Deposition equipment

Abstract

The invention discloses deposition equipment. The deposition equipment comprises a shell, a magnetic control device, a power supply, a conductive connecting piece and a feed-in piece, the magnetic control device comprises a driving part, a magnetic control part and a coupler, the driving part is installed on the shell, the driving part is provided with an output shaft, the magnetic control part is provided with an input shaft, the output shaft is connected with the input shaft through the coupler, and the output shaft and the input shaft are coaxial. The power source is installed on the shell and connected with the feed-in piece through the conductive connecting piece, the input shaft is sleeved with the conductive connecting piece, and the feed-in piece is used for being connected with the target material. The driving piece can be connected with the magnetic control piece through the coupler, so that the magnetic control piece rotates around the axis of the target material. Therefore, the driving structure of the deposition equipment is more compact, the structure of the deposition equipment is simplified, the cost is reduced, and the uniformity of current conduction is ensured.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of semiconductor equipment, in particular to a deposition equipment. BACKGROUND

[0002] The deposition equipment refers to a special equipment for covering a thin film of a specific material on the surface of various substrates (such as silicon wafer, glass, metal, etc.) through physical or chemical methods. The deposition equipment includes a shell, a power supply device and a magnetic control device. The power supply device supplies power to the deposition equipment, and the magnetic control device provides a magnetic field for the deposition equipment. In the related art, the magnetic control device includes a driving member, a gear box and a magnetic control element. In order to avoid interference with the power supply, the driving member is coaxial with the target material, and the magnetic control element is coaxial with the target material. In order to make the magnetic control element rotate around the axis of the target material, the driving member is connected with the magnetic control element through the gear box, which not only makes the deposition equipment occupy a large space, but also makes the structure of the deposition equipment complex and the cost increase. SUMMARY

[0003] The present application provides a deposition equipment, which makes the driving structure more compact, simplifies the structure of the deposition equipment and reduces the cost while ensuring the uniformity of current conduction.

[0004] In an implementation manner, the deposition equipment includes a shell, a magnetic control device, a power supply, a conductive connecting piece and a feeding piece. The magnetic control device includes a driving member, a magnetic control element and a shaft coupling. The driving member is installed on the shell. The driving member is provided with an output shaft. The magnetic control element is provided with an input shaft. The output shaft is connected with the input shaft through the shaft coupling, and the output shaft and the input shaft are coaxial. The power supply is installed on the shell. The power supply is connected with the feeding piece through the conductive connecting piece. The conductive connecting piece is sleeved on the input shaft. The output shaft of the driving member and the input shaft connected with the magnetic control element are coaxial with the target material. The output shaft of the driving member and the input shaft of the magnetic control element can be connected through the shaft coupling, so that the driving structure is more compact, the structure of the deposition equipment is simplified, and the cost is reduced without the transmission of the gear box. In addition, the conductive connecting piece is sleeved on the input shaft connected with the magnetic control element, so that the part of the conductive connecting piece close to the feeding piece is introduced from the center of the feeding piece, which can ensure the uniformity of current conduction.

[0005] In an implementation manner, the conductive connecting piece includes a first connecting piece and a second connecting piece. The conductive connecting piece sleeved on the input shaft includes that the second connecting piece is sleeved on the input shaft and coaxial with the input shaft. The power supply connected with the feeding piece through the conductive connecting piece includes that the first connecting piece is connected with the power supply, the first connecting piece is further connected with the second connecting piece, and the second connecting piece is connected with the feeding piece. The second connecting piece is provided with a plurality of current uniform holes. The second connecting piece is coaxially arranged with the feeding piece, so as to further improve the uniformity of current conduction. In addition, the plurality of current uniform holes can optimize the conduction path of the current on the second connecting piece, so as to further improve the uniformity of current conduction.

[0006] In an implementation, the first connecting member is connected to the second connecting member at a side close to the power supply, and the plurality of current uniform holes are arranged at the side of the second connecting member close to the power supply. The first connecting member is connected to the second connecting member at the side close to the power supply, facilitating assembly. Meanwhile, the current uniform holes arranged at the side close to the power supply can prolong the conduction path of the current, avoiding the current from being biased to the side of the second connecting member close to the first connecting member, thereby ensuring the uniformity of the current conduction.

[0007] In an implementation, the side of the second connecting member close to the power supply is provided with a first abutting surface, the side of the first connecting member close to the second connecting member is provided with a second abutting surface, the first abutting surface is parallel to and abuts the second abutting surface; the first abutting surface and / or the second abutting surface is provided with a groove, and the conductive connecting member further comprises a conductive spiral tube, which is interference-fitted in the groove. Due to manufacturing process and other reasons, the first abutting surface and the second abutting surface may not be completely abutted. The conductive spiral tube can optimize the conduction of the current between the first abutting surface and the second abutting surface.

[0008] In an implementation, the second connecting member is provided with at least two connecting portions, which are uniformly arranged along the circumference of the second connecting member; the first connecting member comprises a connecting arm and at least two fastening portions, which are connected; the at least two fastening portions are connected to the at least two connecting portions one by one, and the connecting arm is arranged in a spaced manner with the second connecting member, and the plurality of current uniform holes are uniformly arranged on the second connecting member along the circumference of the second connecting member. Since the first connecting portion and the second connecting portion are uniformly arranged along the circumference of the second connecting member, and the connecting arm is arranged in a spaced manner with the second connecting member, the connecting portions of the first connecting member and the second connecting member are uniformly arranged along the circumference of the second connecting member, which can improve the uniformity of the current conduction; and the current uniform holes can optimize the conduction path of the current on the second connecting member, thereby further improving the uniformity of the current conduction.

[0009] In an implementation, the current uniform holes comprise horizontal holes, vertical holes and / or oblique holes. By arranging current uniform holes with different extension directions, the conduction path of the current can be optimized as needed, and the uniformity of the current conduction can be improved.

[0010] In an implementation, the material of the input shaft is conductive material, and the deposition device further comprises an insulating sleeve, which is sleeved on the input shaft, and the conductive connecting member is sleeved on the insulating sleeve. The second connecting member of the conductive connecting member is sleeved on the insulating sleeve, thereby insulating and isolating the input shaft connected to the magnetic control member from the conductive connecting member, preventing electromagnetic interference on the driving member and the magnetic control member.

[0011] In one implementation, the magnetic control is located inside the feed-in member, the feed-in member is provided with a through hole, the input shaft passes through the through hole, the end of the insulating sleeve is provided with a flange extending along the radial direction of the insulating sleeve, the insulating sleeve passes through the through hole, the flange is located between the feed-in member and the magnetic control and is connected with the feed-in member or the magnetic control. The flange can extend the insulation distance between the conductive connecting member and the input shaft, avoid creeping, and improve the insulation effect.

[0012] In one implementation, the magnetic control device further comprises a bearing, which is installed between the input shaft and the insulating sleeve. The bearing is installed between the input shaft and the insulating sleeve connected with the magnetic control, which can improve the stability of the rotation of the input shaft.

[0013] In one implementation, the magnetic control device further comprises a support sleeve, which is made of metal, the support sleeve is sleeved on the input shaft and coaxially arranged with the input shaft, and the bearing is installed between the support sleeve and the input shaft; the insulating sleeve is sleeved on the support sleeve. The support sleeve made of metal can improve the overall rigidity.

[0014] In one implementation, at least part of the material of the shaft coupling is an insulating material. In addition to the conduction through contact to the input shaft, the current can also be conducted to the input shaft through electromagnetic induction. The insulating shaft coupling of the embodiment can insulate and isolate the driving member and the input shaft, thereby preventing electromagnetic interference on the driving member.

[0015] In one implementation, the magnetic control device further comprises an insulating adapter block, which connects the input shaft and the magnetic control. The insulating adapter block of the embodiment can insulate and isolate the magnetic control and the input shaft, thereby preventing electromagnetic interference on the magnetic control.

[0016] In one implementation, the material of the input shaft is an insulating material. The insulating input shaft can avoid the conduction of the current to the input shaft through contact and electromagnetic induction, thereby preventing electromagnetic interference on the driving member and the magnetic control.

[0017] In one implementation, at least two first water passages are formed on the shell, the feed-in member is provided with a plurality of communication holes extending along the radial direction of the feed-in member, a rib extending along the radial direction of the feed-in member is arranged between adjacent two communication holes, one end of each first water passage is connected with an external water storage device, and the other end is communicated with the inside of the feed-in member through the plurality of communication holes. On the one hand, the heat dissipation effect of the deposition equipment is improved; on the other hand, the conduction of the current on the feed-in member is realized through the rib extending along the radial direction of the feed-in member, which does not prolong the conduction path of the current, reduces the electromagnetic radiation, and improves the uniformity of the current conduction.

[0018] In one implementation, the deposition apparatus further includes an insulating pad installed between the feed unit and the housing. The insulating pad has a second water inlet, and the first water inlet is connected to multiple connecting holes via the second water inlet. The insulating pad not only provides insulation between the feed unit and the housing but also features a second water inlet connected to the multiple connecting holes. This second water inlet serves as part of a cooling channel, allowing cooling water to flow within the first water inlet, the second water inlet, and the connecting holes, resulting in a compact structure. Furthermore, the insulating pad also provides a seal between the feed unit and the housing.

[0019] In one implementation, the bottom of the feed element has an opening for mounting the target. The target is mounted on the end face of the opening in the feed element, resulting in a simple structure. Attached Figure Description

[0020] Figure 1 A top view of the deposition equipment; Figure 2 For some embodiments Figure 1 Sectional view at point AA; Figure 3 for Figure 2 A magnified view of a section at point B in the middle; Figure 4 This is a schematic diagram of the structure of the first connector in some embodiments; Figure 5 This is a schematic diagram of the structure of the second connector in some embodiments; Figure 6 This is an assembly diagram of the first connector and the second connector in some embodiments; Figure 7 For other embodiments Figure 1 Sectional view at point AA; Figure 8 for Figure 7 A magnified view of a section at point C; Figure 9 This is a schematic diagram of the structure of the first connector in some other embodiments; Figure 10 This is a schematic diagram of the structure of the second connector (non-current uniform hole) in some other embodiments; Figure 11 This is a schematic diagram of the structure of the second connector (with current equalization holes) in some other embodiments; Figure 12 This is an assembly diagram of the first connector and the second connector in some other embodiments; Figure 13 A top view of the feeder assembly with insulating pads.

[0021] Explanation of reference numerals in the attached figures: 10-Outer shell; 101-First shell; 102-Second shell; 103-Mounting hole; 104-First water inlet; 20-Target material; 30 - Magnetically controlled device; 301-Drive component; 3011-Output shaft; 302-Magnetic control; 3021-Input shaft; 303-Coupling; 304-Support sleeve; 305-Bearing; 306-Insulating adapter block; 40 - Power supply device; 401-Power supply; 402-Conductive connector; 4021-First connector; 40211-Second mating surface; 40212-Positioning groove; 40213-Groove; 40214-Fastening part; 40215-Connecting arm; 40216-Void groove; 4022-Second connector; 40221-Current equalization hole; 40222-Cylinder part; 40223-Mounting part; 40224-First mating surface; 40225-Connecting part; 40226-Protruding post; 40227-Flange part; 4023-Conductive spiral tube; 403-Feeding part; 4031-Connecting hole; 4032-Through hole; 4033-Rib; 4034-Opening; 50-Insulating sleeve; 501 - Flange; 502 - Support ring; 60 - Insulating pad; 601 - Second water inlet; 70 - Cooling channel; 80 - Sealing ring. Detailed Implementation

[0022] The terminology used in the following embodiments is for the purpose of describing particular embodiments only and is not intended to be limiting of this application. As used in the specification and appended claims of this application, the singular expressions “a,” “an,” “the,” “the,” “the,” and “this” are intended to also include expressions such as “one or more” unless the context clearly indicates otherwise.

[0023] References to "one embodiment" or "some embodiments" as described in this specification mean that one or more embodiments of this application include a specific feature, structure, or characteristic described in connection with that embodiment. Therefore, the phrases "in one embodiment," "in some embodiments," "in other embodiments," "in still other embodiments," etc., appearing in different parts of this specification do not necessarily refer to the same embodiment, but rather mean "one or more, but not all, embodiments," unless otherwise specifically emphasized. The terms "comprising," "including," "having," and variations thereof mean "including, but not limited to," unless otherwise specifically emphasized.

[0024] In the related art, a deposition apparatus includes a housing 10, a power supply device 40 and a magnetron device 30. The power supply device 40 includes a power source 401 and a feed-in 403, the feed-in 403 supplies the power generated by the power source 401 to the target material 20, so as to excite and maintain the plasma, and guide the movement of positive ions. The magnetron device 30 includes a driving part 301 and a magnetron 302, the driving part 301 drives the magnetron 302 to rotate, the magnetron 302 refers to an array of permanent magnets or electromagnets installed on the back of the sputtering target material 20, which can construct a specific static closed magnetic field topology in the space in front of the surface of the target material 20, the magnetic lines of force are parallel to the target surface and form a ring-shaped closed loop to guide the movement of electrons. The feed-in 403 is coaxially arranged and connected with the target material 20, and the magnetron 302 is coaxially arranged with the target material 20 and needs to rotate around the axis of the target material 20.

[0025] In order to avoid interference with the power source 401 of the power supply device 40, the driving part 301 of the magnetron device 30 is installed on the housing 10 and is coaxial with the target material 20, and the magnetron 302 is coaxial with the target material 20. In order to make the magnetron 302 rotate around the axis of the target material 20, the output shaft 3011 of the driving part 301 is connected with the input shaft 3021 of the magnetron 302 through a gear box, which not only makes the occupied space of the deposition apparatus large, but also makes the structure of the deposition apparatus complex and the cost increases.

[0026] As Figures 1-3As shown in Figures 7 and 8, this embodiment provides a deposition apparatus, including but not limited to a radio frequency magnetron sputtering apparatus, a radio frequency plasma chemical vapor deposition apparatus with enhanced magnetic field, and an ion-assisted deposition apparatus using an independent radio frequency ion source. The output shaft 3011 of the drive unit 301 and the input shaft 3021 connected to the magnetic control unit 302 are coaxial with the target material 20, allowing the drive unit 301 to be connected to the magnetic control unit 302 via a coupling 303, enabling the magnetic control unit 302 to rotate around the axis of the target material 20. Furthermore, the power supply 401 is connected to the feed unit 403 via a conductive connector 402. The conductive connector 402 is sleeved on the input shaft 3021 connected to the magnetic control unit 302, so that one end of the conductive connector 402 is close to the center of the feed unit 403. The gearbox is generally about 200mm × 200mm × 60mm in size, while the coupling 303 does not occupy additional space, thus making the drive structure of the deposition apparatus more compact. Furthermore, replacing the gearbox with a coupling 303 simplifies the structure of the deposition apparatus. Furthermore, the gearbox costs tens of thousands, while the coupling 303 only costs a few hundred to a few thousand, thus reducing costs. Additionally, although the power supply 401 is located on one side of the drive unit 301, the conductive connector 402 is sleeved on the input shaft 3021 connected to the magnetic control unit 302, so that a portion of the conductive connector 402 near the feed unit 403 is introduced from the center of the feed unit 403, ensuring uniform current conduction. The deposition equipment will be described in detail below through specific embodiments.

[0027] like Figures 1-3 As shown in Figures 7 and 8, the deposition equipment of this embodiment includes a housing 10, a magnetron sputtering device 30, and a power supply device 40 for power supply. During deposition, the target material 20 is located inside the housing 10 and is a solid source material in the sputtering deposition process. It is typically a flat plate made of high-purity metal or alloy, or ceramic compound. After being bombarded by high-energy ions in plasma, its surface atoms are sputtered out and deposited onto the substrate to form a thin film. The magnetron sputtering device 30 includes a drive element 301, a magnetron control element 302, and a coupling 303. The drive element 301 can be a motor, a pneumatic motor, or a magnetohydrodynamic seal rotary drive element. The coupling 303 is a mechanical component used to connect two shafts and transmit torque and motion. It can be a rigid coupling or a flexible coupling (such as an elastic, diaphragm, or bellows type). The magnetron control element 302 can be an unbalanced magnetron, an electromagnetic coil magnetron, a high-power pulsed magnetron sputtering, or a dual magnetron AC sputtering. The magnetron control element 302 is located inside the housing 10 and is coaxial with the target material 20. The drive unit 301 is mounted on the top of the housing 10. The output shaft 3011 of the drive unit 301 and the input shaft 3021 connected to the magnetic control 302 are coaxial with the target material 20.

[0028] Specifically, the housing 10 can be a revolution body or not. If the housing 10 is a revolution body, the housing 10 is coaxial with the target material 20; if the housing 10 is not a revolution body, the housing 10 does not need to be coaxial with the target material 20. The driving member 301 can be a revolution body or not. If the driving member 301 is a revolution body, the driving member 301 is coaxial with the housing 10 and the target material 20; if the driving member 301 is not a revolution body, the driving member 301 does not need to be coaxial with the housing 10 and the target material 20. The power supply 401 can be a radio frequency power supply and / or a direct current power supply.

[0029] Since the output shaft 3011 of the driving member 301, the input shaft 3021 connected with the magnetron 302 and the target material 20 are coaxial, the output shaft 3011 can be connected with the input shaft 3021 through the coupling 303, so as to drive the magnetron 302 to rotate around the axis of the target material 20. The power supply device 40 comprises the power supply 401, the conductive connecting member 402 and the feed-in member 403. The electricity generated by the power supply 401 is supplied to the target material 20 through the conductive connecting member 402 and the feed-in member 403, and is used to excite and maintain the plasma of the process gas. The power supply 401 is installed on the top of the housing 10 and located at one side of the driving member 301. One part of the conductive connecting member 402 is connected with the output interface of the power supply 401, and the other part is connected with the feed-in member 403. In some embodiments, the conductive connecting member 402 is sleeved on the input shaft 3021 connected with the magnetron 302, so that the end of the conductive connecting member 402 close to the feed-in member 403 is introduced from the center of the feed-in member 403. The feed-in member 403 is coaxially arranged with the target material 20, the power supply 401 is connected with the feed-in member 403, and the bottom of the feed-in member 403 is provided with an opening 4034, and the end face of the opening 4034 is used to connect with the target material 20, so as to conduct electricity to the target material 20. The output shaft 3011 of the driving member 301 and the input shaft 3021 connected with the magnetron 302 are coaxial with the target material 20 in the present embodiment, so that the output shaft 3011 of the driving member 301 and the input shaft 3021 of the magnetron 302 can be connected through the coupling 303, thereby eliminating the need for a gear box transmission, simplifying the structure of the deposition equipment and reducing the cost. Although the power supply 401 is located at one side of the driving member 301, the conductive connecting member 402 is sleeved on the input shaft 3021 connected with the magnetron 302, so that the part of the conductive connecting member 402 close to the feed-in member 403 is introduced from the center of the feed-in member 403, which can ensure the uniformity of current conduction.

[0030] In this embodiment, the conductive connector 402 includes a first connector 4021 and a second connector 4022. One end of the first connector 4021 is connected to the power supply 401, and the other end is connected to the second connector 4022. The second connector 4022 is connected to the feed member 403. The second connector 4022 is sleeved on the input shaft 3021 connected to the magnetic control unit 302 and is coaxial with the input shaft 3021, thereby being coaxially arranged with the target material 20. The first connector 4021 and the second connector 4022 are perpendicular to each other. The coaxial arrangement of the second connector 4022 with the target material 20 can further improve the uniformity of current conduction. In this embodiment, the first connector 4021 and the second connector 4022 are separately arranged, which facilitates the assembly of the deposition equipment. In other embodiments, the first connector 4021 and the second connector 4022 are integrally arranged.

[0031] In this embodiment, the second connector 4022 is provided with a plurality of current-equalizing holes 40221, which can optimize the current conduction path on the second connector 4022, thereby further improving the uniformity of current conduction. Specifically, the current-equalizing holes 40221 may include transverse holes, vertical holes, and / or oblique holes. The transverse hole refers to the current-equalizing hole 40221 extending circumferentially along the second connector 4022; the vertical hole refers to the current-equalizing hole 40221 extending axially along the second connector 4022; and the oblique hole refers to the current-equalizing hole 40221 extending spirally. This allows for optimization of the current conduction path as needed.

[0032] like Figures 2-6 As shown, in some embodiments, one end of the first connector 4021 is connected to the power supply 401, and the other end is connected to the side of the second connector 4022 near the power supply 401 for easy assembly. A plurality of current-equalizing holes 40221 are provided on the side of the second connector 4022 near the power supply 401 and extend in a direction perpendicular to the axis of the second connector 4022. In this embodiment, the current-equalizing holes 40221 extend half a circle circumferentially along the second connector 4022, and the specific number of current-equalizing holes 40221 can be one or more. Providing current-equalizing holes 40221 on the side near the power supply 401 can extend the current conduction path, preventing the current from being biased towards the side of the second connector 4022 near the first connector 4021, thereby improving the uniformity of current conduction.

[0033] Specifically, the second connecting piece 4022 comprises a barrel portion 40222 and a mounting portion 40223. The barrel portion 40222 is sleeved on the input shaft 3021 and coaxial with the input shaft 3021, so as to improve the uniformity of current conduction. The bottom of the barrel portion 40222 of the second connecting piece 4022 is provided with a flange portion 40227, which is connected with the feeding piece 403 by screwing, clamping, riveting or welding. The top of the barrel portion 40222 is connected with the mounting portion 40223, which is connected with the first connecting piece 4021 by screwing, clamping, riveting or welding on the side close to the power supply 401, facilitating assembly.

[0034] The first connecting face 40224 is parallel to the axial direction of the barrel portion 40222 and parallel to the second connecting face 40211. When the first connecting piece 4021 and the second connecting piece 4022 are assembled, the first connecting face 40224 is attached to the second connecting face 40211, and the screw penetrates the first connecting face 40224 and the second connecting face 40211 and is connected to the mounting portion 40223. Specifically, the second connecting face 40211 is provided with a recess 40213, and the conductive connecting piece 402 further comprises a conductive spiral tube 4023, which is an electrical device formed by winding a wire into a spiral coil. The conductive spiral tube 4023 is interference-fitted in the recess 40213. When the first connecting face 40224 is attached to the second connecting face 40211, the conductive spiral tube 4023 deforms, so that one side of the conductive spiral tube 4023 is in contact with the side wall of the recess 40213, and the other side is in contact with the first connecting face 40224. It can be understood that due to manufacturing process and other reasons, the first connecting face 40224 and the second connecting face 40211 may not be completely attached. The conductive spiral tube 4023 can optimize the conduction of current between the first connecting face 40224 and the second connecting face 40211. In other embodiments, the recess 40213 can also be provided on the first connecting face 40224, or the recess 40213 can be provided on both the first connecting face 40224 and the second connecting face 40211.

[0035] In other embodiments, as Figures 7-12As shown, the top of the second connecting piece 4022 is provided with at least two connecting portions 40225, which are uniformly arranged along the circumference of the second connecting piece 4022, and the number of the connecting portions 40225 can be 2 or more. In the embodiment, the number of the connecting portions 40225 is 2, which specifically includes a first connecting portion and a second connecting portion. The first connecting portion and the second connecting portion are uniformly arranged along the circumference of the second connecting piece 4022, and the line connecting the center of the first connecting portion and the center of the second connecting portion passes through the center of the second connecting piece 4022. The first connecting piece 4021 includes a connecting arm 40215 and at least two fastening portions 40214, and the number of the fastening portions 40214 is the same as that of the connecting portions 40225. In the embodiment, the two sides of the first connecting piece 4021 are respectively provided with the connecting arms 40215, and the two connecting arms 40215 are provided with an empty slot 40216 for avoiding the input shaft 3021. The ends of the two connecting arms 40215 are respectively connected with the fastening portions 40214. The first connecting portion and the second connecting portion are respectively provided with threaded holes, and the fastening portions 40214 are respectively provided with holes corresponding to the threaded holes of the first connecting portion and the second connecting portion. One screw passes through one hole of the first fastening portion 40214 and is threadedly connected to the threaded hole of the first connecting portion, and the other screw passes through one hole of the other fastening portion 40214 and is threadedly connected to the threaded hole of the second connecting portion, so as to realize the connection between the first connecting piece 4021 and the second connecting piece 4022. In other embodiments, the first connecting piece 4021 and the second connecting piece 4022 can be connected by clamping, riveting or welding. Since the first connecting portion and the second connecting portion are uniformly arranged along the circumference of the second connecting piece 4022, and the connecting arm 40215 is arranged at intervals with the second connecting piece 4022, the connecting portions of the first connecting piece 4021 and the second connecting piece 4022 are uniformly arranged along the circumference of the second connecting piece 4022, which can improve the uniformity of current conduction.

[0036] In some embodiments, as shown in Figure 10 In some embodiments, as shown in Figure 11 In some embodiments, as shown in

[0037] In the embodiment, the connecting portions 40225 are protruding columns 40226, which are arranged on the top surface of the second connecting piece 4022. The two fastening portions 40214 are respectively provided with positioning grooves 40212 corresponding to the protruding columns 40226. The two protruding columns 40226 are inserted into the two positioning grooves 40212 one by one, so as to provide positioning for the installation of the first connecting piece 4021 and the second connecting piece 4022.

[0038] In the embodiment, as shown inFigure 2 、 3 In some embodiments, the material of the input shaft 3021 connected with the magnetic control 302 is conductive material, which can be medium carbon steel (e.g., 45 steel), alloy structural steel (e.g., 40Cr, 20CrMnTi), stainless steel (e.g., 304, 316), tool steel, conductive polymer, conductive ceramic, or aluminum alloy. In other embodiments, the material of the input shaft 3021 can also be insulating material, which can be engineering plastic (e.g., nylon, POM, PEEK), composite material (e.g., carbon fiber reinforced polymer), or special ceramic (e.g., zirconium oxide, silicon nitride). If the material of the input shaft 3021 connected with the magnetic control 302 is conductive material, the deposition device of the present embodiment further comprises an insulating sleeve 50, which is located between the conductive connecting piece 402 and the input shaft 3021. Specifically, the insulating sleeve 50 is sleeved on the input shaft 3021 and coaxially arranged with the input shaft 3021, and the second connecting piece 4022 of the conductive connecting piece 402 is sleeved on the insulating sleeve 50, so as to insulate and isolate the conductive connecting piece 402 and the input shaft 3021 connected with the magnetic control 302, and prevent the driving member 301 and the magnetic control 302 from forming electromagnetic interference.

[0039] In the present embodiment, the feeding piece 403 is provided with a cavity, the magnetic control 302 is located in the cavity, and the target material 20 can be connected to the end face of the opening 4034 at the bottom of the feeding piece 403 and close the cavity. The top of the feeding piece 403 is provided with a through hole 4032, the second connecting piece 4022 of the conductive connecting piece 402 is connected to the top of the feeding piece 403 by screwing, clamping, riveting or welding, and the second connecting piece 4022 surrounds the through hole 4032. The input shaft 3021 connected with the magnetic control 302 passes through the through hole 4032 and is connected with the shaft coupling 303. The insulating sleeve 50 passes through the through hole 4032 of the feeding piece 403, and the bottom end of the insulating sleeve 50 is provided with a flange 501 extending along the radial direction of the insulating sleeve 50 and located between the magnetic control 302 and the feeding piece 403, and the flange 501 is connected to the inner side of the feeding piece 403 or the top of the magnetic control 302 by screwing, clamping, riveting or welding. The flange 501 can prolong the insulation distance between the conductive connecting piece 402 and the input shaft 3021, avoid creeping, and improve the insulation effect.

[0040] In the present embodiment, the magnetic control device 30 further comprises a bearing 305, which can be a deep groove ball bearing, an angular contact ball bearing, a cylindrical roller bearing, a tapered roller bearing, a self-aligning roller bearing or a needle bearing. The bearing 305 is installed between the insulating sleeve 50 and the input shaft 3021 connected with the magnetic control 302, which can improve the stability of the rotation of the input shaft 3021.

[0041] Specifically, the magnetic control device 30 further comprises a support sleeve 304 made of metal, which is sleeved on the input shaft 3021 connected with the magnetic control element 302 and coaxially arranged with the input shaft 3021. The bearing 305 is installed between the support sleeve 304 and the input shaft 3021, and the number of the bearing 305 can be one or more. In the embodiment, two bearings 305 are provided, which are respectively installed at the upper and lower ends of the support sleeve 304 and used for supporting the rotation of the input shaft 3021. The insulating sleeve 50 is sleeved on the support sleeve 304, and the top of the support sleeve 304 is provided with an end cover connected with the insulating sleeve 50. Screws penetrate the end cover and are connected to the top of the insulating sleeve 50. The end cover abuts one end of the bearing 305 along the axial direction of the input shaft 3021, and the support sleeve 304 abuts the other end of the bearing 305 along the axial direction of the input shaft 3021. In other embodiments, the end cover and the insulating sleeve 50 can also be connected by clamping or riveting. The insulating sleeve 50 of the embodiment further comprises a support ring 502, which is a ring structure with a central hole. The support ring 502 is sleeved on the input shaft 3021 connected with the magnetic control element 302, and abuts the bottom of the support sleeve 304 to form axial support for the support sleeve 304. The support sleeve 304 of the embodiment supports the input shaft 3021 in the radial direction through the bearing 305, and the insulating sleeve 50 limits the support sleeve 304 in the axial direction, which can improve the stability of the rotation of the input shaft 3021, and the support sleeve 304 made of metal can improve the overall rigidity. In other embodiments, the bottom of the support sleeve 304 can be connected with the insulating sleeve 50 through the end cover, and the top of the support sleeve 304 abuts the support ring 503 of the insulating sleeve 50.

[0042] In the embodiment, at least part of the material of the shaft coupling 303 is an insulating material, that is, the shaft coupling 303 can be made of insulating material in the middle part, or made of insulating material in the whole part. The insulating material can be engineering plastics (such as nylon, POM, PEEK), composite materials (such as carbon fiber reinforced polymer) or special ceramics (such as zirconium oxide, silicon nitride). Since the current can be conducted to the input shaft 3021 not only by contact but also by electromagnetic induction, the insulating shaft coupling 303 of the embodiment can insulate and isolate the driving element 301 and the input shaft 3021, thereby preventing electromagnetic interference on the driving element 301.

[0043] In the embodiment, the magnetic control device 30 further comprises an insulating adapter block 306, which is made of insulating material, such as engineering plastic (e.g. nylon, POM, PEEK), composite material (e.g. carbon fiber reinforced polymer) or special ceramic (e.g. zirconium oxide, silicon nitride). One end of the insulating adapter block 306 is connected to the input shaft 3021 by screwing, clamping or riveting, and the other end is connected to the magnetic control 302 by screwing, clamping or riveting. The insulating adapter block 306 of the embodiment can insulate and isolate the magnetic control 302 from the input shaft 3021, thereby preventing electromagnetic interference on the magnetic control 302.

[0044] In the embodiment, as shown in Figure 1 、 2 , 3, 7, 8, the housing 10 comprises a first shell 101 and a second shell 102, the second shell 102 is used to mount the target material 20, and the feed 403, the magnetic control 302 and the target material 20 are located in the second shell 102. The first shell 101 is mounted on the top of the second shell 102 and communicates with the second shell 102 through the mounting hole 103. The drive 301 is mounted on the top of the first shell 101, the output shaft 3011 of the drive 301 is inserted into the first shell 101, the coupling 303 is located in the first shell 101 and one end of the coupling 303 is connected to the output shaft 3011 of the drive 301, and the other end is connected to the input shaft 3021 of the magnetic control 302. The input shaft 3021 of the magnetic control 302 penetrates the mounting hole 103 and is connected to the magnetic control 302 in the second shell 102. The power supply 401 is mounted on the top of the second shell 102 and located on one side of the first shell 101. One end of the first connecting piece 4021 is connected to the power supply 401, the other end penetrates the side wall of the first shell 101 and is connected to the second connecting piece 4022, and the second connecting piece 4022 penetrates the mounting hole 103 and is connected to the feed 403 in the second shell 102.

[0045] In the embodiment, as shown in Figure 1 、 2 , 7, 13, the deposition device further comprises at least two cooling channels 70, which are used for the flow of cooling water, which can be deionized water. One end of the cooling channel 70 is connected to an external water storage device, and the other end communicates with the inside of the feed 403. The deposition device of the embodiment comprises two cooling channels 70, one of which is used to supply water to the inside of the feed 403, thereby cooling the feed 403, the magnetic control 302 and the target material 20, and the other cooling channel 70 is used to discharge the cooling water in the inside of the feed 403.

[0046] Specifically, the cooling channel 70 comprises the first water passage 104 of the second shell 102. The feed-in piece 403 is provided with a plurality of communication holes 4031 extending along the radial direction of the feed-in piece 403, and a rib 4033 extending along the radial direction of the feed-in piece 403 is arranged between two adjacent communication holes 4031. The first water passage 104 is in communication with the plurality of communication holes 4031, so that the cooling water can be input or discharged. On the one hand, the heat dissipation effect of the deposition device is improved; on the other hand, the current conduction on the feed-in piece 403 is realized through the rib 4033 extending along the radial direction of the feed-in piece 403, which does not prolong the current conduction path, reduces the electromagnetic radiation, and improves the uniformity of current conduction.

[0047] In the embodiment, the insulating pad 60 is further arranged between the feed-in piece 403 and the second shell 102 of the outer shell 10, the top of the insulating pad 60 is connected with the second shell 102, and the bottom of the insulating pad 60 is connected with the feed-in piece 403, so that the insulation between the feed-in piece 403 and the outer shell 10 can be realized. Moreover, the insulating pad 60 further comprises a second water passage 601, and the cooling channel 70 comprises the first water passage 104 and the second water passage 601 in sequence, the second water passage 601 is in communication with the plurality of communication holes 4031, the structure is compact, and the insulating pad 60 can also realize the sealing between the feed-in piece 403 and the outer shell 10. Specifically, the insulating pad 60 can be provided with one or more, and the plurality of insulating pads 60 are uniformly arranged along the circumferential direction of the feed-in piece 403, so as to improve the insulation effect between the feed-in piece 403 and the outer shell 10. In some embodiments, the second water passage 601 can be arranged on only two insulating pads 60; in other embodiments, the deposition device can comprise two or more cooling channels 70, and correspondingly, the second water passage 601 can be arranged on two or more insulating pads 60.

[0048] In the embodiment, the sealing ring 80 is mounted between the insulating pad 60 and the feed-in piece 403, and between the insulating pad 60 and the second shell 102, which can further improve the sealing performance between the feed-in piece 403 and the outer shell 10.

[0049] Obviously, persons of ordinary skill in the art can make various modifications and variations to the embodiments of the present application without departing from the spirit and scope of the present application. Thus, if these modifications and variations of the present application belong to the scope of the claims of the present application and their equivalent technologies, the present application also intends to include these modifications and variations.

Claims

1. A deposition apparatus, characterized by, The magnetic control device comprises a driving part, a magnetic control part and a shaft coupling, the driving part is installed on the shell, the driving part is provided with an output shaft, the magnetic control part is provided with an input shaft, the output shaft is connected with the input shaft through the shaft coupling, and the output shaft and the input shaft are coaxial; The power supply is installed on the shell, the power supply is connected with the feeding part through the conductive connecting part, and the conductive connecting part is sleeved on the input shaft. The conductive connecting part comprises a first connecting part and a second connecting part, wherein the conductive connecting part sleeved on the input shaft comprises that the second connecting part is sleeved on the input shaft and coaxial with the input shaft; 2. The deposition apparatus of claim 1, wherein The power supply is connected with the feeding part through the conductive connecting part, which comprises that the first connecting part is connected with the power supply, the first connecting part is also connected with the second connecting part, and the second connecting part is connected with the feeding part; The second connecting part is provided with a plurality of current uniform holes. The first connecting part is connected to one side of the second connecting part close to the power supply, and the plurality of current uniform holes are arranged on one side of the second connecting part close to the power supply.

3. The deposition apparatus of claim 2, wherein, The first connecting part is connected to one side of the second connecting part close to the power supply, and the plurality of current uniform holes are arranged on one side of the second connecting part close to the power supply.

4. The deposition apparatus according to any one of claims 2-3, wherein The first connecting part is connected to one side of the second connecting part close to the power supply, and the plurality of current uniform holes are arranged on one side of the second connecting part close to the power supply. The first connecting part is connected to one side of the second connecting part close to the power supply, and the plurality of current uniform holes are arranged on one side of the second connecting part close to the power supply.

5. The deposition apparatus of claim 2, wherein The first connecting part is connected to one side of the second connecting part close to the power supply, and the plurality of current uniform holes are arranged on one side of the second connecting part close to the power supply. The first connecting part is connected to one side of the second connecting part close to the power supply, and the plurality of current uniform holes are arranged on one side of the second connecting part close to the power supply. The first connecting part is connected to one side of the second connecting part close to the power supply, and the plurality of current uniform holes are arranged on one side of the second connecting part close to the power supply.

6. The deposition apparatus according to any one of claims 2 to 5, wherein The current uniform hole comprises a horizontal hole, a vertical hole and / or an inclined hole.

7. The deposition apparatus according to any one of claims 1 to 6, wherein The material of the input shaft is conductive material, and the deposition equipment further comprises an insulating sleeve, the insulating sleeve is sleeved on the input shaft, and the conductive connecting part is sleeved on the insulating sleeve.

8. The deposition apparatus of claim 7, wherein, The magnetic control part is located inside the feeding part, the feeding part is provided with a through hole, the input shaft passes through the through hole, the end of the insulating sleeve is provided with a flange extending along the radial direction of the insulating sleeve, the insulating sleeve passes through the through hole, and the flange is located between the feeding part and the magnetic control part and is connected with the feeding part or the magnetic control part.

9. The deposition apparatus according to claim 7 or 8, characterized in that, The magnetic control device further comprises a bearing, and the bearing is installed between the input shaft and the insulating sleeve.

10. The deposition apparatus of claim 9, wherein The magnetic control device further comprises a supporting sleeve, the material of the supporting sleeve is metal, the supporting sleeve is sleeved on the input shaft and coaxially arranged with the input shaft, and the bearing is installed between the supporting sleeve and the input shaft; The insulating sleeve is sleeved on the supporting sleeve.

11. The deposition apparatus according to any one of claims 7 to 10, wherein The material of the coupling is at least partially insulating.

12. The deposition apparatus according to any one of claims 7 to 11, wherein The magnetic control device further comprises an insulating adapter block connecting the input shaft and the magnetic control.

13. The deposition apparatus according to any one of claims 1 to 6, wherein The material of the input shaft is insulating.

14. The deposition apparatus according to any one of claims 1 to 13, wherein The shell is provided with at least two first water passages, the feed-in member is provided with a plurality of communicating holes extending along the radial direction of the feed-in member, and a rib extending along the radial direction of the feed-in member is arranged between two adjacent communicating holes. One end of each first water passage is connected with an external water storage device, and the other end is connected with the interior of the feed-in member through the plurality of communicating holes.

15. The deposition apparatus of claim 14, wherein, The deposition device further comprises an insulating pad block installed between the feed-in member and the shell, the insulating pad block is provided with a second water passage, and the first water passage is connected with the plurality of communicating holes through the second water passage.

16. The deposition apparatus of claims 1-15, wherein, The bottom of the feed-in member is provided with an opening for installing a target material.

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