Explosion-proof treatment device for waste gas of czochralski method monocrystalline silicon furnace
The modularly designed explosion-proof treatment device solves the problems of SiO2 blockage and CO explosion risk, achieves efficient dust filtration and low-temperature catalytic combustion, improves CO conversion rate and enhances the flexibility of the device.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-05-09
- Publication Date
- 2026-03-31
AI Technical Summary
In the Czochralski process for producing monocrystalline silicon, SiO2 particles can easily clog the burner, and CO concentrations within the explosive limits pose an explosion risk. Traditional waste gas treatment devices are inefficient and cannot be moved flexibly.
The explosion-proof treatment device adopts a modular design, including a cyclone separator, a metal mesh flame arrester, a water seal valve, a low-temperature catalytic combustion chamber, and a venturi mixer. Combined with an antistatic filter and a pulse backflushing nozzle, it achieves dust filtration, explosion-proof combustion, and portability.
It significantly improves dust removal efficiency, reduces explosion risk, increases CO conversion rate, reduces energy consumption, and the device is flexible and mobile, improving worker efficiency.
Smart Images
Figure CN224065948U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of single crystal furnace technology, specifically to an explosion-proof treatment device for exhaust gas from a Czochralski single crystal silicon furnace. Background Technology
[0002] With the rapid development of the photovoltaic and semiconductor industries, the demand for monocrystalline silicon as a core material has surged. During the Czochralski process for monocrystalline silicon production, the high-temperature reaction inside the furnace leaves behind a large amount of silicon oxide particles (SiO2) and incompletely burned carbon monoxide (CO) gas. When the monocrystalline silicon furnace is opened for maintenance, the accumulated SiO2 dust (concentration ≤10g / m³) inside the furnace... 3 Both ) and CO (concentration 5%-30% LEL) require rapid treatment;
[0003] The following problems exist in the existing technology for waste gas treatment:
[0004] 1. Dust clogging: SiO2 particles (particle size ≤ 5μm) easily clog the burner, reducing equipment lifespan;
[0005] 2. Explosion risk: CO concentration is at the explosion limit when it is between 12.5% and 74.2%, and traditional flame arresters cannot block high-speed flames;
[0006] 3. Low processing efficiency: Traditional catalytic combustion requires 500℃ to start, which consumes a lot of energy, and the CO conversion rate is only 95%;
[0007] 4. Fixed equipment: Traditional waste gas treatment devices need to be fixedly installed, which cannot meet the flexible operation requirements of multiple silicon furnaces in the workshop;
[0008] Therefore, there is a need to design an exhaust gas treatment device that integrates high-efficiency filtration, low-temperature catalysis, explosion-proof safety, and portability. Summary of the Invention
[0009] Therefore, this utility model was made in view of the above problems. Through modular integrated design, this utility model can realize the integrated functions of dust filtration, explosion-proof combustion, intelligent control and mobile deployment.
[0010] An explosion-proof treatment device for exhaust gas from a Czochralski single-crystal silicon furnace includes: a trolley, a control box, a cyclone separator, a fan, a venturi mixer, a combustion chamber, and connecting pipes. The control box is installed on one side of the top of the trolley. The inlet end of the cyclone separator is connected to the slag discharge port of the furnace body through the connecting pipe. The outlet end of the cyclone separator is connected to the fan, the venturi mixer, and the combustion chamber in sequence through pipes. The fan, the venturi mixer, and the combustion chamber are all installed on the trolley.
[0011] Preferably, the outer side of the cone of the cyclone separator is provided with heat sinks.
[0012] Preferably, the connecting pipe is a telescopic conduit, which is a three-section stainless steel sleeve structure, driven by an electric push rod and connected to the slag discharge port of the furnace body through a flange.
[0013] Preferably, it also includes a metal mesh flame arrester and a water seal valve, which are located on the pipeline between the fan and the Venturi mixer.
[0014] Preferably, the metal mesh flame arrester has a cylindrical structure, and the interior of the metal mesh flame arrester is provided with multiple layers of stainless steel woven mesh, and the water seal valve is provided with a U-shaped water seal groove.
[0015] Preferably, it also includes an antistatic filter element and a pulse backflush nozzle, which are located on the pipeline between the cyclone separator and the fan. The pulse backflush nozzle is located above the antistatic filter element and is connected to the compressed air pipeline. The antistatic filter element is used to filter micron-sized dust.
[0016] Preferably, the combustion chamber includes a liner, an igniter, a catalyst chamber, a flame stabilizer, an air cooling jacket, and a thermocouple sheath. The liner is located on the inner wall surface of the combustion chamber. The igniter is vertically inserted into the front end of the combustion chamber. The catalyst chamber is located at the rear end of the igniter. The flame stabilizer is fixedly installed in the middle of the combustion chamber. The air cooling jacket is located at the rear end of the flame stabilizer. The thermocouple sheath passes through the rear side wall of the combustion chamber.
[0017] Preferably, the flame stabilizer consists of six central swirling blades with an inclination angle of 45°.
[0018] Preferably, the liner is made of a high-temperature resistant material, the catalyst chamber contains a cordierite honeycomb catalyst, and the thermocouple sheath is made of stainless steel.
[0019] The beneficial effects of this utility model are:
[0020] 1. This utility model adopts a dual filtration method of cyclone separator plus antistatic filter element, which significantly improves the dust particle removal efficiency, effectively solves the problem of dust blockage, extends the service life of equipment, and reduces the maintenance frequency of equipment.
[0021] 2. This utility model adopts a multi-layer explosion-proof design by setting a metal mesh flame arrestor, a water seal valve, and an explosion-proof shell for the combustion chamber, which can achieve full-process backfire prevention and effectively control the explosion risk of the equipment.
[0022] 3. The low-temperature catalytic combustion technology of this utility model reduces the ignition temperature in the combustion chamber to 200℃, compared with the ignition temperature of traditional equipment which needs to reach 500℃, thus reducing energy consumption by 60%. Furthermore, by setting a Venturi mixer, the premixing uniformity of CO can reach 95%, thereby increasing the CO conversion rate to 99.9%, achieving highly efficient CO conversion.
[0023] 4. This utility model, by configuring an aluminum alloy frame and a trolley with universal wheels, and supporting single-person pushing, can quickly connect the device to the furnace body, thereby comprehensively improving the flexibility of the equipment and increasing the work efficiency of workers. Attached Figure Description
[0024] Figure 1 This is a schematic diagram of the overall structure of this utility model.
[0025] Figure 2 This is a partial cross-sectional view of the device of this utility model.
[0026] Figure 3 This is a schematic diagram of the combustion chamber in this utility model.
[0027] Figure 4 This is a schematic diagram of the antistatic filter element in this utility model.
[0028] Explanation of reference numerals in the attached figures:
[0029] 1. Furnace body; 2. Control box; 3. Cyclone separator; 4. Fan; 5. Metal mesh flame arrester; 6. Trolley; 7. Water seal valve; 8. Venturi mixer; 9. Combustion chamber; 91. Liner; 92. Igniter; 93. Catalyst chamber; 94. Flame stabilizer; 95. Air cooling jacket; 96. Thermocouple sheath; 10. Flange; 11. Pulse backflush nozzle; 12. Antistatic filter element; 13. Connecting pipe. Detailed Implementation
[0030] Preferred embodiments of this utility model will be described in detail with reference to the accompanying drawings, which will make it easy for those skilled in the art to implement these embodiments. However, this utility model can also be implemented in various different forms, and therefore this utility model is not limited to the embodiments described below. In addition, for the purpose of more clearly describing this utility model, parts not connected to the utility model will be omitted from the drawings.
[0031] like Figure 1 , 2 As shown, an explosion-proof treatment device for exhaust gas from a Czochralski single-crystal silicon furnace includes: furnace body 1, control box 2, cyclone separator 3, fan 4, metal mesh flame arrester 5, trolley 6, water seal valve 7, venturi mixer 8, combustion chamber 9, and connecting pipe 13.
[0032] The furnace body 1 is fixed to the workshop floor by a bracket and is used to produce monocrystalline silicon. A slag discharge port is provided on one side of the lower part of the furnace body 1, and the waste gas generated in the furnace body 1 is discharged from the slag discharge port.
[0033] The trolley 6 is made of an aluminum alloy frame and is equipped with four casters at the bottom, which allows it to move flexibly within the workshop of the single crystal silicon furnace exhaust gas treatment equipment and adapt to operation in narrow spaces.
[0034] The trolley 6 is used to install the control box 2, cyclone separator 3, fan 4, metal mesh flame arrester 5, water seal valve 7, venturi mixer 8, combustion chamber 9, and connecting pipe 13.
[0035] The control box 2 is located at the top of the trolley 6. As the intelligent hub of the device, the control box 2 is responsible for real-time monitoring, safety interlocking and coordinating the operation of various components to ensure the safety and efficiency of the exhaust gas treatment process.
[0036] A cyclone separator 3 is installed on one side of the control box 2 and at the top of the trolley 6. The cyclone separator 3 has an inverted funnel-shaped structure and is used to initially separate coarse dust particles in the exhaust gas. The inlet of the cyclone separator 3 is connected to the furnace body 1 through a pipe and a connecting pipe 13. The bottom of the cyclone separator 3 is used to collect the separated dust and impurities.
[0037] Preferably, as an implementation method, a polytetrafluoroethylene coating is installed on the inner side of the cone of the cyclone separator 3, which not only plays an anti-static role, but also plays a wear-resistant and corrosion-resistant role, thus extending the service life of the cyclone separator 3.
[0038] Preferably, as one possible implementation, heat sinks are installed on the outer side of the lower half of the cone of the cyclone separator 3 to prevent heat accumulation on the outside of the cone from affecting the equipment life or surrounding safety, and the heat sinks are added to assist in cooling.
[0039] The outlet of the cyclone separator 3 is connected to the fan 4 through a pipe. The fan 4 drives the exhaust gas from the furnace body 1 through the cyclone separator 3, the metal mesh flame arrester 5, the water seal valve 7, and the combustion chamber 9 in sequence by the negative pressure suction, so as to ensure the continuity of exhaust gas flow.
[0040] like Figure 4 As shown, preferably, as one possible implementation, a pulse backflush nozzle 11 and an antistatic filter element 12 can also be installed between the cyclone separator 3 and the fan 4. The pulse backflush nozzle 11 is located above the antistatic filter element 12 and is connected to an external compressed air pipeline. Its function is to remove the dust adhering to the surface of the antistatic filter element 12 by periodically spraying high-pressure airflow, maintain filtration efficiency and extend the life of the antistatic filter element 12. The dust is treated in two stages by the cyclone separator 3 and the antistatic filter element 12, which can efficiently separate the silica particles in the exhaust gas of the furnace body 1.
[0041] The other side of the fan 4 is connected to the metal mesh flame arrester 5 through a pipe. The metal mesh flame arrester 5 has a cylindrical structure and multiple layers of stainless steel woven mesh are installed inside. The function of the metal mesh flame arrester 5 is to divide the flame that may backfire into tiny channels through the multiple layers of stainless steel woven mesh, and to quickly cool down by utilizing the high thermal conductivity of the metal mesh to block the spread of the flame.
[0042] The water seal valve 7 is located in the pipeline between the metal mesh flame arrester 5 and the combustion chamber 9. The water seal valve 7 is equipped with a U-shaped water seal groove. Under normal operating conditions, exhaust gas is allowed to enter the combustion chamber 9 in the form of bubbles through the perforated pipe. When backfire or explosion occurs, the water layer of the water seal valve 7 can quickly absorb heat and block the spread of flames. Together with the metal mesh flame arrester 5, it forms a dual explosion-proof barrier of mechanical and liquid seal. The water seal valve 7 automatically replenishes water through the float valve to maintain the stability of the liquid level.
[0043] The Venturi mixer 8 is located at the air inlet front end of the combustion chamber 9. The function of the Venturi mixer 8 is to mix the exhaust gas and the combustion air at high speed according to the air-fuel ratio through the negative pressure effect generated by the gradually contracting-expanding structure, and then enhance the turbulence through the sudden change in flow velocity at the throat, so that CO and oxygen can fully contact each other and deliver the premixed and uniform combustible gas to the main body of the combustion chamber 9.
[0044] like Figure 3 As shown, the combustion chamber 9 includes: a liner 91, an igniter 92, a catalyst chamber 93, a flame stabilizer 94, an air cooling jacket 95, and a thermocouple sheath 96.
[0045] The liner 91 is located on the inner wall surface of the combustion chamber 9. The liner 91 is made of high temperature resistant material. The function of the liner 91 is to isolate the high temperature generated by combustion, prevent the metal shell from deforming, and reduce heat loss to maintain the catalytic reaction temperature.
[0046] The igniter 92 is vertically inserted into the front end of the combustion chamber 9. The function of the igniter 92 is to ignite the premixed gas through a high-frequency electric spark during the cold start stage, trigger the catalytic reaction, and automatically restart when the flameout occurs, ensuring continuous combustion.
[0047] The catalyst chamber 93 is located at the rear of the igniter 92. The catalyst chamber 93 contains a cordierite honeycomb catalyst. The cordierite honeycomb catalyst can reduce the activation energy of the CO oxidation reaction, reduce the ignition temperature from the traditional 500°C to 200°C, and improve the combustion efficiency.
[0048] The flame stabilizer 94 is fixedly installed in the middle of the combustion chamber 9. The flame stabilizer 94 is composed of six central swirling blades with an inclination angle of 45°. The flame stabilizer 94 creates a central low-pressure zone by generating a rotating airflow, attracting high-temperature flue gas to flow back to stabilize the flame root, prevent flameout or flashover, and optimize the combustion temperature distribution to avoid local overheating.
[0049] The air cooling jacket 95 is located at the rear end of the flame stabilizer 94. The air cooling jacket 95 can reduce the surface temperature of the combustion chamber 9 and prevent the peripheral equipment from being damaged by high temperature.
[0050] The thermocouple sheath 96 extends through the rear side wall of the combustion chamber 9. The thermocouple sheath 96 is made of stainless steel. A K-type thermocouple is installed inside the thermocouple sheath 96. The thermocouple sheath 96 can monitor the temperature inside the combustion chamber 9 in real time and transmit it to the control box 2. The thermocouple sheath 96 serves as a sensing component for temperature control.
[0051] The connecting pipe 13 is located at the rear end of the slag discharge port in the furnace body 1. The connecting pipe 13 is a telescopic conduit. The telescopic conduit adopts a three-section stainless steel sleeve structure and is driven by an electric push rod. It achieves quick docking and airtight connection with the furnace body 1 through the flange 10.
[0052] The working principle of this utility model:
[0053] First, the trolley 6 is manually moved to one side of the furnace body 1 and quickly connected to the slag discharge port of the furnace body 1 via the retractable connecting pipe 13 to ensure airtightness. Then, the control box 2 is started to monitor the temperature, exhaust gas flow rate, and pressure parameters in the combustion chamber 9 in real time. The blower 4 is started, and the high-temperature exhaust gas in the furnace body 1 is introduced into the cyclone separator 3 through negative pressure suction. The exhaust gas rotates at high speed in the cyclone separator 3, and coarse dust particles are separated by centrifugal force and collected in the ash storage bin at the bottom of the cyclone separator 3, initially reducing the dust concentration. Then, the exhaust gas is further cleaned of micron-sized dust by the antistatic filter element 12. The pulse backflush nozzle 11 periodically sprays high-pressure airflow to clean the antistatic filter element 12, and high-speed gas is blown in the reverse direction to remove the particles clogging the antistatic filter element 12. The exhaust gas then passes through the metal mesh flame arrester 5. The multi-layer stainless steel mesh in the water seal valve 7 and the metal mesh flame arrester 5 divide the flame, and the U-shaped water tank in the water seal valve 7 can block backfire, forming a double explosion-proof barrier of mechanical and liquid seal. Next, the pretreated exhaust gas enters the venturi mixer 8 and is mixed with the combustion air at high speed according to the air-fuel ratio to form a uniform premixed gas. The mixed gas then enters the combustion chamber 9 and is ignited by the igniter 92. Under the action of the cordierite honeycomb catalyst, the CO ignition temperature drops to 200℃, and CO is efficiently converted. The high-temperature flue gas after combustion is cooled by the air cooling jacket 95. The treated clean gas is discharged through the exhaust pipe. After the treatment is completed, the fan 4 and the combustion chamber 9 are turned off, the connection pipe 13 is disconnected from the furnace body 1, and the trolley 6 is pushed to the next single crystal silicon furnace body 1 to prepare for the next operation.
Claims
1. A device for explosion-proof treatment of exhaust gas from a Czochralski single crystal silicon furnace, characterized by comprising: It comprises a trolley (6), a control box (2), a cyclone separator (3), a fan (4), a venturi mixer (8) and a combustion chamber (9), a connecting pipe (13), the control box (2) is installed on one side of the top end of the trolley (6), the inlet end of the cyclone separator (3) is connected with the slag discharge port of the furnace body (1) through the connecting pipe (13), the outlet end of the cyclone separator (3) is connected with the fan (4), the venturi mixer (8) and the combustion chamber (9) in sequence through the pipeline, and the fan (4), the venturi mixer (8) and the combustion chamber (9) are all installed on the trolley (6). The outer side of the cone of the cyclone separator (3) is provided with heat dissipation fins.
2. The device for preventing explosion of exhaust gas of a Czochralski silicon furnace according to claim 1, wherein: The connecting pipe (13) is a telescopic guide pipe, which is a three-section stainless steel sleeve structure, is driven by an electric push rod and is connected with the slag discharge port of the furnace body (1) through a flange (10).
3. The device for preventing explosion of exhaust gas of a Czochralski silicon furnace according to claim 1, wherein: It also comprises a metal mesh flame arrester (5) and a water seal valve (7), which are located on the pipeline between the fan (4) and the venturi mixer (8).
4. The device according to claim 1, characterized in that: The metal mesh flame arrester (5) is in a cylindrical structure, and a plurality of layers of stainless steel woven meshes are arranged in the metal mesh flame arrester (5), and a U-shaped water seal groove is arranged in the water seal valve (7).
5. The device for preventing explosion of exhaust gas of a Czochralski silicon furnace according to claim 4, wherein: It also comprises an antistatic filter element (12) and a pulse back-blowing nozzle (11), which are located on the pipeline between the cyclone separator (3) and the fan (4), the pulse back-blowing nozzle (11) is located above the antistatic filter element (12), the pulse back-blowing nozzle (11) is connected with a compressed air pipeline, and the antistatic filter element (12) is used for filtering micron-sized dust.
6. The device according to claim 1, characterized in that: The combustion chamber (9) comprises an inner lining (91), an igniter (92), a catalyst chamber (93), a flame stabilizer (94), an air cooling jacket (95) and a thermocouple sleeve (96), the inner lining (91) is located on the inner wall surface of the combustion chamber (9), the igniter (92) is vertically inserted into the front end of the combustion chamber (9), the catalyst chamber (93) is located at the rear section of the igniter (92), the flame stabilizer (94) is fixedly installed in the middle part of the combustion chamber (9), the air cooling jacket (95) is located at the rear end of the flame stabilizer (94), and the thermocouple sleeve (96) penetrates through the rear end side wall of the combustion chamber (9).
7. The device according to claim 1, characterized in that: The flame stabilizer (94) is composed of six central swirl vanes, and the inclination angle of the central swirl vanes is 45°.
8. The device according to claim 7, characterized in that: The inner lining (91) is made of high-temperature resistant material, the catalyst chamber (93) is internally provided with cordierite honeycomb catalyst, and the thermocouple sleeve (96) is a stainless steel sheath.
9. The device according to claim 7, characterized in that: