Vacuum cavity

Abstract

The invention relates to a vacuum cavity. The vacuum cavity comprises a cavity body and a cavity cover, the cavity cover covers the cavity body, the vacuum cavity further comprises at least one first vacuum breaking mechanism and / or at least one second vacuum breaking mechanism, the first vacuum breaking mechanism is arranged on the cavity cover and communicated with a first air inlet in the cavity cover, and the second vacuum breaking mechanism is arranged on the cavity cover and communicated with a second air inlet in the cavity cover. The first vacuum breaking mechanism comprises a first air inlet plate and a second air inlet plate, a plurality of first air inlet holes formed in the first air inlet plate at intervals and a plurality of second air inlet holes formed in the second air inlet plate at intervals are distributed in a staggered mode in the horizontal direction, and the second vacuum breaking mechanism is arranged on the inner side of the bottom wall of the cavity body. The second vacuum breaking mechanism is communicated with a second air inlet in the cavity body, the second vacuum breaking mechanism comprises a third air inlet plate and a fourth air inlet plate, and a plurality of third air inlet holes formed in the third air inlet plate at intervals and a plurality of fourth air inlet holes formed in the fourth air inlet plate at intervals are arranged in a staggered mode in the horizontal direction, so that impact on the vacuum cavity is reduced.

Description

[0001] The application is a divisional application of the original application with the application number 2024102657609 and the filing date of March 8, 2024, and the invention name of "Vacuum cavity". TECHNICAL FIELD

[0002] The application relates to the technical field of vacuum coating, in particular to a vacuum cavity. BACKGROUND

[0003] When the vacuum coating equipment is used to coat the products such as silicon wafers and glass substrates in the cavity, the cavity needs to provide a vacuum environment for the products. In the prior art, the products to be coated need to be transferred into and out of the cavity through the loading cavity and the unloading cavity. Therefore, the loading cavity and the unloading cavity need to be cyclically converted between the vacuum environment and the standard atmospheric environment, so that the products to be coated can be transferred into the loading cavity and out of the unloading cavity. Specifically, before the products to be coated enter the vacuum coating equipment, the loading cavity needs to be broken to vacuum to convert the vacuum environment in the loading cavity into a standard atmospheric environment, so as to facilitate the delivery of the products to be coated into the loading cavity. Then, the loading cavity needs to be vacuumized, and the products to be coated are transferred to the process cavity for coating process. In addition, when the products complete the coating process and are transferred out of the vacuum coating equipment through the unloading cavity, the unloading cavity needs to be broken to vacuum to convert the vacuum environment in the unloading cavity into a standard atmospheric environment, so as to facilitate the delivery of the products out of the cavity. Then, the unloading cavity needs to be vacuumized, and the process is repeated to realize continuous production. However, when the cavity is broken to vacuum by the vacuum breaking mechanism, the loading cavity and the unloading cavity are very sensitive to the flow of air flow in the vacuum environment. If the flow rate or impact force of the air flow is large, the internal dust is easily raised, which pollutes the products and the carrier plate carrying the products. Especially when the unloading cavity is broken to vacuum, the air flow directly contacts the surface of the carrier plate and the products, which easily causes air hole marks on the surface of the products or even causes product fragments, affecting the production quality.

[0004] With the development of technology, there is a shunt component in the prior art to shunt the incoming air flow. However, multiple shunt channels need to be provided on the shunt component, which makes the structure of the shunt component relatively complex and greatly increases the difficulty of processing and production.

[0005] Therefore, there is an urgent need for a vacuum cavity to solve the above-mentioned vacuum breaking problem. SUMMARY

[0006] The purpose of the present application is to provide a vacuum cavity which can reduce the flow rate of air flow and the impact of air flow on the inside of the vacuum cavity when broken to vacuum, and has a simple structure and is convenient for processing and production.

[0007] To achieve this purpose, the application adopts the following technical solutions:

[0008] A vacuum cavity, comprising:

[0009] Cavity body;

[0010] A cavity cover is provided on the cavity body, and a first air inlet is provided on the cavity cover;

[0011] At least one first vacuum breaking mechanism is disposed on the cavity cover. The first vacuum breaking mechanism is connected to the first air inlet. The first vacuum breaking mechanism includes a first air inlet plate and a second air inlet plate. The first air inlet plate is provided with a plurality of first air inlets spaced apart. The second air inlet plate is provided with a plurality of second air inlets spaced apart. The plurality of second air inlets and the plurality of first air inlets are arranged in a staggered manner along the horizontal direction.

[0012] And / or,

[0013] The cavity body is provided with a second air inlet. The vacuum cavity also includes at least one second vacuum breaking mechanism. The second vacuum breaking mechanism is disposed on the inner side of the bottom wall of the cavity body and is connected to the second air inlet. The second vacuum breaking mechanism includes a third air inlet plate and a fourth air inlet plate. The third air inlet plate is provided with a plurality of third air inlets spaced apart, and the fourth air inlet plate is provided with a plurality of fourth air inlets spaced apart. The plurality of third air inlets and the plurality of fourth air inlets are staggered along the horizontal direction.

[0014] As an optional solution, the first vacuum breaking mechanism further includes:

[0015] A first mounting plate is disposed on the cavity cover. The first air intake plate and the second air intake plate are both connected to the first mounting plate. The first air intake plate, the first mounting plate, and the cavity cover together form a first air intake space. The first air intake plate, the second air intake plate, and the first mounting plate together form a second air intake space. The first air intake port, the first air intake space, and the second air intake space are sequentially connected.

[0016] As an optional solution, the second vacuum breaking mechanism further includes:

[0017] The second mounting plate is disposed on the bottom wall. The third air intake plate and the fourth air intake plate are both connected to the second mounting plate. The third air intake plate, the second mounting plate, and the bottom wall together form a third air intake space. The third air intake plate, the fourth air intake plate, and the second mounting plate together form a fourth air intake space. The second air intake, the third air intake space, and the fourth air intake space are sequentially connected.

[0018] As an optional solution, the second vacuum breaking mechanism further includes a second mounting plate, an air intake channel, and a vacuum breaking back plate. One end of the air intake channel is connected to the second air inlet, and the other end is connected to the vacuum breaking back plate. The third air intake plate, the fourth air intake plate, and the vacuum breaking back plate are all connected to the second mounting plate. The third air intake plate, the second mounting plate, and the vacuum breaking back plate together form a third air intake space. The third air intake plate, the fourth air intake plate, and the second mounting plate together form a fourth air intake space. The second air inlet, the air intake channel, the third air intake space, and the fourth air intake space are sequentially connected.

[0019] As an optional solution, an air extraction port is provided on the bottom wall, and the vacuum cavity includes a plurality of second vacuum breaking mechanisms arranged at intervals. An air extraction channel is formed between two adjacent second vacuum breaking mechanisms, and the air extraction channel is connected to the air extraction port.

[0020] As an optional embodiment, the vacuum chamber includes four second vacuum breaking mechanisms arranged at intervals, and a cross-shaped air extraction channel is formed between the four second vacuum breaking mechanisms. A flow channel communicating with the air extraction channel is formed between the outer peripheral wall of the second vacuum breaking mechanism and the side wall of the chamber body. The central intersection area of ​​the air extraction channel is directly opposite the air extraction port located at the center of the bottom wall.

[0021] As an optional solution, the height of the cross-shaped air extraction channel is 30mm to 200mm.

[0022] As an optional solution, the first vacuum breaking mechanism further includes a first locking connector, which is configured to detachably connect the first air intake plate and the second air intake plate to the first mounting plate.

[0023] As an optional solution, the first mounting plate and the second air intake plate are integrally formed parts.

[0024] As an optional feature, the second vacuum breaking mechanism further includes a second locking connector configured to detachably connect the third air intake plate and the fourth air intake plate to the second mounting plate.

[0025] As an optional solution, the second mounting plate and the fourth air intake plate are integrally formed.

[0026] As an optional solution, the first vacuum breaking mechanism further includes a first support connector, which is supported and connected between the first air intake plate and the second air intake plate;

[0027] And / or,

[0028] The second vacuum breaking mechanism also includes a second support connector, which is supported and connected between the third air intake plate and the fourth air intake plate.

[0029] As an optional feature, the first and third air inlets are straight holes or flared holes; the second and fourth air inlets are straight holes or flared holes.

[0030] As an optional solution, the first and third air inlets are round holes, while the second and fourth air inlets are elongated holes.

[0031] As an optional solution, the number of the first vacuum breaking mechanism is one, and the number of the second vacuum breaking mechanism is four.

[0032] As an optional solution, the number of the first vacuum breaking mechanism is four, and the number of the second vacuum breaking mechanism is four.

[0033] The beneficial effects of this invention are:

[0034] This invention provides a vacuum chamber, which includes a chamber body and a chamber cover. The chamber cover is disposed on the chamber body. The vacuum chamber also includes at least one first vacuum breaking mechanism and / or at least one second vacuum breaking mechanism. The first vacuum breaking mechanism is disposed on the chamber cover and communicates with a first air inlet on the chamber cover. The first vacuum breaking mechanism includes a first air inlet plate and a second air inlet plate. A plurality of first air inlets spaced apart on the first air inlet plate and a plurality of second air inlets spaced apart on the second air inlet plate are arranged in a staggered manner in the horizontal direction. The second vacuum breaking mechanism is disposed on the inner side of the bottom wall of the chamber body and communicates with a second air inlet on the chamber body. The second vacuum breaking mechanism includes a third air inlet plate and a fourth air inlet plate. A plurality of third air inlets spaced apart on the third air inlet plate and a plurality of fourth air inlets spaced apart on the fourth air inlet plate are arranged in a staggered manner in the horizontal direction.

[0035] The vacuum chamber provided by this invention, when the vacuum chamber is ruptured by the first vacuum-breaking mechanism, the airflow exiting through the first air inlets on the first air inlet plate is blocked by the second air inlet plate and then enters the chamber body through the second air inlets on the second air inlet plate. This forces the airflow to undergo lateral deflection, effectively reducing the airflow velocity and the impact of the airflow on the vacuum chamber interior, thereby reducing the impact of the upper airflow on the carrier plate and product inside the vacuum chamber and ensuring production quality. When the vacuum chamber is ruptured by the second vacuum-breaking mechanism, the airflow exiting through the third air inlets on the third air inlet plate is blocked by the fourth air inlet plate and then enters the chamber body through the fourth air inlets on the fourth air inlet plate. This forces the airflow to undergo lateral deflection, effectively reducing the airflow velocity and the impact of the airflow on the vacuum chamber interior, thereby reducing the impact of the lower airflow on the carrier plate and product inside the vacuum chamber and ensuring production quality. Furthermore, the above-mentioned vacuum-breaking mechanism only requires that the air inlets on the two air inlet plates be staggered in the horizontal direction, making the structure simple and easy to process and manufacture. Attached Figure Description

[0036] Figure 1 This is a structural cross-sectional view of the vacuum cavity provided in Embodiment 1 of the present invention;

[0037] Figure 2 This is a bottom view of the first vacuum breaking mechanism provided in Embodiment 1 of the present invention;

[0038] Figure 3 This is a structural cross-sectional view of the first vacuum breaking mechanism provided in Embodiment 1 of the present invention;

[0039] Figure 4 This is an exploded view of the first vacuum breaking mechanism provided in Embodiment 1 of the present invention;

[0040] Figure 5 This is a structural cross-sectional view of the second vacuum breaking mechanism provided in Embodiment 1 of the present invention;

[0041] Figure 6 This is a top view of the cavity body provided in Embodiment 1 of the present invention;

[0042] Figure 7 This is a bottom view of the cavity cover provided in Embodiment 1 of the present invention;

[0043] Figure 8 This is a structural cross-sectional view of the vacuum cavity provided in Embodiment 2 of the present invention;

[0044] Figure 9 This is a structural cross-sectional view of a vacuum cavity, another modified example provided in Embodiment 2 of the present invention;

[0045] Figure 10This is a structural cross-sectional view of the second vacuum breaking mechanism provided in Embodiment 2 of the present invention;

[0046] Figure 11 This is a structural cross-sectional view of the first vacuum breaking mechanism provided in Embodiment 3 of the present invention;

[0047] Figure 12 This is a structural cross-sectional view of the second vacuum breaking mechanism provided in Embodiment 3 of the present invention.

[0048] In the picture:

[0049] 1. Cavity body; 11. Air extraction port; 12. Air extraction channel; 13. Bottom wall; 14. Side wall; 15. Second air inlet;

[0050] 2. Cavity cover; 21. First air inlet;

[0051] 3. First vacuum breaking mechanism; 31. First air inlet plate; 311. First air inlet hole; 32. Second air inlet plate; 321. Second air inlet hole; 33. First mounting plate; 34. First locking connector; 35. First support connector; 36. First air inlet space; 37. Second air inlet space;

[0052] 4. Second vacuum breaking mechanism; 41. Third air intake plate; 411. Third air intake hole; 42. Fourth air intake plate; 421. Fourth air intake hole; 43. Second mounting plate; 44. Air intake channel; 45. Vacuum breaking back plate; 46. Third air intake space; 47. Fourth air intake space; 48. Second locking connector; 49. Second support connector;

[0053] 5. Air extraction mechanism. Detailed Implementation

[0054] To make the technical problems solved by the present invention, the technical solutions adopted, and the technical effects achieved clearer, the technical solutions of the present invention will be further described below in conjunction with the accompanying drawings and specific embodiments.

[0055] In the description of this invention, unless otherwise explicitly specified and limited, the terms "connected," "linked," and "fixed" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this invention based on the specific circumstances.

[0056] In this invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0057] In the description of this embodiment, the terms "upper," "lower," "left," and "right," etc., refer to the orientation or positional relationship shown in the accompanying drawings. They are used only for ease of description and simplification of operation, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the present invention. In addition, the terms "first" and "second" are used only for distinction in description and have no special meaning.

[0058] Example 1

[0059] When vacuum coating equipment coats silicon wafers, glass substrates, and other products within its chamber, the chamber needs to provide a vacuum environment. After coating, the vacuum in the chamber needs to be broken to convert the vacuum environment into a standard atmospheric environment, facilitating the removal of the coated product and the introduction of the next product for continuous production. In existing technologies, when the vacuum is broken, the carrier plate and the product it carries are highly sensitive to airflow. High airflow velocity or impact force can easily cause porosity or even product fragmentation on the surface of the carrier plate and product, affecting production quality. With technological advancements, existing technologies incorporate flow dividers to divert the incoming airflow. However, these flow dividers require multiple diversion channels, making their structure complex and significantly increasing the difficulty of manufacturing.

[0060] To solve the above problems, such as Figures 1-5As shown, this embodiment provides a vacuum chamber, which can be used as a loading or unloading chamber. The vacuum chamber includes a chamber body 1, a chamber cover 2, at least one first vacuum breaking mechanism 3, and at least one second vacuum breaking mechanism 4. The chamber cover 2 is disposed on the chamber body 1 and has a first air inlet 21. The first vacuum breaking mechanism 3 is disposed on the chamber cover 2 and communicates with the first air inlet 21. The first vacuum breaking mechanism 3 includes a first air inlet plate 31 and a second air inlet plate 32. The first air inlet plate 31 has multiple first air inlet holes 311 spaced apart, and the second air inlet plate 32 has multiple second air inlet holes 321 spaced apart. The hole 321 and multiple first air inlets 311 are staggered in the horizontal direction. The cavity body 1 is provided with a second air inlet 15. The second vacuum breaking mechanism 4 is provided on the inner side of the bottom wall 13 of the cavity body 1. The second vacuum breaking mechanism 4 is connected to the second air inlet 15. The second vacuum breaking mechanism 4 includes a third air inlet plate 41 and a fourth air inlet plate 42. Multiple third air inlets 411 are spaced apart on the third air inlet plate 41, and multiple fourth air inlets 421 are spaced apart on the fourth air inlet plate 42. The multiple third air inlets 411 and multiple fourth air inlets 421 are staggered in the horizontal direction.

[0061] In this embodiment, when the vacuum chamber is ruptured by the first vacuum breaking mechanism 3, the airflow enters the first vacuum breaking mechanism 3 through the first air inlet 21 on the chamber cover 2. In the first vacuum breaking mechanism 3, the airflow first passes through the first air inlet holes 311 on the first air inlet plate 31. The airflow coming out of the first air inlet holes 311 is blocked by the second air inlet plate 32 and then enters the chamber body 1 through the second air inlet holes 321 on the second air inlet plate 32. The above process forces the airflow to deflect laterally, effectively reducing the airflow velocity and the impact of the airflow on the inside of the vacuum chamber, thereby reducing the impact of the upper airflow on the carrier plate and product inside the vacuum chamber and ensuring production quality. When the vacuum chamber is broken by the second vacuum breaking mechanism 4, the airflow enters the second vacuum breaking mechanism 4 through the second air inlet 15 on the chamber body 1. Inside the second vacuum breaking mechanism 4, the airflow first passes through the third air inlet holes 411 on the third air inlet plate 41. The airflow exiting from the third air inlet holes 411 is blocked by the fourth air inlet plate 42 and then enters the chamber body 1 through the fourth air inlet holes 421 on the fourth air inlet plate 42. This process forces the airflow to deflect laterally, effectively reducing the airflow velocity and the impact of the airflow on the inside of the vacuum chamber, thereby reducing the impact of the airflow below on the carrier plate and product inside the vacuum chamber and ensuring production quality. Furthermore, the structural design of the first vacuum breaking mechanism 3 and the second vacuum breaking mechanism 4 only requires ensuring that the air inlets on the two air inlet plates of the first vacuum breaking mechanism 3 and the two air inlet plates of the second vacuum breaking mechanism 4 are staggered horizontally, resulting in a simple structure and facilitating processing and production.

[0062] It should be noted that in this embodiment, a second air inlet 15 is provided on the bottom wall 13 of the cavity body 1, and the first vacuum breaking mechanism 3 and the second vacuum breaking mechanism 4 are arranged at intervals along the vertical direction. The first vacuum breaking mechanism 3 and the second vacuum breaking mechanism 4 perform vacuum breaking operations from the top and bottom of the vacuum cavity, respectively, effectively improving the vacuum breaking efficiency of the vacuum cavity. It should be noted that in other embodiments, the first vacuum breaking mechanism 3 can be provided only on the cavity cover 2 to perform vacuum breaking operations, or the second vacuum breaking mechanism 4 can be provided only on the inner side of the bottom wall 13 to perform vacuum breaking operations. In addition, it should be noted that after the vacuum breaking operation of the vacuum cavity is completed, when it is necessary to change the atmospheric environment inside the vacuum cavity to a vacuum environment, the air inlet valve connected to the first air inlet 21 and the second air inlet 15 can be closed.

[0063] Specifically, in this embodiment, the first air intake plate 31 and the second air intake plate 32 are arranged at intervals along the vertical direction, and the first air intake plate 31 is located above the second air intake plate 32. In addition, in this embodiment, the third air intake plate 41 and the fourth air intake plate 42 are also arranged at intervals along the vertical direction, and the fourth air intake plate 42 is located above the third air intake plate 41.

[0064] In this embodiment, as Figure 2 and Figure 4 As shown, the first air inlet 311 is a round hole, and the second air inlet 321 is an elongated hole. By designing the first air inlet 311 as a round hole and the second air inlet 321 as an elongated hole, the obstruction effect of the second air inlet plate 32 on the airflow coming out of the first air inlet 311 is improved, ensuring that the airflow discharged through the second air inlet 321 can undergo lateral deflection and flow, and also making the flow velocity of the airflow discharged through each second air inlet 321 more uniform. Optionally, in this embodiment, both the first air intake plate 31 and the second air intake plate 32 are rectangular plates. The extension direction of the first side of the first air intake plate 31 is preset to be the first side direction, and the extension direction of the second side of the first air intake plate 31 is preset to be the second side direction. The first and second sides are perpendicular to each other. The second air intake holes 321 extend along the first side direction, and multiple second air intake holes 321 are arranged at intervals along the second side direction. Multiple first air intake holes 311 are arranged in an array on the first air intake plate 31, and the multiple first air intake holes 311 arranged at intervals along the first side direction form a first air intake hole group. Each second air intake hole 321 is directly opposite the area between two adjacent first air intake hole groups, thereby ensuring the blocking and weakening effect of the first vacuum breaking mechanism 3 on the airflow. Optionally, in this embodiment, the width of the second air intake hole 321 along the second side direction is 1mm to 40mm, and the interval between two adjacent second air intake holes 321 is 1mm to 40mm. Optionally, in this embodiment, both the first air inlet 311 and the second air inlet 321 are straight holes, meaning that the diameters of the first air inlet 311 and the second air inlet 321 are the same along their through-hole direction. In this embodiment, the diameter of the first air inlet 311 is 1mm to 15mm. In other embodiments, the first air inlet 311 and the second air inlet 321 may also be in the form of flared holes.

[0065] In this embodiment, the second vacuum breaking mechanism 4 is similar in structure to the first vacuum breaking mechanism 3 and is symmetrically arranged. For the disassembled structure, please refer to the first vacuum breaking mechanism 3. The third air inlet 411 is a round hole, and the fourth air inlet 421 is an elongated hole, thereby improving the blocking effect of the fourth air inlet plate 42 on the airflow coming out of the third air inlet 411, ensuring that the airflow discharged through the fourth air inlet 421 can undergo lateral deflection flow, and also making the flow velocity of the airflow discharged through each fourth air inlet 421 more uniform. Optionally, in this embodiment, both the third air intake plate 41 and the fourth air intake plate 42 are rectangular plates. The first side of the fourth air intake plate 42 extends in the direction of the third side, and the second side extends in the direction of the fourth side. The first and second sides are perpendicular to each other. The fourth air intake hole 421 extends along the direction of the third side, and multiple fourth air intake holes 421 are spaced apart along the direction of the fourth side. Multiple third air intake holes 411 are arranged in an array on the third air intake plate 41, and these multiple third air intake holes 411 spaced apart along the direction of the third side form a second air intake hole group. Each fourth air intake hole 421 is directly opposite the area between two adjacent second air intake hole groups, thereby ensuring the blocking and weakening effect of the second vacuum breaking mechanism 4 on the airflow. Optionally, in this embodiment, the width of the fourth air intake hole 421 along the direction of the fourth side is 1mm to 40mm, and the interval between two adjacent fourth air intake holes 421 is 1mm to 40mm. Optionally, in this embodiment, both the third air inlet 411 and the fourth air inlet 421 are straight holes, meaning that the diameters of the third air inlet 411 and the fourth air inlet 421 are the same along their through-hole direction. In this embodiment, the diameter of the third air inlet 411 is 1mm to 15mm. In other embodiments, the third air inlet 411 and the fourth air inlet 421 may also be in the form of flared holes.

[0066] like Figure 1 and Figure 3As shown, the first vacuum breaking mechanism 3 also includes a first mounting plate 33, which is disposed on the cavity cover 2. The first air inlet plate 31 and the second air inlet plate 32 are both connected to the first mounting plate 33. The first air inlet plate 31, the first mounting plate 33 and the cavity cover 2 together form a first air inlet space 36. The first air inlet plate 31, the second air inlet plate 32 and the first mounting plate 33 together form a second air inlet space 37. The first air inlet 21, the first air inlet space 36 and the second air inlet space 37 are connected in sequence. When the vacuum chamber is broken by the first vacuum breaking mechanism 3, the airflow entering through the first air inlet 21 on the chamber cover 2 first enters the first air intake space 36. After the airflow is initially slowed down and weakened, it enters the second air intake space 37 through the first air inlet holes 311 on the first air intake plate 31. After being blocked by the second air intake plate 32, the airflow is further weakened, and then enters the interior of the vacuum chamber through the second air inlet hole 321 on the second air intake plate 32, further reducing the airflow velocity and the impact of the airflow on the interior of the vacuum chamber.

[0067] Optionally, in this embodiment, the gap between the first air intake plate 31 and the cavity cover 2 in the vertical direction is 1mm to 15mm. Specifically, the gap between the first air intake plate 31 and the cavity cover 2 in the vertical direction can be 1mm, 3mm, 5mm, 7mm, 8mm, 10mm, 12mm, 14mm, or 15mm. Furthermore, the gap between the second air intake plate 32 and the first air intake plate 31 in the vertical direction is 1mm to 15mm. Specifically, the gap between the second air intake plate 32 and the first air intake plate 31 in the vertical direction can be 1mm, 3mm, 5mm, 7mm, 8mm, 10mm, 12mm, 14mm, or 15mm.

[0068] Optionally, the first mounting plate 33 and the second air inlet plate 32 can be integrally molded, which makes it easier to manufacture the entire first vacuum breaking mechanism 3. Optionally, in other embodiments, the first mounting plate 33 and the second air inlet plate 32 can also be two components that are detachably connected.

[0069] Optionally, such as Figure 3 As shown, the first vacuum breaking mechanism 3 also includes a first locking connector 34, which is configured to detachably connect the first air intake plate 31 and the second air intake plate 32 to the first mounting plate 33. Specifically, the first locking connector 34 can be a bolt, which passes through the first mounting plate 33 and is threadedly connected to the first air intake plate 31. Bolts have the advantages of reliable connection and low cost. In other embodiments, the first locking connector 34 can also be a screw or other form of connector.

[0070] In this embodiment, as Figure 1and Figure 5 As shown, the second vacuum breaking mechanism 4 also includes a second mounting plate 43, which is disposed on the bottom wall 13. The third air inlet plate 41 and the fourth air inlet plate 42 are both connected to the second mounting plate 43. The third air inlet plate 41, the second mounting plate 43 and the bottom wall 13 together form a third air inlet space 46. The third air inlet plate 41, the fourth air inlet plate 42 and the second mounting plate 43 together form a fourth air inlet space 47. The second air inlet 15, the third air inlet space 46 and the fourth air inlet space 47 are connected in sequence. When the vacuum chamber is broken by the second vacuum breaking mechanism 4, the airflow entering through the second air inlet 15 on the bottom wall 13 first enters the third air inlet space 46. After the airflow is initially slowed down and weakened, it enters the fourth air inlet space 47 through the third air inlet holes 411 on the third air inlet plate 41. After being blocked by the fourth air inlet plate 42, the airflow is further weakened, and then enters the interior of the vacuum chamber through the fourth air inlet hole 421 on the fourth air inlet plate 42, further reducing the airflow velocity and the impact of the airflow on the interior of the vacuum chamber.

[0071] Optionally, in this embodiment, the gap between the third air intake plate 41 and the fourth air intake plate 42 in the vertical direction is 1mm to 15mm. Specifically, the gap between the third air intake plate 41 and the fourth air intake plate 42 in the vertical direction can be 1mm, 3mm, 5mm, 7mm, 8mm, 10mm, 12mm, 14mm or 15mm.

[0072] Optionally, the second mounting plate 43 and the fourth air inlet plate 42 can be integrally molded, which makes it easier to manufacture the entire second vacuum breaking mechanism 4. Optionally, in other embodiments, the second mounting plate 43 and the fourth air inlet plate 42 can also be two components that are detachably connected.

[0073] Optionally, such as Figure 5 As shown, the second vacuum breaking mechanism 4 also includes a second locking connector 48, which is configured to detachably connect the third air intake plate 41 and the fourth air intake plate 42 to the second mounting plate 43. Specifically, the second locking connector 48 can be a bolt, which passes through the second mounting plate 43 and is threadedly connected to the third air intake plate 41. Bolts have the advantages of reliable connection and low cost. In other embodiments, the second locking connector 48 can also be a screw or other form of connector.

[0074] In addition, such as Figure 1As shown, the vacuum chamber provided in this embodiment also includes a gas extraction mechanism 5, which can extract gas from the interior of the chamber body 1, thereby changing the vacuum chamber from a standard atmospheric environment to a vacuum environment. Since the specific structure and extraction principle of the gas extraction mechanism 5 are existing technologies, they will not be described in detail here.

[0075] Optionally, an air extraction port 11 is provided on the bottom wall 13, and the air extraction mechanism 5 is connected to the air extraction port 11. The vacuum chamber includes multiple second vacuum breaking mechanisms 4 arranged at intervals, and an air extraction channel 12 is formed between two adjacent second vacuum breaking mechanisms 4. The air extraction channel 12 is connected to the air extraction port 11. When gas is extracted from the inside of the chamber body 1 by the air extraction mechanism 5, the gas inside the chamber body 1 is collected at the air extraction port 11 through the air extraction channel 12 formed between two adjacent second vacuum breaking mechanisms 4, and then extracted by the air extraction mechanism 5. This allows the gas and dust inside the chamber body 1 to be quickly collected at the air extraction port 11, improving the gas extraction speed.

[0076] Preferably, in this embodiment, such as Figure 6 As shown, the vacuum chamber includes four spaced-apart second vacuum breaking mechanisms 4. A cross-shaped extraction channel 12 is formed between the four second vacuum breaking mechanisms 4. A flow channel communicating with the extraction channel 12 is formed between the outer peripheral wall of the second vacuum breaking mechanism 4 and the side wall 14 of the chamber body 1. The central confluence area of ​​the extraction channel 12 is directly opposite the extraction port 11 located at the center of the bottom wall 13. When air is extracted from the interior of the chamber body 1 by the extraction mechanism 5, the airflow inside the chamber body 1 causes dust to move downwards from the flow channels around the chamber body 1 and enter the extraction channel 12. Then, it rapidly converges towards the central area through the cross-shaped extraction channel 12 and is finally discharged through the extraction port 11. This avoids the chaotic flow of dust and airflow within the chamber body 1, effectively improving the extraction efficiency and effect of airflow and dust, and also preventing dust contamination of the chamber body 1.

[0077] Preferably, the height of the cross-shaped suction channel 12 is 30mm to 200mm. Optionally, the height of the cross-shaped suction channel 12 can be 30mm, 35mm, 40mm, 45mm, 50mm, 60mm, 70mm, 80mm, 90mm, 100mm, 150mm, or 200mm. The above values ​​can ensure that the cavity body 1 is quickly evacuated to a vacuum state, thereby improving the suction speed.

[0078] Optionally, in this embodiment, as Figure 6As shown, there are four first vacuum breaking mechanisms 3, which are arranged in a rectangular pattern. Optionally, in other embodiments, there may be only one first vacuum breaking mechanism 3. In this case, there may be multiple first air inlets 21 on the cavity cover 2, and all of the multiple first air inlets 21 are connected to the first vacuum breaking mechanism 3.

[0079] Example 2

[0080] The vacuum chamber provided in this embodiment is basically the same as that in Embodiment 1. The difference between the vacuum chamber provided in this embodiment and that in Embodiment 1 is as follows:

[0081] like Figures 8-10 As shown, the second vacuum breaking mechanism 4 also includes a second mounting plate 43, an air intake channel 44, and a vacuum breaking back plate 45. One end of the air intake channel 44 is connected to the second air intake 15, and the other end is connected to the vacuum breaking back plate 45. The third air intake plate 41, the fourth air intake plate 42, and the vacuum breaking back plate 45 are all connected to the second mounting plate 43. The third air intake plate 41, the second mounting plate 43, and the vacuum breaking back plate 45 together form a third air intake space 46. The third air intake plate 41, the fourth air intake plate 42, and the second mounting plate 43 together form a fourth air intake space 47. The second air intake 15, the air intake channel 44, the third air intake space 46, and the fourth air intake space 47 are connected in sequence. When the vacuum chamber is broken by the second vacuum breaking mechanism 4, the airflow entering through the second air inlet 15 on the bottom wall 13 first enters the third air inlet space 46 through the air inlet channel 44. After the airflow is initially slowed down and weakened, it enters the fourth air inlet space 47 through the third air inlet holes 411 on the third air inlet plate 41. After being blocked by the fourth air inlet plate 42, the airflow is further weakened, and then enters the interior of the vacuum chamber through the fourth air inlet hole 421 on the fourth air inlet plate 42, further reducing the airflow velocity and the impact of the airflow on the interior of the vacuum chamber.

[0082] In this embodiment, there is a certain space between the second vacuum breaking mechanism 4 with the vacuum breaking back plate 45 and the bottom wall 13. During the pumping process, most of the airflow is concentrated below the second vacuum breaking mechanism 4, which further reduces the contamination of the carrier plate inside the vacuum chamber.

[0083] In this embodiment, as Figure 8 As shown, the second vacuum breaking mechanism 4 is arranged at intervals, thereby forming an air extraction channel 12 between adjacent second vacuum breaking mechanisms 4.

[0084] In this embodiment, as Figure 9As shown, the second vacuum breaking mechanisms 4 are directly connected, and no air extraction channel 12 is formed between the multiple second vacuum breaking mechanisms 4. Their arrangement is the same as that of the multiple first vacuum breaking mechanisms 3 located on the cavity cover 2, and will not be further described here. Optionally, in this embodiment, a single second vacuum breaking mechanism 4 can also be used.

[0085] Optionally, in this embodiment, as Figure 10 As shown, optionally, the second mounting plate 43 and the fourth air intake plate 42 are integrally formed parts, the third air intake plate 41 and the second mounting plate 43 are detachably connected by the second locking connector 48, and the vacuum breaking back plate 45 and the second mounting plate 43 are also detachably connected by the second locking connector 48.

[0086] Example 3

[0087] The vacuum chamber provided in this embodiment is basically the same as that in Embodiment 1. The difference between the vacuum chamber provided in this embodiment and that in Embodiment 1 is as follows:

[0088] like Figure 11 As shown, the first vacuum breaking mechanism 3 also includes a first support connector 35, which is supported and connected between the first air intake plate 31 and the second air intake plate 32. Specifically, the second air intake plate 32 is composed of multiple spaced-apart splicing plates, and the gap between two adjacent splicing plates is a second air intake hole 321. Each splicing plate is provided with a first support connector 35 between itself and the first air intake plate 31. The first support connector 35 can be a support stud.

[0089] Similarly, such as Figure 12 As shown, the second vacuum breaking mechanism 4 also includes a second support connector 49, which is supported and connected between the third air intake plate 41 and the fourth air intake plate 42. Specifically, the fourth air intake plate 42 is composed of multiple spaced-apart splicing plates, and the gap between two adjacent splicing plates is the fourth air intake hole 421. Each splicing plate is provided with a second support connector 49 between itself and the third air intake plate 41. The second support connector 49 can be a support stud.

[0090] Obviously, the above embodiments of the present invention are merely examples for clearly illustrating the present invention, and are not intended to limit the implementation of the present invention. Those skilled in the art can make other variations or modifications based on the above description. It is neither necessary nor possible to exhaustively describe all embodiments here. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present invention should be included within the scope of protection of the claims of the present invention.

Claims

1. A vacuum cavity, characterized in that, include: Cavity body (1); A cavity cover (2) is provided on the cavity body (1), and a first air inlet (21) is provided on the cavity cover (2); At least one first vacuum breaking mechanism (3) is disposed on the cavity cover (2). The first vacuum breaking mechanism (3) is connected to the first air inlet (21). The first vacuum breaking mechanism (3) includes a first air inlet plate (31) and a second air inlet plate (32). The first air inlet plate (31) is provided with a plurality of first air inlets (311) spaced apart. The second air inlet plate (32) is provided with a plurality of second air inlets (321) spaced apart. The plurality of second air inlets (321) and the plurality of first air inlets (311) are arranged in a staggered manner along the horizontal direction. The cavity body (1) is provided with a second air inlet (15), and the vacuum cavity also includes at least one second vacuum breaking mechanism (4). The second vacuum breaking mechanism (4) is disposed on the inner side of the bottom wall (13) of the cavity body (1). The second vacuum breaking mechanism (4) is connected to the second air inlet (15). The second vacuum breaking mechanism (4) includes a third air inlet plate (41) and a fourth air inlet plate (42). The third air inlet plate (41) is provided with a plurality of third air inlets (411) spaced apart, and the fourth air inlet plate (42) is provided with a plurality of fourth air inlets (421) spaced apart. The plurality of third air inlets (411) and the plurality of fourth air inlets (421) are staggered along the horizontal direction. An air extraction port (11) is provided on the bottom wall (13); The second vacuum breaking mechanism (4) further includes a second mounting plate (43), an air intake channel (44), and a vacuum breaking back plate (45). One end of the air intake channel (44) is connected to the second air inlet (15), and the other end is connected to the vacuum breaking back plate (45). The third air intake plate (41), the fourth air intake plate (42), and the vacuum breaking back plate (45) are all connected to the second mounting plate (43). The third air intake plate (41), the second mounting plate (43), and the vacuum breaking back plate (45) together form a third air intake space (46). The third air intake plate (41), the fourth air intake plate (42), and the second mounting plate (43) together form a fourth air intake space (47). The second air inlet (15), the air intake channel (44), the third air intake space (46), and the fourth air intake space (47) are connected in sequence.

2. The vacuum cavity according to claim 1, characterized in that, The first vacuum breaking mechanism (3) also includes: The first mounting plate (33) is disposed on the cavity cover (2). The first air intake plate (31) and the second air intake plate (32) are both connected to the first mounting plate (33). The first air intake plate (31), the first mounting plate (33) and the cavity cover (2) together form a first air intake space (36). The first air intake plate (31), the second air intake plate (32) and the first mounting plate (33) together form a second air intake space (37). The first air inlet (21), the first air intake space (36) and the second air intake space (37) are connected in sequence.

3. The vacuum cavity according to claim 2, characterized in that, The first vacuum breaking mechanism (3) further includes a first locking connector (34), which is configured to detachably connect the first air intake plate (31) and the second air intake plate (32) to the first mounting plate (33).

4. The vacuum cavity according to claim 2, characterized in that, The first mounting plate (33) and the second air intake plate (32) are integrally formed parts.

5. The vacuum cavity according to claim 1, characterized in that, The second vacuum breaking mechanism (4) further includes a second locking connector (48), which is configured to detachably connect the third air intake plate (41) and the fourth air intake plate (42) to the second mounting plate (43).

6. The vacuum cavity according to claim 1, characterized in that, The second mounting plate (43) and the fourth air intake plate (42) are integrally formed.

7. The vacuum cavity according to claim 1, characterized in that, The first vacuum breaking mechanism (3) further includes a first support connector (35), which is supported and connected between the first air intake plate (31) and the second air intake plate (32); And / or, The second vacuum breaking mechanism (4) further includes a second support connector (49), which is supported and connected between the third air intake plate (41) and the fourth air intake plate (42).

8. The vacuum cavity according to claim 1 or 2, characterized in that, The first air inlet (311) and the third air inlet (411) are straight holes or flared holes; the second air inlet (321) and the fourth air inlet (421) are straight holes or flared holes.

9. The vacuum cavity according to claim 1 or 2, characterized in that, The first air inlet (311) and the third air inlet (411) are round holes, while the second air inlet (321) and the fourth air inlet (421) are elongated holes.

10. The vacuum cavity according to claim 1 or 2, characterized in that, The number of the first vacuum breaking mechanism (3) is one, and the number of the second vacuum breaking mechanism (4) is four; or, the number of the first vacuum breaking mechanism (3) is four, and the number of the second vacuum breaking mechanism (4) is four.

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