Transverse moving device, conveying system and application of transverse moving device

Abstract

The invention provides a transverse moving device, a conveying system and application of the transverse moving device. The transverse moving device enables two conveying lines which are located at the same height and are parallel to each other and arranged at an interval to communicate with each other. The transverse moving device comprises a transverse moving unit. The transverse moving unit can move on a vertical line between the two conveying lines; the transverse moving device comprises a first magnetic blocking mechanism and a second magnetic blocking mechanism, the first magnetic blocking mechanism is arranged at the conveying end of the transverse moving unit, and the second magnetic blocking mechanism is arranged at a port, in butt joint with the conveying line, of the transverse moving device; the blocking part of the first magnetic blocking mechanism and the blocking part of the second magnetic blocking mechanism are arranged on the magnetic blocking mechanism in a rotatable mode. The transverse moving device can effectively prevent a container from falling off in the semiconductor material conveying process, can improve the conveying efficiency of the semiconductor materials among all work stations, and reduces operation procedures. Therefore, automatic conveying of semiconductor materials is achieved.

Description

Technical Field

[0001] This invention relates to a transverse movement device, a conveying system, and its applications. Background Technology

[0002] In semiconductor manufacturing plants, storage devices, processing equipment, and other related equipment are typically set up separately in the production workshop, serving as collaborative workstations for handling semiconductor materials (such as wafers or photomasks). To improve transport efficiency and achieve automated transport, conveyor belts or lines are usually installed between the workstations to link them together.

[0003] However, due to potential obstacles along the path (such as factory columns, beams, etc.), and considering the connection between the workstation and the conveyor line, two workstations usually cannot be directly connected by just one conveyor line. Instead, at least two conveyor lines extending outward from these two workstations are needed, along with a transverse movement device. The transverse movement device changes the product's conveying path to enable the product to be transferred between the various conveyor lines.

[0004] In the above structure, if the conveyor line transporting semiconductor material is not aligned with the transverse device, or if the transverse device fails to connect with the conveyor line in a timely manner during the transport of semiconductor material, the semiconductor material may fall off. Therefore, the operator must control the transverse device step by step: first, pause the conveyor line transporting semiconductor material; after aligning the transverse device, restart the conveyor line, the semiconductor material is transported onto the transverse device, and the transverse device is moved to another conveyor line before restarting its drive. This operation significantly reduces the efficiency of semiconductor material transport and increases the number of operational steps. Summary of the Invention

[0005] To overcome the drawbacks of existing transverse conveying devices, such as the risk of semiconductor materials falling off and the difficulty in improving conveying efficiency, this invention provides a transverse conveying device, a conveying system, and its application. This transverse conveying device effectively prevents semiconductor materials from falling off during conveying and improves the conveying efficiency of semiconductor materials between workstations, reducing operational steps; thereby achieving automated conveying of semiconductor materials.

[0006] The present invention solves the above-mentioned technical problems through the following technical solutions:

[0007] This invention provides a transverse movement device that connects two parallel and spaced-apart conveyor lines at the same height. The transverse movement device includes a transverse movement unit capable of moving along a vertical line between the two conveyor lines. The device includes a first magnetic blocking mechanism and a second magnetic blocking mechanism. The first magnetic blocking mechanism is located at the conveying end of the transverse movement unit, and the second magnetic blocking mechanism is located at the port of the transverse movement device that connects to the conveyor lines. Both the blocking portions of the first and second magnetic blocking mechanisms are rotatably mounted on the magnetic blocking mechanism. When there is no interaction between the first and second magnetic blocking mechanisms, both are in a first state of blocking the movement of a container used to hold semiconductor materials. When there is interaction between the first and second magnetic blocking mechanisms, the blocking portions repel each other and rotate, reaching a second state that allows the container to pass smoothly.

[0008] Preferably, when the traversing unit moves away from the conveyor line, the first magnetic blocking mechanism and the second magnetic blocking mechanism do not interact. The blocking portions of both the first and second magnetic blocking mechanisms are higher than the traversing unit and the conveyor line to block the container. The blocked container includes the container moving from the conveyor line to the traversing unit and / or the container carried on the traversing unit during the movement.

[0009] Preferably, when the traversing unit approaches the conveyor line, the first magnetic blocking mechanism and the second magnetic blocking mechanism repel each other, such that the blocking portions of the first magnetic blocking mechanism and the second magnetic blocking mechanism are both lower than the traversing unit and the conveyor line, so that the container can pass through smoothly.

[0010] Preferably, the rotation axis of the first magnetic blocking mechanism is positioned below the lateral movement unit, and the rotation axis of the first magnetic blocking mechanism and the rotation axis of the second magnetic blocking mechanism are at the same height.

[0011] Preferably, both the first magnetic blocking mechanism and the second magnetic blocking mechanism are provided with permanent magnet structures. When the first magnetic blocking mechanism and the second magnetic blocking mechanism approach each other, the permanent magnet structures of the first magnetic blocking mechanism and the permanent magnets of the second magnetic blocking mechanism repel each other and rotate.

[0012] Preferably, the first magnetic blocking mechanism and the second magnetic blocking mechanism have a structure that is narrow at one end and wide at the other end.

[0013] Preferably, the first magnetic blocking mechanism and the second magnetic blocking mechanism are the same in size and shape.

[0014] Preferably, the traversing device further includes a driving component and a traversing track. The driving component is connected to the traversing unit and is used to drive the movement of the traversing unit. The traversing unit is disposed in the traversing track, and the traversing track is used to provide a movement path for the traversing unit.

[0015] Preferably, the traversing device further includes a frame.

[0016] More preferably, the frame is provided with the transverse track and the transverse unit, and the second magnetic blocking mechanism is located on one side of the frame connected to the conveyor line;

[0017] More preferably, a displacement sensor is provided within the frame along the length of the transverse track to determine the position of the transverse unit and feed the result back to the drive assembly.

[0018] More preferably, the traversing device further includes a blocking block, which encloses a partially enclosed restrictive space above the traversing unit along the side wall of the traversing device to prevent the container on the traversing unit from overshooting during movement.

[0019] The present invention also provides a semiconductor material delivery system, comprising a transverse device as described above and at least two delivery lines at the same height, parallel to each other and spaced apart, wherein the transverse device is located on a vertical line between the delivery lines.

[0020] The present invention also provides a semiconductor material delivery system, comprising a transverse device and at least two parallel and spaced-apart delivery lines at the same height. The transverse device is located on a vertical line between the delivery lines, connecting them. The transverse device includes a transverse unit capable of moving along the vertical line between the two delivery lines. The transverse unit includes a first magnetic blocking mechanism disposed at the delivery end of the transverse unit. The delivery line includes a third magnetic blocking mechanism disposed at the delivery port of the delivery line. Both the blocking portions of the first and third magnetic blocking mechanisms are rotatably mounted on the magnetic blocking mechanism. When the first and third magnetic blocking mechanisms do not interact, both are in a first state of blocking the movement of a container used to hold semiconductor materials. When the first and third magnetic blocking mechanisms interact, their blocking portions repel each other and rotate, reaching a second state that allows the container to pass smoothly.

[0021] The present invention also provides an application of the semiconductor material transport system described above in the wafer or wafer cassette transport process.

[0022] Compared with the prior art, the present invention has at least the following technical effects:

[0023] 1. The transverse transfer device of the present invention is connected to two parallel and spaced linear conveyor lines in a plane. By switching the position of the transverse transfer unit, the transverse transfer device is connected to one of the two conveyor lines respectively, thereby realizing the transfer of semiconductor material between the two linear conveyor lines.

[0024] 2. The present invention installs a magnetic blocking mechanism along the transmission direction of the semiconductor material in the transverse unit, which can prevent the container holding the semiconductor material from rushing out of the conveyor line and falling off; and when the transverse unit approaches the conveyor line, the blocking part of the magnetic blocking mechanism will automatically lower, allowing the container to pass smoothly, thereby realizing the automation of semiconductor conveying. Attached Figure Description

[0025] Figure 1 This is a three-dimensional structural diagram of a transverse moving device according to an embodiment of this application;

[0026] Figure 2 This is a top view of a transverse movement device according to an embodiment of this application;

[0027] Figure 3 This is a three-dimensional structural schematic diagram of a semiconductor material delivery system according to an embodiment of this application;

[0028] Figure 4 This is a partially enlarged schematic diagram of a semiconductor material delivery system according to an embodiment of this application;

[0029] Figure 5 This is a schematic diagram of the structure of a magnetic blocking mechanism according to an embodiment of this application;

[0030] Figure 6 This is a front view of a magnetic blocking mechanism according to an embodiment of this application.

[0031] Explanation of reference numerals in the attached figures:

[0032] 1. Horizontal movement device, 11. Horizontal movement unit 101, 102. First magnetic blocking mechanism 102. Second magnetic blocking mechanism 103. Rotating shaft 1001. Permanent magnet structure 1002. Drive assembly 104. Horizontal movement track 105. Frame 106. Blocking block 107. Conveyor line 2. First conveyor line 201. Second conveyor line 202. Detailed Implementation

[0033] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the scope of protection of this application.

[0034] In the prior art, situations such as the conveyor line not being aligned with the transverse transfer device, or the transverse transfer device not being timely connected with the conveyor line during the transport of semiconductor materials, can lead to the semiconductor materials falling off. Therefore, embodiments of this application provide a transverse transfer device for transferring semiconductor materials. Figure 1 This is a three-dimensional structural diagram of the transverse movement device of this application.

[0035] The transverse transfer device of this application is used to connect various conveyor lines in a semiconductor manufacturing plant, including conveyor lines extending from the production workshop, conveyor lines extending from the processing workshop, conveyor lines extending from the storage warehouse, etc.; the aforementioned conveyor lines transport containers from one workstation to another by means of transmission.

[0036] In this application, the semiconductor material may be a wafer, and the container may be a container for storing the wafer, such as a wafer box.

[0037] Figure 2 This is a top view of the transverse movement device of this application.

[0038] The transverse movement device 1 connects two parallel and spaced-apart conveyor lines 2 at the same height. The transverse movement device 1 includes a transverse movement unit 101. The transverse movement unit 101 can move along the vertical line between the two conveyor lines 2. The conveying end of the transverse movement unit 101 is provided with a first magnetic blocking mechanism 102, and the port 11 of the transverse movement device connected to the conveyor line 2 is provided with a second magnetic blocking mechanism 103. When the transverse movement unit 101 moves away from the conveyor line 2, the blocking parts of the first magnetic blocking mechanism 102 and the blocking parts of the second magnetic blocking mechanism 103 are both in a first state that blocks the movement of the container. The container is used to hold semiconductor materials. When the transverse movement unit 101 approaches the conveyor line 2, the blocking parts of the first magnetic blocking mechanism 102 and the blocking parts of the second magnetic blocking mechanism 103 are both in a second state that allows the container to pass smoothly.

[0039] The first state can be a state where the blocking part is above the transverse unit 101 and the conveyor line 2, so as to block the movement of the container. For example... Figure 1 As shown, preferably, the first state is that the blocking part is in a vertical state (or "upright state"); the vertical state is one of the states of the blocking part when the magnetic blocking mechanism switches between various states.

[0040] The second state can be characterized by the blocking part being positioned below the transverse unit and the conveyor line, allowing the container to pass through smoothly. For example... Figure 1 As shown, preferably, the second state is that the blocking part is in a horizontal state; the horizontal state is one of the states of the blocking part when the magnetic blocking mechanism switches between various states, so as to achieve the blocking effect of releasing the magnetic blocking mechanism.

[0041] The transverse unit 101 generally includes two closed sections and two conveying ends formed by the parallel arrangement of the two closed sections; "the conveying end of the transverse unit" refers to the port of the transverse unit 101 along the conveying direction, which can convey materials after being connected to the conveyor line.

[0042] The transverse movement device 1 includes two ports 11, which are arranged in opposite directions, or the two ports 11 are respectively arranged to correspond to two spaced conveyor lines 2; each port is connected to a conveyor line 2, so that the transverse movement unit 101 can connect to the corresponding conveyor line 2 after reaching a port.

[0043] In this application, based on the positional relationship between the "transverse moving device 1", the "transverse moving unit 101" and the "conveyor line 2", it can be known that the transverse moving device 1 is located on the vertical line between the conveyor lines 2, and the transverse moving unit 101 is located inside the transverse moving device 1, and thus can move inside it.

[0044] In this application, "the transverse movement unit 101 moves away from the conveyor line 2" means that the direction of movement of the transverse movement unit 101 is away from a conveyor line; combined with Figure 1 Those skilled in the art should understand that when the transverse unit 101 moves away from one conveyor line, the transverse unit 101 will move closer to another conveyor line.

[0045] In this application, the blocking part of the magnetic blocking mechanism is used to block moving containers, including but not limited to wafer cassettes moving from the transport line to the transverse unit, and wafer cassettes on the transverse unit 101 moving between a first position and a second position on the transverse device 1 corresponding to the two ports 11 respectively. In some embodiments, when the wafer cassette is located on the transverse unit in a moving state, the wafer cassette is in a relatively stationary state (non-moving state).

[0046] In this application, "the transverse unit 101 moves closer to the conveyor line 2" means that the direction of movement of the transverse unit 101 is closer to a conveyor line; Figure 3 This is a three-dimensional structural schematic diagram of the semiconductor material delivery system of this application. (Combined with...) Figure 3 Those skilled in the art should understand that when the transverse unit 101 approaches one conveyor line, the transverse unit 101 will move away from another conveyor line.

[0047] In some implementations... Figure 4 This is a partially enlarged schematic diagram of the semiconductor material delivery system of this application. Figure 4 As shown, the blocking part of the first magnetic blocking mechanism 102 is rotatably disposed at the conveying end of the transverse unit 101, and the blocking part of the second magnetic blocking mechanism 103 is rotatably disposed at the port of the transverse device 1. When the transverse unit 101 moves away from the conveyor line 2, the blocking parts of the first magnetic blocking mechanism 102 and the second magnetic blocking mechanism 103 are both higher than the transverse unit 101 and the conveyor line 2 to block the container. The blocked container includes at least the container moving from the conveyor line 2 to the transverse unit 101 and the container placed on the transverse unit 101 during the movement. When the transverse unit 101 approaches the conveyor line 2, the first magnetic blocking mechanism 102 and the second magnetic blocking mechanism 103 repel each other, so that the blocking parts of the first magnetic blocking mechanism 102 and the second magnetic blocking mechanism 103 are both lower than the transverse unit 101 and the conveyor line 2, so that the container can pass smoothly, thereby improving the conveying efficiency of semiconductor materials between various workstations and reducing operation steps; thereby realizing the automated conveying of semiconductor materials.

[0048] In this application, the first magnetic blocking mechanism 102 and the second magnetic blocking mechanism 103 primarily reduce their height through mutual repulsion. In other embodiments, the first magnetic blocking mechanism 102 and the second magnetic blocking mechanism 103 may also appropriately reduce their height through mutual attraction, thereby lowering the height of the first magnetic blocking mechanism and the second magnetic blocking mechanism, allowing the container to pass through the obstruction of the original magnetic blocking mechanism.

[0049] In this application, when the first magnetic blocking mechanism 102 and the second magnetic blocking mechanism 103 interact, the blocking portion of the first magnetic blocking mechanism 102 and the blocking portion of the second magnetic blocking mechanism 103 rotate in opposite directions; preferably, the blocking portion of the first magnetic blocking mechanism 102 rotates 90° clockwise and the blocking portion of the second magnetic blocking mechanism 103 rotates 90° counterclockwise; or, the blocking portion of the first magnetic blocking mechanism 102 rotates 90° counterclockwise and the blocking portion of the second magnetic blocking mechanism 103 rotates 90° clockwise, so that the height of the two blocking portions is reduced.

[0050] In a preferred embodiment, the blocking part of the first magnetic blocking mechanism 102 and the blocking part of the second magnetic blocking mechanism 103 can rotate clockwise or counterclockwise around the rotation axis 1001, which is perpendicular to the conveying direction; the rotation center line of the blocking part is located at the upper part of the center of gravity of the blocking part.

[0051] In this application, as Figure 3As shown, the transverse moving device 1 connects to the first conveyor line 201 and the second conveyor line 202, which are parallel to each other and spaced apart. The transverse moving device 1 includes a transverse moving unit 101, on which a first magnetic blocking mechanism 102 is provided. The two ports of the transverse moving device that are respectively connected to the first conveyor line 201 and the second conveyor line 202 are each provided with a second magnetic blocking mechanism 103. The working process of the first magnetic blocking mechanism and the second magnetic blocking mechanism of the transverse unit is as follows: (1) In the initial state, the transverse unit is connected to the first conveying line 201. The first magnetic blocking mechanism on the first conveying end (the conveying end near the first conveying line) of the transverse unit and the second magnetic blocking mechanism set at the first port (the port near the first conveying line) of the transverse device repel each other. The blocking parts of the two mechanisms are in a horizontal state and are lower than the transverse unit 101 and the first conveying line 201. At this time, the transverse unit 101 is far away from the second conveying line 202. The first magnetic blocking mechanism on the second conveying end (the conveying end near the second conveying line) of the transverse unit and the second magnetic blocking mechanism set at the second port (the port near the second conveying line) of the transverse device do not interact. The blocking parts of the two mechanisms are in a vertical state and are higher than the transverse unit 101 and the second conveying line 202. (2) When the transverse unit moves from the first conveyor line 201 to the second conveyor line 202, the repulsive effect between the first magnetic blocking mechanism on the first conveying end of the transverse unit and the second magnetic blocking mechanism provided at the first port of the transverse device gradually weakens. The blocking parts of the two mechanisms are in an inclined state that gradually changes from a horizontal state to a vertical state until the repulsive effect between the two blocking mechanisms completely disappears, and then they both become vertical. In the vertical state or the inclined state, the blocking parts of the two blocking mechanisms are higher than the transverse unit 101 and the first conveyor line 201. (3) When the transverse unit moves from the first conveyor line 201 to the second conveyor line 202, initially there is no repulsive effect between the first magnetic blocking mechanism on the second conveying end of the transverse unit and the second magnetic blocking mechanism provided at the second port of the transverse device. When the transverse unit 101 and the second conveyor line 202 approach each other to a certain distance, the two blocking mechanisms generate a repulsive effect and are in an inclined state that gradually changes from a vertical state to a horizontal state. (4) When the transverse unit is connected to the second conveyor line 202, the first magnetic blocking mechanism on the second conveying end of the transverse unit and the second magnetic blocking mechanism provided at the second port of the transverse device repel each other. The blocking parts of the two mechanisms are in a horizontal state and are lower than the transverse unit 101 and the second conveyor line 202. At this time, the transverse unit 101 is far away from the first conveyor line 201. The first magnetic blocking mechanism on the first conveying end of the transverse unit and the second magnetic blocking mechanism provided at the first port of the transverse device do not interact. The blocking parts of the two mechanisms are in a vertical filling state and are higher than the transverse unit 101 and the first conveyor line 201.

[0052] In a specific embodiment, the rotation shaft 1001 of the first magnetic blocking mechanism 102 is positioned below the transverse unit 101. The lower position of the rotation shaft 1001 prevents the blocking portion of the magnetic blocking mechanism from bulging out after rotation and affecting the container's transport. Furthermore, the rotation shaft 1001 of the first magnetic blocking mechanism 102 and the rotation shaft 1001 of the second magnetic blocking mechanism 103 are at the same height. This design allows for a greater repulsive force when the two magnetic blocking mechanisms are close together, resulting in a "horizontal" state. This avoids situations where the repulsive force is weak or the height of the two magnetic blocking mechanisms is not reduced to the appropriate level due to misalignment.

[0053] Figure 5 This is a schematic diagram of the structure of the first magnetic blocking mechanism or the second magnetic blocking mechanism. Figure 6 This is a front view of the magnetic blocking mechanism of this application.

[0054] In a specific embodiment, both the first magnetic blocking mechanism 102 and the second magnetic blocking mechanism 103 are provided with permanent magnet structures 1002. The permanent magnet structures 1002 repel each other, causing the blocking portions of the first magnetic blocking mechanism 102 and the second magnetic blocking mechanism 103 to rotate. Preferably, the blocking portions of the first magnetic blocking mechanism 102 and the second magnetic blocking mechanism 103 rotate synchronously.

[0055] In a preferred embodiment, the permanent magnet structure 1002 includes an N pole and a S pole, respectively disposed on both sides of the rotation axis 1001 of the first magnetic blocking mechanism 102 or on both sides of the rotation axis 1001 of the second magnetic blocking mechanism 103. More preferably, the N pole of the permanent magnet structure 1002 on the first magnetic blocking mechanism 102 is aligned with the N pole of the permanent magnet structure 1002 on the second magnetic blocking mechanism 103, and the S pole of the permanent magnet structure 1002 on the first magnetic blocking mechanism 102 is aligned with the S pole of the permanent magnet structure 1002 on the second magnetic blocking mechanism 103. Through the gradually increasing repulsive force as the first magnetic blocking mechanism 102 and the second magnetic blocking mechanism 103 approach each other, the two magnetic blocking mechanisms rotate from a "vertical" state to a "horizontal" state.

[0056] In a preferred embodiment, the first magnetic blocking mechanism 102 and the second magnetic blocking mechanism 103 have the same structure, including a blocking part and a fixing part. The fixing part is fixed to the transverse moving unit or transverse moving device. A rotating shaft is provided on the central axis of the blocking part, so that the blocking part is rotatably connected to the fixing part. Two N poles are provided on the blocking part on one side of the rotating shaft, and two S poles are provided on the blocking part on the other side of the rotating shaft. A component made of ferromagnetic material, such as an iron component, is provided on the fixing part. The iron component is aligned with the outermost N pole and / or S pole on the blocking part. When the first magnetic blocking mechanism 102 and the second magnetic blocking mechanism 103 approach each other, the two blocking mechanisms are in a "horizontal" state due to repulsion. When the first magnetic blocking mechanism 102 and the second magnetic blocking mechanism 103 move away from each other, the repulsion between the two blocking mechanisms disappears and they are in a "vertical" state. During the period when the repulsion disappears, the two blocking mechanisms may sway due to inertia. By setting iron components, when the repulsion between the blocking parts disappears, the magnetic poles of the blocking parts interact with the iron components on the fixed parts and quickly position themselves in a "vertical" state.

[0057] In a specific embodiment, the first magnetic blocking mechanism 102 and the second magnetic blocking mechanism 103 have a structure that is narrow at one end and wide at the other. For example... Figure 3 As shown, when the first magnetic blocking mechanism 102 and the second magnetic blocking mechanism 103 are in the first state, the first magnetic blocking mechanism 102 and the second magnetic blocking mechanism 103 have a structure that is narrower at the top and wider at the bottom. Specifically, both magnetic blocking mechanisms are convex parts, and the rotating shaft 1001 is located in the middle of the magnetic blocking mechanism. When in the first state, the upper part of the structure is light and the lower part is heavy. When the two magnetic blocking mechanisms approach each other, the repulsive force generated can overcome the original gravity of the structure, making both magnetic blocking mechanisms become "horizontal". When the two magnetic blocking mechanisms move away from each other, the repulsive force is eliminated, and the two magnetic blocking mechanisms are subjected to gravity, and both return to the "vertical" state.

[0058] In a specific implementation, the first magnetic blocking mechanism 102 and the second magnetic blocking mechanism 103 are identical in size and shape. Setting the two magnetic blocking mechanisms to be identical not only facilitates production but also allows for better alignment, enabling both to be lowered below the height of the conveyor line 2 and the transverse movement device 1.

[0059] In some embodiments, the lateral movement device 1 further includes a drive assembly 104 and a lateral movement track 105. The drive assembly 104 is connected to the lateral movement unit 105 and is used to drive the movement of the lateral movement unit 101. The lateral movement unit 101 is disposed in the lateral movement track 105, which provides a movement path for the lateral movement unit 101. The lateral movement track 105 enables the lateral movement unit 101 to move within a predetermined movement path, preventing gaps caused by the free movement of the lateral movement unit 101 and thus avoiding the container falling off.

[0060] In specific implementation methods, such as Figure 1 As shown, the transverse movement device 1 also includes a frame 106. This frame 106 provides support and constraint, encompassing all components of the transverse movement device 1, and can be suspended from the ceiling via a connection to a sling. Specifically, the frame 106 contains a transverse track 105 and a transverse movement unit 101; a second magnetic blocking mechanism 103 is located on one side of the frame 106 connected to the conveyor line 2. (Details follow...) Figure 1 As shown, the frame of the transverse device 1 includes two ports arranged in opposite directions, each port being connected to a conveyor line 2, so that the transverse unit 101 can connect to the corresponding conveyor line 2 after reaching a port. The second magnetic blocking mechanism 103 is provided at the two ports.

[0061] In a preferred embodiment, a displacement sensor (not shown) is provided within the frame 106 along the length of the transverse track 105 to determine the position of the transverse unit 101 and feed the result back to the drive assembly 104. The displacement sensor 107 can obtain the position of the transverse unit 101 and, through the settings of the control program in the controller, enable the transverse unit 101 to reach the accurate position and dock with the conveyor line 2.

[0062] In a specific embodiment, the transverse moving device 1 further includes a blocking block 107. The blocking block 107 encloses a partially enclosed restriction area along the side wall of the transverse moving device 1 above the transverse moving unit 101 to prevent the container on the transverse moving unit 101 from overshooting during its movement. This partially enclosed restriction area can also be referred to as a "fence" to prevent the container from tilting to the side of the transverse moving unit 101 or from rushing out of the transverse moving device 1 from the side of the transverse moving unit 101 when the transverse moving unit 101 moves on the transverse moving device 1.

[0063] In some embodiments, the transverse unit 101 includes two parallel sidewalls and a roller shaft disposed between the sidewalls; each roller shaft is connected to a driver disposed on one sidewall, and each roller shaft rotates in the same direction by the unilateral drive, so that the container on it can move forward or backward. If a dual-side drive is used, the movement path of the container being transported will be deviated if one side drive fails; therefore, a unilateral drive is more advantageous for the transverse unit of this application.

[0064] The present invention also provides a semiconductor material delivery system. Figure 3 A three-dimensional structural diagram of a semiconductor material delivery system; Figure 4 This is a partially enlarged schematic diagram of a semiconductor material delivery system.

[0065] The semiconductor material delivery system includes a transverse device 1 as described above and at least two parallel and spaced-apart delivery lines 2 at the same height, with the transverse device 1 located on the vertical line between the delivery lines 2.

[0066] In this application, the number of conveyor lines 2 can be multiple, such as two, three, four, etc., but they need to be parallel or approximately parallel; the transverse moving device 1 is located on the vertical line between each conveyor line 2 and is connected to the end of each conveyor line 2; the transverse moving unit 101 moves on the transverse moving device 1 to dock with each conveyor line 2.

[0067] In some embodiments, the conveyor line 2 consists of several conveying units, each of which includes two parallel sidewalls and a roller disposed between the sidewalls. Each roller is connected to a driver disposed on one sidewall, and each roller rotates in the same direction via the unilateral drive, enabling the container on it to move forward or backward. If a dual-side drive is used, the movement path of the container being conveyed will deviate if one side drive fails; therefore, a unilateral drive is more advantageous for the conveying unit of this application.

[0068] In a specific implementation, the transverse unit 101 and the conveying unit are identical in size and structure, that is, the distance between the two side walls of the transverse unit 101 is the same as the distance between the two side walls of the conveying unit, the length of the roller shaft of the transverse unit 101 is the same as the length of the roller shaft of the conveying unit, and the spacing between each roller shaft of the transverse unit 101 is the same as the spacing between each roller shaft of the conveying unit.

[0069] In a preferred embodiment, both the rollers at the end of the transverse unit 101 and the end of the conveyor line 101 are connected to variable frequency drive motors. For example, when a container is conveyed from the conveyor line 2 to the transverse unit 101, the variable frequency drive motor at the end of the transverse unit 101 is in an acceleration state, causing the container to accelerate from the end of the conveyor line 2 into the transverse unit 101, and the variable frequency drive motor at the end of the conveyor line 2 is in a deceleration state, causing the container accelerating into the transverse unit 101 to gradually decelerate.

[0070] The present invention also provides a semiconductor material delivery system, comprising a transverse device and at least two parallel and spaced-apart delivery lines at the same height. The transverse device is located on a vertical line between the delivery lines, connecting them. The transverse device includes a transverse unit capable of moving along the vertical line between the two delivery lines. The delivery end of the transverse unit is provided with a first magnetic blocking mechanism. Each delivery port of the delivery line is provided with a third magnetic blocking mechanism. When the transverse unit moves away from the delivery line, both the blocking portions of the first and third magnetic blocking mechanisms are in a first state that blocks the movement of the container. When the transverse unit moves closer to the delivery line, both the blocking portions of the first and third magnetic blocking mechanisms are in a second state that allows the container to pass smoothly.

[0071] In the semiconductor material transport system described above, the third magnetic blocking mechanism is disposed on the transport line, and its working process and result are equivalent to those of the second magnetic blocking mechanism disposed on the transverse device. Therefore, the structure, connection relationship, and placement of other components in this semiconductor material transport system can be designed according to the transverse device described above.

[0072] In a specific embodiment, the blocking part of the first magnetic blocking mechanism is rotatably disposed at the conveying end of the transverse unit, and the blocking part of the third magnetic blocking mechanism is rotatably disposed at the conveying port of the conveyor line. When the transverse unit moves away from the conveyor line, the blocking parts of both the first and third magnetic blocking mechanisms are higher than the transverse unit and the conveyor line to block the container moving from the conveyor line to the transverse unit. When the transverse unit moves closer to the conveyor line, the first and third magnetic blocking mechanisms repel each other, so that the blocking parts of both the first and third magnetic blocking mechanisms are lower than the transverse unit and the conveyor line, allowing the container to pass smoothly.

[0073] In a preferred embodiment, the rotation axis of the first magnetic blocking mechanism is positioned below the lateral movement unit, and the rotation axis of the first magnetic blocking mechanism and the rotation axis of the third magnetic blocking mechanism are at the same height.

[0074] In a preferred embodiment, both the first magnetic blocking mechanism and the third magnetic blocking mechanism are provided with permanent magnet structures; when the first magnetic blocking mechanism and the third magnetic blocking mechanism approach each other, the permanent magnet structures of the first magnetic blocking mechanism and the permanent magnets of the third magnetic blocking mechanism repel each other, causing the first magnetic blocking mechanism and the third magnetic blocking mechanism to rotate; the first magnetic blocking mechanism and the third magnetic blocking mechanism have a structure that is narrow at one end and wide at the other end.

[0075] In a specific embodiment, the traversing device further includes a driving component and a traversing track; the driving component is used to drive the movement of the traversing unit, and the traversing track is used to provide a movement path to the traversing unit.

[0076] In a preferred embodiment, the traversing device further includes a frame; the frame contains the traversing track and the traversing unit.

[0077] In a preferred embodiment, a displacement sensor is provided within the frame along the length of the transverse track to determine the position of the transverse unit and feed the result back to the drive assembly.

[0078] In a preferred embodiment, the traversing device further includes a blocking block, which forms a partially enclosed restrictive space above the traversing unit along the side wall of the traversing device to prevent the container on the traversing unit from overshooting during movement.

[0079] The semiconductor material delivery system described above can be applied during the delivery of semiconductor devices.

[0080] Example 1

[0081] This embodiment discloses a wafer traversing device. (Reference) Figure 1 and Figure 2 The transverse moving device 1 connects two parallel and spaced-apart conveyor lines 2 at the same height. The transverse moving device 1 includes a transverse moving unit 101. The transverse moving unit 101 can move along the vertical line between the two conveyor lines 2. The conveying end of the transverse moving unit 101 is provided with a first magnetic blocking mechanism 102 with a rotatable blocking part. The port of the transverse moving device 1 that is connected to the conveyor line 2 is provided with a second magnetic blocking mechanism 103 with a rotatable blocking part.

[0082] like Figure 3 and 4As shown, when the transverse unit 101 approaches the conveyor line 2, the first magnetic blocking mechanism 102 and the second magnetic blocking mechanism 103 repel each other and rotate, so that the blocking part of the first magnetic blocking mechanism 102 and the blocking part of the second magnetic blocking mechanism 103 are in the second state, that is, the horizontal state. Both blocking mechanisms are lower than the transverse unit 101 and the conveyor line 2, so that the wafer cassette containing the wafer can pass through smoothly.

[0083] When the transverse unit 101 moves away from the conveyor line 2, the first magnetic blocking mechanism 102 and the second magnetic blocking mechanism 103 do not interact. The blocking parts of the first magnetic blocking mechanism 102 and the second magnetic blocking mechanism 103 are in the first state, that is, the vertical state. Both blocking mechanisms are higher than the transverse unit 101 and the conveyor line 2 to block the movement of the wafer cassette.

[0084] Therefore, in this transverse device, the magnetic blocking mechanism blocks the forward-moving wafer cassette even when it is not subjected to magnetic force.

[0085] like Figure 5 and 6 As shown, both the first magnetic blocking mechanism 102 and the second magnetic blocking mechanism 103 are provided with permanent magnet structures 1002. The permanent magnet structures 1002 repel each other, causing the blocking portions of the first magnetic blocking mechanism 102 and the second magnetic blocking mechanism 103 to rotate. The N pole of the permanent magnet structure 1002 on the first magnetic blocking mechanism 102 is aligned with the N pole of the permanent magnet structure 1002 on the second magnetic blocking mechanism 103, and the S pole of the permanent magnet structure 1002 on the first magnetic blocking mechanism 102 is aligned with the S pole of the permanent magnet structure 1002 on the second magnetic blocking mechanism 103. Both the first magnetic blocking mechanism 102 and the second magnetic blocking mechanism 103 have a structure that is narrower at the top and wider at the bottom, and their dimensions and shapes are identical.

[0086] The transverse movement device 1 also includes a drive assembly 104, a transverse track 105, a frame 106, and a stop block 107.

[0087] The drive assembly 104 is connected to the transverse unit 105, and the drive assembly 104 is used to drive the movement of the transverse unit 101; the transverse unit 101 is disposed in the transverse track 105, and the transverse track 105 is used to provide a movement path to the transverse unit 101.

[0088] The frame 106 is provided with a transverse track 105 and a transverse unit 101. The second magnetic blocking mechanism 103 is located on one side of the frame 106 connected to the conveyor line 2. The frame 106 is provided with a displacement sensor (not shown) to determine the position of the transverse unit 101 and feed the result back to the drive assembly 104.

[0089] The blocking block 107 forms a partially enclosed restrictive space above the transverse unit 101 along the side wall of the transverse device 1, which is used to prevent the container on the transverse unit 101 from overshooting during the movement.

[0090] The transverse unit 101 includes two parallel sidewalls and a roller shaft disposed between the sidewalls; each roller shaft is connected to a driver disposed on one sidewall, and each roller shaft rotates in the same direction by the unilateral drive, so that the wafer cassette on it can move forward or backward.

[0091] Example 2

[0092] This embodiment discloses a wafer transport system. See [link to relevant documentation] Figure 3 and 4 It includes a transverse moving device 1 as described in Embodiment 1 and two parallel and spaced-apart conveyor lines 2 at the same height, with the transverse moving device 1 located on the vertical line between the conveyor lines 2.

[0093] The conveyor line 2 consists of several conveyor units. Each conveyor unit includes two parallel sidewalls and a roller shaft located between the sidewalls. Each roller shaft is connected to a driver located on one sidewall. Each roller shaft rotates in the same direction through the unilateral drive, so that the wafer cassette on it can move forward or backward.

[0094] The distance between the two side walls of the transverse unit 101 is the same as the distance between the two side walls of the conveying unit. The length of the roller shaft of the transverse unit 101 is the same as the length of the roller shaft of the conveying unit, and the spacing between each roller shaft of the transverse unit 101 is the same as the spacing between each roller shaft of the conveying unit.

[0095] Both the rollers at the end of the transverse unit 101 and the end of the conveyor line 2 are connected to variable frequency drive motors. When the wafer cassette is conveyed from the conveyor line 2 to the transverse unit 101, the variable frequency drive motor at the end of the transverse unit 101 is in an acceleration state, causing the wafer cassette to accelerate from the end of the conveyor line 2 into the transverse unit 101. The variable frequency drive motor at the end of the conveyor line 2 is in a deceleration state, causing the wafer cassette accelerating into the transverse unit to gradually decelerate.

[0096] Example 3

[0097] This embodiment discloses a wafer transport system, which includes a traversing device and at least two parallel and spaced transport lines at the same height. The traversing device 1 is located on the vertical line between the transport lines, connecting them. The traversing device includes a traversing unit. The traversing unit can move on the vertical line between the two transport lines. The transport end of the traversing unit is provided with a first magnetic blocking mechanism. The transport port of each transport line is provided with a third magnetic blocking mechanism. When the traversing unit moves away from the transport line, the blocking parts of the first and third magnetic blocking mechanisms are higher than the traversing unit and the transport line to block the moving wafer cassette. When the traversing unit moves close to the transport line, the blocking parts of the first and third magnetic blocking mechanisms repel each other and are lower than the traversing unit and the transport line, allowing the wafer cassette to pass smoothly.

[0098] The above description is only a preferred embodiment of the present invention, but the scope of protection of the present invention is not limited thereto. Any equivalent substitutions or modifications made by those skilled in the art within the scope of the technology disclosed in the present invention, based on the technical solution and inventive concept of the present invention, should be covered within the scope of protection of the present invention.

Claims

1. A horizontal transfer device, provided in a semiconductor material conveying system, the horizontal transfer device connecting two parallel and spaced conveying lines at the same height, the horizontal transfer device comprising a horizontal transfer unit, the horizontal transfer unit being movable along a vertical line between the two conveying lines, characterized in that the horizontal transfer device comprises a first magnetic blocking mechanism and a second magnetic blocking mechanism, the first magnetic blocking mechanism being provided at a conveying end of the horizontal transfer unit, and the second magnetic blocking mechanism being provided at a port of the horizontal transfer device which is connected to the conveying lines, the blocking part of the first magnetic blocking mechanism and the blocking part of the second magnetic blocking mechanism are rotatably provided on the magnetic blocking mechanisms; in the absence of interaction between the first magnetic blocking mechanism and the second magnetic blocking mechanism, the blocking part of the first magnetic blocking mechanism and the blocking part of the second magnetic blocking mechanism are in a first state of blocking the movement of a container for containing semiconductor material; in the presence of interaction between the first magnetic blocking mechanism and the second magnetic blocking mechanism, the blocking part of the first magnetic blocking mechanism and the blocking part of the second magnetic blocking mechanism are repelled from each other and rotate to a second state in which the container can pass smoothly; when the horizontal transfer unit is away from the conveying lines, the first magnetic blocking mechanism and the second magnetic blocking mechanism are not in interaction, and the blocking part of the first magnetic blocking mechanism and the blocking part of the second magnetic blocking mechanism are higher than the horizontal transfer unit and the conveying lines to block the container; when the horizontal transfer unit is close to the conveying lines, the first magnetic blocking mechanism and the second magnetic blocking mechanism repel each other, so that the blocking part of the first magnetic blocking mechanism and the blocking part of the second magnetic blocking mechanism are lower than the horizontal transfer unit and the conveying lines to allow the container to pass smoothly; the first magnetic blocking mechanism and the second magnetic blocking mechanism satisfy at least one of the following conditions: i.the rotation axis of the first magnetic blocking mechanism is arranged at a position lower than the horizontal transfer unit, and the rotation axis of the first magnetic blocking mechanism is at the same height as the rotation axis of the second magnetic blocking mechanism; ii.both the first magnetic blocking mechanism and the second magnetic blocking mechanism are provided with a permanent magnet structure, when the first magnetic blocking mechanism and the second magnetic blocking mechanism are close to each other, the permanent magnet structure of the first magnetic blocking mechanism and the permanent magnet of the second magnetic blocking mechanism repel each other and rotate; iii.the first magnetic blocking mechanism and the second magnetic blocking mechanism have a structure with a narrow end and a wide end; iv.the first magnetic blocking mechanism and the second magnetic blocking mechanism have the same size and shape; the horizontal transfer device further comprises a driving assembly and a horizontal transfer track, the driving assembly is connected to the horizontal transfer unit and is used to drive the movement of the horizontal transfer unit, and the horizontal transfer unit is arranged in the horizontal transfer track, and the horizontal transfer track is used to provide a movement path for the horizontal transfer unit. ​ ​ ​ 2. The traversing device of claim 1, wherein, ​ 3. The traversing device of claim 1, wherein, ​ 4. The traversing device of claim 1, wherein, ​ ​ ​ ​ ​ 5. The traversing device of claim 1, wherein ​ 6. The traversing device of claim 5, wherein, The horizontal moving device further comprises a frame; the frame satisfies at least one of the following conditions: i. The horizontal moving rail and the horizontal moving unit are arranged in the frame, and the second magnetic blocking mechanism is arranged on one side of the frame connected with the conveying line; ii. A displacement sensor is arranged in the frame along the length direction of the horizontal moving rail, for determining the position of the horizontal moving unit.

7. The traversing device of claim 6, wherein, The horizontal moving device further comprises a blocking block, which surrounds a partially closed limiting space along the side wall surface of the horizontal moving device above the horizontal moving unit, for preventing the overstroke of the containers on the horizontal moving unit during movement.

8. A semiconductor material delivery system characterized by, The horizontal moving device comprises at least two conveying lines arranged at the same height and parallel to each other and spaced apart, and the horizontal moving device is located on the perpendicular line between each of the conveying lines.

9. A semiconductor material conveying system, comprising a horizontal moving device and at least two conveying lines arranged at the same height and parallel to each other and spaced apart, and the horizontal moving device is located on the perpendicular line between each of the conveying lines, so as to connect each of the conveying lines; the horizontal moving device comprises a horizontal moving unit; the horizontal moving unit can move on the perpendicular line between the two conveying lines; characterized in that, the horizontal moving unit comprises a first magnetic blocking mechanism arranged at the conveying end of the horizontal moving unit; the conveying line comprises a third magnetic blocking mechanism arranged at the conveying port of the conveying line; the blocking part of the first magnetic blocking mechanism and the blocking part of the third magnetic blocking mechanism are arranged in a rotatable manner on the magnetic blocking mechanism; in the case that the first magnetic blocking mechanism and the third magnetic blocking mechanism do not interact, the blocking part of the first magnetic blocking mechanism and the blocking part of the third magnetic blocking mechanism are both in a first state of blocking the movement of containers for receiving semiconductor materials; in the case that the first magnetic blocking mechanism and the third magnetic blocking mechanism interact, the blocking part of the first magnetic blocking mechanism and the blocking part of the third magnetic blocking mechanism rotate after repelling each other, to reach a second state in which the containers can pass smoothly.

10. Application of the semiconductor material conveying system according to claim 8 or 9 in the conveying process of wafers or wafer boxes.

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