Cleaning system and annealing device

Abstract

The invention discloses a cleaning system and an annealing device, the cleaning system comprises a cold disc, a cooling pipeline, a detection element, a pipeline cleaning machine and a controller, and the cold disc is used for placing a substrate; the cooling pipeline is used for cooling the substrate; the detection element is used for detecting process parameters in the cooling pipeline in real time and outputting detection signals of the process parameters; the pipeline cleaning machine is connected with the cooling pipeline and is used for cleaning the cooling pipeline; the controller is in communication connection with the detection element and the pipeline cleaning machine and used for receiving the detection signal and controlling the pipeline cleaning machine to clean the cooling pipeline according to the detection signal. According to the invention, the cooling pipeline can be automatically cleaned.

Description

Technical Field

[0001] This invention relates to the field of semiconductor manufacturing technology, and in particular to a cleaning system and annealing apparatus. Background Technology

[0002] With the rapid development of integrated circuits, traditional aluminum processing techniques are no longer sufficient to meet our requirements. Due to copper's excellent thermal conductivity, electrical conductivity, and low resistance, copper interconnect technology has gradually become the mainstream interconnect technology for semiconductor integrated circuits. Copper electroplating, with its simple process and high operability, has also become the main process for preparing copper films in copper interconnect technology.

[0003] In the copper electroplating process, the copper-plated substrate is often placed in an annealing chamber for annealing treatment to reduce stress, stabilize the copper film structure, refine the grains, and adjust the internal microstructure of the copper film.

[0004] The annealing chamber consists of a hot plate and a cold plate. Typically, the electroplated substrate is first placed on the hot plate for a predetermined time, and then quickly placed on the room-temperature cold plate for another predetermined time to complete the annealing process. To maintain the cold plate at room temperature, cooling pipes are usually arranged below it, supplying a cooling medium to carry away the heat generated by the substrate. Over time, impurities in the cooling medium can accumulate in the cooling pipes, forming scale and debris that can clog the pipes. This can prevent the cold plate from maintaining a stable room temperature, ultimately affecting the entire substrate annealing process.

[0005] Therefore, it is necessary to clean the existing cooling pipes. Summary of the Invention

[0006] The purpose of this invention is to solve the problem of how to clean cooling pipes in the prior art.

[0007] To address the above problems, one embodiment of the present invention provides a cleaning system comprising:

[0008] Cold tray, used to hold substrates;

[0009] Cooling pipes are used to cool the substrate;

[0010] The detection element is used to detect process parameters in the cooling pipeline in real time and output the detection signal of the process parameters;

[0011] Pipe cleaning machine, connected to cooling pipes, is used to clean the cooling pipes;

[0012] The controller is communicatively connected to both the detection element and the pipeline cleaning machine. It receives detection signals and controls the pipeline cleaning machine to clean the cooling pipelines based on these signals.

[0013] Another embodiment of the present invention provides a cleaning system comprising:

[0014] Cold tray, used to hold substrates;

[0015] Cooling pipes are used to cool the substrate;

[0016] Temperature sensing element, used to detect the temperature value of the cold plate in real time and output the temperature signal of the temperature value;

[0017] Pipe cleaning machine, connected to cooling pipes, is used to clean the cooling pipes;

[0018] The controller is connected to both the temperature sensing element and the pipeline cleaning machine to receive temperature signals and control the pipeline cleaning machine to clean the cooling pipelines based on the temperature signals.

[0019] Another embodiment of the present invention provides an annealing apparatus, comprising:

[0020] Annealing chamber;

[0021] The aforementioned cleaning system, in which the cold plate is located in the annealing chamber.

[0022] The cleaning system proposed in this application uses a pipeline cleaning machine to clean the cooling pipelines and sets up detection elements to detect the process parameters in the cooling pipelines in real time. The controller controls the pipeline cleaning machine to automatically clean the cooling pipelines based on the received detection signals of the process parameters. At the same time, it can also perform rapid cleaning and maintenance of the cooling pipelines without disassembling the cooling pipelines and related components, saving maintenance time.

[0023] The cleaning system proposed in this application uses a pipe cleaning machine to clean the cooling pipes, and uses a temperature sensing element to detect the temperature value of the cold plate in real time. The controller controls the pipe cleaning machine to automatically clean the cooling pipes based on the temperature signal received from the temperature value.

[0024] The annealing apparatus proposed in this application, by employing the aforementioned cleaning system, is capable of automatically cleaning the cooling pipes acting on the cold plate and the substrate on the cold plate within the annealing chamber.

[0025] Other features and corresponding beneficial effects of the present invention will be described in the latter part of the specification, and it should be understood that at least some of the beneficial effects will become obvious from the description in the specification. Attached Figure Description

[0026] Figure 1 This is a schematic diagram illustrating the working principle of a cleaning system according to an embodiment of this application;

[0027] Figure 2 This is a schematic diagram of the hot plate and cold plate according to an embodiment of this application; and

[0028] Figure 3 This is a schematic diagram illustrating the working principle of an annealing apparatus according to an embodiment of this application. Detailed Implementation

[0029] The following specific embodiments illustrate the implementation of the present invention. Those skilled in the art can easily understand other advantages and effects of the present invention from the content disclosed in this specification. Although the description of the present invention is presented in conjunction with preferred embodiments, this does not mean that the features of the invention are limited to these embodiments. On the contrary, the purpose of describing the invention in conjunction with embodiments is to cover other options or modifications that may be derived based on the claims of the present invention. To provide a deep understanding of the invention, many specific details will be included in the following description. The invention may also be implemented without using these details. Furthermore, to avoid confusion or obscuring the focus of the invention, some specific details will be omitted in the description. It should be noted that, unless otherwise specified, the embodiments and features in the embodiments of the present invention can be combined with each other.

[0030] It should be noted that in this specification, similar reference numerals and letters in the following figures indicate similar items. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.

[0031] The technical solution of the present invention will now be clearly and completely described with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0032] In the description of this invention, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing the invention and for simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0033] In the description of this invention, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this invention based on the specific circumstances.

[0034] To make the objectives, technical solutions, and advantages of the present invention clearer, the embodiments of the present invention will be described in further detail below with reference to the accompanying drawings.

[0035] Figure 1 This is a schematic diagram illustrating the working principle of a cleaning system according to an embodiment of this application; Figure 2 This is a schematic diagram of the hot plate and cold plate according to an embodiment of this application.

[0036] refer to Figure 1 This application proposes a cleaning system, including a cold plate 100, cooling pipes 110, a detection element 120, a pipe cleaning machine 200, and a controller 300. (Reference) Figure 2 The cold plate 100 is used in the annealing chamber 1000 to place the substrate. The annealing chamber 1000 includes a hot plate 400 and a cold plate 100 for annealing the substrate after copper plating. After copper plating and cleaning, the substrate is placed on the hot plate 400 (the hot plate 400 is set to a temperature of, for example, 180°C) and held for a predetermined time, such as 90 seconds. Then, the substrate is transferred from the hot plate 400 to the cold plate 100 (the cold plate 100 is set to a temperature of, for example, room temperature 25°C) and held for a predetermined time, such as 25 seconds, to complete the annealing process.

[0037] See you again Figure 1 To maintain a constant temperature in the cold plate 100, such as always being at room temperature, the cold plate 100 is equipped with a cooling pipe 110. The inlet of the cooling pipe 110 is connected to the outlet of the plant terminal 500, and the outlet of the cooling pipe 110 is connected to the inlet of the plant terminal 500. The outlet of the plant terminal 500 supplies a cooling medium, such as deionized water, to the cooling pipe 110. After flowing through the cooling pipe 110, the cooling medium is discharged to the inlet of the plant terminal 500. The discharged cooling medium is recycled and treated internally in the plant terminal 500 and then supplied back to the cooling pipe 110, thus forming a cooling medium circulation loop. The circulating cooling medium keeps the cold plate 100 at room temperature and removes the heat generated on the substrate of the cold plate 100.

[0038] Both the detection element 120 and the pipe cleaning machine 200 are communicatively connected to the controller 300. The detection element 120 is used to detect the process parameters in the cooling pipe 110 in real time and output the detection signal of the process parameters to the controller 300. In this embodiment, the detection element 120 is a flow meter or a pressure gauge. The process parameter corresponding to the flow meter is the flow rate of the cooling medium in the cooling pipe 110, and the process parameter corresponding to the pressure gauge is the pressure of the cooling medium in the cooling pipe 110. The outlet of the pipe cleaning machine 200 is connected to the cooling pipe 110 for cleaning the cooling pipe 110. In this embodiment, the plant terminal 500 is also connected to the inlet of the pipe cleaning machine 200 to provide cleaning fluid to the pipe cleaning machine 200. In other embodiments, other supply terminals can also be separately connected to the pipe cleaning machine 200 to provide cleaning fluid to the pipe cleaning machine 200 instead of the plant terminal 500. The cooling medium and the cleaning fluid can be the same type of liquid, such as deionized water, or they can be different types of liquids.

[0039] When the flow rate or pressure value is less than or equal to the corresponding set value, it indicates that the cooling pipe 110 is blocked, resulting in a very low flow rate of the cooling medium flowing through the cooling pipe 110 and a corresponding decrease in the pressure of the cooling medium. At this time, the controller 300 controls the pipe cleaning machine 200 to automatically clean and unclog the cooling pipe 110. Conversely, the controller 300 controls the pipe cleaning machine 200 to be in standby mode, that is, when the flow rate or pressure value is greater than the corresponding set value, the pipe cleaning machine 200 temporarily does not clean the cooling pipe 110. The pipe cleaning machine 200 cleans the cooling pipe 110 using a pulse method. The pressure of the cleaning fluid introduced into the cooling pipe 110 by the pipe cleaning machine 200 is controllable within the range of 0MPa to 0.8MPa, and different pulse cleaning intensities are achieved by controlling the duty cycle of water and air, for example, 5 seconds of air and 30 seconds of water.

[0040] Specifically, such as Figure 1 The cooling pipeline 110 includes an inlet pipe section 111, an outlet pipe section 112, and a cooling pipe section 101. The cooling pipe section 101 (e.g., in a spiral shape) is located below the cold plate 100 and connects to the inlet pipe section 111 and the outlet pipe section 112. The inlet pipe section 111 is connected to the outlet of the plant terminal 500 and the outlet of the pipeline cleaning machine 200, respectively. The outlet pipe section 112 is connected to the inlet of the plant terminal 500. A detection element 120 (specifically a flow meter or pressure gauge) is installed on the outlet pipe section 112 to monitor the outflow rate or pressure of the liquid in the outlet pipe section 112. Optionally, the detection element 120 can also be installed on the inlet pipe section 111 to achieve the same detection purpose. The inlet pipe section 111 is equipped with a switching valve 113 and a pressure regulating valve 114. The switching valve 113 is used to control the opening and closing of the inlet pipe section 111. The pressure regulating valve 114 is used to regulate the pressure of the cooling medium in the inlet pipe section 111. Figure 1 In the example shown, the switching valve 113 is located upstream of the pressure regulating valve 114 along the flow direction of the cooling medium in the inlet pipe section 111.

[0041] In some embodiments, such as Figure 1 The cleaning system includes a first control valve 115, a second control valve 116, a third control valve 117, and a waste liquid container 600. The first control valve 115, second control valve 116, and third control valve 117 are either automatically controllable three-way valves or manually controllable three-way connectors (e.g., T-connectors or Y-connectors). The first control valve 115 and third control valve 117 are located on the inlet pipe section 111, and the second control valve 116 is located on the outlet pipe section 112. Along the flow direction of the cooling medium in the inlet pipe section 111, the third control valve 117, the on / off valve 113, the pressure regulating valve 114, and the first control valve 115 are sequentially arranged on the inlet pipe section 111. The inlet of the pipeline cleaning machine 200 is connected to the plant terminal 500 through the third control valve 117, the outlet of the pipeline cleaning machine 200 is connected to the inlet pipe section 111 through the first control valve 115, and the waste liquid container 600 is connected to the outlet pipe section 112 through the second control valve 116 to receive the cleaned cooling medium.

[0042] Specifically, the first control valve 115 has a first end 1151, a second end 1152, and a third end 1153. The first end 1151 and the second end 1152 of the first control valve 115 are connected to the inlet pipe section 111, and the third end 1153 of the first control valve 115 is connected to the outlet of the pipeline cleaning machine 200. The second control valve 116 has a first end 1161, a second end 1162, and a third end 1163. The first end 1161 and the second end 1162 of the second control valve 116 are connected to the outlet pipe section 112, and the third end 1163 of the second control valve 116 is connected to the waste liquid container 600. The third control valve 117 has a first end 1171, a second end 1172, and a third end 1173. The first end 1171 and the second end 1172 of the third control valve 117 are connected to the inlet pipe section 111, and the third end 1173 of the third control valve 117 is connected to the inlet of the pipeline cleaning machine 200. In this embodiment, because the pressure regulating valve 114 has the function of stabilizing pressure, it will affect the pulse cleaning effect of the pipeline cleaning machine 200. Therefore, Figure 1 In the example shown, along the flow direction of the cooling medium in the inlet pipe section 111, the first control valve 115 is located downstream of the pressure regulating valve 114. Furthermore, to improve the purification of the inlet pipe section 111 between the pressure regulating valve 114 and the third control valve 117, a filter 119 can be installed. The filter 119 is installed in the inlet pipe section 111 to filter the cooling medium flowing into the inlet pipe section 111. Figure 1 In the example shown, filter 119 is disposed between pressure regulating valve 114 and third control valve 117.

[0043] When the cooling pipe 110 does not require maintenance or cleaning, the first end 1151 and the second end 1152 of the first control valve 115 are opened, and the third end 1153 of the first control valve 115 is closed; the first end 1161 and the second end 1162 of the second control valve 116 are opened, and the third end 1163 of the second control valve 116 is closed; and the first end 1171 and the second end 1172 of the third control valve 117 are opened, and the third end 1173 of the third control valve 117 is closed. In this case, the plant end 500 supplies cooling medium to the liquid inlet pipe section 111. After the cooling medium flows through the liquid inlet pipe section 111, it flows back to the plant end 500 from the liquid outlet pipe section 112. After being recycled and processed by the plant end 500, it enters the liquid inlet pipe section 111, thus forming a circulation loop. The circulating cooling medium keeps the cold plate 100 at room temperature and removes the heat from the substrate on the cold plate 100. It should be noted that when the first control valve 115, the second control valve 116, and the third control valve 117 are all equipped with manually controlled T-type or Y-type connectors, and the cooling pipe 110 does not require maintenance or cleaning, the third ends 1153, 1163, and 1173 of the first control valve 115, the second control valve 116, and the third control valve 117 are plugged with plugs. When the cooling pipe 110 requires cleaning, the reserved third ends 1153, 1163, and 1173 are connected to the outlet of the pipe cleaning machine 200, the waste liquid container 600, and the inlet of the pipe cleaning machine 200, respectively, for quick cleaning.

[0044] Specifically, when the flow rate or pressure value detected by the detection element 120, such as a flow meter or pressure gauge, decreases to less than or equal to the corresponding set value, it indicates that the cooling pipe 110 is blocked. At this time, the second end 1172 of the third control valve 117 is closed, and the third end 1173 of the third control valve 117 is opened, allowing the first end 1171 and the third end 1173 of the third control valve 117 to flow, and the cleaning fluid (e.g., cooling medium) from the plant end 500 is supplied to the pipe cleaning machine 200; at the same time, the first end 1151 of the first control valve 115 is closed. Open the third end 1153 of the first control valve 115 to allow flow between the third end 1153 and the second end 1152 of the first control valve 115. The cooling medium in the pipeline cleaning machine 200 enters the inlet pipe section 111 for pipeline cleaning. Simultaneously, close the second end 1162 of the second control valve 116 and open the third end 1163 of the second control valve 116 to allow flow between the first end 1161 and the third end 1163 of the second control valve 116. This facilitates the discharge of the cleaned cooling medium from the third end 1163 of the second control valve 116 to the waste liquid container 600. The purpose of the second control valve 116 is to allow the cleaning fluid carrying scale and impurities during the cleaning process to be discharged externally, such as to the waste liquid container 600, preventing it from flowing into the plant end 500 and clogging the plant pipeline. In other embodiments, the outlet of the pipe cleaner 200 and the connection point of the cooling pipe 110, and the inlet of the waste liquid container 600 and the connection point of the cooling pipe 110 can be interchanged. Specifically, the outlet of the pipe cleaner 200 can be connected to the third end 1163 of the second control valve 116, and the inlet of the waste liquid container 600 can be connected to the third end 1153 of the first control valve 115. When maintaining and cleaning the cooling pipe 110, the cleaning fluid in the pipe cleaner 200 enters from the outlet pipe section 112, flows through the cooling pipe section 101, and finally exits from the inlet pipe section 111 into the waste liquid container 600.

[0045] In some embodiments, such as Figure 2 The cleaning system also includes a temperature sensing element 130, which is mounted on the cold plate 100 and communicates with the controller 300 to detect the temperature of the cold plate 100 in real time and output a temperature signal to the controller 300. The temperature sensing element 130 is a thermocouple thermometer.

[0046] When the temperature value of the cold plate 100 detected by the temperature sensing element 130 is greater than or equal to the temperature set value, it indicates that the cooling pipe 110 is blocked, causing the temperature of the cold plate 100 to rise as the amount of substrate processed increases. At this time, the controller 300 controls the pipe cleaning machine 200 to automatically clean and unclog the cooling pipe 110. Conversely, the controller 300 controls the pipe cleaning machine 200 to be in standby mode, that is, when the temperature value is less than the temperature set value, the pipe cleaning machine 200 will not clean the cooling pipe 110 temporarily.

[0047] In some embodiments, in conjunction with reference Figure 1 and Figure 2 The cleaning system includes at least one of a detection element 120 and a temperature sensing element 130 to detect whether the cooling pipe 110 is blocked. The controller 300 controls the pipe cleaning machine 200 to automatically clean the cooling pipe 110 based on the detection signal output by the detection element 120 and / or the temperature signal output by the temperature sensing element 130. When the cleaning system includes both the detection element 120 and the temperature sensing element 130, the priority of the detection signal and the temperature signal is determined according to the actual process conditions.

[0048] Figure 3 This is a schematic diagram illustrating the working principle of an annealing apparatus according to an embodiment of this application.

[0049] refer to Figure 3 The annealing apparatus proposed in this application includes an annealing chamber 1000 and the aforementioned cleaning system.

[0050] In some embodiments, the cooling pipe 110 in the cleaning system described above includes an inlet pipe section 111, an outlet pipe section 112, an inlet branch pipe 1101, an outlet branch pipe 1102, and a cooling pipe section 101. The annealing apparatus includes a plurality of annealing chambers 1000, each annealing chamber 1000 having a cold plate 100, each cold plate 100 being equipped with an inlet branch pipe 1101, an outlet branch pipe 1102, and a cooling pipe section 101, with each cooling pipe section 101 positioned below the corresponding cold plate 100. Each inlet branch pipe 1101 is connected to the inlet pipe section 111, and each outlet branch pipe 1102 is connected to the outlet pipe section 112. (Refer to reference...) Figure 2 and Figure 3 Each cold plate 100 may be equipped with a temperature sensing element 130. The sensing element 120 may be located in the liquid inlet pipe section 111, the liquid outlet pipe section 112, the liquid inlet branch pipe 1101, or the liquid outlet branch pipe 1102. Figure 3 In the example shown, each outlet branch pipe 1102 is equipped with a detection element 120. Along the flow direction of the cooling medium in the inlet pipe section 111, the inlet pipe section 111 is sequentially equipped with a third control valve 117, a filter 119, a switching valve 113, a pressure regulating valve 114 and a first control valve 115, and a second control valve 116 is located in the outlet pipe section 112. Figure 3 The configuration and connection methods of the pipeline cleaning machine 200, controller 300, plant terminal 500, and waste liquid container 600 in the example shown can be found in the documentation. Figure 1 The description of the example shown will not be repeated here. Furthermore, in this embodiment, there are four annealing chambers 1000. In other embodiments, there may be eight annealing chambers 1000; this application does not impose a particular limitation on the number of annealing chambers 1000.

[0051] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, and not to limit them; although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some or all of the technical features; and these modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of the present invention.

Claims

1. A cleaning system, characterized by The system comprises: a cold plate for placing a substrate; a cooling pipeline for cooling the substrate; a detection element for detecting a process parameter in the cooling pipeline in real time and outputting a detection signal of the process parameter; a pipeline cleaning machine connected with the cooling pipeline for cleaning the cooling pipeline; a controller in communication with the detection element and the pipeline cleaning machine respectively for receiving the detection signal and controlling the pipeline cleaning machine to clean the cooling pipeline according to the detection signal.

2. The cleaning system of claim 1, wherein, The detection element is a flow meter or a pressure gauge, the process parameter corresponding to the flow meter is a flow value of a cooling medium in the cooling pipeline, and the process parameter corresponding to the pressure gauge is a pressure value of the cooling medium in the cooling pipeline. The controller is configured to: when the flow value or the pressure value is less than or equal to a corresponding set value, the controller controls the pipeline cleaning machine to clean the cooling pipeline, otherwise, the controller controls the pipeline cleaning machine to be in a standby state.

3. The cleaning system of claim 1, wherein, The system further comprises: a temperature measuring element in communication with the controller for detecting a temperature value of the cold plate in real time and outputting a temperature signal of the temperature value, and the controller controls the pipeline cleaning machine to clean the cooling pipeline according to the temperature signal.

4. The cleaning system of claim 3, wherein, The temperature measuring element is a thermocouple thermometer.

5. The cleaning system of claim 1, wherein, The cooling pipeline comprises an inlet pipe section and an outlet pipe section, and the detection element is arranged on the outlet pipe section or the inlet pipe section.

6. The cleaning system of claim 5, wherein, An outlet of the pipeline cleaning machine is connected with the inlet pipe section or the outlet pipe section.

7. The cleaning system of claim 5, wherein, The inlet pipe section is provided with: a pressure stabilizing valve for adjusting the pressure of the cooling medium in the inlet pipe section; a first control valve through which the outlet of the pipeline cleaning machine is connected with the inlet pipe section; along the flow direction of the cooling medium in the inlet pipe section, the first control valve is located downstream of the pressure stabilizing valve.

8. The cleaning system of claim 5, wherein, The system further comprises: a second control valve arranged on the outlet pipe section; a waste liquid container connected with the outlet pipe section through the second control valve.

9. The cleaning system of claim 5, wherein, The system further comprises: a plant side for supplying the cooling medium to the inlet pipe section and supplying a cleaning liquid to the pipeline cleaning machine; a third control valve through which an inlet of the pipeline cleaning machine is connected with the plant side.

10. The cleaning system of claim 5, wherein, The system further comprises: a filter arranged on the inlet pipe section for filtering the cooling medium entering the inlet pipe section.

11. A cleaning system characterized by, The system comprises: a cold plate for placing a substrate; a cooling pipeline for cooling the substrate; a temperature measuring element for detecting a temperature value of the cold plate in real time and outputting a temperature signal of the temperature value; a pipeline cleaning machine connected with the cooling pipeline for cleaning the cooling pipeline; a controller in communication with the temperature measuring element and the pipeline cleaning machine respectively for receiving the temperature signal and controlling the pipeline cleaning machine to clean the cooling pipeline according to the temperature signal.

12. An annealing apparatus characterized by comprising: The system comprises: an annealing cavity; the cleaning system of any one of claims 1-11, wherein the cold plate is located in the annealing cavity.

13. The annealing apparatus of claim 12, wherein The cooling pipeline comprises an inlet pipe section, an outlet pipe section, an inlet branch pipe and an outlet branch pipe; The annealing device comprises a plurality of the annealing cavities, each of which is provided with one of the cold plates, each of which is provided with the liquid inlet branch pipes and the liquid outlet branch pipes, each of which is connected with the liquid inlet pipe section, and each of which is connected with the liquid outlet pipe section.

14. The annealing apparatus of claim 13, wherein The detection element is arranged on the liquid inlet pipe section, the liquid outlet pipe section, the liquid inlet branch pipe or the liquid outlet branch pipe.

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