A rotating cathode magnetic field uniformity guarantee device

Abstract

The present application relates to the field of vacuum coating equipment, and discloses a rotating cathode magnetic field uniformity guarantee device, which comprises a target cylinder, the target cylinder comprises an inner cavity, the inner cavity comprises a main cold water inlet, a magnetic bar is arranged in the inner cavity along an axial direction, a cold water pipe is arranged in the inner cavity along an axial direction, the cold water pipe comprises a water inlet and a water outlet, the water outlet is communicated with the main cold water inlet, a first spray pipe is arranged in the target cylinder, the first spray pipe is located on a side away from the main cold water inlet, the first spray pipe is communicated with the cold water pipe, a first spray opening is formed in the circumferential surface of the first spray pipe, and the flow area of the first spray opening is smaller than that of the water outlet.The present application has the beneficial effects that: the cold water enters the inner cavity from the main cold water inlet to cool the magnetic bar and the target cylinder, and the cold water is also sprayed into the side away from the main cold water inlet from the first spray opening through the first spray pipe, so that the temperature difference of the target cylinder along the axial direction can be effectively reduced.

Description

TECHNICAL FIELD

[0001] The present application relates to the field of vacuum coating equipment, in particular to a rotating cathode magnetic field uniformity guarantee device. BACKGROUND

[0002] Physical vapor deposition (PVD) has the advantages of large area, rapid and uniform film formation and is widely used in large size panel manufacturing field. Compared with planar cathode, rotating cathode can greatly improve the utilization rate of target material and reduce the target surface nodulation.

[0003] In order to uniformly deposit thin film on large area substrate and continuously and stably control, the target surface magnetic field distribution uniformity of long span rotating cathode must meet certain design requirements.

[0004] Under static state, the target surface magnetic field is mainly determined by the magnet configuration distribution in the cathode magnetic bar. However, in magnetron sputtering, the rotating target surface has complex collision effect and heat energy accumulation under the bombardment of a large number of high-energy positive ions, so that the cathode target body is quickly heated, and the heat energy is conducted to the magnet to increase the temperature of the magnet. Under the magnetic effect of magnet temperature rise, the magnetic field strength of long span target surface fluctuates, which is not conducive to the stability of large area uniform coating process. Therefore, the design of rotating cathode of magnetron sputtering needs to consider the cooling problem of target tube and magnetic bar, and a long span rotating cathode target surface uniformity guarantee device structure based on refrigerant heat exchange is designed, which has excellent disturbance and cooling performance, so that the target material cylinder and the magnetic bar are in a good environment temperature, and the target surface magnetic field uniformity guarantee purpose is achieved.

[0005] At present, the cooling water circulation pipeline structure of large long span rotating cathode in domestic industry still continues to use the traditional center single pipe one-way water inlet method used in the structure of short small span rotating cathode, that is, the water is inlet from the inner pipe space of one end of the stainless steel pipe to the other end, and then the water flow is outlet from the inner pipe and then back to the water along the outer ring surface of the steel pipe. The flow rate of cooling water 15 is relatively stable. Under this condition, there are mainly two problems: (1) under the structural characteristics of axial long span, the path of cooling water flowing in the cathode increases, so that the cooling effect of cooling water on the target surface and the magnetic bar appears obvious gradient stratification, the cooling effect of cooling water on the target cylinder gradually decreases along the water return direction, causing the temperature of the target surface and the magnetic bar to be uneven, and then affecting the target surface magnetic field uniformity (such as Figure 1 The temperature of the water return starting segment 803, the water return middle segment 802 and the water return end segment 801 rises in turn); (2) usually, the rotating direction of the cathode target cylinder remains the same for a certain period of time. If the traditional cooling water circulation pipeline is still used, the characteristics of this rotating motion cause the local temperature variation problem on the circumferential target surface along the rotation of the target cylinder, that is, taking the radial cross section of the magnetic yoke as the reference cross section 16, when the target cylinder rotates, the temperature of the target surface 13 close to the reference cross section gradually decreases, on the contrary, the local temperature of the target surface 14 far away from the reference cross section increases (such as Figure 2The target surface temperature unevenness affects the temperature change of the cathode magnet, and the temperature rise magnetic decay rate is also different. The above two cases will affect the fluctuation control guarantee problem of the long-span rotating cathode target surface magnetic field uniformity. SUMMARY

[0006] The present application aims to improve at least one technical problem in the background art.

[0007] The present application provides a rotating cathode magnetic field uniformity guarantee device, comprising:

[0008] A target cylinder, comprising an inner cavity, wherein the inner cavity comprises a main cold water inlet;

[0009] A magnetic rod arranged in the inner cavity in the axial direction;

[0010] A cold water pipe arranged in the inner cavity in the axial direction, wherein the cold water pipe comprises a water inlet and a water outlet, and the water outlet is in communication with the main cold water inlet;

[0011] A first nozzle arranged in the target cylinder, wherein the first nozzle is located away from the main cold water inlet, the first nozzle is in communication with the cold water pipe, the peripheral surface of the first nozzle is provided with a first nozzle opening, and the flow area of the first nozzle opening is smaller than that of the water outlet.

[0012] The present application has the following beneficial effects: the cold water enters the inner cavity from the main cold water inlet to cool the magnetic rod and the target cylinder, and the cold water is also sprayed from the first nozzle opening of the first nozzle to the side away from the main cold water inlet, which can effectively reduce the temperature difference of the target cylinder in the axial direction.

[0013] As some sub-solutions of the above technical solutions, the rotating cathode magnetic field uniformity guarantee device further comprises a first end cover and a second end cover, wherein the first end cover and the second end cover are respectively located at the two end portions of the target cylinder, the first end cover, the second end cover and the target cylinder jointly form the inner cavity, the water inlet is located adjacent to the first end cover, and the main cold water inlet is arranged on the second end cover; the cold water pipe penetrates through the first end cover in the axial direction of the target cylinder and passes through the second end cover and the main cold water inlet to be in communication with the inner cavity;

[0014] The first nozzle is located away from the second end cover, and the first nozzle is in communication with the cold water pipe through a joint assembly.

[0015] As some sub-solutions of the above technical solutions, the joint assembly comprises an elbow and a connecting pipe, one end of the elbow is communicated with the cold water pipe, the other end of the elbow is communicated with the connecting pipe, the other end of the connecting pipe is communicated with the first spray pipe, the first spray port is communicated with the inner cavity, the first spray port is deviated from the center of the target cylinder, the included angle between the direction of the first spray port and the extension direction of the connecting pipe is b, and the b is between 5° and 30°.

[0016] As some sub-solutions of the above technical solutions, the rotating cathode magnetic field uniformity guarantee device further comprises a first spoiler plate, the first spoiler plate is arranged in the inner cavity, and the first spoiler plate comprises a first spoiler surface, and a plurality of through holes are formed in the first spoiler surface.

[0017] As some sub-solutions of the above technical solutions, the rotating cathode magnetic field uniformity guarantee device further comprises a second spoiler plate, the second spoiler plate is arranged in the inner cavity, and the second spoiler plate comprises a second spoiler surface and a third spoiler surface, the second spoiler surface and the third spoiler surface are not parallel to each other, and a plurality of through holes are formed in the second spoiler surface and the third spoiler surface.

[0018] As some sub-solutions of the above technical solutions, the second spoiler surface is perpendicular to the axis direction of the target cylinder, and / or the third spoiler surface has an included angle a with the axis direction of the target cylinder.

[0019] As some sub-solutions of the above technical solutions, the rotating cathode magnetic field uniformity guarantee device further comprises a support member;

[0020] The support member is arranged in the inner cavity, and the inner cavity is divided into sub-zones under the partial blockage of the support member, and the sub-zones adjacent to the water inlet are sequentially a first sub-zone and a second sub-zone;

[0021] The first spray pipe and the first spoiler plate are located in the second sub-zone, and the middle part of the first spray pipe is fixedly connected with the support member.

[0022] As some sub-solutions of the above technical solutions, the rotating cathode magnetic field uniformity guarantee device further comprises two support members, the support members are arranged in the inner cavity in an axial direction, and the inner cavity is divided into sub-zones under the partial blockage of the support members, and the sub-zones adjacent to the water inlet are sequentially a first sub-zone, a second sub-zone and a third sub-zone;

[0023] The first spray pipe and the first spoiler plate are located in the second sub-zone, one end of the first spray pipe is fixedly connected with the support member, and the other end is fixedly connected with the other support member;

[0024] The rotating cathode magnetic field uniformity guarantee device further comprises a second nozzle, the second nozzle is communicated with the cold water pipe, the second nozzle is fixedly connected with the cold water pipe through a joint assembly, the second nozzle and the second spoiler are located in the third sub-area, one end of the second nozzle is fixedly connected with the first end cover, and the other end is fixedly connected with the support, the second nozzle comprises a second nozzle opening, and the second nozzle opening is communicated with the inner cavity.

[0025] As some sub-solutions of the above technical solutions, the number of the first nozzle openings of the first nozzle is several, and the width of the first nozzle opening increases or remains unchanged along the water inlet direction.

[0026] As some sub-solutions of the above technical solutions, the second spoiler comprises a first plate, a connecting rod and a second plate, the first plate, the connecting rod and the second plate are sequentially connected, the first plate is arranged to be inclined to the axis direction of the target cylinder, the third spoiler surface is arranged on the first plate, the second plate is L-shaped, the second plate comprises an inclined plate and a straight plate, the straight plate is connected with the connecting rod through the inclined plate, the inclined plate is arranged to be inclined to the axis direction of the target cylinder, the straight plate is perpendicular to the axis direction of the target cylinder, and the second spoiler surface is arranged on the straight plate. BRIEF DESCRIPTION OF DRAWINGS

[0027] The above and / or additional aspects and advantages of the present application will become apparent and more readily appreciated from the following description of the embodiments, taken in conjunction with the accompanying drawings in which:

[0028] Figure 1 BACKGROUND Figure 1 ;

[0029] Figure 2 BACKGROUND Figure 2 ;

[0030] Figure 3 STRUCTURE SCHEME OF THE ROTATING CATHODE MAGNETIC FIELD UNIFORMITY GUARANTEE DEVICE Figure 1 ;

[0031] Figure 4 IS Figure 3 A PARTIAL ENLARGED VIEW OF POSITION B IN FIG. 1;

[0032] Figure 5 IS Figure 3 A PARTIAL ENLARGED VIEW OF POSITION A IN FIG. 1;

[0033] Figure 6 STRUCTURE SCHEME OF THE ROTATING CATHODE MAGNETIC FIELD UNIFORMITY GUARANTEE DEVICE Figure 2 ;

[0034] Figure 7 IS AN ANGLE SCHEME OF THE FIRST NOZZLE OPENING OF THE FIRST NOZZLE.

[0035] In the drawings: 1 - target cylinder; 10 - inner cavity; 11 - first end cover; 12 - second end cover; 13 - approaching reference cross-section target surface; 14 - away reference cross-section target surface; 15 - cooling water; 16 - reference cross-section;

[0036] 2 - magnetic rod;

[0037] 3 - cold water pipe;

[0038] 4 - first nozzle; 41 - first nozzle outlet;

[0039] 51 - elbow; 52 - connecting pipe;

[0040] 61 - first spoiler; 611 - first spoiler surface; 62 - second spoiler; 621 - first plate; 6211 - third spoiler surface; 622 - connecting rod; 623 - second plate; 6231 - second spoiler surface;

[0041] 7 - support;

[0042] 8 - second nozzle;

[0043] 801 - water return end section; 802 - water return middle section; 803 - water return start section. DETAILED DESCRIPTION

[0044] Embodiments of the present application are described below in detail with reference to the accompanying drawings, in which like or similar elements or components are denoted throughout by like reference numerals, and the embodiments described below are examples only for explaining the present application, and should not be construed as limiting the present application.

[0045] The embodiments of the present application are described below in detail with reference to the accompanying drawings. Figures 1 to 7 The embodiments of the present application are described below in detail with reference to the accompanying drawings.

[0046] The embodiments of the present application are described below in detail with reference to the accompanying drawings.

[0047] The rotating cathode magnetic field uniformity guarantee device in the embodiments of the present application comprises:

[0048] The target cylinder 1 comprises an inner cavity 10, and the inner cavity 10 comprises a main cold water inlet;

[0049] The magnetic rod 2 is arranged in the inner cavity 10 in the axial direction;

[0050] The cold water pipe 3 is arranged in the inner cavity 10 in the axial direction, and the cold water pipe 3 comprises a water inlet and a water outlet, and the water outlet is communicated with the main cold water inlet.

[0051] A first nozzle 4 is arranged in the target cylinder 1, the first nozzle 4 is located away from the main cold water port, the first nozzle 4 is in communication with the cold water pipe 3, the peripheral surface of the first nozzle 4 is provided with a first nozzle port 41, and the flow area of the first nozzle port 41 is smaller than the flow area of the water outlet.

[0052] The cold water enters the inner cavity 10 from the main cold water port to cool the magnetic bar 2 and the target cylinder 1, and the cold water is also sprayed from the first nozzle port 41 of the first nozzle 4 to the side away from the main cold water port, which can effectively reduce the temperature difference of the target cylinder 1 along the axis direction.

[0053] The rotating cathode magnetic field uniformity protection device further comprises a first end cover 11 and a second end cover 12, the first end cover 11 and the second end cover 12 are respectively located at the two ends of the target cylinder 1, the first end cover 11, the second end cover 12 and the target cylinder 1 jointly form the inner cavity 10, the water inlet is located on the side adjacent to the first end cover 11, and the main cold water port is arranged on the second end cover 12; the cold water pipe 3 penetrates through the first end cover 11 along the axis direction of the target cylinder 1, passes through the second end cover 12 and is in communication with the inner cavity 10 through the main cold water port; the first nozzle 4 is located away from the second end cover 12, and the first nozzle 4 is in communication with the cold water pipe 3 through a joint assembly. The first end cover 11 and the second end cover 12 cooperate with the target cylinder 1 to form a closed inner cavity 10, the cold water pipe 3 penetrates through the first end cover 11 along the axis direction of the target cylinder 1 and passes through the second end cover 12, so that the cold water pipe 3 is stably installed, the joint assembly realizes reliable communication between the first nozzle 4 and the cold water pipe 3, and the uniformity of cooling is further improved.

[0054] The joint assembly comprises an elbow 51 and a connecting pipe 52, one end of the elbow 51 is in communication with the cold water pipe 3, the other end of the elbow 51 is in communication with the connecting pipe 52, the other end of the connecting pipe 52 is in communication with the first nozzle 4, the first nozzle port 41 is in communication with the inner cavity 10, the first nozzle port 41 is deviated from the center of the target cylinder 1, and the included angle between the direction of the first nozzle port 41 and the extension direction of the connecting pipe 52 is b, and the b is between 5° and 30°. The elbow 51 and the connecting pipe 52 cooperate to realize stable communication between the first nozzle 4 and the cold water pipe 3, the first nozzle port 41 is deviated from the center of the target cylinder 1 and forms an included angle of 5° to 30° with the extension direction of the connecting pipe 52, so that the cold water spraying is more targeted, which helps to further improve the temperature uniformity of the target cylinder 1. So as to ensure that there is enough water spraying kinetic energy to stir the circumferential cooling water 15 flow direction, and the purpose of flow disturbance is achieved.

[0055] The rotating cathode magnetic field uniformity guarantee device further comprises a first spoiler 61, the first spoiler 61 is arranged in the inner cavity 10, the first spoiler 61 comprises a first spoiler surface 611, and a plurality of through holes are formed in the first spoiler surface 611. The first spoiler 61 is arranged in the inner cavity 10, the plurality of through holes in the first spoiler surface 611 of the first spoiler 61 can disturb the water flow state, so that the cold water is more uniformly distributed in the inner cavity 10, and then the cooling effect on the magnetic bar 2 and the target cylinder 1 is improved, and the temperature unevenness is reduced.

[0056] Further, the first spoiler surface 611 of the first spoiler 61 and the axis direction of the target cylinder 1 form an included angle c, and in the embodiment, the included angle c can be 35° to 55°. The angle of the included angle c is between 35° and 55°, which is beneficial to enhance the stirring effect of water.

[0057] The rotating cathode magnetic field uniformity guarantee device further comprises a second spoiler 62, the second spoiler 62 is arranged in the inner cavity 10, the second spoiler 62 comprises a second spoiler surface 6231 and a third spoiler surface 6211, the second spoiler surface 6231 and the third spoiler surface 6211 are not parallel to each other, and a plurality of through holes are formed in the second spoiler surface 6231 and the third spoiler surface 6211. The second spoiler surface 6231 and the third spoiler surface 6211 of the second spoiler 62 are not parallel to each other, and a plurality of through holes are formed in the second spoiler surface 6231 and the third spoiler surface 6211, which can further optimize the flow state of water in the inner cavity 10, so that the cold water is more fully contacted with the magnetic bar 2 and the target cylinder 1, and the temperature difference is further reduced.

[0058] Further, the second spoiler surface 6231 is perpendicular to the axis direction of the target cylinder 1, and the third spoiler surface 6211 and the axis direction of the target cylinder 1 form an included angle a. The second spoiler surface 6231 is perpendicular to the axis direction of the target cylinder 1, which is more beneficial to form turbulent flow and accelerate the heat exchange efficiency of water. In the embodiment, the included angle a is 30°, and the included angle of the third spoiler surface 6211 is set to 30°, which is beneficial to improve the stirring effect of water and further improve the heat uniformity of the target cylinder 1.

[0059] The rotating cathode magnetic field uniformity guarantee device further comprises a support 7; the support 7 is arranged in the inner cavity 10, and the inner cavity 10 forms sub-zones under the partial blockage of the support 7, and the sub-zones adjacent to the water inlet are sequentially a first sub-zone and a second sub-zone; the first spray pipe 4 and the first spoiler 61 are located in the second sub-zone, and the middle part of the first spray pipe 4 is fixedly connected with the support 7. The support 7 forms the first sub-zone and the second sub-zone in the inner cavity 10, clearly divides the cooling region, simultaneously fixes the first spray pipe 4, guarantees the stable operation of the first spray pipe 4, and helps to improve the consistency of cooling. In the embodiment, the partial blockage formed by the support 7 means that the support 7 occupies the space for circulation in the inner cavity 10 but does not completely close the circulation channel. The support 7 supports the cold water pipe 3 of the target cylinder 1 and the target cylinder 1, and naturally forms the first sub-zone and the second sub-zone which are partially blocked in the target cylinder 1. The cooling of the first sub-zone is mainly realized by water inlet through the water inlet of the cold water pipe 3, and the temperature of the second sub-zone is relatively high under the blockage of the support 7 and the temperature rise of the cooling water 15. The first spray pipe 4 is arranged in the second sub-zone, water is sprayed to the side wall of the target cylinder 1 by means of the first spray pipe 4, and the consistency of the overall temperature of the target cylinder 1 is improved.

[0060] Further, the number of the first spray openings 41 of the first spray pipe 4 is several, and the width of the first spray openings 41 increases or remains unchanged along the water inlet direction. The several first spray openings 41 remain unchanged or gradually increase in width along the water inlet direction, so that the cold water injection amount is more reasonably distributed, and the temperature difference of the target cylinder 1 in the axial direction is further reduced.

[0061] In another embodiment, the rotating cathode magnetic field uniformity guarantee device further comprises two supports 7, the supports 7 are arranged in the inner cavity 10 in the axial direction, and the inner cavity 10 forms sub-zones under the partial blockage of the supports 7, and the sub-zones adjacent to the water inlet are sequentially a first sub-zone, a second sub-zone and a third sub-zone;

[0062] The first spray pipe 4 and the first spoiler 61 are located in the second sub-zone, one end of the first spray pipe 4 is fixedly connected with the support 7, and the other end is fixedly connected with the other support 7;

[0063] The rotating cathode magnetic field uniformity guarantee device further comprises a second nozzle 8 in communication with the cold water pipe 3, the second nozzle 8 is fixedly connected with the cold water pipe 3 through a joint assembly, the second nozzle 8 and the second spoiler 62 are located in the third sub-zone, one end of the second nozzle 8 is fixedly connected with the first end cover 11, and the other end is fixedly connected with the support 7, the second nozzle 8 comprises a second nozzle opening in communication with the inner cavity 10. The two supports 7 divide the inner cavity 10 into three sub-zones, the second nozzle 8 cooperates with the second spoiler 62 and the first nozzle 4 and the first spoiler plate 61 to expand the coverage of uniform cooling, so that different areas of the target cylinder 1 can obtain effective cooling, and the overall temperature uniformity is further improved. In addition, the first nozzle 4 and the second nozzle 8 are supported by the support 7 and the second end cover 12, so that the structure of the entire rotating cathode magnetic field uniformity guarantee device is compact and simple while improving the heat uniformity.

[0064] Further, the second spoiler 62 comprises a first plate 621, a connecting rod 622 and a second plate 623, the first plate 621, the connecting rod 622 and the second plate 623 are connected in sequence, the first plate 621 is arranged obliquely relative to the axis direction of the target cylinder 1, the third spoiler surface 6211 is arranged on the first plate 621, the second plate 623 is L-shaped, the second plate 623 comprises an inclined plate and a straight plate, the straight plate is connected with the connecting rod 622 through the inclined plate, the inclined plate is arranged obliquely relative to the axis direction of the target cylinder 1, the straight plate is perpendicular to the axis direction of the target cylinder 1, and the second spoiler surface 6231 is arranged on the straight plate. The combination structure of the first plate 621, the connecting rod 622 and the second plate 623 of the second spoiler 62 realizes reasonable arrangement of the first spoiler surface 611 and the third spoiler surface 6211, adapts to the space of the inner cavity 10, optimizes the water flow disturbance effect, and further improves the cooling uniformity. The angle between the plate surface of the inclined plate and the axis direction of the target cylinder 1 is 45°, and through holes are also arranged on the inclined plate and the straight plate. The through hole is arranged on the plate surface of the inclined plate at an angle of 45°, which can further improve the disturbance effect.

[0065] In the working process of the rotating cathode magnetic field uniformity guarantee device of the embodiment, the cooling water 15 enters the inner cavity 10 from the water outlet, and the cooling water 15 entering the main water outlet directly flows in the inner cavity 10 to cool the magnetic bar 2 and the target cylinder 1; part of the cooling water 15 in the cooling water pipe 3 is mixed into the water flow of the main water outlet through the water outlet, and the other part is sprayed to different areas of the inner cavity 10 through the first spray opening 41 of the first spray pipe 4 and the second spray opening of the second spray pipe 8; in cooperation with the disturbance effect of the first spoiler 61 and the second spoiler 62, and the inclined arrangement of the first spray opening 41 and the second spray opening, the cooling water 15 is more uniformly distributed in the inner cavity 10, effectively improving the temperature difference of the target cylinder 1 along the axis direction, and further improving the permanent magnet temperature rise and magnetic retreat, and improving the overall uniformity of the magnet and the uniformity of the target surface temperature.

[0066] The preferred embodiments of the present application are described above, but the present disclosure is not limited to the described embodiments, and those skilled in the art can make various equivalent modifications or replacements without departing from the spirit of the present application, and these equivalent modifications or replacements are all included in the scope defined by the claims of the present disclosure.

[0067] In the description of the present application, unless otherwise explicitly limited, the words such as arrangement, installation, connection and the like should be understood in a broad sense, and those skilled in the art can reasonably determine the specific meaning of the above words in the present application in combination with the specific content of the technical solutions.

Claims

1. A rotating cathode magnetic field uniformity protection device, characterized in that: include: The target cylinder (1) includes an inner cavity (10), and the inner cavity (10) includes a main cold water inlet; A magnetic rod (2) is arranged axially within the inner cavity (10); Cold water pipe (3), the cold water pipe (3) is arranged axially in the inner cavity (10), the cold water pipe (3) includes an inlet and an outlet, the outlet is connected to the main cold water inlet; The first nozzle (4) is disposed inside the target cylinder (1). The first nozzle (4) is located on the side away from the main cold water inlet. The first nozzle (4) is connected to the cold water pipe (3). The first nozzle (4) has a first nozzle (41) on its circumference. The flow area of ​​the first nozzle (41) is smaller than the flow area of ​​the outlet. The rotating cathode magnetic field uniformity protection device further includes a first end cap (11) and a second end cap (12). The first end cap (11) and the second end cap (12) are located at the two ends of the target cylinder (1), respectively. The first end cap (11), the second end cap (12) and the target cylinder (1) together form the inner cavity (10). The water inlet is located on the side adjacent to the first end cap (11). The main cold water inlet is opened on the second end cap (12). The cold water pipe (3) passes through the first end cap (11) along the axial direction of the target cylinder (1) and through the second end cap (12), and communicates with the inner cavity (10) through the main cold water inlet. The first nozzle (4) is located on the side away from the second end cap (12), and the first nozzle (4) is connected to the cold water pipe (3) through a connector assembly; The connector assembly includes an elbow (51) and a connecting pipe (52). One end of the elbow (51) is connected to the cold water pipe (3), and the other end of the elbow (51) is connected to the connecting pipe (52). The other end of the connecting pipe (52) is connected to the first nozzle (4). The first nozzle (41) is connected to the inner cavity (10). The first nozzle (41) is biased toward the center of the target cylinder (1). The angle between the direction of the first nozzle (41) and the extension direction of the connecting pipe (52) is b, and b is between 5° and 30°. The rotating cathode magnetic field uniformity protection device also includes a first baffle plate (61), which is disposed inside the inner cavity (10). The first baffle plate (61) includes a first baffle surface (611), and a plurality of through holes are provided on the first baffle surface (611). The rotating cathode magnetic field uniformity protection device also includes a second turbulence element (62), which is disposed within the inner cavity (10). The second turbulence element (62) includes a second turbulence surface (6231) and a third turbulence surface (6211). The second turbulence surface (6231) and the third turbulence surface (6211) are not parallel to each other, and both the second turbulence surface (6231) and the third turbulence surface (6211) are provided with several through holes.

2. The rotating cathode magnetic field uniformity protection device according to claim 1, characterized in that: The second turbulence surface (6231) is perpendicular to the axial direction of the target cylinder (1) and / or the third turbulence surface (6211) has an angle α with the axial direction of the target cylinder (1).

3. The rotating cathode magnetic field uniformity protection device according to claim 1, characterized in that: The rotating cathode magnetic field uniformity protection device also includes a support component (7). The support member (7) is disposed in the inner cavity (10), and the inner cavity (10) is divided into partitions under the partial obstruction of the support member (7). The partitions adjacent to the water inlet are sequentially the first partition and the second partition. The first nozzle (4) and the first spoiler (61) are both located in the second partition, and the middle part of the first nozzle (4) is fixedly connected to the support (7).

4. The rotating cathode magnetic field uniformity protection device according to claim 1, characterized in that: The rotating cathode magnetic field uniformity protection device also includes two support members (7), which are axially spaced within the inner cavity (10). The inner cavity (10) is divided into partitions by the partial obstruction of the support members (7), and the partitions adjacent to the water inlet are sequentially the first partition, the second partition, and the third partition. The first nozzle (4) and the first spoiler (61) are both located in the second partition. One end of the first nozzle (4) is fixedly connected to the support member (7), and the other end is fixedly connected to another support member (7). The rotating cathode magnetic field uniformity protection device also includes a second nozzle (8), which is connected to the cold water pipe (3). The second nozzle (8) is fixed to the cold water pipe (3) through a connector assembly. The second nozzle (8) and the second baffle (62) are both located in the third partition. One end of the second nozzle (8) is fixed to the first end cap (11), and the other end is fixed to the support member (7). The second nozzle (8) includes a second nozzle, which is connected to the inner cavity (10).

5. The rotating cathode magnetic field uniformity protection device according to claim 1, characterized in that: The first nozzle (4) has several first nozzles (41), and the width of the first nozzle (41) increases or remains unchanged along the water inlet direction.

6. The rotating cathode magnetic field uniformity protection device according to claim 1, characterized in that: The second baffle (62) includes a first plate (621), a connecting rod (622), and a second plate (623). The first plate (621), the connecting rod (622), and the second plate (623) are connected in sequence. The first plate (621) is inclined relative to the axial direction of the target cylinder (1). The third baffle surface (6211) is disposed on the first plate (621). The second plate (623) is L-shaped. The second plate (623) includes an inclined plate and a straight plate. The straight plate is connected to the connecting rod (622) through the inclined plate. The inclined plate is inclined relative to the axial direction of the target cylinder (1). The straight plate is perpendicular to the axial direction of the target cylinder (1). The second baffle surface (6231) is disposed on the straight plate.

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