A photomask taking device of a chip photolithography machine

Abstract

The application discloses a photoetching plate taking device of a chip photoetching machine, and particularly relates to the technical field of taking and transporting, which comprises a taking tray, a plurality of suction cups, a front strip, an oblique inserting rod, a moving seat, a driving part and a limiting part, the suction cups are used for sucking and transporting the photoetching plate, the front strip is located on one side of the suction cups, the driving part is installed on the front strip, the oblique inserting rod is arranged on one side of the front strip, the limiting part is arranged on the outer wall of the oblique inserting rod, and the moving seat is arranged on one side of the oblique inserting rod. The self-checking part, the driving part and the limiting part are linked and controlled, so that the artificial forced mis-taking and transporting is prevented, the personnel factor is difficult to completely control, the taking and transporting under such non-compliance is prevented, and the problems of the complex operation link caused by errors, the difficulty in completely controlling the personnel factor and the difficulty in preventing the taking and transporting under such non-compliance are solved.

Description

Technical Field

[0001] This invention relates to the field of material handling and transportation technology, and more specifically, to a photomask handling device for a chip lithography machine. Background Technology

[0002] After picking up the photomask, the photomask picking device of the chip lithography machine achieves stable transportation through precise mechanical structure and automated control. This ensures that the photomask and silicon wafer are accurately aligned, avoids contamination or mechanical damage during transportation, reduces human intervention, and thus improves production efficiency and product yield, providing a key guarantee for high-precision chip manufacturing.

[0003] In existing publicly available literature, patent publication number CN106672616A discloses an automatic feeding and unloading device for photomasks in a chip lithography machine. This technology uses a first or second suction plate driven by an opening and closing power device. Both the first and second suction plates have clearance recesses on opposite sides. The automatic feeding and unloading device allows the photomask to enter from both sides and directly adsorb the photomask through the opening and closing of the first and second suction plates. The first and second suction plates do not contact the photomask film, thus avoiding wear or tearing of the film. However, this technology still has the following problems.

[0004] In chip lithography machines, the picking and transport of photomasks is often accomplished using a suction cup mechanism. However, due to the variety of photomask models, the model selected during picking and transport may not match the actual requirements, leading to incorrect picking and transport. Some operators, for the sake of convenience, force incorrect picking, which can easily cause serious consequences. Not only does the photomask fall due to improper picking, but it is also damaged during transport due to collisions caused by incorrect paths. Such incorrect operations not only damage the photomask itself but also throw the entire picking and transport process into chaos. Although certain management measures have been taken, the complexity of the operation and the difficulty in fully controlling human factors make it difficult to completely eliminate such non-compliant picking and transport situations. Summary of the Invention

[0005] In order to overcome the above-mentioned defects of the prior art, the present invention provides the following technical solution: a photomask picking device for a chip lithography machine, comprising a picking tray and a plurality of suction cups disposed below it, wherein the suction cups are used to pick up the photomask and transport it;

[0006] A front strip, located on one side of the suction cup, has a drive component mounted on it;

[0007] An inclined insertion rod is provided on one side of the front strip. A limiting member is provided on the outer wall of the inclined insertion rod, and a movable seat is provided on one side of the inclined insertion rod.

[0008] A spacer is installed on the upper surface of the inclined insertion rod, and the spacer is connected to multiple suction cups;

[0009] The self-checking part is arranged on the outer wall of the tray;

[0010] The self-checking part is used to check the type of the photoetching plate. When the type is not consistent with the set type, the front strip is rotated by the driving part to limit the front part of the tray from moving downward;

[0011] When the front strip is rotated, the inclined inserting rod is pressed, the inclined inserting rod is inserted into the inner part of the moving seat, and the limiting part is inserted into the inner part of the moving seat by the inclined inserting rod to limit the rear part of the tray from moving downward;

[0012] The inclined inserting rod drives the spacer to move at the same time, so that the distance between the plurality of suction cups and the photoetching plate is increased.

[0013] In a preferred embodiment, the driving part comprises:

[0014] The groove is arranged above the front strip, the transmission shaft is rotatably arranged in the inner part of the groove, and the bottom end of the transmission shaft is fixedly connected with the front strip;

[0015] The rudder is arranged on the top end of the transmission shaft, the output end of the rudder is used to drive the transmission shaft to rotate, and the moving seat is fixedly connected with the rudder.

[0016] In a preferred embodiment, the cross-sectional area of the groove is larger than the cross-sectional area of the front strip, and the transmission shaft is vertically arranged between the front strip.

[0017] In a preferred embodiment, the limiting part comprises:

[0018] The supporting frame is slidably arranged on the outer wall of the inclined inserting rod, the supporting frame is used to guide the movement of the inclined inserting rod, and the supporting frame is fixedly connected with the tray;

[0019] The sleeve block is slidably arranged on the inner wall of the supporting frame, the sleeve block is fixedly connected with the inclined inserting rod, one side of the outer wall of the supporting frame is fixedly provided with a supporting block, the supporting block and the sleeve block are fixedly connected with the elastic sheet, and the elastic sheet is used to provide elastic force to the sleeve block;

[0020] The inclined strip is fixedly arranged on the outer wall of the inclined inserting rod and away from the front strip, one side of the inclined strip is fixedly provided with a side rod, and the side rod is used to be inserted into the inner part of the moving seat.

[0021] In a preferred embodiment, the inclined inserting rod is arranged to be inclined, and an included angle is arranged between the inclined inserting rod and the front strip.

[0022] In a preferred embodiment, a gap is arranged between the side rod and the inclined inserting rod, and the length of the side rod is smaller than the length of the inclined inserting rod.

[0023] In a preferred embodiment, the spacer comprises:

[0024] A sliding block is fixed to the upper surface of the obliquely inserted rod, and is used to slide along the inner wall of the material taking disc.

[0025] A guide rod is installed in the inner wall of the sliding block, and is fixedly connected between the guide rod and the material taking disc, and is used to guide the sliding of the sliding block.

[0026] A linkage strip is fixed to the upper surface of the sliding block, and the top end of the linkage strip is fixed with a lifting frame.

[0027] A linkage rod is slidably installed in the inner wall of the lifting frame, and the lifting frame is obliquely arranged, and is used to press the linkage rod to move upward.

[0028] A groove rod is fixed to one end of the linkage rod, and the bottom end of the groove rod is fixed with a ring tube, the lower surface of the ring tube is fixedly connected with a plurality of suction tubes, the suction tubes are slidably connected between the ring tube and the material taking disc, and the suction tubes are connected with the suction disc.

[0029] In a preferred embodiment, the plurality of suction tubes are arranged in a circumferential distribution, the upper surface of the ring tube is connected with a valve, the top end of the valve is threadedly connected with a negative pressure hose, one end of the negative pressure hose is installed with a negative pressure fan, and the negative pressure fan is used to form a negative pressure state in the negative pressure hose.

[0030] In a preferred embodiment, the self-checking part comprises:

[0031] A bar code recognition sensor is installed on the outer wall of the material taking disc.

[0032] In a preferred embodiment, a pressure sensor is installed on the upper surface of the material taking disc and close to the center point of the material taking disc, a sensing end of the pressure sensor is installed with an electric cylinder, the output end of the electric cylinder is fixedly connected with the sensing end of the pressure sensor, the output end of the electric cylinder is used to push the pressure sensor to move, and the electric cylinder is fixedly connected with the moving seat.

[0033] The bottom end of the material taking disc is fixed with a threaded sleeve, the inner wall of the threaded sleeve is threadedly connected with a screw rod, and the outer wall of the threaded sleeve is installed with a mounting frame, and the mounting frame is used to guide the sliding of the threaded sleeve.

[0034] The servo motor is installed at one end of the mounting frame, and is used to drive the screw rod to rotate, and one side of the threaded sleeve is provided with a wireless controller, and the wireless controller is electrically connected with the servo motor.

[0035] Technical effects and advantages of the present application.

[0036] 1、 The application adopts self-checking parts, driving parts and limiting parts linkage control, and detects the photoetching plate model in real time through a bar code identification sensor, when the model is inconsistent with the setting, immediately drives the front bar to rotate through the steering engine, makes the front bar block the front of the material taking disc, prevents the material taking disc from moving downward, at the same time, the front bar pushes the oblique inserting rod to insert into the moving seat, and drives the side rod to insert cooperatively, forms double point inclined limiting, effectively prevents the rear of the material taking disc from moving downward, so that the whole process from identification to mechanical limitation is automatic, avoids artificial forced mis-taking transportation, guarantees the safety of the photoetching plate, avoids the taking transportation process from falling into a chaotic state, avoids the complexity of operation link, avoids the difficulty of fully controlling personnel factors, and avoids such non-compliant taking transportation situation.

[0037] 2、 When the photoetching plate model is inconsistent with the setting, the oblique inserting rod drives the sliding sleeve block to move along the guide rod, and then pushes the lifting frame to tilt upward through the linkage bar, extrudes the groove rod and the ring tube to rise, so that the suction pipe and the suction disc are lifted as a whole, the interval with the photoetching plate is increased, the distance between the multiple suction discs and the photoetching plate is automatically opened when the identification is inconsistent, the mis-suction of the multiple suction discs is prevented, the problem of the material taking disc falling or being damaged is avoided, and it is ensured that only when the model is matched, the photoetching plate can be sucked. BRIEF DESCRIPTION OF DRAWINGS

[0038] Figure 1 It is a front view structural schematic diagram of a photoetching plate taking device of a chip photoetching machine.

[0039] Figure 2 It is a bottom view structural schematic diagram of a photoetching plate taking device of a chip photoetching machine.

[0040] Figure 3 It is a truncated local structural schematic diagram of a moving seat and a steering engine connection.

[0041] Figure 4 It is a truncated local structural schematic diagram of a material taking disc and a support frame connection.

[0042] Figure 5 It is a truncated local structural schematic diagram of a moving seat and an electric cylinder connection.

[0043] Figure 6 It is a Figure 5 It is an enlarged structural schematic diagram of A in the application.

[0044] Figure 7 It is a bottom view local structural schematic diagram of a suction disc and a suction pipe connection.

[0045] Figure 8 It is a truncated local structural schematic diagram of a material taking disc.

[0046] The attached diagram is labeled as follows: 1. Feeding tray; 2. Suction cup; 3. Front strip; 4. Angled insert rod; 5. Moving seat; 6. Groove; 7. Drive shaft; 8. Servo motor; 9. Support frame; 10. Sleeve block; 11. Spring piece; 12. Support block; 13. Angled strip; 14. Side rod; 15. Sliding sleeve block; 16. Guide rod; 17. Linkage bar; 18. Lifting frame; 19. Linkage rod; 20. Groove rod; 21. Ring pipe; 22. Suction pipe; 23. Wireless controller; 24. Valve; 25. Negative pressure hose; 26. Negative pressure fan; 27. Barcode recognition sensor; 28. Electric cylinder; 29. ​​Pressure sensor; 30. Threaded sleeve; 31. Mounting frame; 32. Screw; 33. Servo motor. Detailed Implementation

[0047] The technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention.

[0048] The present invention will be further described in detail below with reference to the accompanying drawings.

[0049] Example 1:

[0050] like Figure 1 - Figure 2 The illustrated chip lithography machine's photomask picking device includes a picking tray 1 and multiple suction cups 2 located below it. The suction cups 2 are used to pick up and transport the photomask. A front bar 3 is located on one side of the suction cups 2, and a driving component is mounted on the front bar 3. A slanted insertion rod 4 is located on one side of the front bar 3, and a limiting component is provided on the outer wall of the slanted insertion rod 4. A movable seat 5 is provided on one side of the slanted insertion rod 4. A spacer is installed on the upper surface of the slanted insertion rod 4 and is connected to the multiple suction cups 2. A self-testing component is located on the outer wall of the picking tray 1. The self-testing component is used to detect the photomask model. If the model does not match the set model, the driving component drives the front bar 3 to rotate, thereby limiting the downward movement of the front part of the picking tray 1. When the front bar 3 rotates, it squeezes the slanted insertion rod 4, causing the slanted insertion rod 4 to insert into the movable seat 5. The slanted insertion rod 4 drives the limiting component to insert into the movable seat 5, thereby limiting the downward movement of the rear part of the picking tray 1. The slanted insertion rod 4 simultaneously drives the spacer to move, increasing the distance between the multiple suction cups 2 and the photomask.

[0051] The implementation principle of the embodiment is that: the self-checking part detects the type of the photoetching plate, when the type does not conform to the set type, the front strip 3 is driven to rotate by the driving part, so that the detection is carried out before the material taking and transportation process, which greatly improves the high accuracy of the material taking and transportation, and then the front strip 3 rotates to limit the front of the material taking disc 1, at this time, the front of the material taking disc 1 is limited to move downward, and the front strip 3 extrudes the inclined inserting rod 4 when rotating, so that the power of the front strip 3 is fully utilized to convert into the extrusion force of the inclined inserting rod 4, so that the inclined inserting rod 4 is inserted into the inside of the moving seat 5, so that the inclined inserting rod 4 and the moving seat 5 form an integrated state, at this time, the inclined inserting rod 4 limits the downward movement of the support frame 9, the support frame 9 limits the downward movement of the material taking disc 1, and the limiting part is also inserted into the inside of the moving seat 5 during the driving process of the inclined inserting rod 4, so as to limit the rear of the material taking disc 1 to move downward, fully utilizing the rotating force of the front strip 3, and the inclined inserting rod 4 also moves the spacer, so that the interval distance between the plurality of suction cups 2 and the photoetching plate becomes larger, preventing the suction cups 2 from accidentally sucking the photoetching plate whose type does not conform to the set type, and ensuring that the material taking and transportation of the photoetching plate is consistent with the photoetching plate conforming to the set type, so as to prevent such non-compliant material taking and transportation.

[0052] In the embodiment 1, the photoetching plate material taking device of the chip photoetching machine is disclosed.

[0053] In the embodiment, as shown in Figure 3 Figure 8 The driving part includes: a groove body 6, which is arranged above the front strip 3, a transmission shaft 7 is rotatably arranged in the inside of the groove body 6, and the bottom end of the transmission shaft 7 is fixedly connected with the front strip 3; a rudder 8 is arranged at the top end of the transmission shaft 7, the output end of the rudder 8 is used to drive the transmission shaft 7 to rotate, and the moving seat 5 is fixedly connected with the rudder 8. The cross-sectional area of the groove body 6 is larger than that of the front strip 3, and the transmission shaft 7 is arranged vertically between the front strip 3.

[0054] The implementation principle of the embodiment is that: when the type of the photoetching plate does not conform to the set type, the rudder 8 can be started by the wireless controller 23, the output end of the rudder 8 drives the transmission shaft 7 to rotate, so that the transmission shaft 7 rotates in the inside of the material taking disc 1, and the transmission shaft 7 can also rotate in the inside of the groove body 6, so that the transmission shaft 7 drives the front strip 3 to rotate clockwise, ensuring that the upper surface of the front strip 3 is rotationally limited on the lower surface of the material taking disc 1, and at the same time, the front strip 3 is no longer kept vertically with the groove body 6, but forms an included angle region between the front strip 3 and the groove body 6, so that the front strip 3 can limit the front region of the lower surface of the material taking disc 1, preventing the material taking disc 1 from moving downward.

[0055] In the embodiment, as shown in Figure 4 ​As shown in the figure, the limiting member comprises: a support frame 9 sliding on the outer wall of the inclined insertion rod 4, the support frame 9 being used for guiding the movement of the inclined insertion rod 4, the support frame 9 being fixedly connected with the material taking disc 1; a sleeve block 10 sliding on the inner wall of the support frame 9, the sleeve block 10 being fixedly connected with the inclined insertion rod 4, one side of the outer wall of the support frame 9 being fixedly provided with a supporting block 12, the supporting block 12 being fixedly connected with the sleeve block 10 through an elastic sheet 11, and the elastic sheet 11 being used for providing an elastic force to the sleeve block 10; an inclined strip 13 being fixedly arranged on the outer wall of the inclined insertion rod 4 and away from the front strip 3, one side of the inclined strip 13 being fixedly provided with a side rod 14, and the side rod 14 being used for being inserted into the inside of the moving seat 5. The inclined insertion rod 4 is arranged in an inclined manner, and an included angle is arranged between the inclined insertion rod 4 and the front strip 3. A gap is arranged between the side rod 14 and the inclined insertion rod 4, and the length of the side rod 14 is less than the length of the inclined insertion rod 4.

[0056] The implementation principle of the embodiment is as follows: during the clockwise rotation of the front strip 3, the end inclined surface of the inclined insertion rod 4 is pressed by the front strip 3. With the continuous rotation and pressing of the front strip 3 on the inclined insertion rod 4, the inclined insertion rod 4 is forced to move rightward in an inclined manner. The inclined insertion rod 4 stably moves rightward in an inclined manner along the inner wall of the support frame 9. The inclined insertion rod 4 drives the sleeve block 10 to move rightward in an inclined manner. The sleeve block 10 is pressed on the elastic sheet 11. At this time, the elastic sheet 11 is pressed on the supporting block 12, thereby providing an elastic force to the sleeve block 10. The inclined insertion rod 4 drives the inclined strip 13 to move rightward in an inclined manner. The inclined strip 13 drives the side rod 14 to move rightward in an inclined manner. The side rod 14 is inserted into the inside of the moving seat 5. At the same time, the inclined insertion rod 4 is also inserted into the inside of the moving seat 5. In this way, the inclined insertion rod 4 and the side rod 14 can be inserted into the inside of the moving seat 5 in an inclined state, thereby forming a double-point inclined limiting. The rear part of the material taking disc 1 is limited to move downward in an inclined double-point manner through the inclined insertion rod 4 and the side rod 14.

[0057] Embodiment 3: Based on the embodiment 2, the embodiment discloses a photoetching plate taking device of a chip photoetching machine.

[0058] In the embodiment, as shown in the figure, Figure 5 - Figure 7 As shown in the figure, the spacer comprises: a sliding sleeve block 15 fixedly arranged on the upper surface of the inclined insertion rod 4, the sliding sleeve block 15 being used for sliding along the inner wall of the material taking disc 1; a guide rod 16 installed on the inner wall of the sliding sleeve block 15, the guide rod 16 being fixedly connected with the material taking disc 1, and the guide rod 16 being used for guiding the sliding of the sliding sleeve block 15; a linkage strip 17 fixedly arranged on the upper surface of the sliding sleeve block 15, the top end of the linkage strip 17 being fixedly provided with a lifting frame 18;

[0059] A linkage rod 19 sliding on the inner wall of the lifting frame 18, the lifting frame 18 being arranged in an inclined manner, and the lifting frame 18 being used for pressing the linkage rod 19 to move upward; a groove rod 20 fixedly arranged on one end of the linkage rod 19, the bottom end of the groove rod 20 being fixedly provided with a ring tube 21, the lower surface of the ring tube 21 being fixedly connected with a plurality of suction tubes 22, the suction tubes 22 being slidably connected with the material taking disc 1, and the suction tubes 22 being connected with the suction disc 2.

[0060] The implementation principle of this embodiment is as follows: When the inclined insertion rod 4 is subjected to force and tilts to the right, it will cause the sliding block 15 to tilt to the right. The sliding block 15 moves along the outer wall of the guide rod 16 to ensure that the sliding block 15 tilts to the right stably. The sliding block 15 will cause the linkage bar 17 to tilt to the right, and the linkage bar 17 will cause the lifting frame 18 to tilt to the right. Due to the tilted setting, the inclined surface of the inner wall of the lifting frame 18 will squeeze the linkage rod 19, causing the linkage rod 19 to start to move upward. At the same time, the linkage rod 19 drives... The groove rod 20 moves upward, which in turn drives the ring tube 21 to move upward, increasing the distance between the ring tube 21 and the material picking tray 1. At the same time, the ring tube 21 drives multiple suction tubes 22 to move upward, so that the multiple suction tubes 22 are lifted upward along the inside of the material picking tray 1. Simultaneously, the suction tubes 22 cause the suction cups 2 to move upward, increasing the distance between the multiple suction cups 2 and the photomask. This ensures that the multiple suction cups 2 will not be accidentally or operated by other personnel to pick up the photomask. At this time, the photomask model does not match the set model, thus preventing such non-compliant material picking and transportation.

[0061] Example 4: Based on Example 3, this example discloses a photomask feeding device for a chip lithography machine:

[0062] In this embodiment, as Figure 3 - Figure 5 As shown, the self-test component includes a barcode recognition sensor 27, installed on the outer wall of the material handling tray 1. The barcode recognition sensor 27 can sense and identify the barcode model value on the photomask. If the identified value differs from the photomask barcode value set internally in the wireless controller 23, the wireless controller 23 activates the servo motor 8 to prevent accidental material handling. The wireless controller 23 also wirelessly transmits the incorrect material handling information to a back-end computer for monitoring by supervisors. The servo motor 8 can only be controlled wirelessly remotely by supervisors. If the barcode value identified by the barcode recognition sensor 27 matches the photomask barcode value set internally in the wireless controller 23, the wireless controller 23 does not need to activate the servo motor 8, and can instead activate the electric cylinder 28 for material handling and transport.

[0063] In this embodiment, as Figure 5 - Figure 8As shown, the plurality of suction pipes 22 are arranged in a circumferential distribution, the upper surface of the ring pipe 21 is communicated with a valve 24, the top end of the valve 24 is threadedly connected with a negative pressure hose 25, one end of the negative pressure hose 25 is provided with a negative pressure fan 26, the negative pressure fan 26 is used to form a negative pressure state in the negative pressure hose 25, the bottom end of the material taking disc 1 is fixedly provided with a threaded sleeve 30, the inner wall of the threaded sleeve 30 is threadedly connected with a screw rod 32, the outer wall of the threaded sleeve 30 is provided with a mounting frame 31, the mounting frame 31 is used to guide the threaded sleeve 30 to slide, a servo motor 33 is mounted on one end of the mounting frame 31, the servo motor 33 is used to drive the screw rod 32 to rotate, one side of the threaded sleeve 30 is provided with a wireless controller 23, and the wireless controller 23 is electrically connected between the servo motor 33. The upper surface of the material taking disc 1 and close to the position of the center point thereof is provided with a pressure sensor 29, the sensing end of the pressure sensor 29 is provided with an electric cylinder 28, and the output end of the electric cylinder 28 is fixedly connected with the sensing end of the pressure sensor 29. The output end of the electric cylinder 28 is used to push the pressure sensor 29 to move, and the electric cylinder 28 is fixedly connected with the moving seat 5.

[0064] The implementation principle of the embodiment is that when the material taking and transporting operation is performed, the pressure sensor 29 is pushed downward by the electric cylinder 28, the material taking disc 1 is driven to move downward by the pressure sensor 29, at this time, the front strip 3 is vertically aligned with the groove body 6, so that the material taking disc 1 can move downward along the outside of the front strip 3, the groove body 6 passes through the outside of the front strip 3 and moves downward, and the plurality of suction pipes 22 on the material taking disc 1 can move downward, the suction pipes 22 make the suction disc 2 press on the photolithography plate, and the sensing end of the pressure sensor 29 is pressed by the output end of the electric cylinder 28, when the pressure value sensed by the sensing end of the pressure sensor 29 is the pressure value set by the wireless controller 23, the electric cylinder 28 is turned off by the wireless controller 23.

[0065] At this time, the wireless controller 23 opens the valve 24 and starts the negative pressure fan 26, the negative pressure fan 26 makes the inside of the negative pressure hose 25 generate a negative pressure, simultaneously makes the inside of the valve 24 generate a negative pressure, and makes the inside of the suction pipe 22 generate a negative pressure, and makes the inside of the suction disc 2 generate a negative pressure, and the photolithography plate is negatively sucked, after being sucked, the pressure sensor 29 is driven to move upward by the electric cylinder 28, the material taking disc 1 is driven to move upward by the pressure sensor 29, simultaneously, the servo motor 33 is started, the servo motor 33 drives the screw rod 32 to rotate, the screw rod 32 stably rotates in the inside of the mounting frame 31, the threaded sleeve 30 is driven to move left under the action of the screw thread engagement force, the threaded sleeve 30 drives the material taking disc 1 to move left, until the material taking disc 1 moves to a specified transporting position, ensuring that the photolithography plate on the suction disc 2 can be subjected to the material taking and transporting operation.

[0066] The contents not described in the specification are all the prior art known by the skilled in the art, and the model parameters of the electric appliances are not specifically limited, and the conventional equipment can be used. In the technical solution, the electric appliance control elements not mentioned belong to the prior art, and therefore are not shown in the figure and will not be described here.

[0067] The above only describes the preferred embodiments of the present application and is not used to limit the present application. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application shall be included in the protection scope of the present application.

Claims

1. A photomask taking device of a chip photolithography machine, comprising a taking tray and a plurality of suction cups arranged below the taking tray, characterized in that: The suction disc is used for sucking and transporting a photoetching plate; A front strip is arranged on one side of the suction disc, and a driving member is arranged on the front strip; An oblique insertion rod is arranged on one side of the front strip, a limiting member is arranged on the outer wall of the oblique insertion rod, and a moving seat is arranged on one side of the oblique insertion rod; A spacing piece is arranged on the upper surface of the oblique insertion rod, the spacing piece is connected with the plurality of suction discs, and the spacing piece comprises: A sliding sleeve block is fixed to the upper surface of the oblique insertion rod, and the sliding sleeve block is used for sliding along the inner wall of the material taking disc; A guide rod is arranged on the inner wall of the sliding sleeve block, the guide rod is fixedly connected with the material taking disc, and the guide rod is used for guiding the sliding of the sliding sleeve block; A linkage strip is fixed to the upper surface of the sliding sleeve block, and a lifting frame is fixed to the top end of the linkage strip; A linkage rod is arranged in the inner wall of the lifting frame, the lifting frame is arranged obliquely, and the lifting frame is used for pressing the linkage rod to move upward; A groove rod is fixed to one end of the linkage rod, a ring tube is fixed to the bottom end of the groove rod, a plurality of suction tubes are fixedly connected to the lower surface of the ring tube, the suction tubes are slidably connected with the material taking disc, and the suction tubes are connected with the suction discs; A self-checking member is arranged on the outer wall of the material taking disc; The self-checking member is used for detecting the type of the photoetching plate, when the type does not conform to the set type, the front strip is driven to rotate by the driving member, so as to limit the front part of the material taking disc from moving downward; When the front strip rotates, the oblique insertion rod is pressed, the oblique insertion rod is inserted into the moving seat, the limiting member is driven to insert into the moving seat by the oblique insertion rod, and the rear part of the material taking disc is limited from moving downward; The oblique insertion rod drives the spacing piece to move, so that the spacing distance between the plurality of suction discs and the photoetching plate is increased.

2. A photomask fetching device for a chip photolithography machine according to claim 1, characterized in that: The driving member comprises: A groove body is arranged above the front strip, a transmission shaft is rotatably arranged in the groove body, and the bottom end of the transmission shaft is fixedly connected with the front strip; A rudder machine is arranged at the top end of the transmission shaft, the output end of the rudder machine is used for driving the transmission shaft to rotate, and the moving seat is fixedly connected with the rudder machine.

3. A photomask pick-up device for a chip photolithography machine according to claim 2, characterized in that: The cross-sectional area of the groove body is greater than the cross-sectional area of the front strip, and the transmission shaft is arranged vertically with the front strip.

4. The photomask feeding device for a chip lithography machine according to claim 1, characterized in that: The limiting member comprises: A support frame is arranged in the outer wall of the oblique insertion rod, the support frame is used for guiding the movement of the oblique insertion rod, and the support frame is fixedly connected with the material taking disc; A sleeve block is arranged in the inner wall of the support frame, the sleeve block is fixedly connected with the oblique insertion rod, one side of the outer wall of the support frame is fixedly connected with a support block, the support block is fixedly connected with the sleeve block through a spring piece, and the spring piece is used for providing elastic force to the sleeve block; An oblique strip is fixed to the outer wall of the oblique insertion rod and away from the front strip, one side of the oblique strip is fixedly connected with a side rod, and the side rod is used for being inserted into the moving seat.

5. A photomask handling device for a chip photolithography machine according to claim 4, characterized in that: The oblique insertion rod is arranged obliquely, and an included angle is arranged between the oblique insertion rod and the front strip.

6. A photomask handling device for a chip photolithography machine according to claim 4, wherein: A gap is arranged between the side rod and the oblique insertion rod, and the length of the side rod is less than the length of the oblique insertion rod.

7. The photomask handling device of claim 1, wherein: the photomask handling device is a chip photolithography machine. A plurality of the suction tubes are arranged in a circumferential distribution, a valve is arranged on the upper surface of the ring tube, a negative pressure hose is threadedly connected to the top end of the valve, a negative pressure fan is arranged at one end of the negative pressure hose, and the negative pressure fan is used for forming a negative pressure state in the negative pressure hose.

8. The photomask fetching device of a chip photolithography machine according to claim 1, wherein: The self-checking member comprises: A bar code recognition sensor is arranged on the outer wall of the material taking disc.

9. The photomask handling device of claim 1, wherein: the photomask handling device is a chip photolithography machine. The upper surface of the material taking disc is provided with a pressure sensor near the position of the center point, a cylinder is mounted on the sensing end of the pressure sensor, the output end of the cylinder is fixedly connected with the sensing end of the pressure sensor, the output end of the cylinder is used for pushing the pressure sensor to move, and the cylinder is fixedly connected with the moving seat; ​ The bottom end of the material taking disc is fixedly provided with a threaded sleeve, the inner wall of the threaded sleeve is threadedly connected with a screw rod, and the outer wall of the threaded sleeve is provided with a mounting frame for guiding the threaded sleeve to slide; A servo motor is mounted on one end of the mounting frame, the servo motor is used for driving the screw rod to rotate, one side of the threaded sleeve is provided with a wireless controller, and the wireless controller is electrically connected with the servo motor.

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