiting component 4 is used as the detection object of the detection component 5. The driving component 3 acts according to the information of the detection component 5. By using the logic start control of the detection component 5 and the driving component 3, the opening and closing of the cover 2 can be interlocked, avoiding the problem of equipment damage and personal injury caused by accidental human touch of the start / stop switch of the driving component 3.
[0042] In this embodiment, the detection element 5 can be a conventional position sensor or photoelectric switch. The detection element 5 is used to detect whether the limiting element 4 is located at the mounting position 21.
[0043] It is understood that the information flow transmission and control algorithm between the detection component 5 and the driving component 3 can refer to the existing technology, and the composition structure of the information flow transmission between the two can also refer to the existing technology. In this embodiment, it will not be elaborated.
[0044] In some embodiments, the cover 2 has a first hole and the body 1 has a second hole 11. When the cover 2 is in the first state, the first hole and the second hole 11 are opposite to each other, and the limiting member 4 is inserted into the first hole and the second hole 11 in sequence.
[0045] Specifically, a first hole is provided on the side of the cover 2 facing away from the chamber, and a second hole 11 is formed on one side wall of the main body 1, wherein both the first hole and the second hole 11 are circular holes. When the cover 2 is in the first state, it should be noted that the first state here should be the state in which the cover 2 is fully open to the chamber and stably fixed in this position. Any position of the cover 2 from the closed chamber to the fully open chamber should not be considered as the first state, and only in this first state are the first hole and the second hole 11 opposite each other. The limiting member 4 can be a cylindrical pin with a head. When the first hole and the second hole 11 are opposite each other, the limiting member 4 is inserted into the first hole and the second hole 11 in sequence.
[0046] It should be noted that both the first hole and the second hole 11 can be circular holes, with their inner diameters slightly larger than the outer diameter of the limiting member 4. The inner diameters of the first hole and the second hole 11 can be equal or close.
[0047] Please see the appendix Figure 4 In some embodiments, the cover 2 is provided with an abutment portion 22, and the body 1 is provided with a second hole 11. When the cover 2 is in the first state, the limiting member 4 passes through the second hole 11 and abuts against the abutment portion 22 to restrict the cover 2 from flipping.
[0048] Specifically, the cover 2 may be further provided with an abutment portion 22, on which a limiting groove with an arc-shaped surface is formed. When the cover 2 is in the first state, the limiting member 4 passes through the second hole 11 and abuts against the inner wall of the limiting groove, thereby restricting the movement of the cover 2 during the return stroke (i.e., the movement path along the direction of the closed chamber).
[0049] Whether the first hole or the abutment part 22 is provided, it can be easily matched with the limiting member 4. Furthermore, the limiting member 4 can be easily installed through the second hole 11, ensuring the convenience of operation for the operator.
[0050] Please see the appendix Figure 5 and attached Figure 6 Optionally, a mounting base 7 is detachably connected to the main body 1, the cover 2 is hinged to the mounting base 7, and the second hole 11 is provided in the mounting base 7.
[0051] Specifically, the mounting base 7 is a block-shaped base structure. The mounting base 7 is detachably connected to the main body 1, and the connection and fixation can be achieved by threaded fasteners. The mounting base 7 is set on the side wall of the main body 1, near the opening of the chamber. Part of the mounting base 7 extends out of the main body 1 to be hinged with the cover 2, while also providing sufficient clearance for the movement of the cover 2. The mounting base 7 includes two opposing mounting plates 72, and the second hole 11 passes through the two mounting plates 72. Part of the cover 2 is movably connected between the two mounting plates 72 and is hinged to the two mounting plates 72 through a pivot 71.
[0052] In this embodiment, since the cover 2 is directly rotatably connected to the body 1, neither the position of the rotatable connection nor the rotatable structure of the body 1 is convenient. In this embodiment, by setting the mounting base 7, the position of the rotatable connection between the cover 2 and the body 1 can be set more flexibly, and at the same time, the unnecessary structures formed on the body 1 can be reduced.
[0053] Please see the appendix Figure 3 Optionally, the mounting position 21 is a third hole provided on the surface of the cover 2, and the limiting member 4 can be inserted through the third hole.
[0054] Specifically, a connecting plate 6 is provided on the side wall of the cover 2 away from the chamber, and a third hole is formed in the connecting plate 6. The detection element 5 is located on the connecting plate 6 with its detection end close to the third hole. The connecting plate 6 is erected on the cover 2 and is hinged to the mounting base 7. The connecting plate 6 can be welded to the cover 2 or integrally formed and connected to the cover 2. The limiting element 4 is a cylindrical pin, forming a circular third hole on the connecting plate 6. That is, when the cover 2 is in the second state, the limiting element 4 is inserted into the third hole. When the limiting element 4 is pulled out of the third hole, the driving element 3 drives the cover 2 to open.
[0055] In this embodiment, the connecting plate 6 facilitates the installation of the mounting position 21, and also serves as a reinforcing rib to strengthen the cover 2. Furthermore, the connecting plate 6 is hinged to the mounting base 7, preventing the hinged portion from being located on the main body of the cover 2, thus avoiding any weakening of the cover 2's strength.
[0056] Optionally, the two connecting plates 6 are symmetrically distributed on both sides of the drive component 3.
[0057] In this embodiment, the two connecting plates 6 are hinged to the two corresponding mounting seats 7. By making the two connecting plates 6 symmetrically distributed on both sides of the driving member 3, the force on the cover 2 can be symmetrically distributed, ensuring the uniformity of the force on the cover 2 and preventing the cover 2 from tilting due to uneven force.
[0058] Please continue to refer to the appendix. Figure 4 Furthermore, the connecting plate 6 has a blocking part 61, which blocks the second hole 11 when the cover 2 is in the second state; and / or, the cover 2 also has a third state, which is an intermediate movement state of the cover 2 during the switching process from the first state to the second state, and the blocking part 61 blocks the second hole 11 when the cover 2 is in the third state.
[0059] Specifically, the tail section of the connecting plate 6 forms a shielding part 61, which can seal the second hole 11 when the cover 2 is closed. When the cover 2 is opened from closed, the limiting member 4 needs to be pulled out. At this time, the driving member 3 pushes the cover 2, and the cover 2 drives the connecting plate 6 to flip. During this process, regardless of whether the cover 2 is in the third state or the second state, the limiting member 4 should not be inserted into the second hole 11. The shielding part 61 seals the second hole 11, forming a foolproof design that effectively prevents human error from inserting the limiting member 4 into the second hole 11 and from damaging the equipment during the opening and closing process.
[0060] Please see the appendix Figure 1 and attached Figure 3 Optionally, the vapor deposition equipment also includes a frame 8, with the drive unit 3 and the body 1 both mounted on the frame 8. The vapor deposition equipment also includes a support 9, with the drive end of the drive unit 3 and the cover 2 respectively hinged at both ends of the support 9.
[0061] Specifically, the frame 8 is a frame structure, with the main body 1 located at the higher mounting position of the frame 8 and the drive component 3 located at the lower mounting position of the frame 8. The bracket 9 is a plate-shaped component, hinged to the drive end of the drive component 3. The bracket 9 has high support strength and tensile strength, and is used to transmit the driving force and displacement of the drive component 3 to the cover 2. Where strength permits, the bracket 9 can be a hollow structure.
[0062] The operating procedure for this vapor deposition equipment is as follows:
[0063] Specifically, when the cover 2 is currently closed, and it needs to be opened, the operator first pulls the limiting member 4 out of the third hole. At this time, the detection member 5 detects that the limiting member 4 is not in the third hole and transmits the information to the driving member 3. The driving end of the driving member 3 retracts to pull the cover 2 to flip. During the flipping process, the blocking part 61 of the connecting plate 6 always blocks the second hole 11. After the cover 2 is flipped into place, the first hole and the second hole 11 are opposite each other. The operator then inserts the limiting member 4 into the second hole 11 and the first hole in sequence to prevent the cover 2 from closing accidentally. When it is necessary to close the cover 2, the operator pulls the limiting member 4 out of the second hole 11 and reinserts it into the third hole. At this time, the detection member 5 detects that the limiting member 4 is in the third hole and transmits the information to the driving member 3. The driving end of the driving member 3 pushes out to drive the cover 2 to flip. After the cover 2 is flipped into place, the blocking part 61 of the connecting plate 6 always blocks the second hole 11.
[0064] Obviously, the above embodiments of the present invention are merely examples for clearly illustrating the present invention, and are not intended to limit the implementation of the present invention. Those skilled in the art will be able to make various obvious changes, readjustments, and substitutions without departing from the scope of protection of the present invention. It is neither necessary nor possible to exhaustively describe all embodiments here. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present invention should be included within the scope of protection of the claims of the present invention.
Claims
1. A vapor deposition apparatus, characterized in that, include: The main body (1) has a cavity inside; The cover (2) has a first state of opening the chamber and a second state of closing the chamber, and the cover (2) is provided with a mounting position (21). A driving component (3) is connected to the cover (2) for driving the cover (2) to switch between the first state and the second state; The limiting member (4) can be placed or removed from the mounting position (21), and the limiting member (4) is used to prevent the cover (2) from closing when the cover (2) is in the first state; A detection element (5) is provided on the cover (2), the detection element (5) is used to detect the limiting element (4), and the detection element (5) is signal connected to the driving element (3); When the limiting member (4) is disengaged from the mounting position (21), the detection member (5) transmits a signal to the driving member (3) so that the driving member (3) drives the cover (2) to switch from the second state to the first state; when the limiting member (4) is placed in the mounting position (21), the detection member (5) transmits a signal to the driving member (3) so that the driving member (3) drives the cover (2) to switch from the first state to the second state.
2. The vapor deposition equipment according to claim 1, characterized in that, The cover (2) has a first hole, and the body (1) has a second hole (11). When the cover (2) is in the first state, the first hole and the second hole (11) are opposite each other, and the limiting member (4) is inserted into the first hole and the second hole (11) in sequence.
3. The vapor deposition equipment according to claim 1, characterized in that, The cover (2) is provided with an abutment part (22), and the body (1) is provided with a second hole (11). When the cover (2) is in the first state, the limiting member (4) passes through the second hole (11) and abuts against the abutment part (22) to restrict the cover (2) from flipping.
4. The vapor deposition equipment according to claim 3, characterized in that, The main body (1) is detachably connected to a mounting base (7), the cover (2) is hinged to the mounting base (7), and the second hole (11) is provided on the mounting base (7).
5. The vapor deposition equipment according to claim 4, characterized in that, The mounting position (21) is a third hole provided on the surface of the cover (2), and the limiting member (4) can be inserted through the third hole.
6. The vapor deposition equipment according to claim 5, characterized in that, The cover (2) has a connecting plate (6) on the side wall away from the chamber. The third hole is opened on the connecting plate (6). The connecting plate (6) is hinged to the mounting base (7). The detection element (5) is located on the connecting plate (6) and the detection end is close to the third hole.
7. The vapor deposition equipment according to claim 6, characterized in that, The two connecting plates (6) are symmetrically distributed on both sides of the driving member (3).
8. The vapor deposition equipment according to claim 6, characterized in that, The connecting plate (6) has a shielding part (61), which closes the second hole (11) when the cover (2) is in the second state.
9. The vapor deposition equipment according to claim 6, characterized in that, The connecting plate (6) has a shielding part (61), and the cover (2) also has a third state. The third state is an intermediate movement state of the cover (2) during the switching process between the first state and the second state. When the cover (2) is in the third state, the shielding part (61) closes the second hole (11).
10. The vapor deposition equipment according to any one of claims 1-9, characterized in that, The vapor deposition equipment also includes a frame (8), the drive unit (3) and the body (1) are both located on the frame (8), and the vapor deposition equipment also includes a bracket (9), the two ends of the bracket (9) are respectively hinged to the drive end of the drive unit (3) and the cover (2).