Laser tracker and dimming mechanism thereof

Abstract

The invention discloses a laser tracker and a dimming mechanism thereof, and the dimming mechanism comprises a pedestal, a first adjusting seat which can move along a first direction relative to the pedestal, a second adjusting seat which can move along a second direction relative to the pedestal, and a third adjusting seat which adjusts the emission direction of a laser beam. The third adjusting seat comprises a connecting component connected with the second adjusting seat and a light emitting component for emitting laser beams, and the light emitting component is connected with the connecting component through a plurality of screws; the plurality of screws include a second screw configured to connect the light emitting member and the connecting member, and a first screw configured to change a distance between the connecting member and the light emitting member to adjust an emission direction of the laser beam. According to the invention, the measurement precision of the laser tracker can be improved, and the position and posture of the target can be accurately measured.

Description

[0001] This application is a divisional application of the patent application filed on December 30, 2021, with application number 2021116699514 and invention title "Laser Beam Adjustment Mechanism with Multiple Degrees of Freedom". Technical Field

[0002] This disclosure generally relates to an intelligent manufacturing equipment industry, specifically to a laser tracker and its dimming mechanism. Background Technology

[0003] With the continuous innovation of industrial technology, using laser trackers to measure the position and attitude of targets has become an important method in the intelligent manufacturing equipment industry. Generally speaking, lasers have many advantages such as high brightness, good monochromaticity, high coherence, and strong directionality. These advantages enable laser trackers to obtain good measurement results when used in laser systems.

[0004] As a precision mechanical instrument, laser trackers have demonstrated remarkable performance in measuring the position and attitude of targets. A typical laser tracker includes a horizontal axis, a pitch axis, and an optical axis. The horizontal and pitch axes intersect perpendicularly, as do the optical and pitch axes. By rotating the horizontal axis, the target's position and its changes in the horizontal direction are tracked and measured. By rotating the pitch axis, the target's position and its changes in the vertical direction are tracked and measured. Simultaneously, by rotating the horizontal and pitch axes, and rotating the optical axis, the target's attitude and its changes at any angular position in space can be tracked and measured.

[0005] However, in the existing technology, the horizontal axis, pitch axis and optical axis of the laser tracker cannot be strictly intersected perpendicularly, which will cause the laser tracker (spatial coordinate and attitude measurement) to have a large error and reduce the measurement accuracy of the laser tracker. Summary of the Invention

[0006] This disclosure is made in view of the above-mentioned state of the prior art, and its purpose is to provide an adjustment mechanism for adjusting the laser beam path so that the horizontal axis, pitch axis and optical axis of a laser tracker intersect perpendicularly.

[0007] To this end, this disclosure provides a laser beam adjustment mechanism with multiple degrees of freedom. This mechanism adjusts the path of the laser beam so that the horizontal axis, pitch axis, and optical axis of a laser tracker intersect perpendicularly. It includes a base, a first adjustment seat movable relative to the base along a first direction, a second adjustment seat movable relative to the base along a second direction, and a third adjustment seat for adjusting the emission direction of the laser beam. The first direction is different from the second direction. The third adjustment seat includes a connecting member connected to the second adjustment seat, a light-emitting member for emitting the laser beam, and an elastic member disposed between the connecting member and the light-emitting member. The light-emitting member is connected to the connecting member by a plurality of screws, and the emission direction of the laser beam is adjusted by the screws.

[0008] In this configuration, the laser beam's emission position can be adjusted using the first and second adjustment seats, and the laser beam's emission direction can be adjusted using multiple screws on the third adjustment seat. When adjusting the laser beam using these multiple adjustment seats, the horizontal axis and pitch axis of the laser tracker are made to intersect perpendicularly. The laser tracker measures the spatial position of the laser beam's emission to determine whether the adjustment mechanism is properly adjusted, ensuring that the horizontal axis, pitch axis, and optical axis are in a state of intersecting perpendicularly. When multiple axes intersect perpendicularly, the accuracy of the laser tracker's measurement is improved, thereby increasing the measurement precision.

[0009] Furthermore, in the adjusting mechanism disclosed herein, optionally, the first adjusting seat is slidably mounted on the base, and the first adjusting seat includes a first fixing member that fixes the relative position of the first adjusting seat and the base. The second adjusting seat is slidably mounted on the first adjusting seat, and the second adjusting seat includes a second fixing member that fixes the relative position of the second adjusting seat and the first adjusting seat. In this case, when the first adjusting seat and the second adjusting seat are adjusted, the first fixing member and the second fixing member can be used to fix the first adjusting seat and the second adjusting seat respectively, preventing the adjusting seat from sliding again due to the movement of the adjusting mechanism and thus avoiding large errors.

[0010] Additionally, the adjustment mechanism disclosed herein may optionally include a plurality of lenses for reflecting the laser beam. The base, the first adjustment seat, and the second adjustment seat each have a communicating through-hole. The laser beam passes through the through-hole, is reflected by the lenses, and then passes through the light-emitting hole. This allows the laser beam to pass through the through-hole and exit the adjustment mechanism.

[0011] Alternatively, in the adjustment mechanism disclosed herein, the light-emitting component may include a plurality of through holes matching the size of the plurality of screws, and the connecting component may include a plurality of first grooves matching the size of the plurality of screws, wherein the number of through holes is greater than the number of first grooves, and the first grooves have threads matching the screws. In this case, the plurality of screws can engage with the first grooves through the through holes to fix the light-emitting component to the connecting component.

[0012] Furthermore, in the adjustment mechanism disclosed herein, optionally, the plurality of screws includes a plurality of first screws and a plurality of second screws, the number of through holes is not less than the sum of the number of first screws and the number of second screws, and the number of first grooves is not less than the number of second screws. Thus, the first screws and second screws can be adjusted more conveniently to achieve balanced contact between the light-emitting component and the connecting component.

[0013] Alternatively, in the adjustment mechanism disclosed herein, the first screw and the second screw are arranged alternately on the light-emitting component in a manner surrounding the laser beam. The first screw reaches the surface of the connecting component through the through hole, and the second screw reaches the first groove through the through hole. The first screw is a set screw. In this case, the light-emitting component can be held in place by the cooperation of the second screw and the first groove, and the first screw can hold the light-emitting component in place. At the same time, adjusting the first screw and the second screw can balance the forces between the light-emitting component and the connecting component.

[0014] Alternatively, in the adjustment mechanism disclosed herein, the elastic member may be an O-ring. In this case, since the O-ring has good elasticity, the contact state between the light-emitting frame and the light-emitting component can be adjusted by compressing or relaxing the rubber ring.

[0015] Alternatively, in the adjustment mechanism disclosed herein, a second groove matching the elastic member is formed on the surface of the connecting member near the light-emitting member, the elastic member being disposed in the second groove, and the depth of the second groove being less than the thickness of the elastic member. In this case, there is an adjustable width between the light-emitting member and the connecting member, the adjustable width being the thickness of the portion of the elastic member extending beyond the depth of the second groove when the elastic member is disposed in the second groove.

[0016] Alternatively, in the adjustment mechanism disclosed herein, the light-emitting component is connected to a laser that generates the laser beam, and the laser beam enters the adjustment mechanism through the light-emitting component after being generated by the laser. Thus, the adjustment mechanism can receive the laser light generated by the laser and adjust the path of the laser beam.

[0017] Alternatively, in the adjustment mechanism disclosed herein, the first direction may be perpendicular to the second direction. In this case, the first adjustment seat and the second adjustment seat can slide in mutually perpendicular directions to adjust the exit point of the laser beam.

[0018] According to the multi-degree-of-freedom laser beam adjustment mechanism disclosed herein, the horizontal axis, pitch axis and optical axis of the laser tracker can be made to intersect each other perpendicularly, thereby improving the measurement accuracy of the laser tracker. Attached Figure Description

[0019] This disclosure will now be explained in further detail by way of example only with reference to the accompanying drawings, in which:

[0020] Figure 1 This is a disassembly diagram of the laser tracker according to an embodiment of the present disclosure.

[0021] Figure 2 This is a schematic diagram showing the beam path of the adjustment mechanism involved in the embodiments of this disclosure.

[0022] Figure 3 This is a structural diagram showing the overall structure of the adjustment mechanism involved in the embodiments of this disclosure.

[0023] Figure 4 This is a schematic diagram showing the third adjustment seat of the adjustment mechanism according to the embodiments of this disclosure before installation.

[0024] Figure 5 This is a schematic diagram showing the third adjustment seat of the adjustment mechanism according to the embodiments of this disclosure after installation.

[0025] Figure 6 This is a schematic diagram showing the adjustment of the beam by the adjustment mechanism according to an embodiment of the present disclosure.

[0026] Figure 7 This diagram illustrates the steps involved in adjusting the regulating mechanism according to an embodiment of the present disclosure.

[0027] Figure label:

[0028] 200… laser tracker, 210… functional housing,

[0029] 1…Adjustment mechanism,

[0030] 10…base, 11…first adjusting seat, 12…second adjusting seat,

[0031] 13…Third adjustment seat, 130…Connecting component, 131…Light emission component, 132…Elastic component,

[0032] 130a…first groove, 130b…second groove,

[0033] a…first screw, b…second screw

[0034] A1…Horizontal axis, A2…Pitch axis, A3…Optical axis. Detailed Implementation

[0035] Hereinafter, preferred embodiments of the present disclosure will be described in detail with reference to the accompanying drawings. In the following description, the same reference numerals are used for the same components, and repeated descriptions are omitted. Furthermore, the drawings are merely schematic diagrams, and the proportions of the components or the shapes of the components may differ from actual figures.

[0036] It should be noted that the terms "comprising" and "having" and any variations thereof in this disclosure, such as a process, method, system, product, or device that includes or has a series of steps or units, are not necessarily limited to those steps or units that are explicitly listed, but may include or have other steps or units that are not explicitly listed or that are inherent to such processes, methods, products, or devices.

[0037] Furthermore, the subheadings and similar terms used in the following description of this disclosure are not intended to limit the content or scope of this disclosure; they are merely intended to serve as reading prompts. Such subheadings should not be construed as dividing the content of the article, nor should the content under a subheading be limited to the scope of that subheading.

[0038] This disclosure relates to a multi-degree-of-freedom laser beam adjustment mechanism, which adjusts the path of the laser beam so that the horizontal axis, pitch axis, and optical axis of a laser tracker intersect perpendicularly, and is used to adjust the beam emitted by the laser tracker. The adjustment mechanism has multiple degrees of freedom that can be represented relative to a coordinate system, and can have various motion states. The laser beam adjustment mechanism may be simply referred to as a "beam adjustment mechanism," "adjustment mechanism," or "adjustment device," etc. Hereinafter referred to as the adjustment mechanism. The adjustment mechanism disclosed herein can improve the accuracy of laser tracker measurements.

[0039] Figure 1 This is a disassembly diagram of the laser tracker 200 according to an embodiment of the present disclosure. Figure 2 This is a schematic diagram showing the beam path of the adjustment mechanism 1 according to an embodiment of the present disclosure.

[0040] In some examples, the laser tracker 200 is a precision instrument for measuring spatial coordinates and attitude. Preferably, in some examples, when using the laser tracker 200 to measure the position of a target, it is necessary not only to keep the horizontal axis A1 horizontally intersecting and perpendicular to the pitch axis A2, but also to keep the direction of the laser beam emitted along the optical axis A3 perpendicular to the pitch axis A2 and intersecting the horizontal axis A1. In this case, high-precision measurement results can be obtained by measuring the target using the laser tracker 200.

[0041] like Figure 1 As shown, the laser tracker 200 has a horizontal axis A1, a pitch axis A2, and an optical axis A3. In some examples, the optical axis A3 can represent the direction of extension of the laser beam when it exits the laser tracker 200. The laser tracker 200 includes a functional housing 210. In some examples, an adjustment mechanism 1 may be provided in the functional housing 210. In some examples, the laser beam can be emitted from the laser and then enter the adjustment mechanism 1, be adjusted by the adjustment mechanism 1, and then exit from the laser exit port of the functional housing 210. Hereinafter, the laser exit port of the functional housing 210 will be referred to simply as the laser exit port.

[0042] In some examples, the laser is preferably emitted vertically from the exit port. In some examples, the horizontal axis A1 and the pitch axis A2 intersect perpendicularly. In some examples, the optical axis A3 intersects perpendicularly with the pitch axis A2 and intersects with the horizontal axis A1. In these cases, the accuracy of the laser tracker 200 measurements can be improved.

[0043] In some examples, when the optical axis A3 and the horizontal axis A1 are not perpendicular, i.e., when the laser beam is not emitted perpendicularly to the horizontal axis A1 from the exit port, measuring objects at a distance using the laser tracker 200 will result in significant measurement errors. In some examples, when the emission direction of the optical axis A3 is not perpendicular to the horizontal axis A1, for example, with an angular deviation of 0.1° or even larger, if the laser tracker 200 is measuring a distance of 2 km, the measurement result may have an error of 3 m, greatly reducing the measurement accuracy of the laser tracker 200. In such cases, adjusting the optical axis A3 to make it perpendicular to both the horizontal axis A1 and the pitch axis can improve the measurement accuracy of the laser tracker 200.

[0044] Figure 3 This is a structural diagram showing the overall structure of the adjustment mechanism 1 according to the embodiments of this disclosure.

[0045] In some examples, the adjustment mechanism 1 may include a base 10, a first adjustment seat 11, a second adjustment seat 12, and a third adjustment seat 13. In some examples, the first adjustment seat 11 may be movable relative to the base 10, and the second adjustment seat 12 may be movable relative to the first adjustment seat 11. Thus, the spatial position of the components on the base 10 can be changed by moving the first adjustment seat 11 or the second adjustment seat 12.

[0046] In some examples, the first adjustment seat 11 can move along a first direction, and the second adjustment seat 12 can move along a second direction. In some examples, the first direction and the second direction can be different. Thus, the first adjustment seat 11 and the second adjustment seat 12 can be moved in different directions to adjust whether the exit position of the laser beam path is perpendicular to the pitch axis A2 and intersects the horizontal axis A1.

[0047] In some examples, the third adjustment seat 13 may include a connecting member 130, a light-emitting member 131, and an elastic member 132. In some examples, the third adjustment seat 13 can be connected to the second adjustment seat 12 via the connecting member 130. In some examples, the light-emitting member 131 can be used to emit a laser beam into the adjustment mechanism 1. In some examples, the elastic member 132 can be disposed between the connecting member 130 and the light-emitting member 131. In this case, the specific connection state between the connecting member 130 and the light-emitting member 131 can be changed by changing the compression state of the elastic member 132.

[0048] In some examples, the light-emitting component 131 and the connecting component 130 can be connected by multiple screws. In some examples, the emission direction of the laser beam can be adjusted by adjusting the screws. Specifically, when adjusting the tightness of the screws, the compression state of the elastic member 132 between the light-emitting component 131 and the connecting component 130 can be changed, thereby changing the angle of the light-emitting component 131 relative to the connecting component 130 and thus adjusting the emission direction of the laser beam.

[0049] In some examples, the connecting member 130 can be fixed to the second adjusting seat 12 by bolts, and the third adjusting seat 13 can then be fixed to the second adjusting seat 12. In this case, when the first adjusting seat 11 or the second adjusting seat 12 moves, the third adjusting seat 13 can change its spatial position by following the movement of the first adjusting seat 11 or the second adjusting seat 12.

[0050] As described above, in some examples, the first direction and the second direction can be different. In some examples, when the first adjusting seat 11 moves along the first direction while the second adjusting seat 12 moves along the second direction, the third adjusting seat 13 can change its spatial position relative to the base 10 in either the first or second direction. In this case, when the light-emitting member 131 emits laser light, multiple adjusting seats can be adjusted simultaneously to adjust the emission angle or position of the laser light.

[0051] In some examples, the first direction can be perpendicular to the second direction. In some examples, the first direction can be the X direction and the second direction can be the Y direction. In this case, the X and Y directions can form a coordinate system, and when the first adjusting seat 11 and the second adjusting seat 12 slide, the sliding trajectory of the adjusting seat can be simulated on the coordinate system. This makes the adjustment of the adjusting seat convenient, and at the same time, it can accurately record the sliding distance (adjustment distance) of the first adjusting seat 11 and the second adjusting seat 12 through the coordinate system.

[0052] In some examples, a first adjustment seat 11 may be mounted on a base 10, and a second adjustment seat 12 may be mounted on the first adjustment seat 11. In some examples, the first adjustment seat 11 may slide on the base 10, and the second adjustment seat 12 may slide on the first adjustment seat 11. Thus, the relative position of the laser beam emitted by the light-emitting member 131 can be changed by sliding the first adjustment seat 11 and the second adjustment seat 12.

[0053] In some examples, the first adjusting seat 11 includes a first fixing member (not shown). In some examples, once the first adjusting seat 11 is adjusted, it can be fixed by the first fixing member. This fixes the relative position of the first adjusting seat 11 and the base 10. In some examples, the second adjusting seat 12 includes a second fixing member (not shown). In some examples, once the second adjusting seat 12 is adjusted, it can be fixed by the second fixing member. This fixes the relative position of the second adjusting seat 12 and the first adjusting seat 11. In this case, when the adjusting mechanism 1 moves, undesirable movement of each adjusting seat can be reduced, thereby improving measurement accuracy.

[0054] In some examples, the adjustment mechanism 1 also includes multiple lenses. In some examples, the lenses can be used to reflect the laser beam. This allows observation of the position of the laser beam emitted from inside the adjustment mechanism 1 via the lenses, thus determining whether the adjustment mechanism 1 has been successfully adjusted.

[0055] In some examples, the number of lenses is at least two. In some examples, the lenses can be plane mirrors, beam splitters, or any lens capable of planar reflection of light beams.

[0056] In some examples, the base 10, the first adjustment seat 11, and the second adjustment seat 12 each have through holes (not shown), and these through holes can communicate with each other. In some examples, the connecting member 130 may have through holes (not shown). In some examples, when a laser beam enters the adjustment mechanism 1 from the light-emitting member 131, the laser beam can pass through multiple through holes and exit the adjustment mechanism 1 after being reflected by a lens.

[0057] Figure 4 This is a schematic diagram showing the third adjustment seat 13 of the adjustment mechanism 1 according to the embodiments of this disclosure before installation. Figure 5 This is a schematic diagram showing the third adjustment seat 13 of the adjustment mechanism 1 according to the embodiments of this disclosure after installation.

[0058] like Figure 4 As shown, an elastic member 132 (described later) may be provided between the light-emitting member 131 and the connecting member 130. In some examples, the light-emitting member 131 may include multiple through holes. As described above, the light-emitting member 131 and the connecting member 130 may be connected by multiple screws. In some examples, the multiple through holes may be matched with the size of multiple screws. Thus, screws can pass through the through holes to connect the light-emitting member 131 and the connecting member 130.

[0059] In some examples, the connecting member 130 may include a plurality of first grooves 130a, which may be matched with the size of a plurality of screws. In some examples, the number of through holes may be greater than the number of first grooves 130a. In some examples, the threads of the first grooves 130a may be matched with the screws. Thus, the first grooves 130a and the screws can be used to fix the light-emitting member 131.

[0060] In some examples, the multiple screws include multiple first screws a and multiple second screws b. In some examples, the number of through holes is not less than the sum of the number of first screws a and second screws b. In some examples, the number of first recesses 130a is not less than the number of first screws a. In this case, when the first screws a and the first recesses 130a mate, each first screw a can be secured.

[0061] In some examples, the first screw a and the second screw b may be disposed on the light-emitting member 131. In some examples, the first screw a and the second screw b may alternate sequentially and surround the laser beam. In some examples, the first screw a may reach the surface of the connecting member 130 through a through hole. In some examples, the second screw b may reach the first groove 130a through a through hole.

[0062] In some examples, the first screw a can be a set screw. In some examples, the set screw can be arranged around the laser beam in the light-emitting member 131. In this case, the light-emitting member 131 can be better fixed circumferentially around the connecting member 130. In addition, the first screw a can engage with the through hole to hold the light-emitting member 131 in place. Thus, when the set screw is rotated, the distance between the connecting member 130 and the light-emitting member 131 can change with the rotation of the set screw, thereby adjusting the tightness of the connection between the connecting member 130 and the light-emitting member by the set screw.

[0063] As described above, in some examples, an elastic member 132 may be provided between the connecting member 130 and the light-emitting member 131. In some examples, when the distance between the connecting member 130 and the light-emitting member 131 changes, the connection relationship between the elastic member 132 and the connecting member 130, as well as the connection relationship between the elastic member 132 and the light-emitting member 131, changes synchronously.

[0064] In some examples, the second screw b can reach the first groove 130a through a through hole. The second through hole can mate with the first groove 130a to fix the light-emitting component 131 to the connecting component 130 via the elastic member 132. In some examples, when the second screw b is tightened or loosened, the elastic member 132 can compress or expand, allowing close or slight contact between the light-emitting component 131 and the connecting component 130. In this case, the depth of the first screw a and the second screw b screwed into the through hole can be adjusted simultaneously to balance the contact force between the light-emitting component 131 and the elastic member 132. Thus, the light-emitting component 131 can be smoothly positioned on the elastic member 132.

[0065] In some examples, the elastic member 132 can be an O-ring. Because the O-ring has good elasticity, the contact state between the connecting frame and the light-emitting member 131 can be adjusted by compressing or relaxing the rubber ring.

[0066] In some examples, a second groove 130b is provided in the connecting member 130. In some examples, the second groove 130b may be provided on the surface near the light-emitting member 131. In some examples, the shape of the second groove 130b may substantially match the shape of the elastic member 132. Thus, the elastic member 132 can be provided in the second groove 130b.

[0067] In some examples, the depth of the second groove 130b may be less than the thickness of the elastic member 132. In some examples, when the elastic member 132 is disposed in the second groove 130b, the thickness of the portion of the elastic member 132 extending beyond the depth of the second groove 130b can serve as the adjustment width between the light-emitting member 131 and the connecting member 130. Thus, the depth to which the first screw a and the second screw b are screwed into the light-emitting member 131 can be adjusted, thereby adjusting the aforementioned adjustment width.

[0068] In some examples, the first screw a and the second screw b can be evenly distributed around the light-emitting member 131.

[0069] In some examples, the light-emitting component 131 can be connected to a laser. In some examples, the laser can generate a laser beam, which enters the adjustment mechanism 1 through the light-emitting component 131. Thus, the adjustment mechanism 1 can receive the laser light generated by the laser and adjust the path of the laser beam.

[0070] In some examples, the laser tracker can be adjusted so that the pitch axis intersects and is perpendicular to the horizontal axis, and also adjusted so that the pitch axis intersects and is perpendicular to the optical axis. The laser tracker emits laser light, which passes through an adjustment mechanism. In some examples, the laser tracker can be driven to rotate around the horizontal axis by a preset angle, and the pattern formed by the laser beam can be measured. Based on the range of the pattern, the adjustment mechanism can be adjusted so that the pattern is smaller than a preset value. In some examples, a smaller pattern indicates a higher precision in the adjustment mechanism.

[0071] Figure 6 This is a schematic diagram showing the adjustment of the beam by the adjustment mechanism 1 according to the embodiment of this disclosure. Figure 7 This diagram illustrates the steps involved in adjusting the adjustment mechanism 1 according to an embodiment of the present disclosure.

[0072] In some examples, the steps of adjusting the adjustment mechanism 1 may include: adjusting the horizontal axis A1 and the pitch axis A2 (step S10); emitting a laser (step S20); drawing the trajectory of the beam (step S30); and adjusting the adjustment seat (step S40).

[0073] In some examples, in step S10, the rotation axis of the laser tracker 200 can be adjusted, and in some examples, the horizontal axis A1 and the pitch axis A2 can be adjusted to intersect perpendicularly.

[0074] In some examples, in step S20, the laser exit port of the laser tracker 200 can be adjusted to be vertically upward. When the laser of the laser tracker 200 emits a laser beam, the beam can enter the adjustment mechanism 1 via the laser and then exit from the laser exit port.

[0075] In some examples, in step S30, the horizontal axis A1 of the laser tracker 200 can be rotated so that the laser tracker 200 rotates by a predetermined angle in the horizontal direction. The laser beam rotates with the laser tracker 200 by the predetermined angle, drawing the trajectory of the laser beam at the exit port. The laser beam forms a trajectory with a specific shape at multiple heights (different heights from the laser exit port). In some examples, the smaller the area of ​​the formed specific shape, the higher the measurement accuracy of the adjustment mechanism 1. In this case, when the area of ​​the formed specific shape is relatively large, if the angle and direction of the laser beam are not adjusted in time to make the area of ​​the specific shape smaller than the preset value, and the laser tracker 200 is continued to measure and track the target, it is easy to introduce a large measurement error.

[0076] In some examples, in step S40, when it is found that the laser beam forms a trajectory with a specific shape at different heights from the exit port, multiple adjustment seats can be adjusted simultaneously until the area of ​​the specific shape becomes smaller and smaller than a preset value, at which point the adjustment is complete. In this case, the target can be measured with high accuracy by the laser tracker 200.

[0077] In some examples, during the adjustment process, the first adjustment seat 11 and the second adjustment seat 12 can be continuously slid, and the first screw a and the second screw b on the third adjustment seat can be adjusted to adjust the path of the laser beam so that the optical axis A3 (that is, the extension direction of the beam emitted from the exit port) and the pitch axis A2 intersect perpendicularly and intersect the horizontal axis A1. When the adjustment is completed, the first adjustment seat 11, the second adjustment seat 12, and the third adjustment seat 13 are fixed.

[0078] While the present disclosure has been specifically described above in conjunction with the accompanying drawings and examples, it is to be understood that the foregoing description does not limit the present disclosure in any way. Those skilled in the art can make modifications and variations to the present disclosure as needed without departing from its essential spirit and scope, and all such modifications and variations shall fall within the scope of the present disclosure.

Claims

1. A dimming mechanism for a laser tracker, characterized in that, The device includes a base, a first adjusting seat movable relative to the base in a first direction, a second adjusting seat movable relative to the base in a second direction, and a third adjusting seat for adjusting the emission direction of the laser beam. The third adjusting seat includes a connecting member connected to the second adjusting seat and a light-emitting member for emitting the laser beam. The light-emitting member is connected to the connecting member by a plurality of screws, wherein the plurality of screws includes a second screw configured to connect the light-emitting member and the connecting member, and a first screw configured to change the distance between the connecting member and the light-emitting member to adjust the emission direction of the laser beam.

2. The dimming mechanism of the laser tracker as described in claim 1, characterized in that, The number of second screws is multiple, the light-emitting component includes multiple first through holes, the connecting component includes multiple first grooves, and the second screws reach the first grooves through the first through holes to connect the light-emitting component and the connecting component.

3. The dimming mechanism of the laser tracker as described in claim 2, characterized in that, The number of the first screws is multiple, the light-emitting component includes multiple second through holes, the first screws reach the surface of the connecting component through the second through holes to press against the light-emitting component, and the first screws are set screws.

4. The dimming mechanism of the laser tracker as described in claim 3, characterized in that, The first screw and the second screw are arranged alternately and uniformly around the laser beam on the light-emitting component.

5. The dimming mechanism of the laser tracker as described in any one of claims 1 to 4, characterized in that, It also includes an elastic member disposed between the connecting member and the light-emitting member, the elastic member being configured to balance the contact force between the light-emitting member and the elastic member when the screwing depth of the first screw and the second screw changes.

6. The dimming mechanism of the laser tracker as described in claim 5, characterized in that, The connecting member is provided with a second groove, the shape of which matches the shape of the elastic member. The elastic member is disposed in the second groove, and the depth of the second groove is less than the thickness of the elastic member.

7. The dimming mechanism of the laser tracker as described in claim 6, characterized in that, The thickness of the portion of the elastic member that extends beyond the depth of the second groove is the adjustment width between the light-emitting member and the connecting member.

8. The dimming mechanism of the laser tracker as described in claim 5, characterized in that, The elastic component is an O-ring rubber ring.

9. The dimming mechanism of the laser tracker as described in claim 1, characterized in that, The first direction and the second direction are orthogonal.

10. A laser tracker, characterized in that, The laser tracker includes a dimming mechanism, a functional housing, and a laser as described in any one of claims 1 to 9, wherein the functional housing has a laser emission port, the dimming mechanism is disposed in the functional housing, and the laser is configured to emit a laser beam to the dimming mechanism, wherein the laser beam is adjusted by the dimming mechanism and emitted from the laser emission port.

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