Spray head and thin film deposition apparatus

Abstract

The application relates to the technical field of semiconductor processing equipment, in particular to a shower head and a thin film deposition device, which comprises a top cover, an air inlet hole is arranged on the top cover; a base, a horizontal exhaust part is arranged on the base, a plurality of first exhaust holes are arranged on the exhaust part; an adjusting plate, a plurality of second exhaust holes are arranged on the adjusting plate, the first exhaust holes and the second exhaust holes are arranged in one-to-one correspondence; a driving mechanism, the driving mechanism comprises a driving column, a sliding groove is formed on the base for the sliding of the driving column, a communication groove is arranged on the inner side wall of the base for the extension of the adjusting plate into the sliding groove, a driving tooth is arranged on the side wall of the driving column, a driven tooth is arranged on the side wall of the adjusting plate and is engaged with the driving tooth, the adjusting plate is driven to rotate when the driving column moves transversely, and then the overlapping range of the first exhaust holes and the second exhaust holes is adjusted. The application has the effect of controlling the gas injection parameters at the terminal, and then improving the applicability.

Description

Technical Field

[0001] This application relates to the technical field of semiconductor processing equipment, and in particular to a spray head and thin film deposition apparatus. Background Technology

[0002] In the manufacturing process of semiconductor devices, thin film deposition technologies such as chemical vapor deposition (CVD) and plasma-enhanced chemical vapor deposition (PECVD) are crucial. These processes are typically carried out in dedicated semiconductor processing chambers, where source and reactant gases are delivered to the surface of a wafer or substrate, causing a chemical reaction and forming the desired thin film on the surface. During this process, the gas nozzle located at the top of the chamber is a key component for achieving uniform gas delivery; its function is to evenly disperse and spray the incoming reactant gases onto the wafer surface below.

[0003] With the continuous advancement of semiconductor technology nodes and the increasing complexity of device structures, thin film deposition processes are showing an increasingly diversified trend. Different processes (e.g., depositing thin films of different materials, different thicknesses, or different step coverage) place different and demanding requirements on the dynamic parameters of gas jetting (such as local flow rate, gas mixing uniformity, spatial distribution, etc.).

[0004] In the existing technology, different specifications and types of spray heads are designed for different needs. This process involves a lot of simulation calculations and experimental verification, resulting in high R&D costs and effort. The need to stop the machine to replace a single type of spray head limits the process compatibility and application scope of the equipment and the spray head itself. Summary of the Invention

[0005] To address the aforementioned technical problems, this application provides a spray head that has the advantage of terminal control of gas injection parameters, thereby improving its applicability.

[0006] To achieve the above objectives, the technical solution of the present invention is as follows:

[0007] A spray head includes a top cover, on which an air inlet is provided;

[0008] A base, wherein a horizontal exhaust section is provided on the base, and a plurality of first exhaust holes are provided on the exhaust section;

[0009] An adjusting plate is provided, the bottom of which is sealed to the top of the exhaust section. The adjusting plate is provided with a plurality of second exhaust holes, and the first exhaust hole and the second exhaust hole are provided in a one-to-one correspondence.

[0010] The driving mechanism includes a driving column, a sliding groove formed on the base for the driving column to slide, a communicating groove provided on the inner side wall of the base for an adjusting plate to extend into the sliding groove, driving teeth provided on the side wall of the driving column, and driven teeth provided on the side wall of the adjusting plate to mesh with the driving teeth. When the driving column moves laterally, it drives the adjusting plate to rotate, thereby adjusting the overlap range of the first exhaust hole and the second exhaust hole.

[0011] A sealing mechanism is disposed between the drive column and the sliding groove for sealing.

[0012] To achieve the above technical solution, when the drive column moves laterally, it drives the adjusting plate to rotate, thereby adjusting the overlap range (exhaust channel) of the first and second exhaust holes. This adjusts the cross-sectional area of ​​the exhaust channel of the entire spray head, thus controlling the exhaust rate and pressure difference. Since the drive column and the adjusting plate are driven by the drive teeth and driven teeth, the transmission ratio between them is constant. This allows for precise control of the rotation angle of the adjusting plate by the translational distance of the drive column, thereby precisely controlling the gas spraying parameters. The sprayed gas directly enters the deposition chamber for use, ensuring that the gas meets the requirements of different processes, i.e., ensuring uniform delivery while meeting the requirements of other gas parameters. At the same time, since the drive column can drive the adjusting plate to rotate around its own axis by sliding back and forth along its axial direction in the sliding groove, it is only necessary to ensure the sealing between the drive column and the sliding groove. The sealing requirements of the translational sliding structure are lower than those of the rotational structure, thus facilitating the sealing requirements of the drive column.

[0013] As a preferred embodiment of this application, both ends of the sliding groove are provided with oil inlets for connecting to a hydraulic drive device.

[0014] To achieve the above technical solution, hydraulic oil of different volumes is supplied to both ends of the sliding groove through a hydraulic drive device, thereby driving the drive column to move back and forth horizontally in the sliding groove, thus achieving the effect of driving the adjustment plate to rotate; at the same time, the hydraulic system is selected to meet the requirements of high-pressure and high-temperature working environment and ensure reliability.

[0015] As a preferred embodiment of this application, the sealing mechanism includes a first sealing component disposed on the sidewalls of the sliding grooves on both sides of the connecting groove and a second sealing component disposed at both ends of the drive column.

[0016] The above technical solution is achieved by using the first sealing component to prevent high-pressure gas inside the base from leaking through the connecting groove and sliding groove; and by using the second sealing component to prevent high-pressure oil from leaking into the base and contaminating the internal working gas.

[0017] As a preferred embodiment of this application, the first sealing assembly includes a first sealing groove disposed on the inner wall of the sliding groove, and a plurality of stacked first sealing rings are disposed in the first sealing groove. The cross-section of the first sealing ring is V-shaped, and the tip of the cross-section of the first sealing ring points away from the communicating groove.

[0018] To achieve the above technical solution, the "skirt" of each individual first sealing ring faces the connecting groove. This ensures that when the first sealing ring is installed on the inner wall of the sliding groove (within the first sealing groove), its two side walls abut against the inner wall of the sliding groove and the side wall of the drive column, forming a seal to prevent gas leakage. Simultaneously, after gas leaks into the first sealing groove, it enters the "skirt" of the first sealing ring, causing the gas pressure to act on the two side walls of the first sealing ring. This further presses the two side walls of the first sealing ring against the bottom wall of the first sealing groove and the drive column, respectively, resulting in a better sealing effect with higher gas pressure. Furthermore, the stacked arrangement of several first sealing rings forms a multi-stage seal, creating a pressure relief cavity between the first sealing rings. When a first sealing ring leaks due to excessive pressure, it enters the pressure relief cavity, where eddy currents reduce pressure, ensuring that subsequent first sealing rings are not subjected to excessive gas pressure, thus guaranteeing the gas leak prevention effect.

[0019] As a preferred embodiment of this application, the second sealing assembly includes a second sealing ring, a third sealing ring, and a fourth sealing ring arranged sequentially along the direction from the end of the drive column to the center.

[0020] The above technical solution is achieved by forming a three-stage seal through the second, third, and fourth sealing rings, thereby ensuring that hydraulic oil does not leak into the base and contaminate the gas, while also preventing gas leakage.

[0021] As a preferred embodiment of this application, the second sealing ring includes an inner connecting portion sleeved on the drive column, and an outer connecting portion provided on the inner connecting portion. The outer connecting portion gradually moves away from the inner connecting portion in a direction close to the end of the drive column, so that an opening is formed between the inner connecting portion and the outer connecting portion. The opening faces the end of the drive column, and an elastic metal skeleton is provided in the outer connecting portion.

[0022] The above technical solution enables hydraulic oil to enter the opening of the second sealing ring, allowing the hydraulic oil to press the inner part against the drive column and the outer part against the inner wall of the sliding groove, thus making the sealing effect better the higher the pressure. At the same time, in order to ensure the reliability of the overall seal and ensure that the sealing effect is maintained when the drive column moves, an elastic metal skeleton is provided in the outer part, thereby ensuring the overall structural strength of the second sealing ring.

[0023] As a preferred embodiment of this application, the third sealing ring includes a base layer and a wear-resistant layer disposed on the surface of the base layer.

[0024] To achieve the above technical solution, the wear-resistant layer is made of polytetrafluoroethylene (PTFE) to ensure sealing while reducing friction, thus allowing the drive column to move more smoothly. Furthermore, the wear-resistant layer can scrape away hydraulic oil, preventing it from adhering to the inner wall of the sliding groove and entering the base due to the back-and-forth movement of the drive column, thus avoiding leakage.

[0025] As a preferred embodiment of this application, the cross-section of the fourth sealing ring is Z-shaped.

[0026] The above technical solution achieves the following: both the hydraulic oil or gas leaking from both sides can act on the side walls of the V-shaped cavity, thereby pressing the side walls of the fourth sealing ring against the drive column and the sliding groove side walls, thus achieving a bidirectional dynamic sealing effect that prevents both gas leakage and hydraulic oil leakage.

[0027] This application provides a thin film deposition apparatus, including the above-mentioned spray head and a deposition chamber. The spray head is disposed on the deposition chamber, a deposition platform is disposed below the spray head, and an air extraction ring is disposed below the deposition platform.

[0028] To achieve the above technical solution, the aforementioned spray head is used to achieve the effect of regulating the steam injection parameters at the exhaust terminal, thereby improving its applicability. At the same time, by setting an extraction ring below the deposition stage, the gas sprayed from the spray head will be blocked by the deposition stage when it is extracted by the extraction ring, thus ensuring the deposition effect and accelerating the deposition efficiency. In addition, the extraction rate of the extraction ring can be adjusted to assist in adjusting other pressures and flow rates in the vapor deposition chamber, thereby further improving the applicability of the entire thin film deposition apparatus.

[0029] As a preferred embodiment of this application, the suction ring is provided with a plurality of suction channels at equal intervals along its circumference, the suction channels are spirally arranged around the axial direction of the suction ring, and the diameter of the suction channels gradually decreases along the airflow direction.

[0030] To achieve the above technical solution, the extraction channel is spirally arranged around the extraction ring axis. This causes the gas in the deposition chamber to rotate slightly when the gas is extracted through the extraction channel of the spiral chamber, thus ensuring the uniformity of the internal gas pressure, preventing dead zones, and ensuring the gas phase deposition effect. In addition, the diameter of the extraction channel gradually decreases along the airflow direction, which ensures the initial cross-sectional area of ​​the extraction channel, thereby preventing excessive flow velocity and ensuring pressure stability. At the same time, the gradually shrinking extraction channel can reduce the gas jet velocity, thus ensuring that the extracted gas does not flow back.

[0031] In summary, this application includes at least one of the following beneficial technical effects:

[0032] 1. When the drive column moves laterally, it drives the adjustment plate to rotate, thereby adjusting the overlap range (exhaust channel) of the first and second exhaust holes; thus adjusting the cross-sectional area of ​​the exhaust channel of the entire spray head, thereby controlling the exhaust rate and pressure difference. Since the drive column and the adjustment plate are driven by the drive tooth and driven tooth, the transmission ratio between them is constant. This allows the rotation angle of the adjustment plate to be precisely controlled by the translation distance of the drive column, thereby precisely controlling the gas spraying parameters. The sprayed gas directly enters the deposition chamber for use, thus ensuring that the gas can meet the needs of different processes, that is, ensuring the uniformity of delivery while meeting the requirements of other gas parameters.

[0033] 2. The first sealing component mainly prevents high-pressure gas inside the base from leaking through the connecting groove and sliding groove, while the second sealing component prevents high-pressure oil from leaking into the base and contaminating the internal working gas.

[0034] 3. By setting a suction ring below the deposition stage, the gas ejected from the spray head is blocked by the deposition stage when it is drawn out by the suction ring, thus ensuring the deposition effect and accelerating the deposition efficiency. At the same time, the suction rate of the suction ring can be adjusted to help adjust other pressures and flow rates in the vapor deposition chamber, thereby further improving the applicability of the entire thin film deposition device. Attached Figure Description

[0035] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0036] Figure 1 This is a background technical diagram of this application.

[0037] Figure 2 This is a schematic diagram of the overall structure of a spray head according to this application.

[0038] Figure 3 This is a schematic diagram of the internal structure of the base in a spray head according to this application.

[0039] Figure 4 This is a vertical sectional view of a spray head according to this application.

[0040] Figure 5 This is a cross-sectional view of a spray head according to this application.

[0041] Figure 6 yes Figure 5 Enlarged view of Part A.

[0042] Figure 7This is a partial schematic diagram of the drive mechanism in a spray head according to this application.

[0043] Figure 8 This is a schematic diagram of the overall structure of a thin film deposition apparatus according to this application.

[0044] Figure 9 This is a cross-sectional view of a thin film deposition apparatus according to this application.

[0045] Figure 10 This is a schematic diagram of the pumping ring structure in a thin film deposition apparatus according to this application.

[0046] Reference numerals: 1. Top cover; 11. Air inlet; 12. Heating ring; 2. Base; 21. Exhaust section; 22. First exhaust port; 23. Sliding groove; 24. Connecting groove; 3. Adjusting plate; 31. Second exhaust port; 4. Drive mechanism; 41. Drive column; 42. Drive teeth; 43. Driven teeth; 44. Oil inlet; 5. Sealing mechanism; 51. First sealing assembly; 511. First sealing ring; 52. Second sealing assembly; 521. Second sealing ring; 5211. Inner connection; 5212. Outer connection; 5213. Elastic metal skeleton; 522. Third sealing ring; 5221. Base layer; 5222. Wear-resistant layer; 523. Fourth sealing ring; 524. V-shaped cavity; 6. Air distribution plate; 61. Air distribution hole; 7. Deposition chamber; 8. Deposition platform; 9. Extraction ring; 91. Extraction channel. Detailed Implementation

[0047] The following is in conjunction with the appendix Figure 1-10 This application will be described in further detail.

[0048] Reference Figure 1 As shown, commonly available gas nozzles typically employ a spray plate with a fixed number and distribution pattern of through holes. With the continuous advancement of semiconductor technology nodes and the increasing complexity of device structures, thin film deposition processes are becoming increasingly diversified. Different processes (e.g., depositing thin films of different materials, thicknesses, or with different stepped coverage) impose varying and stringent requirements on gas injection parameters (such as local flow rate, gas mixing uniformity, and spatial distribution). The aforementioned gas nozzle with fixed through holes, due to its rigid structure and performance, can only be controlled by setting a flow valve at the source to control the flow rate supplied. However, because the gas in the pipeline is elastic, the pressure after passing through the throttling valve and the subsequent micro-holes is uncontrollable, thus failing to meet the application requirements.

[0049] Therefore, this application provides a spray head to achieve terminal control of gas injection parameters. (Refer to...) Figure 2 The spray head includes a top cover 1, on which an air inlet 11 is provided; combined with Figure 4The base 2 has a horizontal exhaust section 21 with several first exhaust holes 22. The top cover 1 is fixed to the base 2. This allows gas to enter through the air inlet 11 and exit through the first exhaust holes 22 on the housing. To ensure the gas temperature, the top cover 1 is equipped with a heating ring 12, which can be designed as an electric heating wire or an electric heating strip, thereby heating and controlling the temperature of the gas entering between the top cover 1 and the base 2, thus ensuring the temperature of the supplied gas.

[0050] Combination Figure 3 and Figure 4 To adjust the exhaust parameters of the first exhaust port 22, the airflow temperature-controlled gas spray head also includes an adjusting plate 3 and a drive mechanism 4 for adjusting the position and angle of the adjusting plate 3. The bottom of the adjusting plate 3 and the top of the exhaust section 21 form a sealed fit; that is, by processing the flatness of the bottom of the adjusting plate 3 and the top of the exhaust section 21, a seal is ensured at the contact point to prevent leakage. The adjusting plate 3 is provided with a plurality of second exhaust ports 31, with each first exhaust port 22 corresponding to one of the second exhaust ports 31; combined with... Figure 5 As shown, it also includes a drive mechanism 4, which includes a drive column 41. A sliding groove 23 is formed on the base 2 for the drive column 41 to slide. A connecting groove 24 is provided on the inner side wall of the base 2 for the adjusting plate 3 to extend into the sliding groove 23. A drive tooth 42 is provided on the side wall of the drive column 41, and a driven tooth 43 that meshes with the drive tooth 42 is provided on the side wall of the adjusting plate 3. When the drive column 41 moves laterally, it drives the adjusting plate 3 to rotate, thereby adjusting the overlap range (exhaust channel) of the first exhaust hole 22 and the second exhaust hole 31; thus adjusting the overall... The cross-sectional area of ​​the micropores in each spray head allows for control of the exhaust rate and pressure differential. Because the drive column 41 and the adjusting plate 3 are driven by the drive teeth 42 and driven teeth 43, the transmission ratio between them remains constant. This allows for precise control of the rotation angle of the adjusting plate 3 by adjusting the translational distance of the drive column 41, thereby precisely controlling the gas ejection parameters. The ejected gas directly enters the deposition chamber for use, ensuring that the gas meets the requirements of different processes, guaranteeing both uniform delivery and other gas parameter requirements. Furthermore, since the drive column 41 can drive the adjusting plate 3 to rotate around its own axis simply by sliding back and forth along its axial direction in the sliding groove 23, only the sealing between the drive column 41 and the sliding groove 23 needs to be ensured. The sealing requirements for a translational sliding structure are lower than those for a rotational structure, making it easier to meet the sealing requirements of the drive column 41.

[0051] It is understood that in some alternative embodiments, a rotary drive structure can also be selected to drive the adjusting plate 3 to rotate. However, this requires a rotary drive sealing mechanism to ensure that gas does not leak from the cavity. Both the driving method and the sealing design are relatively difficult. Therefore, in this embodiment, the original required rotary sealing structure is changed to a sliding drive through the design of the driving structure, thereby achieving a sliding seal. This structure makes the design of the sealing structure simpler and more reliable.

[0052] The drive column 41 can be driven by different controllable drive sources, such as servo electric cylinders or servo hydraulic cylinders, depending on the actual operating conditions of the equipment. Specifically, in this application, both ends of the sliding groove 23 are provided with oil inlets 44 for connecting to the hydraulic drive device. That is, different volumes of hydraulic oil are supplied to both ends of the sliding groove 23 through the hydraulic drive device, thereby driving the drive column 41 to move back and forth horizontally in the sliding groove 23, thus achieving the effect of driving the adjusting plate 3 to rotate. At the same time, the selection of the hydraulic system can meet the requirements of high-pressure and high-temperature working environment.

[0053] Combination Figure 6 and Figure 7 As shown, a sealing mechanism 5 is provided between the drive column 41 and the sliding groove 23. The sealing mechanism 5 includes a first sealing component 51 provided on the side wall of the sliding groove 23 on both sides of the connecting groove 24 and a second sealing component 52 provided at both ends of the drive column 41. The first sealing component 51 mainly prevents the high-pressure gas inside the base 2 from leaking from the connecting groove 24 through the sliding groove 23; the second sealing component 52 prevents the high-pressure oil from leaking into the base 2 and contaminating the internal working gas.

[0054] The first sealing assembly 51 includes a first sealing groove disposed on the inner wall of the sliding groove 23. A plurality of stacked first sealing rings 511 are disposed within the first sealing groove. The cross-section of each first sealing ring 511 is V-shaped, with the tip of the cross-section pointing away from the connecting groove 24. That is, the "skirt" of each individual first sealing ring 511 faces the connecting groove 24. Therefore, when the first sealing ring 511 is installed on the inner wall of the sliding groove 23 (within the first sealing groove), its two side walls abut against the inner wall of the sliding groove 23 and the side wall of the drive column 41, respectively, forming a seal to prevent gas leakage. Simultaneously, if gas leaks into the first sealing groove, it enters the "skirt" of the first sealing ring 511, causing the gas pressure to act on the two side walls of the first sealing ring 511. This further presses the two side walls of the first sealing ring 511 against the bottom wall of the first sealing groove and the drive column 41, respectively, resulting in a better sealing effect with higher gas pressure. Meanwhile, because several first sealing rings 511 are stacked and arranged, a multi-stage seal is formed. A pressure relief cavity is formed between the first sealing rings 511 and the first sealing rings 511. As a result, if the first sealing ring 511 leaks due to excessive pressure, it will enter the pressure relief cavity and form a vortex pressure reduction in the pressure relief cavity. This ensures that the subsequent first sealing rings 511 will not be subjected to excessive gas pressure, thereby ensuring the gas leakage prevention effect.

[0055] The second sealing assembly 52 includes a second sealing ring 521, a third sealing ring 522, and a fourth sealing ring 523 arranged sequentially along the end of the drive column 41 to the center. That is, the second sealing ring 521, the third sealing ring 522, and the fourth sealing ring 523 form a three-level seal, thereby ensuring that the hydraulic oil will not leak into the base 2 and contaminate the gas, while also preventing gas leakage.

[0056] The second sealing ring 521 includes an inner connecting portion 5211 fitted onto the drive column 41, and an outer connecting portion 5212 provided on the inner connecting portion 5211. The outer connecting portion 5212 gradually moves away from the inner connecting portion 5211 along the direction close to the end of the drive column 41, so that the cross-section of the entire second sealing ring 521 is arranged in a "Y" shape, forming an opening between the inner connecting portion 5211 and the outer connecting portion 5212, with the opening facing the end of the drive column 41. This allows hydraulic oil to enter the opening of the second sealing ring 521, and the hydraulic oil can press the inner connecting portion onto the drive column 41 and press the outer connecting portion 5212 against the inner wall of the sliding groove 23, so that the higher the pressure, the better the sealing effect. At the same time, in order to ensure the reliability of the overall seal and ensure that the sealing effect is maintained when the drive column 41 moves, an elastic metal skeleton 5213 is provided in the outer connecting portion 5212, thereby ensuring the overall structural strength of the second sealing ring 521.

[0057] The third sealing ring 522 includes a base layer 5221 and a wear-resistant layer 5222 disposed on the surface of the base layer 5221. The wear-resistant layer 5222 is made of polytetrafluoroethylene (PTFE) to ensure sealing while reducing friction, thereby making the drive column 41 move more smoothly. Furthermore, the wear-resistant layer 5222 can scrape away hydraulic oil, preventing hydraulic oil from adhering to the inner wall of the sliding groove 23 and entering the base 2 due to the back-and-forth movement of the drive column 41, thus preventing leakage.

[0058] The cross-section of the fourth sealing ring 523 is Z-shaped, which forms a V-shaped cavity 524 on both sides of the fourth sealing ring 523. That is, the hydraulic oil or gas leaking from both sides can act on the side walls of the V-shaped cavity 524, so that the side walls of the fourth sealing ring 523 can be pressed against the side walls of the drive column 41 and the sliding groove 23, thereby achieving a bidirectional dynamic sealing effect that prevents both gas leakage and hydraulic oil leakage.

[0059] Back Figure 4 Meanwhile, in order to further ensure the uniformity of exhaust, a wind distribution plate 6 is provided below the air inlet. The wind distribution plate 6 is provided with a number of wind distribution holes 61 at equal intervals. The wind distribution plate 6 is fixed on the top cover 1, so that the gas entering the air inlet is blocked by the wind distribution plate 6 and dispersed to the surroundings, and then enters evenly between the top cover 1 and the base 2 through the wind distribution holes 61. This ensures that the gas can be evenly discharged downward from the second exhaust hole 31 and the first exhaust hole 22, thereby ensuring the uniformity of exhaust.

[0060] The implementation principle of a spray head in this application embodiment is as follows: a hydraulic drive device drives a drive column 41 to translate along a sliding groove 23. When the drive column 41 moves laterally, it drives an adjusting plate 3 to rotate, thereby adjusting the overlap range (exhaust channel) of the first exhaust hole 22 and the second exhaust hole 31. This adjusts the cross-sectional area of ​​the exhaust channel of the entire spray head, thereby controlling the exhaust rate and pressure difference. Because the drive column 41 and the adjusting plate 3 are driven by drive teeth 42 and driven teeth 43, the transmission ratio between them is constant. This allows the rotation angle of the adjusting plate 3 to be precisely controlled by the translation distance of the drive column 41, thus precisely controlling the gas spraying parameters. The sprayed gas directly enters the deposition chamber for use, ensuring that the gas can meet the needs of different processes, that is, ensuring uniform delivery while meeting the requirements of other gas parameters. At the same time, the combination of the first sealing component 51 and the second sealing component 52 in the sealing mechanism 5 ensures the sealing effect.

[0061] This application also provides a thin film deposition apparatus, as shown in the reference. Figure 8 and Figure 9As shown, it includes the aforementioned spray head and a deposition chamber 7. The spray head is mounted on the deposition chamber 7, and a deposition platform 8 is positioned below the spray head. A suction ring 9 is positioned below the deposition platform 8. By employing the spray head, the exhaust terminal can be used to control the steam injection parameters. Specifically, by positioning the suction ring 9 below the deposition platform 8, the gas ejected from the spray head is blocked by the deposition platform 8 when it is drawn out by the suction ring 9, thus ensuring the deposition effect and accelerating the deposition efficiency. Simultaneously, the suction rate of the suction ring 9 can be adjusted to assist in adjusting other pressures and flow rates in the vapor deposition chamber 7, thereby further improving the overall applicability of the thin film deposition apparatus.

[0062] Combination Figure 10 As shown, in order to ensure uniform gas purging of the deposition stage 8, the extraction ring 9 is provided with several extraction channels 91 at equal intervals along its circumference. The extraction channels 91 are spirally arranged around the extraction ring 9, so that when the gas passes through the extraction channel 91 of the spiral chamber, the gas in the deposition chamber 7 will rotate slightly, thereby ensuring the uniformity of the internal gas pressure and preventing the formation of dead zones, thus ensuring the gas phase deposition effect. In addition, the diameter of the extraction channel 91 gradually decreases along the airflow direction, that is, ensuring the initial cross-sectional area of ​​the extraction channel 91, thereby preventing the flow velocity from being too high and ensuring pressure stability. At the same time, the gradually shrinking extraction channel 91 can reduce the gas jet velocity, thereby ensuring that the extraction does not backflow.

[0063] The above are all preferred embodiments of this application, and are not intended to limit the scope of protection of this application. Therefore, all equivalent changes made in accordance with the structure, shape and principle of this application should be covered within the scope of protection of this application.

Claims

1. A spray head, characterized in that: Includes a top cover (1), on which an air inlet (11) is provided; A base (2) is provided with a horizontal exhaust section (21), and the exhaust section (21) is provided with a plurality of first exhaust holes (22); Adjustment plate (3), the bottom of the adjustment plate (3) and the top of the exhaust part (21) are sealed together, and the adjustment plate (3) is provided with a plurality of second exhaust holes (31), and the first exhaust hole (22) and the second exhaust hole (31) are provided one to one; The driving mechanism (4) includes a driving column (41), a sliding groove (23) for sliding the driving column (41) is formed on the base (2), a connecting groove (24) for the adjusting plate (3) to extend into the sliding groove (23) is provided on the inner side wall of the base (2), a driving tooth (42) is provided on the side wall of the driving column (41), and a driven tooth (43) that meshes with the driving tooth (42) is provided on the side wall of the adjusting plate (3). When the driving column (41) moves laterally, it drives the adjusting plate (3) to rotate, thereby adjusting the overlap range of the first exhaust hole (22) and the second exhaust hole (31). A sealing mechanism (5) is provided between the drive column (41) and the sliding groove (23) for sealing. The sealing mechanism includes a first sealing component (51) provided on the side wall of the sliding groove (23) on both sides of the connecting groove (24) and a second sealing component (52) provided at both ends of the drive column (41). The first sealing assembly (51) includes a first sealing groove disposed on the inner wall of the sliding groove (23), and a plurality of stacked first sealing rings (511) are disposed in the first sealing groove. The cross-section of the first sealing ring (511) is V-shaped, and the tip of the cross-section of the first sealing ring (511) points away from the communicating groove (24).

2. A spray head according to claim 1, characterized in that: Both ends of the sliding groove (23) are provided with oil inlets (44) for connecting hydraulic drive devices.

3. A spray head according to claim 1, characterized in that: The second sealing assembly (52) includes a second sealing ring (521), a third sealing ring (522) and a fourth sealing ring (523) arranged sequentially along the end of the drive column (41) to the center.

4. A spray head according to claim 3, characterized in that: The second sealing ring (521) includes an inner connecting portion (5211) sleeved on the drive column (41), and an outer connecting portion (5212) is provided on the inner connecting portion (5211). The outer connecting portion (5212) gradually moves away from the inner connecting portion (5211) in the direction close to the end of the drive column (41) so that an opening is formed between the inner connecting portion (5211) and the outer connecting portion (5212). The opening faces the end of the drive column (41), and an elastic metal skeleton (5213) is provided in the outer connecting portion (5212).

5. A spray head according to claim 3, characterized in that: The third sealing ring (522) includes a base layer (5221) and a wear-resistant layer (5222) disposed on the surface of the base layer (5221).

6. A spray head according to claim 3, characterized in that: The cross-section of the fourth sealing ring (523) is Z-shaped.

7. A thin film deposition apparatus, characterized in that: Includes a spray head as described in any one of claims 1-6, and a sedimentation chamber (7), wherein the spray head is disposed on the sedimentation chamber (7), a sedimentation platform (8) is disposed below the spray head, and an air extraction ring (9) is disposed below the sedimentation platform (8).

8. A thin film deposition apparatus according to claim 7, characterized in that: The suction ring (9) is provided with a plurality of suction channels (91) at intervals. The suction channels (91) are spirally arranged around the suction ring (9) axially, and the diameter of the suction channels (91) gradually decreases along the airflow direction.

Images