Electromagnet assembly of rotating cathode

Abstract

An electromagnet assembly, according to one embodiment, for rotating a cathode and rotatably connected to an end block and an end cap, respectively, includes: a shaft; a main body connector disposed on the shaft; an electromagnet arranged in parallel with the shaft; and an electromagnet connector disposed on the electromagnet and detachably disposed on the main body connector, the electromagnet including: an electromagnet housing; the electromagnet base is arranged in the electromagnet shell; the magnetic circuit is arranged in the electromagnet shell and is arranged on the electromagnet base; the electromagnet base is arranged in the electromagnet shell, the permanent magnet is arranged in the electromagnet shell, and the insulation pad is arranged in the electromagnet shell and used for supporting the electromagnet base and the permanent magnet.

Description

TECHNICAL FIELD

[0001] The present invention relates to an electromagnet assembly of a rotary cathode. BACKGROUND

[0002] The rotary cathode can be used in a sputtering device. The rotary cathode can be rotated around a rotation axis. The rotary cathode can be connected to an end block and an end cap. The rotary cathode is arranged to be rotatable between the end block and the end cap.

[0003] For the electromagnet assembly of the rotary cathode, the portion constituting the appearance of the product can be structurally waterproofed. However, the portion for supplying power to the electromagnet assembly, i.e., the connection portion of the cable and the connector, is not easily waterproofed. In addition, current needs to be applied when the target and the electromagnet assembly independently rotate, which can cause problems such as entanglement or short circuit of the cable. There is an urgent need for a technology that solves the above problems.

[0004] The above background art is what the inventor learned or acquired in the course of developing the present invention, and should not be understood as necessarily being the general prior art publicly known before the filing of the present invention. SUMMARY

[0005] Technical problem to be solved

[0006] According to an embodiment, the object is to provide an electromagnet assembly of a rotary cathode.

[0007] Technical solution to the problem

[0008] The electromagnet assembly according to an embodiment for a sputtering device can include a shaft, a main body connector arranged at the shaft, an electromagnet arranged in parallel with the shaft, and an electromagnet connector arranged at the electromagnet and detachably arranged at the main body connector. The electromagnet can include an electromagnet housing, an electromagnet base arranged in the electromagnet housing, a magnetic circuit arranged in the electromagnet housing and arranged at the electromagnet base, and a permanent magnet arranged in the electromagnet housing. The electromagnet assembly can further include an insulating pad arranged in the electromagnet housing to support the electromagnet base and the permanent magnet.

[0009] In an embodiment, the insulating pad can be located between the electromagnet base and the electromagnet connector.

[0010] In an embodiment, the electromagnet assembly can further include an insulating bolt to fasten the electromagnet base and the electromagnet connector, and an insulating sleeve to wrap the insulating bolt.

[0011] In an embodiment, one portion of the insulating sleeve is connected to the electromagnet base and the other portion is connected to the electromagnet connector.

[0012] In an embodiment, the insulating sleeve can include a material having elasticity.

[0013] In an embodiment, one portion of the insulating sleeve is arranged to be inserted into the electromagnet, and another portion of the insulating sleeve is arranged to be inserted into the electromagnet connector.

[0014] In an embodiment, an insulating pad can be further included between the electromagnet connector and the electromagnet.

[0015] Inventive Effects

[0016] The electromagnet assembly of the rotary cathode according to an embodiment can prevent electric noise from being generated between the target and the magnetic circuit. Thus, the rotary cathode can prevent the electromagnet from having performance degradation and breakage. BRIEF DESCRIPTION OF DRAWINGS

[0017] Figure 1 is a schematic side view of a rotary cathode according to an embodiment.

[0018] Figure 2 is a schematic cross-sectional view of a state in which a rotary cathode is connected to an end block according to an embodiment.

[0019] Figure 3 is a cross-sectional view of an electromagnet assembly used in a rotary cathode according to an embodiment.

[0020] Figure 4 is a cross-sectional view of an electromagnet assembly used in a rotary cathode according to an embodiment. DETAILED DESCRIPTION

[0021] Hereinafter, example embodiments will be described in detail with reference to accompanying drawings. The following description is one of several aspects of the embodiments, and the following description constitutes a part of the detailed description. In describing example embodiments, when it is determined that a detailed description of related well-known structures or functions will unnecessarily obscure the present disclosure, the detailed description is omitted.

[0022] However, various changes can be made to the example embodiments. In this document, the present disclosure is not limited to the example embodiments. The example embodiments should be understood to include all changes, equivalents or substitutes within the spirit and technical scope of the present disclosure.

[0023] Also, the terms or words used in the specification and claims should not be interpreted as being limited according to their commonly used meanings or dictionary definitions, but should be interpreted as having a concept fitting in the technology of the present application based on the technical idea of the present application.

[0024] In the specification, the singular forms "a," "an" and "the" are intended to include the plural forms as well, unless the context clearly indicates otherwise. In the specification, the terms "include" and / or "has" and / or "have" and / or "comprise" and / or "comprises" used in the specification are used to indicate the existence of the stated features, numbers, steps, operations, elements, components, and / or a combination thereof but does not preclude the presence or addition of one or more other features, numbers, steps, operations, elements, components, and / or a combination thereof.

[0025] Unless otherwise defined, all terms used in the specification, including technical or scientific terms, have the same meaning as those commonly understood by one of ordinary skill in the art to which the present application pertains. Terms specifically defined in the specification have the meanings set forth in the specification.

[0026] In describing the example, the same reference numerals are used throughout the drawings and the specific description thereof will not be repeated. In describing the example embodiments, when it is determined that a detailed description of related known structures or functions can unnecessarily obscure the present disclosure, the detailed description thereof will be omitted.

[0027] Also, the terms "first", "second", "A", "B", "a", "b", etc. can be used to describe various components. These terms are used only to distinguish one component from another component, and are not used to limit the nature, order or sequence of the corresponding components. When it is described that one component is "connected", "coupled" or "attached" to another component, it should be understood that the one component can be directly connected or attached to the other component, and that an intermediate component can also be "connected", "coupled" or "attached" to the one component.

[0028] When a component has the same function as a component of an example embodiment, the same name is used to describe the component in other embodiments. Without mentioning the opposite example, the configuration disclosed in a certain example embodiment can be applied to other embodiments, and the specific description of the repeated configuration can be omitted.

[0029] Figure 1 is a schematic side view of a rotary cathode according to an embodiment.

[0030] Reference Figure 1The rotary cathode can be equipped with a rotary cathode. The rotary cathode can include a cooling water supply part 95 for supplying cooling water to the inside of the rotary target 100, a target rotating part 18 for rotating the target, and a shaft rotating part 19 for rotating the electromagnet assembly 200.

[0031] The electromagnet assembly 200 is located between the end block 92 and the end cover 93, and can be rotatably disposed inside the rotary target 100. A joint 94 can be equipped between the rotary target 100 and the end block 92. The rotary target 100 can be rotated with the rotation axis as the center.

[0032] The rotary target 100 can be rotated by receiving power from the target rotating part 18. For example, one end of the target can be supported by the joint 94 rotatably mounted to the end block 92, and the other end of the target can be rotatably supported on the end cover 93. The target rotating part 18 can include a target bridge 181 mounted to a flange, and a target motor 182 that generates power to rotate the target.

[0033] The electromagnet assembly 200 can be rotated by receiving power from the shaft rotating part 19. For example, one end of the electromagnet assembly 200 can be supported by the joint 94 rotatably mounted to the end block 92, and the other end of the rotary target 100 can be rotatably supported on the end cover 93. The shaft rotating part 19 can include a shaft bridge 191 mounted to a flange, and a shaft motor 192 that generates power to rotate the rotary target 100.

[0034] The electromagnet assembly 200 can be rotated with the rotation axis disposed in parallel with the x-axis direction as the center.

[0035] Figure 2 is a schematic cross-sectional view of a state in which the electromagnet assembly 200 according to an embodiment is connected to the end block.

[0036] Referring to Figure 2 The shaft 11 can be connected to the end block 92. The cable 14 is disposed in a position parallel to the rotation axis of the shaft 11, and can be located inside the shaft 11. The shaft head 112 can be connected to the shaft body 111. The shaft disc 113 can be closely coupled to the end block 92. The shaft 11 can include a shaft cover 119 disposed on the shaft body 111.

[0037] Figure 3 is a cross-sectional view of an electromagnet assembly according to an embodiment. Figure 4 is a cross-sectional view of an electromagnet assembly according to an embodiment.

[0038] Referring to Figure 3 and Figure 4 , Figure 3 is a cross-sectional view showing the position of the connector arm 132, Figure 4 is a cross-sectional view showing the position of the insulating bolt B.

[0039] A rotating cathode may include several insulating structures. For a rotating cathode used as a rotating cathode, a large current is applied to the target during vacuum discharge. Simultaneously, the target's temperature rises, making cooling the discharge heat crucial for its protection. Specifically, the target is typically cooled by filling the rotating cathode with a large amount of coolant. This can lead to a risk of direct or indirect electrical contact between the target and the magnetic circuit. A rotating cathode according to one embodiment can prevent the generation of electrical noise between the target and the magnetic circuit. Thus, the electromagnet assembly can be protected from performance degradation and damage.

[0040] The electromagnet 15 may include an electromagnet housing 151, an electromagnet base 152, a magnetic circuit 153, a permanent magnet 154, an electromagnet block 155, and a block fastening part 156.

[0041] An insulating pad 17 may be disposed inside the electromagnet 15. The insulating pad 17 may be disposed between the electromagnet base 152 and the electromagnet connector 16. The insulating pad 17 can shield noise generated from the electromagnet connector 16.

[0042] An electromagnet connector 16 may be disposed on an electromagnet 15. The electromagnet connector 16 may include an electromagnet connector plate 161, electromagnet terminals 162, and an electromagnet connector O-ring 169. The electromagnet connector 16 is detachably disposed on an insulating pad 13. The insulating pad 13 may be disposed on a shaft 11. The insulating pad 13 may include a plate 131 disposed on the shaft 11, connector arms 132 connected to the plate 131, and a plate O-ring 139 disposed in a compressed state between the plate 131 and the shaft 11. The insulating pad 13 may be made of an insulating material. The insulating pad 13 may be located between the electromagnet connector 16 and the electromagnet 15.

[0043] Insulating bolt B and insulating sleeve S secure electromagnet 15 and electromagnet connector 16, and are made of insulating material, thereby preventing unnecessary electrical connection between electromagnet connector 16 and electromagnet 15.

[0044] While this embodiment includes specific examples such as particular components, it will be apparent to those skilled in the art that various changes in form and detail can be made in these examples without departing from the spirit and scope of the claims and their equivalents. The examples described herein are for descriptive purposes only and not for limitation. Therefore, the spirit of the invention should not be limited to the illustrated embodiments, and the following claims, their equivalents, or equivalent variations are all within the scope of the invention.

Claims

1. An electromagnet assembly for rotating a cathode and rotatably connected to an end block and an end cap, characterized in that, include: axis; The main connector is arranged on the shaft; An electromagnet, which is arranged parallel to the axis; and An electromagnet connector is arranged on the electromagnet and detachably arranged on the main connector body. The electromagnet includes: Electromagnet housing; An electromagnet base, which is arranged inside the electromagnet housing; A magnetic circuit, which is arranged inside the electromagnet housing and on the electromagnet base; and A permanent magnet is arranged inside the electromagnet housing. It also includes an insulating pad, which is arranged inside the electromagnet housing to support the electromagnet base and the permanent magnet.

2. The electromagnet assembly according to claim 1, characterized in that, The insulating pad is located between the electromagnet base and the electromagnet connector.

3. The electromagnet assembly according to claim 1, characterized in that, Also includes: Insulating bolts, which fasten the electromagnet base and the electromagnet connector; and An insulating sleeve that encloses the insulating bolt.

4. The electromagnet assembly according to claim 3, characterized in that, One part of the insulating sleeve is connected to the electromagnet base, and the other part is connected to the electromagnet connector.

5. The electromagnet assembly according to claim 3, characterized in that, The insulating sleeve comprises an elastic material.

6. The electromagnet assembly according to claim 5, characterized in that, A portion of the insulating sleeve is arranged to be inserted into the electromagnet, and another portion of the insulating sleeve is arranged to be inserted into the electromagnet connector.

7. The electromagnet assembly according to claim 1, characterized in that, Also includes: An insulating pad is located between the electromagnet connector and the electromagnet.

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