Multi-layer quartz glass thermocompression bonding device and method
By separating the center and edge forces, the problem of weak edge bonding in quartz glass thermocompression bonding was solved by using floating components and heating compensation components. This achieved uniformity of pressure and temperature at the glass edges, improving bonding effect and product yield.
Patent Information
- Application Number
- CN202511888233.4
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2025-12-15
- Publication Date
- 2026-01-20
- Estimated Expiration
- Not applicable · inactive patent
AI Technical Summary
In the existing technology, during the hot-press bonding process of quartz glass, insufficient pressure at the glass edge is caused by the radial pressure gradient, resulting in weak edge bonding, which affects the bonding effect and product yield.
A multilayer quartz glass hot-press bonding device was designed. By separating the forces at the center and the edges, and using floating components and heating compensation components, the device achieves downward pressure and temperature compensation at the glass edges, ensuring that the pressure and temperature at the glass edges are within the standard range.
It effectively reduces weak bonding at the glass edges, improves bonding performance, increases product yield, and saves energy.
Smart Images
Figure CN121361260A_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The present application relates to the technical field of glass bonding, in particular to a multi-layer quartz glass hot-press bonding device and method. BACKGROUND
[0002] Glass hot-press bonding is an advanced bonding technology in the field of packaging. The basic principle is to make two clean glass surfaces tightly contact and atomically bond under high temperature and pressure conditions, thereby realizing a firm air-tight connection. First, surface activation treatment is performed, such as ultrasonic cleaning, alkaline cleaning, etc., to break the silicon-oxygen bonds on the surface and generate a large number of polar silicon hydroxyl groups. Then, the temperature is raised and pressure is applied to bond the two surfaces to each other. Then, the pressure is removed and the bonding is maintained in a vacuum state. Finally, the product is cooled to room temperature, and the quartz glass bonding condition is detected.
[0003] In the existing patent CN220684976U, a glass cavity bonding device is disclosed. A plurality of reference surfaces perpendicular to each other are arranged on a reference table. The glass is placed on the corresponding reference surface, and the edges of each glass abut each other. A thimble assembly is arranged on each reference surface to press the end surface of the corresponding glass, so as to bond the edges of each glass to each other, thereby enabling the glass with double-sided film to be directly bonded in a glass cavity.
[0004] In the above structure, the bonding function of the glass can be realized. However, when hot-press bonding of quartz glass is performed, a radial pressure gradient is easily formed during the downward pressing of the upper pressing head, which is manifested as high pressure in the central region and low pressure in the edge region. This uneven pressure distribution directly leads to weak bonding of the edges. On the one hand, insufficient pressure of the edges makes the glass surfaces unable to fully adhere, and the atomic spacing is too large. On the other hand, poor contact further increases the thermal resistance of the glass edge contact, causing the actual temperature of the edge to be lower than that of the center. The bonding rate of quartz glass is highly sensitive to temperature, and insufficient temperature further inhibits atomic diffusion and interfacial reaction, thereby forming a vicious cycle of insufficient pressure, insufficient temperature, and weaker bonding, which greatly reduces the bonding effect and the yield of the product.
[0005] Therefore, how to provide a multi-layer quartz glass hot-press bonding device and method is a problem that needs to be solved by those skilled in the art. SUMMARY
[0006] The application aims to provide a multi-layer quartz glass hot-press bonding device and method. The multi-layer quartz glass hot-press bonding device comprises a supporting heating seat, a sealing assembly arranged on the supporting heating seat, a lower pressing assembly arranged on the sealing assembly, a heat insulation assembly arranged between the lower pressing assembly and the sealing assembly, a floating assembly for pressing the glass edge arranged on the lower pressing assembly, a connecting assembly arranged on the heat insulation assembly, a pulling assembly arranged between the connecting assembly and the heat insulation assembly, a contact assembly arranged between the connecting assembly and the floating assembly, and a heating compensation assembly arranged in the floating assembly and electrically connected in series with the contact assembly. The lower pressing assembly drives the heat insulation assembly and the connecting assembly to move, so that the connecting assembly drives the contact assembly to move and contact, forcing the contact assembly to press the floating assembly, thereby achieving the pressing effect on the glass edge. At the same time, the contact assembly is connected to the circuit, so that the heating compensation assembly generates heat, thereby achieving the temperature compensation of the glass edge.
[0007] Preferably, the sealing assembly comprises a hydraulic push rod hingedly mounted on the supporting heating seat, a sealing cover is hingedly arranged on the supporting heating seat, the sealing cover is hingedly arranged on the output end of the hydraulic push rod, and the supporting heating seat and the sealing cover are mutually attached to form a sealing effect.
[0008] Preferably, the lower pressing assembly comprises a hydraulic lifting rod mounted on the sealing cover, the output end of the hydraulic lifting rod is connected with a pressing plate, and the pressing plate corresponds to the center of the supporting heating seat.
[0009] Preferably, the heat insulation assembly comprises a heat insulation base arranged in the sealing cover, the output end of the hydraulic lifting rod is fixedly sleeved with a heat insulation block, the heat insulation block penetrates through the heat insulation base, and a heat insulation spring is sleeved on the outer circle of the output end of the hydraulic lifting rod between the heat insulation block and the sealing cover.
[0010] Preferably, the floating assembly comprises a plurality of fixed plates arranged on the pressing plate, a floating outer rod is arranged on the fixed plate, a floating inner rod penetrates through the floating outer rod, a floating pressing ring is arranged on the floating inner rod, the floating pressing ring is sleeved on the outer circle of the pressing plate, and a floating spring is sleeved on the outer circle of the floating inner rod between the floating pressing ring and the floating outer rod.
[0011] Preferably, the connecting assembly comprises a connecting rod one hingedly arranged on the heat insulation block, the connecting rod one is hingedly arranged on the heat insulation base, an end of the connecting rod one is hingedly connected with a connecting rod, the connecting rod is hingedly connected with a connecting rod two, the connecting rod two is hingedly arranged on the heat insulation base, and an end of the connecting rod two is provided with a connecting block.
[0012] Preferably, the pulling assembly comprises a pulling outer rod hinged on the heat insulation base, a baffle is hinged on the connecting block, a pulling inner rod is arranged on the baffle and penetrates through the pulling outer rod, and a pulling spring is arranged between the pulling outer rod and the baffle and is sleeved on the outer ring of the pulling inner rod.
[0013] Preferably, the contact assembly comprises a contact conductive column arranged on the floating pressure ring, an insulating support rod is arranged on the connecting block, and a contact conductive ball is arranged on the insulating support rod.
[0014] Preferably, the heating compensation assembly comprises a heating strip arranged in the floating pressure ring, one end of the heating strip is provided with an electric contact one penetrating through the floating pressure ring, the other end of the heating strip is electrically connected with the contact conductive column, and the contact conductive ball is provided with an electric contact two.
[0015] The method for the multi-layer quartz glass hot-press bonding device is also provided, when the quartz glass is hot-press bonded, the sealing assembly is started, the sealing cover is separated from the supporting heating base, two quartz glasses are placed in the placing grooves of the supporting heating base, the sealing assembly is reversely started, the sealing cover and the supporting heating base are mutually attached to form a sealed environment, and the glass drives the floating pressure ring to move upward to be flush with the lower pressing plate; the supporting heating base is started, the glass temperature is forced to slowly rise, the lower pressing assembly is started, the lower pressing plate is forced to press the glass, the two glasses are slowly bonded, then the pressure is removed, the sealed environment is vacuumized, the two glasses are bonded under the vacuum, and the bonded product is obtained after cooling; at this time, it is found that due to the effects of the pressure gradient and the temperature gradient, the edge of the glass forms a weak bond, when the lower pressing plate presses the glass, the heat insulation block drives the connecting rod one, the connecting rod and the connecting rod two to move, the contact conductive ball is forced to press, the contact conductive ball contacts and presses the contact conductive column, the contact conductive column drives the floating pressure ring to press the edge of the glass, the pressing effect on the edge of the glass is realized, and the weak bond is effectively reduced; meanwhile, after the floating pressure ring presses the edge of the glass, due to the reduced contact thermal resistance between the glass and the glass and between the glass and the supporting heating base, the heat transfer is smooth, the temperature of the edge of the glass is normal, the compensation temperature value is reduced, and the energy is saved; when the contact conductive ball contacts the contact conductive column, the circuit of the heating strip is forced to be conducted, the heating temperature of the heating strip is adjusted, the compensation effect on the temperature of the edge of the glass is realized, the weak bond is further reduced, and thus the pressure and the temperature of the edge of the glass are all in the standard range, and the bonding effect is improved.
[0016] The beneficial effects of the application are as follows:
[0017] The application is characterized in that when the quartz glass is subjected to thermal pressure bonding, the sealing assembly is started to separate the sealing assembly from the supporting heating seat, the supporting heating seat is opened, two quartz glass stacks are placed in the placing groove of the supporting heating seat, the sealing assembly is reversely started to make the sealing assembly and the supporting heating seat adhere to each other to form a sealed environment, and the floating assembly is driven upward by the glass to be flush with the pressing assembly; the supporting heating seat is started to force the glass temperature to slowly rise, and the pressing assembly is started to press the glass, so that the two glasses are slowly bonded, then the pressure is removed, the sealed environment is vacuumized to bond the two glasses under vacuum, and the bonded product is obtained after cooling; at this time, it is found that due to the effect of pressure gradient and temperature gradient, the edge of the glass will form a weak bond, when the glass is pressed by the pressing assembly, the heat insulation assembly drives the connecting assembly to move, the contact assembly is forced to contact itself, the contact assembly drives the floating assembly to press the edge of the glass, so that the pressing effect on the edge of the glass is realized, and the weak bond of the edge of the glass is effectively reduced; at the same time, after the floating assembly presses the edge of the glass, the contact thermal resistance between the glass and the glass and between the glass and the supporting heating seat is reduced, heat transfer is smooth, the temperature of the edge of the glass is closer to the normal range, so that the compensation temperature value is reduced and energy is saved; when the contact assembly contacts itself, the circuit of the heating compensation assembly is turned on, the heating temperature of the heating compensation assembly is adjusted to realize the compensation effect of the temperature of the edge of the glass, further reduce the weak bond of the edge of the glass, so that the pressure and temperature of the edge of the glass reach the standard range, and the bonding effect is greatly improved; in summary, the multilayer quartz glass thermal pressure bonding device and method of the application separates the central force and the edge force, and ingeniously uses the pressing force to solve the problem of weak bond of the edge, can ensure that the edge pressing force of the glass is in the standard pressure range, avoid the phenomenon that the central area pressure is high and the edge area pressure is low, make the glass surface fully adhere, ensure that the edge contact thermal resistance is reduced, make the edge temperature of the glass closer to the bonding temperature, reduce the temperature compensation value, save energy, facilitate the edge atom diffusion, form a virtuous cycle of normal pressure, closer temperature and smooth bonding, greatly improve the bonding effect, and improve the yield of the product. BRIEF DESCRIPTION OF DRAWINGS
[0018] The accompanying drawings are included to provide a further understanding of the application, and constitute a part of the specification, illustrate the application together with the embodiments thereof, and explain the application without limiting the application. In the drawings:
[0019] Figure 1 is a perspective view of the structure of the application;
[0020] Figure 2 is a position relationship diagram of the internal structure of the application;
[0021] Figure 3 is an entity diagram of the internal structure of the application;
[0022] Figure 4 is a front view of the present application Figure 3 is a front view of the present application
[0023] Figure 5 is a front view of the present application Figure 3 is a front view of the present application
[0024] Figure 6 is a front view of the present application
[0025] Figure 7 is a front view of the present application Figure 5 is a front view of the present application
[0026] Figure 8 is a front view of the present application Figure 6 is a front view of the present application
[0027] Figure 9 is a front view of the present application
[0028] Figure 10 is a front view of the present application
[0029] Figure: 1, support heating seat; 2, sealing assembly; 201, hydraulic push rod; 202, sealing cover; 3, down pressure assembly; 301, hydraulic lifting rod; 302, down pressure plate; 4, heat insulation assembly; 401, heat insulation base; 402, heat insulation block; 403, heat insulation spring; 5, floating assembly; 501, fixed plate; 502, floating outer rod; 503, floating inner rod; 504, floating pressure ring; 505, floating spring; 6, connecting assembly; 601, connecting rod one; 602, connecting rod; 603, connecting rod two; 604, connecting block; 7, pulling assembly; 701, pulling outer rod; 702, baffle; 703, pulling inner rod; 704, pulling spring; 8, contact assembly; 801, contact conductive column; 802, insulating support rod; 803, contact conductive ball; 9, heating compensation assembly; 901, heating strip; 902, power contact one; 903, power contact two. DETAILED DESCRIPTION
[0030] The present application will now be described in further detail by reference to the accompanying drawings. These drawings show only the essential features of the present application and are therefore to be regarded as a schematic representation only, and accordingly they show only those parts of the application that are relevant to an understanding of the present application.
[0031] Example one:
[0032] As Figure 1 , Figure 2 , Figure 3 , Figure 4 , Figure 5 ,Figure 6 、 Figure 7 、 Figure 8 、 Figure 9 and Figure 10 As shown in the drawings, the multilayer quartz glass hot-press bonding device of the present application comprises a supporting heating seat 1, a sealing assembly 2 arranged on the supporting heating seat 1, a lower pressing assembly 3 arranged on the sealing assembly 2, a heat insulation assembly 4 arranged between the sealing assembly 2 and the lower pressing assembly 3, a floating assembly 5 for pressing the glass edge arranged on the lower pressing assembly 3, a connecting assembly 6 arranged on the heat insulation assembly 4, a pulling assembly 7 arranged between the heat insulation assembly 4 and the connecting assembly 6, a contact assembly 8 arranged between the connecting assembly 6 and the floating assembly 5, and a heating compensation assembly 9 arranged in the floating assembly 5 and electrically connected in series with the contact assembly 8. The lower pressing assembly 3 drives the heat insulation assembly 4 and the connecting assembly 6 to move downward, so that the connecting assembly 6 drives the contact assembly 8 to move and contact, forcing the contact assembly 8 to press the floating assembly 5 downward, thereby achieving the effect of pressing the glass edge. At the same time, the contact assembly 8 is connected to the circuit, so that the heating compensation assembly 9 generates heat, thereby achieving the temperature compensation of the glass edge.
[0033] Working principle: when the quartz glass is heat-pressed and bonded, the sealing assembly 2 is started to separate the sealing assembly 2 from the supporting heating seat 1, the supporting heating seat 1 is opened, two quartz glass stacks are placed in the placing groove of the supporting heating seat 1, the sealing assembly 2 is started in reverse to make the sealing assembly 2 and the supporting heating seat 1 adhere to each other to form a sealed environment, and the glass drives the floating assembly 5 to move upward to be flush with the downward pressing assembly 3; the supporting heating seat 1 is started to force the glass temperature to slowly rise, and the downward pressing assembly 3 is started to force the downward pressing assembly 3 to press the glass, so that the two glasses are slowly bonded, then the pressure is removed, the sealed environment is vacuumized to bond the two glasses under vacuum, and the bonded product is obtained after cooling; at this time, it is found that due to the effect of pressure gradient and temperature gradient, the edge of the glass will form a weak bond, when the downward pressing assembly 3 presses the glass, the heat insulation assembly 4 drives the connecting assembly 6 to move, the contact assembly 8 is forced to contact itself, the contact assembly 8 drives the floating assembly 5 to press the edge of the glass, so as to realize the pressing effect of the edge of the glass, effectively reducing the weak bond of the edge of the glass; at the same time, after the floating assembly 5 presses the edge of the glass, the contact thermal resistance between the glass and the glass and between the glass and the supporting heating seat 1 is reduced, so that the heat transfer is smooth, the temperature of the edge of the glass is closer to the normal range, thereby reducing the compensation temperature value and saving energy; when the contact assembly 8 contacts itself, the circuit of the heating compensation assembly 9 is turned on, the heating temperature of the heating compensation assembly 9 is adjusted to realize the compensation effect of the temperature of the edge of the glass, further reduce the weak bond of the edge of the glass, so that the pressure and temperature of the edge of the glass reach the standard range, greatly improving the bonding effect; in summary, the multi-layer quartz glass heat-pressing and bonding device and method of the application separates the central force and the edge force, and ingeniously uses the pressing force to solve the problem of weak bond of the edge, which can ensure that the edge pressing force of the glass is in the standard pressure range, avoid the phenomenon that the central area pressure is high and the edge area pressure is low, make the glass surface fully adhere, ensure that the edge contact thermal resistance is reduced, make the edge temperature of the glass closer to the bonding temperature, reduce the temperature compensation value, save energy, facilitate the edge atom diffusion, form a virtuous cycle of normal pressure, closer temperature and smooth bonding, greatly improve the bonding effect, and improve the yield of the product.
[0034] Example two:
[0035] As Figure 1 , Figure 2 , Figure 3 , Figure 4 , Figure 5 , Figure 6 , Figure 7 , Figure 8 , Figure 9 and Figure 10As shown in the drawings, the multilayer quartz glass hot-press bonding device of the present application, the sealing assembly 2 comprises a hydraulic push rod 201 hingedly mounted on the supporting heating seat 1, the supporting heating seat 1 is hingedly connected with a sealing cover 202, the sealing cover 202 is hingedly connected to the output end of the hydraulic push rod 201, and the supporting heating seat 1 and the sealing cover 202 are mutually attached to form a sealing effect.
[0036] As shown in the drawings, Figure 1 , Figure 2 , Figure 3 , Figure 4 , Figure 5 , Figure 6 , Figure 7 , Figure 8 , Figure 9 and Figure 10 As shown in the drawings, the multilayer quartz glass hot-press bonding device of the present application, the lower pressing assembly 3 comprises a hydraulic lifting rod 301 mounted on the sealing cover 202, the output end of the hydraulic lifting rod 301 is connected with a lower pressing plate 302, and the lower pressing plate 302 corresponds to the center of the supporting heating seat 1.
[0037] As shown in the drawings, Figure 1 , Figure 2 , Figure 3 , Figure 4 , Figure 5 , Figure 6 , Figure 7 , Figure 8 , Figure 9 and Figure 10 As shown in the drawings, the multilayer quartz glass hot-press bonding device of the present application, the heat insulation assembly 4 comprises a heat insulation base 401 arranged in the sealing cover 202, the output end of the hydraulic lifting rod 301 is fixedly sleeved with a heat insulation block 402, the heat insulation block 402 penetrates through the heat insulation base 401, and the heat insulation block 402 and the sealing cover 202 are provided with a heat insulation spring 403 sleeved on the outer circle of the output end of the hydraulic lifting rod 301.
[0038] As shown in the drawings, Figure 1 , Figure 2 , Figure 3 , Figure 4 , Figure 5 , Figure 6 , Figure 7 , Figure 8 , Figure 9 and Figure 10As shown in the figure, the floating assembly 5 of the multilayer quartz glass hot-press bonding device of the present application comprises a plurality of fixed plates 501 arranged on the lower pressing plate 302, the fixed plates 501 are provided with floating outer rods 502, the floating outer rods 502 are provided with floating inner rods 503 penetrating through the floating outer rods 502, the floating inner rods 503 are provided with floating pressing rings 504, the floating pressing rings 504 are sleeved on the outer circle of the lower pressing plate 302, and the floating spring 505 is sleeved on the outer circle of the floating inner rod 503 between the floating pressing ring 504 and the floating outer rod 502.
[0039] As shown in the figure, Figure 1 , Figure 2 , Figure 3 , Figure 4 , Figure 5 , Figure 6 , Figure 7 , Figure 8 , Figure 9 and Figure 10 As shown in the figure, the connecting assembly 6 of the multilayer quartz glass hot-press bonding device of the present application comprises a connecting rod one 601 hinged on the heat insulation block 402, the connecting rod one 601 is hinged on the heat insulation base 401, the end of the connecting rod one 601 is hinged with a connecting rod 602, the connecting rod 602 is hinged with a connecting rod two 603, the connecting rod two 603 is hinged on the heat insulation base 401, and the end of the connecting rod two 603 is provided with a connecting block 604.
[0040] As shown in the figure, Figure 1 , Figure 2 , Figure 3 , Figure 4 , Figure 5 , Figure 6 , Figure 7 , Figure 8 , Figure 9 and Figure 10 As shown in the figure, the pulling assembly 7 of the multilayer quartz glass hot-press bonding device of the present application comprises a pulling outer rod 701 hinged on the heat insulation base 401, a baffle 702 is hinged on the connecting block 604, the baffle 702 is provided with a pulling inner rod 703 penetrating through the pulling outer rod 701, and a pulling spring 704 is sleeved on the outer circle of the pulling inner rod 703 between the pulling outer rod 701 and the baffle 702.
[0041] As shown in the figure, Figure 1 , Figure 2 , Figure 3 , Figure 4 , Figure 5 , Figure 6 , Figure 7 , Figure 8 , Figure 9 and Figure 10As shown in the drawings, the multi-layer quartz glass hot-press bonding device of the present application, the contact assembly 8 comprises a contact conductive column 801 arranged on the floating pressure ring 504, an insulating support rod 802 arranged on the connecting block 604, and a contact conductive ball 803 arranged on the insulating support rod 802.
[0042] As shown in the drawings, the multi-layer quartz glass hot-press bonding device of the present application, the heating compensation assembly 9 comprises a heating strip 901 arranged in the floating pressure ring 504, an electrical contact one 902 arranged at one end of the heating strip 901 and penetrating through the floating pressure ring 504, and an electrical contact two 903 arranged on the contact conductive ball 803 and electrically connected with the contact conductive column 801. Figure 1 、 Figure 2 、 Figure 3 、 Figure 4 、 Figure 5 、 Figure 6 、 Figure 7 、 Figure 8 、 Figure 9 and Figure 10 As shown in the drawings, the multi-layer quartz glass hot-press bonding device of the present application, the heating compensation assembly 9 comprises a heating strip 901 arranged in the floating pressure ring 504, an electrical contact one 902 arranged at one end of the heating strip 901 and penetrating through the floating pressure ring 504, and an electrical contact two 903 arranged on the contact conductive ball 803 and electrically connected with the contact conductive column 801.
[0043] Working principle: when the quartz glass is hot-pressed and bonded, the hydraulic push rod 201 is started, the output end of the hydraulic push rod 201 drives the sealing cover 202 to move, forces the sealing cover 202 to rotate around the hinge point, separates the sealing cover 202 from the supporting heating seat 1, opens the supporting heating seat 1, places two quartz glass stacks in the placing groove of the supporting heating seat 1 for heating, reversely starts the hydraulic push rod 201, the output end of the hydraulic push rod 201 drives the sealing cover 202 to move reversely, makes the sealing cover 202 and the supporting heating seat 1 mutually adhere to form a sealed environment, at the same time, the glass drives the floating pressure ring 504 to move upwards, the floating pressure ring 504 drives the floating inner rod 503 to slide in the floating outer rod 502, the floating spring 505 is compressed, and the floating pressure ring 504 is flush with the lower pressing plate 302;
[0044] The supporting heating seat 1 is started, the glass temperature is forced to slowly rise, at the same time, the hydraulic lifting rod 301 is started, the hydraulic lifting rod 301 drives the lower pressing plate 302 to move downwards, forces the lower pressing plate 302 to press the glass, makes the two glasses slowly bond, then removes the pressure, and the sealed environment is vacuumized, so that the two glasses are bonded under vacuum, and the bonded product is obtained after cooling.
[0045] At this time, due to the pressure gradient and temperature gradient, the center area is high in pressure and temperature, and the edge area is low in pressure and temperature, and the edge of the glass forms a weak bond. When the lower plate 302 presses the glass, the output end of the hydraulic lifting rod 301 drives the heat insulation block 402 to slide in the heat insulation base 401, and the heat insulation spring 403 is stretched. The heat insulation spring 403 plays a protective role. The downward movement of the heat insulation block 402 drives the end of the connecting rod one 601 to move downward, and the other end of the connecting rod one 601 moves upward. The other end of the connecting rod one 601 drives the connecting rod two 602 to move upward, and the other end of the connecting rod two 603 is forced to move downward. The connecting rod two 603 drives the connecting block 604 to move downward, and the connecting block 604 pulls the baffle 702. The baffle 702 drives the pulling inner rod 703 to move in the pulling outer rod 701, so that the pulling spring 704 is stretched. The downward movement of the connecting block 604 drives the insulating support rod 802 to move downward, and the insulating support rod 802 drives the contact conductive ball 803 to move downward, forcing the contact conductive ball 803 to contact the contact conductive column 801. The output end of the hydraulic lifting rod 301 continuously drives the lower plate 302 to press downward, so that the contact conductive ball 803 continuously presses the contact conductive column 801, forcing the contact conductive column 801 to continuously press the edge of the glass. The downward force is transmitted to the edge of the glass by the lever principle, so as to realize the synchronous downward pressing of the edge of the glass and effectively reduce the weak bond of the edge of the glass. At the same time, after the floating pressure ring 504 presses the edge of the glass, the contact thermal resistance between the glass and the glass and between the glass and the supporting heating base 1 is reduced, so that the heat transfer is smooth, the temperature of the edge of the glass is closer to the normal range, and the compensation temperature value is reduced, thereby saving energy.
[0046] At the same time, the contact conductive ball 803 and the contact conductive column 801 are in continuous contact, and the power supply positive and negative electrodes are electrically connected through the electric contact one 902 and the electric contact two 903, so as to force the circuit of the heating strip 901 to be conductive, and the heating temperature of the heating strip 901 is adjusted through external current control, so that the heating strip 901 heats the edge of the glass, realizes the compensation effect of the temperature of the edge of the glass, further reduces the weak bond of the edge of the glass, and makes the pressure and temperature of the edge of the glass reach the standard range, thereby greatly improving the bonding effect.
[0047] The device separates the lower plate 302 and the floating pressure ring 504, so that the floating pressure ring 504 presses the edge of the glass when the lower plate 302 presses, so that the center and edge of the glass have the same pressing force, avoiding the phenomenon of weak bond. At the same time, the contact conductive ball 803 and the contact conductive column 801 are in continuous contact during pressing, the circuit is turned on, the temperature of the edge of the glass is compensated, the temperature is further improved, and the temperature is close to the normal range, thereby improving the bonding effect of the edge of the glass from the aspects of pressure and temperature.
[0048] The scheme separates the center force and the edge force, and solves the problem of weak bonding of the edge by skillfully using the downward force. On the one hand, it can ensure that the downward force of the glass edge is in the standard pressure range, avoid the phenomenon that the pressure of the center area is high and the pressure of the edge area is low, and make the glass surface fully adhere; on the other hand, it can ensure that the edge contact thermal resistance is reduced, so that the glass edge temperature is closer to the bonding temperature, the temperature compensation value is reduced, the energy is saved, the edge atom diffusion is facilitated, a virtuous cycle of normal pressure, closer temperature and smooth bonding is formed, the bonding effect is greatly improved, and the yield of the product is improved.
[0049] Example three:
[0050] As shown in , , , , , , , , and , the present application proposes a method for multi-layer quartz glass hot-press bonding device. When the quartz glass is hot-press bonded, the sealing assembly 2 is started to separate the sealing cover 202 from the supporting and heating seat 1, the two quartz glasses are placed in the placing groove of the supporting and heating seat 1, the sealing assembly 2 is started in reverse to make the sealing cover 202 and the supporting and heating seat 1 adhere to each other to form a sealed environment, and the glass drives the floating pressure ring 504 to move up to be flush with the lower pressing plate 302; the supporting and heating seat 1 is started to force the glass temperature to rise slowly, and the lower pressing assembly 3 is started to force the lower pressing plate 302 to press the glass, so that the two glasses are slowly bonded, then the pressure is removed, and the sealed environment is vacuumized to bond the two glasses under vacuum, and the bonded product is obtained after cooling; at this time, it will be found that due to the action of pressure gradient and temperature gradient, the edge of the glass will form weak bonding. When the lower pressing plate 302 presses the glass, the heat insulation block 402 drives the connecting rod one 601, the connecting rod 602 and the connecting rod two 603 to move, forces the contact conductive ball 803 to press, makes the contact conductive ball 803 contact and press the contact conductive column 801, and makes the contact conductive column 801 drive the floating pressure ring 504 to press the edge of the glass, realizes the downward pressing action on the edge of the glass, and effectively reduces the weak bonding; at the same time, after the floating pressure ring 504 presses the edge of the glass, due to the reduction of the contact thermal resistance between the glass and the glass and between the glass and the supporting and heating seat 1, the heat transfer is smooth, the temperature of the glass edge is normal, so as to reduce the compensation temperature value and save energy; when the contact conductive ball 803 contacts the contact conductive column 801, the circuit of the heating strip 901 is turned on, the heating temperature of the heating strip 901 is adjusted to realize the compensation effect of the temperature of the edge of the glass, further reduce the weak bonding, so that the pressure and temperature of the edge of the glass are in the standard range, and the bonding effect is improved.
[0051] The above merely provides the preferred embodiment of the present application, and the protection scope of the present application is not limited thereto. Any person skilled in the art, according to the technical range disclosed by the present application and the inventive concept thereof, can make equivalent replacements or changes, and all these should be covered in the protection scope of the present application.
Claims
1. A multi-layered quartz glass hot press bonding apparatus, characterized by, The application relates to a heating support seat (1) provided with a sealing assembly (2), a pressing assembly (3) arranged on the sealing assembly (2), a heat insulation assembly (4) arranged between the sealing assembly (2) and the pressing assembly (3), a floating assembly (5) for pressing the edge of a glass arranged on the pressing assembly (3), a connecting assembly (6) arranged on the heat insulation assembly (4), a pulling assembly (7) arranged between the connecting assembly (6) and the heat insulation assembly (4), a contact assembly (8) arranged between the connecting assembly (6) and the floating assembly (5), and a heating compensation assembly (9) electrically connected in series with the contact assembly (8) and arranged in the floating assembly (5); the pressing assembly (3) drives the heat insulation assembly (4) and the connecting assembly (6) to move, the connecting assembly (6) drives the contact assembly (8) to move and contact, the contact assembly (8) is forced to press the floating assembly (5), the edge of the glass is pressed, and the circuit is connected, the heating compensation assembly (9) generates heat, and the temperature of the edge of the glass is compensated.
2. The multi-layered quartz glass hot press bonding apparatus according to claim 1, wherein, The sealing assembly (2) comprises a hydraulic push rod (201) hingedly arranged on the heating support seat (1), a sealing cover (202) hingedly arranged on the hydraulic push rod (201), and the sealing cover (202) is hingedly arranged on the output end of the hydraulic push rod (201); the heating support seat (1) and the sealing cover (202) are mutually attached to form a sealing effect.
3. The multi-layered quartz glass hot press bonding apparatus according to claim 2, wherein The pressing assembly (3) comprises a hydraulic lifting rod (301) arranged on the sealing cover (202), and the output end of the hydraulic lifting rod (301) is connected with a pressing plate (302); the pressing plate (302) corresponds to the center of the heating support seat (1).
4. The multi-layered quartz glass hot press bonding apparatus according to claim 3, wherein The heat insulation assembly (4) comprises a heat insulation base (401) arranged in the sealing cover (202), a heat insulation block (402) fixedly sleeved on the output end of the hydraulic lifting rod (301), and the heat insulation block (402) penetrates through the heat insulation base (401); a heat insulation spring (403) is arranged between the heat insulation block (402) and the sealing cover (202) and sleeved on the outer circle of the output end of the hydraulic lifting rod (301).
5. The multi-layered quartz glass hot press bonding apparatus according to claim 4, wherein The floating assembly (5) comprises a plurality of fixing plates (501) arranged on the pressing plate (302), a floating outer rod (502) arranged on the fixing plate (501), a floating inner rod (503) penetrating through the floating outer rod (502) and arranged on the floating outer rod (502), a floating pressing ring (504) arranged on the floating inner rod (503), and the floating pressing ring (504) is sleeved on the outer circle of the pressing plate (302); a floating spring (505) is arranged between the floating pressing ring (504) and the floating outer rod (502) and sleeved on the outer circle of the floating inner rod (503).
6. The multi-layered quartz glass hot press bonding apparatus according to claim 5, wherein The connecting assembly (6) comprises a connecting rod I (601) hinged on the heat insulation block (402), the connecting rod I (601) is hinged on the heat insulation base (401), and end portions of the connecting rod I (601) are hinged with connecting rods (602), the connecting rods (602) are hinged with connecting rod II (603), the connecting rod II (603) is hinged on the heat insulation base (401), and end portions of the connecting rod II (603) are provided with connecting blocks (604).
7. The multi-layered quartz glass hot press bonding apparatus according to claim 6, wherein The pulling assembly (7) comprises a pulling outer rod (701) hinged on the heat insulation base (401), the connecting blocks (604) are hinged with baffles (702), the baffles (702) are provided with pulling inner rods (703) penetrating the pulling outer rods (701), and pulling springs (704) sleeved on outer rings of the pulling inner rods (703) are arranged between the pulling outer rods (701) and the baffles (702).
8. The multi-layered quartz glass hot press bonding apparatus according to claim 7, wherein The contact assembly (8) comprises contact conductive columns (801) arranged on the floating pressure ring (504), the connecting blocks (604) are provided with insulating support rods (802), and the insulating support rods (802) are provided with contact conductive balls (803).
9. The multi-layered quartz glass hot press bonding apparatus according to claim 8, wherein The heating compensation assembly (9) comprises a heating strip (901) arranged in the floating pressure ring (504), one end of the heating strip (901) is provided with an electric contact I (902) penetrating the floating pressure ring (504), the other end of the heating strip (901) is electrically connected with the contact conductive column (801), and the contact conductive ball (803) is provided with an electric contact II (903).
10. The method of the multilayer quartz glass hot-press bonding apparatus according to claim 9, characterized in that, In the heat pressing bonding of quartz glass, the sealing assembly (2) is started to separate the sealing cover (202) from the supporting heating seat (1), two quartz glasses are placed in the placing groove of the supporting heating seat (1), the sealing assembly (2) is started reversely to make the sealing cover (202) and the supporting heating seat (1) adhere to each other to form a sealed environment, and the glass drives the floating pressing ring (504) to move upward to be flush with the lower pressing plate (302); the supporting heating seat (1) is started to force the glass temperature to rise slowly, the lower pressing assembly (3) is started to force the lower pressing plate (302) to press the glass, so that the two glasses are bonded slowly, then the pressure is removed, the sealed environment is vacuumized to bond the two glasses under vacuum, and the bonded product is obtained after cooling; at this time, it is found that due to the action of the pressure gradient and the temperature gradient, the edge of the glass will form a weak bond, when the lower pressing plate (302) presses the glass, the heat insulation block (402) drives the connecting rod one (601), the connecting rod (602) and the connecting rod two (603) to move, the contact conductive ball (803) is forced to press, the contact conductive ball (803) contacts and presses the contact conductive column (801), the contact conductive column (801) drives the floating pressing ring (504) to press the edge of the glass, the pressing effect on the edge of the glass is realized, and the weak bond is effectively reduced; at the same time, after the floating pressing ring (504) presses the edge of the glass, due to the reduction of the contact thermal resistance between the glass and the glass and between the glass and the supporting heating seat (1), the heat transfer is smooth, the temperature of the edge of the glass is normal, so that the compensation temperature value is reduced, and the energy is saved; when the contact conductive ball (803) contacts the contact conductive column (801), the circuit of the heating strip (901) is forced to be conducted, the heating temperature of the heating strip (901) is adjusted to realize the compensation effect of the temperature of the edge of the glass, further reduce the weak bond, so that the pressure and the temperature of the edge of the glass reach the standard range, and the bonding effect is improved.