Automatic dismantling equipment for thermal field of czochralski method monocrystalline silicon furnace

Abstract

The invention relates to the technical field of monocrystalline silicon furnaces, and discloses a czochralski method monocrystalline silicon furnace thermal field automatic dismantling device which comprises a base table, two half furnace bodies are slidably connected to the upper portion of the base table, a complete furnace body can be formed when the two half furnace bodies are combined, a heat preservation layer and a heating layer are sequentially arranged in each half furnace body, and an operation shaft is arranged above the base table. A detachable crucible furnace is installed above the operation shaft, fastening assemblies capable of enhancing the stability of the two half furnace bodies when the two half furnace bodies are combined are arranged on the outer sides of the two half furnace bodies, a dragging assembly for lifting the crucible furnace upwards is arranged above the base table, and through the dragging assembly, after the half furnace bodies, the heat preservation layer and the heating layer are separated and fixed, the crucible furnace descends along the outer wall of the crucible furnace. When the crucible furnace is dismounted, lifting force is applied from the bottom of the crucible furnace, the crucible furnace is lifted upwards, dismounting treatment of the crucible furnace is achieved, automatic operation of dismounting of the crucible furnace is achieved, and damage to the crucible furnace and other parts in the dismounting process is reduced.

Description

TECHNICAL FIELD

[0001] The application belongs to the technical field of single crystal silicon furnace, and particularly relates to a Czochralski method single crystal silicon furnace thermal field automatic dismantling equipment. BACKGROUND

[0002] The Czochralski method single crystal silicon furnace thermal field automatic dismantling equipment is a device integrating industrial automation technology, high-temperature-resistant materials and precise mechanical structures, and is used for automatically identifying, grabbing, carrying and dismantling a graphite heat preservation layer, a heater and a quartz crucible assembly in a thermal field of a single crystal silicon furnace in a high-temperature environment, so as to shorten a cooling waiting time, improve equipment utilization and reduce manual operation risks.

[0003] In the process of producing a single crystal silicon round crystal by the Czochralski method, the furnace body and the thermal field in the furnace need to be dismantled and cleaned and maintained after each crystal pulling is completed. Since the crucible furnace is usually tightly wrapped by an outer heating assembly (such as a graphite heater and a heat preservation sleeve), a traditional external grabbing tool cannot directly contact the outer wall of the crucible furnace, and therefore an internal support clamp is used to take out the crucible. The clamp realizes grabbing by applying an expansion force to the inside of the crucible. However, if the pressure control is improper when the clamp expands, the crucible may be deformed, which affects the subsequent use performance or causes the crucible to be scrapped.

[0004] Therefore, the application provides the Czochralski method single crystal silicon furnace thermal field automatic dismantling equipment. SUMMARY

[0005] In order to make up for the deficiencies of the prior art: solve at least one technical problem raised in the background art.

[0006] The technical scheme adopted by the application to solve the technical problems is that the Czochralski method single crystal silicon furnace thermal field automatic dismantling equipment comprises a base table, two half furnace bodies are slidably connected above the base table, the two half furnace bodies can form a complete furnace body when combined, a heat preservation layer and a heating layer are sequentially arranged in the inside of each half furnace body, an operating shaft is arranged above the base table, a detachable crucible furnace is mounted above the operating shaft, a fastening assembly is arranged on the outside of the two half furnace bodies to enhance the stability of the two half furnace bodies when combined, a double pulling assembly is further arranged above the base table to separate the two half furnace bodies from each other, a locking assembly is arranged on the two sides of the top of the base table to position the two separated half furnace bodies, and a pulling assembly is arranged above the base table to lift and take the crucible furnace upward.

[0007] Preferably, the double pulling assembly comprises a moving frame arranged above the base table, a telescopic rod one is fixedly connected to the bottom of the moving frame in a symmetrical manner, a triangular block is fixedly connected to the bottom end of the telescopic rod one, and a connecting frame rod is fixedly connected to the outer wall of the half furnace body.

[0008] Preferably, the fastening assembly comprises two outer connecting plates, the outer connecting plates are fixedly connected to the outer walls of one of the half furnace bodies respectively, the outer walls of the other half furnace body are fixedly connected with cross frames, the inner walls of the outer connecting plates are rotatably connected with rotating shafts, one end of the rotating shafts is fixedly connected with top blocks, the outer sides of the top blocks are fixedly connected with hinge seats one symmetrically, the inner walls of the hinge seats one are hingedly connected with hinge rods, the inner walls of the cross frames are provided with notches two, and the hinge rods and the side surfaces of the cross frames are fixedly connected with torsion springs one.

[0009] Preferably, the inner walls of the cross frames are provided with notches one, the notches one and the notches two are perpendicular, the inner wall length of the notches one is greater than the maximum distance between the two hinge rods, the outer walls of the cross frames are fixedly connected with limiting rods symmetrically, the outer walls of the limiting rods are attached to the outer sides of the hinge rods, and one side of the rotating shafts is provided with a gear assembly for driving the rotating shafts to rotate.

[0010] Preferably, the gear assembly comprises two gears, the gears are fixedly connected to one end of the two rotating shafts, the bottoms of the two triangular blocks are fixedly connected with rack plates one, the teeth of the rack plates one can be engaged with the teeth of the gears, and the number of the teeth of the rack plates one is one fourth of the number of the teeth of the gears.

[0011] Preferably, the locking assembly comprises a plurality of trapezoidal blocks, the trapezoidal blocks are fixedly connected to one side of the outer connecting plates and the cross frames respectively, the top of the base table is fixedly connected with fixed sliding seats symmetrically, the inner walls of the fixed sliding seats are slidably connected with inner sliding blocks, the upper portions of the inner sliding blocks are fixedly connected with moving blocks, and the inner sliding blocks and the inner wall surfaces of the fixed sliding seats are fixedly connected with springs one.

[0012] Preferably, the outer walls of the half furnace bodies are fixedly connected with springs two, and one end of the springs two away from the half furnace bodies is fixedly connected to one side of the fixed sliding seat.

[0013] Preferably, the upper portions of the two moving blocks are fixedly connected with rack plates two, the teeth of the rack plates two can be engaged with the teeth of the gears, and the number of the teeth of the rack plates two is one fourth of the number of the teeth of the gears.

[0014] Preferably, the pulling assembly comprises a plurality of telescopic rods two, the telescopic rods two are fixedly connected to the bottoms of the moving frames, the bottoms of the telescopic rods two are fixedly connected with fixed parts, the side surfaces of the fixed parts are fixedly connected with hinge seats two, the inner walls of the hinge seats two are hingedly connected with hook plates, and the hook plates and the side surfaces of the fixed parts are fixedly connected with torsion springs two.

[0015] Preferably, the shaft rods of the hinge seats two are fixedly connected with connecting blocks at both ends, the side walls of the fixed parts are fixedly connected with limiting parts, and the limiting parts are attached to the outer walls of the connecting blocks.

[0016] The beneficial effects of the present application are as follows: 1. The invention discloses a Czochralski monocrystalline silicon furnace thermal field automatic dismantling equipment, through the fastening assembly, when the two half furnace bodies are combined to form a complete furnace body, the connection strength between the two half furnace bodies is enhanced, the furnace body becomes a firm whole, the stability of the furnace body during the monocrystalline silicon growth process is ensured, and the separation of the two half furnace bodies due to external force or equipment vibration during the monocrystalline silicon growth process is effectively prevented.

[0017] 2. The invention discloses a Czochralski monocrystalline silicon furnace thermal field automatic dismantling equipment, through the double pulling assembly, after starting, the fastening assembly is first released from the fastening connection of the two half furnace bodies, the stable combination state between the two half furnace bodies is broken, conditions are created for subsequent separation operation, and when continuing to move, the two half furnace bodies are pulled apart and separated from each other, the crucible furnace originally wrapped inside is completely exposed, the fastening and separation of the two half furnace bodies can be quickly and accurately released, the preparation time of the thermal field dismantling is greatly shortened, and the automatic operation of the separation of the two half furnace bodies is realized.

[0018] 3. The invention discloses a Czochralski monocrystalline silicon furnace thermal field automatic dismantling equipment, through the locking assembly, after the two half furnace bodies are separated and moved to the specified position, the position of the two half furnace bodies is fixed, movement or shaking of the two half furnace bodies during subsequent operation is prevented, and it is ensured that the pulling assembly can stably and accurately exert force on the outside of the crucible furnace to smoothly perform the lifting operation of the crucible furnace.

[0019] 4. The invention discloses a Czochralski monocrystalline silicon furnace thermal field automatic dismantling equipment, through the pulling assembly, after the two half furnace bodies, the heat preservation layer and the heating layer are separated and fixed, the pulling assembly descends along the outer wall of the crucible furnace, exerts a lifting force on the bottom of the crucible furnace, lifts the crucible furnace upward, realizes the dismantling of the crucible furnace, realizes the automatic operation of the dismantling of the crucible furnace, and reduces the damage to the crucible furnace and other components during the dismantling process. BRIEF DESCRIPTION OF DRAWINGS

[0020] The invention will be further described below with reference to the drawings.

[0021] Figure 1 is a perspective view of the invention; Figure 2 is a structural schematic view of the main furnace body in the invention; Figure 3 is a structural schematic view of the connecting frame rod in the invention; Figure 4 is a structural schematic view of the rotating shaft in the invention; Figure 5 is a structural schematic view of the cross frame plate in the invention; Figure 6 is a structural schematic view of the rack plate one in the invention; Figure 7 is a structural schematic view of the moving block in the invention; Figure 8 is a schematic view of the structure at the crucible furnace in the present application; Figure 9 is a schematic view of the structure at the fixing member in the present application; Figure 10 is a schematic view of the structure at the hook plate in the present application.

[0022] In the figure: 1, base table; 2, half furnace body; 3, heat preservation layer; 4, heating layer; 5, crucible furnace; 6, operating shaft; 7, moving frame; 8, telescopic rod one; 9, triangular block; 10, connecting frame rod; 11, external connecting plate; 12, rotating shaft; 13, top block; 14, cross frame plate; 15, hinged seat one; 16, hinged rod; 17, notch one; 18, notch two; 19, torsional spring one; 20, limiting rod; 21, gear; 22, rack plate one; 23, trapezoidal block; 24, fixed sliding seat; 25, inner sliding block; 26, moving block; 27, spring one; 28, rack plate two; 29, spring two; 30, telescopic rod two; 31, fixing member; 32, hinged seat two; 33, hook plate; 34, connecting block; 35, limiting member; 36, torsional spring two. DETAILED DESCRIPTION

[0023] In order to make the technical means, creative features, purposes and effects realized by the present application easy to understand, the present application is further described below in combination with specific embodiments.

[0024] As shown in Figures 1 to 10 , the present application provides a technical solution: a Czochralski monocrystalline silicon furnace thermal field automatic dismounting device, comprising a base table 1, two half furnace bodies 2 are slidably connected above the base table 1, and the two half furnace bodies 2 can form a complete furnace body when combined, the inside of each half furnace body 2 is sequentially provided with a heat preservation layer 3 and a heating layer 4, an operating shaft 6 is arranged above the base table 1, a detachable crucible furnace 5 is installed above the operating shaft 6, a fastening assembly is arranged on the outside of the two half furnace bodies 2 to enhance the stability of the two half furnace bodies 2 when combined, a double pulling assembly is further arranged above the base table 1 to separate the two half furnace bodies 2 from each other, a locking assembly is arranged on the two sides of the top of the base table 1 to position the two separated half furnace bodies 2, and a pulling assembly is arranged above the base table 1 to lift the crucible furnace 5 upward.

[0025] Working: in the initial state, the two half furnace bodies 2 are in a stable combined state, and under the action of the fastening assembly, a firm integrated furnace body is formed, the internal heat preservation layer 3 and the heating layer 4 constitute a closed thermal field environment, the operation shaft 6 drives the detachable crucible furnace 5 to rotate and lift, the polycrystalline silicon material is loaded into the crucible furnace 5, and the operation shaft 6 is adjusted to the heating center position, then the furnace body is closed, the vacuumizing device starts to work, the air in the furnace is pumped away to form a vacuum environment, then the inert gas filling device fills in argon and other inert gases to protect the crystal pulling environment, the heating layer 4 is powered to heat up, the silicon material is melted into a liquid state, the heat preservation layer 3 maintains the temperature gradient, the operation shaft 6 is lowered to immerse the seed crystal into the silicon melt surface, the initial crystal nucleus is formed by rotation and pulling, the operation shaft 6 is pulled at a constant speed, while the heating layer 4 dynamically adjusts the power to maintain the temperature stability of the melt-crystal interface, realizing the equal diameter growth of the crystal bar, after the crystal bar is grown, the operation shaft 6 stops pulling, the heating layer 4 is powered off, and the furnace is naturally cooled to a safe temperature; After the single crystal boiler is used for many times, the thermal field part needs to be disassembled; the double pulling assembly is started, the double pulling assembly first releases the fastening connection of the two half furnace bodies 2 by the fastening assembly, to create conditions for the separation of the two half furnace bodies 2, and then the double pulling assembly continues to move to pull apart and separate the two half furnace bodies 2, and the heat preservation layer 3 and the heating layer 4 are separated together with the half furnace body 2, so that the crucible furnace 5 is completely exposed outside; after the half furnace bodies 2 are separated and moved to the designated position, the locking assembly fixes the positions of the two half furnace bodies 2 after moving, to ensure that the subsequent pulling assembly can stably act on the outside of the crucible furnace 5; at this time, the half furnace body 2, the heat preservation layer 3 and the heating layer 4 no longer tightly wrap the crucible furnace 5, and the pulling assembly can descend along the outer wall of the crucible furnace 5 to apply a lifting force from the bottom of the crucible furnace 5 to lift the crucible furnace 5 upward for disassembly and processing; and the half furnace body 2, the heat preservation layer 3 and the heating layer 4 can also be disassembled after being separated from each other, so as to maintain, maintain or replace each part; In the above embodiment, by the fastening assembly, the connection strength between the two half furnace bodies 2 is enhanced when the two half furnace bodies 2 are combined to form a complete furnace body, so that the furnace body becomes a firm whole, the stability of the furnace body during the single crystal silicon growth process is ensured, and the separation of the half furnace bodies caused by external force or equipment vibration during the single crystal silicon growth process is effectively prevented; by the double-pulling assembly, after being started, the fastening assembly is first released from the fastening connection of the two half furnace bodies 2, the stable combination state between the two half furnace bodies 2 is broken, conditions for subsequent separation operation are created, and when the two half furnace bodies 2 are continuously moved, the two half furnace bodies 2 are pulled apart from each other to expose the crucible furnace 5 originally wrapped inside, so that the fastening and separation of the half furnace bodies can be quickly and accurately released, the preparation time for the hot field removal is greatly shortened, and the automatic operation of the separation of the half furnace bodies 2 is realized; by the locking assembly, after the two half furnace bodies 2 are separated and moved to the specified position, the position of the half furnace bodies 2 is fixed to prevent movement or shaking of the half furnace bodies 2 during subsequent operation, so that the pulling assembly can stably and accurately apply force to the outside of the crucible furnace 5 to smoothly perform the lifting operation of the crucible furnace 5; by the pulling assembly, after the half furnace body 2, the heat preservation layer 3 and the heating layer 4 are separated and fixed, the pulling assembly is lowered along the outer wall of the crucible furnace 5 to apply a lifting force to the bottom of the crucible furnace 5 to lift the crucible furnace 5 upward, so that the removal of the crucible furnace 5 is realized, the automatic operation of the removal of the crucible furnace 5 is realized, and the damage to the crucible furnace 5 and other components during the removal process is reduced.

[0026] As shown in Figures 2 to 6 The double-pulling assembly includes a moving frame 7 arranged above the base table 1, the bottom of the moving frame 7 is fixedly connected with two telescopic rods 8, the bottom ends of the telescopic rods 8 are fixedly connected with two triangular blocks 9, and the outer walls of the two half furnace bodies 2 are fixedly connected with two connecting frame rods 10.

[0027] When the hot field of the furnace body needs to be removed, the moving frame 7 is first moved above the furnace body, and then the telescopic rods 8 are controlled to be elongated to drive the triangular blocks 9 to descend; during the descent of the two triangular blocks 9, the fastening assembly is first released from the fastening connection of the two half furnace bodies 2; then, the triangular blocks 9 continue to descend, and the inclined surfaces of the triangular blocks 9 press the connecting frame rods 10; because the triangular blocks 9 continuously descend and constantly press the outer walls of the connecting frame rods 10, the two half furnace bodies 2 are pulled apart to each other to realize mutual separation; at this time, the heat preservation layer 3 and the heating layer 4 are separated together with the half furnace body 2 to facilitate the subsequent removal of the crucible furnace 5 by the pulling assembly.

[0028] As shown in Figures 3 to 4As shown, the fastening assembly comprises two outer plates 11, which are respectively fixedly connected to the outer wall of one of the two half furnace bodies 2, the outer wall of the other half furnace body 2 is fixedly connected with a cross-shaped frame plate 14, the inner wall of the outer plate 11 is rotatably connected with a rotating shaft 12, one end of the rotating shaft 12 is fixedly connected with a top block 13, the outer side of the top block 13 is fixedly connected with a hinged seat one 15, the inner wall of the hinged seat one 15 is hingedly connected with a hinged rod 16, the inner wall of the cross-shaped frame plate 14 is provided with a notch two 18, and the hinged rod 16 and the side surface of the cross-shaped frame plate 14 are fixedly connected with a torsion spring one 19.

[0029] When the two half furnace bodies 2 are close to each other, the outer plate 11 and the cross-shaped frame plate 14 are also close to each other, at this time, the rotating shaft 12 drives the top block 13 to insert into the inner wall of the notch two 18; because the length of the inner wall of the notch two 18 is less than the maximum distance between the two hinged rods 16, when the two hinged rods 16 enter the inner wall of the notch two 18, they will be extruded by the inner wall surface of the notch two 18; this extrusion forces one end of the hinged rod 16 to hinge and rotate at the hinged seat one 15, in the process of rotation, the hinged rod 16 will extrude the torsion spring one 19, so that it deforms and stores elastic potential energy; the hinged rod 16 can smoothly pass through the inner wall of the notch two 18, when the two half furnace bodies 2 are completely combined, the hinged rod 16 moves to the side of the cross-shaped frame plate 14 and is no longer extruded by the inner wall of the notch two 18; under the action of the elastic force of the torsion spring one 19, the hinged rod 16 is pushed to reversely hinge and rotate to restore the original state; after the hinged rod 16 restores to the original state, one end of the hinged rod 16 tightly abuts against the side surface of the cross-shaped frame plate 14, and the abutting action forms a stable clamping force, so that the two half furnace bodies 2 can be closely and stably connected together when combined, effectively preventing separation caused by vibration, external force and other factors during use.

[0030] As shown in the figure, Figures 4 to 5 the inner wall of the cross-shaped frame plate 14 is provided with a notch one 17, the notch one 17 and the notch two 18 are perpendicular, the length of the inner wall of the notch one 17 is greater than the maximum distance between the two hinged rods 16, the outer wall of the cross-shaped frame plate 14 is fixedly connected with a limiting rod 20, the outer wall of the limiting rod 20 is in close contact with the outer side of the hinged rod 16, and one side of the rotating shaft 12 is provided with a gear assembly for driving the rotating shaft 12 to rotate.

[0031] When working: in the working process, the limiting rod 20 plays a key limiting role; when the hinged rod 16 recovers the deformation, one end of the hinged rod 16 abuts against the side of the cross plate 14, and the outer side will be in close contact with the outer wall of the limiting rod 20; since the two half furnace bodies 2 can only be separated by external force when they are combined, the limiting rod 20 can limit the outward hinging rotation of the hinged rod 16, effectively prevent the two half furnace bodies 2 from being separated due to external force, and ensure the stability of the structure; when the triangular block 9 descends, it will drive the rotating shaft 12 to rotate 90 degrees; after the rotating shaft 12 rotates, the top block 13 drives the hinged rod 16 to rotate 90 degrees, so that one end of the hinged rod 16 is aligned with the inner wall of the slot one 17, and no longer abuts against the side of the cross plate 14; since the length of the inner wall of the slot one 17 is greater than the maximum distance between the two hinged rods 16, the hinged rod 16 can be smoothly separated from the inner wall of the slot one 17, thereby creating conditions for the separation of the two half furnace bodies 2.

[0032] As shown in Figures 4 to 6 , the gear assembly includes two gears 21, and the gears 21 are fixedly connected to one end of the two rotating shafts 12, respectively. The bottom of each of the two triangular blocks 9 is fixedly connected with a rack plate one 22, the teeth of the rack plate one 22 can be engaged with the teeth of the gear 21, and the number of the teeth of the rack plate one 22 is one fourth of the number of the teeth of the gear 21.

[0033] When working: when the two half furnace bodies 2 need to be separated, the triangular block 9 begins to descend, and the rack plate one 22 fixedly connected to the bottom of the triangular block 9 descends synchronously during the descending process of the triangular block 9; at this time, the teeth of the rack plate one 22 gradually contact and engage with the teeth of the gear 21; since the number of the teeth of the rack plate one 22 is one fourth of the number of the teeth of the gear 21, the gear 21 will accurately rotate 90 degrees during the complete engagement of the rack plate one 22 and the gear 21, and the gear 21 drives the hinged rod 16 to rotate 90 degrees through the rotating shaft 12, so that one end of the hinged rod 16 after rotation no longer abuts against the side of the cross plate 14, but is aligned with the inner wall of the slot one 17 opened in the inner wall of the cross plate 14; since the length of the inner wall of the slot one 17 is greater than the maximum distance between the two hinged rods 16, the hinged rod 16 is smoothly separated from the slot one 17 to provide sufficient space, and then the triangular block 9 continues to descend, and the bottom thereof will apply a downward pressure to the two half furnace bodies 2 to promote the two half furnace bodies 2 to overcome the fastening force therebetween and separate from each other, thereby completing the entire separation action.

[0034] As shown in Figures 2 to 7 , the locking assembly includes a plurality of trapezoidal blocks 23, and the trapezoidal blocks 23 are fixedly connected to one side of the outer connecting plate 11 and the cross plate 14, respectively. The top of the base table 1 is fixedly connected with a fixed sliding seat 24 symmetrically, the inner wall of the fixed sliding seat 24 is slidingly connected with an inner sliding block 25, the upper portion of the inner sliding block 25 is fixedly connected with a moving block 26, and the inner sliding block 25 and the inner wall surface of the fixed sliding seat 24 are fixedly connected with a spring one 27.

[0035] When the two half furnace bodies 2 are separated, the trapezoidal block 23 is moved, and the trapezoidal block 23 gradually approaches the moving block 26. With the continuous separation of the two half furnace bodies 2, the inclined surface of the trapezoidal block 23 continuously presses the inclined surface of the moving block 26. The force is decomposed along the inclined surface direction, and a horizontal component force is generated, so that the moving block 26 drives the inner sliding block 25 to slide in the inner wall of the fixed sliding seat 24 to a specific direction. At the same time, the spring 27 is gradually compressed under the movement of the inner sliding block 25. Then, when the trapezoidal block 23 moves to the plane of the moving block 26, the moving block 26 restores to the original position under the action of the spring 27. However, the trapezoidal block 23 cannot move backward through the moving block 26 due to the plane of the trapezoidal block 23 and the plane of the moving block 26. Therefore, the separation position of the two half furnace bodies 2 is accurately locked.

[0036] As shown in Figures 6 to 7 , the outer wall of the half furnace body 2 is fixedly connected with the spring 29, and the end of the spring 29 away from the half furnace body 2 is fixedly connected with one side of the fixed sliding seat 24.

[0037] When the two half furnace bodies 2 are separated, the spring 29 is pressed and deformed. During the separation process, the trapezoidal block 23 moves to the plane of the moving block 26. After the triangular block 9 completes the separation of the two half furnace bodies 2, the subsequent movement of the triangular block 9 will not affect the separation posture of the two half furnace bodies 2 due to the locking effect of the locking assembly. The two half furnace bodies 2 can always maintain the separated state. This stable separation posture provides great convenience for the pulling assembly to carry out the removal work, and ensures that the removal process can be carried out smoothly. Moreover, after the removal work is completed, the two half furnace bodies 2 can still maintain the separated state. In this way, the workers can conveniently remove and maintain the thermal insulation layer 3 and the heating layer 4. When the two half furnace bodies 2 need to be combined again, the moving block 26 is pulled outward, so that the plane of the moving block 26 no longer hinders the reverse movement of the trapezoidal block 23. The two half furnace bodies 2 are combined together under the action of the spring 29.

[0038] As shown in Figure 7 , the upper part of each moving block 26 is fixedly connected with a rack plate 28, and the teeth of the rack plate 28 can engage with the teeth of the gear 21. The number of teeth of the rack plate 28 is one fourth of the number of teeth of the gear 21.

[0039] When the two half furnace bodies 2 are successfully separated, the telescopic rod two 30 is started to make it elongate downward, thereby driving the fixed part 31 to move downward; the fixed part 31 drives the hook plate 33 to move downward in the descending process; when the hook plate 33 contacts the outer wall of the crucible furnace 5, it is extruded by the outer wall of the crucible furnace 5; at this time, one end of the hook plate 33 is hinged to rotate around the shaft of the hinge seat two 32, and rotates inward to smoothly pass through the obstruction of the outer wall of the crucible furnace 5; after the top of the hook plate 33 is lowered below the crucible furnace 5, the hook plate 33 reversely hinged to rotate under the elastic force of the torsional spring two 36, and returns to the original state; at this time, the top of the hook plate 33 is tightly attached to the bottom of the crucible furnace 5; then, the telescopic rod two 30 is controlled to shrink upward, the hook plate 33 drags the bottom of the crucible furnace 5 to move upward in the ascending process, and finally realizes the automatic removal of the crucible furnace 5.

[0040] As shown in Figures 9 to 10 , the pulling assembly comprises a plurality of telescopic rods two 30, each of which is fixedly connected to the bottom of the moving frame 7, the bottom of each telescopic rod two 30 is fixedly connected with a fixed part 31, the side surface of the fixed part 31 is fixedly connected with a hinge seat two 32, the inner wall of the hinge seat two 32 is hingedly connected with a hook plate 33, and the hook plate 33 and the side surface of the fixed part 31 are fixedly connected with a torsional spring two 36.

[0041] When the two half furnace bodies 2 are successfully separated, the telescopic rod two 30 is started to make it elongate downward, thereby driving the fixed part 31 to move downward; the fixed part 31 drives the hook plate 33 to move downward in the descending process; when the hook plate 33 contacts the outer wall of the crucible furnace 5, it is extruded by the outer wall of the crucible furnace 5; at this time, one end of the hook plate 33 is hinged to rotate around the shaft of the hinge seat two 32, and rotates inward to smoothly pass through the obstruction of the outer wall of the crucible furnace 5; after the top of the hook plate 33 is lowered below the crucible furnace 5, the hook plate 33 reversely hinged to rotate under the elastic force of the torsional spring two 36, and returns to the original state; at this time, the top of the hook plate 33 is tightly attached to the bottom of the crucible furnace 5; then, the telescopic rod two 30 is controlled to shrink upward, the hook plate 33 drags the bottom of the crucible furnace 5 to move upward in the ascending process, and finally realizes the automatic removal of the crucible furnace 5.

[0042] As shown in Figures 9 to 10 , the shaft of the hinge seat two 32 is fixedly connected with a connecting block 34 at both ends, the side wall of the fixed part 31 is fixedly connected with a limiting part 35, and the limiting part 35 is attached to the outer wall of the connecting block 34.

[0043] When working: the limiting piece 35 plays an important limiting role, which can effectively restrict the rotating range of the connecting block 34; since the connecting block 34 and the hook plate 33 are connected through the same shaft, the limiting role indirectly limits the rotating direction of the hook plate 33; specifically, when the hook plate 33 contacts the outer wall of the crucible furnace 5 in the descending process, under the extrusion of the outer wall of the crucible furnace 5, the hook plate 33 can only be hinged inward, so as to smoothly pass through the outer wall of the crucible furnace 5; when the hook plate 33 returns to the original state and prepares to pull the bottom of the crucible furnace 5 to rise, under the strict limitation of the limiting piece 35, the hook plate 33 will not be hinged outward due to the influence of its own gravity, which guarantees the stability and reliability of the pulling process.

[0044] The basic principle, main features and advantages of the present application are shown and described above. It should be understood by those skilled in the art that the present application is not limited by the above-mentioned embodiments, and the above-mentioned embodiments and descriptions in the specification are only to illustrate the principle of the present application. Without departing from the spirit and scope of the present application, various changes and improvements can be made to the present application, and these changes and improvements all fall within the scope of the present application. The scope of protection of the present application is defined by the appended claims and their equivalents.

Claims

1. An automatic removal device for the hot zone of a Czochralski single crystal silicon furnace, comprising a base platform, characterized in that: Two half-furnace bodies are slidably connected above the base platform. When the two half-furnace bodies are combined, they form a complete furnace body. The interior of each half-furnace body is provided with an insulation layer and a heating layer in sequence. An operating shaft is provided above the base platform, and a detachable crucible furnace is installed above the operating shaft. Fastening components are provided on the outside of the two half-furnace bodies to enhance the stability when the two half-furnace bodies are combined. A double-pull component is also provided above the base platform to separate the two half-furnace bodies from each other. Locking components are provided on both sides above the base platform to position the two separated half-furnace bodies. A lifting component is provided above the base platform to lift the crucible furnace upwards.

2. The automatic removal equipment for the hot zone of a Czochralski single crystal silicon furnace according to claim 1, characterized in that: The double-pull assembly includes a movable frame, which is set above the base platform. A telescopic rod is symmetrically fixedly connected to the bottom of the movable frame, and a triangular block is fixedly connected to the bottom end of each telescopic rod. A connecting frame rod is fixedly connected to the outer wall of the half furnace body.

3. The automatic removal equipment for the hot zone of a Czochralski single crystal silicon furnace according to claim 2, characterized in that: The fastening assembly includes two outer plates, which are symmetrically fixed to the outer wall of one half of the furnace body. A cross plate is symmetrically fixed to the outer wall of the other half of the furnace body. A rotating shaft is rotatably connected to the inner wall of each outer plate. A top block is fixedly connected to one end of each rotating shaft. A hinge seat is symmetrically fixed to the outer side of each top block. A hinge rod is hinged to the inner wall of each hinge seat. A slot is opened on the inner wall of each cross plate. A torsion spring is fixedly connected between the hinge rod and the side of the cross plate.

4. The automatic removal equipment for the hot zone of a Czochralski single crystal silicon furnace according to claim 3, characterized in that: The inner wall of each cross plate has a slot 1, which is perpendicular to the slot 2. The inner wall length of slot 1 is greater than the maximum distance between the two hinge rods. The outer wall of each cross plate is symmetrically fixed with limit rods. The outer wall of the limit rod is in contact with the outer side of the hinge rod. A gear assembly that drives the shaft to rotate is provided on one side of the shaft.

5. The automatic removal device for the hot zone of a Czochralski single crystal silicon furnace according to claim 4, characterized in that: The gear assembly includes two gears, which are fixedly connected to one end of two rotating shafts respectively. The bottom of each of the two triangular blocks is fixedly connected to a rack plate, the teeth of which can mesh with the teeth of the gears, and the number of teeth of the rack plate is one-quarter of the number of teeth of the gears.

6. The automatic removal device for the hot zone of a Czochralski single crystal silicon furnace according to claim 5, characterized in that: The locking assembly includes multiple trapezoidal blocks, which are fixedly connected to one side of the outer plate and the cross plate respectively. Fixed slides are symmetrically fixedly connected to the top of the base platform. Inner sliders are slidably connected to the inner walls of the fixed slides. Moving blocks are fixedly connected above the inner sliders. A spring is fixedly connected between the inner sliders and the inner wall of the fixed slides.

7. The automatic removal device for the hot zone of a Czochralski single crystal silicon furnace according to claim 6, characterized in that: Spring 2 is fixedly connected to the outer wall of each half of the furnace body. The end of spring 2 away from the half of the furnace body is fixedly connected to the side of the fixed slide.

8. The automatic removal device for the hot zone of a Czochralski single crystal silicon furnace according to claim 7, characterized in that: Two of the moving blocks are fixedly connected to the top of a rack plate. The teeth of the rack plate can mesh with the teeth of the gear, and the number of teeth of the rack plate is one-quarter of the number of teeth of the gear.

9. The automatic removal equipment for the hot zone of a Czochralski single-crystal silicon furnace according to claim 8, characterized in that: The towing assembly includes multiple telescopic rods 2, each of which is fixedly connected to the bottom of the movable frame. Each of the two telescopic rods 2 has a fixing member fixedly connected to its bottom. Each fixing member has a hinge seat 2 fixedly connected to its side. Each hinge seat 2 has a hook plate hinged to its inner wall. A torsion spring 2 is fixedly connected between the hook plate and the side of the fixing member.

10. The automatic removal device for the hot zone of a Czochralski single-crystal silicon furnace according to claim 9, characterized in that: Both ends of the shaft of the second hinge seat are fixedly connected to connecting blocks, and the side walls of the fixing parts are fixedly connected to limiting parts, which fit against the outer wall of the connecting blocks.

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