End effector matched with convex surface, manipulator and conveying equipment

Abstract

The invention provides an end effector matched with a convex surface, a manipulator and conveying equipment, the end effector matched with the convex surface comprises an extension part, an adsorption part and a plurality of sealing parts, the adsorption part comprises an adsorption main body, an auxiliary heating assembly and a plurality of adsorption assemblies, the adsorption assemblies are made of memory alloy which expands when heated and contracts when cooled, and the sealing parts are arranged on the adsorption main body. When the temperature of the auxiliary heating assembly rises, the adsorption assemblies expand, when the temperature of the auxiliary heating assembly drops, the adsorption assemblies shrink, the states of the adsorption assemblies can be controlled by controlling the temperature of the auxiliary heating assembly, and therefore the lengths of the multiple adsorption assemblies are different. And the sealing element is made of a flexible material of which the melting point is greater than or equal to 150 DEG C, so that the sealing performance between the adsorption assembly and the wafer can be improved, and a gap between the adsorption assembly and the wafer when the adsorption assembly is deformed due to the temperature is avoided.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of semiconductor equipment, in particular to an end effector adapting to a convex surface, a robot and a conveying device. BACKGROUND

[0002] In the semiconductor manufacturing process, it is very important to transport wafers between different process chambers, process chambers and wafer boats by a robot. However, the temperature of the wafer in the process chamber is relatively high, and the wafer has low rigidity at high temperature and is prone to deformation.

[0003] When a vacuum adsorption type robot is used to transport a wafer, the suction cup of the robot generally adsorbs the middle position of the lower surface of the wafer. The middle part of the high-temperature wafer is adsorbed by the suction cup of the robot, and the edge part of the high-temperature wafer has no supporting force and will deform downward under the action of gravity, resulting in the phenomenon that the high-temperature wafer arches upward, especially the thinning sheet, and this linearity is particularly obvious. When the high-temperature wafer deforms, it is very easy to fall off the suction cup.

[0004] Therefore, it is necessary to provide a new end effector adapting to a convex surface, a robot and a conveying device to solve the above problems in the prior art. SUMMARY

[0005] The purpose of the present application is to provide an end effector adapting to a convex surface, a robot and a conveying device, which is adapted to wafers deformed due to high temperature, greatly reducing the risk of wafer falling off.

[0006] To achieve the above purpose, the end effector adapting to a convex surface of the present application comprises: an extension piece, a vacuum channel is formed in the extension piece along the extension direction, and a docking port communicating with the vacuum channel is formed on the upper side of one end of the extension piece; an adsorption member comprising an adsorption body, an auxiliary heating assembly and a plurality of adsorption assemblies, the adsorption body is disc-shaped, a first connecting port is formed on one circular surface of the adsorption body, the adsorption member is connected with the extension piece, the first connecting port is in communication with the docking port, a plurality of second connecting ports are formed on the other circular surface of the adsorption body, the plurality of second connecting ports are in communication with the first connecting port, the number of the adsorption assemblies is the same as the number of the second connecting ports, the adsorption assembly comprises a first opening and a second opening in communication, the adsorption assembly is partially embedded in the second docking port, and the adsorption assembly is seamlessly connected with the second docking port, the first opening is in communication with the second connecting port, the second opening faces upward, the auxiliary heating assembly is connected with all the adsorption assemblies for heating different adsorption assemblies at the same or different temperatures; and a plurality of sealing members, the number of the sealing members being the same as that of the adsorption components, the sealing members being arranged on the second openings; The material of the adsorption components is a memory alloy that expands when heated and shrinks when cooled.

[0007] The end effector with the adaptive convex surface has the following advantages: the material of the adsorption components is a memory alloy that expands when heated and shrinks when cooled; when the temperature of the auxiliary heating component rises, the adsorption components expand, and when the temperature of the auxiliary heating component drops, the adsorption components shrink; the state of the adsorption components can be controlled by controlling the temperature of the auxiliary heating component, so that the lengths of the adsorption components are different, thereby adapting to the lower surface of the wafer after deformation in a high-temperature environment, and avoiding the wafer from falling off; and the material of the sealing members is a flexible material with a melting point greater than or equal to 150℃, which can increase the sealing between the adsorption components and the wafer and avoid gaps between the adsorption components and the wafer when the adsorption components are deformed due to temperature.

[0008] Optionally, the heights of the adsorption components that are the same distance from the center of the adsorption body are the same when the temperatures are the same, the heights of the adsorption components that are closer to the center of the adsorption body are higher, the auxiliary heating component includes a plurality of heating wires, the number of the heating wires is the same as that of the adsorption components, the heating wires are arranged around the outside of the corresponding adsorption components, and the heating wires are not connected to each other, when the corresponding adsorption components are heated by the plurality of heating wires, the corresponding adsorption components are heated by the heating wires from near to far according to the distance of the heating wires from the center of the adsorption body, and the farther the distance of the heating wires from the center of the adsorption body, the lower the heating temperature of the heating wires.

[0009] Optionally, the end effector with the adaptive convex surface further includes a plurality of conductive wires, the number of the conductive wires is the same as that of the heating wires, the conductive wires are connected to the corresponding heating wires, the extension member is internally provided with conductive wire accommodating grooves along the extension direction, and the plurality of conductive wires are accommodated in the conductive wire accommodating grooves.

[0010] Optionally, the end effector with the adaptive convex surface further includes a plurality of auxiliary contraction members, the number of the auxiliary contraction members is the same as that of the adsorption components, the auxiliary contraction members are arranged on the other side of the adsorption body and connected to the corresponding adsorption components, and are used to assist the adsorption components to contract when the environment cools.

[0011] Optionally, the auxiliary shrinkage member comprises at least one spring, one end of the spring is connected to the other side of the adsorption body, and the other end of the spring is connected to a position close to the second opening of the adsorption assembly, and the spring is in a natural state when the ambient temperature is room temperature.

[0012] The application also provides a mechanical hand, comprising: The connecting member comprises a rotating assembly, and a gas guide hole is formed in the rotating assembly; and The end effector of the adaptive convex surface is fixedly connected to the rotating assembly, and the vacuum channel is in communication with the gas guide hole.

[0013] Optionally, the connecting member further comprises a cylindrical hollow shell, an arc-shaped opening is formed in the cylindrical hollow shell along the direction of the central axis, two annular plates are arranged in the cylindrical hollow shell, the upper edge and the lower edge of the arc-shaped opening are fixedly connected to one of the annular plates, respectively, the lower surface of the annular plate fixedly connected to the upper edge of the arc-shaped opening is provided with an upper annular channel, and the upper surface of the annular plate fixedly connected to the lower edge of the arc-shaped opening is provided with a lower annular channel.

[0014] Optionally, the rotating assembly is in the shape of a circular tube, the upper end surface of the rotating assembly is in sliding seal connection with the upper annular channel, and the lower end surface of the rotating assembly is in sliding seal connection with the lower annular channel.

[0015] Optionally, the connecting member further comprises a gas guide member, the gas guide member is arranged in the cylindrical hollow shell, and the gas guide member is in communication with the gas guide hole.

[0016] Optionally, the gas guide member comprises a central pipe, a connecting pipe, a bottom disc and a plurality of fixing rods, one end of the central pipe is sealed, one end of the connecting pipe is in communication with the central pipe, the other end of the connecting pipe is in communication with the gas guide hole, the bottom disc is in the shape of a circular tube, the upper end surface of the bottom disc is in sliding seal connection with the outer wall of the other end of the central pipe, the lower end surface of the bottom disc is sealed, the central pipe is in communication with the bottom disc, and the bottom disc is fixedly connected to the inner wall of the cylindrical hollow shell through the fixing rods.

[0017] Optionally, the gas guide member further comprises a bearing, the inner ring of the bearing is sleeved on one end of the central pipe, the inner ring of the bearing is fixedly connected to the outer wall of the central pipe, and the outer ring of the bearing is fixedly connected to the inner wall of the cylindrical hollow shell through the fixing rods.

[0018] Optionally, the air guide member further comprises a driven member, the driven member is arranged outside the central pipe, the mechanical arm further comprises a driving unit, the driving unit comprises a driving member, the driving member is connected with the driven member through a transmission member, the driving member is used for providing driving force, and the driven member is rotated through the transmission member.

[0019] Optionally, the mechanical arm further comprises a vacuum generating unit, the vacuum generating unit comprises a vacuum generating member, and the vacuum generating member is communicated with the bottom disc through a communication pipeline.

[0020] The application further provides a conveying device, comprising: the mechanical arm; and a control unit, electrically connected with the mechanical arm, used for controlling the movement of the mechanical arm. BRIEF DESCRIPTION OF DRAWINGS

[0021] Figure 1 a structural schematic view of an end effector adapted to a convex surface in some embodiments of the application; Figure 2 a structural schematic view of an end effector adapted to a convex surface in some embodiments of the application; Figure 1 a sectional structural schematic view of a part A of the end effector adapted to a convex surface along an a-a' section line; Figure 3 a structural schematic view of a mechanical arm in some embodiments of the application; Figure 4 a structural schematic view of a rotating assembly in some embodiments of the application; Figure 5 a structural schematic view of a ring-shaped plate in some embodiments of the application; Figure 6 a structural schematic view of an air guide member in some embodiments of the application.

[0022] REFERENCE SIGNS: 10, end effector adapted to a convex surface; 11, extension member; 111, vacuum passage; 112, docking port; 113, conductive wire accommodating groove; 12, suction accessory; 121, suction main body; 1211, first connecting port; 1212, second connecting port; 122, suction assembly; 1221, first opening; 1222, second opening; 123, auxiliary heating assembly; 13, sealing member; 14, conductive wire; 20, connecting member; 21, rotating assembly; 22, air guide hole; 23, cylindrical hollow shell; 24, arc-shaped port; 25, ring-shaped plate; 251, upper ring channel; 201, central pipe; 202, adapter pipe; 203, bottom disc; 204, fixing rod; 205, bearing. DETAILED DESCRIPTION

[0023] In order to make the objects, technical solutions and advantages of the present application clearer, the technical solutions in the embodiments of the present application will be described clearly and completely below with reference to the drawings of the present application. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments of the present application. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative efforts belong to the scope of protection of the present application. Unless otherwise defined, the technical terms or scientific terms used herein should be understood as the common meanings thereof by those skilled in the art. The similar words such as "comprise" used herein mean that the elements or objects before the words cover the elements or objects listed after the words and their equivalents, and do not exclude other elements or objects.

[0024] In view of the problems in the prior art, the embodiments of the present application provide an end effector with an adaptive convex surface. Figure 1 and Figure 2 The end effector 10 with an adaptive convex surface comprises an extension piece 11, a suction accessory 12 and a plurality of sealing pieces 13. The extension piece 11 is internally provided with a vacuum passage 111 in the extension direction, and the upper side of one end of the extension piece 11 is provided with a butt joint port 112 communicating with the vacuum passage 111. The suction accessory 12 comprises a suction main body 121, an auxiliary heating assembly 123 and a plurality of suction assemblies 122. The suction main body 121 is disc-shaped, and a first connecting port 1211 is formed on one disc surface of the suction main body 121. The suction accessory 12 is connected with the extension piece 11, the first connecting port 1211 is in butt joint communication with the butt joint port 112, and a plurality of second connecting ports 1212 are formed on the other disc surface of the suction main body 121. The plurality of second connecting ports 1212 are in communication with the first connecting port 1211. The number of the suction assemblies 122 is the same as the number of the second connecting ports 1212. The suction assembly 122 comprises a first opening 1221 and a second opening 1222 in communication. The suction assembly 122 is partially embedded in the second butt joint port 112, and the suction assembly 122 is seamlessly connected with the second butt joint port 112. The first opening 1221 is in communication with the second connecting port 1212, and the second opening 1222 faces upward. The auxiliary heating assembly 123 is connected with all the suction assemblies 122, and is used for heating different suction assemblies 122 at the same or different temperatures. The number of the sealing pieces 13 is the same as the number of the suction assemblies 122, and the sealing pieces 13 are arranged on the second openings 1222.

[0025] Referring to 1 and Figure 2The extension member 11 is in a strip shape, which can be in a cylindrical shape or a prism shape. The adsorption assembly 122 is in a cylindrical shape. The sealing member 13 is in a flared shape. The small opening end of the sealing member 13 is provided with a circular annular groove (not shown in the figure), and the center symmetry axis of the circular annular groove coincides with the center symmetry axis of the sealing member 13. The edge of the second opening 1222 is embedded in the circular annular groove. The small opening end of the sealing member 13 is in communication with the second opening 1222. The large opening end of the sealing member 13 faces upward.

[0026] In some embodiments, the material of the adsorption assembly is a memory alloy that expands when heated and shrinks when cooled. When the temperature of the auxiliary heating assembly increases, the adsorption assembly expands, so that the second opening is away from the extension member. When the temperature of the auxiliary heating assembly decreases, the adsorption assembly shrinks, so that the second opening is close to the extension member. The material of the sealing member is a flexible material with a melting point greater than or equal to 150°C. The melting point of the material of the sealing member is 200°C, 300°C, 600°C, etc.

[0027] The material of the adsorption assembly is a memory alloy that expands when heated and shrinks when cooled. When the temperature of the auxiliary heating assembly increases, the adsorption assembly expands. When the temperature of the auxiliary heating assembly decreases, the adsorption assembly shrinks. By controlling the temperature of the auxiliary heating assembly, the state of the adsorption assembly can be controlled. Therefore, the lengths of the adsorption assemblies are different, so as to adapt to the lower surface of the wafer after deformation in a high-temperature environment, thereby avoiding the wafer from falling off. The material of the sealing member is a flexible material with a melting point greater than or equal to 150°C, which can increase the sealing between the adsorption assembly and the wafer, and avoid gaps between the adsorption assembly and the wafer when the adsorption assembly is deformed by temperature.

[0028] In some embodiments, the material of the adsorption assembly includes any one of Nitinol, copper-based memory alloy, iron-based memory alloy, etc. The material of the sealing member includes any one of polytetrafluoroethylene (PTEF) and high-performance polyimide (VESPEL).

[0029] In some embodiments, when the temperature is the same, the heights of the adsorption assemblies with the same distance from the center of the adsorption body are the same. The closer the distance from the center of the adsorption body, the higher the height of the adsorption assembly. The auxiliary heating assembly includes a plurality of heating wires. The number of the heating wires is the same as the number of the adsorption assemblies. The heating wires are arranged on the outside of the corresponding adsorption assemblies and are not in communication with each other. When the corresponding adsorption assemblies are heated by the plurality of heating wires, the corresponding adsorption assemblies are heated by the heating wires from near to far according to the distance from the center of the adsorption body. The farther the distance from the center of the adsorption body, the lower the heating temperature of the heating wire.

[0030] Reference is made to Figure 2The end effector of the adaptive convex surface further comprises a plurality of conductive wires 14, the number of the conductive wires 14 being the same as that of the heating wires, the conductive wires 14 being connected with the corresponding heating wires, and the extension member 11 being internally provided with conductive wire accommodating grooves 113 along the extension direction, and the plurality of conductive wires 14 being accommodated in the conductive wire accommodating grooves 113.

[0031] In some embodiments, the end effector of the adaptive convex surface further comprises a plurality of auxiliary contraction members, the number of the auxiliary contraction members being the same as that of the adsorption assemblies, the auxiliary contraction members being arranged on the other side of the adsorption body and connected with the corresponding adsorption assemblies, and being used for assisting the adsorption assemblies to contract when the ambient temperature is lowered.

[0032] After the adsorption assembly adsorbs the wafer, the adsorption assembly is affected by the pressure of the wafer, and the adsorption assembly may be deviated when contracting, and the auxiliary contraction member can make the adsorption assembly deform along the preset direction, so that the deviation of the adsorption assembly when contracting is avoided, and the safety of the wafer during the conveying process is ensured.

[0033] In some embodiments, the auxiliary contraction member comprises at least one spring, one end of the spring being connected with the other side of the adsorption body, and the other end of the spring being connected with a position close to the second opening of the adsorption assembly, and the spring being in a natural state when the ambient temperature is room temperature.

[0034] In some embodiments, the auxiliary contraction member comprises two springs, the two springs being a first spring and a second spring, one end of the first spring being fixedly connected with a first point on the extension assembly, the other end of the first spring being fixedly connected with a second point on the adsorption assembly, one end of the second spring being fixedly connected with a third point on the extension assembly, and the other end of the second spring being fixedly connected with a fourth point on the adsorption assembly, wherein the first point and the third point are symmetrical to the axis of the adsorption assembly, and the second point and the fourth point are symmetrical to the axis of the adsorption assembly.

[0035] In still other embodiments, the auxiliary contraction member comprises a hollow cylindrical structure, one end of the hollow cylindrical structure being connected with the extension member, and the adsorption member being arranged in the hollow cylindrical structure.

[0036] The application further provides a robot, referring to Figure 2 , Figure 3 and Figure 4The mechanical hand comprises a connecting piece 20 and an end effector 10 with the matching convex surface. The connecting piece 20 comprises a rotating assembly 21 with a gas guide hole 22. The end effector 10 with the matching convex surface is fixedly connected with the rotating assembly 21, and the vacuum channel 111 is in communication with the gas guide hole 22.

[0037] With reference to Figure 3 and Figure 5 The connecting piece 20 further comprises a cylindrical hollow shell 23 with an arc-shaped opening 24 along the direction of the central axis. Two annular plates 25 are arranged in the cylindrical hollow shell 23. The upper edge and the lower edge of the arc-shaped opening 24 are fixedly connected with one annular plate 25 respectively. The lower surface of the annular plate 25 fixedly connected with the upper edge of the arc-shaped opening 24 is provided with an upper annular channel 251. The upper surface of the annular plate 25 fixedly connected with the lower edge of the arc-shaped opening 24 is provided with a lower annular channel.

[0038] With reference to Figure 4 and Figure 5 The rotating assembly 21 is in the shape of a circular tube. The upper end surface of the rotating assembly 21 is in sliding seal connection with the upper annular channel 251. The lower end surface of the rotating assembly 21 is in sliding seal connection with the lower annular channel.

[0039] In some embodiments, the rotating assembly is further provided with a wire through hole in communication with the conductive wire containing groove. The conductive wire extends through the wire through hole into the cylindrical hollow shell.

[0040] The upper edge and the lower edge of the arc-shaped opening are fixedly connected with one annular plate respectively. The lower surface of the annular plate fixedly connected with the upper edge of the arc-shaped opening is provided with an upper annular channel. The upper surface of the annular plate fixedly connected with the lower edge of the arc-shaped opening is provided with a lower annular channel. The upper annular channel and the lower annular channel are similar to double-layered sleeves, which can realize the sliding seal connection between the annular plate and the rotating assembly, avoid the gas in the cylindrical hollow shell from polluting the cavity in the process cavity, and avoid the gas in the process cavity from entering the cylindrical hollow shell.

[0041] In some embodiments, a sealing ring is arranged between the upper annular channel and the upper end surface of the rotating assembly to strengthen the sealing property between the upper annular channel and the rotating assembly. A sealing ring is arranged between the lower annular channel and the lower end surface of the rotating assembly to strengthen the sealing property between the lower annular channel and the rotating assembly.

[0042] In some embodiments, the connecting piece further comprises a gas guide piece arranged in the cylindrical hollow shell. The gas guide piece is in communication with the gas guide hole.

[0043] With reference toFigure 3 and Figure 6 The air guide piece comprises a center tube 201, a connecting tube 202, a bottom plate 203 and a plurality of fixing rods 204, one end of the center tube 201 is sealed, one end of the connecting tube 202 is communicated with the center tube 201, the other end of the connecting tube 202 is communicated with the air guide hole, the bottom plate 203 is in the shape of a circular tube, the upper end surface of the bottom plate 203 is in sliding sealing connection with the outer wall of the other end of the center tube 201, the lower end surface of the bottom plate 203 is sealed, the center tube 201 is communicated with the bottom plate 203, and the bottom plate 203 is fixedly connected with the inner wall of the cylindrical hollow shell 23 through the fixing rods 204.

[0044] With reference to Figure 3 and Figure 6 The air guide piece further comprises a bearing 205, the inner ring of the bearing 205 is sleeved on one end of the center tube 201, and the inner ring of the bearing 205 is fixedly connected with the outer wall of the center tube 201, and the outer ring of the bearing 205 is fixedly connected with the inner wall of the cylindrical hollow shell 23 through the fixing rods 204.

[0045] In some embodiments, the air guide piece further comprises a driven part, the driven part is arranged around the outside of the center tube, the mechanical arm further comprises a driving unit, the driving unit comprises a driving part, the driving part is connected with the driven part through a transmission part, and the driving part is used to provide a driving force to drive the driven part to rotate through the transmission part.

[0046] In some embodiments, the mechanical arm further comprises a vacuum generating unit, the vacuum generating unit comprises a vacuum generating part, and the vacuum generating part is communicated with the bottom plate through a communication pipeline.

[0047] In some embodiments, the mechanical arm further comprises a lifting mechanism, the connecting part is fixedly connected with the lifting mechanism, and the lifting mechanism is used to move the connecting part in the vertical direction. The lifting mechanism can be a cylinder or a motor-driven sliding rail mechanism, and can be realized by a plurality of prior arts, which will not be described in detail here.

[0048] The application further provides a conveying device comprising the mechanical arm and a control unit, the control unit is electrically connected with the mechanical arm and is used to control the movement of the mechanical arm. Specifically, the control unit controls the lifting of the lifting mechanism, controls whether the vacuum generating unit is vacuumized, and controls the current size in the conductive wire to control the heating temperature of the auxiliary heating assembly. The control unit is a motion controller (Motion Controller), and can also be a programmable logic controller (Programmable Logic Controller, PLC).

[0049] The application also provides a semiconductor system comprising the transport apparatus. Of course the semiconductor system also comprises other semiconductor apparatuses, such as etching apparatuses, deposition apparatuses, cleaning apparatuses, wafer boats, etc., which are not described here in detail.

[0050] While the application has been illustrated and described in detail in the foregoing embodiments, the foregoing is only illustrative of the application and is not intended to limit the application. Various modifications and changes can be made by persons of ordinary skill in the art without departing from the scope and spirit of the application, which is defined by the following claims. Moreover, the application described herein can have other embodiments and be practiced or implemented in various ways.

Claims

1. An end effector adapted to a convex surface, characterized in that, include: An extension member has a vacuum channel inside along the extension direction, and an interface for communicating with the vacuum channel is provided on the upper side of one end of the extension member. An adsorption component includes an adsorption body, an auxiliary heating component, and several adsorption components. The adsorption body is disc-shaped, and a first connection port is provided on one circular surface of the adsorption body. The adsorption component is connected to the extension component, and the first connection port is connected to the mating interface. Several second connection ports are provided on the other circular surface of the adsorption body, and each of the several second connection ports is connected to the first connection port. The number of adsorption components is the same as the number of second connection ports. Each adsorption component includes a first opening and a second opening that are connected. The adsorption component is partially embedded in the second mating interface, and the adsorption component is seamlessly connected to the second mating interface. The first opening is connected to the second connection port, and the second opening faces upward. The auxiliary heating component is connected to all the adsorption components and is used to heat different adsorption components at the same or different temperatures. as well as, A plurality of sealing elements, the same number as the adsorption assembly, are disposed on the second opening; The material of the adsorption component is a shape memory alloy that expands when heated and contracts when cooled. When the temperature of the auxiliary heating component increases, the adsorption component expands, causing the second opening to move away from the extension. When the temperature of the auxiliary heating component decreases, the adsorption component contracts, causing the second opening to move closer to the extension. The material of the sealing component is a flexible material with a melting point greater than or equal to 150°C.

2. The end effector adapted to a convex surface according to claim 1, characterized in that, At the same temperature, adsorption components that are equidistant from the center of the adsorption body have the same height. Adsorption components that are closer to the center of the adsorption body are taller. The auxiliary heating component includes several heating wires, the number of which is the same as the number of adsorption components. The heating wires are arranged around the outside of the corresponding adsorption components and are not interconnected. When heating the corresponding adsorption components through the heating wires, the heating of the corresponding adsorption components is carried out sequentially from the nearest to the farthest from the center of the adsorption body. The farther away from the center of the adsorption body, the lower the heating temperature of the heating wire.

3. The end effector adapted to a convex surface according to claim 2, characterized in that, The end effector adapted to the convex surface further includes a plurality of conductive wires, the number of which is the same as the number of heating wires. The conductive wires are connected to the corresponding heating wires. The extension member has a conductive wire receiving groove inside along the extension direction, and the plurality of conductive wires are received in the conductive wire receiving groove.

4. The end effector adapted to a convex surface according to any one of claims 1-3, characterized in that, The end effector adapted to the convex surface also includes several auxiliary shrinking members. The number of auxiliary shrinking members is the same as the number of adsorption components. The auxiliary shrinking members are disposed on the other side of the adsorption body and connected to the corresponding adsorption components, and are used to assist the adsorption components in shrinking when the environment cools down.

5. The end effector adapted to a convex surface according to claim 4, characterized in that, The auxiliary shrinking component includes at least one spring, one end of which is connected to the other side of the adsorption body, and the other end of which is connected to a position near the second opening of the adsorption component. When the ambient temperature is room temperature, the spring is in its natural state.

6. A robotic arm, characterized in that, include: The connector includes a rotating assembly having an air guide hole; and, The end effector adapted to the convex surface as described in any one of claims 1 to 5, wherein the end effector adapted to the convex surface is fixedly connected to the rotating assembly, and the vacuum channel is in communication with the air guide hole.

7. The robotic arm according to claim 6, characterized in that, The connector also includes a cylindrical hollow shell with an arc-shaped opening along the central axis. The cylindrical hollow shell contains two annular plates. The upper and lower edges of the arc-shaped opening are respectively fixedly connected to one of the annular plates. An upper annular channel is provided on the lower surface of the annular plate fixedly connected to the upper edge of the arc-shaped opening, and a lower annular channel is provided on the upper surface of the annular plate fixedly connected to the lower edge of the arc-shaped opening.

8. The robotic arm according to claim 7, characterized in that, The rotating assembly is in the shape of a cylindrical tube. The upper end face of the rotating assembly is slidably and sealed to the upper annular channel, and the lower end face of the rotating assembly is slidably and sealed to the lower annular channel.

9. The robotic arm according to claim 7 or 8, characterized in that, The connector also includes an air guide, which is disposed inside the cylindrical hollow shell and communicates with the air guide hole.

10. The robotic arm according to claim 9, characterized in that, The air guide component includes a central tube, a connecting tube, a base plate, and several fixing rods. One end of the central tube is sealed, one end of the connecting tube is connected to the central tube, and the other end of the connecting tube is connected to the air guide hole. The base plate is cylindrical, with its upper end face slidably sealed to the outer wall of the other end of the central tube, and its lower end face sealed. The central tube is connected to the base plate, and the base plate is fixedly connected to the inner wall of the cylindrical hollow shell through the fixing rods.

11. The robotic arm according to claim 10, characterized in that, The air guide component also includes a bearing, the inner ring of which is fitted around one end of the central tube and is fixedly connected to the outer wall of the central tube, and the outer ring of which is fixedly connected to the inner wall of the cylindrical hollow shell through the fixing rod.

12. The robotic arm according to claim 10, characterized in that, The air guide also includes a driven member, which is arranged around the outside of the central tube. The manipulator also includes a drive unit, which includes a drive member. The drive member is connected to the driven member through a transmission member. The drive member is used to provide driving force and drive the driven member to rotate through the transmission member.

13. The robotic arm according to claim 10, characterized in that, The robotic arm also includes a vacuum generating unit, which includes a vacuum generating component that is connected to the chassis via a connecting pipe.

14. A conveying device, characterized in that, include: The robotic arm as described in any one of claims 6 to 13; as well as, The control unit is electrically connected to the robotic arm and is used to control the movement of the robotic arm.

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