Cooperative control and vibration suppression method of MEMS micromirror array in OCS

Abstract

The application discloses a method for cooperative control and vibration suppression of a MEMS micromirror array in an OCS, and relates to the technical field of the MEMS micromirror array, and the technical solution points of the method comprise the following steps: obtaining preset operation parameters and environment interference reference data of the MEMS micromirror array; constructing a MEMS micromirror array control map after processing the preset operation parameters and the environment interference reference data; obtaining real-time operation data of the MEMS micromirror array, and extracting micromirror real-time attitude features and environment real-time interference features of the real-time operation data; inputting the micromirror real-time attitude features into a micromirror cooperative control layer to obtain inter-mirror cooperative deviation coefficients, and judging first control effect features according to the inter-mirror cooperative deviation coefficients, so that the control precision of the MEMS micromirror array can be effectively improved.

Description

Technical Field

[0001] This invention relates to the field of MEMS micromirror array technology, and more specifically, to a method for the coordinated control and vibration suppression of MEMS micromirror arrays in OCS. Background Technology

[0002] In the field of OCS (Optical Communication Systems, etc.), MEMS micromirror arrays are widely used in lidar, optical projection, and optical switching due to their high integration and fast response advantages. However, existing methods require multiple micromirrors in the array to coordinate in terms of pointing angle and response timing. Insufficient coordination between mirrors can lead to optical signal pointing deviation, image blurring, or communication link interruption. Simultaneously, mechanical vibrations and electromagnetic noise in industrial environments can cause unexpected attitude shifts in the micromirrors, reducing system accuracy and stability. Traditional control methods often employ a single control loop, combining coordinated control with vibration suppression, lacking targeted hierarchical design, resulting in limited control accuracy. Furthermore, traditional methods do not provide sufficiently detailed modeling of preset parameters and environmental disturbances, lack control maps based on reference data, and rely on empirical parameter adjustments during real-time control, leading to poor adaptability and robustness. Summary of the Invention

[0003] In view of the shortcomings of the existing technology, the purpose of this invention is to provide a method for the coordinated control and vibration suppression of MEMS micromirror arrays in OCS.

[0004] To achieve the above objectives, the present invention provides the following technical solution:

[0005] A method for coordinated control and vibration suppression of MEMS micromirror arrays in OCS, comprising the following steps:

[0006] Acquire the preset operating parameters and environmental interference benchmark data of the MEMS micromirror array;

[0007] After processing the preset operating parameters and environmental interference benchmark data, a control map of the MEMS micromirror array is constructed.

[0008] Acquire real-time operating data of MEMS micromirror arrays, and extract real-time attitude features of micromirrors and real-time environmental interference features from the real-time operating data;

[0009] The real-time attitude features of the micromirrors are input into the micromirror collaborative control layer to obtain the inter-mirror collaborative deviation coefficient. The first control effect feature is determined based on the inter-mirror collaborative deviation coefficient. The real-time environmental disturbance features are input into the vibration suppression layer to obtain the vibration disturbance suppression coefficient. The second control effect feature is determined based on the vibration disturbance suppression coefficient.

[0010] The control parameters are obtained by processing and analyzing the first and second control effect characteristics.

[0011] Preferably, the preset operating parameters include the target pointing angle of the micromirror array, the inter-mirror spacing, and the cooperative response threshold;

[0012] The environmental interference reference data includes mechanical vibration reference amplitude and environmental noise reference frequency.

[0013] Preferably, the control map of the MEMS micromirror array is constructed after processing the preset operating parameters and environmental interference reference data, specifically including the following steps:

[0014] Micromirror synergy factors and factor interaction features are generated based on preset operating parameters, and a micromirror synergy control layer is constructed based on the micromirror synergy factors and factor interaction features.

[0015] An interference suppression factor is generated based on environmental interference baseline data, and a vibration suppression layer is constructed based on the interference suppression factor. A MEMS micromirror array control map is constructed by combining the micromirror collaborative control layer and the vibration suppression layer.

[0016] Preferably, the micromirror synergy factors and factor interaction features are generated based on preset operating parameters, and a micromirror synergy control layer is constructed based on the micromirror synergy factors and factor interaction features, specifically including the following steps:

[0017] Generate a corresponding micromirror synergy factor based on each micromirror in the MEMS micromirror array.

[0018] Based on the target pointing angle, inter-mirror spacing and collaborative response threshold in the preset operating parameters, the collaborative factor feature corresponding to each micromirror collaborative factor is generated;

[0019] The interaction relationships between micromirror synergistic factors are determined based on the inter-mirror spacing and synergistic response threshold, forming factor interaction characteristics.

[0020] A micromirror collaborative control layer is constructed based on all micromirror collaborative factors and factor interaction characteristics.

[0021] Preferably, an interference suppression factor is generated based on environmental interference benchmark data, and a vibration suppression layer is constructed based on the interference suppression factor; a MEMS micromirror array control map is constructed by combining the micromirror collaborative control layer and the vibration suppression layer, specifically including the following steps:

[0022] Based on the mechanical vibration reference amplitude and environmental noise reference frequency in the environmental interference reference data, a corresponding interference suppression factor is generated;

[0023] Based on the mechanical vibration reference amplitude, a vibration suppression threshold feature is set, and based on the environmental noise reference frequency, a noise filtering feature is set to form a suppression factor feature corresponding to the interference suppression factor.

[0024] A vibration suppression layer is constructed based on the interference suppression factor and the characteristics of the corresponding suppression factor.

[0025] The micromirror cooperative control layer and vibration suppression layer in the MEMS micromirror array control map regulate the cooperative state and vibration state of the MEMS micromirror array.

[0026] Preferably, acquiring real-time operational data of the MEMS micromirror array and extracting the real-time attitude features of the micromirrors and the real-time environmental interference features from the real-time operational data specifically includes the following steps:

[0027] The attitude features of the micromirrors are extracted from the real-time operating data based on the target pointing angle and inter-mirror spacing in the preset operating parameters; wherein, the real-time attitude features of the micromirrors include the real-time pointing angle, real-time spacing and response delay of each micromirror.

[0028] Based on the mechanical vibration reference amplitude and environmental noise reference frequency in the environmental interference reference data, interference features are extracted from the real-time operation data to obtain real-time environmental interference features, wherein the real-time environmental interference features include real-time vibration amplitude and real-time noise frequency.

[0029] Preferably, the real-time attitude features of the micromirrors are input into the micromirror collaborative control layer to obtain the inter-mirror collaborative deviation coefficient, and the first control effect feature is determined based on the inter-mirror collaborative deviation coefficient; the real-time environmental disturbance features are input into the vibration suppression layer to obtain the vibration disturbance suppression coefficient, and the second control effect feature is determined based on the vibration disturbance suppression coefficient, specifically including the following steps:

[0030] Real-time collaboration factors are generated based on the real-time attitude features of the micromirror, and corresponding real-time collaboration factor features are generated based on the real-time attitude features of the micromirror. The real-time collaboration factors are input into the micromirror collaboration control layer and matched with the micromirror collaboration factors in the micromirror collaboration control layer to obtain the collaboration matching degree.

[0031] The micromirror synergy factor with the highest synergy matching degree is used as the benchmark synergy factor. The deviation feature term is obtained by comparing the synergy factor features of the real-time synergy factor with the synergy factor features of the benchmark synergy factor.

[0032] Set the weight values ​​corresponding to each synergistic factor feature, and sum the weight values ​​corresponding to the deviation feature items to obtain the inter-mirror synergistic deviation coefficient.

[0033] If the inter-mirror coordination deviation coefficient is less than the preset coordination deviation threshold, then the first control effect feature is qualified.

[0034] If the inter-mirror coordination deviation coefficient is greater than or equal to the preset coordination deviation threshold, then the first control effect feature is unqualified.

[0035] Real-time interference factors are generated based on real-time environmental interference characteristics, and corresponding real-time interference factor features are generated based on these characteristics. The real-time interference factors are then input into the vibration suppression layer and matched with the interference suppression factors in the vibration suppression layer to obtain the interference matching degree.

[0036] The interference exceeding the threshold feature term is obtained by comparing the real-time interference factor features with the inhibition factor features of the interference inhibition factor.

[0037] Set the weight value corresponding to each suppression factor feature, and accumulate the weight values ​​corresponding to the interference exceeding the threshold feature to obtain the vibration interference suppression coefficient;

[0038] If the vibration interference suppression coefficient is less than the preset interference suppression threshold, then the second control effect characteristic is qualified;

[0039] If the vibration interference suppression coefficient is greater than or equal to the preset interference suppression threshold, then the second control effect characteristic is unqualified.

[0040] Preferably, the control parameters are obtained by processing and analyzing the first control effect characteristics and the second control effect characteristics;

[0041] The overall control accuracy of the MEMS micromirror array is determined based on the first and second control effect characteristics.

[0042] If the overall control accuracy meets the preset accuracy threshold, the current control parameters are maintained; if the overall control accuracy does not meet the preset accuracy threshold, the control parameters are adjusted based on the inter-mirror cooperative deviation coefficient and the vibration interference suppression coefficient.

[0043] Preferably, if the overall control accuracy does not meet the preset accuracy threshold, the control parameters are adjusted based on the inter-mirror coordination deviation coefficient and the vibration interference suppression coefficient, specifically including the following steps:

[0044] If the first control effect characteristic is not qualified, the driving voltage and response delay parameters of the micromirrors are adjusted according to the inter-mirror coordination deviation coefficient to optimize the inter-mirror coordination state.

[0045] If the second control effect characteristic is not qualified, adjust the filter parameters and vibration damping parameters according to the vibration interference suppression coefficient to enhance the vibration suppression effect;

[0046] If both control effect characteristics fail to meet the requirements, the corresponding control parameters will be adjusted synchronously until the overall control accuracy meets the preset accuracy threshold.

[0047] An electronic device includes a memory, a processor, and a computer program stored in the memory and executable on the processor, wherein the processor executes the program to implement a method for coordinated control and vibration suppression of a MEMS micromirror array in the OCS.

[0048] Compared with the prior art, the present invention has the following beneficial effects:

[0049] This invention achieves precise, layered control of the cooperative and vibration states of micromirror arrays by constructing a control map comprising a micromirror cooperative control layer and a vibration suppression layer. A control baseline model is established based on pre-defined operating parameters and environmental interference baseline data. Real-time micromirror attitude characteristics and environmental interference characteristics extracted from real-time operating data are input into the corresponding control layers to obtain inter-mirror cooperative deviation coefficients and vibration interference suppression coefficients. These are used to determine the control effect characteristics, and finally, the control parameters are adjusted accordingly. This effectively improves the control accuracy of MEMS micromirror arrays. The pre-defined operating parameters cover the target pointing angle, inter-mirror spacing, and cooperative response threshold of the micromirror array. The environmental interference baseline data includes mechanical vibration baseline amplitude and environmental noise baseline frequency. These parameters are customized according to different OCS application scenarios, promoting the further development of MEMS micromirror array technology in OCS. Attached Figure Description

[0050] Figure 1 This is a schematic diagram illustrating the steps of the collaborative control and vibration suppression method for MEMS micromirror arrays in OCS proposed in this invention;

[0051] Figure 2 This is a schematic diagram of the structure of the electronic device provided in an embodiment of the present invention.

[0052] 610. Processor; 620. Communication interface; 630. Memory; 640. Communication bus. Detailed Implementation

[0053] To make the above-mentioned objects, features and advantages of the present invention more apparent and understandable, the specific embodiments of the present invention will be described in detail below with reference to the accompanying drawings.

[0054] Many specific details are set forth in the following description in order to provide a full understanding of the invention. However, the invention may also be practiced in other ways different from those described herein, and those skilled in the art can make similar extensions without departing from the spirit of the invention. Therefore, the invention is not limited to the specific embodiments disclosed below.

[0055] Secondly, the term "an embodiment" or "embodiment" as used herein refers to a specific feature, structure, or characteristic that may be included in at least one implementation of the present invention. The phrase "in one embodiment" appearing in different places throughout this specification does not necessarily refer to the same embodiment, nor is it a single embodiment or an embodiment selectively excluded from other embodiments.

[0056] Reference Figures 1-2 As shown.

[0057] The embodiments further illustrate the collaborative control and vibration suppression method of MEMS micromirror arrays in OCS proposed in this invention.

[0058] A method for coordinated control and vibration suppression of MEMS micromirror arrays in OCS, comprising the following steps:

[0059] Acquire the preset operating parameters and environmental interference benchmark data of the MEMS micromirror array;

[0060] After processing the preset operating parameters and environmental interference benchmark data, a control map of the MEMS micromirror array is constructed.

[0061] Acquire real-time operating data of MEMS micromirror arrays, and extract real-time attitude features of micromirrors and real-time environmental interference features from the real-time operating data;

[0062] The real-time attitude features of the micromirrors are input into the micromirror collaborative control layer to obtain the inter-mirror collaborative deviation coefficient. The first control effect feature is determined based on the inter-mirror collaborative deviation coefficient. The real-time environmental disturbance features are input into the vibration suppression layer to obtain the vibration disturbance suppression coefficient. The second control effect feature is determined based on the vibration disturbance suppression coefficient.

[0063] The control parameters are obtained by processing and analyzing the first and second control effect characteristics.

[0064] The preset operating parameters include the target pointing angle of the micromirror array, the inter-mirror spacing, and the cooperative response threshold;

[0065] Environmental interference reference data includes mechanical vibration reference amplitude and environmental noise reference frequency.

[0066] After processing the preset operating parameters and environmental interference baseline data, a control map of the MEMS micromirror array is constructed, which specifically includes the following steps:

[0067] Micromirror synergy factors and factor interaction features are generated based on preset operating parameters, and a micromirror synergy control layer is constructed based on the micromirror synergy factors and factor interaction features.

[0068] An interference suppression factor is generated based on environmental interference baseline data, and a vibration suppression layer is constructed based on the interference suppression factor. A MEMS micromirror array control map is constructed by combining the micromirror collaborative control layer and the vibration suppression layer.

[0069] A micromirror cooperative control layer is constructed by generating micromirror cooperative factors and factor interaction features based on preset operating parameters. These preset operating parameters include the target pointing angle, inter-mirror spacing, and cooperative response threshold of the micromirror array. For each micromirror, a corresponding micromirror cooperative factor is generated. For example, the cooperative factor for micromirror A is generated by combining its target pointing angle, inter-mirror spacing with surrounding micromirrors, and cooperative response threshold. Cooperative factor features corresponding to each micromirror cooperative factor are generated based on the target pointing angle, inter-mirror spacing, and cooperative response threshold. For example, when the target pointing angle is 45 degrees, the pointing feature of the micromirror cooperative factor expands around 45 degrees. The interaction relationships between micromirror cooperative factors are determined based on the inter-mirror spacing and cooperative response threshold, forming factor interaction features. For example, when the inter-mirror spacing is small and the cooperative response threshold is low, the interaction relationships between micromirrors are closer, and the factor interaction features will also reflect this closeness. A micromirror cooperative control layer is constructed based on all micromirror cooperative factors and factor interaction features. This layer is used for subsequent regulation of the cooperative state of the micromirror array.

[0070] An interference suppression factor is generated based on environmental interference reference data to construct a vibration suppression layer. The environmental interference reference data includes the reference amplitude of mechanical vibration and the reference frequency of environmental noise. Corresponding interference suppression factors are generated based on these data. For example, when the reference amplitude of mechanical vibration is 0.5 mm, the corresponding vibration suppression factor sets a suppression strategy for that amplitude; when the reference frequency of environmental noise is 1000 Hz, the corresponding noise suppression factor sets a filtering strategy for that frequency. A vibration suppression threshold feature is set based on the reference amplitude of mechanical vibration; for example, when the mechanical vibration amplitude exceeds 0.5 mm, the vibration suppression threshold feature triggers a corresponding suppression action. Noise filtering features are set based on the reference frequency of environmental noise; for example, specific filtering is applied to noise at 1000 Hz. A vibration suppression layer is constructed based on the interference suppression factor and its corresponding features. This layer is used for subsequent suppression and control of environmental interference.

[0071] A control map for MEMS micromirror arrays is constructed by combining a micromirror cooperative control layer and a vibration suppression layer. This control map integrates the control logic of both micromirror cooperative control and vibration suppression, providing a benchmark model for control decisions during real-time operation. For example, in lidar applications, the micromirror cooperative control layer ensures that multiple micromirrors can collaboratively point at different target angles, while the vibration suppression layer suppresses the interference of mechanical vibration and environmental noise during device operation on the pointing accuracy of the micromirrors. The combined control map allows the MEMS micromirror array to maintain a high-precision cooperative working state even in complex environments.

[0072] Based on preset operating parameters, micromirror synergy factors and factor interaction features are generated. A micromirror synergy control layer is then constructed based on these factors and features, specifically including the following steps:

[0073] Generate a corresponding micromirror synergy factor based on each micromirror in the MEMS micromirror array.

[0074] Based on the target pointing angle, inter-mirror spacing and collaborative response threshold in the preset operating parameters, the collaborative factor feature corresponding to each micromirror collaborative factor is generated;

[0075] The interaction relationships between micromirror synergistic factors are determined based on the inter-mirror spacing and synergistic response threshold, forming factor interaction characteristics.

[0076] A micromirror collaborative control layer is constructed based on all micromirror collaborative factors and factor interaction characteristics.

[0077] Each micromirror in a MEMS micromirror array generates a corresponding micromirror coordination factor. For example, in an array composed of multiple micromirrors, each micromirror has its unique coordination factor. The coordination factor characteristics corresponding to each micromirror coordination factor are generated based on the target pointing angle, inter-mirror spacing, and coordination response threshold in the preset operating parameters. The target pointing angle determines the directional characteristics of the micromirror coordination factor. For example, if the target pointing angle of a micromirror is 60 degrees, the pointing characteristics of its coordination factor are constructed around 60 degrees. The inter-mirror spacing affects the spatial correlation characteristics of the micromirror coordination factor. If the inter-mirror spacing between two micromirrors is small, their coordination factors will have a closer spatial interaction. The coordination response threshold determines the response timeliness characteristics of the micromirror coordination factor. The lower the coordination response threshold, the higher the requirement for response delay of the micromirror coordination factor.

[0078] The interaction relationships between micromirror coordinating factors are determined based on the intermirror spacing and the coordinating response threshold, forming factor interaction features. For example, when the intermirror spacing is small and the coordinating response threshold is low, the interaction relationships between micromirror coordinating factors are more frequent and sensitive, and the factor interaction features will reflect this strong association. Conversely, when the intermirror spacing is large or the coordinating response threshold is high, the interaction relationships between micromirror coordinating factors are relatively weak, and the factor interaction features will reflect this accordingly.

[0079] A micromirror cooperative control layer is constructed based on all micromirror cooperative factors and their interaction characteristics. This layer integrates the cooperative factors of each micromirror and their interrelationships, providing a model foundation for subsequent cooperative control of MEMS micromirror arrays. For example, in a MEMS micromirror array used for high-definition projection, the cooperative control layer ensures that each micromirror cooperates at the target pointing angle. Simultaneously, based on the inter-mirror spacing and cooperative response threshold settings, the interaction between micromirrors satisfies the requirements for the clarity and synchronization of the projected image, thereby achieving high-quality projection display.

[0080] An interference suppression factor is generated based on environmental interference baseline data, and a vibration suppression layer is constructed based on the interference suppression factor. A MEMS micromirror array control map is then constructed by combining the micromirror collaborative control layer and the vibration suppression layer, specifically including the following steps:

[0081] Based on the mechanical vibration reference amplitude and environmental noise reference frequency in the environmental interference reference data, a corresponding interference suppression factor is generated;

[0082] Based on the mechanical vibration reference amplitude, a vibration suppression threshold feature is set, and based on the environmental noise reference frequency, a noise filtering feature is set to form a suppression factor feature corresponding to the interference suppression factor.

[0083] A vibration suppression layer is constructed based on the interference suppression factor and the characteristics of the corresponding suppression factor.

[0084] The micromirror cooperative control layer and vibration suppression layer in the MEMS micromirror array control map regulate the cooperative state and vibration state of the MEMS micromirror array.

[0085] Interference suppression factors are generated based on the reference amplitude of mechanical vibration and the reference frequency of ambient noise from environmental interference reference data. For example, in an industrial environment, the reference amplitude of mechanical vibration is 0.3 mm and the reference frequency of ambient noise is 500 Hz. These vibration amplitudes and noise frequencies will generate specific interference suppression factors. A vibration suppression threshold feature is set based on the mechanical vibration reference amplitude, and a noise filtering feature is set based on the ambient noise reference frequency to form the suppression factor feature corresponding to the interference suppression factor. Assuming the reference amplitude of mechanical vibration is A, when the actual mechanical vibration amplitude exceeds A, the vibration suppression threshold feature will trigger corresponding suppression actions, such as increasing vibration damping. For the noise filtering feature, if the reference frequency of ambient noise is f, a specific filtering algorithm is designed for frequency f to filter noise at that frequency.

[0086] A vibration suppression layer is constructed based on the interference suppression factor and its corresponding characteristics. This layer integrates suppression logic for mechanical vibration and environmental noise, providing model support for subsequent vibration suppression of MEMS micromirror arrays.

[0087] In the MEMS micromirror array control map, the micromirror cooperative control layer and the vibration suppression layer work together to regulate the cooperative and vibrational states of the MEMS micromirror array. For example, in automotive LiDAR applications, the micromirror cooperative control layer ensures that multiple micromirrors cooperate to point at different detection angles, while the vibration suppression layer suppresses the interference of mechanical vibration and environmental noise during vehicle operation on the pointing accuracy of the micromirrors. The synergistic effect of the two allows the LiDAR to accurately detect the surrounding environment even under complex vehicle conditions.

[0088] Acquire real-time operational data of the MEMS micromirror array, and extract the real-time attitude features of the micromirrors and the real-time environmental interference features from the real-time operational data. This process includes the following steps:

[0089] The attitude features of the micromirrors are extracted from the real-time operating data based on the target pointing angle and inter-mirror spacing in the preset operating parameters. The real-time attitude features of the micromirrors include the real-time pointing angle, real-time spacing and response delay of each micromirror.

[0090] Based on the mechanical vibration reference amplitude and environmental noise reference frequency in the environmental interference reference data, interference features are extracted from the real-time operation data to obtain real-time environmental interference features, which include real-time vibration amplitude and real-time noise frequency.

[0091] The real-time attitude features of the micromirrors are extracted from the real-time operating data based on the target pointing angle and inter-mirror spacing in the preset operating parameters. The target pointing angle in the preset operating parameters is the ideal pointing angle that the micromirrors need to achieve, and the inter-mirror spacing is the ideal distance between micromirrors in the micromirror array. When extracting the real-time attitude features of the micromirrors, the real-time pointing angle of each micromirror is the actual measured current pointing angle. For example, if the target pointing angle of a micromirror is 30 degrees, and the actual measured real-time pointing angle is 31 degrees, then 31 degrees is the real-time pointing angle feature of that micromirror. The real-time spacing is the actual distance between the micromirrors in the micromirror array. If the target inter-mirror spacing is 5mm, and the actual measured distance between two micromirrors is 5.2mm, then 5.2mm is the real-time spacing feature. The response delay is the time delay from receiving the drive signal to completing the attitude adjustment of the micromirror. For example, if the target response delay is 1ms, and the actual measured response delay of a micromirror is 1.2ms, then 1.2ms is the response delay feature. By extracting these features, the coordinated attitude state of the micromirror array can be monitored in real time.

[0092] Based on the mechanical vibration reference amplitude and environmental noise reference frequency in the environmental interference reference data, interference features are extracted from the real-time operating data to obtain real-time environmental interference features. The mechanical vibration reference amplitude in the environmental interference reference data is the maximum permissible amplitude of mechanical vibration under normal operating conditions, and the environmental noise reference frequency is the reference frequency range of noise signals in the environment. When extracting real-time environmental interference features, the real-time vibration amplitude is the actual measured amplitude of the mechanical vibration. For example, if the mechanical vibration reference amplitude is 0.4 mm and the actual measured real-time vibration amplitude is 0.3 mm, then 0.3 mm is the real-time vibration amplitude feature. The real-time noise frequency is the frequency of noise in the actual environment. If the environmental noise reference frequency is 800 Hz and the actual measured real-time noise frequency is 820 Hz, then 820 Hz is the real-time noise frequency feature. By extracting these features, the interference status of the environment on the micromirror array can be monitored in real time.

[0093] The real-time attitude features of the micromirrors are input into the micromirror collaborative control layer to obtain the inter-mirror collaborative deviation coefficient. The first control effect feature is determined based on the inter-mirror collaborative deviation coefficient. The real-time environmental disturbance features are input into the vibration suppression layer to obtain the vibration disturbance suppression coefficient. The second control effect feature is determined based on the vibration disturbance suppression coefficient. The specific steps include:

[0094] Real-time collaboration factors are generated based on the real-time attitude features of the micromirror, and corresponding real-time collaboration factor features are generated based on the real-time attitude features of the micromirror. The real-time collaboration factors are input into the micromirror collaboration control layer and matched with the micromirror collaboration factors in the micromirror collaboration control layer to obtain the collaboration matching degree.

[0095] The micromirror synergy factor with the highest synergy matching degree is used as the benchmark synergy factor. The deviation feature term is obtained by comparing the synergy factor features of the real-time synergy factor with the synergy factor features of the benchmark synergy factor.

[0096] Set the weight values ​​corresponding to each synergistic factor feature, and sum the weight values ​​corresponding to the deviation feature items to obtain the inter-mirror synergistic deviation coefficient.

[0097] If the inter-mirror coordination deviation coefficient is less than the preset coordination deviation threshold, then the first control effect feature is qualified;

[0098] If the inter-mirror coordination deviation coefficient is greater than or equal to the preset coordination deviation threshold, then the first control effect feature is unqualified.

[0099] Real-time interference factors are generated based on real-time environmental interference characteristics, and corresponding real-time interference factor characteristics are generated based on real-time environmental interference characteristics.

[0100] The real-time interference factor is input into the vibration suppression layer and matched with the interference suppression factor in the vibration suppression layer to obtain the interference matching degree.

[0101] The interference exceeding the threshold feature term is obtained by comparing the real-time interference factor features with the inhibition factor features of the interference inhibition factor.

[0102] Set the weight values ​​corresponding to each suppression factor feature, and accumulate the weight values ​​corresponding to the interference exceeding the threshold feature to obtain the vibration interference suppression coefficient;

[0103] If the vibration interference suppression coefficient is less than the preset interference suppression threshold, then the second control effect characteristic is qualified;

[0104] If the vibration interference suppression coefficient is greater than or equal to the preset interference suppression threshold, then the second control effect characteristic is unqualified.

[0105] First, real-time coordination factors are generated based on the real-time attitude characteristics of the micromirrors, and corresponding real-time coordination factor features are generated based on these characteristics. For example, the real-time pointing angle, real-time spacing, and response delay of a micromirror are converted into real-time coordination factors and their features. Then, the real-time coordination factors are input to the micromirror coordination control layer and matched with other micromirror coordination factors in the layer to obtain a coordination matching degree. For instance, if there are multiple preset micromirror coordination factors in the micromirror array, the real-time coordination factors are matched one by one with these preset factors. A higher matching degree indicates that the real-time coordination state is closer to the preset coordination state.

[0106] Next, the micromirror coordination factor with the highest coordination matching degree is used as the benchmark coordination factor. The deviation feature term is obtained by comparing the real-time coordination factor features with the benchmark coordination factor features. Assuming the pointing angle feature of the benchmark coordination factor is 45 degrees and the pointing angle feature of the real-time coordination factor is 46 degrees, then this pointing angle feature will generate a deviation feature term. Then, weight values ​​are set for each coordination factor feature, and the weight values ​​corresponding to the deviation feature term are accumulated to obtain the inter-mirror coordination deviation coefficient, which is calculated using the first formula. The inter-mirror coordination deviation coefficient was calculated. ;in, This represents the i-th deviation characteristic term. This represents the i-th weight value.

[0107] If the inter-mirror coordination deviation coefficient is less than the preset coordination deviation threshold, it indicates that the coordination state of the micromirror array meets the requirements, and the first control effect characteristic is qualified. If the inter-mirror coordination deviation coefficient is greater than or equal to the preset coordination deviation threshold, it indicates that there is a problem with the coordination state, and the first control effect characteristic is unqualified. For example, in a MEMS micromirror array system used for 3D modeling, if the preset coordination deviation threshold is 0.5 and the calculated inter-mirror coordination deviation coefficient is 0.3, then the first control effect characteristic is qualified, and the coordination state of the micromirror array meets the accuracy requirements of 3D modeling.

[0108] To assess the effectiveness of vibration suppression, a real-time interference factor is first generated based on real-time environmental interference characteristics, and corresponding real-time interference factor features are then generated based on these characteristics. For example, interference features such as real-time vibration amplitude and real-time noise frequency are converted into real-time interference factors and their features. The real-time interference factor is then input into the vibration suppression layer and matched with the interference suppression factor in the vibration suppression layer to obtain the interference matching degree. Similar to the matching of micromirror coordination factors, the real-time interference factor will match with a preset interference suppression factor, and the matching degree reflects the closeness between the real-time interference and the preset interference.

[0109] Next, the interference exceeding threshold feature is obtained by comparing the real-time interference factor feature with the interference suppression factor feature. Assuming the vibration suppression threshold feature of the interference suppression factor is 0.4 mm and the vibration amplitude feature of the real-time interference factor is 0.5 mm, then the vibration amplitude feature will generate the interference exceeding threshold feature. Weight values ​​are set for each suppression factor feature, and the weight values ​​corresponding to the interference exceeding threshold feature are accumulated to obtain the vibration interference suppression coefficient, which is then calculated using the second formula. The vibration interference suppression coefficient was calculated. ,in, This represents the j-th interference exceeding the threshold feature term. This represents the j-th weight value.

[0110] If the vibration interference suppression coefficient is less than the preset interference suppression threshold, the vibration suppression effect meets the requirements, and the second control effect characteristic is qualified. If the vibration interference suppression coefficient is greater than or equal to the preset interference suppression threshold, the vibration suppression effect is poor, and the second control effect characteristic is unqualified. For example, in a high-precision optical communication system, if the preset interference suppression threshold is 0.6 and the calculated vibration interference suppression coefficient is 0.4, then the second control effect characteristic is qualified, and the impact of environmental interference on optical communication is within an acceptable range.

[0111] The control parameters are obtained by processing and analyzing the first and second control effect characteristics.

[0112] The overall control accuracy of the MEMS micromirror array is determined based on the first and second control effect characteristics.

[0113] If the overall control accuracy meets the preset accuracy threshold, the current control parameters are maintained; if the overall control accuracy does not meet the preset accuracy threshold, the control parameters are adjusted based on the inter-mirror cooperative deviation coefficient and the vibration interference suppression coefficient.

[0114] If the overall control accuracy does not meet the preset accuracy threshold, the control parameters are adjusted based on the inter-mirror coordination deviation coefficient and the vibration interference suppression coefficient, specifically including the following steps:

[0115] If the first control effect characteristic is not qualified, the driving voltage and response delay parameters of the micromirrors are adjusted according to the inter-mirror coordination deviation coefficient to optimize the inter-mirror coordination state.

[0116] If the second control effect characteristic is not qualified, adjust the filter parameters and vibration damping parameters according to the vibration interference suppression coefficient to enhance the vibration suppression effect;

[0117] If both control effect characteristics fail to meet the requirements, the corresponding control parameters will be adjusted synchronously until the overall control accuracy meets the preset accuracy threshold.

[0118] The overall control accuracy of the MEMS micromirror array is determined based on the first and second control effect characteristics. The first control effect characteristic reflects the synergistic control effect of the micromirror array, while the second control effect characteristic reflects the vibration suppression effect. Together, they determine the overall control accuracy of the system. For example, in a MEMS micromirror array system used for high-precision laser projection, if both the first and second control effect characteristics are satisfactory (good micromirror synergy) and (good vibration suppression), the overall control accuracy is high; if one or both are unsatisfactory, the overall control accuracy is insufficient.

[0119] The adjustment of control parameters is decided based on a comparison between the overall control accuracy and the preset accuracy threshold. If the overall control accuracy meets the preset accuracy threshold, it means that the current control parameters can enable the micromirror array to meet the requirements in terms of coordinated control and vibration suppression, so the current control parameters can be maintained. For example, in an optical measurement system, the preset accuracy threshold is 0.9, and the overall control accuracy is determined to be 0.95, which meets the threshold, so the current control parameters are maintained.

[0120] If the overall control accuracy does not meet the preset accuracy threshold, the control parameters are adjusted based on the inter-mirror coordination deviation coefficient and the vibration interference suppression coefficient. The inter-mirror coordination deviation coefficient reflects the degree of deviation in the micromirror coordinated control, while the vibration interference suppression coefficient reflects the degree of inadequacy in vibration suppression.

[0121] If the first control effect characteristic is unqualified, i.e., the inter-mirror coordination deviation coefficient is large, it indicates a problem with the coordination state of the micromirrors. In this case, the driving voltage and response delay parameters of the micromirrors are adjusted according to the inter-mirror coordination deviation coefficient to optimize the inter-mirror coordination state. For example, if a micromirror has a long response delay, resulting in an increased coordination deviation coefficient, the driving voltage can be increased to speed up the micromirror's response and reduce the response delay, thereby reducing the inter-mirror coordination deviation coefficient.

[0122] If the second control effect characteristic is unqualified, i.e., the vibration interference suppression coefficient is large, it indicates that the vibration suppression effect is poor. In this case, the filter parameters and vibration damping parameters should be adjusted according to the vibration interference suppression coefficient to enhance the vibration suppression effect. For example, if the ambient noise frequency is high, resulting in an increased vibration interference suppression coefficient, the filter parameters can be adjusted, a filter circuit for this high-frequency noise can be designed, and vibration damping components can be added to reduce the transmission of mechanical vibration, thereby reducing the vibration interference suppression coefficient.

[0123] If both control performance characteristics fail to meet the requirements, the corresponding control parameters are adjusted synchronously until the overall control accuracy meets the preset accuracy threshold. For example, in a MEMS micromirror array application in a complex industrial environment, there are problems such as large micromirror coordination deviation and insufficient vibration interference suppression. In this case, it is necessary to simultaneously adjust the micromirror's driving voltage, response delay parameters, filtering parameters, and vibration damping parameters. Through multiple iterative adjustments, the inter-mirror coordination deviation coefficient and vibration interference suppression coefficient are reduced to acceptable ranges, ultimately ensuring that the overall control accuracy meets the preset accuracy threshold.

[0124] The overall control accuracy can be determined by combining the inter-mirror coordination deviation coefficient and the vibration interference suppression coefficient. The calculation formula is: Overall Control Accuracy = 1 - (Inter-mirror Coordination Deviation Coefficient × Coordination Weight + Vibration Interference Suppression Coefficient × Interference Weight). The coordination weight and interference weight are set according to the system's emphasis on coordination control and vibration suppression. If the system has higher requirements for coordination control, the coordination weight can be set to 0.6, and the interference weight to 0.4, and vice versa. When the calculated overall control accuracy is greater than or equal to the preset accuracy threshold, the current parameters are maintained; if it is less than the preset accuracy threshold, parameter adjustments are made.

[0125] Electronic devices, including memory, processor, and computer programs stored in memory and run on the processor, wherein the processor executes the program to implement a method for coordinated control and vibration suppression of MEMS micromirror arrays in OCS.

[0126] like Figure 2 As shown, the electronic device may include a processor 610, a communication interface 620, a memory 630, and a communication bus 640, wherein the processor 610, the communication interface 620, and the memory 630 communicate with each other through the communication bus 640. The processor 610 can call logic instructions in the memory 630 to execute the cooperative control and vibration suppression method of the MEMS micromirror array in the OCS.

[0127] Furthermore, the logical instructions in the aforementioned memory 630 can be implemented as software functional units and, when sold or used as independent products, can be stored in a computer-readable storage medium. Based on this understanding, the technical solution of the present invention, in essence, or the part that contributes to the prior art, or a part of the technical solution, can be embodied in the form of a software product. This computer software product is stored in a storage medium and includes several instructions to cause a computer device (which may be a personal computer, server, or network device, etc.) to execute all or part of the steps of the methods described in the various embodiments of the present invention. The aforementioned storage medium includes various media capable of storing program code, such as USB flash drives, portable hard drives, read-only memory, random access memory, magnetic disks, or optical disks.

[0128] On the other hand, the present invention also provides a computer program product, which includes a computer program that can be stored on a non-transitory computer-readable storage medium. When the computer program is executed by a processor, the computer is able to execute a method for coordinated control and vibration suppression of MEMS micromirror arrays in OCS.

[0129] In another aspect, the present invention also provides a non-transitory computer-readable storage medium having a computer program stored thereon, which, when executed by a processor, implements a method for the coordinated control and vibration suppression of a MEMS micromirror array in an OCS.

[0130] The device embodiments described above are merely illustrative. The units described as separate components may or may not be physically separate. The components shown as units may or may not be physical units; that is, they may be located in one place or distributed across multiple network units. Some or all of the modules can be selected to achieve the purpose of this embodiment according to actual needs. Those skilled in the art can understand and implement this without any creative effort.

[0131] Through the above description of the embodiments, those skilled in the art can clearly understand that each embodiment can be implemented by means of software plus necessary general-purpose hardware platforms, and of course, it can also be implemented by hardware. Based on this understanding, the above technical solutions, in essence or the part that contributes to the prior art, can be embodied in the form of a software product. This computer software product can be stored in a computer-readable storage medium, such as ROM / RAM, magnetic disk, optical disk, etc., and includes several instructions to cause a computer device (which may be a personal computer, server, or network device, etc.) to execute the methods described in the various embodiments or some parts of the embodiments.

[0132] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, and not to limit them; although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features; and these modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. A method for coordinated control and vibration suppression of MEMS micromirror arrays in OCS, characterized in that, The method includes the following steps: Acquire the preset operating parameters and environmental interference benchmark data of the MEMS micromirror array; After processing the preset operating parameters and environmental interference benchmark data, a control map of the MEMS micromirror array is constructed. Acquire real-time operating data of MEMS micromirror arrays, and extract real-time attitude features of micromirrors and real-time environmental interference features from the real-time operating data; The real-time attitude features of the micromirrors are input into the micromirror collaborative control layer to obtain the inter-mirror collaborative deviation coefficient. The first control effect feature is determined based on the inter-mirror collaborative deviation coefficient. The real-time environmental disturbance features are input into the vibration suppression layer to obtain the vibration disturbance suppression coefficient. The second control effect feature is determined based on the vibration disturbance suppression coefficient. The control parameters are obtained by processing and analyzing the first and second control effect characteristics.

2. The method for coordinated control and vibration suppression of MEMS micromirror arrays in OCS according to claim 1, characterized in that, The preset operating parameters include the target pointing angle of the micromirror array, the inter-mirror spacing, and the cooperative response threshold. The environmental interference reference data includes mechanical vibration reference amplitude and environmental noise reference frequency.

3. The method for coordinated control and vibration suppression of MEMS micromirror arrays in OCS according to claim 1, characterized in that, After processing the preset operating parameters and environmental interference baseline data, a control map of the MEMS micromirror array is constructed, which specifically includes the following steps: Micromirror synergy factors and factor interaction features are generated based on preset operating parameters, and a micromirror synergy control layer is constructed based on the micromirror synergy factors and factor interaction features. An interference suppression factor is generated based on environmental interference baseline data, and a vibration suppression layer is constructed based on the interference suppression factor. A MEMS micromirror array control map is constructed by combining the micromirror collaborative control layer and the vibration suppression layer.

4. The method for coordinated control and vibration suppression of MEMS micromirror arrays in OCS according to claim 3, characterized in that, Based on preset operating parameters, micromirror synergy factors and factor interaction features are generated. A micromirror synergy control layer is then constructed based on these factors and features, specifically including the following steps: Generate a corresponding micromirror synergy factor based on each micromirror in the MEMS micromirror array. Based on the target pointing angle, inter-mirror spacing and collaborative response threshold in the preset operating parameters, the collaborative factor feature corresponding to each micromirror collaborative factor is generated; The interaction relationships between micromirror synergistic factors are determined based on the inter-mirror spacing and synergistic response threshold, forming factor interaction characteristics. A micromirror collaborative control layer is constructed based on all micromirror collaborative factors and factor interaction characteristics.

5. The method for coordinated control and vibration suppression of MEMS micromirror arrays in OCS according to claim 3, characterized in that, An interference suppression factor is generated based on environmental interference baseline data, and a vibration suppression layer is constructed based on the interference suppression factor. A MEMS micromirror array control map is then constructed by combining the micromirror collaborative control layer and the vibration suppression layer, specifically including the following steps: Based on the mechanical vibration reference amplitude and environmental noise reference frequency in the environmental interference reference data, a corresponding interference suppression factor is generated; Based on the mechanical vibration reference amplitude, a vibration suppression threshold feature is set, and based on the environmental noise reference frequency, a noise filtering feature is set to form a suppression factor feature corresponding to the interference suppression factor. A vibration suppression layer is constructed based on the interference suppression factor and the characteristics of the corresponding suppression factor. The micromirror cooperative control layer and vibration suppression layer in the MEMS micromirror array control map regulate the cooperative state and vibration state of the MEMS micromirror array.

6. The method for coordinated control and vibration suppression of MEMS micromirror arrays in OCS according to claim 1, characterized in that, Acquire real-time operational data of the MEMS micromirror array, and extract the real-time attitude features of the micromirrors and the real-time environmental interference features from the real-time operational data. This process includes the following steps: The attitude features of the micromirrors are extracted from the real-time operating data based on the target pointing angle and inter-mirror spacing in the preset operating parameters; wherein, the real-time attitude features of the micromirrors include the real-time pointing angle, real-time spacing and response delay of each micromirror. Based on the mechanical vibration reference amplitude and environmental noise reference frequency in the environmental interference reference data, interference features are extracted from the real-time operation data to obtain real-time environmental interference features, wherein the real-time environmental interference features include real-time vibration amplitude and real-time noise frequency.

7. The method for coordinated control and vibration suppression of MEMS micromirror arrays in OCS according to claim 6, characterized in that, The real-time attitude features of the micromirrors are input into the micromirror collaborative control layer to obtain the inter-mirror collaborative deviation coefficient. The first control effect feature is determined based on the inter-mirror collaborative deviation coefficient. The real-time environmental disturbance features are input into the vibration suppression layer to obtain the vibration disturbance suppression coefficient. The second control effect feature is determined based on the vibration disturbance suppression coefficient. The specific steps include: Real-time collaboration factors are generated based on the real-time attitude features of the micromirror, and corresponding real-time collaboration factor features are generated based on the real-time attitude features of the micromirror. The real-time collaboration factors are input into the micromirror collaboration control layer and matched with the micromirror collaboration factors in the micromirror collaboration control layer to obtain the collaboration matching degree. The micromirror synergy factor with the highest synergy matching degree is used as the benchmark synergy factor. The deviation feature term is obtained by comparing the synergy factor features of the real-time synergy factor with the synergy factor features of the benchmark synergy factor. Set the weight values ​​corresponding to each synergistic factor feature, and sum the weight values ​​corresponding to the deviation feature items to obtain the inter-mirror synergistic deviation coefficient. If the inter-mirror coordination deviation coefficient is less than the preset coordination deviation threshold, then the first control effect feature is qualified. If the inter-mirror coordination deviation coefficient is greater than or equal to the preset coordination deviation threshold, then the first control effect feature is unqualified. Real-time interference factors are generated based on real-time environmental interference characteristics, and corresponding real-time interference factor features are generated based on these characteristics. The real-time interference factors are then input into the vibration suppression layer and matched with the interference suppression factors in the vibration suppression layer to obtain the interference matching degree. The interference exceeding the threshold feature term is obtained by comparing the real-time interference factor features with the inhibition factor features of the interference inhibition factor. Set the weight value corresponding to each suppression factor feature, and accumulate the weight values ​​corresponding to the interference exceeding the threshold feature to obtain the vibration interference suppression coefficient; If the vibration interference suppression coefficient is less than the preset interference suppression threshold, then the second control effect characteristic is qualified; If the vibration interference suppression coefficient is greater than or equal to the preset interference suppression threshold, then the second control effect characteristic is unqualified.

8. The method for coordinated control and vibration suppression of MEMS micromirror arrays in OCS according to claim 7, characterized in that, The control parameters are obtained by processing and analyzing the first and second control effect characteristics. The overall control accuracy of the MEMS micromirror array is determined based on the first and second control effect characteristics. If the overall control accuracy meets the preset accuracy threshold, the current control parameters are maintained; if the overall control accuracy does not meet the preset accuracy threshold, the control parameters are adjusted based on the inter-mirror cooperative deviation coefficient and the vibration interference suppression coefficient.

9. The method for coordinated control and vibration suppression of MEMS micromirror arrays in OCS according to claim 8, characterized in that, If the overall control accuracy does not meet the preset accuracy threshold, the control parameters are adjusted based on the inter-mirror coordination deviation coefficient and the vibration interference suppression coefficient, specifically including the following steps: If the first control effect characteristic is not qualified, the driving voltage and response delay parameters of the micromirrors are adjusted according to the inter-mirror coordination deviation coefficient to optimize the inter-mirror coordination state. If the second control effect characteristic is not qualified, adjust the filter parameters and vibration damping parameters according to the vibration interference suppression coefficient to enhance the vibration suppression effect; If both control effect characteristics fail to meet the requirements, the corresponding control parameters will be adjusted synchronously until the overall control accuracy meets the preset accuracy threshold.

10. An electronic device, comprising a memory, a processor, and a computer program stored in the memory and executable on the processor, characterized in that, When the processor executes the program, it implements the collaborative control and vibration suppression method for the MEMS micromirror array in the OCS as described in any one of claims 1 to 9.

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