Variable-temperature variable-pressure coupling type high-concentration ozone and oxygen recovery system

Abstract

The invention relates to the technical field of ozone preparation, in particular to a variable-temperature variable-pressure coupling type high-concentration ozone and oxygen recovery system which comprises a plurality of groups of adsorption separation towers, a gas pipeline system, a valve control system, a heating system and a cooling system, the pipeline system comprises a low-concentration ozone inlet header pipe, a high-concentration ozone outlet pipe, a secondary purging pipe, an air purging pipe and an oxygen recycling pipe; the valve control system comprises a plurality of gas path and medium path automatic valves arranged on each adsorption tower; the heating system and the cooling system are used for heating and cooling the adsorption tower. In order to guarantee the concentration of recycled oxygen, oxygen is used for replacing air purging at the last stage of air purging desorption, or gas with the oxygen concentration not reaching the standard is discharged at the initial stage of adsorption, ozone at the desorption stage is effectively enriched, the ozone concentration is increased, and the circulation design is optimized, so that the energy consumption is reduced. The raw material gas consumption is greatly reduced; and the oxygen recycling amount is increased.

Description

Technical Field

[0001] This invention relates to the field of ozone preparation technology, specifically to a variable temperature and pressure coupled high-concentration ozone and oxygen recovery system. Background Technology

[0002] Ozone has advantages such as simple preparation, strong oxidizing power, fast reaction speed, and no secondary pollution. It is increasingly widely used in industries such as wastewater treatment, flue gas treatment, papermaking, printing and dyeing, pharmaceuticals and food processing, and the installed capacity is getting larger and larger.

[0003] Ozone is typically produced via high-voltage corona discharge. However, current ozone generation technologies suffer from low conversion rates, with ozone concentrations only around 10%. This low concentration severely impacts ozone solubility in water, reduces reaction rates, and lowers utilization efficiency. While some manufacturers employ catalytic oxidation to improve ozone oxidation, the investment costs are high, and the results are inconsistent. Furthermore, approximately 90% of the oxygen is not effectively utilized, increasing oxygen consumption costs and aeration equipment investment, thus limiting the widespread adoption of ozone oxidation technology.

[0004] While some domestic and international inventions have disclosed methods for ozone / oxygen separation, these are essentially still pressure swing adsorption (PSA) separation methods. These methods involve high investment costs and low oxygen recovery rates, resulting in poor economic efficiency. Furthermore, because the ozone generator's outlet pressure is low (generally below 0.1 MPa, and sometimes around 0.2 MPa), the range of PSA is limited. PSA separation not only fails to increase ozone concentration but often reduces it, making it only suitable for projects with low requirements for ozone concentration and reaction rate, and low operating pressures, thus exhibiting significant technical limitations.

[0005] Therefore, it is necessary to invent a variable temperature and pressure coupled high-concentration ozone and oxygen recovery system to solve the above problems. Summary of the Invention

[0006] The purpose of this invention is to provide a variable temperature and pressure coupled high-concentration ozone and oxygen recovery system, which, through modular design, aims to reduce construction costs, improve construction efficiency, and ensure construction quality.

[0007] To achieve this objective, the present invention adopts the following technical solution: A variable temperature and pressure coupled high-concentration ozone and oxygen recovery system is provided, comprising multiple adsorption separation towers, a gas pipeline system, a valve control system, a heating system, and a cooling system. The pipeline system includes a low-concentration ozone inlet main pipe, a high-concentration ozone outlet pipe, a secondary purge gas pipe, an air purge gas pipe, and an oxygen recovery pipe. The valve control system includes multiple automatic valves for gas and medium passages installed on each adsorption tower. The heating and cooling systems are used to heat and cool the adsorption towers. The system is configured to control five adsorption towers (adsorption tower A, adsorption tower B, adsorption tower C, adsorption tower D, and adsorption tower E) to operate cyclically according to a preset cycle. Each adsorption tower sequentially experiences the following three states within a complete cycle: S1 Adsorption State: Low concentration of ozone is introduced. Under low temperature conditions, the ozone is adsorbed by the adsorbent, and the unadsorbed oxygen is recovered by pressurization. S2 Secondary Desorption State: Low-concentration ozone from other adsorption towers, which is in the final stage of S3, is introduced to purge the adsorption tower in the initial stage of desorption to increase the ozone concentration. Desorption is carried out under high temperature or high temperature combined with negative pressure conditions to produce high-concentration ozone. S3 Air Desorption State: Clean air is introduced and the adsorbent is purged and desorbed under high temperature conditions. The low concentration of ozone generated is used as secondary purging gas to supply the adsorption tower in the S2 state. The preset cycle adopts an unequal-time adsorption-desorption method. The S1 state duration of a single adsorption tower accounts for 3 / 5 of the total cycle time of a single tower. The S2 and S3 states together constitute the desorption cycle, accounting for 2 / 5 of the cycle time. The S2 and S3 states have equal durations, each accounting for 1 / 5 of the total cycle time of a single tower. At any time, the system keeps three adsorption towers in the S1 adsorption state and two adsorption towers in the S2 and S3 desorption states, respectively.

[0008] As a preferred embodiment of a variable temperature and pressure coupled high-concentration ozone and oxygen recovery system, each adsorption separation tower has a shell-and-tube structure and is equipped with six gas path control valves (F1-F6) and four heating / cooling medium path control valves (F7-F10). The switching between three states, S1, S2, and S3, is achieved by controlling the opening and closing combinations of these valves. Valve F1 is connected to the low-concentration ozone pipe, valve F2 is connected to the purge end of the secondary purge gas pipe, valve F3 is connected to the high-concentration ozone outlet pipe, valve F4 is connected to the air purge gas pipe, valve F5 is connected to the backflush end of the secondary purge gas pipe, and valve F6 is connected to the oxygen recycling pipeline. Valve F7 is the heating medium output end of the adsorption separation tower, valve F8 is the cooling medium input end of the adsorption separation tower, valve F9 is the heating medium input end of the adsorption separation tower, and valve F10 is the cooling medium output end of the adsorption separation tower.

[0009] As a preferred solution for a variable temperature and pressure coupled high-concentration ozone and oxygen recovery system, in state S1, valves F1, F6, F8, and F10 are opened. Low-concentration ozone enters through F1, recycled oxygen flows out through F6, and cooling medium enters through F8 and flows out through F10. In state S2, open valves F3, F5, F7, and F9. Secondary purging gas enters through F5, high-concentration ozone flows out through F3, and heating medium enters through F9 and flows out through F7. In state S3, open valves F2, F4, F7, and F9. Purge air enters through F4, secondary purge air flows out through F2, and heating medium enters through F9 and flows out through F7.

[0010] As a preferred embodiment of a variable temperature and pressure coupled high-concentration ozone and oxygen recovery system, the cooling system includes a low-temperature medium insulation box and a cold water pump. It is connected to the cooling medium control valves F8 and F10 of multiple adsorption separation towers through cooling pipes. It can also pre-cool low-concentration ozone using a low-temperature medium before it enters the adsorption tower in state S1.

[0011] As a preferred embodiment of a variable temperature and pressure coupled high-concentration ozone and oxygen recovery system, the heating system includes a high-temperature medium insulation box and a hot water pump, which are connected to heating medium control valves F7 and F9 of multiple adsorption separation towers through heating pipes. It can also preheat the desorption air using the high-temperature medium.

[0012] As a preferred embodiment of a variable temperature and pressure coupled high-concentration ozone and oxygen recovery system, the high-temperature medium provided by the heating system is controlled between 60°C and 80°C, and the low-temperature medium provided by the cooling system is controlled between -10°C and -20°C.

[0013] As a preferred solution for a variable temperature and pressure coupled high-concentration ozone and oxygen recovery system, the preferred desorption air temperature is not higher than 90℃.

[0014] As a preferred embodiment of a variable temperature and pressure coupled high-concentration ozone and oxygen recovery system, the system switches to oxygen purging at the end of state S3, or discharges gases with substandard oxygen concentration at the beginning of state S1, in order to ensure the purity of the recycled oxygen.

[0015] As a preferred embodiment of a variable temperature and pressure coupled high-concentration ozone and oxygen recovery system, both the high-temperature medium insulation box and the low-temperature medium insulation box are equipped with temperature control devices to ensure that the temperature is within the operating range.

[0016] The beneficial effects of this invention are as follows: By coordinating multiple adsorption towers with the "3 adsorption and 2 desorption" unequal time cycle mode and connecting the three working states, the system can continuously output high-concentration ozone and simultaneously reuse oxygen, solving the product pressure and flow fluctuation problems caused by traditional intermittent operation. Compared with the traditional solution that requires more adsorption towers to achieve the same continuous processing capacity, the number of adsorption towers is effectively reduced, thus lowering the initial investment cost and floor space of the equipment.

[0017] To ensure the concentration of recycled oxygen, oxygen is used instead of air purging at the end of the air purging desorption process, or gases with insufficient oxygen concentration are discharged at the beginning of adsorption. This effectively enriches the ozone in the desorption stage, increases the ozone concentration, and the optimized circulation design significantly reduces feed gas consumption and increases oxygen recycling. The molecular sieve's adsorption capacity at -15℃ is approximately 3-5 times that at room temperature (20℃). Improving the molecular sieve's adsorption capacity through cooling adsorption can reduce the number of oxygen purgings or emissions per unit time, thereby increasing the oxygen recovery rate. The system offers flexibility with multiple operating modes, allowing users to select from various modes such as "temperature and pressure coupling," "temperature-only," or "low-temperature atmospheric pressure adsorption-high-temperature high-pressure desorption" to meet specific requirements for ozone concentration, pressure, and oxygen recovery rate in different application scenarios. It is highly flexible in operation and adaptable to various needs. Attached Figure Description

[0018] To more clearly illustrate the technical solutions of the embodiments of the present invention, the accompanying drawings used in the embodiments of the present invention will be briefly described below. Obviously, the drawings described below are merely some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without any creative effort.

[0019] Figure 1 This is a pipeline diagram of the adsorption tower of the present invention.

[0020] Figure 2 This is a diagram of the high-concentration ozone system of the present invention.

[0021] Figure 3 This is the state diagram of the 5 towers of the present invention. Detailed Implementation

[0022] The technical solution of the present invention will be further described below with reference to the accompanying drawings and specific embodiments.

[0023] The accompanying drawings are for illustrative purposes only and are schematic diagrams, not actual images. They should not be construed as limiting the scope of this patent. To better illustrate the embodiments of the present invention, some parts in the drawings may be omitted, enlarged, or reduced, and do not represent the actual dimensions of the product. It is understandable to those skilled in the art that some well-known structures and their descriptions may be omitted in the drawings.

[0024] In the accompanying drawings of the embodiments of the present invention, the same or similar reference numerals correspond to the same or similar components. In the description of the present invention, it should be understood that if terms such as "upper," "lower," "left," "right," "inner," and "outer" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, they are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, the terms used to describe positional relationships in the drawings are only for illustrative purposes and should not be construed as limiting the present patent. For those skilled in the art, the specific meaning of the above terms can be understood according to the specific circumstances.

[0025] In the description of this invention, unless otherwise explicitly specified and limited, the term "connection" or similar designation indicating a connection between components should be interpreted broadly. For example, it can refer to a fixed connection, a detachable connection, or an integral part; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium; it can refer to the internal communication between two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this invention based on the specific circumstances.

[0026] refer to Figures 1 to 3 This invention provides a variable temperature and pressure coupled high-concentration ozone and oxygen recovery system, comprising multiple adsorption separation towers, a gas pipeline system, a valve control system, a heating system, and a cooling system. The pipeline system includes a low-concentration ozone inlet main pipe, a high-concentration ozone outlet pipe, a secondary purge gas pipe, an air purge gas pipe, and an oxygen recovery pipe. The valve control system includes multiple automatic valves for gas and medium passages installed on each adsorption tower. The heating and cooling systems are used to heat and cool the adsorption towers. The system is configured to control five adsorption towers to operate cyclically according to a preset cycle, with each adsorption tower sequentially experiencing the following three states within a complete cycle: S1 Adsorption State: Low concentration of ozone is introduced. Under low temperature conditions, the ozone is adsorbed by the adsorbent, and the unadsorbed oxygen is recovered by pressurization. S2 Secondary Desorption State: Low-concentration ozone from other adsorption towers, which is in the final stage of S3, is introduced to purge the adsorption tower in the initial stage of desorption to increase the ozone concentration. Desorption is carried out under high temperature or high temperature combined with negative pressure conditions to produce high-concentration ozone. S3 Air Desorption State: Clean air is introduced and the adsorbent is purged and desorbed under high temperature conditions. The low concentration of ozone generated is used as secondary purging gas to supply the adsorption tower in the S2 state. The preset cycle employs a non-uniform adsorption-desorption method. The S1 state duration of a single adsorption tower accounts for 3 / 5 of the total cycle time, while the S2 and S3 states together constitute the desorption cycle, accounting for 2 / 5 of the total cycle time. Furthermore, the durations of S2 and S3 states are equal, each accounting for 1 / 5 of the total cycle time. At any given time, the system maintains three adsorption towers in the S1 adsorption state and two adsorption towers in the S2 and S3 desorption states, respectively. The non-uniform adsorption-desorption method is as follows: Figure 3 As shown; The heating system, including a high-temperature medium insulation tank and a hot water pump, is connected to heating medium control valves and pipelines of multiple adsorption separation towers, and is used to heat the adsorption material through a high-temperature medium. The cooling system, including a cryogenic medium insulation box and a cold water pump, is connected to the cooling medium control valves and pipelines of multiple adsorption separation towers and is used to cool the adsorbent material through the cryogenic medium. The refrigeration system includes a chiller, a chilled water pump, and the part located between the low-temperature medium insulation box and the chilled water pump; The compression purification system includes an air compressor, which is connected to an air purging pipe via an air purification device; An oxygen pressurization system includes an oxygen storage tank and a pressurization device connected to an oxygen reuse pipe. The oxygen storage tank is used to store oxygen compressed by the pressurization device. The negative pressure system is connected to the high-concentration ozone pipeline.

[0027] Each adsorption separation tower has a shell-and-tube structure and is equipped with six gas path control valves (F1-F6) and four heating / cooling medium path control valves (F7-F10). The switching between three states, S1, S2, and S3, is achieved by controlling the opening and closing combinations of these valves. Valve F1 is connected to the low-concentration ozone pipe, valve F2 is connected to the purge end of the secondary purge gas pipe, valve F3 is connected to the high-concentration ozone outlet pipe, valve F4 is connected to the air purge gas pipe, valve F5 is connected to the backflush end of the secondary purge gas pipe, and valve F6 is connected to the oxygen recycling pipeline. Valve F7 is the heating medium output end of the adsorption separation tower, valve F8 is the cooling medium input end of the adsorption separation tower, valve F9 is the heating medium input end of the adsorption separation tower, and valve F10 is the cooling medium output end of the adsorption separation tower.

[0028] This scheme configures 5 sets of shell-and-tube adsorption towers that can be heated and cooled, labeled as Adsorption Tower A, Adsorption Tower B, Adsorption Tower C, Adsorption Tower D, and Adsorption Tower E respectively. Each adsorption tower is equipped with 6 gas control valves and pipelines, labeled F1, F2, F3, F4, F5, and F6 respectively; each adsorption tower is equipped with 4 heating or cooling medium control valves and pipelines, labeled F7, F8, F9, and F10 respectively; valves for tower A are prefixed with "A", such as AF1, AF2-AF10, and so on, as shown in the appendix. Figure 1-2 As shown.

[0029] Each adsorption tower has three states: S1, S2, and S3. In the low-concentration ozone adsorption state, open valves F1, F6, F8, and F10. Low-concentration ozone enters through F1, recycled oxygen flows out through F6, and cooling medium enters through F8 and flows out through F10. Low-concentration ozone enters the adsorption tube of the adsorption tower through valve F1 and is adsorbed. Unadsorbed oxygen flows out of the adsorption tower through F6 and is reused after being pressurized. Low-temperature medium enters the shell of the adsorption tower through F8 to cool the adsorption material. After flowing out of the adsorption tower through F10, it flows back to the low-temperature medium insulation box for reuse.

[0030] In the secondary desorption state, open valves F3, F5, F7, and F9. The secondary purge gas enters through F5, the high-concentration ozone flows out through F3, and the heating medium enters through F9 and flows out through F7. Low-concentration ozone at the end of desorption in other adsorption towers is purged through a secondary purging pipeline into valve F5 to increase the ozone concentration in the initial stage of desorption. High-concentration ozone flows out of the adsorption tower through F3 and enters the negative pressure system for reuse. High-temperature medium enters the adsorption tower shell through F9 to heat the adsorbent material, and flows out of the adsorption tower through F7 and returns to the high-temperature medium insulation box for reuse.

[0031] In the air desorption state, open valves F2, F4, F7, and F9. The purging air enters through F4, the secondary purging air flows out through F2, and the heating medium enters through F9 and flows out through F7.

[0032] Clean air enters the adsorption tower through valve F4 to purge ozone from the tower. Low-concentration ozone flows out of the tower through valve F2 and enters the secondary purging pipeline to purge the tower during the initial desorption phase and increase the ozone concentration. High-temperature medium enters the tower shell through valve F9 to heat the adsorption material. After exiting the tower through valve F7, the medium flows back to the high-temperature medium insulation box for reuse.

[0033] By continuously generating high-concentration ozone and achieving oxygen recycling, ozone concentration can be increased by more than 100%, and oxygen recycling rate can reach over 80%. The adsorption capacity of the adsorbent material is directly proportional to the absolute pressure of the adsorbed gas within a certain range. Through positive pressure adsorption (typically, the absolute pressure at the ozone generator outlet is 0.2 MPa) and negative pressure desorption (0.05 MPa), the ozone concentration can be increased by approximately 50%. The adsorption capacity of the adsorbent material is inversely proportional to the absolute temperature within a certain range. Through low-temperature adsorption (approximately -15℃) and high-temperature desorption (approximately 30℃), the adsorption capacity of molecular sieves at low temperatures is approximately 2-4 times that at high temperatures, thereby increasing the ozone concentration by over 100%.

[0034] To ensure the concentration of reusable oxygen, oxygen is needed to replace air purging at the end of the air purging desorption process, or gases with insufficient oxygen concentration are discharged at the beginning of adsorption, resulting in oxygen waste and preventing complete oxygen recovery. Molecular sieves have an adsorption capacity approximately 3-5 times that at room temperature (20℃) at -15℃. Improving the adsorption capacity of molecular sieves through cooling adsorption can reduce the number of oxygen purgings or emissions per unit time, thereby increasing the oxygen recovery rate to over 80%.

[0035] The cooling system includes a low-temperature medium insulation box and a cold water pump. It is connected to the cooling medium control valves F8 and F10 of multiple adsorption separation towers through cooling pipes. It can also pre-cool low-temperature ozone before it enters the adsorption tower in the S1 state.

[0036] The heating system includes a high-temperature medium insulation box and a hot water pump. It is connected to the heating medium control valves F7 and F9 of multiple adsorption separation towers through heating pipes. It can also preheat the desorption air using the high-temperature medium.

[0037] The temperature of the high-temperature medium provided by the heating system is controlled between 60°C and 80°C, and the temperature of the low-temperature medium provided by the cooling system is controlled between -10°C and 20°C.

[0038] The preferred air temperature for desorption is not higher than 90°C.

[0039] The system switches to oxygen purging at the end of state S3, or discharges gases with substandard oxygen concentration at the beginning of state S1, in order to ensure the purity of the reused oxygen.

[0040] Both the high-temperature medium insulation box and the low-temperature medium insulation box are equipped with temperature control devices to ensure that the temperature remains within the operating range. The high-temperature medium insulation box should be equipped with an automatic heating system, and the heating method includes, but is not limited to, electric heating or other heat recovery devices. The low-temperature medium insulation box should be equipped with an automatic cooling device, which should include a refrigeration unit, a circulating pump, pipeline valves, etc. The automatic cooling device should start and stop automatically according to the set temperature. Depending on the amount of ozone required and the desired concentration, 2, 3, 4, 6, or 7 towers, or multiples thereof, can be used. The outer walls of the adsorption towers should be insulated.

[0041] This invention, through the coordination of multiple adsorption towers with a "3 adsorption, 2 desorption" unequal-time circulation mode and the connection of three working states, ensures that the system can continuously output high-concentration ozone while simultaneously reusing oxygen. It solves the problems of product pressure and flow fluctuation caused by traditional intermittent operation. Compared with the traditional solution that requires more adsorption towers to achieve the same continuous processing capacity, it effectively reduces the number of adsorption towers, lowers the initial investment cost of the equipment and the floor space required.

[0042] To ensure the concentration of recycled oxygen, oxygen is used instead of air purging at the end of the air purging desorption process, or gases with insufficient oxygen concentration are discharged at the beginning of adsorption. This effectively enriches the ozone in the desorption stage, increases the ozone concentration, and the optimized circulation design significantly reduces feed gas consumption and increases oxygen recycling. The molecular sieve's adsorption capacity at -15℃ is approximately 3-5 times that at room temperature (20℃). Improving the molecular sieve's adsorption capacity through cooling adsorption can reduce the number of oxygen purgings or emissions per unit time, thereby increasing the oxygen recovery rate. The system offers flexibility with multiple operating modes, allowing users to select from various modes such as "temperature and pressure coupling," "temperature-only," or "low-temperature atmospheric pressure adsorption-high-temperature high-pressure desorption" to meet specific requirements for ozone concentration, pressure, and oxygen recovery rate in different application scenarios. It is highly flexible in operation and adaptable to various needs.

[0043] It should be stated that the above-described specific embodiments are merely preferred embodiments of the present invention and the technical principles employed. Those skilled in the art should understand that various modifications, equivalent substitutions, and variations can be made to the present invention. However, such variations, as long as they do not depart from the spirit of the present invention, should be within the scope of protection of the present invention. Furthermore, some terminology used in this specification and claims is not limiting, but merely for ease of description.

Claims

1. A temperature- and pressure-coupled high-concentration ozone and oxygen recovery system, characterized in that: The system includes multiple adsorption separation towers, a gas pipeline system, a valve control system, a heating system, and a cooling system. The pipeline system includes a low-concentration ozone inlet main pipe, a high-concentration ozone outlet pipe, a secondary purge gas pipe, an air purge gas pipe, and an oxygen recycling pipe. The valve control system includes multiple automatic valves for gas and medium passages installed on each adsorption tower. The heating and cooling systems are used to heat and cool the adsorption towers. The system is configured to control five adsorption towers to operate cyclically according to a preset cycle. Each adsorption tower sequentially experiences the following three states within a complete cycle: S1 Adsorption State: Low concentration of ozone is introduced. Under low temperature conditions, the ozone is adsorbed by the adsorbent, and the unadsorbed oxygen is recovered by pressurization. S2 Secondary Desorption State: Low-concentration ozone from other adsorption towers, which is in the final stage of S3, is introduced to purge the adsorption tower in the initial stage of desorption to increase the ozone concentration. Desorption is carried out under high temperature or high temperature combined with negative pressure conditions to produce high-concentration ozone. S3 Air Desorption State: Clean air is introduced and the adsorbent is purged and desorbed under high temperature conditions. The low concentration of ozone generated is used as secondary purging gas to supply the adsorption tower in the S2 state. The preset cycle adopts an unequal-time adsorption-desorption method. The S1 state duration of a single adsorption tower accounts for 3 / 5 of the total cycle time of a single tower. The S2 and S3 states together constitute the desorption cycle, accounting for 2 / 5 of the cycle time. The S2 and S3 states have equal durations, each accounting for 1 / 5 of the total cycle time of a single tower. At any time, the system keeps three adsorption towers in the S1 adsorption state and two adsorption towers in the S2 and S3 desorption states, respectively.

2. The variable temperature and pressure coupled high-concentration ozone and oxygen recovery system according to claim 1, characterized in that: Each adsorption separation tower has a shell-and-tube structure and is equipped with six gas path control valves (F1-F6) and four heating / cooling medium path control valves (F7-F10). The switching between three states, S1, S2, and S3, is achieved by controlling the opening and closing combinations of these valves. Valve F1 is connected to the low-concentration ozone pipe, valve F2 is connected to the purge end of the secondary purge gas pipe, valve F3 is connected to the high-concentration ozone outlet pipe, valve F4 is connected to the air purge gas pipe, valve F5 is connected to the backflush end of the secondary purge gas pipe, and valve F6 is connected to the oxygen recycling pipeline. Valve F7 is the heating medium output end of the adsorption separation tower, valve F8 is the cooling medium input end of the adsorption separation tower, valve F9 is the heating medium input end of the adsorption separation tower, and valve F10 is the cooling medium output end of the adsorption separation tower.

3. The variable temperature and pressure coupled high-concentration ozone and oxygen recovery system according to claim 2, characterized in that: In state S1, valves F1, F6, F8, and F10 are opened. Low-concentration ozone enters through F1, recycled oxygen flows out through F6, and cooling medium enters through F8 and flows out through F10. In state S2, open valves F3, F5, F7, and F9. Secondary purging gas enters through F5, high-concentration ozone flows out through F3, and heating medium enters through F9 and flows out through F7. In state S3, open valves F2, F4, F7, and F9. Purge air enters through F4, secondary purge air flows out through F2, and heating medium enters through F9 and flows out through F7.

4. The variable temperature and variable pressure coupled high-concentration ozone and oxygen recovery system according to claim 3, characterized in that: The cooling system includes a low-temperature medium insulation box and a cold water pump. It is connected to the cooling medium control valves F8 and F10 of multiple adsorption separation towers through cooling pipes. It can also pre-cool low-temperature ozone before it enters the adsorption tower in the S1 state using a low-temperature medium.

5. A variable temperature and variable pressure coupled high-concentration ozone and oxygen recovery system according to claim 4, characterized in that: The heating system includes a high-temperature medium insulation box and a hot water pump. It is connected to the heating medium control valves F7 and F9 of multiple adsorption separation towers through heating pipes. It can also preheat the desorption air using the high-temperature medium.

6. The variable temperature and variable pressure coupled high-concentration ozone and oxygen recovery system according to claim 5, characterized in that: The temperature of the high-temperature medium provided by the heating system is controlled between 60°C and 80°C, and the temperature of the low-temperature medium provided by the cooling system is controlled between -10°C and 20°C.

7. A variable temperature and variable pressure coupled high-concentration ozone and oxygen recovery system according to claim 6, characterized in that: The preferred air temperature for desorption is not higher than 90°C.

8. A variable temperature and variable pressure coupled high-concentration ozone and oxygen recovery system according to claim 7, characterized in that: The system switches to oxygen purging at the end of state S3, or discharges gases with substandard oxygen concentration at the beginning of state S1, in order to ensure the purity of the reused oxygen.

9. A variable temperature and variable pressure coupled high-concentration ozone and oxygen recovery system according to claim 5, characterized in that: Both the high-temperature medium insulation box and the low-temperature medium insulation box are equipped with temperature control devices to ensure that the temperature remains within the operating range.

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