Continuous mixing, dispersing, coating and rolling equipment for layer-adding film slurry

Abstract

The invention discloses continuous mixing, dispersing, coating and rolling equipment for layer-adding film slurry. The equipment comprises a mixing and dispersing module and a coating and rolling module which are communicated through a pipeline. Wherein the mixing and dispersing module integrates planetary stirring, shear crushing and vacuum defoaming, so that macroscopic homogeneous mixing, microcosmic agglomerated particle crushing and bubble removal of slurry are realized respectively, and the dispersion uniformity of the slurry is remarkably improved. A light scattering particle size sensor and a non-intrusive ultrasonic bubble detector are arranged in the pipeline so as to judge the condition of the slurry. And the slurry is subjected to precise film forming through the coating and winding module, is subjected to online drying and then is wound, so that the automation and continuity of the film making process are realized. According to the equipment, slurry preparation, coating and winding processes are integrated on the same production line, so that intermediate transfer and human interference are reduced, the stability, the consistency and the production efficiency of layer-adding film preparation are remarkably improved, and the equipment is suitable for continuous industrial preparation of various types of high-viscosity functional film slurry.

Description

TECHNICAL FIELD

[0001] The application belongs to the technical field of preparation equipment of build-up film material, and relates to a continuous preparation and processing equipment for build-up film material, in particular to a continuous equipment for mixing, dispersing, coating and winding of build-up film slurry. BACKGROUND

[0002] As a key dielectric material for high-performance semiconductor packaging substrates, build-up film can form insulating layers and conductive layers on the substrate surface through the "build-up" process, which can realize higher density wiring and smaller line width and spacing, and is an important supporting material for advanced packaging technology. It is widely used in high-end integrated circuit (IC) carrier boards, especially in CPU, GPU, network chip and high-speed storage chip fields.

[0003] However, in order to simultaneously meet the excellent dielectric properties and extremely high dimensional stability of build-up film, inorganic fillers such as silicon dioxide are often added to the current slurry formula to improve mechanical strength and thermal stability. However, the high surface activity of the fillers makes the particles prone to agglomeration, especially in high solid content and high viscosity slurry systems. Uniform dispersion of particles becomes a bottleneck for film quality, and it is extremely difficult to completely break up the particle agglomerates under traditional stirring or grinding conditions. Although there are planetary stirring, high shear dispersion and other schemes in the existing technology, the industry status reflects that a single mixing method often cannot balance the macro-homogeneous mixing and micro-dispersion control of high-viscosity build-up film slurry. At the same time, high-viscosity slurry is prone to entraining air bubbles during stirring, which can form defects in the coated film. Special vacuum degassing machines can be used to eliminate the air bubbles, but the transfer process will cause slurry loss and the inevitable generation of new small air bubbles.

[0004] At the same time, there is still a lack of truly continuous equipment for build-up film preparation process: the current dispersion equipment, coating and winding equipment are mostly single-machine intermittent operation, and manual transfer of slurry is required in between. The process is complicated and the slurry is prone to agglomeration and deterioration of dispersion state for a long time, which leads to coating thickness fluctuation and rising of film surface defect rate. At present, single-machine intermittent operation is mostly used because the residual material is difficult to clean when different formulas are changed, and more importantly, manual visual inspection is required to check the dispersion and air bubble generation of the slurry, and there is a lack of related auxiliary equipment integrated into the production line.

[0005] Therefore, there is an urgent need for a continuous equipment that can integrate key processes such as mixing, dispersion, coating and winding, realize automatic control of the whole process from uniform mixing of high-viscosity slurry to coating, film forming and drying and winding, and real-time monitor the transfer state, so as to significantly improve the stability, dispersion uniformity and production efficiency of the build-up film preparation process, and meet the continuous production needs of high-performance build-up film materials for advanced packaging. SUMMARY

[0006] To solve the above problems, the application provides a mixing dispersion and coating winding continuous device for layering film slurry, which can effectively solve two bottlenecks in the preparation and coating process of high-viscosity layering film slurry in the prior art: (1) dispersion, filler crushing and bubble defects of high-solid-content and high-viscosity slurry; (2) separation of slurry dispersion, coating, drying and winding and lack of reliable real-time monitoring to realize continuous production. The device can realize automatic and continuous control of the whole process from slurry preparation to film winding through macro-micro double-scale dispersion, online real-time monitoring of dispersion state and bubble condition, uniform mixing-coating-film forming-drying winding integrated continuous process, thereby significantly improving the dispersion uniformity, thickness uniformity, film surface flatness and production efficiency of layering film preparation.

[0007] The technical scheme of the application is as follows: A mixing dispersion and coating winding continuous device for layering film slurry comprises a mixing dispersion module and a coating winding module; the mixing dispersion module and the coating winding module are connected through a pump and a pipeline, and a light scattering particle size sensor and a non-invasive ultrasonic bubble detector are arranged in the pipeline; after the layering film slurry is subjected to macro-micro double-level dispersion and defoaming through the mixing dispersion module, the slurry quality is monitored in real time by the light scattering particle size sensor and the non-invasive ultrasonic bubble detector, and then the slurry enters the coating winding module to be precisely coated into a film through a slit and wound, thereby realizing continuous preparation of the layering film.

[0008] In the above technical scheme, further, the mixing dispersion module comprises a planetary stirring unit, a shearing crushing unit and a vacuum defoaming unit; the planetary stirring unit, the shearing crushing unit and the vacuum defoaming unit can be integrally arranged in the same device or separately arranged as independent devices and connected through a pipeline to realize cyclic mixing and dispersion treatment of the slurry from macro-micro double levels.

[0009] Further, the planetary stirring unit adopts single planetary stirring or double planetary stirring to mix the slurry in multiple directions under the combined motion of rotation and revolution; the paddle in the planetary stirring adopts one or more of paddle blades, frame blades, kneading blades, finger blades, dispersion discs and wall-hanging blades.

[0010] Further, the shearing crushing unit adopts one or more of high-speed dispersion, bead milling, ultrasonic and high-pressure homogenization to reduce the agglomeration of powders and improve the dispersion level.

[0011] Further, the vacuum pump used in the vacuum defoaming unit is one or more of a rotary vane pump, a screw pump and a Roots pump to reduce the entrainment of bubbles in the slurry during the mixing and dispersion process.

[0012] Further, the coating and winding module comprises, in sequence, a unwinding device, a film coating device, a drying device, a protective film compounding device and a winding device, the unwinding device is provided with a base film of the layer-increasing film, one end of the base film is placed on a belt, the transmission is controlled through a belt transmission system, the base film is coated by the film coating device, dried by the drying device, compounded with the protective film by the protective film compounding device, and then wound by the winding device to form a continuous production.

[0013] Further, the film coating device adopts a slit precision coating device, which comprises a doctor blade structure with adjustable slit width and a closed-loop flow control system, and together realizes accurate control of the coating thickness.

[0014] Further, the drying device comprises a plurality of temperature control heating zones and an air flow guiding system, which are used for adjusting the drying rate in sections to prevent surface defects of the coating film.

[0015] Further, the winding device comprises a constant tension control unit and an automatic deviation rectifying mechanism, which are used for ensuring the flatness and edge alignment accuracy of the film material during the winding process.

[0016] Further, an online flow sensor and a pressure regulating valve are arranged on the conveying pipeline from the mixing and dispersing module to the coating and winding module to realize real-time monitoring and feedback control of the slurry conveying rate and pressure.

[0017] Compared with the prior art, the present application has the following beneficial effects: The equipment provided by the present application combines the mixing and dispersing module with the coating and winding module, realizes the full-process continuous production of uniform mixing-coating film formation-drying and winding, avoids multiple transfers and intermittent operations in the traditional process, and improves the film formation quality, production efficiency and batch consistency. The mixing and dispersing module integrates planetary stirring, shearing crushing and vacuum defoaming. The combination design of planetary stirring and shearing crushing realizes homogeneous dispersion at macro and micro levels, and significantly reduces the particle agglomeration phenomenon. Vacuum defoaming realizes internal exhaust of the slurry, reduces the defect rate and improves the film surface quality. In addition, light scattering particle size sensors and non-invasive ultrasonic bubble detectors are arranged in the conveying pipeline from the mixing and dispersing module to the coating and winding module, which can accurately judge the slurry condition and realize process controllability. The slit precision coating ensures the uniformity of the coating thickness, and compared with the doctor blade coating, it better meets the high requirements of the layer-increasing film preparation.

[0018] Compared with existing technologies, this invention can simultaneously achieve macroscopic mixing and microscopic dispersion, exhibiting excellent performance in processing systems with high solids content, high viscosity, and easy agglomeration. It utilizes auxiliary methods to monitor the slurry status in real time; and the combined use of a mixing and dispersion module and a coating and winding module improves film stability and quality. It overcomes the difficulties in dispersing high-viscosity, easily agglomerated slurries in existing technologies, as well as the need for manual slurry inspection in discontinuous operations. The equipment structure of this invention is flexible and applicable to the preparation of high-performance IC packaging add-on film materials, showing promising prospects for industrial application. Attached Figure Description

[0019] Figure 1 This is a schematic diagram of the device structure of the present invention; Figure 2 This is a schematic diagram of the device structure in Embodiment 1 of the present invention; Figure 3 This is a schematic diagram of the device structure in Embodiment 2 of the present invention; Figure 4 This is a comparison diagram of silicon powder before and after mixing according to the present invention. A is the silicon powder raw material used, and B is the distribution in the slurry after planetary stirring and shearing. Figure 5 The images show the slurry and coating effect before vacuum degassing according to the present invention.

[0020] Figure 6 This is a diagram showing the actual coating effect of the present invention after vacuum degassing.

[0021] Figure 7 This invention relates to a laminated film formed using different drying temperatures and drying times. Detailed Implementation

[0022] To make the technical objectives, technical solutions, and beneficial effects of the present invention clearer, the present invention will be further described below in conjunction with embodiments.

[0023] The device frame structure diagram of the present invention is as follows: Figure 1 As shown, the system includes a mixing and dispersing module and a coating and winding module. These modules are connected to pipelines via pumps, and light-scattering particle size sensors and non-invasive ultrasonic bubble detectors are installed in the pipelines. After macroscopic and microscopic dual-level dispersion and degassing in the mixing and dispersing module, the slurry quality is monitored in real time by the light-scattering particle size sensor and the non-invasive ultrasonic bubble detector. The slurry then enters the coating and winding module for precision slit coating and winding, achieving integrated and continuous preparation of the layered film. The mixing and dispersing module includes a planetary stirring unit, a shearing and crushing unit, and a vacuum degassing unit. The coating and winding module includes an unwinding device, a coating device, a drying device, a protective film laminating device, and a winding device. The equipment also includes a belt conveyor system.

[0024] Example 1 The embodiment provides a kind of for layering film slurry mixing dispersion and coating winding continuous equipment. Wherein, the planetary stirring unit of mixing dispersion module adopts double planetary stirring, shear broken unit adopts high-speed dispersion homogenizer, and is integrally arranged in the same equipment with vacuum defoaming unit;Coating winding module includes film coating device using slit precision coater, drying device is provided with multiple temperature control heating zone, in the present example, each temperature control heating zone includes an open box, can be supplied with the belt from its open two ends through, temperature control heating part is arranged on the inner wall of open box and is used to heat the internal environment of open box, open box can also include air flow guide system for blowing inside the box, in other embodiments, it can also be directly used existing tunnel oven or hot air circulation oven is realized, replace the belt in the belt transmission system of the application with the belt in it.

[0025] As Figure 2 The mixing dispersion and coating winding continuous equipment for layering film slurry, including mixing dispersion module and coating winding module 2, mixing dispersion module includes shell 3, shell 3 is provided with feed inlet 4 and discharge port 5, discharge port 5 is connected to coating winding module 2 by pump 19 and pipeline 20.

[0026] In the pipeline 20 from mixing dispersion module to coating winding module 2, light scattering particle size sensor 16 and non-invasive ultrasonic bubble detector 17 are arranged, respectively for monitoring the filler particle size and bubble generation in slurry.

[0027] The top of shell 3 is provided with motor 8, and the motor 8 is connected with the double planetary gear structure 10 in the shell 3 to provide power for it. The two output shafts of the double planetary gear structure 10 are connected with the first rotating shaft 11 and the second rotating shaft 12 respectively to drive them to rotate. The first rotating shaft 11 and the second rotating shaft 12 are both provided with stirring blades 14. In addition, the end of the second rotating shaft 12 is provided with a dispersion disc 15. The planetary stirring unit is composed of the first rotating shaft 11, the second rotating shaft 12, the stirring blades 14 and the dispersion disc 15.

[0028] Two high-speed dispersion homogenizers 6 extending into the shell 3 are arranged on the shell 3, which are used as shear broken units for shearing and breaking the agglomerates.

[0029] The shell 3 is provided with a gas pump 7 with an air extraction pipe for vacuumizing the shell and a balance port 9 for balancing the air pressure inside and outside the shell 3, which constitutes a vacuum defoaming unit.

[0030] A temperature sensor 13 is arranged on the inner wall of the shell 3, which is a digital temperature sensor connected with the control system and displays the temperature on the control terminal display screen.

[0031] As Figure 2As shown, the coating and winding module 2 is provided with a unwinding device 18 on which the base film of the layer-incremental film is placed, one end of the base film is placed on the belt, the base film is transmitted by driving the belt by the belt pulley 21, and the base film is sequentially coated, dried, compounded with a protective film, and wound to realize continuous production. The belt pulley 21 is powered by a motor 24. Specifically, there are: The coating and winding module 2 is provided with a slit precision coating device 23, which can be realized by using an existing slit coating machine. Generally, the slit precision coating device 23 can include a mold spliced by an upper die head and a lower die head, with a U-shaped cavity and a slurry flow channel composed of a rectangular slit in between. In addition, in this example, the slit precision coating device 23 can also be connected with a height control component 22 to finely control the height between the mold of the slit precision coating device 23 and the belt, thereby finely adjusting the coating thickness.

[0032] The coating and winding module 2 is provided with a multi-section temperature control drying oven 25, which realizes good drying effect and film forming quality through multi-section temperature control drying and airflow guiding system.

[0033] The coating and winding module 2 is provided with a surface protective film unwinding device 26 and a compounding roller 27, which covers the surface protective film onto the layer-incremental film after coating and drying to prevent scratching or contamination.

[0034] The coating and winding module 2 is provided with a winding device 28 to wind the finished layer-incremental film. In this example, the winding device can also include a constant tension control unit and an automatic deviation correction mechanism to ensure the flatness and edge alignment accuracy of the film during winding.

[0035] Embodiment 2 The embodiment provides a mixing and dispersion and coating and winding continuous equipment for layer-incremental film slurry. The mixing and dispersion module includes double planetary stirring, high-pressure homogenizer for shearing and crushing, and pipeline connection for realizing cyclic mixing and dispersion treatment; the coating and winding module includes slit precision coating for coating device, and multi-section temperature control heating and auxiliary airflow guiding system for drying device. The difference from embodiment 1 is only in the setting of the mixing and dispersion module, the functions of planetary stirring and shearing and crushing are realized by different devices, specifically: As shown in Figure 3 The continuous equipment includes planetary stirring instrument 1 and shearing and crushing instrument 6 in the mixing and dispersion module.

[0036] The planetary stirring instrument 1 comprises a shell 3, on which a feeding port 4 and a discharging port 5 are arranged, the discharging port 5 is connected to the feeding port of the shearing and crushing instrument 6 through a pipeline 20 and is provided with a three-way valve 29, the other end of the three-way valve 29 is connected to the coating and winding module 2, and the discharging port of the shearing and crushing instrument 6 is connected to the planetary stirring instrument 1, and the circulation and dispersion of the slurry or the discharging of the slurry to the coating and winding module 2 can be controlled by controlling the three-way valve.

[0037] The pipeline upstream of the three-way valve 29 is provided with a light scattering particle size sensor 16 and a non-invasive ultrasonic bubble detector 17, which are respectively used to monitor the particle size of the filler in the slurry and the generation of bubbles, so as to assist in judging the selection of the circulation or discharging of the slurry to the coating and winding module 2.

[0038] The top of the shell 3 of the planetary stirring 1 is provided with a motor 8, which is connected to the double planetary gear structure 10 inside the planetary stirring instrument 1 to provide power for the double planetary gear structure 10. The two output shafts of the double planetary gear structure 10 are respectively connected to the first rotating shaft 11 and the second rotating shaft 12 to drive them to rotate. The first rotating shaft 11 and the second rotating shaft 12 are both provided with stirring blades 14. In addition, the end of the second rotating shaft 12 is provided with a dispersion disc 15.

[0039] The planetary stirring instrument 1 is provided with an air pump 7 with an air suction pipe for vacuumizing the planetary stirring instrument and a balance port 9 for balancing the internal and external air pressure when the vacuum defoaming is completed.

[0040] The inner wall of the planetary stirring instrument 1 is also provided with a temperature sensor 13, which is a digital temperature sensor, connected to the control system and displays the temperature on the control terminal display screen.

[0041] The shearing and crushing instrument 6 is provided with a gas cylinder 30 and a homogenizing valve 31, which is driven by an external high-pressure gas source to push the piston of the gas cylinder to apply pressure to the valve core of the homogenizing valve 31, and the slurry realizes shearing and crushing of the agglomerates through high-pressure homogenization.

[0042] The continuous preparation of the build-up film is carried out by using the experimental equipment as in Example 1, and the build-up film slurry formula is as follows: according to CN120248562A, a flame-retardant build-up film with high copper peeling strength and low dielectric constant and loss and a preparation method thereof, 20 g of 328D-Py epoxy resin, 6.89 g of NC3000 (epoxy equivalent 276 g / eq), 7.56 g of biphenyl aralkyl resin SH5095 (hydroxyl equivalent: 212.7 g / eq), 1.0 g of DOPO-HQ, and 25.0 g of spherical silica (SC-2500SQ) are uniformly dispersed in 100 mL of butanone solvent to prepare a resin varnish. After being treated by a mixing and dispersing module, i.e., a double planetary stirring composite high-speed dispersion homogenizer, the SEM comparison chart of the spherical silica in the slurry before and after treatment is as follows: Figure 4The pictures show the distribution of the used silica raw material (A) and the distribution of the same material after being broken by planetary stirring and shearing in the slurry (B). It can be seen that the initial spherical silica raw material is severely agglomerated, and after corresponding mixing and dispersion treatment, the agglomeration phenomenon is improved, and the distribution is more uniform. Figure 5 The pictures show the slurry picture of the build-up film slurry without vacuum degassing and the corresponding coating effect picture. It can be seen that the high viscosity slurry is easy to form bubbles in the process of mixing and dispersion, and if the bubbles are not eliminated, it will affect the film forming quality. After the vacuum degassing unit in Example 1 is degassed and the non-invasive ultrasonic bubble detector is checked, the actual coating effect picture is as shown in Figure 6 The pictures show the distribution of the used silica raw material (A) and the distribution of the same material after being broken by planetary stirring and shearing in the slurry (B). It can be seen that the initial spherical silica raw material is severely agglomerated, and after corresponding mixing and dispersion treatment, the agglomeration phenomenon is improved, and the distribution is more uniform. Figure 7 The pictures show the distribution of the used silica raw material (A) and the distribution of the same material after being broken by planetary stirring and shearing in the slurry (B). It can be seen that the initial spherical silica raw material is severely agglomerated, and after corresponding mixing and dispersion treatment, the agglomeration phenomenon is improved, and the distribution is more uniform.

[0043] In summary, the mixing and dispersion and coating and winding continuous equipment for build-up film slurry provided by the present application combines the mixing and dispersion module and the coating and winding module to realize the full-process continuous production of uniform mixing-coating film-drying and winding, avoids the multiple transfer and intermittent operation in the traditional process, and improves the film forming quality, production efficiency and batch consistency. The mixing and dispersion module integrates planetary stirring, shearing and vacuum degassing. The combination design of planetary stirring and shearing realizes homogeneous dispersion at macro and micro levels, and significantly reduces particle agglomeration. Vacuum degassing realizes internal exhaust of the slurry, reduces the defect rate and improves the film surface quality. In addition, light scattering particle size sensors and non-invasive ultrasonic bubble detectors are arranged in the conveying pipeline between the mixing and dispersion module and the coating and winding module, which can accurately judge the slurry condition and realize process controllability. The narrow slit precision coating ensures the uniformity of the coating thickness, and compared with the doctor blade coating, it better meets the high requirements of build-up film preparation. The present application effectively solves the problems existing in the mixing preparation and coating film forming of high viscosity build-up film slurry, significantly improves the stability, uniformity and production efficiency of film material preparation. At the same time, the equipment structure of the present application is flexible, and can be applied to the preparation of high-performance IC packaging build-up film materials, and has good industrial application prospect.

[0044] It should be noted that the above embodiments are only for illustrating the technical concept and characteristics of the present application, and are only used to illustrate the preferred implementation of the present application, and cannot be understood as a limitation on the protection scope of the present application. Any modification or equivalent replacement of the technical scheme of the present application without departing from the scope of the technical scheme of the present application should be covered in the protection scope of the present application.

Claims

1. A continuous mixing, dispersing, coating, and winding device for laminated film slurry, characterized in that, The equipment includes a mixing and dispersing module and a coating and winding module. The mixing and dispersing module and the coating and winding module are connected to pipelines via pumps. A light scattering particle size sensor and a non-invasive ultrasonic bubble detector are installed in the pipelines. After the thickening film slurry undergoes macroscopic and microscopic dual-level dispersion and degassing in the mixing and dispersing module, the slurry quality is monitored in real time by the light scattering particle size sensor and the non-invasive ultrasonic bubble detector. The slurry then enters the coating and winding module, where it is precisely coated into a film through a narrow slit and wound up, thus realizing the continuous preparation of the thickening film.

2. The continuous mixing, dispersing, coating, and winding equipment for laminated film slurry according to claim 1, characterized in that, The mixing and dispersing module includes a planetary stirring unit, a shearing and crushing unit, and a vacuum degassing unit. The planetary stirring unit, shearing and crushing unit, and vacuum degassing unit can be integrated into the same equipment or set up as several independent devices connected by pipelines to achieve cyclic mixing and dispersion of the slurry from both macroscopic and microscopic levels.

3. The continuous mixing, dispersing, coating, and winding equipment for laminated film slurry according to claim 2, characterized in that, The planetary mixing unit adopts single planetary mixing or double planetary mixing, which is used to mix the slurry in multiple directions under the combined motion of rotation and revolution; the blades in the planetary mixer adopt one or more of the following: paddle blades, frame blades, kneading blades, finger blades, dispersing discs, and wall-mounted blades.

4. The continuous mixing, dispersing, coating, and winding equipment for laminated film slurry according to claim 2, characterized in that, The shearing and crushing unit adopts one or more of the following: high-speed disperser, bead mill, ultrasonic crusher, and high-pressure homogenizer.

5. The continuous mixing, dispersing, coating, and winding equipment for laminated film slurry according to claim 2, characterized in that, The vacuum pump used in the vacuum degassing unit is one or more of the following: rotary vane pump, screw pump, and Roots pump.

6. The continuous mixing, dispersing, coating, and winding equipment for laminated film slurry according to claim 1, characterized in that, The coating and winding module includes an unwinding device, a coating device, a drying device, a protective film laminating device, and a winding device. The unwinding device holds the base film of the layering film, with one end of the base film placed on a belt. The base film is controlled by a belt conveyor system for transmission. It is coated by the coating device, dried by the drying device, and laminated with the protective film by the protective film laminating device before entering the winding device for winding, thus forming continuous production.

7. The continuous mixing, dispersing, coating, and winding equipment for laminated film slurry according to claim 6, characterized in that, The coating device employs a slit-type precision coating apparatus, including a doctor blade structure with adjustable slit width and a closed-loop flow control system, which together achieve precise control of the coating thickness.

8. The continuous mixing, dispersing, coating, and winding equipment for laminated film slurry according to claim 6, characterized in that, The drying device includes multiple temperature-controlled heating zones and an airflow guiding system, which are used to adjust the drying rate in stages to prevent defects on the coating surface.

9. The continuous mixing, dispersing, coating, and winding equipment for laminated film slurry according to claim 6, characterized in that, The winding device includes a constant tension control unit and an automatic correction mechanism to ensure the flatness and edge alignment accuracy of the film material during the winding process.

10. The continuous mixing, dispersing, coating, and winding equipment for laminated film slurry according to claim 1, characterized in that, Online flow sensors and pressure regulating valves are installed on the conveying pipeline from the mixing and dispersing module to the coating and winding module to achieve real-time monitoring and feedback control of the slurry conveying rate and pressure.

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