Micro-motor pressure sensitive chip self-diagnosis calibration device and method, and electronic equipment

Abstract

The invention relates to the field of micro electro mechanical systems, and provides a micro motor pressure sensitive chip self-diagnosis calibration device and method, and electronic equipment, the device comprises a sintering base, a first end of the sintering base is provided with a groove, and a second end of the sintering base is uniformly provided with a plurality of insulator holes; the plurality of insulators are respectively arranged in the plurality of insulator holes of the sintering base; the plurality of conductors are of columnar structures; the tangential section of the insulator is annular, and the conductor and the insulator are concentrically arranged in the insulator hole of the sintering base; the circuit module is arranged at the second end of the sintering base and is connected with the sintering base through a conductor; and a micro-motor pressure sensitive chip to be calibrated is arranged in the groove at the first end of the sintering base. The self-diagnosis calibration device and method are used for overcoming the defects that in the related technology, on-site online calibration cannot be achieved in the installed state of a pressure sensitive chip, and precision is affected, and the scheme of the invention provides the self-diagnosis calibration device and method which can conduct convenient and rapid self-diagnosis and calibration on the pressure sensitive chip.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of micro-electro-mechanical systems, and in particular to a micro-electro-mechanical pressure-sensitive chip self-diagnosis calibration device and method and electronic equipment. BACKGROUND

[0002] Micro-Electro-Mechanical System (MEMS), also known as micro-electro-mechanical system, micro system, micro machine, etc., refers to a high-tech device with a size of a few millimeters or even smaller. The internal structure of the micro-electro-mechanical system is generally in microns or even nanometers, and is an independent intelligent system.

[0003] The micro-electro-mechanical pressure sensor, also known as a micro-electro-mechanical pressure-sensitive chip, combines advanced micro-electronic technology and precise micro-machining technology. The chip made of traditional semiconductor materials such as single crystal silicon wafer is used as the main part by combining micro-mechanical structure and electronic circuit. The pressure is measured by detecting physical changes or charge accumulation, and then converted into an electrical signal for processing, so as to realize sensitive monitoring and accurate conversion of pressure changes.

[0004] However, the pressure-sensitive chip in the related art cannot provide a pressure source in the installed state, and cannot realize online calibration on site. Therefore, it is necessary to periodically disassemble and calibrate in the laboratory. In particular, after long-term use, drift may occur due to stress release, material creep, etc., affecting the accuracy.

[0005] Therefore, there is an urgent need for a device and method that can conveniently and quickly diagnose and calibrate the micro-electro-mechanical pressure-sensitive chip. SUMMARY

[0006] The present application provides a micro-electro-mechanical pressure-sensitive chip self-diagnosis calibration device and method, and electronic equipment, to solve the defect that the pressure-sensitive chip in the related art cannot realize online calibration on site in the installed state, and therefore needs to be periodically disassembled and calibrated in the laboratory. In particular, after long-term use, drift may occur due to stress release, material creep, etc., affecting the accuracy. The present application provides a self-diagnosis calibration device and method, which can conveniently and quickly diagnose and calibrate the pressure-sensitive chip.

[0007] The present application provides a micro-electro-mechanical pressure-sensitive chip self-diagnosis calibration device, comprising: A sintered base, a groove is provided at a first end of the sintered base, and a plurality of insulator holes are uniformly provided at a second end of the sintered base; A plurality of insulators, the insulators are columnar structures, and the plurality of insulators are respectively arranged in the plurality of insulator holes of the sintered base; A plurality of conductors, the conductors are columnar structures; The tangential section of the insulator is annular, and the conductor and the insulator are concentrically arranged in the insulator hole of the sintered base; A circuit module is arranged at the second end of the sintered base and is connected to the sintered base through the conductor; The micro motor pressure sensitive chip to be calibrated is arranged in the groove at the first end of the sintered base.

[0008] The micro motor pressure sensitive chip self-diagnosis calibration device provided by the application further comprises an insulating gasket; The insulating gasket is arranged between the circuit module and the sintered base.

[0009] The micro motor pressure sensitive chip self-diagnosis calibration device provided by the application further comprises a diaphragm; The diaphragm is arranged at the first end of the sintered base and is used for deforming under the triggering of an external pressure signal and transmitting the deformation to the micro motor pressure sensitive chip to be calibrated.

[0010] The micro motor pressure sensitive chip self-diagnosis calibration device provided by the application, the groove at the first end of the sintered base is filled with silicone oil; The deformation of the diaphragm under the triggering of the external pressure signal is transmitted to the micro motor pressure sensitive chip to be calibrated through the silicone oil.

[0011] The micro motor pressure sensitive chip self-diagnosis calibration device provided by the application, the conductor comprises a first conductor, and a bonding surface of the micro motor pressure sensitive chip to be calibrated is connected to the first conductor through a first conductor wire.

[0012] The micro motor pressure sensitive chip self-diagnosis calibration device provided by the application, the conductor further comprises a second conductor, a first end of the micro motor pressure sensitive chip to be calibrated is connected to the second conductor through a second conductor wire, and the first end of the micro motor pressure sensitive chip is an end close to the diaphragm.

[0013] The micro motor pressure sensitive chip self-diagnosis calibration device provided by the application, the first conductor wire and the second conductor wire are gold wires.

[0014] The application further provides a micro motor pressure sensitive chip self-diagnosis calibration method applied to any one of the micro motor pressure sensitive chip self-diagnosis calibration devices and comprising the following steps: A specific voltage and polarity are applied to the micro motor pressure sensitive chip to be calibrated through the circuit module, and a feedback signal of the micro motor pressure sensitive chip to be calibrated is acquired; The feedback signal is compared with a standard pressure value set in advance; When the comparison result shows that the micro electromechanical pressure sensitive chip to be calibrated has a fault, an alarm is given, and the micro electromechanical pressure sensitive chip to be calibrated is calibrated according to the comparison result.

[0015] The application further provides an electronic device, including a memory, a processor and a computer program stored in the memory and executable on the processor, and the processor implements the micro electromechanical pressure sensitive chip self-diagnosis calibration method according to the computer program.

[0016] The application further provides a non-transitory computer readable storage medium, which stores a computer program, and the computer program is executable on a processor to implement the micro electromechanical pressure sensitive chip self-diagnosis calibration method.

[0017] The application further provides a computer program product, which includes a computer program, and the computer program is executable on a processor to implement the micro electromechanical pressure sensitive chip self-diagnosis calibration method.

[0018] The micro electromechanical pressure sensitive chip self-diagnosis calibration device provided by the application controls the voltage and polarity of the specific pin of the intelligent MEMS pressure sensitive chip through the circuit module, changes the reference pressure of the intelligent MEMS pressure sensitive chip, and performs online self-diagnosis, self-compensation and self-calibration with the pressure as a reference. The sensor can be calibrated online without disassembly, and the sensor can be diagnosed, calibrated and compensated at any time, thereby improving the use reliability and service life and reducing the maintenance cost. BRIEF DESCRIPTION OF DRAWINGS

[0019] In order to more clearly illustrate the technical solutions of the present application or the prior art, the following will briefly introduce the drawings needed to be used in the embodiments or prior art description. Obviously, the drawings in the following description are some embodiments of the present application, and other drawings can also be obtained by those skilled in the art without creative labor.

[0020] Figure 1 is one of the structural schematic diagrams of the micro electromechanical pressure sensitive chip self-diagnosis calibration device provided by the embodiments of the application; Figure 2 is the second structural schematic diagram of the micro electromechanical pressure sensitive chip self-diagnosis calibration device provided by the embodiments of the application; Figure 3 is the third structural schematic diagram of the micro electromechanical pressure sensitive chip self-diagnosis calibration device provided by the embodiments of the application; Figure 4 is the structural explosion diagram of the micro electromechanical pressure sensitive chip self-diagnosis calibration device provided by the embodiments of the application; Figure 5is a structural schematic diagram of a micro motor pressure sensitive chip provided by an embodiment of the present application; Figure 6 is a flow schematic diagram of a self-diagnosis calibration method of a micro motor pressure sensitive chip provided by an embodiment of the present application; Figure 7 is a physical structure schematic diagram of an electronic device provided by an embodiment of the present application.

[0021] wherein: 1 - diaphragm; 2 - micro motor pressure sensitive chip; 3 - sintered base; 4 - conductor; 5 - insulator; 6 - insulating gasket; 7 - circuit module; 8 - first bonding surface; 9 - second bonding surface; 10 - first conductor line; 11 - third bonding surface; 12 - fourth bonding surface; 13 - second conductor line. DETAILED DESCRIPTION

[0022] To make the objectives, technical solutions and advantages of the present application clearer, the technical solutions in the present application will be described clearly and completely below with reference to the drawings in the present application. Obviously, the described embodiments are some embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor fall within the protection scope of the present application.

[0023] As shown in Figures 1 to 5 , the present embodiment provides a micro motor pressure sensitive chip self-diagnosis calibration device, which comprises: a sintered base, a first end of the sintered base is provided with a groove, and a second end of the sintered base is uniformly provided with a plurality of insulator holes; a plurality of insulators, the insulators are columnar structures, and the plurality of insulators are respectively arranged in the plurality of insulator holes of the sintered base; a plurality of conductors, the conductors are columnar structures; a tangential section of the insulator is annular, and the conductor and the insulator are concentrically arranged in the insulator hole of the sintered base; a circuit module, arranged at the second end of the sintered base, connected with the sintered base through the conductor; a micro motor pressure sensitive chip to be calibrated is arranged in the groove of the first end of the sintered base.

[0024] In the exemplary embodiment, an insulating gasket is further included; the insulating gasket is arranged between the circuit module and the sintered base.

[0025] In the exemplary embodiment, a diaphragm is further included; The diaphragm is arranged at the first end of the sintering base, and is used to generate deformation under the triggering of an external pressure signal and transmit the deformation to the micro-motor pressure-sensitive chip to be calibrated.

[0026] In an exemplary embodiment, the groove at the first end of the sintering base is filled with silicone oil. The deformation of the diaphragm under the triggering of the external pressure signal is transmitted to the micro-motor pressure-sensitive chip to be calibrated through the silicone oil.

[0027] In an exemplary embodiment, the conductor includes a first conductor, and the bonding surface of the micro-motor pressure-sensitive chip to be calibrated is connected to the first conductor through a first conductor wire.

[0028] In an exemplary embodiment, the conductor further includes a second conductor, and the first end of the micro-motor pressure-sensitive chip to be calibrated is connected to the second conductor through a second conductor wire, and the first end of the micro-motor pressure-sensitive chip to be calibrated is the end close to the diaphragm.

[0029] In an exemplary embodiment, the first conductor wire and the second conductor wire are gold wires.

[0030] In a specific embodiment, the sintering base is fixed with eight conductors through an insulator, and sealed by sintering. Four of the eight conductors are used for pressure signal transmission, which can be referred to as first conductors, two are used for controlling heating voltage, and two are used for controlling pump oxygen voltage and polarity. The control of heating voltage and the control of pump oxygen voltage and polarity can be referred to as second conductors. The micro-motor pressure-sensitive chip to be calibrated is fixedly connected to the lower surface of the sintering base in a gluing manner. The bonding surface on the micro-motor pressure-sensitive chip to be calibrated is connected and conducted to the conductor through a gold wire. The insulating gasket is fixed on the upper surface of the sintering base by gluing. The circuit module is fixed on the insulating gasket in a gluing manner, and is fixed with the conductor by soldering.

[0031] The micro-motor pressure-sensitive chip self-diagnosis calibration method provided by the present application is described below, and the micro-motor pressure-sensitive chip self-diagnosis calibration method described below can be correspondingly referred to the micro-motor pressure-sensitive chip self-diagnosis calibration device described above.

[0032] As shown in Figure 6 The micro-motor pressure-sensitive chip self-diagnosis calibration method provided by the present application includes: Step 601, applying a specific voltage and polarity to the micro-motor pressure-sensitive chip to be calibrated through the circuit module, and obtaining a feedback signal of the micro-motor pressure-sensitive chip to be calibrated; Step 602, comparing the feedback signal with a set standard pressure value; Step 603, when the comparison result shows that the micro-motor pressure sensitive chip to be calibrated has a fault, an alarm is given, and the comparison result is used to calibrate the micro-motor pressure sensitive chip to be calibrated.

[0033] Specifically, when the above method is applied for self-diagnosis, the circuit module can give a fixed voltage to the second conductor connected to the third bonding surface and the fourth bonding surface, and the temperature of the intelligent micro-motor pressure sensitive chip to be calibrated is raised and stabilized for a period of time; the circuit module supplies several groups of voltages and polarities to the first conductor connected to the first bonding surface and the second bonding surface; the output pressure value is collected and compared with the preset standard pressure value, and when the difference exceeds a certain amount, an alarm is given.

[0034] When the self-diagnosis alarm is given, the difference between the output feedback signal, i.e., the pressure value, and the preset standard pressure value can be calculated, and the difference is corrected through the pre-set compensation curve, and the self-diagnosis process is repeated until no alarm is given.

[0035] In addition to the above self-diagnosis and self-compensation, the device and method provided by the application can also perform self-calibration. Specifically, the circuit module can give a fixed voltage to the second conductor connected to the third bonding surface and the fourth bonding surface, and the temperature of the micro-motor pressure sensitive chip to be calibrated is raised and stabilized for a period of time; the circuit module supplies several groups of voltages and polarities to the first conductor connected to the first bonding surface and the second bonding surface; the output pressure value is collected and compared with the preset standard pressure value, and when the difference exceeds a certain amount, an alarm is given.

[0036] Figure 7 An example of a schematic diagram of the physical structure of an electronic device is shown in Figure 7 As shown, the electronic device can include a processor 710, a communications interface 720, a memory 730, and a communications bus 740, wherein the processor 710, the communications interface 720, and the memory 730 complete mutual communication through the communications bus 740. The processor 710 can call the logical instructions in the memory 730 to execute the micro-motor pressure sensitive chip self-diagnosis and calibration method, which includes: The circuit module applies a specific voltage and polarity to the micro-motor pressure sensitive chip to be calibrated, and obtains the feedback signal of the micro-motor pressure sensitive chip to be calibrated; The feedback signal is compared with the set standard pressure value; When the comparison result shows that the micro-motor pressure sensitive chip to be calibrated has a fault, an alarm is given, and the comparison result is used to calibrate the micro-motor pressure sensitive chip to be calibrated.

[0037] Moreover, the logic instructions in the memory 730 described above can be implemented in the form of software function units and sold or used as independent products, and can be stored in a computer readable storage medium. Based on such understanding, the technical solutions of the present application essentially or the parts that contribute to the prior art or parts of the technical solutions can be embodied in the form of a software product. The computer software product is stored in a storage medium, and includes several instructions for causing a computer device (which can be a personal computer, a server, or a network device, etc.) to execute all or part of the steps of the embodiments of the method of the present application. The aforementioned storage medium includes: a U disk, a mobile hard disk, a read-only memory (ROM, Read-Only Memory), a random access memory (RAM, Random Access Memory), a magnetic disk or an optical disk, and various media that can store program codes.

[0038] In another aspect, the present application also provides a computer program product, the computer program product comprising a computer program, the computer program being stored in a non-transitory computer readable storage medium, and the computer program being executable by a processor to cause a computer to execute the self-diagnosis and calibration method of the micro motor pressure sensitive chip provided by the above-mentioned methods, the method comprising: applying a specific voltage and polarity to the micro motor pressure sensitive chip to be calibrated by a circuit module, and obtaining a feedback signal of the micro motor pressure sensitive chip to be calibrated; comparing the feedback signal with a set standard pressure value; when the comparison result shows that the micro motor pressure sensitive chip to be calibrated has a fault, an alarm is given, and the comparison result is used to calibrate the micro motor pressure sensitive chip to be calibrated.

[0039] In another aspect, the present application also provides a non-transitory computer readable storage medium having a computer program stored thereon, the computer program being executable by a processor to implement the self-diagnosis and calibration method of the micro motor pressure sensitive chip provided by the above-mentioned methods, the method comprising: applying a specific voltage and polarity to the micro motor pressure sensitive chip to be calibrated by a circuit module, and obtaining a feedback signal of the micro motor pressure sensitive chip to be calibrated; comparing the feedback signal with a set standard pressure value; when the comparison result shows that the micro motor pressure sensitive chip to be calibrated has a fault, an alarm is given, and the comparison result is used to calibrate the micro motor pressure sensitive chip to be calibrated.

[0040] The device embodiments described above are merely illustrative, wherein the units illustrated as separate components can or can not be physically separated, and the components illustrated as units can or can not be physical units, i.e., can be located in one place, or can be distributed to multiple network units. Part or all of the modules can be selected to achieve the purposes of the embodiments according to actual needs. Those skilled in the art can understand and implement without creative labor.

[0041] Through the description of the above embodiments, those skilled in the art can clearly understand that the embodiments can be realized by means of software and the necessary general hardware platform, and of course can also be realized by hardware. Based on such understanding, the above technical solutions can be embodied in the form of software products, and the computer software products can be stored in a computer readable storage medium, such as ROM / RAM, magnetic disk, optical disk, etc., and include a plurality of instructions to make a computer device (which can be a personal computer, a server, or a network device, etc.) execute the methods of the embodiments or some parts of the embodiments.

[0042] Finally, it should be noted that: the above embodiments are only used to illustrate the technical solutions of the present application, and not to limit them; although the present application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that: it can still modify the technical solutions recorded in the foregoing embodiments, or make equivalent replacement to some technical features; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the spirit and scope of the technical solutions of the embodiments of the present application.

Claims

1. A self-diagnostic calibration device for a micro-motor pressure-sensitive chip, characterized in that, include: A sintered base, wherein a groove is provided at the first end of the sintered base and a plurality of insulator holes are uniformly provided at the second end; A plurality of insulators, wherein the insulators are columnar structures, and the plurality of insulators are respectively disposed in the plurality of insulator holes of the sintering base; Several conductors, wherein the conductors have a columnar structure; The tangential cross-section of the insulator is annular, and the conductor and the insulator are concentrically arranged in the insulator hole of the sintered base; A circuit module is disposed at the second end of the sintered base and is connected to the sintered base through the conductor; The micro-motor pressure-sensitive chip to be calibrated is placed in a groove at the first end of the sintered base.

2. The self-diagnostic calibration device for micro-motor pressure-sensitive chips according to claim 1, characterized in that, It also includes insulating gaskets; The insulating pad is disposed between the circuit module and the sintered base.

3. The self-diagnostic calibration device for micro-motor pressure-sensitive chips according to claim 1, characterized in that, It also includes diaphragms; The diaphragm is disposed at the first end of the sintering base and is used to generate deformation under the triggering of an external pressure signal, and to transmit the deformation to the micro-motor pressure-sensitive chip to be calibrated.

4. The self-diagnostic calibration device for micro-motor pressure-sensitive chips according to claim 3, characterized in that, The groove at the first end of the sintering base is filled with silicone oil; The deformation of the diaphragm triggered by an external pressure signal is transmitted to the micro-motor pressure-sensitive chip to be calibrated through the silicone oil.

5. The self-diagnostic calibration device for micro-motor pressure-sensitive chips according to claim 3, characterized in that, The conductor includes a first conductor, and the bonding surface of the micro-motor pressure-sensitive chip to be calibrated is connected to the first conductor via a first conductor line.

6. The self-diagnostic calibration device for micro-motor pressure-sensitive chips according to claim 5, characterized in that, The conductor also includes a second conductor, and the first end of the micro-motor pressure-sensitive chip to be calibrated is connected to the second conductor through a second conductor line. The first end of the micro-motor pressure-sensitive chip is the end closest to the diaphragm.

7. The self-diagnostic calibration device for a micro-motor pressure-sensitive chip according to claim 6, characterized in that, The first conductor wire and the second conductor wire are gold wires.

8. A self-diagnostic calibration method for a micro-motor pressure-sensitive chip, applied to the self-diagnostic calibration device for a micro-motor pressure-sensitive chip as described in any one of claims 1-7, characterized in that, include: A specific voltage and polarity are applied to the micro-motor pressure-sensitive chip to be calibrated through the circuit module, and the feedback signal of the micro-motor pressure-sensitive chip to be calibrated is obtained. Compare the feedback signal with the set standard pressure value; When the comparison result shows that the micro motor pressure-sensitive chip to be calibrated is faulty, an alarm is triggered, and the comparison result is used to calibrate the micro motor pressure-sensitive chip to be calibrated.

9. An electronic device comprising a memory, a processor, and a computer program stored in the memory and executable on the processor, characterized in that, When the processor executes the program, it implements the self-diagnostic calibration method for the micro-motor pressure-sensitive chip as described in claim 8.

10. A non-transitory computer-readable storage medium having a computer program stored thereon, which, when executed by a processor, implements the self-diagnostic calibration method for a micro-motor pressure-sensitive chip as described in claim 8.

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