Excimer laser electrode assembly assembling tool and assembling method

Abstract

The invention relates to the technical field of lasers, and provides an excimer laser electrode assembly assembling tool and method. The electrode assembly assembling tool comprises a bottom plate. The two opposite side plates are arranged on the bottom plate; the anode supporting structure comprises anode positioning pieces arranged on the two side plates, and the anode positioning pieces are used for supporting an anode assembly; the cathode supporting structure comprises a cross beam and a cathode support, the cross beam is arranged on the bottom plate and located between the two side plates, the cathode support is installed on the cross beam, and the cathode support is used for supporting a cathode assembly. The electrode assembly assembling tool is used for supporting an anode assembly and a cathode assembly of a discharge cavity and enabling the anode assembly and the cathode assembly to be suspended so as to facilitate installation of other parts on an electrode piece.

Description

Technical Field

[0001] This invention relates to the field of laser technology, and provides an electrode assembly fixture and assembly method. Background Technology

[0002] Photolithography is widely used in the manufacturing process of integrated circuits. It determines the circuit structure on the chip by transferring the fine patterns on a mask onto a silicon wafer. The rapid development of very large-scale integrated circuits is inseparable from the support of photolithography, especially in improving resolution and yield.

[0003] Excimer lasers, as a special type of laser source, have been introduced into photolithography. They are not limited by the intensity of the pump source and can provide sufficient photon density over a wide wavelength range, thereby achieving higher pattern resolution.

[0004] An excimer laser consists of a discharge cavity, power supply, linewidth narrowing, beam detection, optical path transmission, beam pulse width broadening, and control system, capable of emitting stable and high-energy vacuum ultraviolet light. In practical applications, by filling the discharge cavity with a specific pressure and type of gas, combined with high-voltage pulsed discharge, gas molecules can be effectively excited to generate a short-wavelength laser beam, which can then be used for precise photolithography. To ensure the efficient operation and assembly of the discharge cavity, precise positioning and fixation of each component are required. Summary of the Invention

[0005] This invention provides an assembly fixture for an excimer laser electrode assembly, which supports the anode and cathode assemblies of the discharge cavity to facilitate the installation of other parts on the electrode assembly.

[0006] This invention also provides a method for assembling an excimer laser electrode assembly.

[0007] A first aspect of the present invention provides an assembly fixture for an excimer laser electrode assembly, comprising: Base plate; Two oppositely arranged side plates are mounted on the base plate; An anode support structure, the anode support structure including anode positioning members disposed on the two side plates, the anode positioning members being used to support the anode assembly; A cathode support structure includes a crossbeam disposed on the base plate and located between the two side plates, and a cathode support mounted on the crossbeam, the cathode support being used to support the cathode assembly.

[0008] According to one embodiment of the present invention, it further includes an upper cavity support column, wherein there are multiple upper cavity support columns disposed on the base plate, and the upper cavity support columns are used to support the upper cavity body.

[0009] According to one embodiment of the present invention, the anode positioning element includes: An anode positioning and fixing component is connected to the side plate; An anode positioning pin is installed on the anode positioning fixture.

[0010] According to one embodiment of the present invention, the cathode holder is mounted on the crossbeam by means of a slot engagement.

[0011] According to one embodiment of the present invention, the side plate is connected to the bottom plate by a corner piece.

[0012] A second aspect of the present invention provides a method for assembling an excimer laser electrode assembly, employing the excimer laser electrode assembly assembly fixture described above, comprising: The anode assembly is assembled by supporting it on the anode positioning member between the two side plates; The cathode assembly is placed on the cathode holder mounted on the crossbeam for testing or assembly.

[0013] According to one embodiment of the present invention, the assembly fixture further includes a plurality of upper cavity support columns disposed on the base plate, and the assembly method further includes: Place the upper cavity body on the upper cavity support; The assembled anode assembly and / or cathode assembly are installed into the upper cavity.

[0014] According to one embodiment of the present invention, the step of supporting the anode assembly on the anode positioning member includes: The anode base plate is supported on the anode positioning member, and other parts of the anode assembly are assembled on the anode base plate.

[0015] According to an embodiment of the present invention, the step of installing the cathode assembly into the upper cavity includes: The cathode ceramic component, the cathode copper sheet, and the cathode plate are sequentially installed into the upper cavity.

[0016] According to one embodiment of the present invention, the step of placing the cathode assembly on the cathode holder includes: The cathode plate and cathode ceramic component are placed on the cathode holder to check whether the machining hole positions match.

[0017] The electrode assembly fixture provided by the first aspect of the present invention, through the precise engagement of the anode positioning pin and the anode assembly positioning hole, restricts the lateral and rotational degrees of freedom of the anode assembly. The anode assembly is supported without wobbling, and the mounting holes of each part can be precisely aligned during assembly, significantly reducing assembly errors and ensuring that the final accuracy of the anode assembly meets the high-voltage discharge requirements of the discharge chamber. The cathode support structure is located between the two side plates, independently distributed from the anode support structure, with no contact between them and sufficient spacing, allowing for simultaneous assembly of the anode and cathode assemblies. Operators do not need to frequently move parts to avoid collisions, greatly improving assembly efficiency and preventing damage to parts caused by collisions. The anode assembly is quickly positioned by the positioning pin, and the cathode assembly is quickly installed through the engagement of the cathode holder and the slot of the crossbeam, eliminating the need for manual measurement, marking, or repeated adjustments to the part positions, shortening the positioning time of a single component. Simultaneously, the anode and cathode assemblies can be assembled synchronously, avoiding the time wasted by the traditional serial process of assembling the anode first and then the cathode, significantly improving overall assembly efficiency and adapting to mass production needs. Precise anode and cathode assembly ensures that their relative positions after installation in the upper cavity meet design requirements. This avoids excessively strong or weak local electric fields during high-voltage discharge in the discharge cavity due to assembly deviations, ensuring the wavelength accuracy and energy stability of the excimer laser output and reducing laser performance fluctuations caused by uneven discharge.

[0018] According to the electrode assembly method provided in the second aspect of the present invention, the precise positioning of the anode locating pin restricts the lateral and rotational degrees of freedom of the anode assembly. The assembly of the anode base plate and subsequent parts is based on the locating pin, significantly improving the alignment accuracy of the mounting holes and controlling the assembly error to a very small range. This ensures that the anode assembly can ultimately meet the accuracy requirements of high-voltage discharge in the discharge chamber, avoiding unstable laser output due to assembly errors. Hole position detection is performed directly on the cathode holder without the need to transfer parts. The detection operation is simple and intuitive, allowing for rapid detection and timely correction of hole position deviations. This avoids bringing unqualified parts into the subsequent assembly process, reducing assembly rework due to hole mismatch and lowering time and material costs. This method not only completes the assembly of the anode and cathode assemblies but also allows for direct hole position detection of the cathode assembly on the cathode holder without the need for additional detection fixtures or equipment, simplifying the process and reducing equipment investment costs. Detection and assembly are completed on the same fixture, reducing the number of part handling operations, avoiding damage to parts during handling, and improving the overall process continuity. Attached Figure Description

[0019] To more clearly illustrate the technical solutions in this invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this invention. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0020] Figure 1 This is a schematic perspective view of the electrode assembly fixture provided by the present invention.

[0021] Figure 2 This is a schematic exploded view of the anode assembly provided by the present invention.

[0022] Figure 3 This is a schematic exploded view of the cathode assembly detection provided by the present invention.

[0023] Figure 4 This is a schematic exploded view of the cathode assembly provided by the present invention.

[0024] Figure 5 This is a schematic perspective view of the upper cavity, cathode assembly, and anode assembly provided by the present invention.

[0025] Figure 6 This is a schematic cross-sectional view of the upper cavity, cathode assembly, and anode assembly provided by the present invention.

[0026] Figure 7 This is a schematic flowchart of the assembly method of the electrode assembly provided by the present invention.

[0027] Figure label: 100. Base plate; 102. Side plate; 104. Anode positioning component; 106. Crossbeam; 108. Cathode support; 110. Upper cavity support; 112. Upper cavity; 114. Anode positioning fastener; 116. Anode positioning pin; 118. Corner piece; 120. Anode base plate; 122. Cathode ceramic component; 124. Cathode plate copper sheet; 126. Cathode plate. Detailed Implementation

[0028] The embodiments of the present invention will be described in further detail below with reference to the accompanying drawings and examples. The following examples are for illustrative purposes only and should not be construed as limiting the scope of the invention.

[0029] like Figures 1 to 6 As shown, a first aspect of the present invention provides an electrode assembly fixture, comprising: Base plate 100; Two oppositely arranged side plates 102 are mounted on the base plate 100; An anode support structure includes an anode positioning member 104 disposed on two side plates 102, the anode positioning member 104 being used to support the anode assembly; The cathode support structure includes a crossbeam 106 disposed on a base plate 100 and located between two side plates 102, and a cathode support 108 mounted on the crossbeam 106. The cathode support 108 is used to support the cathode assembly.

[0030] According to the first aspect of the present invention, the electrode assembly fixture provides a precise fit between the anode positioning pin 116 and the anode assembly positioning hole, which restricts the lateral and rotational degrees of freedom of the anode assembly. The anode assembly is supported without wobbling, and the mounting holes of each part can be precisely aligned during assembly, significantly reducing assembly errors and ensuring that the final accuracy of the anode assembly meets the high-voltage discharge requirements of the discharge chamber. The cathode support structure is located between the two side plates 102, independently distributed from the anode support structure, with no contact and sufficient spacing between them. This allows for simultaneous assembly of the anode and cathode assemblies, eliminating the need for frequent component movement and significantly improving assembly efficiency while preventing damage to components due to collisions. The anode assembly is quickly positioned using the positioning pin, and the cathode assembly is quickly installed using the slot between the cathode holder 108 and the crossbeam 106. This eliminates the need for manual measurement, marking, or repeated adjustments to component positions, shortening the positioning time for a single component. Simultaneously, the anode and cathode assemblies can be assembled synchronously, avoiding the time wasted in the traditional serial process of assembling the anode first and then the cathode. Overall assembly efficiency is significantly improved, adapting to mass production needs. Precise anode and cathode assembly ensures that their relative positions after installation in the upper cavity 112 meet design requirements, avoiding excessively strong or weak local electric fields during high-voltage discharge in the discharge cavity due to assembly deviations. This guarantees the wavelength accuracy and energy stability of the excimer laser output and reduces laser performance fluctuations caused by uneven discharge.

[0031] Please continue reading Figures 1 to 6 The electrode assembly fixture provided in the first aspect of the present invention addresses the problems of difficult positioning and unstable support when assembling the anode and cathode components of the excimer laser discharge cavity. Through the modular structural design of the base plate 100, side plate 102, anode support, and cathode support, it achieves synchronous and precise support and assembly of the two types of components.

[0032] The base plate 100 is a rectangular rigid metal plate made of high-strength alloy, possessing mechanical properties that resist bending and torsional deformation. Its core function is to provide a stable installation reference for the side plate 102 and the cathode support structure, and to evenly transfer the load of the entire fixture to the ground or workbench. The surface of the base plate 100 is treated with ultra-precision milling, with extremely small flatness error, ensuring that the side plate 102 and the crossbeam 106 remain perpendicular and parallel after installation. The base plate 100 has multiple threaded holes for fixing the side plate 102, the crossbeam 106, and the optional upper cavity support 110. The positions of the threaded holes are precisely positioned to ensure accurate relative positioning of each component after installation, eliminating the risk of misalignment. The edges of the base plate 100 are rounded to prevent scratches to operators during assembly, and an anti-slip pad can be added to the bottom to prevent the fixture from sliding during assembly operations.

[0033] The two side plates 102 are rectangular metal plates made of the same material as the base plate 100. They are vertically and relatively fixed to the two sides of the base plate 100, forming a clamping structure. Their core function is to install the anode positioning components 104, providing longitudinal support for the anode assembly. The side plates 102 are connected to the base plate 100 via corner brackets 118. The corner brackets 118 are L-shaped metal components, with one end fixed to the outer wall of the side plate 102 by bolts, and the other end fixed to the upper surface of the base plate 100. After the bolts are tightened, they are locked with anti-loosening washers to prevent the side plates 102 from tilting due to long-term vibration. The height and spacing of the two side plates 102 are designed so that the height is adapted to the support requirements of the anode assembly, and the spacing is adapted to the length of the anode assembly, allowing the anode assembly to be stably mounted between the anode positioning components 104 on the two side plates 102. The inner sidewalls of the side plates 102 are flattened to ensure that the anode positioning components 104 remain horizontal after installation, without any local protrusions that could cause instability in the support.

[0034] The anode support structure consists of anode positioning components 104 symmetrically arranged on two side plates 102. Its core function is to support the anode assembly and provide a positioning reference for its assembly, preventing lateral displacement or tilting during assembly. Multiple anode positioning components 104 are present on each side plate 102, evenly distributed along the height of the side plate 102 to ensure balanced force distribution on the anode assembly after support. Each anode positioning component 104 includes an anode positioning fixing component 114 and an anode positioning pin 116. The positioning pin fixing component is a rectangular metal block, fixed to the inner wall of the side plate 102 by bolts, and has a circular mounting hole. The positioning pin is a cylindrical metal component; one end is inserted into the mounting hole with an interference fit and locked by a set screw, while the other end extends out of the fixing component. The outer diameter of the extended end precisely matches the size of the positioning hole in the anode assembly. When the anode assembly is placed, the positioning pin inserts into the positioning hole, achieving rapid positioning and stable support of the anode assembly.

[0035] The cathode support structure consists of a crossbeam 106 and a cathode holder 108, located between two side plates 102 and fixed to the base plate 100. Its core function is to support the cathode assembly, providing an independent reference for the testing and assembly of the cathode assembly, and it does not interfere with the anode support structure.

[0036] The crossbeam 106 is a rectangular metal rod made of high-strength alloy. It is fixed to the base plate 100 by bolts. The length of the crossbeam 106 is adapted to the spacing between the two side plates 102. A rectangular slot along the length direction is opened on the upper surface of the crossbeam 106. The inner wall of the slot is flat and used to install the cathode support 108. The cathode holder 108 is made of a highly corrosion-resistant material to prevent scratches on the cathode plate surface. PTFE (polytetrafluoroethylene) is preferred. It has a support surface at the top that matches the bottom contour of the cathode assembly, and a rectangular protrusion at the bottom that matches the slots in the crossbeam 106. It is mounted on the crossbeam 106 via these slots, limiting the lateral and vertical movement of the cathode holder 108. The position of the cathode holder 108 can be adjusted along the slots in the crossbeam 106 to accommodate cathode assemblies of different lengths. Limiting blocks at both ends of the crossbeam 106 prevent the cathode holder 108 from excessively moving and falling off.

[0037] According to one embodiment of the present invention, it further includes an upper cavity support 110, there are multiple upper cavity support 110s, the multiple upper cavity support 110s are disposed on the base plate 100, and the upper cavity support 110s are used to support the upper cavity 112.

[0038] In one embodiment of the present invention, the upper cavity support 110 is a cylindrical metal component made of high-strength alloy, and its surface is precision ground to ensure the flatness and verticality of the top plane. Multiple upper cavity supports 110 are evenly distributed along the length and width of the base plate 100, and their distribution positions correspond one-to-one with the bottom support area of ​​the upper cavity 112 to ensure that the upper cavity 112 is subjected to balanced forces after placement.

[0039] The bottom of the upper cavity support column 110 is fixedly connected to the base plate 100 by bolts. The bolts pass through the mounting holes at the bottom of the support column and are screwed into the threaded holes of the base plate 100. After tightening, they are locked by anti-loosening washers to prevent the support column from shifting due to vibration during long-term use. The height of the support column is designed so that after the upper cavity body 112 is placed at the top of the support column, the mounting interface of the upper cavity body 112 can maintain a preset relative position with the anode positioning component 104 and the cathode support 108 in the tooling, and subsequent assembly can be carried out without additional adjustments.

[0040] In addition, the top of the upper cavity support column 110 is provided with a positioning boss, and the bottom of the upper cavity 112 is provided with a positioning groove at the corresponding position. The size of the boss and the groove are precisely matched. When placing the upper cavity 112, the upper cavity 112 can be quickly positioned by the cooperation of the boss and the groove, avoiding lateral displacement of the upper cavity 112 and ensuring the alignment accuracy of the installation interface.

[0041] Multiple evenly distributed upper cavity support pillars 110 provide stable multi-point support for the upper cavity 112, preventing deformation of the upper cavity 112 due to its own weight or assembly operations. Simultaneously, the fit between the positioning boss and the groove ensures precise installation of the upper cavity 112, providing a unified benchmark for subsequent installation of the anode and cathode assemblies into the upper cavity 112 and reducing assembly errors caused by misalignment of the upper cavity 112. The height design of the upper cavity support pillars 110 ensures precise alignment of the upper cavity 112's mounting interface with the anode and cathode support structures in the tooling. The assembled anode and cathode assemblies can be directly connected to the upper cavity 112 without repeated adjustments to its height or position, shortening assembly time and improving overall assembly efficiency.

[0042] According to one embodiment of the present invention, the anode positioning member 104 includes: The anode positioning fastener 114 is connected to the side plate 102; Anode positioning pin 116 is installed on anode positioning fastener 114.

[0043] In one embodiment of the present invention, the anode positioning fastener 114 is a rectangular metal block, which is fixedly connected to the inner sidewall of the side plate 102 by bolts. The position of the fastener is set along the height direction of the side plate 102 to ensure that the anode positioning pin 116 can adapt to the support requirements of the anode assembly after installation. The fastener has a circular mounting hole, and the inner wall of the hole is smoothed without burrs or steps.

[0044] The anode locating pin 116 is a cylindrical metal part made of high-hardness alloy with a wear-resistant surface treatment. One end of the pin is inserted into the mounting hole of the anode locating fastener 114 and secured by an interference fit or a set screw to ensure that the locating pin will not loosen due to vibration or force. The other end of the locating pin extends out of the fastener. The extension length is designed so that when the anode assembly is placed on the locating pin, the anode assembly remains horizontal, and the mounting hole of the anode assembly can be precisely aligned with the locating pin, providing a positioning reference for the subsequent assembly of other parts.

[0045] There are multiple anode positioning elements 104 on each side plate 102, and the positioning elements on both side plates 102 are symmetrically distributed to ensure that the anode assembly is supported with balanced force and will not tilt. The outer diameter of the positioning pin is adapted to the positioning hole size of the anode assembly with a very small gap to prevent lateral displacement of the anode assembly during assembly.

[0046] The precise fit between the anode positioning pin 116 and the anode assembly positioning hole restricts the lateral and rotational degrees of freedom of the anode assembly, ensuring that the anode assembly remains in the preset position throughout the assembly process. This prevents misalignment of parts due to positional deviations, significantly reduces assembly errors, and guarantees the accuracy of subsequent high-voltage discharge in the discharge chamber. Multiple symmetrically distributed anode positioning elements 104 provide stable multi-point support for the anode assembly. After placement, the anode assembly remains horizontal without manual support, allowing operators to assemble other parts with both hands. This improves the convenience and safety of the assembly operation while reducing assembly errors caused by instability due to manual support.

[0047] According to one embodiment of the present invention, the cathode holder 108 is mounted on the crossbeam 106 by means of a slot engagement.

[0048] In one embodiment of the present invention, a rectangular slot along the length direction is provided on the upper surface of the crossbeam 106. The inner wall of the slot is flat and has no sharp edges. The width and depth of the slot are designed according to the size of the cathode holder 108 to ensure that the cathode holder 108 can be smoothly inserted without significant loosening.

[0049] The bottom of the cathode holder 108 has a rectangular protrusion that matches the slot of the crossbeam 106. The height of the protrusion matches the depth of the slot, and the width matches the width of the slot. During installation, align the protrusion on the bottom of the cathode holder 108 with the slot of the crossbeam 106, and push the cathode holder 108 along the length of the slot until the protrusion is fully engaged in the slot, thus initially fixing the cathode holder 108 to the crossbeam 106. The fit between the slot and the protrusion is extremely small, which restricts the lateral and vertical movement of the cathode holder 108, ensuring the stability of the cathode holder 108 after installation.

[0050] In addition, the slots of the crossbeam 106 are equipped with limiting blocks at both ends. After the cathode holder 108 is inserted into the slot, the limiting blocks can prevent the cathode holder 108 from moving excessively along the length of the slot, further fixing the position of the cathode holder 108. The top of the cathode holder 108 is equipped with a support surface that is compatible with the cathode assembly. The shape of the support surface is consistent with the bottom contour of the cathode assembly, ensuring that the cathode assembly can fit the support surface after placement without any risk of shaking.

[0051] The slot-fit installation method eliminates the need for bolts or other fasteners; the cathode holder 108 can be installed and removed simply by pushing. When different specifications of cathode assemblies need to be adapted, the corresponding size of the cathode holder 108 can be quickly replaced without modifying the crossbeam 106, improving the versatility of the tooling and reducing tooling adjustment costs due to specification changes. The precise fit between the slot and the protrusion ensures that the cathode holder 108 is fixed in position after installation, preventing the cathode assembly from shifting when placed on the holder. This provides a stable benchmark for the inspection of the machining holes of the cathode assembly or the assembly of parts, avoiding inspection errors or assembly misalignment caused by the shaking of the cathode holder 108, and ensuring the machining and assembly quality of the cathode assembly.

[0052] According to one embodiment of the present invention, the side plate 102 is connected to the bottom plate 100 via corner brackets 118.

[0053] In one embodiment of the present invention, the corner piece 118 is an L-shaped metal component made of high-strength alloy and has an anti-corrosion treatment on its surface. Multiple corner pieces 118 are provided at the connection between the bottom of each side plate 102 and the bottom plate 100. The two right-angled surfaces of the corner piece 118 are respectively attached to the outer side wall of the side plate 102 and the upper surface of the bottom plate 100.

[0054] Each right-angled surface of the corner fitting 118 has a bolt hole. Bolts pass through the bolt holes of the corner fitting 118 and are screwed into the threaded holes of the side plate 102 and the base plate 100, respectively, to rigidly connect the side plate 102 and the base plate 100. The bolts are made of high-strength material and are locked with anti-loosening nuts after tightening to prevent loosening due to vibration during long-term use. The mating surfaces of the corner fitting 118, the side plate 102, and the base plate 100 are ground to ensure tight contact without gaps or loose connections, preventing the side plate 102 from tilting due to poor fit.

[0055] After the two side plates 102 are connected to the base plate 100 via corner brackets 118, the two side plates 102 remain parallel and perpendicular to the base plate 100. The height and spacing of the side plates 102 are calibrated to ensure that the anode positioning components 104 are symmetrically distributed, providing a stable reference for supporting the anode assembly. The number of corner brackets 118 is designed according to the length of the side plates 102. When the side plates 102 are longer, the number of corner brackets 118 is increased to ensure the connection strength between the side plates 102 and the base plate 100 and to prevent the middle of the side plates 102 from bending due to stress.

[0056] L-shaped corner fitting 118 can transfer the vertical and horizontal forces of side plate 102 to base plate 100. Compared with direct welding or single bolt connection, the multi-point connection method of corner fitting 118 significantly improves the connection strength between side plate 102 and base plate 100. The overall torsional and bending resistance of the tooling is enhanced, and it can withstand the weight of anode and cathode components and external forces during assembly, avoiding the decrease in positioning accuracy caused by tooling deformation. By connecting the side plate 102 with bolts and corner fitting 118, the disassembly and assembly of side plate 102 does not require damage to the structure of base plate 100 or side plate 102. When side plate 102 or anode positioning component 104 needs maintenance, side plate 102 can be removed simply by removing the bolts on corner fitting 118. The operation is simple and quick, reducing the maintenance time and difficulty of the tooling and lowering maintenance costs.

[0057] like Figure 7 As shown, a second aspect of the present invention provides a method for assembling an electrode assembly, employing the electrode assembly fixture described above, including: Step 10: Assemble the anode assembly by supporting it on the anode positioning member 104 between the two side plates 102; Step 20: Place the cathode assembly on the cathode holder 108 mounted on the crossbeam 106 for testing or assembly.

[0058] According to the electrode assembly method provided in the second aspect of the present invention, the precise positioning of the anode positioning pin 116 restricts the lateral and rotational degrees of freedom of the anode assembly. The assembly of the anode base plate 120 and subsequent parts is based on the positioning pin, significantly improving the alignment accuracy of the mounting holes and controlling the assembly error within a very small range. This ensures that the anode assembly can ultimately meet the accuracy requirements of high-voltage discharge in the discharge chamber, avoiding unstable laser output due to assembly errors. Hole position detection is performed directly on the cathode holder 108 without the need to transfer parts. The detection operation is simple and intuitive, allowing for quick detection and timely correction of hole position deviations. This avoids bringing unqualified parts into the subsequent assembly process, reducing assembly rework due to hole mismatch and lowering time and material costs. This method not only completes the assembly of the anode and cathode assemblies but also allows for direct hole position detection of the cathode assembly on the cathode holder 108 without the need for additional detection fixtures or equipment, simplifying the process and reducing equipment investment costs. Detection and assembly are completed on the same fixture, reducing the number of part handling operations, avoiding damage to parts during handling, and improving the overall process continuity.

[0059] Please continue reading Figure 7 The electrode assembly method provided in the second aspect of the present invention, based on the above-mentioned electrode assembly tooling, solves the problems of inaccurate positioning and low efficiency in the traditional assembly of excimer laser discharge cavity electrode assemblies through a step-by-step collaborative process of anode assembly positioning and cathode assembly and independent detection / assembly of cathode assemblies, thereby achieving efficient and precise assembly of the two types of components.

[0060] Before performing step 10, it is necessary to ensure that the base plate 100 of the assembly fixture is placed stably, the side plate 102 is firmly connected to the base plate 100 through the corner piece 118, the anode positioning piece 104 has been accurately installed on the two side plates 102, and the positioning pin is not loose and the surface is free of impurities.

[0061] Initial positioning of the anode assembly: Move the core components of the anode assembly between the two side plates 102 of the tooling. Observe the positions of the positioning holes on the anode base plate 120 and the anode positioning pins 116 on the side plates 102. Slowly lower the anode base plate 120 until the positioning pins are fully inserted into the positioning holes of the anode base plate 120. At this time, the anode base plate 120 is supported between the two side plates 102 by the positioning pins, maintaining a horizontal state without the risk of lateral displacement or tilting, and no manual support is required.

[0062] The anode assembly components are assembled in steps: Using the anode base plate 120 as a reference, the other components of the anode assembly are assembled in a preset order: First, the insulating gasket is placed in the preset mounting area of ​​the anode base plate 120, ensuring that the mounting holes of the gasket are precisely aligned with the holes of the anode base plate 120; then, the anode plate is placed on the insulating gasket, also aligning with the mounting holes; finally, a suitable bolt is taken, passed through the mounting holes of the anode plate, insulating gasket, and anode base plate 120, and screwed into the preset threaded holes of the base plate 100. A torque wrench is used to tighten the bolt to the set torque to complete the assembly of a single component. If more components need to be assembled, the above alignment, placement, and tightening process is repeated until all components of the anode assembly are assembled.

[0063] Assembly quality inspection: After assembly, use a level to check the overall levelness of the anode assembly to ensure there is no tilt; use calipers to measure the distance between each part to confirm that it meets the design requirements; check the tightness of all bolts to avoid any looseness.

[0064] Before performing step 20, the cathode holder 108 needs to be installed on the crossbeam 106 through the slot. The position of the cathode holder 108 on the crossbeam 106 is adjusted according to the length of the cathode assembly to ensure that the support surface of the cathode holder 108 can completely cover the bottom support area of ​​the cathode assembly. At the same time, the position of the cathode holder 108 is fixed by the limiting blocks at both ends of the crossbeam 106 to prevent displacement.

[0065] Cathode assembly placement and positioning: Move the cathode assembly to be assembled or tested onto the cathode holder 108, and slowly lower it onto the support surface of the cathode holder 108. The support surface should fit tightly against the bottom of the part to prevent the part from shaking. If multiple parts need to be placed at the same time, ensure that there is no collision between the parts and that the mounting holes of both are initially aligned.

[0066] Cathode assembly hole position inspection: To check the matching of machined holes in cathode assembly parts, directly observe the mounting hole positions of the two parts on the cathode holder 108. If the holes completely overlap, the matching is qualified. If there is a misalignment, mark the direction and approximate magnitude of the misalignment, transfer the parts to the machining equipment for correction, and then place them back on the cathode holder 108 for inspection until the holes match. Alternatively, a special inspection pin can be used to assist in the inspection. Try inserting the inspection pin into the aligned mounting holes. If the inspection pin can be inserted smoothly without significant looseness, the hole matching is further confirmed to be qualified.

[0067] Cathode assembly component assembly: After the hole position inspection is qualified, the cathode assembly can be completed on the cathode holder 108: place the components in the order of cathode ceramic component 122, cathode plate copper sheet 124, and cathode plate 126, align the mounting holes, and use bolts to pass through the mounting holes of each component and tighten them to complete the assembly; during the assembly process, the stable support of the cathode holder 108 prevents the components from shifting and ensures smooth operation of each step.

[0068] According to one embodiment of the present invention, the assembly fixture further includes a plurality of upper cavity support columns 110 disposed on the base plate 100, and the assembly method further includes: Place the upper cavity 112 on the upper cavity support 110; Install the assembled anode and / or cathode assembly into the upper cavity 112.

[0069] In one embodiment of the present invention, when performing the placement step of the upper cavity 112, the top end of the upper cavity support 110 and the bottom end of the upper cavity 112 are first cleaned to remove surface dust or impurities and prevent impurities from affecting the stability of the support. Then, the bottom positioning groove of the upper cavity 112 is aligned with the positioning boss at the top end of the upper cavity support 110, and the upper cavity 112 is slowly lowered until the boss is fully engaged in the groove, and the upper cavity 112 is stably supported on the upper cavity support 110. At this time, the levelness of the upper cavity 112 is checked using a level. If there is any tilt, it can be corrected by finely adjusting the shims at the top end of the upper cavity support 110 to ensure that the upper cavity 112 is level.

[0070] When performing the anode and cathode assembly installation steps, first remove the assembled anode assembly from the anode positioning member 104, align the anode assembly with the anode mounting interface of the upper cavity 112 through the positioning hole of the anode assembly, and use bolts to fix the anode assembly in the preset position of the upper cavity 112; then remove the assembled cathode assembly from the cathode holder 108, align it with the cathode mounting interface of the upper cavity 112, and complete the docking and fixing of the cathode assembly to the upper cavity 112 in sequence. If only one component needs to be installed, the installation steps for that component are performed separately, and the other component remains in its original state.

[0071] During installation, the alignment of the components with the upper cavity 112 interface is checked using a ruler or laser positioning instrument to ensure that the installation error is within the allowable range and to avoid the discharge cavity from malfunctioning due to misalignment.

[0072] The fit between the positioning boss of the upper cavity support 110 and the groove of the upper cavity 112, along with the precise positioning of the anode and cathode components during the pre-assembly stage, allows the assembled components to quickly align with the interface of the upper cavity 112 without repeated adjustments to the component or upper cavity 112 position. This significantly reduces the time required to install the components into the upper cavity 112, improves overall assembly efficiency, and meets the needs of mass production. The horizontal calibration of the upper cavity 112 and the precise positioning of the components ensure that the relative positions of the anode and cathode components after installation into the upper cavity 112 meet the design requirements for high-voltage discharge in the discharge cavity. This avoids uneven discharge caused by installation deviations and ensures the stability and wavelength accuracy of the subsequent laser output of the excimer laser.

[0073] According to one embodiment of the present invention, the step of supporting the anode assembly on the anode positioning member 104 includes: The anode base plate 120 is supported on the anode positioning member 104, and other parts of the anode assembly are assembled on the anode base plate 120.

[0074] In one embodiment of the present invention, when performing the anode base plate 120 support step, firstly, the surface of the anode locating pin 116 and the locating hole of the anode base plate 120 are cleaned to ensure that no impurities affect the fitting accuracy. Then, the locating hole of the anode base plate 120 is aligned with the anode locating pin 116 on the two side plates 102, and the anode base plate 120 is slowly lowered until the locating pin is fully inserted into the locating hole of the anode base plate 120. The anode base plate 120 is supported between the two side plates 102 by the locating pin, maintaining a horizontal state. At this time, the fitting clearance between the anode base plate 120 and the locating pin is checked to ensure there is no significant shaking, providing a stable reference for subsequent assembly.

[0075] When performing other component assembly steps, the other components of the anode assembly are installed on the anode base plate 120 in the preset assembly sequence: First, the insulating gasket is placed in the preset position on the anode base plate 120, ensuring that the mounting hole of the gasket is aligned with the hole on the anode base plate 120; then, the anode plate is placed on the insulating gasket, aligned with the mounting hole; finally, bolts are passed through the mounting holes of the plate, gasket, and base plate 100, and the bolts are tightened and locked to complete the component assembly. During the assembly process, the spacing and parallelism between components are checked with calipers to ensure that they meet the design requirements.

[0076] If the position of a part needs to be adjusted during assembly, the part can be gently pried until the mounting holes are fully aligned, avoiding forced assembly that could damage or deform the part.

[0077] The anode assembly is disassembled into a base plate 100 support and component assembly steps. The assembly sequence is clearly defined, allowing operators to follow the steps systematically and avoiding component misalignment due to a chaotic assembly order. Simultaneously, the anode positioning pin 116 provides precise positioning for the anode base plate 120. Subsequent component assembly is based on the base plate 100, minimizing assembly errors and ensuring the overall precision of the anode assembly, meeting the high-voltage discharge requirements of the discharge chamber. The anode base plate 120 is stably supported by the positioning pin, eliminating the need for manual assistance. This allows operators to focus on assembling other components, reducing the risk of parts falling or colliding due to improper hand-eye coordination. Furthermore, the clear assembly steps lower the skill requirements for operators; even beginners can master the process with simple training, reducing safety accidents and component damage caused by operational errors.

[0078] According to one embodiment of the present invention, the step of installing the cathode assembly into the upper cavity 112 includes: The cathode ceramic component 122, the cathode copper sheet 124, and the cathode plate 126 are sequentially installed into the upper cavity 112.

[0079] In one embodiment of the present invention, when performing the cathode assembly installation step, the cathode mounting interface of the upper cavity 112 and the surface of each component are first cleaned to remove dust, oil and other impurities, so as to avoid affecting the insulation performance and contact reliability between components.

[0080] The first step is to install the cathode ceramic component 122: Align the positioning protrusion of the cathode ceramic component 122 with the positioning groove of the upper cavity 112 interface, and slowly insert it into the interface, ensuring that the mounting hole of the ceramic component is aligned with the hole of the upper cavity 112. The ceramic component is an insulating part; therefore, avoid collisions or pressure during installation to prevent breakage. If there is a slight gap between the ceramic component and the interface, a thin insulating pad can be placed at the bottom of the ceramic component to compensate for this gap, ensuring that the ceramic component remains horizontal.

[0081] The second step is to install the cathode plate copper sheet 124: Place the cathode plate copper sheet 124 on the upper surface of the cathode ceramic component 122, aligning the mounting holes of the copper sheet with the holes in the ceramic component and the upper cavity 112. The cathode plate copper sheet 124 is a conductive component; during installation, ensure that the surface of the copper sheet is free of scratches or oxide layers. If an oxide layer exists, it must be polished first to ensure subsequent conductivity. After placing the copper sheet, gently press it to ensure a tight fit with the surface of the ceramic component without gaps.

[0082] The third step is to install the cathode plate 126: Place the cathode plate 126 on the cathode plate copper sheet 124, aligning the mounting holes of the cathode plate 126 with the holes of the copper sheet and ceramic components. Use insulated bolts to pass through the mounting holes of each component and screw them into the threaded holes of the upper cavity 112. Tighten the bolts and lock them in place with anti-loosening washers to complete the installation of the cathode assembly. During installation, use a torque wrench to control the tightening torque of the bolts to avoid excessive torque causing the ceramic components to break, or insufficient torque causing the components to loosen.

[0083] The cathode assembly is installed in the following order: insulating ceramic component, conductive copper sheet, and cathode plate 126. First, the ceramic component provides insulation between the cathode assembly and the upper cavity 112. Then, the copper sheet ensures conductive connection between the cathode plate 126 and the external circuit. Finally, the cathode plate 126 enables high-voltage discharge. This assembly sequence matches the functional logic of the components, ensuring the subsequent insulation performance and conductivity reliability of the discharge cavity and preventing functional failures due to improper assembly sequence. Each component installation step uses the upper cavity 112 interface as a reference, and the mounting holes between components are precisely aligned. This ensures that the relative positions of each component in the cathode assembly meet design requirements, avoiding localized electric field inhomogeneity caused by component misalignment, and guaranteeing the stability and wavelength accuracy of the laser output during high-voltage discharge.

[0084] According to one embodiment of the present invention, the step of placing the cathode assembly on the cathode holder 108 includes: The cathode plate 126 and the cathode ceramic part 122 are placed on the cathode holder 108 to check whether the machining hole positions match.

[0085] In one embodiment of the present invention, before performing the hole position detection step, the support surface of the cathode holder 108, the surface of the cathode plate 126 and the cathode ceramic part 122, and the mounting holes are first cleaned to ensure that no impurities block the holes or affect the fit of the parts.

[0086] Step 1: Place cathode plate 126: according to Figure 3 The layout shown aligns the bottom of the cathode ceramic component 122 with the support surface of the cathode holder 108, and slowly lowers it so that the ceramic component is placed stably on the holder. The mounting holes of the ceramic component face upwards, and the positioning protrusions of the ceramic component are aligned with the positioning structure of the cathode holder 108 to ensure that the ceramic component does not shift laterally on the holder.

[0087] The second step is to place the cathode ceramic component 122: according to... Figure 3 The layout shown aligns the bottom of the cathode plate 126 with the upper surface of the cathode ceramic component 122. The cathode plate 126 is then slowly lowered until its mounting holes align with those of the ceramic component. During placement, the alignment of the mounting holes is observed: if the mounting holes completely overlap, the holes are matched; if there is a misalignment, it indicates an error in the hole machining, requiring marking the misalignment and subsequent correction.

[0088] During the inspection, a ruler or a special inspection pin can be used to assist in the judgment: place the ruler against the side of the part and observe the relative position of the edge of the mounting hole and the ruler's scale to determine the offset; or try inserting the inspection pin into the aligned mounting hole. If the inspection pin can be inserted smoothly without obvious looseness, it further proves that the hole position matches. After the inspection is completed, if the hole position matches, other parts can be assembled; if the hole position does not match, the part's machining error must be corrected first, and then the inspection must be repeated until the hole position meets the requirements.

[0089] Before the formal assembly of the cathode assembly, the hole position matching is checked by the cathode holder 108. This allows for the early detection of machining errors between the cathode plate 126 and the cathode ceramic part 122, preventing parts with hole position problems from being carried into the subsequent assembly process. This reduces rework due to assembly failures, significantly improves overall assembly efficiency, and lowers time costs. The cathode holder 108 provides a stable benchmark for hole position detection. After the parts are placed, hole position matching can be determined by visual observation or simple tools, without relying on high-precision testing equipment. This lowers the testing threshold, allowing operators to complete the inspection next to the tooling, reducing the time and manpower required to transport parts to the testing equipment.

[0090] Protecting parts and reducing correction difficulty: Detecting and correcting hole position errors in advance can prevent damage to parts caused by forced alignment during subsequent assembly; at the same time, it is simpler to correct errors when parts are in an unassembled state, and the correction process will not damage other assembled parts, reducing correction difficulty and cost.

[0091] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, and not to limit them; although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features; and these modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. An assembly fixture for an excimer laser electrode assembly, characterized in that, include: Base plate (100); Two oppositely arranged side plates (102) are disposed on the base plate (100); An anode support structure, the anode support structure including anode positioning members (104) disposed on the two side plates (102), the anode positioning members (104) being used to support the anode assembly; A cathode support structure, comprising a crossbeam (106) disposed on the base plate (100) and located between the two side plates (102) and a cathode support (108) mounted on the crossbeam (106), the cathode support (108) being used to support the cathode assembly.

2. The excimer laser electrode assembly fixture according to claim 1, characterized in that, It also includes an upper cavity support (110), there are multiple upper cavity support (110), the multiple upper cavity support (110) are arranged on the base plate (100), and the upper cavity support (110) is used to support the upper cavity (112).

3. The excimer laser electrode assembly fixture according to claim 1, characterized in that, The anode positioning element (104) includes: An anode positioning fastener (114) is connected to the side plate (102); An anode positioning pin (116) is installed on the anode positioning fastener (114).

4. The excimer laser electrode assembly fixture according to claim 1, characterized in that, The cathode holder (108) is installed on the crossbeam (106) by means of a slot.

5. The excimer laser electrode assembly fixture according to claim 1, characterized in that, The side plate (102) is connected to the base plate (100) via corner brackets (118).

6. A method for assembling an excimer laser electrode assembly, using the excimer laser electrode assembly assembly fixture as described in any one of claims 1 to 5, characterized in that, include: The anode assembly is assembled on the anode positioning member (104) supported between the two side plates (102); The cathode assembly is placed on the cathode holder (108) mounted on the crossbeam (106) for testing or assembly.

7. The assembly method of the excimer laser electrode assembly according to claim 6, characterized in that, The assembly fixture further includes a plurality of upper cavity support columns (110) disposed on the base plate (100), and the assembly method further includes: Place the upper cavity (112) on the upper cavity support (110); The assembled anode assembly and / or cathode assembly are installed into the upper cavity (112).

8. The assembly method of the excimer laser electrode assembly according to claim 6, characterized in that, The step of supporting the anode assembly on the anode positioning member (104) includes: The anode base plate (120) is supported on the anode positioning member (104), and other parts of the anode assembly are assembled on the anode base plate (120).

9. The assembly method of the excimer laser electrode assembly according to claim 7, characterized in that, The step of installing the cathode assembly into the upper cavity (112) includes: The cathode ceramic component (122), the cathode copper sheet (124), and the cathode plate (126) are sequentially installed into the upper cavity (112).

10. The assembly method of the excimer laser electrode assembly according to claim 6, characterized in that, The step of placing the cathode assembly on the cathode holder (108) includes: The cathode plate (126) and the cathode ceramic part (122) are placed on the cathode holder (108) to check whether the machining hole positions match.

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