A semiconductor connector inspection apparatus

Abstract

The application discloses a kind of detection device of semiconductor connector, including installation component, driving component, throw material component and marking component, driving component is connected with installation component;Throw material component is slidably connected with installation component;Marking component is slidably connected with installation component;Wherein, driving component is connected throw material component and marking component respectively, driving component is used to drive throw material component and marking component relative installation component to different direction sliding by rotating simultaneously, to realize the throwing material or marking of semiconductor connector.It is compared to prior art, the application combines two kinds of ways of throwing material and marking, and realizes automated throwing material and marking using driving component, can effectively improve the flexibility and efficiency of post-processing after detection, according to actual demand selects throwing material or marking operation, avoids resource waste.Through driving component, throw material component and marking component are simultaneously controlled to slide along different directions, avoid the structural complexity and action redundancy brought by independent driving mechanism.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of semiconductor detection, in particular to a detection device for semiconductor connecting pieces. BACKGROUND

[0002] Semiconductor devices need to undergo multiple electrical performance tests and appearance inspections to ensure the quality of the final product. On a common semiconductor detection production line, manual detection is generally used in combination with manual material rejection to remove semiconductor products that are unqualified or suspicious. Such a method not only has high labor intensity and low efficiency, but also highly depends on the attention and experience level of the operator, and is prone to introduce misjudgment and omissions due to negligence or subjective judgment bias, resulting in unqualified products mixing into subsequent processes. SUMMARY

[0003] In view of the deficiencies of the prior art, the present application provides a detection device for semiconductor connecting pieces, which realizes automatic material rejection and improves detection efficiency by combining material rejection and marking.

[0004] In order to achieve the above-mentioned purpose, the present application adopts the following technical solution:

[0005] A detection device for semiconductor connecting pieces, comprising a mounting component, a driving component, a material rejection component, and a marking component, the driving component being connected to the mounting component; the material rejection component being slidingly connected to the mounting component; the marking component being slidingly connected to the mounting component; wherein the driving component is connected to the material rejection component and the marking component respectively, and is used to simultaneously drive the material rejection component and the marking component to slide in different directions relative to the mounting component by rotating, so as to realize material rejection or marking of the semiconductor connecting pieces.

[0006] As one of the embodiments, the driving component comprises a rotating member, a first linkage member, and a second linkage member, the first linkage member and the second linkage member being connected to the two sides of the rotating member respectively, one end of the first linkage member being rotatably connected to the rotating member, the other end being rotatably connected to the material rejection component, one end of the second linkage member being rotatably connected to the rotating member, the other end being rotatably connected to the marking component, the rotating member rotating to simultaneously drive the first linkage member and the second linkage member to move and rotate in different directions, thereby driving the material rejection component and the marking component to slide in different directions relative to the mounting component.

[0007] As one of the embodiments, the material rejection component and the marking component are sequentially and spacedly arranged along a first direction, the material rejection component and the marking component are slidingly connected to the mounting component in a second direction, the first direction being perpendicular to the second direction, and the second direction being perpendicular to the rotation axis of the rotating member.

[0008] As one of the implementations, the ejecting component comprises an ejecting head, the ejecting head comprises a main body and a needle, the main body is connected with the mounting component, the needle is detachably connected with the main body, and the needle is used for pricking the semiconductor connector which is detected as unqualified.

[0009] As one of the implementations, the ejecting component comprises a first sliding base, the mounting component is provided with a first sliding rail, the first sliding base is provided with a first sliding groove, the first sliding base is slidably connected with the first sliding rail through the first sliding groove, and the first sliding base is connected with the driving component, and the main body is detachably connected with the first sliding base.

[0010] As one of the implementations, the main body is provided with a slot, and the needle is inserted into the slot; the ejecting head comprises a fixing sleeve, the fixing sleeve is sleeved on the outer periphery of the main body, and the fixing sleeve is used for extruding the main body so that the slot is tightened to clamp the needle.

[0011] As one of the implementations, the main body comprises a clamping end, the clamping end is provided with the slot, the clamping end is provided with a through clamping groove in the radial direction, the clamping groove is communicated with the slot, the fixing sleeve is sleeved on the outer periphery of the clamping end and at least partially covers the clamping groove, so that the clamping groove is tightened, and then the slot is tightened.

[0012] As one of the implementations, the fixing sleeve is provided with a fixing groove, the clamping end extends into the fixing groove, and along the direction of inserting the clamping end into the fixing groove, the clamping end is gradually reduced in at least partial radial dimension, and the groove wall of the fixing groove is gradually reduced in at least partial radial dimension.

[0013] As one of the implementations, the clamping end comprises a first part and a second part which are connected in sequence along the axial direction of the clamping end, the first part is connected with the main body, along the direction of inserting the clamping end into the fixing groove, the second part is gradually reduced in at least partial radial dimension, the first part is provided with a through unlocking groove, and when the fixing sleeve is sleeved on the clamping end, at least part of the unlocking groove is exposed to the fixing sleeve.

[0014] As one of the implementations, the clamping end comprises a third part, opposite ends of the third part are connected with the first part and the second part respectively, the radial dimension of the third part is smaller than the radial dimension of the second part, and the radial dimension of the second part is smaller than the radial dimension of the first part.

[0015] As one of the implementations, at least part of the outer surface of the fixing sleeve is a plane.

[0016] As one of the implementations, the diameter of the needle is 0.8mm-5mm.

[0017] As one of the implementations, the marking component comprises a second sliding seat and an inkjet machine, the second sliding seat is provided with a second sliding groove, the mounting component is provided with a second sliding rail, the second sliding seat is slidably connected with the second sliding rail through the second sliding groove, the inkjet machine is connected with the second sliding seat, and the inkjet machine is used for spraying different sizes of marks on the material.

[0018] As one of the implementations, the detection device comprises a detection component and a guide component, the detection component is connected with the mounting component, and the detection component is used for detecting whether the semiconductor connector is qualified; the mounting component is slidably connected with the guide component, so as to drive the detection component or the material throwing component or the marking component to slide to a detection station; when the mounting component drives the detection component to slide to the detection station, the detection component detects the semiconductor connector; when the detection result is unqualified: the mounting component drives the material throwing component to slide to the detection station, so that the material throwing component is aligned with the semiconductor connector and throws the material; and / or, the mounting component drives the marking component to slide to the detection station, so that the marking component is aligned with the semiconductor connector and marks the semiconductor connector.

[0019] The application provides a semiconductor connector detection device, which comprises a mounting component, a driving component, a material throwing component and a marking component, the driving component is connected with the mounting component, the material throwing component is slidably connected with the mounting component, and the marking component is slidably connected with the mounting component; wherein the driving component is connected with the material throwing component and the marking component respectively, and the driving component is used for simultaneously driving the material throwing component and the marking component to slide in different directions relative to the mounting component by rotating, so as to realize material throwing or marking of the semiconductor connector. Compared with the prior art, the application combines the material throwing and marking modes, and adopts the driving component to realize automatic material throwing and marking, so that the flexibility and efficiency of post-detection processing can be effectively improved, the material throwing or marking operation can be selected according to actual requirements, and resource waste is avoided. The driving component simultaneously controls the material throwing component and the marking component to slide in different directions by rotating, the motion precision can be controlled, the material throwing component and the marking component are well suitable for material throwing of the conductive sintering film and the conductive sintering sheet, the rotating action simultaneously controls the material throwing component and the marking component to move in different directions, the integrated control of the material throwing and marking functions is realized, the structural complexity and action redundancy caused by the independent driving mechanism are avoided, the detection efficiency and reliability are improved, and the detection device is very suitable for the detection scene of the conductive sintering film and the conductive sintering sheet. BRIEF DESCRIPTION OF DRAWINGS

[0020] Figure 1 A structural schematic diagram of a semiconductor connector detection device is shown.

[0021] Figure 2Another structural schematic view of a semiconductor connector detection device of the present application is shown.

[0022] Figure 3 A sectional schematic view of a semiconductor connector detection device of the present application is shown.

[0023] Figure 4 An exploded schematic view of a semiconductor connector detection device of the present application is shown.

[0024] Figure 5 A sectional schematic view of a semiconductor connector detection device of the present application is shown. Figure 3 An enlarged view of A in the figure.

[0025] Figure 6 A sectional schematic view of a semiconductor connector detection device of the present application is shown.

[0026] Figure 7 An enlarged view of B in the figure. Figure 6 An enlarged view of B in the figure.

[0027] Reference signs: 1, mounting component; 11, first sliding rail; 12, second sliding rail;

[0028] 2, driving component; 21, power piece; 22, rotating piece; 221, rotating part; 23, first linkage; 231, rotating groove; 24, second linkage;

[0029] 3, material throwing component; 31, first sliding seat; 32, material throwing head; 321, main body part; 3211, clamping end; 3212, first part; 3213, second part; 3214, third part; 3215, insertion groove; 3216, clamping groove; 3217, unlocking groove; 322, ejector pin; 323, fixing sleeve; 3231, fixing groove; 3232, flat surface;

[0030] 4, marking component; 41, second sliding seat; 42, inkjet machine; 5, detection component. DETAILED DESCRIPTION

[0031] In the present application, the terms "provided with", "connected with" should be interpreted in a broad sense. For example, it can be fixed connection, detachable connection, or integral structure; it can be mechanical connection, or electrical connection; it can be direct connection, or indirect connection through intermediate medium, or internal communication between two devices, elements or components. For those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0032] The terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "radial", "circumferential", and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, which are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as limiting the present application.

[0033] In order to make the purposes, technical solutions and advantages of the present application clearer, the present application is further described in detail below in combination with the drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present application and do not limit the present application.

[0034] Referring to Figure 1 The embodiment of the present application provides a detection device for semiconductor connectors, which comprises a mounting component 1, a driving component 2, a material throwing component 3 and a marking component 4, the driving component 2 is connected with the mounting component 1; the material throwing component 3 is slidingly connected with the mounting component 1; the marking component 4 is slidingly connected with the mounting component 1; wherein the driving component 2 is connected with the material throwing component 3 and the marking component 4 respectively, and the driving component 2 is used to drive the material throwing component 3 and the marking component 4 to slide in different directions relative to the mounting component 1 by rotating at the same time, so as to realize the material throwing or marking of the semiconductor connectors.

[0035] In actual application, the mounting component 1 can be a rigid support, a mounting plate or a mounting seat, which is used as a common mounting reference of the driving component 2, the material throwing component 3 and the marking component 4, so as to ensure the relative positional relationship between the components stable. The driving component 2 is fixedly connected with the mounting component 1, and the material throwing component 3 is slidingly connected with the mounting component 1, so that the material throwing component 3 can produce a predetermined direction movement relative to the mounting component 1 under the driving of the driving component 2, which is used to reject the semiconductor connectors detected as unqualified from the normal conveying path. The marking component 4 is also slidingly arranged on the mounting component 1, so that the marking component 4 can move along a predetermined direction relative to the mounting component 1 under the driving of the driving component 2, which is used to form marking information on the semiconductor connectors which need to be marked.

[0036] Specifically, when the unqualified semiconductor connector needs to be thrown, the driving part 2 is started and drives the throwing part 3 to move towards the semiconductor connector, so as to pierce and damage the unqualified semiconductor connector, avoiding flowing into the next process; at this time, the driving part 2 drives the marking part 4 to move away from the semiconductor connector, avoiding interfering with the throwing action; when the unqualified semiconductor connector needs to be marked, the driving part 2 is started and drives the marking part 4 to move towards the semiconductor connector, so as to print or spray the marking symbol on the surface of the unqualified product, realizing traceability management; at this time, the throwing part 3 is driven by the driving part 2 to retreat away from the semiconductor connector, avoiding interfering with the action of the marking part 4.

[0037] It can be understood that the above device can be used for throwing and marking operations of unqualified semiconductor connectors, and can also perform the same detection process on qualified semiconductor connectors, and only select whether to trigger the throwing or marking action based on the determination result.

[0038] Compared with the prior art, the present application combines the throwing and marking methods, and uses the driving part 2 to realize automatic throwing and marking, which can effectively improve the flexibility and efficiency of post-detection processing, select throwing or marking operation according to actual needs, and avoid resource waste. And the driving part 2 controls the throwing part 3 and the marking part 4 to slide in different directions by rotating, which realizes integrated control of the throwing and marking functions, avoids the structural complexity and action redundancy brought by independent driving mechanisms, and improves the detection efficiency and reliability.

[0039] Again refer to Figure 1 and Figure 2 , the throwing part 3 and the marking part 4 are both in sliding connection with the mounting part 1, the driving part 2 includes a rotating part 22, a first linkage part 23 and a second linkage part 24, the first linkage part 23 and the second linkage part 24 are respectively connected to the two sides of the rotating part 22, one end of the first linkage part 23 is in rotational connection with the rotating part 22, and the other end is in rotational connection with the throwing part 3, one end of the second linkage part 24 is in rotational connection with the rotating part 22, and the other end is in rotational connection with the marking part 4, the rotating part 22 rotates and drives the first linkage part 23 and the second linkage part 24 to move and rotate in different directions, and further drives the throwing part 3 and the marking part 4 to slide in different directions relative to the mounting part 1.

[0040] In actual application, the driving component 2 further comprises a power piece 21, the rotating piece 22 is driven by the power piece 21 to realize reciprocating rotation, the throwing component 3 and the marking component 4 are both slidably connected with the mounting component 1 in the same direction, the first linkage 23 and the second linkage 24 can be respectively rotatably connected on both sides of the rotating piece 22 in the radial direction, specifically, the first linkage 23 and the second linkage 24 are both provided with rotating grooves 231, both sides of the rotating piece 22 in the radial direction are respectively provided with rotating parts 221, the first linkage 23 and the second linkage 24 are rotatably connected in the rotating grooves 231 through the rotating parts 221; and the first linkage 23 is rotatably connected with the throwing component 3, and the second linkage 24 is rotatably connected with the marking component 4, so that the reciprocating rotation of the rotating piece 22 is converted into the reciprocating sliding of the throwing component 3 and the marking component 4 in the same direction by the first linkage 23 and the second linkage 24.

[0041] Specifically, when the power piece 21 drives the rotating piece 22 to reciprocate, the rotating parts 221 on both sides drive the first linkage 23 and the second linkage 24 to reciprocate, and then drive the throwing component 3 and the marking component 4 to move in the opposite direction by linkage, when the rotating piece 22 rotates in one direction, the first linkage 23 pushes the throwing component 3 to move towards the semiconductor connector to perform the piercing action, while the second linkage 24 pulls the marking component 4 to retreat away from the semiconductor connector; when the rotating piece 22 reverses rotation, the first linkage 23 drives the throwing component 3 to retreat, and the second linkage 24 pushes the marking component 4 to move towards the semiconductor connector and complete the marking. In this way, not only the cooperative control of the throwing and marking actions is realized, but also the mechanical structure is effectively simplified, and the failure rate is reduced.

[0042] Again refer to Figure 1 and Figure 2 , the throwing component 3 and the marking component 4 are sequentially and spaced apart in the first direction, the throwing component 3 and the marking component 4 are slidably connected with the mounting component 1 in the second direction, the first direction is perpendicular to the second direction, and the second direction is perpendicular to the rotation axis of the rotating piece 22.

[0043] In order to clearly describe, Figure 1 the X direction represents the first direction, and the Y direction represents the second direction, for example, the vertical plane is perpendicular to the rotation axis of the rotating piece 22, and the first direction and the second direction are both arranged in the vertical plane.

[0044] In actual application, the throwing component 3 and the marking component 4 are symmetrically arranged on both sides of the rotating piece 22 in the radial direction, which is helpful to balance the stress in the movement process; the throwing component 3 and the marking component 4 are slidably arranged in the second direction, which is conducive to effectively converting the rotating movement of the rotating piece 22 into linear reciprocating movement, improving the transmission efficiency and action synchronization.

[0045] Refer toFigure 2 and Figure 3 The ejection component 3 comprises an ejection head 32, the ejection head 32 comprises a main body part 321 and a thimble 322, the main body part 321 is connected with the mounting component 1, the thimble 322 is detachably connected with the main body part 321, and the thimble 322 is used for pricking the unqualified semiconductor connector for detection.

[0046] In actual application, the ejection component 3 comprises the ejection head 32 used for directly contacting with the semiconductor connector, and the ejection head 32 specifically comprises two parts of the main body part 321 and the thimble 322. The main body part 321 is used for fixedly connecting with the remaining transmission structure of the ejection component 3, and the thimble 322 is detachably connected with the main body part 321, so that the thimble 322 can be conveniently detached from the main body part 321 and a new thimble 322 is reassembled when the thimble 322 is worn, bent or needs to be replaced.

[0047] It can be understood that the detachable connection between the thimble 322 and the main body part 321 can be realized in the mode of threaded connection, buckle connection or fastener connection, and the application does not repeat the description here.

[0048] Referring to Figure 4 The ejection component 3 comprises a first sliding seat 31, the mounting component 1 is provided with a first sliding rail 11, the first sliding seat 31 is provided with a first sliding groove, the first sliding seat 31 is slidably connected with the first sliding rail 11 through the first sliding groove, and the first sliding seat 31 is connected with the driving component 2. The main body part 321 is detachably connected with the first sliding seat 31.

[0049] In actual application, the first sliding seat 31 cooperates with the first sliding rail 11 to realize the stable sliding of the ejection component 3 in the second direction, so as to ensure the linearity and precision of the movement track of the thimble 322; the main body part 321 can be detachably fixed on the first sliding seat 31 by screws, so as to facilitate maintenance and replacement. The first sliding seat 31 is rotatably connected with the first linkage 23, and is connected with the rotating part 22 through the first linkage 23, so as to convert the rotary motion of the rotating part 22 into the reciprocating sliding of the first sliding seat 31 in the second direction, thereby driving the ejection head 32 to perform the ejection action.

[0050] Referring to Figure 4 The marking component 4 comprises a second sliding seat 41 and an inkjet machine 42, the second sliding seat 41 is provided with a second sliding groove, the mounting component 1 is provided with a second sliding rail 12, the second sliding seat 41 is slidably connected with the second sliding rail 12 through the second sliding groove, and the inkjet machine 42 is connected with the second sliding seat 41. The inkjet machine 42 is used for spraying different sizes of marks to the material.

[0051] In practical applications, the second sliding seat 41 cooperates with the second sliding rail 12 to realize stable sliding of the marking component 4 in the second direction, ensuring the position accuracy and the repeat positioning accuracy of the inkjet machine 42 in the marking process; the second sliding seat 41 is rotationally connected with the second linkage 24, and is connected with the rotating piece 22 through the second linkage 24, so that the rotating motion of the rotating piece 22 is converted into the reciprocating sliding of the second sliding seat 41 in the second direction, thereby driving the inkjet machine 42 to synchronously perform the marking action; the inkjet machine 42 can adjust and control the size and position of the ejected marking according to the detection result, realize the classification identification of the qualified products and unqualified products, and improve the sorting efficiency and the automation degree.

[0052] Referring to Figure 5 and Figure 6 , the main body part 321 is provided with a slot 3215, and the ejector pin 322 is inserted into the slot 3215; the material ejecting head 32 comprises a fixing sleeve 323, which is sleeved on the outer periphery of the main body part 321 and is used for extruding the main body part 321 so as to tighten the slot 3215 and thereby clamp the ejector pin 322.

[0053] In practical applications, the main body part 321 is provided with a slot 3215 for accommodating the ejector pin 322, and the ejector pin 322 is inserted into the slot 3215 in a plug-in manner, so that a detachable connection relationship is formed between the ejector pin 322 and the main body part 321. In order to ensure that the ejector pin 322 is reliably positioned in the slot 3215 and obtain sufficient clamping force, the material ejecting head 32 further comprises a fixing sleeve 323, which is sleeved on the outer periphery of the main body part 321. When the fixing sleeve 323 is assembled in place relative to the main body part 321 along the axial direction or the radial direction, a radial extrusion action is generated on the main body part 321, so that the slot 3215 provided on the main body part 321 is correspondingly tightened, thereby clamping and locking the ejector pin 322 inserted therein.

[0054] The fixing sleeve 323 is sleeved on the outer periphery of the main body part 321 and extrudes the main body part 321 in the radial direction, so that a centripetal contraction force is generated on the inner wall of the slot 3215, thereby stably clamping the root of the ejector pin 322 and realizing quick assembly and disassembly and reliable fixation; when the ejector pin 322 needs to be replaced, the ejector pin 322 can be pulled out along the slot 3215 by loosening the fixing sleeve 323, which is simple and convenient to operate and does not require additional tools.

[0055] Referring again to Figure 5 , the main body part 321 comprises a clamping end 3211, the clamping end 3211 is provided with a slot 3215, the clamping end 3211 is provided with a through clamping groove 3216 in the radial direction, the clamping groove 3216 is communicated with the slot 3215, and the fixing sleeve 323 is sleeved on the outer periphery of the clamping end 3211 and at least partially covers the clamping groove 3216, so that the clamping groove 3216 is tightened, and then the slot 3215 is tightened.

[0056] In practical application, the main body 321 specifically comprises a clamping end 3211 located at the mounting end of the thimble 322, the clamping end 3211 serving as a partial region of the main body 321 and being used for realizing partial extrusion clamping of the thimble 322. The clamping end 3211 is provided with a slot 3215 arranged in axial correspondence with the thimble 322, so as to allow the thimble 322 to be inserted into the slot 3215. The clamping end 3211 is further provided with a clamping groove 3216 penetrating through the thickness direction of the clamping end 3211 along the radial direction of the clamping end 3211, the clamping groove 3216 being in communication with the slot 3215, so that the slot 3215 is cut by the clamping groove 3216 in the radial direction to form a clamping portion capable of being elastically contracted. When the fixing sleeve 323 is sleeved on the outer periphery of the clamping end 3211 and covers the position of the clamping groove 3216 at least partially, the clamping end 3211 originally cut by the clamping groove 3216 is capable of being clamped and folded due to the limitation and extrusion of the fixing sleeve 323 in the radial direction, so that the clamping groove 3216 is tightened, and the caliber of the slot 3215 in communication with the clamping groove 3216 is reduced, thereby realizing reliable clamping and fixing of the thimble 322 through the sleeving of the fixing sleeve 323 after the thimble 322 is inserted into the slot 3215.

[0057] Referring again to Figure 5 and Figure 7 , the fixing sleeve 323 is provided with a fixing groove 3231, the clamping end 3211 extends into the fixing groove 3231, and the radial dimension of the clamping end 3211 gradually decreases at least partially along the direction in which the clamping end 3211 is inserted into the fixing groove 3231, and the radial dimension of the groove wall of the fixing groove 3231 gradually decreases at least partially.

[0058] In practical application, the fixing sleeve 323 is provided with a fixing groove 3231 for accommodating the clamping end 3211, the clamping end 3211 extends into the fixing groove 3231 along the axial insertion direction, so that the clamping end 3211 and the fixing sleeve 323 form a limiting fit relationship in the axial and radial directions. Specifically, along the direction of the clamping end 3211 inserted into the fixing groove 3231 (for example, the direction extending from one end of the fixing sleeve 323 to the inside thereof), at least part of the radial dimension of the clamping end 3211 has a gradually reduced structure, which can be a conical frustum, a tapered ladder or a reduced diameter structure with a beveled outer periphery; Correspondingly, at least part of the inner diameter (or inscribed radial dimension) of the groove wall of the fixing groove 3231 gradually reduces in the same insertion direction, thereby forming a "conical" or "tapered" structure corresponding to the tapered profile of the outer periphery of the clamping end 3211. When the clamping end 3211 is inserted into the fixing groove 3231 and continues to advance along the insertion direction, as the larger radial dimension segment of the clamping end 3211 gradually enters the area with smaller inner diameter of the fixing groove 3231, the groove wall of the fixing groove 3231 gradually increases the radial extrusion effect on the outer periphery of the clamping end 3211, and then the clamping groove 3216 is tightened through the clamping groove 3216 provided on the clamping end 3211, and the insertion slot 3215 connected thereto is radially contracted, thereby achieving clamping and locking of the thimble 322 inserted into the insertion slot 3215.

[0059] Again referring to Figure 5 and Figure 7 , the clamping end 3211 includes a first part 3212 and a second part 3213 connected in sequence along the axial direction thereof, the first part 3212 is connected with the main body part 321, along the direction of the clamping end 3211 inserted into the fixing groove 3231, the second part 3213 gradually reduces in at least part of the radial dimension, the first part 3212 is provided with a through unlocking groove 3217, when the fixing sleeve 323 is sleeved on the clamping end 3211, at least part of the unlocking groove 3217 is exposed to the fixing sleeve 323.

[0060] In practical applications, the clamping end 3211 is divided into a first part 3212 and a second part 3213 connected in an axial direction, wherein the first part 3212 is connected to the main body part 321 and has a relatively large radial dimension, and the second part 3213 is tapered in the insertion direction, that is, the direction of inserting the clamping end 3211 into the fixing groove 3231 in the above embodiment, and the radial dimension gradually decreases at the position to realize cooperation with the fixing groove 3231. The unlocking groove 3217 is provided on the first part 3212 and penetrates the circumferential direction. When the fixing sleeve 323 is sleeved on the outer circumference of the clamping end 3211, at least part of the unlocking groove 3217 is exposed outside the end face of the fixing sleeve 323. The unlocking groove 3217 is convenient for the operator to extend into the unlocking groove 3217 by an external tool and apply a force to the fixing sleeve 323, so that when it is necessary to release the ejector pin 322, the fixing sleeve 323 can be axially forced by the unlocking groove 3217 to exit from the clamping end 3211, thereby releasing the radial extrusion of the clamping end 3211, restoring the initial caliber of the clamping groove 3216 and the insertion groove 3215, and further releasing the ejector pin 322.

[0061] Again refer to Figure 5 The clamping end 3211 includes a third part 3214, the opposite ends of the third part 3214 are connected to the first part 3212 and the second part 3213 respectively, the radial dimension of the third part 3214 is smaller than that of the second part 3213, and the radial dimension of the second part 3213 is smaller than that of the first part 3212.

[0062] In practical applications, the third part 3214 of the clamping end 3211 connects the first part 3212 and the second part 3213, and has a radial dimension smaller than that of the second part 3213 and smaller than that of the first part 3212, forming an intermediate transition section. This structure design is conducive to reducing the overall rigidity of the clamping end 3211 and improving the elastic deformation capability, so that the second part 3213 is more easily deformed radially when extruded by the fixing groove 3231, thereby improving the consistency and response speed of the clamping force on the ejector pin 322. At the same time, the small diameter of the third part 3214 forms a space for avoiding interference, so that the machining tool can more conveniently access the root area of the clamping end 3211 when machining the clamping end 3211, reducing the risk of interference and improving the machining precision and assembly efficiency.

[0063] Again refer to Figure 5The outer surface of the fixing sleeve 323 is provided with a flat surface 3232. In actual application, the flat surface 3232 is arranged on the outer surface of the fixing sleeve 323, so as to facilitate the operator to hold or use the tool to exert a rotating, axial pushing and pulling or other force, thereby improving the disassembly convenience. The flat surface 3232 can also prevent the fixing sleeve 323 from rolling during the installation process, so as to ensure the stable positioning and facilitate the accurate alignment of the assembly position. Meanwhile, the flat surface 3232 cooperates with the unlocking groove 3217 of the clamping end 3211, so that the force balance can be achieved by abutting the flat surface 3232 and the unlocking groove 3217 through the tool during disassembly, thereby avoiding the stress concentration to cause the deformation or damage of the components, so as to ensure the connection reliability and sealing performance after repeated assembly and disassembly.

[0064] In an embodiment, referring back to Figure 1 The detection device further comprises a detection component 5 and a guide component (not shown in the figure). The detection component 5 is connected with the mounting component 1. The guide component can include a sliding rail and a linear actuator. The mounting component 1 is slidingly connected to the sliding rail. The linear actuator is used to drive the mounting component 1 to make reciprocating linear motion along the sliding rail. The mounting component 1 slides along the sliding rail, thereby driving the detection component 5 or the material throwing component 3 or the marking component 4 to slide to the detection station, so as to complete the dynamic detection and positioning of the workpiece.

[0065] The detection device is provided with a detection station. The semiconductor connecting piece is located in the detection station. Specifically, the detection component 5 is used to detect whether the semiconductor connecting piece is qualified. When the mounting component 1 drives the detection component 5 to slide to the detection station, the detection component 5 detects the semiconductor connecting piece. When the detection result is unqualified: the mounting component 1 drives the material throwing component 3 to slide to the detection station, so that the material throwing component 3 is aligned with the semiconductor connecting piece and throws the material of the semiconductor connecting piece. Specifically, the semiconductor connecting piece can be pierced by a ejector pin 322. In addition, the mounting component 1 can also drive the marking component 4 to slide to the detection station, so that the marking component 4 is aligned with the semiconductor connecting piece and marks the semiconductor connecting piece. Specifically, the semiconductor connecting piece can be marked by an inkjet machine 42.

[0066] The detection component 5 can be an optical camera, a sensor, a laser scanner or a machine vision system, which can capture the topographic features and position information of the semiconductor connecting piece in real time, accurately identify the size deviation, surface defects or assembly errors. The guide component can be a gantry structure. The mounting component 1 is slidingly connected to the gantry structure. The motion repeatability positioning accuracy of the gantry structure is ±0.01 mm, which is suitable for semiconductor connecting pieces with a minimum interval of 0.2 mm.

[0067] In an embodiment, the diameter of the ejector pin 322 can be 0.8 mm to 5 mm, such as 0.8 mm, 0.9 mm, 1 mm, 1.5 mm, 2 mm or the like, which is suitable for semiconductor connecting pieces with a size of 1 mm to 8 mm.

[0068] In an embodiment, the inkjet machine 42 can have a dot size of 0.1mm-0.5mm, such as 0.1mm, 0.2mm, 0.3mm, 0.4mm or 0.5mm, etc., suitable for semiconductor connectors of 1mm-8mm in size.

[0069] In an embodiment, the detection component 5 can be an optical camera with a field of view of 7*8mm, which can accurately locate the reference point of the semiconductor connector.

[0070] It should be noted that the semiconductor connector mainly refers to a connector needed in a semiconductor assembly or packaging process. In some embodiments, the semiconductor connector is a conductive sintering film or conductive sintering sheet used in chip sintering, such as DTS (Direct Thermal Sintering, conductive sintering film / sintering silver film), sintering silver preform, etc. In the chip sintering scenario, the conductive sintering film and conductive sintering sheet are very small in size, so it is difficult to implement conventional product detection in this scenario, and manual material throwing is currently used. The driving component 2 of the present application can control the movement precision by rotating to drive the material throwing component 3 to slide, which is well adapted to the material throwing of the conductive sintering film and conductive sintering sheet, and the rotating action simultaneously controls the sliding of the material throwing component 3 and the marking component 4 in different directions, realizing integrated control of the material throwing and marking functions, avoiding the structural complexity and action redundancy brought by independent driving mechanisms, improving the detection efficiency and reliability, and being very suitable for the detection scenario of the conductive sintering film and conductive sintering sheet. In particular, the specific structure design of the material throwing component, the specific structure and cooperation relationship of the fixed sleeve 323 sleeved on the main body 321 not only realize the stability of the thimble 322, but also facilitate the installation of small-size thimbles 322, further improving the adaptability of the present application in the detection scenario of the conductive sintering film and conductive sintering sheet.

[0071] It can be understood that the device can be adapted to the detection needs of other precision electronic components in addition to being used for detecting semiconductor connectors.

[0072] In addition, the terms "first", "second" are only for descriptive purposes and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first", "second" can explicitly or implicitly include at least one of the features. In the description of the present application, the meaning of "multiple" is at least two, such as two, three, etc., unless otherwise specifically limited.

[0073] Moreover, in addition to being used to represent the orientation or positional relationship, the above-mentioned part of the terms can also be used to represent other meanings, for example, the term "upper" can also be used to represent a certain dependent relationship or connection relationship in some cases. For those skilled in the art, the specific meaning of these terms in the present application can be understood according to the specific situation.

[0074] The above description is merely that of a specific implementation of the application, and it is to be appreciated that those skilled in the art can make several improvements and refinements to the application without departing from the principles thereof.

Claims

1. A semiconductor connector inspection apparatus characterized by comprising: The semiconductor connector testing device comprises: a detection component for detecting whether the semiconductor connector is qualified; a mounting component; a driving component connected with the mounting component; a material throwing component in sliding connection with the mounting component; a marking component in sliding connection with the mounting component; wherein the driving component is connected with the material throwing component and the marking component respectively, and is used for driving the material throwing component and the marking component to slide in different directions relative to the mounting component by rotating at the same time, so as to realize material throwing or marking of the semiconductor connector; the driving component comprises a rotating member, a first linkage member and a second linkage member, the first linkage member and the second linkage member are connected to two sides of the rotating member respectively, one end of the first linkage member is in rotational connection with the rotating member, and the other end is in rotational connection with the material throwing component, one end of the second linkage member is in rotational connection with the rotating member, and the other end is in rotational connection with the marking component, the rotating member rotates at the same time to drive the first linkage member and the second linkage member to move and rotate in different directions, and then drives the material throwing component and the marking component to slide in different directions relative to the mounting component; the material throwing component and the marking component are arranged in sequence and spaced apart in a first direction, and are in sliding connection with the mounting component in a second direction, the first direction is perpendicular to the second direction, and the second direction is perpendicular to the rotating axis of the rotating member; the material throwing component comprises a material throwing head, the material throwing head comprises a main body and a thorn, the main body is connected with the mounting component, and the thorn is detachably connected with the main body, and is used for pricking and piercing the semiconductor connector which is unqualified.

2. The semiconductor connector inspection apparatus according to claim 1, wherein the material throwing component comprises a first sliding seat, the mounting component is provided with a first sliding rail, the first sliding seat is provided with a first sliding groove, the first sliding seat is in sliding connection with the first sliding rail through the first sliding groove, and is connected with the driving component, and the main body is detachably connected with the first sliding seat.

3. The semiconductor connector inspection apparatus according to claim 1, wherein the main body is provided with a slot, and the thorn is inserted into the slot; the material throwing head comprises a fixing sleeve, the fixing sleeve is sleeved on the outer periphery of the main body, and is used for extruding the main body, so that the slot is tightened to clamp the thorn.

4. The semiconductor connector inspection apparatus according to claim 3, wherein the main body comprises a clamping end, the clamping end is provided with the slot, the clamping end is provided with a through clamping groove in the radial direction, the clamping groove is in communication with the slot, and the fixing sleeve is sleeved on the outer periphery of the clamping end and at least partially covers the clamping groove, so that the clamping groove is tightened, and then the slot is tightened.

5. The semiconductor connector inspection apparatus according to claim 4, wherein the fixing sleeve is provided with a fixing groove, the clamping end extends into the fixing groove, along the direction of inserting the clamping end into the fixing groove, the clamping end gradually reduces in at least partial radial dimension, and the groove wall of the fixing groove gradually reduces in at least partial radial dimension.

6. The semiconductor connector inspection apparatus according to claim 5, wherein The clamping end comprises a first part and a second part connected in sequence along the axial direction of the clamping end, the first part is connected with the main body part, and the second part is gradually reduced in at least partial radial dimension, the first part is provided with a through unlocking slot, and at least part of the unlocking slot is exposed when the fixing sleeve is sleeved on the clamping end.

7. The semiconductor connector testing apparatus according to claim 6, wherein The clamping end comprises a third part, the opposite ends of the third part are connected with the first part and the second part respectively, the radial dimension of the third part is smaller than that of the second part, and the radial dimension of the second part is smaller than that of the first part.

8. The semiconductor connector inspection apparatus according to claim 3, wherein At least part of the outer surface of the fixing sleeve is a plane.

9. The semiconductor connector inspection apparatus according to claim 1, wherein The diameter of the ejector pin is 0.8mm-5mm.

10. The apparatus according to any one of claims 1 to 9, wherein The marking component comprises a second sliding seat and an inkjet machine, the second sliding seat is provided with a second sliding groove, the mounting component is provided with a second sliding rail, the second sliding seat is slidably connected with the second sliding rail through the second sliding groove, the inkjet machine is connected with the second sliding seat, and the inkjet machine is used for spraying different sizes of marks on the material.

11. The apparatus according to any one of claims 1 to 9, wherein The detection device further comprises a guide component, the detection component is connected with the mounting component, and the mounting component is slidably connected with the guide component so as to drive the detection component, the material throwing component or the marking component to slide to a detection station. When the mounting component drives the detection component to slide to the detection station, the detection component detects the semiconductor connecting piece. When the detection result is unqualified, the mounting component drives the material throwing component to slide to the detection station, so that the material throwing component is aligned with the semiconductor connecting piece and throws the material; and / or, the mounting component drives the marking component to slide to the detection station, so that the marking component is aligned with the semiconductor connecting piece and marks the semiconductor connecting piece.

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