A system and method for controlling an RGV in cooperation with a case opening mechanism

Abstract

The present application relates to wafer transfer equipment technical field, in order to solve how to realize the reasonable collaborative control of RGV and box opening mechanism technical problem, provide a kind of system and method for controlling RGV and box opening mechanism collaborative operation, the system includes RGV, box opening mechanism and control center, control center receives the sensor data of RGV by first communication link, and receives the sensor data of box opening mechanism by second communication link, and sends control instruction to RGV by first communication link, and sends control instruction to box opening mechanism by second communication link, to realize the collaborative control of RGV and box opening mechanism, wherein, control center continuously obtains the first clock signal of itself, and continuously obtains the second clock signal of RGV and the third clock signal of box opening mechanism, control center selects one from first, second and third clock signals as the master clock signal of system in each control period and carries out time alignment.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of wafer transfer equipment, and in particular to a system and method for controlling the cooperative operation of an RGV and an unboxing mechanism. BACKGROUND

[0002] In the field of semiconductor manufacturing, the production process of wafers needs to go through hundreds of precise processes, and has very high requirements for the cleanliness of the production environment (usually requires a Class 1 clean room, no more than 1 particle of 0.5 μm or larger per cubic foot of air), operating precision (sub-millimeter level), and process efficiency. Generally, wafers are stored in a cassette in units of 25 pieces (1 Lot), and the cassette needs to be loaded into a lot box for intra-facility transfer, temporary storage, or process switching to avoid external contamination and physical damage.

[0003] In traditional production, the opening of the lot box, the taking and placing of the cassette, and the transfer to the processing machine depend on manual or semi-automatic operation, for example, workers wearing a complete set of dust-free clothes in the clean room manually open the lot box, take out the cassette, and then carry it to the machine interface. This process has the following pain points:

[0004] Efficiency bottleneck: manual operation takes about 2-3 minutes to process a single batch, which is difficult to match the production capacity demand of 50+ batches per hour of an advanced production line;

[0005] Quality risk: manual contact may introduce particle contamination (about 1 million particles are emitted by the human body per hour), resulting in a 1%-3% decrease in wafer yield, and manual alignment errors (±1-2 mm) may cause scratches on the edges of the wafer;

[0006] High cost: the labor cost in a clean room is 3-5 times that in a normal workshop, and 24-hour continuous production requires multiple shifts, with labor costs accounting for 15%-20% of the total operating costs of the production line.

[0007] To break through the three constraints of efficiency, quality, and cost, related technologies propose an automatic operation scheme that realizes the opening of the lot box through an unboxing mechanism and the transfer of the cassette through an RGV (Rail Guided Vehicle). In this operation scheme, how to realize the reasonable cooperative control of the RGV and the unboxing mechanism to ensure the safety, reliability, and stable and smooth operation of the system is still a technical problem to be solved by those skilled in the art. SUMMARY

[0008] The present application provides a system and method for controlling the cooperative operation of RGV and box opening mechanism, which can ensure the safe and reliable control of one of RGV and box opening mechanism, avoid the time deviation between devices leading to out-of-control action sequence, and ensure the stable and smooth operation of the system, thereby effectively avoiding the damage of devices or products and ensuring the wafer transfer efficiency.

[0009] The technical solutions adopted by the present application are as follows:

[0010] A system for controlling the cooperative operation of RGV and box opening mechanism, comprising RGV, box opening mechanism and control center, the control center is connected with the RGV through a first communication link and connected with the box opening mechanism through a second communication link, the control center receives sensor data of the RGV through the first communication link and receives sensor data of the box opening mechanism through the second communication link, and sends control instructions to the RGV through the first communication link and sends control instructions to the box opening mechanism through the second communication link, to realize the cooperative control of the RGV and the box opening mechanism. Wherein, the control center continuously obtains its first clock signal, and continuously obtains the second clock signal of the RGV and the third clock signal of the box opening mechanism, the control center selects one of the first clock signal, the second clock signal and the third clock signal as the master clock signal of the system for time alignment in each control period.

[0011] The control center selects one of the first clock signal, the second clock signal and the third clock signal as the master clock signal of the system for time alignment after the first communication link or the second communication link is disconnected and reconnected.

[0012] When the control center successfully obtains at least two of the first clock signal, the second clock signal and the third clock signal, it processes the at least two clock signals in the current control period as follows: obtaining the number of pulses of each clock signal in the previous n control periods, wherein n is an integer greater than 1; calculating the stability parameter of each clock signal according to the number of pulses of each clock signal in the previous n control periods; selecting the clock signal with the largest stability parameter as the master clock signal.

[0013] The control center calculates the stability parameter according to the following formula:

[0014]

[0015] Wherein,

[0016]

[0017]

[0018] wherein S represents the stability parameter, i represents the serial number of the current control period, c x represents the number of pulses of the clock signal in the xth control period, and T represents the length of one control period.

[0019] The control center sends the master clock signal to the RGV through the first communication link and to the box opening mechanism through the second communication link, and the control center, the RGV and the box opening mechanism respectively adjust the time stamp of their own data according to the master clock signal to realize time alignment.

[0020] A method for controlling the cooperative work of an RGV and a box opening mechanism, comprising: the control center receiving sensor data of the RGV through the first communication link and receiving sensor data of the box opening mechanism through the second communication link; the control center sending control instructions to the RGV through the first communication link and sending control instructions to the box opening mechanism through the second communication link to realize cooperative control of the RGV and the box opening mechanism. Wherein the control center continuously obtains its first clock signal and continuously obtains the second clock signal of the RGV and the third clock signal of the box opening mechanism, and the control center selects one of the first clock signal, the second clock signal and the third clock signal as the master clock signal of the system for time alignment in each control period.

[0021] After the first communication link or the second communication link is disconnected and reconnected, the control center selects one of the first clock signal, the second clock signal and the third clock signal as the master clock signal of the system for time alignment.

[0022] When the control center successfully obtains at least two of the first clock signal, the second clock signal and the third clock signal, in the current control period, the control center processes the at least two clock signals as follows: obtaining the number of pulses of each clock signal in the previous n control periods, wherein n is an integer greater than 1; calculating the stability parameter of each clock signal according to the number of pulses of each clock signal in the previous n control periods; selecting the clock signal with the largest stability parameter as the master clock signal.

[0023] The stability parameter is calculated according to the following formula:

[0024]

[0025] wherein,

[0026]

[0027]

[0028] Wherein, S represents the stability parameter, i represents the serial number of the current control period, c x represents the number of pulses of the clock signal in the xth control period, T represents the length of a control period.

[0029] The control center sends the master clock signal to the RGV through the first communication link, and sends the master clock signal to the box opening mechanism through the second communication link, and the control center, the RGV and the box opening mechanism respectively adjust the time stamp of their own data according to the master clock signal to realize time alignment.

[0030] The beneficial effects of the present application are:

[0031] The present application can ensure safe and reliable control of one of the RGV and the box opening mechanism through double-link communication with the RGV and the box opening mechanism, ensure system safety and reliability while reducing restart recovery time, align the time of the entire system to avoid time deviation between devices leading to out-of-control action sequence, and ensure smooth operation of the system, thereby effectively avoiding collision between the RGV or the box opening mechanism and the wafer or the box body to cause damage to the equipment or the product, and ensuring wafer transfer efficiency. BRIEF DESCRIPTION OF DRAWINGS

[0032] Figure 1 The figure is a block diagram of the system for controlling the cooperative operation of the RGV and the box opening mechanism according to the embodiment of the present application. DETAILED DESCRIPTION

[0033] The technical solutions in the embodiments of the present application will be described clearly and completely below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor are within the scope of protection of the present application.

[0034] As Figure 1 shown, the system for controlling the cooperative operation of the RGV and the box opening mechanism according to the embodiment of the present application comprises an RGV 10, a box opening mechanism 20 and a control center 30.

[0035] The control center 30 is communicatively connected with the RGV 10 through a first communication link and communicatively connected with the box opening mechanism 20 through a second communication link, the control center 30 receives sensor data of the RGV 10 through the first communication link and receives sensor data of the box opening mechanism 20 through the second communication link, and sends control instructions to the RGV 10 through the first communication link and sends control instructions to the box opening mechanism 20 through the second communication link, so as to realize cooperative control of the RGV 10 and the box opening mechanism 20.

[0036] The control center 30 continuously obtains the first clock signal of itself, and continuously obtains the second clock signal of the RGV 10 and the third clock signal of the box opening mechanism 30, and the control center 30 selects one of the first clock signal, the second clock signal and the third clock signal as the master clock signal of the system for time alignment in each control cycle.

[0037] In an embodiment of the present application, the RGV 10 includes a body traveling along the track and a mechanical arm located on the body, the sensors of the RGV 10 include a position sensor (such as a laser ranging sensor) for detecting overall position data of itself, a speed sensor (such as a pulse encoder) for detecting overall speed data of itself, a sensor for detecting position and speed of the mechanical arm, a vision sensor (such as a camera) for collecting target direction image data, etc. The box opening mechanism 20 includes a rotatable tray supporting the batch of carrying boxes and a clamping arm for clamping and opening the box cover, and the sensors of the box opening mechanism 20 include an angle sensor for detecting the rotation angle of the tray, a force sensor for detecting the clamping force of the clamping arm, etc.

[0038] In an embodiment of the present application, the first communication link and the second communication link are one and the other of Profinet (an automation bus standard based on industrial Ethernet technology), RS485 (an industrial serial bus), CAN (Controller Area Network), LoRa (Long Range Radio), WiFi (a wireless local area network communication technology), etc.

[0039] In one embodiment of the present application, the general operation process of RGV 10 and box opening mechanism 20 is as follows: control center 30 generates wafer box transfer task and issues it to RGV 10 and box opening mechanism 20, so that RGV 10 and box opening mechanism 20 are ready and collect sensor data; control center 30 receives sensor data of RGV 10 and then box opening mechanism 20 through two communication links respectively, and according to the sensor data, in combination with the built-in control software, generates and sends movement instructions to RGV 10 to control the movement of RGV 10 body along the track, sends stop instructions to control the stop of RGV 10 body, sends mechanical arm movement instructions to control the movement of the end of the mechanical arm to the wafer box and takes the wafer box, generates and sends position adjustment instructions to box opening mechanism 20 to control the rotation of the rotatable tray to the angle to be opened, and sends opening instructions to control the clamping and opening of the cover of the batch carrier box. Thus, RGV 10 can move from the initial position to the position where box opening mechanism 20 is located, and after box opening mechanism 20 opens the cover of the batch carrier box, RGV 10 takes the wafer box and transports it to the target position.

[0040] Since control center 30 interacts with RGV 10 and interacts with box opening mechanism 20 using different communication links, a dedicated heartbeat detection thread (such as RGV_Heartbeat(), Box_Heartbeat()) can be provided for each communication link to monitor the stability of the two links in real time. When one of the links is abnormal, the safe and reliable control of RGV 10 and box opening mechanism 20 can be ensured. For example, when the communication of box opening mechanism 20 is temporarily interrupted, i.e. the second communication link is disconnected, the system can only suspend the action of box opening mechanism 20 through Disconnect_Handler() function, while retaining the state collection and basic motion ability of RGV 10, without the need for overall shutdown, RGV 10 can continue to be controlled to continue the wafer box transfer process or to protect the safety of wafer boxes and other equipment and devices, and compared with the 10-15 minutes of the overall system restart time after completing the communication repair, only restarting the box opening mechanism only needs about 2 minutes. Therefore, while ensuring the safety and reliability of the system, the restart recovery time can also be reduced.

[0041] Since the RGV 10, the box opening mechanism 20 and the control center 30 are relatively independent electronic devices, respectively having different clock sources, in the coordination of the RGV and the box opening mechanism, the time of each interaction data in the whole control process is difficult to align, and if the accumulation of time deviation, the sequence of each action in the control process will be out of control, for example, the collision between the clamping arm and the batch carrying box, the mechanical hand and the batch carrying box, resulting in operation failure or even damage to the equipment or products. Most of the related technologies directly specify the clock source of a certain chip as the reference clock source of the whole system, however, the clock source of this chip is not always the optimal clock source with reliable and high precision. In view of this, the embodiment of the present application proposes a strategy of dynamically selecting one from the three clock signals according to the stability parameter as the main clock signal for time alignment.

[0042] In an embodiment of the present application, in addition to selecting the main clock signal once in each control period, the selection of the main clock signal can also be performed once after the first communication link or the second communication link is disconnected and reconnected.

[0043] In an embodiment of the present application, the control center 30, when successfully obtaining at least two of the first clock signal, the second clock signal and the third clock signal, performs the following processing on the at least two clock signals in the current control period: obtaining the number of pulses of each clock signal in the previous n control periods, wherein n is an integer greater than 1; calculating the stability parameter of each clock signal according to the number of pulses of each clock signal in the previous n control periods; selecting the clock signal with the largest stability parameter as the main clock signal.

[0044] Wherein, the "control period" is a time measurement of the execution frequency of time alignment, which does not matter whether it is accurate or not, so it can be directly timed by the control center 30. That is, when the control center 30 processes the first clock signal of itself and the received second clock signal and third clock signal, it measures the time by the clock of the control center 30. The successful acquisition of a clock signal by the control center 30 means that the control center 30 obtains the clock signal and the signal of the clock signal in the previous n periods is complete. Generally, the control center 30 will successfully obtain the first clock signal, the second clock signal and the third clock signal, or successfully obtain the first clock signal and the second clock signal, or successfully obtain the first clock signal and the third clock signal. In an embodiment of the present application, if the control center 30 does not successfully obtain the first clock signal, the whole system cannot be effectively controlled, at which time an error can be reported.

[0045] In an embodiment of the present application, the control center 30 can calculate the stability parameter according to the following formula:

[0046]

[0047] wherein,

[0048]

[0049]

[0050] wherein, S represents a stability parameter, T represents the duration of a control period, i represents the serial number of the current control period, c x represents the number of pulses of the clock signal in the xth control period, that is, c i-y represents the number of pulses of the clock signal in the previous y control periods of the current control period. The number of pulses in the embodiments of the present application refers to the counting value of the counter in the corresponding time, which can refer to the number of pulse rising edges in the time.

[0051] After selecting the master clock signal, the control center 30 can send the master clock signal to the RGV 10 through the first communication link and to the box opening mechanism 20 through the second communication link, and the control center 30, the RGV 10 and the box opening mechanism 20 can respectively adjust the time stamp of their own data according to the master clock signal to realize time alignment. The above adjustment can include adjustment of sending time stamp, receiving time stamp, instruction actual execution time, etc.

[0052] Corresponding to the above embodiment of the system for controlling the cooperative work of the RGV and the box opening mechanism, the present application further proposes a method for controlling the cooperative work of the RGV and the box opening mechanism.

[0053] The method for controlling the cooperative work of the RGV and the box opening mechanism according to the embodiments of the present application comprises: the control center receives the sensor data of the RGV through the first communication link and receives the sensor data of the box opening mechanism through the second communication link; the control center sends control instructions to the RGV through the first communication link and sends control instructions to the box opening mechanism through the second communication link to realize the cooperative control of the RGV and the box opening mechanism. Wherein, the control center continuously obtains its own first clock signal and continuously obtains the second clock signal of the RGV and the third clock signal of the box opening mechanism, and the control center selects one from the first clock signal, the second clock signal and the third clock signal as the master clock signal of the system for time alignment in each control period.

[0054] In one embodiment of the present application, the approximate operation process of the RGV and the box opening mechanism is as follows: the control center generates a wafer box transfer task and sends it to the RGV and the box opening mechanism, so that the RGV and the box opening mechanism are ready and collect sensor data; the control center receives the sensor data of the RGV and then the sensor data of the box opening mechanism through two communication links, and according to the sensor data, in combination with the built-in control software, generates and sends a moving instruction to the RGV to control the RGV body to move along the track, a stop instruction to control the RGV body to stop moving, a mechanical hand moving instruction to control the mechanical hand end to move to the wafer box and pick up the wafer box, a position adjustment instruction to the box opening mechanism to control the rotatable tray to rotate to the angle to be opened, and an opening instruction to control the clamping arm to clamp and open the cover of the batch carrier box. Thus, the RGV can move from the initial position to the position where the box opening mechanism is located, and after the box opening mechanism opens the cover of the batch carrier box, the RGV picks up the wafer box and transports it to the target position.

[0055] Since the control center interacts with the RGV and the box opening mechanism through different communication links, a dedicated heartbeat detection thread (such as RGV_Heartbeat() and Box_Heartbeat()) can be provided for each communication link to monitor the stability of the two links in real time. When one of the links is abnormal, the safe and reliable control of the RGV and the box opening mechanism can be ensured. For example, when the communication of the box opening mechanism is temporarily interrupted, i.e., the second communication link is disconnected, the system can only suspend the action of the box opening mechanism through the Disconnect_Handler() function, while retaining the state collection and basic motion capability of the RGV, without the need for overall shutdown. The RGV can continue to control the wafer box transfer process or protect the safety of the wafer box and other equipment and devices, and the restart time of the box opening mechanism is only about 2 minutes, which is much shorter than the 10-15 minutes of the overall system restart time after completing the communication maintenance. Therefore, the system safety and reliability can be ensured while reducing the restart recovery time.

[0056] Since the RGV, the box opening mechanism and the control center are relatively independent electronic devices, each having a different clock source, in the coordination of the RGV and the box opening mechanism, the time of each interaction data in the entire control process is difficult to align. If the time deviation accumulates, the sequence of each action in the control process will be out of control, for example, the clamping arm and the batch carrier box, or the mechanical hand and the batch carrier box collide, resulting in operation failure or even damage to the equipment or products. Most related technologies directly specify the clock source of a certain chip as the reference clock source of the entire system. However, the clock source of this chip is not always the optimal clock source that is reliable and high-precision. In view of this, the embodiment of the present application proposes a strategy of dynamically selecting one from the three clock signals according to the stability parameter as the master clock signal for time alignment.

[0057] In one embodiment of the present application, in addition to the selection of the master clock signal once in each control cycle, the selection of the master clock signal can also be performed once after the first communication link or the second communication link is disconnected and re-established.

[0058] In one embodiment of the present application, when the control center successfully acquires at least two of the first clock signal, the second clock signal and the third clock signal, the control center processes the at least two clock signals in the current control cycle as follows: acquires the number of pulses of each clock signal in the previous n control cycles, where n is an integer greater than 1; calculates a stability parameter of each clock signal according to the number of pulses of each clock signal in the previous n control cycles; and selects the clock signal with the largest stability parameter as the master clock signal.

[0059] In one embodiment of the present application, the stability parameter can be calculated according to the following formula:

[0060]

[0061]

[0062]

[0063]

[0064] wherein S represents the stability parameter, i represents the serial number of the current control cycle, c x represents the number of pulses of the clock signal in the xth control cycle, and T represents the length of one control cycle.

[0065] In one embodiment of the present application, the control center sends the master clock signal to the RGV through the first communication link and to the box opening mechanism through the second communication link, and the control center, the RGV and the box opening mechanism respectively adjust the time stamp of their own data according to the master clock signal to achieve time alignment.

[0066] The system and method for controlling the cooperative operation of the RGV and the box opening mechanism according to the embodiments of the present application can ensure the safe and reliable control of one of the RGV and the box opening mechanism when one of the links is abnormal through the double-link communication with the RGV and the box opening mechanism, can reduce the restart recovery time while ensuring the safety and reliability of the system, can avoid the loss of control of the action sequence caused by the time deviation between devices by aligning the time of the entire system, and can ensure the stable and smooth operation of the system, thereby effectively avoiding the collision between the RGV or the box opening mechanism and the wafer or the box body and the damage to the equipment or the product, and can ensure the wafer transfer efficiency.

[0067] ​In the description of the application, the terms "first", "second", "third", etc. are used only for descriptive purposes and do not connote or imply relative importance or a specific order. Thus, features identified as "first", "second", etc. can implicitly or explicitly include one or more of the features identified with those terms. The term "plurality" means two or more, unless expressly specified otherwise.

[0068] In the present application, unless specifically defined otherwise, the terms "mount", "connect", "connection", "contact", and the like, are to be construed in their broadest possible sense, such as to include fixed connections, detachable connections, or integrally formed connections; mechanical connections, electrical connections, or connections made through intermediate medium; direct connections, or indirect connections via intervening elements; or connections between internal elements of two elements, or the interaction between two elements. The specific meaning of the above terms in the present application can be understood by those of ordinary skill in the art according to the specific circumstances.

[0069] In the present application, unless specifically defined otherwise, the first feature "on" or "under" the second feature can be direct contact between the first and second features, or indirect contact between the first and second features through an intermediate medium. Moreover, the first feature "above", "over", and "on" the second feature can be directly above or obliquely above the first feature, or simply indicate that the first feature is higher in horizontal height than the second feature. The first feature "below", "under", and "under" the second feature can be directly below or obliquely below the first feature, or simply indicate that the first feature is lower in horizontal height than the second feature.

[0070] In the description of the present application, the description of the terms "one embodiment", "some embodiments", "an example", "a specific example", or "some examples" means that the specific features, structures, materials or characteristics described in connection with the embodiment or example are included in at least one embodiment or example of the present application. In the present application, the illustrative description of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any suitable manner in any one or more embodiments or examples. In addition, those of ordinary skill in the art can combine and combine the different embodiments or examples described in the present application and the features of the different embodiments or examples, without contradiction.

[0071] Any processes or methods described in the flowcharts or otherwise described herein can be understood as representing modules, segments, or portions of code that include one or more executable instructions for implementing specific logic functions or steps, and alternate implementations are possible that include structure that is not shown or described herein, including implementations that use different terminology, structures, or approaches to achieve the same results. The scope of preferred embodiments of the present application includes any implementation that performs the functions described herein, whether explicitly discussed or not.

[0072] Logic and / or steps represented in the flowcharts or otherwise described herein, for example, can be embodied in computer-readable medium, which can be any device or apparatus that can store, communicate, propagate, or transport programming for use by or in connection with an instruction execution system, apparatus, or device. Computer-readable medium can include any suitable medium such as, for example, the following: a data signal embodied in or transmitted by a carrier wave or other transport mechanism; a storage medium, such as any non-transitory medium that can be used to store programming, including a read only memory (ROM) and a random access memory (RAM); or a media such as a compact disk (CD), a digital versatile disk (DVD), a Blu-ray disk, a floppy disk, a tape, a magnetic hard drive, or a solid state hard drive. The computer-readable medium can even be paper or another suitable medium upon which the program is printed, as the program can be electronically captured, for example, by optically scanning the paper or other suitable medium, then electronically capturing the program, and then using a suitable medium to communicate the program to a computer.

[0073] It should be understood that aspects of the present application can be implemented in hardware, software, firmware, or combinations thereof. In the above embodiments, various steps or methods can be implemented in software or firmware that is stored in memory and executed by a suitable instruction execution system. For example, if implemented in hardware, as in another embodiment, any of the following technologies, or combinations thereof, can be used: a discrete logic circuit having logic gates for implementing logic functions upon data signals, an application specific integrated circuit having appropriate combinational logic gates, a programmable gate array (PGA), a field programmable gate array (FPGA), or other implementations known to those skilled in the art.

[0074] Those skilled in the art can understand that all or part of the steps of the method carried out by the above-mentioned embodiments can be instructed by a program to relevant hardware, and the program can be stored in a computer readable storage medium. When the program is executed, it includes one of the steps of the method embodiments or a combination thereof.

[0075] In addition, each functional unit in each embodiment of the present application can be integrated into one processing module, or each unit can exist physically alone, or two or more units can be integrated into one module. The integrated module can be realized in the form of hardware or in the form of a software functional module. When the integrated module is realized in the form of a software functional module and sold or used as an independent product, it can also be stored in a computer readable storage medium.

[0076] Although the embodiments of the present application have been shown and described above, it should be understood that the above-mentioned embodiments are exemplary and cannot be understood as limiting the present application, and those skilled in the art can make changes, modifications, replacements and variations to the above-mentioned embodiments within the scope of the present application.

Claims

1. A system for controlling the coordinated operation of an RGV and a box-opening mechanism, characterized in that, The system includes an RGV (Remotely Receiving Vehicle), a box-opening mechanism, and a control center. The control center communicates with the RGV via a first communication link and with the box-opening mechanism via a second communication link. The control center receives sensor data from the RGV via the first communication link and sensor data from the box-opening mechanism via the second communication link. It also sends control commands to the RGV via the first communication link and to the box-opening mechanism via the second communication link, thereby achieving coordinated control of the RGV and the box-opening mechanism. The control center continuously acquires its own first clock signal, and continuously acquires the second clock signal of the RGV and the third clock signal of the box-opening mechanism. In each control cycle, the control center selects one of the first clock signal, the second clock signal and the third clock signal as the master clock signal of the system for time alignment.

2. The system for controlling the coordinated operation of the RGV and the box-opening mechanism according to claim 1, characterized in that, After the first or second communication link is disconnected and reconnected, the control center selects one of the first clock signal, the second clock signal, and the third clock signal as the master clock signal of the system for time alignment.

3. The system for controlling the coordinated operation of the RGV and the box-opening mechanism according to claim 1 or 2, characterized in that, When the control center successfully acquires at least two of the first clock signal, the second clock signal, and the third clock signal, it processes the at least two clock signals in the current control cycle as follows: Obtain the number of pulses for each clock signal in the first n control cycles, where n is an integer greater than 1; The stability parameter of each clock signal is calculated based on the number of pulses of each clock signal in the first n control cycles; The clock signal with the highest stability parameter is selected as the master clock signal.

4. The system for controlling the coordinated operation of the RGV and the box-opening mechanism according to claim 3, characterized in that, The control center calculates the stability parameter according to the following formula: ； in, ； ； Where S represents the stability parameter, i represents the sequence number of the current control cycle, and c x This represents the number of clock signal pulses in the x-th control cycle, and T represents the duration of one control cycle.

5. The system for controlling the coordinated operation of the RGV and the box-opening mechanism according to claim 1 or 2, characterized in that, The control center sends the master clock signal to the RGV through the first communication link and to the box-opening mechanism through the second communication link. The control center, the RGV, and the box-opening mechanism adjust the timestamps of their own data according to the master clock signal to achieve time alignment.

6. A method for controlling the coordinated operation of an RGV and a box-opening mechanism based on the system for controlling the coordinated operation of an RGV and a box-opening mechanism as described in claim 1, characterized in that, include: The control center receives sensor data from the RGV through the first communication link and sensor data from the box-opening mechanism through the second communication link. The control center sends control commands to the RGV via the first communication link and to the box-opening mechanism via the second communication link, thereby achieving coordinated control of the RGV and the box-opening mechanism. The control center continuously acquires its own first clock signal, and continuously acquires the second clock signal of the RGV and the third clock signal of the box-opening mechanism. In each control cycle, the control center selects one of the first clock signal, the second clock signal and the third clock signal as the master clock signal of the system for time alignment.

7. The method for controlling the coordinated operation of the RGV and the box-opening mechanism according to claim 6, characterized in that, After the first or second communication link is disconnected and reconnected, the control center selects one of the first clock signal, the second clock signal, and the third clock signal as the master clock signal of the system for time alignment.

8. The method for controlling the coordinated operation of the RGV and the box-opening mechanism according to claim 6 or 7, characterized in that, When the control center successfully acquires at least two of the first clock signal, the second clock signal, and the third clock signal, it processes the at least two clock signals in the current control cycle as follows: Obtain the number of pulses for each clock signal in the first n control cycles, where n is an integer greater than 1; The stability parameter of each clock signal is calculated based on the number of pulses of each clock signal in the first n control cycles; The clock signal with the highest stability parameter is selected as the master clock signal.

9. The method for controlling the coordinated operation of the RGV and the box-opening mechanism according to claim 8, characterized in that, The stability parameter is calculated according to the following formula: ； in, ； ； Where S represents the stability parameter, i represents the sequence number of the current control cycle, and c x This represents the number of clock signal pulses in the x-th control cycle, and T represents the duration of one control cycle.

10. The method for controlling the coordinated operation of the RGV and the box-opening mechanism according to claim 6 or 7, characterized in that, The control center sends the master clock signal to the RGV through the first communication link and to the box-opening mechanism through the second communication link. The control center, the RGV, and the box-opening mechanism adjust the timestamps of their own data according to the master clock signal to achieve time alignment.

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